JP2001093113A - Thin film magnetic head and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the high frequency characteristics by attaining the shortening of the magnetic path length and the reduction of the eddy current loss. SOLUTION: The recording head is provided with a lower magnetic pole layer 8 and an upper magnetic pole layer 13 including magnetic pole parts confronted each other through a recording gap layer 12, and thin film coils 10. The upper magnetic pole layer 13 is provided with the magnetic pole part 13A and a yoke part 13B. The yoke part 13B includes the part 13B3 connected to the magnetic pole part 13A, the part 13B4 connected to a 3rd layer 8c of the lower magnetic pole layer 8, and two parallel magnetic path parts 13B1, 13B2 forming parallel two magnetic paths between these parts 13B3 and 13B4. The thin film coils 10 respectively include coil parts 101, 102 spirally wound aroung the parallel magnetic path parts 13B1,13B2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a thin-film magnetic head having at least an inductive magnetic transducer and a method for manufacturing the same.

[0002]

2. Description of the Related Art In recent years, as the areal recording density of a hard disk drive has been improved, the performance of a thin film magnetic head has been required to be improved. As the thin-film magnetic head, a composite thin-film magnetic layer having a structure in which a recording head having an inductive magnetic transducer for writing and a reproducing head having a magneto-resistive (hereinafter also referred to as MR (Magnetoresistive)) element for reading is laminated. Heads are widely used.

In order to increase the recording density of the performance of the recording head, it is necessary to increase the track density in the magnetic recording medium. For this purpose, it is necessary to realize a recording head having a narrow track structure in which the width of the lower magnetic pole and the upper magnetic pole formed above and below the recording gap layer on the air bearing surface is reduced from several microns to submicron dimensions. Yes, semiconductor processing technology is used to achieve this.

Here, with reference to FIGS. 11 to 14,
As an example of a conventional method of manufacturing a thin film magnetic head, an example of a method of manufacturing a composite thin film magnetic head will be described. In FIGS. 11 to 14, (a) shows a cross section perpendicular to the air bearing surface of the thin film magnetic head, and (b) shows a cross section of the magnetic pole portion of the thin film magnetic head parallel to the air bearing surface.

In this manufacturing method, first, as shown in FIG.
So, for example, Altic (Al _TwoO_Three・ From TiC)
On a substrate 101 made of, for example, alumina (Al_TwoO_Three)
The insulating layer 102 having a thickness of about 5 to 10 μm.
Stack. Next, a magnetic material is formed on the insulating layer 102.
A lower shield layer 103 for a reproducing head is formed.

Next, on the lower shield layer 103, for example, alumina is sputter deposited to a thickness of 100 to 200 nm to form a lower shield gap film 104 as an insulating layer. Next, on the lower shield gap film 104,
The reproduction MR element 105 is formed to have a thickness of several tens of nm. Next, on the lower shield gap film 104, the MR
A pair of electrode layers 106 which are electrically connected to the element 105 are formed.

Next, an upper shield gap film 107 as an insulating layer is formed on the lower shield gap film 104 and the MR element 105, and the MR element 105 is embedded in the shield gap films 104, 107.

Next, on the upper shield gap film 107, an upper shield layer and lower magnetic pole layer (hereinafter, referred to as a lower magnetic pole layer) 108 made of a magnetic material and used for both the read head and the write head is formed. It is formed to a thickness of about 3 μm.

Next, as shown in FIG. 12, a recording gap layer 109 made of an insulating film, for example, an alumina film is formed on the lower magnetic pole layer 108 to a thickness of 0.2 μm. Next, to form a magnetic path, the recording gap layer 109 is partially etched to form a contact hole 109a. Next, on the recording gap layer 109 in the magnetic pole portion, the upper magnetic pole chip 1 made of a magnetic material for a recording head is formed.
10 is formed to a thickness of 0.5 to 1.0 μm. At this time, at the same time, contact holes 109a for forming magnetic paths are formed.
A magnetic layer 11 made of a magnetic material for forming a magnetic path
9 is formed.

Next, as shown in FIG. 13, the upper magnetic pole tip 110 is used as a mask to perform ion milling.
The recording gap layer 109 and the lower magnetic pole layer 108 are etched. As shown in FIG. 13B, the structure in which the respective sidewalls of the upper magnetic pole portion (upper magnetic pole tip 110), the write gap layer 109, and a part of the lower magnetic pole layer 108 are formed in a self-aligned vertical manner is trimmed. (Trim) structure.

Next, an insulating layer 111 made of, for example, an alumina film is formed on the entire surface to a thickness of about 3 μm. Next, the insulating layer 111 is polished and flattened to reach the surfaces of the upper pole tip 110 and the magnetic layer 119.

Next, on the flattened insulating layer 111,
For example, a first type for an induction type recording head made of copper (Cu)
The thin-film coil 112 of the layer is formed. Next, the insulating layer 11
1 and the coil 112, a photoresist layer 113
Is formed in a predetermined pattern. Next, heat treatment is performed at a predetermined temperature to planarize the surface of the photoresist layer 113. Next, a second-layer thin-film coil 114 is formed on the photoresist layer 113. Next, the photoresist layer 1 is formed on the photoresist layer 113 and the coil 114.
15 are formed in a predetermined pattern. Next, heat treatment is performed at a predetermined temperature to planarize the surface of the photoresist layer 115.

Next, as shown in FIG. 14, an upper magnetic pole layer 116 made of a magnetic material for a recording head, for example, permalloy is formed on the upper magnetic pole tip 110, the photoresist layers 113 and 115, and the magnetic layer 119. I do. next,
On the upper magnetic pole layer 116, an overcoat layer 117 made of, for example, alumina is formed. Finally, the slider including the above layers is machined to form the air bearing surfaces 118 of the recording head and the reproducing head, thereby completing the thin-film magnetic head.

