JP2000357729A - Precision part holding jig comprising grip mechanism - Google Patents

Precision part holding jig comprising grip mechanism

Info

Publication number
JP2000357729A
JP2000357729A JP16754499A JP16754499A JP2000357729A JP 2000357729 A JP2000357729 A JP 2000357729A JP 16754499 A JP16754499 A JP 16754499A JP 16754499 A JP16754499 A JP 16754499A JP 2000357729 A JP2000357729 A JP 2000357729A
Authority
JP
Japan
Prior art keywords
movable plate
plate
hole
held
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16754499A
Other languages
Japanese (ja)
Inventor
Hiroshi Yamagami
廣 山上
Masahiro Nanao
雅博 七尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KENSEIDOU KAGAKU KOGYO KK
Kenseido Kagaku Kogyo KK
Original Assignee
KENSEIDOU KAGAKU KOGYO KK
Kenseido Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KENSEIDOU KAGAKU KOGYO KK, Kenseido Kagaku Kogyo KK filed Critical KENSEIDOU KAGAKU KOGYO KK
Priority to JP16754499A priority Critical patent/JP2000357729A/en
Publication of JP2000357729A publication Critical patent/JP2000357729A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68313Auxiliary support including a cavity for storing a finished device, e.g. IC package, or a partly finished device, e.g. die, during manufacturing or mounting

Abstract

PROBLEM TO BE SOLVED: To cause an elastic pressing force even in a direction different from the sliding direction of a movable plate by allowing, when a precision part is housed in a dimple, a movable part which moved in reverse direction once to contact the precision part as it moves again in one direction under elastic force, for larger elastic deformation. SOLUTION: A pin is inserted into a through hole 4 to press a movable plate 3 leftwise for sliding. Then a micro chip is inserted in a dimple 2 which became a perfect hole under the resiliency of a spring 6. When pressing the movable plate 3 leftwise is stopped, a peninsular spring 5 of the movable plate 3 presses the micro chip 7 under back-pressing of the spring 6, so that the micro chip is held in the dimple 2 under the pressure. Under the elastic force of the peninsular spring 5 of the movable plate 3, the micro chips are held for all dimples 3 at precise and regular positions even if the dimple 2 is significantly larger than the micro chip.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明はグリップ機構を有する例
えばマイクロチップ等の小部品を、例えば製造ライン中
のパターン付け工程や洗浄工程等に於て保持するための
装置又は治具に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus or a jig for holding a small part having a gripping mechanism, such as a microchip, for example, in a patterning step or a cleaning step in a production line.

【0002】[0002]

【従来の技術】マイクロチップ等の小部品を製造ライン
で保持するためには金属板等に小部品の下部がすっぽり
はまる貫通穴又は窪みを多数あけた治具が使用されてい
る。しかし、その状態では例えば洗浄液が勢いよく当た
った場合や振動を受けた場合に穴から飛び出ることがあ
り得る。また、載せられただけなので、治具で逆さまに
することは出来ないから、例えば洗浄するにも上下から
洗浄液を当てなければならない。また、位置精度が要求
されるパターン付け工程では、必要なチップと穴とのす
き間のためにしっかりと固定が出来ない。さらに治具か
らの重力による落下を利用した取り外しの際に、治具を
逆さまにすると、落下のしかたがバラバラになるためチ
ップを傷つけやすく、また一度に整然と別の受け器に移
すことが出来ない。
2. Description of the Related Art In order to hold a small part such as a microchip on a manufacturing line, a jig having a large number of through holes or depressions in which a lower part of the small part fits completely in a metal plate or the like is used. However, in such a state, for example, the cleaning liquid may jump out of the hole when the cleaning liquid vigorously hits or receives vibration. Also, since it is merely placed, it cannot be turned upside down with a jig. For example, a cleaning liquid must be applied from above and below for cleaning. Further, in a patterning step where positional accuracy is required, it is impossible to fix firmly due to a gap between a necessary chip and a hole. In addition, when removing the jig from the jig using gravity, if the jig is turned upside down, the way of dropping will be different and the chip will be easily damaged, and it will not be possible to orderly move it to another receiver at once .

