JP2000339715A - Automatic focusing device using static pressure air bearing - Google Patents

Automatic focusing device using static pressure air bearing

Info

Publication number
JP2000339715A
JP2000339715A JP14623699A JP14623699A JP2000339715A JP 2000339715 A JP2000339715 A JP 2000339715A JP 14623699 A JP14623699 A JP 14623699A JP 14623699 A JP14623699 A JP 14623699A JP 2000339715 A JP2000339715 A JP 2000339715A
Authority
JP
Japan
Prior art keywords
lens barrel
static pressure
compressed air
bearing
bearing housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14623699A
Other languages
Japanese (ja)
Inventor
Takashi Tsurukubo
隆 鶴窪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Original Assignee
Victor Company of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd filed Critical Victor Company of Japan Ltd
Priority to JP14623699A priority Critical patent/JP2000339715A/en
Publication of JP2000339715A publication Critical patent/JP2000339715A/en
Pending legal-status Critical Current

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  • Optical Recording Or Reproduction (AREA)
  • Automatic Focus Adjustment (AREA)

Abstract

PROBLEM TO BE SOLVED: To surely automatically focus a lens barrel to which an objective lens is fixed using compressed air. SOLUTION: In this automatic focusing device 1B, a first static pressure air bearing 10A which supports a small diameter cylindrical part 2b of a lens barrel 2 within a through hole 11a of a bearing casing 11 so as to be vertically movable in a floating state by a static pressure of compressed air and a second static pressure air bearing 10B which moves upward the lens barrel 2 relative to the bearing casing 11 until the lens barrel 2 comes into contact with an upper limit stopper 26 are separately provided.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、光学式ディスク原
盤装置に適用され、記録ビ−ム又は再生ビ−ムを絞り込
むために静圧空気軸受を用いた自動焦点調整装置に関す
るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic focus adjusting device which is applied to an optical disk master device and uses a static pressure air bearing for narrowing a recording beam or a reproducing beam.

【0002】[0002]

【従来の技術】従来より、静圧空気軸受を用いた自動焦
点調整装置は、対物レンズを固定する鏡筒を圧縮空気に
よる静圧空気軸受でガイドすることで、対物レンズの可
動範囲が大きく取れ、対物レンズの光軸方向の追従性能
が良好となるために、光学式ディスク原盤装置に適用さ
れている。
2. Description of the Related Art Conventionally, an automatic focus adjusting device using a static pressure air bearing has a large movable range of the objective lens by guiding a lens barrel for fixing the objective lens with a static pressure air bearing using compressed air. Since the objective lens has good follow-up performance in the optical axis direction, it is applied to an optical disk master device.

【0003】この種の従来の静圧空気軸受を用いた自動
焦点調整装置の一例を図2を用いて説明する。
An example of this type of conventional automatic focusing device using a static pressure air bearing will be described with reference to FIG.

【0004】図2は従来の静圧空気軸受を用いた自動焦
点調整装置を説明するための図であり、(A)は(B)
のM−M矢視断面図であり、(B)は縦断面図である。
FIGS. 2A and 2B are views for explaining a conventional automatic focus adjusting device using a static pressure air bearing. FIG.
(B) is a longitudinal sectional view.

【0005】図2(A),(B)に示した従来の静圧空
気軸受を用いた自動焦点調整装置1Aにおいて、鏡筒2
が段付き円筒状に形成されており、上部フランジ部2a
は大径で厚みが薄く形成され、この上部フランジ部2a
の下方は上部フランジ部2aより小径で長尺に小径円筒
部2bが形成されている。また、鏡筒2の内部中央に貫
通孔2cが形成されており、この貫通孔2c内に対物レ
ンズ3が接着材などを用いて固定されている。
[0005] In the conventional automatic focusing device 1A using a static pressure air bearing shown in FIGS.
Is formed in a stepped cylindrical shape, and the upper flange portion 2a
Is formed to have a large diameter and a small thickness.
Below the upper flange portion 2a, a small-diameter cylindrical portion 2b having a smaller diameter than the upper flange portion 2a is formed. A through hole 2c is formed in the center of the inside of the lens barrel 2, and the objective lens 3 is fixed in the through hole 2c using an adhesive or the like.

【0006】また、上記した鏡筒2は、後述するよう
に、固定設置されたリング状の軸受筐体11内を重力方
向に向けられて、圧縮空気により浮遊している状態で支
持されている。そして、鏡筒2の下端部側には、円盤状
の光学式ディスク原盤7が図示しないターンテーブル上
に載置されて、ターンテーブルと一体に回転自在になっ
ている。この光学式ディスク原盤7の上面には情報信号
記録用のフォトレジストが塗布されている。
Further, as described later, the above-mentioned lens barrel 2 is supported in a state of being floated by compressed air while being directed in the direction of gravity in a fixed ring-shaped bearing housing 11. . At the lower end of the lens barrel 2, a disc-shaped optical disc master 7 is placed on a turntable (not shown), and is rotatable integrally with the turntable. A photoresist for recording information signals is applied to the upper surface of the optical disk master 7.

【0007】また、4は情報信号を記録するための記録
用のメインビームであり、ここではブルー&紫外線レー
ザを用いている。一方、5は焦点調整用のサブビームで
あり、ここでは赤レーザを用いている。この際、焦点調
整用のサブビーム5は、光学式ディスク原盤7上に照射
するための往きのサブビーム5aと、往きのサブビーム
5aが光学式ディスク原盤7で反射された戻りのサブビ
ーム5bとからなる。
Reference numeral 4 denotes a recording main beam for recording an information signal. In this case, a blue & ultraviolet laser is used. On the other hand, reference numeral 5 denotes a sub-beam for focus adjustment, in which a red laser is used here. At this time, the sub-beam 5 for focus adjustment includes a forward sub-beam 5a for irradiating the optical disk master 7 and a return sub-beam 5b in which the forward sub-beam 5a is reflected by the optical disk master 7.

【0008】そして、図示しないレーザ光源から出射し
た記録用のメインビーム4は対物レンズ3により絞られ
て光学式ディスク原盤7に照射されて情報信号がフォト
レジスト上に記録露光される。一方、焦点調整用のサブ
ビーム5はメインビーム4のレーザ光源とは異なるレー
ザ光源(図示せず)から出射されており、ここで往きの
サブビーム5aが対物レンズ3により絞られて光学式デ
ィスク原盤7に照射され、この光学式ディスク原盤7で
反射した戻りのサブビーム5bを2分割フォトディテク
タ−(図示せず)に取り込んで、対物レンズ3の焦点情
報を得ている。この際、焦点調整用のサブビーム5は情
報記録用のフォトレジストに対して感度特性の低い波長
のレーザ(赤レーザ)が用いられている。
The recording main beam 4 emitted from a laser light source (not shown) is converged by the objective lens 3 and irradiated on the optical disc master 7 to record and expose information signals on the photoresist. On the other hand, the sub-beam 5 for focus adjustment is emitted from a laser light source (not shown) different from the laser light source of the main beam 4, where the incoming sub-beam 5 a is narrowed by the objective lens 3 and the optical disc master 7 The return sub-beam 5b reflected by the optical disc master 7 is taken into a two-segment photodetector (not shown) to obtain focus information of the objective lens 3. At this time, a laser (red laser) having a wavelength having a low sensitivity characteristic with respect to the photoresist for information recording is used as the sub-beam 5 for focus adjustment.

【0009】また、鏡筒2の上部フランジ部2aの下方
に形成した小径円筒部2bは、静圧空気軸受10を形成
したリング状の軸受筐体11の中央に形成した貫通孔1
1a内に僅かの隙間を隔てて圧縮空気の静圧により浮遊
している状態で嵌合し、鏡筒2が対物レンズ3の光軸に
沿って上下動可能になっている。
A small-diameter cylindrical portion 2b formed below the upper flange portion 2a of the lens barrel 2 has a through-hole 1 formed in the center of a ring-shaped bearing housing 11 in which a hydrostatic air bearing 10 is formed.
The lens barrel 2 is fitted in a floating state by a static pressure of compressed air with a slight gap therebetween so that the lens barrel 2 can move up and down along the optical axis of the objective lens 3.

