JP2001079748A - Roller for working of wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent derailment of a wire from a partition groove by securing thickness of a partition wall even in the case of reducing a forming pitch of a wire groove. SOLUTION: This wire saw forms a plural number of wire grooves on an outer peripheral surface of a roller 12 for working. An inclined groove bottom surface 15a to make contact with and support a wire 16 on an outer peripheral lower part is formed on each of the wire grooves 15. Partition wall 18 are projectively provided between each of the wire grooves 15, inclined groove side surfaces 15b are formed on both sides of those partition walls 18 at a smaller opening angle than an inclined groove bottom surface 15a facing against outer peripheral both side parts of the wire 16 through a clearance.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw for cutting or grooving a work made of a hard and brittle material such as a semiconductor material, a magnetic material, and a ceramic using a wire. The present invention relates to an application roller.

[0002]

2. Description of the Related Art As a conventional processing roller for a wire saw of this type, for example, a roller as shown in FIG. 4 is known. That is, a plurality of wire grooves 22 are formed on the outer peripheral surface of the processing roller 21, and the wires 23 are mounted in the wire grooves 22. Further, in the processing roller 21, a portion where the wire groove 22 is formed is formed of a synthetic resin such as urethane.

In a wire saw provided with this type of processing roller, when cutting a thin workpiece, as shown in FIG. 5, the formation pitch P2 of the wire groove 22 on the processing roller 21 is reduced. It is necessary to make the arrangement pitch of the wires 23 narrower than the formation pitch P1 in FIG. However, when the pitch at which the wire grooves 22 are formed is reduced in this way, the thickness of the partition walls separating the wire grooves 22 is reduced, and the rigidity of the partition walls is reduced, so that the partition walls are easily bent. Therefore, during processing, the wire 23
Swing and vibration are allowed, the cut surface of the work becomes wavy, and there is a problem that the processing accuracy for the work is reduced.

In order to cope with such a problem, for example, as shown in Japanese Utility Model Registration No. 3044020 and Japanese Utility Model Registration No. 3045267, a portion in which a wire groove is formed is formed of ceramic to increase the rigidity of the wire groove. Processing rollers with increased height have been proposed in the past.
However, when the portion where the wire groove is formed is formed of ceramic as described above, a baking process or the like is required, so that the manufacturing is complicated, and the high hardness makes it difficult to process the wire groove on the outer peripheral surface of the processing roller. It is. For this reason,
There is a problem that it is difficult to obtain the processing accuracy of the processing roller itself and the processing cost increases.

[0005] In particular, utility model registration No. 3044020
In the configuration described in FIG. 6 of the publication, as shown in FIG. 6 of this application, the wire groove 22 is formed of a slanted groove bottom surface 22a and a slanted groove side surface 22b having different opening angles. And the wire groove 2
2 while being in contact with the inclined groove bottom surface 22a.
3 is an inclined groove side surface 22b of the wire groove 22 at two points.
The wire 23 contacts the wire groove 22 at a total of four points.

Therefore, in processing the wire groove 22, it is necessary to control the dimensions so that the inner surface of the wire groove comes into contact with the wire 23 at four points, and extremely high precision is required, and the processing is extremely troublesome. .

In order to cope with such a problem and to cope with a narrow arrangement pitch of wires, for example, a configuration as shown in FIG. 7 has been proposed. In this conventional configuration, the wire groove 22 is simply formed by only the inclined groove bottom surface 22a, the face shape of the processing roller is formed in a simple saw blade shape, and the wire 23 is formed by the inclined groove bottom surface 22 at two points on the lower outer periphery.
a.

[0008]

However, in the conventional processing roller shown in FIG. 7, since the top of the partition wall between the wire grooves 22 has a low groove crest, the wire 23 floats in the wire groove 22. When the wire 23 is
There is a problem that it is easy to derail from the.

The present invention has been made by paying attention to such problems existing in the prior art. Its main purpose is to secure the rigidity of the partition walls between the wire grooves even when the pitch for forming the wire grooves is reduced in order to cut a thin workpiece. An object of the present invention is to provide a wire saw processing roller capable of preventing the processing accuracy from lowering.

A further object of the present invention is to provide a wire saw processing roller capable of preventing the wire from floating and derailing in the wire groove. Another object of the present invention is to form a wire groove on the outer peripheral surface, thereby ensuring the processing accuracy of the processing roller itself and reducing the processing cost. To provide a roller.

