JP2001059527A - Universal joint boot - Google Patents

Universal joint boot

Info

Publication number
JP2001059527A
JP2001059527A JP23370299A JP23370299A JP2001059527A JP 2001059527 A JP2001059527 A JP 2001059527A JP 23370299 A JP23370299 A JP 23370299A JP 23370299 A JP23370299 A JP 23370299A JP 2001059527 A JP2001059527 A JP 2001059527A
Authority
JP
Japan
Prior art keywords
boot
inclining
slope
universal joint
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23370299A
Other languages
Japanese (ja)
Inventor
Seiya Umeno
誠也 梅野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nok Corp
Original Assignee
Nok Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nok Corp filed Critical Nok Corp
Priority to JP23370299A priority Critical patent/JP2001059527A/en
Publication of JP2001059527A publication Critical patent/JP2001059527A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To prevent a boot from breaking by abrasion by arranging a bending part on an inclining part in a boots wherein a crest part of a bellows part and the inclining part of a small diameter side are brought into contact with each other. SOLUTION: A bending part 8 is disposed on an inclining part 7 with which a crest part 5 of a boots 1 is brought into contact, and the inclining part 7 is formed by assembling an outside inclining part 7a with an outside inclining part 7a which are alternately continuously formed on the border of the bending part 8. An inclining angle θ1 of the outside inclining part 7a with respect to a center axis 0 of a free condition of the boots 1 is set larger than an inclining angle θ2 of the inside inclining part 7b with respect to the center axis 0. When the crest part 5 and the inclining surface part 7 are brought into contact with each other while bending the boots 1 at a wide angle, the inclining surface part 7 is smoothly bent at the bending part 8 in a compression side on a circumference. Accordingly, contact pressure is suppressed in a low level, and breakage is prevented by suppressing generation or advance of abrasion.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、自在継手の作動部
を被覆保護するために用いられる自在継手用ブーツに関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a universal joint boot used for covering and protecting an operating portion of a universal joint.

【0002】[0002]

【従来の技術】従来から、図3に示すように、小径側の
取付部52と大径側の取付部53との間に蛇腹部54を
有し、小径側の取付部52を自在継手21の軸部22の
外周に固定するとともに大径側の取付部53を自在継手
21の外輪部23の外周に固定して自在継手21の作動
部24を被覆保護するようにした熱可塑性エラストマー
製の自在継手用ブーツ51が知られている。
2. Description of the Related Art Conventionally, as shown in FIG. 3, a bellows portion 54 is provided between a small diameter side mounting portion 52 and a large diameter side mounting portion 53, and the small diameter side mounting portion 52 is connected to the universal joint 21. And a fixing portion 53 on the large-diameter side is fixed to the outer periphery of the outer ring portion 23 of the universal joint 21 to cover and protect the operating portion 24 of the universal joint 21. A universal joint boot 51 is known.

【0003】このブーツ51は、従来のゴム製ブーツと
比較して、その材質上、耐久性、機能性およびリサイク
ル性に優れていることから、近年急速にその普及率が拡
大しているが、ゴム製ブーツと比較して剛性が高いため
に、以下のような不都合を来している。
[0003] The boots 51 are excellent in durability, functionality and recyclability in terms of material compared to conventional rubber boots. Since the rigidity is higher than that of rubber boots, the following inconveniences are caused.

【0004】すなわち、図3に示したように、自在継手
21の作動に伴ってこのブーツ51が広角度に屈曲する
と、蛇腹部54における山部55とその小径側に位置す
る斜面部56とが円周上圧縮側において互いに接触する
ことがあり、このように両者55,56が接触すると、
その接触圧により接触部に摩耗が発生し、この接触摩耗
部においてブーツ51が破損することがある。接触面圧
の大きさは、ブーツ51が広角度に曲がる程に、またブ
ーツ51が小さいものである程に大きくなる傾向があ
る。
That is, as shown in FIG. 3, when the boot 51 is bent at a wide angle with the operation of the universal joint 21, the peak 55 of the bellows 54 and the slope 56 located on the small diameter side thereof are formed. On the circumferential compression side, they may come into contact with each other.
The contact pressure causes wear at the contact portion, and the boot 51 may be damaged at the contact wear portion. The magnitude of the contact surface pressure tends to increase as the boot 51 bends at a wide angle and as the boot 51 becomes smaller.

