JP2001091260A - Piezoelectric vibration gyro - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric gyro, having to provide a structure not to apply the stress of a direct vibration to a soldered part and high durability against an impact, easy for assembling production superior in gyro characteristics having no noise, and suitable for automatic mass production. SOLUTION: In the case of this gyro, external connecting parts 2a-5a of each of electrodes 2-5 provided in the vicinity of two vibration nodes of a resonator 1 is bondedly sandwiched by conductive supporting members 9a, 9c on its upper surface side and by conductive support members 9b, 9d on its lower surface side, and terminal part 9a'-9d' extending from the bonded parts of support members 9a'-9d' are adhered connected to rod conductor terminal parts 7a-7d, 7a'-7d' provided so as to penetrate thorugh a frame part 7 respectively in an electrically and mechanically stable state. Straight line parts 10a-10d and arc parts 10a'-10d' of the conductive support members 9a-9d are point- symmetrically disposed with the bonded part as a center, and the length of each straight line part 10a-10d excluding each narrow part (bonded part) is longer than the bonded part to the resonant 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention belongs to a gyroscope mainly used for an automobile navigation system or a camera shake correction device of a camera-integrated VTR, and uses a cylindrical bending oscillator made of a piezoelectric material. Related to the piezoelectric vibrating gyroscope.

[0002]

2. Description of the Related Art Conventionally, a piezoelectric vibrating gyroscope of this kind is a gyroscope utilizing a mechanical phenomenon that generates a Coriolis force in a direction perpendicular to the direction of vibration when a rotating angular velocity is applied to a vibrating object. Are known.

In general, a piezoelectric vibrating gyroscope is a composite vibration system configured to enable excitation and detection in two different directions orthogonal to each other, that is, a driving electrode, a detection electrode, and a common electrode for a piezoelectric vibrator. In the configuration in which the ground electrode is provided, when a rotational angular velocity is applied to the piezoelectric vibrator in a state where the vibration is excited by the drive electrode, a force acts in a direction perpendicular to the vibration by the action of the Coriolis force described above. A new vibration is excited in the direction. The magnitude of this new vibration is proportional to the amplitude of the drive vibration generated by the drive voltage applied to the drive electrode and the rotational angular velocity applied to the piezoelectric vibrator. The magnitude of the applied angular velocity can be obtained from the magnitude of the obtained detection voltage.

FIG. 4 shows a basic configuration of a columnar piezoelectric vibrator 1 for a piezoelectric vibrating gyroscope according to an example of the related art. FIG. 4A is a perspective view from one direction, and FIG. ) Relates to a perspective view from another direction different from FIG. (A), and FIG. (C) relates to a cross-sectional view in one plane parallel to the end face.

The piezoelectric vibrator 1 is made of a columnar piezoelectric ceramic extending in a uniaxial direction, and has a pair of detecting electrodes 3 and 4 extending in a uniaxial direction on the side surface thereof. A plurality of electrode patterns are arranged so as to form the extended drive electrode 2 and the common ground electrode 5 that also extends in the circumferential direction while also extending in the uniaxial direction.
Positive (+) and negative (1) shown in FIG. 4C between the drive electrode 2 and the detection electrodes 3 and 4 and the common ground electrode 5, respectively.
And a polarization treatment with the polarity of

[0006] Of these, the common ground electrode 5 has an arch shape in which three local portions along one axial direction are connected in the circumferential direction as shown in FIGS. 4 (a) and 4 (b). From the center of the arch to the external connection portion 2 of the drive electrode 2 to be described later.
An external connection portion 5a is provided at an end extending in the direction a. Also, the local portion of the drive electrode 2 is routed in the circumferential direction,
An external connection portion 2a is provided at an end of the common ground electrode 5 facing the external connection portion 5a.
External connection portions 3a and 4a are also provided at the end portions of the reference numeral 4 respectively. Further, the external connection parts 2a, 3a, 4a, 5a
It is provided very close to the vibrating node vicinity position lines 6A and 6B, which are located near the nodes of vibration substantially along the tangential direction of the piezoelectric vibrator 1.

That is, in the case of the piezoelectric vibrator 1, two symmetrical lines extending in a direction substantially perpendicular to the uniaxial direction, which coincide with the driving direction of the columnar piezoelectric ceramics, are provided. Are supported on two vibrating node position lines 6A and 6B in the circumferential direction including the vibrating node near points at a distance equal to the distance from the vibrating nodes from both end surfaces of the driving electrode 2 and the common ground electrode. 5 and vibrates in the direction of the black arrow in FIG. At this time, when the rotational angular velocity is applied to the vibrating piezoelectric vibrator 1, vibration having an amplitude proportional to the rotational angular velocity is excited in the direction of the white arrow in FIG. 4C perpendicular to the driving direction. You.

FIG. 5 is a perspective view showing the external configuration of a piezoelectric vibrating gyroscope manufactured by mounting the piezoelectric vibrator 1 on the drive detection circuit board 11. As shown in FIG.

In this piezoelectric vibrating gyroscope, the piezoelectric vibrator 1 has a rubber-like soft elastic supporting member having adhesive properties at positions very close to its vibration nodes (on the above-described vibration node vicinity position lines 6A and 6B). It is arranged and supported on a pair of insulating holders 12 via 13a and 13b.

[0010] Of these, the supporting parts 13a and 13b include:
As the rubber-like soft elastic body, a resin having fluidity before curing and having adhesive properties after curing, such as a silicone resin, is used. The insulating holder 12 is connected and fixed to the connection terminals (not shown) on the drive detection circuit board 11 through four conductive terminals 16 buried in the main body by soldering or the like.
Also, the external connection portions 2a, 3 of the drive electrode 2, the detection electrodes 3, 4, and the common ground electrode 5 provided on the piezoelectric vibrator 1 are provided.
a, 4a and 5a are connected to another four conductive terminals 17 penetratingly buried in the insulating holder 12 via very delicate input / output leads 14. Further, an electronic component 15 such as a capacitor is mounted on the drive detection circuit board 11.

