JP2001051208A - Observation device obtaining three-dimensional image of object to be inspected using microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate observation of the side part or the like of an object to be inspected by making two reflection mirrors individually rotatable, to observe the object to be inspected from directly above by rotating one reflection mirror to a specified position, to obtain the clear image of the object to be inspected by providing an optical filter and also to adjust the optical path and the light quantity of a light beam, with which the object to be inspected is illuminated so as to obtain clear image of the object to be inspected. SOLUTION: This device possesses a light source 32 to illuminate the object to be inspected 8, a first reflecting mirror 48 whose angle is variable and which receives the light beam reflected by the object 8 with a certain angle with an optical axis 42 of a microscope and a second reflection mirror 50 whose angle is variable and which is provided at position, including the optical axis 42 of the microscope and receives a light beam reflected by the first reflecting mirror 48 and guides the beam to the lens barrel of the microscope. Also, a filter is provided at an optical path adjusting part 33 between the light source 32 and the object 8, and the optical path and the light quantity of the light beams with which the object 8 is illuminated are adjusted to obtain the clear image of the object 8.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an observation apparatus for obtaining a three-dimensional image of a test object using a microscope.

[0002]

2. Description of the Related Art Inspections such as bonding failure of terminals of a semiconductor chip and soldering failure of an ultra-small electronic component are performed by using a microscope because the inspection object (inspection portion or inspection object) is minute. It is necessary to seek an enlarged image of.
However, accurate inspection is difficult only with a two-dimensional image of the inspection object obtained by simply enlarging with a microscope. In other words, accurate verification cannot be expected only from an image viewed from directly above the inspection object. For this reason, an observation device for obtaining a three-dimensional image of a fine inspection object using a microscope has been proposed.

A conventional observation apparatus for obtaining a three-dimensional image of an object to be inspected by using a microscope includes a light source for illuminating the object to be inspected, a light reflected from the object to be reflected, and reflected at an angle to the optical axis of the microscope. A first reflection mirror for receiving the light beam, and a second reflection mirror provided at a position including the optical axis of the microscope and receiving the light beam reflected by the first reflection mirror and guiding the light beam to the lens barrel of the microscope. are doing.

That is, the light beam obliquely reflected by the inspection object is reflected by the first reflecting mirror, and the reflected light beam is reflected by a second reflecting mirror.
The mirror is guided to the lens barrel of the microscope by a reflecting mirror, and a three-dimensional image of the inspection object is obtained.

[0005]

However, since the installation angles of the conventional first and second reflection mirrors are fixed, only light rays obliquely reflected at a predetermined angle on the inspection object are observed. . That is, there has been a problem that obliquely reflected light rays other than the predetermined angle cannot be guided to the lens barrel of the microscope. In order to solve this problem, a plurality of sets of first and second reflection mirrors (ie, mirror units) installed at different angles are prepared, and these mirror units are selected as necessary, and the observation unit is used. A complicated operation of inserting was required. Further, aligning a plurality of mirror units has disadvantages in terms of the cost of the entire apparatus and the storage space.

Further, a two-dimensional image of the object to be inspected viewed from directly above is also indispensable for the inspection. However, in the conventional observation apparatus, it is necessary to remove the mirror unit from the apparatus, and there is a problem in operation.

Further, an image obtained by enlarging a light beam reflected by the object to be inspected with a microscope is used as a charge coupled device camera (CCD).
In the case of photographing with a camera, etc., there is a problem that light from a light source is irregularly reflected on an inspection object and causes so-called halation. However, there is no proposal for the conventional three-dimensional image observation apparatus to solve this problem.

Further, in the above-mentioned conventional observation apparatus, the light source for illuminating the object to be inspected is a ring-shaped light source surrounding the periphery of the lens barrel of the microscope, as in the present application. However, since the optical path of the light beam from the light source is always constant, it is necessary to obtain images 種 々 of various inspected objects having different shapes. There was a problem that some parts caused halation and became unclear.

[0009]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve various problems of a conventional observation apparatus for obtaining a three-dimensional image of an object to be inspected using a microscope.

[0010]

According to the present invention, there is provided an observation apparatus comprising: a light source for illuminating an object to be inspected; A reflecting mirror provided at a position including the optical axis of the microscope, and a second angle-variable reflecting mirror that receives the light reflected by the first reflecting mirror and guides the light to the lens barrel of the microscope. I have.

