JP2001108541A - Capacitance-type force/torque sensor - Google Patents
Capacitance-type force/torque sensorInfo
- Publication number
- JP2001108541A JP2001108541A JP29042599A JP29042599A JP2001108541A JP 2001108541 A JP2001108541 A JP 2001108541A JP 29042599 A JP29042599 A JP 29042599A JP 29042599 A JP29042599 A JP 29042599A JP 2001108541 A JP2001108541 A JP 2001108541A
- Authority
- JP
- Japan
- Prior art keywords
- capacitance
- force sensor
- movable plate
- substrate
- variable capacitance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Position Input By Displaying (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、静電容量式力覚
センサに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a capacitive force sensor.
【０００２】[0002]
【従来の技術】従来の静電容量式力覚センサとしては、
例えば図14に示す如く、固定電極Ｄｘ＋，Ｄｘ−，Ｄｙ
＋，Ｄｙ−を有した基板90と、操作軸91ａを有し且つ導
電性を有した皿状の金属ダイヤフラム91とをリベット92
により一体化して成るものがある。この力覚センサで
は、前記操作軸91ａを傾倒させると金属ダイヤフラム91
が変形して、前記金属ダイヤフラム91と固定電極Ｄｘ
＋，Ｄｘ−，Ｄｙ＋，Ｄｙ−との間の静電容量が変化す
るようになっている。2. Description of the Related Art As a conventional capacitive force sensor,
For example, as shown in FIG. 14, fixed electrodes Dx +, Dx−, Dy
A rivet 92 connects a substrate 90 having +, Dy- and a dish-shaped metal diaphragm 91 having an operation shaft 91a and having conductivity.
Some are integrated. In this force sensor, when the operation shaft 91a is tilted, the metal diaphragm 91
Is deformed, and the metal diaphragm 91 and the fixed electrode Dx are deformed.
The capacitance between +, Dx-, Dy +, and Dy- changes.
【０００３】しかしながら、従来の静電容量式力覚セン
サではに示すような問題がある。 金属ダイヤフラム91への操作軸91ａとの結合（カシ
メ止め等）や、金属ダイヤフラム91と基板90とのリベッ
ト結合等の面倒な組み立て作業が必要であり、コスト高
となってしまう。 金属ダイヤフラム91と基板90との間に水等が侵入し
やすく、用途によっては防水対策用のシール部材が別途
必要になってしまう。[0003] However, the conventional capacitive force sensor has the following problems. A laborious assembling operation such as connection of the operation shaft 91a to the metal diaphragm 91 (eg, caulking) and rivet connection between the metal diaphragm 91 and the substrate 90 is required, resulting in an increase in cost. Water or the like easily enters between the metal diaphragm 91 and the substrate 90, and a sealing member for waterproofing is separately required depending on the application.
【０００４】[0004]
【発明が解決しようとする課題】そこで、この発明で
は、面倒な組み立て作業が少なく且つ部品点数を増やす
ことなく容易に防水及び防塵対策ができる静電容量式力
覚センサを提供することを課題とする。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a capacitance type force sensor which can be easily waterproofed and dustproofed without a troublesome assembling work and without increasing the number of parts. I do.
【０００５】[0005]
【課題を解決するための手段】（請求項１記載の発明）
この発明の静電容量式力覚センサは、固定電極群が形成
された基板と、前記固定電極群と対向する面に導電性イ
ンク又は導電性塗料を付着又は含侵させて成る可動電極
を有したエラストマー製の可動板とを具備すると共に、
前記固定電極群と可動電極とから複数の可変静電容量部
を構成し、前記可動板に加えた力の大きさと方向に対応
して各可変静電容量部の静電容量が変化するようにして
ある。 （請求項２記載の発明）この発明の静電容量式力覚セン
サは、固定電極群が形成された基板と、前記固定電極群
と対向する面に導電性金属を蒸着させて成る可動電極を
有したエラストマー製の可動板とを具備すると共に、前
記固定電極群と可動電極とから複数の可変静電容量部を
構成し、前記可動板に加えた力の大きさと方向に対応し
て各可変静電容量部の静電容量が変化するようにしてあ
る。 （請求項３記載の発明）この発明の静電容量式力覚セン
サは、請求項１又は２記載の発明に関して、可動板に
は、エラストマーより成る凸状の操作部が一体成形され
ている。 （請求項４記載の発明）この発明の静電容量式力覚セン
サは、請求項１乃至３のいずれかの記載の発明に関し
て、固定電極群は、１８０°間隔で電極が配置されたも
のであり、二つの可変静電容量部の静電容量の変化によ
り操作部に作用したＸ軸方向の力の大きさ及び正負方向
が検出できるようにしてある。 （請求項５記載の発明）この発明の静電容量式力覚セン
サは、請求項１乃至３のいずれかの記載の発明に関し
て、固定電極群は、９０°間隔で電極が配置されたもの
であり、一方の直線上で対向する可変静電容量部の静電
容量の変化により操作部に作用したＸ軸方向の力の大き
さ及び正負方向が検出でき、他方の直線上で対向する可
変静電容量部の静電容量の変化により操作部に作用した
Ｙ軸方向の力の大きさ及び正負方向が検出できるように
してある。 （請求項６記載の発明）この発明の静電容量式力覚セン
サは、請求項５記載の発明に関して、９０°間隔で配置
された四つの電極で囲まれた基板部分に独立する電極を
形成してあり、前記した独立する電極と可動電極とによ
り構成される可変静電容量部の静電容量の変化により操
作部に作用したＺ軸方向の力の大きさ及び正負方向が検
出できるようにしてある。 （請求項７記載の発明）この発明の静電容量式力覚セン
サは、請求項１乃至６のいずれかに記載の発明に関し
て、可動板には操作部を囲む態様で周凸部が形成されて
おり、前記周凸部を取付部材に押圧する態様で可動板を
取り付けたときには、周凸部の弾性復帰力により取付部
材と可動板との間のシール性が確保されるようにしてあ
る。 （請求項８記載の発明）この発明の静電容量式力覚セン
サは、請求項１又は２記載の発明に関して、基板と可動
板とを金属フレームで包み込むと共に前記金属フレーム
の一部を折り曲げて可動板が基板及び金属フレームに対
して圧接する態様で固定してあり、前記可動板の弾性復
帰力によって生じるシール性により可変静電容量部に異
物が外部から侵入しないようにしてある。 （請求項９記載の発明）この発明の静電容量式力覚セン
サは、請求項８記載の発明に関して、金属フレームが導
電性を有するものであり、前記金属フレームを介して可
動電極を特定の電圧に保持するようにしてある。 （請求項10記載の発明）この発明の静電容量式力覚セン
サは、請求項１乃至９記載の発明に関して、基板又は可
動板の対向面のうち少なくともいずれか一方に、固定電
極群と可動電極との間の間隙があまり小さくならないよ
うにする突起を設けてある。 （請求項11記載の発明）この発明の静電容量式力覚セン
サは、請求項５記載の発明に関して、９０°間隔で配置
された四つの電極で囲まれた基板部分に独立する接点用
ランドを形成すると共に、前記接点用ランドと対向する
可動板部分に電気接点となる突起を形成し、前記突起と
接点用ランドとによりスイッチを構成させてある。 （請求項12記載の発明）この発明の静電容量式力覚セン
サは、請求項３記載の発明に関して、操作部に空間部を
設けてある。Means for Solving the Problems (Invention of Claim 1)
The capacitive force sensor according to the present invention has a substrate on which a fixed electrode group is formed, and a movable electrode formed by attaching or impregnating a conductive ink or a conductive paint on a surface facing the fixed electrode group. And a movable plate made of elastomer.
