JP2001110574A - Electrode for light emitting element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a transparent electrode for use in display element of organic EL wherein resistance component has been decreased while the decrease of the aperture ratio is sustained, and destruction of light emitting films is prevented to enhance reliability. SOLUTION: Grooves are formed by etching and so on the transparent substrate 1. The conductive auxiliary electrodes are formed into the grooves by vapor deposition and so. The transparent conductive material is laminated by vapor deposition and so on the auxiliary electrodes of the transparent substrate to form the electrode for EL element. The process can improve conductivity without reducing the hole opening ratio.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transparent electrode used for a display element, a touch panel and the like.

[0002]

2. Description of the Related Art Conventionally, a transparent electrode used for a display element or a touch panel is formed by laminating a transparent conductive material such as ITO (Sn dope In ₂ O ₃ ) in a thin film on a transparent substrate such as glass or plastic. It was done.

[0003] Transparent electrodes have the characteristic of having high transmittance to visible light, but have the disadvantage that the resistance is about two orders of magnitude higher than that of metal thin-film electrodes. Therefore, when used as an electrode of a display element, there is a disadvantage that the resistance increases as the distance from the signal input terminal increases. For example, in a transmissive liquid crystal display device, transparent electrodes are used for both the anode and the cathode, but the capacitance component of the liquid crystal and the resistance component of the transparent electrode cooperate, and the signal waveform becomes dull or delayed as the distance from the input end increases, resulting in a clear display. Is difficult to obtain. For example, a transparent electrode is used as an anode in a self-luminous organic electroluminescence (hereinafter, referred to as an organic EL) display element, but a current is required for light emission. As the distance increases, the current decreases, which causes a problem of darkening. As a countermeasure, as shown in FIG. 24, a stripe-shaped metal film is deposited on the upper surface of the transparent electrode to reduce the resistance component of the transparent electrode. (JP-A-5-307997)

[0004]

However, as can be seen from FIG. 24, the formation of the metal film causes sharp irregularities in the portion facing the luminescent color material. In the organic EL light emitting element, the luminescent color material is formed by laminating about two to four kinds of organic color material thin films having a thickness of several tens of nanometers. The portion corresponding to the corner of the film is torn or discontinuous, and the thickness of the luminescent color material is thin at the end face. In the case of an organic EL, since an electric field of 10 ⁶ V / cm or more is applied, electric charges are concentrated on the end face of the metal film having a low resistance, the luminescent color material is destroyed, and the anode and the cathode are short-circuited. Become. If the resistance is reduced without changing the aperture ratio, the metal film becomes thicker, so that the irregularities become steeper, and the reliability of the light emitting element decreases. Conversely, if the aperture ratio is not reduced, there is a problem that the resistance component of the electrode does not decrease because the thickness of the metal film is small.

In particular, in the case of a transparent electrode in a delta type color pixel array of a matrix drive type color display, due to the arrangement of color pixels,
The width of the connection portion electrode between the pixels is extremely narrow, and this disadvantage becomes more remarkable.

SUMMARY OF THE INVENTION It is an object of the present invention to improve the reliability and reduce the resistance component of an electrode using a transparent conductive material.

[0007]

In order to solve this problem, in the electrode of the present invention, a conductive auxiliary body made of a conductive material such as a metal film is inscribed in a transparent electrode made of a transparent conductive material or a light emitting color. By circumscribing the surface of the transparent electrode opposite to the surface that is in contact with the material, the surface of the electrode that is in contact with the luminescent color material is made substantially flat, or the conductive auxiliary body is enclosed by the transparent electrode and the transparent substrate. The surface of the transparent electrode that is in contact with the luminescent color material is configured to have a gradual unevenness almost flat.

Thus, an electrode can be obtained which does not destroy the film of the luminescent color material, prevents short-circuiting between the electrodes, improves the reliability of the light emitting element, and minimizes the resistance without reducing the aperture ratio. .

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION According to the first aspect of the present invention, there is provided a transparent substrate, a transparent electrode including a transparent conductive material formed in a predetermined shape on the transparent substrate, and at least a part of the transparent electrode. A light-emitting element electrode having a conductive auxiliary body including a conductive material formed on the transparent substrate as in contact with the light-emitting element, wherein the thickness of the transparent electrode is equal to the thickness of the conductive auxiliary body; Since the size of the light-emitting material is reduced and no mechanical stress is applied to the light-emitting color material, the light-emitting color material film is not broken, and the reliability is improved.

According to a second aspect of the present invention, there is provided the electrode for a light emitting device according to the first aspect, further comprising a second transparent electrode formed so as to cover the transparent electrode and the conductive auxiliary material, wherein the resistance component of the transparent electrode is reduced. In addition, since a voltage is uniformly applied to the luminescent color material through the transparent electrode, the luminescent color material film is not broken, so that the reliability is improved. Further, since the structure is not in contact with the luminescent material, the luminous efficiency is not reduced. .

