JP2001115968A - Injector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a miniaturizable simply structured injector capable of providing a stable delivery rate with less pulsation. SOLUTION: This injector I is equipped with a first outer block 10 having a first outer flow-in part 13 for a force-fed fluid F and a first outer flow-out part 14 for the fluid; an intermediate block 20 having a connection flow-in part 21 and a connection flow-out part 22 communicating with the flow-in part 13 and the flow-out part 14, respectively; a second outer block 30 having a second outer flow-in part 31 and a second outer flow-out part 32 communicating with the flow-in part 21 and the flow-out part 22, respectively; a first chamber 40 formed of the outer block 10 and the intermediate block 20; a second chamber 50 formed of the intermediate block 20 and the outer block 30; check valves 61, 71 for suction, check valves 66, 76 for discharge; a pressurizing mechanism body 80; and a working fluid flow-in/flow-out part 90 for causing a working fluid A to flow into or out of at least one of the two chambers to reciprocate the mechanism body.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to an injector.

[0002]

2. Description of the Related Art For example, an injector for pumping a fluid such as a chemical solution or ultrapure water may be incorporated in various devices in a semiconductor manufacturing line or the like. As a conventional injector of this type, an inlet and an outlet for a fluid to be pressurized, two chambers, two inflow portions respectively connecting the chambers and the inlet, the chambers and the outlet, A body body formed with two outflow portions communicating with each other, and a pressurizing mechanism body provided with a diaphragm portion provided at both ends in each of the chambers, and supplies a working fluid such as gas into the chamber. There is known a configuration in which the pressurizing mechanism reciprocates by doing so, and thereby the fluid to be pressed in the chamber is discharged from the outlet.

[0003] However, the injector having the above-mentioned conventional structure has a problem that the structure becomes complicated, and it is necessary to divide the body body into a large number, or the volume of the body body becomes extremely large, so that the injector becomes large. There was a problem that invited.

Further, in the above-mentioned conventional structure, the supply of the working fluid for reciprocating the pressurizing mechanism is switched by an end detecting switch or a sensor built in the body. ) Is detected, or the switching is performed mechanically by utilizing the rise in the internal pressure of the chamber to which the working fluid is supplied when the end of the pressurizing mechanism is reached. However, the discharge pressure of the fluid under pressure at the outlet when the pressurizing mechanism reverses is almost close to zero, and there is a problem that the discharge pressure pulsates greatly. Further, since the supply of the working fluid for reciprocating the pressurizing mechanism is switched as described above, the discharge flow rate from the injector cannot be easily changed.

Further, the above-mentioned conventional injector cannot check the inside of each of the chambers from the outside, so that not only cannot the operating state of the pressurizing mechanism be visually checked, but also the diaphragm of the pressurizing mechanism. There is also a problem that the discovery of the occurrence of an abnormality such as breakage of the unit is delayed.

[0006]

The present invention has been proposed in view of the above points, and has a simple structure.
In addition, the present invention provides an injector that can achieve downsizing, can obtain a stable discharge flow rate with small pulsation, can easily change the discharge flow rate, and can detect occurrence of abnormality at an early stage. With the goal.

[0007]

That is, according to the present invention, the first outer inflow portion (1) of the fluid (F) to be pressurized is provided on one side.
3) and a first outer block (10) having a first outer outflow portion (14) of the fluid to be pumped on the other side, and a connection disposed inside the first outer block and communicating with the first outer inflow portion. An intermediate block (20) having an inflow portion (21) and a connection outflow portion (22) communicating with the first outer outflow portion;
A second outer inflow portion (31) disposed outside the intermediate block opposite to the first outer block and communicating with a connection inflow portion of the intermediate block and a second outer side communicating with a connection and outflow portion of the intermediate block. Second with outlet (32)
An outer block (30), a first suction section (41) formed by the first outer block and the intermediate block, communicating with the first outer inflow section, and a first discharge section communicating with the first outer outflow section. First chamber (40) having (42)
And a second suction portion (5) formed by the intermediate block and the second outer block and communicating with the second outer inflow portion.
1) and a second discharge portion (5) communicating with the second outside outflow portion.
A second chamber (50) having a second suction port, and a first suction reverse port interposed between the first outside inflow section and the first suction section so that the fluid to be pumped flows in the direction of the first suction section. Stop valve (6
1) a first discharge check valve (66) interposed between the first discharge portion and the first outer outflow portion so that the fluid to be pumped flows in the direction of the first outer outflow portion; A second suction check valve (71) interposed between the second outer inflow portion and the second suction portion so that the fluid to be pressure-flowed flows in the direction of the second suction portion;
Between the second discharge part and the second outflow part.
A second discharge check valve (76) interposed so that the fluid to be pumped flows toward the outer outflow portion, a first diaphragm portion (81) having an outer peripheral portion fixed to an inner wall of the first chamber, and A pressurizing mechanism (80) in which a second diaphragm (82) having an outer peripheral portion fixed to an inner wall of the second chamber is integrally movable by a connecting portion (83) penetrating the intermediate block; A working fluid outflow opening from the intermediate block to at least one of the first chamber or the second chamber, and allowing a working fluid (A) for reciprocating the pressurizing mechanism to flow into or out of at least one of the first chamber or the second chamber. An injector (I) comprising an inlet (90).

