JP2001026459A - Glass composition - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the specific Young's modulus of glass and also to increase the productivity of a glass substrate by specifying composition ratios of SiO2, Al2O3, MgO and ZrO2 being main components. SOLUTION: The composition range of main components are kept in 50.5-60% SiO2, 10-30% Al2O3, 10-30% MgO and 0.1-8.4% ZrO2 by weight ratio. When SiO2 is less than 50.5%, melt property becomes worse, and when SiO2 is more than 60%, crystal is hardly precipitated. When Al2O3 is less than 10%, a precipitated crystal is small and strength is low, and when Al2O3 is more than 30%, melt temp. becomes high and the glass is liable to devitrify. When MgO is less than 10%, the chemical durability of a glass matrix phase is not improved, and when MgO is more than 30%, other crystalline phase is precipitated and desired strength is difficult to obtain. When ZrO2 is less than 0.1%, sufficient crystalline nucleus is hardly formed and fine and homogeneous crystalline structure is not obtained. Further, when ZrO2 is more than 8.4%, melt temp. becomes high and also the glass is liable to devitrify and melt information becomes difficult.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a glass composition, particularly a glass composition suitable for crystallized glass. More specifically, it relates to the composition of a crystallized glass magnetic disk.

[0002]

2. Description of the Related Art Conventionally, as a substrate for a magnetic disk,
Aluminum substrates and glass substrates have been put to practical use.
Among them, a glass substrate has received the most attention because of its excellent surface smoothness and mechanical strength. As such a glass substrate, a chemically strengthened glass substrate in which the surface of the glass substrate is strengthened by ion exchange, and a crystallized glass substrate in which a crystal component is precipitated on the substrate to strengthen the bond are known.

[0003]

By the way, the recent demand for the performance of the substrate is becoming stricter day by day.
In particular, there is a demand for an improvement in performance with respect to strength directly related to deflection and warpage during high-speed rotation. This can be represented by the specific elastic modulus (= Young's modulus / specific gravity) of the substrate material, and the higher the numerical value, the more desirable. Further, there is a demand for improvement in productivity while satisfying such requirements.
Therefore, an object of the present invention is to provide a composition with improved specific elastic modulus of glass and higher productivity.

[0004]

Means for Solving the Problems In order to achieve the above object, the invention described in claim 1 provides a composition range of a main component,
SiO ₂ is 50.5 wt% or more and 60 wt% or less, Al ₂ O ₃ is 10 wt% or more and 30 wt% or less, MgO is 10 wt% or more and 30 wt% or less,
It is characterized in that ZrO ₂ is set to not less than 0.1 wt% and not more than 8.4 wt%.

[0005]

Embodiments of the present invention will be described below. In the glass substrate of the embodiment according to the present invention, the composition range of the main component is such that SiO ₂ is 50.5 wt% or more and 60 wt% or less, Al ₂ O ₃ is 10 wt% or more and 30 wt% or more.
wt% or less, MgO is 10 wt% or more and 30 wt%
Hereinafter, ZrO ₂ is 0.1 wt% or more and 8.4 wt%.
It is characterized as follows.

[0006] Since SiO ₂ is a glass-forming oxide, if its composition ratio is less than 50.5 wt%, its melting property deteriorates, and
If it exceeds 0 wt%, it will be in a stable state as glass,
Crystals are less likely to precipitate.

[0007] Al ₂ O ₃ is a glass intermediate oxide, and is a component of aluminum borate-based crystals that are crystal phases precipitated by heat treatment. If the composition ratio is less than 10 wt%, the number of precipitated crystals is small, and strength cannot be obtained. If the composition ratio is more than 30 wt%, the melting temperature becomes high, and the glass tends to be devitrified.

[0008] MgO is a flux and agglomerates granular crystals to form crystal particle masses. However, if the composition ratio is less than 10% by weight, the working temperature range becomes narrow, and the chemical durability of the glass matrix phase does not improve. If it exceeds 30% by weight, other crystal phases precipitate and it is difficult to obtain the required strength.

