JP2001084534A - Magnetic head slider and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic head slider of high performance capable of performing a high density recording at a low cost. SOLUTION: This magnetic head slider is provided with a holder part for maintaining sliding contact with a recording medium, an electromagnetic induction type element part 6 as the one for recording signals to the recording medium and a magnetic resistance effect type element part 2 as the one for detecting the signals from the recording medium. In this case, the magnetic resistance effect type element part 2 is constituted of a thin film process and the electromagnetic induction type element part 6 is constituted of a ferrite substrate and a coil.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head slider for a magnetic disk drive, and more particularly, to a holder for maintaining sliding contact with a recording medium, and an electromagnetic induction type element for recording signals on the recording medium. And a magnetic head slider including a magnetoresistive element for detecting a signal from the recording medium and a method of manufacturing the same.

[0002]

2. Description of the Related Art FIG. 10 is a schematic diagram of a conventional thin-film MR head (magnetic head) disclosed in, for example, page 82 of "New Development of Ultra-High Density External Storage Device" published by Nikkei BP.
Is an upper magnetic pole, 29 is a coil, 8 and 9 are magnetic thin films, 3 is an electrode film, and 2 is a magnetoresistive element. These components are all formed by a thin film process. The magnetoresistive element for detecting a signal from a recording medium includes a magnetoresistive element 2 and an electrode film 3. The magnetoresistive element 2 is for detecting a change in the magnetic field of a recording medium (not shown), and detects a change in resistance due to a magnetic field generated from the recording medium via the electrode film 3. In detecting a change in the magnetic field of the recording medium, in order to remove an unnecessary magnetic field, in this magnetoresistive element section, the magnetoresistive element 2 and the electrode film 3 are formed of two magnetic thin films 8 and 9. It is configured to be sandwiched. On the other hand, an electromagnetic induction type element portion for recording a signal on a recording medium includes an upper magnetic pole 30 and a coil 2 shown in FIG.
9 and a magnetic thin film 8.
By passing a current through a coil 29 wound around a magnetic circuit composed of a magnetic thin film 8 and a magnetic thin film 8, a magnetic field is generated in a gap G between the upper magnetic pole 30 and the magnetic thin film 8, and a signal is recorded on a recording medium. .

[0003]

However, in the magnetic head as described above, many thin film processes are required for forming the components, so that the yield is lowered and the manufacturing cost is increased. . Also, since the magnetic head is formed by cutting out the substrate, the pitch of the magnetic head elements on the substrate is restricted by the shape of the slider, so that the number of magnetic head elements obtained from one substrate is reduced. This causes an increase in cost. Therefore, there is a problem that the cost is high when the magnetic head slider is finally provided.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems and to provide a high-performance magnetic head slider capable of high-density recording at low cost and a method of manufacturing the same.

[0005]

According to a first aspect of the present invention, there is provided a holder for maintaining sliding contact with a recording medium, an electromagnetic induction type element for recording a signal on the recording medium, and a recording medium. In a magnetic head slider provided with a magnetoresistive element for signal detection, the magnetoresistive element is formed by a thin film process, and the electromagnetic induction element is formed by a ferrite substrate and a coil. It is characterized by having.

According to a second aspect of the present invention, in the magnetic head slider according to the first aspect, the electromagnetic induction type element portion is formed by joining a ferrite substrate on which a coil is wound on the magnetoresistive effect type element portion. It is characterized by having a configuration.

[0007] The third aspect of the present invention is the first or second aspect.
In the magnetic head slider according to the above, the electromagnetic induction type element portion is further formed by bonding a ferrite substrate on a flat ferrite substrate bonded on the magnetoresistive effect type element portion, and forming a coil on the ferrite substrate. Characterized by being wound.

According to a fourth aspect of the present invention, in the magnetic head slider according to the first aspect, at least a part of the surface of the pad portion formed by the thin film process is exposed to the outside of the wiring of the magnetoresistive element portion. It is characterized by having been constituted.

