JP2000346894A - Inspection device for wiring board and its inspection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method that can simultaneously inspect the existence of a disconnection of a conductor pattern and the existence of a short circuit of the conductor pattern, in an inspection device for conductor pattern included in a wiring board having external connection terminals at its peripheral edge and an integrated circuit element in its central part. SOLUTION: This inspection device for wiring board comprises a changeover unit 4 for selecting any first electrode 23, an antenna member 5 with a conductor layer 52 facing to second electrode 24 through the insulating layer 51, a voltage impression portion 71 for impressing a test voltage to the selected first electrode 23, a current detecting portion 72 and an insulation determining portion 73 that detect short circuit between conductor patterns based on current flowing through a residual first electrode 23, and a signal receiving portion 74 and a conductor determining portion 75 that receive an input signal from the antenna member 5 and detect a disconnection of the conductor patterns.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for inspecting a conductor pattern of a wiring board having an external connection terminal at a peripheral portion and an integrated circuit element mounted at a center portion, and particularly to the presence or absence of disconnection of each conductor pattern. The present invention relates to an inspection apparatus capable of simultaneously inspecting for the presence or absence of a short circuit between a conductor pattern and a conductor pattern.

With the recent increase in the density and integration of integrated circuit elements, both the wiring board and the conductor pattern on which they are mounted are integrated and formed at a high density. When inspecting the conductor pattern, inspection probes are provided at both ends of the conductor pattern. Methods such as contacting are becoming impractical.

[0003] Instead of this, by detecting an electromagnetic wave emitted from the conductor pattern when a test voltage is applied from one end of the conductor pattern, an apparatus capable of detecting the presence or absence of a disconnection without contacting the probes with both electrodes of the conductor pattern. Recruitment is being considered by each company.

However, if a conventional inspection apparatus is used, it is not possible to simultaneously inspect a conductor pattern for disconnection and a short circuit between the conductor patterns. Therefore, there is a demand for the development of an inspection apparatus that can simultaneously inspect the presence / absence of disconnection of a conductor pattern and the presence / absence of a short circuit between conductor patterns.

[0005] In addition, when it is sufficient to simply inspect the presence / absence of disconnection of the conductor pattern, a long time is required for the inspection using a conventional inspection apparatus. Therefore, there is a demand for the development of an inspection apparatus that can inspect in a relatively short time when inspecting only the presence / absence of disconnection of a conductor pattern.

[0006]

2. Description of the Related Art FIG. 4 is a perspective view showing an example of a wiring board to be inspected, FIG. 5 is a view showing the principle of a conventional wiring inspection machine, FIG. 6 is a block diagram showing a conventional wiring board inspection apparatus, and FIG. FIG. 8 shows an example of a switching unit, and FIG. 8 is a flowchart showing a conventional wiring board inspection method.

In FIG. 4, a wiring board 2 on which an integrated circuit element 1 is mounted has a plurality of conductor patterns 22 radially arranged in, for example, an insulator 21, and each conductor pattern 22 is provided at both ends on the surface of the insulator 21. A first electrode 23 and a second electrode 24 are formed so as to be exposed.

A first electrode 23 arranged along the periphery of the wiring board 2 is used as a test electrode or a connection terminal for connection to an external circuit, and a second electrode 24 arranged at the center of the wiring board 2 is used. Are connected to the integrated circuit element 1 via bumps and the like, which are not shown.

As a conductor pattern inspection apparatus for a printed wiring board, for example, there is a wiring inspection apparatus shown in FIG.
626626), the wiring tester has an antenna 32 connected to the oscillator 31 and a receiver 35 connected to the conductor pattern 34 of the wiring board 33 to be tested.

When a signal having a sine waveform shown in FIG. 5B is applied from the oscillator 31 to the antenna 32 close to the conductor pattern 34 at the time of inspection, the signal shown in FIG.
The data is input to the receiver 35 from 34 and compared with reference data stored in the memory 36 in advance.

In the comparator 37, the level of the signal input to the receiver 35 and the level of the reference data stored in the memory 36 are compared. If both levels substantially match, the conductor pattern is determined to be good. Are different, the conductor pattern is determined to be defective.

However, the above-described wiring inspection machine has a function of detecting disconnection of a conductor pattern, but has no function of detecting a short circuit between conductor patterns. In order to inspect the wiring board, as shown in FIG. 6, an inspection apparatus having a function of detecting a short circuit added to the function of the wiring inspection machine is used.

That is, the conventional wiring board inspection apparatus includes a switching unit 4 that can be connected to all of the first electrodes 23 and an insulating layer
An antenna member 5 having a conductor layer 52 that can face all of the second electrodes 24 via 51 and a measuring circuit 6 for inspecting the wiring board 2 to be inspected.

The measuring circuit 6 includes an oscillator 61 for applying a sine wave signal to the conductor pattern to be inspected, a DC power supply 62 for applying a DC voltage, and a signal receiving unit 65 for detecting a disconnection.
And a continuity determination unit 66, a current detection unit 63 for detecting a short circuit, and an insulation determination unit 64.

The switching unit 4 comprises a plurality of switch elements 41, each of which can be connected to a first electrode 23, for example, as shown in FIG.
42 is connected to the oscillator 61 or the DC power supply 62, and the second contact 43 is connected to the current detection unit 63.

The common terminals 44 of the switch elements 41 are connected to the corresponding first electrodes 23, respectively. When one switch element 41 is actuated, any one of the first electrodes 23 (in the figure, two electrodes from the top) Is selected, and the remaining first electrodes 23 are connected to the current detection unit 63.

In the inspection of the conductor pattern, detection of disconnection and detection of a short circuit are performed in series on the selected conductor pattern as shown in FIG.
, And the switching unit 4 is connected to the first electrode 23 to start the inspection.

When a sine wave signal is applied from the oscillator 61 to the conductor pattern via the first electrode 23 selected by the switching unit 4, the signal induced in the antenna member 5 is input to the signal receiving unit 65 and preset. The presence / absence of disconnection is determined by comparing with a reference.

Next, a DC voltage is applied to the conductor pattern from a DC power supply 62, and the current flowing through the remaining first electrodes 23, which are short-circuited to each other, is measured. The insulation between the pattern and the presence or absence of a short circuit is determined.

[0020]

However, in the conventional inspection of a wiring board, as shown in FIG. 8, disconnection detection and short-circuit detection are performed in series with respect to a selected conductor pattern, and the inspection target is inspected. There is a problem that the time required for inspection increases as the number of conductor patterns to be formed increases.

Depending on the purpose of the inspection, there may be a case where it is only necessary to inspect the presence / absence of a disconnection even if a short circuit of the conductor pattern cannot be detected, but a conventional inspection apparatus for inspecting the conductor pattern for disconnection or short circuit for each conductor pattern. Has the problem that it takes a long time for inspection.