【0010】上記した静圧空気軸受10の軸受筐体11
はアルミ材などを用いてリング状に形成されており、こ
の下面11bにリング状空気道11eが形成され、この
リング状空気道11eは下側を遮蔽円盤12で遮蔽され
ている。また、軸受筐体11の内部には、外周部11c
から中央の貫通孔11aに向かって下段と上段の2段に
わたって第1,第2横空気道11f,11gが円周に沿
って略等間隔の角度に分割されて放射状に複数形成され
ており、これら第1,第2横空気道11f,11gの外
周部側は下記する圧縮空気入り口11hを除いてシール
ド材13で閉鎖され、且つ、第1,第2横空気道11
f,11gの貫通孔11a側の先端が絞られて貫通孔1
1aに連通している。また、下段の第1横空気道11f
のうちの1本は外周部11cに形成した圧縮空気入り口
11hに接続されている。また、軸受筐体11の下面1
1bに形成したリング状空気道11eと、第1,第2横
空気道11f,11gとを接続するために第1縦空気道
11iが複数形成されている。更に、上段の第2横空気
道11gから上方に向かって第2縦空気道11jが形成
されており、この第2縦空気道11jは後述するセンタ
ーポール23の下面23cに形成したリング状空気道2
3dに連通している。
The bearing housing 11 of the above-described hydrostatic air bearing 10
Is formed in a ring shape by using an aluminum material or the like. A ring-shaped air passage 11e is formed on the lower surface 11b, and the lower side of the ring-shaped air passage 11e is shielded by a shielding disk 12. Further, an outer peripheral portion 11c is provided inside the bearing housing 11.
The first and second horizontal air passages 11f and 11g are divided at substantially equal intervals along the circumference and are radially formed in two stages of a lower stage and an upper stage toward the central through hole 11a, and The outer peripheral sides of the first and second lateral air passages 11f and 11g are closed by a shield material 13 except for a compressed air inlet 11h described below, and the first and second lateral air passages 11g and 11g are closed.
f, 11g of the through-hole 11a side are narrowed and the through-hole 1
1a. Also, the lower first horizontal air passage 11f
One of them is connected to a compressed air inlet 11h formed in the outer peripheral portion 11c. Also, the lower surface 1 of the bearing housing 11
A plurality of first vertical airways 11i are formed to connect the ring-shaped airway 11e formed in 1b to the first and second horizontal airways 11f and 11g. Further, a second vertical air passage 11j is formed upward from the upper second horizontal air passage 11g, and the second vertical air passage 11j is a ring-shaped air passage formed on a lower surface 23c of a center pole 23 described later. 2
It communicates with 3d.

【0011】そして、フィルタ(図示せず)を通過した
清浄な圧縮空気圧を軸受筐体11の圧縮空気入り口11
hから入れると、この圧縮空気入り口11hと連通した
1本の第1横空気道11f及び第1縦空気道11iから
下方のリング状空気道11eに導かれ、この後、複数の
第1縦空気道11iを介して下段及び上段の第1,第2
横空気道11f,11gから圧縮空気が軸受筐体11の
中央に形成した貫通孔11a内に流入して、鏡筒2の小
径円筒部2bを軸受筐体11の貫通孔11a内で圧縮空
気の静圧により浮遊させている。
Then, the clean compressed air pressure that has passed through a filter (not shown) is applied to the compressed air inlet 11 of the bearing housing 11.
h, the air is guided from one of the first horizontal air passage 11f and the first vertical air passage 11i communicating with the compressed air inlet 11h to the lower ring-shaped air passage 11e. Via the road 11i, the first and second lower and upper stages
Compressed air flows into the through hole 11a formed in the center of the bearing housing 11 from the lateral air passages 11f and 11g, and passes through the small-diameter cylindrical portion 2b of the lens barrel 2 through the through hole 11a of the bearing housing 11. Suspended by static pressure.

【0012】次に、鏡筒2の上部フランジ部2aの下方
と、軸受筐体11の上面11dとの間には、鏡筒2を上
下動させるために電磁気回路による電磁気駆動手段20
が取り付けられている。
Next, between the lower part of the upper flange portion 2a of the lens barrel 2 and the upper surface 11d of the bearing housing 11, there is provided an electromagnetic driving means 20 by an electromagnetic circuit for moving the lens barrel 2 up and down.
Is attached.

【0013】上記した電磁気駆動手段20は、鏡筒2の
上部フランジ部2aの外周部にリング状のコイルボビン
21が立ち下がって取り付けられており、このコイルボ
ビン21に駆動コイル22が巻かれている。
In the above-mentioned electromagnetic driving means 20, a ring-shaped coil bobbin 21 is attached to the outer peripheral portion of the upper flange portion 2a of the lens barrel 2 so as to fall down, and a driving coil 22 is wound around the coil bobbin 21.

【0014】また、軸受筐体11の上面11dには、セ
ンターポール23が取り付けられており、このセンター
ポール23は軟磁性材料を用いて大径部23aと小径部
23bとで段付きリング状に形成されている。
A center pole 23 is mounted on the upper surface 11d of the bearing housing 11. The center pole 23 is formed of a large-diameter portion 23a and a small-diameter portion 23b in a stepped ring shape using a soft magnetic material. Is formed.

【0015】上記したセンターポール23の大径部23
a上には、リング状の永久磁石24と、リング状のヨー
ク25とが積層されており、リング状のヨーク25はコ
イルボビン21に巻き付けた駆動コイル22と対向して
いる。更に、ヨーク25上には鏡筒2の上動を規制する
上限ストッパ26が取り付けられている。
The large-diameter portion 23 of the center pole 23 described above
A ring-shaped permanent magnet 24 and a ring-shaped yoke 25 are laminated on a, and the ring-shaped yoke 25 faces the drive coil 22 wound around the coil bobbin 21. Further, an upper limit stopper 26 for restricting upward movement of the lens barrel 2 is mounted on the yoke 25.

【0016】そして、駆動コイル22と、ヨーク25
と、永久磁石24と、センターポール23とで電磁気回
路が形成されている。そして、この電磁気回路では光学
式ディスク原盤7で反射した焦点調整用の戻りサブビー
ム5bと対応した対物レンズ3への焦点情報に基づいて
駆動コイル22に制御電流を流して出力された電磁力に
より、鏡筒2を対物レンズ3の光軸に沿って上下動させ
るようになっている。
The drive coil 22 and the yoke 25
, The permanent magnet 24 and the center pole 23 form an electromagnetic circuit. In this electromagnetic circuit, a control current is supplied to the drive coil 22 based on focus information to the objective lens 3 corresponding to the return sub-beam 5b for focus adjustment reflected by the optical disk master 7 and an electromagnetic force output. The lens barrel 2 is moved up and down along the optical axis of the objective lens 3.

【0017】また、センターポール23の小径部23b
はリング状のコイルボビン21の内側に進入して、鏡筒
2の上部フランジ部2aの下面近傍まで突出している。
The small diameter portion 23b of the center pole 23
Enters the inside of the ring-shaped coil bobbin 21 and protrudes to near the lower surface of the upper flange portion 2a of the lens barrel 2.

【0018】また、センターポール23の下面23cは
軸受筐体11の上面11d上に取り付けられており、こ
のセンターポール23の下面23cにリング状空気道2
3dが形成されており、このリング状空気道23dは軸
受筐体11の第2縦空気道11jと連通している。
The lower surface 23c of the center pole 23 is mounted on the upper surface 11d of the bearing housing 11, and the lower surface 23c of the center pole 23 is
3d, and the ring-shaped air passage 23d communicates with the second vertical air passage 11j of the bearing housing 11.

【0019】また、センターポール23に形成したリン
グ状空気道23dから縦空気道23eが小径部23b内
を上方に向かって複数形成されており、この縦空気道2
3eの上端は絞られて鏡筒2の上部フランジ部2aの下
面側の隙間Sに連通している。
A plurality of vertical air passages 23e are formed from the ring-shaped air passages 23d formed in the center pole 23 upward in the small diameter portion 23b.
The upper end of 3e is narrowed and communicates with the gap S on the lower surface side of the upper flange portion 2a of the lens barrel 2.

