JP2000339617A - Production of magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To regulate track widths with high accuracy even when these track widths are formed narrow with an increase in recording density. SOLUTION: In the process for producing the magnetic head by butting a pair of magnetic core half body blocks against each other to manufacture magnetic head blocks and subjecting their magnetic recording medium sliding surfaces to grooving to regulate the track widths of the magnetic gaps by a grinding wheel 30, the magnetic head blocks 26 are arranged with the magnetic gaps in such a manner that the magnetic gaps exist diagonal according to azimuth angles with a direction approximately orthogonal with the magnetic recording medium sliding surfaces and the magnetic head blocks 26 are previously subjected to such processing that the end faces on the advance side of the grinding wheel is formed as the surface approximately orthogonal with the advance direction of the grinding wheel 30.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for, for example, a video tape recorder (VTR) or a data storage device which performs recording and / or reproduction at a high recording density, and is applied to a high coercive force magnetic recording medium such as a vapor deposition tape. The present invention relates to a method for manufacturing a magnetic head for performing recording and / or reproduction on the other hand.

[0002]

2. Description of the Related Art In recent years, in the field of magnetic recording, the recording density of recording signals has been increasing, and a magnetic recording medium having a high coercive force and a high residual magnetic flux density, such as a ferromagnetic metal material, has been nonmagnetically supported. A vapor deposition tape or the like directly attached to a body has been used. Accordingly, it is required that the core material of the magnetic head has a high saturation magnetic flux density and a high magnetic permeability.

In order to satisfy such requirements, as shown in FIG. 28, a ferrite is used as an auxiliary core material, and a metal magnetic film having a high saturation magnetic flux density is formed on the ferrite as a main core material. Metal-in-gap (Meta) in which a magnetic gap is formed by a film
An (in gap) type magnetic head (hereinafter, referred to as an MIG head) 100 has been proposed.

The MIG head 100 has a pair of magnetic core halves 101 and 102 which are separately manufactured on the left and right sides of a magnetic gap g located substantially at the center of the surface in contact with the magnetic recording medium.
The magnetic gap forming surfaces, which are butting surfaces, are butted and joined via a non-magnetic material at positions where the track width portions substantially coincide with each other.

In the MIG head 100, a pair of magnetic core halves 101 and 102 are
4 and the metal magnetic films 105 and 106 form a closed magnetic circuit. Among these, the magnetic core bases 103 and 104 are formed of a soft magnetic oxide material such as ferrite, for example, and serve as auxiliary core portions that constitute a closed magnetic circuit. on the other hand,
The metal magnetic films 105 and 106 are to be main cores constituting a closed magnetic circuit, have a high saturation magnetic flux density, and are formed over the entire surface including the magnetic gap forming surface.

[0006] In the MIG head 100, track width regulating grooves 107, 108, 109, 110 for regulating the track width T _W of the magnetic gap g are provided on the surfaces of the magnetic core bases 103, 104 facing the magnetic gap forming surfaces. Are formed in an arc shape in the depth direction from the vicinity of both ends of the magnetic gap g. The track width regulating grooves 107, 108, 109 and 110 are filled with a non-magnetic material 111 such as glass for the purpose of securing the contact characteristics with the magnetic recording medium and preventing uneven wear due to sliding contact. ing.

Further, in the MIG head 100, the magnetic gap forming surfaces facing the surface of the magnetic core substrates 103, 104, as well as regulating the depth D _P of the magnetic gap g, the winding for winding a coil (not shown) Wire groove 11
2 and 113 are formed to have a substantially rectangular cross section.

In the MIG head 100, since the metal magnetic films 105 and 106 constituting the magnetic gap g have a high saturation magnetic flux density, the intensity of the magnetic field generated from the magnetic gap g increases. Therefore, MIG head 1
00 is used for a video tape recorder (VTR) or data storage device that performs recording and reproduction at a high recording density, and is suitable for performing recording and reproduction on a high coercive force magnetic recording medium such as a vapor deposition tape. ing.

In some of such magnetic heads, a magnetic gap g is formed obliquely in accordance with the azimuth angle with respect to a direction substantially perpendicular to the sliding direction of the magnetic recording medium. As a device provided with such a magnetic head, a helical scan type recording / reproducing device can be mentioned.

In the following magnetic heads shown in FIGS. 31 to 36, the magnetic head 1 shown in FIG.
Descriptions of parts equivalent to 00 are omitted,
The same reference numerals are used in the drawings.

As shown in FIG. 29, this recording / reproducing apparatus has a set of magnetic heads having different azimuth angles arranged in a positional relationship facing a substantially cylindrical drum 114. Magnetic gaps are mounted on the peripheral surface as desired. The recording / reproducing apparatus uses the magnetic tape 1 obliquely hung on the drum 114.
In contrast to the magnetic head 15, one of the magnetic heads (hereinafter, referred to as head A) 116 writes a recording signal on the magnetic tape 115, and the other magnetic head (hereinafter, referred to as head B). The operation of recording a new magnetic recording signal 117 in a positional relationship adjacent to one side of the previous recording signal is sequentially repeated, and the recording signal is densely recorded on the magnetic tape 115.

That is, the recording / reproducing apparatus includes a drum 1
As the 14 rotates, it runs in a predetermined direction relative to the magnetic tape 115. The magnetic tape 115 has a first recording track 118 written by a head A 116 and a head B, as shown in FIG.
The second recording track 119 written by the step 117 is formed alternately.

