JP2001074381A - Thin flat type heat pipe and container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow a gas to be scarcely retained therein and to simply completely seal and cut so as to efficiently cool a semiconductor chip or the like by providing a step from an outer periphery at a center of a thin copper plate to form a recess, and providing a passage as a sealing part communicating with an exterior at a corner of the periphery. SOLUTION: A rectangular copper plate is pressed to form a recess shape at a center 2 on its rectangular outer periphery 1. However, a corner 3 of a part of the periphery is formed in a shape disposed in the same plane as the center. Another normal copper flat plate is combined and laminated on the periphery 1 by using a brazing material, thereby obtaining a container having an opening at the corner 3. A liquid is poured from the corner 3, the container is heated, and a gas is displaced by a boiling method. A tip of the corner 3 is obliquely caulked, and then welded to obtain a flat heat pipe. Alternatively, the tip of the corner 3 is contained in a vacuum evacuating system having a slightly soft packing in its opening, and may be made to the heat pipe by injecting a vapor and vacuum evacuating.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat heat pipe and a container used for cooling electronic equipment.

[0002]

2. Description of the Related Art A heat pipe is one of means for efficiently radiating heat generated from a semiconductor chip of an electronic device which is increasing year by year. In particular, among heat pipes, a flat heat pipe has been attracting attention in terms of securing a heat receiving surface with respect to a chip surface and diffusing heat.

[0003] The heat pipe is formed of a hollow container (container), and the inside of the container is evacuated to a vacuum state, in which an appropriate amount of liquid is sealed as a working fluid. When heat is received from a location outside the container, the liquid present in the portion where the heat was received evaporates,
There, latent heat of evaporation is absorbed. The vapor fills the container due to the pressure difference and condenses on the inner surface of the container other than at the heat receiving section, where the latent heat of evaporation is released. The condensed liquid returns to the evaporating section by a liquid recirculation mechanism called a wick made of mesh, wire, and the like provided in advance on the inner tube wall, and evaporates again in the heat receiving section. The above-described circulation is repeated, and as a result, there is an effect that heat is diffused to the entire container.

A heat pipe is completed in the final step of injecting a working fluid into a container and removing and sealing a gas other than the working fluid, but a method of boiling the working fluid to remove the gas may be adopted. , Even if you use a vacuum pump,
The heat pipe container has a sealing portion, which needs to be opened to the outside until the final step. A general heat pipe has a pipe shape as its name implies, and in this case, one end of the pipe becomes a sealing portion. It is common to caulk this part after vacuum injection or injection degassing, and then weld and seal.

However, if the heat pipe is not a pipe but a flat one, the above-described method cannot be applied. FIG. 11 is a diagram showing a conventional sealing portion in a flat heat pipe. As shown in FIG.
4. The lower plate 105 and the side plate 106 are combined by brazing to form a hexahedron. At this time, a thin tube 107 is inserted into the side plate member 106 to form a sealing portion.

Next, FIG. 9 shows a conventional flat heat pipe. The flat heat pipe shown in FIG. 9 includes a container 101 formed by extrusion molding made of aluminum. However, although the container shown in FIG. 9 can be formed from aluminum, it is difficult to form the above-described container from copper. On the other hand, water is an excellent working fluid. However, a container formed of aluminum has a problem that water cannot be used as an excellent working fluid.

To solve the above-mentioned problem, FIG.
As shown in FIG. 1, a flat heat pipe in which a mesh is inserted into a hollow portion of a container composed of an upper plate and a lower plate is used. The container shown in FIG. 10 can be molded from copper, which can use water as an excellent working fluid. However, the flat heat pipe shown in FIG. 10 has a problem that it is difficult to stably insert the mesh into the container, and the characteristics of the heat pipe vary.

Further, the conventional mesh, braid, and wire have the following problems. That is, as shown in FIG. 6, in the wire, the reflux direction can be expected to be excellent because the geometrically acute portion in the cross section thereof continues uniformly in the reflux direction. However, even if it is possible to store the wire in the heat pipe container, it is extremely difficult to fix it securely to the wall, and it is useless to use the wick when it is suspended in the air. Further, in a flat heat pipe, the liquid reflux direction is not one direction, and depending on how the heat pipe is placed, it is required that the liquid reflux in any direction in a plane.

Furthermore, in the case of a mesh or a braid, the direction of recirculation is not as uniform as a wire, and it always has components that intersect the axial direction, which is rather an obstacle to axial recirculation.

[0010]

The conventional sealing portion has the following problems. That is, as described above, in the technical field of cooling a semiconductor chip or the like of an electronic device, there is a tendency to make the entire device compact and increase the mounting density, and the flat heat pipe is also greatly restricted in the thickness direction. .
For example, in the order of 1 mm in height of the entire heat pipe and 0.2 mm in wall thickness, as shown in FIG. 11, the thin tube 107 inserted into the side plate has an outer diameter of 0.6 mmφ and an inner diameter of 0.4 mmφ. . Therefore, liquid injection cannot be performed with currently marketed injection needles. Further, since the thin tube is inserted into the side plate, the thin tube protrudes from the container to the outside. Furthermore, since the thin tube is located on the side of the container,
When degassing, there is a problem that gas remains in the corners.