FIG. 15 is a plan view of the thin-film magnetic head shown in FIG. Note that, in this drawing, the overcoat layer 117, other insulating layers and insulating films are omitted.

In FIG. 14, TH indicates the throat height, and MR-H indicates the MR height. In addition,
The throat height refers to the length (height) from the end on the air bearing surface side to the end on the opposite side of the portion where the two magnetic pole layers face each other via the recording gap layer. The MR height refers to the length (height) from the end on the air bearing surface side of the MR element to the end on the opposite side. In FIG. 14, P2W represents the magnetic pole width, that is, the recording track width. The factors that determine the performance of the thin-film magnetic head are, in addition to the throat height and the MR height, etc., the Apex Angle (θ) shown in FIG.
le). The apex angle is a top surface of the insulating layer 111 and a straight line connecting a corner of a side surface on a magnetic pole side in a coil portion (hereinafter, referred to as an apex portion) which is covered with the photoresist layers 113 and 115 and is raised in a mountain shape. With the angle.

[0016]

In recent years, as the surface recording density of a hard disk drive used in a computer or the like has been improved, the frequency of recording / reproducing information in a thin-film magnetic head has been increasing. Therefore, a thin-film magnetic head having excellent high-frequency characteristics is required.

[0017] In the thin film magnetic head, for example, the magnetic path length as indicated by symbol L ₀ in FIG. 14 (Yoke Leng
It is known that high frequency characteristics can be improved by shortening th).

However, the conventional thin-film magnetic head has a problem that it is difficult to shorten the magnetic path length as described below. That is, in the conventional thin-film magnetic head, as shown in FIGS. 14 and 15, for example, the coil is disposed between the lower magnetic pole layer and the upper magnetic pole layer, and the connection portion between the lower magnetic layer and the upper magnetic layer (FIG. Layer 11
It is spirally wound around 9). In such a structure, the magnetomotive force generated by the coil cannot be efficiently transmitted to the pole layer, so that it is necessary to increase the number of turns of the coil, and as a result, it is difficult to reduce the magnetic path length.

On the other hand, for example, US Pat.
3,740, JP-A-48-55718, JP-A-60-113310, JP-A-63-201908
The publication discloses a thin film magnetic head in which a coil is spirally wound around a pole layer. According to the structure in which the coil is spirally wound, the magnetomotive force generated by the coil can be efficiently transmitted to the magnetic pole layer. The number can be reduced, and as a result, the magnetic path length can be reduced.

On the other hand, when the frequency of the recorded information increases, a problem arises in that the eddy current loss in the pole layer forming the magnetic path of the inductive magnetic transducer increases. As the eddy current loss increases, the strength of the recording magnetic field generated from the magnetic pole portions opposed via the recording gap layer decreases, the delay of the recording magnetic field with respect to the recording current supplied to the coil increases, Problems such as a decrease in the time gradient of the rising edge of the data. Specifically, these problems are, for example, a non-linear transition shift (Non-linear Transition Sh).
ift (NLTS).

The present invention has been made in view of the above problems, and an object of the present invention is to improve the high-frequency characteristics by enabling a reduction in the magnetic path length and a reduction in eddy current loss in an inductive magnetic transducer. And a method of manufacturing the same.

[0022]

A thin-film magnetic head according to the present invention is magnetically coupled to each other, includes magnetic pole portions facing each other on a medium facing surface side facing a recording medium, and includes at least one layer. First and second magnetic layers; a gap layer provided between a magnetic pole portion of the first magnetic layer and a magnetic pole portion of the second magnetic layer; A thin-film coil that transmits a magnetic path formed by the layers, wherein at least one magnetic layer forms a plurality of parallel magnetic paths between a portion connected to the other magnetic layer and a magnetic pole portion. Including a magnetic path portion, the thin film coil includes a plurality of coil portions wound around each parallel magnetic path portion.

A method of manufacturing a thin-film magnetic head according to the present invention includes a first and a first layer each including at least one layer, the magnetic pole portions being magnetically connected to each other, including magnetic pole portions facing each other on a medium facing surface side facing a recording medium. 2 magnetic layer, a gap layer provided between the magnetic pole portion of the first magnetic layer and the magnetic pole portion of the second magnetic layer, and a magneto-motive force generated by the first and second magnetic layers. A thin-film magnetic head including a thin-film coil for transmitting a magnetic path to a magnetic path, wherein a step of forming a first magnetic layer, a step of forming a gap layer on the first magnetic layer, Second on the gap layer
Forming a magnetic layer, and forming a thin film coil, the step of forming at least one magnetic layer,
The step of forming a plurality of parallel magnetic path portions forming a plurality of parallel magnetic paths between the portion connected to the other magnetic layer and the magnetic pole portion and forming a thin-film coil is performed around each parallel magnetic path portion. In order to form a plurality of coil portions wound around.

In the thin film magnetic head or the method of manufacturing the same according to the present invention, a plurality of parallel magnetic path portions are formed on at least one of the magnetic layers and include a plurality of coil portions wound around each parallel magnetic path portion. A thin film coil is formed on the substrate. As a result, the magnetomotive force generated in the thin-film coil can be efficiently transmitted to the magnetic layer, and the length of the portion occupied by the thin-film coil can be reduced, so that the magnetic path length can be reduced. . In addition, since at least one of the magnetic layers is divided by a plurality of parallel magnetic path portions, eddy current loss can be reduced. In the present invention,
The parallel magnetic path portion may pass through the central axis of the coil portion, or may pass through a position eccentric to the central axis of the coil portion.

In the thin-film magnetic head or the method of manufacturing the same according to the present invention, at least one magnetic layer may have a flat layer including a parallel magnetic path portion.