A plurality of variable capacitance units are configured from the fixed electrode group and the movable electrode, and the capacitance of each variable capacitance unit changes according to the magnitude and direction of the force applied to the movable plate. It is. (Invention of Claim 2) A capacitive force sensor according to the present invention comprises a substrate on which a fixed electrode group is formed, and a movable electrode formed by depositing a conductive metal on a surface facing the fixed electrode group. A movable plate made of an elastomer having a plurality of variable capacitance units is configured from the fixed electrode group and the movable electrode, and each of the variable capacitance units is configured to correspond to the magnitude and direction of the force applied to the movable plate. The capacitance of the capacitance section is changed. (Invention of Claim 3) In the capacitance-type force sensor of the present invention, in accordance with the invention of Claim 1 or 2, a convex operating portion made of an elastomer is integrally formed on the movable plate. (Invention according to claim 4) According to the capacitive force sensor of the present invention, in the invention according to any one of claims 1 to 3, the fixed electrode group has electrodes arranged at 180 ° intervals. In addition, the magnitude of the force acting on the operation unit in the X-axis direction and the positive / negative direction can be detected by the change in the capacitance of the two variable capacitance units. (Invention of Claim 5) According to the capacitive force sensor of the present invention, in the invention according to any one of Claims 1 to 3, the fixed electrode group has electrodes arranged at 90 ° intervals. Yes, the magnitude of the force in the X-axis direction and the positive / negative direction applied to the operation unit can be detected based on the change in the capacitance of the variable capacitance unit opposing on one straight line, and The magnitude and the positive / negative direction of the force in the Y-axis direction applied to the operation unit based on the change in the capacitance of the capacitance unit can be detected. (Invention of claim 6) In the capacitive force sensor of the present invention, in accordance with the invention of claim 5, an independent electrode is formed on a substrate portion surrounded by four electrodes arranged at 90 ° intervals. The magnitude of the force in the Z-axis direction and the positive / negative direction applied to the operation unit based on the change in the capacitance of the variable capacitance unit formed by the independent electrode and the movable electrode are detected. It is. (Invention of Claim 7) In the capacitive force sensor of the present invention, in the invention according to any one of Claims 1 to 6, the movable plate is formed with a circumferential convex portion so as to surround the operation portion. When the movable plate is mounted in such a manner as to press the peripheral convex portion against the mounting member, the sealing property between the mounting member and the movable plate is ensured by the elastic restoring force of the peripheral convex portion. (Embodiment 8) According to the capacitive force sensor of the present invention, the substrate and the movable plate are wrapped in a metal frame and a part of the metal frame is bent. The movable plate is fixed so as to be pressed against the substrate and the metal frame, and foreign matter does not enter the variable capacitance portion from the outside due to the sealing property generated by the elastic return force of the movable plate. (Invention according to claim 9) According to the capacitive force sensor of the present invention, in the invention according to claim 8, the metal frame has conductivity, and the movable electrode is specified through the metal frame. The voltage is maintained. According to a tenth aspect of the present invention, in the capacitive force sensor according to the first to ninth aspects, the fixed electrode group and the movable electrode are provided on at least one of the opposing surfaces of the substrate and the movable plate. Protrusions are provided to prevent the gap between the electrodes from becoming too small. (Invention according to claim 11) The capacitive force sensor according to the invention is characterized in that, in accordance with the invention according to claim 5, a contact land independent of a substrate portion surrounded by four electrodes arranged at 90 ° intervals. And a projection serving as an electrical contact is formed on the movable plate portion facing the contact land, and a switch is constituted by the projection and the contact land. (Invention of Claim 12) In the capacitance type force sensor of the present invention, a space portion is provided in the operation section according to the invention of Claim 3.
【０００６】なお、上記発明の静電容量式力覚センサの
機能については、以下の発明の実施の形態の欄で詳述す
る。The function of the capacitance type force sensor of the present invention will be described in detail in the following embodiments of the present invention.
【０００７】[0007]
【発明の実施の形態】以下、この発明の実施の形態を図
面に従って説明する。 （実施形態１）図１は、この発明の実施形態１の静電容
量式力覚センサＳの断面図を示している。Embodiments of the present invention will be described below with reference to the drawings. (Embodiment 1) FIG. 1 is a sectional view of a capacitive force sensor S according to Embodiment 1 of the present invention.
