JP2001048669A - Joined body of metal-ceramics composite material and ceramic, and method for joining the same - Google Patents
Joined body of metal-ceramics composite material and ceramic, and method for joining the sameInfo
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- JP2001048669A JP2001048669A JP11230736A JP23073699A JP2001048669A JP 2001048669 A JP2001048669 A JP 2001048669A JP 11230736 A JP11230736 A JP 11230736A JP 23073699 A JP23073699 A JP 23073699A JP 2001048669 A JP2001048669 A JP 2001048669A
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- ceramic
- composite material
- alloy
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、材料と材料とを接
合した接合体及びその接合方法に関し、特に一方の材料
がＡｌ合金をマトリックスとする金属−セラミックス複
合材料で、もう一方がセラミックスである接合体及びそ
の接合方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a joined body in which materials are joined to each other and a joining method thereof, and in particular, one of the materials is a metal-ceramic composite material using an Al alloy as a matrix, and the other is ceramics. The present invention relates to a joined body and a joining method thereof.
【０００２】[0002]
【従来の技術】Ａｌ合金をマトリックスとする金属−セ
ラミックス複合材料は、軽量、高剛性を特徴として産業
機械などに利用が進んでいる。その複合材料の接合につ
いては、複合材料が新規な材料であるため、報告例がほ
とんどない。2. Description of the Related Art Metal-ceramic composite materials using an Al alloy as a matrix are characterized by their light weight and high rigidity, and are increasingly used in industrial machines and the like. There are few reports on the joining of the composite materials because the composite materials are new materials.
【０００３】それに比べて従来から接合の実績のあるセ
ラミックスでは、セラミックスとセラミックス、あるい
はセラミックスと金属とを接合した接合体が機械部品、
電子部品等に以前から利用されている。このセラミック
スの接合技術については、主としてセラミックス表面に
メタライズを施した後、そのメタライズ面をろう材を介
してろう付けする方法、あるいはメタライズしないでセ
ラミックス表面同士を直接Ｔｉなどの活性な金属を含む
ろう材を介してろう付けする方法で接合することが知ら
れている。On the other hand, in ceramics that have been used in the past, ceramics and ceramics, or ceramics and metal bonded bodies are used as mechanical parts,
It has been used for electronic parts and the like for some time. Regarding this ceramic joining technique, a method of mainly metallizing the ceramic surface and then brazing the metallized surface via a brazing material, or directly bonding the ceramic surfaces without metallizing to an active metal such as Ti It is known to join by brazing through a material.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、これら
の方法を用いて複合材料を接合してみても、セラミック
スと同じように接合することは難しかった。それは、セ
ラミックス表面にメタライズを施す方法では、ろう付け
が８００℃付近で行われるため、それより融点の低いＡ
ｌ合金をマトリックスとしている複合材料では変形して
しまうという問題であるためである。However, even if composite materials are joined using these methods, it is difficult to join them in the same manner as ceramics. In the method of metallizing the ceramic surface, since brazing is performed at around 800 ° C., A having a lower melting point than that of A is used.
This is because there is a problem that the composite material using the alloy 1 as a matrix is deformed.
【０００５】一方の活性金属によるろう付けにおいて
も、ろう付け温度が通常８００℃以上を必要とするの
で、これも同様それより融点の低いＡｌ合金をマトリッ
クスとしている複合材料では変形してしまうこととな
る。[0005] On the other hand, brazing with an active metal also requires a brazing temperature of usually 800 ° C or higher, which also causes deformation in a composite material having an Al alloy having a lower melting point as a matrix. Become.
【０００６】また、セラミックスとＡｌ合金とを高圧を
かけて接合することも提案されているが、この方法では
温度には問題ないもののさまざまな形態を有する製品に
適応することが難しく、生産性に乏しい技術となってい
る。[0006] It has also been proposed to join ceramics and an Al alloy by applying high pressure. However, this method has no problem with temperature, but it is difficult to apply the method to products having various forms, and it is difficult to improve productivity. It is a scarce technology.
【０００７】本発明は、上述した金属−セラミックス複
合材料の接合が有する課題に鑑みなされたものであっ
て、その目的は、金属−セラミックス複合材料とセラミ
ックスとを強固にしかも圧力をかけることなく容易に接
合することのできる接合体を提供し、その接合方法をも
提供することにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the joining of a metal-ceramic composite material, and has as its object to easily and strongly apply a pressure to a metal-ceramic composite material without applying pressure. It is another object of the present invention to provide a joined body that can be joined to an object and a joining method thereof.
