JP2001038504A - Surface coated cemented carbide cutting tool with hard coating layer exercising superior chipping resistance during highly efficient cutting - Google Patents

Surface coated cemented carbide cutting tool with hard coating layer exercising superior chipping resistance during highly efficient cutting

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Publication number
JP2001038504A
JP2001038504A JP21882699A JP21882699A JP2001038504A JP 2001038504 A JP2001038504 A JP 2001038504A JP 21882699 A JP21882699 A JP 21882699A JP 21882699 A JP21882699 A JP 21882699A JP 2001038504 A JP2001038504 A JP 2001038504A
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Japan
Prior art keywords
layer
cutting
thickness
hard coating
average
Prior art date
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JP21882699A
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Japanese (ja)
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JP3994590B2 (en
Inventor
Keiji Nakamura
惠滋 中村
Kunihiro Endo
邦博 遠藤
Takatoshi Oshika
高歳 大鹿
Toshiaki Ueda
稔晃 植田
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a surface coated cemented carbide cutting tool with a hard coating layer exercising superior chipping resistance during highly efficient cutting. SOLUTION: In a coated cemented carbide tool comprised by chemically and/or physically vapor-depositing a hard coating layer of an overall average layer thickness of 3 to 35 μm comprising a lower layer, a middle layer, and an upper layer on a surface of a WC base cemented carbide base substance, the lower layer is constituted by a Ti compound of an average thickness of 1 to 20 μm and the middle layer has a texture having an average thickness of 1 to 15 μm with K and ZrO2 distributed as a dispersed phase on a basis material of Al2O3. The upper layer is constituted by an outermost surface substrate layer represented by TiOX having an average thickness of 0.1 to 3 μm and an outermost surface layer comprising a Ti nitrogen oxide layer having an average thickness of 0.05 to 2 μm and represented by TiN1-Y(O)Y (in the formula, X represents 1.2 to 1.7 in atomic ratio in regard to Ti, and Y represents 0.01 to 0.4 in atomic ratio in regard to Ti).

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、各種鋼や鋳鉄な
どの連続切削や断続切削を、高能率切削を目的として速
い切削速度で行った場合や、さらなる高能率切削を目的
として前記の速い切削速度での切削を高送りや高切り込
みなどの重切削条件で行った場合にも、硬質被覆層がす
ぐれた耐チッピング性を発揮する表面被覆超硬合金製切
削工具(以下、被覆超硬工具という)に関するものであ
る。
BACKGROUND OF THE INVENTION The present invention relates to a case where continuous cutting or intermittent cutting of various steels or cast irons is performed at a high cutting speed for high efficiency cutting, or the above-mentioned high speed cutting for further high efficiency cutting. Even when cutting at high speed under heavy cutting conditions such as high feed and high cutting depth, the hard coating layer exhibits excellent chipping resistance and is made of a surface coated cemented carbide cutting tool (hereinafter referred to as coated carbide tool). ).

【0002】[0002]

【従来の技術】従来、一般に、炭化タングステン基超硬
合金基体(以下、超硬基体という)の表面に、(a)下
部層として、それぞれ0.1〜5μmの平均層厚を有
し、かつ、Tiの炭化物(以下、TiCで示す)層、窒
化物(以下、同じくTiNで示す)層、酸化物(以下、
Ti23で示す)層、炭窒化物(以下、TiCNで示
す)層、炭酸化物(以下、TiCOで示す)層、窒酸化
物(以下、TiNOで示す)層、および炭窒酸化物(以
下、TiCNOで示す)層のうちの1種または2種以上
からなるTi化合物層、(b)中間層として、1〜15
μmの平均層厚を有する酸化アルミニウム(以下、Al
23で示す)層、(c)上部層として、自体が黄金色の
表面色調を有することから、工具の使用前と使用後の識
別を容易にする目的で、0.1〜3μmの平均層厚を有
するTi窒化物(以下、TiNで示す)層、以上(a)
〜(c)で構成された硬質被覆層を3〜35μmの全体
平均層厚で化学蒸着および/または物理蒸着してなる被
覆超硬工具が知られており、この被覆超硬工具が、例え
ば各種鋼や鋳鉄などの連続切削や断続切削に用いられて
いることも知られている。
2. Description of the Related Art Conventionally, a tungsten carbide-based cemented carbide substrate (hereinafter referred to as a cemented carbide substrate) generally has, on the surface thereof, (a) an average layer thickness of 0.1 to 5 μm each as a lower layer, and , Ti carbide (hereinafter referred to as TiC) layer, nitride (hereinafter also referred to as TiN) layer, oxide (hereinafter referred to as TiN) layer,
A Ti 2 O 3 layer, a carbonitride (hereinafter, shown as TiCN) layer, a carbon oxide (hereinafter, shown as TiCO) layer, a nitrogen oxide (hereinafter, shown as TiNO) layer, and a carbonitride ( (Hereinafter referred to as TiCNO) layer, and a Ti compound layer composed of one or more of these layers;
Aluminum oxide having an average layer thickness of μm (hereinafter referred to as Al
(Shown as 2 O 3 ) layer and (c) the upper layer itself has a golden surface tone, so that the average of 0.1 to 3 μm is used for the purpose of facilitating discrimination between before and after use of the tool. A Ti nitride (hereinafter, referred to as TiN) layer having a layer thickness;
Coated carbide tools are known which are obtained by chemical vapor deposition and / or physical vapor deposition of the hard coating layer composed of (c) with a total average layer thickness of 3 to 35 μm. It is also known to be used for continuous cutting and interrupted cutting of steel, cast iron, and the like.

