JP2001033079A - Thermohygrostat - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a thermohygrostat which is able to accurately and readily conduct control of cooling capacity, and at the same time display an arbitrary atmospheric characteristic. SOLUTION: A device comprises a cooling device comprising a cooling coil which is in contact with the atmosphere circulating a room, cooling capacity controllers 6, 7, 8, an operational device 5 for inputting at least two values among four characteristics of a dry-bulb temperature, wet-bulb temperature, relative humidity and dew point temperature and calculating at least one value of the remaining characteristics, detecting devices 9, 10 for detecting at least two characteristics among the four characteristics in the room and a display device 15 for indicating at least one of the characteristics.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a constant-temperature and constant-humidity device used for a weather resistance test of a material or a device, and particularly to efficiently controlling both a cooling capacity with high accuracy and displaying an atmosphere index. The present invention relates to a thermo-hygrostat that can be used.

[0002]

2. Description of the Related Art For weather resistance testing of materials and equipment which pass through various parts of the world where the climate changes drastically, the temperature and humidity can be freely set from the viewpoint of establishing and repeatedly executing standard tests with reproducibility. It is necessary to use an environmental test room that can be set accurately and with high accuracy. In such an environment test room facility, the heat source temperature, which is the temperature of the cooling medium, is changed at a considerable frequency according to the set temperature and the set humidity. The method of designating the target atmosphere in the environmental test is not one, and differs depending on the material or the device to be tested. Usually, the dry bulb temperature (D
B: Dry Bulb) and relative humidity (RH: Relative Humidity) specify the atmosphere of temperature and humidity. But, for example,
In tests related to semiconductor materials, dry bulb temperature DB and dew point temperature (DP:
Dew Point), and in an air conditioner-related test, an atmosphere is specified by a dry bulb temperature DB and a wet bulb temperature (WB: Wet Bulb).

[0003] In the above, a test example in which the dry-bulb temperature is always used to designate the temperature has been described, but in principle, it is not necessary to specially treat the dry-bulb temperature. That is, dry bulb temperature DB, wet bulb temperature W
If any two values among the four atmosphere indices B, relative humidity RH, and dew point temperature DP are known, the remaining two atmosphere indices can be calculated. The remaining atmosphere indices other than the designated atmosphere indices can be derived using a psychrometric chart.

FIG. 12 is a diagram showing an outline of a psychrometric chart.
In the psychrometric chart, the horizontal axis represents the dry bulb temperature DB, and the vertical axis represents the absolute humidity χ. However, the temperature coordinates of the point on the curve of 100% relative humidity RH are wet bulb temperature WB or dew point temperature DP
Represents In the case of specifying the normal atmosphere including the dry bulb temperature, for example, point A (25 ° C., 80%) where the dry bulb temperature DB is 25 ° C. and the relative humidity RH is 80% is specified. At this time, if the point at which the enthalpy line passing through the point A intersects the curve of 100% relative humidity is the point B, the temperature coordinate of the point B is 22.4.
C is the wet bulb temperature WB. If the point at which the horizontal line passing through the point A intersects the curve of 100% relative humidity is the point C, the temperature coordinate 21.2 ° C. at the point C is the dew point temperature DP. The psychrometric chart includes a curve group representing the temperature dependence of each relative humidity RH, a point P representing a combination of a certain dry bulb temperature DB and an absolute humidity 、, and a wet bulb temperature WB realized in the atmosphere at the point P. An enthalpy line group that connects to is entered.

For example, when the dry bulb temperature DB and the wet bulb temperature WB are designated, the wet bulb temperature WB is a straight line parallel to the vertical axis.
An intersection point B 'between the line and the curve having a relative humidity of 100% is determined. Needless to say, the temperature coordinate of point B 'is the specified wet bulb temperature.
It is WB. Next, when an intersection A ′ between the enthalpy line passing through the intersection B ′ and the dry-bulb temperature DB line, which is a straight line parallel to the vertical axis, is obtained, the curve of the relative humidity passing through the point A ′ gives the relative humidity RH. Further, the dew point temperature DP can be obtained as a temperature coordinate of an intersection C ′ of a horizontal line passing through the point A ′ and a curve of 100% relative humidity. Even when the dry-bulb temperature DB and the dew-point temperature DP are designated, other atmospheric indices can be similarly obtained from the psychrometric chart.

When the dry-bulb temperature is not included, for example, when the wet-bulb temperature WB and the relative humidity RH are designated, first, a straight line parallel to the vertical axis representing the wet-bulb temperature and a curve of the relative humidity 100 are first obtained. An intersection B "is determined. Next, an enthalpy line passing through the point B" is specified. When an intersection A "where the specified enthalpy line intersects with the curve of the designated relative humidity is found, a point A"
Gives the dry-bulb temperature DB. When the intersection C "of the horizontal line passing through the point A" and the curve of 100% relative humidity is obtained, the temperature coordinate of the point C "is the dew point temperature DP.