【0003】[0003]

【発明が解決しようとする課題】本発明者はこれらの問
題点を解決するために種々研究を重ね、水平一方向にバ
ネで偏らせた内蔵可動板を有する多層金属構造体に小部
品保持用窪み穴を多数設け、水平方向に押し戻される可
動板のバネの押し付けで小部品を保持する治具を開発し
た。しかし、マイクロチップ等に於ても、寸法にバラツ
キがあり、これだけでは窪み穴を大きくしすぎると横方
向に於て保持にぐらつきを生じ、又は位置精度が不十分
となり、一方精確な大きさにすると入れることが出来な
いものがでてしまうという問題が解決出来ないことがわ
かった。
The present inventor has conducted various studies to solve these problems, and has found that a multi-layer metal structure having a built-in movable plate biased by a spring in one horizontal direction is used for holding small parts. We have developed a jig that has many hollows and holds small parts by pressing the spring of the movable plate that is pushed back in the horizontal direction. However, even microchips have variations in dimensions, and if this alone is used, if the size of the hollow is too large, the holding will be unstable in the horizontal direction, or the positioning accuracy will be insufficient, while Then, it turned out that the problem that something that could not be entered appeared could not be solved.

【0004】特にマイクロチップにパターンを付ける工
程等では、位置の精度が要求されるから、治具の窪み穴
に収納される小部品がその中でのぐらつきを生じること
や位置精度が不十分となることは非常に好ましくないこ
とである。
[0004] Particularly, in the step of forming a pattern on a microchip, etc., positional accuracy is required. Therefore, if small components housed in the recessed holes of the jig cause wobble therein or the positional accuracy is insufficient. Is very undesirable.

【0005】この問題を解決するために、本発明者は更
に研究を重ね、上記可動板のスライド方向と異なる方向
に於ても弾力的な押付け力を生じることによる改良され
た保持機構を探究し、本発明を完成させた。
In order to solve this problem, the present inventor has further studied and searched for an improved holding mechanism by generating an elastic pressing force in a direction different from the sliding direction of the movable plate. The present invention has been completed.

【0006】[0006]