The invention according to claim 5 is the invention according to claims 1 to 4.
In the magnetic head slider according to any one of the above, the wiring of the magnetoresistive element is provided with a cutout in a part of the holder so that at least a part of the surface of the pad formed by the thin film process is exposed. It is characterized by having the above configuration.

[0010] The invention of claim 6 is the first to fifth aspects of the present invention.
Wherein the width of the magnetoresistive element is substantially the same as the width of the ferrite substrate forming the electromagnetic induction element.

According to a seventh aspect of the present invention, there is provided a magnetic head slider having an electromagnetic induction type element for recording a signal on a recording medium and a magnetoresistive element for detecting a signal from the recording medium. In the manufacturing method, in a thin film process, a plurality of magnetoresistive element sections are arranged in rows at equal intervals to form a magnetoresistive element section row member. A ferrite substrate member constituting the electromagnetic induction type element portion is joined thereon to form a mother substrate including the magnetoresistive effect type element portion row member and the ferrite substrate member. The head slider is divided into head slider portions each including a resistance effect element portion and a ferrite substrate portion.

The invention according to an eighth aspect of the present invention provides an electromagnetic induction type element for recording a signal on the recording medium, a holder for maintaining a sliding contact with the recording medium, and a signal for detecting a signal from the recording medium. A method of manufacturing a magnetic head slider including a magnetoresistive element, wherein a plurality of magnetoresistive elements are arranged in a row at equal intervals in a holder member by a thin film process. Forming an element portion row member, joining a ferrite substrate member constituting an electromagnetic induction type element portion on the magnetoresistive effect type element portion row member, the holder member and the magnetoresistive effect type element portion row member, Forming a base substrate comprising a ferrite substrate member, and dividing the base substrate into head slider portions each including a holder portion on one of the magnetoresistive effect element portions and a ferrite substrate portion on the other. Features and That.

[0013] The invention of claim 9 is the invention of claim 7 or claim 8.
In the method for manufacturing a magnetic head slider according to the above, the divided head slider portion is mounted on a head holder,
The coil is wound around the ferrite substrate.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 Embodiment 1
A magnetic head element using an electromagnetic induction element as an electromagnetic induction element for recording a signal on a recording medium, and a magnetoresistive element as a magnetoresistive element for detecting a signal from a recording medium; A magnetic head slider having a holder for maintaining sliding contact with a medium, wherein the magnetoresistive element is formed by a thin film process, and the electromagnetic induction element is formed without using a thin film process. An example constituted by a substrate and a winding coil of a wire is shown. Hereinafter, description will be given based on FIGS. 1 to 3. FIG. 1 is a configuration diagram of a magnetic head element of a magnetic head slider, FIG. 2 is a schematic configuration diagram of the magnetic head element viewed from a sliding surface side, and FIG. 3 is a schematic configuration diagram of a magnetic head slider viewed from a side.

In FIGS. 1 and 2, reference numeral 1 denotes a silicon substrate. On the silicon substrate 1 (on the right side in the figure), components constituting a magnetoresistive element portion are formed by using a thin film process. . Reference numeral 2 denotes a magnetoresistive element formed by a thin film process, and reference numeral 3 denotes an electrode film for detecting a change in resistance of the magnetoresistive element 2. Reference numeral 4 denotes a pad for connecting a wiring to the electrode film 3, and these components constitute a magnetoresistive element.

An electromagnetic induction type element is joined to the above magnetoresistive element (the right side in the figure). The electromagnetic induction type element serving as the electromagnetic induction type element portion includes a ferrite substrate 5 as a core and a coil 6 as a winding wound around the ferrite substrate 5. The cross section of the ferrite substrate 5 of this example is formed in a substantially C-shape (U-shape). It is preferable that the width of the magnetoresistive element 2 including the pad portion 4 described later is substantially the same as the width of the ferrite substrate 5 constituting the electromagnetic induction type element portion.