[0013]

In the above-described recording / reproducing apparatus, as shown in FIG. 30, when recording tracks are alternately written by the respective magnetic heads, the recording tracks slightly overlap the previously written recording tracks. The next recording track is written to This is to eliminate a non-recorded area (a so-called guard band) between recording tracks and increase the recording density.

When such recording is performed, the azimuth angle of each magnetic head is changed to minimize the interference between adjacent recording tracks. Side erase may occur. This side erase is caused by a leakage magnetic field generated at both ends in the track width direction in the vicinity of the magnetic gap of the magnetic head. When such side erase occurs, a sufficient signal cannot be taken out from each recording track, resulting in signal deterioration. Cause a great deal of.

For example, FIG. 31 is an enlarged view of the magnetic head shown in FIG. 28 in the vicinity of the magnetic gap.
In this magnetic head, the track width regulating grooves 107, 10
8, 109 and 110 are formed in the depth direction on the abutting surfaces of the respective magnetic core bases 103 and 104. In this case, however, due to misalignment at the time of abutting, the shape of the corners of the metal magnetic films 105 and 106, and the like. Thus, there is a shape uncertain portion at the end of the magnetic gap. As a result, the side erasing is likely to occur.

Therefore, as shown in FIG. 32, after the magnetic core bases 103 and 104 are brought into contact with each other, the groove of the magnetic recording medium sliding surface is left as long as the track width, as shown in FIG. 2. Description of the Related Art A magnetic head is known, which is processed and arranged obliquely according to an azimuth angle.
In this magnetic head, since the track width is determined by the groove processing after the butting, the shape uncertainties due to the positional deviation at the time of the butting and the corner shapes of the metal magnetic films 105 and 106 are not formed.

However, in this case, the metal magnetic film 10
The portion protruding from the track width of 5,106 slides on the adjacent track, and the leakage magnetic field from this portion causes the side erase.

In FIGS. 31 and 32, a plurality of small arrows schematically show the leakage magnetic field generated around the magnetic gap g. Arrow C indicates the sliding direction of the magnetic head with respect to the magnetic tape 115. Also in FIG. 33 listed below, FIG.
Similarly to FIG. 32, a plurality of small arrows schematically show a leakage magnetic field generated around the magnetic gap g. An arrow C indicates the sliding direction of the magnetic head with respect to the magnetic tape 115.

As a countermeasure, a magnetic head and a thin film head whose magnetic gap has been devised with a focused ion beam or the like have been developed. From the viewpoint of mass productivity and control of the leakage magnetic field, FIG. As shown in the figure, a magnetic head in which the magnetic gap g is formed obliquely to the direction substantially perpendicular to the sliding direction C according to the azimuth angle and the track width regulating groove is formed along the sliding direction C is given. Can be.

In this magnetic head, since the magnetic head has a position configuration in which a leakage magnetic field is generated from a continuous interface in the running direction, the magnetic influence on the adjacent recording tracks is limited to a very small width (submicron region). And the effect of the leakage magnetic field can be reduced.

In the magnetic head, if the track width is reduced in response to the increase in recording density, it is necessary to regulate the track width with high dimensional accuracy. Further, in this magnetic head, it is necessary to form a magnetic gap with a more inclined azimuth angle in order to reduce crosstalk noise in a recording format due to narrow tracks. Furthermore, when manufacturing this magnetic head, in order to obtain more magnetic heads by cutting out from a head block of a specified length, the width of a grindstone used for groove processing for regulating track width is reduced. There is a need.

However, when manufacturing the above-described magnetic head, as shown in FIGS. 34 and 35, the grindstone 121 enters the side surface of the head block 120 at an angle in consideration of the azimuth angle β. Will be done.

For this reason, when the grindstone 121 enters the side face of the head block 120 obliquely, the grindstone 121 is warped by the widthwise reaction force D generated on the grindstone 121, and the grindstone 121 is moved in the approach direction of the grindstone 121. In some cases, displacement occurred. As a result, by accumulating and releasing the amount of deflection of the grindstone 121 generated during the grinding process, meandering occurs in the processing locus of the grindstone 121, that is, the groove 122 that regulates the track width as shown in FIG. It was sometimes impossible to regulate with high precision.

Therefore, the present invention has been proposed in view of such a conventional situation, and even when the track width is narrowed in accordance with the increase in recording density, the track width can be accurately determined. It is an object of the present invention to provide a method of manufacturing a magnetic head which can be regulated.

[0025]

According to a method of manufacturing a magnetic head according to the present invention, which achieves this object, a pair of magnetic core half blocks are abutted to form a magnetic head block, and the magnetic recording medium slide surface is formed on the magnetic head block. In a method of manufacturing a magnetic head in which a groove is formed to regulate a track width of a magnetic gap by a grindstone, a magnetic head block is tilted in accordance with an azimuth angle with respect to a direction in which a magnetic gap is substantially perpendicular to a sliding direction of a magnetic recording medium. In addition, the magnetic head block is preliminarily machined so that the end face on the whetstone entry side is substantially perpendicular to the entry direction of the whetstone.

As described above, in the method of manufacturing a magnetic head according to the present invention, since the end face of the magnetic head block on the grindstone entry side is a surface that is substantially perpendicular to the direction in which the grindstone enters, the grindstone is positioned with respect to the magnetic head block. As a result, the grindstone can enter in a substantially vertical direction, and the stable straightness of the grindstone can be secured. Therefore, it is possible to reduce the influence of the reaction force of the grindstone generated when the grindstone enters the magnetic head block obliquely, and it is possible to form the groove for regulating the track width with high precision.