In the thin-film magnetic head or the method of manufacturing the same according to the present invention, the first magnetic layer includes a first layer disposed in a region facing a part of the thin-film coil and a gap in the first layer. A second layer connected to the layer-side surface and forming a magnetic pole portion, wherein the second magnetic layer includes a parallel magnetic path portion, and a part of the thin-film coil is a second magnetic layer in the first magnetic layer. It may be arranged on the side of the layer. In this case, an insulating layer that covers a part of the thin-film coil disposed on the side of the second layer and has a flat surface on the gap layer side may be provided.
The end of the second layer opposite to the medium facing surface may define the throat height.

In the thin-film magnetic head or the method of manufacturing the same according to the present invention, each coil portion is wound, for example, spirally around each parallel magnetic path portion.

[0028]

Embodiments of the present invention will be described below in detail with reference to the drawings. [First Embodiment] First, a thin-film magnetic head and a method of manufacturing the same according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 6, (a) shows a cross section perpendicular to the air bearing surface, and (b) shows a cross section of a magnetic pole portion parallel to the air bearing surface.

In the method of manufacturing a thin film magnetic head according to the present embodiment, first, as shown in FIG. 1, for example, alumina (Al ₂ O ₃ .TiC) is placed on a substrate 1 made of AlTiC (Al ₂ O ₃ .TiC). _The insulating layer 2 made of ₂ O ₃ ) is about 5 μm
Is deposited with a thickness of Next, a magnetic material,
For example, a lower shield layer 3 made of permalloy for a reproducing head is formed to a thickness of about 3 μm. Lower shield layer 3
Is selectively formed on the insulating layer 2 by plating using a photoresist film as a mask, for example. next,
Although not shown, an insulating layer made of, for example, alumina is formed to a thickness of, for example, 4 to 5 μm, and
Polishing is performed by (chemical mechanical polishing) until the lower shield layer 3 is exposed, and the surface is flattened.

Next, as shown in FIG. 2, a lower shield gap film 4 as an insulating film is formed on the lower shield layer 3.
Is formed to a thickness of, for example, about 20 to 40 nm. next,
On the lower shield gap film 4, a reproducing MR element 5
Is formed to a thickness of several tens of nm. The MR element 5 is formed, for example, by selectively etching an MR film formed by sputtering. As the MR element 5, an element using a magneto-sensitive film exhibiting a magnetoresistance effect, such as an AMR element, a GMR element, or a TMR (tunnel magnetoresistance effect) element can be used. Next, a pair of electrode layers 6 electrically connected to the MR element 5 are formed on the lower shield gap film 4 to a thickness of several tens of nm. next,
An upper shield gap film 7 as an insulating film is formed on the lower shield gap
The MR element 5 is formed in a thickness of 0 to 40 nm and is buried in the shield gap films 4 and 7. Shield gap film 4,
Examples of the insulating material used for 7 include alumina, aluminum nitride, diamond-like carbon (DLC), and the like. Further, the shield gap films 4 and 7 may be formed by a sputtering method or may be formed by a chemical vapor deposition (CVD) method. When the shield gap films 4 and 7 made of an alumina film are formed by the CVD method, the material is, for example, trimethyl aluminum (Al).
(CH ₃ ) ₃ ) and H ₂ O are used. When the CVD method is used, it is possible to form the thin, dense shield gap films 4 and 7 with few pinholes.

Next, on the upper shield gap film 7,
A first layer 8a of an upper shield layer and a lower magnetic pole layer (hereinafter, referred to as a lower magnetic pole layer) 8 made of a magnetic material and used for both a read head and a write head has a thickness of about 1.0 to 1.5 μm.
It is selectively formed with a thickness of m. The lower pole layer 8
Is composed of the first layer 8a, and a second layer 8b and a third layer 8c to be described later. The first layer 8a of the lower magnetic pole layer 8 is arranged at a position facing a part of a thin film coil described later.

Next, the second layer 8b and the third layer 8c of the lower pole layer 8 are formed on the first layer 8a of the lower pole layer 8.
Is formed to a thickness of about 1.5 to 2.5 μm. The second layer 8b forms the pole portion of the lower pole layer 8, and the first layer 8b
2a is connected to the recording gap layer side (upper side in FIG. 2A) described later. The third layer 8c is a portion for connecting the first layer 8a to an upper magnetic pole layer described later. The position of the end of the second layer 8b opposite to the air bearing surface (the medium facing surface facing the recording medium) 30 in the portion facing the upper magnetic pole layer defines the throat height. Further, the position of the end of the second layer 8b opposite to the air bearing surface 30 in the portion facing the upper magnetic pole layer is the throat height zero position. In the present embodiment, the throat height is larger than the MR height.

The second layer 8b and the third layer 8c of the lower magnetic pole layer 8 are made of NiFe (Ni: 80% by weight, Fe: 20% by weight) or NiFe (Ni:
(45% by weight, Fe: 55% by weight) or the like, and may be formed into a predetermined pattern by a plating method. May be selectively etched to form a predetermined pattern. Besides this,
CoFe, a Co-based amorphous material that is a high saturation magnetic flux density material, or the like may be used.

Next, as shown in FIG. 3, an insulating film 9 made of alumina, for example, is
Formed to a thickness of

Next, a photoresist is patterned by a photolithography process on the insulating film 9 on the side (the right side in FIG. 3A) of the second portion 8b of the lower magnetic pole layer 8 to form a thin film coil. A frame (not shown) for forming the first layer portion by a frame plating method is formed. Next, using this frame, a thin-film coil 10 made of, for example, copper (Cu) is formed by frame plating.
Is formed, for example, with a thickness of 1.0 to 2.0 μm and a pitch of 1.2 to 2.0 μm. The thin-film coil 10 according to the present embodiment includes a first layer portion 10a, a second layer portion 10b and a connecting portion 1 described later.
0c. Next, the frame is removed. The first layer portion 10a of the thin film coil 10 is
Is disposed on the side (right side in FIG. 3A) of the layer 8b. The first layer portion 10a of the thin-film coil 10 corresponds to FIG.
It comprises a plurality of quadrangular prism portions extending in a direction intersecting the paper surface in FIG.