【0003】また、一般に、上記の被覆超硬工具の硬質
被覆層を構成するTi化合物層およびAl23層が粒状
結晶組織を有し、かつ前記Al23層はα型結晶構造を
もつものやκ型結晶構造をもつものなどが広く実用に供
されることも良く知られており、さらに例えば特開平6
−8010号公報や特開平7−328808号公報に記
載されるように、前記Ti化合物層を構成するTiCN
層を、層自身の靱性向上を目的として、通常の化学蒸着
装置にて、反応ガスとして有機炭窒化物を含む混合ガス
を使用し、700〜950℃の中温温度域で化学蒸着す
ることにより縦長成長結晶組織とすると共に、その層厚
を相対的に厚膜とし、3〜20μmの平均層厚をもつよ
うにすることも知られている。
In general, the Ti compound layer and the Al 2 O 3 layer constituting the hard coating layer of the coated carbide tool have a granular crystal structure, and the Al 2 O 3 layer has an α-type crystal structure. It is also well known that materials having a κ-type crystal structure are widely used for practical purposes.
As described in JP-A-8010 and JP-A-7-328808, TiCN constituting the Ti compound layer
The layer is vertically elongated by chemical vapor deposition at a medium temperature range of 700 to 950 ° C. using a mixed gas containing an organic carbonitride as a reaction gas with a normal chemical vapor deposition apparatus for the purpose of improving the toughness of the layer itself. It is also known to have a grown crystal structure and a relatively thick layer having an average layer thickness of 3 to 20 μm.

【0004】[0004]

【発明が解決しようとする課題】一方、近年の切削加工
に対する省力化および省エネ化、さらに低コスト化の要
求は強く、これに伴い、切削加工は高能率切削を行う傾
向にあるが、上記の従来被覆超硬工具においては、上記
の通りこれの硬質被覆層の上部層(最表面層)が使用前
後の識別目的で蒸着形成されたTiN層からなり、この
TiN層は被削材である各種鋼に対する付着性の強いも
のであるため、特に高能率切削を目的として切削速度を
速くすると、この高速切削では高い発熱を伴うことか
ら、切粉が高温加熱されることと相まって前記TiN層
に強力に付着し、前記TiN層を硬質被覆層から局部的
に剥がし取るように作用し、この場合前記TiN層は中
間層であるAl23層、このAl23層は下部層である
Ti化合物層に対していずれも密着性のすぐれたもので
あるので、これらの構成層も前記TiN層と一緒に局部
的に剥がし取られ、この結果刃先にチッピング(微小欠
け)が発生し、比較的短時間で使用寿命に至るものであ
り、またさらなる高能率切削を目的として前記の速い切
削速度での切削を高送りや高切り込みなどの重切削条件
で行った場合には、特に硬質被覆層を構成するAl23
層(中間層)の靭性不足が原因で刃先にチッピングが発
生するのが一段と加速されるようになり、使用寿命の一
段の短命化は避けられないのが現状である。
On the other hand, in recent years, there has been a strong demand for labor saving, energy saving, and further cost reduction in cutting, and with this, cutting tends to perform high efficiency cutting. In a conventional coated carbide tool, as described above, the upper layer (outermost layer) of the hard coating layer is composed of a TiN layer formed by vapor deposition for the purpose of identification before and after use, and this TiN layer is used as a work material. When the cutting speed is increased particularly for high efficiency cutting, the high speed cutting is accompanied by a high heat generation because of the strong adhesion to steel. And acts to locally peel off the TiN layer from the hard coating layer, where the TiN layer is an intermediate Al 2 O 3 layer, and the Al 2 O 3 layer is a lower layer Ti For compound layer Since all of these layers have excellent adhesion, these constituent layers are also locally peeled off together with the TiN layer, and as a result, chipping (small chipping) occurs at the cutting edge, and in a relatively short time. When the cutting at the above-mentioned high cutting speed is performed under heavy cutting conditions such as high feed and high cutting for the purpose of further high-efficiency cutting, particularly the Al constituting the hard coating layer is used. 2 O 3
At present, chipping on the cutting edge due to insufficient toughness of the layer (intermediate layer) is further accelerated, and further shortening of service life is inevitable.

【0005】[0005]

【課題を解決するための手段】そこで、本発明者等は、
上述のような観点から、硬質被覆層がすぐれた耐チッピ
ング性を発揮する被覆超硬工具を開発すべく、特に上記
の従来被覆超硬工具に着目し、研究を行った結果、
(a)上記の従来被覆超硬工具の硬質被覆層を構成する
Al23層(中間層)に、Al23との合量に占める割
合で、0.1〜10重量%の酸化ジルコニウム(以下、
ZrO2で示す)を分散相として分布させると、この結
果のAl23主体層は、Al23のもつすぐれた熱的安
定性、耐熱性、および高硬度が損なわれることなく、す
ぐれた靭性を具備するようになり、したがってこのAl
23主体層を硬質被覆層の中間層とする被覆超硬工具
は、高能率切削を目的として、速い切削速度での切削を
高送りや高切り込みなどの重切削条件で行うのに用いて
も前記中間層の靭性不足が原因のチッピング発生がなく
なり、長期に亘ってすぐれた耐摩耗性を発揮すること。
Means for Solving the Problems Accordingly, the present inventors have
From the viewpoints described above, in order to develop a coated carbide tool in which the hard coating layer exhibits excellent chipping resistance, focusing on the above-mentioned conventional coated carbide tools, as a result of conducting research,
(A) Oxidation of 0.1 to 10% by weight in the Al 2 O 3 layer (intermediate layer) constituting the hard coating layer of the above-mentioned conventional coated carbide tool, based on the total amount with Al 2 O 3. Zirconium (hereinafter
(Indicated by ZrO 2 ) as a disperse phase, the resulting Al 2 O 3 -based layer exhibits excellent thermal stability, heat resistance, and high hardness of Al 2 O 3 without loss. Toughness, and therefore this Al
A coated carbide tool with a 2 O 3 main layer as an intermediate layer of a hard coating layer is used for performing high-speed cutting at a high cutting speed under heavy cutting conditions such as high feed and high cutting. In addition, chipping caused by insufficient toughness of the intermediate layer is eliminated, and excellent wear resistance is exhibited over a long period of time.

【0006】(b)上記(a)のAl23の素地に、Z
rO2相が分散分布してなるAl2 3主体層は、例えば
化学蒸着装置を用い、反応ガス組成を、容量%で、Al
Cl3:1〜10%、ZrCl4:0.01〜10%、C
2:1〜30%、H2S:0.02〜2%、HCl:
0.5〜10%、N21〜15%、H2:残り、とし、か
つ、 反応雰囲気温度:850〜1050℃、 反応雰囲気圧力:40〜400Torr、 の条件で形成できること。
(B) Al of the above (a)TwoOThreeIn the base of Z
rOTwoAl with dispersed phasesTwoO ThreeThe main layer is, for example,
Using a chemical vapor deposition apparatus, the reaction gas composition
ClThree: 1-10%, ZrClFour: 0.01 to 10%, C
OTwo: 1 to 30%, HTwoS: 0.02-2%, HCl:
0.5-10%, NTwo1 to 15%, HTwo: The rest, and then
And the reaction atmosphere temperature: 850 to 1050 ° C., and the reaction atmosphere pressure: 40 to 400 Torr.

