JP2001027728A - Confocal optical scanner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To view the longitudinal section image of a sample in real time by providing a scanning means performing scanning with returning light from a sample and passing or transmitted through a shielding means or a light condensing means, and a driving means changing a position where light is condensed to the sample in an optical axis direction synchronizing with the operation of the scanning means. SOLUTION: By condensing the reflected returning light from the sample 14 to a slit formed on a slit plate 12 being the shielding means again by an objective lens 13, a confocal effect is obtained. The returning light is transmitted through a light branching means 11 and made incident on a photographing means 17 through a lens 15 and a movable mirror 16, whereby photographing is performed. At such a time, the driving means 18 successively moves the lens 13 in the optical axis direction so as to move the focal position of the lens 13 in the optical axis direction. The condensing position of the light passing through the slit, etc., is changed in the optical axis direction and also the incident position on the photographing means 17 is scanned by the mirror 16 synchronizing with it, whereby the longitudinal section image of the sample is viewed in real time.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a confocal optical scanner for obtaining a confocal image, and more particularly to a confocal optical scanner capable of visually observing a longitudinal section image of a sample in real time.

[0002]

2. Description of the Related Art A confocal optical scanner has a Nipkow plate having a plurality of pinholes (hereinafter referred to as a pinhole plate).
By rotating the sample, the surface of the sample is scanned, and a slice image of a plane perpendicular to the optical axis direction of the sample can be obtained. Further, by connecting such a confocal optical scanner to an optical microscope, changing the focus of the objective lens in the optical axis direction, and performing arithmetic processing by an arithmetic control circuit or the like based on a slice image obtained for each focal position, A slice image (hereinafter, referred to as a vertical tomographic image) horizontal in the optical axis direction can be obtained.

FIG. 12 is a configuration block diagram showing an example of a confocal microscope using such a conventional confocal optical scanner. In FIG. 12, 1 is a light source, 2 is a confocal optical scanner that scans a sample surface by rotating a pinhole plate, 3 is an optical microscope unit including an objective lens, 4 is a sample, 5
Is a stage for moving the sample 4 in the optical axis direction, and 6 is a CCD
A photographing means such as a camera, 7 is a storage means, and 8 is an arithmetic control means.

Output light from a light source 1 is transmitted to a confocal light scanner 2.
And enters the optical microscope unit 3 via the confocal optical scanner 2. This output light is condensed on the sample 4 by the objective lens constituting the optical microscope unit 3.

Return light such as fluorescence generated by irradiation of reflected light or output light from the sample 4 is again incident on the confocal light scanner 2 via the optical microscope unit 3 and transmitted through the confocal light scanner 2 to take an image. It is incident on the means 6. The output of the photographing means 6 is connected to the storage means 7, and the output of the storage means 7 is connected to the arithmetic control means 8. Further, the drive signal from the arithmetic and control unit 8 is connected to the stage 5.

Here, the operation of the conventional example shown in FIG.
3 and FIG. FIG. 13 is an explanatory diagram for explaining a situation in which a slice image is obtained, and FIG. 14 is an explanatory diagram for explaining a situation in which a vertical tomographic image is generated by calculation.

[0007] The output light from the light source 1 is confocal light scanner 2
And passes through a plurality of pinholes formed in a rotating pinhole plate in the confocal optical scanner 2 and enters the optical microscope unit 3. This output light is converged on the sample 4 by an objective lens constituting the optical microscope unit 3, and scans the surface of the sample 4 as the pinhole plate rotates.

Return light such as fluorescence generated by irradiation of reflected light or output light from the sample 4 is again condensed on the same pinhole as that of each pinhole previously passed by the objective lens constituting the optical microscope unit 3. Produces a confocal effect.

The return light is photographed by the photographing means 6. At this time, the image obtained by the photographing means 6 is obtained by scanning the surface of the sample 4 with the rotation of the pinhole plate.
A slice image on a plane perpendicular to the optical axis at the focal position of the objective lens constituting the optical microscope unit 3 is obtained.

At this time, the arithmetic and control means 8 sequentially moves the stage 5 in the optical axis direction indicated by "ZD01" in FIG.
The focal position of the objective lens is moved in the optical axis direction, and a slice image of the sample 4 changed in the optical axis direction is photographed by the photographing means 6, and the slice images at each position of the sample 4 photographed by the photographing means 6 are stored. 7 sequentially.

