JP2001021330A - Slit disc for confocal device and confocal device and picture measuring method for the same device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain fixed quantity of exposure at each radial position from the center of a slit disc, and to quickly fetch confocal pictures without revolving the slit disc. SOLUTION: Slits to be formed on a slit disc 13 of a confocal device 10 are not radially formed from the center of the slit disc 13 but formed so as to be increased almost in proportion to the increase of radial positions 1-5. Thus, mean exposure R can be obtained at the radial positions 1-5 of the slit disc 13. Therefore, it is not necessary to revolve the slit disc 13 by a driving motor 18, and it is possible to fetch almost mean exposure R at the radial positions 1-5, and to quickly fetch the confocal pictures of a sample 16 by moving the slit disc 13 to the revolving direction a little.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a slit disk of a confocal device, a confocal device, and an image measuring method of the confocal device. More particularly, the amount of exposure by the confocal slit disk is determined by the radial position of the slit disk. The present invention relates to a slit disk of a confocal device, a confocal device, and a method of measuring an image of the confocal device, which are substantially uniform.

[0002]

2. Description of the Related Art In a confocal device, when a confocal image is formed for a predetermined sample and the shape of the sample is measured,
The projection light projected through the objective lens by rotating the slit disk formed with a predetermined slit irradiates the object to be measured, and the reflected light from this object is again incident on the CCD camera through the objective lens, The measurement is performed by forming a confocal image of the object. In such a case, the slit disk of the conventional confocal device forms a slit having a substantially uniform width so as to open radially from the center of the slit disk, and allows projection light and reflected light to pass therethrough to obtain a confocal image of the object. Is formed and measurement is performed. As another method, a pinhole disk in which pinholes are arranged as a Nippou disk is rotated to form a confocal image of an object by the above-described method, and measurement is performed.

At this time, when forming a confocal image to be measured, a confocal image is formed based on the exposure amount of reflected light that enters through a slit of a slit disk and a pinhole of a pinhole disk. Here, the exposure amount is proportional to the product of the transit time of exposure per unit length or unit area of the slit and the pinhole, and the number of times of repeated exposure from the slit and the pinhole by rotating the slit disk and the pinhole disk. . Therefore, in order to obtain a uniform exposure amount corresponding to the radial position from the center of the disk for the slit disk and the pinhole disk,
Each disk is orbited several times. On the other hand, in the slit disk, a radial slit is opened toward the outer peripheral direction so as not to perform a plurality of rounds, and is opened.
Some methods employ a method of increasing the amount of light to be exposed corresponding to a radial position.

[0004]

In the above-mentioned conventional confocal device, a slit disk having a slit having a substantially uniform width and a pinhole disk having a pinhole opened are located at respective radial positions from the center of each disk. In order to obtain a constant exposure amount, the slit disk and the pinhole disk must be rotated a plurality of times, and there is a problem that a high-speed confocal image cannot be captured. Also, in the slit disk, even if a method in which the radial slit is widened toward the outer peripheral direction and opened to increase the exposure amount corresponding to the radial position, the exposure amount corresponds to the radial position. It can be made substantially equal. However, there is a problem that the resolution of the confocal image formed based on the exposure of the reflected light that has entered through the slit that is open and widened is reduced.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and it is possible to obtain a constant exposure amount at each radial position from the center of the slit disk without rotating the slit disk, and at the same time, at a high speed. An object of the present invention is to provide a slit disk of a confocal device capable of capturing a focused image, a confocal device, and an image measuring method of the confocal device.

[0006]

In order to achieve the above object, the invention according to claim 1 is to input a reflected light passing through the slit by rotating a slit disk having a predetermined slit formed therein. A slit disk of a confocal device for measuring a confocal image, wherein the slit is formed so as to increase substantially in proportion to a radial position from a center of the disk. In the invention according to claim 1 configured as described above, the slit formed in the slit disk is formed so as to increase substantially in proportion to the radial position from the center of the slit disk. That is, the exposure amount of the slit disk is proportional to the product of the open slit passage time per unit length of the slit and the number of repetitions of the open slit. Here, by increasing the number of slits substantially in proportion to the radial position from the center of the slit disk, the number of slits is substantially proportional to the radius.