According to a second aspect of the present invention, in the first aspect, a first suction check valve block (60) including the first outside inflow portion and the first suction check valve; An outflow portion and a first discharge check valve block (65) including a first discharge check valve are respectively assembled in the first outer block, and the second outer inflow portion and the second suction check valve are provided. A second suction check valve block (70) including a stop valve;
The second discharge check valve block (75) including the second outer outflow portion and the second discharge check valve is related to an injector that is assembled in the second outer block.

Further, according to a third aspect of the present invention, in the first or second aspect, supply of the working fluid for reciprocating the pressurizing mechanism to the first chamber or the second chamber and discharge of the working fluid from the chamber. However, the present invention relates to an injector that is configured to be switched at a predetermined switching cycle by an external switching unit and to be able to arbitrarily change the switching cycle.

Further, according to a fourth aspect of the present invention, in any one of the first to third aspects, the intermediate block is formed of a transparent or translucent body so that the operation state of the pressurizing mechanism can be visually recognized from the outside. Pertaining to the injector being used.

Further, the invention of claim 5 relates to the injector according to claim 4, wherein the connection inflow portion and the connection outflow portion of the intermediate block are constituted by pipe members embedded in the intermediate block.

Further, according to a sixth aspect of the present invention, in any one of the first to fifth aspects, the working fluid for reciprocating the pressurizing mechanism body flows into and out of only one of the first chamber and the second chamber, and The present invention relates to an injector in which a spring (S) is disposed between an inner wall of a chamber through which a working fluid does not flow and an inner surface of a diaphragm disposed in the chamber.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a longitudinal sectional view showing a state of discharging a fluid from a first chamber of an injector according to an embodiment of the present invention, FIG. 2 is a longitudinal sectional view showing a state of discharging a fluid from a second chamber of the injector, and FIG. FIG. 4 is a perspective view showing a check valve used in the injector, FIG. 4 is a schematic view showing one usage example of the injector, FIG. 5 is a schematic view showing another usage example, and FIG. 6 is an effect in the usage example of FIG. FIG. 7 is a longitudinal sectional view of an injector according to another embodiment.

The injector I shown in FIG. 1 and FIG.
According to one embodiment of the present invention, the first outer block 1
0, an intermediate block 20, a second outer block 30,
The first chamber 40, the second chamber 50, the first suction check valve 61, the first discharge check valve 66, the second suction check valve 71, and the second discharge check valve 76 And the pressurizing mechanism 80
And a working fluid inflow / outflow section 90. In addition, the first
The body in which the outer block 10, the intermediate block 20, and the second outer block 30 are integrally assembled corresponds to the body in the conventional structure described in the section of the prior art. Further, the injector I of this embodiment is assembled to supply a fluid such as a chemical solution or ultrapure water under pressure to various devices in a semiconductor manufacturing line or the like. Hereinafter, each part will be described in detail.

The first outer block 10 has, on one side thereof, an inflow port 11 for the fluid F to be pressurized and a first port 11 communicating with the inflow port 11.
An outside inflow portion 13 is provided, and on the other side, an outflow port 12 for the fluid F to be pressurized and a first outside outflow portion 14 communicating with the outflow port 12 are provided. In this embodiment, the first outer block 10 is formed of a resin having high corrosion resistance and chemical resistance such as a fluororesin.