FIG. 6 is a schematic view for explaining the vibration of the piezoelectric vibrator 1 (rod-like flexural vibrator) in the piezoelectric vibrating gyroscope having such a configuration. Here, the amplitude of the flexural vibration is emphasized for ease of explanation, but the actual flexural vibration is extremely small.

In FIG. 6, a rectangle indicated by a solid line indicates the piezoelectric vibrator 1 in a stationary state (when not deformed), and an arc shape indicated by a chain line indicates an upwardly and downwardly bent vibration state (when deformed).
2 shows the piezoelectric vibrator 1 of FIG. In FIG. 6, the vibration nodes 6α ′ and 6β ′ are the piezoelectric vibrators 1 at rest or during vibration.
Of the true node of the vibration on the center line of the axis α, β
The above vibrating node near points 6α and 6β indicate locations on the surface of the piezoelectric vibrator 1 at a distance equal to the distance between the vibrating nodes 6α ′ and 6β ′ from both end faces. That is, the vibration node neighborhood point 6α,
The axes α and β including 6β are the above-described vibration node vicinity position lines 6A,
6B.

Here, if the piezoelectric vibrator 1 is in an infinitely fine state, the vibrating node points 6α and 6β coincide with the vibrating nodes 6α ′ and 6β ′ on the axes α and β. (Or the thickness), the vibrating nodes 6α and 6β move along the axes α1 and β1 when the first vibrating node moves on the axes α1 and β1, respectively.
The movement to the second vibrating node vicinity movement points 6α2 and 6β2 on α1 and 6β1 or axes α2 and β2 is shown.

Therefore, when the piezoelectric vibrator 1 is supported on its surface, ideally a position including the vibrating node near point 6α, the first vibrating node near moving point 6α1, and the second vibrating node near moving point 6α2. And a position including the vibrating node near point 6β, the first vibrating node near moving point 6β1, and the second vibrating node near moving point 6β2. Incidentally, such support is also an important problem with respect to vibration in the direction (drive side) orthogonal to the vibration in the drive direction excited by the Coriolis force when the rotational angular velocity is applied.

FIG. 7 is a perspective view showing a basic configuration of a piezoelectric vibrating gyroscope according to another conventional example and a supporting structure thereof.

This piezoelectric vibrating gyroscope is disclosed in
No. 32379, which vibrates at a position corresponding to a vibrator 111 having a substantially rectangular parallelepiped shape and two vibrating nodes N1 and N2 on a central axis O in a longitudinal direction generated when the vibrator 111 vibrates. Support members 112a, 112b, 112 for holding the child 111 from above and below
c, 112d, 112e, and 112f.

The vibrator 111 includes an electrode layer 11 between a first piezoelectric substrate 113 and a second piezoelectric substrate 114.
5, the first piezoelectric substrate 113 and the second piezoelectric substrate 114 are polarized in directions opposite to each other in the thickness direction as indicated by arrows. The surface of the first piezoelectric substrate 113 facing the electrode layer 115 is divided at predetermined intervals in the width direction, and the vibration nodes N1 and N2 of the vibrator 111 are separated.
A pair of three pairs of divided electrodes 116a and 116b are formed, each of which is divided into three on the end side in the longitudinal direction of the vibrator 111. Further, the common electrode 11 is formed on the entire surface of the second piezoelectric substrate 114 facing the electrode layer 115.
7 are formed.

On the other hand, the supporting members 112a, 112
Each of b, 112c, 112d, 112e, and 112f is made of a substantially Z-shaped thin metal plate, and has enlarged portions 118a, 11
8b, 118c, 118d, 118e and 118f are formed. Further, support members 112a and 112b are fixed to the portions of the divided electrodes 116a and 116b located on the upper side in the thickness direction of the vibrating body 111 at the vibration node N1 via the enlarged portions 118a and 118b by soldering or the like, respectively. An enlarged portion 118 is provided at a portion of the common electrode 117 located below the vibration body 111 in the thickness direction at the node N1.
The support member 112c is fixed by soldering or the like via c. Further, the divided electrodes 116a and 116b located above the vibration node N2 have enlarged portions 118d and 1 respectively.
The support members 112d and 112e are fixed via 18e, and the support member 112f is fixed via an enlarged portion 118f to the common electrode 117 located below the vibration node N2. Thus, the support members 112a to 112f
The vibrator 111 is sandwiched and supported in a sandwich manner from above and below at the vibration nodes N1 and N2.

In the case of the piezoelectric vibrating gyroscope having such a support structure, the common electrode 117 and the divided electrode 116 are provided from the transmitting circuit in the attached circuit configuration (detailed description is omitted).
When a drive voltage is applied to the first and second piezoelectric substrates 113a and 116b, the first piezoelectric substrate 113 and the second piezoelectric substrate 114 vibrate (bend) in a direction perpendicular to their main surfaces, and the vibrating gyroscope is driven by the vibrator 111. When rotated about the central axis O of
Coriolis force is generated according to the rotational angular velocity. At this time, the generated Coriolis force is parallel to the main surfaces of the first piezoelectric substrate 113 and the second piezoelectric substrate 114, and
11 works in a direction orthogonal to the central axis O. Due to this Coriolis force, the direction of the bending (deflection) vibration of the vibrator 111 is changed, a signal corresponding to the rotational angular velocity is generated between the divided electrodes 116a and 116b, and the differential amplifier circuit connected to the divided electrodes 116a and 116b. Since the detection voltage is detected, the applied rotational angular velocity can be obtained from the magnitude of the detection voltage. Also in this vibrator 111, the point where the point near the vibrating node moves with the occurrence of bending (bending) vibration is determined by the piezoelectric vibrator 1 according to the example described with reference to FIG.
Is the same as

FIG. 8 is a perspective view schematically showing the piezoelectric vibrating gyroscope shown in FIG. 7 in a mounted state. However, in FIG. 8, the detail structure of the vibrator 111 shown in FIG. 7 is simplified and shown in a rectangular parallelepiped shape in consideration of the visibility.