Next, as shown in FIG. 4, an insulating layer 11 made of, for example, alumina is formed on the whole to a thickness of about 3 to 4 μm. Next, the insulating layer 11 is polished by, for example, CMP until the second layer 8b and the third layer 8c of the lower magnetic pole layer 8 are exposed, and the surface is flattened. Here, in FIG. 4A, the first layer portion 10a of the thin-film coil 10 is not exposed, but the first layer portion 10a may be exposed.

Next, on the flattened second and third layers 8b and 8c of the lower magnetic pole layer 8 and the insulating layer 11, a recording gap layer 12 made of an insulating material is formed. .
It is formed to a thickness of 3 μm. Generally, the insulating material used for the recording gap layer 12 includes alumina, aluminum nitride, silicon oxide-based material, silicon nitride-based material, diamond-like carbon (DLC), and the like.
Further, the recording gap layer 12 may be formed by a sputtering method or a CVD method. When the recording gap layer 12 made of an alumina film is formed by the CVD method, for example, trimethyl aluminum (Al (CH ₃ ) ₃ ) and H ₂ O are used as materials. C
The use of the VD method makes it possible to form a thin, dense recording gap layer 12 with few pinholes.

Next, in order to form a magnetic path, a contact hole is formed by partially etching the recording gap layer 12 on the third layer 8c of the lower magnetic pole layer 8.

Next, as shown in FIG. 5, on the recording gap layer 12, from the air bearing surface 30 to the portion above the third layer 8c of the lower magnetic pole layer 8, the upper magnetic pole layer 1 is formed.
3 is formed to a thickness of about 2.0 to 3.0 μm. The upper magnetic pole layer 13 is connected to the third magnetic layer 8c of the lower magnetic pole layer 8 through a contact hole formed in a portion of the lower magnetic pole layer 8 above the third magnetic layer 8c. Are connected. The upper magnetic pole layer 13 is a flat layer.

The upper magnetic pole layer 13 is made of NiFe (Ni: 80).
Wt%, Fe: 20 wt%) or NiFe which is a high saturation magnetic flux density material (Ni: 45 wt%, Fe: 55 wt%)
Or the like, and may be formed by a sputtering method using a material such as FeN or FeZrN which is a high saturation magnetic flux density material. In addition, CoFe, Co-based amorphous material or the like, which is a high saturation magnetic flux density material, may be used. Also, to improve high frequency characteristics,
The upper magnetic pole layer 13 may have a structure in which an inorganic insulating film and a magnetic layer such as permalloy are stacked in any number of layers.

Next, using the magnetic pole portion of the upper magnetic pole layer 13 as a mask, the write gap layer 12 is formed by dry etching.
Is selectively etched. At this time, for example, a chlorine-based gas such as BCl ₂ or Cl ₂ or C
Reactive ion etching (RIE) using a gas such as a fluorine-based gas such as F ₄ or SF ₆ is used. Next, the second of the lower magnetic pole layer 8 is formed by, for example, argon ion milling.
Is selectively etched to a depth of, for example, 0.2 to 0.6 μm to obtain a trim structure as shown in FIG. According to this trim structure, it is possible to prevent the effective track width from increasing due to the spread of the magnetic flux generated when writing in a narrow track.

Next, an insulating film 14 made of, for example, alumina is formed to a thickness of about 0.5 to 0.8 μm.

Next, although not shown, the insulating film 14 and the recording gap layer are formed by, for example, reactive ion etching or ion milling on the upper portions of both ends of each square pillar portion of the first layer portion 10a of the thin film coil 10. A contact hole is formed so as to penetrate through the insulating layer 11 and the second layer 12 and reach the first layer portion 10a of the thin film coil 10.

Next, the second layer portion 10b of the thin film coil 10 made of, for example, copper (Cu) is formed on the insulating film 14 located on the upper magnetic pole layer 13 by frame plating.
Is, for example, a thickness of 1.0 to 2.0 μm and 1.2 to
It is formed at a pitch of 2.0 μm. Second of thin film coil 10
The layer portion 10b is composed of a plurality of quadrangular prism-shaped portions extending in a direction perpendicular to the plane of FIG. 5A. Both ends of each quadrangular prism portion of the second layer portion 10b of the thin-film coil 10 are connected to the thin-film coil 10 via a connecting portion formed by filling the contact hole with the material of the thin-film coil.
Are connected to both ends of each square pillar portion of the first layer portion 10a.

Next, as shown in FIG. 6, an overcoat layer 15 made of, for example, alumina is entirely
Formed to a thickness of 0 to 40 μm, flattened its surface,
An electrode pad (not shown) is formed thereon. Finally, the slider including the above layers is polished to form the air bearing surfaces 30 of the recording head and the reproducing head, thereby completing the thin-film magnetic head according to the present embodiment.

FIG. 7 is a plan view of the thin-film magnetic head according to the present embodiment. In this figure, the overcoat layer 15, other insulating layers and insulating films are omitted. In FIG. 7, a symbol TH represents a throat height,
TH0 indicates a throat height zero position. Also,
FIG. 6 shows a cross section taken along line AA ′ in FIG.

As shown in FIG. 7, the lower magnetic pole layer 8
The end of the second layer 8b opposite to the air bearing surface 30 is formed in a straight line parallel to the air bearing surface 30.