Reference numeral 7 denotes a magnetic thin film bonded to the ferrite substrate 5, 8 denotes a magnetic thin film formed between the magnetoresistive element 2 and the ferrite substrate 5, and 9 denotes a position where the magnetoresistive element 2 is located at the center. It is a magnetic thin film formed on the opposite side of the magnetic thin film 8 so as to sandwich it. These magnetic thin films 7, 8, and 9 are thin films for forming a magnetic path through which a magnetic field passes, and a permalloy film or the like is used. The magnetic thin film 7 is bonded to improve the magnetic characteristics of the ferrite substrate 5, and is not necessarily required when the magnetic characteristics of the ferrite substrate 5 can ensure the required performance. Reference numeral 10 denotes a magnetic insulating film formed between the ferrite substrate 5, the magnetic thin films 7, 8, and 9, the magnetoresistive element 2, and the electrode film 3.

FIG. 3 is a schematic structural view of a magnetic head slider including the magnetic head element shown in the first embodiment and a holder section 11 for holding the magnetic head element in sliding contact with a recording medium, as viewed from the side. It is. A recording medium (not shown) is located above this figure. The holder 11 is a ceramic holder (ceramic holder), and the magnetic head element described in the first embodiment is fixed on the holder 11 (right side in the figure) to form a magnetic head slider.

In the first embodiment, as shown in the figure, the silicon substrate 1 is formed longer than the ferrite substrate 5 (up and down direction in the figure), so that the surface opposite to the sliding contact surface with the recording medium is formed. , At least a part of the surface of the pad portion 4 is exposed to the outside. In this way, by adopting a configuration in which at least a part of the surface of the pad portion 4 for connecting the detection signal to the outside is exposed, connection with the outside is facilitated.

Next, the operation will be described. The magnetoresistive element 2 is for detecting a magnetic field change on the recording medium, and its resistance value changes according to a magnetic field generated from the recording medium. The change detected here is transmitted to the outside via the electrode film 3 and the pad portion 4. Upon this detection,
In order to remove a disturbance magnetic field, the magnetoresistive element 2 is sandwiched between two magnetic thin films 8 and 9. A magnetic field for recording a signal on the recording medium is applied to the ferrite substrate 5, the coil 6, and the magnetic thin films 7 and 8 constituting the electromagnetic induction type element portion. When a current flows through a coil 6 wound around a magnetic circuit composed of the ferrite substrate 5 and the magnetic thin films 7 and 8, a magnetic field is generated in the gap between the ferrite substrate 5 and the magnetic thin film 7 and the magnetic thin film 8. .

According to the first embodiment, most components of the electromagnetic induction element for signal recording can be manufactured by a method other than the thin film process, so that the time required for the thin film process can be reduced. As a result, the manufacturing cost and yield can be significantly improved. Furthermore, since at least a part of the surface of the pad portion 4 is exposed, wiring to the outside is facilitated.

Embodiment 2 FIG. In the first embodiment, the magnetic pole on one side corresponding to the electromagnetic induction element for signal recording is composed of only a magnetic thin film. However, in the second embodiment, the magnetic poles on both sides of the electromagnetic induction element are ferrite. FIGS. 4 to 6 show a configuration including a substrate. FIG. 4 is a configuration diagram showing each component as a component of the magnetic head element of the magnetic head slider, similarly to FIG. 1, and FIG. 5 is a schematic view of the magnetic head element of FIG. 4 viewed from the sliding surface side. FIG. 6 is a block diagram of FIG.
FIG. 3 is a schematic configuration diagram of a magnetic head slider in which the magnetic head element of FIG.