In this case, the vibrator 111 is
a to 112f so as to be accommodated in the frame 131 while being suspended, and the upper surface of the frame 131 and the support members 112a, 112b, 112d, and 112e are adhesively fixed, and the lower surface of the vibrator 111 and the frame 131
The lower surface of the frame 131 and the supporting members 112c and 112f are bonded and fixed so that the lower surface of the vibrator 111 is disposed on the same plane, whereby the vibrating body 111 is supported and fixed in a hollow state. I have. Incidentally, in the case of this piezoelectric vibrating gyroscope, the support members 112c and 112 on the lower surface are used.
f, each support member 112a-112f
, The straight line connecting the adhesive fixing portions to the frame 131 at both ends thereof and the straight line formed by the fixing portion to the vibrator 111 via the substantially Z-shaped bent portion are parallel to each other.

[0022]

In the case of the piezoelectric vibrating gyroscope according to the above-described conventional example, the influence of the movement of the point near the vibration node during flexural vibration is absorbed by the elasticity of the rubber-like soft elastic body used as the supporting member. This reduces the effect on the vibration of the piezoelectric vibrator, but this rubber-like soft elastic body has fluidity before curing, and has adhesive properties after curing. In addition, the support position and the support width in the circumferential direction are large, which tends to be irregular, and the relaxation function for absorbing the influence of the movement of the point near the vibration node becomes unstable, and the In addition to the problem that the load is also easily changed, the sharpness (Q) of the vibration is reduced, and the supporting state of the rubber-like soft elastic body is easily changed due to aging or the like. In these cases Along with adverse effects on the vibration characteristics or a gyro characteristics of the piezoelectric vibrator, there is a problem that has become a major factor causing variation in these properties.

In the case of a support structure using a support member made of a rubber-like soft elastic material, each of the piezoelectric vibrators is provided so as to be able to tolerate movement of the piezoelectric vibrator due to external mechanical shock. The input and output lead wires used for electrical connection between the external connection part of the electrode and the conductor terminal penetrated and buried in the insulating holder are arranged in a circular arc, but the size and path of this arc are automatically mounted. In addition, since the load of the piezoelectric vibrator is not uniform, the connection of the input / output lead wires also causes variations in the vibration characteristics and gyro characteristics.

Furthermore, since the support by the support member is performed on the lower surface (one surface) of the piezoelectric vibrator, an external mechanical shock is applied in a horizontal direction perpendicular to one axial direction of the piezoelectric vibrator. In this case, since the piezoelectric vibrator is swung so as to rotate about the supporting portion, there is a problem that the influence of the shock at this time is likely to be output as noise.

On the other hand, in the case of a piezoelectric vibrating gyroscope according to another conventional example, since the vibrator is supported in a sandwich manner in the support structure, a low-profile piezoelectric vibrating gyroscope is obtained, and the vibrator vibrates when vibrating. In this support structure, both ends of the support member are fixed to the frame body, while the possibility that troubles such as the vibrator dropping off the support member and the vibrator dropping is reduced and the impact resistance is improved. When the fixing point is located on a straight line perpendicular to the central axis of the vibrator, and the fixing portion of the support member to the vibrator is in a position parallel to the line to which the frame and the support member are fixed, It is easy to rotate the line to which the frame and the support member are to be fixed in the center direction during the fixing work, and it is difficult to keep the upper surface of the frame or the lower surface of the frame and the support member respectively flat, and at the same time, Are those hard to perform relative positioning of the fixing portion on the wear part and the vibrator and the support member, there is a problem that assembly manufactured is not easy.

Further, in the configuration in which only the bent portion is provided on the support member, the movement of the point near the vibration node cannot be sufficiently balanced with respect to the driving and the driving by the Coriolis force and the bending (bending) vibration in the orthogonal direction. Also, there is a problem that the damping phenomenon that the vibration of the vibrator is transmitted to the supporting member and leaks out cannot be sufficiently suppressed.

Further, in general, a piezoelectric vibrator always repeats minute vibrations in the vertical direction by a drive voltage applied from a drive detection circuit in an operating state, and also in a direction perpendicular to the drive direction when a rotational angular velocity is applied. Vibration is excited, and when soldering is performed using a copper-based elastic material such as phosphor bronze due to its superiority in solderability as a support member, the support member is hardened by the solder and elasticity is increased. There is a problem that it is lost and becomes brittle [especially if a minute vibration is applied directly directly to the supporting portion (soldering portion) of the piezoelectric vibrator, there is a risk of breaking or the like]. In consideration of the above, in the case of a piezoelectric vibrating gyroscope according to another conventional example, in order to obtain a stronger connection with the vibrator at the joint with the vibrator, an expanded portion or an expanded portion provided with a through hole in the support member is required. Have Because, there is a problem that such a joint if structure (enlarged section) and the solder in the boundary portion between the other thin support members can not avoid fatal problems such as breakage described above to adhere.

The present invention has been made in order to solve such problems, and the technical problem thereof is that deterioration of vibration characteristics due to support and variation in various characteristics can be suppressed, and furthermore, vibration of direct vibration is not directly applied to the soldering portion. To provide a piezoelectric vibrating gyro with a structure that does not apply stress, has high durability against external impacts, has excellent gyro characteristics without noise generation, is easy to assemble and manufacture, and is suitable for automatic mass production. is there.