【0005】[0005]

【発明が解決しようとする課題】本発明は以上の点に鑑
みて、ブーツが広角度に屈曲してその蛇腹部における山
部とその小径側に位置する斜面部とが互いに接触しても
両者の接触圧を小さく抑えることができ、もってこの接
触部においてブーツが摩耗して破損するのを防止するこ
とが可能な自在継手用ブーツを提供することを目的とす
る。
SUMMARY OF THE INVENTION In view of the above, the present invention has been made in consideration of the above circumstances, even when a boot is bent at a wide angle and a peak portion in the bellows portion and a slope portion located on the small diameter side come into contact with each other. It is an object of the present invention to provide a universal joint boot capable of suppressing the contact pressure of the universal joint, thereby preventing the boot from being worn and damaged at the contact portion.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するた
め、本発明の請求項1による自在継手用ブーツは、小径
側取付部と大径側取付部との間に蛇腹部を有し、当該ブ
ーツの屈曲作動時に前記蛇腹部における山部とその小径
側に位置する斜面部とが互いに接触することのある自在
継手用のブーツにおいて、前記山部が接触する前記斜面
部に屈曲部を設けたことを特徴とするものである。
In order to achieve the above object, a boot for a universal joint according to claim 1 of the present invention has a bellows portion between a small-diameter side mounting portion and a large-diameter side mounting portion. In a boot for a universal joint in which a peak portion of the bellows portion and a slope portion located on a small diameter side thereof may come into contact with each other at the time of the bending operation of the boot, a bent portion is provided on the slope portion where the peak portion contacts. It is characterized by the following.

【0007】また、本発明の請求項2による自在継手用
ブーツは、上記した請求項1の自在継手用ブーツにおい
て、屈曲部を設けた斜面部が、前記屈曲部を境として互
いに連続する外側斜面部分と内側斜面部分との組み合わ
せよりなるとともに、当該ブーツの自由状態における中
心軸線に対する前記外側斜面部分の傾斜角度が前記内側
傾斜部分の傾斜角度よりも大きく設定されていることを
特徴とするものである。
According to a second aspect of the present invention, there is provided a boot for a universal joint according to the first aspect of the present invention, wherein the slope provided with the bent portion has an outer slope continuous with the bent portion as a boundary. And a combination of the inner slope portion and the inner slope portion, and the inclination angle of the outer slope portion with respect to the center axis in the free state of the boot is set to be larger than the inclination angle of the inner slope portion. is there.

【0008】上記構成を備えた本発明の請求項1による
自在継手用ブーツのように、山部が接触する斜面部に屈
曲部が設けられると、当該ブーツが広角度に屈曲して山
部と斜面部とが互いに接触したときに円周上圧縮側にお
いて斜面部が屈曲部においてスムーズに曲げられるため
に、発生する接触圧の大きさを小さく抑えることが可能
となる。このようにスムーズに曲げられる屈曲部として
は、斜面部に予め曲げ癖を付けるべく屈曲部を断面く字
形または略く字形のものとして形成するのが好適であ
り、請求項2に示すように、屈曲部を設けた斜面部が、
屈曲部を境として互いに連続する外側斜面部分と内側斜
面部分との組み合わせよりなり、なおかつ当該ブーツの
自由状態における中心軸線に対する外側斜面部分の傾斜
角度が内側傾斜部分の傾斜角度よりも大きく設定される
のが好適である。
[0008] When the bent portion is provided on the slope portion where the peak contacts, as in the universal joint boot according to the first aspect of the present invention having the above configuration, the boot bends at a wide angle to form the peak. When the slope portion comes into contact with each other, the slope portion is smoothly bent at the bent portion on the compression side on the circumference, so that the magnitude of the generated contact pressure can be reduced. As the bent portion that is smoothly bent in this way, it is preferable to form the bent portion in a cross-shaped or substantially rectangular shape in order to add a bending habit to the slope portion in advance. The slope with the bend is
The boot is composed of a combination of an outer slope portion and an inner slope portion that are continuous with each other at the bent portion, and the inclination angle of the outer slope portion with respect to the center axis in the free state of the boot is set to be larger than the inclination angle of the inner slope portion. Is preferred.

