JP2001129680A - Laser beam machining equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve such a problem that micro cracks arise in the glass material due to concentration of stresses and a edge side of a glass plate is weakened by such a processing method that a grinder is used in processing a edge side of a glass plate, namely that the ridge of the side face is processed through ground and rounded by a grinder up to now. SOLUTION: In the solution, the laser processing equipment A1 provides a carrying equipment 10, lens-units 20a and 20b, a moving equipment 30 of lens-units and a irradiating equipment 40 of laser beams. And when the moving equipment 30 of lens-units moves the lens-units 20a and 20b, and when the carrying equipment 10 carries the work 80, at the same time the irradiating spots of laser beams move on the work 80 along the front edge side 81 or behind edge side 84 of the work 80.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing apparatus for processing a workpiece by irradiating a laser beam, and more particularly to a laser processing apparatus suitable for processing an end face of a plate-shaped workpiece.

[0002]

2. Description of the Related Art A grinder has been conventionally used for edge treatment of a glass plate. That is, in the end face portion of the glass plate cut into a predetermined shape, a sharp corner often appears on the ridge. The sharp corners are polished and rounded with a grinder for safety.

[0003]

However, if such a treatment is performed by a grinder, microcracks may occur in the glass material due to stress concentration, and the end face of the glass plate may be weakened.

[0004] In addition to the rounding process, the end face of a plate-shaped work is generally processed in a state where the work is fixed to a mounting table or the like. Therefore, when the end processing is included in the production line, the continuity of each process may be hindered.

[0005]

In order to solve the above-mentioned problems, a laser processing apparatus according to the present invention is provided with a transport device for transporting a plate-like work, a laser beam, and a laser beam converged by an objective lens. A lens unit that generates a laser beam irradiation spot on the work, a lens unit moving device that can move the lens unit in an oblique direction with respect to a conveying direction of the work, and a lens unit moving device that moves the lens unit. A laser light irradiating device for irradiating the light receiving portion of the lens unit with laser light along a movement trajectory of the light receiving portion of the lens unit, wherein the lens unit is moved by the lens unit moving device. By transporting the workpiece by the transport device, a laser beam irradiation spot is formed along the front end face or the rear end face of the workpiece. It is configured to move the upper work (claim 1). According to such a configuration, it is easy to irradiate the laser light to the front end face or the rear end face of the work, and therefore,
The end face of the work can be easily processed by laser processing.

In the above laser processing apparatus, the work is conveyed by the conveyance device with the lens unit stopped, so that the laser beam irradiation spot moves on the work along the side end surface of the work. (Claim 2), it is easy to irradiate the side end surface of the work with the laser beam, and therefore, it becomes easier to perform the work of the end surface of the work by laser processing.

In order to solve the above-mentioned problems, another laser processing apparatus according to the present invention includes a transfer device for transferring a plate-like work, a laser beam, and a laser beam which is converged by an objective lens. A pair of lens units for generating a laser beam irradiation spot on the work, a lens unit moving device capable of moving each of the lens units obliquely with respect to a direction in which the work is conveyed, and a movement of the lens unit A laser light irradiating device that irradiates a laser beam to the light receiving portion of each of the lens units along a movement trajectory of the light receiving portion of each of the lens units moved by the device; A laser is moved along the front end face of the work by conveying the work by the transfer device while moving the lens unit of The irradiation spot moves on the work, and the work is conveyed by the conveyance device while moving the other lens unit by the lens unit moving device, so that the laser light irradiation spot is formed along the rear end face of the work. It is configured to move on the work (claim 3). According to such a configuration, it is easy to irradiate the front end face and the rear end face of the work with laser light, and therefore,
The end face of the work can be easily processed by laser processing.

In the above laser processing apparatus, the work is conveyed by the conveyance device with one of the lens units stopped, so that a laser beam irradiation spot is formed on the work along one side end surface of the work. Move,
When the workpiece is transported by the transport device while the other lens unit is stopped, the laser beam irradiation spot moves on the workpiece along the other side end surface of the workpiece. 4) It is easy to irradiate the laser light to both end faces of the work, and therefore, it becomes even easier to perform the end face processing of the work by laser processing.

In the above-mentioned laser processing apparatus, the irradiation direction of the laser beam from the lens unit may be configured to be changeable.