An object of the present invention is to provide an inspection apparatus and an inspection method capable of simultaneously inspecting the presence / absence of a disconnection of a conductor pattern and the presence / absence of a short circuit between conductor patterns, or an inspection in a relatively short time when inspecting only a disconnection of a conductor pattern. It is an object of the present invention to provide an inspection apparatus and an inspection method that can be used.

[0023]

FIG. 1 is a block diagram showing a wiring board inspection apparatus according to the present invention. The same object is denoted by the same symbol throughout the drawings.

The above problem is solved by the first electrode 23 and the second electrode
An apparatus for inspecting a wiring board 2 on which a plurality of conductor patterns 22 having a plurality of conductor patterns 22 are formed for disconnection of the conductor patterns and short-circuits between the conductor patterns, wherein an arbitrary first electrode 23 is selected, and the remaining first electrodes 23 are selected. A switching unit 4 for short-circuiting the electrodes 23 to each other, and an antenna member 5 having a conductor layer 52 dielectrically coupled to all of the second electrodes 24 via an insulating layer 51.
And a measurement circuit 7. The measurement circuit 7 includes a voltage application unit 71 that applies a test voltage whose potential changes instantaneously or a test voltage having a pulse waveform to the first electrode 23 selected by the switching unit 4. And a current detection unit 72 and an insulation determination unit
73, a signal receiving unit 74 and a conduction determining unit 75, and the current detecting unit 72 and the insulation determining unit 73 are connected to the selected first electrode.
When the test voltage is applied to 23, the remaining first short-circuited
The signal receiving unit 74 and the continuity determining unit 75 have a function of detecting a current flowing through the first electrode 23 to determine whether there is a short circuit between the conductor patterns. Is applied, a signal input from the antenna member 5 is received, and this is achieved by a wiring board inspection apparatus having a function of determining the presence / absence of disconnection of a conductor pattern.

The wiring board inspection apparatus for applying, for example, a pulse-wave test voltage to the first electrode selected in this manner, synchronizes with the rise or fall of the test voltage and generates a signal corresponding to the resistance value of the conductor pattern. The presence or absence of a break in the conductor pattern is determined from the voltage level of the signal input from the conductor pattern corresponding to the selected first electrode and the second electrode to the signal receiving unit via the antenna member via the antenna member, and input to the signal receiving unit. can do.

In addition, when the test voltage rises, a current corresponding to the insulation resistance between the conductor pattern corresponding to the selected first electrode and the other conductor patterns passes through the short-circuited first electrode. The current flows to the current detection unit, and the presence or absence of a short circuit between the conductor patterns can be determined from the current value.
The test voltages applied to the selected first electrodes are all the same, and by changing the voltage at least once discontinuously, the presence / absence of disconnection of the conductor pattern and the presence / absence of a short circuit between the conductor patterns are simultaneously determined. Can be determined.

That is, an inspection apparatus and an inspection method capable of simultaneously inspecting the presence / absence of disconnection of a conductor pattern and the presence / absence of a short circuit between conductor patterns, or an inspection apparatus capable of inspecting in a relatively short time when inspecting only a disconnection of a conductor pattern. An inspection method can be realized.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the accompanying drawings. FIG. 2 is a diagram showing an input waveform and a detected waveform, FIG. 3 is a flowchart showing a wiring board inspection method according to the present invention, FIG. 9 is a block diagram showing another inspection device according to the present invention, and FIG. Diagrams and diagrams explaining the operation principle of
11 is a diagram showing a first modification of another inspection device, FIG. 12 is a diagram showing a second modification of another inspection device, and FIG. 13 is a diagram showing a specific example of the second modification with different intervals. FIG. 14 is a view showing a specific example in which the area of the second modification is different, FIG. 15 is a view showing a third modification of another inspection apparatus, and FIG. 16 shows still another inspection apparatus according to the present invention. Block diagram, FIG. 17 is a side sectional view showing a configuration example of a wiring board mounting portion to be inspected, FIG. 18 is a diagram showing a division pattern of a divided antenna member, FIG. 19 is a diagram showing an embodiment of a divided antenna member, FIG. 20 is a perspective view showing another embodiment of the split antenna member, FIG. 21 is a perspective view showing a simplified configuration method of the split antenna member, FIG. 22 is a schematic view showing a modification of the antenna member, and FIG. It is a figure showing an example of the judgment circuit used for an example.

The wiring board inspection apparatus according to the present invention comprises a switching unit 4, an antenna member 5, and a measurement circuit 7 as shown in FIG. 1, and the antenna member 5 is mounted on the wiring board 2 to be inspected. It has a conductor layer 52 that can face all of the second electrodes 24 via the insulating layer 51.

The switching unit 4 includes a first electrode 23
Can be connected to any of them, and an arbitrary first electrode 23 can be connected to one of them.
It has a function of selecting an individual first electrode 23 and a function of short-circuiting the remaining first electrodes 23 except for the selected one when an arbitrary first electrode 23 is selected.

Unlike the conventional inspection apparatus, the measurement circuit 7 applies a pulse waveform test voltage to the selected first electrode 23, a current detection section 72 for detecting a short circuit, and an insulation determination section 73. And a signal receiving section 74 for detecting disconnection and a conduction determining section 75.

When a test voltage is applied to the selected first electrode 23, the current detecting section 72 detects a current flowing through the other first electrodes 23, and the insulation judging section 73 is selected from the current level. The presence or absence of a short circuit between the conductor pattern corresponding to the electrode 23 and another conductor pattern is determined.

When a test voltage is applied to the selected first electrode 23, the signal receiving section 74 receives a signal input from the antenna member 5, and the continuity determining section 75 is selected from the level of the input signal. By detecting the resistance of the conductor pattern corresponding to the electrode 23, the presence or absence of disconnection is determined.

That is, when a test voltage having a pulse waveform is applied to the first electrode 23 selected from the voltage application section 71 as shown in FIG. 2A, the pulse waveform has a pulse waveform as shown in FIG. A signal is input from the antenna member 5 to the signal receiving unit 74 in synchronization with the rise and fall.

The level of the signal input from the antenna member 5 to the signal receiving section 74 is proportional to the conductor resistance of the conductor pattern to which the test voltage is applied. For example, the continuity determining section 75 compares the level of the input signal with a reference value. By doing so, the presence / absence of disconnection can be determined.

When a test voltage having a pulse waveform is applied to the first electrode 23 selected from the voltage application section 71 as shown in FIG. 2A, the voltage is selected as shown in FIG. 2C. First
The current flows to the current detection unit via the electrodes, the conductor pattern, and the remaining first electrodes.

