JP2001084654A - Sticking method for stuck type optical disk and sticking device - Google Patents

Sticking method for stuck type optical disk and sticking device

Info

Publication number
JP2001084654A
JP2001084654A JP26248399A JP26248399A JP2001084654A JP 2001084654 A JP2001084654 A JP 2001084654A JP 26248399 A JP26248399 A JP 26248399A JP 26248399 A JP26248399 A JP 26248399A JP 2001084654 A JP2001084654 A JP 2001084654A
Authority
JP
Japan
Prior art keywords
substrate
holding member
optical disk
bonding
substrate holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26248399A
Other languages
Japanese (ja)
Inventor
Noboru Murayama
昇 村山
Shinji Kobayashi
慎司 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP26248399A priority Critical patent/JP2001084654A/en
Publication of JP2001084654A publication Critical patent/JP2001084654A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To straighten distortion before irradiation and to control deformation owing to heat generation caused by irradiation of ultraviolet rays by pressurizing an upper surface of a substrate stuck with a light transmissive flat member and executing irradiation by the ultraviolet rays to harden an adhesive. SOLUTION: Since press glass 4, a glass holder 5 and a holder receiving base 6 are circular matching a disk substrate 9, the center of the holder receiving base 6 is made to coincide with the center of the rotation of a holding table 8. The disk substrate 9 on the holding table 8 always is lightly pressurized by the press glass 4 in a concentric state. Next, the holding table 8 on which the disk substrate 9 lightly pressurized by the press glass 4 is placed is rotated by a motor A 13, irradiation of ultraviolet rays by a lamp 1 is started, the upper surface of the disk substrate 9 is irradiated through the press glass 4, and a non-hardened adhesive layer is hardened. After the composite disk substrate is vacuum-sucked to the holding table 8, the rotation of the holding table 8 is stopped, the holding table 8 is lowered by a cylinder 14 and the disk substrate is separated from the press glass 4.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明はDVD−5,DVD−
9などの片面が光透過性がある基板で構成された貼合型
光ディスクの製造工程における貼合装置に関するもので
あり、貼合せ前の基板の歪みや紫外線照射時の熱歪みに
よる貼合せ完了製品の変形による品質低下を効果的に防
止することができるものであり、極めて薄いプラスチッ
ク製品を紫外線硬化型接着剤で貼合せた各種の積層品の
貼合工程にも利用することができるものである。
The present invention relates to DVD-5, DVD-
9 relates to a bonding apparatus in the manufacturing process of a bonding type optical disc composed of a substrate having a light-transmitting surface on one side, such as a bonding completed product due to distortion of the substrate before bonding or thermal distortion during ultraviolet irradiation. It can effectively prevent deterioration in quality due to deformation of the product, and can be used also in a laminating process of various laminated products obtained by laminating an extremely thin plastic product with an ultraviolet curable adhesive. .

【0002】[0002]

【従来の技術】近年の大情報量リムーバブルメディアの
需要の増大に伴い、従来のCD(コンパクトディスク)
の6〜8倍程度の記憶容量を有するDVD(デジタルビ
デオディスク)の市場要求が高まりつつある。このDV
Dは、片面に情報記録層を設けた0.6mm厚の薄型基
板を光透過性のあるもう一枚の薄型基板に貼合せて、一
枚の貼合せ型光ディスクが構成される。またDVDには
その情報記録層の構成によって、大別すると数種類あ
り、情報記録層を片面だけに設けたものをDVDー5、
情報記録層を2層に設けたものをDVDー9、1層情報
基板を両面に対向させてリバーシブルに記録出来るDV
Dー10などがある。これらの貼合せ型光ディスクの作
製は次のような手順でなされる。まず、片方もしくは両
方の薄型基板に接着剤を塗布し、両基板を重ね合せて、
それを例えば回転装置等で高速回転させ、余分な接着剤
を振切りながら貼合面に均一な厚さを持つ接着層をつく
る。次に回転を停止させ、接着剤を介して密着した2枚
の薄型基板の接着剤層を硬化させる装置(例えば紫外線
硬化型接着剤なら紫外線照射装置)へ送り、接着剤を硬
化させて1枚の貼合せ型光ディスクが完成される。さら
に言えば、従来の貼合せ方法の手順は、接着剤塗布、重
ね合せ、振切り、接着剤硬化のステップ順であり、可動
形のディスク保持テーブル(インデックステーブルの外
周部の同心線上に所定の間隔で配置したもの)上に一方
の基材を載せて保持させ、当該ディスク保持テーブルを
低速で回転させながら、紫外線硬化性の接着剤を滴下さ
せてリング状に塗布し、その上に他方の基板を重ね合
せ、上記ディスク保持テーブルを高速回転させて、遠心
力によって上記接着剤を上下に重ねられた基板間に拡散
させると共に、余分の接着剤を外周外方に排出させ、次
いで、基板の上から紫外線ランプで紫外線を照射して接
着剤を硬化させて2枚の基板を相互に貼合せるものであ
る。
2. Description of the Related Art With the recent increase in demand for large information amount removable media, a conventional CD (compact disk)
The market demand for DVDs (digital video discs) having a storage capacity of about 6 to 8 times that of the above is increasing. This DV
In D, a 0.6 mm thick thin substrate provided with an information recording layer on one side is bonded to another light-transmitting thin substrate to form one bonded optical disk. DVDs are roughly classified into several types according to the configuration of the information recording layer.
DVD-9 having two information recording layers and a DV capable of reversible recording with a single-layer information substrate facing both sides.
D-10 and the like. The production of these laminated optical disks is performed in the following procedure. First, apply an adhesive to one or both of the thin substrates, overlay both substrates,
It is rotated at a high speed by, for example, a rotating device to form an adhesive layer having a uniform thickness on the bonding surface while shaking off excess adhesive. Next, the rotation is stopped, and then sent to a device for curing the adhesive layer of the two thin substrates adhered through the adhesive (for example, an ultraviolet irradiation device in the case of an ultraviolet-curable adhesive), and the adhesive is cured to obtain one sheet. Is completed. In addition, the procedure of the conventional laminating method is the sequence of steps of adhesive application, superposition, shaking, and curing of the adhesive. The movable disk holding table (a predetermined concentric line on the outer peripheral portion of the index table). One of the base materials is placed on the disk holding table and held, and while the disk holding table is being rotated at a low speed, an ultraviolet curable adhesive is dropped and applied in a ring shape. The substrates are overlapped, the disc holding table is rotated at a high speed, and the adhesive is diffused between the vertically stacked substrates by centrifugal force, and the excess adhesive is discharged to the outside of the outer periphery. The adhesive is cured by irradiating ultraviolet rays from above with an ultraviolet lamp, and the two substrates are bonded to each other.