For example, the Z-axis direction in FIG.
13, “PS01” and “PS01” in FIG.
The slice images of the sample scanned on the planes shown as “PS02” and “PS03” are “SI01” and “SI01” in FIG.
02 "and" SI03 ", and such slice images are sequentially stored in the storage means 7.

Then, the arithmetic control means 8 selects "ZD" in FIG.
At the time when the slice images at each position in the 01 ″ direction are photographed, each slice image stored in the storage unit 7 is read out to construct a three-dimensional image of the sample 4 and reconstruct a vertical tomographic image by calculation.

For example, when a vertical tomographic image in the YZ plane as shown in FIG. 14 "PS11" is reconstructed by calculation, a vertical tomographic image as shown in "LI01" in FIG. 14 can be obtained.

[0014]

However, the conventional method shown in FIG. 12 has a problem that a longitudinal tomographic image cannot be observed in real time and optically. That is, since a vertical tomographic image is obtained by computation from a large number of slice images, the processing time becomes long and the real-time property is lost.

Further, for example, the resolution is 3000 with the naked eye.
In contrast, the number of scanning lines is about 500 to 1000 in the photographing means such as a camera, whereas the number of scanning lines is about 6000, and the resolution and color are limited by the specifications of the photographing means 6. Therefore, an object to be solved by the present invention is to realize a confocal optical scanner capable of visually observing a longitudinal section image of a sample in real time.

[0016]

In order to achieve the above object, according to a first aspect of the present invention, in a confocal optical scanner for obtaining a confocal image, a linear light is projected on a sample. Shielding means or light condensing means for irradiating, scanning means for scanning the return light that has passed or transmitted through the shielding means or light condensing means among the returned light from the sample, and in synchronization with the operation of this scanning means The provision of the driving means for changing the light condensing position on the sample in the optical axis direction makes it possible to visually observe a vertical cross-sectional image of the sample in real time.

According to a second aspect of the present invention, in the confocal optical scanner according to the first aspect of the present invention, in the confocal optical scanner for obtaining a confocal image, the light source and the output light of the light source are made parallel light. A lens, a light branching unit for reflecting or transmitting the parallel light, a shielding unit or a light collecting unit irradiated with reflected light or transmitted light from the light branching unit, and the shielding unit or the light collecting unit. An objective lens for condensing the transmitted or transmitted light and condensing the return light from the sample to the shielding means or the condensing means, and the light branching means for passing or transmitting the shielding means or the condensing means A second lens that condenses the return light that has passed or reflected the light, and changes the optical path of the return light from the second lens so that the return light enters the photographing means or the naked eye. Means for changing the light condensing position of the objective lens in the optical axis direction and scanning the position of incidence on the photographing means or the naked eye by the scanning means in synchronization with this, thereby obtaining a longitudinal cross-sectional image of the sample. Can be viewed in real time.

According to a third aspect of the present invention, in the confocal optical scanner according to the first and second aspects of the present invention, the shielding means is a slit plate having a slit formed thereon. Images can be viewed in real time.

According to a fourth aspect of the present invention, in the confocal optical scanner according to the first and second aspects, the condensing means is a cylindrical lens.
It is possible to visually check the longitudinal section image of the sample in real time.

According to a fifth aspect of the present invention, in the confocal optical scanner according to the third aspect of the present invention, the slit is
With the linear slit, it is possible to visually observe a vertical cross-sectional image of the sample in real time.

According to a sixth aspect of the present invention, in the confocal optical scanner according to the third aspect, the slit is
With the non-linear slit, a cut surface suitable for the shape of the sample to be observed can be obtained.

According to a seventh aspect of the present invention, in the confocal optical scanner according to the third aspect of the present invention, by changing the forming direction of the slit, the cut surface can be arbitrarily set according to the shape of the sample to be observed. It can be changed.

According to an eighth aspect of the present invention, in the confocal optical scanner according to the third aspect, by changing the slit width of the slit, the cut surface can be arbitrarily set according to the shape of the sample to be observed. It can be changed.

According to a ninth aspect of the present invention, in the confocal optical scanner according to the third aspect of the present invention, a plurality of slits are formed in the slit plate, so that a plurality of cut surfaces are provided. It becomes possible to observe a vertical tomographic image of a location.