[0029]

According to the present invention, a plurality of electrode patterns including a driving electrode, a detecting electrode, and a common earthing electrode are formed on a surface of a columnar piezoelectric ceramic extending in an axial direction. The external extraction portions of the plurality of electrode patterns coincide with the driving direction of the columnar piezoelectric ceramics, and are positioned on two mutually symmetrical lines extending substantially perpendicular to the uniaxial direction. A columnar piezoelectric vibrator arranged very close to the vibration node of the location, and a columnar piezoelectric vibrator joined and sandwiched and supported by external extraction portions from both sides opposing perpendicularly in one axial direction, and the columnar piezoelectric vibrator is supported. A columnar piezoelectric element having a plurality of conductive support members having terminal portions formed at both ends extended from a portion joined to the vibrator and a plurality of fixing portions for connecting and fixing the plurality of terminal portions at predetermined positions. Vibrator inside A piezoelectric vibrating gyroscope comprising: a frame fixed in a state in which a plurality of terminal portions and a plurality of fixing portions are connected and fixed at a line perpendicular to a uniaxial direction different from the two lines. In the plurality of conductive support members, the length from one of the connection fixing points to the other through the joining portion to the columnar piezoelectric vibrator in a direction parallel to a line orthogonal to the uniaxial direction Each of the two straight lines has the same shape in which the arc portion extends from both ends of the straight line portion having an extra length longer than the straight line distance. A line that is connected and fixed to the joint to the columnar piezoelectric vibrator so as to intersect with any one of the lines, and that the connection fixing point to the terminal on the end side of the arc is orthogonal to the uniaxial direction In the opposite direction deviated from the direction parallel to The linear portion and the circular arc portion are point-symmetrical with respect to the joint portion as a whole, and are arranged in a mirror image symmetry crosswise pair by being placed on each other. Is
The length is longer than the length of the joint to the columnar piezoelectric vibrator,
The width is smaller than the arc and other parts at the joint,
In the other portion, a piezoelectric vibrating gyroscope larger than the arc portion can be obtained.

Further, according to the present invention, in the piezoelectric vibrating gyroscope, the plurality of terminals have a portion larger than the width of the other portion of the linear portion between the connection fixing point and the arc portion. A piezoelectric vibrating gyroscope is obtained.

Further, according to the present invention, in any of the above piezoelectric vibrating gyroscopes, the columnar piezoelectric vibrator can be a columnar piezoelectric vibrator.

[0032]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 shows the basic structure of a columnar piezoelectric vibrator 1 used in a piezoelectric vibrating gyroscope according to one embodiment of the present invention. FIG. FIG. 2 (b) relates to an external perspective view from another direction different from FIG. 2 (a), and FIG. 2 (c) relates to a cross-sectional view in a plane parallel to the end face.

The piezoelectric vibrator 1 is made of a columnar piezoelectric ceramic extending in one axial direction, and has a drive electrode 2 extending in one axial direction without extending in the circumferential direction on a side surface thereof, and a driving electrode 2 extending in one axial direction. And a pair of detecting electrodes 3 and 4 which extend in the circumferential direction and face each other in the circumferential direction, and three local portions extending in parallel along the uniaxial direction are connected by a circumferentially extending local portion. As shown in FIG. 1C, a plurality of electrode patterns are provided so as to form the common ground electrode 5 and between the drive electrode 2 and the detection electrodes 3 and 4 and the common ground electrode 5. It is made by performing a polarization process with positive (+) and negative (-) polarities.

However, the external connection portion for connecting each electrode to the outside here is shown in FIG. 1 (a) and FIG.
As shown in (b), the external connection portion 2a of the drive electrode 2
And the external connection part 5a of the common ground electrode 5 are formed so as to be included in the electrode local part, and the external connection part 3a of the detection electrode 3 and the external connection part 4a of the detection electrode 4 are provided as special terminals. . A set of an external connection portion 2a of the drive electrode 2 and an external connection electrode 3a of the detection electrode 3 is disposed on a line extending substantially parallel to the axial direction on the peripheral surface of the columnar piezoelectric vibrator 1, and The external connection portion 5a of the common ground electrode 5 and the external connection portion 4a of the detection electrode 4 are provided on both ends of the cylindrical piezoelectric vibrator 1 on a line on the peripheral surface symmetrical with respect to the one axis direction of the cylindrical piezoelectric vibrator 1. From the vibration node (vibration node 6 in FIG. 9)
(see α ′, 6β ′) and a point near the vibration node at a distance equal to the distance from the vibration node (see points 6α and 6β near the vibration node in FIG. 9)
Are disposed very close to the vibration nodes on the vibration node vicinity position lines 6A and 6B.

That is, in the case of the columnar piezoelectric vibrator 1, the driving electrode 2, the pair of detecting electrodes 3 and 4, and the common grounding electrode 5 are provided on the surface of the columnar piezoelectric ceramic extending in one axis direction. And a plurality of external patterns 2a, 3a, and 4 for each electrode pattern.
a, 5a coincide with the driving direction of the cylindrical piezoelectric ceramic,
In addition, the columnar piezoelectric ceramic is located in the vicinity of two vibration nodes located on two mutually symmetrical lines (vibration node vicinity position lines 6A and 6B) extending substantially perpendicular to the uniaxial direction. It is the configuration that was done.

FIG. 2 shows the columnar piezoelectric vibrator 1 shown in FIG. 1 with conductive supporting members 9a to 9d and rod-shaped conductor terminals 7a to 7d.
FIG. 7 is a plan view showing a basic configuration of a piezoelectric vibrating gyroscope according to one embodiment, which is mounted and fixed to a frame 7 using d, 7a ′ to 7d ′.

