JP2001047620A - Ink jet head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent adhesive from projecting by forming a plurality of nonpenetrating recesses at least along the fringe part of an opening in the bonding face of one member. SOLUTION: A plurality of nonpenetrating recesses 51, 51,... comprising thin trenches are made along the fringe part of an opening 42 in the bonding face of one member 41. Nonpenetrating recesses 52, 52,... are also made in other region. The nonpenetrating recesses 51 made along the fringe part of an opening 42 substantially surrounds the opening 42 of one member 41. Three nonpenetrating recesses 51 are made in the barrier wall 45 between the opening 42 of one member 41. Since excess adhesive flows into the nonpenetrating recesses 51 when one member 41 is bonded to the other member, projection of the adhesive into the opening 42 of one member 41 is reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet head, and more particularly, to an ink jet head in which at least two members are joined.

[0002]

2. Description of the Related Art Generally, an ink jet head used as a recording head in an ink jet recording apparatus used as an image forming apparatus (image recording apparatus) such as a printer, a facsimile, a copying machine, a plotter, etc. has a plurality of nozzles for ejecting ink droplets, A flow path forming member that forms an ink liquid chamber (also referred to as a discharge chamber, a pressurized liquid chamber, an ink flow path, a pressurized chamber, a pressure chamber, etc.) communicating with each nozzle, and ink in each ink liquid chamber. Energy generating means (actuator including an electromechanical converting element such as a piezoelectric element, or an electrothermal converting element such as a heater, or an electrostatic force generating means such as an electrode, etc., which generates energy for discharging ink droplets from a nozzle by applying pressure. ), And the actuator is driven in accordance with the image information to eject ink droplets from required nozzles to form an image. Record.

[0003] Such various ink jet heads include:
For example, as described in JP-A-10-138469, a nozzle plate, a liquid chamber partition member, a vibration plate, a piezoelectric element and the like are laminated and joined,
As described in Japanese Patent Application Laid-Open Publication No. H10-115, a liquid chamber forming member (first substrate) is joined to a lid member that covers the same, and a liquid head forming member is joined to a nozzle plate having a nozzle formed on the front surface of the head. Are formed by joining the above members.

In this case, it is known that a silicon substrate or the like is directly bonded or eutectic bonded to join a plurality of members. However, when such a bonding method cannot be used, an adhesive is generally used. Is used.
A typical method of applying an adhesive is to form a thin adhesive layer on a flexible base material and transfer it onto the surface (joining surface) of a member to be bonded. There is known a transfer method of applying and bonding, and a screen printing method.

At this time, for example, when a liquid chamber partition member having openings such as through holes or recesses forming a plurality of fine discharge chambers is bonded to a nozzle plate, if the amount of the adhesive applied is large, the liquid When the chamber partition member and the nozzle plate are overlapped, the adhesive protrudes to the opening side to block the openings (through holes) of the ink flow paths and nozzles, or to enter the discharge chamber to change the volume of the discharge chamber. The ink droplet ejection characteristics will vary between them.

Therefore, as described in Japanese Patent Application Laid-Open No. 7-125198, a plurality of fine rectangular recesses are formed so as to surround a pressure generating chamber, an ink supply port, and a through hole serving as a reservoir. It is known to allow excess adhesive to flow.

[0007]

It is said that effective formation of the adhesive cannot be prevented only by forming a fine rectangular recess so as to surround the through hole formed in the member to be joined as described above. There are issues. Further, when a recess is formed in the through hole spacing wall, the rigidity of the partition wall is reduced, and there is also a problem that the reliability of the head may be reduced, such as a reduction in ink droplet ejection efficiency.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a highly reliable ink jet head by preventing the adhesive from protruding.

[0009]

In order to solve the above-mentioned problems, an ink jet head according to the present invention has a plurality of non-penetrating recesses formed at least along the edge of an opening on a joint surface of one member. It is. Note that the “opening of one member” in this specification means a portion having at least an opening, such as a through hole, a through hole, or a recess formed in one member.

Here, when the width of the partition between the opening of one member and the non-penetrating recess is TA, the thickness is LA, the width of the partition between the openings is TB, and the thickness is LB, TA / LA ≧
It is preferable to have a relationship of TB / LB. In addition, the width TA of the partition wall between the opening of one member and the non-penetrating recess is 3.
Preferably it does not exceed 0 μm. An ink jet head characterized by the following.

