JP2001135004A - Chucking device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a chucking device which can surely chuck a deck or stamper without using a vacuum pump, magnet, etc. SOLUTION: The chucking device which is used to fix the disk or the stamper used for manufacture of the disk to an evaluation device is provided with a turntable 1 which carries the disk or the stamper and rotates, a fixing part 2 which is disposed on the turntable 1 and has a hole part 6, a hub part 2a and a boss part 2b having an elastic body ring 5, an external communicating path 30 which has the hole part 6 as its opening end and a vacuum solenoid valve 19 which is disposed on the external communicating path 30 and to which compressed air is supplied. the boss part 2b of the fixing part 2 fits into the hole part 6 to fix the disk 3 onto the turntable 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chucking device, and more particularly, to a disk serving as an information medium such as an optical disk, and a chucking device of a defect evaluation device for evaluating a defect of a stamper used for manufacturing the disk.

[0002]

2. Description of the Related Art For example, in a manufacturing process of a disk serving as an information medium such as an optical disk, a stamper used for manufacturing, a signal characteristic or a defect of the manufactured disk (dust attached to the stamper or the disk in the manufacturing process) is used. Etc.). The evaluation in this evaluation step is performed by a dedicated evaluation device. Such an evaluation device includes a turntable, on which a stamper or a disc is mounted and rotated. Then, the signal characteristics or defects of the stamper or the disk are evaluated using optical means. At this time, the stamper and the disc are chucked on the turntable by a chucking device so as not to come off from the turntable during rotation.

[0003] Existing chucking devices include, for example, Japanese Patent Application Laid-Open Nos. 5-135644 and 8-339578.
There is an invention described in Japanese Patent Publication No. Of these,
According to the invention described in Japanese Patent Application Publication No. 135564, a rubber sheet is fixed to a part of a surface (mounting surface) of the turntable on which a disk or the like is mounted, so that a gap between the mounted disk and the mounting surface is provided. A space is created in the space. In addition, the turntable is provided with a through hole connecting the mounting surface and the back surface, and a spiral rib is provided on the back surface, and the air in the space is discharged from the through hole and the rib to the back surface of the turntable by the rotation of the turntable. Like that. With such a configuration, a negative pressure is generated in the space, and the disk or the like is fixed to the mounting surface by being pressed at atmospheric pressure.

In Japanese Patent Application Laid-Open No. 8-339578, a concave portion is provided on the surface of a turntable, a vacuum pump is connected to an air passage connected to the concave portion, and a switching valve is provided in the air passage. It is described that an air flow path is opened by the switching valve, a concave pressure is made negative by operating a vacuum pump, and a stamper placed on the turntable is chucked on the turntable. Further, Japanese Patent Application Laid-Open No. 8-339578 discloses a magnet holding device that can be moved up and down below a turntable, and a magnet held here is moved up and down to a stamper placed on the turntable. It is described that the working magnetic force is strengthened or weakened. According to such a configuration, when the stamper is placed on the turntable, the stamper is chucked with a strong magnetic force, and when the stamper is removed, the magnetic force is weakened and the stamper can be easily removed from the turntable. Become like

[0005]

However, the above-described technique has the following problems. That is,
As described in Japanese Patent Application Laid-Open No. Hei 5-135644, when air is exhausted from the rib on the back surface of the turntable, this chucking is not sufficient immediately after the start of rotation.
In addition, it is conceivable that the disk comes off due to the generation of a starting torque by the start of the turntable.

Also, as described in Japanese Patent Application Laid-Open No. 8-339578, when a vacuum pump is used to create a negative pressure state to chuck a stamper, the vacuum pump does not operate normally due to a problem. Sometimes the stamper can be thrown from the turntable.

Further, in the configuration in which the stamper is chucked by a magnetic force, a magnet having a relatively strong magnetic force is used, so that the stamper may be magnetized even after being removed from the turntable. The magnetized stamper is attracted to a mold or a tool in a later process, which makes it difficult to perform the work in the later process. Further, when the stamper is magnetized, it is difficult to remove the stamper from the turntable even when the magnet is lowered and moved away from the turntable, and the stamper may be damaged when the stamper is removed. Moreover,
Periodic replacement is necessary because the magnetic force of the magnet changes over time, which makes maintenance of the evaluation device complicated.

The present invention has been made in view of the above points, and has as its object to provide a chucking device that can reliably chuck a disk or a stamper without using a vacuum pump or a magnet. It is assumed that.