【０００８】[0008]
【課題を解決するための手段】本発明者等は、上記目的
を達成するため鋭意研究した結果、ろう材中にＭｇを含
ませれば、あるいは複合材料中のマトリックス中にＭｇ
を含ませれば、複合材料とセラミックスとをろう材を介
して圧力をかけることなく強固に接合することができる
との知見を得て本発明を完成するに至った。Means for Solving the Problems The inventors of the present invention have conducted intensive studies to achieve the above object, and as a result, if Mg is contained in the brazing material, or if Mg is contained in the matrix of the composite material,
The present inventors have found that the composite material and the ceramic can be firmly joined to each other via the brazing material without applying pressure through the brazing material, thereby completing the present invention.
【０００９】即ち本発明は、（１）Ａｌ合金をマトリッ
クスとする金属−セラミックス複合材料とセラミックス
とが、Ｍｇを含むＡｌ合金からなるろう材を介して接合
されていることを特徴とする金属−セラミックス複合材
料とセラミックスとの接合体（請求項１）とし、（２）
前記ろう材中のＭｇの含有量が、０．１〜５％であるこ
とを特徴とする請求項１記載の金属−セラミックス複合
材料とセラミックスとの接合体（請求項２）とし、
（３）Ｍｇを含むＡｌ合金をマトリックスとする金属−
セラミックス複合材料とセラミックスとが、Ａｌ合金か
らなるろう材を介して接合されていることを特徴とする
金属−セラミックス複合材料とセラミックスとの接合体
（請求項３）とし、（４）前記マトリックスであるＡｌ
合金中のＭｇの含有量が、０．３％以上であることを特
徴とする請求項３記載の金属−セラミックス複合材料と
セラミックスとの接合体（請求項４）とし、（５）Ａｌ
合金をマトリックスとする金属−セラミックス複合材料
とセラミックスとの間にＭｇを含むＡｌ合金からなるろ
う材を装填し、それを窒素雰囲気中で加熱処理すること
を特徴とする金属−セラミックス複合材料とセラミック
スとの接合方法（請求項５）とし、（６）前記ろう材中
のＭｇの含有量が、０．１〜５％であることを特徴とす
る請求項５記載の金属−セラミックス複合材料とセラミ
ックスとの接合方法（請求項６）とし、（７）Ｍｇを含
むＡｌ合金をマトリックスとする金属−セラミックス複
合材料とセラミックスとの間にＡｌ合金からなる粉末状
のろう材を装填し、それを窒素雰囲気中で加熱処理する
ことを特徴とする金属−セラミックス複合材料とセラミ
ックスとの接合方法（請求項７）とし、（８）前記マト
リックスであるＡｌ合金中のＭｇの含有量が、０．３％
以上であることを特徴とする請求項７記載の金属−セラ
ミックス複合材料とセラミックスとの接合方法（請求項
８）とすることを要旨とする。以下さらに詳細に説明す
る。That is, the present invention provides (1) a metal-ceramic composite material in which an Al alloy is used as a matrix and ceramics are joined via a brazing material made of an Al alloy containing Mg. (2) a joined body of the ceramic composite material and the ceramic (claim 1);
The metal-ceramic composite material and ceramic joined body according to claim 1, wherein the content of Mg in the brazing material is 0.1 to 5%,
(3) Metal having Al alloy containing Mg as matrix
(4) The ceramic composite material and the ceramic are joined via a brazing material made of an Al alloy, wherein the metal-ceramic composite material and the ceramic are joined together (Claim 3). Some Al
4. A joined body of the metal-ceramic composite material and the ceramic according to claim 3, wherein the content of Mg in the alloy is 0.3% or more (claim 4).
A metal-ceramic composite material and ceramics, wherein a brazing material made of an Al alloy containing Mg is loaded between a ceramic and a metal-ceramic composite material having an alloy as a matrix, and heated in a nitrogen atmosphere. The metal-ceramic composite material and the ceramic according to claim 5, wherein the content of Mg in the brazing material is 0.1 to 5%. (7) A powdered brazing material made of an Al alloy is loaded between a ceramic and a metal-ceramic composite material having an Al alloy containing Mg as a matrix. (7) A method for joining a metal-ceramic composite material and ceramics, wherein the method is a heat treatment in an atmosphere. The content of Mg in the alloy is 0.3%
The gist of the present invention is a bonding method of a metal-ceramic composite material and ceramics according to claim 7. This will be described in more detail below.