According to a third aspect of the present invention, there is provided a transparent substrate having a groove having a predetermined shape at a predetermined depth on a surface, a conductive auxiliary body including a conductive material formed so as to fill the groove, and the conductive auxiliary body. An electrode for a light-emitting element having a transparent electrode formed in a predetermined shape on the substrate so as to be in contact with at least a part of the body. The resistance component of the transparent electrode is significantly reduced without lowering the aperture ratio, and the emission color is reduced. Since no mechanical stress is applied to the material, the luminescent color material film is not broken and the reliability is improved, and the luminous efficiency is not reduced due to the structure not in contact with the luminescent material.

According to a fourth aspect of the present invention, a transparent substrate having a groove having a predetermined shape at a predetermined depth on the surface, and filling the groove so as to protrude from the surface of the transparent electrode by a predetermined thickness. A conductive auxiliary body including the formed conductive material, and a transparent electrode formed in a predetermined shape on the substrate so as to be in contact with at least a part of the conductive auxiliary body, the thickness of the transparent electrode and the conductive auxiliary An electrode for a light-emitting element with the same body thickness, which reduces the resistance component of the transparent electrode and does not apply a mechanical stress to the light-emitting color material, so that the light-emitting color material film is not broken and the reliability is improved. Have.

According to a fifth aspect of the present invention, there is provided an electrode for a light emitting device according to the fourth aspect, further comprising a second transparent electrode formed so as to cover the transparent electrode and the conductive auxiliary material. In addition, since a voltage is uniformly applied to the luminescent color material through the transparent electrode, the luminescent color material film is not broken, so that the reliability is improved. Further, since the structure is not in contact with the luminescent material, the luminous efficiency is not reduced. .

According to a sixth aspect of the present invention, a transparent substrate, a transparent electrode including a transparent conductive material formed in a predetermined shape on the transparent substrate, and a conductive material formed on a part of the transparent electrode are provided. A light-emitting element electrode having a conductive auxiliary body including a transparent electrode and a second transparent electrode formed so as to cover a part of the conductive auxiliary body, the resistance component of the transparent electrode being reduced, and the transparent electrode Since the voltage is uniformly applied to the luminescent color material through the luminescent material, the luminescent color material film is not broken, so that the reliability is improved. Further, since the luminescent color material is not in contact with the luminescent material, the luminescent efficiency is not reduced.

According to a seventh aspect of the present invention, there is provided the light emitting element electrode according to the sixth aspect, wherein the surface of the second transparent electrode is flat, the resistance component of the transparent electrode is reduced, and the luminescent color material is passed through the transparent electrode. Since the voltage is uniformly applied to the light emitting material, the light emitting color material film is not broken and the reliability is improved, and the light emitting material is not in contact with the light emitting material.

According to an eighth aspect of the present invention, the transparent electrode and the conductive auxiliary member are formed in a plurality of light emitting portions and a connecting portion formed so as to connect the plurality of light emitting portions. The electrode for a light-emitting element described above has an effect that the resistance component of the electrode is reduced, the surface in contact with the luminescent color material is flat, and stress is not applied, so that reliability is improved.

According to a ninth aspect of the present invention, a transparent electrode and a conductive auxiliary body are formed on a plurality of light emitting portions, and a conductive auxiliary body is formed on a connecting portion formed so as to connect the plurality of light emitting portions. Item 4. The electrode for a light emitting element according to item 1, 3 or 4, wherein the resistance component of the transparent electrode in the pixel portion can be reduced.
Further, since the connecting portion electrode has no transparent electrode, the number of fine structures is reduced, the process is simplified, and the reliability of the electrode is improved.

According to a tenth aspect of the present invention, the transparent electrode, the conductive auxiliary member, and the second transparent electrode are formed at a plurality of light emitting portions and at a connecting portion formed so as to connect the plurality of light emitting portions. Item 7. An electrode for a light-emitting element according to Item 2, 5, 6, or 7, which has an effect of reducing the resistance component of the electrode, having a flat surface in contact with the luminescent color material, and having no stress, thereby improving reliability.

[0019] According to an eleventh aspect of the present invention, a transparent electrode, a conductive auxiliary member and a second transparent electrode are formed on a plurality of light emitting portions, and a conductive auxiliary member is formed on a connecting portion formed so as to connect the plurality of light emitting portions. 6. The light emitting element electrode according to claim 2, wherein a resistance component of the transparent electrode in the pixel portion can be reduced. Further, since the connecting portion electrode has no transparent electrode, the number of fine structures is reduced, the process is simplified, and the reliability of the electrode is improved.