When the test voltage is applied, the level of the current flowing through the current detecting section is inversely proportional to the insulation resistance value interposed between the conductor patterns. For example, the magnitude of the current value is compared with the reference value in the insulation determination section 73. By doing so, it is possible to determine the presence or absence of a short circuit.

The wiring board inspection apparatus according to the present invention can determine the presence / absence of disconnection by applying a test voltage having a pulse waveform to the first electrode 23 selected from the voltage applying unit 71. In parallel with the determination, the presence or absence of a short circuit between the conductor patterns can be determined.

That is, unlike the conventional method of inspecting a wiring board in which detection of disconnection and detection of a short circuit are performed in series on a selected conductor pattern, the method of inspecting a wiring board according to the present invention is shown in FIG. As described above, the disconnection detection and the short-circuit detection are performed in parallel, and the test time is reduced.

In the above embodiment, the test voltage applied to the first electrode selected from the voltage applying unit 71 is a voltage having a pulse waveform, but is not necessarily limited to the pulse waveform voltage. The same effect can be obtained even if the voltage is turned on and off.

According to experiments by the present inventors, when a DC voltage of 100 V is applied as a test voltage to a selected conductor pattern and turned on and off, a signal voltage of about 1 V is input to the signal receiving unit and a current of about 10 μA is supplied. Has been confirmed to flow to the current detection unit.

The wiring board inspection apparatus that applies, for example, a test voltage in the form of a pulse wave to the first electrode selected as described above, synchronizes with the rise or fall of the test voltage and generates a signal corresponding to the resistance value of the conductor pattern. The presence or absence of a break in the conductor pattern is determined from the voltage level of the signal input from the conductor pattern corresponding to the selected first electrode and the second electrode to the signal receiving unit via the antenna member via the antenna member, and input to the signal receiving unit. can do.

When the test voltage rises, a current corresponding to the insulation resistance between the conductor pattern corresponding to the selected first electrode and the other conductor patterns flows through the short-circuited first electrode. The current flows to the current detection unit, and the presence or absence of a short circuit between the conductor patterns can be determined from the current value. The test voltages applied to the selected first electrodes are all the same, and by changing the voltage at least once discontinuously, the presence / absence of disconnection of the conductor pattern and the presence / absence of a short circuit between the conductor patterns are simultaneously determined. Can be determined.

In the inspection of the wiring board, it is desirable to be able to detect the presence / absence of a disconnection and the presence / absence of a short circuit in all the conductor patterns on the wiring board to be inspected. In some cases, it is only necessary to be able to inspect in a short time.

Another inspection apparatus of the wiring board inspection apparatus according to the present invention is an inspection apparatus configured to cope with such a demand, and as shown in FIG. Is provided with an oscillator capable of simultaneously applying a sine wave signal to all the conductor patterns included therein.

That is, another inspection apparatus according to the present invention includes an oscillator 61 which can be connected to all of the first electrodes 23 via a plurality of test probes, an antenna member 5, and a disconnection connected to the antenna member 5, for example. And a continuity determination unit 66 for detecting the presence / absence of the signal.

The oscillator 61 has a function of simultaneously applying a sine wave signal to all the conductor patterns 22 of the wiring board 2 to be inspected via the first electrode 23.
Has a conductor layer 52 that can face all of the second electrodes 24 via the insulating layer 51 when placed on the substrate.

As shown in FIG. 10A, two conductor patterns 22
When a sine wave signal is individually applied from the oscillator 61 through the first electrode 23 to the second electrode 24 and the antenna member 5 of each conductor pattern, FIGS. Is output.

As described above, when the sine wave signals are simultaneously applied from the oscillator 61 to the two conductor patterns 22 differently from the case where the sine wave signals are individually applied, the voltage level of the received signal is changed to the second electrode.
When the voltage level of each received signal is different in proportion to the number of 24, the sum is the total value.

As a result, for example, when the sine wave signal is individually applied, the voltage level of the received signal changes as shown in FIG.
Assuming 120mV and 100mV respectively as shown in 10 (c), 2
When applied simultaneously to the conductor pattern 22 of FIG.
It becomes 220mV as shown in (d).

Therefore, when a sine wave signal is applied to the two conductor patterns 22 at the same time, the voltage level of the received signal output via the antenna member 5 is 120 mV or 1 mV.
If it is 00 mV, it is determined that one of the two conductor patterns 22 is disconnected.

In addition, as shown in FIG. 9B, a plurality of conductor patterns are formed on the wiring board 2 to be inspected, in addition to the conductor pattern 22 in which the first electrode 23 and the second electrode 24 are connected 1: 1. It may include a conductor pattern 25 connected in the middle and a conductor pattern 26 branched in the middle.

As described above, the wiring board 2 to be inspected is
Even when the conductor pattern 25 or the conductor pattern 26 is included in addition to the conductor pattern 22, the disconnection of the conductor pattern is detected by another inspection apparatus according to the present invention, similarly to the wiring board having the conductor pattern 22 alone. it can.

The inspection apparatus shown in FIG. 9 is based on such a principle. In the inspection, a sine wave signal is applied to all the conductor patterns 22 and an electromagnetic wave radiated from all the second electrodes 24 is transmitted to the antenna member 5. And are input to the signal receiving unit 65 as a received signal.

When a received signal is input to the signal receiving section 65, its voltage level is compared with a reference value stored in advance in a conduction determining section 66. When the voltage level of the received signal is lower than the reference value, the wiring board to be inspected is checked. 2 is determined to include the disconnected conductor pattern 22.

As described above, in the wiring board inspection apparatus for simultaneously applying a sine wave signal to all the conductor patterns via the first electrode, the voltage level of the signal input to the signal receiving unit via the antenna member is changed to the second level. It is proportional to the number of electrodes. Therefore, if there is a disconnection in the conductor pattern, the voltage level of the signal decreases in proportion to the number of disconnected conductor patterns, and the presence / absence of the disconnection can be determined by comparing with the voltage level of the signal when there is no disconnection. In addition, since all the conductor patterns can be inspected at the same time, the inspection time is greatly reduced.

In FIG. 9, the oscillator 61 is connected to the first electrode 23 and a received signal is input from the antenna member 5 to the signal receiving section 65. However, when the oscillator 61 is connected to the antenna member 5 and all the first It is also possible to obtain the same effect by connecting the electrode 23 to the signal receiving unit 65.

However, the inspection apparatus shown in FIG. 9 can detect the presence / absence of disconnection of the conductor pattern in a short time, but cannot specify the disconnected conductor pattern. The following modified example is an apparatus capable of detecting the presence / absence of disconnection of a conductor pattern in a short time and specifying the disconnected conductor pattern.