4 and 5, reference numeral 12 denotes a ferrite substrate for forming a magnetic thin film 8 between the magnetoresistive effect element 2 and the ferrite substrate 5 formed in the first embodiment in a substantially C-shape. is there. Hereinafter, the ferrite substrate 12 is also referred to as a second ferrite substrate, and the ferrite substrate 5 is also referred to as a first ferrite substrate. The second ferrite substrate 12 is formed in a planar shape in this example, and is joined on the magnetoresistive element 2 (on the right side in the drawing). Then, on the second ferrite substrate 12 (right side in the figure)
In the same manner as in the first embodiment, a substantially C-shaped first ferrite substrate 5 is joined.
And a coil 6 wound thereon. The substrate 1 of the above-described magnetoresistive effect element portion, in this example, the silicon substrate has a width including a pad portion 4 to be described later, which is substantially equal to that of the substrate 5 constituting the electromagnetic induction type element portion, in this example, the ferrite substrate. Preferably they have the same width.

In FIG. 5, reference numeral 10 denotes a first ferrite substrate 5, a second ferrite substrate 12, magnetic thin films 7, 8,
9, a magnetic insulating film formed between the magnetoresistive element 2, the electrode film 3, and the like. The magnetic thin films 7, 8, and 9 are thin films for forming a magnetic path through which a magnetic field passes, and a permalloy film or the like is used. Since the magnetic thin film 7 is joined to improve the magnetic characteristics of the first ferrite substrate 5 in the same manner as in the first embodiment, the magnetic characteristics of the first ferrite substrate 5 determine the required performance. If it can be secured, the magnetic thin film 7 is not always necessary. Also, since the magnetic thin film 8 is also joined to improve the magnetic characteristics of the second ferrite substrate 12, if the magnetic characteristics of the second ferrite substrate 12 can secure the required performance, this The magnetic thin film 8 is not always necessary.

FIG. 6 is a schematic structural view of the magnetic head slider according to the second embodiment as viewed from the side, as described above.
A recording medium (not shown) is located above this figure. The wiring of the magnetoresistive effect element portion formed by the thin film process has the pad portion 4 formed by the thin film process at least on the surface of the pad portion 4 on the surface opposite to the sliding surface with the recording medium. The magnetic thin film 7.8.9 is partially exposed to the outside.
The first ferrite substrate 5, the holder 11, the second ferrite substrate 12, and the like formed in a substantially C-shape are appropriately formed on a part of the slider. In the illustrated example, a notch 1 is formed in a part of the holder 11 in order to expose a part of the surface of the pad 4.
3, but of course, such a notch is not limited to this example. With such a configuration, the wiring from the pad portion 4 can be pulled out very easily after assembling the magnetic head slider.

Next, the operation will be described. The magnetoresistive element 2 is for detecting a magnetic field change on a recording medium, and its resistance value changes by a magnetic field generated from the recording medium. The change detected here is transmitted to the outside via the electrode film 3 and the pad portion 4. In order to remove a disturbance magnetic field at the time of this detection, the magnetoresistive element 2 is sandwiched between two magnetic thin films 8 and 9. They are,
This is the same as in the first embodiment. A magnetic field for recording a signal on the recording medium is applied to the first ferrite substrate 5 and the second ferrite substrate 12 and the first ferrite substrate 5 constituting the electromagnetic induction type element unit. And the magnetic thin films 7 and 8. By passing a current through a coil 6 wound around a magnetic circuit composed of a ferrite substrate 5 and magnetic thin films 7, 8, the first
A magnetic field is generated between the ferrite substrate 5 and the magnetic thin film 7 and the second ferrite substrate 12 and the magnetic thin film 8.

