JP2001084793A - Physical coordinate transformation system of physical address of memory cell, coordinate transformation method and recording medium storing coordinate transformation program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for preparing a transformation table for transforming fail bit map data in the test process of a semiconductor memory into physical coordinates using design data. SOLUTION: The method for forming a conversion table comprises a step (S107) for defining an placement pattern of memory cells being repeated a plurality of times as a basic pattern, a step (S107) for associating the local physical address of the memory cell with physical coordinates, a step (S109) for grouping the memory cells based on a basic pattern, and a step (S111) for associating the physical address at the origin of a basic pattern referring to the origin of all memory cells with physical coordinates.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a fail bit map (Fail Bit Map) obtained in a test process of a semiconductor memory.
Hereafter, it is referred to as FBM. The present invention relates to a system and method for performing coordinate conversion between a physical address and physical coordinates of defect data obtained in a defect inspection step, and a computer-readable recording medium storing a control program thereof.

[0002] The physical address is a two-dimensional address system used when displaying as a fail bit map, and is, for example, a DRAM (dynamic random accumulator).
In the case of essmemory, the coordinate system is such that the word lines are set vertically and the bit lines are set horizontally or vice versa.

The physical coordinates indicate the absolute positional relationship of each memory cell. For example, when the physical coordinates are expressed by two orthogonal X-axis and Y-axis components, the X-axis component The larger the value is, the farther from the origin along the X-axis, and similarly, the larger the component in the Y-axis direction, the farther from the origin along the Y-axis. Further, if the component in the X-axis direction doubles, the distance in the X-axis direction also doubles. Furthermore, if the components in the X-axis direction are the same, the distance in the X-axis direction is also the same. The same applies to the Y-axis direction.

[0004]

2. Description of the Related Art Defect data obtained in a defect inspection process in the manufacturing process of a semiconductor memory is compared with FBM data indicating an electrical defect obtained in a test process, and identifying a defective defect is a defect. This is very important in identifying the cause of the failure. In the defect inspection process, the defect coordinates and the size thereof are detected. Generally, the coordinate system is a physical coordinate system whose origin is at the center of the wafer.

When comparing the coordinates of the FBM and the defect data, the coordinate system of the FBM and the coordinate system of the defect data must be the same. Usually, the physical address notation used in the FBM is converted into a physical coordinate system which is the coordinates of a defect.

[0006]

Conventionally, the conversion mechanism has been realized by a mathematical formula created by a human. This makes formulas very complex and time-consuming to create,
There was a problem that human error easily occurred.

[0007] Further, there is a problem that a person who is familiar with a memory cell structure of a product and has a skill of creating a mathematical formula is limited in the number of people who can formulate a mathematical formula.

Further, when there is an error in the mathematical expression, it is necessary to repeat correction and verification until the error disappears. Since it takes time to verify the mathematical expression, there is a problem that the creation time is further increased.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has recorded therein a system and method for facilitating conversion between a coordinate system of FBM and a coordinate system of defect data, and a control program therefor. It is an object of the present invention to provide a computer-readable recording medium.

[0010]

According to a first aspect of the present invention, there is provided a system for converting a physical address of a memory cell into physical coordinates, wherein a pattern which is a plurality of times and is arranged as a memory cell is defined as a basic pattern. A basic pattern definition unit, a memory cell grouping unit for grouping memory cells based on the basic pattern, and a physical address and physical coordinates of the origin of the basic pattern with reference to the origin of all memory cells, and an origin of the basic pattern. And an address coordinate management unit for managing local physical addresses and physical coordinates of the memory cells in the basic pattern on the basis of

According to a second aspect of the present invention, there is further provided a grouping pattern defining section for defining a pattern, which is an arrangement pattern of a basic pattern, which is repeated a plurality of times, as a grouping pattern, and grouping the basic patterns based on the grouping pattern. And a basic pattern grouping unit.The grouping pattern definition unit further defines a pattern that is an arrangement pattern of the grouping pattern and that is repeated a plurality of times as a new grouping pattern, and creates a new grouping pattern. It has a function of defining the finally obtained grouping pattern as an n-th (n is a natural number) grouping pattern by repeating until it becomes impossible. The address coordinate management unit further sets the origin of all the memory cells. Physical address of the origin of the n-th combined pattern found as a reference And the physical coordinates of the origin of the (n-1) th combined pattern with reference to the origin of the nth combined pattern, and the origin of the nth combined pattern. And the association with the origin of the (n-1) th combined pattern is repeated until the (n-1) th combined pattern becomes the basic pattern.