【0003】ところで、紫外線の照射が基板全面に均一
であれば、接着剤は基板全面において均一な速度で硬化
して、接着が全面均質になるのであるが、実際には紫外
線の照射が基板全面に均一になり難く、このため接着剤
の硬化速度が均一にならず、貼合せ接着が全面均一にな
されないことになる。紫外線照射時にディスク保持テー
ブルを回転させて基板全面に均一に照射し、合せて半径
方向外方からも外周面に紫外線を照射してこの問題を解
消する発明が特開平10ー334521号公報に記載さ
れている。この発明は、紫外線照射を全面均一にして接
着の不均一による貼合せ完成品の品質低下を防止するも
のであり、全面均一に貼合せて接着硬化させることがで
きると共に作業の高速化を図ることができるものであ
る。紫外線照射の不均一による他に温度分布の不均一や
上下基板の温度差によって変形すると、この変形のため
に貼合せ完成品の品質が低下することになる。すなわ
ち、従来の方法においては、接着剤に紫外線硬化樹脂型
接着剤(ラジカル重合、またはカチオン重合の接着剤)
を用い、接着剤を硬化させるために紫外線照射装置で紫
外線を照射するが、この紫外線照射に伴う発生熱によ
り、基板が変形し易い。これは基板が0.6mm厚の薄
型になったため熱の影響が大きく、構成層の異なる基板
を貼合せるときの熱変形の度合に差が出るため、バイメ
タル素材によるサーモスタットのように表裏どちらかに
反ってしまうことによるものと推測される。このように
変形した状態のままで硬化接着されると完成基板の品質
が著しく低下することになる。また、基板の貼合せ工程
における「そり」は、貼合せる2枚の基板の温度に差が
あることに因るところが大きい。さらに紫外線照射時の
基板の温度分布(内外周の温度差)によっても硬化後の
基板の「そり」具合が大きく影響される。
If the irradiation of ultraviolet rays is uniform over the entire surface of the substrate, the adhesive cures at a uniform rate over the entire surface of the substrate and the adhesion is uniform over the entire surface. Therefore, the curing speed of the adhesive is not uniform, and the bonding and bonding are not uniform over the entire surface. Japanese Patent Application Laid-Open No. H10-334521 discloses an invention which solves this problem by rotating the disk holding table during ultraviolet irradiation to uniformly irradiate the entire surface of the substrate and simultaneously irradiating the outer peripheral surface with ultraviolet light from the outside in the radial direction. Have been. SUMMARY OF THE INVENTION The present invention aims to uniformize the entire surface of an ultraviolet ray to prevent the quality of finished bonded products from deteriorating due to uneven bonding. Can be done. Deformation due to non-uniform temperature distribution or temperature difference between the upper and lower substrates, in addition to non-uniform irradiation of ultraviolet rays, results in deterioration of the quality of the finished bonded product due to the deformation. That is, in the conventional method, an ultraviolet curable resin type adhesive (radical polymerization or cationic polymerization adhesive) is used as the adhesive.
Is used to irradiate ultraviolet rays with an ultraviolet irradiation device to cure the adhesive, but the substrate is easily deformed by the heat generated by the ultraviolet irradiation. This is because the thickness of the substrate is reduced to 0.6 mm and the effect of heat is large, and there is a difference in the degree of thermal deformation when laminating substrates with different constituent layers. It is presumed to be due to warping. If cured and bonded in such a deformed state, the quality of the finished substrate will be significantly reduced. In addition, “warpage” in the substrate bonding process is largely due to a difference in temperature between the two substrates to be bonded. In addition, the degree of "warpage" of the cured substrate is greatly affected by the temperature distribution of the substrate during irradiation with ultraviolet light (temperature difference between the inner and outer circumferences).

【0004】[0004]

【解決しようとする課題】そこで本発明は、紫外線照射
時の基板の熱変形を低下させ、かつ基板がもつ成形など
の前工程までに発生した変形や、取り置きなどのための
経時変化による変形を機械的に矯正しながら貼合すこと
で、高品質の貼合型光ディスクを得ることのできる貼合
方法および貼合装置を工夫することをその課題とするも
のである。さらにこの課題を具体的に細分化すれば次の
ようになる。
SUMMARY OF THE INVENTION Accordingly, the present invention reduces the thermal deformation of a substrate during the irradiation of ultraviolet rays, and reduces the deformation of the substrate up to the previous process such as molding and the deformation due to aging due to storage. It is an object of the present invention to devise a bonding method and a bonding apparatus capable of obtaining a high-quality bonded optical disk by bonding while mechanically correcting. This problem is further subdivided as follows.

【0005】〔課題1〕この課題1は請求項1に係る発
明の課題であり、貼合せるディスク基板を保持部材に設
置して後、保持されたディスク基板にフラット部材を重
ねて、当該フラット部材でディスク基板を軽く押えて照
射前の歪みを矯正するとともに、紫外線照射に伴う発熱
による変形を抑制しつつ基板に紫外線照射を行えるよう
にすることである。 〔課題2〕基板保持部材上の基板に重ねるフラット部材
として平坦精度の高い部材を用いても、紫外線を上記フ
ラット部材を通して基板に照射するとなると、フラット
部材の素材内部の光透過率や屈折率が不均一になること
が避けられず、また紫外線ランプには、ランプ自体に発
光箇所による照射むらが生じている。このため矯正硬化
時に基板に対して照射むらによるエネルギーの偏りによ
る硬化不良や、貼合せた後の基板残留内部応力むらによ
る矯正不良を引き起こす可能性が出てくる。課題2は請
求項2に係る発明、請求項3に係る発明、請求項4に係
る発明の課題であり、平坦精度の高い部材を用いても、
紫外線を上記フラット部材を通して基板に照射するとき
の、基板上面への紫外線照射を基板全面に均一になるよ
うにすることである。 〔課題3〕基板保持部材上の基板にフラット部材を重ね
合せ、またはこれを分離するときに、さらには紫外線照
射時に基板保持部材上の基板に対してフラット部材が横
方向に相対移動すると、これが上記基板に対して剪断力
を与えて歪みを生じさせることになる。課題3は請求項
5に係る発明の課題であり、上記フラット部材が基板保
持部材上の基板に対して同心的にかつ垂直に接近・離間
し、紫外線照射時には同心状に保持されるようにフラッ
ト部材に対する基板保持部材による支持機構を工夫する
ことである。
[Problem 1] This problem 1 is an object of the invention according to claim 1, in which after a disc substrate to be bonded is set on a holding member, a flat member is superimposed on the held disc substrate, and To correct the distortion before irradiation by lightly pressing the disk substrate, and to allow the substrate to be irradiated with ultraviolet rays while suppressing deformation due to heat generated by ultraviolet irradiation. [Problem 2] Even if a flat member with high flatness accuracy is used as a flat member to be superimposed on the substrate on the substrate holding member, when the substrate is irradiated with ultraviolet rays through the flat member, the light transmittance and the refractive index inside the material of the flat member are reduced. It is inevitable that the lamp becomes non-uniform, and in the ultraviolet lamp, the lamp itself has irradiation unevenness due to a light emitting portion. For this reason, there is a possibility that a correction failure due to uneven energy due to irradiation unevenness to the substrate during correction hardening and a correction failure due to uneven residual internal stress of the substrate after bonding may occur. Problem 2 is an object of the invention according to claim 2, the invention according to claim 3, and the invention according to claim 4. Even if a member having high flatness accuracy is used,
The object of the present invention is to make the ultraviolet irradiation on the upper surface of the substrate uniform over the entire surface of the substrate when the substrate is irradiated with ultraviolet light through the flat member. [Problem 3] When a flat member is superimposed on or separated from a substrate on a substrate holding member, and when the flat member relatively moves relative to the substrate on the substrate holding member at the time of irradiation with ultraviolet rays, this causes A shear force is applied to the substrate to cause distortion. Problem 3 is an object of the invention according to claim 5 in which the flat member approaches and separates concentrically and vertically with respect to the substrate on the substrate holding member, and is flat so that it is concentrically held during ultraviolet irradiation. It is to devise a support mechanism for the member by the substrate holding member.