In the second embodiment, as described above, the structure on both sides of the region where the magnetic field is generated, that is, the first ferrite substrate 5 and the magnetic thin film 7 and the second ferrite substrate 12 and the magnetic thin film 8 Since the similar configuration is used, the symmetry of the recording magnetic field can be greatly improved.
Also, since most of the elements for signal recording can be manufactured using a method other than the thin film process, the time required for the thin film process is greatly reduced as compared with the conventional case where almost all components are formed by the thin film process. Therefore, the manufacturing cost and the yield can be improved. Furthermore, since the notch 13 is formed in the holder portion 11 so that at least a part of the surface of the pad portion 4 for connecting the detection signal to the outside is exposed to the outside, connection to the outside, that is, wiring is facilitated.

Embodiment 3 In the third embodiment, an electromagnetic induction type element for recording a signal on the recording medium and a magnetoresistive effect type for detecting a signal from the recording medium are provided in a holder for maintaining sliding contact with the recording medium. The method of manufacturing the magnetic head slider shown in the first and second embodiments having the element section will be described with reference to FIGS. FIG. 7 is a view showing a method of manufacturing a magnetic head slider, FIG. 8 is a view showing a magnetoresistive element portion formed in a row,
FIG. 9 is a view showing an example of a conventional magnetic head slider in which all the magnetic head elements are formed by a thin film process.

First Step In FIG. 7, first, on one side, a holder member 31 having a size that can be divided into a required number of holder parts (right side in the figure)
In addition, as a substrate member of a size that can be divided into a required number of magnetoresistive elements, for example, a silicon substrate member is joined,
On the substrate member (right side in the figure), by a thin film process,
A plurality of magnetoresistive element sections 19 are arranged in rows at equal intervals to form a magnetoresistive element section row member 32. FIG.
In the figure, a plurality of sets of a silicon substrate 1, a magnetoresistive element 2, a magnetoresistive element section 19 composed of an electrode film 3, pads 4, and 4 are arranged at equal intervals in the form of a row (in FIG. (Left-right direction). A solid line vertically separating adjacent magnetoresistive elements 19, 19 indicates that each of the magnetoresistive elements 19 is one by one, that is, 2 shows a division line when cut out.

Second Step Next, in FIG. 7, the above-described embodiment is provided on the magnetoresistive element array member 32 (right side in the figure), that is, on the 19 magnetoresistive element array. In 1, a ferrite substrate member 33 serving as a first ferrite substrate 5 constituting an electromagnetic induction type element portion is joined. Thus, the holder member 31 and the magnetoresistive element array member 3 joined together
A mother substrate including the ferrite substrate member 2 and the ferrite substrate member 33 is formed. At this stage, the cross section of the ferrite substrate member 33 has already been formed into a substantially C-shape (U-shape).

Third Step Next, one of the above-mentioned mother substrates (31, 32, 33) is made into one, that is, a set of ferrites constituting the holder 11, the magnetoresistive element 19, and the electromagnetic induction element. It is cut out so as to be divided for each unit substrate including the substrate 5, that is, for each head slider portion 16.

Fourth Step Next, a head slider portion (unit substrate) 16 comprising a set of the holder portion 11, the magnetoresistive element portion 19, and the ferrite substrate 5 cut out in this way is separately prepared. It is appropriately mounted on the holder 17. In this mounting, as shown in FIG. 7, for example, it is preferable that the head slider portion 16 as a unit substrate is sandwiched between the head holders 17 from both sides. In this case, the ferrite substrate 5 is joined or fixed so that it is exposed from the head holder 17. The head holder 17 in this example is made of ceramic (ceramic holder).

Fifth Step Finally, the coil 6 is wound around the exposed ferrite substrate 5 to form an electromagnetic induction type element portion, whereby the magnetic head slider 18 is completed.

In the first to fifth steps, the magnetic head slider according to the first embodiment has been described.
The same applies to the magnetic head slider described in the second embodiment, that is, the magnetic head slider including the second ferrite substrate 12. In the first to fifth steps,
Although the description has been given of the configuration example including the holder member 31 that can be divided into the required number of holder portions 11, the holder member 31 is not necessarily required.
Is not necessary. This manufacturing method can be applied to the manufacture of a magnetic head slider without the holder 11.

