JP2001062234A - Air filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to prevent the deformation and failure of a filter pack housed in a filter frame and to maintain a uniform flow-out wind velocity and capturing efficiency by disposing a netlike material on the downstream side of the filter pack and providing the net-like material with >=1 rib so as to be confine within the filter frame. SOLUTION: The air filter 1 for creating an ultraclean space, such as a clean room for liquid crystal and semiconductor production, is composed of a filter pack 10, the filter frame 20 and a lath net 30. The ends 11a and 11b of a filter medium constituting a filter pack 10 are fixed by an adhesive to the inside wall surfaces 21 and 22 of the filter frame 20. The ends 11c and 11d of the filter medium are hermetically fixed by a sealing agent 13 to the inner walls 23 and 24 of the filter frame 20. The lath net 30 is provided with three ribs 31 in parallel with the pleats of the filter medium and outward in its central part. The filter frame 20 is provided with notches in the position inclusive of the height of the ribs 31 from the downstream side of the inner walls 21 to 24. The circumference of the lath net 30 is fitted and fixed into these notches.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air filter for creating an ultra-clean space such as a clean room for producing liquid crystals and semiconductors.

[0002]

2. Description of the Related Art Conventionally, in a 610 mm.times.610 mm air filter, as disclosed in Japanese Utility Model Laid-Open Publication No. 60-91224, a filter medium protecting means is provided downstream of a filter pack housed in a filter frame. One provided with a perforated plate is known. Further, as disclosed in Japanese Utility Model Laid-Open No. 59-7022, as a support material of a separator used as a spacing material for a filter material of a filter pack,
It is known that a reinforcing bar material is provided downstream of a filter pack. Further, as disclosed in Japanese Utility Model Laid-Open Publication No. 62-62822, a rod-shaped rigid material is disposed downstream of a filter medium. In addition, these conventional techniques can be applied to an air filter in which a ribbon-shaped mini-pleat is provided on the filter medium itself instead of using the corrugated separator as the filter medium spacing member.

[0003] Recently, since it is necessary to construct a low-cost clean room, the amount of aluminum used for the ceiling frame is reduced, and the number of fans only corresponding to the number of filters is reduced. A large air filter such as a foot is required. However, such a large air filter is likely to be deformed due to the wind pressure, the weight of the filter pack when used horizontally, or to be damaged due to such deformation.
The task was to solve this problem.

For example, as disclosed in Japanese Utility Model Laid-Open Publication No. 60-91224, when a perforated plate is provided as a filter medium protecting means downstream of a filter pack accommodated in a filter frame, the pressure drop In particular, when the size is increased, the aperture ratio of the perforated plate cannot be increased so much as to have strength, and it is difficult to suppress the increase in pressure loss. In addition, the actual opening 59-70
As disclosed in Japanese Patent Publication No. 22-222, when a reinforcing bar material is provided on the downstream side of the filter pack as a support material of the separator used as a spacing material for the filter material of the filter pack, the reinforcing bar and the filter There is a problem that the filter medium is damaged by contact with the pack, and it is necessary to separate the reinforcing bar from the filter pack so that the filter pack does not contact with the filter medium. In addition, since the reinforcing bar material has no air permeability, the air flow is disturbed, and the function of the air filter, which has to blow out the clean air almost uniformly, has been hindered. Further, as disclosed in Japanese Utility Model Application Laid-Open No. 62-62822, when a rod-shaped rigid member is disposed downstream of the filter medium, when a well-shaped frame having a large space is formed, for example, a reinforcing material is used. However, even if the rib processing is performed, the weight of the filter pack cannot be supported, so that the rib itself bends and does not improve the strength, and therefore does not solve the above problem.

[0005]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is intended to prevent deformation of a filter pack in a large air filter such as 4 feet x 4 feet and damage caused by the deformation. It is another object of the present invention to provide an air filter capable of maintaining the same uniform blowing wind speed and collection efficiency as before.