Therefore, the product of the transit time per unit length, which is inversely proportional to the radius, becomes a constant value, and a substantially uniform exposure amount can be obtained regardless of the radial position. Here, the confocal image to be measured is formed based on the reflected light from the object entering from each slit. It goes without saying that the resolution of this confocal image is determined by the slit width of each slit. That is, each slit is formed to have a substantially uniform width so that the resolution of the confocal image does not differ for each slit that receives light. Therefore, in this case, the mode in which the slits are formed so as to increase substantially in proportion to the radial position from the center of the slit disk is to make the number of slits having a substantially uniform width substantially proportional to the radial position. And increase it. .

Various methods can be employed for forming the slits formed in the slit disk so as to increase substantially in proportion to the radial position from the center of the slit disk. For example, by dividing a predetermined section from the center of the slit disk in the outer peripheral direction, from the inner peripheral section toward the outer peripheral section, the number of slits formed in each section is set at the position of the corresponding section from the center of the slit disk. As roughly proportional,
A radial slit may be formed in the same section.

Here, as a simple method of forming the slit formed in the slit disk so as to increase substantially in proportion to the radial position from the center of the slit disk, the invention according to claim 2 is as follows. The slit disk of the confocal device according to claim 1, wherein the slit is formed substantially parallel within a predetermined fan-shaped section having the center of the disk as a vertex. In the invention according to claim 2 configured as described above, the slits formed in the slit disk are formed substantially parallel within a predetermined fan-shaped section whose vertex is the center of the slit disk. Here, in order to increase the number of slits substantially in proportion to the radial position from the center of the slit disk, it is preferable to form one end of the opening of the slit so as to cover a sector-shaped arc.

As described above, when the slits are formed substantially parallel in the sector, the number of slits can be increased in the slit disk in accordance with the radial position from the center. In such a case, if the interval between the slits formed substantially in parallel is set to a predetermined constant interval, the degree of increase can be made substantially proportional to the radial position. Therefore, according to a third aspect of the present invention, in the slit disk of the confocal device according to the second aspect, the slits are provided at predetermined substantially constant intervals within a predetermined fan-shaped section whose center is the vertex of the disk. There is a configuration to be formed. In the invention according to claim 3 configured as described above, the slits formed in the slit disk are formed substantially in parallel with each other in a predetermined fan-shaped section having the center of the slit disk as the vertex, and are formed substantially in parallel. The formed slits are formed at predetermined substantially constant intervals.

As another example of a method of forming such a slit disk so as to increase the number of slits substantially in proportion to the radial position from the center thereof, the invention according to claim 4 is the invention according to claim 2. Wherein the slit is formed substantially parallel to one side of the sector within a predetermined sector passing through the center of the disk. In the invention according to claim 4 configured as described above, the slit formed in the slit disk is formed substantially parallel to one side of the sector within a predetermined sector passing through the center of the slit disk.

According to another aspect of the present invention, there is provided a confocal device according to the invention, wherein the slit is formed within a predetermined fan-shaped section passing through the center of the disc. It is configured to be formed substantially parallel to the center line of the sector. In the invention according to claim 5 configured as described above, the slit formed in the slit disk is formed substantially parallel to the center line of the sector within a predetermined sector passing through the center of the slit disk.

In such a case, in a sector having a vertex at the center of the slit disk, the slits formed substantially parallel to each other have a predetermined constant interval between the slits.
The number of slits can be increased substantially in proportion to the radial position from the center of the slit disk. Therefore,
According to a sixth aspect of the present invention, in the slit disk of the confocal device according to the fourth or fifth aspect, the slits are formed at predetermined substantially constant intervals. In the invention according to claim 6 configured as described above, the slits formed in the fan shape are substantially parallel and
It is formed at a predetermined substantially constant interval.

As described above, when a predetermined sector is divided on the slit disk and the slit is formed in each sector, a slit which increases substantially in proportion to the radial position can be formed. Here, if the shape of each sector is made uniform, the formation of slits and the like will be simplified. Therefore, according to a seventh aspect of the present invention, in the slit device of the confocal device according to any one of the second to fifth aspects, the sector has substantially the same inner angle. In the invention according to claim 7 configured as described above, a sector having a vertex at the center of the slit disk is divided with substantially the same inner angle.