The width of the partition between the opening of one of the members and the non-through recess is TA, the thickness is LA, the length of the non-through recess is WA, the width of the partition between the openings is TB, and the thickness is TB. Is preferably LB, TA / WA ≧ TB / LB and LA ≧ WA. Further, it is preferable that the distance between the plurality of non-penetrating recesses of one member does not exceed 30 μm.

In these cases, the non-penetrating recess can be formed by etching. Further, the non-penetrating recess may have an inclined wall. Furthermore, a liquid chamber substrate having a discharge chamber with which the nozzle communicates and a vibration plate forming a wall surface of the discharge chamber, an electrode substrate provided with an electrode facing the vibration plate, and a lid member covering the discharge chamber are provided. In the ink jet head, a non-penetrating recess can be formed on the surface of the liquid chamber substrate to which the lid member is joined.

[0013] In the ink jet head according to the present invention, one member having an opening is joined to another member via an adhesive, and the joining surface of the other member is arranged along the edge of at least one opening. A plurality of non-penetrating recesses are formed at the positions where they do.

[0014]

Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is an explanatory cross-sectional view showing an example of a piezo-type inkjet head to which the present invention is applied, and FIG. 2 is an explanatory plan view showing FIG. 1 in a transparent state.

In this ink jet head, a diaphragm 2 and an opening for forming a discharge chamber in which the diaphragm 2 forms a wall surface are formed by anisotropic etching or the like on a liquid chamber substrate 1 made of a single crystal silicon substrate. A concave portion 3 is provided, and a laminated piezoelectric element 4 is provided on the outer surface of the diaphragm 2 to constitute an actuator section.

On the liquid chamber substrate 1, a fluid resistance forming plate 6, a common ink flow path forming plate 7, and a nozzle plate 8 are sequentially laminated and bonded with an adhesive to form a plurality of nozzle holes 9, A plurality of discharge chambers 10 with which the nozzle holes 9 communicate, a common ink flow path (common ink chamber) 11 for supplying ink to the plurality of pressurized chambers 10, and ink from the common ink flow path 11 to the pressurized chamber 10 Ink flow paths such as an ink supply path 12 that serves as a fluid resistance section for supplying the ink and a nozzle communication path 13 that connects the nozzle hole 9 and the pressurizing chamber 10 are formed.

Here, a through-hole (through-hole) 15 as an opening for forming the ink supply passage 12 and a through-hole 16 for forming the nozzle communication passage 13 are formed in the fluid resistance forming plate 6 to form a common ink flow path. The forming plate 7 has a through hole 17 forming the common ink chamber 11 and the through hole 18 forming the nozzle communication passage 13, and the nozzle plate 8 has a plurality of nozzle holes 9 corresponding to each ejection chamber 10. are doing.

In the ink jet head configured as described above, when a driving voltage is applied to the piezoelectric element 4, the piezoelectric element 4 is displaced in the stacking direction, and the diaphragm 2 is deformed and displaced toward the discharge chamber 10 to discharge. The internal volume of the chamber 10 decreases, the pressure in the ejection chamber 10 increases, and ink droplets are ejected from the nozzle holes 9 through the nozzle communication passage 13.

Next, FIG. 3 is an explanatory sectional view showing an example of an electrostatic ink jet head to which the present invention is applied, and FIG.
It is a plane explanatory view showing in a transmission state. This ink jet head includes a liquid chamber substrate 21 made of a single crystal silicon substrate or the like, and a lid member 22 provided above the liquid chamber substrate 21.
An electrode substrate 23 provided below the liquid chamber substrate 21, and a nozzle plate 24 provided on the front side of the liquid chamber substrate 21 and the lid member 22.
And

By stacking the liquid chamber substrate 21, the lid member 22, and the electrode substrate 23, a plurality of discharge chambers 26 in which the nozzle holes 25 of the nozzle plate 24 communicate with each other, and ink is supplied to each discharge chamber 26. Common ink flow path (common ink chamber)
27, an ink supply path 28 serving as a fluid resistance part for supplying ink from the common ink flow path 27 to the ejection chamber 26, and a nozzle hole 2
An ink flow path such as a nozzle communication path 29 that communicates the discharge chamber 5 with the discharge chamber 26 is formed.