【0009】[0009]

【発明の実施の形態】つぎに本発明の実施例を図面にし
たがって説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings.

【0010】図1は、当該実施例に係る自在継手用ブー
ツ1の断面を示しており、その作動状態すなわち広角度
屈曲状態が図2に示されている。
FIG. 1 shows a cross section of a boot 1 for a universal joint according to this embodiment, and its operating state, that is, a wide-angle bending state is shown in FIG.

【0011】図1に示すように、当該ブーツ1は先ず、
多数の山部5および谷部6を軸方向に交互に並べた蛇腹
部4を有しており、この蛇腹部4の軸方向一端側(図上
上側であり、以下、小径側とも称する)に円筒状を呈す
る比較的小径の取付部(小径側取付部または小径側装着
部とも称する)2が一体に設けられており、反対側の軸
方向他端側(図上下側であり、以下、大径側とも称す
る)に同じく円筒状を呈する比較的大径の取付部(大径
側取付部または大径側装着部とも称する)3が一体に設
けられている。蛇腹部4は、各山部5と谷部6の間に斜
面部7を一体に設けたものであって、山部5および谷部
6の径寸法は小径側取付部2から大径側取付部3にかけ
て徐々に拡大するように形成されている。
As shown in FIG. 1, the boot 1 is first
It has a bellows portion 4 in which a large number of peak portions 5 and valley portions 6 are alternately arranged in the axial direction. A relatively small-diameter mounting portion (also referred to as a small-diameter mounting portion or a small-diameter mounting portion) 2 having a cylindrical shape is integrally provided, and the other end in the axial direction on the opposite side (the upper and lower sides in the figure; A relatively large-diameter mounting portion (also referred to as a large-diameter mounting portion or a large-diameter mounting portion) 3, which is also cylindrical, is integrally provided on the (diameter side). The bellows portion 4 is formed by integrally providing a slope portion 7 between each peak portion 5 and the valley portion 6, and the diameter of the peak portion 5 and the valley portion 6 is changed from the small diameter side mounting portion 2 to the large diameter side mounting portion. It is formed so as to gradually expand toward the portion 3.

【0012】また、このブーツ1は、樹脂ないしは熱可
塑性エラストマーによって一体に成形されており、図示
したように、小径側取付部2を自在継手21の軸部22
の外周に固定するとともに大径側取付部3を自在継手2
1の外輪部23の外周に固定して自在継手21の作動部
24を被覆保護するものである。また、このブーツ1は
その屈曲作動時に蛇腹部4における山部5とその小径側
に位置する斜面部7とが互いに接触することがあるため
に、以下のような工夫がなされている。
The boot 1 is integrally formed of a resin or a thermoplastic elastomer. As shown, the small-diameter mounting portion 2 is connected to the shaft 22 of the universal joint 21.
And the large-diameter side mounting portion 3 is connected to the universal joint 2.
The outer joint 23 is fixed to the outer periphery of the outer ring part 23 to cover and protect the operating part 24 of the universal joint 21. In addition, the boot 1 is devised as follows since the peak 5 of the bellows 4 and the slope 7 located on the small diameter side thereof may come into contact with each other during the bending operation.