Further, as described above, the conventional flat heat pipe using a wick has the following problems. That is, as described above, in the technical field of cooling a semiconductor chip or the like of an electronic device, there is a tendency that the entire device is compact and the mounting density is increased, and the heat generation density is dramatically increased. However, conventional wicks are not sufficient.

Accordingly, an object of the present invention is to provide a thin flat heat pipe and a container which can efficiently cool a semiconductor chip or the like of an electronic device whose heat generation density is dramatically increased and which can be more easily sealed off. Is to provide.

[0013]

Means for Solving the Problems In order to solve the above-mentioned conventional problems, the inventors have made intensive studies. As a result, the following findings were obtained. In other words, in the center of the thin copper plate, a recess is formed by providing a step with the outer peripheral portion, and a passage as a sealing portion that communicates with the outside at the corner of the outer peripheral portion is provided, simply by caulking that portion It has been found that gas can hardly remain in the inside when gas is released because sealing can be performed and formed at the corners.

Further, in the wick, the important thing is that
It has sufficient capillary force. Capillary force is usually obtained by arranging a mesh or the like along the tube wall, but the structure in which a geometrically acute portion in the cross section continues uniformly in the reflux direction is most ideal. That is,
When one wire is placed along the wall surface, the cross-sectional shape is as shown in FIG. In the case shown in FIG. 6, it is the point A that contributes to the reflux. Even if it is a mesh or a braid, it is a collection of wires microscopically, so if it can be fixed to the heat pipe wall, A
Part, which is effective for liquid reflux.

Therefore, by providing a group of projections on one of the wall surfaces forming the container and fixing the mesh or the like to the inner wall of the container by the group of projections, a space for the steam flow path can be secured, and the mesh is closely attached to the inner wall of the container. Therefore, it was found that the angle between the inner wall surface of the container and the wire having a circular cross section as a mesh constituent was an acute angle, and that there was an excellent liquid reflux effect.

Further, the mesh formed by combining the wires in a grid pattern in the X direction and the Y direction is brought into close contact with the inner wall of the container, so that the angle between the inner wall surface of the container and the wire having a circular cross section of the mesh component is an acute angle. Yes, it was found that there was an excellent reflux effect of the liquid.

The present invention has been made based on the above findings and the like. A first aspect of the thin flat heat pipe of the present invention is a thin flat heat pipe comprising the following members. (1) A metal wire rod arranged at a predetermined interval on the same plane and parallel to each other, and a metal wire rod arranged at a predetermined interval on the same plane and intersecting with the wire rod. And (2) a concave portion is formed at a center portion, which is formed to be in contact with the wire group and to accommodate the wire group, and a hollow portion is formed at a corner thereof. An upper plate made of a thin copper plate and a lower plate made of a flat copper thin plate having a passage leading to the outside from the recess are formed, and the outer peripheral portion is joined. (3) a container having a hollow portion formed therein;
Water as a working fluid contained in the container.

The second aspect of the thin flat heat pipe of the present invention is as follows.
Is a thin flat type heat pipe comprising the following members. (1) An upper plate made of a thin copper plate and a lower plate made of a flat copper thin plate in which a depression is formed in the center and a passage communicating with the outside from the depression is formed in the corner. And, the outer peripheral portion is joined, the passage has been sealed off, and a container having a hermetically decompressed cavity,
(2) a wick that is housed in the container and that is made of a flat material and a wire wound around the flat material;
(3) A working fluid contained in the container.

The third aspect of the thin flat heat pipe of the present invention is as follows.
Is a thin flat type heat pipe comprising the following members. (1) An upper plate made of a copper thin plate and a lower plate made of a copper thin plate in which a depression is formed at the center and a passage communicating with the outside from the depression is formed at a corner thereof, A container having a plurality of projections provided on one surface of the upper plate material or the lower plate material and having a hollow portion in which an outer peripheral portion is joined, the passage is completely closed, and the pressure is hermetically closed; A wick made of a flat plate material and a wire wound around the flat plate material, which is pressed by the plurality of protrusions and fixed to the inner walls of the container facing each other, and (3) stored in the container. Working fluid.

The fourth aspect of the thin flat heat pipe of the present invention is as follows.
Is a thin flat type heat pipe comprising the following members. (1) An upper plate made of a copper thin plate and a lower plate made of a copper thin plate in which a depression is formed at the center and a passage communicating with the outside from the depression is formed at a corner thereof, A container having an outer peripheral portion joined thereto, the passage closed and having a hermetically sealed and depressurized cavity portion; and (2) two opposing sheets which are accommodated in the container and at least one of which is provided with a plurality of projections And a wick made of a wire wound around the perforated plate unit, and (3) a working fluid contained in the container. .

The fifth aspect of the thin flat heat pipe of the present invention
Is characterized in that a wire is further disposed so as to intersect with the wires disposed on both outer surfaces of the perforated plate unit of the wick.

The sixth aspect of the thin flat heat pipe of the present invention
Is characterized in that the upper plate is integrally formed by press working.

The first aspect of the flat heat pipe container according to the present invention is a flat heat pipe container comprising a flat plate having a hollow portion at the center and a passage communicating with the outside at one corner of the outer peripheral portion and another flat plate. Combination, the outer peripheral part is bonded using a brazing material,
This is a flat heat pipe container that forms a closed space at the center by closing the passage.

A second aspect of the flat heat pipe container according to the present invention is characterized in that the flat plate and the other flat plate have corresponding depressions and passages in the central portion and the outer peripheral portion. It is assumed that.