The liquid chamber substrate 21 has a recess 31 which is an opening for forming a discharge chamber 27 and a deformable diaphragm 30 which is a bottom of the discharge chamber 27 and forms a wall surface thereof. Common ink flow path 3 for supplying ink
1 and a nozzle communication passage 2
A groove 33, which is an opening for forming the groove 9, is provided.

The lid member 22 has an ink supply path 28.
And an ink supply port 35 for supplying ink to the common ink channel 27 from outside. Further, an electrode 36 facing the diaphragm 30 is provided on the electrode substrate 23, and the electrode 36 and the diaphragm 30 constitute an actuator section. The surface of the electrode 36 is protected by an insulating film 37.

Here, the liquid chamber substrate 21 and the electrode substrate 23 are bonded by a bonding method such as direct bonding, anodic bonding, or eutectic bonding, and the liquid chamber substrate 21 and the lid member 22 are bonded with an adhesive, The plate 24 is also bonded with an adhesive.

In this ink jet head, when a driving voltage is applied between the diaphragm 30 and the electrode 36, the diaphragm 30 is deformed by electrostatic force, and
As the internal volume changes, ink droplets are ejected from the nozzle holes 25.

The application of the present invention to two members joined by an adhesive in these ink jet heads will be described with reference to FIGS. In each of the heads, for example, the liquid chamber substrate 1 and the flow path forming plate 6, the common ink chamber forming plate 7 and the nozzle plate 7, or the liquid chamber substrate 21
The present invention can be applied to the bonding of the adhesive and the lid member 22 and the liquid chamber substrate 21 to the nozzle plate 24 and the like. In the following, one member having openings (these include the liquid chamber substrates 1 and 21 and the common ink chamber forming plate 7) and the other member (these members have a flow path forming member) will be generically described. Plate 6, nozzle plates 7, 24, lid member 22, etc.).

First, as shown in FIG. 5 and FIG. 6, in order to bond one member 41 having the opening 42 and the other member 43 with the adhesive 44, for example, the transfer of one member 41 is performed by using a transfer method. After applying the adhesive 44 to the joining surface, the other member 4
4 are superimposed and joined (pressed) under a predetermined load.

Therefore, a first embodiment of the present invention will be described with reference to FIGS. 7 is an explanatory plan view of the liquid chamber substrate, and FIG. 8 is an explanatory front sectional view of FIG. In this embodiment, the opening 4 is formed on the joining surface of the one member 41 having the opening 42 (including the partition 45 between the openings 42).
A non-penetrating recess 51 composed of a plurality of narrow grooves along the edge of
51 ... are formed. Further, non-penetrating recesses 52 are formed in regions other than the region along the edge of the opening 42.

Here, the non-penetrating recess 51 along the edge of the opening 42 is formed so as to substantially surround the opening 42 of the one member 41. Also, the opening 4 of the one member 41
Three non-penetrating recesses 51 are formed in the two interval walls 45.

The non-penetrating recess 51 can be formed by dry etching or wet etching. In terms of accuracy, it is preferable to use dry etching.
Thereby, since the width and thickness of the partition wall due to the formation of the non-penetrating recess can be controlled, it is possible to prevent a decrease in rigidity of the opening interval wall due to poor quality accuracy. Here, since the depth of the non-penetrating concave portion is several tens μm or less, a structure having a narrow width of 10 μm can be manufactured.

Therefore, as described above, one member 4
For example, when one member 41 and the other member 43 are joined by applying an adhesive 44 to the joining surface of the first member by a transfer method and overlapping and pressing the other member 43, the excess adhesive 44 Since it flows into the through recess 51, the one member 41
Is protruding toward the opening 42 side.

Next, a second embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIG. 9 is a plan view of the liquid chamber substrate, and FIG. 10 is a front sectional view of FIG. Also in this embodiment, the opening 4
A non-penetrating recess 51 composed of a plurality of narrow grooves is formed along the edge of the second.

Also in this case, the non-penetrating recess 51 is formed by the one member 4
1 is formed so as to substantially surround the opening 42,
One non-penetrating recess 51 is formed in the partition wall 45 between the openings 42. That is, the non-penetrating recess 51 formed on the joint surface of the partition 45 is a groove wider than that of the first embodiment.