ZrO ₂ is a glass-modified oxide, and a crystal nucleating agent for glass functions effectively. If the composition ratio is less than 0.1 wt%, it is difficult to form sufficient crystal nuclei, crystal grains are coarsened, crystals are heterogeneously deposited, and a fine and uniform crystal structure cannot be obtained. A smooth surface required as a substrate cannot be obtained. In addition, chemical durability and migration resistance are reduced, which may affect the magnetic film, and the stability in the polishing-cleaning process is deteriorated. On the other hand, if it exceeds 8.4% by weight, the melting temperature becomes high and the glass tends to be devitrified, so that melt molding becomes difficult. In addition, the precipitated crystal phase changes, making it difficult to obtain desired characteristics.

Hereinafter, the manufacturing method will be described. Raw materials including the composition of the main components of the finally produced glass substrate are sufficiently mixed at a predetermined ratio, and the mixture is put into a platinum crucible and melted. After melting, it is poured into a mold to form a rough shape. This is annealed to room temperature. Subsequently, the temperature is maintained at the indicated primary heat treatment temperature and primary treatment time (heat treatment), and crystal nucleation is performed. Subsequently, the crystal nucleus is grown while maintaining the temperature at the secondary heat treatment and the secondary treatment time. By cooling this, the desired crystallized glass is obtained.

[0011] The glass substrate obtained by the above manufacturing method contains 50.5 wt% or more and 60 wt% of SiO _2.
Hereinafter, Al ₂ O ₃ is 10 wt% or more and 30 wt% or less, MgO is 10 wt% or more and 30 wt% or less, Z
Since the rO ₂ is 0.1 wt% or more and 8.4 wt% or less, it is possible to obtain a very high specific modulus and a high productivity.

[0012]

Next, a specific example of the embodiment will be described. Material composition ratio (unit: wt%), melting temperature and melting time, primary heat treatment temperature and primary treatment time, secondary heat treatment temperature and secondary treatment time, main precipitation constituting the glasses of the first to fifth embodiments Table 1 shows the crystal phase, sub-precipitated crystal phase, average crystal grain size, specific gravity, Young's modulus, and specific elastic modulus. Table 2 similarly shows the glasses of the sixth to tenth examples. Similarly, first to first
Table 3 shows the glasses of the five examples. Similarly, the 16th to 20th
Table 4 shows the glasses of the examples.

[0013]

[Table 1]

[0014]

[Table 2]

[0015]

[Table 3]

[0016]

[Table 4]

The glass composition of the first embodiment is such that SiO ₂ is 55.6 wt%, Al ₂ O ₃ is 15.6 wt%, MgO is 15 wt%, P ₂ O ₅ is 1.6 wt%, and Li ₂ O is 2.7
wt%, the TiO ₂ 5 wt%, the ZrO ₂ 2.5 wt%,
The composition ratio of K ₂ O is 1.7 wt% and Sb ₂ O ₃ is 0.4 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1400 ° C. and the melting time is 3
Time, primary treatment temperature 680 degrees, primary treatment time 4.5 hours, secondary treatment temperature 780 degrees, secondary treatment time 5 hours. As a result, the main precipitated crystal phase was magnesium alumina silicate, Is rutile and the specific elastic modulus is 36.5
A glass substrate having a characteristic of 3 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is Si, which is a basic composition.
In addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , P ₂ O _5, which acts as a flux, is added. It is a nucleating agent that precipitates silicate-based crystals. It is an important component to make it. Composition ratio is 0.1wt
%, It is difficult to form sufficient crystal nuclei, crystal grains are coarsened or crystals are heterogeneously deposited, and it is difficult to obtain a fine and uniform crystal structure. Can not be obtained. 9w
If it exceeds t%, the reactivity with the furnace agent at the time of melting increases,
Further, since the devitrification becomes strong, the productivity at the time of melt molding decreases. In addition, the chemical durability may be reduced, which may affect the magnetic film, and the stability in the polishing-cleaning process may be deteriorated.

In addition, since Li ₂ O serving as a flux is added, the stability during production is improved. Composition ratio 0.1
If it is less than wt%, the meltability will be poor, and if it exceeds 12 wt%, the stability in the polishing-cleaning step will be poor.

