JP2001150191A - Pressurizing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pressurizing device for fixed point working having highly accurate working, large pressurizing force and less driving energy. SOLUTION: This device comprises a 1st slider and a 2nd slider which are movably formed between a base plate and a supporting plate which are provided with a prescribed distance, a screw shaft which is rotatable forward and backward and provided on the supporting plate, a nut member which is screwed on the screw shaft provided on the 1st slider and a cylinder for driving the 2nd slider through a piston. A plunger provided on the 1st slider is formed so as to be enterable into the cylinder and so that the pressure of the supply fluid in the cylinder is increased by the entrance of the plunger and a body to be pressurized which is present between the 2nd slider and the base plate is pressurized.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressing device such as a press device used for sheet metal working, and more particularly to a fixed point working requiring accurate position control and a large pressing force. And a driving device having a small driving energy.

[0002]

2. Description of the Related Art Conventionally, as a means for driving a ram in contact with a work in a press working apparatus, a hydraulic cylinder has been widely used, and a hydraulic cylinder has been widely used.
The hydraulic cylinder driven press uses high-pressure hydraulic oil.However, in order to increase the pressing force, a hydraulic cylinder with a large diameter is required, and therefore a large amount of high-pressure hydraulic oil is required. And the required energy is also large.

Further, in a progressive feeding apparatus in which a plurality of the above press devices are arranged in tandem in the feeding direction of a long hoop material and processed, it is complicated to make the pressing force different in each press device. In addition, there is a problem that a large amount of hydraulic oil is used.

Further, in the above-described press apparatus driven by the hydraulic cylinder, when performing fixed-point processing, that is, processing in a state where the distance between the ram and the table is kept constant,
It is necessary to perform a process commonly referred to as "body punching".

[0005] FIG. 4 is an explanatory view showing a conventional boring process. In FIG. 4, reference numeral 61 denotes a table, and the ram 62 of the press device is moved up and down by, for example, a hydraulic cylinder with respect to the table 61 so as to press the work 63. In this case, in order to accurately machine the work 63 to the thickness dimension t, the lower end of the ram 62 is provided with a protrusion 6 corresponding to the thickness dimension t below the working surface 64.
5 is protruded.

When the ram 62 is operated downward by the above-described structure, predetermined work can be performed on the work 63 by the operation surface 64. However, when the protrusion 65 of the ram 62 comes into contact with the table 61, the work 63 is processed. The thickness t of the workpiece 63 can be ensured accurately, processing can be performed without dimensional variation, and processing accuracy for the work 63 can be improved.

[0007]

The machining mode shown in FIG. 4 has the following problems while the machining accuracy can be improved by fixed-point machining. That is, in addition to the ram 62 abutting against the work 63, the protrusion 65 of the ram 62 also collides against the table 61, so that a collision sound is generated. In the case of high-speed machining with a large number of operations, there is a problem that the noise becomes intense and the working environment is impaired.

[0008] On the other hand, fixed-point machining using an electric press has also been used conventionally, and is known to be advantageous in preventing the generation of noise due to boring by the hydraulic press or the like.

FIG. 5 is a vertical sectional view of a main part showing an example of a conventional electric press, which is described in, for example, Japanese Patent Application Laid-Open No. 6-218593. In FIG. 5, reference numeral 41 denotes a pressing force generating means, which is housed in a head frame 44 provided on a column 43 formed integrally with a table 42.

Reference numeral 45 denotes a cylindrical main body, which is provided in the head frame 44 and has a bearing 46 at the upper end. Reference numeral 47 denotes a screw shaft, the upper end of which is supported by a bearing portion 46, and is formed in a suspended state. Reference numeral 48 denotes a ram shaft, which is formed in a hollow cylindrical shape, and a nut body 49 screwed to the screw shaft 47 is fixed to an upper end thereof, and is provided in the cylindrical main body 45 so as to be vertically movable. . Reference numeral 50 denotes a pressing body, which is detachably provided at the lower end of the ram shaft 48. The screw shaft 47 and the nut body 49 are engaged with a ball screw.

Reference numeral 51 denotes a steady rest.
And a connecting plate 54 provided at a lower end of the ram shaft 48 and the steadying rod 53. I have. Reference numeral 55 denotes a drive motor,
The screw shaft 47 is formed in a rotatable manner via a pulley 56 and a belt 57 provided at the upper end of the screw shaft 47.