As described above, the slit disk used for the confocal device in which the slit is formed so as to increase substantially in proportion to the radial position from the center of the slit disk is not used for the slit disk alone. Of course, it goes without saying that the confocal device is incorporated and used. Accordingly, it can be easily understood that the above-described slit disk is incorporated and functions as a confocal device that performs projection and incidence while measuring the confocal image while rotating the slit disk.

Therefore, the invention according to claim 8 is a confocal device for measuring a confocal image by inputting reflected light passing through the slit by rotating a slit disk having a predetermined slit formed therein. A light source irradiating unit that supplies a light beam to be projected onto an object on which an image is formed; a rotationally driven slit disk formed so that the slits are increased substantially in proportion to the radial position; And a two-dimensional image element for measuring a confocal image by inputting reflected light from an object of a light beam emitted by the light source irradiating unit through the driven slit disk. That is,
It is not necessarily limited to the slit disk alone, and there is no difference that the present invention is effective in a confocal device incorporating the slit disk.

Further, a slit disk used for a confocal device, in which the slit is formed so as to increase substantially in proportion to the radial position from the center of the slit disk, is incorporated in the confocal device, and the slit disk is rotated. On the other hand, a method of measuring a confocal image by performing projection and incidence is not necessarily limited to a substantial device, and it can be easily understood that the method also functions as a method.

According to the ninth aspect of the present invention, there is provided a confocal device for measuring a confocal image by inputting reflected light passing through the slit by rotating a slit disk having a predetermined slit. An image forming method, wherein a light source irradiating step of supplying a light beam to be projected on an object on which an image is formed, and a slit disk formed so as to increase the slit substantially in proportion to the radial position by a predetermined amount. It is configured to include a slit disk rotation step of rotating at an angle and receiving substantially uniform reflected light at a radial position, and an image measuring step of measuring a confocal image based on the input reflected light. In other words, there is no difference that the method is not necessarily limited to a confocal device having a substance but is also effective as a method.

[0019]

As described above, according to the present invention, it is possible to obtain a constant exposure amount at each radial position from the center of the slit disk without rotating the slit disk.
A slit disk of a confocal device capable of capturing a confocal image at high speed can be provided. According to the second aspect of the present invention, the number of slits is increased substantially in proportion to the radial position from the center of the slit disk by a simple method by forming the slits substantially parallel in the sector. It becomes possible. Further, according to the third aspect of the present invention, by increasing the interval between the slits formed substantially in parallel to a predetermined constant interval, it is possible to make the increase in the number of slits substantially proportional to the radial position.

Further, according to the invention of claim 4,
By forming each slit substantially parallel in the sector, it is possible to present another method of increasing the number of slits substantially in proportion to the radial position from the center of the slit disk by a simple method. Further, according to the fifth aspect of the invention, the number of slits is increased substantially in proportion to the radial position from the center of the slit disk by a simple method by forming each slit in the sector substantially in parallel. Still other approaches can be presented.
Furthermore, according to the invention of claim 6, by making the interval between the slits formed substantially parallel to a predetermined constant interval, it is possible to make the increase in the number of slits substantially more proportional to the radial position. become.

Further, according to the invention according to claim 7,
The size of each sector can be made substantially uniform, and the formation of the slit is simplified. Furthermore, according to the invention of claim 8, it is possible to obtain a constant exposure amount at each radial position from the center of the slit disk without rotating the slit disk, and it is possible to capture a confocal image at high speed. The confocal device can be provided. Further, claim 9
According to the invention according to the confocal device, it is possible to obtain a constant exposure amount at each radial position from the center of the slit disk without rotating the slit disk, and to capture a high-speed confocal image. An image measurement method can be provided.

[0022]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing a confocal device according to an embodiment of the present invention. In the figure, a confocal device 10 includes a white light source 11 that is a non-coherent light source, a lens 12, a slit disk 13 provided with a plurality of slits that are openings, a beam splitter 14 such as a half mirror, An objective lens 15, a sample 16 to be measured, and a two-dimensional C
And a CD camera 17. In such a configuration, the output light of the white light source 11 is incident on the lens 12 and is also incident on the slit disk 13 via the beam slitter 14 from the lens 12, and the light passing through each slit of the slit disk 13 is an objective lens. Sample 1 through 15
6 is irradiated.