According to a twelfth aspect of the present invention, a transparent electrode, a conductive auxiliary member and a second transparent electrode are formed on a plurality of light emitting portions, and a conductive auxiliary member is formed on a connecting portion formed to connect the plurality of light emitting portions. The light-emitting element electrode according to claim 6, wherein a second transparent electrode is formed, and a resistance component of the transparent electrode in the pixel portion can be reduced. Further, since the connecting portion electrode has no transparent electrode, the number of fine structures is reduced, the process is simplified, and the reliability of the electrode is improved.

According to a thirteenth aspect of the present invention, the connecting portion is covered with an insulator.
2. The electrode for a light-emitting element according to any one of 2), wherein the resistance component of the transparent electrode is reduced and the connection portion is insulated, so that the pattern of the mask plate for attaching the light-emitting material is simplified and Has a function of separating from the other color pixel electrodes, and has the effect of preventing the color material from sneaking onto the other color pixel electrodes during the deposition of the luminescent color material.

According to a fourteenth aspect of the present invention, there is provided the electrode for a light emitting device according to any one of the first to twelfth aspects, wherein the conductive material is a metal material, and has an effect of reducing a resistance component of the transparent electrode.

According to a fifteenth aspect of the present invention, there is provided the electrode for a light emitting device according to any one of the first to twelfth aspects, wherein the conductive material is a semiconductor material. By forming, it has the effect that the resistance component can be controlled.

According to a sixteenth aspect of the present invention, there is provided the electrode for a light emitting device according to any one of the first to twelfth aspects, wherein the conductive material is a transparent conductive material. Has the effect of not lowering.

(Embodiment 1) Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the present embodiment, an organic EL display element will be mainly described as an example. As shown in the cross-sectional view of FIG. 1, the organic EL display element forms a transparent electrode 2 by laminating a transparent conductive material on a transparent substrate glass 1 and further forms a hole transport material, a luminescent material, A light-emitting organic material 3 as an electron transporting material and a metal electrode 4 are laminated and formed by vapor deposition or the like, and light is emitted by applying a voltage from a power supply 5 using the transparent electrode as an anode and the metal electrode as a cathode. Things. Here, ITO is generally used for the transparent electrode 2 because of its high transmittance, high electrical conductivity, and wide bandwidth among the transparent conductive materials, and the specific resistivity of the ITO is about 1 to 1. .4 × 10 ^-4 Ω
Cm, which is about 100 times higher than metal.

FIGS. 2 and 3 show embodiments of the electrode of the present invention in order to reduce the resistance of the electrode.

FIG. 2 is a plan view and a sectional view schematically showing the structure of an electrode according to an embodiment of the present invention, in which only the transparent glass 1 and the transparent electrode 2 shown in FIG. 1 are shown. . In FIG. 2, reference numeral 11 denotes a transparent substrate, and a transparent glass plate, a plastic plate, or the like is used. Reference numeral 12 denotes a transparent electrode made of a transparent conductive material such as ITO, tin oxide, and ATO. Reference numeral 10 denotes a conductive auxiliary body, and a conductive material having electrical conductivity equal to or higher than that of the transparent electrode 12 is used.

FIG. 3 is a cross-sectional view schematically showing an electrode configuration according to one embodiment of the present invention, showing four embodiments due to differences in the electrode configuration, and FIGS. 2 and 3 (a). Is a view showing the same embodiment. FIG. 3A shows the transparent substrate 11.
A trench is dug by an etching process or the like, and the trench is filled with a conductive material by vapor deposition or the like to form the conductive auxiliary body 10. A transparent conductive material is laminated on the transparent substrate 11 by vapor deposition or the like, and then etched. Then, the unnecessary portion is removed to form a transparent electrode 12, and the conductive auxiliary body 10 and the transparent electrode 12 are in close contact with each other at their contact surfaces, and are electrically ohmic contacts. In this example, the conductive auxiliary body 10 is provided on the side of the transparent substrate 11, and by increasing the depth of the groove, the cross-sectional area of the conductive auxiliary body 10 is maintained without reducing the aperture ratio and regardless of the thickness of the transparent electrode 12. And thus the conductivity can be increased. The thickness of the transparent electrode 12 is 0.1
Even if it is about μm, the conductivity can be remarkably increased by setting the depth of the groove to several μm. In addition, since the surface in contact with the luminescent color material (not shown) is flat, the film of the luminescent color material does not break or become discontinuous. A highly reliable light-emitting element can be provided because the film is not destroyed.

FIG. 3B shows a state in which a transparent conductive material is deposited on a transparent substrate 11 by vapor deposition or the like, unnecessary portions are etched to form a transparent electrode 12, and a groove is formed in the transparent electrode 12 by etching or the like. A conductive material is filled in the groove to the level of the upper surface of the transparent electrode by vapor deposition or the like to form a conductive auxiliary body 10.

