JP2001021039A - Semiconductor manufacturing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the danger to a human body during cap opening/closing, and to make a cap opening/closing mechanism simple and inexpensive. SOLUTION: Gas springs 22 are attached to a pair of arms 16, one end thereof being connected to be rotated integrally with a shaft 14 rotatably supported by a film forming chamber 12, and the other end thereof being connected to a cap 18 to be opened/closed in the film forming chamber 12, and the shaft 22a of each gas spring 22 is connected to the film forming chamber 12. The shaft 14 is provided with a gear box 24 for storing a worm gear composed of a worm wheel, its axial center being connected to be rotated integrally therewith, and a cylindrical worm engaged with the worm wheel for self locking. A cap opening/closing handle 32 protruded out of the gear box 24 is connected to the axial center of the cylindrical worm to be integrally rotated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing method in which a lid is provided on the chamber so as to be openable and closable via an arm rotatably connected to a shaft rotatably supported by the chamber. Related to the device.

[0002]

2. Description of the Related Art FIGS. 5 and 6 show a conventional semiconductor manufacturing apparatus. Semiconductor manufacturing apparatuses 50 and 70 are integrated with a shaft 54 rotatably supported by a chamber 52 as shown in FIG. One end of the arm 56 is connected so as to rotate in the direction shown in FIG.
Mounted on One end of a gas spring 60 is attached to the chamber 52, and the other end of the gas spring 60 is attached to the arm 56. When the shaft 60a of the gas spring 60 expands and contracts, the arm 56 rotates and the lid 58 opens and closes. It is configured as follows. A handle 62 is provided on the lid 58.

When opening and closing the lid 58, the lid 58 is first opened and closed by the gas spring 60. However, the lid 58 cannot be completely opened and closed only by the force of the gas spring 60. This is performed by holding the handle 62 with the hand 64.

FIG. 6 shows a chamber 7.
One end of an arm 83 is connected so as to rotate integrally with a shaft 74 rotatably supported by the arm 2.
Is attached to the lid 84 of the chamber 72. One end of a cylinder arm 76 is connected to the shaft 74 so as to rotate integrally therewith.
Is connected to the shaft 78a of the air cylinder 78 so as to move up and down integrally therewith. Air cylinder 7
8 is provided with an electromagnetic valve 80 for controlling the opening and closing of a valve for driving the same by an electric signal, and a sensor 82 for detecting a driving state of the air cylinder 78.

When the lid 84 is opened, first, the valve is opened by the electromagnetic valve 80, the shaft 78a of the air cylinder 78 is driven upward, and the other end of the cylinder arm 76 is raised. Is rotated counterclockwise. As a result, the shaft 74 rotates integrally with the cylinder arm 76, and one end of the arm 83 rotates integrally therewith, so that the lid 84 opens. When closing the lid 84,
By driving the shaft 78a of the air cylinder 78 downward,
It can be performed by rotating each member in the opposite direction to the above.

[0006]

However, the above-mentioned prior art has the following problems. That is, in the one shown in FIG.
To bring the hand closer to the lid 58,
There is a risk that the hand will be pinched by the lid 58. Further, since the operator must be near the lid 58 when the lid 58 is opened, there is a danger that N2 gas flows out of the chamber 52 when the lid 58 is opened, which may have an adverse effect on the human body.

Further, in the apparatus shown in FIG. 6, since the air cylinder 78, the sensor 82, the solenoid valve 80 and the like are used, there is a problem that the cost is increased and the mechanism is complicated.

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and an object of the present invention is to provide a safe, low-cost, and simple-structure semiconductor manufacturing apparatus.

[0009]

SUMMARY OF THE INVENTION In order to achieve the above-mentioned object, the present invention provides a method for opening and closing a chamber via an arm rotatably connected to a shaft rotatably supported by the chamber. In a semiconductor manufacturing apparatus provided with a lid as possible, the lid is configured to be opened and closed by a gas spring that can rotate the arm and a worm gear that can rotate the shaft. is there.

Thus, the lid can be opened and closed by using the force of the gas spring until the upper limit of the force required for opening and closing the lid and using the worm gear for the remaining force.

When the lid is opened and closed using the gas spring, the lid is closed when the lid closing moment> the lid opening moment of the gas spring, and when the lid closing moment <the lid opening moment of the gas spring. If the worm gear is configured so that the worm does not rotate when trying to turn the worm from the worm wheel (this action is called self-locking),
Even in the above state, the lid can be kept stationary, so that the lid can be stopped in the lid open / closed state at any angle (0 to 90 °).