Further, since TiO ₂ serving as a flux is added, stability during production is improved. Composition ratio 0.1
If the amount is less than 12 wt%, the meltability deteriorates, and the crystal growth becomes difficult. Homogeneity occurs, and a fine and uniform crystal structure cannot be obtained, and a smooth surface required as a disk substrate in polishing cannot be obtained. Further, devitrification tends to occur during melt molding, and productivity is reduced.

Further, since K ₂ O serving as a flux is added, the stability during production is improved. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If the content exceeds 5 wt%, the glass becomes stable, crystallization is suppressed, the chemical durability is reduced, the magnetic film may be affected, and the stability in the polishing-cleaning step is deteriorated.

Further, since Sb ₂ O ₃ serving as a fining agent is added, stability during production is improved. However, if the composition ratio is less than 0.1 wt%, a sufficient fining effect cannot be obtained, and the productivity is reduced. If it exceeds 5 wt%, the crystallization of the glass becomes unstable and the control of the precipitated crystal phase becomes impossible, so that it becomes difficult to obtain the required characteristics.

The glass composition of the second embodiment is as follows: 52.9 wt% of SiO ₂ , 16.7 wt% of Al ₂ O ₃ , 14.2 wt% of MgO, 1.5 wt% of P ₂ O ₅ , Li ₂ O to 2.5 wt%, the TiO ₂ 7.1wt%, a ZrO ₂ 5w
The composition ratio is t%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1400 ° C. and the melting time is 3
Time, primary treatment temperature 680 degrees, primary treatment time 4.5 hours, secondary treatment temperature 780 degrees, secondary treatment time 5 hours. As a result, the main precipitated crystal phase was magnesium alumina silicate, Is rutile and the specific elastic modulus is 36.7
A glass substrate having a characteristic of 1 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The basic composition is Si
In addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , P ₂ O _5, which acts as a flux, is added. It is a nucleating agent that precipitates silicate-based crystals. It is an important component to make it. Composition ratio is 0.1wt
%, It is difficult to form sufficient crystal nuclei, crystal grains are coarsened or crystals are heterogeneously deposited, and it is difficult to obtain a fine and uniform crystal structure. Can not be obtained. 9w
If it exceeds t%, the reactivity with the furnace agent at the time of melting increases,
Further, since the devitrification becomes strong, the productivity at the time of melt molding decreases. In addition, the chemical durability may be reduced, which may affect the magnetic film, and the stability in the polishing-cleaning process may be deteriorated.

In addition, since Li ₂ O serving as a flux is added, stability during production is improved. Composition ratio 0.1
If it is less than wt%, the meltability will be poor, and if it exceeds 12 wt%, the stability in the polishing-cleaning step will be poor.

Further, since TiO ₂ serving as a flux is added, stability during production is improved. Composition ratio 0.1
If the amount is less than 12 wt%, the meltability deteriorates, and the crystal growth becomes difficult. Homogeneity occurs, and a fine and uniform crystal structure cannot be obtained, and a smooth surface required as a disk substrate in polishing cannot be obtained. Further, devitrification tends to occur during melt molding, and productivity is reduced.

The glass composition of the third embodiment is such that SiO ₂ is 58 wt%, Al ₂ O ₃ is 18 wt%, and MgO is 22.6.
wt%, 0.2 wt% of P ₂ O _5, the ZrO ₂ 1.2 wt
%.

The raw materials are prepared so as to have the above composition ratio, and according to the above-mentioned manufacturing method, the melting temperature is 1450 ° C., the melting time is 3.5 hours, the primary processing temperature is 710 ° C., the primary processing time is 5 hours, and the secondary processing temperature is As a result of treatment at 800 ° C. for a secondary treatment time of 5.5 hours, a glass substrate having a main precipitated crystal phase of magnesium alumina silicate and a specific elastic modulus of 37.30 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The basic composition is Si.
In addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , P ₂ O _5, which acts as a flux, is added. It is a nucleating agent that precipitates silicate-based crystals. It is an important component to make it. Composition ratio is 0.1wt
%, It is difficult to form sufficient crystal nuclei, crystal grains are coarsened or crystals are heterogeneously deposited, and it is difficult to obtain a fine and uniform crystal structure. Can not be obtained. 9w
If it exceeds t%, the reactivity with the furnace agent at the time of melting increases,
Further, since the devitrification becomes strong, the productivity at the time of melt molding decreases. In addition, the chemical durability may be reduced, which may affect the magnetic film, and the stability in the polishing-cleaning process may be deteriorated.