【0006】[0006]

【課題解決のために講じた手段】上記課題1を解決する
ために講じた手段は、LD,DVD等の貼合せ型光ディ
スクの製造工程におけるディスク貼合せ方法を前提とし
て、次の(イ)(ロ)によって構成されるものである。 (イ)紫外線照射源と重ね合され、基板保持部材に保持
された基板との間に光透過性のあるフラット部材を設置
しておき、これに貼合せる基板上面を押圧させたこと、
(ロ)フラット部材による押圧力で上記基板の歪みを矯
正した状態で紫外線照射を行って、接着剤を硬化させて
基板を貼合せること。
Means taken to solve the problem The means taken to solve the above problem 1 is based on the following method (a) (a), based on a disk bonding method in the manufacturing process of a bonded optical disk such as an LD or DVD. B). (A) a light-transmissive flat member is installed between the substrate and the substrate held by the substrate holding member, which is superimposed on the ultraviolet irradiation source, and the upper surface of the substrate to be bonded thereto is pressed;
(B) UV irradiation is performed in a state where the distortion of the substrate is corrected by the pressing force of the flat member, and the adhesive is cured to bond the substrates.

【0007】[0007]

【作用】紫外線照射源からの紫外線が上記フラット部材
を透過して基板保持部材上の基板に照射され、接着剤が
硬化する。紫外線照射源と重ね合され、基板保持部材に
保持された基板との間に光透過性のあるフラット部材を
設置しておき、これに貼合せる基板上面を押圧させたこ
とにより、重ね合された基板が基板保持部材と上記フラ
ット部材との間で挟圧されてその歪みが矯正される。そ
して、上記フラット部材による押圧力で上記基板の歪み
を矯正した状態で紫外線照射を行って、接着剤を硬化さ
せて基板を貼合せることにより、紫外線照射による上下
の基板間の熱歪みの差異、基板の内周側と外周側との熱
歪みの差異に関わらず、重ね合された基板が変形するこ
とが抑制され、無変形のままで接着剤が硬化して固定さ
れるから変形のない複合基板(上記の基板が貼合された
もの。以下同じ)が生成される。LD,DVD等の貼合
せ型光ディスクの製造工程におけるディスク貼合せ方法
において、紫外線照射源と貼合せるディスク基板の間
に、フラットで光透過性のある部材を設置して、これに
貼合せるディスク基板を軽圧し、ディスク基板をフラッ
トに矯正させながら紫外線照射して、接着剤を硬化させ
て貼合せることで、紫外線照射時の基板の熱変形を低下
させ、かつ基板がもつ成型や前工程までに発生した変形
や、取り置きなどによる経時変化による変形を矯正で
き、高品質の貼合型光ディスクを得ることができる。
The ultraviolet light from the ultraviolet irradiation source passes through the flat member and is irradiated on the substrate on the substrate holding member, whereby the adhesive is cured. A light-transmissive flat member was set between the substrate held by the substrate holding member and the ultraviolet irradiation source, and the upper surface of the substrate to be bonded to the flat member was pressed. The substrate is pinched between the substrate holding member and the flat member to correct the distortion. Then, by performing ultraviolet irradiation in a state where the distortion of the substrate is corrected by the pressing force of the flat member, by curing the adhesive and bonding the substrates, the difference in thermal distortion between the upper and lower substrates due to the ultraviolet irradiation, Despite the difference in thermal distortion between the inner and outer peripheral sides of the substrate, deformation of the superimposed substrate is suppressed, and the adhesive is hardened and fixed with no deformation, so there is no deformation. A substrate (the above-mentioned substrate is bonded, the same applies hereinafter) is generated. In a disk bonding method in a manufacturing process of a bonded optical disk such as an LD or a DVD, a flat and light-transmissive member is installed between an ultraviolet irradiation source and a disk substrate to be bonded, and the disk substrate bonded to the member is mounted. Light pressure, irradiate ultraviolet rays while straightening the disk substrate, cure the adhesive, and bond to reduce the thermal deformation of the substrate at the time of ultraviolet irradiation, and by the molding and pre-process of the substrate It is possible to correct the deformation that has occurred and the deformation due to a temporal change due to storage, etc., and to obtain a high-quality bonded optical disc.

【0008】[0008]

【実施態様1】実施態様1は、上記解決手段による貼合
せ型ディスク貼合せ方法において、光透過性のあるフラ
ット部材で基板を軽く押圧した状態で上記基板保持部材
を回転させながら上記の紫外線照射を行うことである。
[Embodiment 1] An embodiment 1 is a laminating type disk laminating method according to the above-mentioned solving means, wherein the ultraviolet irradiation is performed while rotating the substrate holding member in a state where the substrate is lightly pressed by a light transmissive flat member. It is to do.

【作用】光透過性のあるフラット部材で基板を軽く押圧
した状態で上記基板保持部材を回転させながら上記の紫
外線照射することによって、光源の発光むら、フラット
部材の光透過率のむらによる照射むらが平均化されて、
基板全面について均一化されるから、接着剤の紫外線硬
化速度の不均一に伴う複合基板変形が防止される。
By irradiating the above-mentioned ultraviolet rays while rotating the substrate holding member in a state where the substrate is lightly pressed by a light-transmissive flat member, the uneven light emission of the light source and the uneven light transmittance of the flat member are reduced. Averaged,
Since the entire surface of the substrate is made uniform, deformation of the composite substrate due to unevenness of the ultraviolet curing rate of the adhesive is prevented.

【0009】[0009]

【実施態様2】実施態様2は、請求項2の貼合せ型光デ
ィスク貼合せ方法を実施するための貼合せ型光ディスク
貼合せ装置であって、次の(イ)乃至(ニ)によって構
成されるものである。 (イ)上記基板保持部材を昇降させるプレス機構を備え
ること、(ロ)基板保持部材を上昇させて基板上面を上
記フラット部材の下面に当接させて軽く圧接させ、基板
保持部材を下降させて基板上面をフラット部材の下面か
ら離間させるようにしたこと、(ハ)基板保持部材を回
転させる回転駆動機構を備えること、(ニ)基板保持部
材上の上記基板及び上記フラット部材を回転させながら
紫外線照射を行うようにしたこと。
Embodiment 2 Embodiment 2 is a bonding type optical disk bonding apparatus for carrying out the bonding type optical disk bonding method according to claim 2, and is constituted by the following (a) to (d). Things. (B) A press mechanism for raising and lowering the substrate holding member is provided. (B) The substrate holding member is raised to bring the upper surface of the substrate into contact with the lower surface of the flat member to be lightly pressed to lower the substrate holding member. The upper surface of the substrate is separated from the lower surface of the flat member; (c) a rotation drive mechanism for rotating the substrate holding member; and (iv) ultraviolet light while rotating the substrate and the flat member on the substrate holding member. Irradiation was performed.

