JP2001083098A - Optical surface inspection mechanism and device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical surface inspection mechanism and device for grasping the depth of a scratch and at the same time grasping a shallow scratch and undulation. SOLUTION: This optical surface inspection mechanism for optically inspecting the surface state of an object 6 to be measured is provided with a light source optical system 2 for allowing light from a light source 1 to be nearly in parallel luminous flux, a one-dimensional microlens array 3 where a plurality of microlenses 3a, 3b, etc., for forming the image of a light source 1 by condensing luminous flux that has been made parallel by the light source optical system 2 are aligned in a straight line, an object optical system 4 for projecting the image of the light source being formed by the one-dimensional microlens array 3 to the object 6 to be measured, a first image-forming optical system for forming the image of luminous flux reflected from the surface of the object 6 to be measured in that the luminous flux has been applied, and a one-dimensional line sensor, where a plurality of pixels are aligned being arranged corresponding to each of the micro lenses 3a, 3b, etc., on an image formation surface by the first image-forming optical system or near the image formation surface.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical surface inspection mechanism used in the field of optical measurement and an optical surface inspection apparatus using the same, and more particularly, to inspecting the depth of a flaw on the surface of an object to be measured. And an optical surface inspection apparatus using the same.

[0002]

2. Description of the Related Art Conventionally, as a device for inspecting the surface condition of an object to be inspected, as shown in FIG. In some cases, surface conditions such as defects and uneven color of an object to be measured are inspected by various signal processing techniques based on a change in the amount of detected scattered light. With such a technique, information on the size of a defective shape such as a scratch or a defect could be obtained.

[0003]

However, according to the above-described conventional inspection apparatus, it is difficult to obtain information in the depth direction with respect to shape defects such as scratches and defects.
Further, it has been difficult to detect shallow scratches having a very small amount of scattered light and undulation of a medium or the like.

Accordingly, an object of the present invention is to provide an optical surface inspection mechanism and a surface inspection apparatus capable of grasping the depth of a flaw and of a shallow flaw or undulation.

[Means for Solving the Problems]

[0005] In order to achieve the above object, an optical surface inspection mechanism according to the first aspect of the present invention is, for example, shown in FIGS.
As shown in the figure, in an optical surface inspection mechanism for optically inspecting the surface state of the DUT 6; a light source optical system 2 for converting light from the light source 1 into a substantially parallel light beam; A plurality of microlenses 3a, 3b,... Arranged linearly to form an image of the light source 1 by condensing the formed light flux; and the one-dimensional microlens array 3 forms an image. An objective optical system 4 for projecting the image of the light source onto the object 6 to be measured; and a first imaging optical system 1 for imaging the light beam reflected from the surface of the object 6 onto which the light beam is projected.
0; a plurality of pixels arranged linearly on the image forming surface of the first image forming optical system 10 or in the vicinity of the image forming surface so as to correspond to the microlenses 3a, 3b,. A one-dimensional line sensor 12.

With this configuration, the one-dimensional microlens array 3 and the objective optical system 4 for projecting the image of the light source formed by the one-dimensional microlens array 3 onto the DUT 6
Therefore, the light source images arranged linearly on the object to be measured are formed. The irradiation state of this light source image changes depending on the surface state of the measured object. In particular, the irradiation state changes significantly depending on the depth of the surface irregularities. In addition, since the one-dimensional line sensor is provided, light beams arranged in a straight line including information on the surface state of the object to be measured are focused on the one-dimensional line sensor.

In order to achieve the above object, an optical surface inspection mechanism according to the second aspect of the present invention will be described with reference to FIGS.
As shown in the figure, in an optical surface inspection mechanism for optically inspecting the surface state of the DUT 6; a light source optical system 2 for converting light from the light source 1 into a substantially parallel light beam; A plurality of microlenses 3a, 3b,... For condensing the formed light flux and forming an image of the light source 1 are linearly arranged.
A one-dimensional micro-lens array 3; an objective optical system 4 for projecting an image of a light source formed by the first one-dimensional micro-lens array 3 onto an object 6; and an object 6 onto which the light beam is projected. First to focus the light beam reflected from the surface of the
And a plurality of microlenses 13a, 13b,... Which convert the light from the DUT 6 focused by the first imaging optical system 10 into a substantially parallel light beam, are linearly arranged. A second one-dimensional microlens array 13; a second imaging optical system 14 for forming an image of the second one-dimensional microlens array 13; a second one-dimensional with respect to the second imaging optical system 14 Each micro lens 1 of the micro lens array 13
And a one-dimensional line sensor 12 in which a plurality of pixels are arranged in a straight line. At the rear focal point of the second imaging optical system 14, an aperture 15 may be arranged.