According to a third aspect of the present invention, there is provided a method of converting a physical address of a memory cell into a physical coordinate, wherein a step of defining a layout pattern of the memory cell, which is repeated a plurality of times, as a basic pattern, Associating local physical addresses and physical coordinates with each other; grouping memory cells based on the basic pattern; and associating physical addresses and physical coordinates of the origin of the basic pattern with reference to the origin of all memory cells. And characterized in that:

According to a fourth aspect of the present invention, there is further provided a step of defining an arrangement pattern of a basic pattern which is repeated a plurality of times as a grouped pattern, a step of grouping the basic patterns based on the grouped pattern, Defining a pattern that is an arrangement pattern of the raising pattern and that is repeated a plurality of times as a new grouping pattern, further repeating each step until it becomes impossible to create a new grouping pattern. Is the nth (n is a natural number) grouping pattern,
Associating the physical address and the physical coordinates of the origin of the n-th combined pattern with reference to the origin of all memory cells, and the (n-1) -th combined with reference to the origin of the n-th combined pattern Associating the physical address and the physical coordinates of the origin of the pattern with the origin of the nth combined pattern and the origin of the (n-1) th combined pattern. 1) It is characterized in that it is repeated until the first grouping pattern becomes the basic pattern.

According to a fifth aspect of the present invention, there is provided a memory system comprising: a step of defining a memory cell layout pattern which is repeated a plurality of times as a basic pattern; a step of associating a local physical address of the memory cell with physical coordinates; Grouping the memory cells based on, and associating the physical address and the physical coordinates of the origin of the basic pattern with reference to the origin of all memory cells, and causing a computer to execute these processes. A computer-readable recording medium storing a coordinate conversion program to be executed.

According to a sixth aspect of the present invention, there is further provided a step of defining a pattern which is a layout pattern of a basic pattern and repeated a plurality of times as a grouping pattern, a step of grouping the basic patterns based on the grouping pattern, Defining a pattern that is an arrangement pattern of the raising pattern and that is repeated a plurality of times as a new grouping pattern, further repeating each step until it becomes impossible to create a new grouping pattern. Is the nth (n is a natural number) grouping pattern,
Associating the physical address and the physical coordinate of the origin of the n-th combined pattern obtained with reference to the origin of all the memory cells, and the (n-1) -th reference based on the origin of the n-th combined pattern Associating the physical address of the origin of the grouping pattern with the physical coordinates, and further comprising the step of associating the origin of the n-th grouping pattern with the origin of the (n-1) th grouping pattern. This is a computer-readable recording medium storing a coordinate conversion program characterized by causing a computer to execute these processes of repeating until the (n-1) -th combined pattern becomes a basic pattern.

[0016]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 shows a system configuration according to a first embodiment of the present invention. Defect information (defect coordinates, size, etc.) detected by the defect inspection apparatus 101 is stored in the defect database 102. Further, defect classification is performed by the defect classification device 103 using the defect information stored in the defect database 102, and the result of the classification is added to the defect information in the defect database 102. The FBM measured by the tester 104 is stored in the FBM database 105, classified by the FBM classification system 106, and the result is stored in the FBM database 105. The coordinate comparison system 107 collects defect data and FBM classification data from the databases 102 and 105, converts FBM classification result data into physical coordinates based on configuration information and coordinate information set for each product type, The coordinates are compared with the information, and the result is registered in the coordinates comparison database 108.

FBM measured by tester 104
Are mode classified by the FBM classification system 106. FIG. 2 shows an example of FBM mode classification. The FBM 201 composed of a set of linear bits has a column failure FBM.
Classified as BM 202, starting point 203 and ending point 204
And a mode number indicating a column failure are stored in the database. The FBM 205 composed of a set of rectangular bits is classified as a block failure FBM 206, and the addresses of the start point 207 and the end point 208 and the mode number indicating the block failure are stored in the database.

As shown in FIG. 3, the physical address of the FBM is represented by (x, y). Bits 302 are regularly arranged in a chip 301 in both the X and Y directions. In the following figures, numerical values in the (x, y) format represent physical addresses (x, y) of the FBM.

FIG. 4 shows the relationship between the FBM address and the physical coordinates. In the figure, 図 represents individual memory cells. Reference numerals 401 and 402 in FIG. 4 each include two basic patterns 405 arranged in the X direction and four basic patterns 405 in the Y direction.
04 is two basic patterns 406 each in the X direction,
Four are arranged in the Y direction.