According to a tenth aspect of the present invention, there is provided a confocal optical scanner for obtaining a slice image of a sample surface by rotating a pinhole plate having a plurality of pinholes formed thereon. Shielding means or light condensing means for irradiating a linear light to the scanning means, scanning means for scanning the return light that has passed or transmitted through the shielding means or light condensing means among the return light from the sample, and this scanning means And a driving means for changing the light condensing position on the sample in the direction of the optical axis in synchronization with the operation described above, it is possible to view a vertical cross-sectional image of the sample in real time.

According to the eleventh aspect of the present invention, there is provided a confocal optical scanner for obtaining a slice image of a sample surface by rotating a pinhole plate having a plurality of pinholes.
A first lens that converts output light from the light source into parallel light, a light branching unit that transmits the parallel light, a shielding unit or a light collecting unit that is irradiated with light transmitted from the light branching unit, and the shielding unit. Alternatively, a pinhole plate on which light passing or transmitted through the light collecting means is collected, and light passing through the pinhole of the pinhole plate and light returning from the sample being collected on the pinhole. An objective lens, and a second lens that passes through the pinhole of the pinhole plate, passes or transmits through the shielding unit or the focusing unit, and collects the return light reflected by the light branching unit.
Scanning means for changing the optical path of the return light from the second lens to make the light enter the photographing means or the naked eye,
By changing the focus position of the objective lens in the direction of the optical axis and scanning the position of incidence on the photographing means or the naked eye by the scanning means in synchronization with this, a vertical cross-sectional image of the sample is viewed in real time. It becomes possible.

According to a twelfth aspect of the present invention, in the confocal optical scanner according to the tenth and eleventh aspects, the shielding means or the condensing means is provided on the light source side or the objective lens side of the pinhole plate. With this arrangement, it is possible to visually check the longitudinal section image of the sample in real time.

According to a thirteenth aspect of the present invention, in the confocal optical scanner according to the tenth and eleventh aspects, the light splitting means is a multiple light splitting means, so that a vertical sectional image of the sample can be obtained. Can be viewed in real time.

According to a fourteenth aspect of the present invention, in the confocal optical scanner according to the thirteenth aspect, the shielding means or the light condensing means is provided at a specific position of the multiple light branching means. By automatically operating the scanning means in accordance with the selection of (1), it becomes possible to coexist a conventional confocal optical scanner and a confocal optical scanner capable of observing a longitudinal tomographic image in real time.

The invention according to claim 15 is the invention according to claims 1, 2,
In a confocal optical scanner according to the tenth and eleventh aspects, the scanning means changes a position of incidence on the photographing means by operating a movable mirror, so that a vertical cross-sectional image of the sample is visually observed in real time. It becomes possible to do.

The invention according to claim 16 is the invention according to claims 1, 2, and
In a confocal optical scanner according to the tenth and eleventh aspects, the scanning means changes a position of incidence on the photographing means by moving a lens in a direction perpendicular to an optical axis, thereby obtaining a longitudinal section of the sample. Images can be viewed in real time.

The invention according to claim 17 is based on claims 1, 2, and
In a confocal optical scanner according to the tenth and eleventh aspects, the scanning means diffracts an optical path by an acousto-optic modulator to change an incident position on the photographing means, so that a movable part is provided in the scanning means. Disappears.

[0033]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 is a block diagram showing the configuration of an embodiment of a confocal optical scanner according to the present invention. In FIG. 1, 9 is a light source, 10 and 15 are lenses, 11 is light branching means such as a dichroic mirror or a polarizing beam splitter, 12 is a slit plate which is a shielding means having a slit, 13 is an objective lens, 14 is a sample, Reference numeral 16 denotes a movable mirror serving as a scanning unit, 17 denotes a photographing unit, and 18 denotes a driving unit that moves the objective lens 13 in the optical axis direction.

The output light of the light source 9 is converted into parallel light by the lens 10 and is incident on the light splitting means 11. This output light is reflected by the light splitting means 11 and irradiates the slit plate 12. The output light transmitted through the slit formed in the slit plate 12 is condensed by the objective lens 13 and irradiated on the sample 14.