The initial position of the pressing body 50, the fixed position stop point, the rotation speed of the drive motor 55, the forward / reverse rotation instruction, and the like can be performed by measuring means, a central processing unit, and the like (not shown).

With the above configuration, the screw shaft 47 is driven by the drive motor 55 via the belt 57 and the pulley 56.
Is rotated, the ram shaft 48 with the nut body 49 fixed to the upper end thereof moves down, and the pressing body 50 comes into contact with the workpiece W at a preset position and pressing force as shown by a chain line, Processing is performed. After the machining, the ram shaft 48 and the pressing body 50 are raised by the reverse rotation of the drive motor 55,
Return to the initial position. By repeating the above operation, predetermined fixed-point processing can be sequentially performed on a plurality of workpieces W.

According to the above-described electric press, fixed point processing can be performed without generating noise. However, the conventional press has the following problems. That is, since the pressing force applied to the workpiece W is determined by the capacity of the drive motor 55, in the case of a large-capacity press device, the drive motor 55 also needs to have a large capacity. In a large-capacity and large-size press, the ram shaft 48
Also, since the movable body including the pressing body 50 is also large and heavy, the driving energy required for the repetitive vertical movement of the movable body is also large, which will spur the increase in size and capacity of the drive motor 55. There is a problem.

Further, it is difficult to accurately position the pressing body 50 at, for example, a predetermined position (height h) above the table 42, and an error occurs. That is, the pressing body 50
Is moved up and down by the rotation of the screw shaft 47 and the movement of the nut body 49 screwed with the screw shaft 47.
In order to shorten the machining tact, the rotational speed and / or the screw pitch of the screw shaft 47 must be increased, which causes a decrease in the positioning accuracy of the pressing body 50. On the other hand, if the number of rotations and / or the screw pitch of the screw shaft 47 is reduced to improve the positioning accuracy of the pressing body 50, the time required for the vertical movement of the pressing body 50 increases, and the processing tact also increases. There is a problem that processing efficiency is reduced.

On the other hand, the vertical movement of the pressing body 50 may be performed by a plurality of driving means. However, the structure is complicated and large, and the control of the plurality of driving means may not be performed smoothly. Has not been put to practical use.

An object of the present invention is to solve the above-mentioned problems in the prior art and to provide a pressurizing apparatus for fixed point processing which has high processing accuracy, large pressing force and low driving energy. It is assumed that.

[0018]

In order to solve the above-mentioned problems, according to the present invention, a substrate, a support plate provided in parallel with the substrate at a predetermined distance from the substrate, and a support plate provided between the substrate and the support plate are provided. A first member formed between the first member and the second member so as to be movable in a direction orthogonal to the substrate and the support plate and to be relatively movable in the aforementioned direction.
And a second slider, a screw shaft supported by the support plate so as to be orthogonal to the support plate and rotatable forward and backward, and the screw shaft provided on the first slider in a non-rotating state. And a fluid pressure cylinder for driving the second slider via a piston. The plunger provided on the first slider or the fluid pressure cylinder is connected to the fluid pressure cylinder. A pressurized member formed between the second slider and the substrate so as to be able to enter the cylinder and to increase the pressure of the supply fluid in the fluid pressure cylinder by the entry of the plunger; The technical means of pressurizing is adopted.

In the present invention, the first slider and the second slider can be formed so as to be movable in the vertical direction while the substrate and the support plate are parallel to the horizontal plane.

Further, in the above invention, a guide bar is provided between the substrate and the support plate so as to be orthogonal to the guide bar, and the first slider can be slidably engaged with the guide bar.

Further, in the above invention, a guide post is provided between the cassette substrate and the fixing plate provided in parallel with each other so as to be orthogonal to these, and the second slider can be slid on the guide post. The cassette can be formed by engagement, and the fixed plate can be provided with a fluid pressure cylinder.

Still further, in the above invention, the screw shaft and the nut member can be engaged with the ball screw.

Next, in the above invention, the screw shaft can be driven by a servomotor.

In this case, it is possible to provide a position detecting device for detecting the moving position of the second slider, and to control the servomotor by a signal from the position detecting device.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an explanatory diagram of a main part configuration showing an embodiment of the present invention. In FIG. 1, reference numeral 1 denotes a substrate, which is formed, for example, in the shape of a rectangular flat plate and is provided on a base 2, and, for example, columnar guide bars 3 are erected at four corners thereof. At the upper end of the guide bar 3, a support plate 4 formed, for example, in the shape of a rectangular flat plate, for example, a fastening member 5
Is fixed through.