According to a method of manufacturing a magnetic head according to the present invention for achieving the above object, a magnetic head block is manufactured by abutting a pair of magnetic core half-blocks, and a magnetic gap is formed on a sliding surface of the magnetic recording medium by a grindstone. In a method of manufacturing a magnetic head for performing groove processing for regulating a track width of a magnetic head,
The magnetic head block is disposed so that the magnetic gap is oblique in accordance with the azimuth angle with respect to a direction substantially perpendicular to the sliding direction of the magnetic recording medium. An auxiliary member having an end surface shape substantially orthogonal to the approach direction is provided.

As described above, in the method of manufacturing a magnetic head according to the present invention, the auxiliary member having an end surface shape that is substantially perpendicular to the direction in which the grindstone enters is disposed in contact with the end surface of the magnetic head block on the grindstone entry side. As a result, the grindstone enters substantially perpendicularly to the auxiliary member, and stable straightness of the grindstone can be secured. Therefore, it is possible to reduce the influence of the reaction force of the grindstone generated when the grindstone enters the magnetic head block obliquely, and it is possible to form the groove for regulating the track width with high precision.

In the method of manufacturing a magnetic head according to the present invention, a plurality of magnetic head blocks are arranged in the sliding direction of the magnetic recording medium, and the magnetic gap of each magnetic head block is substantially perpendicular to the sliding direction of the magnetic recording medium. The grooves may be arranged obliquely to the direction according to the azimuth angle, and the grooves may be formed along the sliding direction of the magnetic recording medium.

In this case, the influence of the reaction force of the grindstone generated when the grindstone enters each magnetic head block obliquely can be reduced by arranging a plurality of these magnetic head blocks side by side, and the track width is regulated. Can be formed with high precision.

[0031]

Embodiments of the present invention will be described below in detail with reference to the drawings.

A magnetic head manufactured by the method of manufacturing a magnetic head to which the present invention is applied uses ferrite as an auxiliary core material and has a high saturation magnetic flux density on the ferrite, as shown in FIGS. 1 and 2, for example. A metal-in-gap (Meta) in which a metal magnetic film is formed as a main core material and a magnetic gap portion is formed by the metal magnetic film.
(in Gap) type magnetic head (hereinafter, referred to as MIG head) 1. FIG. 1 is a perspective view for explaining the configuration of the MIG head 1, and FIG.
FIG. 3 is a plan view for explaining a configuration of a magnetic recording medium sliding surface of the MIG head 1.

The MIG head 1 is separately manufactured on the left and right sides with a magnetic gap g located substantially at the center of a sliding surface 1a of a head that slides on a tape-shaped magnetic recording medium (hereinafter referred to as a magnetic tape). Pair of magnetic core halves 2 and 3
The magnetic gap forming surfaces, which are butting surfaces, are butted and joined via a non-magnetic material at positions where the track width portions substantially coincide with each other. The magnetic gap g is formed obliquely at a predetermined azimuth angle α with respect to the sliding direction A of the head with respect to the magnetic tape.

In the MIG head 1, the pair of magnetic core halves 2 and 3 are composed of magnetic core bases 4 and 5 and metal magnetic films 6 and 5.
7 together form a closed magnetic circuit. The magnetic core substrates 4 and 5 are made of, for example, Mn-Zn ferrite, Ni-Z
formed of an oxide soft magnetic material such as n-based ferrite,
It is an auxiliary core that forms a closed magnetic circuit. On the other hand, the metal magnetic films 6 and 7 are to be main cores constituting a closed magnetic circuit, have a high saturation magnetic flux density, and are formed over the entire surface including the magnetic gap forming surface.

In the MIG head 1, the sliding surface 1a is moved in the sliding direction A to adjust the contact state with the magnetic tape.
Is formed in a substantially circular arc shape along.

The sliding surface 1a of the MIG head 1 has
Track width regulating grooves 8, 9 for regulating the track width T _W of the magnetic gap g are formed. The track width regulating grooves 8 and 9 are formed substantially parallel to each other along the sliding direction A. The track width regulating grooves 8 and 9 have
Each is filled with a non-magnetic material 10 such as glass for the purpose of ensuring the contact characteristics with the magnetic tape and preventing uneven wear due to sliding contact.

The sliding surface 1a of the MIG head 1 has
The contact width regulating grooves 11 and 12 for adjusting the contact width T _C with the magnetic tape are formed. The contact width regulating grooves 11 and 12 are formed substantially parallel to each other along the sliding direction A.

In the MIG head 1, the surface of the magnetic core bases 4, 5 facing the magnetic gap forming surface regulates the depth D _P of the magnetic gap g and is used for winding a coil (not shown). The line grooves 13 and 14 are formed with a substantially rectangular cross section.

In the MIG head 1 configured as described above, since the metal magnetic films 6 and 7 constituting the magnetic gap g have a high saturation magnetic flux density, the magnetic field intensity generated from the magnetic gap g increases. Therefore, MIG head 1
Is used for a video tape recorder (VTR) or a data storage device that performs recording and / or reproduction at a high recording density, and is used for recording and / or reproduction on a high coercive force magnetic recording medium such as a vapor deposition tape. It is suitable.

Next, a method for manufacturing a magnetic head to which the present invention is applied will be described in detail.

The method of manufacturing a magnetic head described below
In this method, a plurality of head blocks having magnetic gaps formed at equal intervals are formed, and the head blocks are divided into individual head chips, which are used as individual magnetic heads.