The address of the FBM is stored in the coordinate comparison system 1.
At 07, the data is converted into a physical coordinate system which is a coordinate system of the defect data. The conversion uses a coordinate conversion table. The coordinate conversion table is created by the conversion table creation system 110. The creation method is performed in the following procedure.

First, the conversion table creation system 110 reads the design data 109. As the design data 109, data of a process including an object such as a trench that has one-to-one correspondence with an FBM bit is used. Hereinafter, FB
An object that has a one-to-one correspondence with M bits is called a cell. Here, it is assumed that the object of coordinate conversion is a main body cell array.

For example, the design data of the trench process includes:
In addition to the trenches of the main body cell array, there are alignments 501 to 504, a redundancy circuit 505, a peripheral circuit 506, and cells 507 to 509 in the peripheral circuit as shown in FIG. Therefore, based on the design data, the main body cell array, the alignment, the redundancy circuit, and the peripheral circuits are displayed on the screen of the terminal 111, and a human selects a main body cell array area from among them by using a mouse or the like. Only the selected data is extracted and stored in the conversion table creation system 110. Further, the ratio of the coordinate scale of the design data to the scale of the physical coordinates is input from the terminal 111 and stored in the conversion table creation system 110. Thereby, physical relative coordinates between arbitrary points on the design data can be obtained. The cells drawn in the design data have respective widths in the vertical and horizontal directions. Therefore, the center of gravity of the cell is used as the representative point of the cell, and this is used as the coordinates of the cell.

Next, a basic pattern of a cell is defined. F
When the X-axis and the Y-axis are set as shown in FIG. 4, the relationship between the BM address and the physical position of the cell is as follows. become. However, depending on the product, as in the basic patterns 405 and 406 shown in FIG. 4, even in the case of cells having the same X address, the physical position in the X direction may be different. That is, the cells having the same X address are not always arranged on the same straight line. Therefore, the physical address cannot be specified from the physical position of the cell.

Therefore, a repetition pattern of the physical arrangement of cells, which is generated when the X address is fixed and only the Y address is incremented, is designated. This repeated pattern is called a basic pattern. In the example of FIG. 6, two portions corresponding to the basic pattern are shaded portions 405 and 406.

The design data of the main body cell array stored in the conversion table creation system 110 is read, the main body cell array is displayed on the terminal 111, and a human selects a basic pattern using a mouse or the like. At this time, the values are selected in ascending order of the value of the Y address so that the order can be understood. A plurality of basic patterns can be specified.

When the basic patterns are defined, an identification name is given to each of them as shown in FIG. For example, the identifier of the basic pattern 405 is P0, and the basic pattern 40
The identifier of No. 6 is P1. FIG. 8 shows the relationship between the local physical address of the basic pattern and the physical positional relationship between cells existing in the basic pattern based on the design data.
The table 801 corresponds to the identifier P0, and the table 802
Corresponds to the identification name P1. The calculated information is stored in the coordinate comparison system 107. Here, the local physical address of the basic pattern is a relative physical address of each cell where the cell having the smallest Y address in the basic pattern (hereinafter referred to as the origin of the basic pattern) is (0, 0). Meaning, the local physical coordinates of the basic pattern means relative physical coordinates of each cell with respect to the origin of the basic pattern. That is, by referring to the tables 801 and 802, the local physical address of the basic pattern
The relative physical coordinates from the origin of the basic pattern can be obtained.

Grouping of the main body cell array is performed according to the defined basic pattern. Main cells 401 to 404 in FIG.
Are grouped by the basic patterns 405 and 406, as shown in FIG. Fig. 1
Create a table like 0. This table includes the physical address of the cell having the smallest Y address in each group (hereinafter referred to as the origin of the group), the number of cells in each group, and the relative physical address from the physical address (0, 0) to the origin of each group. Basic patterns used for coordinates and grouping are described. This table is generated by the conversion table creation system 110 and stored in the coordinate comparison system 107.

When performing coordinate comparison between FBM data and defect data, it is necessary to convert physical addresses into physical coordinates. This is made possible by referring to the tables of FIGS. 8 and 10 stored in the coordinate comparison system 107. For example, if the physical address is (X, Y) = (1, 10)
In the case of, referring to FIG. 10, (1,8)-(1,11)
Is within the range of No. It turns out that it corresponds to 11. Then, the physical coordinates 1101 from the cell at the physical address (0, 0) to the origin of the group including the target cell are (40, 120), and the basic pattern used is P0. Here, the physical address of the origin of the group including the target cell is subtracted from the physical address to obtain a local physical address from the origin of the group to the target cell.