[0006]

That is, in the air filter of the present invention, as described in claim 1, a mesh material is provided at least on the downstream side of the filter pack, and the mesh material is contained in the filter frame. Is provided with one or more ribs. According to a second aspect of the present invention, in the air filter according to the first aspect, the filter pack is formed of a pleated filter medium folded in a zigzag shape, and ribs of the mesh are provided in parallel with the pleats. It is characterized by having. The air filter according to claim 3 is the air filter according to claim 1,
The filter pack is composed of a pleated filter medium folded in a zigzag shape, and the filter pack is divided into a plurality of pieces in a direction perpendicular to the pleats, and the ribs of the mesh material are provided perpendicular to the pleats. Features. An air filter according to a fourth aspect is characterized in that, in the air filter according to any one of the first to third aspects, the ribs of the mesh material are provided outward. An air filter according to a fifth aspect is characterized in that, in the air filter according to any one of the first to third aspects, the ribs of the mesh material are provided inward. Claim 6
The air filter according to the second aspect is characterized in that, in the air filter according to the second aspect, the ribs of the mesh material are provided in parallel with the pleats such that the ribs are immersed between the folds of the pleats of the filter medium. According to a seventh aspect of the present invention, in the air filter according to the third aspect, the ribs of the mesh material are provided perpendicular to the pleats so as to be immersed between the plurality of divided filter media. It is characterized by the following. An air filter according to an eighth aspect is the air filter according to any one of the first to seventh aspects, wherein a contact portion between the rib of the mesh material and the filter medium is a non-venting portion.

[0007]

DETAILED DESCRIPTION OF THE INVENTION As described above, an air filter according to the present invention has a mesh disposed at least on the downstream side of a filter pack and one or more ribs provided on the mesh so as to be accommodated in a filter frame. The first feature is that the filter medium can be held in a predetermined shape without increasing the pressure loss.
It is suitable for constituting as a large-sized air filter having a size of 30 mm to 290 mm or more and a thickness of 30 mm to 290 mm.

In the filter pack constituting the air filter of the present invention, a filter medium made of glass fiber, synthetic resin fiber, PTFE, or the like is folded in a zigzag shape. To maintain the spacing of
Alternatively, it may be formed such that a ribbon-like hot melt resin is applied in advance in the flow direction of the filter medium before the filter medium is folded to form a space holding portion, and the space between the crests is maintained.

The filter frame constituting the air filter includes a metal plate made of aluminum, stainless steel, or the like.
A resin plate such as an extruded resin plate such as a PC and a wooden plate such as a plywood can be used.

[0010] As the mesh, a resin or metal lath net having a thickness of 0.5 mm or more and an opening ratio of 30 to 80% can be used.

In the present invention, when the ribs provided on the mesh are arranged in parallel with the pleats provided on the filter medium of the filter pack, the airflow passing therethrough is not obstructed and the ribs run around the ribs. Because it blows out, the turbulence of the air flow is suppressed.

The height of the rib can be 5 to 285 mm. In this case, providing the ribs perpendicular to the pleats is not preferable unless the air flow is blocked at the blowout surface of the filter medium corresponding to the ribs and a dead zone is formed, so that a later-described configuration is adopted. Of course.

The rib used in the present invention needs to be provided at least one at the center. Furthermore, a plurality may be provided at the center, or 50 to 1
It may be provided at equal intervals of 00 mm. Also, this rib
Either bend the mesh body, or attach another member by gluing or welding, divide the mesh body into a plurality, fold the ends thereof, fix the folded portions together by gluing, welding, etc. It can be configured by any means. In particular, when the rib is a separate plate member having no air permeability, the strength of the filter pack can be further increased.