The observation apparatus according to the present invention further comprises a light source for illuminating the object to be inspected; and a first reflecting mirror having a variable angle for receiving light reflected at an angle with the optical axis of the microscope on the object to be inspected. And a second reflecting mirror which is provided at a position including the optical axis of the microscope and receives the light reflected by the first reflecting mirror and guides the light to the lens barrel of the microscope.
The second variable reflection mirror of which the angle is variable includes the first and second reflection mirrors.
Can be displaced to a position where the inspection object can be directly observed without passing through the reflection mirror.

Further, the observation apparatus according to the present invention comprises a light source for illuminating the object to be inspected, and a first reflecting mirror having a variable angle for receiving the light reflected at an angle with the optical axis of the microscope on the object to be inspected. A second reflecting mirror provided at a position including the optical axis of the microscope and receiving light reflected by the first reflecting mirror and guiding the light to the lens barrel of the microscope; The optical filter provided between the light source and the second reflecting mirror whose angle is variable can be displaced to a position where the inspection object can be directly observed without passing through the first and second reflecting mirrors.

Further, the observation apparatus according to the present invention is characterized in that the inspection object has an angle-variable first reflection mirror that receives light reflected at an angle with the optical axis of the microscope, and a position including the optical axis of the microscope. A second reflecting mirror that receives light reflected by the first reflecting mirror and guides the light to the lens barrel of the microscope; and an optical filter that is provided between the inspection object and the light source. And an optical path changing means provided between the inspection object and the light source for changing an optical path of the light source, wherein the angle-variable second reflection mirror includes the first and second reflection mirrors. The inspection object can be displaced to a position where the inspection object can be directly observed without a mirror.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment according to the present invention will be described with reference to FIGS.

FIG. 1 is a view schematically showing an observation apparatus 4 to which the present invention is applied. The observation device 4 is a device that obtains a three-dimensional image of the inspection object using a microscope, but may be simply referred to as an observation device in this specification for the sake of simplicity.

A table 6 movable in the X-axis and Y-axis directions is provided below the observation device 4, and the inspection object 8 is placed on the table 6. The inspection object 8 is a microelectronic component, an IC chip, or the like.

A CCD camera 12 is provided above a microscope 10 which forms a part of the observation device 4, and a video signal output from the CCD camera 12 is sent to a monitor device (not shown) via a line 14. You. Barrel 11 of microscope 10
Are supported by the support portion 16. The support unit 16 has a vertical moving unit 18 that moves the entire observation device 4 in the vertical direction. By rotating the knob 20 of the moving section 18, the entire apparatus can be moved in the vertical direction. The support 16 is fixed to a suitable stationary part 22.

In FIG. 1, reference numeral 24 denotes a stop portion of the microscope, and reference numeral 26 denotes a zoom portion of the microscope. Since these parts are not directly related to the present invention, detailed description will be omitted.

In FIG. 1, what is directly related to the present invention is a reflected light selecting section 28 for selecting a light ray reflected by the inspection object 8 and guiding it to the microscope 10, a reflected light selecting section 28 and an optical path adjustment described later. A rotation driving unit 30 for rotating the unit 33 to an arbitrary position around the optical axis of the microscope, a ring-shaped light source 32 for illuminating the inspection object 8, and an optical path adjustment for adjusting the optical path of the light beam output from the light source 32 Part 33. Although not clear from FIG. 1, the ring-shaped light source 32 is attached so as to surround the periphery of the lower end of the microscope 10.
The light path adjusting unit 33 also includes a filter provided in the light path of the light beam output from the light source 32.

FIG. 2 is a diagram showing the details of the reflected light selecting section 28 and its peripheral portion. The rotation drive unit 30 (FIG. 1) can rotate the reflected light selection unit 28 and the optical path adjustment unit 33 with a filter through the rotation bearing 40 by 360 degrees about the optical axis 42 of the microscope. Reference numeral 44 denotes a field of view of the microscope, and reference numeral 11 denotes a part of the lens barrel of the microscope 10.

The ring-shaped light source 32 is provided with an optical axis 42 of the microscope.
The object 8 is illuminated at an angle to (ie, the object is illuminated obliquely from above).

The reflected light selecting section 28 has two reflecting mirrors 48 and 50. In the claims, the reflection mirrors 48 and 50 are first and second reflection mirrors, respectively.