Reference numeral 6 denotes a first slider, which is slidably engaged with the guide bar 3 so as to be movable in the axial direction of the guide bar 3. Reference numeral 7 denotes a screw shaft, which is provided on the support plate 4 via a bearing (not shown) so as to be capable of normal and reverse rotation. A pulley 8 is fixed to the upper end of the screw shaft 7.
Reference numeral 9 denotes a servo motor, which is provided on the support plate 4 via an attachment member 10 and is wound around a pulley 12 fixed to a motor shaft 11 and the pulley 8.
The screw shaft 7 is configured to be driven to rotate forward and reverse through the shaft 3.

Numeral 14 denotes a nut member, which is provided on the first slider 6 in a non-rotating state and is formed so as to screw with the screw shaft 7. In this case, the screw shaft 7 and the nut member 14 can be engaged with a ball screw. Therefore, the first slider 6 can be reciprocated up and down along the guide bar 3 by rotating the screw shaft 7 forward and reverse by the servo motor 9.

Reference numeral 15 denotes a cassette, which is constituted by a cassette substrate 16, a fixing plate 17, a second slider 18, and a guide post 19 as described later, and is detachably provided on the substrate 1. Reference numeral 20 denotes a hydraulic cylinder, which is formed as described later, is provided on the fixed plate 17, and drives the second slider 18. Reference numeral 21 denotes a plunger, which is provided on the first slider 6 and has a hydraulic cylinder 20.
It is formed so that it can enter. 22 is a pipe, 23 is a switching valve, and 24 is a check valve, and is provided between the hydraulic cylinder 20 and a hydraulic supply source (not shown). The check valve 24 stops the outflow of the hydraulic oil when the pressure of the hydraulic oil in the hydraulic cylinder 20 is equal to or less than a predetermined pressure, but has a role of a safety valve that causes the hydraulic oil to flow out when the pressure of the hydraulic oil exceeds the predetermined pressure. 25 is a linear scale, 26 is a detector, and constitutes a position detecting device for detecting the moving position of the second slider.

FIG. 2 is an enlarged sectional structural explanatory view of a main part showing the cassette 15 and the hydraulic cylinder 20 in FIG.
The same parts are indicated by the same reference numerals as in FIG. In FIG. 2, the guide posts 19 are erected at, for example, four corners of the cassette substrate 16, and a fixing plate 17 is provided at an upper end thereof via a fastening member 27. The second slider 18 is engaged with the guide post 19 via, for example, a linear ball bearing 28 so as to be vertically slidable.

Reference numeral 29 denotes a stripper support plate, which is slidably engaged with the guide post 19 and connected to the second slider 18 via a support rod 30 so as to be relatively movable.
And it is formed so as to be urged downward via the coil spring 31. Reference numeral 32 denotes a die, which is detachably provided on the cassette substrate 16. The second slider 18 is provided with a punch 33 paired with the die 32 and the stripper support plate 2.
9 is penetrated.

Reference numeral 34 denotes a piston, which has a hollow hole 3 having a bottom.
5, and the lower end thereof is connected to the second slider 18 via an operation amount adjusting member 36. The plunger 21 provided on the first slider 6 shown in FIG. 1 is formed so as to be able to enter the bottomed hollow hole 35 of the hydraulic cylinder 20 and the piston 34. In this case, the gap between the plunger 21 and the bottomed hollow hole 35 is, for example, about 1 mm, and is formed so that they do not contact each other. In addition, between the plunger 21 and the hydraulic cylinder 20, and between the piston 34 and the hydraulic cylinder 2
For example, an O-ring or the like is interposed between them so as to maintain liquid tightness.

Next, the operation of the above configuration will be described. First, in FIGS. 1 and 2, the upper portion of the hydraulic cylinder 20 is filled with hydraulic oil from a hydraulic supply source (not shown) via a pipe 22, and the supply of hydraulic oil from the switching valve 23 is shut off. Next, when the screw shaft 7 is rotated forward by the servomotor 9, the nut member 14 and the first slider 6 are lowered, and the plunger 21 enters the hydraulic cylinder 20 and further into the bottomed hollow hole 35 of the piston 34. .

When the plunger 21 enters, the piston 34 in the hydraulic cylinder 20 descends, and the second slider 18 constituting the cassette 15 descends. First, the stripper support plate 29 is moved to the workpiece (not shown). And the punch 33 and the die 32 can perform predetermined forming, such as punching, bending drawing, and compression, on the workpiece.