On the other hand, in the operation of the constant temperature and humidity apparatus, it is essential to know the dew point temperature DP for controlling moisture. FIG. 13 is a conceptual diagram illustrating the reason why the dew point temperature DP is essential for the operation of the constant temperature and humidity apparatus. FIG. 13 (a) is a diagram showing extra moisture when the atmosphere A1 changes to the atmosphere A2, that is, extra absolute humidity ΔW, and FIG. 13 (b) shows the extra moisture in the cooling coil. It is a figure showing the state where ΔW is discharged to the drain. As shown in FIG. 13A, when shifting from the atmosphere A1 to the atmosphere A2, the heat source temperature, that is, the refrigerant temperature is cooled to DP2 which is the dew point temperature of the atmosphere A2. For this reason, the moisture ΔW, which is the difference between the absolute humidity χ ₁ and χ ₂ , precipitates as moisture due to condensation or the like, and as shown in FIG. 13 (b), the condensed moisture is discharged from the drain or the like. Thereafter, the air is heated to the temperature of the target atmosphere A2. As shown in FIG. 13A, when changing the atmosphere in the lower left direction, first, the refrigerant is cooled to the dew point temperature in order to remove excess moisture from the air as described above. Actually, the heat source temperature is cooled to about (dew point temperature −5 ° C.) in order to shorten the cooling time.

When the atmosphere is changed in the upper right direction, for example, when the atmosphere is changed from A2 to A1, the refrigerant temperature is heated to DP1, which is the dew point temperature of A1, and humidified until dew condensation occurs at the temperature DP1. Then, it is heated to the temperature of A1.

The above description can be summarized as follows. When the current atmosphere is changed to the target atmosphere, first, in order to adjust the humidity, the absolute humidity 目標 of the target atmosphere is realized by setting the temperature of the atmosphere to the dew point temperature. For this operation, the dew point temperature in the target atmosphere is required.

Conventionally, in order to know the dew point temperature of the target atmosphere, the psychrometric chart shown in FIG. 12 is separately prepared, the dew point temperature is obtained after the above procedure, and the setting of the heat source temperature is performed by a special operation. Was going as

If it is not easy to calculate the dew point temperature, the heat source temperature should be lower than necessary, for example, (the target dry bulb temperature-
(20 ° C.) was uniformly set. As a result, an operation for operating the cooling control device has been performed while avoiding a situation of insufficient cooling.

Apart from the above-mentioned problem of cooling control, a room where the atmosphere is adjusted is usually provided with a temperature sensor and a relative humidity sensor. Atmospheric indices detected by these sensors are displayed in real time, and have been used for confirming and recording test conditions. Atmospheric indices other than those described above can be calculated based on the dry-bulb temperature and the relative humidity. Therefore, if necessary, they have been separately obtained by an air chart or calculation.

[0013]

The control of the cooling capacity of the conventional thermo-hygrostat has the following problems. I. If the heat source temperature is uniformly set to (dry bulb temperature-20 ° C) to avoid insufficient cooling without finding the dew point temperature, cooling is performed more than necessary, and energy is wasted. It takes too long to reach the target atmosphere due to excessive cooling. II. When determining the dew point temperature 1) When reading the psychrometric chart: In the psychrometric chart, in order to read the dew point temperature from the set dry bulb temperature and the relative humidity, work outside the cooling capacity control system as described above. Is required, and it takes time and effort. 2) When a dew point meter is used: Since an expensive dew point meter is required, it causes a cost increase. 3) When using a software-constructed controller: Although the accuracy is relatively high, hardware and software are expensive.

The above-mentioned atmosphere index is used for controlling the cooling capacity, but is also used for confirming and recording as a test condition of an environmental test. Conventionally, only the atmosphere index monitored by the sensor is displayed in real time, but it has not been possible to easily know an arbitrary atmosphere index. However, in order to confirm that the atmosphere index of the ongoing test satisfies the target value,
Further, in order to inform the public in many fields of the reliability of the environmental test, it is necessary to display an atmosphere index other than the monitored atmosphere index.

An object of the present invention is to provide a constant-temperature and constant-humidity device capable of easily and accurately controlling a cooling capacity and displaying an arbitrary atmosphere index.

[0016]

According to the present invention, there is provided a thermo-hygrostat of the present invention comprising a cooling device including a cooling coil which is in contact with an atmosphere circulating in a room and cools the atmosphere, a dry-bulb temperature, a wet-bulb temperature, and a relative humidity. And a computing device for calculating at least one of the remaining atmospheric indices based on the input of at least two of the four atmospheric indices of the dew point temperature, and a cooling capability for controlling the cooling capability of the cooling device based on the dew point temperature A control unit configured to display at least one atmosphere index based on a detection result of at least two atmosphere indexes among four atmosphere indexes of a dry-bulb temperature, a wet-bulb temperature, a relative humidity, and a dew point temperature in the room (15 ).

The constant temperature and humidity apparatus calculates the target dew point temperature when the specified target atmosphere index does not include the target dew point temperature, and controls the cooling capacity based on the dew point temperature. It can be carried out. In addition, other atmosphere indices can be calculated based on the atmosphere indices detected indoors and provided for display. As a result, it is possible to execute both the quick and efficient control of the cooling capacity and the display of the atmosphere index which enhances the reliability of the environmental test.

In the above constant-temperature and constant-humidity apparatus, the arithmetic unit is configured to input at least two target atmosphere indices among the four target atmosphere indices of target dry bulb temperature, target wet bulb temperature, target relative humidity and target dew point temperature. Calculating at least one of the remaining target atmosphere indices based on the calculated target atmosphere indices or the input target atmosphere indices for use in the cooling capacity control unit;
Based on one atmosphere index, at least one atmosphere index is calculated and provided to the display device.