The intermediate block 20 is arranged inside the first outer block 10 and has a connection inflow portion 21 communicating with the first outer inflow portion 13 and a connection outflow portion 22 communicating with the first outer outflow portion 14. Have. In this example,
The intermediate block 20 (excluding the connection inflow portion 21 and the connection outflow portion 22) is made of transparent vinyl chloride so that the operation state of a pressurizing mechanism 80 described later can be visually recognized from the outside, as in the invention of claim 4. It is formed of a transparent or translucent body made of resin or the like. Further, in this embodiment, the connection inflow section 21 and the connection outflow section 22 are formed by the pipe member P embedded in the intermediate block 20 as in the invention of claim 5.
1, P2. Further, the pipe members P1, P
2 is preferably formed of a resin having high corrosion resistance and chemical resistance such as a fluororesin in consideration of contact with the fluid F to be pressed. In the illustrated example, the pipe members P1, P
A sealing member o1 such as an O-ring is interposed between the second outer block 10 and the first outer block 10 to improve the sealing performance.

The second outer block 30 is disposed outside the intermediate block 20 on the side opposite to the first outer block 10.
1 and a second outside outflow portion 32 communicating with the connection outflow portion 22 of the intermediate block 20. In this embodiment, the second outer block 30 is formed of a resin having high corrosion resistance and chemical resistance such as a fluororesin. Further, in the illustrated example, a seal member o1 such as an O-ring is interposed between the second outer block 30 and the pipe members P1 and P2 to improve the sealability.

The first outer block 10, the intermediate block 20, and the second outer block 30 are integrally assembled by appropriate means. Note that, in this embodiment, the first
The overall outer shape of the body body in which the outer block 10, the intermediate block 20, and the second outer block 30 are integrally assembled is a square, and the injector I has extremely good arrangement.

The first chamber 40 is formed by the first outer block 10 and the intermediate block 20. The first chamber 40 has a first suction part 41 communicating with the first outside inflow part 13 and a first discharge part 42 communicating with the first outside outflow part 14. And the first
Between the outer inlet 13 and the first suction part 41, a first suction check valve 61 configured to allow the fluid to be fed to flow in the direction of the first suction part 41 is interposed. A first discharge check valve 66 configured to allow the fluid to be fed to flow in the direction of the first outer outflow portion 14 is interposed between the first outer outflow portion 14 and the first discharge portion 42.

The second chamber 50 includes the intermediate block 2
0 and the second outer block 30. The second chamber 50 has a second suction part 51 communicating with the second outside inflow part 31 and a second discharge part 52 communicating with the second outside outflow part 32. And the second
Between the outer inlet 31 and the second suction part 51, a second suction check valve 71 configured to allow the fluid to be fed to flow in the direction of the second suction part 51 is interposed. A second discharge check valve 76 is arranged between the second outer outflow portion 32 and the second discharge portion 52 so that the fluid under pressure flows in the direction of the second outer outflow portion 32.

Here, in the embodiment, the first outer inflow portion 13 and the first
First suction check valve block 60 including suction check valve 61
And the first outer outflow portion 14 and the first discharge check valve 66
The first outside check valve block 65 and the second outside inflow portion 31 and the second suction check valve 7 are assembled in the first outside block 10 as separate members.
1 and a second discharge check valve block 75 including the second outflow portion 32 and the second discharge check valve 76 in the second outer block 30. Each is assembled as a separate member. In this way, the volume of the entire injector I can be reduced, and the injector I itself can be reduced in size.

In this embodiment, the first outside inflow portion 13, the first outside outflow portion 14, the second outside inflow portion 31, and the second outside outflow portion of each of the check valve blocks 60, 65, 70, 75 are provided. Reference numeral 32 is bent at a substantially right angle. By doing so, the check valves 61, 66, 71, 7
6 and the opening axes of the inflow port 11 and the outflow port 12 are orthogonal to each other, and it is necessary to change the flow direction of the fluid F to be pressurized, etc., the check valve blocks 60, 65,
The flow direction of the fluid F under pressure can be changed in the insides 70 and 75, and the volume of the entire injector I can be reduced more efficiently. Each of the check valve blocks 6
Reference numerals 0, 65, 70, and 75 are made of a resin having high corrosion resistance and chemical resistance such as a fluororesin. Symbol o2 shown
Is a seal member such as an O-ring interposed between the check valve blocks 60, 65, 70, 75 and the first outer block 10, the intermediate block 20, and the second outer block 30.