According to the manufacturing method of the third embodiment, a substrate having a plurality of magnetoresistive elements 19 formed at regular intervals in a matrix using a thin film process, that is, a magnetoresistive element section By joining in advance the row member 32 and the ferrite substrate 5 having a substantially C-shaped cross section having substantially the same length as that of the magnetoresistive element section, the electromagnetic induction type element section is formed. A plurality of magnetic head elements including the magnetoresistive element can be simultaneously and efficiently mass-produced.

A substrate member (silicon substrate member) in which the magnetoresistive effect element portions 19 shown in FIG. 8 are formed in an aligned state by this manufacturing method, and a magnetic head element as shown in FIG. Comparing the substrate on which the conventional magnetic head slider 20 entirely formed by the thin film process is formed with the number of magnetic head elements that can be formed in the same area, the substrate used in the manufacturing method of the present invention is more efficient. Excellent in point. This is an advantage of the present invention obtained by not generating all of the magnetic head sliders collectively by a thin film process. FIG.
Numeral 21 shown is a row of magnetic head elements formed in the row 20 of the magnetic head slider. The number of pad portions 4 for connecting the row 21 of magnetic head elements to the outside is two, two corresponding to the magnetoresistive effect element 2 and two corresponding to both ends of the coil. It is arranged beside the row 21 of magnetic head elements for formation. On the other hand, in the present invention, as shown in the third embodiment, the pad portion 4 is arranged below the magnetoresistive effect element 2, that is, at both lower ends of the U-shape. The spacing between the magnetoresistive element portions 19 formed in alignment with each other can be narrowed, and the production efficiency per unit area can be improved.

According to the manufacturing method shown in the third embodiment, the width of the magnetoresistive element 19 including the pad 4 is substantially the same as the width of the electromagnetic induction element joined thereto. Can be formed. Therefore, even if a thin film process is used, the magnetoresistive element portion 19 can be efficiently formed on the silicon substrate 1 unlike the conventional case, and the cost can be reduced. it can.

[0038]

According to the first to ninth aspects of the present invention, most of the signal recording elements can be manufactured by a method other than the thin film process, so that the time required for the thin film process can be reduced. As a result, the manufacturing cost and the yield can be improved, and a high-performance magnetic head slider capable of high-density recording at low cost can be provided.

According to the third aspect of the present invention, since the structure on both sides of the magnetic field generating region is made similar to improve the symmetry of the signal recording element, the symmetry of the recording magnetic field is greatly improved. Thus, a high-performance magnetic head slider can be provided.

According to the fourth and fifth aspects of the present invention,
Since at least a part of the surface of the pad portion is exposed to the outside, wiring can be pulled out from the pad portion very easily after assembling the magnetic head slider, and external wiring processing can be easily performed. Can be.

According to the seventh and ninth aspects of the present invention,
Compared with the conventional method, a large amount of magnetic head sliders can be manufactured extremely efficiently.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a magnetic head element portion of a magnetic head slider according to a first embodiment.

FIG. 2 is a schematic configuration diagram of the magnetic head element section of FIG. 1 viewed from a sliding surface.

FIG. 3 is a schematic configuration diagram of the magnetic head slider of FIG. 1 viewed from the side.

FIG. 4 is a configuration diagram of a magnetic head element portion of a magnetic head slider according to a second embodiment.

FIG. 5 is a schematic configuration diagram of the magnetic head element section of FIG. 4 as viewed from a sliding surface.

FIG. 6 is a schematic configuration diagram of the magnetic head slider shown in the second embodiment as viewed from the side.

FIG. 7 is a diagram illustrating a method of manufacturing a magnetic head slider.

FIG. 8 is a diagram showing a magnetoresistive element portion formed in a row.

FIG. 9 is a diagram showing an example of a conventional magnetic head slider in which all of the magnetic head elements are formed by a thin film process.