[0025] Other aspects of the thin flat heat pipe of the present invention include the following: between the wire and the upper plate or the lower plate, between the wire and the another wire, between the wire group and the upper plate or A mesh is further provided between the lower plate and the lower plate.

According to another aspect of the thin flat heat pipe of the present invention, the flat material of the wick has a round or square or more polygonal shape having a notch or a support provided at an end thereof, The wire is wound around the notch or the support as a turning point, and is arranged on one surface of the flat plate.

In another aspect of the thin flat heat pipe of the present invention, the flat material of the wick has a polygonal shape of a round or a quadrangle or more, and the wire is disposed on both sides of the flat material. It is characterized by having.

In another aspect of the thin flat heat pipe of the present invention, the flat material of the wick is formed of a perforated plate having a plurality of perforations.

In another aspect of the thin flat heat pipe of the present invention, a wire is further arranged so as to intersect with the wire arranged on the one surface or both surfaces of the flat material of the wick. It is characterized by the following.

In another aspect of the thin flat heat pipe of the present invention, the perforated plate unit of the wick has a polygonal shape of a round or a quadrangle or more, and the wire is formed on both outer surfaces of the perforated plate unit. Is characterized in that it is arranged.

One embodiment of the wick of the present invention is a wick composed of a flat plate and a wire wound around the flat plate, which is housed in a container having a closed and reduced pressure cavity of a thin flat heat pipe. .

In another aspect of the wick according to the present invention, the flat plate has two opposing perforated plates provided with a plurality of projections on at least one side thereof so as to have a gap corresponding to the height of the projections. It comprises a perforated plate unit formed in combination.

In another aspect of the wick according to the present invention, the flat material of the wick has a polygonal shape of a circle or a rectangle having a notch or a support provided at an end thereof, and the wire is formed of the polygonal shape. It is characterized by being wound around a notch or a support as a turning point and arranged on one surface of the flat plate.

In another aspect of the wick according to the present invention, the flat material of the wick is formed of a perforated plate having a plurality of perforations. Another aspect of the wick according to the present invention is characterized in that a wire is further arranged so as to intersect with the wires arranged on both outer surfaces of the perforated plate unit.

[0035]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described with reference to the drawings. One of the flat heat pipe containers of the present invention
One mode is to combine a flat plate having a recessed portion in the center, a passage having a passage communicating with the outside in a part of the outer peripheral portion, and another flat plate, and bonding the outer peripheral portion using a brazing material to form the passage. This is a flat heat pipe container that forms a closed space at the center by sealing off.

Hereinafter, a more detailed description will be given with reference to the drawings. FIG. 1 is a schematic perspective view showing a sealing portion of the container of the present invention. FIG. 2 is a plan view of a sealing portion of the container of FIG. As shown in FIG. 1, a rectangular copper plate is pressed to form a rectangular outer peripheral portion 1 in which a central portion 2 is depressed. However, the corner 3 which is a part of the outer periphery is shaped to be on the same plane as the center. When a brazing material is used on the outer peripheral portion 1 and combined with another ordinary copper flat plate and bonded, a container having an opening at the corner 3 can be obtained.

The liquid is injected from the corner 3, the container is heated, and the gas is expelled by the boiling method. The corners of the corners 3 are caulked diagonally and then welded to obtain a flat heat pipe. Alternatively, the corners of the corners 3 may be placed in a vacuuming system provided with a soft packing at the opening, and formed into a heat pipe by steam injection and vacuuming. With such a method, even if the shape of the flat heat pipe is on the order of, for example, an outer thickness of 1 mm, a thickness of a flat plate of 0.2 mm, and a height of the internal space of 0.6 mm, the heat pipe can be sufficiently processed. is there.

In addition, protrusions having a height corresponding to the gap of the internal space are provided at predetermined intervals on one of the flat plates in advance.
A brazing material is also placed at the apex, and combined with the above-described method to form a heat pipe in the same manner. By such a method, a thin structure can be easily reinforced. For example, even when an internal pressure of 1 kg / cm ² is assumed, a problematic distortion does not occur if the protrusions are arranged in a square shape at a pitch of 10 mm.

The container material shown in FIG. 1 is most effective when pressed from a copper plate. Originally, in terms of workability, aluminum is superior to copper, but is inferior in characteristics because water cannot be used as a working fluid. Therefore, it can be said that the present invention, which can be formed of a copper material, has a remarkable effect on characteristics.

Further, one aspect of the thin flat heat pipe of the present invention is as follows: (1) A metal wire rod arranged in parallel with a predetermined interval on the same plane and intersects with the wire rod. (2) contacting the wire group and accommodating the wire group, the wire group consisting of another wire rod arranged in parallel with each other at a predetermined interval on the same plane and arranged in the same manner. The upper plate made of a copper thin plate, in which a depression is formed in the center and a passage communicating with the outside from the depression at the corner, and the lower plate made of a flat copper thin plate, Formed from the outer periphery,
(3) A thin flat heat pipe made of water as a working fluid housed in the container, the container having a cavity part in which the passage is sealed and depressurized.