According to this configuration, when the target dew point temperature is not input, the arithmetic unit calculates the target dew point temperature and supplies the target dew point temperature to the cooling capacity control unit, and also calculates another atmosphere index from the atmosphere index detected by the indoor detecting device. It can be calculated and displayed almost in real time. Since a calculation board can be used for this calculation, the two functions of controlling the cooling capacity and displaying the atmosphere index can be simply and inexpensively performed by one calculation board. This arithmetic circuit board can be easily attached not only to a newly-installed constant temperature and humidity apparatus but also to an existing constant temperature and humidity apparatus, so that it is very versatile.

In the above constant-temperature and constant-humidity apparatus, the arithmetic unit is configured to input at least two target atmosphere indices among the four target atmosphere indices of target dry bulb temperature, target wet bulb temperature, target relative humidity, and target dew point temperature. A cooling capacity control mode in which at least one of the remaining target atmosphere indices is calculated based on the calculated target atmosphere indices or the input target atmosphere indices; The display mode is switched between a display mode in which at least one of the remaining atmospheric indices is calculated based on the detection result of at least two of the four atmospheric indices of the bulb temperature, the relative humidity, and the dew point temperature and provided to the display device. It is desirable to have mode switching means.

By using the above switching means, the calculation of the target dew point temperature is guaranteed when the target dew point temperature is not included in the target atmosphere index during the time of the cooling capacity control mode. Inside, necessary atmosphere indicators are displayed. Usually, there is little opportunity to change the target atmosphere index, so the total time of the cooling capacity control mode is short. For this reason, if the remaining time other than the cooling capacity control mode is set as the display mode time, the atmosphere index of the test condition can be almost always displayed in real time. This mode switching means can be realized by simple automatic or manual means. As the automatic switching means, there is a method in which the cooling capacity control mode is changed for a predetermined time, for example, about 5 seconds, for changing the target atmosphere index, and automatically switched to the display mode after 5 seconds.

In the above-mentioned constant temperature and humidity apparatus, it is preferable that the room is provided with an atmosphere index sensor, and the atmosphere index sensor detects the indoor atmosphere index.

By providing the atmosphere index sensor, the dry-bulb temperature, relative humidity and the like are detected in real time, and the remaining atmosphere indexes can be almost always displayed in real time by the operation of the arithmetic unit. As a result, it is possible to easily confirm the atmosphere index during the test or before the start of the test, and it is possible to record almost completely the test conditions with respect to the atmosphere index.

In the above constant-temperature and constant-humidity apparatus, when the mode switching means is not used, and in other cases, the arithmetic unit calculates the target dry bulb temperature, the target wet bulb temperature, the target relative humidity, and the target dew point temperature. A first calculating step of calculating at least one of the remaining target atmosphere indices based on at least two of the two target atmosphere indices, and using the calculated target atmosphere index or the input target atmosphere index for use of the cooling capacity control unit; And at least one of the remaining atmospheric indices based on at least two of the four atmospheric indices of the dry bulb temperature, the wet bulb temperature, the relative humidity and the dew point temperature in the room detected by the detecting device. And a second arithmetic unit for calculating the calculated value and providing the calculated value to the display device.

According to the above configuration, the change of the setting of the target atmosphere index and the display of the atmosphere index in the test room can always be performed in real time. As a result, even when the target atmosphere index is changed very frequently, it is possible to always display the atmosphere index in the test chamber.

In the above constant-temperature and constant-humidity device, the arithmetic unit includes input index selecting means for inputting any one of four atmospheric indices of a dry bulb temperature, a wet bulb temperature, a relative humidity, and a dew point temperature; It is preferable to provide output index selecting means for outputting any one of the four atmosphere indexes.

With the above arrangement, the dry bulb temperature, wet bulb temperature,
Any two elements of the relative humidity and the dew point temperature can be input to the arithmetic device, and all the above-mentioned atmosphere indices can be calculated without separately calculating outside the constant temperature and humidity device. In addition, a calculation board can be used for the calculation device, and there is no need to use an expensive controller. When an arithmetic board is used, the input index selecting means can be realized by switching a bit switch mounted on the board. In addition, when outputting an arbitrary atmosphere index used for controlling the cooling capacity or for checking and recording the test conditions in the environmental test room, an appropriate atmosphere index can be displayed by the output index selection means. Becomes When an arithmetic board is used, the output index selecting means can be realized by a bit switch mounted on the board, similarly to the input index selecting means.

In the above-mentioned constant temperature and humidity apparatus, in the case of a relatively simple constant temperature and humidity apparatus, and in other cases, the cooling capacity control unit controls the cooling capacity of the cooling coil.

In both cases where the cooling device is provided with a chiller or the like and when the cooling device is not provided with a chiller or the like, the control of the cooling capacity is limited to the cooling coil located in the circulation path of the atmosphere. Ability to control.
As a result, the atmosphere can be adjusted with simple control.