In order to achieve the above object, an optical surface inspection mechanism according to a third aspect of the present invention provides an optical surface inspection system for optically inspecting the surface condition of a device under test 6, as shown in FIG. A light source optical system 2 for converting light from the light source 1 into a substantially parallel light beam; and a plurality of microlenses 3a for condensing the light beam collimated by the light source optical system 2 to form an image of the light source 1. One-dimensional microlens array 3 in which 3b... Are linearly arranged; one-dimensional microlens array 3
Objective optical system 4 for projecting the image of the light source formed by the method on object 6 to be measured; beam splitter 16 arranged between light source optical system 2 and one-dimensional microlens array 3; one-dimensional microlens array An imaging optical system 14 for imaging an image of the one-dimensional microlens array 3, which is arranged in a direction in which light reflected from the DUT 6 via the object 3 is reflected by the beam splitter 16; With respect to 14, each micro lens 3a, 3b of the one-dimensional micro lens array 3
And a one-dimensional line sensor 12 in which a plurality of pixels are linearly arranged. Imaging optical system 1
An aperture 15 may be arranged at the rear focal point of No. 4.

In order to achieve the above object, an optical surface inspection mechanism according to a fourth aspect of the present invention is the optical surface inspection mechanism according to the third aspect, for example, as shown in FIG. The imaging optical system is a one-dimensional microlens array 3
Is a third one-dimensional microlens array 17 in which microlenses are arranged corresponding to the respective microlenses 3a, 3b,..., And the one-dimensional line sensor 12 includes the objective optical system 4 and the one-dimensional microlens array 3 And may be arranged at conjugate positions. The surface of the object to be measured is imaged on each pixel of the one-dimensional line sensor.

Here, as described in claim 5, in the optical surface inspection mechanism according to any one of claims 1 to 4, the light source optical system 2 controls the light from the light source 1 substantially. A collimator lens 2a for converting the light beam into a parallel light beam; a first cylindrical lens 2b for imparting astigmatism to the light beam substantially parallelized by the collimator lens 2a to focus the light beam on a focal line in a predetermined direction (X-axis direction); And the second cylindrical lens 2c having a refractive power in a direction (Y-axis direction) perpendicular to the direction (X-axis direction).

With this configuration, since the first and second cylindrical lenses are provided, a line light beam having a width in a predetermined direction and having a very narrow width in a direction perpendicular thereto is obtained. If the line of the line luminous flux is made coincident with the arrangement direction of each microlens of the one-dimensional microlens array, the light of the light source can be effectively used for the microlens array. Therefore, the luminance of the irradiated portion on the surface of the device under test can be increased.

In order to achieve the above object, an optical surface inspection apparatus according to a sixth aspect of the present invention provides an optical surface inspection apparatus according to any one of the first to fifth aspects as shown in FIG. A surface inspection mechanism; an object to be measured 6 and the optical surface inspection mechanism are arranged in a direction parallel to the surface and perpendicular to an arrangement direction (X-axis direction) of a plurality of light source images projected on the object to be measured 6 (X-axis direction); First moving means 3 for relatively moving in the Y-axis direction)
A second moving means 32 for relatively moving the DUT 6 and the arrangement direction (X-axis direction) in a direction normal to the surface (Z-axis direction); and a second moving means 32 Means 41 for recording the relative movement position of the surface in the normal direction (Z-axis direction) and the output of the one-dimensional line sensor 12 corresponding to the relative movement position.

The recording means 41 preferably comprises a storage means for storing a relative movement position by the second movement means 32, which gives the maximum detected value of the output for each of the plurality of light detection elements 12. .

[0014]

Embodiments of the present invention will be described below with reference to the drawings. In the drawings, the same or corresponding members are denoted by the same or similar reference numerals, and duplicate description is omitted.

FIG. 1 is a schematic side view (a) showing an irradiation optical system including a light source optical system, a microlens, and an objective optical system in a surface inspection mechanism according to a first embodiment of the present invention. It is a schematic front view (b).