Further, the thin flat heat pipe according to the present invention comprises: (1) a thin copper plate having a depression formed in the center and a passage communicating from the depression to the outside at the corner; A container formed of a plate member and a lower plate member made of a flat copper thin plate, having an outer peripheral portion joined, the passage closed off, and a hermetically sealed depressurized hollow portion; and (2) a container accommodated in the container. A wick composed of a flat material and a wire wound on the flat material,
(3) A thin flat heat pipe made of a working fluid contained in the container may be used.

Further, the thin flat heat pipe according to the present invention comprises: (1) a copper thin plate having a depression formed in the center and a passage communicating with the outside from the depression at the corner. A plate material, and a lower plate material made of a copper thin plate, a plurality of protrusions are provided on one surface of the upper plate material or the lower plate material, an outer peripheral portion is joined, the passage is sealed off, and the pressure is reduced. A container having a hollow portion formed therein; and (2) a flat plate material housed in the container, pressed by the plurality of projections, and fixed to the opposite inner wall of the container, and wound around the flat plate material. A wick made of a wire and (3) a thin flat heat pipe made of a working fluid contained in the container may be used.

Further, the thin flat heat pipe according to the present invention comprises: (1) a copper thin plate having a depression formed in the center and a passage communicating with the outside from the depression at the corner. Plate material, and a container formed by a lower plate material made of a copper thin plate, having an outer peripheral portion joined, the passage closed off, and a container having a hermetically sealed and depressurized cavity portion,
(2) A perforated plate unit formed by combining two opposing perforated plates provided with a plurality of protrusions on at least one of them and accommodated in the container so as to have a gap corresponding to the height of the protrusions. And a wick made of a wire wound around the perforated plate unit, and (3) a thin flat heat pipe made of a working fluid contained in the container.

In the above-described embodiment of the thin flat heat pipe of the present invention, the passage formed at the corner can be sealed simply by caulking the portion, and no protrusion is formed. Since the gasket is formed in the portion, it is difficult for gas to remain inside when gas is released. Furthermore, the thin flat heat pipe of the present invention intersects with the wires disposed on both outer surfaces of the perforated plate unit of the wick. In addition, a wire may be further arranged to perform the operation.

Further, in the thin flat heat pipe of the present invention, the upper plate may be formed integrally by press working. Further, the thin flat heat pipe according to the present invention may be configured such that, between the wire and the upper plate or the lower plate, between the wire and the another wire, the wire group and the upper plate or the lower plate. A mesh may be further provided between them.

The above-described embodiment of the thin flat heat pipe of the present invention will be described in more detail below.

According to the container of the present invention described above, in the conventional container shown in FIG. 9, while the partition member stands vertically, the arc of the round bar 2 and the flat plates 1, 3
Since the angle formed by the round bar 2 is an acute angle, the round bar 2 itself functions as a wick, which is advantageous in that the number of parts is reduced. Further, in the case of the conventional extruded material shown in FIG. 9, the heat transfer in the X direction (the direction crossing the partition member of the container) is smaller than the heat transfer in the Y direction (the direction along the partition member of the container). Inferior. On the other hand, in the above-described container of the present invention, for example, as shown in FIG. 2B, by intermittently disposing the bars 2, the heat transfer characteristics in the X direction as well as the Y direction are improved. Can be. In that case, as shown in FIG. 4, the container 8 can be provided with required strength by sandwiching the mesh 8 between the plate 7 and the bar 9 on one side.

As shown in FIG. 3, two groups of bars 5 arranged in parallel are arranged so as to cross each other, and in a container of a thin flat heat pipe formed by being sandwiched between plates 4 and 6, the bars Space is connected in both the X and Y directions without intermittent placement. Further, as described above, in the structure shown in FIG. 4 in which the mesh is interposed between the bar group 9 and the flat plate 7 arranged in parallel, the bar 9 functions as a part of the wick, and at the same time, the main The mesh 8 which is a wick is fixed to the surface of the one plate member 7 and serves to secure a steam flow path.

As shown in FIG. 5, a plurality of projections 12 are provided on one of the two flat plates 11, and the two flat plates are opposed to each other to form one container. In that case, one flat plate 1
When the central part of 1 is formed in a concave shape, the concave forms an internal space of the container. In particular, when the required container specifications are extremely thin, this depression can be easily formed by press molding. At this time, the above-mentioned protrusion 12 can be formed simultaneously with the formation of the depression. The protrusions 12 are provided on the entire surface of the recessed portion of the flat plate 11 by, for example, an equilateral triangle arrangement. Even if the shape of the projection is cylindrical, for example,
The shape may be a quadrangular prism. The height of the projection may be set so as to be the difference between the width of the gap between one plate and the other plate in the container and the thickness of the layered mesh stored in the container.

As described above, the two flat plates 11 and 14 on which the depressions and protrusions have been processed are combined, the laminated mesh 13 is sandwiched between the flat plates, and the outer peripheral portion is sealed by brazing. A thin tube is sandwiched in a part of the outer peripheral part, and liquid injection, degassing, and sealing are performed in that part to form a thin flat heat pipe. The protrusion 12
While acting as a mesh hold,
A space for the steam flow path for the steam flow to pass is secured. As described above, the portion of the mesh that contributes to the recirculation of the hydraulic fluid as the wick is an acute angle portion formed by the inner wall surface of the container and the wire that forms the mesh having a circular cross section. According to the flat heat pipe of the present invention, the mesh surely adheres to the wall surface by the projection, so that the effect of recirculating the working fluid is also improved. The structure of the wick is
The same effects as described above can be obtained even when the wire group and the braid group are used in addition to the mesh.