Further, FIG. 3C shows a structure in which a transparent conductive material is laminated on the entire transparent electrode 12 by vapor deposition or the like after the process of FIG. 3 (b) and 3 (c), the thickness of the conductive auxiliary body 10 can be made substantially the same as that of the transparent electrode 12 of FIG. 3 (b). , The conductivity can be increased. Further, a surface in contact with a light-emitting color material (not shown) is flat, and a highly reliable light-emitting element can be provided.

FIG. 3D shows a conductive auxiliary body 10 formed by depositing a conductive material on a transparent substrate 11 by vapor deposition or the like, and further forming a transparent electrode 12 thereon by applying a transparent conductive material by vapor deposition or the like. In FIG. 3D, as in FIGS. 3B and 3C, the aperture ratio can be increased and the conductivity can be increased as compared with the conventional example. When the material of the transparent electrode 12 is ITO, the thickness of the conductive auxiliary body 10 is set to be equal to or less than that of the transparent electrode 12 because the thickness of the conductive auxiliary body 10 is about 100 nm in order to make the transmittance of visible light about 90%. As a result, unevenness becomes gentle on the surface in contact with the luminescent color material, and even if several types of luminescent color materials having a film thickness of several tens of nm are laminated on the transparent electrode 12, they do not break or become discontinuous. Is substantially uniform, the luminescent color material film is not broken even in a high electric field, and the reliability is remarkably improved as compared with the conventional example.

In FIG. 3, when the lengths of the transparent electrode 12 in the horizontal and vertical directions are L and t, respectively, L = 10
0 μm and t1 = 1 in FIGS. 7A, 7B and 7D.
In FIG. 3C, t2 = 110 nmtp, and the horizontal and vertical lengths of the conductive auxiliary body 10 are S and d, respectively.
In FIG. 10A, S1 = 10 .mu.m and d1 = 2 in FIG.
μm, S2 = 20 μm in FIGS. 3B, 3C and 3D.
When m and d2 are set to 100 nm and the dimensions are as shown in FIG. 24 in the conventional example, the aperture ratio and the conductive magnification are as follows (Table 1).

[0033]

[Table 1]

Thus, it can be seen that both the aperture ratio and the conductive magnification are superior to the conventional example. In addition, using ITO, the resistance value per unit area of a transparent electrode having a thickness of 100 nm is about 20 Ω, and for example, about 10 kΩ at both ends of a 200 μm × 10 cm transparent electrode wire, and about 10 kΩ at both ends of a 1 mm × 5 cm transparent electrode wire. It becomes a resistance of 1 kΩ. Therefore, in the case of a thin transparent electrode line such as an electrode for image display, it is necessary to select this embodiment having a high conductivity and a high aperture ratio. For example, FIG.
In the above example, in the case of the above dimensions, it can be reduced to 50Ω and 5Ω respectively.

In the above description, the example in which the conductive auxiliary body 10 is provided at the center of the transparent electrode 12 has been described. However, it is needless to say that the conductive auxiliary body 10 may be provided at any part of the transparent electrode 12. 3B, 3C, and 3D, the case where the conductive auxiliary body 10 and the transparent substrate 11 are in direct contact has been described, but the transparent electrode 12 is sandwiched. Needless to say, a configuration may be used.

Further, in the above embodiment, FIGS.
It goes without saying that two or more embodiments of (c) and (d) may be used in combination. One embodiment used in combination is shown in FIG. In FIG. 4, the embodiment of (a) is a combination of the embodiments of FIGS. 3 (a) and (b), and the embodiment of (b) is the embodiment of FIGS. 3 (a) and (d). In both of the embodiments (a) and (b), the electric auxiliary body 10 is provided on both the transparent substrate 11 and the transparent electrode 12. By combining, not only the advantages of both embodiments such as high aperture ratio and high conductivity,
In the embodiment of (a), the process can be simplified by simultaneously etching both the transparent electrode 12 and the transparent substrate 11, and in the embodiment of (b), the unevenness of the transparent electrode 12 is reduced by (d) in FIG. ) Can be made even smaller than in the embodiment of FIG.

(Embodiment 2) Hereinafter, a second embodiment of the present invention will be described with reference to the drawings.

An example of application to a passive matrix drive type color organic EL display device using the electrodes in the embodiment shown in FIGS. 2 and 3 will be described.