Referring to FIG. 1A, an irradiation optical system according to the first embodiment will be described first. The optical axis of the light source optical system 2 is directed in the Z-axis direction perpendicular to the surface of the DUT 6,
The orthogonal coordinates X axis and Y axis are set in a plane orthogonal to the axis. In the figure, a light source 1 for generating monochromatic light, and a convex lens 2a as a collimator lens, a cylindrical lens 2b, and a cylindrical lens 2c, which constitute a light source optical system for converting light from the light source 1 into parallel rays, are arranged in this order. I have. Each of the cylindrical lenses 2b and 2c has a positive refractive power in the Y-axis direction, and has no refractive power in the X direction. The light source optical system 2 includes the above collimator lens 2a to the cylindrical lens 2c.

Next, there is provided a one-dimensional microlens array 3 in which a plurality of microlenses are linearly arranged in the X-axis direction. Each of the plurality of micro lenses forms a small convex lens.

An objective optical system 4 is arranged between the one-dimensional microlens array 3 and the surface of the object 6 to be measured.
The objective optical system 4 includes a convex lens 4a, a telecentric stop 5, and a convex lens 4b from the one-dimensional microlens array 3 side. The convex lens 4a and the convex lens 4b constitute a bilateral telecentric lens system. An irradiation optical system includes the light source optical system 2, the microlens array 3, and the objective optical system 4.

The operation of the above-described irradiation optical system will be described with reference to FIG. The illumination light from the light source 1 is converted into a substantially parallel light beam by the collimator lens 2a. This illumination light is focused by the cylindrical lens 2b in the Y-axis direction and is incident on the cylindrical lens 2c, and is incident on the one-dimensional microlens array 3 as parallel rays focused on the Y-axis direction.
During this time, as shown in (b), when viewed from the Y direction,
From the collimator lens 2a to the one-dimensional micro-lens array 3, the parallel light remains as it is, and enters as a wide parallel light in the full linear direction of the one-dimensional micro-lens array 3.

The parallel light beams incident on the microlenses 3a, 3b,... Of the one-dimensional microlens array 3 are collected at the focal points of the microlenses 3a, 3b,. At the focal point, an image of the light source 1 is formed for each of the microlenses 3a, 3b,. Since the focal lengths of the micro lenses 3a, 3b,... Are made sufficiently smaller, for example, 1/100 or less than the focal length of the collimator lens 2a, the formed image of the light source 1 is Small enough to see.

A minute image of this light source (can be regarded as a point light source)
Is projected onto the surface of the DUT 6 by the both-side telecentric objective optical system 4. This projected image is shown in FIG.
As shown in (b), a row of dot-like light source images 7 arranged linearly in one row corresponding to each microlens of the one-dimensional microlens array 3 is obtained.

Referring to FIG. 2, an irradiation state on the surface of the DUT 6 will be described. FIG. 2A is a side view in the X direction from the convex lens 4b to the DUT 6 in FIG.
FIGS. 2B, 2C, and 2D are enlarged views of the vicinity of the imaging plane in FIG. 2A. First, when there is no flaw on the surface of the DUT 6, the surface is focused on as shown in FIG. On the other hand, when there is, for example, a concave portion (or a convex portion (not shown)) on the surface of the DUT 6, the irradiation light is, as shown in FIG. A focal line is connected to the (imaginary position), and diffused light is projected on the bottom of the concave portion (the vertex of the convex portion).

However, the measured object 6 and the irradiation optical systems 2, 3, and 4 are relatively moved in the direction normal to the surface of the measured object 6 (Z
Moving in the direction), it is possible to focus on the bottom of the concave portion on the surface of the DUT 6. At this time, if the relative amount of movement is recorded in association with the amount of light detected by a one-dimensional line sensor described later, it is possible to determine how much movement has been made in the Z direction to achieve focusing.

Next, referring to FIG. 3, the first imaging optical system 1 will be described.
A detection optical system including 0 and the one-dimensional line sensor 12 will be described. For convenience, FIG. 1 shows the irradiation optical system, and FIG. 3 shows the detection optical system separately. Actually, the measured object 6 and the linearly arranged point light source images 7 in both figures are common.