The reflection mirror 48 rotates about the fulcrum 52, and converts the light reflected by the inspection object 8 from an incident angle of about 30 degrees to 4 degrees.
The light is received at 5 degrees and reflected in the direction of the reflection mirror 50. In other words, the reflecting surface of the reflecting mirror 48 is installed at an angle α (variable) shown with respect to the optical axis 42 of the microscope, and this angle α changes from 45 degrees to about 30 degrees. Reflection mirror 4
8, the rotation angle is adjusted by angle adjusting means (not shown) for adjusting the mirror rotation angle α. In this rotation angle adjustment, the reflection mirror 48 may be adjusted (changed) by a predetermined angle (for example, 0.5 degree or 1 degree) by one angle adjustment, or the angle may be continuously adjusted. May be. It should be noted that the predetermined angles described above (about 30-45 degrees) are merely exemplary. Since the angle adjusting means itself can be realized by a simple configuration, a detailed description is omitted.

The reflection mirror 50 is rotatable about a fulcrum 54 in the range of 45 degrees to 0 degrees with respect to the optical axis 42 of the microscope. If described using the above-mentioned angle α with the optical axis 42, the reflection mirror 50 can rotate around the fulcrum 54 in the range of 45 ° to 0 °.
That is, the reflection mirror 50 is positioned at 0 ° with respect to the optical axis 42 of the microscope.
When the degree position (α = 0) is reached (that is, when the reflection surface of the mirror 50 is parallel to the optical axis), the inspection object 8 can be observed from directly above. This is shown in FIG. As in the case of the reflection mirror 48, the rotation angle of the reflection mirror 50 is adjusted by angle adjusting means (not shown) for adjusting the mirror rotation angle. As in the case described above, the rotation angle may be adjusted (changed) by a predetermined angle (for example, 0.5 degrees or 1 degree) by one angle adjustment, or may be continuously adjusted. The angle may be adjusted at the same time. Note that the range of angle changes described above is merely exemplary.

The mirror rotation angle adjustment described above may be performed manually, or a motor may be used to control the drive of the motor to adjust the angle.

By appropriately adjusting both the angles of the reflection mirrors 48 and 50, the reflected light from the side of the inspection object can be observed. For example, the incident angle of the reflection mirror 48 is set to 30
If the incident angle at the reflection mirror 50 is 45 degrees (for example, in the case of a reflected light ray shown by a solid line in FIG. 2), 30 degrees with respect to the optical axis 42 in the reflected light from the inspection object 8 Can be guided to the microscope. Further, if the angle of incidence of the reflecting mirror 48 is set to 30 degrees and the angle of incidence at the reflecting mirror 50 is increased by about 5 degrees from 45 degrees to about 50 degrees (that is, α = 40 degrees), Among the reflected light, light reflected at 35 degrees with respect to the optical axis 42 can be guided to the microscope (for example, in the case of the reflected light indicated by a broken line in FIG. 2). That is, the reflecting mirrors 48 and 50 are respectively
From 45 degrees (α = 45 degrees) to 2 degrees and β degrees and γ
If the position is rotated clockwise (on the drawing) every time,
In the reflected light from the inspection object 8, (β +
Light rays reflected at γ) degrees can be directed to a microscope. Of course, the condition that the light beam from the inspection object 8 can be captured by the mirrors 48 and 50 must be satisfied.

As described above, by appropriately adjusting both the angles of the reflecting mirrors 48 and 50, the reflected light from the side of the inspection object can be observed, and the reflecting mirror 50 becomes parallel to the optical axis 42. (Shown in FIG. 3)
The inspected object can be observed from directly above.

In FIG. 2, the position of the inspection object 8 in the case of the light beam indicated by the solid line is moving upward (indicated by 8 ') in the case of the light beam indicated by the broken line. However, actually, the position of the inspection object 8 does not change, and the observation device 4 is lowered. This is because the optical path length of the light beam that changes according to the rotation of the reflection mirrors 48 and 50 is adjusted to the focal length of the microscope by moving the observation device 4 up and down.

As described above, the observation device 4 can obtain an image of a portion of the inspection object 8 that is not perpendicular to the optical axis of the microscope. That is, since a three-dimensional image of the inspection object 8 can be obtained, it is necessary to obtain not only the side surface of the end portion of the inspection object 8 but also the image of the concave portion or the convex portion existing in the upper flat portion of the inspection object 8. I can do it.

The optical path adjusting unit 33 will be described with reference to FIGS.

An optical path adjusting unit 3 of which a specific example will be described in this specification
Reference numeral 3 uses a thin disk-shaped part 60 shown in FIG. 4 and two parts (referred to as 60 ′ and 60 ″) having the same configuration as this part, that is, a total of three disk-shaped parts. The hole 61 at the center of the disc-shaped part 60 shown in FIG. 4 is such that the center of the hole 61 and the optical axis 42 of the microscope coincide with each other, and the size of the field of view 44 of the microscope can be accommodated. An optical filter is provided on all or a part of the fan-shaped windows (or openings) 62a to 62d, for example, various filters such as a polarizing plate and a light diffusing plate. A clear image of the inspected object can be obtained, and the intermediate portions (shown by 64a to 64d) of the adjacent windows (62a to 62d) are portions that block light from the light source 33.