【0007】(c)上記(a)のAl23主体層の表面
に、まず、下地層として、反応ガス組成を、容量%で、
TiCl4:0.2〜10%、CO2:0.1〜10%、
Ar:5〜60%、H2:残り、とし、かつ、 反応雰囲気温度:800〜1100℃、 反応雰囲気圧力:30〜500torr、 とした条件で、0.1〜3μmの平均層厚を有し、か
つ、Tiに対する酸素の割合が原子比で1.25〜1.
90、すなわち、 組成式:TiOW、 で表わした場合、W:Tiに対する原子比で1.25〜
1.90、を満足するTi酸化物層を形成し、このTi
酸化物層の上に、最表面層として、通常の条件、すなわ
ち、反応ガス組成を、容量%で、TiCl4:0.2〜
10%、N2:4〜60%、H2:残り、とし、かつ、 反応雰囲気温度:800〜1100℃、 反応雰囲気圧力:30〜650torr、 とした条件で、0.05〜2μmの平均層厚を有するT
iN層を形成すると、この最表面層形成時に上記下地層
を構成するTi酸化物層の酸素が拡散してきてTi窒酸
化物層が形成されるようになり、この場合前記Ti窒酸
化物層形成後の最表面下地層は、酸素の割合がTiに対
する原子比で1.2〜1.7、すなわち、 組成式:TiOX、 で表わした場合、X:Tiに対する原子比で1.2〜
1.7、を満足するTi酸化物層となり、一方前記最表
面層は、拡散酸素の割合がTiに対する原子比で0.0
1〜0.4、すなわち、 組成式:TiN1-Y(O)Y、 で表わした場合(ただし、括弧内のOは上記最表面下地
層からの拡散酸素を示す)、Y:Tiに対する原子比で
0.01〜0.4、を満足するTi窒酸化物層となり、
この結果の上記Ti窒酸化物層およびTi酸化物層が硬
質被覆層の最表面層および最表面下地層として化学蒸着
および/または物理蒸着された被覆超硬工具において
は、特に前記Ti窒酸化物層が、上記TiN層と同等の
黄金色の表面色調を具備するため、工具の使用前後の識
別を可能とし、かつ被削材である各種鋼に対する付着性
のきわめて低いものであるため、高能率切削を目的とし
て切削速度を速くした条件で切削を行っても、高温加熱
された切粉が付着することがなくなることから、切刃の
チッピング発生が著しく抑制され、さらに上記(a)の
Al23主体層によってもたらされる硬質被覆層の靱性
向上によるチッピング発生抑制効果と相俟って、長期に
亘ってすぐれた切削性能を発揮するようになること。以
上(a)〜(c)に示される研究結果が得られたのであ
る。
(C) On the surface of the Al 2 O 3 main layer of (a), first, as an underlayer, a reaction gas composition was prepared by volume%.
TiCl 4: 0.2~10%, CO 2 : 0.1~10%,
Ar: 5 to 60%, H 2 : remaining, reaction atmosphere temperature: 800 to 1100 ° C., reaction atmosphere pressure: 30 to 500 torr, and an average layer thickness of 0.1 to 3 μm. And the ratio of oxygen to Ti is 1.25 to 1.
90, that is, when represented by the composition formula: TiO W , the atomic ratio to W: Ti is 1.25 to
1.90, a Ti oxide layer satisfying 1.90 is formed.
On the oxide layer, as the outermost surface layer, under the usual conditions, that is, the reaction gas composition is set to TiCl 4 : 0.2 to
10%, N 2: 4~60% , H 2: remainder, and then, and, Temperature of reaction atmosphere: 800 to 1100 ° C., reaction atmosphere pressure: 30~650Torr, between the conditions, the average layer 0.05~2μm T with thickness
When the iN layer is formed, oxygen of the Ti oxide layer constituting the underlayer diffuses during the formation of the outermost surface layer, so that a Ti nitride oxide layer is formed. In this case, the Ti nitride oxide layer is formed. In the subsequent outermost surface underlayer, the oxygen ratio is 1.2 to 1.7 in atomic ratio to Ti, that is, when represented by the composition formula: TiO x , the atomic ratio to X: Ti is 1.2 to 1.7.
1.7, while the outermost surface layer has a diffusion oxygen ratio of 0.0 as an atomic ratio to Ti.
1 to 0.4, namely, composition formula: TiN 1-Y (O) Y, in the case where expressed (however, O in parenthesis indicates the diffusion of oxygen from the outermost base layer), Y: atom to Ti It becomes a Ti nitride oxide layer satisfying a ratio of 0.01 to 0.4,
In the resulting coated carbide tool in which the Ti nitride oxide layer and the Ti oxide layer are chemically and / or physically deposited as the outermost surface layer and the outermost surface underlayer of the hard coating layer, the Ti nitride oxide layer and the Ti oxide layer are particularly preferable. Since the layer has a golden surface tone equivalent to that of the above-mentioned TiN layer, it is possible to identify before and after use of the tool, and since it has extremely low adhesion to various steels as work materials, it has a high efficiency. Even when cutting is performed under the condition that the cutting speed is increased for the purpose of cutting, chipping heated at a high temperature is prevented from adhering, so that chipping of the cutting blade is remarkably suppressed, and the above-mentioned (a) Al 2 Excellent cutting performance over a long period of time in combination with the effect of suppressing chipping due to the improvement in toughness of the hard coating layer provided by the O 3 main layer. The research results shown in (a) to (c) above were obtained.