When the ribs are arranged in parallel with the pleats provided on the filter medium of the filter pack as described above, the ribs can be immersed between the crests of the filter medium. In this case, no space is required for accommodating the ribs in the filter frame of the air filter. When the ribs are provided outward of the filter pack, a space for accommodating the ribs in the filter frame of the air filter is required for the height of the ribs.

In the present invention, the direction of the rib provided on the mesh member may be perpendicular to the pleat of the filter medium. In this way, even if the ribs are provided perpendicular to the pleats of the filter medium, the airflow is not blocked by the blowing surface of the filter medium,
The function of the air filter is not affected and the reinforcing effect can be exhibited. That is, the filter pack containing the pleated filter medium can be divided into a plurality (two or more) in the vertical direction of the pleats, and the mesh rib can be interposed between the divided filter packs.

[0016]

Next, an embodiment of the air filter of the present invention will be described with reference to the drawings. FIG. 1 is a plan view showing one embodiment of the air filter of the present invention, FIG. 2 is an enlarged sectional view taken along line AA of FIG. 1, FIG. 3 is a plan view showing another embodiment of the air filter of the present invention, FIG. FIG. 4 is an enlarged sectional view taken along line BB of FIG. 3.
FIG. 5 is a perspective view showing an embodiment in which the filter pack is divided in the vertical direction and the ribs of the mesh are provided in the direction perpendicular to the pleats of the filter medium.

In FIGS. 1 and 2, reference numeral 1 denotes an air filter which is formed as a large air filter having a length and width of 1220 mm × 1220 mm and a thickness of 75 mm, and a filter pack 10 having a folded width of 65 mm and an aluminum filter having a thickness of 15 mm. Filter frame 20, thickness 1 mm, aperture ratio about 3
And a 5% aluminum lath net 30. The filter medium 11 made of glass fiber constituting the filter pack 10 is folded in a zigzag shape, and the space between the folded ridges is fixed with a ribbon-like hot melt resin so as to maintain a folding interval.

Further, ends 11a and 11b of the filter medium 11 are connected to inner wall surfaces 21 and 22 of the filter frame 20.
And the ends 11 c and 11 d of the filter medium 11 are fixed to the inner side walls 23 and 24 of the filter frame 20.
Is sealed and fixed with a sealant 13.

In the lath net 30, three ribs 31, 31, 31 having a height of 10 mm are provided at the center of the lath net 30 at intervals of 50 mm in parallel with the pleats of the filter medium 11 by bending. Have been. The filter frame 20 is provided with a cut 25 at a position including the height of the rib 31 from the downstream side of the inner side walls 21, 22, 23 and 24, and the cut 25 is fitted around the lath net 30 and fixed. I did it.

Since the air filter of the present invention is constructed as described above, the strength of the filter pack 10 is maintained by the ribs 31 provided on the lath net 30, so that there is no possibility of the filter pack being deformed. In addition, it is possible to maintain uniform blowing wind speed and collection efficiency.

FIGS. 3 and 4 show another embodiment of the present invention, which differs from the above embodiment in the shape and position of the ribs provided on the lath net 30. FIG. That is, 2
One end of each of the lath nets 30, 30 is folded back, the ends are butted together, and fixed by means such as adhesion or welding, and a rib 31 having a height of 30 mm is attached to a filter medium at the abutting portion of the lath nets 30, 30. One piece is formed inward in parallel with the pleats provided on 11. In addition, the lath net 30
The eyes are fan-shaped, so we used a lath net with a different shape.

In this case, the ribs 31 are inserted between the folds of the pleats. Therefore, the thickness of the air filter is 75 mm. In this case as well, the lath net 30 is formed by the inner side walls 21, 22, 2,
3 and 24 were fitted and fixed in the cuts 25 provided in them.

In this embodiment, since the ribs 31 are inserted into the pleats, the filter medium 11 may be rubbed and dusted or the filter medium 11 may be damaged. Non-ventilated part 3 that closes the pleated part into which 31 is inserted
2 was formed. In this embodiment, as in the above-described embodiment, the strength of the filter pack 10 is maintained by the ribs 31.
In addition, it is possible to maintain uniform blowing wind speed and collection efficiency.