[0030]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (Embodiment 1) FIG. 1 is a diagram for explaining an outline of a thermo-hygrostat in Embodiment 1. In the above constant temperature and humidity apparatus, the environmental test room 4
, A cooling coil 1, a heater 2, and a humidifier 3. To the cooling coil 1, brine cooled by exchanging heat with the refrigerant cooled by the condenser 21 or the like in the heat exchanger 22 is supplied. The circulation system of the chiller includes a condenser 21, a heat exchanger 22, a compressor 23, and an expansion valve 24. The brine circulation system includes pumps 25 and 27, electric valves 11 and 28, a brine tank 22, and a temperature sensor 29 for monitoring the brine temperature in the cooling coil. The brine tank 22 is separated from the brine immediately after the heat exchange in the heat exchanger 22 and the brine used for cooling the atmosphere by a partition wall.
The environmental test chamber 4 is provided with a fan (not shown), and air is forcibly circulated in the direction of the arrow.

Next, the configuration of the cooling control unit and a method for controlling the cooling capacity will be described. In FIG. 1, a dry-bulb temperature DB and a relative humidity RH are designated as target atmosphere indices. These target values are input to the dew point temperature calculation board DP as set values (SP: Set Point). The input index is a temperature display controller 6 (TIC1: Thermo-Indicator Controller 1).
And Humidity Indicator Controller (HIC)
ller). In FIG. 1, the flow of the set values is indicated as DB-SP (set value of dry bulb temperature) and RH-SP (set value of relative humidity). Dew point calculation board 5 (D
P) is provided with an input terminal (not shown) for inputting an atmosphere index other than the dry bulb temperature and the relative humidity. As can be easily understood from the above description, the target dew point temperature DP-SP is calculated by the dew point calculation board 5 based on the input of the two atmosphere indices. The target dew point temperature DP-SP is sent from the calculation board DP to the temperature display controller 8 (TIC2), and the temperature display controller 8 compares the target dew point temperature with the temperature value of the temperature sensor 29 based on the target dew point temperature. The output of the condenser 21 and the compressor 23 and the opening of the electric valve 28 are controlled so that the temperature value of the temperature sensor 29 becomes, for example, (target dew point temperature −5 ° C.). Based on the above target dew point temperature, the condensed water is discharged from a drain (not shown) provided below the cooling coil in order to adjust the absolute humidity χ to the value of the target atmosphere. Thereafter, the temperature display controller 6 monitors the heating output of the heater 2 while monitoring the indicated value DB-PV of the temperature sensor 9 (T) installed in the environmental test chamber so as to reach the target dry bulb temperature DB-SP. Control.

Unlike the above case, when humidification is required to adjust the absolute humidity to the target atmosphere, that is, when the humidification is changed upward in the psychrometric chart, the cooling coil 1 or the heater 2 is used. The air heated to a temperature near the dew point temperature is converted into air containing saturated water vapor by the humidifier 3, and the water condensed is discharged from a drain (not shown).

Atmospheric indices detected by the detecting devices 9 and 10 are inputted to the dew point calculating board 5 by using a switching means (not shown), and the calculated dew point temperature and other atmospheric indices are displayed on the display device 15. Sent and displayed.

According to the above configuration, the cooling control of the atmosphere in the environmental test chamber can be performed after knowing the accurate dew point temperature, so that it is possible to improve the energy efficiency and reduce the time to reach the target atmosphere. Control for shortening can be performed. In particular, accurate calculation of the dew point temperature allows accurate control of humidity. Since the calculation of these atmosphere indices can be performed using a calculation board, it can be implemented inexpensively and easily by attaching to existing equipment. Note that the control of the cooling device by the cooling control unit may be limited to a limited range, and may be limited to the motor-operated valve 11 for the brine that circulates the cooling coil that directly sends the cooling atmosphere to the environmental test chamber. Is rather preferred.

The current value PV of the dry bulb temperature DB and the relative humidity RH can be obtained from the temperature sensor 9 (T) and the relative humidity sensor 10 (H) installed in the environmental test chamber 4. This DB-PV and RH-PV
Are the temperature display controller 6 (TIC1) and the humidity display controller 7 (H
It is sent to the IC 1) and the dew point temperature calculation board 5 (DP) and used for control and display. The operation of these control arithmetic units will be further described with reference to the drawings.

FIG. 2 is a flowchart for explaining how the display control device and the operation board shown in FIG. 1 perform the operation and control, and the operation and display. When changing the target atmosphere index, that is, when changing the SP value, the SP change of any two of the three indexes of the dry bulb temperature DB, the wet bulb temperature WB, and the relative humidity RH of the main controller in FIG. Will do. (However, in general, it is possible to input the change of any two indices of the four indices obtained by adding the dew point temperature to the three indices.) At this time, the input / output mode of the dew point temperature calculation board DP SP mode (cooling capacity control mode)
The display of the dew point temperature indicator 45 (TI: not shown in FIG. 1) holds the immediately preceding display value DB-PV. This holding time is 5 seconds. The dew point calculation board 5 (DP) calculates the dew point temperature DP based on the input of the above-mentioned atmosphere index. After a lapse of 5 seconds, the dew point calculation board 5 is automatically switched to the PV mode (display mode), the current value PV in the environmental test chamber 4 is input from the temperature sensor 9 and the humidity sensor 10, and the dew point temperature is calculated. Therefore, the switching means from the SP mode to the PV mode can be said to be an automatic switching means using the elapsed time after the setting change of the target atmosphere index. On the other hand, the temperature display calculation device 8 (TIC2) keeps holding the target dew point temperature calculated by the dew point calculation board 5, and continues to control the heat source temperature.