The piezoelectric vibrating gyroscope includes a cylindrical piezoelectric vibrator 1 having the above-described configuration, a total of four conductive supporting members 9a to 9d for supporting the cylindrical piezoelectric vibrator 1, and And a frame 7 for mounting and fixing the columnar piezoelectric vibrator 1 in a hollow state using the supporting members 9a to 9d.

Of these, each of the conductive supporting members 9a to 9d
Means that the cylindrical piezoelectric vibrator 1 is joined and sandwiched by external take-out portions 2a, 3a, 4a, 5a from both sides (upper side, lower side in FIG. 2) opposed to each other vertically in the uniaxial direction, A total of eight terminal portions 9 a ′, 9 a ″, 9 b ′, 9 b ″, 9 are provided at both ends extending from a portion joined to the piezoelectric vibrator 1.
c ', 9c ", 9d', 9d" (however, in the plan view of FIG. 2, the external connection portions 4a, 5a and the terminal portions 9b ', 9b ", 9d' on the lower surface side are shown because of the appearance from the upper surface direction. , 9
d ″ are not shown).

The frame 7 has terminals 9a ', 9a ", 9
b ', 9b ", 9c', 9c", 9d ', 9d "have a total of eight fixing portions at predetermined locations for connecting and fixing, and each terminal portion 9a', 9a", 9b ', 9b ", 9
The fixed points of connection between c ', 9c ", 9d', 9d" and each of the fixing portions are two lines (position lines 6A and 6B near the vibrating node).
Are located on a line orthogonal to the uniaxial direction different from the above.
The frame 7 has a drive detection circuit board (not shown) on which a drive detection circuit for applying a drive voltage to the drive electrode 2 and the common ground electrode 5 to obtain a detection voltage from the detection electrodes 3 and 4 is provided. A predetermined number of rods are provided at predetermined positions of the frame 7 for positioning and connecting and fixing the conductive support members 9a to 9d and the drive detection circuit of the drive detection circuit board. The conductor terminal portions 7a, 7a ', 7b,
A plurality of through holes are provided so that 7b ', 7c, 7c', 7d, 7d 'can be arranged.

Further, each conductive support member 9a, 9b, 9
c and 9d are linear distances in a direction parallel to a line perpendicular to the uniaxial direction in a length from one of the connection fixing points to the other through the joint to the cylindrical piezoelectric vibrator 1. Straight sections 10a, 10
b, 10c, 10d from both ends.
b ', 10c', and 10d 'extend (however, in the plan view of FIG. 2, the linear portions 10b, 10c and the arc portions 10b', 10c 'on the lower surface side are illustrated because of the appearance from the upper surface direction. (Not shown) and straight portions 10a, 10b, 1 on both sides (upper surface, lower surface) with respect to each of two lines (vibration node vicinity position lines 6A, 6B).
0c and 10d are two lines (vibration node vicinity position lines 6A and 6A).
B) is connected and fixed to the joint to the columnar piezoelectric vibrator 1 so as to intersect with any one of B)
Terminal portions 9a ', 9a ", 9b', 9b", 9c ', 9 on the end sides of 0a', 10b ', 10c', 10d '.
The connection fixing points for c ″, 9d ′, and 9d ″ are located in the opposite directions that are shifted from the direction parallel to the line orthogonal to the uniaxial direction, so that the entire linear portions 10a to 1d
0d and the arc portions 10a 'to 10d' are point-symmetrical with respect to the joint, and are arranged in a mirror-image crosswise manner. ).

In addition, each terminal 9a ', 9a ", 9
b ', 9b ", 9c', 9c", 9d ', 9d "
Each of the rod-shaped conductor terminal portions 7a, 7a ', 7b, 7b', 7c,
7c ', 7d, 7d' are provided in a one-to-one manner by a through-hole opening (this opening is substantially U-shaped with one direction cut out).
(It may be a letter-shaped hole).

Thus, each of the bar-shaped conductor terminal portions 7a, 7
a ', 7b, 7b', 7c, 7c ', 7d, 7d'
After penetrating through the plurality of through holes in the frame 7 on a one-to-one basis, it is joined to the drive detection circuit board and connected to the required wiring pattern of the drive detection circuit.
9a ", 9b ', 9b", 9c', 9c ", 9d ', 9
d ″ is fitted one-to-one with the opening and connected and fixed by soldering or the like.

That is, in this state, the external connection of the drive electrode 2, the common ground electrode 5, and the detection electrodes 3, 4 disposed very close to the two vibration nodes of the bending vibration of the columnar piezoelectric vibrator 1. The portions 2a, 5a, 3a, 4a are sandwiched and sandwiched between the conductive support members 9a, 9c on the upper surface side and the conductive support members 9b, 9d on the lower surface side, and extend from the joint portions of the conductive support members 9a to 9d. Each terminal part 9a ', 9a ", 9b', 9
b ", 9c ', 9c", 9d', 9d "are penetrated through the frame 7 and are disposed in the form of rod-shaped conductor terminals 7a, 7a ', 7
b, 7b ', 7c, 7c', 7d, 7d 'are connected and fixed stably electrically and mechanically.

FIG. 3 is an enlarged plan view showing a main part of the piezoelectric vibrating gyroscope shown in FIG. 2, and FIG. 3 (a) shows each electrode 2, 3, 4, 4 in the columnar piezoelectric vibrator 1. 5 relates to a main part of one of two lines (vibration node vicinity position lines 6A, 6B) on which the external connection portions 2a, 3a, 4a, 5a are arranged (oscillation node vicinity position line 6B). b) is the same as FIG.
It is related to an enlarged view of a main part of FIG. However, the frame 7 is omitted here so that the arrangement of the conductive support members 9a and 9b can be easily seen.