In the first modification of the inspection apparatus, the voltage or frequency of the sine wave signal applied differs for each conductor pattern as shown in FIG. 11, and the modification shown in FIG. Are applied from the oscillator 61 for each conductor pattern.

When a received signal is input to the signal receiving section 65, its voltage level is compared with a reference value stored in advance in a conduction determination section 66, and when the voltage level of the received signal is lower than the reference value, the wiring board to be inspected. 2 is determined to include the disconnected conductor pattern 22.

The voltage level of the received signal obtained from each conductor pattern substantially corresponds to the voltage of the sine wave signal applied from the oscillator 61, and the disconnection was performed by performing an inverse calculation from the difference between the reference value and the voltage level of the received signal. It is possible to specify the conductor pattern.

In the modification shown in FIG. 11 (b), a sine wave signal having the same voltage but different frequency is applied from an oscillator 61 for each conductor pattern, and although not shown, a signal reception signal is input to which a reception signal is input. The unit 65 has a frequency discrimination circuit that detects a voltage level for each frequency.

Therefore, the conduction determination section 66 compares the voltage level of the received signal with a reference value stored in advance for each frequency to detect the presence or absence of a break in the conductor pattern and to determine whether or not the conductor pattern has been disconnected from the missing frequency. Can be specified.

In the inspection apparatus shown in FIG. 9, the distance between the second electrode and the conductor layer and the area of opposition between each of the second electrodes and the conductor layer are constant. The second modification is the second modification. Antenna members having different distances between the second electrode and the conductor layer or opposite areas of the second electrode and the conductor layer.

FIG. 12 shows an example of the antenna member 5 in which the conductor layer 52 has a step so that the distance g from the second electrode 24 changes for each conductor pattern, and the insulating layer is provided on the conductor layer 52 having the step. 51
Is formed, the surface of the antenna member 5 in contact with the second electrode 24 is flattened.

As described above, by changing the distance g with the second electrode 24 for each conductor pattern, each second g
Even if the level of the electromagnetic wave radiated from the second electrode 24 is the same, a difference occurs in the voltage level of the received signal transmitted from the second electrode 24 to the antenna member 5.

For example, if the voltage levels of the received signals transmitted from the respective second electrodes to the antenna member are different as shown in FIG. 13 (a), one of the corresponding conductor patterns is disconnected and the signal receiving portion is disconnected. The voltage value input to
It changes as shown in 13 (b).

When a received signal is input to the signal receiving section 65, its voltage level is compared with the reference value stored in the conduction determining section 66, but the back calculation is performed from the difference between the reference value and the voltage level of the received signal. This makes it possible to specify the disconnected conductor pattern.

Although not shown, the second electrode 24
Instead of providing a step in the conductive layer 52 so that the distance between the second electrode and
Even if the surface facing 24 forms a slope, substantially the same effect can be obtained.

Each of the second electrodes 24 and the conductor layer 52
The conductor layer 52 is formed such that the area opposed to the conductor pattern differs for each conductor pattern.
Even if the distance g between the electrode 24 and the conductor layer 52 is constant, a difference occurs in the voltage level of the received signal.

For example, if the voltage level of the received signal transmitted from each second electrode to the antenna member is different as shown in FIG. 14 (a), one of the corresponding conductor patterns is disconnected, and the signal receiving section is disconnected. The voltage value input to
It changes as shown in 14 (b).

By forming the insulating layer 51 interposed between the second electrode 24 and the conductor layer 52 so that the dielectric constant differs for each conductor pattern, each of the second electrodes 24 and the conductor layer
Even if the interval or the facing area with the same 52 is the same, a difference occurs in the voltage level of the received signal.

As a result, similarly to the case where the facing area is changed, a difference occurs in the voltage level of the received signal transmitted to the antenna member as shown in FIG. 14A, and the signal is broken by disconnection of one of the corresponding conductor patterns. The voltage value input to the receiver is
It changes as shown in 14 (b).

When a received signal is input to the signal receiving section 65, its voltage level is compared with the reference value stored in the conduction determination section 66, but the back calculation is performed from the difference between the reference value and the voltage level of the received signal. This makes it possible to specify the disconnected conductor pattern.

However, in the case of a wiring board having a small area of the second electrode, a method of changing the distance g from the conductor layer 52 for each conductor pattern, an area facing the conductor layer for each conductor pattern, or an insulating layer It is extremely difficult to form an antenna member by changing the dielectric constant of the antenna.

Even if the conductor layer is finely processed to form a step, the difference in voltage level of the received signal is small and it becomes difficult to identify the disconnected conductor pattern. Also, the method of changing the dielectric constant cannot increase the voltage level difference of the received signal.

Therefore, as shown in FIG. 12, for a wiring board in which the second electrodes 24 are arranged in a plurality of rows, the distance g with the conductor layer 52 is changed, and the conductors facing the rows of the second electrodes 24 are changed. By changing the widths w ₁ and w ₂ of the layer 52, the voltage level difference of the received signal can be increased.

Although not shown, the second electrode 24
The same effect can be obtained by interposing an insulating layer 51 having a different permittivity for each conductor pattern between the second electrode 24 and the conductor layer 52 instead of changing the facing area between each of them and the conductor layer 52 for each conductor pattern. Can be obtained.

In the inspection device shown in FIG. 9, a conductor layer 52 in which the antenna member 5 can face all of the second electrodes 24 via the insulating layer 51 is provided.
However, in the third modified example, the antenna member 5 has a plurality of cells 53 which can face the second electrode 24 as shown in FIGS. 15 (a) and (b).

The switching unit 54 is interposed between the signal receiving portion 65 and the cell 53 composed of a conductor piece facing the second electrode 24 via the insulating layer 51, and is selected by appropriately operating the switching unit 54. Any cell 53 can be connected to the signal receiving unit 65.

Therefore, all the cells 53 are connected to the signal receiving section 65 when the disconnection of the conductor pattern is detected, and when the disconnection of the conductor pattern is detected, the cells 53 are detected.
Are sequentially cut off from the signal receiving unit 65, the disconnected conductor pattern can be specified.

When the antenna member 5 is formed, for example, the manufacturing data of the wiring board 2 to be inspected is converted into data for forming each cell, and is opposed to the second electrode 24 of the wiring board 2 to be inspected 1: 1. An antenna member 5 with a plurality of possible cells 53 may be formed.

As shown in FIG. 16 (a), a further inspection apparatus of the wiring board inspection apparatus of the present invention comprises a switching unit 4 and a measuring circuit.
The switching unit 4 includes a plurality of switch elements 41 connectable to the first electrode 23, for example, as shown in FIG.