【０００８】この静電容量式力覚センサＳは、基本的に
は図１に示すように、基板１と、前記基板１上に配置さ
れた可動板２とを具備するものであり、図１の二点鎖線
に示される如くケーシングＫの上壁ｋにビスＢにより取
り付けるようにして形成されている。This capacitance type force sensor S basically includes a substrate 1 and a movable plate 2 disposed on the substrate 1 as shown in FIG. As shown by the two-dot chain line in FIG.
【０００９】基板１は、図１や図２に示すように、その
上面に接点用ランドＬ、及びレジスト膜Ｒで覆われた固
定電極Ｄｘ＋，Ｄｘ−，Ｄｙ＋，Ｄｙ−，Ｄｚ＋が形成
されていると共に、下面に静電容量／電圧変換用の電子
部品Ｅが配置されており、また、四隅には上記ビスＢを
挿通するための貫通孔ｈを穿設してある。なお、固定電
極Ｄｘ＋，Ｄｘ−，Ｄｙ＋，Ｄｙ−，Ｄｚ＋をレジスト
膜Ｒで覆ってあるのは、後述する導電性インク層21と電
気的に接触するようなことがないようにするためであ
る。As shown in FIGS. 1 and 2, a contact land L and fixed electrodes Dx +, Dx-, Dy +, Dy-, Dz + covered with a resist film R are formed on the upper surface of the substrate 1. At the same time, an electronic component E for capacitance / voltage conversion is arranged on the lower surface, and through holes h for inserting the screws B are formed at four corners. The reason why the fixed electrodes Dx +, Dx-, Dy +, Dy-, and Dz + are covered with the resist film R is to prevent electrical contact with the conductive ink layer 21 described later. .
【００１０】可動板２は、図１に示すように、エラスト
マー部20とこれの下面側にシルク印刷した導電性インク
層21とから構成されている。前記エラストマー部20の材
料は常温付近で大きなゴム弾性を示す高分子物質であれ
ばよく、例えば、架橋した天然ゴムや合成ゴム、熱可塑
性ウレタンゴム、スパンデックスやポリカーボネート弾
性樹脂、スポンジゴムなどが採用できる。また、この実
施形態では導電性インク層21をエラストマー部20の下面
に印刷形成してあるが、その他、エラストマー部20の下
面に、導電性塗料を印刷して形成したものや、導電性金
属を蒸着したものとしてもよい。As shown in FIG. 1, the movable plate 2 includes an elastomer portion 20 and a conductive ink layer 21 silk-printed on the lower surface of the elastomer portion. The material of the elastomer section 20 may be a polymer substance exhibiting a large rubber elasticity at around normal temperature, for example, a crosslinked natural rubber or a synthetic rubber, a thermoplastic urethane rubber, a spandex, a polycarbonate elastic resin, a sponge rubber, etc. . Further, in this embodiment, the conductive ink layer 21 is formed by printing on the lower surface of the elastomer portion 20, but in addition, the conductive ink layer 21 may be formed by printing a conductive paint on the lower surface of the elastomer portion 20, or a conductive metal may be formed. It may be deposited.
【００１１】前記エラストマー部20は、図１に示すよう
に、その上面に短軸状の操作部20ａを立設してあり、外
周部には上記した上壁ｋとの圧接によりシール性を発揮
する周凸部20ｂを設けてあると共に前記操作部20ａと周
凸部20ｂとの間を真円状のダイヤフラム部20ｃとしてあ
る。他方、導電性インク層21は、図１に示すように、そ
の下面に上記固定電極Ｄｘ＋，Ｄｘ−，Ｄｙ＋，Ｄｙ
−，Ｄｚ＋が入る程度の大きさの平面視円形状の凹み部
21ａを設けてある。As shown in FIG. 1, the elastomer portion 20 has a short-axis operating portion 20a erected on its upper surface, and its outer peripheral portion exhibits sealing properties by being pressed against the upper wall k. A circular projection 20b is provided between the operation portion 20a and the peripheral projection 20b. On the other hand, as shown in FIG. 1, the conductive ink layer 21 has the fixed electrodes Dx +, Dx−, Dy +, Dy on its lower surface.
-, Dz +, a concave portion of a circular shape in a size enough to enter.
21a is provided.
【００１２】なお、上記可動板２は操作部20ａに力を加
えるとダイヤフラム部20ｃに応力が集中して変形する起
歪体を形成しており、上記導電性インク層21における固
定電極と対向する部分は、後述するように固定電極Ｄｘ
＋，Ｄｘ−，Ｄｙ＋，Ｄｙ−，Ｄｚ＋との関係で可変静
電容量部Ｃｘ＋，Ｃｘ−，Ｃｙ＋，Ｃｙ−，Ｃｚ＋を構
成する可動電極Ｄとして機能する。The movable plate 2 forms a strain-generating body which is deformed by applying a stress to the diaphragm portion 20c when a force is applied to the operation portion 20a. The movable plate 2 faces the fixed electrode in the conductive ink layer 21. The part is a fixed electrode Dx as described later.
+, Dx-, Dy +, Dy-, and Dz +, and functions as a movable electrode D that constitutes the variable capacitance units Cx +, Cx-, Cy +, Cy-, and Cz +.
