JP2001100643A - Electro-optic device and projection type display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a structure which lessens the color irregularity occurring in the local heat elevation of substrates by the light from a light source of an electro-optic device used for a projection type display device. SOLUTION: A liquid crystal device 100 as the electro-optic device is constituted by holding a liquid crystal layer 50 between a counter substrate 80 and an active matrix substrate 10. Further, a substrate 101 of -10×10-7 to 10×10-7/ deg.C in coefficient of thermal expansion at 0 to 75 deg.C is arranged adjacently to the counter substrate 80 on which the light from the light source is made incident. As a result, the unevenness in the coefficient of thermal expansion within the substrate surface of the substrate 101 may be reduced, the color irregularity prevented and a display grade improved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention belongs to an electro-optical device comprising at least three substrates, and furthermore to a technical field of an electro-optical device used for a projection display device or the like.

[0002]

2. Description of the Related Art In a projection type display device using a liquid crystal device as an electro-optical device, light emitted from a light source is condensed by a condensing light source system and guided to the liquid crystal device, and this light is modulated by a liquid crystal. By doing so, a predetermined image is projected on a projection surface such as a screen by an enlarged projection optical system and displayed. The liquid crystal device has a liquid crystal cell in which liquid crystal is sandwiched between an active matrix substrate on which pixel electrodes and switching elements electrically connected to the pixel electrodes are arranged, and a counter substrate on which a counter electrode is formed.

In a projection display device, light from a light source is focused so that the liquid crystal of the liquid crystal device is focused. Therefore, about 1 m of the substrate thickness from the liquid crystal layer which is the focal position
Scratches and dust on the outer surface of the active matrix substrate or the opposing substrate located at m are within the focal length range and are in a focus state. As a result, small scratches and dust of about 10 to 20 μm are also projected on the projected image, which degrades display quality. In order to avoid such a problem, a pair of NA3s having a thickness of about 1 mm
5 (trade name, manufactured by NH Techno) transparent substrate.
This prevents the outer surface of the liquid crystal cell substrate from being scratched or dusted. Further, by setting the thickness of the transparent substrate to about 1 mm, even if the surface of the transparent substrate that is not in contact with the liquid crystal cell has scratches or dust, these are surely located outside the focal length range. , The display quality is not degraded.

[0004]

However, in the projection type display device having the above-described structure, color unevenness has occurred. The color unevenness is a color difference on the screen when a projection screen displays and displays a raster screen on the screen. In the projection display device, since the liquid crystal device is irradiated with strong light from a light source, there is a difference in temperature rise between the central portion and the four corners of the transparent substrate, so that color unevenness occurs. Specifically, when a difference in temperature rise occurs between the center and the four corners of the transparent substrate, the rate of thermal expansion within the substrate surface of the transparent substrate is different, and light incident on such a transparent substrate has its outgoing light reflected by the substrate. The light is emitted as light having a different phase in the plane. As a result, color unevenness occurs in the projected image, and the display quality is significantly reduced. In particular, in the case of the projection-type display device having the above-described configuration, unevenness has occurred in a black screen.

SUMMARY OF THE INVENTION The present invention has been made in consideration of the above-described problems, and has as its object to provide an electro-optical device and a projection display device having high display quality without color unevenness.

[0006]

In order to solve the above-mentioned problems, an electro-optical device according to the present invention comprises a first substrate having a first surface and a second surface, a first substrate having a first surface and a second surface. A second substrate having a surface, a third substrate disposed adjacent to a second surface of the first substrate, a first surface of the first substrate, and a first surface of the second substrate. Are arranged to face each other, and the first substrate and the second substrate
An electro-optical material sandwiched between the first substrate and the electro-optical device, wherein the third substrate is used by irradiating light from a direction of a second surface of the first substrate.
Thermal expansion coefficient at 〜75 ° C. is −10 × 10 ⁻⁷ / ° C.
It is characterized by 10 × 10 ⁻⁷ / ° C.