Further, in this embodiment, each of the check valves 61, 66, 71, and 76 is formed of a cylindrical body or a prismatic body (a cylindrical body in the drawing), as can be understood from FIG. The one in which a plurality of fluid flow passages C are radially formed on the side end surface E1 and the outer peripheral wall surface E2 is used. Of course, each check valve is not limited to this.

The pressurizing mechanism 80 is provided in the first chamber 40
A first diaphragm portion 81 disposed in the inside and a second diaphragm portion 82 disposed in the second chamber 50 are integrally movably connected by a connecting portion 83 passing through the intermediate block 20, and the body Located in the body.
The pressurizing mechanism 80 in the embodiment includes the components 81 and 8 described above.
2 and 83 are screwed together. Of course, the present invention is not limited thereto, and the first diaphragm portion 81 and the connecting portion 83 may be integrally formed, and the second diaphragm portion 82 may be screwed and fixed to the connecting portion 83, or the second diaphragm portion 82 And the connecting portion 83 are integrally formed, and the connecting portion 8 is formed.
The first diaphragm portion 81 may be fixedly screwed to the third portion.
Further, the pressurizing mechanism body 80 of this embodiment is formed of a resin having high corrosion resistance and chemical resistance, such as a fluororesin, similarly to the above blocks.

The first diaphragm portion 81 has a thin movable portion 81a which is a diaphragm surface and an outer peripheral portion 81b on the outer peripheral side. The outer peripheral portion 81b is fixed to the inner wall 40a of the first chamber 40. Have been. The second diaphragm portion 82 has a thin movable portion 82a that is a diaphragm surface and an outer peripheral portion 82b on the outer peripheral side. The outer peripheral portion 82b is fixed to the inner wall 50a of the second chamber 50. ing. In this embodiment, as shown, the outer peripheral portion 81b of the first diaphragm portion 81 is sandwiched and fixed between the first outer block 10 and the intermediate block 20, while the outer peripheral portion 81b of the second diaphragm portion 82 is fixed. The outer peripheral portion 82b is sandwiched and fixed between the intermediate block 20 and the second outer block 30. Symbol o3 shown
Are outer peripheral portions 81b, 8 of the respective diaphragm portions 81, 82.
O4 is a sealing member such as an O-ring interposed between 2b and the intermediate block 20, and o4 is a sealing member such as an O-ring interposed between the connecting portion 83 and the intermediate block 20.

The working fluid inflow / outflow section 90 is formed in the intermediate block 20 and is provided in the first chamber 40 or the second chamber 40.
A working fluid that opens to at least one of the chambers 50 and reciprocates the pressurizing mechanism 80, for example, a pressure-controlled gas A that pressurizes or depressurizes each of the diaphragm portions 81 and 82.
And the like flows out and in between the inner wall 40a or 50a of one of the two chambers 40 and 50 and the inner surface 81c or 82c of the diaphragm 81 or 82 disposed in the chamber. A working fluid supply device such as a compressor outside the injector is connected to the working fluid inflow / outflow section 90.

In this embodiment, the working fluid inflow / outflow portion 9
Reference numeral 0 denotes a first working fluid inflow / outflow portion 91 which is opened from the intermediate block 20 to the first chamber 40 and flows the working fluid A between the inner wall 40a of the first chamber 40 and the inner surface 81c of the first diaphragm portion 81. The second block 50 is opened from the intermediate block 20 to the inner wall 5 of the second chamber 50.
0a and a second working fluid inflow / outflow portion 92 through which the working fluid A flows in / out between the inner surface 82c of the second diaphragm portion 82. The second working fluid A is supplied by alternately supplying the working fluid A into both chambers 40 and 50. The pressure mechanism 80 reciprocates. Here, when the working fluid A is supplied to one of the chambers via the first working fluid outflow / inflow portion 91 or the second working fluid outflow / inflow portion 92, the working fluid filled in the chamber from the other chamber is supplied. A
Is discharged to the outside of the injector I via the first working fluid outflow / inflow portion 91 or the second working fluid outflow / inflow portion 92.