【作用】基板保持部材の昇降動作によって基板保持部材
上の基板を上記フラット部材の下面に押圧、離間させ、
また、基板保持部材を回転させることにより紫外線照射
むらを基板全面について均一化することができるので、
単純な機構によって熱歪み、紫外線照射むらに解消して
変形のない複合基板を生成することができ、また、基板
保持部材の昇降動作によって基板保持部材上の基板を上
記フラット部材の下面に押圧、離間させられるので、基
板保持部材上の基板を上記フラット部材の重ね合せ動
作、離間動作を迅速に行うことができる。したがって、
高品質の複合基板を能率的に生産することができる。
The substrate on the substrate holding member is pressed against and separated from the lower surface of the flat member by the raising / lowering operation of the substrate holding member,
Also, by rotating the substrate holding member, it is possible to uniform the ultraviolet irradiation unevenness over the entire surface of the substrate,
Thermal distortion by a simple mechanism, it is possible to generate a composite substrate without deformation by eliminating uneven UV irradiation, and by pressing the substrate on the substrate holding member against the lower surface of the flat member by the elevating operation of the substrate holding member, Since the substrates are separated from each other, the substrate on the substrate holding member can be quickly overlapped and separated from the flat member. Therefore,
High quality composite substrates can be efficiently produced.

【0010】[0010]

【実施態様3】実施態様3は、実施態様2の貼合せ型光
ディスク貼合せ装置について、紫外線光源の下方に鏡面
状の反射機構を設け、紫外線照射光を乱反射させるよう
にしたものである。
[Embodiment 3] In Embodiment 3, the mirroring type optical disc bonding apparatus of Embodiment 2 is provided with a mirror-like reflecting mechanism below an ultraviolet light source to diffusely reflect ultraviolet irradiation light.

【作用】紫外線光源の下方に鏡面状の反射機構を設け、
紫外線照射光を乱反射させるようにしたことによって、
紫外線光源からの紫外線を反射鏡によって乱反射させて
フラット部材上面に照射することになるから、フラット
部材上面への紫外線の照射むらが低減される。
[Function] A mirror-like reflecting mechanism is provided below the ultraviolet light source,
By irregularly reflecting ultraviolet irradiation light,
Since the ultraviolet light from the ultraviolet light source is irregularly reflected by the reflecting mirror and irradiates the upper surface of the flat member, the irradiation unevenness of the ultraviolet light on the upper surface of the flat member is reduced.

【0011】[0011]

【実施態様4】実施態様4は、実施態様2、実施態様3
の貼合せ型光ディスク貼合せ装置について、上記基板保
持部材に対する基板及び上記フラット部材の位置ずれを
防止する偏心防止機構を設けたこと。
Embodiment 4 Embodiment 4 is Embodiment 2 and Embodiment 3.
An eccentricity preventing mechanism for preventing a displacement of the substrate and the flat member with respect to the substrate holding member is provided in the bonding type optical disk bonding apparatus.

【作用】上記基板保持部材に対する基板及び上記フラッ
ト部材の位置ずれを防止する偏心防止機構を設けたこと
により、基板保持部材が上昇して基板保持部材上の基板
をフラット部材に押圧させる時にフラット部材が上記基
板に対して位置ずれを生じることが防止され、また、基
板保持部材が降下して基板保持部材上の基板がフラット
部材から離間する時にフラット部材が上記基板に対して
位置ずれを生じることが防止される。したがって、上記
位置ずれによる複合基板の品質低下が防止される。
With the provision of an eccentricity preventing mechanism for preventing the displacement of the substrate and the flat member with respect to the substrate holding member, the flat member is pressed when the substrate holding member rises to press the substrate on the substrate holding member against the flat member. Is prevented from being displaced with respect to the substrate, and the flat member is displaced with respect to the substrate when the substrate holding member is lowered and the substrate on the substrate holding member is separated from the flat member. Is prevented. Therefore, the deterioration of the quality of the composite substrate due to the displacement is prevented.

【0012】[0012]

【実施の形態】次いで図面を参照しつつ実施の態様を説
明する。本発明による装置の基本構成は従来のものと違
いはなく、紫外線照射ランプ1、紫外線を照射する基板
の保持する基板保持部材(以下「保持テーブル」とい
う)8、基板を投入ステージから保持テーブルに移すア
ーム、複合基板(上下の基板を貼り付けたもの)を保持
テーブルから搬出ステージに移すアーム等を備えてお
り、保持テーブルに載せられた貼合せる基板を軽く押圧
するフラットな石英ガラスによるプレスガラス4、その
プレスガラス4を保持するガラスホルダー5、またガラ
スホルダー5を受けるホルダー受台6、貼合すディスク
状の基板9を位置決めし保持する保持テーブル8、保持
テーブル8を昇降動作させるためのシリンダ14、また
保持テーブル8を回転させるためのモータ13、そして
紫外線照射ランプ1から照射される紫外線を反射させる
リフレクターユニット(多数の凹面鏡によるユニット)
3を備えている。また、保持テーブル8へ基板9を移載
するための投入ステージ18、基板を投入ステージ18
と保持テーブル8、保持テーブル8と搬出ステージ26
間で搬送する搬送機構17があり、これらはベース15
および架台24に組み付けられている。ディスク状の基
板9を貼合せる動作手順は及びその機構の詳細は次のと
おりである。紫外線硬化型接着剤を塗布し、それを振切
り回転装置(スピナー)などで所望の膜厚まで振切った
未硬化の貼合せディスク基板9を投入ステージ18へ載
せる。なお、投入ステージ18の設置場所に振切り回転
装置等を設けても良い。センサ19が保持テーブル上の
基板9を検知すると、その基板9を一方のアーム20先
端の吸着パッド23で吸着し、アーム20を保持テーブ
ル側に回動させて吸着した基板を保持テーブル8上に載
せる。なお、移送中に重ね合された上方基板と下方基板
とが位置ずれすることを防止するための位置決めピン2
2が吸着パッド23の中心位置に配置されており、ま
た、上記アーム20は上記搬送機構17で駆動される。
Next, an embodiment will be described with reference to the drawings. The basic configuration of the apparatus according to the present invention is the same as that of the conventional apparatus. The ultraviolet irradiation lamp 1, a substrate holding member (hereinafter referred to as a “holding table”) 8 for holding a substrate to be irradiated with ultraviolet rays, It is equipped with an arm to transfer, an arm to transfer the composite substrate (one on which the upper and lower substrates are pasted) from the holding table to the carry-out stage, etc., and press glass with flat quartz glass that lightly presses the substrate to be bonded placed on the holding table 4, a glass holder 5 for holding the press glass 4, a holder receiving table 6 for receiving the glass holder 5, a holding table 8 for positioning and holding a disc-shaped substrate 9 to be bonded, and a lifting table 8 for moving the holding table 8 up and down. The cylinder 14, the motor 13 for rotating the holding table 8, and the UV irradiation lamp 1 Reflector unit for reflecting that ultraviolet (units by multiple concave mirrors)
3 is provided. A loading stage 18 for transferring the substrate 9 to the holding table 8 and a loading stage 18
And holding table 8, holding table 8 and unloading stage 26
There is a transport mechanism 17 for transporting between
And the gantry 24. The operation procedure for bonding the disc-shaped substrate 9 and details of its mechanism are as follows. An ultraviolet-curable adhesive is applied, and the uncured laminated disk substrate 9 that has been shaken to a desired film thickness by a shake-off rotating device (spinner) or the like is placed on the loading stage 18. Note that a shake-off rotating device or the like may be provided at the installation location of the loading stage 18. When the sensor 19 detects the substrate 9 on the holding table, the substrate 9 is sucked by the suction pad 23 at the tip of the one arm 20 and the arm 20 is rotated to the holding table side to place the sucked substrate on the holding table 8. Put on. Note that positioning pins 2 for preventing the upper substrate and the lower substrate superimposed during the transfer from being displaced.
2 is arranged at the center position of the suction pad 23, and the arm 20 is driven by the transport mechanism 17.