【００１０】上記で述べたように本発明の金属−セラミ
ックス複合材料とセラミックスとの接合体としては、Ｍ
ｇを含むＡｌ合金からなるろう材を介して接合されてい
ることとする金属−セラミックス複合材料とセラミック
スとの接合体とした（請求項１）。[0010] As described above, the bonded body of the metal-ceramic composite material of the present invention and the ceramic is made of M
A joined body of a metal-ceramic composite material and ceramics, which is to be joined via a brazing material made of an Al alloy containing g (claim 1).
【００１１】ろう材としてＭｇを含むＡｌ合金を用いた
のは、複合材料中の金属がＡｌ合金であることと、ろう
材中にＭｇを含ませれば、後述するように窒素雰囲気中
で加熱処理すると、４５０℃付近からＭｇが蒸発してＭ
ｇ3Ｎ2が生成され、このＭｇ 3Ｎ2がセラミックス表面に
付着し、これにろう材中の溶融したＡｌ合金が接すると
ＡｌＮが生成され、この反応を通じて溶融したＡｌ合金
がセラミックスに濡れることになり、その結果、複合材
料とセラミックスとがろう材を介して強固に接合される
ようになるからである。この反応はＭｇ3Ｎ2の生成量が
微量でも効果がある。An Al alloy containing Mg was used as a brazing material.
The reason is that the metal in the composite material is an Al alloy,
If Mg is included in the material, it will be used in a nitrogen atmosphere as described later.
, The Mg evaporates from around 450 ° C.
gThreeNTwoIs generated, and this Mg ThreeNTwoIs on the ceramic surface
When the molten Al alloy in the brazing material comes into contact with
AlN is produced and melted through this reaction.
Becomes wet with ceramics, and as a result, the composite material
Material and ceramics are firmly joined via brazing material
That is because This reaction is MgThreeNTwoGeneration amount
Even small amounts are effective.
【００１２】その接合方法としては、Ａｌ合金をマトリ
ックスとする金属−セラミックス複合材料とセラミック
スとの間にＭｇを含むＡｌ合金からなるろう材を装填
し、それを窒素雰囲気中で加熱処理することとする金属
−セラミックス複合材料とセラミックスとの接合方法と
した（請求項５）。As a joining method, a brazing material made of an Al alloy containing Mg is loaded between a ceramic and a metal-ceramic composite material having an Al alloy as a matrix, and heat-treated in a nitrogen atmosphere. (Claim 5).
【００１３】この方法は、窒素雰囲気中で加熱処理する
ことが必須であり、窒素雰囲気中でないとＭｇ3Ｎ2が生
成せず、接合強度が大きく低下する。ろう材の装填は、
どんな状態でもよく例えば箔状でもよいし粉末状でもよ
い。その接合温度は、マトリックスの融点以下であれば
よく、６００℃以下の温度で非加圧で接合可能である。
なお、この場合、ろう材中にＭｇを含ませたろう材を用
いているので、複合材料中のマトリックス中にはＭｇを
含ませなくてもよいが、含ませても勿論構わない。In this method, it is essential to perform a heat treatment in a nitrogen atmosphere. If the heat treatment is not performed in a nitrogen atmosphere, Mg 3 N 2 is not generated, and the bonding strength is greatly reduced. The loading of brazing material
It may be in any state, for example, a foil form or a powder form. The bonding temperature may be lower than the melting point of the matrix, and bonding can be performed at a temperature of 600 ° C. or lower without applying pressure.
In this case, since the brazing material containing Mg is used in the brazing material, Mg may not be contained in the matrix of the composite material, but may be contained.
【００１４】そのＭｇの含有量としては、０．１〜５％
とした（請求項２、６）。０．１％より少ないとＭｇの
効果が低下して接合強度が落ち、また逆に５％より多く
てもろう材中の合金が硬くなって脆くなるので接合強度
が落ちる。The Mg content is 0.1 to 5%
(Claims 2 and 6). If it is less than 0.1%, the effect of Mg decreases and the bonding strength decreases. Conversely, if it exceeds 5%, the alloy in the brazing material becomes hard and brittle, so that the bonding strength decreases.