[0009]

The above-mentioned problems can be solved by the following means. That is, the chucking device according to claim 1 is provided in an evaluation device that evaluates a disk or a stamper used for manufacturing the disk,
A chucking device used to fix a disk or a stamper to an evaluation device, comprising: a rotary table on which the disk or the stamper is mounted and rotated; a hole provided on the rotary table; A disk fixing means having a boss provided with a body ring, and fitting the boss to the hole to fix the disk on the rotary table;
It has an external communication passage having a hole as an opening end, and a vacuum solenoid valve provided on the external communication passage and supplied with compressed air.

With this configuration, the disk or the stamper can be chucked to the turntable by the action of the fixing portion and the pressure difference. For this reason, even if the chucking effect by one operation is insufficient, it is possible to prevent the disk or stamper from falling off the turntable by the other operation. Further, by using a vacuum solenoid valve to which compressed air is supplied, a pressure difference between the hole and the outside can be made with a relatively simple configuration.

The invention according to claim 2 is characterized in that the hole is formed such that a space is created between the boss and the bottom of the hole when the boss is fitted.

With this configuration, when the pressure of the hole becomes negative, the pressure difference between the inside and the outside of the hole is increased, and the attraction force of the fixed portion to the turntable can be further increased. .

According to a third aspect of the present invention, the hole has a groove on the inner peripheral surface for engaging with the elastic ring.

[0014] With this configuration, even when the suction of the fixing portion due to the pressure difference is insufficient, the elastic ring is prevented from being caught in the groove and the boss of the fixing portion is prevented from coming off the hole. Can be.

According to a fourth aspect of the present invention, there is further provided a pressure setting valve for setting the pressure of the compressed air supplied to the vacuum solenoid valve.

With this configuration, the suction force of the fixed portion due to the pressure difference can be adjusted as needed.

According to a fifth aspect of the present invention, a branch communication path is provided by branching an external communication path upstream of a vacuum solenoid valve to provide a branch communication path, and to switch between supply and stop of supply of compressed air to the branch communication path. And a branch communication passage pressure setting valve that can set the pressure of the compressed air supplied to the branch communication passage switching valve.

With this configuration, compressed air can be supplied from the branch communication path to the external communication path and the hole without passing through the vacuum solenoid valve.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments 1, 2, 3, and 4 of the present invention will be described below. (Embodiment 1) FIGS. 1 and 2 are views for explaining a chucking device according to Embodiment 1, wherein FIG. 1 is a top view of the chucking device, and FIG. 2 is an arrow in FIG. It is a longitudinal cross-sectional view which follows the line AA '. 1 and FIG. 2, FIG.
It is a drawing common to the first to fourth embodiments. The longitudinal sectional views shown below are all taken along the line AA 'in FIG.

The chucking device according to the first embodiment is provided in an evaluation device for evaluating a disk such as an optical disk or a stamper used for manufacturing the disk, and is used for fixing the disk or the stamper to the evaluation device. Things. In the first and second embodiments, the chucking device will be described by taking as an example a state where the disk is chucked by the chucking device.

The illustrated configuration has a turntable 1, which is a turntable on which a disk is mounted and rotated, a hole 6 provided in the turntable 1, a hub 2a, and an elastic ring 5. And a boss 2b.
b: a fixing portion 2 which is a disk fixing means for fixing the disk 3 on the turntable 1 by fitting into the hole 6;
And a vacuum solenoid valve 19 provided on an external communication path 30 composed of a communication path 15, an communication path 16, and a communication path 18 having an open end on the bottom surface. The chucking device further illustrated includes a shaft 7 to which the turntable 1 is attached, a base 10 having bearings 9a and 9b for attaching the shaft 7, and a rotary motor 12 to which the base 10 is attached to rotate. Have.

In the first embodiment, as is apparent from FIG. 1, the turntable 1 is formed in a disk shape, and the rotating shaft, that is, the shaft 7 is provided so as to pass through the center of the disk. The hole 6 is provided on the shaft 7 so as to coincide with the rotation axis of the turntable 1. The hub 2a also has a disc shape, and the boss 2b is
It is configured as a cylindrical member that is located at the center of a and protrudes perpendicularly to the surface of the hub portion 2a. Elastic ring 5
Is fitted on the outer peripheral surface of the cylindrical portion, and the boss 2
b is hardly removed from the hole 6. Such a fixed part 2
Are fixed together with the turntable 1 with the disk 3 interposed therebetween.