【0008】この発明は、上記の研究結果に基づいてな
されたものであって、超硬基体の表面に、下部層、中間
層、および上部層からなる硬質被覆層を3〜35μmの
全体平均層厚で化学蒸着および/または物理蒸着してな
る被覆超硬工具にして、(a)上記下部層を、それぞれ
0.1〜20μmの平均層厚を有し、かつ、TiC層、
TiN層、Ti23層、TiCN層、TiCO層、Ti
NO層、およびTiCNO層のうちの1種または2種以
上からなるTi化合物層で構成し、(b)上記中間層
を、1〜15μmの平均層厚を有し、かつAl23の素
地に、Al23との合量に占める割合で、0.1〜10
重量%のZrO2が分散相として分布した組織を有する
Al23主体層で構成し、(c)上記上部層を、 0.1〜3μmの平均層厚を有し、かつ、 組成式:TiOX 、 で表わした場合、X:Tiに対する原子比で1.2〜
1.7、を満足するTi酸化物層からなる最表面下地層
と、 0.05〜2μmの平均層厚を有し、かつ、 組成式:TiN1-Y(O)Y、 で表わした場合(ただし、括弧内のOは上記最表面下地
層からの拡散酸素を示す)、Y:Tiに対する原子比で
0.01〜0.4、を満足するTi窒酸物層からなる最
表面層で構成してなる、高能率切削で硬質被覆層がすぐ
れた耐チッピング性を発揮する被覆超硬工具に特徴を有
するものである。
The present invention has been made on the basis of the above research results, and has a hard coating layer comprising a lower layer, an intermediate layer, and an upper layer on the surface of a superhard substrate, having a total average layer thickness of 3 to 35 μm. (A) the lower layers each having an average layer thickness of 0.1 to 20 μm, and a TiC layer;
TiN layer, Ti 2 O 3 layer, TiCN layer, TiCO layer, Ti
A Ti compound layer comprising one or more of a NO layer and a TiCNO layer, and (b) the intermediate layer has an average layer thickness of 1 to 15 μm and is made of an Al 2 O 3 substrate. To the total amount with Al 2 O 3 , 0.1 to 10
Composed of Al 2 O 3 main layer having a tissue ZrO 2 weight% is distributed as a dispersed phase, (c) a said upper layer has an average layer thickness of 0.1 to 3 m, and the composition formula: When represented by TiO x , the atomic ratio to X: Ti is 1.2 to 1.2.
1.7, an outermost underlayer consisting of a Ti oxide layer satisfying 1.7, an average layer thickness of 0.05 to 2 μm, and represented by the composition formula: TiN 1-Y (O) Y. (However, O in parentheses indicates oxygen diffused from the outermost surface underlayer). The outermost surface layer of a Ti nitride layer satisfying an atomic ratio of 0.01 to 0.4 with respect to Y: Ti. The present invention is characterized by a coated carbide tool having a hard coating layer which exhibits excellent chipping resistance by high-efficiency cutting.

【0009】つぎに、この発明の被覆超硬工具におい
て、硬質被覆層に関して、上記の通りに数値限定した理
由を説明する。 (1)中間層のAl23主体層におけるZrO2の分布
割合 上記の通りAl23の素地に分散相として分布する微細
なZrO2には、Al23のもつすぐれた熱的安定性、
耐熱性、および高硬度を損なうことなく、靭性を向上さ
せる作用があるが、その分布割合がAl23との合量に
占める割合で0.1重量%未満では、速い切削速度での
重切削に際して、切刃にチッピングが発生するのを抑制
するのに十分な靭性を確保することができず、一方その
分布割合が同10重量%を越えるとAl23の素地によ
ってもたらされる上記の特性に低下傾向が現れるように
なることから、その分布割合をAl23との合量に占め
る割合で0.1〜10重量%、望ましくは0.3〜6重
量%と定めた。
Next, the reason why the numerical values of the hard coating layer in the coated cemented carbide tool of the present invention are limited as described above will be described. (1) Distribution Ratio of ZrO 2 in Al 2 O 3 Main Layer of Intermediate Layer As described above, fine ZrO 2 distributed as a dispersed phase in an Al 2 O 3 base material has excellent thermal properties of Al 2 O 3. Stability,
It has the effect of improving toughness without impairing heat resistance and high hardness. However, if its distribution ratio is less than 0.1% by weight in the total amount with Al 2 O 3 , the weight at a high cutting speed is low. At the time of cutting, sufficient toughness cannot be ensured to suppress the occurrence of chipping on the cutting edge. On the other hand, if the distribution ratio exceeds 10% by weight, the above-mentioned effect caused by the base material of Al 2 O 3 is obtained. since so it appears decline in properties, 0.1 to 10 wt% as a percentage of the distribution ratio to the total amount of the Al 2 O 3, preferably defined as 0.3 to 6% by weight.

【0010】(2)中間層の平均層厚 中間層を構成するAl23主体層は、Al23素地によ
るすぐれた耐酸化性、熱的安定性、および高硬度、並び
にZrO2によるすぐれた靭性を具備するものである
が、その平均層厚が1μm未満では所望の耐摩耗性およ
び靭性を確保することができず、一方その平均層厚が1
5μmを越えると、切刃に欠けやチッピングが発生し易
くなることから、その平均層厚を1〜15μm、望まし
くは2〜10μmと定めた。
(2) Average Layer Thickness of Intermediate Layer The Al 2 O 3 main layer constituting the intermediate layer has excellent oxidation resistance, thermal stability and high hardness due to the Al 2 O 3 base, and ZrO 2 . Although it has excellent toughness, if the average layer thickness is less than 1 μm, the desired wear resistance and toughness cannot be secured, while the average layer thickness is 1 μm.
If it exceeds 5 μm, chipping and chipping easily occur in the cutting blade, so the average layer thickness is set to 1 to 15 μm, preferably 2 to 10 μm.

【0011】(3)上部層の最表面層を構成するTi窒
酸物層の拡散酸素の割合(Y値) Y値をTiに対する原子比で0.01〜0.40とした
のは、その値が0.01未満では切粉に対する付着性抑
制に所望の効果を確保することができず、一方その値が
0.40を越えると、層中に気孔が形成され易くなり、
健全な最表面層の安定的形成が難しくなるという理由に
よるものである。
(3) Percentage of diffusion oxygen (Y value) of Ti nitride layer constituting the outermost surface layer of the upper layer The Y value is set to 0.01 to 0.40 in atomic ratio with respect to Ti. If the value is less than 0.01, the desired effect cannot be ensured in suppressing adhesion to chips, while if the value exceeds 0.40, pores are easily formed in the layer,
This is because it is difficult to stably form a sound outermost layer.