The glass composition of the fourth embodiment is as follows: 50.5 wt% of SiO ₂ , 22.3 wt% of Al ₂ O ₃ , 21.2 wt% of MgO, 1.2 wt% of P ₂ O ₅ , ZrO ₂ Is a composition ratio of 4.8 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1450 degrees, the melting time is 3.5 hours, the primary processing temperature is 710 degrees, the primary processing time is 5 hours, and the secondary processing temperature is in accordance with the above-mentioned manufacturing method. As a result of treatment at 800 ° C. for a secondary treatment time of 5.5 hours, a glass substrate having a main precipitated crystal phase of magnesium alumina silicate and a specific elastic modulus of 35.86 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The basic composition is Si
In addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , P ₂ O _5, which acts as a flux, is added. It is a nucleating agent that precipitates silicate-based crystals. It is an important component to make it. Composition ratio is 0.1wt
%, It is difficult to form sufficient crystal nuclei, crystal grains are coarsened or crystals are heterogeneously deposited, and it is difficult to obtain a fine and uniform crystal structure. Can not be obtained. 9w
If it exceeds t%, the reactivity with the furnace agent at the time of melting increases,
Further, since the devitrification becomes strong, the productivity at the time of melt molding decreases. In addition, the chemical durability may be reduced, which may affect the magnetic film, and the stability in the polishing-cleaning process may be deteriorated.

The glass composition of the fifth embodiment is as follows: 52% by weight of SiO ₂ , 26% by weight of Al ₂ O ₃ , and 19.5% of MgO.
wt%, 2 wt% of Nb ₂ O _5, the ZrO ₂ 0.5 wt%
Is the composition ratio.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1450 degrees, the melting time is 3.5 hours, the primary processing temperature is 710 degrees, the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of treatment at 800 ° C. for a secondary treatment time of 5.5 hours, a glass substrate having a main precipitated crystal phase of magnesium alumina silicate and a specific elastic modulus of 36.48 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
Nb ₂ O ₅ acting as a flux is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , and the crystal nucleating material increases. However, if the composition ratio is less than 0.1 wt%, the rigidity cannot be sufficiently improved. If it exceeds 9 wt%,
The crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain the required characteristics.

The glass composition of the sixth embodiment is such that 52% by weight of SiO ₂ , 18.2% by weight of Al ₂ O ₃ and 1% of MgO.
9.6wt%, Nb ₂ O ₅ to 4 wt%, a ZrO ₂ 6.2
The composition ratio is wt%.

The raw materials are prepared so as to contain the above composition ratio, and the melting temperature is 1450 degrees, the melting time is 3.5 hours, the primary processing temperature is 710 degrees, the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of treatment at 800 ° C. for a secondary treatment time of 5.5 hours, a glass substrate having a main precipitated crystal phase of magnesium alumina silicate and a specific elastic modulus of 36.94 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Nb ₂ O ₅ acting as a flux is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , and the crystal nucleating material increases. However, if the composition ratio is less than 0.1 wt%, the rigidity cannot be sufficiently improved. If it exceeds 9 wt%,
The crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain the required characteristics.

The glass composition of the seventh embodiment is as follows: 54% by weight of SiO ₂ , 19.2% by weight of Al ₂ O ₃ and 2% by weight of MgO.
The composition ratio is 3.4 wt%, Ta ₂ O ₅ is 2.2 wt%, and ZrO ₂ is 1.2 wt%.