In this case, the position of the second slider 18 when the stripper support plate 29 abuts on the workpiece can be recognized in advance. Can be surely executed by the control operation described above, and fixed point processing can be performed. That is, the cross-sectional area A ₁ of the plunger 21 and the stroke S
₁ and the internal cross-sectional area of the hydraulic cylinder 20 (piston 34
Servo motor between the stroke S ₂ of the largest cross-sectional area) A ₂ and the piston 34, the relationship of _{A 1 S 1 = A 2 S} 2, by _{S 1 = (A 2 / A} 1) S 2 of The number of rotations to be assigned to 9 is determined.

By the plunger 21 entering the hydraulic cylinder 20, the pressure of the hydraulic oil in the hydraulic cylinder 20 can be increased by A ₂ / A ₁ times, and the pressure applied to the workpiece can be increased. Can be greatly increased. Incidentally, when the diameter of the plunger 21 is 40 mm and the inner diameter of the hydraulic cylinder 20 is 160 mm, the pressure of the hydraulic oil can be increased 16 times. Therefore, a large pressure can be obtained without using a high-pressure hydraulic supply source or a large-diameter hydraulic cylinder.

Next, a processing mode different from the above will be described. First, the operating position of the punch 33 is adjusted by the operating amount adjusting member 36, and then the operating oil from the hydraulic pressure source is supplied to the switching valve 2
When the air is supplied to the upper part of the hydraulic cylinder 20 via the pipe 3 and the pipe 22 (the plunger 21 is kept stationary), the piston 34 is driven and the second slider 18 is lowered. Stripper support plate 29
In a state in which the workpiece is in contact with the workpiece, the punch 33 and the die 32 can perform a predetermined forming process such as punching, bending drawing, and compression on the workpiece.

In the last stage of the drawing process, for example, when a larger driving force is required,
When the slider 18 reaches a predetermined position, the servo motor 9 is driven by a detection signal of the detector 26, for example.
The rotation of the screw shaft 7 causes the first slider 6 to move down, and the plunger 21 enters the bottomed hollow hole 35 of the hydraulic cylinder 20 and the piston 34, whereby the hydraulic cylinder 2
The pressure of the hydraulic oil within 0 is increased, and a large pressing force is applied.

After the machining is completed, the plunger 21 is raised by the reverse rotation of the servomotor 9 and the hydraulic oil is supplied below the hydraulic cylinder 20, so that the piston 34 is raised and the first slider 6 and the The second slider 18 also returns to its original position.

FIG. 3 is a longitudinal sectional view of a main part showing a first modification of the hydraulic cylinder 20 in FIG.
Are indicated by the same reference numerals. In FIG. 3, plunger 2
1, a flange 38 is integrally provided at an upper portion, and is formed so as to be able to enter the bottomed hollow hole 35 of the hydraulic cylinder 20 and the piston 34. Reference numeral 39 denotes a holding member, which is formed, for example, in a U-shape and is provided above the hydraulic cylinder 20 to hold the plunger 21 urged upward by the coil spring 40. The plunger 21 is provided such that the lower end thereof can be held slightly above the opening 22a for hydraulic oil of the hydraulic cylinder 20 (communicating with the pipe 22). Further, between the plunger 21 and the hydraulic cylinder 20, an O-ring or the like is interposed, for example, so as to maintain liquid tightness. An operating rod 37 is provided on the first slider 6.

When the operating rod 37 is lowered via the first slider 6 by driving the servo motor 9 shown in FIG. 1, the plunger 21 is lowered and the opening 2
2a is closed, and the hydraulic oil above the hydraulic cylinder 20 is closed. Therefore, the hydraulic cylinder 2 of the plunger 21
0, and further into the bottomed hollow hole 35 of the piston 34, the pressure of the hydraulic oil in the hydraulic cylinder 20 can be increased, and a large pressing force is applied to the piston 34. Because Therefore, the same operation as that in the above-described processing mode can be expected.

FIG. 6 is a vertical sectional view of a main part of a second modification of the hydraulic cylinder 20 in FIG.
Are indicated by the same reference numerals. 6, reference numeral 71 denotes a coil spring, which is interposed between a support member 72 provided at a lower end portion of the hydraulic cylinder 20 and the piston 34 to urge the piston 34 upward. The lower end of the piston 34 passes through the support member 72 and is connected to the second slider 18.