Physical address (1,10) -) Physical address of origin of group (1,8) Local physical address (0,2) in group Since the basic pattern used for grouping is P0, the table in FIG. Referring to 801, it is found that the local physical coordinates 1102 corresponding to the obtained local physical address (0, 2) is (20, 30). Then, the local physical coordinates 1102 are added to the physical coordinates 1101 from the cell at the physical address (0,0) to the origin of the group including the target cell to calculate the physical coordinates of the target cell.

Physical coordinates (40,120) from the physical address (0,0) to the origin of the group +) Local physical coordinates of the group (20,30) Physical coordinates from the physical address (0,0) to the target cell (60,150) The physical coordinates can be obtained by the above.
Since coordinates are set when (0, 0) is set as the origin, it is necessary to take the difference between the origin of the FBM and the origin of the defect coordinates into consideration when comparing the coordinates with the defect coordinates. In addition, the direction of the notch or the orientation flat is taken into consideration, and rotation is performed if necessary.

In the coordinate comparison system 107, the FBM
Based on the FBM classification result obtained from the database and the coordinates converted by the above method, the coordinates of the defect data obtained from the defect database are compared, and the result is registered in the coordinate comparison result database 108. Analyze the result of the coordinate comparison using the registered data. The conversion table is also used for display based on the physical coordinates of the FBM.

FIG. 27 is a flowchart showing the flow of the processing of this embodiment. As shown in the figure, first, design data is read (step S101). The design data is
As described above, a process that includes an object such as a trench, which has one-to-one correspondence with an FBM bit, is used. Next, the cell array part is replaced with a GUI (graphical userin
(Step S10)
3). As described above, in the design data of the trench process or the like, cells in the alignment, the redundancy circuit, and the peripheral circuit exist in addition to the trench of the main body cell array as described above. Therefore, a human selects a main body cell array region using a mouse or the like from the main body cell array, the alignment, the redundancy circuit, and the peripheral circuit displayed on the screen of the terminal 111 based on the design data. Next, the ratio between the design data and the actual dimensions is input (step S105). Next, GU
I is used to define the basic pattern of the cell. That is, the human looks at the cell array displayed on the screen of the terminal 111 and selects a basic pattern using a mouse or the like. At this time, the relationship between the cell arrangement in the pattern and the physical address is defined (step S107). Next, all cells are grouped based on the basic pattern (step S10).
9). At the time of grouping, the correspondence between the physical address of the origin of the pattern and the physical coordinates, the number of cells in the pattern, and the name of the pattern used for grouping are recorded in the coordinate conversion table (step S111). The physical address is converted into physical coordinates using the created coordinate conversion table (step S113).

As described above, according to the present embodiment, a table for converting FBM data into physical coordinates in a test process of a semiconductor memory can be created using design data. Also, using the created conversion table, FB
The physical address of M can be converted into physical coordinates.

Next, a second embodiment will be described.
In the second embodiment, in addition to the first embodiment, the coordinate conversion table is hierarchized. 2. Description of the Related Art The memory capacity of a semiconductor memory is increasing with the progress of miniaturization technology. Therefore, the coordinate conversion table obtained in the first embodiment (FIG. 10)
Becomes bloated. Therefore, the coordinate conversion table is hierarchized by grouping repetitive parts based on the configuration information of the memory, and the size of the conversion table is reduced.

In the coordinate conversion table (FIG. 10) created by the coordinate conversion table creation system 110 of the first embodiment, an area where the same basic patterns are arranged at equal intervals is detected.

First, using the group including the cell of the physical address (0, 0) as a search criterion, a group in which the same group is arranged at equal intervals is searched in the X-axis direction and the Y-axis direction. The search results are as shown in FIG. 12, that is, two in the X-axis direction and four in the Y-axis direction. Here, the group with the larger number of groups arranged at equal intervals (X direction or Y direction) is a collective pattern (FIG. 13). X
If the same number is found for both the Y and Y axes, the X direction is set. In addition to this, a unique identifier, a grouping direction, a physical interval thereof, the number of cells in the pattern constituting the group (the X direction and the Y direction are separately calculated), the number of patterns constituting the group, and the number of cells constituting the group. The pattern is obtained and registered in the grouping pattern list (FIG. 14). In this example, the recognition name is S00. Groups corresponding to this pattern are put together. The group to be grouped is deleted from the coordinate conversion table of FIG. 10, and the physical address of the cell having the smallest physical address value in the group and the number of cells existing in the grouping target (X direction, Y direction) (Calculated separately), relative physical coordinates from the physical coordinates (0, 0) to the cell having the smallest physical address value in the grouping target, and a pattern for grouping are registered in the coordinate conversion table (FIG. 15). 1501).