In order to solve the above-mentioned problems, still another laser processing apparatus according to the present invention includes a transfer device for transferring a plate-like work, a laser beam receiving device, and a laser beam converging by an objective lens. A lens unit that generates a laser beam irradiation spot on the work, a lens unit moving device that can move the lens unit in a direction substantially perpendicular to the conveying direction of the work, and a lens unit moving device that moves the lens unit. A laser light irradiating device that irradiates the light receiving portion of the lens unit with laser light along a movement trajectory of the light receiving portion of the lens unit, wherein the work is stopped and the lens unit moving device By moving the lens unit, a laser beam irradiation spot is formed along the front end face or the rear end face of the work. The laser beam irradiation spot is configured to move on the work along the side end surface of the work by moving the work and moving the work by the transfer device in a state where the lens unit is stopped. (Claim 6). According to this configuration, it is easy to irradiate the front end face, the rear end face, and the side end face of the work with the laser beam, and therefore, it becomes easy to perform the work of the end face of the work by laser processing.

According to another aspect of the present invention, there is provided a laser processing apparatus for transporting a plate-like workpiece, receiving the laser beam, and converging the laser beam with an objective lens. A pair of lens units for generating a laser beam irradiation spot on the work, a lens unit moving device capable of moving each of the lens units in a direction substantially perpendicular to a conveying direction of the work, and the lens A laser light irradiating device that irradiates the light receiving portion of each of the lens units with a laser beam along a movement trajectory of the light receiving portion of each of the lens units moved by the unit moving device, and stops the work. By moving one of the lens units by the lens unit moving device in a state where the laser light is irradiated, the laser light irradiation is performed along the front end face of the work. Spot is moved on the work,
By moving the other lens unit by the lens unit moving device while the work is stopped, the laser beam irradiation spot moves on the work along the rear end face of the work and stops one lens unit. The workpiece is transported by the transport device in a state in which the laser beam irradiation spot moves on the workpiece along one side end surface of the workpiece while the other lens unit is stopped. By transporting the workpiece by the device, the laser beam irradiation spot moves on the workpiece along the other side end face of the workpiece (claim 7). According to such a configuration, the front end face, the rear end face, and both side end faces of the work can be easily irradiated with the laser beam, and therefore, the end face processing of the work can be more easily performed by laser processing.

According to another aspect of the present invention, there is provided a laser processing apparatus for rotating a plate-like work around a central axis orthogonal to a plate surface.
A laser beam irradiating device for irradiating a laser beam toward an end face of the work rotated by the rotating device; a position detecting means capable of detecting a position of the end surface of the work rotated by the rotating device; Focus position changing means for changing the position of the focal point of the laser beam irradiated by the laser beam with respect to the rotation axis, wherein the focus position changing means is controlled based on the position of the end face of the work detected by the position detecting means. Thereby, the laser beam irradiation spot of the laser beam irradiated by the laser beam irradiation device is configured to move on the end face of the work rotated by the rotating device (claim 8). According to this configuration, it is easy to irradiate the end face of the work having a complicated shape with the laser beam, and therefore, it becomes easy to perform the end face processing of the work by the laser processing.

[0013] In the above laser processing apparatus, the laser processing apparatus further comprises an angle detecting means for detecting an angle of the end face of the work at a position detected by the position detecting means, and the angle of the end face of the work detected by the angle detecting means. When the laser light irradiation intensity of the laser light irradiation device is controlled based on the above (claim 9), it is easy to irradiate the end face of the work having a complicated shape with the laser light at a uniform energy density. It becomes easier to perform the end face processing by laser processing.

[0014]

Embodiments of the present invention will be described with reference to the drawings. Hereinafter, a glass plate will be mainly described as an example of a work processed by the laser processing apparatus. However, the laser processing apparatus of the present application can be applied to a work made of a material other than glass. In addition, mainly, as the processing performed by the laser processing apparatus, an example of the processing of the end face of the work, that is, the rounding processing of the end face of the work will be described. However, the laser processing apparatus of the present application performs other processing, for example, a plurality of stacked The present invention can also be applied to a fusing process or the like in a case where an end face of a glass plate is fused by a laser beam to produce a double-layer glass.

First, a schematic configuration of a laser processing apparatus A1 according to an embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is a diagram showing an overall configuration of a laser processing apparatus A1,
FIG. 2 is an enlarged view of a part of the laser processing device A1.