According to such a configuration of the present invention, by disposing the third substrate having a specific thermal expansion coefficient, the third substrate surface due to a local temperature rise caused by the irradiation of light from the light source. This has the effect of reducing uneven thermal expansion in the interior, and obtaining an electro-optical device with high display quality of uneven color. Further, by arranging the third substrate adjacent to the first substrate, the third substrate functions as a dust-proof substrate, which prevents the second surface of the first substrate from being scratched or adhering dust. I do. Also, if the thickness of the third substrate is 1.0 mm or more, even if there is a flaw or dust on the surface of the third substrate facing the surface in contact with the first substrate, they are located outside the focal length range. And does not affect the display. Here, as the substrate having the above-described coefficient of thermal expansion, for example, Neoceram (trade name, manufactured by Nippon Electric Glass), Clear Serum (trade name, manufactured by OHARA), or the like can be used. In the projection type display device using the electro-optical device, the temperature of the third substrate is raised to 40 to 55 ° C. in normal temperature use and to 55 to 70 ° C. in a slightly high temperature environment (40 ° C.) during operation. , The coefficient of thermal expansion at 0 to 70 ° C. is preferably −10 × 10 ⁻⁷ to 10 × 10 ⁻⁷ / ° C., more preferably 2.0 × 10 ⁻⁷ / ° C. By using the third substrate having a specific thermal expansion coefficient as described above, it is possible to prevent the occurrence of color unevenness.

Further, the third substrate has a thickness of 1.0 mm or more. With this configuration, when the electro-optical device is used as a light valve of a projection display device, the surface of the third substrate facing the first substrate is damaged or dust adheres. However, these scratches and dust are surely located outside the focal length range, and the defocus function of the third substrate is sufficiently enhanced.

The third substrate absorbs or reflects light having a wavelength of 380 nm or less. According to such a configuration, when liquid crystal is used as the electro-optical material, the effect of blocking the wavelength of 380 nm or less, that is, ultraviolet light from entering the liquid crystal layer, and preventing deterioration of the liquid crystal alignment film due to ultraviolet light is prevented. Have.

Further, a switching element is provided on the second substrate. According to such a configuration, it is possible to prevent the ultraviolet rays from being incident on the switching element by the third substrate, and it is possible to prevent the switching element from being deteriorated.

Further, the first substrate is a substrate having the same expansion coefficient as the third substrate. With such a configuration, even in the first substrate,
It is possible to reduce uneven thermal expansion in the substrate surface due to local temperature rise caused by irradiation of light from the light source,
Further, there is an effect that an electro-optical device having high display quality of color unevenness is obtained. In addition, by using the same type of substrate as the first substrate and the third substrate, the respective refractive indexes of the first substrate and the third substrate can be made equal. This has the effect of transmitting light through the electro-optical device and having a very small loss of light quantity.

Another electro-optical device according to the present invention includes a first substrate having a first surface and a second surface; a second substrate having a first surface and a second surface; A third substrate disposed adjacent to a second surface of the substrate; a first surface of the first substrate and a first surface of the second substrate disposed opposite to each other; An electro-optical material sandwiched between the first substrate and the second substrate, wherein the electro-optical device is used by irradiating light from the second surface of the first substrate.
The substrate is made of neoceram.

According to such a configuration of the present invention, by disposing the third substrate made of Neoceram (trade name, manufactured by Nippon Electric Glass), local temperature rise caused by irradiation of light from the light source is achieved. Thermal expansion unevenness in the third substrate surface can be reduced, and an effect of obtaining an electro-optical device having high color unevenness display quality can be obtained. Furthermore, the third substrate also functions as a dust-proof substrate that prevents the second surface of the first substrate from being scratched or dust-adhering. In particular,
In a projection display device using an electro-optical device, the temperature rises to about 40 to 55 ° C. in normal temperature use and to about 55 to 70 ° C. in a slightly high temperature environment (40 ° C.) during operation. The use of neoceram is effective because the coefficient of thermal expansion of the substrate can be suppressed within a specific range and the occurrence of color unevenness can be prevented.

Further, the first substrate is made of neoceram. With such a configuration,
Also in the first substrate, it is possible to reduce uneven thermal expansion in the substrate surface due to a local temperature rise caused by irradiation of light from the light source, and to obtain an electro-optical device with high color unevenness display quality. Have. Further, by using neoceram for the first substrate and the third substrate, the respective refractive indices of the first substrate and the third substrate can be made equal, so that light guided from the light source can be efficiently transmitted to the electro-optical device. And the light amount loss is extremely small.

[0015] Further, the semiconductor device further includes a fourth substrate disposed adjacent to a second surface of the second substrate, wherein the second substrate and the fourth substrate are made of a quartz substrate. By using a quartz substrate as the second substrate and the fourth substrate in this manner, there is an effect that a light amount loss caused by passing through the second substrate and the fourth substrate is small. In addition, since the second substrate and the fourth substrate are made of the same material, the two substrates have the same expansion coefficient and display with less color unevenness can be performed.