The search criterion is incremented in the Y direction, and a group in which the same groups are arranged at equal intervals is searched in the X axis direction and the Y axis direction, respectively, as described above with reference to FIGS. . However, the group 1601 put together is excluded from the target. In this example, the next search criterion is the basic pattern 405. If the same grouping pattern already exists in the list of FIG. 14, the pattern is not newly registered, and the grouping is performed using the existing pattern. Similarly, the search criterion is incremented in the Y direction. When the search group reaches the final group in the Y axis direction, the search criterion is incremented in the X direction, and the same search and registration are repeated.

As a result, a list of the patterns constituting the grouping is as shown in FIG. 17, and the grouped coordinate conversion table is as shown in FIG.

Further, the same grouping is performed on the grouped coordinate conversion table shown in FIG. 18, and this is repeated until the grouping becomes impossible. FIG. 19 shows the state of grouping. First, the basic pattern P0 is used as a component, and four of these are arranged in the Y-axis direction.
And Next, the identification number S00 is used as a constituent element, and two of these are arranged in the X-axis direction as an identification number S10. Finally, the identification number S10 is used as a component, and two of these are arranged in the Y-axis direction to be an identification number S20.

Similarly, the basic pattern P1 is used as a constituent element, and four basic patterns are arranged in the Y-axis direction.
And Next, the identification number S01 is used as a component, and two of these are arranged in the X-axis direction to be an identification number S11. Finally, the identification number S11 is used as a component, and two of these are arranged in the Y-axis direction to be an identification number S21. As a result,
Finally, the list of assembled patterns is as shown in FIG.
The coordinate conversion table is as shown in FIG.

Next, conversion from a physical address to physical coordinates will be described with reference to the grouped pattern list shown in FIG. 20 and the coordinate conversion table shown in FIG.

For example, the physical address (X, Y) = (3, 2)
In the case of conversion from 5) to physical coordinates, the physical address (3,
No. 25) is in the range from (2, 0) to (3, 31), and thus No. 25 in FIG. 17 corresponds to step S21.
It can be seen that it is composed of Further, the cell of the physical address (0,0) is changed from the cell of the target (the cell 2 shown in FIG. 22).
It can be seen that the relative physical coordinates 2202 to the origin of the group S21 including (201) is (160, 0).

Next, a local physical address in S21 is obtained. FIG. 2 shows the local physical address in S21.
Cell 2302 when cell 2301 shown in FIG.
Physical address. This is obtained by subtracting the physical address of the cell 2301 from the physical address of the cell 2302.

Physical address of cell 2302 (3,25) -) Physical address of origin 2301 of group (2,0) Local physical address in group S21 (2303) (1,25) The configuration pattern used for grouping is Referring to the table of FIG. 20 because of S21, two rows or columns that are continuous or grouped in the Y direction, the physical interval is 300, the constituent pattern is S11, and the cells existing in the pattern It can be seen that the number = (2, 16). Using this information, a lower-level pattern including the target cell is specified.

The pattern constituting S21 is S11
This includes (2 * 16) cells. Since there are 16 cells in the Y direction, the next step S11 is shown every time the Y address increases by 16 cells. In other words, the product of the quotient of (Y coordinate of local physical address in the group / 16) and the interval in which S11 continues is the origin 24 of S21.
The relative physical coordinates 2403 from 01 to the origin 2402 of S11 including the target cell are shown. Since the series of S11 extends in the Y direction, the physical coordinates in the X direction do not change. Therefore, the relative physical coordinates are calculated only in the Y direction when X = 0. The "quotient" is used as the integer part of the result of the division.

From the origin 2401 of S21, the target cell 24
The relative physical coordinates 2403 up to the origin 2402 of S11 including S04 are obtained as follows. Since the direction in which the groups are connected is the Y direction, only the Y direction is calculated,
X is 0.

X = 0 Y = (S21 Local physical address Y2 in the group
Cell 24 in Y direction existing in 303 / S11 pattern
07 number) quotient * physical interval 2408 = (25/1
6) The quotient * 300 = 1 * 300 = 300 Therefore, the relative physical coordinates 2403 are (0,300).