The common terminals 44 of the switch elements 41 are connected to the corresponding first electrodes 23, respectively. When one switch element 41 is operated, an arbitrary first electrode 23 (second from the top in the figure) Is selected, and the remaining first electrode 23 is configured to be short-circuited.

All the switching elements 41 are connected to the first contact
42 is collectively connected to an oscillator 61 capable of outputting a sine wave signal, and the sine wave signal output from the oscillator 61 is applied to the conductor pattern 22 via the switch element 41 and the selected first electrode 23. Is done.

The measuring circuit 70 includes a signal receiving section 65 for detecting disconnection and a conduction determining section 66 in addition to the oscillator 61 capable of outputting a sine wave signal, and the electromagnetic waves radiated from all the second electrodes 24 are Each is input from the antenna member 5 to the signal receiving section 65 as a received signal.

When a received signal is input to signal receiving section 65, its voltage level is compared with a reference value stored in advance in conduction determining section 66. When the voltage level of the received signal is lower than the reference value, the sine wave signal It is determined that the applied conductor pattern 22 is disconnected.

When the selected conductor pattern 22 is short-circuited with the adjacent conductor pattern 22, a sine wave signal is applied to all the conductor patterns 22 via the switching unit 4, and the voltage level of the received signal is reduced. Since it is higher than the reference value, it can be easily detected.

Although not shown, the switching unit 4 selects an arbitrary first electrode 23 to apply a sine wave signal, and short-circuits the remaining first electrode 23 to form a related conductor pattern. It is also possible to configure so that everything is connected to the ground circuit.

In this case, when the voltage level of the received signal is lower than the reference value, the conductor pattern 22 to which the sine wave signal is applied is applied.
Is determined to be disconnected, and when the adjacent conductor pattern 22 is short-circuited, the voltage level of the received signal becomes the ground level, which can be easily detected.

The wiring board 2 to be inspected has a plurality of conductor patterns, as shown in FIG. 16B, in addition to the conductor pattern 22 in which the first electrode 23 and the second electrode 24 are connected at 1: 1. It may include a conductor pattern 25 connected in the middle and a conductor pattern 26 branched in the middle.

As described above, the wiring board 2 to be inspected is
Even in the case where the conductor pattern 25 or the conductor pattern 26 is included in addition to the conductor pattern 22, the disconnection of the conductor pattern is detected by still another inspection device of the present invention, similarly to the wiring board having the conductor pattern 22 alone. it can.

As described above, still another inspection apparatus of the present invention for applying a sine wave signal to each conductor pattern via the switching unit is another inspection apparatus for applying the sine wave signal to all the conductor patterns simultaneously. Although the inspection time is longer than that of the apparatus, the inspection time can be greatly reduced as compared with the conventional inspection apparatus that sequentially applies a sine wave signal or a DC voltage to each conductor pattern and detects a short circuit of the conductor pattern. Moreover, it is difficult to specify the broken conductor pattern in the another inspection apparatus of the present invention, but the other inspection apparatus of the present invention is characterized in that the broken conductor pattern can be easily specified.

A further inspection apparatus of the wiring board inspection apparatus of the present invention shown in FIG. 16 has a switching unit as a means for selecting a conductor pattern. For example, one test probe connected to an oscillator 61 instead of the switching unit. The first electrode
23 may be sequentially contacted.

In this case, however, a sine wave signal is applied to the first electrode 23 in contact with the test probe, and the disconnection of the conductor pattern is detected, but the first electrode 23 for the adjacent conductor pattern is free. Therefore, a short circuit of the conductor pattern cannot be detected.

As described above, the oscillator 61 is connected to the first electrode 23, and the signal is extracted from the antenna member 5 facing the second electrode 24. As shown in FIG. There are cases where the first electrode 23 is exposed on the front surface and where the first electrode 23 is exposed on the back surface.

FIG. 17 shows an example of the configuration of the wiring board mounting portion 8 to which the wiring board 2 can be mounted regardless of the surface where the first electrode 23 is exposed. 2 includes a plurality of test probes 82 that can contact each of the first electrodes 23 exposed on the back surface of the second probe 2.

On the other hand, the antenna member 5 includes all the second electrodes.
It has a plurality of test probes 83 implanted around the conductor layer 52 which can face the 24, and the plurality of test probes 83 can contact each of the first electrodes 23 exposed on the surface of the wiring board 2 to be inspected. It is arranged in a suitable position.

The antenna member 5 has a ground portion 50 made of a conductor for blocking electromagnetic waves leaking from the conductor pattern 22 of the wiring board 2 to be inspected. The conductor layer 52 and the plurality of test probes 83 provided on the antenna member 5 are It is attached to the ground part 50 via an insulator.

The test probes 82 and 83 provided on the base 81 and the antenna member 5, respectively, are connected to the oscillator 61 via the switching control circuit 84, and operate the switching control circuit 84 in accordance with the wiring board 2 to be inspected. And the first electrode on the front or back side
23 is connected to the oscillator 61.

If the wiring board 2 to be inspected can be limited to the one in which the first electrode 23 is exposed on either the front surface or the back surface, unnecessary test probes are removed and the switching control circuit is removed. The control target of 84 may be reduced to specialize the wiring board mounting portion to be inspected.

In the modified example of the present invention shown in FIGS. 15A and 15B, the antenna member 5 has a plurality of cells 53 each of which can face the second electrode 24, but the wiring board 2 to be inspected is mounted. The number and position of the second electrodes 24 formed by the integrated circuit element 1
The intervals etc. may be different.

Therefore, in the inspection device using the split type antenna member, when each cell is formed so as to be able to face all the second electrodes, the number, position, interval, etc. of the cells are the It is necessary to prepare a dedicated antenna member suitable for the electrode 24.

The antenna member 5 shown below has a cell which can be opposed even if the number, position, interval, etc. of the second electrodes of the wiring board to be inspected are different. This is a common antenna member that enables inspection of a plurality of different types of wiring boards to be inspected.

That is, FIG. 18 shows a cell division pattern of the common antenna member. The antenna member 5 of FIG. 18A has a plurality of cells 53 arranged in a matrix.
Is connected to the signal receiving unit, and the remaining cells 53 are connected to GND.

By arranging the cells 53 in a matrix in this manner, even if the positions and the intervals of the second electrodes on the wiring board are different, for example, any of the cells 53 can face the second electrodes. A plurality of types of wiring boards to be inspected can be inspected using the same antenna member.

When the arrangement area of the second electrodes formed on the surface of the wiring board to be inspected is wider than the arrangement area of the cells 53 on the antenna member, the antenna member 5 is moved in parallel with the arrangement direction of the cells 53. By doing so, the region facing the second electrode can be expanded.

However, if each of the cells 53 arranged in a matrix is configured to be connected to a signal receiving unit or GND, it is necessary to provide a switch circuit corresponding to each of the cells 53. Control becomes complicated.