First, as shown in FIG. 3, an oxide magnetic material such as Mn—Zn-based ferrite and Ni—Zn-based ferrite has a length of 34.5 mm, a width of 2.5 mm, and the like.
A substantially plate-shaped substrate 20 having a thickness of about 1 mm is prepared. The base 20 becomes the magnetic core halves 4 and 5 in the magnetic head 1 described above.

Next, as shown in FIG. 4, a glass groove 21 is formed on one main surface of the base 20. This glass groove 21
Is a groove into which the glass is heated and melted and poured in order to maintain the bonding strength between the cores of the head block. Thereby, in the glass groove 21, it is possible to improve the adhesive force at the time of bonding between the cores and to relax the stress at the time of forming the metal magnetic film described later. Here, for example, the glass groove 21 has a width of about 30 μm and a depth of about 100 μm.

In the case where the core blocks are bonded together by metal bonding or the like without flowing the glass, the glass grooves 21 shown in FIG. 4 need not be formed.

Next, as shown in FIG. 5, on the main surface of the base 20, a winding groove 22 for regulating the gap depth of the magnetic gap and winding the winding is formed. This winding groove 22
The shape of the cross section 22a on the side to be the sliding surface 1a of the magnetic head 1 described above is
It is formed with an inclination angle of about ゜, and is formed as a substantially trapezoidal groove having a depth of about 300 μm. The opening width of the winding groove 22 is determined by an electric circuit of a magnetic device using the magnetic head. That is, the opening width of the winding groove 22 is determined from the cross-sectional area in consideration of the electric resistance value of the magnetic head or the number of windings satisfying the inductance. Here, for example, the inclination angle of the section 21a is 45 ° and the depth is 300.
μm and a winding groove 22 having an opening width of about 500 μm.

Then, while improving the gap accuracy,
In order to suppress a chemical reaction between the base 20 and the metal magnetic film, which will be described in detail later, the main surface of the base 20 is polished by mirror finishing or the like so that the surface roughness is, for example, about 20 to 100.

Next, as shown in FIG. 6, a metal magnetic film 23 having a thickness of, for example, about 4 μm is formed on the main surface of the base 20. Here, as the metal magnetic film 23, for example, F
e-Si, Fe-Si-Al, Fe-Ga-Si-Ru
A crystalline soft magnetic material based on the above can be used. Also, for example, FeTaN sputtered in argon containing nitrogen with a FeTa alloy as a target, or a composition in which part or all of Ta in the FeTaN is replaced with Nb or Hf, or N in the FeTaN A composition in which part or all of the composition is replaced with O, C, B, or the like, or a soft magnetic material similar to these can be used. Further, an amorphous soft magnetic material or the like can be used.

Before the metal magnetic film 23 is formed, silicon oxide, platinum or the like may be formed on the substrate 20.
As a result, the substrate 20 made of this oxide soft magnetic material
And the chemical reaction between the metal magnetic film 23 and the metal magnetic film 23 can be suppressed.

In this method, the metal magnetic film 23 is formed on the base 20 on which the winding groove 22 is formed, but the present invention is not necessarily limited to such a process. For example, after the metal magnetic film 23 is formed on the base 20, the winding groove 22 may be formed on the base 20 on which the metal magnetic film 23 is formed.

Next, as shown in FIG.
A gap film 24 made of a nonmagnetic material such as iO ₂ is formed on each of the portions of the base 20 that will be the magnetic core halves where the glass groove 21 and the winding groove 22 are not formed. The thickness of the gap film 24 is, for example, about half the specified gap length, and is about 0.1 μm here.

Next, as shown in FIG.
The base block 25 processed in the same manner as that of the head block 2 is abutted with the end faces thereof through the gap film 24 so that the glass groove 21 and the winding groove 22 substantially coincide with each other.
6 is formed.

Next, as shown in FIG. 9, a fusing glass 27 which can be melted at, for example, about 500 ° C. is inserted into the winding groove 22 of the head block 26 held in the state shown in FIG. Place so that the side to be the moving surface is the lower surface,
The fused glass 27 is heated and melted. Thereby, the fusion glass 27 is buried over the tops of the glass groove 21 and the winding groove 22, and the head block 26 is joined and integrated.
The head block 26 may be joined and integrated by metal joining or the like.

Further, when forming a groove for regulating the track width to a predetermined width, which will be described later, if there is an extra front depth, the processing load is increased or the processing accuracy is reduced. The processing is performed so that the front depth on the surface side is about 100 μm.

Next, as shown in FIG. 10, a groove for regulating the track width to a predetermined width is formed in the head block 26 by grinding using a grindstone described in detail later. A groove 28 that is substantially perpendicular to the direction in which the grindstone enters is formed on the end face on the side in which the grindstone enters.

The groove 28 has an inclined surface 28a having an angle substantially equal to the azimuth angle toward the bottom, and the inclined surface 28a is a surface substantially perpendicular to the direction in which the grinding wheel enters in consideration of the azimuth. It is formed so that it becomes. The inclined surface 28a has a width equal to or greater than the width of the subsequent track. Further, the depth of the groove 28 only needs to be sufficient to form the inclined surface 28a. The surface other than the inclined surface 28a may be formed substantially perpendicular to the main surface on which the groove 28a is formed.
It may be formed with an inclination such that a spreads.

Then, as shown in FIG. 11, the head block 26 is slid with the magnetic tape so that the magnetic gap is inclined with respect to the direction substantially perpendicular to the direction in which the magnetic tape slides with the magnetic tape according to the azimuth angle α. Groove processing is performed by a grindstone along the moving direction. Thereby, a groove 29 for regulating the track width to a predetermined width is formed. The groove 29 is formed in the above-described magnetic head 1 by the track width regulating groove 11, 1.
It becomes 2.