Next, a local physical address 2405 in S11 is obtained. The remainder of (the local physical address in the S21 group / the number of cells existing in the pattern of the S11) indicates the local physical address 2405 of the S11 in the direction in which the rows or columns are connected. The calculation is performed only in the direction in which the rows or columns are continuous. In this example, since the direction is the Y direction, X = 1 (X component of the physical address 2303; no calculation is performed) Y = (Local physical address Y in the S21 group)
(Y component of (2501)) / Remainder of the number of cells 2407 in the Y direction existing in the S11 pattern = (25/16)
Remainder = 9 Therefore, the local physical address 2 in the S11 group
405 becomes (1, 9).

Similarly, since the relative physical coordinates 2503 from the origin 2501 of S11 to the origin 2502 of S01 including the target cell 2504 are continuous in the X direction, X = (local physical address X in the S11 group)
(X component of (2405)) / X existing in S01 pattern
The quotient of the number of cells in the direction) * the physical interval = the quotient of (1/1) * 40 = 1 * 40 = 40 Y = 0 Therefore, the relative physical coordinates 2503 are (40, 0).

The local address 2505 in S01
X = (local physical address X in the S11 group
(Remainder of (X component of (2405) / number of cells in X direction existing in S01 pattern) = Remainder of (1/1) = 0 Y = 9 (Y component of (2405). No calculation is performed.) Therefore, the local physical address 2 in the S01 group
505 becomes (0, 9).

Similarly, since the relative physical coordinates 2603 from the origin 2601 of S01 to the origin 2602 of P1 including the target cell 2604 are continuous in the Y direction, X = 0 Y = (local in the S01 group). Physical address Y
(Y component of (2505)) / (number of cells in Y direction existing in P1 pattern) quotient * physical interval = quotient of (9/4) * 60 = 2 * 60 = 120 Therefore, relative physical coordinates 2603 Becomes (0,120).

The local address 26 in the P1 group
05 is X = 0 (X component of (2505). No calculation is performed.) Y = (Local physical address Y in S01 group
The remainder of (Y component of (2505)) / the number of cells in the Y direction existing in the P01 pattern = the remainder of (9/4) =
1 Therefore, the local physical address 2605 in P1 is (0, 1).

Here, referring to the table 802 in FIG. 8, the relative physical coordinates of the target cell from the origin of P1 are (−).
20, 10).

Finally, the relative physical coordinates calculated in each process are added to determine the physical coordinates from the cell at the physical address (0, 0) to the target cell.

[0056] Therefore, the physical coordinates of the target cell are (180, 430). As described above, the physical address can be converted into the physical coordinates using the simplified coordinate conversion table.

FIG. 28 is a flowchart showing the flow of the grouping process in this embodiment. As shown in the figure, first, an area where the same basic patterns are arranged at equal intervals is detected (step S201).

Next, an area in which the same basic pattern is arranged at equal intervals is recorded as a collective pattern, and the corresponding area is replaced with the collective pattern. (Step S
203). In the present embodiment, an area in which four basic patterns P0 are arranged in the Y-axis direction is collectively referred to as a pattern S00.

Next, an area where the grouping patterns are arranged at the same interval is recorded as a new grouping pattern, and the corresponding area is replaced with a new grouping pattern (step S205). In the present embodiment, a region where two grouping patterns S00 are arranged in the X-axis direction is defined as a grouping pattern S10.

Step S205 is repeated until new grouping becomes impossible (step S207). In the present embodiment, an area where two grouping patterns S10 are arranged in the Y-axis direction is defined as a grouping pattern S20.
Step 205 is repeated until.

Then, a grouping pattern and a grouped coordinate conversion table are created (step S20).
9) The physical address is converted into physical coordinates using the grouping pattern and the coordinate conversion table thus grouped (step S211).

As described above, according to the present embodiment, the coordinate conversion table can be simplified by taking advantage of the fact that memory cells generally have many repetitive patterns.

FIG. 29 is an external view showing an example of a computer system which reads a program stored in a recording medium and implements the present invention in accordance with the procedures described therein. On the front of the main body of the computer system 80, a floppy disk drive 8 as a magnetic disk device is provided.
1, a CD-ROM drive 82 as an optical disk device is provided, and a floppy disk 83 or a CD-ROM 84 is inserted from each drive entrance and a predetermined read operation is performed to store the data in these recording media. Programs can be imported into the system. Further, by connecting a predetermined drive device, for example, a ROM 85 as a memory device and a cassette tape 86 as a magnetic tape device can be used.