Referring to FIGS. 3A and 3B, the length of the linear portion 10a of the conductive support member 9a is longer than the length of the portion joined to the columnar piezoelectric vibrator 1 and the width thereof. Form a narrow portion 10a ″ at a joint portion with the cylindrical piezoelectric vibrator 1, and at other portions are larger than the arc portion 10a ′, and a terminal portion on the end side of the arc portion 10a ′. 9
It can be seen that a ′, 9a ″ has wide portions 8a, 8a ′ between the connection fixing point and the arc portion 10a ′ as portions larger than the width of the other portion of the linear portion 10a.

That is, since the conductive support members 9a to 9d have the same shape, the other conductive support members 9b, 9c, 9d
Similarly, the narrow portions 10b ', 10c', and 10d 'of the linear portions 10b, 10c, and 10d respectively correspond to the narrow portions 10b.
b ", 10c", 10d ", and the arc portions 10b ', 1
Terminal portions 9b ', 9b ", 9 on the end sides of 0c', 10d '.
c ′, 9c ″, 9d ′, 9d ″ are the connection fixed points and the arc 1
0b ', 10c', and 10d 'between the linear portions 10b, 1
Wide portions 8b, 8b ', 8c, 8c', 8d, 8d 'are provided as portions larger than the widths of the other portions of 0c and 10d.

As described above, each of the conductive support members 9a to 9d
Each of the straight portions 10a to 10d has a narrow portion 10a "to 10d".
Is provided, it is possible to solder the columnar piezoelectric vibrator 1 with a small amount of solder.
External connection parts 2a, 3a, 4a, 5a in 3, 4.5
Can be directly visually recognized, so that the solderability of each of the conductive support members 9a to 9d and the external connection portions 2a, 3a, 4a, 5a can be confirmed, and the reliability for soldering can be improved. Also, each narrow portion 10a ″ of each straight line portion 10a to 10d
Since the length of the portion other than 10d "is longer than the joint portion (narrow portion 10a" to 10d ") with the cylindrical piezoelectric vibrator 1, solder is applied to the boundary between the arc portions 10a 'to 10d'. Since there is no adhesion, the stress of the repetitive vibration of the columnar piezoelectric vibrator 1 is absorbed by each of the arc portions 10a 'to 10d' and the boundary portion where the soldering is not attached, and does not directly act on the soldering portion. Breakage, which was a fatal problem of each of the conductive support members 9a to 9d at the attachment portion, does not occur, and high reliability can be obtained.
Each arc portion 10a'-10 of each conductive support member 9a-9d
Even if d 'is formed in another shape other than the arc shape, for example, a bent portion formed point-symmetrically with respect to the joint portion with the cylindrical piezoelectric vibrator 1, the same can be obtained.

Referring to FIG. 3 (a), in the case of the conductive support member 9a connected to the frame 7 from the upper surface side, the straight portion 10a has two lines (vibration node vicinity position lines 6A and 6B). ) (The driving electrode in this case) so as to intersect a line Lc perpendicular to the one axis direction of the columnar piezoelectric vibrator 1 indicating one of the above (the vibrating node position line 6B). 2 is connected to the external connection portion 2a), and the terminal portion 9 on the end side of the arc portion 10a 'extending from both sides of the linear portion 10a.
a ′, 9a ″ is a different line L parallel to the line Lc.
b and La, respectively. Further, in the case of the conductive support member 9b connected to the frame 7 from the lower surface side, similarly, the joint portion (here, the common ground electrode 5 of the common ground electrode 5) to the cylindrical piezoelectric vibrator 1 so that the linear portion 10b intersects the line Lc. The terminal portions 9b 'and 9b "on the end side of the arc portion 10b' joined to the external connection portion 5a) and extending from both sides of the linear portion 10b are placed on different lines La and Lb parallel to the line Lc with the line Lc interposed therebetween. Each is arranged.

The effect of such an arrangement is that, as in the case of the conventional support structure described with reference to FIG. 8, the support members (typically represented by the support members 112c and 112f on the lower surface) are bonded and fixed to the frame at both ends. Since the straight line connecting the portions and the straight line formed by the fixed portion of the support member to the vibrator via the substantially Z-shaped bent portion are parallel, the frame body and the support member are fixed during the fixing work. There is no problem that it is easy to rotate around the line, and it is difficult to arrange the upper or lower surface of the frame and the support member on a plane, respectively, and the upper or lower surface of the frame 7 and each of the conductive support members 9a to 9a to 9d and each can be held and fixed on a perfect plane.

Further, the bar-shaped conductor terminal portions 7a, 7a ', 7b, 7b', 7c, 7 provided at predetermined positions on the frame 7 in advance.
Terminal portions 9a ', 9a ", 9b', 9b", 9c ', 9 at both ends of the conductive support members 9a to 9d are provided at c', 7d, 7d '.
c ", 9d ', 9d", the through-holes provided therein are fitted and fixed, and similarly, the bar-shaped conductor terminal portions 7a, 7a', 7b, 7b ', 7c, 7c ', 7
By joining the drive detection circuit board to d and 7d ',
The relative positions of the columnar piezoelectric vibrator 1, the conductive support members 9a to 9d, the frame 7, and the drive detection circuit board can be accurately set.

As is apparent from FIG. 3, the conductive support member 9a is formed such that the portion from the external connection portion 2a of the drive electrode 2 to the terminal portion 9a 'in the cylindrical piezoelectric vibrator 1 is connected to the external connection portion 2a. It has the same dimensions as the portion up to the terminal portion 9a ″, and the shape is point-symmetric with respect to the external connection portion 2a of the drive electrode 2 on the columnar piezoelectric vibrator 1. Other conductive support members 9b, The conductive support members 9a on the upper surface have exactly the same structure.
The shape and arrangement of the lower conductive support member 9c (or the lower conductive support member 9c) are mirror-symmetrical to the lower conductive support member 9b (or the upper conductive support member 9d).