At this time, the depth of the groove 29 is set to be equal to or less than the position where the front depth disappears after the grinding, and even if the head wears from the initial front depth to the disappearance of the depth, a large amount of head wear occurs. The depth shall be such that the track width does not fluctuate.

For this reason, the cutting depth of the grindstone should not be rounded at the end of the grindstone so that the perpendicularity of the side surface of the grindstone used in the grinding process can be sufficiently obtained. In addition, the depth is preferably, for example, about 100 to 130 μm corresponding to the depth region to be worn. Of these, it is preferable that the depth of cut to zero or less of the depth is about 0 to 30 μm, and more preferably, if the depth of cut of the grinding wheel is too deep, the effect of concentrating magnetic flux on the magnetic gap portion is reduced, Since the head efficiency is reduced, it is preferable to set the depth not to exceed 30 μm.

Here, in the conventional method, FIG. 12 and FIG.
As shown in FIG. 3, with respect to the side surface of the head block 26,
The grindstone 30 enters obliquely at a predetermined angle in consideration of the azimuth angle. FIG. 12 shows the head block 2
FIG. 13 is a perspective view schematically showing a state in which the grindstone enters the side surface 6 aslant, and FIG. 13 is a plan view thereof.

In this case, as shown in FIG. 14, when the grindstone 30 obliquely enters the side surface of the head block 26, the grindstone 30 may escape due to a difference in contact resistance, or as shown in FIG. In addition, the waviness of the grindstone caused by the difference in the contact resistance hinders the straightness of the grindstone, and the meandering of the grindstone occurs. For this reason, in the conventional method, the groove 29 cannot be formed with high accuracy due to the effect of the reaction force of the grindstone 30 generated when the grindstone 30 enters the head block 26 obliquely.

For this reason, for example, when the grindstone width is 250 μm,
When groove processing is performed to leave an azimuth angle of 20 ° and a track width of 6 μm, the meandering amount becomes 1.5 μm or more, and a deviation of 4.5 μm to 7.5 μm occurs in the track width direction. When the recording width becomes the narrowest, the actual track width is reduced by about 25% with respect to the specified track width.
And the narrow track width format cannot be realized. In addition, if the track width is selected within an error of, for example, 0.3 μm, only a magnetic head satisfying a specified value of about 30% can be obtained, which causes a problem in productivity.

For this reason, in the conventional method, the decrease in the yield is caused, for example, by setting the azimuth angle to 15 ° or more and setting the width of the grindstone to 3 °.
It becomes remarkable when the thickness is set to 00 μm or less, and becomes about 60% or less required for manufacturing. Further, when the track width is, for example, 6 μm or less, the absolute value of the error due to the meandering of the grindstone 30 occupies 20% or more of the effective track width, and it is difficult to cope with the narrow track.

On the other hand, in the present method, the grindstone 30 on the side of the head block 26 where the grindstone 30 is obliquely enters.
A groove 28 having an inclined surface 28a that is substantially perpendicular to the direction of entry.

In this case, as shown in FIG. 16 and FIG. 17, the grindstone 30 enters substantially perpendicularly to the inclined surface 28a of the groove 28 in the head block 26,
0 stable straightness can be secured. Therefore, it is possible to reduce the influence of the reaction force of the grindstone generated when the grindstone 30 enters the head block 26 obliquely, and to form the groove 29 for regulating the track width to a predetermined width with high precision. Can be.

In this method, as shown in FIGS. 18 and 19, the side surface of the head block 26 which is in contact with the end face of the grindstone 30 in the approach direction and is substantially perpendicular to the approach direction of the grindstone 30 is formed. May be provided.

If the auxiliary substrate 31 is too thick, the amount of grinding increases, and there is a possibility that the abrasion of the grindstone 30 may be accelerated. Therefore, it is preferable to form the auxiliary substrate 31 as thin as possible. Also,
The auxiliary substrate 31 is preferably made of the same material as the head block 26, for example, Mn—Zn based ferrite, Ni
-It is preferable to be made of an oxide magnetic material such as Zn-based ferrite.

The auxiliary substrate 31 and the head block 26 are joined by using an instant adhesive, a melting type fixing wax, or the like.
Acetone or I. P. It is preferable to use a bonding agent that can be easily decomposed with an industrial solvent such as A. Here, Alon α (trade name) manufactured by Toa Gosei Co., Ltd. was used as the instant adhesive.

In this case, as shown in FIG.
Enters substantially perpendicularly to the auxiliary substrate. For this reason, as shown in FIG. 21, the stable straightness of the grindstone 30 can be ensured. Therefore, it is possible to reduce the influence of the reaction force of the grindstone generated when the grindstone enters the head block 26 obliquely, and to form the groove 29 for regulating the track width to a predetermined width with high precision. it can.

In this method, as shown in FIG.
A plurality of joined and integrated head blocks 26 are arranged in the direction of sliding with the magnetic tape, and the magnetic gap of each head block 26 is inclined with respect to a direction substantially perpendicular to the sliding direction according to the azimuth angle. To place. And
As shown in FIG. 23, a grinding process is performed by a grindstone along a direction in which a plurality of head blocks 26 arranged side by side are slid on a magnetic tape on a processing surface serving as the above-described sliding surface 1 a of the magnetic head 1. By doing so, the grooves 29 that become the track width regulating grooves 8 and 9 of the magnetic head 1 described above may be formed.