The raw materials were prepared so as to contain the above composition ratio, and the melting temperature was 1450 degrees, the melting time was 3.5 hours, the primary processing temperature was 710 degrees, the primary processing time was 5 hours, and the secondary processing temperature was in accordance with the above-mentioned manufacturing method. As a result of treatment at 800 ° C. and a secondary treatment time of 5.5 hours, a glass substrate having a main precipitated crystal phase of magnesium alumina silicate and a specific elastic modulus of 36.54 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
Since Ta ₂ O ₅ acting as a flux is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , the meltability and strength are improved, and the chemical durability of the glass matrix phase is improved. However, if the composition ratio is less than 0.1 wt%, the rigidity cannot be sufficiently improved. If the content exceeds 9 wt%, crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain desired characteristics.

The glass composition of the eighth embodiment is as follows: 52.2 wt% of SiO ₂ , 16.8 wt% of Al ₂ O ₃ , 20.6 wt% of MgO, 5.2 wt% of Ta ₂ O ₅ , ZrO ₂ Is a composition ratio of 5.2 wt%.

The raw materials are prepared so as to contain the above composition ratio, and the melting temperature is 1450 degrees, the melting time is 3.5 hours, the primary processing temperature is 710 degrees, the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of treatment at 800 ° C. for a secondary treatment time of 5.5 hours, a glass substrate having a main precipitated crystal phase of magnesium alumina silicate and a specific elastic modulus of 38.03 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Since Ta ₂ O ₅ acting as a flux is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , the meltability and strength are improved, and the chemical durability of the glass matrix phase is improved. However, if the composition ratio is less than 0.1 wt%, the rigidity cannot be sufficiently improved. If the content exceeds 9 wt%, crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain desired characteristics.

The glass composition of the ninth embodiment is as follows: 52.2 wt% of SiO ₂ , 26.2 wt% of Al ₂ O ₃ , 17.4 wt% of MgO, 2.4 wt% of Li ₂ O, and ZrO ₂ The composition ratio is 1.8 wt%.

The raw materials are prepared so as to have the above composition ratio, and according to the above-mentioned manufacturing method, the melting temperature is 1450 degrees, the melting time is 3.5 hours, the primary processing temperature is 710 degrees, the primary processing time is 5 hours, and the secondary processing temperature is As a result of treatment at 800 ° C. for a secondary treatment time of 5.5 hours, a glass substrate having a main precipitated crystal phase of magnesium alumina silicate and a specific elastic modulus of 40.67 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
Since Li ₂ O serving as a flux is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , stability during production is improved. If the composition ratio is less than 0.1 wt%, the meltability will be poor, and if it exceeds 12 wt%, the stability in the polishing-washing step will be poor.

The glass composition of the tenth embodiment was SiO ₂
51 wt%, Al ₂ O ₃ 14.8 wt%, and MgO 2
2 wt%, Li ₂ O 6 wt%, ZrO ₂ 6.2 wt%
Is the composition ratio.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1450 degrees, the melting time is 3.5 hours, the primary processing temperature is 710 degrees, the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of treatment at 800 ° C. for a secondary treatment time of 5.5 hours, a glass substrate having a main precipitated crystal phase of magnesium alumina silicate and a specific elastic modulus of 39.33 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
Since Li ₂ O serving as a flux is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , stability during production is improved. If the composition ratio is less than 0.1 wt%, the meltability will be poor, and if it exceeds 12 wt%, the stability in the polishing-washing step will be poor.

The glass composition of the eleventh embodiment was SiO ₂
52.2 wt%, Al ₂ O ₃ 24.2 wt%, MgO
The 19.4wt%, the TiO ₂ 4 wt%, a ZrO ₂ 0.
The composition ratio is 2 wt%.