Return light such as fluorescence generated by irradiation of reflected light or output light from the sample 14 is again condensed by the objective lens 13 and passes through the slit that has passed first. Then, the return light passing through the slit is transmitted through the light branching unit 11 and is incident on the movable mirror 16 via the lens 15, and the reflected light from the movable mirror 16 is incident on the photographing unit 17.

The objective lens 13 is driven by a driving means 18 so as to move in the optical axis direction.
Is driven by a driving unit (not shown) to change the incident position on the photographing unit 17.

The operation of the embodiment shown in FIG. 1 will now be described with reference to FIG. FIG. 2 is an explanatory diagram illustrating a situation in which a vertical tomographic image can be obtained in real time.

The output light from the light source 9 enters the slit plate 12 via the lens 10 and the light splitting means 11. Then, the output light passing through the slit formed in the slit plate 12 is condensed by the objective lens 13 and is irradiated on the surface of the sample 14.

Return light such as fluorescence generated by irradiation of reflected light or output light from the sample 14 is again condensed by the objective lens 13 into a slit formed in the slit plate 12 to produce a confocal effect.

The return light passes through the light branching means 11 and is incident on the photographing means 17 via the lens 15 and the movable mirror 16 to be photographed. At this time, since the slit image obtained by the photographing means 17 is obtained by passing through the same slit, it becomes a plane slit image perpendicular to the optical axis at the focal position of the objective lens 13.

At this time, the driving means 18 sequentially moves the objective lens 13 in the optical axis direction indicated by "ZD11" in FIG.
The focal point of the objective lens 18 is moved in the optical axis direction to change the slit image of the sample 14 in the optical axis direction.
Incident on

At the same time, the movable mirror 16 is driven in the direction indicated by "MD11" in FIG. 1 in synchronization with the driving of the objective lens 18 to change the incident position on the photographing means 17.

For example, by driving the objective lens 18 to change the focal position, “SL11”, “S” in FIG.
As shown by L12 "and" SL13 ", the position of the slit image focused on the sample 14 changes.

The confocal images (slit images) obtained corresponding to these slit images are driven by the movable mirror 16 to obtain “CI11” and “CI1” in FIG.
As shown by “2” and “CI13”, the light is incident on the photographing unit 17 while the incident position moves.

For example, in FIG. 2, the Z-axis direction coincides with the optical axis direction in FIG. 1, and "PS21" and "PS2" in FIG.
The slit images of the sample obtained on the surfaces indicated by "2" and "PS23" are indicated by "CI21", "CI22" and "CI23" in FIG. 2, and such slit images move the incident position. While entering the photographing means 17.

That is, a vertical tomographic image as shown by "LI21" in FIG. 2 cut along the cutting plane shown by "SL21" in FIG. 2 and "PS21", "PS22" and "PS2" in FIG.
The slit image which is the intersection with the surface as indicated by 3 "is incident on the photographing means 17 while being scanned upward or downward by the movable mirror which is the scanning means.

For this reason, in the photographing means 17, "LI" in FIG.
A vertical tomographic image indicated by reference numeral 21 "is to be photographed. In addition, although the photographing means 17 is used in FIG. 1, the vertical tomographic image can be observed even with the naked eye instead of the photographing means.

As a result, the condensing position of the light passing through the slit is changed in the direction of the optical axis, and at the same time, the position of incidence on the photographing means 17 is scanned by the scanning means in synchronization with this. It becomes possible to see it in real time.

In the embodiment shown in FIG.
Although two slits are provided in the Y-axis direction (vertical direction) in FIG. 2, they may be vertically and horizontally inclined. FIG. 3 is a plan view showing an example of such a slit forming direction. FIG.
3A shows a slit formed obliquely, and FIG. 3B shows a slit formed in a lateral direction (X-axis direction in FIG. 2).

By changing the formation direction, "SL21" in FIG. 2 is changed according to the shape of the sample to be observed.
Can be changed.

Further, as shown in FIG. 3, the slit direction and the slit width may be changed to an arbitrary direction and an arbitrary slit width without being fixed. FIG. 4 is a plan view showing an example of such a change in the direction of the slit and a change in the slit width.

For example, the slit indicated by “SL41” in FIG. 4 is rotated as indicated by “RT01” in FIG.
The direction of the slit is changed as shown in “SL42” in the middle, and the slit shown in “SL43” in FIG.
P01 ”and“ EP02 ”are expanded as shown in FIG.
SL44 "is a wide slit.