[0064]

As described above, according to the present invention, when comparing the coordinates of the defect data obtained in the defect inspection step in the semiconductor manufacturing process with the FBM data indicating the electrical defect obtained in the test step, the design data is obtained. By performing coordinate conversion using the conversion table created from the above, it is easy to set up the coordinate conversion system, shortening the setting time, reducing human errors, facilitating product type development, and reducing erroneous settings. Become.

In general, the coordinate conversion table can be simplified by taking advantage of the feature that memory cells have many repetitive patterns.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating a system configuration according to a first embodiment of the present invention.

FIG. 2 illustrates the first embodiment of the present invention, and is a diagram illustrating an example of FBM mode classification.

FIG. 3 is a diagram illustrating a physical address of an FBM according to the first embodiment of this invention.

FIG. 4 illustrates the first embodiment of the present invention and illustrates a relationship between an FBM address and physical coordinates.

FIG. 5 is a diagram showing the first embodiment of the present invention and showing a positional relationship of a main body cell array and the like displayed on a screen of a terminal based on design data.

FIG. 6 is a diagram illustrating the first embodiment of the present invention and illustrating a repetition pattern of a physical arrangement of cells.

FIG. 7 is a diagram showing a first embodiment of the present invention and showing local physical addresses and physical coordinates of cells existing in a basic pattern.

FIG. 8 shows the first embodiment of the present invention, and is a view showing a table indicating a relationship between local physical addresses and physical coordinates of cells existing in a basic pattern.

FIG. 9 shows the first embodiment of the present invention and is a diagram showing a relationship between a basic pattern and grouping.

FIG. 10 is a diagram illustrating a coordinate conversion table according to the first embodiment of the present invention.

FIG. 11 shows the first embodiment of the present invention, and is a diagram illustrating a relationship between physical coordinates and local physical coordinates from a cell at a physical address (0, 0) to the origin of a group including a target cell.

FIG. 12 shows the second embodiment of the present invention and is a diagram illustrating a result of searching for basic patterns arranged at equal intervals in the X-axis direction and the Y-axis direction.

FIG. 13 is a diagram showing the second embodiment of the present invention and showing that the Y-axis direction having many basic patterns arranged at equal intervals is a combined pattern.

FIG. 14 is a diagram showing a grouping pattern list according to the second embodiment of the present invention.

FIG. 15 is a diagram illustrating a coordinate conversion table according to the second embodiment of the present invention.

FIG. 16 shows the second embodiment of the present invention, and is a diagram illustrating a result of searching for basic patterns arranged at equal intervals in the X-axis direction and the Y-axis direction.

FIG. 17 shows the second embodiment of the present invention, and is a diagram showing a list of grouping patterns to which a new grouping pattern has been added.

FIG. 18 is a diagram illustrating a coordinate conversion table compiled according to the second embodiment of the present invention.

FIG. 19 is a diagram illustrating a second embodiment of the present invention and showing a state in which grouping is repeated until grouping becomes impossible.

FIG. 20 shows the second embodiment of the present invention, and is a diagram showing a grouping pattern list to which a new grouping pattern is further added.

FIG. 21 shows the second embodiment of the present invention, and is a diagram showing a coordinate conversion table further compiled.

FIG. 22 shows the second embodiment of the present invention and is a diagram showing physical coordinates and local physical coordinates from a cell at a physical address (0, 0) to the origin of a group including a target cell.

FIG. 23 shows the second embodiment of the present invention and is a diagram showing physical coordinates from a cell at the origin of S21 to a target cell.

FIG. 24 shows the second embodiment of the present invention, and is a diagram showing physical coordinates and local physical coordinates from the cell at the origin in S21 to the origin of the group including the target cell.

FIG. 25 shows the second embodiment of the present invention and is a diagram showing physical coordinates and local physical coordinates from the cell at the origin in S11 to the origin of the group including the target cell.

FIG. 26 shows the second embodiment of the present invention and is a diagram showing physical coordinates and local physical coordinates from the cell at the origin of S01 to the origin of the group including the target cell.

FIG. 27 is a flowchart illustrating a flow of processing from reading design data to converting a physical address into physical coordinates using a created conversion table according to the first embodiment of this invention.

FIG. 28 shows a second embodiment of the present invention, in which a physical address is converted into physical coordinates by using a grouped pattern and a grouped conversion table from detection of an area where the same basic pattern is arranged at equal intervals. 6 is a flowchart showing a flow of processing until the processing is performed.