The raw materials were prepared so as to contain the above composition ratio, and the melting temperature was 1450 degrees, the melting time was 3.5 hours, the primary processing temperature was 710 degrees, the primary processing time was 5 hours, and the secondary processing temperature was in accordance with the above-mentioned manufacturing method. As a result of treatment at 800 degrees and a secondary treatment time of 5.5 hours, the main precipitated crystal phase was magnesium alumina silicate, the sub-precipitated crystal phase was rutile, and the specific elastic modulus was 3
A glass substrate having properties of 7.06 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
Since TiO ₂ serving as a flux is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , stability during production is improved. If the composition ratio is less than 0.1 wt%, the meltability deteriorates, and the crystal growth becomes difficult. If the composition ratio exceeds 12 wt%, crystallization is rapidly promoted, the control of the crystallization state becomes difficult, and the deposited crystals become coarse. In addition, heterogeneity of the crystal phase occurs, and a fine and uniform crystal structure cannot be obtained, and a smooth surface required as a disk substrate in polishing cannot be obtained. Further, devitrification tends to occur during melt molding, and productivity is reduced.

The glass composition of the twelfth embodiment was SiO ₂
The 51wt%, 17.6wt% of Al ₂ O _3, the MgO 1
4.4 wt%, TiO ₂ 9 wt%, ZrO ₂ 8 wt%
Is the composition ratio.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1450 degrees, the melting time is 3.5 hours, the primary processing temperature is 710 degrees, the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of treatment at 800 degrees and a secondary treatment time of 5.5 hours, the main precipitated crystal phase was magnesium alumina silicate, the sub-precipitated crystal phase was rutile, and the specific elastic modulus was 3
A glass substrate having a characteristic of 6.35 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
Since TiO ₂ serving as a flux is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , stability during production is improved. If the composition ratio is less than 0.1 wt%, the meltability deteriorates, and the crystal growth becomes difficult. If the composition ratio exceeds 12 wt%, crystallization is rapidly promoted, the control of the crystallization state becomes difficult, and the deposited crystals become coarse. In addition, heterogeneity of the crystal phase occurs, and a fine and uniform crystal structure cannot be obtained, and a smooth surface required as a disk substrate in polishing cannot be obtained. Further, devitrification tends to occur during melt molding, and productivity is reduced.

The glass composition of the thirteenth embodiment was SiO ₂
53.2 wt%, Al ₂ O ₃ 21 wt%, MgO 2
The composition ratio is 5.3 wt% and ZrO ₂ is 0.5 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1450 degrees, the melting time is 3.5 hours, the primary processing temperature is 710 degrees, the primary processing time is 5 hours, and the secondary processing temperature is in accordance with the above-mentioned manufacturing method. As a result of treatment at 800 ° C. and a secondary treatment time of 5.5 hours, a glass substrate having a main precipitated crystal phase of magnesium alumina silicate and a specific elastic modulus of 36.32 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The glass composition of the fourteenth embodiment was SiO ₂
50.5 wt%, Al ₂ O ₃ 23.1 wt%, MgO
Is 22.2 wt% and ZrO ₂ is 4.2 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1450 degrees, the melting time is 3.5 hours, the primary processing temperature is 710 degrees, the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of treatment at 800 ° C. for a secondary treatment time of 5.5 hours, a glass substrate having a main precipitated crystal phase of magnesium alumina silicate and a specific elastic modulus of 35.86 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The glass composition of the fifteenth embodiment was SiO ₂
The 53.2t%, Al ₂ O to 18.1 wt%, MgO and 22.2wt%, a _{ZrO 2 6wt%, B 2 O} 3 0.5
The composition ratio is wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1400 ° C. and the melting time is 3 according to the above-mentioned production method.
Treatment time was 680 degrees for the primary treatment temperature, 4.5 hours for the primary treatment time, 780 degrees for the secondary treatment temperature, and 5 hours for the secondary treatment time. As a result, the main precipitated crystal phase was magnesium alumina silicate, and the specific elastic modulus was A glass substrate having characteristics of 36.53 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
Since B ₂ O ₃ serving as a former is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , the phase separation of the glass is promoted, and the crystal precipitation and growth are promoted. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If it exceeds 5% by weight, the glass is apt to be devitrified and molding becomes difficult, and the crystals become coarse and fine crystals cannot be obtained.