The semiconductor device may further include a fourth substrate disposed adjacent to the second surface of the third substrate, wherein the second substrate and the fourth substrate have a coefficient of thermal expansion of -10 × at 0 to 70 ° C. 10
⁻⁷ / ° C. to 10 × 10 ⁻⁷ / ° C. With such a configuration, even in the second substrate and the third substrate, it is possible to reduce uneven thermal expansion in the substrate surface due to a local temperature rise due to irradiation of light from the light source, and furthermore, This has the effect of obtaining an electro-optical device with high display quality.

[0017] The liquid crystal display further includes a pair of polarizing plates arranged so as to sandwich the first substrate, the second substrate, and the third substrate. Here, when a polarizing plate that easily absorbs the heat of light from the light source is used, color unevenness due to a local temperature rise of the third substrate sandwiched between the polarizing plates becomes remarkable. Also in an electro-optical device using such a polarizing plate, by using a substrate having a specific coefficient of thermal expansion as a third substrate sandwiched between a pair of polarizing plates, color unevenness can be prevented and display quality can be reduced. This has the effect of obtaining an electro-optical device having a high density.

The projection type display device according to the present invention includes a light source, an optical system for projecting incident light, and an optical system interposed between the light source and the optical system for modulating the light from the light source to form the optical system. And a light valve having the above-described electro-optical device.

The operation and other advantages of the present invention will become more apparent from the embodiments explained below.

[0020]

Embodiments of the present invention will be described below. In the embodiments of the present invention, a projection display device using a liquid crystal device as an electro-optical device will be described as an example.

The configuration of the projection display device will be described with reference to FIG.

The projection display apparatus 1100 includes a light source device 920 as an optical system, a uniform illumination optical system 923, and a light beam W emitted from the uniform illumination optical system 923 for red (R), green (G), and blue (B). A) a color separation optical system 924 for color separation;
A light guide system 927 for guiding the blue light flux B to the corresponding light valve 925B is provided. Further, light valves 925R, 925G, and 925B each composed of three liquid crystal devices as modulation means for modulating each color light beam R, G, and B color-separated by the color separation optical system 924 and the light guide system 927, and after being modulated. A color synthesizing prism 910 as a color synthesizing unit for re-synthesizing the color luminous flux, and a projection lens unit 90 as a projection unit for expanding and projecting the synthesized luminous flux onto the surface of the projection surface 100
6 is provided.

The uniform illumination optical system 923 includes two lens plates 921 and 922 and a reflection mirror 931. The two lens plates 921 and 922 are arranged so as to be orthogonal to each other with the reflection mirror 931 interposed therebetween. Uniform illumination optical system 923
The two lens plates 921 and 922 each include a plurality of rectangular lenses arranged in a matrix. The light beam emitted from the light source device 920 is transmitted to the first lens plate 92.
The light is split into a plurality of partial light beams by one rectangular lens.
Then, these partial light beams are divided into three light valves 925R and 925R by the rectangular lens of the second lens plate 922.
Superimposed around 5G and 925B. Therefore, by using the uniform illumination optical system 923, even when the light source device 920 has an uneven illuminance distribution in the cross section of the emitted light beam, the three light valves 925R, 925G, and 925B are used.
Can be illuminated with uniform illumination light.

Each color separation optical system 924 includes a blue-green reflecting dichroic mirror 941, a green reflecting dichroic mirror 942, and a reflecting mirror 943. First, in the blue-green reflecting dichroic mirror 941, the blue light beam B and the green light beam G included in the light beam W are reflected at right angles, and head toward the green reflecting dichroic mirror 942. The red light beam R passes through the mirror 941, is reflected at a right angle by the rear reflection mirror 943, and is emitted from the emission unit 944 of the red light beam R to the prism unit 910 side.

Next, a green reflecting dichroic mirror 942
Of the blue and green light fluxes B and G reflected by the blue-green reflection dichroic mirror 941,
Only the green light beam G is reflected at a right angle, and is emitted from the emission unit 945 of the green light beam G to the color combining optical system side. The blue light flux B that has passed through the green reflection dichroic mirror 942 is emitted from the emission section 946 of the blue light flux B to the light guide system 927 side. In this example, the emission portions 944 and 94 of the color light beams in the color separation optical system 924 from the emission portion of the light beam W of the uniform illumination optical element.
The distances to 5,946 are set to be substantially equal.