【0013】この実施例では搬送機構17は回転(水平
回動)および昇降して、基板のピックアップ、載置を行
うものであるが、ディスク状の基板9を保持テーブル8
に移送可能なものであればどのような搬送機構でもよ
い。搬送機構17は、待機位置から投入ステージ18上
にアーム20を回動させ、その先端の吸着パッド23を
投入ステージ18上に下降させて、投入ステージ18上
の基板9を吸着パッド23に接触させ、吸着パッド23
にてディスク基板9を真空吸着させる。このときアーム
20に配置している位置決めピン22はディスク基板9
中央の穴に嵌合して重ねられた上方基板と方基板間に位
置ズレが生じないようにする。次に再び搬送機構17を
駆動させてアーム20を上昇、回転させ、保持テーブル
8上に基板9を移載する。保持テーブル8上に移載され
たディスク基板9は保持テーブル8のセンターピンにて
位置決めされ、その状態は基板9中心と保持テーブル8
の回転中心が同一になるように設置されている。なお、
投入ステージから保持テーブルに移送される上下両基板
間に未硬化の薄い接着剤層がサンドイッチされているの
で接着剤層の界面張力により、上下両基板が相対移動す
ることも分離されることもない。ただし、装置のハイス
ピード化などのため移送中の剪断方向への加速度による
上下両基板間の剪断力が界面張力を上回ったときにずれ
が生じるので、搬送アーム20にも位置ずれ防止のため
の位置決めピン22を取付て、上記の位置ずれを防止し
ている。
In this embodiment, the transport mechanism 17 rotates (horizontally rotates) and moves up and down to pick up and place the substrate.
Any transport mechanism may be used as long as it can be transported to the transport mechanism. The transport mechanism 17 rotates the arm 20 on the loading stage 18 from the standby position, lowers the suction pad 23 at the tip thereof onto the loading stage 18, and brings the substrate 9 on the loading stage 18 into contact with the suction pad 23. , Suction pad 23
Then, the disk substrate 9 is sucked by vacuum. At this time, the positioning pins 22 arranged on the arm 20 are
A positional shift is prevented from occurring between the upper substrate and the upper substrate which are fitted in the center hole and overlapped. Next, the transport mechanism 17 is driven again, the arm 20 is raised and rotated, and the substrate 9 is transferred onto the holding table 8. The disk substrate 9 transferred onto the holding table 8 is positioned by the center pin of the holding table 8, and the state is determined by the center of the substrate 9 and the holding table 8.
Are installed so that the center of rotation of them is the same. In addition,
Since the uncured thin adhesive layer is sandwiched between the upper and lower substrates transferred from the loading stage to the holding table, the upper and lower substrates are not relatively moved or separated by the interfacial tension of the adhesive layer. . However, a shift occurs when the shearing force between the upper and lower substrates due to acceleration in the shearing direction during transfer exceeds the interfacial tension due to an increase in the speed of the apparatus or the like. The positioning pin 22 is attached to prevent the above-mentioned displacement.