The outer rings of the bearings 9a and 9b are formed by the upper bearing fixing ring 8 and the lower bearing fixing ring 11, and the inner rings are formed by the upper stepped portion 70 of the shaft 7 and the fixing ring 13
Are fixed to the base 10 vertically. Shaft 7
The magnetic fluid 4 is sealed between the outer peripheral portion of the upper ring and the upper bearing fixing ring 8 to seal between them. The turntable 1 is rotatably attached to the base 10 by connecting the lower end of the shaft 7 to the rotating shaft 12 a of the rotating motor 12 via the coupling 14.

In such a configuration, the shaft 7 is provided with the communication path 15, and the base 10 is provided with the communication path 16 communicating with the space between the bearings 9 a and 9 b.
6 is connected to a communication path 18 such as an air hose via a supply port 17. Therefore, when the turntable 1 is attached to the base 10 via the shaft 7, the communication path 1
5, the communication path 16 and the communication path 18 are connected to form an external communication path 30 having the hole 6 as an opening end. Further, in the first embodiment, a vacuum solenoid valve 19 is provided on the communication passage 18 and compressed air is supplied to the vacuum solenoid valve 19 from the supply side port 19a. , The pressure inside the external communication passage 30 can be reduced to a negative pressure.

The configuration described above operates as follows. That is, the fixed portion 2 is removed from the turntable 1, and the disc 3 is placed on the turntable such that the inner peripheral surface thereof and the mating projection 1b of the turntable 1 coincide. Then, the fixing portion 2 is inserted so that the boss portion 2b fits into the hole portion 6. At this time, the length of the portion of the boss 2b inserted into the hole 6 is shorter than the depth of the hole 6, and a space 6a is created between the bottom surface of the boss 2b and the bottom of the hole 6. Like that.

Subsequently, when the vacuum solenoid valve 19 is operated to reduce the pressure in the external communication path 30 and the space 6a, the external communication path 3
0 and the space 6a become negative pressure, and the whole fixed part 2 is pressed against the turntable 1 by the atmospheric pressure. As a result, the disk 3 is pressed and fixed on the turntable 1. Thereafter, the turntable 1 is rotated by rotating the rotary motor 12, and the disk 3 is evaluated by the evaluation device.

With such a configuration, the turntable 1
The disc 3 can be fixed on the turntable at the start of the rotation of the disc, so that the disc 3 does not come off the turntable 1. In addition, by using a simple configuration such as a vacuum solenoid valve, the chucking device can be configured to be small, simple, and low in cost. In addition, Embodiment 1
Since the chucking device does not use a magnet, it does not magnetize the stamper even when chucking the stamper, and can eliminate the influence of the magnetizing of the stamper on the subsequent process.

After evaluating the disk 3 as described above, after stopping the turntable 1, the vacuum solenoid valve 19 is operated to the release side, the space 6a is set to normal pressure, and the boss portion 2b of the fixing portion 2 is opened. The disk 3 is removed from the turntable 1 by pulling it out from the part 6. At this time, since no force acts on the disk 3, the disk 3 can be removed from the turntable 1 with a sufficiently small force, and the risk of damaging the disk 3 can be eliminated.

(Embodiment 2) Next, Embodiment 2 of the present invention will be described. FIG. 3 is a longitudinal sectional view for explaining Embodiment 2 of the present invention. Embodiment 2 illustrated
This chucking device has substantially the same configuration as the above-described chucking device of the first embodiment. However, the chucking device according to the second embodiment is different from the chucking device according to the first embodiment in that the hole 6 provided in the turntable 1 of the chucking device has a groove 1a that engages with the elastic ring 5 on the inner peripheral surface. It is different from the device. In the configuration of the chucking device shown in FIG. 3, the same members as those of the chucking device of the first embodiment shown in FIG. 2 are denoted by the same reference numerals, and description thereof will be omitted.

In the second embodiment, the groove 1a is formed as an annular groove centered on the rotation axis of the turntable 1,
When the fixing part 2 is attached to the turntable 1, the groove 1a
Are configured to engage with the elastic ring 5. By providing such a groove 1a in the hole 6, the boss 2b
Is harder to come off from the hole 6. Therefore, even if the turntable 1 is rotated in a state where the disk 3 is not fixed with sufficient strength due to a failure of the vacuum solenoid valve 19, the elastic ring 5 is caught by the groove 1a and the fixed part 2 is turned. Detachment from the table 1 can be prevented.