As shown in FIG. 1A, the irradiation light is irradiated in the normal direction of the surface of the object 6 to be measured, that is, in the Z-axis direction. However, the present invention is not limited to this, and both or one of the irradiation light and the detection light may be detected by using a line 7 of point light source images (focal points) linearly arranged as an axis. May be inclined with respect to the normal line. In other words, the optical axis of the irradiation optical system (in particular, the objective optical system 4 among them) and the optical axis of the detection optical system 10 may be inclined with respect to the normal. The inclination angle does not necessarily need to be equal between the irradiation optical system and the detection optical system,
For example, the optical axis of the irradiation optical system may be in the normal direction, and the optical axis of the detection optical system may be inclined. However, when both are inclined, it is preferable to incline at an equal angle. Further, it is most preferable that both the inclinations are zero, that is, irradiation is performed in the normal direction, and detection is performed in the normal direction. Making both the irradiation light and the detection light perpendicular to the surface of the DUT 6 can be realized in an embodiment described later in detail with reference to FIGS.

As shown in FIG. 3, a convex lens 10a is arranged above the surface of the DUT 6 so as to convert the light from the light source image array 7 into a parallel light beam. The convex lens 10b to be focused on is disposed. The convex lens 10a and the convex lens 10b constitute a double-sided telecentric optical system. Also convex lens 1
An aperture stop 11 is arranged between Oa and the convex lens 10b. Each pixel of the one-dimensional line sensor 12 is linearly arranged so as to correspond to each point light source image 7 on the surface of the DUT 6.

In such an optical system, the scattered light reflected from the point light source image 7 is formed on the one-dimensional line sensor 12 by the image forming optical system 10.

Next, a detection optical system constituting an optical surface inspection mechanism according to a second embodiment will be described with reference to FIG. In the figure, the convex lens 10 is positioned upward from the surface of the DUT 6.
3 is similar to the embodiment of FIG. 3 in that a double-sided telecentric optical system 10 as a first imaging optical system, which includes a and a convex lens 10b, is disposed. In the present embodiment, the bilateral telecentric optical system 10
A plurality of micro lenses 13a, 13a, 1
A second one-dimensional microlens array 13 in which 3b,... Are arranged is arranged, and a convex lens 14 as a second imaging optical system is further arranged ahead of the second one-dimensional microlens array 13. , One pinhole 15 is arranged at a position conjugate to the front focal point of the one-dimensional microlens array 13, and each microlens 13 a, 13 b of the second one-dimensional microlens array is related to the second imaging optical system 14. ,... Are provided with a one-dimensional line sensor 12 in which pixels are arranged corresponding to positions where the images are formed.

The operation of this embodiment will be described with reference to FIGS. The detection optical system in this figure is used in combination with the irradiation optical system described in FIG. In the figure, a point light source image 7 on a DUT 6 is a telecentric optical system 10.
Are formed into parallel light beams by the microlenses 13a, 13b,... Of the second microlens array 13, and are incident on the second imaging optical system.

The second imaging optical system 14 includes a pinhole 15
Is formed on the one-dimensional line sensor 12 disposed on the rear side, and the microlenses 13a, 13b
... images are formed. Therefore, as described with reference to FIG. 2B, when the illumination light is not focused on the surface of the DUT 6, the beam diameter increases on the pinhole 15, and the beam is blocked by the pinhole 15 and detected. Is small, and all the light passes through the pinhole when in focus, so that light and dark can be clearly detected in the case of focusing and out of focus.

As described above, the scratches and the irregularities in the reflectance on the object 6 are scattered by the scratches, and the reflectance fluctuates. It can be detected by output fluctuation. At this time, since the object 6 is irradiated with the line at the position of the point light source image 7, the luminance is high. For this reason, the sensitivity to scratches can be increased.

Referring to FIG. 5, an optical surface inspection mechanism according to a third embodiment will be described. In the figure, irradiation optical system 2,
The one-dimensional microlens array 3 and the objective optical system 4 are the same as those described in FIG. As viewed in the direction of the arrow X, between the cylindrical lens 2c and the one-dimensional microlens array 3, the light from the light source 1 is a parallel light beam. A beam splitter 16 is inserted between the two lenses so that the light from the point light source image 7 is reflected substantially at right angles when viewed in the direction of the arrow X. A second imaging optical system 14, a pinhole 15, and a one-dimensional line sensor 12 are arranged in a direction in which light from the point light source image 7 is reflected by the beam splitter 16.