【課題を解決する手段】本発明は次の構成からなる。 1.精密部品を保持する為の治具であって、該治具は、
該精密部品の少なくとも一部分を収容する為の窪み部を
有し、該窪み部の垂線と直角の一方向に弾力的に偏よせ
られ、該一方向と逆の方向に移動可能であり、該窪み部
位置に対応する位置に該精密部品を通すための貫通穴又
は切り欠き部を有している可動部が、該窪み部の断面を
横切って存在する内部構造を該治具は有しており、該可
動部は該窪み部の垂線と直角の該一方向と異なる方向に
弾性変形する形状部分を有し、該形状部分は、該精密部
品が該窪み部中に収容されているときに、一旦該一方向
と逆方向に移動された該可動部が、弾力により再び該一
方向に移動するに従って、該精密部品と接触することに
より、より大きく弾性変形する形状であることを特徴と
する治具。 2.一つの治具が複数の精密部品を保持するために多数
の該窪み部と、該可動層の対応する位置の貫通穴と該形
状部分を有する1に記載の治具。 3.被保持物体の全部又は一部分を収納する窪み部又は
貫通部を1以上有し、内部に弾力的に偏らせた一定距離
板表面と平行な一方向に移動可能であり貫通する穴を対
応数だけ有する可動板を内蔵し、該可動板を貫通する穴
の周囲が押しつけられることにより該窪み部又は貫通部
に収納された被保持物体が該窪み部又は貫通部の周囲に
押し付けられ保持されることを特徴とし、更に該可動板
は貫通する穴の周囲の一部に、該一方向とは異なる板平
面と平行な方向に向けて弾力的に被保持物体を横押しす
るための横押部を有し、該横押部の形状は該偏よせられ
た位置に該可動板が近づくに従って該被保持物体と接触
後横押し力が大きくなる形状であり、該可動板を該一方
向と逆方向に移動させるための穴を有する被保持物体を
保持するための装置。 4.被保持物体の少なくとも一部分の周囲を取り囲む貫
通部又は窪み部を1以上有する板状体からなり、該板状
体は少なくとも底板、枠板、上板の3層を重ねて製造さ
れたことにより、枠板層部分に空所を有し、該空所中に
は可動板が内蔵されており、該可動板は該貫通部又は窪
み部に対応する位置に貫通穴を有し、弾力的に偏らせる
手段で板面と平行な一方向に偏らせられており、該手段
に対抗する力を加えることにより一定距離該一方向と逆
方向に移動可能であり、該板状体の貫通部又は窪み部の
形状及び寸法と、該可動板の貫通穴の形状及び寸法と
は、該貫通部又は窪み部に取り囲まれ且つ該貫通穴を貫
いている被保持物体又はその一部分が該弾力的に偏らせ
る手段により押される該可動板によって該貫通部又は窪
み部の周壁に押付けられる関係を有し、該可動板の該貫
通穴には半島状の弾性たわみ部材が突出しており、該半
島状の弾性たわみ部材は逆方向に移動させられた該可動
板が該一方向に移動するに従って該貫通部又は窪み部の
同方向の中央線に近付き、該被保持物体又はその一部分
と接触する形状を有するものであり、該被保持物体が該
貫通部又は窪み部で取り囲まれる位置まで入ることを該
半島状の弾性たわみ部材が妨げることがない位置まで、
該可動板を該一方向と逆方向に移動させるために、該上
板の穴及び対応した位置の該可動板に設けられた該弾力
的に偏らせる手段に対抗する力を加えるための穴を有す
る、被保持物体を保持するための装置。
The present invention has the following construction. 1. A jig for holding a precision part, wherein the jig is
A recess for accommodating at least a portion of the precision component, the recess being resiliently biased in one direction perpendicular to a perpendicular to the recess, and movable in a direction opposite to the one direction; The jig has an internal structure in which a movable part having a through hole or a notch for passing the precision component at a position corresponding to the part position exists across the cross section of the recess. The movable portion has a shape portion that is elastically deformed in a direction different from the one direction perpendicular to a perpendicular line of the depression portion, and the shape portion, when the precision component is accommodated in the depression portion, The movable part, once moved in the opposite direction to the one direction, has a shape in which as the movable part moves in the one direction again by elasticity, it comes into contact with the precision component to be more elastically deformed. Utensils. 2. 2. The jig according to 1, wherein one jig has a large number of the depressions for holding a plurality of precision parts, a through hole at a corresponding position of the movable layer, and the shape portion. 3. It has one or more dents or through-holes for storing all or a part of the held object, and is movable in one direction parallel to the plate surface at a fixed distance resiliently biased inside. The object to be held housed in the depression or the penetrating portion is pressed and held around the depression or the penetrating portion by being pressed around the hole penetrating the movable plate. The movable plate further includes a lateral pressing portion for elastically laterally pressing the held object in a direction parallel to a plate plane different from the one direction, in a part of a periphery of the through hole. The lateral pushing portion has a shape in which the lateral pushing force increases after the movable plate approaches the biased position and comes into contact with the held object as the movable plate approaches, and the movable plate is moved in a direction opposite to the one direction. For holding an object to be held having a hole for moving the object. 4. Consisting of a plate-like body having at least one penetration portion or depression surrounding at least a part of the held object, the plate-like body is manufactured by stacking at least three layers of a bottom plate, a frame plate, and an upper plate, The frame plate layer portion has a space, and a movable plate is built in the space, and the movable plate has a through hole at a position corresponding to the through portion or the concave portion, and is elastically biased. Means, which is deflected in one direction parallel to the plate surface, is movable in a direction opposite to the one direction by a predetermined distance by applying a force opposing the means, and is provided with a penetrating portion or depression of the plate-like body. The shape and size of the portion and the shape and size of the through hole of the movable plate are such that the held object or a part thereof, which is surrounded by the through portion or the depression and penetrates the through hole, is elastically biased. Pressed against the peripheral wall of the penetration or depression by the movable plate pressed by the means. A peninsula-shaped elastic flexible member projects from the through hole of the movable plate, and the movable plate moved in the opposite direction moves the movable plate in the one direction. Has a shape approaching the center line in the same direction of the penetrating portion or the concave portion in accordance with the above, and has a shape in contact with the held object or a part thereof, and enters the position where the held object is surrounded by the penetrating portion or the concave portion To the position where the peninsula-like elastic flexure does not hinder,
In order to move the movable plate in the direction opposite to the one direction, a hole for applying a force opposing the hole of the upper plate and the elastically biasing means provided on the movable plate at a corresponding position is provided. An apparatus for holding an object to be held.