The reflected light from the sample 16 is again incident on the slit disk 13 via the objective lens 15. Then, the reflected light incident on the slit disk 13 is incident on the beam slitter 14, and the light reflected on the beam slitter 14 is incident on the CCD camera 17. Further, the sample 16 is scanned in an optical axis direction indicated by “A” in FIG. 1 by an optical axis scanning unit (not shown). Further, the slit disk 13 is provided with a drive motor 1 connected to a drive shaft portion 13a.
As a result, the drive shaft 8 rotates around the drive shaft 13a at a predetermined rotation speed.

Here, the operation of the confocal apparatus 10 shown in FIG. 1 in this embodiment will be described with reference to FIG. In the figure, a beam slitter 14 is installed on an image plane of an objective lens 15. Here, the slit width of the slit formed on the surface of the slit disk 13 is formed to be the same width as the Airy first dark band on the imaging plane. The interval between the slits is formed to be about 10 times the slit width. On the other hand, if the reflected light from the sample 16 is condensed by the objective lens 15, it does not actually converge on one clean point,
A fine image in which bright and dark rings are arranged alternately around the bright part in the center. These are called "airy disks", and the dark ring adjacent to the center portion is the first airy dark zone.

When the output light of the white light source 11 is incident on the slit disk 13, a plurality of slit images of the slit disk 13 are formed on the sample 16 by the objective lens 15. Then, the slit image on the sample 16 is further incident on a CCD camera 17 which is a light receiving unit. In the present embodiment, the light receiving section is constituted by a two-dimensional CCD camera 17. Since a plurality of pixels are arranged on a plane, the CCD camera 17 receives only reflected light passing through a slit having a constant slit width, as described above, by focusing on a pixel row corresponding to the slit width. You are doing.
For example, a predetermined slit image is measured at a pixel row at a position where the image is formed. Therefore, assuming that the width of the pixel row in the x direction in the CCD camera 17 is a, the pixel row receives only light that has passed through the slit width of a. That is, it has not only the resolution of the 16 surfaces of the sample but also the resolution in the optical axis direction.

At this time, the measurement surface of the sample 16 is
If the sample 16 is located at the focal plane 2, the slit image becomes clear, but if the sample 16 is moved up and down from the focal plane by an optical axis scanning unit (not shown), the slit image becomes dark. When such a slit image is received by each pixel of the CCD camera 17, the maximum amount of light is incident when the position in the optical axis direction matches the focal plane as shown in FIG. The amount of incident light decreases as the position deviates from the surface. That is, the position in the optical axis direction where the amount of incident light is the maximum is
This indicates the height of the sample 16 in the optical axis direction at that point. Accordingly, the sample 16 is scanned in the optical axis direction indicated by “A” in FIG. 1 by an optical axis scanning unit (not shown), and the position in the optical axis direction at which the amount of light measured by the CCD camera 17 is maximized is determined. A change in the optical axis direction of the surface of the surface 16, that is, a step can be obtained.

For example, when a three-dimensionally shaped sample 16a having a step "L" as shown in FIG. 3 is measured by the present confocal apparatus 10, a slit image as shown by a broken line in FIG. It is imaged. Here, if the surface of the sample upper surface 16a1 in FIG. 3A is a focal plane, the slit image of the surface of the sample lower surface 16a2 in FIG. 3A becomes dark. Conversely, FIG.
If the surface of the sample lower surface 16a2 in (a) is the focal plane, the slit image of the sample upper surface 16a1 in FIG.

Therefore, by determining the position in the optical axis direction at which the maximum amount of light is input to each pixel of the CCD camera 17, a tomographic image of the sample 16a as shown in FIG. It becomes possible to obtain. As a result, the slit image is formed on the surface of the sample 16 and the position in the optical axis direction at which the maximum amount of light is input to each pixel of the CCD camera 17 which is a light receiver is obtained.
The resolution can be obtained in the optical axis direction without scanning the irradiation light using non-coherent light.