The upper magnetic pole layer 13 has a magnetic pole portion 13A having one end disposed on the air bearing surface 30, and a yoke portion 13B connected to the other end of the magnetic pole portion 13A. The magnetic pole portion 13A has a constant width equal to the recording track width. The width of the yoke portion 13B is larger than the width of the magnetic pole portion 13A, and gradually decreases as it approaches the air bearing surface 30. The position of the boundary between the magnetic pole portion 13A and the yoke portion 13B is located near the throat height zero position TH0. The two outer edges in the width direction of the magnetic pole portion 13A extend in the direction perpendicular to the air bearing surface 30, and the end edge of the magnetic pole portion 13A and the yoke portion 1 subsequent thereto
It is substantially perpendicular to the edge of 3B.

The yoke portion 13B is connected to the magnetic pole portion 13A.
Part 13B to be tied_ThreeAnd the third layer 8c of the lower pole layer 8
13B connected to_FourAnd these parts 13B_Three, 1
3B _FourTo form two parallel magnetic paths between
13B of parallel magnetic path₁, 13B_TwoAnd Parallel
Magnetic path part 13B₁, 13B_TwoA wedge-shaped gap is formed between
Has been established.

The thin-film coil 10 has a parallel magnetic path portion 13B₁
Coil part 10 spirally wound around₁And parallel
Magnetic path part 13B_TwoCoil wound spirally around
Min 10 _TwoAnd In the present embodiment, the parallel magnetic path
Part 13B₁, 13B_TwoIs part of the coil part 1
0₁, 10_TwoThe other part passes through the central axis of
₁, 10_TwoPasses eccentrically to the center axis of
But the parallel magnetic path portion 13B₁, 13B_TwoThe whole is a coil part
10₁, 10_TwoMay pass through the center axis of
It may pass through a position eccentric to the axis.

Each of the coil portions 10 ₁ , 1 of the thin-film coil 10
O ₂ represents a first layer portion 10a and a second layer portion 10a, respectively.
b is spirally wound around the parallel magnetic path portions 13B ₁ and 13B ₂ by being connected in a zigzag manner via the connecting portion 10c. In FIG. 7, only a part of the first layer portion 10a of the thin film coil 10 is indicated by a broken line.

The coil portion 1 of the thin film coil 10
0 ₁ and 10 ₂ are connected between the coil portions via a connecting portion 10d. The connection part 10d between the coil parts is formed on the insulating film 9 similarly to the first layer part 10a. In addition, each of the coil portions 10 ₁ and 10 ₂ and the connection portion 10d between the coil portions are connected via a connection portion 10c.

The coil portion 1 of the thin film coil 10
0 ₁ and 10 ₂ are wound so as to generate a magnetic field in the same direction for a current in the same direction.

In the present embodiment, the lower magnetic pole layer 8 composed of the first layer 8a, the second layer 8b and the third layer 8c corresponds to the first magnetic layer in the present invention, and the upper magnetic pole layer 13
Corresponds to the second magnetic layer in the present invention.

As described above, the thin-film magnetic head according to the present embodiment includes a reproducing head and a recording head (inductive magnetic transducer). The reproducing head is arranged so that the MR element 5 and a part of the medium facing surface facing the recording medium, that is, a part on the air bearing surface 30 side, face the MR element 5 therebetween, and a lower shield for shielding the MR element 5 is provided. It has a layer 3 and an upper shield layer (lower magnetic pole layer 8).

The recording heads are magnetically connected to each other,
The lower magnetic pole layer 8 and the upper magnetic pole layer 13 each include a magnetic pole portion facing each other on the air bearing surface 30 side and include at least one layer, and the magnetic pole portion of the lower magnetic pole layer 8 and the magnetic pole portion of the upper magnetic pole layer 13 It has a recording gap layer 12 provided therebetween and a thin-film coil 10 which generates a magnetomotive force and transmits it to a magnetic path formed by the lower magnetic pole layer 8 and the upper magnetic pole layer 13.

The upper magnetic pole layer 13 has a magnetic pole portion 13A and a yoke portion 13B. Yoke portion 13B includes a portion 13B ₃ which is connected to the pole portion 13A, the portion 13B _4, which is connected to the third layer 8c of the bottom pole layer 8, parallel between these portions 13B _3, 13B ₄ 2 And two parallel magnetic path portions 13B ₁ and 13B ₂ forming two magnetic paths. The thin-film coil 10 includes coil portions 10 ₁ and 10 ₂ spirally wound around the parallel magnetic path portions 13B ₁ and 13B ₂ , respectively.

According to the present embodiment, the thin film coil 10
Is spirally wound around the parallel magnetic path portions 13B ₁ and 13B ₂ in the yoke portion 13B of the upper magnetic pole layer 13, so that the magnetomotive force generated in the thin film coil 10 can be efficiently transmitted to the upper magnetic pole layer 13. it can. Therefore, the number of turns of the thin film coil 10 can be reduced as compared with a structure in which the thin film coil is spirally wound, and as a result, the magnetic path length can be reduced.

Further, in the present embodiment, the thin film coil 10
The two coil portions 10 ₁ and 10 ₂ are arranged in a direction intersecting the direction in which the magnetic flux passes through the magnetic path, so that a single thin film coil is provided for a single magnetic path. Even if the number of turns is the same, the length of the portion occupied by the thin film coil 10 can be reduced to about 1/2. Therefore, according to the present embodiment, the magnetic path length can be significantly reduced.