Further, apart from the above-mentioned projection group, the second plate having the same height as the gap width between one flat plate and the other flat plate in the container.
It is desirable that the second projection group provided as described above function as a reinforcing material for the container, because the strength of the container is increased. The density of the arrangement of the second projection group may be coarser than that of the first projection group. However, when the wick structure is made of a mesh, it is preferable to previously form perforations in the laminated mesh in an arrangement and shape corresponding to the arrangement and shape of the second projection group. In this case, 2
When the wick structure is sandwiched between the two flat plates, the tips of the second projections contact the surface of the other flat plate. By brazing the portion in the same manner as the outer peripheral portion, deformation of the wall surface of the container can be suppressed even when the internal pressure of the heat pipe becomes higher than the atmospheric pressure.

Next, one embodiment of the wick of the present invention will be described. One aspect of the wick of the present invention is
A wick composed of a flat plate and a wire wound around the flat plate, which is accommodated in a container having a closed and depressurized cavity of a thin flat heat pipe. Further, in one aspect of the wick of the present invention, the flat plate member is formed by combining two opposing perforated plates provided with a plurality of projections on at least one of them so as to have a gap corresponding to the height of the projections. It may be composed of a perforated plate unit formed in this way.

Further, in one aspect of the wick of the present invention, the flat material of the wick has a polygonal shape of a circle or a quadrangle having a notch or a support provided at an end thereof, and May be wound around the notch or the support with the support as a turning point, and disposed on one surface of the flat plate. Furthermore, one of the wicks of the present invention
In one mode, the flat material of the wick may include a perforated plate having a plurality of perforations. Further, in one aspect of the wick of the present invention, a wire may be further arranged so as to intersect with the wires arranged on both outer surfaces of the perforated plate unit.

Another embodiment of the above-described thin flat heat pipe of the present invention will be described in more detail below. That is, when a copper material capable of using water as a working fluid is selected as a container and a wick material,
It is difficult to actually make a copper wire of 0.5 mmφ or less along the tube wall of the container. Therefore, in the present invention, a method is used in which a copper thin plate is used as a supporting material for guiding the wire, and the copper thin plate wound with the wire is spread as a wick in a container.

For example, a wire is passed between the opposite short sides of a rectangular copper thin plate, and the wire is densely wound from the front surface to the back surface of the thin plate, and again to the front surface and the back surface. On this occasion,
The end of the wire is fixed by being entangled with a notch or the like provided at a corner of the thin plate. In this way, a plate-like wick having the best liquid reflux mechanism in the same direction is obtained. The wick obtained in this way, like a mesh,
It may be taken into a heat pipe container.
As shown in (1), a projection group 12 may be provided on one inner wall surface of the container, and a flat plate on which a wire is wound may be pressed on the other wall surface.

The wick can be stored in a container structure in which a plate material composed of six surfaces of an upper plate material, a lower plate material and a side plate material is combined. However, when the heat pipe is extremely thin, one of the plate materials is used. Was depressed like a pot lid
A structure combining two flat plates may be used. However, in such a case, steam is not supplied to the wire arranged on one side of the wire wound on both sides of the thin copper plate, and the steam does not condense. There is. One of the functions required for the flat heat pipe is to reduce the thickness, and it is better that there is no dead space. On the short side of the thin copper plate, notches are provided at an appropriate pitch, and it is possible to arrange a wire on only one side of the thin copper plate as a folded portion, in this case, eliminate the dead space described above. can do.

When the wire is provided only on one side, if this thin plate is used as one of the wall surfaces of the heat pipe container, the number of parts is reduced and the efficiency is improved. The above-mentioned thin plate around which the wire is wound is made of a normal flat plate, but a perforated plate (punched metal) can be used instead. In this case, even when the wire is wound on the front and back, the space where the above-described wire group is arranged does not become a dead space, and the vapor condenses on both the front and back surfaces, and both serve as a liquid return path. Can be used.

When the wire is wound in one direction, the recirculation function is effective only in one direction, and the function as a flat heat pipe is limited. Therefore, the first wire is wound so as to pass between the short sides of the perforated plate, and then the second wire is placed between the long sides, with the intention of two-dimensionally refluxing the working fluid (vertically and horizontally). There is a method of winding so as to pass and crossing both the first and second wires on the perforated plate. At first glance, this appears to perform only the same function as the mesh, but the actual effect is quite different.

That is, in the case of a mesh, a single line extends along a wall surface and another single line crosses it, so that the single line does not always contact the wall surface. On the other hand, in the present invention, the portion A shown in FIG. 6 where the wire is in contact with the wall surface is always in close contact with the wall surface. In other words, the present invention has a structure in which a so-called direct passage formed by wires is configured in two stories. This example is shown in FIG. In FIG. 7, a projection 1 is provided on the inner surface of the upper flat plate 15 having a depression.
7 is formed, and a wick on which the wires 19 in the X direction and the wires 20 in the Y direction are arranged is pressed against the inner wall of the other flat plate 16 by the projections.