【００１３】ここで、この静電容量式力覚センサＳは、
図１に示すケーシングＫへの取り付け状態では以下に示
す機能が発揮されている。 周凸部20ｂが上壁ｋからの押圧力により弾性変形し
て、導電性インク層21と接点用ランドＬとが圧接状態と
なり、可変静電容量部Ｃｘ＋，Ｃｘ−，Ｃｙ＋，Ｃｙ
−，Ｃｚ＋への液体やゴミの侵入が阻止（シール性が発
揮）され、他方、上壁ｋの下面と周凸部20ｂとが圧接状
態となり、上壁ｋに形成された孔Ｈからの液体やゴミの
侵入が阻止される。つまり、このセンサＳの構成を採用
した場合、板状シート部材を特別に設けなくとも各所の
シール性が確保できる。 上記した導電性インク層21と接点用ランドＬとの接触
により可動板２の導電性インク層21全体がＧＮＤ電位と
なる。よって、接点用ランドＬと固定電極Ｄｘ＋，Ｄｘ
−，Ｄｙ＋，Ｄｙ−，Ｄｚ＋との間に電位差を設けるこ
とにより上記した可変静電容量部Ｃｘ＋，Ｃｘ−，Ｃｙ
＋，Ｃｙ−，Ｃｚ＋を発生させることができる。 なお、このセンサＳの構成を採用した場合、従来の技
術の欄で記載したような面倒な組み立て作業がない。Here, the capacitance type force sensor S
In the state of attachment to the casing K shown in FIG. 1, the following functions are exhibited. The peripheral convex portion 20b is elastically deformed by the pressing force from the upper wall k, and the conductive ink layer 21 and the contact land L are brought into pressure contact with each other, and the variable capacitance portions Cx +, Cx-, Cy +, Cy are formed.
− And Cz + are prevented from entering the liquid or dust (the sealing property is exhibited), while the lower surface of the upper wall k and the peripheral convex portion 20b are brought into pressure contact with each other, and the liquid or dust from the hole H formed in the upper wall k is pressed. Is prevented. In other words, when the configuration of the sensor S is employed, the sealing properties at various places can be ensured without specially providing a plate-shaped sheet member. Due to the contact between the conductive ink layer 21 and the contact land L, the entire conductive ink layer 21 of the movable plate 2 has the GND potential. Therefore, the contact land L and the fixed electrodes Dx +, Dx
-, Dy +, Dy-, and Dz + to provide a potential difference between the variable capacitance units Cx +, Cx-, and Cy.
+, Cy- and Cz + can be generated. When the configuration of the sensor S is adopted, there is no troublesome assembling work as described in the section of the related art.
【００１４】この静電容量式力覚センサＳは上記のよう
な構成であるから、操作部20ａを操作すると以下に示す
ように機能する。Since the capacitance type force sensor S has the above-described configuration, it operates as follows when the operation section 20a is operated.
【００１５】先ず、図３に示すように、操作部20ａにＸ
軸方向の力Ｆｘ又はモーメントＭｘを加えると、可動電
極Ｄと固定電極Ｄｘ＋との間のギャップが小さくなり、
可変静電容量部Ｃｘ＋の静電容量が大きくなる。他方、
可動電極Ｄと固定電極Ｄｘ−との間のギャップは変化し
ないか又は大きくなり、可変静電容量部Ｃｘ＋の静電容
量は変化しないか又は小さくなる。このことは対称性に
よりＹ軸方向の力Ｆｙ又はモーメントＭｙを加えた場合
も固定電極Ｄｙ＋，Ｄｙ−について同様のことが言え
る。つまり、ＸＹ平面では、加える力の大きさと方向に
応じて可動電極Ｄを構成する導電性インク層21が変形
し、それに対応して可変静電容量部Ｃｘ＋，Ｃｘ−，Ｃ
ｙ＋，Ｃｙ−，Ｃｚ＋の静電容量が変化する。なお、上
記した操作部20ａへの力又はモーメントが無くなると、
元の状態に復帰する。First, as shown in FIG. 3, an X
When an axial force Fx or a moment Mx is applied, the gap between the movable electrode D and the fixed electrode Dx + becomes smaller,
The capacitance of the variable capacitance unit Cx + increases. On the other hand,
The gap between the movable electrode D and the fixed electrode Dx− does not change or increases, and the capacitance of the variable capacitance unit Cx + does not change or decreases. The same can be said for the fixed electrodes Dy + and Dy- even when a force Fy or a moment My in the Y-axis direction is applied due to symmetry. That is, in the XY plane, the conductive ink layer 21 forming the movable electrode D is deformed according to the magnitude and direction of the applied force, and the variable capacitance portions Cx +, Cx−, C
The capacitance of y +, Cy-, Cz + changes. When the above-mentioned force or moment to the operation unit 20a disappears,
Return to the original state.
【００１６】次に、図４に示すように、操作部20ａにＺ
軸方向の力Ｆｚを加えると、可動電極Ｄと固定電極Ｄｚ
＋との間のギャップが小さくなり、可変静電容量部Ｃｚ
＋の静電容量は大きくなる。また、可動電極Ｄと固定電
極Ｄｘ＋，Ｄｘ−，Ｄｙ＋，Ｄｙ−，Ｄｚ＋との間のギ
ャップは均等に小さくなり可変静電容量部Ｃｘ＋，Ｃｘ
−，Ｃｙ＋，Ｃｙ−の静電容量はほぼ等しく大きくな
る。Next, as shown in FIG.
When an axial force Fz is applied, the movable electrode D and the fixed electrode Dz
+ Becomes smaller, and the variable capacitance portion Cz
The capacitance of + increases. Further, the gaps between the movable electrode D and the fixed electrodes Dx +, Dx-, Dy +, Dy-, Dz + are uniformly reduced, and the variable capacitance portions Cx +, Cx
The capacitances of −, Cy + and Cy− are almost equal and increase.
【００１７】以上のことから、可変静電容量部Ｃｘ＋，
Ｃｘ−，Ｃｙ＋，Ｃｙ−，Ｃｚ＋の静電容量は三次空間
に加える力の大きさに対応して変化することが判った。
したがって、図５に示すような回路を構成すれば、操作
部20ａに加える力の大きさと方向を、Ｘ，Ｙ，Ｚ軸方向
の成分の電圧変化として検出することができる。なお、
図５に示した回路にかえて図６に示した回路（Ｙ及びＺ
軸の回路は省略している）を採用しても同様の効果を得
ることができる。図６中、Ｖｘ1 ，Ｖｘ2 は周期的に変
化するものとする。 （実施形態２）図７は、この発明の実施形態２の静電容
量式力覚センサＳの断面図を示しており、図８は前記静
電容量式力覚センサＳの外観斜視図を示している。From the above, the variable capacitance units Cx +, Cx +,
It has been found that the capacitance of Cx−, Cy +, Cy−, Cz + changes according to the magnitude of the force applied to the tertiary space.