In this embodiment, the objective optical system 4 of FIG. 1 is used in common with the double-sided telecentric optical system 10 of FIG. 4, and the one-dimensional microlens array 3 is shared with the second one-dimensional microlens array 13. Is equivalent to The operation and effect are the same as those described with reference to FIG. 4.
Can be illuminated from the vertical direction, the irradiated portion can be observed from the vertical direction, and the reflected light can be detected from the vertical direction. In particular, since the surface of the object 6 can be irradiated in the vertical direction and detected in the vertical direction, profile data (described later) on the surface can be easily obtained.

The fourth embodiment will be described with reference to FIG. In this embodiment, another one-dimensional microlens array 17 is provided in front of the beam splitter 16 by arranging a plurality of microlenses so as to correspond to each point light source image 7. And the one-dimensional micro lens array 17
A one-dimensional line sensor 12 on the image plane of each micro lens
Is provided.

A pinhole may be inserted between the one-dimensional microlens array 17 and the one-dimensional line sensor 12 so as to correspond to each microlens of the one-dimensional microlens array 17.

As the light source 1, a coherent light source such as a laser beam is preferably used. Z of light source image 7
This is because the position in the direction is uniquely determined. Further, a lens for converging a light beam of a predetermined light source and a pinhole (not shown) are arranged at the focal position of the lens, and the pinhole is
It may be.

In the embodiments shown in FIGS. 5 and 6, the beam splitter 16 is described as being inserted between the cylindrical lens 2c and the one-dimensional microlens array 3, but the beam splitter 16 is disposed at another position, for example, the one-dimensional microlens array. 3 and the objective optical system 4. In that case, the beam splitter 16 and the convex lens 14 will be described with reference to the example of FIG.
And another one-dimensional microlens array corresponding to the one-dimensional microlens array 3 may be inserted and arranged.

Next, an optical surface inspection apparatus according to a fifth embodiment will be described with reference to FIG. In this embodiment, the optical surface inspection mechanism includes the third optical mechanism described with reference to FIG.
Although the first embodiment is used, the first, second or fourth embodiment may of course be used.

In the figure, an optical surface inspection mechanism according to the third embodiment vertically emits a light beam for generating a point light source image 7 above a mounting table 30 on which an object to be measured 6 is mounted. 6 is arranged so as to irradiate the surface in the normal direction (Z direction). A moving mechanism 31 as first moving means for moving the mounting table 30 in a direction (Y direction) perpendicular to the arrangement direction (X direction) of the point light source images 7 is connected to the mounting table 30. Further, a moving mechanism 32 as a second moving means for moving the mounting table 30 in the normal direction of the surface of the device under test 6 is connected. Further, a third moving unit 33 for moving the mounting table 30 in the direction in which the light source images 7 arranged in a straight line are arranged (also the direction of the focal line of the cylindrical lens 2b) is connected to the mounting table 30.

The one-dimensional line sensor 12 is a memory that stores the light amount detection value from each detection element (pixel) of the one-dimensional line sensor 12 and the amount of movement by each of the moving mechanisms 31, 32, 33 in association with each other. 41 are connected.

In this optical surface inspection apparatus, the mounting table 30
Is moved in the Y direction perpendicular to the arrangement direction of the point light source images 7 linearly arranged by the moving mechanism 31,
Is set at a predetermined position in the X direction, which is the same as the arrangement direction, and the mounting table 30 is gradually moved in the Z direction by the moving mechanism 32 at that position, and the light amount detection value by the one-dimensional line sensor 12 for each Z direction position is calculated. It is stored in the memory 41. The memory 41 stores all the detected values for each Z-direction position, compares them later, and stores the Z-direction position giving the maximum light amount together with the maximum light amount value in the X-direction and the Y-direction. Alternatively, the light amount at each Z-direction position may be compared before and after moving in the Z direction while moving in the Z direction, and the Z-direction positions providing the larger light amount may be stored one after another, so that The position in the Z direction at which the maximum light amount is given may be stored.

After moving a predetermined amount in the Z direction, the moving mechanism 3
Step 1 moves the mounting table 30 in the Y direction. In addition, it is moved in the X direction. In this manner, the entire surface of the object 4 to be inspected to be inspected is covered. The above-described movement detection is preferably performed continuously as a series of operations.

In FIG. 7, the moving mechanism moves the mounting table 30. However, the moving table may be fixed and the optical surface inspection mechanism may be moved. The point is that the DUT 6 and the optical surface inspection mechanism may be relatively moved. Alternatively, both may be movable. For example, the mounting table is moved in the X and Y directions, and the optical inspection mechanism is moved in the Z direction.