The antenna member 5 shown in FIGS. 18 (b), (c) and (d) solves the above-mentioned problem by reducing the number of cells 53, and the antenna member 5 shown in FIG. 18 (b) The member 5 includes a cell 53 composed of conductor pieces that are divided into strips and arranged in parallel at a predetermined pitch.

In such an antenna member 5, the cell 53 does not face the second electrode arranged in the length direction of the cell 53 at 1: 1 but the second electrode arranged in the X-axis direction. After facing the electrode, it can be rotated 90 degrees to face the second electrode in the Y-axis direction.

To make the cells 53 face 1: 1 with all the second electrodes arranged in the X-axis direction and the Y-axis direction, FIG.
Although the time required for the inspection is longer than that of the antenna member 5 of (a), the configuration, connection and control of the switching unit can be greatly simplified.

The antenna member 5 shown in FIG. 18 (c) includes cells 53 composed of circular conductor pieces arranged concentrically at a predetermined pitch, and the antenna member 5 shown in FIG. And a cell 53 composed of rectangular conductor pieces arranged concentrically at a predetermined pitch.

In such an antenna member 5, it is difficult to make the cell 53 face the second electrode 1: 1 like the antenna member 5, but, for example, by selecting one conductor pattern and applying a test signal. This is effective in an inspection device or the like for inspecting the conductor pattern.

In the case of the split type antenna member, the cell 53 and the switching unit are connected by the wiring corresponding to each cell 53 as described above, and the voltage level of the output signal is transmitted via the conductor layer 52 of the integrated antenna member. It is extremely smaller than the voltage level of the output signal to be output.

Therefore, connecting the antenna member 5 and the switching unit and the switching unit and the signal receiving unit with long cables during connection lowers the reliability such as noise being superimposed on the output signal. Become a factor and must be avoided.

An embodiment of the split type antenna member is shown in FIG.
An AMP 55 for signal amplification is provided immediately after the switching unit 54 as shown in FIG. 19 (a), and an antenna unit 9 comprising the antenna member 5, the switching unit 54 and the AMP 55 as shown in FIG. 19 (b). .

Although not shown, the switching unit 54
Has, for example, a substrate to which the cell 53 is connected and an IC constituted by a MOS-FET. The AMP 55 has a substrate connected to a signal receiving unit or a control circuit via a connector or the like and at least one amplifying signal. It has an IC.

In the antenna unit 9 shown in FIG. 19, except for the cell 53 which can face the second electrode, the remaining cell 53 is connected to GND.
However, as shown in FIG. 20, a shield plate 92 having a conductor layer 91 with a hole may be inserted between the antenna unit 9 and the wiring board to be inspected.

The shield plate 92 is composed of a conductor layer 91 having a hole formed with a hole 93 at a position facing the second electrode, and an insulating layer 94. The conductor layer 91 having a hole is covered by the target conductor. Through holes 93 are formed in accordance with the number, position, interval, and the like of the second electrodes included in the inspection wiring board.

When the divided antenna member is directly opposed to the wiring board to be inspected, when the type of the wiring board to be inspected is switched, data for controlling the switching unit 54 is exchanged.
The remaining cells 53 except for the cells 53 that can face the second electrode need to be connected to GND.

However, the shield plate 92 is inserted between the antenna unit 9 and the wiring board to be inspected, so that the conductor layer 91 with the through hole is G
When connecting to the ND, unlike the case where the cell is directly opposed, all cells except the cell 53 facing the second electrode are set to G.
There is no need to connect to ND.

Therefore, even if the type of the wiring board to be inspected is switched and the number and the position of the second electrodes are slightly shifted, there is no need to exchange data for controlling the switching unit 54, and the circuit suitable for the wiring board to be inspected is not required. It can be easily handled by selecting and inserting the shield plate 92.

The second electrodes 24 arranged symmetrically to the left and right
In the case of the wiring board 2 having the inspection, the wiring board 2 to be inspected is turned over as shown in FIG. 21 and is opposed to the wiring board 2 to be inspected so that the wiring board 2 to be tested is a simple split type antenna member. Available.

In this case, a shield plate 92 is inserted between the wiring boards 2 to be inspected as shown in the figure to block electromagnetic waves leaking from the conductor pattern, and a through hole is formed in a region facing the second electrode 24.
The through-hole conductor layer 91 in which the holes 93 are formed is connected to GND (not shown).

In this case, as shown in FIG. 18, there is no need to prepare a split antenna member having a plurality of cells, and the switching unit 54 only switches the cells of the simple split antenna member. No complicated operation such as connection to GND is required.

Each of the antenna members described so far is a non-contact type, in which the conductor layer and the second electrode are dielectrically coupled via an insulator, and the voltage level of the signal input to the conductor layer is Due to the dielectric constant of the insulator, the voltage level is extremely lower than the voltage level of the input signal.

Although the level of the signal voltage can be improved by making the insulator covering the conductor layer thinner and employing an insulator having a high dielectric constant, the dielectric constant is a value inherent to the material of the insulator, There is a limit to thinning, which alone limits the improvement of voltage levels.

A modification of the antenna member shown in FIG. 22 is an antenna member in which a conductor layer is opposed to a second electrode without an intervening insulator, and an antenna member 10 shown in FIG. Alternatively, the cell 53 is brought as close as possible to the second electrode 24 to improve the voltage level.

That is, the antenna member 10 has the ground portion 50 for blocking electromagnetic waves leaking from the conductor pattern of the wiring board 2 to be inspected, and is arranged at a position where it can face the second electrode 24 of the antenna member 10. The cell 53 is insulated from the ground unit 50 by an insulator.

When the antenna member 10 configured as described above is placed on the wiring board 2 to be inspected so that the cell 53 approaches the second electrode 24 as much as possible, a complete gap is formed between the cell 53 and the second electrode 24. Contact, unstable contact, and no contact at all.

The output signal level of the cell 53 when the cell 53 is in contact with the second electrode 24 is equal to the level of the input signal to the first electrode 23, and when the cell 53 is not in contact at all. The signal level output from 53 is significantly lower than the input signal to first electrode 23.

When the cell 53 and the second electrode 24 are in contact with each other in an unstable manner, the level of the signal output from the cell 53 is indefinite and is output when the cell 53 is completely in contact. It fluctuates between the signal level and the signal level output when no contact is made.

However, even if the level of the signal output from the cell 53 is unstable or smaller than the input signal to the first electrode 23, the signal is output from the cell 53. Means that the conductor pattern 22 is not broken, and is determined to be non-defective.