The laser processing apparatus A1 mainly includes a transfer device 10
, A pair of lens units 20a and 20b, a lens unit moving device 30, and a laser beam irradiation device 40.

The transport device 10 is a roller conveyor, and includes a plurality of rollers 14, a servomotor 11, a feed roller 12 driven by the servomotor 11, and an outer frame 13. The transport device 10 can transport the workpiece in the direction of arrow S in FIG. 1 by the feed roller 12 while the workpiece is placed on the roller 14.

The lens units 20a and 20b converge the laser light incident from the openings 21a and 21b, which are the light receiving portions, by a built-in objective lens (not shown) and emit the laser light from the openings 22a and 22b.

The lens unit moving device 30 includes a motor 31a,
31b, guide rails 32a and 32b, and a ball screw mechanism. The ball screw mechanism includes a male screw, a nut, and a plurality of balls, but only male screws 33a and 33b are shown in the figure. The nuts threaded with the male screws 33a and 33b are attached to the lens units 20a and 20b.
Built in. When the motors 31a, 31b are driven to rotate, the male screws 33a, 33b connected thereto rotate, and the lens units 20a, 20b move in the direction guided by the guide rails 32a, 32b. The guide rail 32a and the guide rail 3
2b are fixed on the table 50 in parallel with each other.

The laser light irradiation device 40 includes a laser oscillator 44,
The irradiating units 42a and 42b have a pipeline 45 for guiding the laser light generated by the laser oscillator 44 to the irradiating units 42a and 42b. In the middle of the pipe line 45, there is a branch portion 43 that branches the laser beam. Branch 43
The laser beam is branched by, for example, a half mirror. The irradiation units 42a and 42b are fixed on the table 50, and emit laser light from the openings 41a and 41b. The dashed line in the figure indicates the optical path of the laser light. Although a mirror is provided in a portion where the optical path is bent, the mirror is omitted in the figure. The laser beams emitted from the apertures 41a and 41b of the irradiation units 42a and 42b travel along the movement trajectories of the apertures 21a and 21b that are the light receiving locations of the lens units 20a and 20b.
It is incident on 1b. Thus, the optical path of the laser light is
a, 21b.
Regardless of how the 0a and 20b move on the table 50, the laser light surely enters the openings 21a and 21b.

In FIG. 1, the table 50 is arranged so that the lens units 20a and 20b are moved in a direction perpendicular to the conveying direction of the conveying device 10, but the table 50 can be adjusted in angle. Depending on the adjustment, the lens units 20a and 20b may be moved obliquely to the transport direction of the transport device 10.

In FIG. 1, 60 is a chiller unit, 70 is a control panel, and 90 is a lehr. Control panel 70
Controls the servo motor 11 that is the drive source of the transport device 10, the motors 31a and 31b that are the drive sources of the lens unit moving device 30, the laser oscillator 44, and the like.

Next, with reference to FIGS. 3 to 7, a process in which the end face of the rectangular glass plate 80 as a plate-shaped work is processed by the laser processing apparatus A1 will be described. The processing at this time is an end face processing of the glass plate 80, that is, a processing of performing rounding processing on the end face. 3 to 7 show, by a plan view, a state in which the glass plate 80 conveyed by the conveying device 10 passes through the table 50. However, the conveying device 10 shows only the outer frame 13, and other parts are omitted. Have been. The angle of the table 50 is adjusted so that the lens units 20a and 20b are moved in a direction that forms 45 degrees with respect to the transport direction of the transport device 10. The arrow S in the figure indicates the transport direction of the transport device 10.

FIG. 3 shows a state in which the front end face 81 of the glass plate 80 conveyed has approached the table 50. At this time, the lens unit 20b is waiting at the leftmost position on the guide rail 32b, and no laser light is emitted from the irradiation unit 42b. The lens unit 20a is at the initial position, and when the front end face 81 of the glass plate 80 conveyed reaches the optical path of the laser light to be emitted from the lens unit 20a, the emission of the laser light from the irradiation unit 42a starts. Is done. Therefore, laser light is emitted from the lens unit 20a, and the emitted laser light irradiates the leftmost portion of the front end face 81 of the glass plate 80. The lens unit 20a has a front end face 81 such that the laser beam applied to the glass plate 80 forms a focused irradiation spot on the front end face 81 suitable for processing.
Is in a distance relationship with By being irradiated with the laser light, the laser light irradiated portion of the front end face 81 is heated and softened,
Rounded due to the surface tension of the softened glass material. That is, the end surface treatment using the surface tension is performed. At this time, since large stress concentration does not occur inside the glass material, micro cracks are unlikely to occur,
The end face does not become fragile.