The glass composition of the sixteenth embodiment was SiO ₂
56.2 wt%, Al ₂ O 14.6 wt%, MgO
Is 17.6 wt%, ZrO ₂ is 8.4 wt%, and B ₂ O ₃ is 3.2 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1400 ° C. and the melting time is 3
Treatment time was 680 degrees for the primary treatment temperature, 4.5 hours for the primary treatment time, 780 degrees for the secondary treatment temperature, and 5 hours for the secondary treatment time. As a result, the main precipitated crystal phase was magnesium alumina silicate, and the specific elastic modulus was A glass substrate having characteristics of 36.53 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Since B ₂ O ₃ serving as a former is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , the phase separation of the glass is promoted, and the crystal precipitation and growth are promoted. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If it exceeds 5% by weight, the glass is apt to be devitrified and molding becomes difficult, and the crystals become coarse and fine crystals cannot be obtained.

The glass composition of the seventeenth embodiment was SiO ₂
52 wt%, Al ₂ O 25.3 wt%, MgO 1
6.7 wt%, 4.2 wt% of ZrO ₂ , and Y ₂ O ₃ of 1.
The composition ratio is 8 wt%.

The raw materials were prepared so as to contain the above composition ratio, and the melting temperature was 1450 ° C., the melting time was 3.5 hours, the primary processing temperature was 710 ° C., the primary processing time was 5 hours, and the secondary processing temperature was in accordance with the above-mentioned manufacturing method. As a result of treatment at 800 ° C. and a secondary treatment time of 5.5 hours, a glass substrate having a main precipitated crystal phase of magnesium alumina silicate and a specific elastic modulus of 38.00 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Since Y ₂ O ₃ acting as a flux is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , the rigidity is improved. However, if the composition ratio is less than 0.1 wt%, sufficient rigidity cannot be obtained. If it exceeds 9 wt%, crystal precipitation is suppressed, sufficient crystallinity cannot be obtained, and desired characteristics cannot be achieved.

The glass composition of the eighteenth embodiment was SiO ₂
The 51.8wt%, 15.3wt% of Al ₂ O, MgO
Is 23.9 wt%, ZrO ₂ is 4.8 wt%, and Y ₂ O ₃ is 4.2 wt%.

The raw materials were prepared so as to contain the above composition ratios, and the melting temperature was 1450 ° C., the melting time was 3.5 hours, the primary processing temperature was 710 ° C., the primary processing time was 5 hours, and the secondary processing temperature was in accordance with the above-mentioned manufacturing method. As a result of the treatment at 800 ° C. and the secondary treatment time of 5.5 hours, a glass substrate having a main precipitated crystal phase of magnesium alumina silicate and a specific elastic modulus of 38.16 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
Since Y ₂ O ₃ acting as a flux is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , the rigidity is improved. However, if the composition ratio is less than 0.1 wt%, sufficient rigidity cannot be obtained. If it exceeds 9 wt%, crystal precipitation is suppressed, sufficient crystallinity cannot be obtained, and desired characteristics cannot be achieved.

The glass composition of the nineteenth embodiment was SiO ₂
The 52.6wt%, 18.8wt% of Al ₂ O _3, MgO
19.9 wt%, ZrO ₂ 5 wt%, K ₂ O 1 wt%
%, Sb ₂ O ₃ 0.2 wt%, ZnO 0.5 wt%,
La ₂ O ₃ has a composition ratio of 2 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1400 ° C., the melting time is 3.5 hours, the primary processing temperature is 680 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of the treatment at 780 ° C. and the secondary treatment time of 5.5 hours, a glass substrate was obtained in which the main precipitated crystal phase was magnesium alumina silicate and the specific elastic modulus was 35.12. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is Si, which is a basic composition.
Since K ₂ O serving as a flux is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , stability during production is improved. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If the content exceeds 5 wt%, the glass becomes stable, crystallization is suppressed, the chemical durability is reduced, the magnetic film may be affected, and the stability in the polishing-cleaning step is deteriorated.

Further, since Sb ₂ O ₃ serving as a fining agent is added, the stability during production is improved. However, if the composition ratio is less than 0.1 wt%, a sufficient fining effect cannot be obtained, and the productivity is reduced. If it exceeds 5 wt%, the crystallization of the glass becomes unstable and the control of the precipitated crystal phase becomes impossible, so that it becomes difficult to obtain the required characteristics.