Therefore, if the circuit as shown in FIG. 5 is configured, the magnitude and direction of the force applied to the operation unit 20a can be detected as voltage changes in the X, Y, and Z axis directions. In addition,
Instead of the circuit shown in FIG. 5, the circuit (Y and Z) shown in FIG.
The same effect can be obtained even if the axis circuit is omitted). In FIG. 6, Vx 1 and Vx 2 change periodically. (Embodiment 2) FIG. 7 is a sectional view of a capacitive force sensor S according to Embodiment 2 of the present invention, and FIG. 8 is an external perspective view of the capacitive force sensor S. ing.
【００１８】この実施形態では単独での組み立てを考慮
しており、静電容量式力覚センサＳは、図７や図８に示
すように、基板１と可動電極板２とを金属フレームＦ内
に収容すると共に、前記金属フレームＦにおける上壁ｆ
１と折曲片ｆ２とにより基板１と可動電極板２とを積層
した状態で挟圧保持したものである。したがって、上記
実施形態１と同様にこの可変静電容量部Ｃｘ＋，Ｃｘ
−，Ｃｙ＋，Ｃｙ−，Ｃｚ＋への液体やゴミの侵入が阻
止（シール性が発揮）され、また、導電性インク層21と
接点用ランドＬとの接触により可動板２の導電性インク
層21全体がＧＮＤ電位となっている。ここで、図７や図
８に示した符号ｆ３はハンダ付きリード端子であり、こ
れを介して接点用ランドＬと固定電極Ｄｘ＋，Ｄｘ−，
Ｄｙ＋，Ｄｙ−，Ｄｚ＋との間に電位差が付与される。In this embodiment, independent assembly is taken into consideration, and the capacitive force sensor S includes a substrate 1 and a movable electrode plate 2 in a metal frame F, as shown in FIGS. And the upper wall f of the metal frame F
In this state, the substrate 1 and the movable electrode plate 2 are sandwiched and held in a state of being laminated by the first and the bent pieces f2. Therefore, similarly to the first embodiment, the variable capacitance units Cx +, Cx
−, Cy +, Cy−, and Cz + are prevented from entering a liquid or dust (the sealing property is exhibited), and the conductive ink layer 21 of the movable plate 2 is brought into contact with the conductive ink layer 21 and the contact land L. The whole is at the GND potential. Here, reference symbol f3 shown in FIGS. 7 and 8 is a lead terminal with solder, through which the contact land L and the fixed electrodes Dx +, Dx-,.
A potential difference is applied between Dy +, Dy-, and Dz +.
【００１９】また、導電性インク層21をＧＮＤ（グラン
ド）電位にする手段として上記実施形態において接点用
ランドＬを設けることなく、図９に示す如く、導電性イ
ンク層21を金属フレームＦと接触させ、前記金属フレー
ムＦのリード端子ｆ３をＧＮＤに接続するようにしても
よい。 （実施形態３）この実施形態３の静電容量式力覚センサ
Ｓは、図10に示すように、基板１にレジスト膜Ｒで覆わ
れた固定電極Ｄｘ＋，Ｄｘ−，Ｄｙ＋，Ｄｙ−のみを配
設し、これら固定電極Ｄｘ＋，Ｄｘ−，Ｄｙ＋，Ｄｙ−
で囲まれる部分と対向する可動板２部分に下方に突出す
る突起21ｄ（導電性インク層21により覆われている）を
設けて構成してある。このセンサＳでは上記突起21ｄの
下端を基板１側に接触させてあり、突起21ｄがテコの支
点の如く機能するようにしてある。したがって、この構
造のセンサＳをジョイスティックとして使用した場合、
操作性が安定するという効果がある。 （実施形態４）この実施形態４の静電容量式力覚センサ
Ｓは、図11に示すように、レジスト膜Ｒで覆われた固定
電極Ｄｘ＋，Ｄｘ−，Ｄｙ＋，Ｄｙ−で囲まれた基板部
分に独立する接点用ランドＬ１（レジスト膜Ｒ無し）を
形成すると共に、前記接点用ランドＬ１と対向する可動
板２部分に電気接点となる突起21ｅ（導電性インク層21
により覆われている）を形成してあり、前記突起21ｅと
接点用ランドＬ１とによりスイッチを構成させたもので
ある。 （実施形態５）この実施形態４の静電容量式力覚センサ
Ｓは、図12や図13に示すように、操作感を向上させるた
めに操作部20ａの内部に空間部ｔ（中空）とすることが
できる。 （その他の実施形態）上記実施形態１〜５に示された静
電容量式力覚センサＳに関し、操作性を向上させるため
に操作部20ａの先端を凸又は凹にしても良い。As a means for setting the conductive ink layer 21 to a GND (ground) potential, the conductive ink layer 21 is brought into contact with the metal frame F as shown in FIG. Then, the lead terminal f3 of the metal frame F may be connected to GND. (Embodiment 3) As shown in FIG. 10, a capacitance type force sensor S of Embodiment 3 includes only fixed electrodes Dx +, Dx-, Dy +, and Dy- covered on a substrate 1 with a resist film R. These fixed electrodes Dx +, Dx-, Dy +, Dy-
The movable plate 2 is provided with a projection 21d (covered by the conductive ink layer 21) protruding downward on a portion of the movable plate 2 opposed to the portion surrounded by. In this sensor S, the lower end of the projection 21d is brought into contact with the substrate 1, so that the projection 21d functions as a fulcrum of a lever. Therefore, when the sensor S having this structure is used as a joystick,
There is an effect that operability is stabilized. (Embodiment 4) As shown in FIG. 11, a capacitance type force sensor S of Embodiment 4 has a substrate surrounded by fixed electrodes Dx +, Dx-, Dy +, Dy- covered with a resist film R. Independent contact lands L1 (without the resist film R) are formed on the portions of the movable plate 2 facing the contact lands L1.