As a result, not only can the target dew point temperature be calculated by a simple arithmetic circuit board to provide a basis for controlling the heat source temperature, but other environmental indices can be calculated based on indices from various sensors in the environmental test chamber. Calculation and display can be performed, and test conditions can be easily confirmed. Such confirmation leads to an improvement in test accuracy, and further enhances the value of the environmental test.

FIG. 3 shows an SP mode for calculating and controlling a set target index, and calculating and displaying a current value index.
FIG. 3 is a diagram illustrating a circuit for switching a PV mode. FIG. 3 shows a changeover switch 19 for switching between the SP mode and the PV mode, and also shows the display device 15.
FIG. 3 shows three changeover switches, but the three switches operate in conjunction with each other. Other configurations are the same as those in FIG. In the SP mode, the calculation board DP calculates the dew point temperature based on the input target atmosphere index, sends the target dew point temperature DP-PV to the temperature display controller 8 (TIC2), and based on the DP-PV. The temperature display control device 8 includes the condenser 21
And controls the compressor 23, the expansion valve 24, and the electric valve 28. On the other hand, in the PV mode, the data of the current value of the dry bulb temperature DB and the relative humidity RH from the temperature sensor 9 and the humidity sensor 10 are fetched, and the dew-point calculation substrate 5
Calculate DP. The atmosphere index input from the sensor, the dew point temperature DP and the wet bulb temperature WB calculated from the values are displayed on the display device 15 (IC) to clearly indicate test conditions in the environmental test room.

By switching between the SP mode and the PV mode, the PV mode can be maintained except for a short period of time when the setting of the target index is changed. As a result, cooling control is performed based on the target dew point temperature calculated in the SP mode, and at other times, other atmosphere indices are calculated based on data taken from a temperature sensor or the like, and the test environment at that time is calculated. It can be displayed. This calculation and display can be performed by attaching a calculation board, a display control device, and the like to the existing equipment, so that it can be performed inexpensively and simply.

FIG. 4 is a diagram showing a configuration in which the input and output of the dew point calculation board 5 are identified by a bit pattern so that any two atmosphere indexes can be selected. In FIG. 4, the input selection means and the output selection means 40 can input two atmosphere indices of the following three combinations from two input terminals IN1 and IN2. That is, (DB, WB), (DB, RH), and
Three types of atmosphere indices (DB, DP) can be selected, and two ranges are assigned so that each type can be switched between a high level range and a low level range. That is, the ranges of dry bulb temperature, wet bulb temperature, and dew point temperature are -20 ° C to 80 ° C and -60 ° C to 40 ° C.
There are two ranges. However, the relative humidity range is from 0 to 1
It is in the range of 00%. In FIG. 4, the remaining two indices other than the arbitrary two inputted indices are output, so that the input index selecting means and the output index selecting means are selected in conjunction with each other. ing. That is, one of the bit patterns created by the four bit switches
If an it pattern is selected, two input indices and two output indices are determined. Although the input terminal shown in FIG. 4 always includes the dry-bulb temperature, the input terminal may not include the dry-bulb temperature.

As a result, by using a simple device called a bit switch, it is possible to input an atmosphere index designated according to the test object, and to output other indices. Therefore, it is possible to control the cooling based on the dew point temperature in response to input of any atmosphere index, and to provide sufficient data for display from the viewpoint of recording and confirming the environmental test conditions. It becomes possible.

FIG. 5 is a diagram showing a circuit configuration for performing calculation and control and calculation and display without using a switch for switching between the SP mode and the PV mode. In FIG. 5, the dew-point calculation board 5 (DP1: first calculation device) calculates the dew-point temperature DP based on the input target index, and the temperature display control device 32 (TI
Send the target dew point temperature to C3). Temperature display controller 32 (TIC
In 3), the temperature obtained from the heat source temperature sensor 55 is controlled by operating the condenser, the compressor and the motor-operated valve by the operating means 38 based on the target dew point temperature. The target dew point temperature is also sent to the temperature display control device 7 (TIC1) and the temperature display control device 31 (TIC2), and the operating means 36 and 37 are operated to control the cooling coil and the humidifier. Atmosphere indices obtained from a temperature sensor and a humidity sensor (not shown) are sent to a dew point calculation board 35 (DP2: second calculation device), which calculates and displays the current dew point temperature. Device 4
Send to 5 (TI). The display device 45 (TI) displays the dew point temperature. With the circuit configuration in FIG. 5, it is possible to perform both control and display by using two operation boards without using a changeover switch.

Since a changeover switch is not used, SP
Mode and PV mode can be operated in parallel. For this reason, it is possible to quickly reach the target atmosphere while maintaining the display of the current atmosphere index under high energy efficiency by coping with the test conditions that change the target atmosphere very frequently.

FIG. 6 shows the changeover switch 39 and the PLC 2
It is a figure which shows the circuit structure which performs both control and display using 0, 30. FIG. 6A shows a part for performing calculation, control, and display, and FIG. 6B shows the contents of data processing in the PLC. In FIG. 6A, two PLCs 2
In the data processing of 0 and 30, it is necessary to digitize an analog signal flowing outside the PLC, process the digital signal, and then convert the digital signal to analog again. Although this point is different from the method of directly processing an analog signal, there is an advantage that a PLC can be used.