Also in this embodiment, as described above, the adhesive 44 is applied to the joining surface of the one member 41 by, for example, a transfer method.
When joining the one member 41 and the other member 43 by applying and applying and pressing the other member 43,
Since the excess adhesive 44 flows into the non-penetrating recess 51, the amount of the one member 41 protruding toward the opening 42 is reduced.

Here, in order to confirm the effect of reducing the protrusion of the adhesive in the present invention, the case where the non-penetrating concave portion 51 is formed as in the first and second embodiments and the case where the non-penetrating concave portion 51 is formed as shown in FIG. The case where the concave portion 51 is not formed was verified. However, the opening 42 of the one member 41 used had a length of 2 mm, a width of 150 μm, and a partition 45 having a width of 100 μm. In the first embodiment, the non-penetrating recess 51 has a width of 20 μm and a depth of 30 μm, and the width of the partition wall 46 formed between the opening 42 and the non-penetrating recess 41 is 10 μm. In the second embodiment, the non-penetrating recess 51 has a width of 30 μm,
The depth of the partition wall 46 formed between the opening 42 and the non-penetrating concave portion 51 was 30 μm, and the width of the partition 46 was 35 μm.

Then, an epoxy-based adhesive was used as the adhesive 44, the coating amount was set to 5 μm, and the coating was applied to the bonding surface of one of the members 41 by a transfer method, and the other member 43 was bonded and bonded. At this time, the amount of the adhesive 44 flowing out is determined by the other member 43.
The length of the protrusion of the adhesive 44 was measured. Table 1 shows the results.

[0036]

[Table 1]

As can be seen from Table 1, one of the members 4
It was confirmed that the outflow of the adhesive 44 was reduced by forming the non-penetrating concave portion 51 on the joint surface of No. 1 along the edge of the opening 42 so as to surround the opening of the opening 42.

Here, the dimensions of the non-penetrating recess 51, the opening 4
The dimensions of the partition wall 45 between the two and the dimensions of the partition wall 46 formed between the opening 42 and the non-penetrating recess 51 will be described. The rigidity of the opening wall 42 due to the formation of the opening 42 such as a through hole or a recess, and the opening 42 due to the formation of the non-penetrating recess 51
And the rigidity of the partition wall 46 between the non-penetrating recess 51 depends on the width t and the thickness l of the partition wall as expressed by the following equation (1).

[0039]

(Equation 1)

Therefore, as shown in FIG.
And the width of the partition wall 46 formed by the non-penetrating recess 51 is TA, the thickness is LA, and the partition wall 4 formed between the openings 42, 42 is formed.
Assuming that the width of No. 5 is TB and the thickness is LB, the following equation (2) is established.

[0041]

(Equation 2)

By doing so, it is possible to prevent the rigidity of the opening interval wall 45 from being reduced due to the formation of the non-penetrating recess 51. That is, when the opening 41 is a discharge chamber, when the discharge chamber is pressurized, the opening-interval wall 42 is hardly deformed, but the thinned portion (the partition 46) is deformed due to the formation of the non-penetrating recess 51, and the discharge is performed. It is possible to prevent a decrease in the indoor pressure and a drop in the ink droplet ejection efficiency.

For example, if the liquid chamber spacing wall 45 is TB = 70 μ
m, LB = 100 μm, and when the partition wall 46 formed by the formation of the non-penetrating recess 41 is TA = 15 μm, LA is set to 2
The thickness may be set to 1.4 μm or less.

In order to confirm this, a simulation was performed and verified. As shown in FIG. 12, the simulation model includes a side plate member 6 having a through hole (through hole) 62 formed therein.
1 and a top plate 63 and a bottom plate 64 are bonded to each other with an adhesive.
5 is formed, a non-penetrating recess 67 is formed in the joint surface in the partition wall 66 formed by the side plate member 61, and the nozzle hole 6 is formed in the top plate 63.
8 is formed. The model has a three-dimensional configuration and the discharge chamber 65
Is full of water.