The confocal device 10 according to the present embodiment
Has a resolution in the optical axis direction and a resolution similar to that of a normal optical microscope in a direction perpendicular to the optical axis.
In addition, when the slit width of the slit disk 13 is increased, the light amount increases, while the spatial resolution decreases. When the slit width is reduced, the spatial resolution improves, and the light amount decreases. Therefore, it is not necessary to limit the slit width to the width of the airy first dark belt, and the slit width can be changed as appropriate as long as it is about 1/20 to 5 times the diameter of the airy first dark belt.

When the interval between the slits of the slit disk 13 is increased, the interference from the adjacent slits is reduced, so that the resolution in the optical axis direction is improved, but the number of slits that can be measured simultaneously decreases. On the other hand, if the interval is reduced, the number of slits increases, but interference between the slits occurs, making accurate measurement difficult. Therefore, the interval between the slits is not limited to ten times the airy first dark zone, but can be changed as appropriate as long as it is about twice or more the airy first dark zone. Further, the device constituting the light receiver is not limited to the CCD camera 17, but may be an image pickup tube, a film or the like. Alternatively, the image may be directly observed with an eye using an eyepiece.

Further, each slit of the slit disk 13 may be provided at the converging point of the cylindrical lens array 19, respectively. In such a case, the configuration shown in FIG. 4 is obtained, and the incident light from the white light source 11 can be used effectively. In addition, the light collecting means such as the cylindrical array 19 may be an ordinary convex lens, or may be a Fresnel lens or a gradient index lens. Further, when a transmissive liquid crystal panel is used for the opening, a microlens may be added to each liquid crystal element. Further, a half mirror has been exemplified as the beam splitter 14, but a polarizing beam splitter may be used, and the beam splitter 14 can be appropriately adopted.

In this manner, it is possible to obtain a confocal image showing the change of the sample 16 in the optical axis direction. On the other hand, when acquiring this confocal image, the slit disk 13 is made to circulate at a predetermined rotation speed. That is, it passes through the slit formed in the slit disk 13,
A confocal image is formed by the CCD camera 17 by exposing the beam to the beam slitter 14. Here, if the exposure amount is not uniform, light and dark will occur in the image.
That is, when the slit disk 13 rotates, the inside of the slit disk 13 becomes bright and becomes darker toward the outside. This is because the linear velocities are different between the inside and outside radial positions. Here, a specific embodiment will be described with reference to FIG. Assuming that the exposure amount is R and the rotational angular velocity of the slit disk 13 is ω, the linear velocity v at the radial position r of the slit disk 13 is calculated by the following equation. v = r * ω

The exposure amount R is proportional to the product of the passage time t of the open slit per unit length and the number of repetitions n due to the rotation of the slit disk 13. Assuming that the proportional constant is k, the exposure amount R is calculated by the following equation. R = k * t * n Therefore, the exposure amount R is inversely proportional to the linear velocity v. That is, as the radial position r increases, the exposure amount R decreases.
Thus, the above-described light and dark of the image occurs. here,
As shown in FIG. 5A, the slit disc 13 is
Except for 3a, it is divided into radial positions 1 to 5 in the outer peripheral direction.
In such a case, the linear velocities at the respective radial positions 1 to 5 are as follows: v1 = r1 * ωv2 = r2 * ωv3 = r3 * ωv4 = r4 * ωv5 = r5 * ω, and radial position 1 <radial position 2 < Since radial position 3 <radial position 4 <radial position 5, the exposure amount R is as shown in FIG.
As shown in (1), as the radial position increases from 1 to 5, it decreases in inverse proportion.

Accordingly, the slit disk 13 is rotated by the drive motor 18 and the slit disk 13 is rotated until the CCD camera 17 obtains a substantially uniform exposure amount R. That is, by rotating, the radial position 2
The control is performed to raise the exposure amount R of (5) to the level of the radial position 1. By such circling control, the exposure amount R is set to the same level irrespective of the radial positions 1 to 5 as shown in FIG. 5 (c), so that light and dark do not occur in the confocal image.
Such a phenomenon is caused by the slit disk 13 as shown in FIG.
It can be seen from the above description that this occurs when the slits are formed such that the density of the slits decreases in the outer peripheral direction. In FIG. 6, the black lines indicate slits, and the white portion indicates the space between slits. In the configuration of the slit disk 13 shown in FIG.
Slit disk 1 until it can be obtained at 5
Since it is necessary to make the circuit 3 rotate, it is not suitable for acquiring a confocal image of the sample 16 at high speed.