In order to realize a color display element using an organic EL, it is necessary to use an organic material that emits red (R), green (G), and blue (B), respectively, as a color pixel using RGB as a color pixel. What is necessary is just to adhere on an electrode according to arrangement. As an adhesion method according to this color pixel arrangement, a mask plate for vapor deposition having a thickness of several tens of microns, in which only a pixel portion of the same color is cut out, is brought into close contact with the transparent electrode, and a mask plate is deposited each time a material of each color is vapor-deposited. It is performed by a method of moving precisely by the pixel pitch. Basic color pixel array methods include a stripe type shown in FIG. 5A, a mosaic type shown in FIG. 5B, and a delta type shown in FIG. However, in FIGS. 5 and 9, G and B may be interchanged. As shown in FIG. 7A, the vapor deposition mask plate in the case of the stripe type has a long strip-shaped hollow portion in one row, and the hollow portion is repeated at a three-pixel pitch. In the case of the mosaic type color arrangement shown in FIG. 7B, the cut-out portion of the mask pattern has a configuration in which strips corresponding to one pixel have a step-like shape, and are repeated diagonally at a three-pixel pitch. The electrode configuration in the case of the stripe-type or mosaic-type color pixel arrangement as described above has the same shape, which is shown in FIG. FIG.
(A) is a row direction electrode, corresponding to each vertical row in FIG. 5, and (b) of FIG. 6 is a column direction electrode, which is orthogonal to the row direction electrode and corresponds to each horizontal column in FIG. are doing. In the case of a color display element using an organic EL, since the specific resistance of a transparent electrode is higher than that of a metal, a transparent electrode serving as an anode is generally used as a row direction electrode having a small amount of current and a constant current.

FIG. 8 shows an embodiment in which the row direction electrode of FIG. 6 is realized using the configuration example shown in FIG. 3B among the electrode configuration examples according to one embodiment of the present invention. FIG. 8A,
As can be seen from (b), since the electrode is flat, the luminescent color material is not broken or discontinuous, so that the reliability of the luminescent element is increased. The electrode configuration when each of the electrode configurations of (a), (c), and (d) of FIG. 3 is applied to the row direction electrode of FIG.
As in FIG. 8, the same electrodes are arranged in parallel in the column direction.

Next, the row direction electrode corresponding to the delta type color pixel arrangement of FIG. 9 is shown in FIG.
(B). As in the case described with reference to FIG. 6, a transparent electrode is used as the row direction electrode, and the anode is used as the anode. As can be seen from FIG. 10, the electrode of the portion connecting the same color pixels in the vertical direction, that is, the row direction becomes thin because the area of the color pixel portion needs to be increased. Since the transparent conductive material has a specific resistance about two orders of magnitude higher than that of a metal, the resistance increases as the distance from the signal input terminal increases. In particular, since the thinned pixel connection portion has a large resistance, a conductive auxiliary member is provided. We need to increase the rate. FIG. 11 shows a pattern of a mask plate for implementing the delta color pixel arrangement of FIG. By this mask pattern, the organic color materials of RGB are vapor-deposited for each color, and a metal electrode in the column direction serving as a cathode is vapor-deposited thereon, but before the organic color material is vapor-deposited so that the anode and the cathode do not contact each other. In addition, it is necessary to previously attach an insulator to the electrodes of the connecting portions in the row direction.

Therefore, among the electrode configuration examples according to an embodiment of the present invention, the row direction electrode shown in FIG. 10 is embodied using the electrode configuration example shown in FIG. 3, and an example in which an insulator is attached to the pixel connection portion electrode. This is shown in FIGS.

FIGS. 12A, 12B, and 12C show an example in which the electrode configuration example of FIG. 3A is applied to the row direction electrodes of the delta color pixel arrangement shown in FIG. FIG. 2 shows a plan view when an insulator is attached, and a cross-sectional view taken along lines A-A1 and BB1.

FIGS. 13 (a), 13 (b) and 13 (c) show an example in which the electrode configuration example of FIG. 3 (b) is applied to the row direction electrodes of the delta type color pixel arrangement shown in FIG. FIG. 2 shows a plan view when an insulator is attached, and a cross-sectional view taken along lines A-A1 and BB1.

FIGS. 14 (a), (b) and (c) show an example in which the electrode configuration shown in FIG. 3 (c) is applied to the row direction electrodes of the delta color pixel arrangement shown in FIG. FIG. 2 shows a plan view when an insulator is attached, and a cross-sectional view taken along lines A-A1 and BB1.

FIGS. 15 (a), (b) and (c) show an example in which the electrode configuration example of FIG. 3 (d) is applied to the row direction electrode of the delta type pixel arrangement shown in FIG. FIG. 2 shows a plan view when an insulator is attached, and a cross-sectional view taken along lines A-A1 and BB1. 12 to 15, reference numeral 20 denotes a conductive auxiliary body made of a conductive material, 21 denotes a transparent substrate, 22 denotes a transparent electrode of a color pixel portion made of a transparent conductive material, and 32 denotes a transparent electrode of a pixel connecting portion made of a transparent conductive material. Electrodes 23 are insulators. The color pixel portion electrode 22 is masked with a resist or the like, and an insulator such as silicon dioxide or silicon nitride is connected to a transparent electrode by plasma CVD, high frequency sputtering, laser ablation, or the like. It is what was vapor-deposited. The insulator 23 also serves as a mounting table for the mask plate when the color material is attached. In addition, the elevation of the mounting table also serves to separate the color pixel electrodes from the other color pixel electrodes, so that the color material can be prevented from wrapping around the other color pixel electrodes during the deposition of the luminescent color material. The process for forming the electrodes other than the insulator 23 is the same as that described in the embodiment of FIGS. Also, the electrode making process is shown in FIGS.
This is the same as that described in the embodiment.