【0013】すなわち、図の例では、最も大径側に位置
する山部5とその小径側に位置する斜面部7とが互いに
強く接触するために、この最も大径側に位置する山部5
が接触する斜面部7に環状を呈する屈曲部8が設けられ
ており、この屈曲部8を設けた斜面部7が、屈曲部8を
境として互いに連続する外側斜面部分7aと内側斜面部
分7bとの組み合わせにより形成されており、なおかつ
当該ブーツ1の自由状態(図1の状態であって、すなわ
ち屈曲角度零の状態)における中心軸線0に対する外側
斜面部分7aの傾斜角度θが同中心軸線0に対する内
側傾斜部分7bの傾斜角度θよりも大きく設定され
て、断面く字形または略く字形に形成されている。外側
斜面部分7aの肉厚は全長に亙って均一であるが、内側
斜面部分7bの肉厚はその内側から外側にかけて、すな
わち屈曲部8に向けて徐々に増大するように形成されて
いる。また上記屈曲部8は、所定の長さを備えた斜面部
7において、山部5がちょうど接触する部分に設けられ
ている。
That is, in the example shown in the figure, the peak 5 located on the largest diameter side and the slope 7 located on the smaller diameter side come into strong contact with each other.
An inclined portion 8 having an annular shape is provided on the inclined portion 7 with which the outer inclined portion 7a and the inner inclined portion 7b are continuous with each other with the curved portion 8 as a boundary. It is formed by a combination of and, yet (a state of FIG. 1, i.e. the state of flexion zero) the free state of the boot 1 inclination angle theta 1 of the outer ramp portion 7a with respect to the central axis 0 at the same center axis 0 is set larger than the inclination angle theta 2 of the inner inclined portion 7b for, it is formed in cross-section rather shaped or substantially V-shape. The thickness of the outer slope portion 7a is uniform over the entire length, while the thickness of the inner slope portion 7b is formed so as to gradually increase from the inside to the outside, that is, toward the bent portion 8. The bent portion 8 is provided at a portion of the slope portion 7 having a predetermined length, where the peak portion 5 just contacts.

【0014】上記構成を備えたブーツ1は、例えばCV
Jブーツとして、自在継手21の作動部24の外周に装
着されてこの作動部24を被覆保護するものであるが、
上記したように山部5が接触する斜面部7に屈曲部8が
設けられており、しかもこの屈曲部8を設けた斜面部7
が、屈曲部8を境として互いに連続する外側斜面部分7
aと内側斜面部分7bとの組み合わせにより形成されて
おり、なおかつ当該ブーツ1の自由状態における中心軸
線0に対する外側斜面部分7aの傾斜角度θが同中心
軸線0に対する内側傾斜部分7bの傾斜角度θよりも
大きく設定されているために、図2に示すように、当該
ブーツ1が広角度に屈曲して山部5と斜面部7とが互い
に接触したときに円周上圧縮側において斜面部7がこの
屈曲部8においてスムーズに曲げられる。したがって、
発生する接触圧の大きさを小さく抑えることが可能とな
り、これにより摩耗の発生ないし進行を抑えて、当該ブ
ーツ1がこの摩耗により破損するのを防止することがで
きる。
The boot 1 having the above configuration is, for example, a CV
As a J boot, it is mounted on the outer periphery of the operating portion 24 of the universal joint 21 to cover and protect the operating portion 24.
As described above, the bent portion 8 is provided on the slope portion 7 with which the mountain portion 5 contacts, and the slope portion 7 provided with the bent portion 8 is provided.
Are outer slope portions 7 continuous with each other at the bent portion 8.
a and the inner slope portion 7b, and the inclination angle θ 1 of the outer slope portion 7a with respect to the center axis 0 in the free state of the boot 1 is the inclination angle θ of the inner slope portion 7b with respect to the center axis 0. 2 , the boot 1 is bent at a wide angle and the ridge 5 and the slope 7 contact each other as shown in FIG. 7 is smoothly bent at the bent portion 8. Therefore,
It is possible to suppress the magnitude of the generated contact pressure to a small value, thereby suppressing the occurrence or progress of abrasion and preventing the boot 1 from being damaged by the abrasion.

【0015】尚、上記実施例では、最も大径側に位置す
る山部5が接触する斜面部7のみに屈曲部8を設けた
が、同様の構成の屈曲部8を、小径側に位置する他の斜
面部7に併設するようにしても良い。
In the above-described embodiment, the bent portion 8 is provided only on the slope portion 7 where the peak portion 5 located on the largest diameter side contacts, but the bent portion 8 having the same configuration is located on the smaller diameter side. It may be provided alongside another slope 7.