However, this can also be applied to the case shown in FIG. 5 which is an example of a mesh, but in such a wick of the steam flow securing type, the upper plate having the wick is merely condensed with steam. However, no structure that contributes to the reflux is provided. Therefore, in order to make the above-described method of fixing the wire by the perforated plate more effective, a perforated plate unit having a predetermined steam flow path between one perforated plate and the other perforated plate is formed by two perforated plates. And then
It is preferable to wind a wire around the perforated plate unit thus formed. Thereby, the same function can be provided to both surfaces of the perforated plate by effectively utilizing the space.

In FIG. 8, a projection group (not shown) is provided on one of the two perforated plates 23, and these two perforated plates are combined to form a perforated plate unit. After winding the wires 22 in the X direction, the wires 24 are further wound in the Y direction from above. Next, the entire wick thus formed is housed in a housing (container) composed of the upper flat plate 21 and the lower flat plate 25. At this time, if the thickness of the two perforated plates, the gap between the perforated plates (projection height), and the sum of the four layers of wires are set as the internal space height of the housing, the outer wire group (Y The direction 24 is in close contact with the housing inner walls 21 and 25. The inner wire group (X direction) 22 is in close contact with the perforated plate 23. The gap between the two perforated plates establishes a steam flow path, and the steam condenses on the group of wires through the holes in the perforated plates. Thus, according to the present invention, an excellent structure in which both the upper surface and the lower surface of the flat heat pipe have a wick structure composed of a direct circulation path in both the X direction and the Y direction, and a vapor flow path is secured. Can be provided. As described above, according to the container of the present invention, degassing by the boiling method is easy. In particular, gas does not easily remain at the corners of the container. Further, since the corners need only be swaged, the cost can be easily reduced.

[0062]

EXAMPLE 1 According to one of the present invention, a thickness of 0.2 mm × width 25 mm × height 50
In a rectangular copper plate of mm, a recess having a step of about 0.6 mm was formed at the center portion leaving a width of 2 mm on the outer periphery. Further, a passage leading to the outside was formed at one of the four corners of the outer peripheral portion of the rectangular copper plate. The passage is 1 mm wide and has the same height as the central depression. The angle between the passage and the side of the copper plate is 45
°. Such a shape was formed by press working.
On the other hand, columnar projections having a height of 0.6 mm and a diameter of 3 mmφ were formed in a square array at intervals of 10 mm on another copper plate having the same size as the above-mentioned copper plate. This was also formed by press working.

As a wick structure, four meshes (# 120) having a size of 20 mm × 45 mm were prepared. In the superimposed mesh, holes of 3 mmφ were perforated at a pitch of 10 mm so as to correspond to the columnar projections formed on the copper plate.
The mesh thus perforated was inserted into the projection of the copper plate, and four meshes were fitted into the depression. A brazing material was placed on the apexes of the protrusions and a portion of the outer circumference of the copper plate having a width of 2 mm. Thereafter, another copper plate was put thereon, the whole was fixed with clips, and then flowed into a furnace to be integrated. Water was injected with a syringe needle from the opening of the 0.6 mm × 1 mm passage, and the mixture was made into a heat pipe by a boiling method. In this way, the outer thickness is 1mm x 25mm x 50mm
An ultra-thin flat heat pipe was manufactured. When the chip was cooled using the ultra-thin flat plate heat pipe manufactured as described above, efficient cooling was achieved.

Example 2 According to one of the present invention, a thickness of 0.2 mm × width of 50 mm ×
1m at the center of a 100mm long rectangular copper plate with 2mm outer circumference
It was recessed with a step about m. In addition, height 1 in the center
A group of cylindrical protrusions having a diameter of 3 mmφ and a diameter of 3 mm was formed in a square array at intervals of 10 mm. Such a shape was formed by press working. Further, a passage leading to the outside was formed in one of the four corners of the rectangular copper plate. The passage is 1mm wide and the height is
It has the same height as the central depression. The angle between the passage and the side of the copper plate was 45 °. Such a shape was formed by press working. On the other hand, columnar projections having a height of 0.5 mm and a diameter of 3 mmφ were formed in a square array at intervals of 5 mm on another copper plate having the same size as the above-described copper plate. This was also formed by press working.

As a wick structure, six meshes (# 200) each having a size of 45 mm × 95 mm were prepared and superimposed, and a 10 mm 3 mm hole was formed on the copper plate so as to correspond to the cylindrical projection formed on the copper plate. Perforated at pitch. Six such meshes were inserted into the copper plate projections. A brazing material was placed on the outer periphery of the copper plate and on the apex of the protrusion, and thereafter, another copper plate was put thereon, and the whole was fixed with clips, flowed into a furnace, and integrated. Water was injected from a 1 mm × 1 mm opening with an injection needle, and the mixture was made into a heat pipe by a boiling method. In this way, an ultra-thin flat heat pipe having an outer thickness of 1.4 mm, a width of 50 mm and a length of 100 mm was produced. When the chip was cooled using the ultra-thin flat plate heat pipe manufactured as described above, efficient cooling was achieved.

Example 3 According to one of the present invention, thickness 0.2 mm × width 25 mm × height 70
The remaining 21 mm of the rectangular copper plate excluding the 2 mm outer circumference
For the part of mm × 66mm, the short side is 21mm
Along the two sides, 40 cylindrical dowels having a height of 0.8 mm and 0.2 mmφ were provided at a pitch of 0.5 mm, and using these as turning points, a copper wire of 0.2 mmφ was wound around one side of the copper plate. . The beginning and end of winding were tied to the dowel at the end. On the other hand, separately from this, thickness 0.2mm × width 25 × length 70mm
In the other rectangular copper plate, the central portion having a width of 2 mm on the outer periphery was depressed with a step of 0.6 mm. Further, in one of the four corners of the outer peripheral portion, a passage having the same height as the central portion and a width of 1 mm continuing from the central portion was formed at an angle of 45 ° to the side. Such a shape was formed by press working.