(Embodiment 3) Hereinafter, a third embodiment of the present invention will be described with reference to the drawings.

The embodiment of the electrode shown in FIGS. 12 to 15 is an electrode applied to the generally used delta type pixel arrangement shown in FIG. 9, and corresponds to the pixel shape shown in FIG. In this case, the luminescent color material of each color is adhered on the pixel electrode using the mask plate described above, and therefore, it is necessary to attach an insulator to the pixel connecting portion electrode in advance. Despite the benefits of depositing this insulator, the process is relatively time consuming and costly. Therefore, an embodiment in which the process of attaching an insulator is eliminated will be described below.

First, as to the electrodes, FIGS. 18 to 21 show an example in which the row direction electrode of FIG. 10 is realized by using the electrode configuration example shown in FIG. 3 among the electrode configuration examples according to one embodiment of the present invention. Show.

FIGS. 18 (a), (b) and (c) are plan views showing the case where the electrode configuration example of FIG. 3 (a) is applied to the row direction electrode shown in FIG. 10, and A-A1, B-B. FIG. 4 shows a cross-sectional view at B1.

FIGS. 19 (a), (b) and (c) are plan views showing the case where the electrode configuration example of FIG. 3 (b) is applied to the row direction electrodes shown in FIG. 10, and A-A1, B- FIG. 4 shows a cross-sectional view at B1.

FIGS. 20 (a), 20 (b) and 20 (c) are plan views showing the case where the electrode configuration example of FIG. 3 (c) is applied to the row-direction electrode shown in FIG. 10 and FIGS. FIG. 4 shows a cross-sectional view at B1.

FIGS. 21 (a), 21 (b) and 21 (c) are plan views showing the case where the electrode configuration example of FIG. 3 (d) is applied to the row direction electrode shown in FIG. FIG. 4 shows a cross-sectional view at B1.

18 to 21, reference numeral 40 denotes a conductive auxiliary member made of a conductive material, 41 denotes a transparent substrate, 42 denotes a transparent electrode of a color pixel portion made of a transparent conductive material, and 52 denotes a connection made of a transparent conductive material. Part of the transparent electrode. The process of forming the electrodes is the same as that described in the embodiment of FIGS.

Next, a description will be given of an embodiment of a color pixel arrangement diagram for forming a display element without forming an insulator on a pixel connecting portion electrode in the electrode configurations of FIGS. FIG. 16 is a diagram showing an RGB color pixel array according to an embodiment of the present invention. By attaching a coloring material to a pixel portion and a pixel connecting portion, it is not necessary to form an insulator on a pixel connecting portion electrode. In addition, the pixel connection portion emits light similarly to the pixel portion.
As can be seen from FIG. 16, a pixel connection unit that sequentially connects pixels of the same color in the row direction is provided, and each pixel column having a delta arrangement is configured such that pixels located at each vertex of the triangle face each other. One of the two pixel connection portions is selected as a pixel, and the sum of one pixel portion and the selected pixel connection portion is set as a new one pixel, that is, the same direction is set every other row. A color pixel array in which a pixel connection portion is added as described above.

Next, an embodiment of a mask plate pattern based on the color pixel array shown in FIG. 16 will be described.

FIG. 17 shows a pattern diagram of a mask plate according to an embodiment of the present invention, in which a pattern portion formed by connecting a square portion with a long string is cut out by etching or the like. It is. In FIG. 17, a square portion is a pixel electrode,
The stripe-shaped portions between the squares correspond to the pixel connecting portion electrodes, respectively, and when the luminescent color material is attached using the pattern of the mask plate as shown in this figure, the connecting portion electrode also has the organic color material. Is attached. As described above, the conductivity is obtained by using the electrodes shown in FIGS. 18 to 21, which are one embodiment of the present invention, the color pixel array shown in FIG. 16, and the pattern of the mask plate shown in FIG. In addition, the process of depositing an insulator can be eliminated, and the light emitting area of each color pixel can be increased, so that a bright, inexpensive, and highly reliable display element can be realized.

(Embodiment 4) Hereinafter, a fourth embodiment of the present invention will be described with reference to the drawings.

According to the present invention, in the second and third embodiments, the pixel portion electrode is the same as the conventional one, but the pixel connection portion electrode has no transparent electrode.