FIG. 29 is an external view showing an example of a computer system that reads a program stored in a recording medium and implements the present invention in accordance with the procedures described therein.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 101 Defect inspection apparatus 102 Defect database 103 Defect classification apparatus 104 Tester 105 FBM database 106 FBM classification system 107 Coordinate comparison system 108 Coordinate comparison result database 109 Design data 110 Coordinate conversion table creation system 111 Terminal

Claims (6)

[Claims] 1. A system for converting a physical address of a memory cell into physical coordinates, comprising: a basic pattern definition unit for defining a pattern, which is an arrangement pattern of the memory cell, that is repeated a plurality of times, as a basic pattern; A memory cell grouping unit for grouping the memory cells based on the basic pattern and the physical address and physical coordinates of the origin of the basic pattern with reference to the origin of all memory cells, and the basic pattern with reference to the origin of the basic pattern. An address coordinate management unit for managing local physical addresses and physical coordinates of internal memory cells. 2. The coordinate conversion system according to claim 1, further comprising: a grouping pattern definition unit that defines a pattern, which is an arrangement pattern of the basic pattern, that is repeated a plurality of times, as a grouping pattern. A basic pattern grouping unit for grouping the basic patterns based on a raised pattern, wherein the collective pattern defining unit further includes a new collective arrangement pattern that is the arrangement pattern of the collective pattern and that is repeated a plurality of times. Defined as a pattern,
The address coordinate management unit has a function of repeating until a new grouping pattern cannot be created, and defining the finally obtained grouping pattern as an n-th (n is a natural number) grouping pattern. Further, the physical address and physical coordinates of the origin of the n-th combined pattern obtained with reference to the origin of all the memory cells are managed, and the origin of the n-th combined pattern is set as a reference (n-
1) manages the physical address and physical coordinates of the origin of the first combined pattern, and associates the origin of the n-th combined pattern with the origin of the (n-1) th combined pattern by the (n-1) th A coordinate conversion system characterized by repeating until a grouping pattern of the above becomes a basic pattern. 3. A method for converting a physical address of a memory cell into a physical coordinate, comprising: defining a layout pattern of the memory cell, which is repeated a plurality of times, as a basic pattern; Associating physical addresses with physical coordinates; grouping the memory cells based on the basic pattern; associating physical addresses and physical coordinates of the origin of the basic pattern with reference to the origins of all memory cells. And a coordinate transformation method comprising: 4. The coordinate transformation method according to claim 3, further comprising: defining a pattern that is an arrangement pattern of the basic pattern and that is repeated a plurality of times as a grouping pattern, based on the grouping pattern. Grouping the basic pattern with the grouping pattern, and defining a pattern that is a layout pattern of the grouping pattern that is repeated a plurality of times as a new grouping pattern. Iterates until it becomes impossible to create a pattern, and sets the finally obtained grouped pattern as an n-th (n is a natural number) grouped pattern, and the n-th grouped pattern based on the origin of all memory cells. Associating the physical address of the origin with the physical coordinates; Associating the physical address and the physical coordinates of the origin of the (n-1) th combined pattern with reference to the origin of the first combined pattern,
Further, the step of associating the origin of the n-th combined pattern with the origin of the (n-1) -th combined pattern is repeated until the (n-1) -th combined pattern becomes a basic pattern. Coordinate conversion method to be used. 5. A step of defining, as a basic pattern, an arrangement pattern of memory cells which is repeated a plurality of times, a step of associating a local physical address of the memory cell with physical coordinates, and Grouping the memory cells, and associating physical addresses and physical coordinates of the origin of the basic pattern with reference to the origins of all memory cells, and causing a computer to execute these processes. A computer-readable recording medium storing a coordinate conversion program. 6. The recording medium according to claim 5, further comprising: a step of defining a pattern which is an arrangement pattern of the basic pattern and is repeated a plurality of times as a grouping pattern; Grouping the basic pattern, and defining a pattern which is the arrangement pattern of the grouping pattern and is repeated a plurality of times as a new grouping pattern, further comprising: Is repeated until it becomes impossible to generate the n-th grouping pattern obtained by using the finally obtained grouping pattern as an n-th (n is a natural number) grouping pattern with reference to the origin of all memory cells. Associating a physical address of the origin of the pattern with physical coordinates; Associating the physical address and the physical coordinate of the origin of the (n-1) th combined pattern with the origin of the nth combined pattern as a reference, further comprising the origin of the nth combined pattern And the step of associating the (n-1) th combined pattern with the origin of the (n-1) th combined pattern is repeated until the (n-1) th combined pattern becomes a basic pattern. A computer-readable recording medium storing a coordinate conversion program.