A brazing material is placed on a portion having a width of 2 mm on the outer periphery of the copper plate,
Thereafter, another copper plate was put on the copper plate, the whole was fixed with a clip, and then flowed into a furnace to be integrated. 1m formed above
Inject water with a syringe needle from the opening of the passage of m × 0.6 mm,
It was made into a heat pipe by the boiling method. In this way, an ultra-thin flat heat pipe having an outer thickness of 1.0 mm × width 25 × length 70 mm was produced. When the chip was cooled using the ultra-thin flat plate heat pipe manufactured as described above, efficient cooling was achieved.

Example 4 In accordance with one of the present inventions, a 2 mm pitch square array of 1
A 0.2 mmφ copper wire was wound around a perforated copper plate having a thickness of 0.2 mm × 20 × 65 mm with a hole of mmφ. As the winding method, a total of 38 turns were wound at a pitch of 0.5 mm between the two sides of 20 mm, which are the short sides of the perforated plate, through the front and back of the perforated plate. The winding start and winding end were entangled with the end holes of the square array. On the other hand, a center portion of a rectangular copper plate having a thickness of 0.2 mm, a width of 25 mm, and a length of 70 mm, with a width of 2 mm on the outer periphery, was recessed with a step of 1.0 mm. Further, in one of the four corners of the outer periphery, a passage having the same height as the central portion and a width of 1 mm continuing from the central portion was formed at an angle of 45 ° with respect to the side. Such a shape was formed by press working. For another copper plate of the same size as the copper plate, a columnar projection of height 0.4 mm and diameter 1φ is 3 mm.
It was formed in a square array of intervals. This was also formed by press working.

The perforated plate on which the first wire was wound was fitted as a wick structure into the depression of the copper plate. Further, a brazing material was placed on a portion having a width of 2 mm on the outer periphery of the copper plate. Thereafter, another copper plate was put on the copper plate, the whole was fixed with a clip, and then flowed into a furnace to be integrated. Water was injected with an injection needle from the opening of the 1 mm × 1 mm passage described above, and formed into a heat pipe by a boiling method. In this way, the outer thickness is 1.4mm x 2mm
A thin flat heat pipe of 5 mm × 70 mm in length was produced.
When the chip was cooled using the ultra-thin flat plate heat pipe manufactured as described above, efficient cooling was achieved.

Example 5 In accordance with one of the present invention, a 1 mm square array with a 2 mm pitch was used.
0.1mm x 20mm x 65mm with a φ hole
With a perforated copper plate A, a perforated copper plate B in which a 1φ hole is also drilled in a square arrangement of 2mm pitch, and a 10mm pitch 1φ, 0.2mm height cylindrical dowel, with the dowel inside,
They were superposed to form a perforated plate unit. A 0.2 mmφ copper wire was wound around the perforated plate unit. As a winding method, a total of 62 turns were wound between the two sides of 65 mm, which are the long sides of the perforated plate unit, at a pitch of 1 mm through the front and back of the perforated plate. From above,
A total of 38 turns were wound at a pitch of 0.5 mm between the two sides of the short side, that is, 20 mm, through the front and back of the perforated plate. The winding start and winding end were entangled with the end holes of the square array.

On the other hand, separately from this, the thickness is 0.2 mm × width 25 m.
The central portion of the rectangular copper plate measuring mx 70 mm long except for the outer periphery having a width of 2 mm was recessed with a step of 1.2 mm. Further, in one of the four corners of the outer peripheral portion, a passage having the same height as the central portion and a width of 1 mm continuing from the central portion was formed at an angle of 45 ° to the side. Such a shape was formed by press working. The first wire-wound perforated plate unit was fitted as a wick structure into the depression of the copper plate. In addition, put the brazing material on the outer periphery of the copper plate with a width of 2 mm, and then cover it with another copper plate that is just a flat plate of the same size as the copper plate, fix the whole with clips, and let it flow into the furnace , Integrated.

Water was injected with an injection needle from the opening of the above-mentioned 1 mm × 1.2 mm passage, and was made into a heat pipe by a boiling method. In this way, the outer thickness is 1.6 mm x 25 mm x 7
A 0 mm thin flat heat pipe was produced. When the chip was cooled using the ultra-thin flat plate heat pipe manufactured as described above, efficient cooling was achieved.

[0073]

According to the present invention, an inexpensive and structurally simple sealing portion can be obtained in a flat heat pipe container. In particular, even with a thin flat heat pipe having an outer thickness of 1.5 mm or less, the cut-off portion can be effectively set.
Further, according to the present invention, a substantially porous flat heat pipe container can be made of a copper material that can use water as a working fluid. Further, by fixing the mesh to the inner wall, the steam flow path could be secured stably. Further, a wick structure using only wires without using a mesh can be provided. A method for easily mass-producing these can be provided.