The glass plate 80 is conveyed in the direction of arrow S in the figure without stopping from the state of FIG. Then
The motor 31a is driven in synchronization with the transport device 10, and the lens unit 20a moves along the guide rail 32a in a direction approaching the irradiation unit 42a. At this time, the movement of the lens unit 20a is controlled so that the distance of the lens unit 20a to the front end face 81 does not change.

FIG. 4 is a view showing a state where the glass plate 80 has been conveyed to some extent from the state of FIG. Since the distance of the lens unit 20a to the front end face 81 is not different from the state shown in FIG. 3, the laser beam applied to the glass plate 80 forms an irradiation spot on the front end face 81 in a condensed state suitable for processing. I have. When the glass plate 80 is further conveyed from the state of FIG. 4 and the left end face 82 of the glass plate 80 approaches the optical path of the laser light to be emitted from the lens unit 20b, the irradiation unit
Laser light is emitted from 42b.

FIG. 5 is a diagram showing a state where the glass plate 80 has been conveyed to some extent from the state of FIG. The distance of the lens unit 20a to the front end surface 81 is the same as the state shown in FIGS. The lens unit 20b has a guide rail 32b
Although it is still located on the upper left side, since the laser beam is emitted from the irradiation unit 42b, the lens unit 20b
Is emitted to the left end face 82 of the glass plate 80. The lens unit 20b has a distance relationship with the left end face 82 such that the laser light applied to the glass plate 80 forms a focused irradiation spot on the left end face 82 suitable for processing. When the glass plate 80 is further transported from the state shown in FIG. 5, the entire front end face 81 of the glass plate 80 is processed by the laser light emitted from the lens unit 20a.
At this time, the lens unit 20a is located on the rightmost side on the guide rail 32a. When the glass plate 80 is further conveyed, the right end surface 83 of the glass plate 80 is moved to the lens unit 20a.
Irradiated with laser light emitted from the. At this time, the lens unit 20a is stopped while being located on the rightmost side on the guide rail 32a.

FIG. 6 is a view showing a state where the right end face 83 of the glass plate 80 is being processed by being irradiated with the laser beam emitted from the lens unit 20a. The lens unit 20a has a distance relationship with the right end face 83 such that the laser light irradiated on the glass plate 80 forms an irradiation spot in a focused state suitable for processing on the right end face 83. When the glass plate 80 is further transported from the state of FIG. 6, the entire left end face 82 of the glass plate 80 is processed by the laser light emitted from the lens unit 20b. Then, the rear end face 84 of the glass plate 80 reaches the optical path of the laser light emitted from the lens unit 20b. At this time, the lens unit 20b
Is such that the laser light applied to the glass plate 80 forms an irradiation spot in a focused state suitable for processing on the rear end face 84,
There is a distance relationship with the rear end face 84. When the rear end surface 84 of the glass plate 80 approaches the optical path of the laser light emitted from the lens unit 20b, the motor 31b is driven in synchronization with the transport device 10, and the lens unit 20b is illuminated along the guide rail 32b by the irradiation unit 42b. Move in a direction away from At this time, the movement of the lens unit 20b is controlled so that the distance to the rear end surface 84 of the lens unit 20b does not change.

FIG. 7 shows that the lens unit 20a is a glass plate 80.
The right end surface 83 of the glass plate 8 is processed.
0 shows a state in which the rear end face 84 is being machined. When the glass plate 80 is further conveyed and the lens unit 20a finishes processing the entire right end surface 83 of the glass plate 80, the irradiation unit
The emission of the laser beam from 42a stops. When the lens unit 20b finishes processing the entire rear end face 84 of the glass plate 80, the emission of the laser beam from the irradiation unit 42b stops. afterwards,
The glass plate 80 is sent to the lehr 90.

Next, another end face processing method using the laser processing apparatus A1 will be described with reference to FIGS. Figures 3-7
In the processing method described with reference to, the irradiation direction of the laser light by the lens units 20a and 20b is not changed from the start to the end of the processing, but the irradiation direction may be changed during the processing process. As described above, the angle of the table 50 can be adjusted. For example, an angle changing device may be attached to the table 50, and the angle changing device may be controlled by the control panel 70 to change the angle of the table 50 during processing.