As described above, by arbitrarily changing the direction and width of the slit, it is possible to arbitrarily change the cut surface indicated by “SL21” in FIG. 2 according to the shape of the sample to be observed.

As a method of arbitrarily changing the direction and width of the slit, the slit can be changed mechanically with another slit, the direction and width of the slit can be changed manually or electrically, or the liquid crystal plate can be driven. It is possible to form a slit having an arbitrary direction and an arbitrary slit width.

Further, a slit having an arbitrary shape may be used instead of a linear slit. FIG. 5 is a plan view showing an example of such a slit having an arbitrary shape. For example, in FIG. 5, an inverted V-shaped slit is formed as shown by "SL51" in FIG.

As described above, by using a slit having an arbitrary shape, a cut surface suitable for the shape of a sample to be observed can be obtained. For example, FIG. 6 is a plan view showing a case where cells are observed as a sample. Since the cell shown in “CE01” in FIG. 6 is not linear in shape, the slit image shown in “SLI1” in FIG. 6 is changed to “CE01” in FIG. 6 by using the slit shown in FIG. This is optimal when it is desired to observe a longitudinal tomographic image of the outer peripheral portion of the cell illuminated on the sample shown.

As a method of arbitrarily changing the shape of the slit, it is possible to form a slit of an arbitrary shape by driving a liquid crystal plate in addition to mechanical replacement.

Although the movable mirror 16 is illustrated in FIG. 1 as a scanning means for changing the incident position on the photographing means 17, other methods may be used. FIG. 7 is an explanatory diagram showing an example of a scanning unit using a lens.

In FIG. 7, reference numeral 17 denotes the same symbol as in FIG. 1, and the lens indicated by "LZ01" in FIG.
By moving in the direction perpendicular to the optical axis indicated by D21 ″, the position of incidence on the photographing means 17 can be changed.

Although one slit is formed in the slit plate shown in FIG. 1 and the like, a multi-slit may be used. FIG. 8 is an explanatory diagram showing an example of the multi-slit and its effect.

In the slit plate shown in FIG.
Three slits indicated by middle “SL61”, “SL62” and “SL63” are formed. By using such a slit plate, there are a plurality of cut planes as indicated by “SL21” in FIG. 2, and it is possible to observe longitudinal tomographic images at a plurality of places at the same time.

For example, as shown in FIG. 8 (B), the vertical cross-sectional images of the central portion and both ends of the sample having three tangent cross-sections “PS31”, “PS32” and “PS33” in FIG. It becomes possible to observe at the same time.

FIG. 9 is a structural block diagram showing an embodiment when applied to a conventional confocal optical scanner using a pinhole plate.

In FIG. 9, 19 denotes a light source, 20, 27 and 29 denote lenses, 21 denotes a microlens plate on which a plurality of microlenses are formed, 22 denotes a light splitting means such as a dichroic mirror or a polarizing beam splitter, and 23 denotes a slit. Is a slit plate which is a shielding means, is formed with a pinhole plate having a plurality of pinholes formed in the same pattern as the microlens, 25 is an objective lens, 26 is a sample, and 28 is a movable means as a scanning means. A mirror, 30 is a photographing unit, and 31 is a driving unit.

The output light of the light source 19 becomes parallel light by the lens 20 and is incident on the microlens plate 21. Each microlens formed on the microlens plate 21 splits the incident light into the light splitting means 22 and the slit of the slit plate 23. The light is transmitted and condensed on a pinhole formed in the pinhole plate 24.

The output light transmitted through each pinhole formed in the pinhole plate 24 is condensed by the objective lens 25 and irradiated on the sample 26.

Return light such as fluorescence generated by irradiation of reflected light or output light from the sample 26 is again condensed by the objective lens 25 and passes through the same pinhole that has passed first. Then, the return light passing through the pinhole further passes through a slit formed in the slit plate 23 and passes through the light branching means 2.
The light is reflected by the lens 2 and enters the movable mirror 28 via the lens 27.

The movable mirror 28 reflects the incident light, and the reflected light is condensed by the lens 29 and enters the photographing means 30.