In this embodiment, the thin film coil 10
Is disposed on the flat insulating film 9 on the side of the second layer 8b of the lower magnetic pole layer 8, and the upper surface of the insulating layer 11 covering the first layer portion 10a is flattened. A flat upper magnetic pole layer 13 is formed on the insulating layer 11 with a recording gap layer 12 interposed therebetween.
A second layer portion 10b of the thin-film coil 10 is formed on the insulating film 14 with an insulating film 14 interposed therebetween. Therefore, both the first layer portion 10a and the second layer portion 10b of the thin film coil 10 can be formed on a flat surface. Thereby, the thin film coil 10 can be formed finely, and the magnetic path length can be reduced from this point as well.

Further, according to the present embodiment, the throat height is defined by the end of the second layer 8b of the lower magnetic pole layer 8 opposite to the air bearing surface 30 (the right side in FIG. 6A). In addition, the first layer portion 1 of the thin film coil 10
0a is disposed on the side of the second layer 8b, so that the end of the first layer portion 10a of the thin-film coil 10 on the air bearing surface 30 side (left side in FIG. 6A) is connected to the second layer 8b. The end opposite to the air bearing surface 30, that is, the throat height zero position can be approached. From this point, the magnetic path length can be reduced.

According to the present embodiment, a part of upper magnetic pole layer 13 is divided by a plurality of parallel magnetic path portions 13B ₁ and 13B _{2 which} are parallel to each other, so that eddy current loss in upper magnetic pole layer 13 is reduced. Is done.

As described above, according to the present embodiment, it is possible to reduce the magnetic path length and the eddy current loss, and from these, it is possible to improve the high frequency characteristics of the inductive magnetic transducer. become.

Further, according to the present embodiment, since the upper magnetic pole layer 13 including the parallel magnetic path portions 13B ₁ and 13B ₂ is a flat layer, the present embodiment is different from a case where a thin film coil is wound on a non-flat layer. Thus, the length of the winding of the thin-film coil 10 can be reduced, and the magnetomotive force generated in the thin-film coil 10 can be transmitted to the upper magnetic pole layer 13 more efficiently.

From the above, according to the present embodiment,
It is possible to provide a thin-film magnetic head having excellent high-frequency characteristics of a recording head, non-linear transition shift (NLTS), and overwrite characteristics which are characteristics for overwriting.

Further, according to the present embodiment, the first layer portion 10a of the thin-film coil 10 disposed on the side of the second layer 8b of the lower magnetic pole layer 8 is covered, and the surface on the recording gap layer 12 side is formed. Since the flattened insulating layer 11 is provided, the upper magnetic pole layer 13 for defining the recording track width can be accurately formed on a flat surface. Therefore, according to the present embodiment,
The recording track width can be minutely formed to a half-micron dimension or a quarter-micron dimension, and even when the recording track width is reduced in this manner, the recording track width can be accurately defined.

In this embodiment, the magnetic pole portion of the upper magnetic pole layer 13 that defines the track width of the recording head does not define the throat height, but the second layer 8b of the lower magnetic pole layer 8 reduces the throat height. Stipulate. Therefore, according to the present embodiment, it is possible to accurately and uniformly define the throat height even if the track width is reduced.

In the future, a thin film magnetic head capable of coping with a surface recording density of, for example, 10 to 20 gigabits / (inch) ² and a thin film magnetic head capable of performing a good recording operation in a high frequency band of, for example, 300 to 500 MHz will be provided. When realizing this, it is particularly important to uniformly form a fine recording track width and to efficiently use the magnetomotive force generated by the thin film coil for recording. For that purpose, in the upper magnetic pole layer 13, it is necessary to accurately control the track width and to prevent the magnetic flux from being saturated near the throat height zero position.

Therefore, in the present embodiment, as shown in FIG. 7, the shape of the upper magnetic pole layer 13 is formed by two widthwise outer edges of the magnetic pole portion 13A and the yoke portion 1
The shape is such that the edge of 3B is substantially orthogonal.

However, when the upper magnetic pole layer 13 is formed by photolithography, the shape at the boundary between the magnetic pole portion 13A and the yoke portion 13B is rounded. It is extremely difficult to form a precise shape accurately.

Therefore, in the present embodiment, for example, FIG.
The upper magnetic pole layer 13 is formed using the photomask pattern 20 shown in FIG. This photomask pattern 20
Has a light transmitting portion 21 corresponding to the shape of the upper magnetic pole layer 13 to be formed, and a light shielding portion 22 surrounding the light transmitting portion 21. The light shielding portion 22 of the photomask pattern 20
In particular, the shape of the upper magnetic pole layer 13 to be formed in two portions corresponding to a portion where two widthwise outer edges of the magnetic pole portion 13A and a subsequent edge of the yoke portion 13B are substantially orthogonal to each other. In contrast, a wedge-shaped portion 23 protruding toward the light transmitting portion 21 is added.

FIG. 9 is a plan view showing the upper magnetic pole layer 13 formed using the photomask pattern shown in FIG. As shown in this figure, the use of the photomask pattern shown in FIG.
At the boundary portion 25 between the 3A and the yoke portion 13B, a shape is obtained in which the two outer edges in the width direction of the magnetic pole portion 13A are substantially orthogonal to the edges of the subsequent yoke portion 13B. Therefore, accurate control of the track width and prevention of magnetic flux saturation near the throat height zero position can be sufficiently achieved. The shape of the upper magnetic pole layer 13 shown in FIG.
However, there is no difference in the basic configuration including two parallel magnetic path portions.

[Second Embodiment] A thin-film magnetic head and a method of manufacturing the same according to a second embodiment of the present invention will be described below with reference to FIG. FIG. 10 is a plan view showing the upper magnetic pole layer and the thin-film coil in the thin-film magnetic head according to the present embodiment.