As the moving mechanism 31, one of the mounting tables 30 is used.
The mounting table 30 may be rotated about a point, especially an axis in the Z direction passing through a point located on an extension of the point light source image 7 in the arrangement direction. In short, it is only necessary to scan in the direction perpendicular to X. This configuration is convenient for inspecting a circular object to be measured.

When the optical surface inspection mechanism is moved in the Z direction, the one-dimensional microlens array 3 and the objective optical system 4
May be integrally moved. For example, as can be seen in FIG. 1, when the one-dimensional microlens array 3 and the objective optical system 4 are moved integrally in the Z direction, a point light source image 7
Is changed in the Z direction with respect to the DUT 6.

When the moving mechanisms 31, 32, and 33 are means for moving the optical surface inspection mechanism, a holding mechanism for holding the optical surface inspection mechanism itself is provided, and the holding mechanism is moved. Is preferred.

According to the above-described optical surface inspection mechanism or optical surface inspection apparatus of the present invention, a one-dimensional line sensor is provided. The one-dimensional line sensor can remarkably increase the pixel density in the line direction and can perform high-speed processing.

As described above, in the optical surface inspection mechanism or the inspection apparatus according to the embodiment of the present invention, the corresponding one-dimensional line sensor 12
Light output is the largest. The relative position between the DUT 6 and the one-dimensional line sensor 12 is changed, and the detection element (pixel) output of each one-dimensional line sensor 12 is stored in the memory 41.
When the position information of the maximum output of the one-dimensional line sensor 12 is detected, the corresponding profile data of the DUT 6 is obtained according to the same principle as the confocal microscope.

In this way, a gentle curvature due to the undulation or the like of the measured object 6 can be obtained as profile data.

The amount of light emitted to the light source images 7 arranged in a straight line, and the one-dimensional line sensor 1 reflected from the light source images 7
Even if the surface state of the DUT 6 is uniform, the amount of light incident on the sample 2 may be non-uniform due to non-uniformity of the optical system. In particular, the light amount distribution lacks uniformity in a mountain shape or a valley shape along the direction in which the light source images 7 are arranged. In order to correct such non-uniformity, an inverse filter (not shown) may be inserted and arranged at any position of the irradiation optical system and the detection optical system. Alternatively or in combination,
The memory 41 may include a filter for correcting the non-uniformity (for example, electrically) as a signal, that is, a compensation function. In addition, as the one-dimensional line sensor, a CCD line sensor or a device in which a PD (photodiode) is arranged in one dimension can be considered.

Although the irradiation optical system and the detection optical system have been described above as refraction optical systems using lenses, they may be reflection optical systems.

The optical surface inspection mechanism according to the present invention is used for inspecting a mirror-finished object (Si substrate, hard disk, etc.) for scratches or the like, or for obtaining a pattern image of, for example, an electronic circuit or an IC circuit. Are suitable.

[0053]

As described above, the present invention includes the one-dimensional microlens array and the objective optical system for projecting the image of the light source formed by the one-dimensional microlens array onto the object. The light source images arranged linearly above are formed. The irradiation state of this light source image changes depending on the surface state of the measured object. In particular, depending on the depth of the surface irregularities,
The irradiation state changes significantly. In addition, since it is equipped with a one-dimensional line sensor, it can focus on a one-dimensional line sensor with a linear light beam containing information on the surface state of the object to be measured, thereby reducing the depth of surface irregularities at high speed. It is possible to provide an optical surface inspection mechanism and an optical surface inspection device capable of inspecting.

[Brief description of the drawings]

FIG. 1 is a schematic side view and a schematic front view illustrating an irradiation optical system of an optical surface inspection mechanism according to a first embodiment of the present invention.

FIG. 2 is a conceptual diagram illustrating an irradiation state of an object to be measured by the irradiation optical system of FIG.

FIG. 3 is a schematic side view and a schematic front view illustrating a detection optical system of the optical surface inspection mechanism according to the first embodiment of the present invention.

FIG. 4 is a schematic side view and a schematic front view illustrating a detection optical system of an optical surface inspection mechanism according to a second embodiment of the present invention.

FIG. 5 is a schematic side view of an optical surface inspection mechanism according to a third embodiment of the present invention.

FIG. 6 is a schematic side view of an optical surface inspection mechanism according to a fourth embodiment of the present invention.