The objective lens 25 is driven by the driving means 31 so as to move in the optical axis direction.
Is driven by a driving unit (not shown) to change the incident position on the photographing unit 30. Furthermore, the micro lens plate 2
1 and the pinhole plate are fixed to the same fixing means, and are rotated synchronously by driving means (not shown).

The operation of the embodiment shown in FIG. 9 will now be described. However, description of the same parts as in the embodiment shown in FIG. 1 will be omitted. Output light from the light source 19 is incident on the slit plate 23 via the lens 20, the microphone lens plate 21, and the light branching unit 22. Then, the output light passing through the slit formed in the slit plate 23 passes through the pinhole formed in the pinhole plate, and is irradiated on the surface of the condensed sample 26 by the objective lens 25.

Return light such as fluorescent light generated by irradiation of reflected light or output light from the sample 26 is again condensed by the objective lens 25 into the slit formed in the slit plate 23 to produce a confocal effect.

The return light is reflected by the light branching means 22 and is incident on the photographing means 30 via the lens 27, the movable mirror 28 and the lens 29 to be photographed. At this time, since the slit image obtained by the photographing means 30 is obtained by passing through the same slit, the slit image is a plane image perpendicular to the optical axis at the focal position of the objective lens 25.

At this time, the driving means 31 sequentially moves the objective lens 25 in the optical axis direction indicated by "ZD21" in FIG.
By moving the focal position of the objective lens 25 in the optical axis direction and changing the slit image of the sample 26 in the optical axis direction, the photographing means 30
Incident on

At the same time, the movable mirror 28 is driven in the direction indicated by "MD31" in FIG. 9 in synchronization with the driving of the objective lens 25 to change the position of incidence on the photographing means 30.

For this reason, as in the embodiment shown in FIG. 1, the photographing means 30 takes a vertical tomographic image as indicated by "IL21" in FIG. Also, in FIG.
Although 0 is used, a vertical tomographic image can be observed even with the naked eye instead of the photographing means.

As a result, a slit plate is provided in the vicinity of the pinhole plate of the confocal optical scanner using the conventional pinhole plate, and the light condensing position of the light passing through the slit is changed in the optical axis direction and synchronized therewith. And photographing means 3 by scanning means
By scanning the position of incidence on zero, it is possible to view a vertical cross-sectional image of the sample in real time.

Further, in FIG. 9, the light branching means 22 and the slit plate 23 may be formed as an integral structure so as to be detachable. In this case, a conventional confocal optical scanner using a pinhole plate can be easily modified so that a vertical tomographic image can be observed in real time.

Further, a slit may be formed at a specific position of the multiple light splitting means, and the scanning means may be automatically operated according to the selection of the light splitting means. FIG. 10 is a plan view and a front view illustrating a state in which the scanning unit is automatically operated.

In FIG. 10, reference numeral 24 denotes the same reference numerals as in FIG. 9, reference numeral 22a denotes light branching means, reference numeral 23a denotes a slit plate,
32 is a multiple light branching means. The basic configuration is the same as that of the embodiment shown in FIG.

The multiple light splitting means 32 provided on the light source side of the pinhole plate 24 is movable in the direction indicated by "MD41" in FIG.
Various light branching means indicated by 1 "," BS02 "," BS03 "," BS04 "and" BS05 "can be selected based on the observation target.

Now, light from a microlens plate (not shown) is radiated to the position indicated by "SP01" in FIG. 10. Therefore, at present, the light splitting means indicated by "BS03" in FIG. It will be selected.

If the slit plate is not integrally formed with the optical branching means indicated by "BS03" in FIG.
It does not drive the movable mirror 28 which is the middle scanning means. Then, for example, when the light branching unit integrally formed with the slit plate indicated by “BS05” in FIG. 10 is selected, the movable mirror 28 as the scanning unit in FIG. 9 is driven.

As described above, the slit is formed at a specific position of the multiple light branching means 32 and the scanning means is automatically operated in accordance with the selection of the light branching means. It becomes possible to coexist with a confocal optical scanner capable of observing a layer image in real time.

Although the slit plate 23 is provided on the light source side of the pinhole plate 24 in the embodiment shown in FIG. 9 and the like, the slit plate 23 may be provided on the objective lens side of the pinhole plate 24.