【0012】(4)上部層の最表面下地層における酸素
の割合(W値およびX値) 上記の通り最表面層を構成するTi窒酸物層は、まず、
下地層として、酸素の割合をTiに対する原子比で1.
25〜1.90(W値)としたTi酸化物層を形成し、
ついで前記下地層の上に通常の条件でTiN層を蒸着す
ることにより形成されるものであり、したがって前記T
iN層形成時における前記下地層からの酸素の拡散が不
可欠となるが、前記下地層を構成するTi酸化物層のW
値が1.25未満であると、前記TiN層への酸素の拡
散反応が急激に低下し、最表面層における拡散酸素の割
合(Y値)をTiに対する原子比で0.01以上にする
ことができず、一方同W値が1.90を越えると、前記
最表面層における拡散酸素の割合がTiに対する原子比
で0.40を越えて多くなってしまうことから、W値を
1.25〜1.90と定めたものであり、この場合最表
面層形成後の最表面下地層における酸素の割合(X値)
はTiに対する原子比で1.2〜1.7の範囲内の値を
とるようになる、言い換えれば最表面層形成後の最表面
下地層のX値が1.2〜1.7を満足する場合に、前記
最表面層のY値は0.01〜0.40を満足するものと
なるのである。
(4) Ratio of oxygen (W value and X value) in the outermost surface underlayer of the upper layer As described above, the Ti nitride layer constituting the outermost layer is first formed by:
As the underlayer, the ratio of oxygen was set to 1.
Forming a Ti oxide layer with 25 to 1.90 (W value);
Then, a TiN layer is formed by evaporating the TiN layer on the underlayer under normal conditions.
The diffusion of oxygen from the underlayer during the formation of the iN layer is indispensable.
When the value is less than 1.25, the diffusion reaction of oxygen into the TiN layer is sharply reduced, and the ratio (Y value) of the diffused oxygen in the outermost surface layer is set to 0.01 or more in atomic ratio to Ti. On the other hand, if the W value exceeds 1.90, the ratio of the diffused oxygen in the outermost surface layer exceeds 0.40 in atomic ratio to Ti, so that the W value is increased to 1.25. In this case, the ratio of oxygen (X value) in the outermost surface underlayer after the formation of the outermost surface layer
Takes a value in the range of 1.2 to 1.7 in atomic ratio to Ti. In other words, the X value of the outermost underlayer after the formation of the outermost layer satisfies 1.2 to 1.7. In this case, the Y value of the outermost surface layer satisfies 0.01 to 0.40.

【0013】(5)硬質被覆層の中間層を除く構成層の
平均層厚 まず、下部層を構成するTi化合物層には、いずれも共
通する性質として構成層のいずれとも強固に密着する性
質があり、この結果構成層相互間にすぐれた層間密着性
が確保されるようになるが、この場合粒状結晶組織のも
のでは、その平均層厚が0.1μm未満では所望のすぐ
れた層間密着性を確保することができず、またすぐれた
靭性を有する縦長成長結晶組織のTiCN層では、所望
の靭性を確保するには3μm以上の平均層厚が必要であ
り、一方前記粒状結晶組織のものでは、その平均層厚が
5μmを越え、また前記縦長成長結晶組織のTiCN層
では、その平均層厚が20μmを越えると、いずれも急
激に粒成長するようになって、切刃にチッピングが発生
し易くなることから、その平均層厚を、粒状結晶組織の
ものでは0.1〜5μm、縦長成長結晶組織のTiCN
層では、3〜20μm、すなわちTi化合物層としての
平均層厚を0.1〜20μmと定めた。また、硬質被覆
層を構成する最表面層および最表面下地層の平均層厚
を、それぞれ0.05〜2μmおよび0.1〜3μmと
したのは、その平均層厚が0.05μm未満および0.
1μm未満では、前者にあっては所望の表面色調(黄金
色)を確保することができず、また後者にあっては最表
面層への酸素供給が不十分になり、一方前者の色調付与
作用は2μm、後者の酸素供給作用は3μmの平均層厚
で十分満足に行うことができるという理由にもとづくも
のである。さらに、硬質被覆層の平均層厚を3〜35μ
mとしたのは、その層厚が3μmでは所望のすぐれた耐
摩耗性を確保することができず、一方その層厚が35μ
mを越えると、切刃に欠けやチッピングが発生し易くな
るという理由によるものである。
(5) Average Layer Thickness of Constituent Layers Excluding the Intermediate Layer of the Hard Coating Layer First, the Ti compound layer constituting the lower layer has a common property that it is strongly adhered to any of the constituent layers. As a result, excellent interlayer adhesion between the constituent layers is ensured. In this case, if the average crystal layer thickness is less than 0.1 μm, the desired excellent interlayer adhesion can be obtained. In a TiCN layer having a vertically-grown crystal structure that cannot be secured and has excellent toughness, an average layer thickness of 3 μm or more is required to secure desired toughness. If the average layer thickness exceeds 5 μm, and in the TiCN layer having the vertically-grown crystal structure, if the average layer thickness exceeds 20 μm, all of the grains grow rapidly and chipping easily occurs on the cutting edge. Become TiCN from, the average layer thickness, than that of the granular crystal structure 0.1 to 5 [mu] m, the longitudinal growth crystal structure
The layer was determined to have a thickness of 3 to 20 μm, that is, an average layer thickness of 0.1 to 20 μm as a Ti compound layer. Further, the average layer thickness of the outermost layer and the outermost underlying layer constituting the hard coating layer is set to 0.05 to 2 μm and 0.1 to 3 μm, respectively, because the average layer thickness is less than 0.05 μm and 0 to 2 μm. .
If the thickness is less than 1 μm, the former cannot achieve a desired surface color tone (golden color), and the latter has insufficient oxygen supply to the outermost surface layer. Is based on the reason that the oxygen supply effect of 2 μm can be sufficiently achieved with an average layer thickness of 3 μm. Furthermore, the average thickness of the hard coating layer is 3 to 35 μm.
The reason for this is that if the layer thickness is 3 μm, the desired excellent wear resistance cannot be secured, while the layer thickness is 35 μm.
If it exceeds m, chipping and chipping of the cutting edge are likely to occur.