[0011]

In order to achieve the above object, according to the first aspect of the present invention, each of the wire grooves is formed with a tapered cross-sectional bottom surface having a tapered cross section for contacting and supporting the wire at a lower portion of the outer periphery. A partition wall is protruded between the wire grooves, and inclined groove side surfaces are formed on both sides of the partition wall at an opening angle smaller than the inclined groove bottom surface opposed to both sides of the outer periphery of the wire with a gap therebetween. Things.

According to a second aspect of the present invention, in the wire saw processing roller according to the first aspect, the outer peripheral portion where the wire groove is formed is formed of a synthetic resin.

According to a third aspect of the present invention, in the wire saw processing roller according to the first or second aspect, the partition wall has a height such that a top portion thereof is located outside of an upper peripheral portion of the wire. It is formed.

According to a fourth aspect of the present invention, in the wire saw processing roller according to any one of the first to third aspects, the opening angle of the bottom surface of the inclined groove is 90 to 100.
It is set every time.

According to a fifth aspect of the present invention, in the roller for processing a wire saw according to any one of the first to fourth aspects, an opening angle of the side surface of the inclined groove is set to 50 to 90 degrees. .

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. As shown in FIGS. 1 and 2, a wire saw 11 includes a plurality of processing rollers 12.
Are arranged. Each processing roller 12 is composed of a core material 13 made of a metal material and a sleeve 14 made of a synthetic resin material such as urethane formed on the outer periphery thereof. A plurality of wire grooves 15 are formed on the outer peripheral surface of the sleeve 14. Have been. A wire 16 is mounted between the wire grooves 15 of each processing roller 12 while maintaining a predetermined tension.
With the rotation of 2, the vehicle is continuously driven in one direction, or is moved stepwise in one direction with reciprocation. Then, while a slurry containing abrasive grains is supplied onto the wire, a work 17 made of a hard and brittle material is pressed, and processing such as cutting and grooving is performed.

As shown in FIG. 3, each of the processing rollers 1
The second wire groove 15 has an inclined groove bottom surface 15a having a tapered cross section that opens at a predetermined opening angle R1. A partition wall 18 protrudes between the wire grooves 15, and the partition wall 1
On both sides of 8, the inclined groove side surface 15b of the wire groove 15 is formed with an opening angle R2 smaller than the inclined groove bottom surface 15a.

With the wires 16 inserted into the respective wire grooves 15, the wires 16 are supported in contact with the inclined groove bottom surfaces 15a at the lower part of the outer periphery. Further, the wire 16 is provided on the inclined groove side surface 1 on both sides of the outer periphery.
5b, without being in contact with the inclined groove side surface 15b. Further, the partition wall 18 is formed at a height such that the top portion 18a is located outside the upper peripheral portion of the wire 16.

In this embodiment, the opening angle R1 of the inclined groove bottom surface 15a is set to 90 to 100 degrees. Also, the opening angle R2 of the inclined groove side surface 15b is 5
It is set to 0 to 90 degrees. Further, the formation pitch P of the wire grooves 15 is set to 0.585 mm.

The effects that can be expected from the above embodiment will be described below. In the processing roller for the wire saw of this embodiment, a plurality of wire grooves 15 are formed on the outer peripheral surface. Each wire groove 15 is formed with an inclined groove bottom surface 15a having a tapered cross section for contacting and supporting the wire 16 at the lower part of the outer periphery. Partition walls 18 protrude between the wire grooves 15, and inclined groove side surfaces 15 b are provided on both sides of the partition walls 18, and inclined groove bottom surfaces 15 opposed to both outer peripheral sides of the wire 16 with a gap therebetween.
The opening angle is smaller than a.

Therefore, the rigidity can be increased by increasing the thickness of the partition wall 18. By the way, when the inclined groove side surface 15b is not formed on the inner surface of the wire groove but is formed only by the inclined groove bottom surface 15a, the thickness of the partition wall 18 becomes small. Therefore, in this embodiment, even when the pitch at which the wire grooves 15 are formed is reduced in order to cut a thin workpiece, the deformation of the partition wall 18 can be prevented, and the cut surface of the work is in a wavy state. And the processing accuracy can be prevented from lowering. Further, since the partition wall 18 is protruded between the wire grooves 15, even if the wire 16 floats in the wire groove 15, the wire groove 15
Can be prevented from derailing. further,
It is sufficient to process the wire groove 15 so that the wire 16 contacts the inclined groove bottom surface 15a of the wire groove 15 only at the lower part of the outer periphery. Easy.

