JP2000339038A - Fluid temperature controller and its controlling method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide fluid temperature controller and its controlling method effective for the protection of a heat exchanger and the reduction of cost. SOLUTION: A passage 12 for cooling a heating unit 100 is divided into a 1st branch 14-1 and a 2nd branch 14-2 and the 1st branch 14-1 is arranged on the heat absorbing side of a Peltier element 116. The 2nd branch 14-2 is arranged on a position separated from the Peltier element 116, and when the temperature of fluid flowing into the passage 12 is higher than the heat resistance temperature of the element 116, the fluid is allowed to flow into the 2nd branch 14-2 to protect the element 116.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a fluid temperature control device and method, and more particularly to a fluid temperature control device and method effective for protecting a heat exchanger and reducing costs.

[0002]

2. Description of the Related Art Generally, the temperature of a process chamber or a constant temperature chamber used in a semiconductor device or liquid crystal manufacturing line is controlled by a method of circulating a heat exchange medium in the chamber. For example, when the chamber is maintained at a low temperature, the heat exchange medium cooled to a predetermined temperature is circulated, and when the chamber is maintained at a high temperature, the heat exchange medium heated to a predetermined temperature is circulated.

The heat exchange medium has good circulation properties,
A fluid such as air or water having relatively good thermal energy transfer efficiency is used. Heating and cooling of such a heat exchange fluid are generally performed using a heat exchanger such as a heater or a refrigerator.

[0004] This heat exchanger is used as a means for supplying heat energy again to the fluid that has lost heat energy in the chamber, and the fluid that has obtained heat energy from the heat exchanger is again placed in the chamber. Supplied. In this way, the heat exchange fluid circulates between the chamber and the heat exchanger and contributes to the temperature control of the chamber.

[0005] Incidentally, depending on the type of a process chamber incorporated in a semiconductor manufacturing line, there is a case where a wide temperature range needs to be supported. For a process chamber of this type, for example, -2
Supply of a fluid that changes within a temperature range of about 0 ° C. to 100 ° C. is required. In such a case, a configuration is generally adopted in which a high-temperature region is covered with a heater for heating and a low-temperature region is covered with a refrigerator for cooling.

[0006]

However, direct flow of a high-temperature fluid through the refrigerator may damage the refrigerator, so that it is necessary to devise a combination of the heater and the refrigerator. Further, installing both a heater and a refrigerator in all the process chambers is not preferable because it increases equipment costs and running costs.

In particular, since the Peltier element is fragile and expensive, these problems tend to appear when the Peltier element is used as a heat exchanger.

Accordingly, an object of the present invention is to provide a fluid temperature control device and method effective for protecting a heat exchanger and reducing costs.

[0009]

As means for achieving the above object, the following approach has been taken and will be described here.

In the temperature range of the fluid required for the above-mentioned process chamber (for example, -20 ° C. to 100 ° C.), not all temperatures are always required, and some temperatures may be used less frequently. . For example, 30 ° C.
There is also a process chamber in which a high-temperature region of 100 ° C. is always required at the time of executing the process, but a low-temperature region of 20 ° C. to 30 ° C. needs to be achieved only during maintenance.

For such a process chamber,
It is wasteful to keep a cooling heat exchanger, for example, a Peltier element, always running, which causes an increase in running cost. Further, always providing a Peltier element which is not usually used in this way also increases the cost of the apparatus.

Therefore, the temperature range of 30 ° C. to 100 ° C.
A method is conceivable in which a normal temperature refrigerant such as factory cooling water is used in combination with a heater, and the Peltier element is driven only when a low temperature range of 20 ° C. to 30 ° C. is required. Furthermore, if the Peltier element is made detachable and shared by a plurality of process chambers, the cost of the apparatus can be reduced. That is,
The idea is to use only when necessary.

However, simply turning on / off the Peltier element
In addition, the above-mentioned another problem that the Peltier element is damaged by the high-temperature fluid cannot be solved only by the configuration in which the Peltier element is detachable. In order to solve this problem, a new idea is needed that is different from the idea of “use only when necessary”.

Then, when the cause of the Peltier element being damaged was considered, it was found that the cause was the heating of the Peltier element. In other words, to cool the fluid,
When a Peltier element is arranged on the flow path of the fluid, a high temperature fluid set in a high temperature range of 30 ° C. to 100 ° C. also flows through the flow path, so that the Peltier element is heated by the high temperature fluid. It is.

Generally, the Peltier element is damaged when exposed to a temperature environment of 80 ° C. or higher. Therefore, if the high-temperature fluid constantly flows near the Peltier element as described above, the Peltier element is heated to 80 ° C. or higher. And are often damaged.

On the other hand, considering only the point of avoiding damage, it is possible to make the Peltier element detachable and remove the Peltier element when a fluid of 80 ° C. or more flows. The operation of attaching and detaching the Peltier element in accordance with is complicated and impractical.