【0014】なお、位置決めピン22はアーム21のリ
ニアブッシュ22aによって上下動可能に支持されてい
て、コイルスプリングSによって下方に軽く付勢されて
おり、複合基板が吸着パッド23に吸着されたときに中
心が若干ずれていても、無理なく位置決めピン22の先
端が複合基板の中心孔に嵌合されるようにしている(図
5参照)。保持テーブル8の軸は軸受けによってベース
15に回転自在に支承されていて、モータ13によって
ギヤ11,12を介して駆動される。また、ベース15
は架台24に上下動可能に支持されており、シリンダ1
4の伸縮によって昇降される。シリンダ14を伸長させ
て保持テーブル8を紫外線ランプ側へと上昇させ、上昇
した保持テーブル8上の貼合せる基板9をプレスガラス
4と接触させ、プレスガラス4をガラスホルダー受台5
から若干浮き上がらせた状態で保持テーブル8の上昇動
作を停止させる。このときプレスガラス4の重量の全て
が保持テーブル上の基板9にかかるため、この重量が基
板9をプレスガラス4に押圧するプレス力となる。プレ
スガラス4の保持テーブル8に対する位置決めは、プレ
スガラス4の中心穴を保持テーブル8のセンターピン2
5へ嵌合させることを基本とするが、保持テーブル8が
下降しプレスガラス4が保持テーブル8上の基板9から
離間する時、プレスガラス4は、上記のとおりフローテ
ィング状態になっているために位置ずれを生じ易い。こ
の結果、センターピン25との位置ずれが生じた場合、
良好で円滑な嵌合せ動作が得られず、強引な嵌合いによ
るプレスガラス4への接触時のダメージや、中心位置ず
れ(保持テーブ8の回転中心とプレスガラス4の中心位
置のずれ)などを引き起こし、その結果、良好な貼合せ
基板が得られなくなるおそれがある。上記の問題に対処
するため、プレスガラス4を保持するガラスホルダー5
の外周面とガラスホルダー受台6の内周の嵌め合い面を
傾斜面(テーパ面)5s,6sにしている(図6参
照)。プレスガラス4、ガラスホルダー5、ガラスホル
ダー受台6は基板9に合せて円形であるため、ガラスホ
ルダー受台6の中心を保持テーブル8の回転中心にあわ
せることにより、保持テーブル8と分離するときでも、
上記傾斜面(テーパ面)5s,6sによって調心されて
プレスガラス4の中心は保持テーブル8の回転中心軸上
に存在する。したがって、プレスガラス4が常に同心状
態で保持テーブル8上の基板9を軽く押圧することにな
る。次に、プレスガラス4で軽く押圧された基板9が載
置されている保持テーブル8をモータ13で回転させ
る。保持テーブル8が回転したら紫外線ランプ1による
紫外線照射を開始して、プレスガラス4を通して上記基
板9上面に照射し、未硬化の上記接着剤層を硬化させ
る。このときガラスホルダ5の傾斜面5sはガラスホル
ダー受台6の傾斜面6sから少し浮き上がった状態にあ
るので、プレスガラス4は支障なく保持テーブル8上の
基板9とともに回転する。また、プレスガラス4と紫外
線ランプ1との間に配置したリフレクターユニット(多
数の凹面鏡3aを同心円状に配置したもの)3をモータ
16を往復回転運動(交番的に回転方向を換えて)させ
て、個々の凹面鏡3aを水平軸3bを軸にして揺動させ
ることにより、紫外線の反射角度を変化させ、反射光の
照射位置を変化させることで照射むらのない均一な照射
が得られる。なお、同心円状に配置された多数の凹面鏡
3aの水平軸3bは自在継ぎ手3cによって順次連結さ
れてプレスガラス4の下方において、プレスガラス4の
中心軸周りに多角形状に配置されているので、一つの水
平軸3bが正逆方向に往復駆動されることによって全て
の水平軸3bが連動して正逆回転される。また、この紫
外線ランプに冷却装置を設け、あるいは閃光型紫外線ラ
ンプ(キセノンフラッシュランプ)などを用いること
で、雰囲気、周辺機器への熱影響や量産時の連続運転時
の蓄熱による影響を軽減することができる。
The positioning pin 22 is supported by the linear bush 22a of the arm 21 so as to be vertically movable, and is urged lightly downward by the coil spring S. Even if the center is slightly shifted, the tip of the positioning pin 22 is fitted into the center hole of the composite board without any difficulty (see FIG. 5). The shaft of the holding table 8 is rotatably supported on a base 15 by a bearing, and is driven by a motor 13 via gears 11 and 12. In addition, base 15
Is supported by the gantry 24 so as to be able to move up and down.
4 is moved up and down by expansion and contraction. The cylinder 14 is extended to raise the holding table 8 toward the ultraviolet lamp, the substrate 9 to be bonded on the raised holding table 8 is brought into contact with the press glass 4, and the press glass 4 is placed on the glass holder receiving stand 5.
The lifting operation of the holding table 8 is stopped in a state in which the holding table 8 is slightly lifted from. At this time, since all of the weight of the press glass 4 is applied to the substrate 9 on the holding table, this weight is a pressing force for pressing the substrate 9 against the press glass 4. The positioning of the press glass 4 with respect to the holding table 8 is performed by aligning the center hole of the press glass 4 with the center pin 2 of the holding table 8.
5, but when the holding table 8 is lowered and the press glass 4 is separated from the substrate 9 on the holding table 8, the press glass 4 is in a floating state as described above. It is easy to cause displacement. As a result, when a positional displacement with the center pin 25 occurs,
Good and smooth fitting operation cannot be obtained, and damage at the time of contact with the press glass 4 due to forcible fitting, and misalignment of the center (misalignment between the rotation center of the holding table 8 and the center position of the press glass 4) are caused. As a result, a good bonded substrate may not be obtained. In order to address the above problems, a glass holder 5 for holding the press glass 4
The outer peripheral surface and the inner peripheral surface of the glass holder receiver 6 are fitted with inclined surfaces (tapered surfaces) 5s and 6s (see FIG. 6). Since the press glass 4, the glass holder 5, and the glass holder cradle 6 are circular in conformity with the substrate 9, the center of the glass holder cradle 6 is aligned with the rotation center of the holding table 8, so that the glass holder is separated from the holding table 8. But
The center of the press glass 4 is centered on the inclined surfaces (tapered surfaces) 5s and 6s, and is located on the rotation center axis of the holding table 8. Therefore, the press glass 4 constantly presses the substrate 9 on the holding table 8 lightly and concentrically. Next, the holding table 8 on which the substrate 9 lightly pressed by the press glass 4 is placed is rotated by the motor 13. When the holding table 8 is rotated, ultraviolet irradiation by the ultraviolet lamp 1 is started, and the ultraviolet light is irradiated on the upper surface of the substrate 9 through the press glass 4 to cure the uncured adhesive layer. At this time, since the inclined surface 5s of the glass holder 5 is slightly raised from the inclined surface 6s of the glass holder receiving base 6, the press glass 4 rotates together with the substrate 9 on the holding table 8 without any trouble. Further, a reflector unit (with a large number of concave mirrors 3a arranged concentrically) 3 disposed between the press glass 4 and the ultraviolet lamp 1 is caused to reciprocate by rotating the motor 16 (alternately changing the rotation direction). By oscillating each concave mirror 3a about the horizontal axis 3b, the reflection angle of the ultraviolet light is changed, and the irradiation position of the reflected light is changed, whereby uniform irradiation without irradiation unevenness can be obtained. The horizontal axes 3b of a number of concave mirrors 3a arranged concentrically are sequentially connected by a universal joint 3c, and are arranged below the press glass 4 in a polygonal shape around the center axis of the press glass 4. By reciprocating the two horizontal shafts 3b in the forward and reverse directions, all the horizontal shafts 3b are rotated forward and backward in conjunction with each other. In addition, by providing a cooling device for this UV lamp or using a flash type UV lamp (xenon flash lamp), it is possible to reduce the effects of heat on the atmosphere and peripheral devices and the effects of heat storage during continuous operation during mass production. Can be.

【0015】また、9がプレスガラス4に静電気や摩擦
などによって貼り付いてしまい、保持テーブル8を下降
させたときに複合基板(上記の上下両基板9,9が接着
されて一体になったもの)が取り残される可能性がある
ので、真空源(図示なし)を駆動して上記複合基板を保
持テーブルに真空吸着させてこれを防止する。上記複合
基板を保持テーブル8に真空吸着させて後、保持テーブ
ル8の回転を停止させ、シリンダ14で保持テーブル8
を下降させて、プレスガラス4から分離させる。貼合さ
れ硬化したディスク状の上下の基板9を貼合わて積層し
た複合基板は、他方のアーム21によって排出ステージ
26へ移載される。一方のアーム20と他方のアーム2
1は同一搬送機構17に接続されており、未接着の基板
と接着済みの複合基板の供給、排出は同時に行われるこ
とになる。
When the holding table 8 is lowered, the composite substrate 9 (the upper and lower substrates 9 and 9 are bonded together to form an integral body) when the holding table 8 is lowered. Since there is a possibility that the composite substrate is left behind, the vacuum source (not shown) is driven to vacuum adsorb the composite substrate to the holding table to prevent this. After the composite substrate is vacuum-sucked on the holding table 8, the rotation of the holding table 8 is stopped, and the holding table 8 is
Is lowered to separate it from the press glass 4. The composite substrate obtained by bonding and laminating the disk-shaped upper and lower substrates 9 that have been bonded and cured is transferred to the discharge stage 26 by the other arm 21. One arm 20 and the other arm 2
Numeral 1 is connected to the same transport mechanism 17, so that the supply and discharge of the unbonded substrate and the bonded composite substrate are performed simultaneously.