【0007】以下本発明の好ましい具体例を図面を参照
して説明する。図1は、本発明の沢山の小部品を保持す
るための保持装置1の透視図である。保持装置1は小部
品を受ける100個の窪み穴2を有している。保持装置
1の内部には可動板3があって、可動板3にあけられた
貫通穴4にピンを挿入して板と水平の一方向に動かすこ
とにより(図1の矢印の方向)可動板3をばねの力に抗
してスライドさせることが出来る。図1は独立に動かす
ことの出来る縦2列に並んだ2つの可動板3を有する例
を示す。
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a holding device 1 for holding many small parts according to the present invention. The holding device 1 has 100 recesses 2 for receiving small parts. A movable plate 3 is provided inside the holding device 1, and a pin is inserted into a through hole 4 formed in the movable plate 3 and moved in one direction parallel to the plate (in the direction of the arrow in FIG. 1). 3 can be slid against the force of the spring. FIG. 1 shows an example having two movable plates 3 which can be moved independently and are arranged in two vertical columns.

【0008】図1の各窪み穴2から可動板3と一体の部
分をなす半島状のばね部5がのぞいてみえる。可動板3
を矢印の方向に動かすと半島状ばね部5は見えなくな
り、窪み穴2は完全な穴となる。
A peninsula-shaped spring portion 5 which is an integral part of the movable plate 3 can be seen from each of the recessed holes 2 in FIG. Movable plate 3
Is moved in the direction of the arrow, the peninsular spring portion 5 disappears, and the hollow 2 becomes a complete hole.

【0009】図2〜図4は図1のa−a’、b−b’、
a−a’の断面図であって、上記可動板のスライド動作
を断面で説明するものである。図3の貫通穴4にピンを
挿入して可動板3を左に押してスライドさせるとスプリ
ング6の反発力を受け、完全な穴となった窪み穴2にマ
イクロチップ7(図4)を挿入した後に可動板3を左に
押すのをやめればスプリング6の押し戻しにより可動板
3の半島状ばね部5がマイクロチップ7を押して、マイ
クロチイプ7はその押し付けによって窪み穴2内に保持
される。可動板3の半島状ばね部5は図4の手前側から
向こう側にも弾力を及ぼすから、窪み穴2がマイクロチ
イプ7の寸法よりかなり大きくても、マイクロチップは
全ての窪み穴3について精確な規則正しい位置に保持さ
れる。
FIGS. 2 to 4 show aa ', bb',
It is sectional drawing of aa ', Comprising: The sliding operation | movement of the said movable plate is demonstrated in a cross section. When a pin is inserted into the through hole 4 in FIG. 3 and the movable plate 3 is pushed to the left and slid, the microchip 7 (FIG. 4) is inserted into the recessed hole 2 which has been subjected to the repulsive force of the spring 6. If the movable plate 3 is stopped to be pushed to the left later, the spring 6 pushes back and the peninsula-shaped spring portion 5 of the movable plate 3 pushes the microchip 7, and the microchip 7 is held in the hollow 2 by the pressing. Since the peninsula-shaped spring portion 5 of the movable plate 3 also exerts elasticity from the near side to the far side in FIG. 4, even if the recessed hole 2 is considerably larger than the size of the microchip 7, the microchip is accurate for all the recessed holes 3. It is kept in a regular position.

【0010】治具製造例 図1〜5に示す構造は、以下の様に製造することが出来
る。図2〜4の断面に示されるようにステンレス金属製
の下底板8と適所にそれぞれの貫通穴をあけた上底板
9、枠板10、上板11及び可動板3を準備する。下底
板8と上底板9と枠板10を拡散溶接する。枠板10の
貫通穴で形成される凹部の一辺に接してスプリング6を
配置し、可動板3をスプリング6のある辺と反対側の片
に接して同凹所内に配置する。次に上板11を枠板10
にスポット溶接する。
[0010]Jig manufacturing example  The structure shown in FIGS. 1 to 5 can be manufactured as follows.
You. Made of stainless metal as shown in the cross section of FIGS.
Bottom plate 8 and upper bottom plate with each through hole in place
9, a frame plate 10, an upper plate 11, and a movable plate 3 are prepared. Bottom
The plate 8, the upper bottom plate 9, and the frame plate 10 are diffusion-welded. Of frame plate 10
The spring 6 is in contact with one side of the recess formed by the through hole.
Place the movable plate 3 on the side opposite to the side where the spring 6 is located.
And placed in the same recess. Next, the upper plate 11 is
Spot welding.