, And a switch is constituted by the protrusion 21e and the contact land L1. (Embodiment 5) As shown in FIGS. 12 and 13, a capacitance type force sensor S of Embodiment 4 has a space t (hollow) inside an operation section 20a in order to improve the operation feeling. can do. (Other Embodiments) Regarding the capacitance type force sensor S shown in the first to fifth embodiments, the tip of the operation section 20a may be convex or concave in order to improve operability.
【００２０】手で操作する力以外の力を測定する場合
は、用途に合わせて操作部の形状を変更しても良い。例
えば操作部の先端をベアリング等の取り付けが可能な形
状にし、糸の張力を測定する用途にも供することができ
る。When measuring a force other than the force operated by hand, the shape of the operation unit may be changed according to the application. For example, the tip of the operation unit can be formed into a shape that allows attachment of a bearing or the like, and can be used for measuring the tension of the yarn.
【００２１】[0021]
【発明の効果】この発明は上記構成を有するものである
から以下の効果を奏する。Since the present invention has the above configuration, the following effects are obtained.
【００２２】発明の実施の形態段の欄の説明から明らか
なように、面倒な組み立て作業が少なく且つ部品点数を
増やすことなく容易に防水及び防塵対策ができる静電容
量式力覚センサを提供できた。As is clear from the description of the embodiment, it is possible to provide a capacitance type force sensor which can be easily waterproofed and dustproofed with less troublesome assembling work and without increasing the number of parts. Was.
【図１】この発明の実施形態１の静電容量式力覚センサ
の組み立て断面図。FIG. 1 is an assembled sectional view of a capacitive force sensor according to Embodiment 1 of the present invention.
【図２】前記力覚センサの基板及び固定電極の平面図。FIG. 2 is a plan view of a substrate and a fixed electrode of the force sensor.
【図３】前記力覚センサの操作部にＸ軸方向の力又はモ
ーメントが生じたときの断面図。FIG. 3 is a cross-sectional view when a force or a moment in the X-axis direction is generated in an operation unit of the force sensor.
【図４】前記力覚センサの操作部にＺ軸方向の力が生じ
たときの断面図。FIG. 4 is a cross-sectional view when a force in the Z-axis direction is generated in an operation unit of the force sensor.
【図５】前記力覚センサに採用される回路図。FIG. 5 is a circuit diagram employed in the force sensor.
【図６】前記力覚センサに採用される他の実施形態の回
路図。FIG. 6 is a circuit diagram of another embodiment employed in the force sensor.
【図７】この発明の実施形態２の静電容量式力覚センサ
の断面図。FIG. 7 is a sectional view of a capacitive force sensor according to Embodiment 2 of the present invention.
【図８】この発明の実施形態２の静電容量式力覚センサ
の外観斜視図。FIG. 8 is an external perspective view of a capacitive force sensor according to Embodiment 2 of the present invention.
【図９】前記発明の実施形態２の静電容量式力覚センサ
に関連する力覚センサの断面図。FIG. 9 is a cross-sectional view of a force sensor related to the capacitive force sensor according to the second embodiment of the invention.
【図10】この発明の実施形態３の静電容量式力覚センサ
の断面図。FIG. 10 is a sectional view of a capacitive force sensor according to Embodiment 3 of the present invention.
【図11】この発明の実施形態４の静電容量式力覚センサ
の断面図。FIG. 11 is a sectional view of a capacitive force sensor according to Embodiment 4 of the present invention.
【図12】この発明の実施形態５の静電容量式力覚センサ
の断面図。FIG. 12 is a sectional view of a capacitive force sensor according to Embodiment 5 of the present invention.
【図13】この発明の実施形態５の静電容量式力覚センサ
に関連する力覚センサの断面図。FIG. 13 is a cross-sectional view of a force sensor related to a capacitive force sensor according to Embodiment 5 of the present invention.
【図14】先行技術の静電容量式力覚センサの断面図。FIG. 14 is a cross-sectional view of a prior art capacitive force sensor.
Ｓ 静電容量式力覚センサ Ｄ 可動電極板 Ｄｘ＋ 固定電極 Ｄｘ− 固定電極 Ｄｙ＋ 固定電極 Ｄｙ− 固定電極 Ｄｚ＋ 固定電極 Ｃｘ＋ 可変静電容量部 Ｃｘ− 可変静電容量部 Ｃｙ＋ 可変静電容量部 Ｃｙ− 可変静電容量部 Ｃｚ＋ 可変静電容量部 ｔ 空間部 Ｆ 金属フレーム １ 基板 ２ 可動板 20 エラストマー部 20ａ 操作部 20ｂ 周凸部 21 導電性インク層 21ｄ 突起 21ｅ 突起 S Capacitive force sensor D Movable electrode plate Dx + Fixed electrode Dx- Fixed electrode Dy + Fixed electrode Dy- Fixed electrode Dz + Fixed electrode Cx + Variable capacitance part Cx- Variable capacitance part Cy + Variable capacitance part Cy- Variable capacitance section Cz + Variable capacitance section t Space section F Metal frame 1 Substrate 2 Movable plate 20 Elastomer section 20a Operation section 20b Circumferential projection 21 Conductive ink layer 21d Projection 21e Projection
───────────────────────────────────────────────────── フロントページの続き (72)発明者 岡田 和廣 埼玉県大宮市桜木町４−244−１ 都築ビ ル４階 Ｆターム(参考） 2F051 AA10 AB06 AC01 DA03 DB03 ────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Kazuhiro Okada 4-24-1 Sakuragicho, Omiya-shi, Saitama F-term (reference) 2F051 AA10 AB06 AC01 DA03 DB03
Claims (12)
定電極群と対向する面に導電性インク又は導電性塗料を
付着又は含侵させて成る可動電極を有したエラストマー
製の可動板とを具備すると共に、前記固定電極群と可動
電極とから複数の可変静電容量部を構成し、前記可動板
に加えた力の大きさと方向に対応して各可変静電容量部
の静電容量が変化するようにしてあることを特徴とする
静電容量式力覚センサ。A substrate having a fixed electrode group formed thereon; and a movable plate made of an elastomer having a movable electrode formed by attaching or impregnating a conductive ink or a conductive paint on a surface facing the fixed electrode group. And comprising a plurality of variable capacitance sections from the fixed electrode group and the movable electrode, and the capacitance of each variable capacitance section corresponding to the magnitude and direction of the force applied to the movable plate. The capacitance-type force sensor is characterized in that the force is changed.