(Embodiment 2—Conversion between Atmosphere Indices) Here, a method of calculating each of the atmosphere indices based on the psychrometric chart will be described. These calculation methods were used when creating the psychrometric chart. First, a basic calculation formula is derived. (1) Assuming that the pressure of saturated steam that keeps balance with water at a temperature of T ° K is p _s kg / cm ² , logp _s = -7.90298 ｛(Ts / T) -1｝ + 5.02808log (Ts / T) -1.3816 × 10 ^-7 × ｛10 ^{11.344 (1-T / Ts)} -1｝ + 8.1328 × 10 ^-3 × ｛10 ^{-3.49149 (Ts / T-1)} -1｝ + logp _v (Ts) ... .... (1a) holds. However, supercooled water, that is, -100 ° C
For ~0 ° C. _{water, logp s = -9.09718 {(To} / T) -1} -3.56654log (To / T) +0.876793 {1- (T / To)} + logp i (To) .. ... (1b) holds. Here, log represents a common logarithm. Also, p
_v (Ts) = saturated steam at 100 ° C. = 1atm = 1.32323 kg / cm ²
And p _i (To) = 0 saturated vapor pressure at 0 ° C. = 0.006028 atm = 0.0
06228 kg / cm ² . (2) Treat humid air in which dry air and water vapor are mixed as an ideal gas as an ideal gas,
Applying Dalton's law of partial pressure to this gives the following equation: χ = (Ra / Rv) ｛p / (Pp)｝ = 0.622p / (Pp) (2) However, the absolute humidity is χkg / kg ', the pressure of humid air is Patm, the partial pressure of water vapor is pam, the gas constant of dry air is Ra = 29.27 kgm / kg ° K, and the gas constant of water vapor in humid air is Rv = 47.06. kgm / kg ° K. (3) The specific volume v of air containing 1 kg of dry air is as follows. v = ｛Rv / (P-10 ⁴ )｝ ｛χ + (Ra / Rv)｝ T = ｛47.06 / (P × 10 ⁴ )｝ (χ + 0.622) T .... (3) (4) Ideal Assuming that a mixed gas obtained by mixing gases is an ideal gas, its enthalpy can be expressed as the sum of the enthalpies of the component gases. That is, the enthalpy of air containing 1 kg of dry air is expressed as follows. i = ia + χiv = Cpa ・ t + (ro + Cpv ・ t) ・ = 0.24t + (597.3 + 0.441t) χ .............. ......... (4) where ro is the latent heat of vaporization for converting 0 ° C saturated water to 0 ° C saturated steam 597.3kcal / kg, Cpa is the constant pressure specific heat of the air
0.24kcal / kg ℃, Cpv is the specific heat of steam 0.441kcal / kg ℃. Χ indicates absolute humidity kg / kg '. (5) Assuming that the partial pressure of water vapor of a certain humid air is p and the partial pressure of water vapor of saturated air at the same temperature is p _s , the relative humidity RH is obtained as follows.

RH = (p / p _s ) × 100 (%) ........................ (5) (6) Calculation of relative humidity using ventilation hygrometer When calculating relative humidity from dry bulb temperature t ° C and wet bulb temperature t '° C, when using a ventilation hygrometer such as an Asman hygrometer Can be obtained from Sprung's equation using equation (5) as in the following equation (6). p = p '-(K / 735.5593) · (t-t') · (760.0 / 755) ... (6) where K is a constant , T> 0, K = 0.5,
When t ≦ 0, K = 0.44.

In principle, based on the above basic formulas (1) to (6),
If any two atmosphere indices are input, the remaining atmosphere indices can be calculated. In the calculation, the following two procedures (A) and (B) are frequently used as intermediate procedures. (A) Procedure for obtaining wet bulb temperature t ′ from enthalpy i and total pressure P.

FIG. 7 is a flowchart of this procedure.
The solution procedure by the dichotomy shown in FIG. 7 is as follows. (A-1) DB range -20 ° C to + 80 ° C, tmin = -2
T = (tmin + tmax), assuming 0 ° C. and tmax = DB
/ 2 is substituted into equation (1a) or equation (2a) according to the sign of t. When tmin + tmax = 0, t
= 0. (A-2) (2) for calculating a i ₁ by formula and (4) below. i
When = 0, t '=-5 ° C. (A-3) If 0.9999 <| i ₁ / i (enthalpy equivalent to wet bulb temperature) | <1.0001, then OK (yes), otherwise (A-4) (A-4) If i ₁ > i, t is input to tmax. If i ₁ <i, t is input to tmin, and t = (tmi
(n + tmax) / 2 is calculated, and the process returns to (A-1). (B) The dew point temperature t ″ is determined from the water vapor partial pressure p and the total pressure P.

FIG. 8 is a flowchart of this procedure.
The solution procedure by the dichotomy shown in FIG. 8 is as follows. (B-1) DB range -20 ° C to + 80 ° C, tmin = -2
T = (tmin + tmax), assuming 0 ° C. and tmax = DB
/ 2 is substituted into the expression (1a) or (1b) according to the sign of t. When tmin + tmax = 0, t = 0. (B-2) If 0.9999 <| p ₁ / p (water vapor partial pressure corresponding to dew point temperature) | <1.0001, OK (yes), otherwise,
The following (B-3) is performed. (B-3) If p ₁ > p, input t into tmax, and
If i ₁ <i, t is input to tmin, and t = (tm
(in + tmax) / 2, and returns to (B-1).