Next, the hole 6 having such a groove 1a is formed.
The procedure for attaching the fixing portion 2 to the rim will be described with reference to FIGS. First, turntable 1 to fixed part 2
Is removed, and the disk 3 is placed on the turntable such that the inner peripheral surface and the mating projection 1b of the turntable 1 match (a). Then, the fixing portion 2 is inserted so that the boss portion 2b fits into the hole portion 6 (b). At this time, the fixing portion 2 is fitted into the boss portion 2 while being fitted to the inner peripheral surface of the hole portion 6.
The elastic ring 5 provided at the position b is manually inserted until it reaches the groove 1a (c). And the vacuum solenoid valve 1
9 is operated to fix the disk 3 on the turntable 1, and the rotation motor 12 is rotated to rotate the turntable 1.

According to the chucking device of the second embodiment, in addition to the effects obtained in the first embodiment, the fixing portion 2 can be turned even when a failure occurs in the vacuum solenoid valve 19. It is possible to prevent the disk 3 from coming off the table 1 and prevent the disk 3 from coming off the turntable 1 and being damaged. Such a point contributes to increasing the yield in the manufacturing process of the disk 3.

(Embodiment 3) Next, Embodiment 3 of the present invention will be described. FIG. 5 shows Embodiment 3 of the present invention.
It is a longitudinal cross-sectional view for explaining. The illustrated chucking device of the third embodiment has substantially the same configuration as the chucking device of the second embodiment described above.
However, the third embodiment is different from the chucking device of the second embodiment in further including a pressure setting valve 21 that can set the pressure of the compressed air supplied to the vacuum solenoid valve 19. In the configuration of the chucking device shown in FIG. 5, the same members as those of the chucking device of the second embodiment shown in FIG. 3 are denoted by the same reference numerals, and description thereof will be omitted.

The pressure setting valve 21 is configured to adjust the pressure of the compressed air supplied to the vacuum solenoid valve 19 and to be able to arbitrarily set this value. By changing the pressure of the compressed air using the pressure setting valve 21, the ability to decompress the external communication passage 30 and the space 6a changes, and the force for chucking the disk 3 on the turntable 1 is adjusted. In the chucking device according to the third embodiment having such a configuration, for example, even when the elastic body ring 5 is deteriorated with time and the ability to prevent the boss portion 2b from being easily detached is reduced, the supply to the vacuum solenoid valve 19 is performed. This can be dealt with by increasing the pressure of the compressed air.

(Embodiment 4) Next, Embodiment 4 of the present invention will be described. FIG. 6 is a longitudinal sectional view for explaining Embodiment 4 of the present invention. Embodiment 4 illustrated
This chucking device has substantially the same configuration as the chucking device of the third embodiment described above. However, in the fourth embodiment, the external communication passage 30 described in the first embodiment is branched on the upstream side of the vacuum solenoid valve to provide the branch communication passage 22. A branch communication passage switching valve 23 for switching between supply and stop of the compressed air to the branch communication passage 22 and a pressure setting valve 25 for setting the pressure of the compressed air supplied to the branch communication passage switching valve 23 are provided. It differs from the chucking device of the third embodiment in having. In the fourth embodiment, an electromagnetic valve that simply opens and closes the branch communication path is used as the branch communication path switching valve 23.
In the configuration of the chucking device shown in FIG. 6, the same members as those of the chucking device of the third embodiment shown in FIG. 5 are denoted by the same reference numerals, and description thereof will be omitted.

The above configuration operates as follows. That is, compressed air having the same pressure is supplied to the vacuum solenoid valve 19 of the external communication path 30 and the branch communication path switching valve 23 of the branch communication path 22. The vacuum solenoid valve 19 and the branch communication path switching valve 23 are not operated together when the disk 3 is not mounted on the turntable 1, or are closed. When chucking the disk 3 on the turntable 1, only the vacuum solenoid valve 19 is operated with only the branch communication passage switching valve 23 closed. As a result,
The pressure of the external communication passage 30 and the space 6a is reduced to negative pressure, and the disk 3 is chucked.

When removing the chucked disk 3 from the turntable 1, the operation of the vacuum solenoid valve 19 is released. Then, the branch communication path switching valve 23 is opened, and compressed air is supplied from the branch communication path 22 to the external communication path 30 without passing through the vacuum solenoid valve 19. As a result, the compressed air is supplied to the space 6a and the pressure becomes higher than the normal pressure or the atmospheric pressure, and the fixing portion 2 is easily pulled out from the hole 6.