In the processing roller for the wire saw of this embodiment, the outer peripheral portion of the roller in which the wire groove 15 is formed is made of synthetic resin. For this reason, the wire groove 15 can be easily formed on the outer peripheral surface of the roller, and the processing accuracy of the processing roller 12 itself can be secured.

In the wire saw processing roller according to the present embodiment, the partition wall 18 is formed at a height such that the top 18 a is located outside the upper outer periphery of the wire 16. For this reason, the possibility that the wire 16 is derailed from the wire groove 15 can be more reliably prevented.

In the processing roller for the wire saw of this embodiment, the opening angle R1 of the inclined groove bottom surface 15a is 9
It is set to 0-100 degrees. Therefore, the wire 16
Can be stably supported on the inclined groove bottom surface 15a in a stable state.

In the processing roller of the wire saw of this embodiment, the opening angle R2 of the inclined groove side surface 15b is 5
It is set to 0 to 90 degrees. Therefore, a large thickness of the partition wall 18 can be ensured, and the wire 1
6 can be held in a non-contact state with the inclined groove side surface 15b.

[0026]

The present invention is configured as described above, and has the following effects. According to the first aspect of the present invention, when the inclined groove side surface of the partition wall is formed to have an opening angle smaller than the inclined groove bottom surface, the partition wall can be thickened, and the formation pitch of the wire grooves is reduced. However, the rigidity of the partition wall can be ensured, and a reduction in processing accuracy can be prevented. Further, even if the wire floats in the wire groove, it is possible to prevent the risk of derailment from the wire groove. Furthermore, the wire and the wire groove need only be in contact at two points, and extremely high precision is not required in processing the wire groove.

According to the second aspect of the present invention, since the outer peripheral portion in which the wire groove is formed is made of synthetic resin,
The wire groove can be easily formed on the outer peripheral surface of the roller, and the processing accuracy of the processing roller itself can be secured.

According to the third aspect of the present invention, since the top of the partition wall is higher than the outer circumferential top of the wire, the risk of the wire being derailed from the wire groove by the partition wall can be more reliably prevented. .

According to the fourth aspect of the present invention, the opening angle of the bottom surface of the inclined groove is set to 90 to 100 degrees.
The lower part of the outer periphery of the wire can be stably supported on the inclined groove bottom surface in a stable state.

According to the fifth aspect of the present invention, the opening angle of the side surface of the inclined groove is set to 50 to 90 degrees, so that a large thickness of the partition wall can be secured, and the wire is connected to the side surface of the inclined groove. In a non-contact state.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a wire saw embodying the present invention.

FIG. 2 is an enlarged partial sectional view showing a processing roller.

FIG. 3 is an enlarged cross-sectional view of a main part showing a wire groove structure of a processing roller.

FIG. 4 is a sectional view of a main part showing a conventional example of a wire groove structure of a processing roller.

FIG. 5 is a sectional view of a main part showing another conventional example of a wire groove structure.

FIG. 6 is a cross-sectional view of a main part showing another conventional example of a wire groove structure.

FIG. 7 is a sectional view of an essential part showing another conventional example of a wire groove structure.

[Explanation of symbols]

11: wire saw, 12: processing roller, 14: sleeve, 15: wire groove, 15a: inclined groove bottom face, 15b: inclined groove side face, 16: wire, 17: work, 18: partition wall, 18a: top, R1, R2: opening angle.

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Claims (5)

[Claims] 1. A roller for processing a wire saw having a plurality of wire grooves formed on an outer peripheral surface, wherein each of the wire grooves has an inclined groove bottom surface having a tapered cross section for contacting and supporting a wire at a lower part of the outer periphery. Partitioning walls are protruded between the wire grooves, and inclined side surfaces of the dividing walls are formed on both sides of the dividing wall at an opening angle smaller than the inclined groove bottom surface opposed to both sides of the outer periphery of the wire with a gap therebetween. Processing roller. 2. The wire saw processing roller according to claim 1, wherein an outer peripheral portion in which the wire groove is formed is formed of a synthetic resin. 3. The wire saw processing roller according to claim 1, wherein the partition wall is formed at a height such that a top portion thereof is located outside of an upper peripheral portion of the wire. 4. An opening angle of the bottom of the inclined groove is set to 90-10.
The wire saw processing roller according to any one of claims 1 to 3, wherein the roller is set at 0 degree. 5. An opening angle of a side surface of the inclined groove is set to 50 to 90.
The roller for processing a wire saw according to claim 1, wherein the roller is set at a predetermined temperature.