In this case, as for the number of head blocks 26 arranged, the larger the number, the more stable the grinding by the grindstone 30. However, in order to secure mass productivity, about 50 head chips per block are required. You usually get it. Further, it is necessary to form two track width regulating grooves for each head chip. Therefore, the whetstone 3
Grinding with 0 is a repetition process of 100 times or more.

At this time, if the processing distance per process is too long, the wear of the grindstone 30 cannot be controlled. For this reason, it is preferable that the dimension in the direction of entry of the grindstone 30 in the plurality of head blocks 26 arranged side by side be at least 5 mm in order to at least obtain the processing stability of the grindstone.

Here, the head block 26 has a thickness of 1
Since the bases 20 and 25 are joined together, the thickness is about 2 mm. The dimensions of the plurality of head blocks 26 arranged in the direction of entry of the grindstone 30 are set to a total of 20 mm in which ten head blocks 26 are arranged.

When arranging the head blocks 26, it is preferable that the interval between the head blocks 26 arranged in a plurality is set to 300 μm or less in order to stabilize the steady state of the grindstone 30. Set the head block interval to 3
When the thickness is not less than 00 μm, the gap generated between the head blocks 26 is too large, and the magnetic gap is inclined at a predetermined azimuth angle. It is because it increases.

It is preferable that the processing surfaces of the head blocks 26 arranged side by side are processed to make the heights of the processing surfaces of the head blocks 26 arranged side by side substantially equal. Thereby, the processing resistance of the grindstone 30 can be made uniform, and the meandering of the grindstone 30 can be prevented.

Further, in this grinding, if residual processing stress, processing distortion or the like in the previous process remains on the processing surface of the head block 26, as shown in FIG.
The grinding process may cause a defect 29a in the processing edge. For this reason, it is preferable that the principal surfaces of the plurality of head blocks 26 arranged side by side are further subjected to a strain relief process for removing a damaged layer by mirror finishing or the like.

As described above, the influence of the reaction force of the grindstone generated when the grindstone enters the head block 26 obliquely,
This can be reduced by arranging a plurality of these head blocks 26, and the grooves 29 for regulating the track width can be formed with high precision.

Next, as shown in FIG. 25, the formed groove 29 is filled with glass 32 to cover the groove 29, thereby obtaining a smooth surface.

Next, as shown in FIG. 26, the above-described magnetic head 1 for adjusting the contact width T _C with the magnetic tape is used.
The grooves 33 serving as the contact width regulating grooves 11 and 12 are formed along the direction in which the grooves 33 slide with the magnetic tape. The groove 33 regulates the contact width of the sliding surface that slides with the magnetic tape on the magnetic core portion remaining after processing so that an appropriate contact pressure can be obtained. For example, the contact width is 80 to 130 μm.
It is preferable to form it so that it is about the same.

If the contact width is regulated wider than this, the thickness of the air film generated between the magnetic tape and the magnetic head increases due to a decrease in the surface pressure when sliding on the magnetic tape. As a result, the recording / reproducing ability of the magnetic head deteriorates due to the spacing loss. On the other hand, if the contact width is regulated to be narrower, the wear of the head is accelerated due to the increase in the surface pressure when sliding with the magnetic tape, and the period during which the magnetic recording device requires maintenance is shortened. Would.

Next, as shown in FIG. 27, a cutting process for forming individual head chips is performed in the formed groove 33 in the cutting direction indicated by the dashed line in the figure in consideration of azimuth. And for the separated head chip,
The magnetic head 1 as shown in FIG. 1 described above is manufactured by subjecting a surface that slides on the magnetic tape to a cylindrical cutting process having a substantially cylindrical shape.

As described above, in the method of manufacturing a magnetic head to which the present invention is applied, a process in which the end surface of the head block 26 on the side in which the grindstone 30 enters in the direction in which the grindstone 30 enters is made in advance. Therefore, the grindstone 30 enters the head block 26 substantially perpendicularly, and the stable straightness of the grindstone 30 can be secured.

Further, in this method, since the auxiliary substrate 31 having an end surface shape that is substantially perpendicular to the approach direction of the grindstone 30 is disposed in contact with the entry side end face of the grindstone 30 of the head block 26, Since it enters the auxiliary substrate 31 substantially perpendicularly, the stable straightness of the grindstone 30 can be secured.

Thus, the grinding stone 3 is attached to the head block 26.
It is possible to reduce the influence of the reaction force of the grindstone 30 generated when the 0 enters obliquely, and it is possible to form the groove 29 for regulating the track width to a predetermined width with high precision.

Specifically, the deviation of the track width caused by the influence of the precision of the processing machine and the wear of the grindstone can be reduced to about 0.4 μm, and the selection of the head chips by the deviation of 0.3 μm or more can be achieved. , A yield of 80% or more can be obtained. In addition, while the defect occurrence rate of the conventional product is 39 out of 80 pieces, the present method is 6 out of 80 pieces, so that the productivity can be greatly improved.

Therefore, according to the present method, when the track width is reduced with the increase in recording density, for example, when a magnetic head having an azimuth angle of 15 ° or more and a track width of 6 μm or less is manufactured. Even so, the track width can be regulated with high precision, and the productivity can be greatly improved.