The operation of the piezoelectric vibrating gyroscope having the above-described configuration when the excitation vibration occurs with or without the application of the rotational angular velocity in one vibration state will be described. However, here, at a local portion of the columnar piezoelectric vibrator 1 (the component in FIG. 2 corresponding to the component described in FIG. 3A), the columnar piezoelectric vibrator 1 is driven in the front and back directions on the paper surface. When the rotational angular velocity is applied under the situation near the supporting part where
It is assumed that Coriolis force is applied to the columnar piezoelectric vibrator 1 and bending vibration is excited in a direction perpendicular to the driving direction of the columnar piezoelectric vibrator 1.

In this piezoelectric vibrating gyroscope, when the rotational angular velocity is not applied, the external connection portion 2a of the drive electrode 2 which is the joining portion between the rod-shaped conductor terminal portion (fixed portion) 7a on the frame 7 and the columnar piezoelectric vibrator 1 The shape of the conductive support member 9a formed between the cylindrical piezoelectric vibrator 1 and the rod-shaped conductor terminal portion (fixed portion) 7a 'on the frame 7 around the external connection portion 2a
Support member 9 formed between external connection portion 2a
The shape of the conductive support member 9b on the lower surface side is the same as the shape of the conductive support member 9b.

A Coriolis force is generated and the columnar piezoelectric vibrator 1
Is bent, the portion between the bar-shaped conductor terminal portion 7a and the external connection portion 2a of the conductive support member 9a on the upper surface side and the portion between the bar-shaped conductor terminal portion 7a 'and the external connection portion 2a are completely lost. It is deformed point-symmetrically around the external connection part 2a so that it can be spread in the same shape. Due to the deformation of the deformed portions, forces in directions opposite to each other act on the external connection portion 2a. However, this force deforms both deformed portions of the conductive support member 9a completely equally, so that the forces become equal and mutually deformed. They cancel each other out at the external connection part 2a.

On the other hand, as for the conductive support member 9b, a portion between the rod-shaped conductor terminal portion 7b and the external connection portion 5a and a portion between the rod-shaped conductor terminal portion (fixed portion) 7b 'and the external connection portion 5a. Is deformed symmetrically about the external connection portion 5a so as to be narrowed. Due to the deformation of both deformation parts, the external connection part 5
Although forces in directions opposite to each other act on a, the deformed portions of the conductive support member 9b are completely deformed equally, so that the forces are equal to each other and cancel each other out at the external connection portion 5a. Since the conductive support members 9a and 9b have exactly the same shape and dimensions and are formed point-symmetrically about the external connection portions 2a and 5a, the above-mentioned forces are completely equal. Therefore, since all forces acting on the bending vibration in the direction orthogonal to the driving direction excited by the Coriolis force cancel each other, no force is applied to the external connection portion, and the excited bending vibration is reduced. No leakage to the outside.

By the way, the operation of the conductive support portions 9a and 9b arranged on one of the vibration nodes among the conductive support portions 9a to 9d located very close to the two vibration nodes has been described. However, even in the configuration of the entire columnar piezoelectric vibrator 1 including the conductive support portions 9c and 9d arranged on the other vibration node side, all the forces acting in the same manner cancel each other out.

[0058]

As described above, according to the piezoelectric vibrating gyroscope of the present invention, the external connecting portions of the respective electrodes disposed in the vicinity of the two vibration nodes of the columnar piezoelectric vibrator 1 have a columnar shape. Joined and held by a plurality of conductive support members having a shape arranged point-symmetrically with respect to the joining portion to the piezoelectric vibrator,
Basically, each terminal portion extending from a joint portion of each conductive support member is electrically and mechanically stably connected and fixed to a plurality of rod-shaped conductor terminal portions disposed through the frame body. In the configuration, each of the conductive support members is constituted by a pair of two pairs in which the linear portion and the arc portion are point-symmetrical with respect to the joint portion and are arranged mirror-symmetrically crosswise. A narrow portion was provided in each linear portion of each conductive support member, and the solderability between each conductive support member and the external connection portion was checked with a small amount of solder while observing the wettability while directly viewing the external connection portion of each electrode. In addition, the length of each linear portion other than each narrow portion is made longer than the joint portion (narrow portion) with the columnar piezoelectric vibrator, and the boundary between each linear portion and each arc portion is formed. Stress caused by repeated vibration of the columnar piezoelectric vibrator without solder The vibrator is sandwiched from above and below by the conventional support member, and is absorbed by the arc portion and the boundary portion where there is no adhesion of soldering and does not directly act on the soldering portion. Prevents generation of noise due to vibration of the piezoelectric vibrator due to external mechanical shock that could not be solved by the piezoelectric vibrator support structure of the piezoelectric vibratory gyroscope that connects and fixes the joint part by soldering, and repeated piezoelectric vibrator It is possible to solve problems such as prevention of breakage of the support member caused by stress applied to the joint portion due to vibration, securing high impact resistance, and prevention of vibration leakage from the support portion at the time of bending vibration due to Coriolis force. The relative positioning of the piezoelectric vibrator, the conductive support member, the frame, and the drive detection circuit board can be easily set, and automatic assembly becomes possible. As a result, the structure does not directly apply vibrational stress to the soldered part, has high durability against impact, has little noise-free variation, has excellent gyro characteristics, is easy to assemble and manufacture, and is suitable for automatic mass production. The piezoelectric vibrating gyro can be provided at low cost.