【0011】以上の方法で、窪み穴2の入口寸法は上板
2の貫通穴の精度だけを考慮すればよい。貫通穴をエッ
チングで形成する場合サイドエッチを少なくする工夫を
すれば、精度の良好な穴があけられる。可動板の貫通穴
は、半島状の部分5が図1で見えている部分を除けば、
上板2の貫通穴よりも大きく形成されており、且つ半島
状の部分5は可動板3をスライドさせれば見えなくな
り、スプリングに押し戻されてもスライド方向と異なる
水平方向に弾力を及ぼし得るからである。底板が上板1
1と同様な貫通穴を有する態様も可能である。
In the above method, the size of the entrance of the recessed hole 2 only needs to consider the accuracy of the through hole of the upper plate 2. When the through-hole is formed by etching, a hole with high precision can be formed by devising to reduce the side etch. Except for the part where the peninsula-shaped part 5 is visible in FIG.
Since the peninsula-shaped portion 5 is formed larger than the through hole of the upper plate 2 and becomes invisible when the movable plate 3 is slid, it can exert elasticity in a horizontal direction different from the sliding direction even when pushed back by a spring. It is. The bottom plate is the top plate 1
An embodiment having the same through-hole as that of 1 is also possible.

【0012】[0012]

【本発明の効果】イ)保持される部品の飛び出しを防止
出来る。 ロ)部品を保持した状態でさかさまに出来るので、製造
ラインの効率を改良出来る。 ハ)可動板を移動させることにより一度に同時に保持力
を解除出来る。 ニ)重力落下を利用した保持装置から他の受け器への部
品の移し替えが整然と実施出来る。 ホ)可動板のスライド方向と別の方向からの押し付け手
段が設けられることにより、部品の保持に対するぐらつ
きや精度悪化なしに収容する穴を大きく出来るから、保
持される部品の寸法のバラツキに対しても対応すること
が出来る。
[Effect of the present invention] a) It is possible to prevent the held parts from jumping out. B) Since the components can be turned upside down while holding the components, the efficiency of the production line can be improved. C) The holding force can be released simultaneously by moving the movable plate. D) The transfer of components from the holding device using gravity drop to another receiver can be performed in an orderly manner. E) By providing the pressing means from the direction different from the sliding direction of the movable plate, the size of the hole to be accommodated can be increased without wobbling or deteriorating the accuracy of the holding of the parts. Can also respond.

【図面の簡単な説明】[Brief description of the drawings]

【図1】図1は、本発明の沢山の小部品を保持するため
の保持装置の透視図である。
FIG. 1 is a perspective view of a holding device for holding many small parts of the present invention.

【図2】図2は、スライド動作を断面で説明する為の図
1のa−a’の断面図である。
FIG. 2 is a cross-sectional view taken along the line aa ′ of FIG. 1 for illustrating a sliding operation in cross-section.

【図3】図3は、スライド動作を断面で説明する図1の
b−b’断面図である。
FIG. 3 is a cross-sectional view taken along the line bb 'of FIG. 1 for explaining a sliding operation in a cross section.

【図4】図4は、スライド動作を断面で説明する図1の
a−a’の断面図である。
FIG. 4 is a cross-sectional view taken along the line aa ′ of FIG. 1, illustrating a sliding operation in cross-section.