[0086]

As described above in detail, according to the magnetic head manufacturing method of the present invention, the end face of the magnetic head block on the side of the grindstone entering side is made substantially perpendicular to the entering direction of the grindstone. As a result, the grindstone enters substantially perpendicularly to the magnetic head block, and stable straightness of the grindstone can be secured. Thereby, the influence of the reaction force of the grindstone generated when the grindstone enters the magnetic head block obliquely can be reduced, and the groove for regulating the track width can be formed with high precision.

According to the method of manufacturing a magnetic head of the present invention, the auxiliary member having an end surface shape substantially perpendicular to the direction in which the grindstone enters is disposed in contact with the end surface of the magnetic head block on the grindstone entry side. As a result, the grindstone enters substantially perpendicularly to the auxiliary member, and stable straightness of the grindstone can be secured. Thereby, the influence of the reaction force of the grindstone generated when the grindstone enters the magnetic head block obliquely can be reduced, and the groove for regulating the track width can be formed with high precision.

In the method of manufacturing a magnetic head according to the present invention, a plurality of magnetic head blocks are arranged in the magnetic recording medium sliding direction, and the magnetic gap of each magnetic head block is substantially perpendicular to the magnetic recording medium sliding direction. The grooves may be arranged obliquely to the direction according to the azimuth angle, and the grooves may be formed along the sliding direction of the magnetic recording medium.

In this case, the influence of the reaction force of the grindstone generated when the grindstone enters each magnetic head block obliquely can be reduced by arranging a plurality of these magnetic head blocks side by side, and the track width is regulated. Can be formed with high precision.

Therefore, according to the method of manufacturing a magnetic head according to the present invention, even when the track width is narrowed in accordance with the increase in recording density, the track width can be regulated with high accuracy. Productivity can be greatly improved.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a configuration of a magnetic head manufactured by applying the present invention.

FIG. 2 is a plan view showing a configuration of a magnetic recording medium sliding surface of a magnetic head manufactured by applying the present invention.

FIG. 3 is a diagram sequentially illustrating manufacturing steps of a method of manufacturing a magnetic head to which the present invention is applied, and is a schematic perspective view illustrating a base that is a magnetic core half.

FIG. 4 is a schematic perspective view showing a state in which a glass groove is formed on a main surface of a base, sequentially showing manufacturing steps of a method for manufacturing a magnetic head to which the present invention is applied.

FIG. 5 is a schematic perspective view showing a state in which a winding groove is formed on a base on which a glass groove is formed, sequentially showing manufacturing steps of a method of manufacturing a magnetic head to which the present invention is applied.

FIG. 6 is a view sequentially showing manufacturing steps of a method of manufacturing a magnetic head to which the present invention is applied, and is a schematic perspective view showing a state where a metal magnetic film is formed on a base on which a glass groove and a winding groove are formed; FIG.

FIG. 7 is a schematic perspective view showing a state in which a gap film is formed on a substrate on which a metal magnetic film is formed, sequentially showing manufacturing steps of a method of manufacturing a magnetic head to which the present invention is applied. .

FIG. 8 is a schematic perspective view illustrating a state in which substrates serving as a head block are butted against each other, sequentially illustrating manufacturing steps of a method of manufacturing a magnetic head to which the present invention is applied.

FIG. 9 is a schematic perspective view showing a state in which a head block is joined and integrated, sequentially showing manufacturing steps of a method of manufacturing a magnetic head to which the present invention is applied.

FIG. 10 is a view sequentially showing manufacturing steps of a method of manufacturing a magnetic head to which the present invention is applied, and is a schematic perspective view showing a state in which a groove is formed in the head block so as to be substantially perpendicular to the direction in which the grindstone enters. It is.

FIG. 11 is a schematic perspective view showing a state in which a groove for regulating a track width to a predetermined width is formed, sequentially showing manufacturing steps of a method for manufacturing a magnetic head to which the present invention is applied.

FIG. 12 is a perspective view schematically showing a state in which a grindstone obliquely enters the side surface of the head block.

FIG. 13 is a plan view schematically showing a state in which a grindstone obliquely enters the side surface of the head block.

FIG. 14 is a plan view schematically showing a state in which the grinding wheel has escaped.

FIG. 15 is a plan view schematically illustrating a state in which wandering of the grindstone has occurred.

FIG. 16 is a plan view showing a state in which the grindstone enters substantially perpendicularly to the head block.

FIG. 17 is a main part plan view showing a state where a groove for regulating a track width to a predetermined width is formed.

FIG. 18 is a perspective view schematically showing a state in which an auxiliary substrate is arranged on a side surface of the head block in the direction in which the grindstone enters, in which the manufacturing steps of the magnetic head manufacturing method to which the present invention is applied are sequentially shown. is there.

FIG. 19 is a plan view schematically showing a manufacturing step of a method of manufacturing a magnetic head to which the present invention is applied, and schematically showing a state in which an auxiliary substrate is arranged on a side surface of the head block on the side in which the grindstone enters; is there.

FIG. 20 is a plan view schematically showing a state in which the grindstone enters substantially perpendicularly to the auxiliary substrate.

FIG. 21 is a plan view schematically showing a state in which a grindstone enters a head block through an auxiliary substrate.

FIG. 22 is a schematic perspective view showing a state in which a plurality of head blocks joined and integrated are arranged side by side, sequentially showing the manufacturing steps of the manufacturing method of the magnetic head to which the present invention is applied.

FIG. 23 is a view sequentially showing the manufacturing steps of the method of manufacturing a magnetic head to which the present invention is applied, and is a schematic perspective view showing a state in which a plurality of head blocks are grooved by a grindstone. .

FIG. 24 is a view sequentially showing manufacturing steps of a method of manufacturing a magnetic head to which the present invention is applied, and is a view schematically showing a state in which a processing edge has been lost by grinding.