FIG. 8 shows that about 6
FIG. 9 is a diagram in which the angle of the table 50 is adjusted so that the lens unit 20a can move in an angle direction of 0 degrees. FIG.
FIG. 5 is a diagram in which the angle of the table 50 is adjusted so that the lens unit 20a can move in an angle direction that forms about 30 degrees with respect to the transport direction of the transport device 10. In the figure, the table
Only the lens unit 20a is shown on 50. The arrow S in the figure indicates the transport direction of the transport device 10. The dashed line is the optical path of the laser light. 8, the front end face 81 of the glass plate 80 is processed by the lens unit 20a, and when the entire front end face 81 is processed, the irradiation direction of the lens unit 20a is changed as shown in FIG. Right end face 83 of glass plate 80
May be processed. In both the state of FIG. 8 and the state of FIG. 9, the irradiation direction of the laser light emitted from the lens unit 20a is about 3
At an angle of 0 degrees.

Next, a laser processing apparatus A2 according to another embodiment of the present invention will be described with reference to FIG. The laser processing apparatus A2 differs from the laser processing apparatus A1 in FIG. 1 in the configuration of the pair of lens units and their arrangement on the table 50, but is otherwise the same. Table 50 is a lens unit
The angle is adjusted so that 120a and 120b move in a direction orthogonal to the transport direction of the transport device 10. In the figure, the transport device 10 is omitted, but the arrow S indicates the transport direction of the transport device 10.

The lens units 120a and 120b have mirrors 125a and
The laser beam from the irradiation units 42a and 42b is received and reflected by mirrors 125a and 125b, and the objective lenses 126a and
Irradiation is performed on the end face of the glass plate 80 serving as a workpiece through 6b. That is, the mirrors 125a and 125b are light receiving portions of the lens units 120a and 120b. The distance between the guide rail 32a for guiding the pair of lens units 120a and 120b and the guide rail 32b is
It is desirable to be able to adjust according to the front-back length of the glass plate 80 to be processed.

A processing method using the laser processing apparatus A2 will be described with reference to FIGS. First, the transport device
When the glass plate 80 is conveyed by 10, the lens unit 120b is kept at the initial position and the lens unit
The left end face 82 of the glass plate 80 is processed by the laser beam from 120b (see FIG. 10A). Next, when the glass plate 80 is conveyed to an intermediate position between the two guide rails 32a and 32b, the conveying device 10 is stopped to stop the glass plate 80 at that position. Then, while moving the two lens units 120a and 120b in a direction orthogonal to the transport direction, the front end face 81 and the rear end face 84 of the glass plate 80 are processed by the laser light from the lens units 120a and 120b (FIG. 10 ( b)). When the processing of the front end face 81 and the rear end face 84 is completed, the transport device 10 is driven again, while transporting the glass plate 80 by the transport device 10,
The lens unit 120a is stopped at the rightmost position, and the right end surface 83 of the glass plate 80 is processed by the laser light from the lens unit 120a (see FIG. 10C). In this manner, the entire end face of the glass plate 80 can be processed.

Next, a laser processing apparatus A3 according to still another embodiment of the present invention will be described with reference to FIG. The laser processing device A3 includes a rotation device 130, a laser light irradiation device 140, a detection device 200 including a pair of optical distance sensors, a control device (not shown), and a transfer device 110.

The rotating device 130 includes a drive shaft 131 rotated by a motor and a rotary table 132 fixed on the drive shaft 131.
And In the figure, a glass plate 180 is fixed on a rotary table 132. The glass plate 180 is obtained by cutting a flat plate of glass to manufacture a door glass of an automobile, and has a complicated shape. Rotary table 132
Has an adsorption unit 133 that adsorbs the glass plate 180 at a negative pressure. When the rotating device 130 is driven while the glass plate 180 is fixed on the rotary table 132, the glass plate 180 rotates around a central axis (rotation axis) P orthogonal to the plate surface.
Arrow X in the figure indicates the rotation direction.