【００１５】前記とは異なる別の接合体としては、Ｍｇ
を含むＡｌ合金をマトリックスとする金属−セラミック
ス複合材料とセラミックスとが、Ａｌ合金からなるろう
材を介して接合されていることとする金属−セラミック
ス複合材料とセラミックスとの接合体とした（請求項
３）。As another bonded body different from the above, Mg
A metal-ceramic composite material having an Al alloy containing aluminum as a matrix and ceramics are joined via a brazing material made of an Al alloy to form a joined body of the metal-ceramic composite material and ceramics. 3).
【００１６】この接合体は、ろう材中にＭｇを含ませた
ものではなく、複合材料中のマトリックス中に含ませた
ものである。ろう材中にＭｇを含ませなくとも、マトリ
ックス中に含ませれば、そのＭｇが蒸発し、ろう材中に
Ｍｇを含んだものと同じようになり、先記したと同様に
強固に接合されるようになる。This joined body does not contain Mg in the brazing material, but contains it in the matrix of the composite material. Even if Mg is not contained in the brazing material, if it is contained in the matrix, the Mg evaporates and becomes the same as that containing Mg in the brazing material, and is joined firmly as described above. Become like
【００１７】その接合方法としては、Ｍｇを含むＡｌ合
金をマトリックスとする金属−セラミックス複合材料と
セラミックスとの間にＡｌ合金からなる粉末状のろう材
を装填し、それを窒素雰囲気中で加熱処理することを特
徴とする金属−セラミックス複合材料とセラミックスと
の接合方法とした（請求項７）。As a joining method, a powdery brazing material made of an Al alloy is charged between a ceramic and a metal-ceramic composite material having an Al alloy containing Mg as a matrix, and is heated in a nitrogen atmosphere. The present invention provides a method for joining a metal-ceramic composite material and ceramics.
【００１８】この方法も先記したと同様、窒素雰囲気中
で加熱処理することが必須であり、窒素雰囲気中でない
とＭｇ3Ｎ2が生成せず、接合強度が大きく低下する。ろ
う材の装填は、ろう材中にＭｇを含ませたものとは異な
り、Ｍｇの蒸気がセラミックス表面に達しやすいように
粉末状のものが好ましい。その接合温度は、これもマト
リックスの融点以下であればよく、６００℃以下の温度
で非加圧で接合可能である。なお、この場合、先記した
と同様マトリックス中にＭｇを含ませているので、ろう
材中にＭｇを含ませなくてもよいが、含ませても勿論構
わない。In this method, similarly to the above, it is essential to perform the heat treatment in a nitrogen atmosphere. If the heat treatment is not performed in a nitrogen atmosphere, Mg 3 N 2 is not generated, and the bonding strength is greatly reduced. The loading of the brazing material is different from that in which Mg is contained in the brazing material, and is preferably in the form of powder so that the vapor of Mg easily reaches the ceramic surface. The bonding temperature may be lower than the melting point of the matrix, and the bonding can be performed at a temperature of 600 ° C. or lower without applying pressure. In this case, as in the case described above, Mg is contained in the matrix, so that it is not necessary to include Mg in the brazing material, but it is of course possible to do so.
【００１９】そのＭｇの含有量としては、０．３％以上
とした（請求項４、８）。マトリックス中に含ませる場
合には、相手方のセラミックスと距離があるので０．３
％より少ないとＭｇの効果が低下して接合強度が落ち
る。多い分には接合には差し支えないが、１０％より多
くなるとＭｇのろう材への拡散が増え、ろう材が脆くな
る。The content of Mg is set to 0.3% or more (claims 4 and 8). When including it in the matrix, it is 0.3
%, The effect of Mg is reduced and the bonding strength is reduced. If it is more than 10%, the diffusion of Mg into the brazing material increases, and the brazing material becomes brittle.
【００２０】[0020]
【発明の実施の形態】本発明の接合方法を述べると、先
ずＡｌ合金をマトリックスとする金属−セラミックス複
合材料とそれに接合すべきセラミックスとを用意する。
これとは別にＭｇを０．１〜５％含んだＡｌ合金からな
るろう材も用意する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The joining method of the present invention will be described. First, a metal-ceramic composite material using an Al alloy as a matrix and a ceramic to be joined thereto are prepared.