Here, the partition 66 formed by the side plate member 61
Is TB = 150 μm and LB = 250 μm. And, as the partition wall 69 formed between the through-hole 62 and the non-through recess 67, the bottom plate 64 is set to 3 μsec for TA = 15 μm and LA = 30 μm and for TA = 15 μm and LA = 20 μm. The maximum displacement was 0.1 μm. The materials were all SUS. Table 2 shows the calculation results of the simulation.

[0046]

[Table 2]

As can be seen from Table 2, it was confirmed that the partition wall between the non-penetrating concave portion and the through-hole was hardly displaced by the relationship of the formula (2). Here, "substantially no displacement" is used in the sense that no extreme decrease in internal pressure due to displacement of the partition wall between the non-penetrating recess and the through hole when the discharge chamber is pressurized.

Next, the width TA of the partition wall 45 formed between the non-through recess 51 and the opening 42 will be described. The application amount of the adhesive is usually 5 μm or less in thickness, and 2 to 3 μm.
About m is appropriate. Therefore, the adhesive was applied with a thickness of 3 μm, and pressed with a pressure load of 1.5 kg / cm ² to perform joining. Here, using the width TA of the partition wall 45 formed between the non-penetrating recess 51 and the opening 42 as a parameter, the amount of the adhesive flowing out (the amount of protrusion from the edge of the opening 42) was measured. Table 3 shows the results.

[0049]

[Table 3]

Based on the actual head configuration, scale, discharge evaluation results, and the like, it is sufficient that the outflow amount is about 5 μm. Then, as can be seen from Table 3, if the width TA of the partition wall 45 formed between the non-penetrating recess 51 and the opening 42 does not exceed 30 μm, the outflow amount can be suppressed to 5 μm or less, and the characteristics of the head deteriorate. Can be suppressed.

Next, a third embodiment of the present invention will be described with reference to FIG.
3 will be described. FIG. 3 is an explanatory plan view of one member. Also in this embodiment, a non-penetrating recess 51 composed of a plurality of narrow grooves is formed on the joint surface of one member 41 along the edge of the opening 42, and the non-penetrating recess 51 is also formed in a region not along the edge of the opening 42. A through recess 52 is formed. Here, the non-penetrating recess 51 along the edge of the opening 42 is formed of a minute recess (concave groove) and is formed so as to substantially surround the opening 42.

Also in this embodiment, as described above, the adhesive 44 is applied to the joining surface of the one member 41 by, for example, a transfer method.
When joining the one member 41 and the other member 43 by applying and applying and pressing the other member 43,
Since the excess adhesive 44 flows into the non-penetrating recess 51, the amount of the one member 41 protruding toward the opening 42 is reduced.

When such a configuration is adopted, the opening 4
2 and the width of the partition wall 46 formed by the non-through recess 51 is TA,
The thickness is LA, the width of the partition wall 45 between the openings 42 is TB,
The thickness is LB, and the depth (length) of the non-penetrating recess 51 is W
When A is set, the following relations (3) and (4) are established.

[0054]

(Equation 3)

[0055]

(Equation 4)

By doing so, it is possible to prevent the rigidity of the opening interval wall 45 from being reduced due to the formation of the non-penetrating recess 51. That is, when the opening 52 is a discharge chamber, the opening partition 45 hardly deforms when the discharge chamber is pressurized, but the thinned portion (the partition 46) is deformed due to the formation of the non-penetrating concave portion 51, and the discharge chamber is deformed. It is possible to prevent a drop in pressure and a drop in ink droplet ejection efficiency.

In this case, even when the relationship of the above-mentioned equation (2) does not hold, a decrease in rigidity can be suppressed.
Therefore, since the thickness LA of the non-penetrating recess 51 can be increased, the depth of the non-penetrating recess 51 can be arbitrarily increased.

In this case, the distance (interval) WB between the minute non-penetrating recesses 51 formed of a plurality of narrow grooves provided along the edge of the opening 42 is determined by the above-described opening 42 and the non-penetrating recess 5.
1, for the same reason as defining the width of the partition wall 46,
It is preferable not to exceed 30 μm.

Next, a fourth embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIG. FIG. 3 is an enlarged explanatory view of a portion where a non-through recess is formed. In this embodiment, the non-penetrating recess 51 has a cross-sectional shape having an inclined wall 51a. Thereby, a decrease in rigidity can be prevented. However, TC / LC <TD / LC in each dimension of the partition wall 46 having an inclination.
Is established, and as a whole, the partition walls 4 formed by the openings are formed.
5 must be greater than the stiffness.