FIG. 11 is an explanatory diagram showing the positional relationship of such a slit plate. 11, reference numerals 21 and 24 denote the same reference numerals as in FIG. 9, and reference numeral 23b denotes a slit plate. As shown in FIG. 11, the slit plate 23b is arranged on the pinhole plate 24 on the objective lens side.

In FIG. 1 and the like, a slit plate having a slit as a shielding means is used to irradiate a slit image on a sample. On the other hand, an output light using a cylindrical lens as a condensing means is used. May be condensed in a line on the sample.

Further, the direction and width of the cylindrical lens may be changed similarly to the above-mentioned slit, and the shape does not need to be linear. Further, a plurality of cylindrical lenses may be used. Also,
A cylindrical lens may be formed at a specific position of the multiple light branching means.

Although the movable mirror and the lens are exemplified as the scanning means, an acousto-optic modulator may be used.
In this case, there is no mechanical movable part in the scanning means.

Also, in FIG. 9, the microlens plate is for efficiently condensing the output light of the light source 19 to each pinhole, and is a necessary component for observing a vertical tomographic image in real time. Absent.

[0090]

As is apparent from the above description,
According to the present invention, the following effects can be obtained. According to the first to fifth, fifth to tenth, thirteenth, fifteenth, and sixteenth aspects of the present invention, the light condensing position of light passing through a slit or the like is changed in the optical axis direction and synchronized therewith. By scanning the incident position on the photographing means by the scanning means,
It is possible to visually check the longitudinal section image of the sample in real time.

Further, according to the inventions of claims 6 to 8, by using a slit having an arbitrary shape such as a non-linear slit, a cut surface suitable for the shape of a sample to be observed can be obtained. . Further, by arbitrarily changing the direction of the slit or the like and the width of the slit or the like, the cut surface can be arbitrarily changed according to the shape of the sample to be observed.

According to the ninth aspect of the present invention, the use of the multi-slit slit plate makes it possible to cut a plurality of cut surfaces and simultaneously observe longitudinal tomographic images at a plurality of locations.

According to the fourteenth aspect of the present invention, a slit or the like is provided at a specific position of the multiple light branching means, and the scanning means is automatically operated according to the selection of the position. It becomes possible to coexist a scanner and a confocal optical scanner capable of observing a longitudinal tomographic image in real time.

Further, according to the seventeenth aspect of the present invention, the optical path is diffracted by the acousto-optic modulator to change the incident position on the photographing means, so that the scanning means has no movable part.

[Brief description of the drawings]

FIG. 1 is a configuration block diagram showing an embodiment of a confocal optical scanner according to the present invention.

FIG. 2 is an explanatory diagram illustrating a situation in which a vertical tomographic image can be obtained in real time.

FIG. 3 is a plan view illustrating an example of a forming direction of a slit.

FIG. 4 is a plan view showing an example of a change in the direction of a slit and a change in a slit width.

FIG. 5 is a plan view showing an example of a slit having an arbitrary shape.

FIG. 6 is a plan view showing a case where cells are observed as a sample.

FIG. 7 is an explanatory diagram illustrating an example of a scanning unit using a lens.

FIG. 8 is an explanatory diagram showing an example of a multi-slit and its effect.

FIG. 9 is a configuration block diagram showing an embodiment when applied to a confocal optical scanner using a pinhole plate.

FIGS. 10A and 10B are a plan view and a front view illustrating a state in which a scanning unit is automatically operated.

FIG. 11 is an explanatory diagram showing a positional relationship between slit plates.

FIG. 12 is a configuration block diagram showing an example of a confocal microscope using a conventional confocal optical scanner.

FIG. 13 is an explanatory diagram illustrating a situation in which a slice image can be obtained.

FIG. 14 is an explanatory diagram illustrating a situation in which a vertical tomographic image is generated by calculation.