FIG. 22 shows an embodiment of the present invention, in which the pixel connecting portion electrode in the second embodiment is configured to be covered with an insulator, and the covered connecting portion electrode is masked when a coloring material adheres. 12 to 15, which are examples of the electrode that can also be used as the mounting table, correspond to FIG. 12,
This is an embodiment in the case where the conductive assistant is provided on the transparent substrate side. In FIG. 22, reference numeral 60 denotes a conductive auxiliary body, 61 denotes a transparent substrate side, 62 denotes a pixel portion electrode, and 63 denotes an insulator.

The present invention can be similarly applied to the embodiments shown in FIGS.

In this embodiment, since the resistance component of the electrode can be reduced and the connection portion is insulated, the pattern of the mask plate for adhering the luminescent material is simplified, and at the same time, the elevation of the installation table allows other components to be formed. It also has the function of separating the color pixel electrode from the color pixel electrode, so that it is possible to prevent the color material from sneaking onto another color pixel electrode during vapor deposition of the luminescent color material. Further, the elimination of the transparent electrode from the pixel connection portion electrode reduces the number of fine structures, simplifies the process, and improves the reliability of the electrode.

FIG. 23 is an embodiment of the present invention, and is a drawing of FIGS. 18 to 21 showing an embodiment of an electrode in which the pixel connection electrode in Embodiment 3 has no insulator cover. 1
8, which is an embodiment in the case where the conductive auxiliary body is provided on the transparent substrate side. In FIG. 23, reference numeral 60 denotes a conductive auxiliary body, 61 denotes a transparent substrate side, and 62 denotes a pixel portion electrode.

The present invention can be similarly applied to the embodiments shown in FIGS.

In this embodiment, the resistance component of the electrode can be reduced, and at the same time, by eliminating the transparent electrode from the pixel connecting portion electrode, the fine structure is reduced, the process is simplified, and the reliability of the electrode is improved.

In the above description of each embodiment, the conductive auxiliary body 1
Although the example in which 0 is provided in the center of the transparent electrode 12 has been described, it goes without saying that it may be provided in any part of the transparent electrode 12. Further, in this embodiment, the case where the organic EL display element is used has been described, but it is needless to say that the present invention can be applied to other display elements such as liquid crystal, plasma, and field emission. Also, in the above embodiment, FIG.
Although only the embodiment shown in (b), (c), and (d) has been described, as shown in FIG.
It goes without saying that two or more of the embodiments (b), (c) and (d) may be used in combination. Further, FIG.
In the embodiments of FIGS. 15 to 18 and FIGS. 18 to 23, the case where the present invention is applied to the delta-type color pixel array has been described. No. In addition, a metal is mainly used as the conductive material, but a semiconductor may be used, and a transparent conductive material, which is a kind of semiconductor for increasing the aperture ratio, may be used.

[0067]

As described above, according to the present invention, the resistance component of the transparent electrode can be reduced while suppressing the decrease in the aperture ratio, and the surface in contact with the luminescent color material is flat, and the luminescent color material is subjected to mechanical stress. , The luminescent color material film is not broken and the reliability is improved. And other advantageous effects.

[Brief description of the drawings]

FIG. 1 is a sectional view of an organic EL display element according to a first embodiment of the present invention.

FIG. 2 is a diagram showing an electrode configuration according to the first embodiment;

FIG. 3 is a sectional view showing an electrode configuration according to the first embodiment.

FIG. 4 is a sectional view showing an electrode configuration according to the first embodiment.

FIG. 5 is a diagram showing an RGB color pixel array of a matrix drive type color display element according to the second embodiment;

FIG. 6 is a diagram showing electrodes of a matrix drive type color display element according to the second embodiment.

FIG. 7 is a diagram showing an RGB color pixel array mask plate of a trix drive type color display element according to the second embodiment;

FIG. 8 is a sectional view showing a configuration of a matrix-driven row direction electrode according to the second embodiment;

FIG. 9 is a diagram showing an RGB color pixel array of a matrix drive type color display element according to the second embodiment.

FIG. 10 is a diagram showing electrodes of a matrix drive type color display element according to the second embodiment.

FIG. 11 is a diagram showing an RGB color pixel array mask plate of a matrix drive type color display element according to the second embodiment;

FIG. 12 is a sectional view showing a configuration of a matrix drive type row direction electrode according to the second embodiment;

FIG. 13 is a sectional view showing the configuration of a matrix-driven row direction electrode according to the second embodiment;

FIG. 14 is a sectional view showing a matrix-driven row-direction electrode configuration according to the second embodiment;

FIG. 15 is a sectional view showing the configuration of a matrix-driven row direction electrode according to the second embodiment;

FIG. 16 is a diagram showing an RGB color pixel array of a matrix drive type color display element according to the third embodiment.

FIG. 17 is a diagram showing an RGB color pixel array mask plate of a matrix drive type color display element according to the third embodiment.