Although the level of the output signal when the cell 53 is not in contact at all depends on the dielectric constant of the air interposed therebetween, the distance between the cell 53 and the second electrode 24 can be made extremely small. The height can be increased as compared with a case where an insulator is interposed between the insulators.

The measuring circuit connected to the non-contact type antenna member is designed for the output signal of the cell 53 having substantially the same level as described above. It is impossible to determine the quality of the pattern.

The judgment circuit shown in FIG. 23 (a) judges the quality of the conductor pattern from the output signal of the cell 53 having a significantly different level. The judgment circuit is in contact with the peak value holding circuit 11 of the signal output from the cell 53. It comprises an inspection determination circuit 12 and a non-contact inspection determination circuit 13.

When the peak value of the signal output from the cell 53 is held, the contact inspection determination circuit 12 compares the peak value with a preset reference value, and if the peak value is higher than the reference value, changes the conductor pattern. When the conductor pattern is determined to be non-defective, the conductor pattern is determined to be defective.

If the contact inspection judgment circuit 12 judges that the conductor pattern is defective, the non-contact inspection judgment circuit 13 compares the peak value with a reference value, and if the peak value is higher than the reference value, the conductor pattern is regarded as a non-defective product. If the judgment is low, the conductor pattern is judged to be defective.

The determination circuit shown in FIG. 23 (b) includes a peak value detection circuit 14, a contact inspection determination circuit 15, and a non-contact inspection determination circuit.
The contact inspection determination circuit 15 compares the detected peak value with a reference value, and determines that the conductor pattern is non-defective if higher than the reference value.

The detected peak value is compared with a reference value. If the detected peak value is lower than the reference value, the conductor pattern is determined to be defective and the switch circuit 16 is closed. When the switch circuit 16 is closed, the non-contact inspection determination circuit 13 compares the output signal of the cell with a reference value to determine whether the conductor pattern is good or not.

The antenna member 10 shown in FIG. 22 (a) has a conductor layer or cell 53 as close as possible to the second electrode 24 to improve the voltage level, but the antenna member 10 shown in FIG.
In order to improve the voltage level, a liquid is interposed between the cell 53 and the second electrode 24.

That is, unlike the case of FIG. 22 (a), the antenna member 10 is fixed to the bottom of the cylindrical container 17 with the cell 53 facing upward in a watertight manner. By being placed on the upper part, the cell 53 and the second electrode 24 face each other at a preset interval.

As an alternative to the insulator, a liquid (for example, water) 18 is placed between at least the opposing cell 53 and the second electrode 24.
Is filled, and instead of the insulator used for the non-contact type antenna member, the cell 53 is connected to the second electrode 24 via the liquid 18.
And is inductively coupled.

The dielectric constant of an insulator made of resin or the like used for a non-contact type antenna member is 3 to 10, whereas the dielectric constant of water is as large as about 80. If the distance between the electrodes 24 is equal to the thickness of the insulator, the voltage level can be improved.

[0145]

As described above, according to the present invention, the presence / absence of disconnection of the conductor pattern and the presence / absence of a short circuit between the conductor patterns can be inspected simultaneously, or when inspecting only the disconnection of the conductor pattern, the inspection can be performed in a relatively short time. An inspection device and an inspection method can be provided.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a wiring board inspection apparatus according to the present invention.

FIG. 2 is a diagram showing an input waveform and a detection waveform.

FIG. 3 is a flowchart showing a wiring board inspection method according to the present invention.

FIG. 4 is a perspective view showing an example of a wiring board to be inspected.

FIG. 5 is a diagram showing the principle of a conventional wiring inspection machine.

FIG. 6 is a block diagram showing a conventional wiring board inspection apparatus.

FIG. 7 is a diagram illustrating an example of a switching unit.

FIG. 8 is a flowchart showing a conventional wiring board inspection method.

FIG. 9 is a block diagram showing another inspection apparatus according to the present invention.

FIG. 10 is a diagram illustrating the operation principle of another inspection apparatus.

FIG. 11 is a view showing a first modification of another inspection apparatus.

FIG. 12 is a view showing a second modified example of another inspection apparatus.

FIG. 13 is a diagram showing a specific example in which the intervals of the second modified example are different.

FIG. 14 is a diagram showing a specific example in which the area of the second modified example is different.

FIG. 15 is a view showing a third modification of another inspection apparatus.

FIG. 16 is a block diagram showing still another inspection apparatus according to the present invention.

FIG. 17 is a side sectional view showing a configuration example of a wiring board mounting portion to be inspected.

FIG. 18 is a view showing a division pattern of a division type antenna member.

FIG. 19 is a view showing one embodiment of a split type antenna member.

FIG. 20 is a perspective view showing another embodiment of the split type antenna member.

FIG. 21 is a perspective view showing a simplified configuration method of a split antenna member.

FIG. 22 is a schematic view showing a modification of the split antenna member.

FIG. 23 is a diagram illustrating an example of a determination circuit used in a modification.

[Explanation of symbols]

 2 Inspection wiring board 4 Switching unit 5 Antenna member 7 Measurement circuit 8 Inspection wiring board mounting part 9 Antenna unit 10 Antenna member 11 Peak value holding circuit 12 Contact inspection judgment circuit 13 Non-contact inspection judgment circuit 14 Peak value detection circuit 15 Contact Inspection judgment circuit 16 Switching circuit 17 Cylindrical container 18 Liquid 22, 25, 26 Conductor pattern 23 First electrode 24 Second electrode 41 Switch element 44 Common terminal 50 Ground part 51 Insulating layer 52 Conductive layer 53 Cell 54 Switching unit 55 AMP 61 Oscillator 65 Signal receiver 66 Conduction detector 70 Test circuit 71 Voltage application unit 72 Current detector 73 Insulation detector 74 Signal receiver 75 Conduction detector 81 Base 82, 83 Test probe 84 Switching control circuit 91 With through hole Conductor layer 92 Shield plate 93 Through hole 94 Insulation layer

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Takeo Ogawa 4-1-1, Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Prefecture Inside Fujitsu Limited (72) Inventor Yutaka Fukui 4-1-1, Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa No. 1 Fujitsu Limited F term (reference) 2G014 AA02 AA03 AB59 AC07 AC18

Claims (9)