【0014】[0014]

【発明の実施の形態】つぎに、この発明の被覆超硬工具
を実施例により具体的に説明する。原料粉末として、い
ずれも0.5〜4μmの範囲内の所定の平均粒径を有す
るWC粉末、(Ti,W)C(重量比で、以下同じ、T
iC/WC=30/70)粉末、(Ti,W)CN(T
iC/TiN/WC=24/20/56)粉末、(T
a,Nb)C(TaC/NbC=90/10)粉末、C
32粉末、およびCo粉末を用意し、これら原料粉末
を表1に示される配合組成に配合し、ボールミルで72
時間湿式混合し、乾燥した後、1ton/cm2の圧力
で所定形状の圧粉体にプレス成形し、この圧粉体を同じ
く表1に示される条件で真空焼結することによりISO
・CNMG120412に規定するスローアウエイチッ
プ形状をもった超硬基体A〜Fをそれぞれ製造した。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the coated carbide tool of the present invention will be specifically described with reference to examples. As the raw material powder, WC powder having a predetermined average particle diameter in the range of 0.5 to 4 μm, (Ti, W) C (the same in weight ratio, T
iC / WC = 30/70) powder, (Ti, W) CN (T
iC / TiN / WC = 24/20/56) powder, (T
a, Nb) C (TaC / NbC = 90/10) powder, C
An r 3 C 2 powder and a Co powder were prepared, and these raw material powders were blended in the blending composition shown in Table 1, and were mixed with a ball mill to obtain a powder.
After being wet-mixed for one hour and dried, it is pressed into a green compact of a predetermined shape at a pressure of 1 ton / cm 2, and this green compact is vacuum-sintered under the conditions shown in Table 1 to obtain ISO.
-Carbide bases A to F each having a throw-away tip shape specified in CNMG120412 were manufactured.

【0015】ついで、これらの超硬基体A〜Fの表面
に、ホーニングを施した状態で、通常の化学蒸着装置を
用い、表2〜4(表2中のl−TiCNは特開平6−8
010号公報に記載される縦長成長結晶組織をもつTi
CN層の形成条件を示すものであり、これ以外は通常の
粒状結晶組織の形成条件を示すものである)に示される
条件にて、表5、6に示される組成および目標層厚の下
部層(Ti化合物層)および中間層(Al23主体
層)、さらに上部層(拡散酸素含有のTi窒酸化物層か
らなる最表面層および拡散酸素供給用Ti酸化物層から
なる最表面下地層)で構成された硬質被覆層を形成する
ことにより本発明被覆超硬工具1〜10をそれぞれ製造
するとともに、中間層をAl23層で、上部層をTiN
層で構成する以外は同一の条件で従来被覆超硬工具1〜
10をそれぞれ製造した。
Next, the surfaces of these superhard substrates A to F were honed, and a conventional chemical vapor deposition apparatus was used. Tables 2 to 4 (l-TiCN in Table 2 was
No. 010, which has a vertically elongated crystal structure
Under the conditions shown in Tables 5 and 6, under the conditions shown in Tables 5 and 6. (Ti compound layer), an intermediate layer (Al 2 O 3 main layer), and an upper layer (a top surface layer composed of a diffusion oxygen-containing Ti oxynitride layer and a top surface underlayer composed of a diffusion oxygen supply Ti oxide layer) ), The coated superhard tools 1 to 10 of the present invention are manufactured respectively, the intermediate layer is an Al 2 O 3 layer, and the upper layer is TiN.
Conventional coated carbide tools 1 to 1
10 were each manufactured.

【0016】なお、この結果得られた本発明被覆超硬工
具1〜10の硬質被覆層について、これの中間層である
Al23主体層におけるZrO2の分布割合を電子プロ
ーブマイクロアナライザー(EPMA)を用いて測定し
たところ、表3に示される目標値と実質的に同じ値を示
し、また、上部層を構成する最表面層および最表面下地
層について、酸素の含有割合(Y値およびX値)をオー
ジェ発光分光分析装置を用いて測定したところ、表7に
示される値を示した。また、いずれの被覆超硬工具も黄
金色の表面色調を有し、かつ硬質被覆層を構成する構成
層もそれぞれ目標層厚と実質的に同じ平均層厚を示し
た。
The distribution ratio of ZrO 2 in the Al 2 O 3 main layer, which is the intermediate layer of the hard coating layers of the coated carbide tools 1 to 10 of the present invention obtained as a result, was measured by using an electron probe microanalyzer (EPMA). ) Shows substantially the same value as the target value shown in Table 3, and the oxygen content (Y value and X value) of the outermost surface layer and the outermost underlayer constituting the upper layer. Was measured using an Auger emission spectrometer, and the values shown in Table 7 were obtained. In addition, all the coated carbide tools had a golden surface tone, and the constituent layers constituting the hard coating layer also showed substantially the same average layer thickness as the target layer thickness.