FIG. 25 is a schematic perspective view showing a state in which the track width regulating groove is filled with glass, in which the manufacturing steps of the method of manufacturing a magnetic head to which the present invention is applied are sequentially shown.

FIG. 26 is a schematic perspective view showing a manufacturing step of a method of manufacturing a magnetic head to which the present invention is applied, in which a groove serving as a width regulating groove is formed to hit a head block.

FIG. 27 is a schematic perspective view showing a state in which a head block is divided into individual head chips, sequentially showing manufacturing steps of a method of manufacturing a magnetic head to which the present invention is applied.

FIG. 28 is a perspective view showing a configuration example of a MIG head.

FIG. 29 is a schematic perspective view showing a configuration example of a helical scan recording / reproducing apparatus.

FIG. 30 is an enlarged view of a portion indicated by a box B in FIG. 29;

FIG. 31 is a diagram showing a state in which a leakage magnetic field generated around a magnetic gap is generated beyond a track width.

FIG. 32 is a diagram showing a configuration of a magnetic head in which a track width regulating groove is formed so as to be substantially perpendicular to the track width direction.

FIG. 33 is a view showing a configuration of a magnetic head in which a magnetic gap is formed obliquely in accordance with an azimuth angle with respect to a direction substantially orthogonal to a sliding direction, and a track width regulating groove is formed along the sliding direction. is there.

FIG. 34 is a plan view schematically showing a state in which the grindstone has entered obliquely into the side surface of the head block in consideration of the azimuth angle.

FIG. 35 is a plan view of relevant parts schematically showing a state in which a grindstone has entered obliquely into the side surface of the head block in consideration of the azimuth angle.

FIG. 36 is a diagram schematically showing a state in which meandering has occurred in a processing locus of a grindstone.

[Explanation of symbols]

1 MIG head, 2, 3 magnetic core half, 8, 9 track width regulating groove, 20 base, 26 head block, 2
8 Grooves that are substantially perpendicular to the direction of whetstone entry, 2
9 Groove for regulating track width, 30 grinding wheel, 31
Auxiliary board

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 5D093 AA01 AC01 DA02 FA18 HA01 HA20 5D111 AA23 DD04 DD22 GG16 HH16 JJ24 JJ41 KK01

Claims (13)

[Claims] 1. A method of manufacturing a magnetic head in which a magnetic head block is manufactured by abutting a pair of magnetic core half blocks, and a groove is formed on a sliding surface of the magnetic recording medium with a grindstone to regulate a track width of a magnetic gap. The magnetic head block is disposed so that a magnetic gap is oblique in accordance with an azimuth angle with respect to a direction substantially orthogonal to a magnetic recording medium sliding direction, and a grindstone entry side end face with respect to the magnetic head block. A method in which the surface is substantially perpendicular to the direction of entry of the grindstone. 2. An azimuth angle of 15 ° or more and a track width of 6 μm or less.
The manufacturing method of the magnetic head described. 3. The method for manufacturing a magnetic head according to claim 1, wherein the width of the whetstone is 300 μm or less. 4. A plurality of magnetic head blocks are arranged in the sliding direction of the magnetic recording medium, and a magnetic gap of each magnetic head block is in accordance with an azimuth angle with respect to a direction substantially perpendicular to the sliding direction of the magnetic recording medium. 2. The method of manufacturing a magnetic head according to claim 1, wherein the grooves are arranged obliquely and the grooves are formed along the sliding direction of the magnetic recording medium. 5. An interval between the magnetic head blocks is 30.
5. The method for manufacturing a magnetic head according to claim 4, wherein the thickness is 0 [mu] m or less. 6. The method of manufacturing a magnetic head according to claim 4, wherein a dimension of each of the magnetic head blocks in a sliding direction of the magnetic recording medium is 5 mm or more. 7. A method of manufacturing a magnetic head in which a pair of magnetic core half blocks are butted to form a magnetic head block, and a groove is formed on a sliding surface of the magnetic recording medium by a grindstone to regulate a track width of a magnetic gap. The magnetic head block is arranged so that a magnetic gap is inclined according to an azimuth angle with respect to a direction substantially perpendicular to a sliding direction of a magnetic recording medium, A method of manufacturing a magnetic head, comprising arranging an auxiliary member having an end surface shape substantially orthogonal to a direction in which a grindstone enters. 8. The method according to claim 7, wherein the auxiliary member is made of the same material as the magnetic head block. 9. The azimuth angle is 15 ° or more, and the track width is 6 μm or less.
The manufacturing method of the magnetic head described. 10. The method for manufacturing a magnetic head according to claim 7, wherein the width of the whetstone is 300 μm or less. 11. A magnetic head block comprising a plurality of magnetic head blocks arranged in the sliding direction of the magnetic recording medium, and a magnetic gap of each magnetic head block corresponding to an azimuth angle with respect to a direction substantially perpendicular to the sliding direction of the magnetic recording medium. 8. The method of manufacturing a magnetic head according to claim 7, wherein the grooves are arranged obliquely and the grooves are formed along the sliding direction of the magnetic recording medium. 12. The magnetic head block according to claim 1, wherein an interval between the magnetic head blocks is three.
The method of manufacturing a magnetic head according to claim 11, wherein the thickness is not more than 00 µm. 13. The method of manufacturing a magnetic head according to claim 11, wherein a dimension of each of the magnetic head blocks in a sliding direction of the magnetic recording medium is 5 mm or more.