FIG. 10 is a schematic view of a conventional thin film MR head.

[Explanation of symbols]

Reference Signs List 1 silicon substrate, 2 magnetoresistive element (magnetoresistive element section), 3 electrode films, 4 pad sections, 5 ferrite substrate (first ferrite substrate), 6 coil (electromagnetic induction element section), 7, 8 , 9 magnetic thin film, 11 holder part, 12 ferrite substrate (second ferrite substrate),
13 notch, 16 head slider part (unit substrate),
18 magnetic head slider, 19 magnetoresistive element section, 31 holder member, 32 magnetoresistive element row member, 33 ferrite substrate member, 34 head holder.

 ────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Yukio Izumi 2-3-2 Marunouchi, Chiyoda-ku, Tokyo F-term (reference) in Mitsubishi Electric Corporation 5D033 BA13 BB14 DA02 DA22 DA31 5D034 BA03 BA09 BA16 BA18 BB02 BB20 DA07 5D042 NA02 PA03 PA09 QA04 QA06 RA01

Claims (9)

[Claims] 1. A holder for maintaining sliding contact with a recording medium, an electromagnetic induction element for recording a signal on the recording medium, and a magnetoresistive element for detecting a signal from the recording medium. A magnetic head slider comprising:
A magnetic head slider according to claim 1, wherein said electromagnetic induction type element portion comprises a ferrite substrate and a coil. 2. The magnetic head according to claim 1, wherein the electromagnetic induction type element section has a configuration in which a ferrite substrate on which a coil is wound is joined to a magnetoresistive effect type element section. Slider. 3. The electromagnetic induction type element section is provided on a planar ferrite substrate joined on the magnetoresistive effect type element section.
3. The magnetic head slider according to claim 1, wherein a ferrite substrate is further joined, and a coil is wound around the ferrite substrate. 4. The magnetic device according to claim 1, wherein the wiring of the magnetoresistive element has a structure in which at least a part of a surface of a pad formed by a thin film process is exposed to the outside. Head slider. 5. The wiring of the magnetoresistive element portion has a structure in which a notch is provided in a part of a holder portion such that at least a part of a surface of a pad portion formed by a thin film process is exposed. The magnetic head slider according to any one of claims 1 to 4, wherein: 6. The device according to claim 1, wherein the width of the magnetoresistive element is substantially the same as the width of the ferrite substrate constituting the electromagnetic induction element. Magnetic head slider. 7. A method of manufacturing a magnetic head slider comprising: an electromagnetic induction element for recording a signal on a recording medium; and a magnetoresistive element for detecting a signal from the recording medium. Forming a magnetoresistive element array member in which a plurality of magnetoresistive element elements are arranged at regular intervals in a row in a process; and forming an electromagnetic induction on the magnetoresistive element element array member. A ferrite substrate member forming a mold element portion is joined to form a mother substrate composed of the magnetoresistive effect element array member and the ferrite substrate member, and the mother substrate is formed as one magnetoresistive element element portion. And a ferrite substrate portion. 8. A holder for maintaining sliding contact with a recording medium, an electromagnetic induction type element for recording a signal on the recording medium, and a magnetoresistive element for detecting a signal from the recording medium. A method for manufacturing a magnetic head slider comprising: a plurality of magnetoresistive element sections arranged at regular intervals in a row by a thin film process on a holder member; Forming, on the magnetoresistive element array member, joining a ferrite substrate member constituting an electromagnetic induction type element section, from the holder member, magnetoresistive element array member and ferrite substrate member A magnetic head comprising: a base substrate formed by dividing a base substrate into head slider portions each including a holder portion on one of the magnetoresistive effect element portions and a ferrite substrate portion on the other; Lidar manufacturing method. 9. The method for manufacturing a magnetic head slider according to claim 7, wherein the divided head slider portion is mounted on a head holder, and a coil is wound around the ferrite substrate portion.