The laser beam irradiating device 140 is arranged so as to be able to irradiate the laser beam toward the end face of the glass plate 180 rotated by the rotating device 130. The arrow Y in the figure indicates the direction of irradiation of the laser light. The laser light irradiation device 140 includes a laser oscillator and a head 141, and is configured to guide the laser light generated by the laser oscillator to the head 141 and irradiate the head plate 141 with the laser light toward the glass plate 180. However, the laser oscillator is omitted in the figure. The head 141 has a built-in piezo mirror (not shown) serving as a focal position changing means.
It is configured to irradiate zero. The piezo mirror is controlled by a control device. Therefore, the focal position of the laser light emitted from the head 141 (the position of the focal point of the laser light irradiated by the laser light irradiation device 140 with respect to the rotation axis P)
Can be changed by the control device.

The detecting device 200 includes a pair of optical distance sensors. Lines V1 and V2 in the figure indicate the detection directions of the respective optical distance sensors. Line V1, V2
Is directed to the end face of the glass plate 180 on the turntable 132. The pair of optical distance sensors detects distances at two points where the lines V1 and V2 intersect the end surface of the glass plate 180. Therefore, the position of the end face of the glass plate 180 can be calculated from the detection result of at least one of the distance sensors. Further, since the two points whose distances are detected are close to each other, the angle of the end face of the glass plate 180 can be calculated from the detection results of both the distance sensors. As described above, the detection device 200 also functions as position detection means for detecting the position of the end face of the glass plate 180, and also functions as angle detection means for detecting the angle of the end face.

Next, how the end face of the glass plate 180 is processed by the laser processing apparatus A3 will be described. First, the glass plate 180 is transported toward the rotating device 130 while being placed on the transport device 110. Arrow S in the figure indicates the transport direction. At this time, the mounting height of the glass plate 180 by the transfer device 110 is higher than the rotating table 132 of the rotating device 130. When the glass plate 180 is positioned directly above the rotary table 132 of the rotating device 130, the transfer device
The conveyance in the direction of arrow S by 110 is stopped. Then, the lifting / lowering device 111 supporting the transport device 110 is driven, and the transport device 110 is lowered. Then, when the mounting height of the glass plate 180 by the transfer device 110 is lower than the rotating table 132 of the rotating device 130, the glass plate 180 is mounted on the rotating table 132. FIG. 11 shows the state at this time. Next, the suction unit 133 operates, and the glass plate 180 is fixed to the turntable 132 by the negative pressure. In this way, the glass plate 180 is attached to the rotating device 130.

The rotating device 130 is driven while the glass plate 180 is attracted to the rotating table 132. The detection device 200
The detection result about the detection portion of the end face of the rotating glass plate 180 is sent to the control device. The control device can know the position and angle of the detected portion from the detection result.

Then, based on the position of the detected portion of the end face of the glass plate 180, the control state of the piezo mirror after a predetermined time is determined. In other words, since the glass plate 180 is rotating, the laser beam emitted from the head 141 is irradiated to the portion where the position has been detected by the detection device 200 after a predetermined time. By controlling the focal position of the laser beam, an irradiation spot of a size suitable for the processing is formed on the end face of the glass plate 180. In this way, the laser light irradiation device 14
The irradiation spot of the laser beam irradiated by 0 moves on the end surface of the rotating glass plate 180. The detection result is continuously sent from the detection device 200 to the control device, and the control device continuously controls the piezo mirror. While the glass plate 180 makes one rotation, the distance between the head 141 and the end surface of the glass plate 180 constantly changes, but since the focal position of the laser beam is controlled as described above, the position on the end surface of the glass plate 180 is changed. Always has an irradiation spot of a size suitable for the processing.

The detection device 200 on the end face of the glass plate 180
The irradiation intensity of the laser light from the laser light irradiation device 140 after a predetermined period of time is determined based on the angle of the detection portion according to. The shape of the irradiation spot on the end surface changes depending on the angle between the end surface and the laser beam irradiated on the end surface.
Therefore, if the irradiation intensity of the laser light from the laser light irradiation device 140 is constant, the energy density of the irradiation spot changes depending on the angle between the end face and the laser light applied to the end face. In order to minimize such a change in the energy density of the irradiation spot, the irradiation intensity of the laser light from the laser light irradiation device 140 is controlled based on the angle of the detected portion of the end face. In order to control the irradiation intensity of the laser light from the laser light irradiation device 140, for example, the output of a laser oscillator may be controlled.