The injector I thus configured operates as follows. That is, as shown in FIG. 1, the first chamber 40
The working fluid A is supplied between the inner wall 40a of the second chamber 50 and the inner surface 81c of the first diaphragm portion 81, and the inner wall 50 of the second chamber 50 is supplied through the second working fluid inflow / outflow portion 92.
When the working fluid A that has been filled between a and the inner surface 82c of the second diaphragm portion 82 is discharged, the pressurizing mechanism 80 moves to the first outer block 10 side. As a result, the fluid F to be pressure-filled between the inner wall 40a of the first chamber 40 and the outer surface 81d of the first diaphragm part 81 is discharged from the first discharge part 42, the first discharge check valve 66, At the same time as the liquid is discharged from the outlet 12 through the outer outlet 14, the first outer inlet 1 is discharged from the inlet 11.
3, the second chamber 50 via the connection inflow section 21, the second outside inflow section 32, the second suction check valve 71, and the second suction section 51;
The space between the inner wall 50a and the outer surface 82d of the second diaphragm portion 82 is filled with the fluid F to be pressured and is ready for the next discharge operation.

On the other hand, as shown in FIG. 2, the working fluid A flows between the inner wall 50a of the second chamber 50 and the inner surface 82c of the second diaphragm 82 via the second working fluid inflow / outflow portion 92. When the working fluid A filled between the inner wall 40a of the first chamber 40 and the inner surface 81c of the first diaphragm portion 81 is discharged via the first working fluid inflow / outflow portion 91 and discharged, Pressurizing mechanism 80
Moves to the second outer block 30 side. by this,
Inner wall 50a of second chamber 50 and second diaphragm portion 8
Fluid F filled between the second outer surface 82d
Is the second discharge part 52, the second discharge check valve 76, the second discharge
Outer outflow portion 32, connection outflow portion 22, first outer outflow portion 14
And at the same time, the inner wall of the first chamber 40 is discharged from the inflow port 11 through the first outside inflow section 13, the first suction check valve 61, and the first suction section 41. The space under pressure 40 is filled with the fluid F to be pressured between the outer surface 81d of the first diaphragm portion 81 and the next discharge operation.

In this embodiment, the supply of the working fluid A for reciprocating the pressurizing mechanism 80 to the first chamber 40 or the second chamber 50 and the switching of the discharge of the working fluid A from the chamber are switched. The switching of the working fluid supply side chamber is performed at a predetermined switching cycle by an external switching means (not shown), and the switching cycle can be arbitrarily changed. I have. The switching means includes an arbitrary periodic ON-O from a sequencer, a timer, or the like.
A switching solenoid valve such as a four- or five-way solenoid valve driven based on the FF signal is preferable.

If the switching cycle of the supply and discharge of the working fluid A can be changed as described above, the cycle of the reciprocating motion of the pressurizing mechanism 80, and the reciprocating range of the pressurizing mechanism 80 can be easily changed. be able to. Thereby, the switching cycle is set to be equal to each of the diaphragm portions 81 and 8 of the pressurizing mechanism 80.
2 is set to be shorter than the time to reach the end (stroke end), and each diaphragm 81, 82 of the pressurizing mechanism 80 is set.
Before the end of the pressurizing mechanism 80, the pulsation of the discharge pressure of the fluid F under pressure at the outlet 12 which occurs when the pressurizing mechanism 80 reverses can be reduced (FIG. 6 (A) and (B).

The injector I of this embodiment is:
As described above, since the intermediate block 20 is formed of a transparent body (or a translucent body), the operating state of the pressurizing mechanism 80 can be visually recognized from the outside. Therefore, the pressurizing mechanism 80, in particular, each of the diaphragm portions 81,
Not only can abnormalities such as the breakage of the pressurizing mechanism 82 be detected at an early stage, but also the setting of the reciprocating range of the pressurizing mechanism 80 by determining the reversal position of the pressurizing mechanism 80, that is, the setting of the discharge flow rate is easy. There are advantages that can be done. Further, if the reversing position in the reciprocating motion of the pressurizing mechanism 80 is easily understood by engraving a scale on the intermediate block 20 made of the transparent or translucent body, the setting of the discharge flow rate can be more easily performed. Become. If the intermediate block 20 is not formed of a transparent or translucent body as described above, a detecting means such as a CCD or a photo sensor is provided on the inner walls 40a, 50a of the chambers 40, 50 to provide a pressurizing mechanism. The operating state of 80 may be made visible from the outside.