Further, the addition of ZnO acting as a flux aids uniform crystal precipitation. However, when the composition ratio is 0.1
If the amount is less than wt%, sufficient improvement in crystal homogenization cannot be achieved. If it exceeds 5% by weight, the glass becomes stable, crystallization is suppressed, and it becomes difficult to obtain the required strength.

Since La ₂ O ₃ serving as a flux is added, crystal precipitation is suppressed. However, the composition ratio is 0.1w
If it is less than t%, the rigidity cannot be sufficiently improved. 5w
If the content exceeds t%, crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain desired characteristics.

The glass composition of the twentieth embodiment was SiO ₂
54 wt%, Al ₂ O ₃ 12.1 wt%, MgO 1
8.2 wt%, ZrO ₂ 5.2 wt%, K ₂ O 4 wt
%, ₂ wt% of Sb ₂ O ₃ , 2 wt% of ZnO, La ₂ O ₃
Is a composition ratio of 2.5 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1400 degrees, the melting time is 3.5 hours, the primary processing temperature is 680 degrees, the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of the treatment at 780 ° C. and the secondary treatment time of 5.5 hours, a glass substrate having a main precipitated crystal phase of magnesium alumina silicate and a specific elastic modulus of 35.77 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Since K ₂ O serving as a flux is added in addition to O ₂ , Al ₂ O ₃ , MgO, and ZrO ₂ , stability during production is improved. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If the content exceeds 5 wt%, the glass becomes stable, crystallization is suppressed, the chemical durability is reduced, the magnetic film may be affected, and the stability in the polishing-cleaning step is deteriorated.

Further, since Sb ₂ O ₃ acting as a fining agent is added, the stability during production is improved. However, if the composition ratio is less than 0.1 wt%, a sufficient fining effect cannot be obtained, and the productivity is reduced. If it exceeds 5 wt%, the crystallization of the glass becomes unstable and the control of the precipitated crystal phase becomes impossible, so that it becomes difficult to obtain the required characteristics.

Further, since ZnO serving as a flux is added, uniform crystal precipitation is assisted. However, when the composition ratio is 0.1
If the amount is less than wt%, sufficient improvement in crystal homogenization cannot be achieved. If it exceeds 5% by weight, the glass becomes stable, crystallization is suppressed, and it becomes difficult to obtain the required strength.

Further, since La ₂ O ₃ acting as a flux is added, crystal precipitation is suppressed. However, the composition ratio is 0.1w
If it is less than t%, the rigidity cannot be sufficiently improved. 5w
If the content exceeds t%, crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain desired characteristics.

[0087]

According to the present invention, a glass substrate having a specific elastic modulus of 33 or more and high productivity can be obtained.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hideki Kawai 2-3-13 Azuchicho, Chuo-ku, Osaka City Inside Osaka International Building Minolta Co., Ltd. (72) Akira Sugimoto 2-3-3 Azuchicho, Chuo-ku, Osaka City 13 Osaka International Building Minolta Co., Ltd. (72) Inventor Kazuhiko Ishimaru 2-3-13 Azuchicho, Chuo-ku, Osaka City F-term in Osaka International Building Minolta Co., Ltd. 4G062 AA11 BB01 BB06 DA06 DB04 DC01 DD01 DE01 DF01 EA01 EB01 EC01 ED04 EE01 EF01 EG01 FA01 FB01 FC02 FC03 FD01 FE01 FF01 FG01 FH01 FJ01 FK01 FL01 GA01 GA10 GB01 GC01 GD01 GE01 HH01 HH03 HH05 HH07 HH09 HH11 HH13 HH15 KK01 KK KK KK CB07 DA03

Claims (1)

[Claims] 1. The composition range of a main component is as follows: SiO ₂ is 50.5 wt% or more and 60 wt% or less, Al ₂ O ₃ is 10 wt% or more and 30 wt% or less, MgO is 10 wt% or more and 30 wt% or less. A glass composition characterized in that ZrO ₂ is at least 0.1 wt% and not more than 8.4 wt%.