Separately, a brazing material made of an Al alloy containing 0.1 to 5% of Mg is also prepared.
【００２１】この用意したろう材を同じく用意した金属
−セラミックス複合材料とセラミックスとの間の接合面
に箔状あるいは粉末状などで装填する。これを窒素雰囲
気中で所定温度で熱処理して接合する。The prepared brazing material is loaded in the form of foil or powder on the joint surface between the metal-ceramic composite material and ceramic prepared in the same manner. This is heat-treated at a predetermined temperature in a nitrogen atmosphere for bonding.
【００２２】複合材料中のマトリックス中にＭｇを含ま
せる場合には、０．３％以上のＭｇを含んだＡｌ合金を
マトリックスとする金属−セラミックス複合材料と接合
すべきセラミックス及びＡｌ合金からなる粉末状のろう
材を用意し、これらの用意した材料を用いて同様に接合
する。When Mg is contained in the matrix of the composite material, a powder comprising ceramics and an Al alloy to be joined to a metal-ceramic composite material having an Al alloy containing 0.3% or more of Mg as a matrix A brazing filler metal is prepared and joined in the same manner using these prepared materials.
【００２３】以上の方法で金属−セラミックス複合材料
とセラミックスとを接合すれば、強固にしかも圧力をか
けることなく容易に接合することのできる接合方法とす
ることができる。If the metal-ceramic composite material and the ceramic are joined by the above method, a joining method that can be joined firmly and easily without applying pressure can be obtained.
【００２４】[0024]
【実施例】以下、本発明の実施例を比較例と共に具体的
に挙げ、本発明をより詳細に説明する。EXAMPLES Hereinafter, the present invention will be described in more detail with reference to Examples of the present invention and Comparative Examples.
【００２５】（実施例１〜９） （１）接合体の作製 金属−セラミックス複合材料（ＭＭＣ）としてセランク
ス（株）社が製造した表１に示すＭＭＣを、セラミック
スとして（株）日本セラテックが製造した表１に示すセ
ラミックスを用意し、それらからそれぞれ５０×５０×
２０ｍｍの試料を切り出し、接合する面を研削加工して
用いた。なお、ＭＭＣのＰＳ１７０は、ＳｉＣ粉末７０
ｖｏｌ％＋ＡＣ８Ａ（ＪＩＳ Ｒ５２０２に規定するＭ
ｇを約１％含むＡｌ合金）３０ｖｏｌ％であり、ＰＳ１
７０*は、ＳｉＣ粉末７０ｖｏｌ％＋ＡＣ４Ａ（ＪＩＳ
Ｒ５２０２に規定するＭｇを約０．５％含むＡｌ合
金）３０ｖｏｌ％であり、ＰＡＬ６０は、Ａｌ2Ｏ3粉末
６０ｖｏｌ％＋（Ａｌ−２Ｍｇ）４０ｖｏｌ％である。
また、セラミックスのアルミナは純度が９９．５％のも
のである。(Examples 1 to 9) (1) Production of bonded body MMC shown in Table 1 manufactured by Selanx Corporation as a metal-ceramic composite material (MMC) was manufactured by Nippon Ceratech Co., Ltd. as ceramics. The ceramics shown in Table 1 were prepared, and 50 × 50 ×
A 20 mm sample was cut out and the surface to be joined was ground and used. The MMC PS 170 is a SiC powder 70
vol% + AC8A (M specified in JIS R5202
g) (Al alloy containing about 1%).
70 * is SiC powder 70 vol% + AC4A (JIS
Al alloy containing about 0.5% Mg specified in R5202) is 30 vol%, and PAL60 is Al 2 O 3 powder 60 vol% + (Al-2Mg) 40 vol%.
The alumina of the ceramic has a purity of 99.5%.
【００２６】ろう材は表１の配合になるよう金属を混合
し、黒鉛坩堝中で６５０℃で溶解し、これを金属製の回
転２本ロールに流し出す方法で厚さ約２００μｍの箔を
作製したもの（実施例１〜６、８、９）を、また、溶解
した金属をアトマイズ処理して粉末に作製したもの（実
施例７）をそれぞれ用意した。The brazing material is prepared by mixing metals so as to have the composition shown in Table 1, melting at 650 ° C. in a graphite crucible, and pouring the molten metal into a rotating two-roll metal roll to produce a foil having a thickness of about 200 μm. What was prepared (Examples 1 to 6, 8, and 9), and what was prepared as a powder by atomizing a dissolved metal (Example 7) were prepared.