Therefore, in this embodiment, the slit disk 13 is formed to have the slits shown in FIGS. In the figure, the slit disk 13 is
Equally divide into 0-107. And each sector 100-10
7, including the center lines 100a to 107a.
Slits are formed at predetermined regular intervals in parallel with 0a to 107a. In FIG. 8, a hatched portion indicates a space between slits, and a white portion indicates a slit. Therefore, as shown in FIG. 8, the relationship between the radial position and the number of slits is as follows: Radial position 1 = Slit number 3 Radial position 2 = Slit number 5 Radial position 3 = Slit number 7 Radial position 4 = Slit number 9 Radial position 5 = Slit Equation 11 is obtained, and it can be seen that the radial positions 1 to 5 and the number of slits have a substantially proportional relationship.

FIG. 9 shows the relationship between the number of slits at radial positions 1 to 5 on the slit disk 13 in which the slits are formed and the exposure amount R. In FIG. 9A, the number of slits at the radial positions 1 to 5 increases stepwise as the radial position increases, and as described above, the radial position 1
5 and the number of slits have a substantially proportional relationship. In this case, when the white light source 11 is irradiated and the reflected light from the sample 16 is exposed to the CCD camera 14 through the slit disk 13, the exposure amount R becomes 1 as shown in FIG.
5 is substantially equal. That is, as shown in FIGS. 7 and 8, when the slit is formed in the slit disk 13, when the slit is increased substantially in proportion to the radial position,
The exposure amount R at each of the radial positions 1 to 5 can be obtained substantially uniformly without rotating around the slit disk 13.

Next, FIG. 10 shows another embodiment of the slit disk 13 in which the slits which increase substantially in proportion to the radial position are formed. In the figure, the slit disk 13 is divided into sectors 200 to 207 with the center of the slit disk 13 as the apex, and within each sector 200 to 207, it is parallel to one side on the left side as viewed in the figure and at a predetermined constant interval. Creating a slit. As a result, it is possible to form a slit that increases substantially in proportion to the radial position. Then, the exposure amount R can be obtained substantially uniformly.

In this embodiment, the slit disk 13
7 and 8 are formed at predetermined fixed intervals in parallel with the center lines 100a to 107a of the sectors 100 to 107, as shown in FIG. Although a configuration is adopted that is formed parallel to one side on the left side and at a predetermined fixed interval, it is needless to say that the method of forming the slit so as to increase the number of slits by making the slit substantially proportional to the radial position is,
As shown in FIG.
207 to 207 are not limited to the configuration parallel to the center lines 100 a to 107 a or a predetermined side, and a slit may be formed in a sector so as to be parallel to an arbitrary reference line 300.

In the present embodiment, the sector is divided so that the slit disk 13 is divided into eight equal parts. Of course, the division method of the sector is that if a slit can be formed in the divided sector by a predetermined method. Well, it is not necessarily limited to equal parts. In the present embodiment,
The slit disk 13 is set to a predetermined fan shape 100 to 107 or 2
Although a configuration in which the slit is formed based on a predetermined method by dividing the slit into 00 to 207 is adopted, a method of increasing the number of slits substantially in proportion to the radial position of the slit disk 13 is not particularly limited. Instead, as shown in FIG. 12, the slit disk 13 may be concentrically divided at predetermined intervals, and the number of slits may be increased in proportion to the division outside the center. .

As described above, the slits formed on the slit disk 13 of the confocal device 10 are not formed radially from the center of the slit disk 13 but are substantially proportional to the radial positions 1 to 5 which become larger. To increase. Specifically, as shown in FIGS. 7 and 8, the slit disk 13 is equally divided into sectors 100 to 107, and the sectors 100 to 107 include the center lines 100 a to 107 a while including the center lines 100 a to 107 a. By forming slits parallel to 107a and at a predetermined constant interval, it is possible to obtain an even exposure amount R at radial positions 1 to 5. Therefore, it is not necessary to rotate the slit disk 13 by the drive motor 18, and by slightly moving the slit disk 13 in the rotation direction, it is possible to obtain a substantially uniform exposure amount R at the radial positions 1 to 5.
Can be captured at high speed.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating a schematic configuration of a confocal device according to an embodiment of the present invention.