【0020】ここで、軸受筐体11の圧縮空気入り口1
1hから進入して第2縦空気道11jに至った圧縮空気
は、第2縦空気道11jからセンターポール23のリン
グ状空気道23dに流入し、このリング状空気道23d
と連通した縦空気道23eを介して鏡筒2の上部フラン
ジ部2aの下面側の隙間Sに送り出されるので、この送
り出された圧縮空気により鏡筒2の上部フランジ部2a
の下面を押し上げて鏡筒2を上限ストッパ26に接触規
制されるまで上動させると共に、送り出された圧縮空気
はコイルボビン21とセンタ−ポ−ル23との微少隙間
を通過して大気中に流出している。この際、対物レンズ
3を固定した鏡筒2の上下方向の可動量はおよそ3mm
あれば目視による確認もでき易く十分である。また、鏡
筒2の可動量が3mm程度あれば、光学式ディスク原盤
装置において光学式ディスク原盤7の装着時に自動焦点
調整装置1A全体をメカニカル的な上下動機構(図示せ
ず)にて上昇させ、鏡筒2の下端部を光学式ディスク原
盤7より逃がす機構部が不要になり装置としての剛性を
上げることができる。
Here, the compressed air inlet 1 of the bearing housing 11
The compressed air entering from 1h and reaching the second vertical air passage 11j flows into the ring-shaped air passage 23d of the center pole 23 from the second vertical air passage 11j, and this ring-shaped air passage 23d
Is sent out to the gap S on the lower surface side of the upper flange portion 2a of the lens barrel 2 through the vertical air passage 23e communicating with the upper portion 2a.
Is pushed up until the lens barrel 2 comes into contact with the upper limit stopper 26 and the compressed air sent out passes through a small gap between the coil bobbin 21 and the center pole 23 and flows out into the atmosphere. are doing. At this time, the vertical movable amount of the lens barrel 2 to which the objective lens 3 is fixed is approximately 3 mm.
If there is, it can be easily confirmed by visual inspection, which is sufficient. If the movable amount of the lens barrel 2 is about 3 mm, the entire automatic focus adjustment device 1A is raised by a mechanical vertical movement mechanism (not shown) when the optical disk master 7 is mounted in the optical disk master. In addition, a mechanism for releasing the lower end of the lens barrel 2 from the optical disk master 7 becomes unnecessary, and the rigidity of the apparatus can be increased.

【0021】[0021]

【発明が解決しようとする課題】ところで、上記した従
来の静圧空気軸受を用いた自動焦点調整装置1Aによる
と、鏡筒2内に固定した対物レンズ3で集光された記録
用のメインビーム4により光学式ディスク原盤7に情報
信号を記録露光中には、光学式ディスク原盤7の面振れ
等による焦点ズレを光学式ディスク原盤7で反射した焦
点調整用の戻りのサブビーム5bと対応した対物レンズ
3への焦点情報に基づいて駆動コイル22に制御電流を
流して、鏡筒2を上下動させることで対物レンズ3の焦
点合わせを行っている。通常、この焦点位置は対物レン
ズ3を固定した鏡筒2が上下方向に可動する範囲の中間
点位置ぐらいに設定しているが、この合焦動作中にもセ
ンタ−ポ−ル23に形成した縦空気道23eから圧縮空
気が常に吐出して、鏡筒2は上限ストッパ26に接触規
制されるまで上昇する力を受けている。このため、駆動
コイル22には常に、上昇する力をキャンセルする下降
駆動力をオフセットコイル電流として流す必要があり、
駆動コイル22の負担が増大する。
According to the above-mentioned conventional automatic focusing device 1A using a static pressure air bearing, the main beam for recording condensed by the objective lens 3 fixed in the lens barrel 2 is used. While recording and exposing an information signal on the optical disc master 7 by the optical disc 4, an object corresponding to the return sub-beam 5b for focus adjustment reflected by the optical disc master 7 on the defocus due to the surface deflection of the optical disc master 7 or the like. A control current is supplied to the drive coil 22 based on the focus information on the lens 3 to move the lens barrel 2 up and down, thereby performing focusing of the objective lens 3. Normally, this focal position is set at about the middle point of the range in which the lens barrel 2 to which the objective lens 3 is fixed can move in the vertical direction, but it is formed on the center pole 23 even during this focusing operation. Compressed air is constantly discharged from the vertical air passage 23e, and the lens barrel 2 receives a rising force until the lens barrel 2 is restricted in contact with the upper limit stopper 26. For this reason, it is necessary to always supply a downward drive force for canceling the rising force to the drive coil 22 as an offset coil current.
The load on the drive coil 22 increases.

【0022】一方、センタ−ポ−ル23に形成した縦空
気道23eからの圧縮空気の吐出は音響振動を伴うと共
に、さらに固定部のセンタ−ポ−ル23と可動部の鏡筒
2とコイルボビン21とで囲まれた隙間Sは、縦空気道
23eからの圧縮空気で加圧状態になっており、鏡筒2
の小径円筒部2bが軸受筐体11の中央に形成した貫通
孔11a内を圧縮空気により非接触で浮遊して微少に上
下動して合焦動作している時、可動部の鏡筒2とコイル
ボビン21はより異常振動し易くなる。これらの異常振
動は異常信号として光学式ディスク原盤7に記録され、
この異常信号はフォ−カス、トラッキング性能劣化とし
て光学式ディスク原盤7の記録品質低下をまねいてしま
うという恐れがある。
On the other hand, the discharge of the compressed air from the vertical air passage 23e formed in the center pole 23 is accompanied by acoustic vibration, and furthermore, the center pole 23 of the fixed part, the lens barrel 2 of the movable part, and the coil bobbin 21 is pressurized by compressed air from the vertical air passage 23e, and
When the small-diameter cylindrical portion 2b floats in the through hole 11a formed in the center of the bearing housing 11 in a non-contact manner by compressed air and moves slightly up and down to perform focusing operation, The coil bobbin 21 is more likely to abnormally vibrate. These abnormal vibrations are recorded on the optical disk master 7 as abnormal signals,
This abnormal signal may cause deterioration of the recording quality of the optical disk master 7 as deterioration of focus and tracking performance.

【0023】更に、軸受筐体11に形成した一本の圧縮
空気入り口11hから挿入した圧縮空気で、鏡筒2を軸
受筐体11に対して浮遊させる静圧空気軸受機能と、鏡
筒2を軸受筐体11に対して上動させる上動機能とを兼
用しているために以下の問題も起こる。
Further, a static pressure air bearing function for floating the lens barrel 2 with respect to the bearing housing 11 with compressed air inserted through one compressed air inlet 11h formed in the bearing housing 11, and The following problem also arises because it also serves as an up-moving function for up-moving the bearing housing 11.

【0024】即ち、鏡筒2を軸受筐体11の上方に取り
付けた上限ストッパ26に接触規制されるまで上動させ
る調整は、センタ−ポ−ル23に形成した縦空気道23
eからの圧縮空気の吐出量で行うが、これは主に縦空気
道23eの直径と圧縮空気の圧力で決まり、縦空気道2
3eの直径のアンバランス等を吸収して上動量を調整す
るのは圧力の微調整である。
That is, the adjustment to move the lens barrel 2 upward until the lens barrel 2 comes into contact with the upper limit stopper 26 attached above the bearing housing 11 is regulated. The vertical air passage 23 formed in the center pole 23 is adjusted.
e, which is mainly determined by the diameter of the vertical air passage 23e and the pressure of the compressed air.
It is fine adjustment of pressure that adjusts the upward movement amount by absorbing the imbalance of the diameter of 3e.