FIG. 5 shows still another embodiment of the present invention. The direction of the ribs of the net is different from that of the above embodiment.
It is characterized by being provided perpendicular to the pleats.
In FIG. 5, the air filter is 1220 mm in length and width.
It is formed as a large air filter with a size of 1220 mm and a thickness of 75 mm.
10 mm x 1220 mm, filter packs 10 and 10 arranged vertically in two parts with a folding width of 65 mm and a thickness of 15 mm
And an aluminum filter net 20 having a thickness of 1 mm and an aperture ratio of about 35%. The filter medium 11 made of glass fiber constituting each of the filter packs 10 is folded in a zigzag shape, and the folded ridges are fixed with a ribbon-shaped hot melt resin 14 to maintain a folding interval. .

In the case of this embodiment, the pleats of the filter medium 11 are provided at the center of the lath net 30 and one rib 31 provided in the vertical direction is immersed in the filter packs 10, 10 which are vertically divided into two.

The filter packs 10, 10 are hermetically accommodated in the filter frame 20 by a sealant or an adhesive (not shown), and the lath net 30 is fixed to the filter frame 20 in the same manner as in the above embodiment.

In the embodiments shown in FIGS. 3, 4 and 5, the ribbed lath net or the filter pack is shown as an example in which the filter pack is divided into two parts.

[0028]

As described above, in the air filter of the present invention, by providing the ribs, the strength of the filter pack can be maintained. Can be eliminated. Moreover, in the present invention, by employing the above-described deformation preventing means, it is possible to maintain a uniform blowing wind speed and a uniform collection efficiency without generating a turbulence in the blowing airflow.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment of the present invention.

FIG. 2 is an enlarged sectional view taken along line AA of FIG.

FIG. 3 is a plan view showing another embodiment of the present invention.

FIG. 4 is an enlarged sectional view taken along line BB of FIG. 3;

FIG. 5 is a perspective view showing another embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Air filter 10 Filter pack 11 Filter material 11a end 11b end 11c end 11d end 12 Adhesive 13 Sealant 20 Filter frame 21 Inner side wall 22 Inner side wall 23 Inner side wall 24 Inner side wall 25 Cut 30 Lath net 31 Rib 32 Non Vent section 40 Joining material

Continued on the front page (72) Inventor Jun Iizuka 415, Sakunodani, Yuki City, Ibaraki Prefecture F-term in the Yuki Plant of Nippon Inorganic Company, Limited 4D058 JA14 JB05 JB14 KA06 KA12 SA04

Claims (8)

[Claims] 1. An air filter, wherein a mesh is provided at least on the downstream side of a filter pack, and one or more ribs are provided on the mesh so as to fit in a filter frame. 2. The air filter according to claim 1, wherein the filter pack is formed of a pleated filter medium folded in a zigzag shape, and ribs of the mesh are provided in parallel with the pleats. 3. The filter pack is composed of a pleated filter medium folded in a zigzag shape, and the filter pack is divided into a plurality of pieces in a direction perpendicular to the pleats, and ribs of the mesh material are perpendicular to the pleats. The air filter according to claim 1, wherein the air filter is provided. 4. The air filter according to claim 1, wherein the ribs of the mesh are provided outward. 5. The air filter according to claim 1, wherein the ribs of the mesh are provided inward. 6. The air filter according to claim 2, wherein the ribs of the mesh material are provided in parallel with the pleats so as to be immersed between the folds of the pleats of the filter medium. 7. The air filter according to claim 3, wherein the ribs of the mesh material are provided perpendicular to the pleats so as to be immersed between the plurality of divided filter media. 8. The air filter according to claim 1, wherein a contact portion between the rib of the mesh material and the filter medium is a non-venting portion.