FIG. 2 is a diagram showing a change in a light amount in an optical axis direction.

FIG. 3 is a diagram showing a specific example of a sample.

FIG. 4 is a configuration diagram showing a configuration of a cylindrical lens.

FIG. 5 is a diagram showing a relationship between a radial position and an exposure amount on a slit disk.

FIG. 6 is an external view of a slit disk in which slits are formed radially.

FIG. 7 is a diagram showing an example of a method of dividing the slit disk when forming a slit in the slit disk according to the present invention.

FIG. 8 is a diagram showing a method of forming a slit in a divided sector.

FIG. 9 is a diagram showing a relationship between a radial position and an exposure amount when a slit disk according to the present invention is used.

FIG. 10 is a view showing another example of forming a slit in the slit disk of the present invention.

FIG. 11 is a diagram showing another example of forming a slit in the slit disk of the present invention.

FIG. 12 is a view showing another example of forming a slit in the slit disk of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Confocal apparatus 11 ... White light source 12 ... Lens 13 ... Slit disk 13a ... Drive shaft part 14 ... Beam slitter 15 ... Objective lens 16 ... Sample 17 ... CCD camera 18 ... Drive motor

Continued on the front page F term (reference) 2F065 AA04 AA06 AA07 AA53 DD06 FF04 FF10 GG02 GG12 GG24 HH03 HH04 JJ03 JJ12 JJ13 JJ26 LL08 LL29 LL30 LL37 LL46 QQ29 2H052 AA08 AC04 AC15 AC16 AF35

Claims (9)

[Claims] 1. A slit disk of a confocal device for measuring a confocal image by inputting reflected light passing through the slit disk by rotating a slit disk formed with a predetermined slit, wherein the slit is A slit disk of the confocal device, which is formed so as to increase substantially in proportion to a radial position from the center of the disk. 2. The slit disk of the confocal device according to claim 1, wherein the slit is formed substantially in parallel within a predetermined fan-shaped section having the center of the disk as a vertex. Slit disk of confocal device. 3. The slit disk of the confocal device according to claim 2, wherein the slits are formed at predetermined substantially constant intervals within a predetermined fan-shaped section having a vertex at the center of the disk. A slit disk of a confocal device characterized by the following. 4. The slit disk of the confocal device according to claim 2, wherein the slit is formed substantially parallel to one side of the sector within a predetermined sector passing through the center of the disk. The slit disk of the confocal device that is the feature. 5. The slit disk of the confocal device according to claim 2, wherein the slit is formed substantially parallel to a center line of the sector within a predetermined sector passing through the center of the disk. A slit disk of a confocal device characterized by the following. 6. The confocal device according to claim 4, wherein said slits are formed at substantially constant intervals. Slit disk. 7. The slit of a confocal device according to claim 2, wherein the sector has substantially the same inner angle. disk. 8. A confocal device for measuring a confocal image by inputting reflected light passing through the slit by rotating a slit disk in which a predetermined slit is formed, wherein the object on which an image is formed is provided. A light source irradiating unit for supplying a light beam to be projected on the slit disk; a slit disk driven to rotate formed to increase a slit substantially in proportion to a radial position; and a slit disk driven to rotate. A confocal device comprising: a two-dimensional image element for measuring a confocal image by inputting reflected light of a light beam emitted by a light source irradiation unit from an object. 9. An image forming method of a confocal device for measuring a confocal image by inputting reflected light passing through the slit by rotating a slit disk having a predetermined slit formed therein, the method comprising: A light source irradiating step of supplying a light beam to be projected on an object to be formed, and rotating a slit disk formed so as to increase the slit substantially in proportion to the radial position at a predetermined angle,
Image measurement of a confocal device, comprising: a slit disk rotation step of inputting substantially uniform reflected light at a radial position; and an image measuring step of measuring a confocal image based on the input reflected light. Method.