The present embodiment is an example in which three parallel magnetic path portions are provided in the upper magnetic pole layer. In the present embodiment, the upper magnetic pole layer 23 shown in FIG. 10 is used instead of the upper magnetic pole layer 13 in the first embodiment. Upper magnetic pole layer 23
Has a magnetic pole portion 23A and a yoke portion 23B. Yoke portion 23B includes a portion 23B _4, which is connected to the pole portion 23A, the portion 23B ₅ which is connected to the third layer 8c of the bottom pole layer 8, parallel between these portions 23B _4, 23B ₅ 3 It includes three parallel magnetic path portions 23B ₁ , 23B ₂ , and 23B ₃ forming one magnetic path. Further, the thin film coil 10, parallel path with portions 23B coil portion 10 ₁ wound helically around the _1, parallel path portions 23B coil portion 10 wound helically around the _2
2, and a coil portion 10 ₃ which is wound helically around a parallel path portions 23B _3.

Each of the coil portions 10 ₁ , 1 of the thin-film coil 10
0 _2, 10 _3, respectively, by the first layer 10a and second layer 10b are connected to the zigzag shape through a connecting portion 10c, parallel path portions 23B _1, 23B _2, 23B
_It is spirally wound around ₃ .

The coil portion 1 of the thin film coil 10
Between 0 ₁ and 10 ₂ and between the coil portions 10 ₂ and 10 ₃
Each of the coil portions is connected via a connecting portion 10d. The connecting portion 10d between the coil portions is connected to the first layer portion 10
It is formed on the insulating film 9 in the same manner as in FIG. In addition, a connecting portion 10 between each coil portion 10 ₁ , 10 ₂ , 10 ₃ and the coil portion.
are connected to each other via a connecting portion 10c.

The coil portion 1 of the thin-film coil 10
0 ₁ , 10 ₂ , and 10 ₃ are wound so as to generate a magnetic field in the same direction with respect to a current in the same direction.

According to the present embodiment, since three parallel magnetic path portions and three coil portions are provided, the effect of reducing the magnetic path length and the eddy current loss is smaller than in the first embodiment. It becomes more noticeable.

Other configurations, operations and effects of the present embodiment are the same as those of the first embodiment.

The present invention is not limited to the above embodiments, and various modifications are possible. For example, in each of the above embodiments, the upper magnetic pole layer is composed of one flat layer, but the upper magnetic pole layer may be composed of a plurality of layers. in this case,
It is preferable that the layer including the parallel magnetic path portion is a flat layer.

The present invention can be applied to a case where an upper magnetic pole layer including a parallel magnetic path portion is formed on an apex portion.

In the present invention, a parallel magnetic path portion may be provided in the lower magnetic pole layer, or a parallel magnetic path portion may be provided in both the lower magnetic pole layer and the upper magnetic pole layer. Also, four or more parallel magnetic path portions and coil portions may be provided.

In each of the above embodiments, a thin film magnetic head having a structure in which a reading MR element is formed on the substrate side and an inductive magnetic conversion element for writing is stacked thereon has been described. The stacking order may be reversed.

That is, an inductive magnetic transducer for writing may be formed on the substrate side, and an MR element for reading may be formed thereon. In such a structure, for example, the magnetic film having the function of the upper magnetic pole layer shown in the above-described embodiment is formed on the substrate side as a lower magnetic pole layer, and the magnetic film having the above-described structure is opposed to the magnetic pole layer via a recording gap film. It can be realized by forming the magnetic film having the function of the lower magnetic pole layer shown in the embodiment as the upper magnetic pole layer. In this case, it is preferable to use the upper magnetic pole layer of the induction type magnetic transducer and the lower shield layer of the MR element together.

The present invention can also be applied to a thin-film magnetic head for recording only having an inductive magnetic transducer or a thin-film magnetic head for performing recording and reproduction using an inductive magnetic transducer.

[0086]

As described above, in the method of manufacturing a thin-film magnetic head according to any one of claims 1 to 6 or the method of manufacturing a thin-film magnetic head according to any one of claims 7 to 12, at least one magnetic layer is provided. A plurality of parallel magnetic path portions are formed, and the thin film coil is formed to include a plurality of coil portions wound around each of the parallel magnetic path portions. Therefore,
According to the present invention, the magnetomotive force generated in the thin-film coil can be efficiently transmitted to the magnetic layer, and the length of the portion occupied by the thin-film coil can be shortened. Will be possible. Further, according to the present invention, at least one of the magnetic layers is divided by the plurality of parallel magnetic path portions, so that eddy current loss can be reduced. From these facts, according to the present invention, it is possible to improve the high frequency characteristics of the inductive magnetic transducer.

Further, according to the method of manufacturing a thin-film magnetic head according to the second aspect or the thin-film magnetic head according to the eighth aspect,
Since at least one of the magnetic layers has a flat layer including a parallel magnetic path portion, the length of the winding of the thin-film coil is made shorter, and the magnetomotive force generated in the thin-film coil is more efficiently used. This has the effect of being able to communicate to

According to the method of manufacturing a thin-film magnetic head of any one of claims 3 to 5, or the method of manufacturing a thin-film magnetic head of any of claims 9 to 11, the first magnetic layer may be a thin-film coil. A first layer disposed in a region opposing a part of the first layer, and a second layer connected to a surface of the first layer on the gap layer side to form a magnetic pole portion; The layer includes parallel magnetic path portions, and a part of the thin-film coil is arranged on the side of the second layer in the first magnetic layer, so that the magnetic path length can be further reduced. It works.

According to the method of manufacturing a thin-film magnetic head of the fourth aspect or the thin-film magnetic head of the tenth aspect, the gap layer covers a part of the thin-film coil disposed on the side of the second layer. Since the insulating layer whose side surface is flattened is provided, there is an effect that the second magnetic layer can be accurately formed on the flat surface.