[Brief description of the drawings]

FIG. 1 shows a basic configuration of a columnar piezoelectric vibrator used in a piezoelectric vibrating gyroscope according to one embodiment of the present invention.
(A) relates to an external perspective view from one direction, (b)
7A relates to an external perspective view from another direction different from FIG. 7A, and FIG. 7C relates to a cross-sectional view in one plane parallel to the end face.

FIG. 2 is a plan view showing a basic configuration of a piezoelectric vibrating gyroscope according to one embodiment in which the columnar piezoelectric vibrator shown in FIG. 1 is mounted and fixed to a frame using a conductive support member and a rod-shaped conductor terminal portion. .

FIG. 3 is an enlarged plan view showing a main part of the piezoelectric vibrating gyroscope shown in FIG. 2; FIG. 3 (a) is a diagram illustrating two lines on which external connection portions of respective electrodes in a cylindrical piezoelectric vibrator are arranged; (B) relates to an enlarged view of a main part of (a).

4A and 4B show a basic configuration of a columnar piezoelectric vibrator for a piezoelectric vibrating gyroscope according to a conventional example, wherein FIG. 4A is a perspective view from one direction, and FIG. 4B is different from FIG. (C) relates to a cross-sectional view in one plane parallel to the end face.

FIG. 5 is a perspective view showing an external configuration of a piezoelectric vibrating gyroscope manufactured by mounting the piezoelectric vibrator shown in FIG. 4 on a drive detection circuit board.

FIG. 6 is a schematic view for explaining vibration of a piezoelectric vibrator (rod-shaped flexural vibrator) in the piezoelectric vibrating gyroscope having the configuration described in FIG. 5;

FIG. 7 is a perspective view showing a basic configuration of a piezoelectric vibrating gyroscope and a supporting structure thereof according to another conventional example.

FIG. 8 is a perspective view schematically showing the piezoelectric vibrating gyroscope shown in FIG. 7 in a mounted state.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Piezoelectric vibrator 2 Drive electrode 2a, 3a, 4a, 5a External connection part 3, 4 Detection electrode 5 Common ground electrode 6A, 6B Position line near vibration node 6α, 6β Point near vibration node 6α1, 6β1, 6α2, 6β2 Vibration node Near moving point 6α ', 6β', N1, N2 Vibration node 7, 131 Frame 7a to 7d, 7a 'to 7d' Conductive rod-shaped terminal portion 8a to 8d, 8a 'to 8d' Wide portion 9a to 9d Conductive support Members 9a 'to 9d', 9a "to 9d" Terminals 10a to 10d Linear parts 10a 'to 10d' Arc parts 10a "to 10d" Narrow parts 11 Drive detection circuit parts 12 Insulating holders 13a, 13b Supporting parts 14 Input / output Lead wire 15 electronic component 16 conductive terminal 111 vibrator 112a, 112b, 112c, 112d, 112e,
112f Supporting members 113, 114 Piezoelectric substrate 115 Electrode layer 116a, 116b Split electrode 117 Common electrode 118a, 118b, 118c, 118d, 118e,
118f Enlarged part O Center axis

Claims (3)

[Claims] 1. A plurality of electrode patterns including a driving electrode, a detecting electrode, and a common earth electrode are formed on a surface of a columnar piezoelectric ceramic extending in a uniaxial direction, and an external extraction portion of the plurality of electrode patterns is provided. Positioned in the vicinity of two vibration nodes of the columnar piezoelectric ceramic, which are located on two mutually symmetrical lines that coincide with the driving direction of the columnar piezoelectric ceramic and extend substantially perpendicular to the uniaxial direction. The columnar piezoelectric vibrator having the configuration described above, and the columnar piezoelectric vibrator is supported by being sandwiched and held by the external take-out portions from both sides facing perpendicularly to the uniaxial direction, and from a joint portion to the columnar piezoelectric vibrator. The columnar piezoelectric vibrator is in a hollow state having a plurality of conductive support members having terminal portions formed at both ends to be extended and a plurality of fixing portions for connecting and fixing the plurality of terminal portions at predetermined positions. Take in A piezoelectric element comprising: a frame fixed at the connection between the plurality of terminal portions and the plurality of fixing portions, the frame being positioned on a line orthogonal to the uniaxial direction different from the two lines. In the vibrating gyroscope, the plurality of conductive support members have a length orthogonal to the uniaxial direction from one of the connection fixing points to the other through a joint portion to the columnar piezoelectric vibrator. Each of the two straight lines has the same shape in which the arc portions extend from both ends of the straight line portion having an extra length longer than the straight line distance in the direction parallel to the line, and the two lines are formed on both sides. Connected and fixed to the joint to the columnar piezoelectric vibrator so that the straight portion intersects with one of the two lines,
The connection fixing point for the terminal portion on the end side of the circular arc portion is placed in a direction opposite to a direction parallel to a line orthogonal to the uniaxial direction in opposite directions, so that the entire linear portion and The arc portion comprises a pair of two pairs which are arranged point-symmetrically and mirror-symmetrically crosswise with respect to the joint portion, and the linear portion has a length of the joint portion to the columnar piezoelectric vibrator. A piezoelectric vibrating gyroscope having a length longer than a length and a width smaller at the joint portion than at the arc portion and other portions, and larger at the other portion than at the arc portions. 2. The piezoelectric vibrating gyroscope according to claim 1, wherein the plurality of terminal portions have a portion larger than the width of the other portion of the straight portion between the connection fixing point and the arc portion. A piezoelectric vibrating gyroscope characterized by comprising: 3. The piezoelectric vibrating gyroscope according to claim 1, wherein said columnar piezoelectric vibrator is a columnar piezoelectric vibrator.