With the above configuration, first, the hydraulic cylinder 20
Supply hydraulic oil inside and keep it closed. Next, when the plunger 21 is lowered in the same manner as in FIG. 2, the plunger 21 enters the hydraulic cylinder 20 and further into the bottomed hollow hole 35 of the piston 34, so that the pressure of the hydraulic oil increases, The piston 34 lowers against the urging force of the coil spring 71, and lowers the second slider 18. Therefore, a predetermined pressure can be applied between the second slider 18 and the cassette substrate 16. After the pressurization is completed, when the plunger 21 is raised, the hydraulic oil is reduced in pressure, and the urging force of the coil spring 71 raises the piston 34 and the second slider 18 to return to the original position.

The manner in which the pressure of the hydraulic oil is increased by the plunger 21 entering the hydraulic cylinder 20 is the same as that described above. However, in the configuration shown in FIG. Thereafter, since it is used in a sealed state, only a small amount of replenishment is required every predetermined time, and the consumption of hydraulic oil is extremely small. Further, there is an advantage that a large-scale hydraulic supply source is not required.

FIGS. 7A and 7B are longitudinal sectional views of a main part showing a third modification of the hydraulic cylinder 20 in FIG.
Indicates an upper limit state and a lower limit state of the piston, respectively. FIG.
In the hydraulic cylinder 20, the pistons 73, 74
Are provided facing each other, and each piston rod 75,
The side 76 is formed so as to communicate with the bypass 77. The piston rods 75 and 76 are respectively connected to the first slider 6 and the second slider 18 shown in FIG.
Then, hydraulic oil is supplied into the hydraulic cylinder 20 and is kept in a sealed state. Reference numerals 78 and 79 denote seals, which are provided on the pistons 73 and 74, respectively. Also, a seal 80,
81 is a piston rod 75, 7
6 is provided in contact therewith.

With the above structure, when the piston rod 75 is lowered by the first slider 6 shown in FIG.
The piston 73 in the hydraulic cylinder 20 is moved by the piston 73.
Since the hydraulic oil between 3, 74 is pressurized to lower the piston 74 and the piston rod 76, the same pressurization as described above can be performed. In this case, the piston 74
Hydraulic oil on the bottom surface side moves to the upper surface side of the piston 73 via the bypass 77 due to the lowering of the piston 74, and therefore does not restrict the behavior of the pistons 73 and 74.

After the pressurization is completed, the piston rod 75
When the piston 73 is lifted, the pistons 73, 7
The hydraulic oil on the top side of the piston 73 moves from the bypass 77 to the bottom side of the piston 74, so that the piston 74 and the piston rod 76
Is raised smoothly.

As shown in FIG. 7, the piston rod 75,
Piston 73, piston 74 and piston rod 76
Let d ₁ , d ₂ , d ₃ , and d ₄ be the diameters of the pistons 73, respectively. The upper surface area of the piston 73 is a ₁ = (π / 4) (d ₂ ² −d
₁ ²⁾ bottom area a ₂ = (π / 4 of the piston 73) bottom surface area of d ₂ ² top area a ₃ = (π / 4 of the piston 74) d ₃ ² pistons _{74 a 4 = (π / 4} ) (d ₃ ² -d
₄ ² ), when a pressing force of P ₁ is applied to the piston rod 75, a pressing force of P ₂ is obtained on the piston rod 76, and this value is expressed as P ₂ = P ₁ (a ₃ / a ₂₎ ). That is, a pressing force of a ₃ / a ₂ times can be obtained.

[0048] In FIG 7, when the stroke of the piston 73 and 74 were each set to L _1, L _2, hydraulic oil when regarded as incompressible fluid, because it is _{a 2 L 1 = a 3 L} 2, L 1 =
L ₂ (a ₃ / a ₂ ) is obtained. In other words, in order to obtain the stroke L ₂ required for pressurization is required stroke required for the piston 73 and piston rod 75, FIG. 1
In this case, the number of rotations required for the servo motor 9 can be obtained.

On the other hand, in FIG. 7, a ₁ L ₁ = a ₄ L ₂
Therefore, considering the relationship of a ₂ L ₁ = a ₃ L ₂ , a ₄ = a ₁ (a ₃ / a ₂ ) and a ₁ = a ₂ (a ₄ / a ₃ ) are obtained. 73, 74 and piston rods 75, 76 for smoothly operating the pistons 73, 74
Can be determined.