【0025】一方、鏡筒2の小径円筒部2bを軸受筐体
11の貫通孔11a内で浮遊させるには圧縮空気の静圧
を最良の圧力値に設定する必要があるものの、センタ−
ポ−ル23に形成した縦空気道23eの微調整で振られ
てしまい最良の空気軸受性能が発揮できないし、更に、
センタ−ポ−ル23の縦空気道23eと鏡筒2の上部フ
ランジ部2aとの位置関係で縦空気道23eからの圧縮
空気の吐出量の変化で微妙に圧縮空気の圧力変動を起こ
してしまう。これは同じように鏡筒2の異常な微振動を
引き起こしてしまい、この振動は異常信号として光学式
ディスク原盤7に記録され、この異常信号はフォ−カ
ス、トラッキング性能劣化として光学式ディスク原盤7
の記品質低下をまねいてしまうという恐れがあるそこで
本発明では、上記の不都合を解消し、最良の静圧空気軸
受性能が発揮でき、フォ−カス、トラッキング性能の良
い静圧空気軸受を用いた自動焦点調整装置が望まれてい
る。
On the other hand, in order to float the small-diameter cylindrical portion 2b of the lens barrel 2 in the through-hole 11a of the bearing housing 11, it is necessary to set the static pressure of the compressed air to the best pressure value.
The vertical air passage 23e formed in the pole 23 is swung due to fine adjustment, so that the best air bearing performance cannot be exhibited.
Due to the positional relationship between the vertical air passage 23e of the center pole 23 and the upper flange portion 2a of the lens barrel 2, a change in the amount of compressed air discharged from the vertical air passage 23e causes a slight change in the pressure of the compressed air. . This also causes abnormal micro-vibration of the lens barrel 2, and this vibration is recorded on the optical disk master 7 as an abnormal signal, and this abnormal signal is degraded as focus and tracking performance deterioration.
Therefore, in the present invention, the above-mentioned disadvantages are solved, the best hydrostatic air bearing performance can be exhibited, and a hydrostatic air bearing having good focus and tracking performance is used in the present invention. There is a need for an automatic focus adjustment device.

【0026】[0026]

【課題を解決するための手段】本発明は上記課題に鑑み
てなされたものであり、重力方向に向けられ、且つ、上
部に大径の上部フランジ部を形成し、且つ、この上部フ
ランジ部の下方に形成した小径円筒部内に対物レンズを
固定した鏡筒と、前記鏡筒の小径円筒部を、固定設置し
た軸受筐体の貫通孔内に圧縮空気の静圧により浮遊した
状態で嵌合させ、前記軸受筐体内に形成した第1空気道
手段を介して前記圧縮空気を前記貫通孔内に吐出させる
ことで前記鏡筒を上下動可能に支持する第1静圧空気軸
受と、前記鏡筒に取り付けた駆動コイルと、該駆動コイ
ルと対向して前記軸受筐体に取り付けた永久磁石及びヨ
ークとで電磁気回路を形成し、この電磁気回路で前対物
レンズへの焦点情報に基づいて出力された電磁力により
前記鏡筒を上下動させる電磁気駆動手段と、前記軸受筐
体内に形成した第1空気道手段とは異なる第2空気道手
段を介して圧縮空気を前記鏡筒の上部フランジ部に向け
て吐出させることで、前記鏡筒を前記軸受筐体に対して
上限ストッパに接触するまで上動させる第2静圧空気軸
受とを備えたことを特徴とする静圧空気軸受を用いた自
動焦点調整装置である。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and has a large-diameter upper flange portion which is directed in the direction of gravity and has an upper portion formed thereon. A lens barrel in which an objective lens is fixed in a small-diameter cylindrical part formed below and a small-diameter cylindrical part of the lens barrel are fitted in a through hole of a fixedly installed bearing housing in a floating state by static pressure of compressed air. A first static pressure air bearing for vertically supporting the lens barrel by discharging the compressed air into the through hole through a first air path means formed in the bearing housing; and An electromagnetic circuit is formed by the drive coil attached to the motor and the permanent magnet and the yoke attached to the bearing housing in opposition to the drive coil, and the electromagnetic circuit outputs the electromagnetic circuit based on the focus information to the front objective lens. Up and down movement of the lens barrel by electromagnetic force Discharging the compressed air toward an upper flange portion of the lens barrel through an electromagnetic driving means to be driven and a second air path means different from the first air path means formed in the bearing housing; And a second static pressure air bearing that moves the bearing up to the upper limit stopper with respect to the bearing housing.

【0027】上記発明の静圧空気軸受を用いた自動焦点
調整装置において、前記第2静圧空気軸受は、前記対物
レンズへの自動焦点非動作時、自動焦点引き込み動作
時、自動焦点動作終了時及び自動焦点動作異常時に前記
鏡筒の上部フランジ部に向けて前記圧縮空気を吐出させ
る一方、前記対物レンズへの自動焦点引き込み動作が完
了して自動焦点動作中には前記圧縮空気の吐出を停止さ
せることを特徴とする静圧空気軸受を用いた自動焦点調
整装置である。
In the automatic focus adjusting apparatus using the static pressure air bearing according to the invention, the second static pressure air bearing is provided when the automatic focusing on the objective lens is not performed, when the automatic focusing operation is performed, and when the automatic focusing operation is completed. When the auto-focus operation is abnormal, the compressed air is discharged toward the upper flange portion of the lens barrel, while the auto-focus pull-in operation to the objective lens is completed and the discharge of the compressed air is stopped during the auto-focus operation. An automatic focus adjusting device using a static pressure air bearing.

【0028】[0028]

【発明の実施の形態】以下に本発明に係る静圧空気軸受
を用いた自動焦点調整装置の一実施例を図1を参照して
詳細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an automatic focusing device using a hydrostatic air bearing according to the present invention will be described below in detail with reference to FIG.

【0029】図1(A),(B)は本発明に係る静圧空
気軸受を用いた自動焦点調整装置を説明するための図で
あり、(A)は(B)のN−N矢視断面図であり、
(B)は縦断面図である。尚、説明の便宜上、先に従来
例で示した構成部材と同一構成部材に対しては同一の符
号を付して適宜説明し、且つ、従来例と異なる点を中心
に説明する。
FIGS. 1A and 1B are views for explaining an automatic focus adjusting device using a static pressure air bearing according to the present invention, and FIG. 1A is a view taken along the line NN of FIG. FIG.
(B) is a longitudinal sectional view. For the sake of convenience, the same components as those shown in the conventional example will be denoted by the same reference numerals, and the description will be appropriately made, and the points different from the conventional example will be mainly described.

【0030】図1(A),(B)に示した本発明に係る
静圧空気軸受を用いた自動焦点調整装置1Bでは、鏡筒
2を軸受筐体11に対して圧縮空気により浮遊させる静
圧空気軸受機能と、鏡筒2を軸受筐体11に対して圧縮
空気により上動させる上動機能とを、従来で説明したよ
うな同一の圧縮空気入り口から挿入した圧縮空気で行う
ことなく、静圧空気軸受機能は軸受筐体11に形成した
第1圧縮空気入り口11hから挿入した圧縮空気で行
い、一方、上動機能は軸受筐体11に形成した第2圧縮
空気入り口11pから挿入した圧縮空気で行うことを特
徴とするものである。
In the automatic focusing device 1B using the static pressure air bearing according to the present invention shown in FIGS. 1A and 1B, the lens barrel 2 is floated on the bearing housing 11 by compressed air. The pressurized air bearing function and the upward movement function of moving the lens barrel 2 upward with the compressed air with respect to the bearing housing 11 are not performed by the compressed air inserted from the same compressed air inlet as described in the related art. The static pressure air bearing function is performed by the compressed air inserted from the first compressed air inlet 11h formed in the bearing housing 11, while the upward movement function is performed by the compressed air inserted from the second compressed air inlet 11p formed in the bearing housing 11. It is characterized by performing with air.