【図5】図5は、上板を除いた場合に見える、枠板で形
成される凹部内に可動板とスプリングを含む状態を示す
平面図である。
FIG. 5 is a plan view showing a state where a movable plate and a spring are included in a concave portion formed by a frame plate, which is visible when an upper plate is removed.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】精密部品を保持する為の治具であって、 該治具は、該精密部品の少なくとも一部分を収容する為
の窪み部を有し、 該窪み部の垂線と直角の一方向に弾力的に偏よせられ、
該一方向と逆の方向に移動可能であり、該窪み部位置に
対応する位置に該精密部品を通すための貫通穴又は切り
欠き部を有している可動部が、該窪み部の断面を横切っ
て存在する内部構造を該治具は有しており、 該可動部は該窪み部の垂線と直角の該一方向と異なる方
向に弾性変形する形状部分を有し、 該形状部分は、該精密部品が該窪み部中に収容されてい
るときに、一旦該一方向と逆方向に移動された該可動部
が、弾力により再び該一方向に移動するに従って、該精
密部品と接触することにより、より大きく弾性変形する
形状であることを特徴とする治具。
1. A jig for holding a precision component, the jig having a recess for accommodating at least a part of the precision component, and one direction perpendicular to a perpendicular line of the recess. Elastically biased to
A movable part which is movable in a direction opposite to the one direction and has a through-hole or a cutout for passing the precision component at a position corresponding to the position of the recess is provided. The jig has an internal structure that exists transversely, and the movable portion has a shape portion that is elastically deformed in a direction different from the one direction perpendicular to a perpendicular line of the recessed portion. When the precision part is accommodated in the recess, the movable part once moved in the opposite direction to the one direction comes into contact with the precision part as it moves in the one direction again by elasticity. A jig having a shape that is more elastically deformed.
【請求項2】一つの治具が多数の精密部品を保持するた
めに多数の該窪み部と、該可動部の対応する位置の多数
の貫通穴と多数の該形状部分を有する請求項1に記載の
治具。
2. The apparatus according to claim 1, wherein one jig has a number of said recesses for holding a number of precision parts, a number of through holes at corresponding positions of said movable part, and a number of said shapes. The described jig.
【請求項3】被保持物体の全部又は一部分を収納する窪
み部又は貫通部を1以上有し、 内部に弾力的に偏らせた一定距離板表面と平行な一方向
に移動可能であり貫通する穴を対応数だけ有する可動板
を内蔵し、 該可動板を貫通する穴の周囲が押しつけられることによ
り該窪み部又は貫通部に収納された被保持物体が該窪み
部又は貫通部の周囲に押し付けられ保持されることを特
徴とし、 更に該可動板は貫通する穴の周囲の一部に、該一方向と
は異なる板平面と平行な方向に向けて弾力的に被保持物
体を横押しするための横押部を有し、 該横押部の形状は該偏よせられた位置に該可動板が近づ
くに従って該被保持物体と接触後横押し力が大きくなる
形状であり、 該可動板を該一方向と逆方向に移動させるための穴を有
する被保持物体を保持するための装置。
3. The apparatus according to claim 1, wherein the object to be held has at least one depression or through-hole for accommodating all or a part of the object to be held. A movable plate having a corresponding number of holes is built-in, and an object held in the recess or the through portion is pressed around the recess or the through portion by pressing around the hole penetrating the movable plate. Further, the movable plate elastically laterally pushes the held object in a part of a periphery of the through hole in a direction parallel to a plate plane different from the one direction. The lateral pressing portion has a shape in which the lateral pressing force increases after the movable plate comes into contact with the object to be held as the movable plate approaches the deviated position. Holds objects to be held with holes for moving in one direction and the other Because of the device.
【請求項4】被保持物体の少なくとも一部分の周囲を取
り囲む貫通部又は窪み部を1以上有する板状体からな
り、 該板状体は少なくとも底板、枠板、上板の3層を重ねて
製造されたことにより、枠板層部分に空所を有し、該空
所中には可動板が内蔵されており、 該可動板は該貫通部又は窪み部に対応する位置に貫通穴
を有し、弾力的に偏らせる手段で板面と平行な一方向に
偏らせられており、該手段に対抗する力を加えることに
より一定距離該一方向と逆方向に移動可能であり、 該板状体の貫通部又は窪み部の形状及び寸法と、該可動
板の貫通穴の形状及び寸法とは、該貫通部又は窪み部に
取り囲まれ且つ該貫通穴を貫いている被保持物体又はそ
の一部分が該弾力的に偏らせる手段により押される該可
動板によって該貫通部又は窪み部の周壁に押付けられる
関係を有し、 該可動板の該貫通穴には半島状の弾性たわみ部材が突出
しており、該半島状の弾性たわみ部材は逆方向に移動さ
せられた該可動板が該一方向に移動するに従って該貫通
部又は窪み部の同方向の中央線に近付き、該被保持物体
又はその一部分と接触する形状を有するものであり、 該被保持物体が該貫通部又は窪み部で取り囲まれる位置
まで入ることを該半島状の弾性たわみ部材が妨げること
がない位置まで、該可動板を該一方向と逆方向に移動さ
せるために、該上板の穴及び対応した位置の該可動板に
設けられた該弾力的に偏らせる手段に対抗する力を加え
るための穴を有する、被保持物体を保持するための装
置。
4. A plate-like body having at least one penetrating portion or depression surrounding at least a part of an object to be held, said plate-like body being manufactured by stacking at least three layers of a bottom plate, a frame plate and an upper plate. As a result, there is a space in the frame plate layer portion, a movable plate is built in the space, and the movable plate has a through hole at a position corresponding to the through portion or the concave portion. The plate-like body is biased in one direction parallel to the plate surface by elastically biasing means, and can be moved in a direction opposite to the one direction by a predetermined distance by applying a force opposing the means. The shape and size of the through portion or the recess of the movable plate and the shape and size of the through hole of the movable plate are such that the held object or a part thereof, which is surrounded by the through portion or the recess and penetrates the through hole, is The movable plate pushed by the elastically biasing means causes the periphery of the penetrating portion or the concave portion to move. A peninsula-shaped elastic flexible member protrudes from the through-hole of the movable plate, and the movable plate moved in the opposite direction moves in the one direction. As the object moves, it approaches the center line in the same direction of the penetrating portion or the concave portion, and has a shape to come into contact with the held object or a part thereof, and the held object is surrounded by the penetrating portion or the concave portion In order to move the movable plate in a direction opposite to the one direction until the peninsula-shaped elastic bending member does not hinder the entry into the position, the movable plate in the hole in the upper plate and the movable plate in the corresponding position are moved. A device for holding an object to be held, having a hole for applying a force opposing the resilient biasing means provided.
JP16754499A 1999-06-14 1999-06-14 Precision part holding jig comprising grip mechanism Pending JP2000357729A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16754499A JP2000357729A (en) 1999-06-14 1999-06-14 Precision part holding jig comprising grip mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16754499A JP2000357729A (en) 1999-06-14 1999-06-14 Precision part holding jig comprising grip mechanism