【００２７】用意したろう材を接合する材料の５０×５
０ｍｍの接合面間に装填し、窒素雰囲気中で表１に示す
温度で熱処理して接合し、接合体を作製した。なお、試
料が移動しないように約３０ｇ／ｃｍ2の重しを載せて
接合を行った。50 × 5 of the material for joining the prepared brazing material
It was loaded between the bonding surfaces of 0 mm, and heat-treated at a temperature shown in Table 1 in a nitrogen atmosphere and bonded to prepare a bonded body. In addition, bonding was performed with a weight of about 30 g / cm 2 placed so that the sample did not move.
【００２８】（２）評価 得られた接合体から接合部を中心とした試料を切り出
し、その表面を研削加工して３×４×４０ｍｍの試料を
作製した。この試料で下部スパン３０ｍｍ、上部スパン
１０ｍｍの４点曲げ試験を行って接合強度を求めた。そ
の結果を表１に示す。(2) Evaluation A sample centering on the joint was cut out from the obtained joined body, and the surface was ground to prepare a 3 × 4 × 40 mm sample. This sample was subjected to a four-point bending test with a lower span of 30 mm and an upper span of 10 mm to determine the bonding strength. Table 1 shows the results.
【００２９】（比較例１、２）比較として比較例１で
は、マトリックス中にはＭｇを含んでいるが、ろう材中
にはＭｇを含まない箔状のろう材を用いる他は、比較例
２では、加熱雰囲気をアルゴン中にした他は実施例１と
同様に接合体を作製し、評価した。それらの結果も表１
に示す。(Comparative Examples 1 and 2) For comparison, in Comparative Example 1, except that the matrix contains Mg but the brazing material is a foil-like brazing material that does not contain Mg. Then, a joined body was prepared and evaluated in the same manner as in Example 1 except that the heating atmosphere was argon. Table 1 shows the results.
Shown in
【００３０】表１から明らかなように、実施例では、全
て１００ＭＰａ以上の強固な接合強度を有する接合体が
得られている。このことは、ろう材またはマトリクス中
にＭｇを含ませれば、強固に接合された金属−セラミッ
クス複合材料とセラミックスとの接合体が得られるとい
うことを示している。As is clear from Table 1, in all of the examples, joined bodies having a strong joining strength of 100 MPa or more were obtained. This indicates that if Mg is contained in the brazing material or the matrix, a bonded body of the metal-ceramic composite material and the ceramics which are firmly bonded can be obtained.
【００３１】これに対して比較例１では、マトリックス
中にＭｇを含んでいるものの、ろう材に箔状のＭｇを含
まないろう材を用いているので、Ｍｇ蒸気がセラミック
素面に到達するのが少なく、接合強度が１００ＭＰａを
大きく下回った。また、比較例２では、加熱雰囲気をア
ルゴン中にしたため、これも接合強度が１００ＭＰａを
大きく下回った。On the other hand, in Comparative Example 1, although the matrix contains Mg, but the brazing filler metal which does not contain Mg is used, the Mg vapor reaches the ceramic elementary surface. The bonding strength was significantly lower than 100 MPa. In Comparative Example 2, since the heating atmosphere was argon, the bonding strength was also significantly lower than 100 MPa.
【００３２】[0032]
【発明の効果】以上の通り、本発明の金属−セラミック
ス複合材料とセラミックスとの接合方法であれば、金属
−セラミックス複合材料とセラミックスとがＡｌ合金を
介して強固に接合することのできる接合体が得られるよ
うになった。このことにより、高温、高圧、真空を必要
としなくとも安価で簡便に、しかも強固に接合すること
のできる接合体とその接合方法を提供することが可能と
なった。As described above, according to the method for joining a metal-ceramic composite material and ceramics of the present invention, a joined body capable of firmly joining a metal-ceramic composite material and ceramics via an Al alloy is provided. Can be obtained. As a result, it has become possible to provide a bonded body that can be inexpensively, easily, and firmly bonded without requiring high temperature, high pressure, and vacuum, and a bonding method thereof.