【0031】即ち、本発明に係る静圧空気軸受を用いた
自動焦点調整装置1Bにおいて、重力方向に向けられた
鏡筒2の上部に大径の上部フランジ部2aが形成され、
且つ、この上部フランジ部2aの下方に形成した小径円
筒部2bに形成した貫通孔2c内に対物レンズ3が接着
材などを用いて固定されている。また、鏡筒2の下端部
側には、円盤状の光学式ディスク原盤7が図示しないタ
ーンテーブル上に載置されて、ターンテーブルと一体に
回転自在になっている。また、鏡筒2の上部フランジ部
2aの下方に形成した小径円筒部2bは、第1静圧空気
軸受10Aを構成するリング状の軸受筐体11の中央に
形成した貫通孔11a内に僅かの隙間を隔てて圧縮空気
の静圧により浮遊している状態で嵌合し、鏡筒2が対物
レンズ3の光軸に沿って上下動可能になっている。ま
た、記録用のメインビーム4及び焦点調整用のサブビー
ム5は対物レンズ3により絞られて光学式ディスク原盤
7に照射されており、この際、光学式ディスク原盤7で
反射した焦点調整用の戻りのサブビーム5bを2分割デ
テクタ−(図示せず)に取り込んで、対物レンズ3への
焦点情報を得ている。
That is, in the automatic focus adjusting device 1B using the static pressure air bearing according to the present invention, a large-diameter upper flange portion 2a is formed above the lens barrel 2 oriented in the direction of gravity.
The objective lens 3 is fixed using an adhesive or the like in a through hole 2c formed in the small-diameter cylindrical portion 2b formed below the upper flange portion 2a. At the lower end of the lens barrel 2, a disc-shaped optical disc master 7 is mounted on a turntable (not shown), and is rotatable integrally with the turntable. The small-diameter cylindrical portion 2b formed below the upper flange portion 2a of the lens barrel 2 has a small diameter in a through hole 11a formed in the center of a ring-shaped bearing housing 11 constituting the first hydrostatic air bearing 10A. The lens barrel 2 is fitted in a floating state by the static pressure of the compressed air with a gap therebetween, so that the lens barrel 2 can move up and down along the optical axis of the objective lens 3. The main beam 4 for recording and the sub-beam 5 for focus adjustment are squeezed by the objective lens 3 and irradiated on the optical disc master 7. At this time, the return for focus adjustment reflected on the optical disc master 7 is performed. Is taken into a two-segment detector (not shown) to obtain focus information for the objective lens 3.

【0032】また、鏡筒2の上部フランジ部2aの下方
と、軸受筐体11の上面11dとの間には、鏡筒2を上
下動させるために電磁気回路による電磁気駆動手段20
が取り付けられている。
Further, between the lower part of the upper flange portion 2a of the lens barrel 2 and the upper surface 11d of the bearing housing 11, an electromagnetic driving means 20 by an electromagnetic circuit for moving the lens barrel 2 up and down is provided.
Is attached.

【0033】上記した電磁気駆動手段20は、鏡筒2の
上部フランジ部2aにコイルボビン21が取り付けら、
このコイルボビン21に駆動コイル22が巻かれてい
る。また、軸受筐体11の上面11dにセンターポール
23が取り付けら、更に、センターポール23の大径部
23a上に、永久磁石24と、ヨーク25とが積層され
て、ヨーク25はコイルボビン21に巻き付けた駆動コ
イル22と対向しており、駆動コイル22と、ヨーク2
5と、永久磁石24と、センターポール23とで電磁気
回路が形成されている。そして、この電磁気回路では光
学式ディスク原盤7で反射した焦点調整用の戻りサブビ
ーム5bと対応した対物レンズ3への焦点情報に基づい
て駆動コイル22に制御電流を流して出力された電磁力
により、鏡筒2を対物レンズ3の光軸に沿って上下動さ
せるようになっている。また、ヨーク25上には鏡筒2
の上動を規制する上限ストッパ26が取り付けられてい
る。尚、実施例では、上限ストッパ26をヨーク25上
に固定しているが、これに限ることなく、上限ストッパ
26は固定設置した軸受筐体11に対して鏡筒2の上方
向を規制できるものであれば良い。
The above-described electromagnetic drive means 20 includes a coil bobbin 21 attached to the upper flange 2a of the lens barrel 2,
A drive coil 22 is wound around the coil bobbin 21. A center pole 23 is mounted on the upper surface 11d of the bearing housing 11, and a permanent magnet 24 and a yoke 25 are laminated on the large-diameter portion 23a of the center pole 23. The yoke 25 is wound around the coil bobbin 21. The drive coil 22 and the yoke 2
5, the permanent magnet 24, and the center pole 23 form an electromagnetic circuit. In this electromagnetic circuit, a control current is supplied to the drive coil 22 based on focus information to the objective lens 3 corresponding to the return sub-beam 5b for focus adjustment reflected by the optical disk master 7 and an electromagnetic force output. The lens barrel 2 is moved up and down along the optical axis of the objective lens 3. The lens barrel 2 is placed on the yoke 25.
The upper limit stopper 26 for restricting the upward movement of the upper end is mounted. In the embodiment, the upper limit stopper 26 is fixed on the yoke 25. However, the present invention is not limited to this. The upper limit stopper 26 can restrict the upward direction of the lens barrel 2 with respect to the fixedly installed bearing housing 11. Is fine.

【0034】ここで、従来例と異なる点について説明す
る。
Here, differences from the conventional example will be described.

【0035】まず、鏡筒2の小径円筒部2bを、固定設
置した軸受筐体11の貫通孔11a内に圧縮空気の静圧
により浮遊した状態で嵌合させ、圧縮空気を貫通孔11
a内に吐出させることで鏡筒2を上下動可能に支持する
第1静圧空気軸受10Aは、軸受筐体11に形成した第
1圧縮空気入り口11hから取り入れた圧縮空気の静圧
を用いている。
First, the small-diameter cylindrical portion 2b of the lens barrel 2 is fitted into the through hole 11a of the fixedly mounted bearing housing 11 in a floating state by the static pressure of compressed air.
The first static pressure air bearing 10A that supports the lens barrel 2 so that it can move up and down by being discharged into the inside of the bearing housing 11 uses the static pressure of the compressed air taken in from the first compressed air inlet 11h formed in the bearing housing 11. I have.

【0036】ここで、第1静圧空気軸受10Aを動作さ
せるための第1空気道手段として、軸受筐体11内にリ
ング状空気道11e、第1横空気道11f、第2横空気
道11g、第1圧縮空気入り口11h、第1縦空気道1
1iが形成されている。即ち、軸受筐体11の外周部1
1cに形成した第1圧縮空気入り口11hから取り入れ
た圧縮空気は、この第1圧縮空気入り口11hと連通し
た1本の第1横空気道11f及び第1縦空気道11iか
らリング状空気道11eに導かれ、この後、複数の第1
縦空気道11iを介して下段及び上段の第1,第2横空
気道11f,11gから圧縮空気が軸受筐体11の中央
に形成した貫通孔11a内に吐出することで、鏡筒2の
小径円筒部2bを軸受筐体11の貫通孔11a内で圧縮
空気の静圧により浮遊させた状態で、鏡筒2を上下動可
能に支持している。
Here, as first air passage means for operating the first static pressure air bearing 10A, a ring-shaped air passage 11e, a first lateral air passage 11f, and a second lateral air passage 11g are provided in a bearing housing 11. , First compressed air inlet 11h, first vertical air passage 1
1i is formed. That is, the outer peripheral portion 1 of the bearing housing 11
The compressed air taken in from the first compressed air inlet 11h formed in 1c is transferred from one first horizontal air passage 11f and the first vertical air passage 11i communicating with the first compressed air inlet 11h to the ring-shaped air passage 11e. Led, after which a plurality of first
The compressed air is discharged from the lower and upper first and second horizontal air passages 11f and 11g into the through-hole 11a formed in the center of the bearing housing 11 through the vertical air passage 11i, thereby reducing the diameter of the lens barrel 2. The lens barrel 2 is vertically movably supported in a state where the cylindrical portion 2b is floated by the static pressure of compressed air in the through hole 11a of the bearing housing 11.

【0037】次に、鏡筒2を圧縮空気により軸受筐体1
1に対して上限ストッパ26に接触するまで上動させる
第2静圧空気軸受10Bは、軸受筐体11に形成した第
2圧縮空気入り口11pから取り入れた圧縮空気の静圧
を用いている。
Next, the lens barrel 2 is compressed by the compressed air into the bearing housing 1.
The second static pressure air bearing 10B, which is moved upward until it comes into contact with the upper limit stopper 26, uses the static pressure of the compressed air taken in from the second compressed air inlet 11p formed in the bearing housing 11.