The red and green luminous flux R of the color separation optical system 924,
Condensing lenses 951 and 952 are arranged on the emission sides of the G emission sections 944 and 945, respectively. Therefore,
The red and green luminous fluxes R and G emitted from the respective emission sections are incident on these condenser lenses 951 and 952 and are parallelized.

The red and green luminous fluxes R and G thus collimated enter the light valves 925R and 925G and are modulated to add image information corresponding to each color light. That is, the switching of these liquid crystal devices is controlled in accordance with the image information, whereby each color light passing therethrough is modulated. On the other hand, the blue luminous flux B is
To the corresponding light valve 925B, where it is similarly modulated according to image information.
The light valves 925R, 925G, and 925B of this example
Are incident-side polarizing means 960R and 960R, respectively.
G, 960B, and exit-side polarization means 961R, 961G,
961B and a liquid crystal device 962 disposed therebetween.
R, 962G and 962B.

The light guide system 927 is a light emitting section 94 for the blue light flux B.
No. 6, a condenser lens 954 disposed on the exit side, an incident-side reflection mirror 971, an exit-side reflection mirror 972, an intermediate lens 973 disposed between these reflection mirrors, and a front side of the light valve 925B. And a condenser lens 953. The blue light flux B emitted from the condenser lens 946 is transmitted through the light guide system 927 to the liquid crystal device 962B.
And modulated. The optical path length of each color beam, that is,
Each liquid crystal device 962R, 962G, 9
The distance to 62B is the longest for the blue luminous flux B, and therefore the loss of light quantity of the blue luminous flux is the largest. However, by interposing the light guide system 927, the loss of light amount can be suppressed.

Each light valve 925R, 925G, 92
The color light fluxes R, G, and B modulated through 5B are incident on a color combining prism 910, where they are combined. The light combined by the color combining prism 910 is enlarged and projected on the surface of the projection surface 100 at a predetermined position via the projection lens unit 906.

Next, a liquid crystal device used for each light valve will be described with reference to FIG. FIG. 2 is a schematic vertical sectional view of the liquid crystal device.

The liquid crystal device 100 includes a counter substrate 80 as a first substrate, an active matrix substrate 10 as a second substrate opposed to the first substrate, and a liquid crystal device 100 for bonding both substrates with a predetermined gap therebetween. A seal 53 disposed along the periphery of the substrate; and a liquid crystal layer 50 sandwiched between the substrates.
And The opposing substrate 80 has a first surface in contact with the liquid crystal layer 50 and a second surface in opposition to the first surface, and the active matrix substrate 10 has a first surface in contact with the liquid crystal layer 50 and opposing the first surface. And a second surface. Further, transparent substrates 101 and 102 are arranged adjacent to the second surfaces of the opposing substrate 80 and the active matrix substrate 10, respectively. Then, the liquid crystal device 100 is arranged in the projection display device such that the spectrum from the light source is incident on the counter substrate 80 side.

The active matrix substrate 10 is composed of a plurality of scanning lines and a plurality of data lines arranged crossing each other on a quartz substrate having a thickness of 1.2 mm, and a switching element and a pixel electrode arranged at each intersection. These wirings and switching elements are arranged on the first surface of the active matrix substrate 10. As the transparent substrate 102 disposed adjacent to the active matrix substrate 10, a quartz substrate having a thickness of about 1.1 mm is used.

On the other hand, the opposing substrate 80 is a light shielding formed on a 1.1 mm thick neoceram (trade name, manufactured by Nippon Electric Glass) corresponding to the scanning lines, data lines and switching elements on the active matrix substrate. A transparent electrode formed so as to cover the light-shielding film. These transparent electrodes and the like are arranged on the first surface of the counter substrate 80. As the transparent substrate 101 disposed adjacent to the counter substrate 80,
Neoceram having a thickness of 1.1 mm is used. Neoceram has a thermal expansion coefficient of about −6.0 × at 0 ° C. to 380 ° C.
It has a characteristic of 10 ⁻⁷ / ° C. Since the operation guarantee of an electro-optical device such as a light valve is usually 0 ° C. to 75 ° C., this coefficient of thermal expansion is effective within the operation guarantee temperature. Also, neoceram has a light transmittance of about 90% for light having a wavelength of about 400 nm or more, and a light transmittance for light having a wavelength of about 400 nm or less rapidly decreases to about 340 nm.
Has a characteristic that the light transmittance is almost 0 near
It is effective for shielding ultraviolet rays from a light source. In this embodiment, since the light-blocking layer is provided on the counter substrate 80, light from the light source is not directly incident on the switching element, and malfunction of the switching element can be prevented. Furthermore, the transparent substrate 101 can control the incidence of ultraviolet light that degrades the liquid crystal alignment film 50.