【0016】プレスガラス4の支持機構については、プ
レスガラス4を保持テーブル8の軸心に一致させた状態
で垂直に昇降可能に支持するものであればよいのである
から、ガラスホルダー受台6に複数の垂直ピンを設け、
これをガラスホルダー5に設けた穴に嵌合させて精密に
ガイドするものでもよい。この場合、上記垂直ピンに付
勢ばねを嵌めて設け、この付勢ばねでガラスホルダー5
を下方に付勢し、また、この付勢ばねによる付勢力を調
整して、プレスガラス4と保持テーブル8上の基板との
押圧力を調整するようにすることもできる。反対にプレ
スガラスが重すぎるときは、上記垂直ピンに嵌めて設け
た上記付勢ばねをガラスホルダの下方に配置してプレス
ガラスによる上記押圧力を低減するようにすることもで
きる。
The support mechanism for the press glass 4 may be any as long as it can vertically support the press glass 4 in a state of being aligned with the axis of the holding table 8. Provide multiple vertical pins,
This may be fitted into a hole provided in the glass holder 5 to guide precisely. In this case, an urging spring is fitted on the vertical pin and provided by the urging spring.
Can be urged downward, and the urging force of this urging spring can be adjusted to adjust the pressing force between the press glass 4 and the substrate on the holding table 8. On the other hand, when the press glass is too heavy, the biasing spring fitted to the vertical pin may be arranged below the glass holder to reduce the pressing force by the press glass.

【0017】[0017]

【効果】この発明は以上のとおりのものであるが、本発
明の効果は各請求項に係る発明毎に次のように整理され
る。 1.請求項1に係る発明について 請求項1に係る発明の貼合せ型光ディスクの貼合方法に
おいては、紫外線照射源と貼合せるディスク状の基板の
間に、光透過性のあるフラット部材を設置して、これに
貼合せる上記基板を軽く押し付け、これをフラットに矯
正させながら紫外線照射して接着剤を硬化させて貼合せ
ることで、成形や前工程までに発生した基板の歪みや、
取り置きなどの経時変化による歪みを矯正でき、紫外線
照射時の基板の熱変形を抑制して高品質の貼合せ型光デ
ィスクを得ることができる。
The present invention has been described above, but the effects of the present invention are organized as follows for each of the claimed inventions. 1. Regarding the invention according to claim 1 In the bonding method of the bonding type optical disk according to the invention according to claim 1, a light-transmissive flat member is provided between the ultraviolet irradiation source and the disk-shaped substrate to be bonded. By gently pressing the substrate to be bonded to it, curing the adhesive by irradiating ultraviolet light while correcting it flat, and bonding the substrate, distortion of the substrate caused by molding and the previous process,
It is possible to correct a distortion due to a temporal change such as storage, and to suppress a thermal deformation of the substrate at the time of irradiating ultraviolet rays to obtain a high-quality bonded optical disk.

【0018】2.請求項2に係る発明、請求項3に係る
発明について 請求項2に係る発明の貼合せ型光ディスクの貼合方法お
よび請求項3に係る発明の貼合せ型光ディスクの貼合装
置においては、上記請求項1に係る発明の効果に加え
て、フラット部材と貼合せて積層する上下の基板と保持
部材とを紫外線照射源に対して相対回転させることによ
り光線のあたる場所を変化させて照射むらを無くし、照
射むらによる接着剤層の硬化不良や残留応力の不均衡を
解消することができ、高品質の貼合せ型光ディスクを得
ることができる。
2. Regarding the invention according to claim 2 and the invention according to claim 3 In the method for bonding a bonded optical disk according to the invention according to claim 2 and the bonding apparatus for a bonded optical disk according to the invention according to claim 3, In addition to the effects of the invention according to Item 1, the upper and lower substrates and the holding member, which are laminated by laminating the flat member, are relatively rotated with respect to the ultraviolet irradiation source to change the position where the light beam strikes, thereby eliminating irradiation unevenness. In addition, poor curing of the adhesive layer and imbalance in residual stress due to uneven irradiation can be eliminated, and a high-quality bonded optical disc can be obtained.

【0019】3.請求項4に係る発明について 請求項4に係る発明の貼合せ型光ディスクの貼合せ装置
においては、上記請求項1に係る発明の効果に加えて、
紫外線照射源から照射される紫外線を乱反射させる鏡面
状の反射機構を往復動させることによって、光線のあた
る場所を変化させ照射むらを無くし、照射むらによる接
着剤層の硬化不良や残留応力の不均衡を解消することが
でき、高品質の貼合型光ディスクを得ることができる。
3. Regarding the invention according to claim 4 In the bonding apparatus of the bonding type optical disc according to the invention according to claim 4, in addition to the effect of the invention according to claim 1,
By reciprocating the mirror-like reflection mechanism that diffusely reflects the ultraviolet light emitted from the ultraviolet irradiation source, the location where the light hits is changed to eliminate irradiation unevenness. Can be eliminated, and a high-quality bonded optical disc can be obtained.

【0020】4.請求項6に係る発明について 請求項6に係る発明の貼合せ型光ディスクの貼合せ装置
においては、上記基板保持部材に対する基板及び上記フ
ラット部材の位置ずれを防止する偏心防止機構を設けた
ことにより、請求項1乃至請求項4に係る発明の効果に
加えて、偏心により生じる基板保持部材に載置された上
下の基板とフラット部材との位置ずれや、偏心回転に伴
う不均一な遠心力による上記上下の基板間の剪断応力を
低減して、この剪断応力によって生じる複合基板の歪み
をなくして高品質の貼合せ型光ディスクを得ることがで
きる。
4. About the invention according to claim 6 In the bonding apparatus of the bonding type optical disc according to the invention according to claim 6, by providing an eccentricity prevention mechanism for preventing a displacement of the substrate and the flat member with respect to the substrate holding member, In addition to the effects of the inventions according to claims 1 to 4, the above-mentioned eccentricity causes displacement between the upper and lower substrates placed on the substrate holding member and the flat member, and uneven centrifugal force caused by eccentric rotation. By reducing the shear stress between the upper and lower substrates, distortion of the composite substrate caused by the shear stress can be eliminated, and a high-quality bonded optical disc can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】は実施例の装置本体の正面図である。FIG. 1 is a front view of an apparatus main body according to an embodiment.

【図2】は実施例の装置本体の平面図である。FIG. 2 is a plan view of the apparatus main body of the embodiment.

【図3】は実施例の紫外線照射部の拡大断面図である。FIG. 3 is an enlarged cross-sectional view of an ultraviolet irradiation section of the embodiment.

【図4】は実施例のリフレクターユニットの配置を示す
平面図である。
FIG. 4 is a plan view showing the arrangement of the reflector units of the embodiment.

【図5】はアーム先端の要部拡大断面図である。FIG. 5 is an enlarged sectional view of a main part of an arm tip.

【図6】はプレスガラス(透明なフラット部材)のホル
ダ受台による支持構造の拡大断面図である。
FIG. 6 is an enlarged sectional view of a support structure of a press glass (a transparent flat member) by a holder receiving base.