【0038】ここで、第2静圧空気軸受10Bを動作さ
せるための第2空気道手段として、軸受筐体11内に第
2圧縮空気入り口11p、第3横空気道11q、第3縦
空気道11rが形成されている。即ち、軸受筐体11の
外周部11cには、第1圧縮空気入り口11hと異なる
第2圧縮空気入り口11pが形成されており、この第2
圧縮空気入り口11pと連通して第3横空気道11qが
貫通孔11a内に達することなく形成され、更に、第3
横空気道11qから上方に向かって第3縦空気道11r
が形成されている。これら第2圧縮空気入り口11p,
第3横空気道11q,第3縦空気道11rによる第2静
圧空気軸受10B用の第2空気道手段は、第1静圧空気
軸受10A用の第1空気道手段とは異なった位置に形成
されているので互いに交わることはない。
Here, as a second air passage means for operating the second hydrostatic air bearing 10B, a second compressed air inlet 11p, a third horizontal air passage 11q, a third vertical air passage are provided in the bearing housing 11. 11r is formed. That is, a second compressed air inlet 11p different from the first compressed air inlet 11h is formed in the outer peripheral portion 11c of the bearing housing 11, and the second compressed air inlet 11p is formed in the outer peripheral portion 11c.
A third lateral air passage 11q communicating with the compressed air inlet 11p is formed without reaching the inside of the through hole 11a.
Third vertical airway 11r upward from horizontal airway 11q
Are formed. These second compressed air inlets 11p,
The second air path means for the second hydrostatic air bearing 10B by the third horizontal air path 11q and the third vertical air path 11r is located at a different position from the first air path means for the first static pressure air bearing 10A. Because they are formed, they do not cross each other.

【0039】また、軸受筐体11の第3縦空気道11r
は、センターポール23の下面23cに形成したリング
状空気道23dに連通し、更に、リング状空気道23d
は小径部23b内の縦空気道23eに連通している。
The third vertical air passage 11r of the bearing housing 11
Communicates with a ring-shaped air passage 23d formed on the lower surface 23c of the center pole 23, and further, the ring-shaped air passage 23d
Communicates with the vertical air passage 23e in the small diameter portion 23b.

【0040】従って、第2静圧空気軸受10B用の第2
空気道手段では、フィルタ(図示せず)を通過した清浄
な圧縮空気が軸受筐体11の第2圧縮空気入り口11p
から進入して、第3横空気道11q,第3縦空気道11
rを通ってセンターポール23のリング状空気道23d
に流入し、このリング状空気道23dと連通した縦空気
道23eを介して圧縮空気が鏡筒2の上部フランジ部2
aの下面側の隙間Sに送り出されるので、この送り出さ
れた圧縮空気が鏡筒2の上部フランジ部2aの下面を押
し上げて鏡筒2を上限ストッパ26に接触規制されるま
で上動させると共に、送り出された圧縮空気はコイルボ
ビン21とセンタ−ポ−ル23との微少隙間を通過して
大気中に流出している。
Therefore, the second static pressure air bearing 10B
In the air passage means, clean compressed air that has passed through a filter (not shown) is supplied to the second compressed air inlet 11 p of the bearing housing 11.
From the third horizontal airway 11q and the third vertical airway 11q.
and 23d of a ring-shaped air passage of the center pole 23
The compressed air flows into the upper flange portion 2 of the lens barrel 2 through the vertical air passage 23e communicating with the ring-shaped air passage 23d.
Since the compressed air is sent out to the gap S on the lower surface side of the lens a, the sent compressed air pushes up the lower surface of the upper flange portion 2a of the lens barrel 2 to move the lens barrel 2 upward until the contact with the upper limit stopper 26 is restricted. The sent compressed air passes through a minute gap between the coil bobbin 21 and the center pole 23 and flows out to the atmosphere.

【0041】上記の構成により、軸受筐体11に形成し
た第1空気道手段の第1圧縮空気入り口11hと、第2
空気道手段の第2圧縮空気入り口11pとを別々に設け
たので、圧縮空気の圧力調整を第1静圧空気軸受10A
による静圧空気軸受機能時と、第2静圧空気軸受10B
よる上動機能時とそれぞれ別々に分離して調整できる。
とくに、第2静圧空気軸受10Bよる上動機能時に第1
静圧空気軸受10Aの軸受性能が最良になる圧力設定値
に影響を及ぼさなくなり最良の空気軸受性能が発揮でき
る。また、第2静圧空気軸受10Bよる上動機能時に
は、常時圧縮空気が供給されている第1圧縮空気入り口
11hと連通した第1静圧空気軸受10Aのラインに関
係なく、第2圧縮空気入り口11pに供給する圧縮空気
を電磁バルブ等(図示せず)によりON/OFFするこ
とにより、鏡筒2の上動を圧縮空気によりON/OFF
制御できる。
With the above arrangement, the first compressed air inlet 11h of the first air passage means formed in the bearing housing 11 and the second compressed air inlet 11h
Since the second compressed air inlet 11p of the air passage means is separately provided, the pressure of the compressed air can be adjusted by the first static pressure air bearing 10A.
And the second static pressure air bearing 10B
It can be adjusted separately from the time of the upward movement function.
In particular, the first hydrostatic air bearing 10B has the first
The pressure setting value at which the bearing performance of the hydrostatic air bearing 10A becomes the best is not affected, and the best air bearing performance can be exhibited. In addition, during the upward movement function by the second static pressure air bearing 10B, the second compressed air inlet is independent of the line of the first static pressure air bearing 10A that communicates with the first compressed air inlet 11h to which compressed air is always supplied. The upward movement of the lens barrel 2 is turned on / off by the compressed air by turning on / off the compressed air supplied to the 11p by an electromagnetic valve or the like (not shown).
Can control.

【0042】例えば、光学式ディスク原盤7への記録
前、待機及び光学式ディスク原盤7の装着等の時に、鏡
筒2の下端部が光学式ディスク原盤7に接触しないよう
に鏡筒2を上方向に逃がす必要がある、この時、発熱に
伴う弊害を引き起こす駆動コイル22へのDC通電によ
る上昇作動ではなく、第2圧縮空気入り口11pに供給
する圧縮空気で鏡筒2を上限ストッパ26に接触するま
で上方向に上昇保持させておく。
For example, before recording on the optical disk master 7, during standby, and during mounting of the optical disk master 7, the lens barrel 2 is raised so that the lower end of the lens barrel 2 does not contact the optical disk master 7. At this time, the lens barrel 2 is brought into contact with the upper limit stopper 26 with the compressed air supplied to the second compressed air inlet 11p, instead of the ascending operation by the DC current supplied to the drive coil 22, which causes a problem due to heat generation. And keep it raised upward until it does.