The disk-shaped part shown in FIG. 4 does not necessarily have to be a disk, but may have an oval or polygonal shape (outer shape) if windows 62a to 62d can be provided.

The installation of the optical filter will be described in more detail. For example, four fan-shaped windows 62 of a disc-shaped part 62
The same filter may be provided for all of a to 62d, or a filter having different characteristics may be provided for each of the four windows 62a to 62d. Furthermore, four windows (62a to 62d, corresponding to 62a to 62d,
a ′ to 62d ′) may be provided with the same or different filters, or may be entirely or partially transparent. Furthermore, the same or different filters may be provided in the four windows of the third disc-shaped part 62 ″ (62a ″ to 62d ″, corresponding to 62a to 62d).
Alternatively, all or a part may be transparent. In other words, the selection of the window provided with the filter, the selection of the filter itself, etc.
This is performed in consideration of various conditions such as the type of an imaging device of an imaging device (such as a CCD camera) and the type of a light beam emitted from a light source.

If three disk parts 60 of FIG. 4 and parts 60 'and 60 "having the same configuration are used in a stacked state, and three disk parts 62, 62' and 62" are shifted by 30 degrees and stacked one upon another, As shown in FIG. In this case, the light from the ring-shaped light source 32 is completely blocked (although such a use example is of course not considered).

FIG. 6 shows the above-mentioned three stacked disc parts 62,
A state is shown in which the part 62 'of 62' and 62 "is shifted clockwise by 30 degrees. In this case, the window indicated by the hatched portion is opened.

FIG. 7 shows the above-described three stacked disk components 62,
A state in which two disk-shaped parts 62 'and 62 "of 62' and 62" are shifted clockwise by 60 degrees and 30 degrees, respectively, is shown. In this case, the window indicated by the hatched portion is opened.

In the above case, the disc-shaped part 62 'and / or
Or 62 "is rotated to open the window, but the other disc-shaped parts 62 can be similarly rotated to open the window. Further, in this embodiment, four windows are opened at the same time. When the largest window is opened, the angle of the window at the center of the disk is 60 degrees, but the size of each of the four windows is in the range of 0 to 60 degrees in the angle at the center of the disk. You can decide freely.

A plurality of disc components 62, 62 'and 62 "
The adjustment of the respective rotational positions may be performed by manually turning the outer edge of the disk, or a known adjusting mechanism including a motor may be used.

In the above embodiment, three disk parts 60, 6
Although 0 ′ and 60 ″ are prepared, the present invention is not limited to this number. For example, two or four or more disk components similar to the disk component 60 may be used. The location where the blocking portion is provided is apparent from the above description.

As described above, the present invention provides a number of features,
That is, each of the two reflection mirrors can be rotated.
The method includes: photographing the inspection object from directly above with the reflection mirrors being parallel to the optical axis; illuminating the inspection object with a filter; and controlling the amount and location of light rays from the light source. Each of these features can be used independently, or a combination of the above features can be used.

[0041]

As described above, according to the present invention,
Since each of the two reflecting mirrors is rotatable, when observing the side of the object to be inspected, it is possible to avoid the trouble of exchanging a unit including two reflecting mirrors whose installation angles are fixed. Furthermore, since one reflection mirror can be made parallel to the optical axis of the microscope, it is not necessary to perform a troublesome operation of removing the reflection mirror unit as in the related art. Further, according to the present invention, the object to be inspected is illuminated through the filter, so that a clear image can be obtained.
Furthermore, since the amount and location of the light beam from the light source can be controlled, there is an effect that a so-called halation of an image can be prevented and a clear image can be obtained.

[Brief description of the drawings]

FIG. 1 is a diagram showing an entire observation apparatus according to the present invention.

FIG. 2 is a diagram showing in detail a reflected light selecting unit, an optical path adjusting unit with a filter, and the like, which are directly related to the present invention.

FIG. 3 is a diagram showing a state in which an object to be inspected is observed from directly above in a reflected light selecting unit shown in FIG. 2;

FIG. 4 is a diagram showing one component of an optical path adjusting unit with a filter according to the present invention.

FIG. 5 is a diagram illustrating an optical path adjustment unit with a filter according to the present invention.

FIG. 6 is a diagram illustrating an optical path adjusting unit with a filter according to the present invention.