When the glass plate 180 makes one rotation while the end face is irradiated with the laser beam in this manner, the end face processing for the entire circumference of the glass plate 180 is completed.

In the laser processing apparatus A3, a piezo mirror is used as the focal position changing means. However, without using such a special mirror, for example, one or both of the head 141 and the rotating device 130 can be used. The position of the focal point (the position of the focal point of the laser beam emitted by the laser beam irradiating device 140 with respect to the rotation axis P) may be changed by changing the distance between the two.

[0045]

According to the laser processing apparatus of the present invention, the end face of a plate-shaped work can be processed without making the end face of the plate-shaped work weak by micro cracks or the like.

Further, in a laser processing apparatus having a transfer device, the laser processing device can be easily coupled to a transfer device on a production line, and continuity of each step of the production line can be easily ensured. In particular,
In a laser processing apparatus in which a lens unit moves in an oblique direction with respect to the direction in which a work is conveyed, it is possible to perform end face processing without stopping the conveyance of the work, with a very simple configuration.

Further, in a laser processing apparatus having a rotating device, an appropriate irradiation spot is formed on the end face without fixing the work by high-precision positioning with respect to the rotating device. Further, even if the shape of the work is complicated, the irradiation spot can be reliably moved along the end face.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating an overall configuration of a laser processing apparatus.

FIG. 2 is an enlarged view of a part of the laser processing apparatus.

FIG. 3 is a diagram showing a process in which an end face of a glass plate is processed by a laser processing apparatus.

FIG. 4 is a diagram showing a process in which an end face of a glass plate is processed by a laser processing apparatus.

FIG. 5 is a diagram showing a process in which an end face of a glass plate is processed by a laser processing apparatus.

FIG. 6 is a diagram showing a process in which an end face of a glass plate is processed by a laser processing apparatus.

FIG. 7 is a diagram showing a process in which an end face of a glass plate is processed by a laser processing apparatus.

FIG. 8 is a diagram when the angle of the table is adjusted so that the lens unit can move in an angle direction forming about 60 degrees with respect to the transport direction of the transport device.

FIG. 9 is a diagram when the angle of the table is adjusted so that the lens unit can move in an angle direction that forms about 30 degrees with respect to the transport direction of the transport device.

FIG. 10 is a diagram illustrating a process of processing by a laser processing apparatus. (A) is a diagram when the left end surface of the glass plate is processed by the laser processing device, (b) is a diagram when the front end surface and the rear end surface of the glass plate are processed by the laser processing device, c) is a diagram when the right end surface of the glass plate is processed by the laser processing device.

FIG. 11 is a diagram illustrating a configuration of a laser processing apparatus.

[Explanation of symbols]

 A1, A2, A3 Laser processing device 10 Transport device 11 Servo motor 12 Feed roller 13 Outer frame 14 Roller 20a, 20b Lens unit 21a, 21b Opening 22a, 22b Opening 30 Lens unit moving device 31a, 31b Motor 32a, 32b Guide rail 33a , 33b Male thread 40 Laser beam irradiation device 41a, 41b Opening 42a, 42b Irradiation part 43 Branch part 44 Laser oscillator 45 Pipe line 50 Table 60 Chiller unit 70 Control panel 80 Glass plate 81 Front end face 82 Left end face 83 Right end face 84 Rear end face 90 Annealing furnace 110 Conveying device 111 Lifting device 120a, 120b Lens unit 125a, 125b Mirror 126a, 126b Objective lens 130 Rotating device 131 Drive shaft 132 Rotary table 133 Suction unit 140 Laser beam irradiation device 141 Head 180 Glass plate 200 Detection device

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Yasukun Iwasaki 6-107 Takino-cho, Nishinomiya-shi, Hyogo Shin-Meiwa Industry Co., Ltd. Development Center F-term (reference) 4E068 AE00 CA11 CB05 CC00 CC06 CD13 CE02 CE04 CE11 DA14 DB13

Claims (9)