[Claims] 1. An apparatus for inspecting a wiring board on which a plurality of conductor patterns having a first electrode and a second electrode are formed for disconnection of the conductor patterns and short-circuit between the conductor patterns, Having a switching unit for selecting said first electrode and short-circuiting the remaining first electrodes to each other, and a conductor layer dielectrically coupled to all of said second electrodes via an insulating layer A voltage application unit comprising: a member; and a measurement circuit, wherein the measurement circuit applies a test voltage whose potential changes instantaneously or a test voltage having a pulse waveform to the first electrode selected by the switching unit. , A current detecting unit and an insulation determining unit, and a signal receiving unit and a conduction determining unit, wherein the current detecting unit and the insulation determining unit
When the test voltage is applied to the electrodes of the first electrode, a current flowing through the remaining first electrode that has been short-circuited is detected to determine whether there is a short circuit between the conductor patterns. The receiving unit and the continuity determining unit are connected to the selected first terminal.
A wiring board inspection apparatus having a function of receiving a signal input from the antenna member when the test voltage is applied to the electrode and determining whether or not the conductor pattern is disconnected. 2. A method for inspecting a wiring board on which a plurality of conductor patterns having a first electrode and a second electrode are formed for disconnection of the conductor pattern and short-circuit between the conductor patterns, Having a switching unit for selecting said first electrode and short-circuiting the remaining first electrodes to each other, and a conductor layer dielectrically coupled to all of said second electrodes via an insulating layer A voltage application unit comprising: a member; and a measurement circuit, wherein the measurement circuit applies a test voltage whose potential changes instantaneously or a test voltage having a pulse waveform to the first electrode selected by the switching unit. , A current detecting unit and an insulation determining unit, and a signal receiving unit and a conduction determining unit, wherein the current detecting unit and the insulation determining unit
When the test voltage is applied to the electrodes of the first electrode, a current flowing through the remaining first electrode that has been short-circuited is detected to determine whether there is a short circuit between the conductor patterns. The receiving unit and the continuity determining unit are connected to the selected first terminal.
When the test voltage is applied to the electrodes, a signal input from the antenna member is received, and the test voltage is reduced by using a wiring board inspection apparatus having a function of determining whether or not the conductor pattern is disconnected. When the voltage is applied, if the level of the signal input from the antenna member to the signal receiving portion exceeds the reference value, there is no disconnection in the conductor pattern corresponding to the selected first electrode, and is equal to or less than the reference value. If so, it is determined that there is a break in the conductor pattern, and the value of the current flowing through the short-circuited first electrode is
The conductor pattern corresponding to the selected first electrode is short-circuited with another conductor pattern if the reference value is exceeded, and it is determined that there is no short-circuit if the conductor pattern is less than the reference value. Inspection methods. 3. An apparatus for inspecting a wiring board on which a plurality of conductor patterns each having a first electrode and a second electrode are formed for disconnection of the conductor pattern, comprising: an oscillator; An antenna member having a conductor layer inductively coupled to all of the second electrodes; a signal receiving unit and a conduction determining unit; and the oscillator includes at least one of the first and second electrodes via the first electrode. The conductor pattern has a function of applying a test signal of a sine waveform or a pulse waveform, and the signal receiving unit and the continuity determining unit receive a signal input from the antenna member and compare the signal with a reference voltage. A wiring board inspection apparatus having a function of determining whether or not the conductor pattern is disconnected. 4. The wiring board according to claim 3, wherein the test signal applied to at least one conductor pattern is a signal having the same frequency and signal level, or a signal having a different frequency or signal level for each conductor pattern. Inspection equipment. 5. The antenna member according to claim 1, wherein an interval between the second electrode and the conductor layer is different for each conductor pattern, or a facing area between the second electrode and the conductor layer is different for each conductor pattern. 4. The wiring board inspection apparatus according to claim 3, wherein the dielectric constant of the insulating layer interposed between the second electrode and the conductor layer is different for each of the second electrodes. 6. A method of inspecting a wiring board on which a plurality of conductor patterns having a first electrode and a second electrode are formed for disconnection of the conductor pattern, comprising: an oscillator and an insulating layer interposed therebetween. An antenna member having a conductor layer inductively coupled to all of the second electrodes; a signal receiving unit and a conduction determining unit; and the oscillator includes at least one of the first and second electrodes via the first electrode. The conductor pattern has a function of applying a test signal of a sine waveform or a pulse waveform, and the signal receiving unit and the continuity determining unit receive a signal input from the antenna member and compare the signal with a reference voltage. Applying a test signal of a sine waveform or a pulse waveform to at least one conductor pattern via the first electrode, using a wiring board inspection device having a function of determining whether or not the conductor pattern is disconnected; Receiving a signal input from the antenna member mounted on the wiring board to be inspected so as to face all of the two electrodes, and outputting an output voltage of the signal with a reference output voltage when there is no disconnection in the conductor pattern. A method for inspecting a wiring board, comprising detecting the presence or absence of disconnection in comparison. 7. An apparatus for inspecting a wiring board on which a plurality of conductor patterns each having a first electrode and a second electrode are formed for disconnection of the conductor patterns and short-circuit between the conductor patterns, A switching unit connected to the first electrode for selecting any of the first electrodes and short-circuiting the remaining first electrodes; and a dielectric unit for all of the second electrodes via an insulating layer. An antenna member having a conductor layer coupled thereto, and a measurement circuit, wherein the measurement circuit applies a test wave signal having a sine waveform or a pulse waveform to the first electrode selected by the switching unit. An oscillator, a signal receiving unit and a conduction determining unit, wherein the signal receiving unit and the conduction determining unit receive a signal input from the antenna member when a test signal is applied to the first electrode. And the conductor A wiring board inspection device having a function of detecting the presence or absence of disconnection or short circuit of a pattern. 8. A method for inspecting a wiring board on which a plurality of conductor patterns having a first electrode and a second electrode are formed for disconnection of the conductor pattern and short-circuit between the conductor patterns, A switching unit connected to the first electrode for selecting any of the first electrodes and short-circuiting the remaining first electrodes; and a dielectric unit for all of the second electrodes via an insulating layer. An antenna member having a conductor layer coupled thereto, and a measurement circuit, wherein the measurement circuit applies a test wave signal having a sine waveform or a pulse waveform to the first electrode selected by the switching unit. An oscillator, a signal receiving unit and a conduction determining unit, wherein the signal receiving unit and the conduction determining unit receive a signal input from the antenna member when a test signal is applied to the first electrode. And the conductor A test signal of a sine waveform or a pulse waveform is applied to an arbitrary conductor pattern through the switching unit using a wiring board inspection device having a function of detecting the presence / absence of disconnection or short circuit of the pattern, A signal input through the antenna member placed on the wiring board to be inspected so as to face all of the electrodes is received. If the conductor pattern is broken, the output voltage of the signal decreases, and the adjacent conductor A method for inspecting a wiring board, comprising detecting whether there is a disconnection and a short circuit in the conductor pattern by utilizing an increase in output voltage of the signal if the pattern is short-circuited. 9. The antenna member has a plurality of cells each composed of a conductor piece divided for each opposing second electrode, and is capable of individually extracting a signal from each cell. 8. The inspection apparatus for a wiring board according to 5 or 7.