[0012]

FIG. 1 is a front view of a semiconductor manufacturing apparatus 10 embodying the present invention, and FIG. 2 is a side view of FIG. A shaft 14 is rotatably supported in a film forming chamber (chamber) 12 provided adjacent to the transfer chamber 11. The shaft 14 is provided at a predetermined interval in the axial direction so as to rotate integrally with the shaft 14. One ends of the pair of arms 16 are connected. The other ends of the pair of arms 16 are connected to a lid 18, and the lid 18 rotates together with the arm 16 that rotates integrally with the shaft 14 to open and close the film forming chamber 12.

A gas spring 22 is attached to each of the pair of arms 16, and a shaft 22 a of each gas spring 22 is connected to the film forming chamber 12. At the right end of the shaft 14, a gear box 24 is provided.
Worm gear 2 capable of rotating shaft 14 as shown in FIG.
6 are stored.

A worm gear 26 has a worm wheel 28 connected to an axis so as to rotate integrally with the shaft 14.
And a cylindrical worm 30 that engages with the worm wheel 28 in a self-locking manner. A lid opening / closing handle 32 protruding out of the gear box 24 is integrally rotated around the axis of the cylindrical worm 30. Are linked.

Next, a method of opening and closing the lid according to the present embodiment will be described. When opening the lid, first open the gas spring 22
To extend the shaft 22a and push up the other end of the arm 16 upward. As a result, the arm 16 rotates about the shaft 14 and the lid 18 opens. Gas spring 22
When the force is used up to the upper limit, the lid 18 is stopped by the self-lock of the worm gear 26, and the remaining operation of opening the lid 18 is to rotate the lid opening / closing handle 32 in the lid 18 opening direction to drive the worm gear 26. , By rotating the shaft 14.

Next, when closing the lid 18, first, the gas spring 22 is driven to contract the shaft 22a, and the other end of the arm 16 is pulled down. As a result, the arm 16 rotates about the shaft 14 and the lid 18 closes. When the force of the gas spring 22 is used up to the upper limit, the lid 18 is stopped by the self-locking of the worm gear 26, and the remaining operation of closing the lid 18 is performed by moving the lid opening / closing handle 32 to the lid 1.
8) The worm gear is driven by rotating in the closing direction,
Is performed by rotating.

As described above, the lid 18 can be stopped at an angle desired to be opened by the self-locking of the worm gear 26 without electrical control, so that no electrical failure occurs only when the lid 18 is opened and closed. Absent.

The change in the weight of the lid 18 can be dealt with by replacing the gas spring 22.

[0019]

As described above, the invention according to claim 1 of the present invention uses the force of the gas spring until the upper limit of the force required for opening and closing the lid is used, and uses the force of the worm gear for the remaining force. Since the lid can be opened and closed by this, the hand can be kept from touching the lid and the body can be kept away from the lid, so that danger can be avoided.

Further, since electric control is not performed only for opening and closing the lid, the cost can be reduced.

Further, since a mechanism for opening and closing the lid is configured only by attaching the gas spring to the arm and the film forming chamber and attaching the worm gear to the shaft, the manufacturing can be simplified.

[Brief description of the drawings]

FIG. 1 is a plan view of a semiconductor manufacturing apparatus embodying the present invention.

FIG. 2 is a side view of FIG.

FIG. 3 is a front view of the inside of the gearbox.

FIG. 4 is a sectional view taken along line 4-4 of FIG. 3;

FIG. 5 is a side view of a conventional semiconductor manufacturing apparatus.

FIG. 6 is a side view of a conventional semiconductor manufacturing apparatus.

[Explanation of symbols]

 12 Film forming chamber (chamber) 14 Axis 16 Arm 18 Lid 22 Gas spring 22a Shaft 24 Gear box 32 Lid opening / closing handle

Claims (1)

[Claims] 1. A semiconductor manufacturing apparatus in which a lid is provided on the chamber so as to be openable and closable via an arm connected so as to rotate integrally with a shaft rotatably supported by the chamber. The semiconductor manufacturing apparatus is configured to be opened and closed by a gas spring capable of rotating the arm and a worm gear capable of rotating the shaft.