定電極群と対向する面に導電性金属を蒸着させて成る可
動電極を有したエラストマー製の可動板とを具備すると
共に、前記固定電極群と可動電極とから複数の可変静電
容量部を構成し、前記可動板に加えた力の大きさと方向
に対応して各可変静電容量部の静電容量が変化するよう
にしてあることを特徴とする静電容量式力覚センサ。2. A fixed substrate comprising: a substrate on which a fixed electrode group is formed; and an elastomer movable plate having a movable electrode formed by depositing a conductive metal on a surface facing the fixed electrode group. A plurality of variable capacitance units are configured from the electrode group and the movable electrode, and the capacitance of each variable capacitance unit changes according to the magnitude and direction of the force applied to the movable plate. A capacitance type force sensor.
の操作部が一体成形されていることを特徴とする請求項
１又は２記載の静電容量式力覚センサ。3. The capacitance type force sensor according to claim 1, wherein a convex operation portion made of an elastomer is integrally formed on the movable plate.
置されたものであり、二つの可変静電容量部の静電容量
の変化により操作部に作用したＸ軸方向の力の大きさ及
び正負方向が検出できるようにしてあることを特徴とす
る請求項１乃至３のいずれかに記載の静電容量式力覚セ
ンサ。4. A fixed electrode group in which electrodes are arranged at an interval of 180 °, and the magnitude of a force in the X-axis direction applied to the operation unit due to a change in capacitance of two variable capacitance units. 4. A capacitance type force sensor according to claim 1, wherein a positive and negative direction can be detected.
されたものであり、一方の直線上で対向する可変静電容
量部の静電容量の変化により操作部に作用したＸ軸方向
の力の大きさ及び正負方向が検出でき、他方の直線上で
対向する可変静電容量部の静電容量の変化により操作部
に作用したＹ軸方向の力の大きさ及び正負方向が検出で
きるようにしてあることを特徴とする請求項１乃至３の
いずれかに記載の静電容量式力覚センサ。5. A fixed electrode group in which electrodes are arranged at intervals of 90 °, and an X-axis direction acting on an operation unit due to a change in capacitance of a variable capacitance unit opposed on one straight line. The magnitude and the positive / negative direction of the force can be detected, and the magnitude and the positive / negative direction of the force acting on the operation unit in the Y-axis direction can be detected by the change in the capacitance of the variable capacitance unit facing the other straight line The capacitance type force sensor according to any one of claims 1 to 3, wherein:
まれた基板部分に独立する電極を形成してあり、前記し
た独立する電極と可動電極とにより構成される可変静電
容量部の静電容量の変化により操作部に作用したＺ軸方
向の力の大きさ及び正負方向が検出できるようにしてあ
ることを特徴とする請求項５記載の静電容量式力覚セン
サ。6. An independent electrode is formed on a substrate portion surrounded by four electrodes arranged at 90 ° intervals, and a variable capacitance portion constituted by the independent electrode and the movable electrode is provided. 6. The capacitance-type force sensor according to claim 5, wherein the magnitude and the positive / negative direction of the force acting on the operation unit in the Z-axis direction due to the change in the capacitance can be detected.
形成されており、前記周凸部を取付部材に押圧する態様
で可動板を取り付けたときには、周凸部の弾性復帰力に
より取付部材と可動板との間のシール性が確保されるよ
うにしてあることを特徴とする請求項１乃至６のいずれ
かに記載の静電容量式力覚センサ。7. A movable plate is provided with a peripheral convex portion surrounding the operation portion, and when the movable plate is attached by pressing the peripheral convex portion against the attaching member, the mounting member and the movable plate are elastically restored by the peripheral convex portion. The capacitive force sensor according to any one of claims 1 to 6, wherein a sealing property between the sensor and the sensor is ensured.
むと共に前記金属フレームの一部を折り曲げて可動板が
基板及び金属フレームに対して圧接する態様で固定して
あり、前記可動板の弾性復帰力によって生じるシール性
により可変静電容量部に異物が外部から侵入しないよう
にしてあることを特徴とする請求項１又は２記載の静電
容量式力覚センサ。8. A substrate and a movable plate are wrapped in a metal frame, and a part of the metal frame is bent so that the movable plate is fixedly pressed against the substrate and the metal frame. 3. The capacitance type force sensor according to claim 1, wherein a foreign matter does not enter the variable capacitance portion from the outside by a sealing property generated by a force.
り、前記金属フレームを介して可動電極を特定の電圧に
保持するようにしてあることを特徴とする請求項８記載
の静電容量式力覚センサ。9. The capacitance type force according to claim 8, wherein the metal frame has conductivity, and the movable electrode is held at a specific voltage via the metal frame. Sense sensor.
もいずれか一方に、固定電極群と可動電極との間の間隙
があまり小さくならないようにするための突起を設けて
あることを特徴とする請求項１乃至９のいずれかに記載
の静電容量式力覚センサ。10. A projection for preventing a gap between a fixed electrode group and a movable electrode from becoming too small on at least one of a substrate and a facing surface of the movable plate. A capacitive force sensor according to claim 1.