Here, the transparent substrates 101 and 102 may be directly adhered to the opposing substrate or the active matrix substrate by an adhesive or the like, or may be fixed by a fixing device without attaching. Further, the dust-proof glasses 101 and 102 may be arranged such that a vacuum space is arranged at a predetermined distance from the opposing substrate or the active matrix substrate. By providing such a space, heat accumulated in the counter substrate, the active matrix substrate, and the transparent substrate can be released, and a rise in temperature can be suppressed.

In the present embodiment, by disposing 101 a transparent substrate having a specific thermal expansion coefficient adjacent to the opposite substrate 80 on the side where the light source is incident, color unevenness due to uneven thermal expansion in the substrate surface is reduced. Can be reduced.

Further, by using a quartz substrate as the active matrix substrate 10 on the light emitting side and the transparent substrate disposed adjacent to the active matrix substrate 10, loss of light quantity can be reduced.

FIG. 3 shows the degree of occurrence of color unevenness when substrates having various coefficients of thermal expansion are used as transparent substrates. The measurement was performed by measuring the degree of color unevenness in the state of the projection type display device shown in FIG. 1 and changing the dustproof substrate of the liquid crystal device used for the light valve. As a liquid crystal device, a quartz substrate was used as a substrate used as an active matrix substrate, and neoceram was used as a substrate used as a counter substrate. The transparent substrate is bonded to the active matrix substrate and the counter substrate with an adhesive. The liquid crystal device is arranged so that the opposing substrate is on the light source side (incident side). The measurement of color unevenness is performed by a method described later, and the larger the numerical value, the greater the degree of color unevenness. As the transparent substrate, one selected from neoceram, a quartz substrate, and NA35 was used.
The thermal expansion coefficient of each substrate at 50 ° C. was about −6.0 × 10 ⁻⁷ / ° C. for neoceram, and about 5.8 × 10 for quartz substrate.
⁻⁷ / ° C., NA 35 is about 37 × 10 ⁻⁷ / ° C.

As shown in FIG. 3, when neoceram is used as the dust-proof substrate on the incident side, color unevenness can be greatly reduced and thermal expansion can be reduced as compared with the case where a quartz substrate or NA35 is used as the dust-proof substrate. The use of a substrate having a lower coefficient can reduce color unevenness, and as a result, display quality can be improved. Further, by using neoceram as the dustproof substrate on the incident side and using a quartz substrate as the dustproof substrate on the output side, color unevenness can be reduced as compared with using neoceram on both the incident side and the output side.

Next, FIG. 4 shows the relationship between the thermal expansion coefficient and the color unevenness of the dustproof substrate arranged on the side where the light from the light source is incident. In FIG. 4, the horizontal axis represents the coefficient of thermal expansion at 50 ° C.,
The vertical axis indicates the color difference Δu'v '. The color unevenness was measured by changing the thermal expansion coefficient of the dust-proof substrate on the side where light from the light source was incident in the state of the projection display device shown in FIG. As a liquid crystal device used for a light valve of a projection display device,
A quartz substrate was used as a substrate used as an active matrix substrate, neoceram was used as a substrate used as a counter substrate, and a quartz substrate was used as a transparent substrate disposed on an active matrix substrate side which is an emission side. The transparent substrate is bonded to the active matrix substrate and the counter substrate with an adhesive. The liquid crystal device is arranged so that the opposing substrate is on the light source side (incident side).

The measurement of color unevenness is performed by the following method.

A driving circuit is attached to the projection type display device of FIG.
The raster screen is projected on the screen, and two points with the most different colors on the screen are selected. Then, the color coordinates (u ₁ , v ₁ ) of these two points in the CIE1976 USC color system,
(U ₂ , v ₂ ) is obtained, and the color difference Δu′v ′ = ((u ₁ + v)
₁ ) ² + (u ₂ + v ₂ ) ² ) ^1/2 is derived. Color difference Δ
The greater the value of u'v ', the greater the degree of color unevenness. Conversely, the smaller the color difference Δu'v', the smaller the color unevenness. The two points having the most different colors on the screen are the two points on the screen where the color difference Δu'v 'is the largest.