【0016】[0016]

【発明の効果】本発明は、以下の効果を奏する。The present invention has the following effects.

【0017】すなわち先ず、上記構成を備えた本発明の
請求項1による自在継手用ブーツにおいては、屈曲作動
時に蛇腹部における山部とその小径側の斜面部とが互い
に接触する自在継手用のブーツにおいて、上記斜面部に
屈曲部が設けられているために、当該ブーツが広角度に
屈曲して山部と斜面部とが接触したときに円周上圧縮側
において斜面部が屈曲部においてスムーズに曲げられ
る。したがって、発生する接触圧の大きさを小さく抑え
ることが可能となり、これにより摩耗の発生ないし進行
を抑えて、当該ブーツが摩耗により破損するのを防止す
ることができ、その耐久性を向上させることができる。
また、このことにより低温ないし極低温雰囲気中でブー
ツを広角度で回転させた場合にも、スムーズな回転を得
ることができる。
First, in the universal joint boot according to the first aspect of the present invention having the above-mentioned structure, the boot for the universal joint in which the peak portion of the bellows portion and the slope portion on the small diameter side thereof come into contact with each other during the bending operation. In the above, since the bent portion is provided on the slope portion, when the boot is bent at a wide angle and the mountain portion and the slope portion come into contact with each other, the slope portion on the compression side on the circumference is smoothly formed at the bent portion. Bendable. Therefore, it is possible to reduce the magnitude of the generated contact pressure, thereby suppressing the occurrence or progress of abrasion, preventing the boot from being damaged by abrasion, and improving its durability. Can be.
Further, even when the boot is rotated at a wide angle in a low-temperature or very low-temperature atmosphere, a smooth rotation can be obtained.

【0018】また、上記構成を備えた本発明の請求項2
による自在継手用ブーツにおいては、屈曲作動時に蛇腹
部における山部とその小径側の斜面部とが互いに接触す
る自在継手用のブーツにおいて、上記斜面部に屈曲部が
設けられ、この斜面部が、屈曲部を境として互いに連続
する外側斜面部分と内側斜面部分との組み合わせよりな
るとともに、当該ブーツの自由状態における中心軸線に
対する外側斜面部分の傾斜角度が内側傾斜部分の傾斜角
度よりも大きく設定されているために、斜面部が特に曲
がり易く、当該ブーツが広角度に屈曲して山部と斜面部
とが接触したときに円周上圧縮側において斜面部が屈曲
部においてスムーズに曲げられる。したがって、発生す
る接触圧の大きさを小さく抑えることが可能となり、こ
れにより摩耗の発生ないし進行を抑えて、当該ブーツが
摩耗により破損するのを防止することができ、その耐久
性を向上させることができる。また上記請求項1の場合
と同様、このことにより低温ないし極低温雰囲気中でブ
ーツを広角度で回転させた場合にも、スムーズな回転を
得ることができる。
Further, the present invention has the above configuration.
In the universal joint boot according to the universal joint boots in which the peak portion in the bellows portion and the slope portion on the small diameter side thereof come into contact with each other at the time of the bending operation, a bent portion is provided on the slope portion, and the slope portion is The boot is composed of a combination of an outer slope portion and an inner slope portion that are continuous with each other with the bent portion as a boundary, and the inclination angle of the outer slope portion with respect to the center axis in the free state of the boot is set to be larger than the inclination angle of the inner slope portion. Therefore, the slope portion is particularly easily bent, and when the boot is bent at a wide angle and the hill portion and the slope portion come into contact with each other, the slope portion is smoothly bent at the bending portion on the compression side on the circumference. Therefore, it is possible to reduce the magnitude of the generated contact pressure, thereby suppressing the occurrence or progress of abrasion, preventing the boot from being damaged by abrasion, and improving its durability. Can be. Further, as in the case of the first aspect, even when the boot is rotated at a wide angle in a low or very low temperature atmosphere, a smooth rotation can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例に係る自在継手用ブーツの装着
状態を示す断面図
FIG. 1 is a sectional view showing a mounted state of a universal joint boot according to an embodiment of the present invention.