【表１】 [Table 1]
Claims (8)
ラミックス複合材料とセラミックスとが、Ｍｇを含むＡ
ｌ合金からなるろう材を介して接合されていることを特
徴とする金属−セラミックス複合材料とセラミックスと
の接合体。1. A method according to claim 1, wherein the metal-ceramic composite material having the Al alloy as a matrix and the ceramic are made of A containing Mg.
A joined body of a metal-ceramic composite material and ceramics, which is joined via a brazing material made of an alloy.
〜５％であることを特徴とする請求項１記載の金属−セ
ラミックス複合材料とセラミックスとの接合体。2. The content of Mg in the brazing material is 0.1%.
The joined body of the metal-ceramic composite material and the ceramic according to claim 1, wherein the content is about 5%.
る金属−セラミックス複合材料とセラミックスとが、Ａ
ｌ合金からなるろう材を介して接合されていることを特
徴とする金属−セラミックス複合材料とセラミックスと
の接合体。3. A ceramic comprising a metal-ceramic composite material having an Al alloy containing Mg as a matrix and ceramics
A joined body of a metal-ceramic composite material and ceramics, which is joined via a brazing material made of an alloy.
ｇの含有量が、０．３％以上であることを特徴とする請
求項３記載の金属−セラミックス複合材料とセラミック
スとの接合体。4. The method according to claim 1, wherein the M in the Al alloy is a matrix.
The joined body of the metal-ceramic composite material and the ceramic according to claim 3, wherein the content of g is 0.3% or more.
ラミックス複合材料とセラミックスとの間にＭｇを含む
Ａｌ合金からなるろう材を装填し、それを窒素雰囲気中
で加熱処理することを特徴とする金属−セラミックス複
合材料とセラミックスとの接合方法。5. A metal characterized in that a brazing material made of an Al alloy containing Mg is charged between a ceramic and a metal-ceramic composite material having an Al alloy as a matrix, and is heated in a nitrogen atmosphere. A method of joining the ceramic composite material and the ceramic.
〜５％であることを特徴とする請求項５記載の金属−セ
ラミックス複合材料とセラミックスとの接合方法。6. The content of Mg in the brazing material is 0.1%.
The method for joining a metal-ceramic composite material and ceramics according to claim 5, wherein the content is about 5%.
る金属−セラミックス複合材料とセラミックスとの間に
Ａｌ合金からなる粉末状のろう材を装填し、それを窒素
雰囲気中で加熱処理することを特徴とする金属−セラミ
ックス複合材料とセラミックスとの接合方法。7. A powdery brazing material made of an Al alloy is loaded between a ceramic and a metal-ceramic composite material having an Al alloy containing Mg as a matrix, and is heated in a nitrogen atmosphere. Bonding method between a metal-ceramic composite material and ceramics.
ｇの含有量が、０．３％以上であることを特徴とする請
求項７記載の金属−セラミックス複合材料とセラミック
スとの接合方法。8. M in the Al alloy as the matrix
The method for joining a metal-ceramic composite material and ceramic according to claim 7, wherein the content of g is 0.3% or more.
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| JP23073699A JP4373538B2 (en) | 1999-08-17 | 1999-08-17 | Bonded body of metal-ceramic composite material and ceramic and bonding method thereof |
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|---|---|---|---|
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003320452A (en) * | 2002-04-30 | 2003-11-11 | Taiheiyo Cement Corp | Method for joining metal - ceramic composite materials to each other |
| JP2005247662A (en) * | 2004-03-05 | 2005-09-15 | Kyocera Corp | Joined body, wafer holding member using the same, and method for manufacturing the same |
-
1999
- 1999-08-17 JP JP23073699A patent/JP4373538B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003320452A (en) * | 2002-04-30 | 2003-11-11 | Taiheiyo Cement Corp | Method for joining metal - ceramic composite materials to each other |
| JP4597468B2 (en) * | 2002-04-30 | 2010-12-15 | 太平洋セメント株式会社 | Method for joining metal-ceramic composite materials |
| JP2005247662A (en) * | 2004-03-05 | 2005-09-15 | Kyocera Corp | Joined body, wafer holding member using the same, and method for manufacturing the same |
| JP4583053B2 (en) * | 2004-03-05 | 2010-11-17 | 京セラ株式会社 | Bonded body, wafer holding member using the same, and manufacturing method thereof |
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| Publication number | Publication date |
|---|---|
| JP4373538B2 (en) | 2009-11-25 |
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