FIG. 4 shows an example of use of the injector I having the above structure. In this example, the injector I is used as a pressure intensifier for increasing the pressure in a circuit that supplies the pressure-supplied fluid F in the tank T1 to the use point U1 by the pump V.

FIG. 5 shows another example of use of the injector I having the above structure. In this example, the injector I is used as a so-called diaphragm pump for pumping and supplying the fluid F under pressure in the tank T2 to the use point U2. In the illustrated example, an adjustment valve H (see Japanese Patent No. 2671183) is provided between the injector I and the use point U2. In this way, as can be understood from the graph of FIG. 6A showing the relationship between the discharge pressure of the fluid to be pressed and the time, the discharge pressure at the timing y at which the pressurizing mechanism 80 shifts to the reversing operation. By setting the set pressure z of the adjusting valve H lower than the pressure adjustment of the fluid to be pressured,
The fluid F under pressure can be stably supplied to the use point U2 at a constant pressure. That is, pulsation of the discharge pressure can be removed. A symbol t in the drawing indicates a switching cycle of supply and discharge of the working fluid A to each of the chambers.

In FIG. 6, as a reference comparative example, FIG. 6 (B) shows the discharge pressure and time of the fluid to be pressurized when the regulating valve H is not disposed between the injector I and the use point U2 in the embodiment. The graph of the relationship with
(C) A graph showing the relationship between the discharge pressure of the fluid to be pumped and the time when the regulating valve H is not disposed between the injector I and the use point U2 using an injector having a conventional structure instead of the injector I. ,
(D) shows a graph of the relationship between the discharge pressure of the fluid to be pumped and time when the regulating valve H is disposed between the injector I and the use point U2 using an injector having a conventional structure. . (D) As can be seen from the figure, when using an injector having a conventional structure in which the discharge pressure at the timing y when the pressurizing mechanism 80 shifts to the reversing operation is close to 0, the discharge pressure from the injector is equal to or less than the pressure set by the adjustment valve H , It becomes impossible to supply the fluid F under pressure to the use point U2 at a constant pressure, and the pulsation of the discharge pressure remains.

FIG. 7 shows an injector Ix according to another embodiment of the present invention. In the following description and in FIG. 7, the same members as those of the injector I of the embodiment described above are denoted by the same reference numerals, and description thereof will be omitted. The injector Ix of this embodiment is configured such that the pressurizing mechanism 80 is provided only in one of the first chamber 40 and the second chamber 50, in the illustrated example, only in the second chamber 50, as in the invention defined in claim 6. A chamber in which the working fluid A to be reciprocated flows in and out, and in which the working fluid A does not flow in and out, the inner wall 40 of the first chamber 40 in the illustrated example.
The spring S is disposed between the inner surface 81a of the diaphragm 81 and the inner surface 81c of the diaphragm 81 disposed in the chamber. In this case, the first working fluid inflow / outflow portion 91 on the first chamber 40 side where the working fluid A does not flow out / in serves as a respiratory tract.

With this configuration, the spring S
As a result, the pressurizing mechanism 80 is constantly urged in the direction of one outer block, so that the pressurizing mechanism 80 is reciprocated only by supplying and discharging the working fluid A to or from only one of the chambers 40 or 50. Accordingly, the drive control of the pressurizing mechanism 80 becomes extremely simple. When the supply and discharge of the working fluid A is performed only to one of the chambers as described above, the switching means for switching between the supply and the discharge of the working fluid A may be an arbitrary periodic signal from a sequencer, a timer, or the like. A three-way solenoid valve driven based on a simple ON-OFF signal is preferable. Although not shown, the working fluid for reciprocating the pressurizing mechanism into and out of the two chambers flows in and out of the two working fluid inflow / outflow portions, and springs are disposed between the inner walls of the two chambers and the inner surface of the diaphragm portion. It may be provided.