【0043】次に、光学式ディスク原盤7を装着した記
録開始時に、自動焦点調整装置1Bが自動焦点引き込み
動作を開始する。軸受筐体11に形成した第1圧縮空気
入り口11hから取り込んだ圧縮空気で鏡筒2を軸受筐
体11に対して浮遊させつつ、駆動コイル22へのDC
通電により対物レンズ3を固定した鏡筒2を下降動作さ
せ、光学式ディスク原盤7で反射した焦点調整用の戻り
のサブビ−ム5bで対物レンズ3の焦点情報を得て、光
学式ディスク原盤7のレジスト面に対し対物レンズ3へ
の焦点位置を合致追従させるように駆動コイル22に制
御電流を流し自動焦点動作を開始する、この後、記録用
のメインビ−ム4を対物レンズ3に入光させ、光学式デ
ィスク原盤7のレジスト面への露光記録開始する、この
露光記録中自動焦点動作を継続させる。この自動焦点引
き込み動作が完了した時、第2圧縮空気入り口11pに
供給する圧縮空気をOFFにして圧縮空気の吐出を止め
る。このため固定部のセンタ−ポ−ル23と可動部の鏡
筒2とコイルボビン21とで囲まれた隙間Sは加圧状態
から常圧状態になり、鏡筒2の加圧状態で起こる異常振
動は無くなる。従って、光学式ディスク原盤7に記録さ
れた信号はフォ−カス、トラッキング性能共に異常信号
が無くなり高品質の記録原盤ができる。
Next, at the start of recording with the optical disc master 7 mounted, the automatic focus adjusting device 1B starts an automatic focus pull-in operation. While the lens barrel 2 is floated with respect to the bearing housing 11 with the compressed air taken in from the first compressed air inlet 11h formed in the bearing housing 11, the DC to the drive coil 22 is increased.
The lens barrel 2 to which the objective lens 3 is fixed is moved downward by energization, and the focus information of the objective lens 3 is obtained by the return sub-beam 5b for focus adjustment reflected by the optical disk master 7, and the optical disk master 7 is obtained. A control current is applied to the drive coil 22 so that the focal position of the objective lens 3 coincides with and follows the resist surface, and an automatic focusing operation is started. Thereafter, the main beam 4 for recording enters the objective lens 3. Then, the automatic focusing operation during the exposure recording, in which the exposure recording on the resist surface of the optical disk master 7 is started, is continued. When the automatic focusing operation is completed, the compressed air supplied to the second compressed air inlet 11p is turned off to stop the discharge of the compressed air. Therefore, the gap S surrounded by the center part 23 of the fixed part, the lens barrel 2 of the movable part, and the coil bobbin 21 changes from a pressurized state to a normal pressure state, and abnormal vibration occurs when the lens barrel 2 is pressurized. Is gone. Therefore, the signal recorded on the optical disk master 7 has no abnormal signal in both focus and tracking performance, and a high quality recording master can be obtained.

【0044】光学式ディスク原盤7への記録完了時及び
異常発生による記録停止時に、記録用のメインビ−ム4
の対物レンズ3への入光を停止させ、同時に自動焦点追
従動作を停止させ、鏡筒2を光学式ディスク原盤7から
離すため、駆動コイル22へのDC通電により鏡筒2を
上限ストッパ26に接触するまで上昇動作させ、同時に
第2圧縮空気入り口11pに供給する圧縮空気をONに
して鏡筒2が上限ストッパ26に接触するまでの圧縮空
気の吐出量が確保できるまでの時定数例えば5秒程度に
設定して、発熱に伴う弊害を引き起こす駆動コイル22
へのDC通電を停止させ、第2圧縮空気入り口11pか
らの圧縮空気の吐出のみで鏡筒2を上限ストッパ26に
接触させるように上昇保持させる。
When recording on the optical disk master 7 is completed and when recording is stopped due to an abnormality, the main beam 4 for recording is
Of the objective lens 3 is stopped, the automatic focus following operation is stopped at the same time, and the lens barrel 2 is separated from the optical disk master 7. A time constant until the compressed air supplied to the second compressed air inlet 11p is turned on and the discharge amount of the compressed air until the lens barrel 2 contacts the upper limit stopper 26 can be secured, for example, 5 seconds. Drive coil 22 that causes adverse effects due to heat generation.
Is stopped, and the lens barrel 2 is raised and held so as to contact the upper limit stopper 26 only by discharging the compressed air from the second compressed air inlet 11p.

【0045】上記により、第2静圧空気軸受10Bは、
鏡筒2内に固定した対物レンズ3への自動焦点非動作
時、自動焦点引き込み動作時、自動焦点動作終了時及び
自動焦点動作異常時に圧縮空気を鏡筒2の上部フランジ
部2aに向けて吐出させるているので、上記各動作時に
電磁気駆動手段20の駆動コイル22への通電でなく、
圧縮空気の吐出により対物レンズ3を固定した鏡筒2を
光学式ディスク原盤7の上方で浮上保持させることがで
きる。
As described above, the second hydrostatic air bearing 10B is
Compressed air is discharged toward the upper flange portion 2a of the lens barrel 2 when the automatic focusing on the objective lens 3 fixed in the lens barrel 2 is not performed, when the automatic focusing operation is performed, when the automatic focusing operation is completed, and when the automatic focusing operation is abnormal. Therefore, in each of the above operations, the drive coil 22 of the electromagnetic drive means 20 is not energized,
By discharging the compressed air, the lens barrel 2 to which the objective lens 3 is fixed can be floated and held above the optical disk master 7.

【0046】一方、第2静圧空気軸受10Bは、鏡筒2
内に固定した対物レンズ3への自動焦点引き込み動作が
完了して自動焦点動作中には圧縮空気の吐出を停止させ
ることで、自動焦点作動中の光学式ディスク原盤7への
記録時及び再生時、第2静圧空気軸受10Bによる圧縮
空気の吐出による弊害を防止する効果がある。
On the other hand, the second static pressure air bearing 10B
When the automatic focusing operation to the objective lens 3 fixed inside is completed and the discharge of the compressed air is stopped during the automatic focusing operation, the recording and reproduction on the optical disk master 7 during the automatic focusing operation are performed. This has the effect of preventing adverse effects due to the discharge of compressed air by the second static pressure air bearing 10B.

【0047】尚、上記した実施例では、本発明に係る静
圧空気軸受を用いた自動焦点調整装置1Bを光学式ディ
スク原盤装置に適用して説明したが、これに限定される
ものでもなく、対物レンズを固定した鏡筒を軸受筐体内
で静圧空気軸受により浮遊させて使用するものであれば
いかなる物にも適用できる。
In the above-described embodiment, the automatic focus adjusting device 1B using the static pressure air bearing according to the present invention has been described as applied to the optical disk master device. However, the present invention is not limited to this. The present invention can be applied to any object in which a lens barrel to which an objective lens is fixed is floated by a static pressure air bearing in a bearing housing.

【0048】[0048]

【発明の効果】以上詳述した本発明に係る静圧空気軸受
を用いた自動焦点調整装置において、請求項1記載によ
ると、とくに、鏡筒の小径円筒部を、固定設置した軸受
筐体の貫通孔内に圧縮空気の静圧により浮遊した状態で
嵌合させ、軸受筐体内に形成した第1空気道手段を介し
て圧縮空気を前記貫通孔内に吐出させることで鏡筒を上
下動可能に支持する第1静圧空気軸受と、軸受筐体内に
形成した第1空気道手段とは異なる第2空気道手段を介
して圧縮空気を鏡筒の上部フランジ部に向けて吐出させ
ることで、鏡筒を前記軸受筐体に対して上限ストッパに
接触するまで上動させる第2静圧空気軸受とを分離して
設けているので、第1静圧空気軸受と第2静圧空気軸受
とをそれぞれ独立して動作させることができる。
According to the first aspect of the present invention, there is provided an automatic focusing device using a hydrostatic air bearing according to the present invention, wherein a small diameter cylindrical portion of a lens barrel is fixedly installed. The lens barrel can be moved up and down by being fitted into the through hole in a floating state by the static pressure of the compressed air, and discharging the compressed air into the through hole through the first air path means formed in the bearing housing. By discharging the compressed air toward the upper flange portion of the lens barrel through a first static pressure air bearing that is supported by the first and second air path means different from the first air path means formed in the bearing housing, Since the second static pressure air bearing for moving the lens barrel up with respect to the bearing housing until it comes into contact with the upper limit stopper is provided separately, the first static pressure air bearing and the second static pressure air bearing are separated. Each can be operated independently.

【0049】また、請求項2記載によると、第2静圧空
気軸受は、対物レンズへの自動焦点非動作時、自動焦点
引き込み動作時、自動焦点動作終了時及び自動焦点動作
異常時に圧縮空気を鏡筒の上部フランジ部に向けて吐出
させるているので、上記各動作時に電磁気駆動手段への
通電でなく、圧縮空気の吐出により対物レンズを固定し
た鏡筒を上方で浮上保持させることができる。
According to the second aspect, the second hydrostatic air bearing supplies compressed air to the objective lens at the time of non-automatic focusing operation, at the time of automatic focusing operation, at the end of the automatic focusing operation, and at the time of abnormal automatic focusing operation. Since the discharge is performed toward the upper flange portion of the lens barrel, the lens barrel to which the objective lens is fixed can be floated and held upward by discharging compressed air instead of energizing the electromagnetic driving means during each of the above operations.