FIG. 7 is a diagram illustrating an optical path adjustment unit with a filter according to the present invention.

[Description of Issue]

4: Observation device for obtaining a three-dimensional image of the inspection object using a microscope 6: Table on which the inspection object is mounted and movable in the X-axis and Y-axis directions 8: Object to be inspected 10: Microscope 12: CCD camera 16: Supporting portion for supporting the observation device 18: Vertical movement mechanism of the observation device 28: Reflected light selecting portion 30: Rotation driving portion for rotating the reflected light selecting portion and the like about the optical axis of the microscope 32: Ring-shaped light source 33: Filter 42: Optical axis of microscope 44: Field of view of microscope 48: First reflecting mirror 50: Second reflecting mirror 60, 60 ′ and 60 ″: One component constituting optical path adjusting unit 62a to 62d : Fan-shaped window (opening) in which a filter can be provided 64a to 64d: Light transmission window of component 60 64a 'to 64d': Light transmission window of component 60 '64a "to 64d": Component 60 Light transmittance window of

Claims (11)

[Claims] 1. A light source for illuminating an object to be inspected, a first reflecting mirror having a variable angle for receiving light reflected at an angle with the optical axis of the microscope on the object to be inspected, and an optical axis of the microscope A second reflecting mirror, which is provided at a position and receives light reflected by the first reflecting mirror and guides the light to the lens barrel of the microscope; and a three-dimensional image of the inspection object using the microscope having: Observation device to get. 2. The microscope according to claim 1, wherein said second reflecting mirror having a variable angle is displaceable to a position where said object to be inspected can be directly observed without passing through said first and second reflecting mirrors. Observation device that obtains a three-dimensional image of an object to be inspected using a computer. 3. An observation apparatus for obtaining a three-dimensional image of an inspection object using a microscope according to claim 1, further comprising an optical filter provided between the inspection object and the light source. 4. An object to be inspected using a microscope according to claim 1, further comprising an optical path changing means provided between the object to be inspected and the light source and changing an optical path of the light source. Observation device for obtaining a three-dimensional image. 5. An inspection object using a microscope according to claim 1, further comprising a camera that reflects the second reflection mirror and obtains a three-dimensional image of the inspection object magnified by the microscope. Observation device for obtaining a three-dimensional image. 6. A light source using a microscope according to claim 1, wherein said light source is a ring-shaped light source for illuminating said inspection object at an angle with respect to an optical axis of said microscope. An observation device that obtains a three-dimensional image of an inspection object. 7. A light source for illuminating an object to be inspected, 8. An angle-variable first reflecting mirror for receiving a light beam reflected at an angle to the optical axis of the microscope on the object to be inspected, and a first mirror provided at a position including the optical axis of the microscope. An angle-variable second reflection mirror that receives the light reflected by the reflection mirror and guides the light to the lens barrel of the microscope, wherein the angle-variable second reflection mirror includes the first and second angles.
Of a test object using a microscope, which can be displaced to a position where the test object can be directly observed without passing through a reflecting mirror
An observation device that obtains a two-dimensional image. 9. An observation apparatus for obtaining a three-dimensional image of an inspection object using a microscope according to claim 7, further comprising an optical filter provided between the inspection object and the light source. 9. A three-dimensional image of an inspected object using a microscope according to claim 7, further comprising an optical path changing means provided between the inspected object and the light source for changing an optical path of the light source. Observation device to obtain. 10. A light source for illuminating an object to be inspected, a first reflecting mirror whose angle is variable with respect to an optical axis of the microscope at the object to receive light reflected at an angle, and an optical axis of the microscope A second reflecting mirror that is provided at a position and receives light reflected by the first reflecting mirror and guides the light to the lens barrel of the microscope; and a light provided between the inspection object and the light source. The filter and the second reflecting mirror whose angle is variable include the first and second reflecting mirrors.
Of a test object using a microscope, which can be displaced to a position where the test object can be directly observed without passing through a reflecting mirror
An observation device that obtains a two-dimensional image. 11. A light source for illuminating an object to be inspected, a first reflecting mirror whose angle is variable with respect to the optical axis of the microscope at the object to receive light reflected at an angle, and an optical axis of the microscope A second reflecting mirror that is provided at a position and receives light reflected by the first reflecting mirror and guides the light to the lens barrel of the microscope; and a light provided between the inspection object and the light source. A filter provided between the inspection object and the light source; and an optical path changing unit configured to change an optical path of the light source.
Of a test object using a microscope, which can be displaced to a position where the test object can be directly observed without passing through a reflecting mirror
An observation device that obtains a two-dimensional image.