When the above intermediate procedures (A) and (B) are used, it is easy to calculate another atmosphere index from any two kinds of atmosphere indexes.

(Embodiment 2-1: Relative humidity RH and dew point temperature t ″ are obtained from dry-bulb temperature t and wet-bulb temperature t ′). FIG. 9 shows a flowchart of calculation in this embodiment. First, the wet-bulb temperature t 'is input to the equation (1) to obtain a water vapor partial pressure p' corresponding to the wet-bulb temperature.
By substituting the above t 'and p', the water vapor partial pressure p is obtained. Then, by substituting the dry bulb temperature t in equation (1), determine the saturated water vapor partial pressure p _s. Next, determine the RH relative humidity by substituting p and p _s in (5). Finally, the above intermediate procedure (B)
The dew point temperature t ″ can be obtained from the water vapor partial pressure.

According to the above procedure, the relative humidity RH and the dew point temperature t ″ can be easily obtained from the dry bulb temperature t and the wet bulb temperature t ′. Therefore, two indexes of the dry bulb temperature and the wet bulb temperature are used. In a test related to an air conditioner, which is often performed, cooling control can be performed easily and with high energy efficiency.

(Embodiment 2-2: Relative humidity RH is obtained from dry-bulb temperature t and dew-point temperature t ".) FIG. 10 is a diagram showing a calculation flowchart in this embodiment.
First, the dew-point temperature t ″ is input into the equation (1) to obtain the steam partial pressure p at the dew-point temperature. The dry-bulb temperature t is input, and the saturated steam partial pressure p at the dry-bulb temperature is also obtained from the equation (1). _s
Ask for. By inputting the above p and p _s into the equation (5), the relative humidity RH can be obtained.

According to the above procedure, other atmospheric indexes such as relative humidity can be easily known even in a test related to a semiconductor material in which the dry bulb temperature and the dew point temperature are often specified.

(Embodiment 2-3: Dew point temperature t ″ and wet bulb temperature t ′ are determined from dry bulb temperature t and relative humidity RH.) FIG. 11 shows a flowchart of calculation in this embodiment. 11, firstly, by entering the dry-bulb temperature t (1) determine the saturated water vapor pressure p _s from the equation. then, p _s
And the relative humidity RH are substituted into the equation (5) to determine the water vapor partial pressure p. Next, the dew point temperature t ″ is obtained from the water vapor partial pressure p by the above-described intermediate procedure (B). On the other hand, the absolute humidity χ can be obtained by substituting the water vapor partial pressure p into the equation (2). Next, the dry-bulb temperature t and the absolute humidity χ are calculated as (4)
The enthalpy i can be obtained by inputting the equation. Finally, the wet bulb temperature t ′ can be obtained from the enthalpy i by the above-mentioned intermediate procedure (A).

According to the above-described procedure, in the case where the normal atmosphere such as the dry bulb temperature and the relative humidity is designated, the dew point temperature and the like can be known, and the cooling device can be cooled with high energy efficiency. Further, the test conditions can be confirmed and recorded, and the quality of the environmental test can be improved.

Although the embodiments of the present invention have been described above, the embodiments of the present invention disclosed above are merely examples, and the scope of the present invention is limited to these embodiments. Not done. The scope of the present invention is indicated by the description of the claims, and further includes meanings equivalent to the description of the claims and all modifications within the scope.

[0058]

According to the present invention, it is possible to efficiently and easily control an atmosphere having an appropriate temperature and humidity based on a dew point temperature in accordance with a method of designating an atmosphere index which differs depending on a test object. In addition, based on temperature and humidity sensors in the environmental test room, the values of arbitrary atmospheric indices can be calculated at the time of the test, and they can be checked and displayed, improving the value of the test in terms of test accuracy and recording test conditions. Can be done. The arithmetic device that enables these functions can be easily attached to an existing device as well as a newly installed constant temperature / humidity device, and thus can be widely used for many constant temperature / humidity devices.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a constant temperature and humidity apparatus according to a first embodiment.

FIG. 2 is a flowchart when setting of a target value is changed.

FIG. 3 is a circuit configuration diagram of a portion that switches between an SP mode and a PV mode.

FIG. 4 is a diagram illustrating an input terminal and an output terminal of a calculation board.

FIG. 5 is a circuit configuration diagram that enables an SP mode and a PV mode without using a changeover switch.

FIG. 6 is a circuit configuration diagram for performing digital signal processing inside the PLC using the PLC. (a) is a circuit configuration diagram in which a PLC is incorporated, and (b) is a diagram showing a method of performing A / D conversion and digital signal processing inside the PLC, and then D / A converting and outputting.

FIG. 7 is a flowchart showing a procedure for obtaining a wet bulb temperature t ′ from enthalpy i and total pressure P.

FIG. 8 is a flowchart showing a procedure for obtaining a dew point temperature t ″ from a water vapor partial pressure p and a total pressure P.

FIG. 9 is a flowchart for calculating relative humidity and dew point temperature from dry bulb temperature and wet bulb temperature.

FIG. 10 is a flowchart for calculating relative humidity from a dry bulb temperature and a dew point temperature.