【符号の説明】[Explanation of symbols]

1:紫外線ランプ 2:ランプボックス 3:リフレクターユニット 3a:凹面鏡 3b:水平軸 3c:自在継ぎ手 4:プレスガラス 5:ガラスホルダ 5s:傾斜面 6:ホルダ受台 6s:傾斜面 7:遮光板 8:保持テーブル 9:基板 10:回転シャフト 11,12:ギア 13:モータ 14:シリンダ 15:ベース 16:モータ 17;搬送気候 18:投入ステージ 19:センサ 20,21:アーム 22:位置決めピン 22a:リニアブッシュ 23:吸着パッド 24:架台 25:保持テーブル8のセンターピン 26:搬出ステージ S:コイルスプリング 1: UV lamp 2: Lamp box 3: Reflector unit 3a: Concave mirror 3b: Horizontal axis 3c: Universal joint 4: Press glass 5: Glass holder 5s: Inclined surface 6: Holder holder 6s: Inclined surface 7: Light shielding plate 8: Holding table 9: Substrate 10: Rotating shaft 11, 12: Gear 13: Motor 14: Cylinder 15: Base 16: Motor 17; Transport climate 18: Loading stage 19: Sensor 20, 21: Arm 22: Positioning pin 22a: Linear bush 23: Suction pad 24: Stand 25: Center pin of holding table 8 26: Unloading stage S: Coil spring

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】LD,DVD等の貼合せ型光ディスクの製
造工程におけるディスク貼合せ方法において、 紫外線照射源と重ね合され、基板保持部材に保持された
基板との間に光透過性のあるフラット部材を設置してお
き、これに貼合せる基板上面を押圧させ、 上記フラット部材による押圧力で上記基板の歪みを矯正
した状態で紫外線照射を行って、接着剤を硬化させて基
板を貼合せる貼合せ型光ディスク貼合せ方法。
1. A disc bonding method in a manufacturing process of a bonded optical disk such as an LD or a DVD, wherein a flat plate having a light transmitting property is provided between the substrate and a substrate held by a substrate holding member, which is superposed on an ultraviolet irradiation source. A member is placed, and the upper surface of the substrate to be bonded is pressed, and the substrate is irradiated with ultraviolet light in a state where the distortion of the substrate is corrected by the pressing force of the flat member, and the adhesive is cured to bond the substrate. Lamination type optical disk lamination method.
【請求項2】光透過性のあるフラット部材で基板を軽く
押圧した状態で上記基板保持部材を回転させながら上記
の紫外線照射を行う請求項1の貼合せ型ディスク貼合せ
方法。
2. The bonding type disk bonding method according to claim 1, wherein the ultraviolet irradiation is performed while rotating the substrate holding member while the substrate is lightly pressed by a flat member having a light transmitting property.
【請求項3】上記基板保持部材を昇降させるプレス機構
を備え、 基板保持部材を上昇させて基板上面を上記フラット部材
の下面に当接させて軽く圧接させ、基板保持部材を下降
させて基板上面をフラット部材の下面から離間させるよ
うにし、 基板保持部材を回転させる回転駆動機構を備え、 基板保持部材上の上記基板及び上記フラット部材を回転
させながら紫外線照射を行うようにした、請求項2の貼
合せ型光ディスク貼合せ方法を実施するための貼合せ型
光ディスク貼合せ装置。
3. A press mechanism for raising and lowering the substrate holding member, wherein the substrate holding member is raised to bring the upper surface of the substrate into contact with the lower surface of the flat member and lightly pressed, and the substrate holding member is lowered to lower the upper surface of the substrate. 3. The apparatus according to claim 2, further comprising: a rotary drive mechanism for rotating the substrate holding member, wherein the ultraviolet irradiation is performed while rotating the substrate and the flat member on the substrate holding member. A lamination type optical disk laminating apparatus for performing a lamination type optical disk lamination method.
【請求項4】紫外線光源の下方に鏡面状の反射機構を設
け、紫外線照射光を乱反射させるようにした請求項3の
貼合せ型光ディスク貼合せ装置。
4. The bonding type optical disk bonding apparatus according to claim 3, wherein a mirror-like reflecting mechanism is provided below the ultraviolet light source to diffusely reflect the ultraviolet irradiation light.
【請求項5】多数の凹面鏡を紫外線光源の下方に環状に
配置し、これらの凹面鏡を水平軸を中心にして往復揺動
せるようにした請求項4の貼合せ型光ディスク貼合せ装
置。
5. The bonding type optical disk bonding apparatus according to claim 4, wherein a number of concave mirrors are annularly arranged below the ultraviolet light source, and these concave mirrors are reciprocally oscillated about a horizontal axis.
【請求項6】上記基板保持部材に対する基板及び上記フ
ラット部材の位置ずれを防止する偏心防止機構を設けた
請求項3または請求項4の貼合せ型光ディスク貼合せ装
置。
6. The bonding type optical disk bonding apparatus according to claim 3, further comprising an eccentricity preventing mechanism for preventing a displacement of the substrate and the flat member with respect to the substrate holding member.
【請求項7】基板保持部材に設けた基板位置決め用の中
心ピンを上記フラット部材の中心孔に嵌合させるように
した請求項4または請求項5の貼合せ型光ディスク貼合
せ装置。
7. The bonding type optical disk bonding apparatus according to claim 4, wherein a center pin for positioning the substrate provided on the substrate holding member is fitted into a center hole of the flat member.
【請求項8】上記基板保持部材の外周に傾斜面を有する
位置決め部材を設け、上記フラット部材のホルダ外周の
傾斜面を上記基板保持部材の傾斜面に当接させて、フラ
ット部材が基板保持部材に対して自己調心されるように
した請求項7の貼合せ型光ディスク貼合せ装置。
8. A positioning member having an inclined surface is provided on an outer periphery of the substrate holding member, and an inclined surface of a holder outer periphery of the flat member is brought into contact with the inclined surface of the substrate holding member, so that the flat member is a substrate holding member. 8. The bonding type optical disk bonding apparatus according to claim 7, wherein the apparatus is self-centered with respect to the optical disk.
【請求項9】上記フラット部材のホルダを支持部材によ
って上下動自在に支持させ、基板保持部材上の基板をホ
ルダを支持部材の下面に押圧させたとき、ホルダを支持
部材が基板保持部材によって押し上げられるようにした
請求項8の貼合せ型光ディスク貼合せ装置。
9. When the holder of the flat member is vertically supported by a supporting member and the substrate on the substrate holding member is pressed against the lower surface of the supporting member, the holder is pushed up by the substrate holding member. 9. The bonding type optical disk bonding apparatus according to claim 8, wherein the bonding apparatus is adapted to be used.
JP26248399A 1999-09-16 1999-09-16 Sticking method for stuck type optical disk and sticking device Pending JP2001084654A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26248399A JP2001084654A (en) 1999-09-16 1999-09-16 Sticking method for stuck type optical disk and sticking device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26248399A JP2001084654A (en) 1999-09-16 1999-09-16 Sticking method for stuck type optical disk and sticking device

Publications (1)

Publication Number Publication Date
JP2001084654A true JP2001084654A (en) 2001-03-30

Family

ID=17376428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26248399A Pending JP2001084654A (en) 1999-09-16 1999-09-16 Sticking method for stuck type optical disk and sticking device

Country Status (1)

Country Link
JP (1) JP2001084654A (en)

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