Publications (1)

Publication Number Publication Date
JP2000357729A true JP2000357729A (en) 2000-12-26

Family

ID=15851691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16754499A Pending JP2000357729A (en) 1999-06-14 1999-06-14 Precision part holding jig comprising grip mechanism

Country Status (1)

Country Link
JP (1) JP2000357729A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI402367B (en) * 2005-11-18 2013-07-21 Hon Hai Prec Ind Co Ltd Clamp for vacuum deposition
JP2015159156A (en) * 2014-02-21 2015-09-03 東洋精密工業株式会社 Work clamp tray and manufacturing method therefor
JP2015159219A (en) * 2014-02-25 2015-09-03 東洋精密工業株式会社 multi-size work clamp tray
JP2015159220A (en) * 2014-02-25 2015-09-03 東洋精密工業株式会社 Workpiece clamp tray with passage
JP2015159218A (en) * 2014-02-25 2015-09-03 東洋精密工業株式会社 hierarchical work clamp tray

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI402367B (en) * 2005-11-18 2013-07-21 Hon Hai Prec Ind Co Ltd Clamp for vacuum deposition
JP2015159156A (en) * 2014-02-21 2015-09-03 東洋精密工業株式会社 Work clamp tray and manufacturing method therefor
JP2015159219A (en) * 2014-02-25 2015-09-03 東洋精密工業株式会社 multi-size work clamp tray
JP2015159220A (en) * 2014-02-25 2015-09-03 東洋精密工業株式会社 Workpiece clamp tray with passage
JP2015159218A (en) * 2014-02-25 2015-09-03 東洋精密工業株式会社 hierarchical work clamp tray

Similar Documents

Publication Publication Date Title
US7453056B2 (en) Compound-eye imaging device
EP0329004B1 (en) Chip mounting apparatus
US6610253B2 (en) Liquid pin transfer assembly with common pin bias
US8899993B2 (en) Interposer plate
EP0764827B1 (en) Touch probe
JPS6022334A (en) Chip matching mechanism
JPH11330714A (en) Jig
JP2000357729A (en) Precision part holding jig comprising grip mechanism
TW202207543A (en) Connector assembly
US20080282866A1 (en) Sheet punch devices for various patterns
US20080311777A1 (en) Pin grid array socket having a base with interior standoffs and hightening peripheral walls
JP4618199B2 (en) Flexible substrate fixing jig
JPH11195895A (en) Conveying member
JP2004034257A (en) Cylindrical body holder
JP2006007259A (en) Press device
TWI409192B (en) Tray
JP6529599B2 (en) Electrical contacts
JP7131813B2 (en) Work clamp tray with movable plate movement guide
JP2007035978A (en) Positioning jig
KR102509522B1 (en) The Transfering Method For The Prodcut or Electro-conductive Contact Pin
CN216387112U (en) High-speed transmission line positioning jig
JP2005096788A (en) Pocket size variable tray
JPH08195156A (en) Kink section forming device for electronic part with lead wire
JP2790150B2 (en) Pin grid array pin correction device
JPH11162306A (en) Inclination sensor