Further, according to the present invention, the steam flow path is ensured and the mesh is securely in contact with the inner wall surface as compared with the conventional case where the mesh is simply stored, so that the maximum heat transfer amount is reduced. Doubled. Further, an ultra-thin flat heat pipe which is not deformed by internal pressure was obtained. Further, in the flat heat pipe, the wire was securely fixed to the inner surface of the container. In order to impair the advantages of the wire as a wick structure, it is possible to provide a method in which the liquid can be circulated in both the X and Y directions as in the case of the mesh. Further, according to the present invention, it is possible to provide a flat heat pipe that secures a steam flow path and has an excellent wick structure on both the upper and lower surfaces of the flat heat pipe.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing a sealing portion of a container of the present invention.

FIG. 2 is a plan view of a sealing portion of the container of FIG. 1;

FIG. 3 is a diagram showing one embodiment of a wick of the present invention.

FIG. 4 is a view showing another embodiment of the wick of the present invention.

FIG. 5 is a view showing one embodiment of the plate-type heat pipe of the present invention.

FIG. 6 is a cross-sectional view showing a contact portion between one plate and a wire of the container.

FIG. 7 is a diagram showing another embodiment of the plate-type heat pipe of the present invention.

FIG. 8 is a view showing another embodiment of the wick of the present invention.

FIG. 9 is a view showing a conventional aluminum container.

FIG. 10 is a diagram showing a cross section of a conventional heat pipe.

FIG. 11 is a view showing a conventional sealing portion in a flat heat pipe.

[Explanation of symbols]

 1 Peripheral part of thin plate 2 Central part of thin plate 3 Corner of thin plate 4 Plate 5 Bar 6 Plate 7 Plate 8 Mesh 9 Bar 10 Plate 11 Plate 12 protrusion 13 Laminated mesh 14 Plate 15 Upper plate 16 Plate 17 Projection 18 perforated plate 19 wire 20 wire 21 upper flat material 22 wire 23 perforated plate 24 wire 25 lower flat material 26 wire 27 plate material 101 Container made by aluminum extrusion 102 container 103 mesh 104 upper plate material 105 lower plate material 106 side plate material 107 narrow tube

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Toshiaki Nakamura 2-6-1 Marunouchi, Chiyoda-ku, Tokyo Inside Furukawa Electric Co., Ltd. (72) Inventor Jun Sakagawa 2-6-1, Marunouchi, Chiyoda-ku, Tokyo Furukawa Electric Co., Ltd.

Claims (8)

[Claims] 1. A thin flat heat pipe comprising the following members: (1) A metal wire rod arranged in parallel with each other at a predetermined interval on the same plane, and arranged so as to intersect with said wire rod. A wire group consisting of another wire rod arranged in parallel with each other at a predetermined interval on the same plane; and (2) formed so as to be in contact with the wire group and to accommodate the wire group, A concave portion is formed in the center portion, and an upper plate material made of a copper thin plate having a passage formed from the concave portion to the outside at a corner thereof, and a lower plate material formed of a flat copper thin plate, (3) a container having a cavity in which the passages are sealed and the passage is sealed and the pressure is reduced.
Water as a working fluid contained in the container. 2. A thin flat heat pipe made of the following members: (1) An upper plate made of a thin copper plate having a recess formed in the center and a passage formed in the corner to communicate with the outside from the recess. , And a container formed by a lower plate material made of a flat copper thin plate, joining an outer peripheral portion, and having a cavity part in which the passage is sealed off and hermetically decompressed,
(2) a wick that is housed in the container and that is made of a flat material and a wire wound around the flat material;
(3) A working fluid contained in the container. 3. A thin flat heat pipe made of the following members: (1) An upper plate made of a copper thin plate having a recess formed in the center and a passage communicating with the outside from the recess at the corner. And a lower plate made of a copper thin plate, and a plurality of protrusions are provided on one surface of the upper plate or the lower plate. The outer peripheral portions are joined, the passage is sealed off, and the pressure is reduced. A container having a hollow portion formed therein, and (2) a flat plate material and a wire wound around the flat plate material, which are accommodated in the container, are pressed by the plurality of protrusions, and are fixed to opposed inner walls of the container. And (3) a working fluid contained in the container. 4. A thin flat heat pipe made of the following members: (1) An upper plate made of a thin copper plate having a recess formed in the center and a passage formed in the corner to communicate with the outside from the recess. And a container formed of a lower plate material made of a copper thin plate, having an outer peripheral portion joined thereto, the passage closed off, and having a sealed and depressurized cavity portion; and (2) at least contained in the container. A wick comprising a perforated plate unit formed by combining two opposing perforated plates provided with a plurality of protrusions on one side so as to have a gap corresponding to the height of the protrusion, and a wire rod wound around the perforated plate unit And (3) a working fluid contained in the container. 5. The thin flat type according to claim 4, wherein a wire is further arranged so as to intersect with the wires arranged on both outer surfaces of the perforated plate unit of the wick. heat pipe. 6. The thin flat heat pipe according to claim 1, wherein the upper plate is integrally formed by press working. 7. A flat plate having a depression in the center and having a passage communicating with the outside at one corner of the outer peripheral portion is combined with another flat plate, and the outer peripheral portion is bonded using a brazing material. A flat heat pipe container that forms a closed space in the center by closing the passage. 8. The flat heat pipe container according to claim 7, wherein the flat plate and the other flat plate have corresponding recesses and passages in the central portion and the outer peripheral portion. .