It is necessary that at least the relationship TB / LB <TD / LC be established between the width TB and the thickness LB of the opening interval wall 45. Wet etching can be used to form the non-through recess 51 having such an inclined wall. According to wet etching, a slope is inevitably formed. It is to be noted that, instead of being linearly inclined, it may be formed stepwise.

Therefore, the third and fourth embodiments were verified by simulation. The model was the same as that described with reference to FIG. In the model of the third embodiment, TA = 15 μm, LA = 40
μm, WA = 25 μm. In the model of the fourth embodiment, TD = 35 μm, TC = 15 μm, LC = 4
It was set to 0 μm. In each case, the partition 66 formed by the side plate member 61 was set to TB = 150 μm and LB = 250 μm. As a comparative example, one having TA = 15 μm and LA = 40 μm was also manufactured. Table 4 shows the results of the simulation.

[0062]

[Table 4]

As can be seen from Table 4, even if the relations of the equations (2), (3) and (4) are not satisfied, the configuration of the third embodiment or the fourth embodiment allows the partition wall to be formed. A decrease in rigidity can be suppressed. Here, "substantially no displacement" is used in the sense that no extreme decrease in internal pressure due to displacement of the partition wall between the non-penetrating recess and the through hole when the discharge chamber is pressurized.

In the above embodiment, the present invention is applied to the piezo type and electrostatic type ink jet heads. However, the present invention is also applicable to an ink jet head using a heating resistor as an energy generating means. it can. Further, in the above-described embodiment, the example in which the non-penetrating concave portion of one member having the opening is formed has been described. However, the non-penetrating concave portion can be formed in the other member adhered to one member. In this case, the other member is formed at a position corresponding to the edge of the opening of one member.

[0065]

As described above, according to the ink jet head of the present invention, a plurality of non-penetrating recesses are formed at least along the edge of the opening on the joint surface of one member. It is possible to reduce the amount of the adhesive that sticks out to the ink, to ensure the uniformity of the ink droplet ejection efficiency, to improve the reliability, and to improve the image quality.

Here, the width TA and the thickness LA of the partition wall between the opening of one of the members and the non-penetrating recess, and the width TB and the thickness LB of the partition between the openings satisfy the relationship TA / LA ≧ TB / LB. With this configuration, it is possible to prevent a decrease in rigidity of the opening interval wall, and it is possible to prevent a drop in ink droplet ejection efficiency when the opening forms the ejection chamber.

Further, by preventing the width TA of the partition wall between the opening of one member and the non-penetrating recess from exceeding 30 μm, it is possible to suppress the outflow of the adhesive to the opening.
Deterioration of the characteristics of the head can be reliably suppressed.

Further, the width TA, the thickness LA, and the length W of the non-penetrating recess between the opening of one member and the non-penetrating recess are provided.
A, the width TB and the thickness LB of the partition wall between the openings are TA / WA
By satisfying the relationship of ≧ TB / LB and LA ≧ WA, it is possible to prevent a decrease in rigidity of the opening interval wall while increasing the thickness of the non-penetrating recess, and the opening is formed in the discharge chamber. Can be prevented from lowering the ink droplet ejection efficiency when forming the ink droplets.

Further, by preventing the distance between the plurality of non-penetrating recesses of one member from exceeding 30 μm, it is possible to suppress the adhesive from flowing out to the opening side, and to surely reduce the characteristics of the head. Can be suppressed.

In this case, the non-penetrating recess can be easily manufactured by forming the non-penetrating recess by etching. In addition, by forming the non-penetrating concave portion with the inclined wall, it is possible to prevent a decrease in rigidity of the opening interval wall, and it is possible to prevent a drop in ink droplet ejection efficiency when the opening forms an ejection chamber.

Further, a liquid chamber substrate having a discharge chamber with which the nozzle communicates and a vibration plate forming the wall surface of the discharge chamber, an electrode substrate provided with electrodes facing the vibration plate, and a cover member covering the discharge chamber are provided. In the provided ink jet head, a highly reliable electrostatic ink jet head can be obtained by forming a non-penetrating concave portion on the surface of the liquid chamber substrate to which the lid member is joined.