[Claims] 1. A transport device for transporting a plate-shaped work, a lens unit receiving laser light, converging the laser light with an objective lens to generate a laser light irradiation spot on the work, and a lens unit. A lens unit moving device capable of moving the lens unit obliquely with respect to the conveying direction of the work; and a light receiving portion of the lens unit along a movement locus of the light receiving portion of the lens unit moved by the lens unit moving device. A laser light irradiation device that irradiates the work with the lens unit by the lens unit moving device, and conveys the work by the conveyance device. A laser processing apparatus configured such that a laser beam irradiation spot moves on the workpiece along the laser processing spot. 2. The apparatus according to claim 1, wherein the work is conveyed by the conveyance device while the lens unit is stopped, so that a laser beam irradiation spot moves on the work along a side end surface of the work. The laser processing apparatus according to claim 1. A pair of lens units for receiving a laser beam, converging the laser beam with an objective lens to produce a laser beam irradiation spot on the workpiece, and a pair of lens units. A lens unit moving device capable of moving the lens unit in a direction oblique to the conveying direction of the work; and a moving locus of a light receiving portion of each lens unit moved by the lens unit moving device. A laser light irradiating device for irradiating a laser beam to a light receiving portion of each of the lens units, and conveying the workpiece by the conveying device while moving one of the lens units by the lens unit moving device. A laser beam irradiation spot moves on the work along the front end surface of the work, and is moved by the lens unit moving device. By conveying the workpiece by while moving the other lens unit the conveying device, the laser beam irradiation spot is configured to move on the said workpiece along the rear end face of the workpiece,
Laser processing equipment. 4. A laser beam irradiating spot moves on the work along one side end surface of the work by conveying the work by the transfer device with one of the lens units stopped. The laser beam irradiation spot is configured to move on the work along the other side end surface of the work by transferring the work by the transfer device while the lens unit is stopped. 3. The laser processing apparatus according to 3. 5. The laser processing apparatus according to claim 1, wherein an irradiation direction of the laser light from the lens unit is changeable. 6. A transport device for transporting a plate-like work, a lens unit receiving laser light, converging the laser light with an objective lens to generate a laser light irradiation spot on the work, and a lens unit. A lens unit moving device that can be moved in a direction substantially perpendicular to the conveying direction of the work; and a light receiving portion of the lens unit along a movement locus of the light receiving portion of the lens unit moved by the lens unit moving device. And a laser light irradiation device for irradiating a laser beam to the lens unit. By moving the lens unit by the lens unit moving device while the work is stopped,
A laser beam irradiation spot moves on the work along the front end surface or the rear end surface of the work, and the work is conveyed by the conveyance device in a state where the lens unit is stopped. A laser processing apparatus configured such that a laser beam irradiation spot moves on the workpiece along the laser processing spot. 7. A transport device for transporting a plate-like work, a pair of lens units for receiving a laser beam, converging the laser beam with an objective lens to generate a laser beam irradiation spot on the work, A lens unit moving device capable of moving the lens unit in a direction substantially perpendicular to the direction of transporting the work; and a moving locus of a light receiving portion of each of the lens units moved by the lens unit moving device. A laser light irradiating device for irradiating a laser beam to a light receiving portion of each of the lens units, and by moving one of the lens units by the lens unit moving device while the work is stopped, The laser beam irradiation spot moves on the work along the front end surface of the work, and the lens unit is stopped in a state where the work is stopped. By moving the other lens unit by the moving device, the laser beam irradiation spot moves on the work along the rear end surface of the work, and the transfer device moves the work with the one lens unit stopped. By carrying, the laser beam irradiation spot moves on the work along one side end surface of the work, and the work is carried by the carrying device in a state where the other lens unit is stopped. A laser processing apparatus, wherein a laser beam irradiation spot moves on the work along the other side end surface of the work. 8. A rotating device for rotating a plate-like work around a central axis orthogonal to a plate surface, a laser light irradiating device for irradiating a laser beam toward an end surface of the work rotated by the rotating device, Position detecting means for detecting the position of the end face of the work rotated by the rotating device; and focus position changing means for changing the position of the focal point of the laser light emitted by the laser light irradiating device with respect to the rotation axis; The focus position changing means is controlled based on the position of the end face of the work detected by the position detection means, so that the laser light irradiation spot of the laser light emitted by the laser light irradiation apparatus is rotated by the rotating device. A laser processing apparatus configured to move on an end surface of the work. 9. An apparatus according to claim 1, further comprising an angle detecting means for detecting an angle of an end face of said work at a position detected by said position detecting means, wherein said laser beam is detected based on the angle of said end face of said work detected by said angle detecting means. The laser processing apparatus according to claim 8, wherein a laser beam irradiation intensity of the irradiation apparatus is controlled.