FIG. 11 is a flowchart for calculating a dew point temperature and a wet bulb temperature from a dry bulb temperature and a relative humidity.

FIG. 12 is a diagram illustrating a procedure for obtaining a wet bulb temperature and a dew point temperature from a dry bulb temperature and a relative humidity using an air chart.

FIG. 13 is a diagram for explaining the reason why the dew point temperature is important in the operation of the constant temperature and humidity apparatus. (a) is a diagram for explaining that extra moisture is generated when the atmosphere shifts from the atmosphere A1 to A2, and (b) is a diagram showing a method for removing extra moisture condensed.

[Explanation of symbols]

1 cooling coil, 2 heater, 3 humidifier, 4 environment test room, 5,35 dew point temperature calculation board, 6,8,31,3
2 temperature display control device, 7 humidity display control device, 9 temperature sensor, 10 humidity sensor, 11, 28 electric valve, 1
5 display device, 19, 39 changeover switch, 20,
30 PLC, 21 condenser, 22 heat exchanger, 23
Compressor, 24 expansion valve, 25, 27 pump, 2
6 brine tank, 29, 55 heat source temperature sensor, 36,
37, 38 operation terminal, 40 input / output selection means, 45 dew point indicator, t, DB dry bulb temperature, t ', WB wet bulb temperature,
t ”, DP dew point temperature, RH relative humidity, χ absolute humidity, P
Total pressure, p water vapor partial pressure, the saturated vapor pressure of p _s arbitrary temperature, i enthalpy, SP setpoint, PV instruction value (current value).

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G050 BA06 BA10 CA02 DA01 EA01 EA02 EA05 EC01 EC03 3L054 BE01 3L060 AA06 AA07 AA08 CC02 CC06 CC19 DD02 DD06 DD07 EE02 EE23 EE24 EE25 3L061 BC01 BC02 BC07 BD03 4G057 AD03

Claims (7)

[Claims] 1. A cooling device including a cooling coil (1) for cooling an ambient by contacting with an atmosphere circulating in a room (4).
(1, 21) and an arithmetic unit for calculating at least one of the remaining atmospheric indices based on input of at least two of the four atmospheric indices of dry bulb temperature, wet bulb temperature, relative humidity and dew point temperature ( 5, 35), a cooling capacity control unit (6, 7, 8) for controlling the cooling capacity of the cooling device based on a target dew point temperature, and a dry bulb temperature, a wet bulb temperature, and a relative humidity in the room (4). And a display device (15) for displaying at least one atmosphere index based on the detection results of at least two atmosphere indexes among the four atmosphere indexes of the dew point temperature. 2. The arithmetic unit (5) receives the remaining dry atmosphere temperature, the wet wet bulb temperature, the target relative humidity, and the target dew point temperature based on at least two of the target atmosphere indices. At least one of the target atmosphere indices is calculated, and the calculated target atmosphere index or the input target atmosphere index is used for use of the cooling capacity control unit (6, 7, 8), and the indoor room is detected. The constant temperature and humidity apparatus according to claim 1, wherein at least one atmosphere index is calculated based on at least two atmosphere indexes and provided to the display device (15). 3. The arithmetic unit (5) receives the remaining target atmosphere indices among at least two target atmosphere indices among a target dry bulb temperature, a target wet bulb temperature, a target relative humidity, and a target dew point temperature. A cooling capacity control mode for calculating at least one of the target atmosphere indices and providing the calculated target atmosphere indices or the input target atmosphere indices for use of the cooling capacity control units (6, 7, 8); Dry bulb temperature,
A display mode for calculating at least one of the remaining atmospheric indices based on a detection result of at least two atmospheric indices among the four atmospheric indices of wet bulb temperature, relative humidity and dew point temperature and providing the calculated value to the display device (15); The constant-temperature and constant-humidity device according to claim 1 or 2, further comprising a mode switching means (19) for switching between (i) and (ii). 4. An atmosphere index sensor in said room (4).
The constant temperature and humidity apparatus according to any one of claims 1 to 3, wherein (9, 10) is provided, and the atmosphere index of the room is detected by the atmosphere index sensor. 5. The arithmetic unit (5, 35) is configured to calculate a remaining target temperature based on at least two inputs of four target atmosphere indices of a target dry bulb temperature, a target wet bulb temperature, a target relative humidity, and a target dew point temperature. A first arithmetic unit (5) for calculating at least one of the atmosphere indices and providing the calculated target atmosphere indices or the input target atmosphere indices for use of the cooling capacity control unit (6, 7, 8); Calculating at least one of the remaining atmospheric indices based on at least two atmospheric indices among four atmospheric indices of a dry bulb temperature, a wet bulb temperature, a relative humidity and a dew point temperature in the room detected by the detection device; The thermo-hygrostat according to claim 1 or 2, further comprising a second arithmetic unit (35) provided to the display device (15). 6. The arithmetic unit (5, 35) comprises: a dry bulb temperature;
An input index selecting means (4) for inputting any one of the four atmospheric indexes of wet bulb temperature, relative humidity, and dew point temperature.
The constant temperature and humidity apparatus according to any one of claims 1 to 5, further comprising output index selecting means (40) for determining which of the four atmosphere indexes is to be output. 7. The cooling capacity control unit (6, 7, 8) controls a cooling capacity of the cooling coil (1).
The constant temperature and humidity apparatus according to any one of the above.