【0050】一方、第2静圧空気軸受は、対物レンズへ
の自動焦点引き込み動作が完了して自動焦点動作中には
圧縮空気の吐出を停止させることで、自動焦点作動中の
記録時及び再生時、第2静圧空気軸受による圧縮空気の
吐出による弊害を防止する効果がある。
On the other hand, the second static pressure air bearing stops the discharge of the compressed air during the automatic focusing operation after the automatic focusing operation to the objective lens is completed, so that the recording and reproduction during the automatic focusing operation are performed. At this time, there is an effect of preventing adverse effects due to the discharge of compressed air by the second static pressure air bearing.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(A),(B)は本発明に係る静圧空気軸受を
用いた自動焦点調整装置を説明するための図であり、
(A)は(B)のN−N矢視断面図であり、(B)は縦
断面図である。
FIGS. 1A and 1B are diagrams for explaining an automatic focus adjustment device using a static pressure air bearing according to the present invention;
(A) is an NN cross-sectional view of (B), and (B) is a longitudinal cross-sectional view.

【図2】(A),(B)は従来の静圧空気軸受を用いた
自動焦点調整装置を説明するための図であり、(A)は
(B)のM−M矢視断面図であり、(B)は縦断面図で
ある。
FIGS. 2A and 2B are views for explaining a conventional automatic focusing device using a static pressure air bearing, and FIG. 2A is a cross-sectional view taken along line MM of FIG. FIG. 4B is a longitudinal sectional view.

【符号の説明】[Explanation of symbols]

1B…静圧空気軸受を用いた自動焦点調整装置、2…鏡
筒、2a…上部フランジ部、2b…小径円筒部、3…対
物レンズ、4…記録用のメインビーム、5…焦点調整用
のサブビーム、7…光学式ディスク原盤、10A…第1
静圧空気軸受、10B…第2静圧空気軸受、11…軸受
筐体、11a…貫通孔、11e…リング状空気道、11
f…第1横空気道、11g…第2横空気道、11h…第
1圧縮空気入り口、11i…第1縦空気道、11p…第
2圧縮空気入り口、11q…第3横空気道、11r…第
3縦空気道、11e、11f、11g、11h、11i
…第1空気道手段、11p、11q、11r…第2空気
道手段、20…電磁気駆動手段、21…コイルボビン、
22…駆動コイル、23…センタ−ポ−ル、23d…リ
ング状空気道、23e…縦空気道、24…永久磁石、2
5…ヨーク、26…上限ストッパ。
1B: automatic focus adjustment device using a static pressure air bearing, 2: lens barrel, 2a: upper flange portion, 2b: small diameter cylindrical portion, 3: objective lens, 4: main beam for recording, 5: focus adjustment Sub beam, 7: optical disk master, 10A: first
Static pressure air bearing, 10B: second static pressure air bearing, 11: bearing housing, 11a: through hole, 11e: ring-shaped air path, 11
f: 1st horizontal airway, 11g ... 2nd horizontal airway, 11h ... 1st compressed air inlet, 11i ... 1st vertical airway, 11p ... 2nd compressed air inlet, 11q ... 3rd horizontal airway, 11r ... Third vertical airway, 11e, 11f, 11g, 11h, 11i
... first airway means, 11p, 11q, 11r ... second airway means, 20 ... electromagnetic drive means, 21 ... coil bobbin,
Reference numeral 22: drive coil, 23: center pole, 23d: ring-shaped airway, 23e: vertical airway, 24: permanent magnet, 2
5: yoke, 26: upper limit stopper.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】重力方向に向けられ、且つ、上部に大径の
上部フランジ部を形成し、且つ、この上部フランジ部の
下方に形成した小径円筒部内に対物レンズを固定した鏡
筒と、 前記鏡筒の小径円筒部を、固定設置した軸受筐体の貫通
孔内に圧縮空気の静圧により浮遊した状態で嵌合させ、
前記軸受筐体内に形成した第1空気道手段を介して前記
圧縮空気を前記貫通孔内に吐出させることで前記鏡筒を
上下動可能に支持する第1静圧空気軸受と、 前記鏡筒に取り付けた駆動コイルと、該駆動コイルと対
向して前記軸受筐体に取り付けた永久磁石及びヨークと
で電磁気回路を形成し、この電磁気回路で前対物レンズ
への焦点情報に基づいて出力された電磁力により前記鏡
筒を上下動させる電磁気駆動手段と、 前記軸受筐体内に形成した第1空気道手段とは異なる第
2空気道手段を介して圧縮空気を前記鏡筒の上部フラン
ジ部に向けて吐出させることで、前記鏡筒を前記軸受筐
体に対して上限ストッパに接触するまで上動させる第2
静圧空気軸受とを備えたことを特徴とする静圧空気軸受
を用いた自動焦点調整装置。
1. A lens barrel which is directed in the direction of gravity, has a large-diameter upper flange formed at an upper part thereof, and has an objective lens fixed in a small-diameter cylindrical part formed below the upper flange. The small-diameter cylindrical part of the lens barrel is fitted in the through hole of the fixedly installed bearing housing in a floating state by the static pressure of compressed air,
A first static pressure air bearing for vertically supporting the lens barrel by discharging the compressed air into the through-hole through a first air path means formed in the bearing housing; An electromagnetic circuit is formed by the attached drive coil, the permanent magnet and the yoke attached to the bearing housing in opposition to the drive coil, and the electromagnetic circuit is output by the electromagnetic circuit based on focus information to the front objective lens. Compressed air is directed to an upper flange of the lens barrel via electromagnetic driving means for moving the lens barrel up and down by force, and second air path means different from the first air path means formed in the bearing housing. By discharging, the lens barrel is moved up to the bearing housing until it comes into contact with an upper limit stopper.
An automatic focus adjustment device using a static pressure air bearing, comprising: a static pressure air bearing.
【請求項2】請求項1記載の静圧空気軸受を用いた自動
焦点調整装置において、 前記第2静圧空気軸受は、前記対物レンズへの自動焦点
非動作時、自動焦点引き込み動作時、自動焦点動作終了
時及び自動焦点動作異常時に前記鏡筒の上部フランジ部
に向けて前記圧縮空気を吐出させる一方、前記対物レン
ズへの自動焦点引き込み動作が完了して自動焦点動作中
には前記圧縮空気の吐出を停止させることを特徴とする
静圧空気軸受を用いた自動焦点調整装置。
2. An automatic focus adjusting device using a static pressure air bearing according to claim 1, wherein said second static pressure air bearing operates automatically when said objective lens is not automatically focused, when automatically focused, and when said automatic focus pull-in operation is performed. The compressed air is discharged toward the upper flange portion of the lens barrel at the end of the focus operation and at the time of an abnormal auto focus operation, and the compressed air is discharged during the auto focus operation when the automatic focus pull-in operation to the objective lens is completed. Automatic focusing device using a static pressure air bearing, characterized in that it stops the discharge of fluid.
JP14623699A 1999-05-26 1999-05-26 Automatic focusing device using static pressure air bearing Pending JP2000339715A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14623699A JP2000339715A (en) 1999-05-26 1999-05-26 Automatic focusing device using static pressure air bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14623699A JP2000339715A (en) 1999-05-26 1999-05-26 Automatic focusing device using static pressure air bearing

Publications (1)

Publication Number Publication Date
JP2000339715A true JP2000339715A (en) 2000-12-08

Family

ID=15403192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14623699A Pending JP2000339715A (en) 1999-05-26 1999-05-26 Automatic focusing device using static pressure air bearing

Country Status (1)

Country Link
JP (1) JP2000339715A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005015627A1 (en) * 2005-04-06 2006-10-12 Carl Zeiss Smt Ag Optical imaging device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005015627A1 (en) * 2005-04-06 2006-10-12 Carl Zeiss Smt Ag Optical imaging device
US7548387B2 (en) 2005-04-06 2009-06-16 Carl Zeiss Smt Ag Optical imaging device

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