As shown in FIG. 4, by using a substrate having a coefficient of thermal expansion of −10 × 10 ⁻⁷ to 10 × 10 ⁻⁷ / ° C. as a dust-proof substrate, color unevenness which is a problem in display does not occur.

As described above, in the present embodiment, by using a substrate having a specific coefficient of thermal expansion adjacent to the substrate on which light from the light source is incident, the unevenness of the coefficient of thermal expansion in the plane of the substrate is increased. In a projection display device in which the temperature rise is remarkable, it is possible to obtain a display device with reduced color unevenness and high display quality.

[Brief description of the drawings]

FIG. 1 is a schematic diagram of a projection display device according to an embodiment.

FIG. 2 is a schematic cross-sectional view of the liquid crystal device of the present embodiment.

FIG. 3 is a table showing the ratio of each color unevenness when a transparent substrate used in a liquid crystal device of a projection type display device is changed.

FIG. 4 is a graph showing a relationship between a thermal expansion coefficient and color unevenness of a transparent substrate disposed on a side on which light from a light source used in a liquid crystal device of a projection display device is incident.

[Explanation of symbols]

 Reference Signs List 10 active matrix substrate 50 liquid crystal layer 80 opposed substrate 100 liquid crystal device 101, 102 transparent substrate 906 projection lens unit 920 light source device 925R, 925G, 925B light valve 1100 projection display device

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G03B 21/00 G03B 21/00 D G09F 9/30 316 G09F 9/30 316D F-term (Reference) 2H088 EA14 HA01 HA08 HA13 HA24 HA28 MA04 MA05 2H090 JB02 JD18 LA04 LA12 LA15 5C094 AA03 AA08 AA55 AA60 BA03 BA16 BA43 CA19 CA24 DA12 EA04 EA05 EB02 ED01 ED03 ED05 ED11 ED14 FA02 FB02 FB15 JA20 5G435 BB12 DD12 BB12 DD12 GG08 GG16 GG28 HH02 LL15

Claims (11)

[Claims] A first substrate having a first surface and a second surface, a second substrate having a first surface and a second surface, and being adjacent to a second surface of the first substrate. A third substrate, and a first surface of the first substrate and a first surface of the second substrate are opposed to each other, and are sandwiched between the first substrate and the second substrate. An electro-optical material, wherein the third substrate is used by irradiating light from the direction of the second surface of the first substrate. Is -1
An electro-optical device having a temperature of 0 × 10 ⁻⁷ / ° C. to 10 × 10 ⁻⁷ / ° C. 2. The electro-optical device according to claim 1, wherein the third substrate has a thickness of 1.0 mm or more. 3. The electro-optical device according to claim 1, wherein the third substrate absorbs or reflects light having a wavelength of 380 nm or less. 4. The electro-optical device according to claim 3, wherein a switching element is disposed on the second substrate. 5. The substrate according to claim 1, wherein the first substrate has the same coefficient of expansion as the third substrate.
The electro-optical device according to any one of claims 1 to 4. 6. A first substrate having a first surface and a second surface, a second substrate having a first surface and a second surface, and being adjacent to a second surface of the first substrate. A third substrate, and a first surface of the first substrate and a first surface of the second substrate are opposed to each other, and are sandwiched between the first substrate and the second substrate. An electro-optical material, wherein the electro-optical device is used by irradiating light from a direction of a second surface of the first substrate, wherein the third substrate is made of neoceram. Electro-optical device. 7. The electro-optical device according to claim 6, wherein the first substrate is made of neoceram. 8. The semiconductor device according to claim 1, further comprising a fourth substrate disposed adjacent to a second surface of the second substrate, wherein the second substrate and the fourth substrate are made of a quartz substrate. The electro-optical device according to any one of claims 1 to 7. 9. The semiconductor device further comprises a fourth substrate disposed adjacent to a second surface of the third substrate, wherein the second substrate and the fourth substrate have a coefficient of thermal expansion of -10 × at 0 to 70 ° C. ^10-7
The electro-optical device according to claim 8, wherein the temperature is in the range of / C to ^10x10-7 / C. 10. The method according to claim 1, further comprising a pair of polarizing plates disposed so as to sandwich the first substrate, the second substrate, and the third substrate. An electro-optical device according to claim 1. 11. A light source, an optical system for projecting incident light, and interposed between the light source and the optical system, for modulating light from the light source to guide the light to the optical system. A projection display device, comprising: a light valve having the electro-optical device according to claim 10.