【0017】つぎに、上記本発明被覆超硬工具1〜10
および従来被覆超硬工具1〜10について、 被削材:JIS・S30C(硬さ:HB168)の丸
棒、 切削速度:355m/min.、 切り込み:1.5mm、 送り:0.2mm/rev.、 切削時間:5分、 の条件での炭素鋼の乾式高速連続切削試験、 被削材:JIS・SNCM439(硬さ:HB245)
の長さ方向等間隔4本縦溝入り丸棒、 切削速度:300m/min.、 切り込み:1.7mm、 送り:0.25mm/rev.、 切削時間:5分、 の条件での合金鋼の乾式高速断続切削試験、 被削材:JIS・SCM440(硬さ:HB180)の
丸棒、 切削速度:250m/min.、 切り込み:1.7mm、 送り:0.7mm/rev.、 切削時間:5分、 の条件での合金鋼の乾式高送り高速連続切削試験、 被削材:JIS・S25C(硬さ:HB162)の長さ
方向等間隔4本縦溝入り丸棒、 切削速度:250m/min.、 切り込み:7.3mm、 送り:0.25mm/rev.、 切削時間:5分、 の条件での炭素鋼の乾式高切り込み高速断続切削試験、
を行い、いずれの切削試験でも切刃の最大逃げ面摩耗幅
を測定した。この測定結果を表7に示した。
Next, the coated carbide tools of the present invention 1 to 10
Workpiece: JIS S30C (hardness: HB168) round bar, Cutting speed: 355 m / min. Infeed: 1.5 mm Feed: 0.2 mm / rev. Cutting time: 5 minutes Dry high-speed continuous cutting test of carbon steel under the following conditions: Work material: JIS SNCM439 (Hardness: HB245)
Round bar with four longitudinal grooves at equal intervals in the longitudinal direction, Cutting speed: 300 m / min. Notch: 1.7 mm Feed: 0.25 mm / rev. Cutting time: 5 minutes Dry high-speed intermittent cutting test of alloy steel under the following conditions: Work material: JIS SCM440 (hardness: HB180) round bar, Cutting speed: 250 m / min. Infeed: 1.7 mm Feed: 0.7 mm / rev. , Cutting time: 5 minutes, Dry high-feed, high-speed continuous cutting test of alloy steel under the following conditions: Work material: JIS S25C (hardness: HB162), round bar with four longitudinal grooves at regular intervals in the longitudinal direction, Cutting Speed: 250 m / min. Infeed: 7.3 mm Feed: 0.25 mm / rev. , Cutting time: 5 minutes, Dry high-cut high-speed intermittent cutting test of carbon steel under the following conditions:
And the maximum flank wear width of the cutting edge was measured in each cutting test. Table 7 shows the measurement results.

【0018】[0018]

【表1】 [Table 1]

【0019】[0019]

【表2】 [Table 2]

【0020】[0020]

【表3】 [Table 3]

【0021】[0021]

【表4】 [Table 4]

【0022】[0022]

【表5】 [Table 5]

【0023】[0023]

【表6】 [Table 6]

【0024】[0024]

【表7】 [Table 7]

【0025】[0025]

【発明の効果】表5〜7に示される結果から、硬質被覆
層の上部層を構成する最表面層がTiN層の形成時に下
地層から拡散してきた酸素と反応して形成されたTi窒
酸化物層からなると共に、同中間層がAl23主体層で
構成された本発明被覆超硬工具1〜10は、高い発熱を
伴う鋼の速い切削速度での切削でも、前記Ti窒酸化物
層が高温加熱の切粉との親和性がきわめて低く、切粉が
前記Ti窒酸化物層に付着することがないことから、切
刃にチッピングの発生なく、またさらなる高能率切削を
目的として、前記の速い切削速度での切削を高送りおよ
び高切込みの重切削条件で行っても、前期Al23主体
層がすぐれた靭性をもつことから、切刃にチッピングが
発生することはなく、すぐれた耐摩耗性を発揮するのに
対して、硬質被覆層の上部層(最表面層)がTiN層
で、かつ中間層がAl23層で構成された従来被覆超硬
工具1〜10においては、いずれも速い切削速度での切
削では、切粉が前記TiN層に付着し易く、前記TiN
層が他の構成層と共に前記切粉によって剥がし取られる
ことから、切刃にチッピングが発生し易く、比較的短時
間で使用寿命に至り、また特に前記の速い切削速度での
切削に加えて、切削条件が高送りおよび高切込みの重切
削である場合には、中間層であるAl23層の靭性不足
が原因でチッピングの発生が加速されるようになり、使
用寿命の一段の短命化が避けられないことが明らかであ
る。上述のように、この発明の被覆超硬工具は、通常の
条件での各種鋼や鋳鉄などの連続切削および断続切削は
勿論のこと、高能率切削を目標としてこれらの切削を速
い切削速度で行っても、さらに苛酷な条件として速い切
削速度での切削を高送りおよび高切込みの重切削条件で
行っても、使用前後の識別を可能とした状態で、切刃に
チッピングの発生なく、すぐれた耐摩耗性を長期に亘っ
て発揮するものであるから、切削加工の省力化および省
エネ化、さらに低コスト化に十分満足に対応できるもの
である。
From the results shown in Tables 5 to 7, it can be seen that the uppermost layer constituting the upper layer of the hard coating layer reacts with oxygen diffused from the underlayer during the formation of the TiN layer to form Ti oxynitride. The coated cemented carbide tools 1 to 10 according to the present invention, which are composed of a material layer and the intermediate layer is composed of an Al 2 O 3 main layer, can be used for cutting the steel with high heat even at a high cutting speed. The layer has a very low affinity for high-temperature heated chips, and since the chips do not adhere to the Ti-nitride layer, there is no chipping on the cutting edge, and for the purpose of further high-efficiency cutting, Even if the cutting at the high cutting speed is performed under high feed and high cutting conditions under heavy cutting conditions, since the Al 2 O 3 main layer has excellent toughness, chipping does not occur on the cutting edge, Demonstrates excellent wear resistance, but hard coating In the conventional coated carbide tools 1 to 10 in which the upper layer (outermost layer) of the covering layer is a TiN layer and the intermediate layer is an Al 2 O 3 layer, the cutting at a high cutting speed is all Powder easily adheres to the TiN layer,
Since the layer is peeled off by the cutting powder together with the other constituent layers, chipping is likely to occur on the cutting blade, leading to a service life in a relatively short time, and especially in addition to the cutting at the high cutting speed, When the cutting conditions are heavy cutting with high feed and high depth of cut, chipping is accelerated due to insufficient toughness of the Al 2 O 3 layer as the intermediate layer, and the service life is further shortened. It is clear that is inevitable. As described above, the coated cemented carbide tool of the present invention performs these cuttings at a high cutting speed with the aim of high efficiency cutting as well as continuous cutting and interrupted cutting of various steels and cast irons under normal conditions. Even under severe conditions, high-speed and high-cut heavy-duty cutting at high cutting speeds is possible, with the ability to identify before and after use, and excellent cutting edges without chipping. Since the wear resistance is exhibited over a long period of time, it is possible to satisfactorily cope with the labor saving and energy saving of the cutting process and the cost reduction.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 大鹿 高歳 埼玉県大宮市北袋町1−297 三菱マテリ アル株式会社総合研究所内 (72)発明者 植田 稔晃 埼玉県大宮市北袋町1−297 三菱マテリ アル株式会社総合研究所内 Fターム(参考) 3C046 FF03 FF10 FF17 FF19 FF22 FF25 4K029 AA04 BA41 BA44 BA48 BA54 BA55 BA60 BB02 BC00 BD05 EA01 4K030 BA18 BA35 BA36 BA38 BA41 BA43 BA46 BB12 CA03 JA01 LA01 LA22  ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Takashi Oshika 1-297 Kitabukurocho, Omiya City, Saitama Prefecture Inside Mitsubishi Materials Research Institute (72) Inventor Toshiaki Ueda 1-297 Kitabukurocho, Omiya City, Saitama Mitsubishi F-term in Reference Materials Research Laboratory (reference) 3C046 FF03 FF10 FF17 FF19 FF22 FF25 4K029 AA04 BA41 BA44 BA48 BA54 BA55 BA60 BB02 BC00 BD05 EA01 4K030 BA18 BA35 BA36 BA38 BA41 BA43 BA46 BB12 CA03 JA01 LA01 LA22