In the above two embodiments, the inlet 11 and the outlet 12 for the fluid F to be pressurized are both formed in the first outer block 10. However, the present invention is not limited to this. 11 is formed on the first outer block 10,
The outlet 12 is formed in the second outer block 30,
The inlet 11 and the inlet 12 are connected to the first outer block 1
0, the intermediate block 20, and the second outer block. In addition, the injector according to the present invention can be implemented by appropriately changing a part of the configuration of the above embodiment without departing from the spirit of the invention.

[0039]

As shown and described above, in the injector according to the present invention, the check valve and the pressurizing mechanism are provided in the body constituted by the first outer block, the intermediate block and the second outer block. Since all the components such as each inflow section and each outflow section are incorporated, the structure of the body is simplified as compared with the conventional one, and it is not necessary to divide the body into many parts, and the injector itself is very difficult. Become compact. In particular, the first suction check valve block including the first outside inflow portion and the first suction check valve and the first outside outflow portion and the first discharge check valve as in the second aspect of the present invention. And a second discharge check valve block including a second outside inflow portion and a second suction check valve, and a second outside check valve block. If the outflow portion and the second discharge check valve block including the second discharge check valve are assembled in the second outer block, respectively, the size of the injector can be further reduced.

According to the third aspect of the present invention, the supply of the working fluid for reciprocating the pressurizing mechanism to the first chamber or the second chamber and the discharge of the working fluid from the chamber are switched externally. If the switching is performed at a predetermined switching cycle by means and the switching cycle can be arbitrarily changed, the reciprocating range of the pressurizing mechanism can be easily changed. As a result, by setting the switching period to be shorter than the time when each diaphragm of the pressurizing mechanism reaches the end, the pressurizing mechanism is inverted before each diaphragm of the pressurizing mechanism reaches the end. Therefore, the pulsation of the discharge pressure generated when the pressurizing mechanism is inverted can be reduced. In addition, the discharge flow rate can be easily changed by changing the switching cycle.

Further, if the intermediate block is formed of a transparent or semi-transparent body made of a transparent vinyl chloride resin or the like so that the operating state of the pressurizing mechanism can be visually recognized from the outside. In addition, it is possible to detect an abnormality such as breakage of the pressurizing mechanism at an early stage, and to set the reciprocating range of the pressurizing mechanism by determining the reversal position of the pressurizing mechanism, that is, setting the discharge flow rate. It will be easier.
In addition, as in the invention of claim 5, the connection inflow portion and the connection outflow portion in the intermediate block made of the transparent vinyl chloride resin or the like are constituted by pipe members, and the portion in contact with the fluid to be pressure-containing including the tube members is provided. If all are formed of a material having high corrosion resistance or high chemical resistance, the injector has high applicability when the fluid to be pressured is ultrapure water or a chemical.

Further, the working fluid for reciprocating the pressurizing mechanism flows into and out of only one of the first chamber and the second chamber in the body, and the working fluid flows out. If a spring is disposed between the inner wall of the chamber that is not inserted and the inner surface of the diaphragm portion disposed in the chamber, the pressurizing mechanism is always urged in the direction of one outer block by the spring. The pressurizing mechanism can be reciprocated simply by supplying and discharging the working fluid only to the hydraulic fluid, thereby greatly simplifying the drive control of the pressurizing mechanism.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a state of discharging a fluid from a first chamber of an injector according to an embodiment of the present invention.

FIG. 2 is a longitudinal sectional view showing a state of discharging a fluid from a second chamber of the injector.

FIG. 3 is a perspective view showing a check valve used in the injector.

FIG. 4 is a schematic view showing an example of use of the injector.

FIG. 5 is a schematic view showing another example of use.

FIG. 6 is a graph for explaining effects in the use example of FIG. 5;

FIG. 7 is a longitudinal sectional view of an injector according to another embodiment.