【図2】同自在継手用ブーツの作動状態を示す断面図FIG. 2 is a sectional view showing an operating state of the universal joint boot.

【図3】従来例に係る自在継手用ブーツの作動状態を示
す断面図
FIG. 3 is a sectional view showing an operating state of a boot for a universal joint according to a conventional example.

【符号の説明】[Explanation of symbols]

1 自在継手用ブーツ 2 小径側取付部 3 大径側取付部 4 蛇腹部 5 山部 6 谷部 7 斜面部 7a 外側斜面部分 7b 内側斜面部分 8 屈曲部 21 自在継手 22 軸部 23 外輪部 24 作動部 0 中心軸線 DESCRIPTION OF SYMBOLS 1 Boot for universal joint 2 Small diameter side attachment part 3 Large diameter side attachment part 4 Bellows part 5 Crest part 6 Valley part 7 Slope part 7a Outside slope part 7b Inside slope part 8 Bend part 21 Universal joint 22 Shaft part 23 Outer ring part 24 Operation Part 0 center axis

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 小径側取付部(2)と大径側取付部
(3)との間に蛇腹部(4)を有し、当該ブーツ(1)
の屈曲作動時に前記蛇腹部(4)における山部(5)と
その小径側に位置する斜面部(7)とが互いに接触する
ことのある自在継手用のブーツ(1)において、 前記山部(5)が接触する前記斜面部(7)に屈曲部
(8)を設けたことを特徴とする自在継手用ブーツ。
A boot (1) having a bellows portion (4) between a small diameter side mounting portion (2) and a large diameter side mounting portion (3).
In a boot (1) for a universal joint, a peak (5) of the bellows (4) and a slope (7) located on the small diameter side thereof may come into contact with each other at the time of bending operation of the bellows (4). A boot for a universal joint, characterized in that a bent portion (8) is provided on the slope portion (7) that makes contact with 5).
【請求項2】 請求項1の自在継手用ブーツにおいて、 屈曲部(8)を設けた斜面部(7)が、前記屈曲部
(8)を境として互いに連続する外側斜面部分(7a)
と内側斜面部分(7b)との組み合わせよりなるととも
に、当該ブーツ(1)の自由状態における中心軸線
(0)に対する前記外側斜面部分(7a)の傾斜角度
(θ)が前記内側傾斜部分(7b)の傾斜角度
(θ)よりも大きく設定されていることを特徴とする
自在継手用ブーツ。
2. The universal joint boot according to claim 1, wherein the slope portion (7) provided with the bent portion (8) is continuous with the outer slope portion (7a) at the bent portion (8).
And the inner slope portion (7b), and the inclination angle (θ 1 ) of the outer slope portion (7a) with respect to the center axis (0) in the free state of the boot ( 1 ) is the inner slope portion (7b). ) Is set to be larger than the inclination angle (θ 2 ) of the universal joint.
JP23370299A 1999-08-20 1999-08-20 Universal joint boot Pending JP2001059527A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23370299A JP2001059527A (en) 1999-08-20 1999-08-20 Universal joint boot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23370299A JP2001059527A (en) 1999-08-20 1999-08-20 Universal joint boot

Publications (1)

Publication Number Publication Date
JP2001059527A true JP2001059527A (en) 2001-03-06

Family

ID=16959217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23370299A Pending JP2001059527A (en) 1999-08-20 1999-08-20 Universal joint boot

Country Status (1)

Country Link
JP (1) JP2001059527A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11804365B2 (en) 2019-09-02 2023-10-31 Kokusai Electric Corporation Substrate processing apparatus, plasma generating apparatus, and method of manufacturing semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11804365B2 (en) 2019-09-02 2023-10-31 Kokusai Electric Corporation Substrate processing apparatus, plasma generating apparatus, and method of manufacturing semiconductor device

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