FIG. 18 is a sectional view showing the configuration of a matrix-driven row direction electrode according to the third embodiment;

FIG. 19 is a sectional view showing a matrix-driven row-direction electrode configuration according to the third embodiment;

FIG. 20 is a sectional view showing a matrix-driven row-direction electrode configuration according to the third embodiment;

FIG. 21 is a sectional view showing a matrix-driven row-direction electrode configuration according to the third embodiment;

FIG. 22 is a sectional view showing the configuration of a matrix-driven row direction electrode according to the fourth embodiment;

FIG. 23 is a sectional view showing the configuration of a matrix-driven row direction electrode according to the fourth embodiment;

FIG. 24 is a cross-sectional view of a conventional display element.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Transparent glass 2 Transparent electrode 3 Light emitting organic material 4 Metal electrode 10 Conduction auxiliary body 11 Transparent substrate 12 Transparent electrode 20, 40, 60 Conduction auxiliary body 21, 41, 61 Transparent substrate 22, 42, 62 Pixel part transparent electrode 23, 63 Insulator 32,52 Transparent electrode for connecting part

 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Yoshikazu Hori 3-10-1 Higashi-Mita, Tama-ku, Kawasaki-shi, Kanagawa F-term in Matsushita Giken Co., Ltd. (Reference) 3K007 AB04 AB05 AB18 BA06 CA01 CA05 CB00 CB01 DA00 FA01

Claims (16)

[Claims] 1. A transparent substrate, a transparent electrode including a transparent conductive material formed in a predetermined shape on the transparent substrate, and a conductive material formed on the transparent substrate so as to at least partially contact the transparent electrode. An electrode for a light-emitting element, comprising: a conductive auxiliary body comprising: a transparent electrode having a thickness equal to that of the conductive auxiliary body. 2. The light emitting device electrode according to claim 1, further comprising a second transparent electrode formed so as to cover the transparent electrode and the conductive auxiliary material. 3. A transparent substrate having a groove having a predetermined depth and a predetermined shape on the surface, a conductive auxiliary body including a conductive material formed so as to fill the groove, and at least a part of the conductive auxiliary body. An electrode for a light emitting element having a transparent electrode formed in a predetermined shape on the substrate so as to be in contact therewith. 4. A transparent substrate having a groove having a predetermined shape at a predetermined depth on a surface, and a conductive material formed to fill the groove and protrude from the surface of the transparent electrode by a predetermined thickness. And a transparent electrode formed in a predetermined shape on the substrate so as to be in contact with at least a part of the conductive auxiliary body, wherein a thickness of the transparent electrode is equal to a thickness of the conductive auxiliary body. Light emitting element electrode. 5. The light emitting element electrode according to claim 4, further comprising a second transparent electrode formed so as to cover the transparent electrode and the conductive auxiliary material. 6. A transparent substrate, a transparent electrode including a transparent conductive material formed in a predetermined shape on the transparent substrate, and a conductive auxiliary body including a conductive material formed on a part of the transparent electrode.
An electrode for a light-emitting element having a second transparent electrode formed so as to cover the transparent electrode and a part of the conductive auxiliary body. 7. The light emitting element electrode according to claim 6, wherein the surface of the second transparent electrode is flat. 8. The light-emitting element electrode according to claim 1, wherein a plurality of light-emitting portions and a connection portion formed so as to connect the plurality of light-emitting portions are provided with a transparent electrode and a conductive auxiliary body. . 9. A plurality of light emitting portions are provided with a transparent electrode and a conductive auxiliary member, and a connecting portion formed so as to connect the plurality of light emitting portions is formed with a conductive auxiliary member. The electrode for a light-emitting element according to the above. 10. A transparent electrode, a conductive auxiliary member, and a second transparent electrode are formed on a plurality of light emitting portions and a connecting portion formed to connect the plurality of light emitting portions.
The electrode for a light emitting element according to 5, 6, or 7. 11. A transparent electrode, a conductive auxiliary member and a second transparent electrode are formed on a plurality of light emitting portions, and a conductive auxiliary member is formed on a connecting portion formed to connect the plurality of light emitting portions. Item 6. An electrode for a light emitting element according to item 2 or 5. 12. A transparent electrode, a conductive auxiliary member, and a second transparent electrode are formed on a plurality of light emitting portions, and a conductive auxiliary member and a second transparent electrode are formed on connecting portions formed so as to connect the plurality of light emitting portions. The light-emitting element electrode according to claim 6, wherein: 13. The light emitting device electrode according to claim 8, wherein the connecting portion is covered with an insulator. 14. The light emitting element electrode according to claim 1, wherein the conductive material is a metal material. 15. The electrode for a light-emitting element according to claim 1, wherein the conductive material is a semiconductor material. 16. The light-emitting element electrode according to claim 1, wherein the conductive material is a transparent conductive material.