[Explanation of symbols]

 Reference Signs List 10 first outer block 11 inflow 12 outflow 13 first outer inflow part 14 first outer outflow part 20 intermediate block 21 connection inflow part 22 connection outflow part 30 second outer block 31 second outer inflow part 32 second outer outflow Part 40 First chamber 40a Inner wall of first chamber 41 First suction part 42 First discharge part 50 Second chamber 50a Inner wall of second chamber 51 Second suction part 52 Second discharge part 60 Check valve block for first suction 61 First suction check valve 65 First discharge check valve block 66 First discharge check valve 70 Second suction check valve block 71 Second suction check valve 75 Second discharge check valve Block 76 Second discharge check valve 80 Pressurizing mechanism 81 First diaphragm section 82 Second diaphragm section 83 Connecting section 90 Working fluid inflow / outflow section 91 First working fluid outflow / inflow section 92 First 2 Working fluid inflow / outflow section A Working fluid F Pressurized fluid I, Ix Injector S Spring

 ────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tomoko Shibata 3-11-8 Ueno, Chikusa-ku, Nagoya-shi, Aichi F-term in Advanced Electric Industry Co., Ltd. 3H077 AA02 AA08 BB10 CC02 CC09 CC17 DD09 DD13 EE04 EE36 EE37 FF02 FF03 FF04 FF06 FF12 FF14 4F042 AA06 CB04 CB08

Claims (6)

[Claims] 1. A first outer inflow portion (13) of the fluid to be pressure-fed (F) on one side and a first outer outflow portion (1) of the fluid to be pressured on the other side.
4) a first outer block (10), a connection disposed inside the first outer block and connected to the first outer inlet, and a connection in communication with the first outer outlet. An intermediate block (20) having an outflow portion (22), and a second outer inflow portion (31) disposed outside the intermediate block on the opposite side of the first outer block and communicating with a connection inflow portion of the intermediate block. And a second outer outlet (32) communicating with the connecting outlet of the intermediate block.
An outer block (30), a first suction portion (41) formed by the first outer block and the intermediate block, and communicating with the first outer inflow portion.
And a first discharge portion (42) communicating with the first outside outflow portion.
And a second suction part (51) formed by the intermediate block and the second outer block and communicating with the second outer inflow part.
And a second discharge portion (52) communicating with the second outside outflow portion.
A second chamber (50) having a first suction check valve interposed between the first outer inflow portion and the first suction portion so that the fluid to be pressure-fed flows in the direction of the first suction portion. (61) a first interposed between the first discharge portion and the first outer outflow portion so that the fluid to be pressure-flowed flows in the direction of the first outer outflow portion.
A discharge check valve (66), a second suction check valve interposed between the second outer inflow portion and the second suction portion so that the fluid to be pressure-fed flows in the direction of the second suction portion. (71) a second interposed between the second discharge portion and the second outer outflow portion so that the fluid to be pressure-flowed flows in the direction of the second outer outflow portion.
A discharge check valve (76), a first diaphragm portion (81) having an outer peripheral portion fixed to the inner wall of the first chamber, and a second diaphragm portion (82) having an outer peripheral portion fixed to the inner wall of the second chamber. And a pressurizing mechanism (80) arranged integrally and freely by a connecting portion (83) penetrating the intermediate block; and an opening from the intermediate block to at least one of the first chamber or the second chamber, An injector (I), comprising: a working fluid inflow / outflow portion (90) for allowing a working fluid (A) for reciprocating the pressurizing mechanism to flow into and out of at least one of the first chamber and the second chamber. 2. The first suction check valve block (60) including the first outside inflow portion and the first suction check valve, and the first outside outflow portion and the first discharge. A first discharge check valve block (65) including a check valve is assembled in the first outer block, respectively, and a second suction including the second outer inflow portion and a second suction check valve is provided. Check valve block (70), and a second discharge check valve block (7) including the second outer outflow portion and the second discharge check valve.
5) and the injector respectively assembled in the second outer block. 3. The first chamber or the second chamber for a working fluid for reciprocating the pressurizing mechanism according to claim 1 or 2.
An injector configured such that supply to the chamber and discharge of the working fluid from the chamber are switched at a predetermined switching cycle by an external switching means, and the switching cycle can be arbitrarily changed. 4. The injector according to claim 1, wherein the intermediate block is formed of a transparent or translucent body so that an operation state of the pressurizing mechanism can be visually recognized from the outside. 5. The injector according to claim 4, wherein the connection inflow portion and the connection outflow portion of the intermediate block are constituted by pipe members embedded in the intermediate block. 6. A chamber according to claim 1, wherein the working fluid for reciprocating the pressurizing mechanism flows into and out of only one of the first chamber and the second chamber, and the working fluid does not flow into and out of the chamber. An injector in which a spring (S) is provided between an inner wall and an inner surface of a diaphragm portion provided in the chamber.