According to the chucking device of the fourth embodiment, in addition to the effects obtained in the first to third embodiments, the fixing portion 2 can be further easily removed. The possibility of accidentally damaging the disc 3 when pulling out the disc is reduced. This contributes to increasing the yield of the disk manufacturing process.

[0039]

The present invention described above has the following effects. That is, the invention described in claim 1 is:
The disc or the stamper can be chucked to the turntable by adsorbing the fixed portion with a pressure difference. For this reason, in addition to the pressure difference, the fixed portion contributes to chucking of the disk and the stamper, and the disk and the stamper can be reliably chucked to the turntable. Such an effect is effective in improving the reliability of the chucking device. In addition, a pressure difference between the hole and the outside can be provided with a relatively simple configuration, and the configuration of the chucking device and, consequently, the evaluation device can be reduced in size, simplicity, and cost.

According to the second aspect of the present invention, the attraction force to the fixed portion can be further increased. For this reason, even when the fixing by the fixing portion is insufficient, the boss portion of the fixing portion can be prevented from coming off from the hole, and the reliability of the chucking device can be further improved.

According to the third aspect of the present invention, even if the suction of the fixing portion due to the pressure difference is insufficient, the boss portion of the fixing portion is prevented from coming off the hole, and the reliability of the chucking device is further improved. Can be enhanced.

According to the present invention, the state of the chucking device can be optimally adjusted according to the evaluation step.
The usability of the chucking device can be enhanced.

According to a fifth aspect of the present invention, the external communication passage and the hole can be supplied with normal pressure or high pressure by supplying compressed air, and the fixing portion can be easily pulled out of the hole in a short time. Can be. The present invention as described in claims 1 to 5 can provide a chucking device that can reliably chuck a disk or a stamper without using a vacuum pump or a magnet. It can be said that.

[Brief description of the drawings]

FIG. 1 is a diagram common to Embodiments 1 to 4 of the present invention, showing a top surface of a chucking device.

FIG. 2 is a view for explaining the chucking device according to the first embodiment of the present invention, and is a longitudinal sectional view along an arrow AA ′ in FIG. 1;

FIG. 3 is a view for explaining the chucking device according to the second embodiment of the present invention, and is a longitudinal sectional view taken along the line AA ′ in FIG. 1;

FIG. 4 is a view for explaining a procedure for attaching a fixing portion in the chucking device shown in FIG. 3;

FIG. 5 is a view for explaining the chucking device according to the third embodiment of the present invention, and is a longitudinal sectional view along the arrow AA ′ in FIG. 1;

FIG. 6 is a view for explaining a chucking device according to a fourth embodiment of the present invention, and is a longitudinal sectional view along an arrow AA ′ in FIG. 1;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Turntable 1a Groove part 2 Fixed part 2a Hub part 2b Boss part 3 Disk 5 Elastic ring 6 Hole part 6a Space 7 Shaft 9a, 9b Bearing 10 Base 15, 16, 18 Communication passage 19 Vacuum solenoid valve 21, 25 Pressure setting Valve 22 Branch communication passage 23 Branch communication passage switching valve 30 External communication passage

Claims (5)

[Claims] 1. A chucking device which is provided in an evaluation device for evaluating a disk or a stamper used for manufacturing a disk and is used for fixing the disk or the stamper to the evaluation device. A rotary table that is placed and rotated, a hole provided on the rotary table, a hub, and a boss provided with an elastic ring, and the boss is fitted into the hole. Disk fixing means for fixing a disk on the rotary table, an external communication path having the hole as an open end, and a vacuum solenoid valve provided on the external communication path and supplied with compressed air. Characteristic chucking device. 2. The chucking device according to claim 1, wherein the hole is configured such that a space is created between the boss and the bottom of the hole when the boss is fitted. apparatus. 3. The chucking device according to claim 1, wherein the hole has a groove that engages with the elastic ring on an inner peripheral surface. 4. The chucking device according to claim 1, further comprising a pressure setting valve that can set a pressure of compressed air supplied to the vacuum solenoid valve. 5. A branch communication path switching valve that branches the external communication path upstream of the vacuum solenoid valve to provide a branch communication path, and switches between supply and stop of supply of compressed air to the branch communication path. The chucking device according to any one of claims 1 to 4, further comprising a branch communication passage pressure setting valve that can set a pressure of the compressed air supplied to the branch communication passage switching valve.