According to the thin film magnetic head of the present invention, the end of the second layer opposite to the medium facing surface defines the throat height. As a result, even when the track width is reduced, the throat height can be accurately and uniformly defined.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view for explaining one step in a method of manufacturing a thin-film magnetic head according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view for explaining a step following the step shown in FIG.

FIG. 3 is a cross-sectional view for explaining a step following the step shown in FIG. 2;

FIG. 4 is a cross-sectional view for explaining a step following the step shown in FIG. 3;

FIG. 5 is a cross-sectional view for explaining a step following the step shown in FIG. 4;

FIG. 6 is a sectional view of the thin-film magnetic head according to the first embodiment of the present invention.

FIG. 7 is a plan view of the thin-film magnetic head according to the first embodiment of the present invention.

FIG. 8 is a plan view showing an example of a mask pattern used for forming the upper magnetic pole layer of the thin-film magnetic head according to the first embodiment of the present invention by photolithography.

9 is a plan view showing an upper magnetic pole layer formed using the mask pattern shown in FIG.

FIG. 10 is a plan view showing a main part of a thin-film magnetic head according to a second embodiment of the present invention.

FIG. 11 is a cross-sectional view for explaining one step in a conventional method of manufacturing a thin-film magnetic head.

FIG. 12 is a cross-sectional view for explaining a step following the step shown in FIG. 11;

FIG. 13 is a cross-sectional view for explaining a step following the step shown in FIG. 12;

FIG. 14 is a sectional view for illustrating a step following the step shown in FIG. 13;

FIG. 15 is a plan view of a conventional thin-film magnetic head.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Substrate, 2 ... Insulating layer, 3 ... Lower shield layer, 5 ... MR
Element 8, lower magnetic pole layer 9, insulating layer, 10a first layer portion of thin film coil, 10b second layer portion of thin film coil, 1
0 ₁ , 10 ₂ : coil part, 11: insulating layer, 12: recording gap layer, 13: upper magnetic pole layer, 13 A: magnetic pole part, 13
B ... yoke portion, 13B _1, 13B ₂ ... parallel magnetic path part, 1
4 ... insulating film, 15 ... overcoat layer.

Claims (12)

[Claims] A first and a second magnetic layer magnetically coupled to each other and including magnetic pole portions facing each other on a medium facing surface side facing a recording medium, each including at least one layer; A gap layer provided between the magnetic pole portion of the magnetic layer and the magnetic pole portion of the second magnetic layer; and generating a magnetomotive force and transmitting the magnetomotive force to a magnetic path formed by the first and second magnetic layers. At least one of the magnetic layers includes a plurality of parallel magnetic path portions forming a plurality of parallel magnetic paths between a portion connected to the other magnetic layer and the magnetic pole portion; A thin-film magnetic head, wherein the coil includes a plurality of coil portions wound around each parallel magnetic path portion. 2. The thin-film magnetic head according to claim 1, wherein the at least one magnetic layer has a flat layer including the parallel magnetic path portion. 3. The first magnetic layer includes: a first layer disposed in a region facing a part of the thin-film coil;
And a second layer forming a magnetic pole portion, the second magnetic layer including the parallel magnetic path portion, and a part of the thin film coil is connected to the second magnetic layer. 3. The thin-film magnetic head according to claim 1, wherein the thin-film magnetic head is arranged on a side of the first magnetic layer beside the second layer. 4. An insulating layer covering a part of the thin-film coil disposed on a side of the second layer and having a flattened surface on a side of the gap layer. Item 3
The thin-film magnetic head as described in the above. 5. The thin-film magnetic head according to claim 3, wherein an end of the second layer opposite to the medium facing surface defines a throat height. 6. The thin-film magnetic head according to claim 1, wherein each of the coil portions is spirally wound around each of the parallel magnetic path portions. 7. A first and a second magnetic layer magnetically coupled to each other and including magnetic pole portions facing each other on a medium facing surface side facing a recording medium, each including at least one layer; The magnetic pole portion of the magnetic layer and the second
A gap layer provided between the magnetic pole portion of the magnetic layer,
A thin-film magnetic head, comprising: a thin-film coil for generating a magnetomotive force and transmitting the magnetomotive force to a magnetic path formed by the first and second magnetic layers, the method comprising: forming the first magnetic layer; Forming at least one of a step of forming the gap layer on the first magnetic layer, a step of forming the second magnetic layer on the gap layer, and a step of forming the thin-film coil. Forming a plurality of parallel magnetic path portions forming a plurality of parallel magnetic paths between a portion connected to the other magnetic layer and the magnetic pole portion, and forming the thin film coil. Forming a plurality of coil portions wound around each parallel magnetic path portion. 8. The method according to claim 7, wherein the step of forming at least one magnetic layer forms a flat layer including the parallel magnetic path portion. 9. The step of forming the first magnetic layer includes the steps of: forming a first layer disposed in a region facing a part of the thin film coil; and forming a first layer on a surface of the first layer on the gap layer side. And forming a second layer forming a magnetic pole portion, wherein the step of forming the second magnetic layer forms the parallel magnetic path portion, and the step of forming the thin film coil comprises the steps of: 9. The method of manufacturing a thin-film magnetic head according to claim 7, wherein a part of the thin-film magnetic head is disposed on a side of the first magnetic layer beside the second layer. 10. The method according to claim 10, further comprising the step of forming an insulating layer covering a part of the thin-film coil disposed on the side of the second layer and having a flattened surface on the gap layer side. The method for manufacturing a thin-film magnetic head according to claim 9. 11. The method according to claim 9, wherein an end of the second layer opposite to the medium facing surface defines a throat height. 12. The method according to claim 7, wherein each of the coil portions is spirally wound around each of the parallel magnetic path portions.