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 炭化タングステン基超硬合金基体の表面
に、下部層、中間層、および上部層からなる硬質被覆層
を3〜35μmの全体平均層厚で化学蒸着および/また
は物理蒸着してなる表面被覆超硬合金製切削工具にし
て、 (a)上記下部層を、それぞれ0.1〜20μmの平均
層厚を有し、かつ、Tiの炭化物層、窒化物層、酸化物
層、炭窒化物層、炭酸化物層、窒炭酸化物層、および炭
窒酸化物層のうちの1種または2種以上からなるTi化
合物層で構成し、 (b)上記中間層を、1〜15μmの平均層厚を有し、
かつ酸化アルミニウムの素地に、酸化アルミニウムとの
合量に占める割合で、0.1〜10重量%の酸化ジルコ
ニウムが分散相として分布した組織を有する酸化アルミ
ニウム主体層で構成し、 (c)上記上部層を、 0.1〜3μmの平均層厚を有し、かつ、 組成式:TiOX、 で表わした場合、 X:Tiに対する原子比で1.2〜1.7、 を満足するTi酸化物層からなる最表面下地層と、 0.05〜2μmの平均層厚を有し、かつ、 組成式:TiN1-Y(O)Y、 で表わした場合(ただし、括弧内のOは上記最表面下地
層からの拡散酸素を示す)、 Y:Tiに対する原子比で0.01〜0.4、 を満足するTi窒酸物層からなる最表面層で構成したこ
と、を特徴とする高能率切削で硬質被覆層がすぐれた耐
チッピング性を発揮する表面被覆超硬合金製切削工具。
1. A hard coating layer comprising a lower layer, an intermediate layer and an upper layer is formed on the surface of a tungsten carbide-based cemented carbide substrate by chemical vapor deposition and / or physical vapor deposition with a total average layer thickness of 3 to 35 μm. A cutting tool made of a surface-coated cemented carbide is used. (A) The lower layers each have an average layer thickness of 0.1 to 20 μm, and a carbide layer, a nitride layer, an oxide layer, and a carbonitride of Ti. (B) the intermediate layer is an average layer having a thickness of 1 to 15 μm. Having a thickness,
And an aluminum oxide base layer comprising an aluminum oxide main layer having a structure in which 0.1 to 10% by weight of zirconium oxide is distributed as a dispersed phase in a proportion of the total amount of the aluminum oxide and the aluminum oxide. When the layer has an average layer thickness of 0.1 to 3 μm and is represented by the composition formula: TiO x , the Ti oxide satisfies the following: X: an atomic ratio to Ti of 1.2 to 1.7. A layer having an average thickness of 0.05 to 2 μm and a composition formula: TiN 1-Y (O) Y , where O in parentheses is (Indicating oxygen diffused from the surface underlayer), and an outermost surface layer composed of a Ti nitride layer satisfying an atomic ratio of 0.01 to 0.4 with respect to Y: Ti. Table with hard coating layer showing excellent chipping resistance in cutting Coated cemented carbide cutting tools.
JP21882699A 1999-08-02 1999-08-02 Surface coated cemented carbide cutting tool with excellent chipping resistance with high efficiency cutting and hard coating layer Expired - Lifetime JP3994590B2 (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1247789A2 (en) * 2001-02-16 2002-10-09 Sandvik Aktiebolag Alpha-alumina coated cutting tool
JP2008126342A (en) * 2006-11-17 2008-06-05 Mitsubishi Materials Corp Surface-coated cutting tool having rigid coating layer exhibiting excellent chipping resistance
JP2009255253A (en) * 2008-04-18 2009-11-05 Sumitomo Electric Hardmetal Corp Surface-coated cutting tool
JP2009285807A (en) * 2008-05-30 2009-12-10 Sumitomo Electric Hardmetal Corp Surface-coated cutting tool
JP2013505361A (en) * 2009-09-23 2013-02-14 バルター アクチェンゲゼルシャフト Tool coating
CN103205728A (en) * 2012-01-17 2013-07-17 株洲钻石切削刀具股份有限公司 Surface-modified coated cutting tool and preparation method thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1247789A2 (en) * 2001-02-16 2002-10-09 Sandvik Aktiebolag Alpha-alumina coated cutting tool
EP1247789A3 (en) * 2001-02-16 2004-03-31 Sandvik Aktiebolag Alpha-alumina coated cutting tool
JP2008126342A (en) * 2006-11-17 2008-06-05 Mitsubishi Materials Corp Surface-coated cutting tool having rigid coating layer exhibiting excellent chipping resistance
JP2009255253A (en) * 2008-04-18 2009-11-05 Sumitomo Electric Hardmetal Corp Surface-coated cutting tool
JP2009285807A (en) * 2008-05-30 2009-12-10 Sumitomo Electric Hardmetal Corp Surface-coated cutting tool
JP2013505361A (en) * 2009-09-23 2013-02-14 バルター アクチェンゲゼルシャフト Tool coating
CN103205728A (en) * 2012-01-17 2013-07-17 株洲钻石切削刀具股份有限公司 Surface-modified coated cutting tool and preparation method thereof

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