In the embodiment of the invention described above, the so-called vertical type in which the substrate 1 and the support plate 4 are arranged in parallel with the horizontal plane and the guide bar 3 connecting them is provided in the vertical direction has been described. The present invention is also applicable to a so-called horizontal type in which the substrate 1 and the support plate 4 are provided in parallel with the vertical plane and the guide bar 3 is provided in the horizontal direction.

In addition to the single use of the pressurizing apparatus of the present invention, the pressurizing apparatus of the present invention is also applicable to, for example, a case where a plurality of units are arranged in tandem and, for example, a long workpiece is progressively fed. It is possible. In this case, the plurality of pressurizing devices may have different pressurizing forces. The pressing apparatus of the present invention is not limited to a sheet metal working for a sheet material, and also includes a process of assembling a plurality of parts, press fitting, caulking, etc. Can also be used for fastening.

[0052]

Since the present invention has the above-described configuration and operation, the following effects can be obtained. (1) A large pressurizing force can be obtained by a fluid pressure in which the pressurizing force on the workpiece or the pressurized body is increased to the reciprocal multiple of the cross-sectional area ratio between the plunger and the hydraulic cylinder. (2) Since the fluid pressure cylinder is reduced in size and the amount of hydraulic oil used is reduced, the driving energy can be significantly reduced. (3) Since the lower end stop position of the slider can be accurately controlled, fixed point processing can be performed, and processing precision can be improved. (4) There is no noise like the one driven only by fluid pressure,
A quiet working environment can be secured.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of a main part configuration showing an embodiment of the present invention.

FIG. 2 is an explanatory diagram showing an enlarged sectional configuration of a main part showing a cassette 15 and a hydraulic cylinder 20 in FIG.

FIG. 3 is a vertical sectional view of a main part showing a modification of the hydraulic cylinder 20 in FIG. 2;

FIG. 4 is an explanatory view showing a conventional body stamping process.

FIG. 5 is a longitudinal sectional view of a main part showing an example of a conventional electric press.

FIG. 6 is a vertical sectional view of a main part showing a second modification of the hydraulic cylinder 20 in FIG. 2;

FIGS. 7A and 7B are main part longitudinal sectional views showing a third modification of the hydraulic cylinder 20 in FIG. 2, and FIGS. 7A and 7B show an upper limit state and a lower limit state of the piston, respectively.

[Explanation of symbols]

 Reference Signs List 1 substrate 4 support plate 6 first slider 7 screw shaft 14 nut member 18 second slider 20 hydraulic cylinder

Claims (7)

[Claims] 1. A substrate, a support plate provided in parallel with the substrate at a predetermined distance, and between the substrate and the support plate, movably in a direction orthogonal to the substrate and the support plate and in the direction. A first slider and a second slider formed so as to be relatively movable with respect to each other; a screw shaft supported on the support plate so as to be orthogonal to the support plate and rotatable forward and backward;
A nut member provided on the first slider in a non-rotating state and screwed with the screw shaft; and a fluid pressure cylinder for driving the second slider via a piston, A slider or a plunger provided on the fluid pressure cylinder is formed so as to be able to enter the fluid pressure cylinder and that the pressure of the supply fluid in the fluid pressure cylinder is increased by the entry of the plunger;
A pressurizing device for pressurizing a pressurized body existing between the second slider and the substrate. 2. The method according to claim 1, wherein the substrate and the support plate are parallel to a horizontal plane.
2. The pressurizing device according to claim 1, wherein the slider and the second slider are formed so as to be movable in a vertical direction. 3. A guide bar is provided between a substrate and a support plate so as to be orthogonal to the guide bar, and a first slider is slidably engaged with the guide bar.
Or the pressurizing device according to 2. 4. A cassette is provided by interposing a guide post between a cassette substrate and a fixing plate provided in parallel with each other so as to be orthogonal thereto, and a second slider is slidably engaged with the guide post. The pressurizing device according to any one of claims 1 to 3, wherein a fluid pressure cylinder is provided on the fixed plate. 5. The pressurizing device according to claim 1, wherein the screw shaft and the nut member are engaged with a ball screw. 6. The pressurizing device according to claim 1, wherein the screw shaft is driven by a servomotor. 7. The pressurizing device according to claim 6, wherein a position detecting device for detecting a moving position of the second slider is provided, and a servo motor is controlled by a signal from the position detecting device. apparatus.