According to the ink jet head of the present invention, one member having an opening is joined to the other member via an adhesive, and the joining surface of the other member is formed along the edge of at least one opening along the edge. Since a plurality of non-penetrating recesses are formed at the corresponding positions, it is possible to reduce the protrusion of the adhesive to the opening side, to ensure uniformity of ink droplet ejection efficiency, and to improve reliability. As a result, the image quality is improved.

[Brief description of the drawings]

FIG. 1 is an explanatory sectional view showing an example of a piezo type inkjet head to which the present invention is applied.

FIG. 2 is an explanatory plan view of FIG. 1;

FIG. 3 is an explanatory sectional view showing an example of an electrostatic inkjet head to which the present invention is applied.

FIG. 4 is an explanatory plan view of FIG. 1;

FIG. 5 is an explanatory perspective view of a case where two members are joined with an adhesive;

FIG. 6 is an explanatory plan view of a member having an opening;

FIG. 7 is an explanatory plan view of the first embodiment of the present invention.

FIG. 8 is a front sectional view of FIG. 7;

FIG. 9 is an explanatory plan view of a second embodiment of the present invention.

FIG. 10 is an explanatory front view of FIG. 9;

FIG. 11 is an explanatory view for explaining dimensions of an opening and a non-through recess of one member;

FIG. 12 is an explanatory diagram for explaining a simulation model;

FIG. 13 is an explanatory plan view of a third embodiment of the present invention.

FIG. 14 is an explanatory cross-sectional view of a main part of a fourth embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Liquid chamber board, 2 ... Vibration plate, 3 ... Recess, 4 ... Piezoelectric element,
6 ... flow path forming plate, 7 ... common ink chamber forming plate, 8 ... nozzle plate, 21 ... liquid chamber substrate, 22 ... electrode substrate, 23 ... lid member,
24 ... Nozzle plate, 30 ... Vibrating plate, 35 ... Electrode, 41 ... One member, 42 ... Opening portion, 43 ... The other member, 44 ... Adhesive, 45 ... Opening space, 46 ... Opening and non-penetration Partition walls between concave portions, 51 ... non-through concave portions.

Claims (9)

[Claims] 1. An ink jet head in which one member having an opening is joined to another member via an adhesive via an adhesive, a joining surface of the one member is provided with a plurality of non-conductive members along at least an edge of the opening. An ink jet head having a through recess formed therein. 2. The ink jet head according to claim 1, wherein the width of the partition between the opening of the one member and the non-through recess is TA, the thickness is LA, and the width of the partition between the openings is TB. , Where LB is the thickness, TA / LA ≧ TB /
An ink jet head having an LB relationship. 3. The ink jet head according to claim 1, wherein a width TA of a partition wall between the opening of the one member and the non-penetrating recess does not exceed 30 μm. 4. The ink jet head according to claim 1, wherein the width of the partition wall between the opening of the one member and the non-penetrating recess is TA, the thickness is LA, and the length of the non-penetrating recess is W.
An ink jet head having a relationship of TA / WA ≧ TB / LB and LA ≧ WA, where A is the width of the partition wall between openings and TB is the thickness of the partition wall. 5. The ink jet head according to claim 1, wherein a distance between the plurality of non-penetrating recesses of the one member does not exceed 30 μm. 6. The ink jet head according to claim 1, wherein said non-penetrating recess is formed by etching. 7. The ink jet head according to claim 1, wherein the non-penetrating recess has an inclined wall. 8. The ink jet head according to claim 1, wherein a liquid chamber substrate having a discharge chamber with which a nozzle communicates, a diaphragm forming a wall surface of the discharge chamber, and the diaphragm are opposed to each other. An ink jet head comprising: an electrode substrate provided with electrodes; and a lid member that covers the discharge chamber, wherein the non-penetrating recess is formed on a surface of the liquid chamber substrate that joins the lid member. 9. An ink jet head in which one member having an opening is joined to the other member via an adhesive, the joining surface of the other member corresponding to at least the edge of the one opening. An ink jet head, wherein a plurality of non-penetrating recesses are formed at positions where the ink does not flow.