まれた基板部分に独立する接点用ランドを形成すると共
に、前記接点用ランドと対向する可動板部分に電気接点
となる突起を形成し、前記突起と接点用ランドとにより
スイッチを構成させてあることを特徴とする請求項５記
載の静電容量式力覚センサ。11. An independent contact land is formed on a substrate portion surrounded by four electrodes arranged at 90 ° intervals, and a projection serving as an electrical contact is formed on a movable plate portion facing the contact land. The capacitance type force sensor according to claim 5, wherein a switch is constituted by the protrusion and the contact land.
とする請求項３記載の静電容量式力覚センサ。12. The capacitive force sensor according to claim 3, wherein a space is provided in the operation unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29042599A JP3380998B2 (en) | 1999-10-13 | 1999-10-13 | Capacitive force sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29042599A JP3380998B2 (en) | 1999-10-13 | 1999-10-13 | Capacitive force sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001108541A true JP2001108541A (en) | 2001-04-20 |
| JP3380998B2 JP3380998B2 (en) | 2003-02-24 |
Family
ID=17755878
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29042599A Expired - Lifetime JP3380998B2 (en) | 1999-10-13 | 1999-10-13 | Capacitive force sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2003035615A (en) * | 2001-07-24 | 2003-02-07 | Nitta Ind Corp | Electrostatic capacitive sensor |
| WO2004061400A1 (en) * | 2003-01-06 | 2004-07-22 | Nitta Corporation | Capacitive sensor |
| JP2004354049A (en) * | 2003-03-31 | 2004-12-16 | Wacoh Corp | Force detection device |
| JP2009162787A (en) * | 2003-03-31 | 2009-07-23 | Wacoh Corp | Force detection device |
| JP2016071567A (en) * | 2014-09-29 | 2016-05-09 | ミネベア株式会社 | Attachment structure of pointing device, and pointing device |
| JP2017517721A (en) * | 2014-04-15 | 2017-06-29 | レイトラム，エル．エル．シー． | Weighing system using conveyor belt |
| US10191001B2 (en) | 2014-04-15 | 2019-01-29 | Laitram, L.L.C. | Conveyor-belt system for measuring conditions that vary the resonant frequency of a resonant circuit |
| CN110207886A (en) * | 2019-07-03 | 2019-09-06 | 临沂大学 | It is a kind of can simultaneously dynamometry and direction two to formula capacitance sensor |
| US10597236B2 (en) | 2014-04-15 | 2020-03-24 | Laitram, L.L.C. | Capacitively coupled conveyer measuring system |
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| JPH06324801A (en) * | 1993-05-13 | 1994-11-25 | Nitta Ind Corp | Capacitance type sensor |
| JPH07151623A (en) * | 1993-11-29 | 1995-06-16 | Nitta Ind Corp | Capacitive sensor |
| JPH07200164A (en) * | 1993-12-28 | 1995-08-04 | Nitta Ind Corp | Electrostatic capacity type sensor |
| JP2000292271A (en) * | 1999-02-02 | 2000-10-20 | Nitta Ind Corp | Capacitance-type force sensor |
| JP2001027570A (en) * | 1999-07-13 | 2001-01-30 | Nitta Ind Corp | Electrostatic capacity type force sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06324801A (en) * | 1993-05-13 | 1994-11-25 | Nitta Ind Corp | Capacitance type sensor |
| JPH07151623A (en) * | 1993-11-29 | 1995-06-16 | Nitta Ind Corp | Capacitive sensor |
| JPH07200164A (en) * | 1993-12-28 | 1995-08-04 | Nitta Ind Corp | Electrostatic capacity type sensor |
| JP2000292271A (en) * | 1999-02-02 | 2000-10-20 | Nitta Ind Corp | Capacitance-type force sensor |
| JP2001027570A (en) * | 1999-07-13 | 2001-01-30 | Nitta Ind Corp | Electrostatic capacity type force sensor |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003035615A (en) * | 2001-07-24 | 2003-02-07 | Nitta Ind Corp | Electrostatic capacitive sensor |
| CN100465598C (en) * | 2003-01-06 | 2009-03-04 | 新田株式会社 | Capacitive sensor |
| WO2004061400A1 (en) * | 2003-01-06 | 2004-07-22 | Nitta Corporation | Capacitive sensor |
| US7119552B2 (en) | 2003-01-06 | 2006-10-10 | Nitta Corporation | Capacitance type force sensors |
| JP2010008427A (en) * | 2003-03-31 | 2010-01-14 | Wacoh Corp | Force detection device |
| JP2009162787A (en) * | 2003-03-31 | 2009-07-23 | Wacoh Corp | Force detection device |
| JP2004354049A (en) * | 2003-03-31 | 2004-12-16 | Wacoh Corp | Force detection device |
| JP2010151847A (en) * | 2003-03-31 | 2010-07-08 | Wacoh Corp | Force detection device |
| JP2017517721A (en) * | 2014-04-15 | 2017-06-29 | レイトラム，エル．エル．シー． | Weighing system using conveyor belt |
| US10191001B2 (en) | 2014-04-15 | 2019-01-29 | Laitram, L.L.C. | Conveyor-belt system for measuring conditions that vary the resonant frequency of a resonant circuit |
| US10597236B2 (en) | 2014-04-15 | 2020-03-24 | Laitram, L.L.C. | Capacitively coupled conveyer measuring system |
| JP2016071567A (en) * | 2014-09-29 | 2016-05-09 | ミネベア株式会社 | Attachment structure of pointing device, and pointing device |
| CN110207886A (en) * | 2019-07-03 | 2019-09-06 | 临沂大学 | It is a kind of can simultaneously dynamometry and direction two to formula capacitance sensor |
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| JP3380998B2 (en) | 2003-02-24 |
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