FIG. 7 is a conceptual perspective view of an optical surface inspection device according to a fifth embodiment of the present invention.

FIG. 8 is a conceptual diagram illustrating an inspection state of a conventional optical surface inspection mechanism.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 light source 2 light source optical system 3 micro lens array 4 objective optical system 5 aperture 6 DUT 7 light source image 10 first imaging optical system 11 aperture stop 12 line sensor 13 second micro lens array 14 second imaging Optical system 15 Pinhole 16 Beam splitter 17 Microlens array 30 Mounting table 31, 32, 33 Moving mechanism 41 Memory

Claims (6)

[Claims] An optical surface inspection mechanism for optically inspecting a surface state of an object to be measured; a light source optical system for converting light from a light source into a substantially parallel light beam; and a light beam collimated by the light source optical system. A one-dimensional microlens array in which a plurality of microlenses are linearly arranged to condense light and form an image of the light source; and measuring the image of the light source formed by the one-dimensional microlens array on the measured object. An objective optical system for projecting the object;
A first imaging optical system that forms an image of the light beam reflected from the surface of the object to be measured onto which the light beam has been projected; and an image forming surface of the first image forming optical system or in the vicinity of the image forming surface. A one-dimensional line sensor in which a plurality of pixels are linearly arranged corresponding to each microlens; an optical surface inspection mechanism; 2. An optical surface inspection mechanism for optically inspecting a surface state of an object to be measured; a light source optical system for converting light from a light source into a substantially parallel light beam; and a light beam made parallel by the light source optical system. A first one-dimensional microlens array in which a plurality of microlenses are linearly arranged to converge light and form an image of the light source; and a light source formed by the first one-dimensional microlens array. An objective optical system for projecting the image of the object on the object to be measured; a first image forming optical system for converging a light beam reflected from the surface of the object to which the light beam is projected; and the first image forming optical system A second one-dimensional microlens array in which a plurality of microlenses are linearly arranged to convert light from an object to be measured focused by the system into a substantially parallel light beam;
A second imaging optical system for forming an image of the one-dimensional microlens array; and the second imaging optical system with respect to the second imaging optical system.
A one-dimensional line sensor in which a plurality of pixels are linearly arranged corresponding to each microlens of the one-dimensional microlens array; an optical surface inspection mechanism. 3. An optical surface inspection mechanism for optically inspecting a surface state of an object to be measured; a light source optical system for converting light from a light source into a substantially parallel light beam; and a light beam made parallel by the light source optical system. A one-dimensional microlens array in which a plurality of microlenses are linearly arranged to condense light and form an image of the light source; and measuring the image of the light source formed by the one-dimensional microlens array on the measured object. An objective optical system for projecting the object;
A beam splitter disposed between the light source optical system and the one-dimensional microlens array; reflected light from the device under test via the one-dimensional microlens array;
Arranged in a direction reflected by the beam splitter,
An imaging optical system that forms an image of the one-dimensional microlens array; a primary element in which a plurality of pixels are linearly arranged in correspondence with each microlens of the one-dimensional microlens array with respect to the imaging optical system; An original line sensor; an optical surface inspection mechanism. 4. The one-dimensional line sensor according to claim 1, wherein the imaging optical system is a third one-dimensional microlens array in which microlenses are arranged corresponding to each microlens of the one-dimensional microlens array. 4. The optical surface inspection mechanism according to claim 3, wherein the optical surface inspection mechanism is arranged at a conjugate position with respect to the objective optical system and the one-dimensional microlens array. 5. A light source optical system comprising: a collimator lens for converting light from a light source into a substantially parallel light beam; and applying astigmatism to the light beam substantially parallelized by the collimator lens to form a focal line in a predetermined direction. A first cylindrical lens to be focused;
5. A second cylindrical lens having a refractive power in a direction perpendicular to the predetermined direction. 6.
The optical surface inspection mechanism according to claim 1. 6. The optical surface inspection mechanism according to claim 1, wherein the object to be measured and the optical surface inspection mechanism are parallel to the surface and the object to be measured. First moving means for relatively moving in a direction perpendicular to the direction in which the plurality of light source images projected on the object are arranged; and moving the object to be measured and the focal line in a direction normal to the surface. And a means for recording a relative movement position of the surface by the second movement means in a normal direction and an output of the one-dimensional line sensor corresponding to the relative movement position. An optical surface inspection device.