[Explanation of symbols]

 1, 9, 19 light source 2 confocal optical scanner 3 optical microscope section 4, 14, 26 sample 5 stage 6, 17 imaging means 7 storage means 8 arithmetic control means 10, 15, 20, 27, 29 lens 11, 22 light branching Means 12,23 Slit plate 13,25 Objective lens 16,28 Movable mirror 18,30,31 Driving means 21 Micro lens plate 24 Pinhole plate

Claims (17)

[Claims] 1. A confocal optical scanner for obtaining a confocal image, comprising: a shielding unit or a focusing unit for irradiating a sample with linear light; and a shielding unit or the focusing unit of return light from the sample. Scanning means for scanning the return light that has passed or transmitted therethrough; and driving means for changing a light condensing position on the sample in the optical axis direction in synchronization with the operation of the scanning means. Focus light scanner. 2. A confocal optical scanner for obtaining a confocal image, comprising: a light source; a first lens that converts output light from the light source into parallel light; a light branching unit that reflects or transmits the parallel light; Shielding means or light collecting means to which reflected light or transmitted light from the branching means is applied; and light shielding or returning light from the sample while condensing light transmitted or transmitted through the shielding means or light collecting means. Or an objective lens for condensing the light on the light condensing means, a second lens for condensing the return light passing or transmitting through the shielding means or the light condensing means and transmitting or reflecting the light branching means, Scanning means for changing the optical path of the return light from the second lens to make it incident on the photographing means or the naked eye, and changing the focusing position of the objective lens in the optical axis direction. Confocal optical scanner, which comprises scanning the incident position to the imaging means or the naked eye by the scanning means in synchronization therewith. 3. The confocal optical scanner according to claim 1, wherein said shielding means is a slit plate having a slit formed therein. 4. The apparatus according to claim 1, wherein said condensing means is a cylindrical lens.
And a confocal optical scanner according to claim 2. 5. The confocal optical scanner according to claim 3, wherein said slit is a linear slit. 6. The confocal optical scanner according to claim 3, wherein said slit is a non-linear slit. 7. The confocal optical scanner according to claim 3, wherein the direction in which the slit is formed is changed. 8. The confocal optical scanner according to claim 3, wherein a slit width of said slit is changed. 9. The confocal optical scanner according to claim 3, wherein a plurality of slits are formed in said slit plate. 10. A confocal optical scanner for obtaining a slice image of a sample surface by rotating a pinhole plate on which a plurality of pinholes are formed, wherein a linear light is provided on the sample provided near the pinhole plate. Shielding means or light condensing means for irradiating; scanning means for scanning the return light that has passed or transmitted through the shielding means or light condensing means among the return light from the sample; and synchronizing with the operation of the scanning means A confocal optical scanner, comprising: driving means for changing a condensing position on the sample in an optical axis direction. 11. A confocal optical scanner for obtaining a slice image of a sample surface by rotating a pinhole plate having a plurality of pinholes, wherein a first light source and a first lens for converting output light of the light source into parallel light are provided. A light branching unit that transmits the parallel light; a shielding unit or a light collecting unit irradiated with the transmitted light from the light branching unit; and a light that has passed or transmitted through the shielding unit or the light collecting unit is collected. A pinhole plate, an objective lens that collects light passing through the pinhole of the pinhole plate and collects return light from the sample to the pinhole, and passes through the pinhole of the pinhole plate. A second lens that passes or transmits through the shielding unit or the light collecting unit and collects the return light reflected by the light branching unit; and the return light from the second lens. Scanning means for changing the optical path to be incident on the photographing means or the naked eye, and changing the light condensing position of the objective lens in the optical axis direction and synchronizing with this, by the scanning means to the photographing means or the naked eye. A confocal optical scanner for scanning an incident position. 12. The confocal optical scanner according to claim 10, wherein said shielding means or said condensing means is provided on a light source side or an objective lens side of said pinhole plate. 13. The confocal optical scanner according to claim 10, wherein said light branching means is a multiple light branching means. 14. The apparatus according to claim 1, wherein said shielding means or said condensing means is provided at a specific position of said multiple light branching means, and said scanning means is automatically operated in accordance with selection of said specific position. 14. The confocal light scanner according to item 13. 15. The apparatus according to claim 1, wherein said scanning means changes a position of incidence on said photographing means by operating a movable mirror.
A confocal optical scanner according to claim 1 or claim 12. 16. The apparatus according to claim 1, wherein said scanning means changes a position of incidence on said photographing means by moving a lens in a direction perpendicular to an optical axis. Confocal light scanner. 17. The apparatus according to claim 1, wherein said scanning means changes an incident position on said photographing means by diffracting an optical path by an acousto-optic modulator.
The confocal optical scanner according to claim 2, 10, or 11.