As a result of repeating the creative act from such a viewpoint, the idea of "switching the fluid flow path" was obtained.
That is, the fluid is kept away from the Peltier element.
The present invention seeks to solve the above-described problems based on such an idea.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (Summary of the Invention) A representative feature of the present invention conceived based on the above idea is to switch the outflow direction of the fluid in accordance with the temperature of the fluid to protect the heat exchanger. That is. That is, a flow path for performing heat exchange provided in the vicinity of the heat exchanger and a protection flow path provided separately from the heat exchanger are prepared, and the temperature of the fluid is adjusted to the heat exchanger. If it is within the rating of, flow the fluid to the heat exchange flow path,
If the rating is exceeded, it flows into the protection channel. With such a configuration, it is possible to prevent the heat exchanger from being placed in a high-temperature environment.

(Embodiment) FIG. 1 is a conceptual diagram showing a configuration of a fluid temperature control device according to the present invention at the time of non-heat exchange.
Hereinafter, the configuration of the present invention will be described with reference to FIG.

The flow path 12 is a flow path through which a fluid to be subjected to temperature control in the present invention flows. Specific examples of the fluid include, for example, air, water, and other chemical liquids, and are used as a heat exchange medium in a process chamber or a constant temperature room.

The first branch 14-1 and the second branch 14-2 are branches branched from the flow path 12, and are arranged at different positions. The first branch 14-1 is
The heat exchanger 10 is a flow path for heat exchange, and the heat exchanger 10 is disposed close to the first branch 14-1.

The heat exchanger 10 is a concept including a cooling means such as a refrigerator or a Peltier element and a heating means such as a heater, and exchanges heat with the fluid flowing through the first branch 14-1. When the heat exchanger 10 is configured by a refrigerator or a Peltier element, a cooling water flow path 20 is introduced into the heat exchanger 10,
Cooling water is supplied to the condenser of the refrigerator or the heating surface of the Peltier element.

The heat exchanger 10 is driven based on the power control signal PCONT output from the controller 24, and supplies heat energy to the fluid flowing through the first branch 14-1. It is within the scope of the present invention to use this PCONT signal to stop supplying power to the heat exchanger 10 when the heat exchanger 10 is not in use to reduce power consumption.

On the other hand, the heat exchanger 10 is disposed so as to be thermally isolated from the second branch 14-2, so that the heat exchanger 10 is not affected by the fluid flowing through the second branch 14-2. It is the configuration that was done. This is intended to protect the heat exchanger 10.

The switching valve 16 is provided at a branch point between the first branch path 14-1 and the second branch path 14-2, and based on a valve control signal VCONT output from the controller 24, the first branch path 14-1. 14-1 or second branch 14
-2 is communicated with the flow path 12. This switching valve 16 can be embodied, for example, as a current-controlled three-way valve. When the switching valve 16 is constituted by a three-way valve, one end of the three-way valve is terminated by a terminator 18 to prevent leakage of fluid.

As shown in FIG.
When the heat exchanger 10 is not used, the outflow direction of the fluid is switched to the second branch 14-2 to prevent the heat exchanger 10 from being reversely supplied with heat energy from the fluid. Preferably, a temperature sensor 22 is provided in the flow channel 12, and the switching valve 16 is controlled based on the output of the temperature sensor. For example, when the output of the temperature sensor 22 is equal to or higher than 80 ° C., it is assumed that the heat exchanger 10 is damaged by the high-temperature fluid, so the outflow direction of the fluid is switched to the second branch 14-2. It is also possible to protect the heat exchanger 10.

FIG. 2 is a conceptual diagram showing a configuration at the time of heat exchange of the fluid temperature control device according to the present invention. As shown in the figure, when performing heat exchange, the controller 24 outputs a VCONT signal to the switching valve 16 to flow the fluid to the first branch path 14-1, and to connect the PCONT to the heat exchanger 10.
A signal is output to drive the heat exchanger 10.

FIG. 3 is a timing chart showing an example of the control timing in the present invention. Hereinafter, an operation example of the heat exchange device according to the present invention will be described with reference to FIG.

First, the state when the temperature of the fluid flowing in the flow channel 12 is high will be considered. When the temperature of the fluid is high as described above, the controller 24 controls the switching valve 16 to flow the fluid to the second branch 14-2 to protect the heat exchanger 10. As a result, the fluid temperature control device according to the present invention,
The state shown in FIG. 1 is obtained.

Thereafter, as shown in FIG.
When the output signal TEMP of No. 2 falls to the set temperature TS, V
Invert the CONT signal to start switching the outflow direction. The set temperature TS is a value determined based on the rating of the heat exchanger 10. Then, the fluid flows into the first branch 14-
1 to the heat exchanger 10,
It outputs a CONT signal to drive the heat exchanger 10. As a result, the fluid temperature control device according to the present invention is in the state shown in FIG.

As described above, the controller 24 operates the switching valve 16 based on the output of the temperature sensor 22 to control the temperature of the fluid. When a Peltier element is used as the heat exchanger 10, it is considered that the present invention can be easily implemented by referring to the configurations shown in FIGS. When the present invention is applied to a refrigerator, it may be configured as shown below.

FIG. 4 is a conceptual diagram showing an example in which the present invention is applied to a refrigerator. When applying the present invention to a refrigerator,
As shown in the figure, the first branch 14-1 is connected to the refrigerator 30
And the second branch 14-2 is provided outside the evaporator 36. With such a configuration, the high-temperature fluid can be prevented from flowing into the evaporator 36. Refrigerator 3
Since the zero evaporator 36 is also affected by high heat, such a configuration is useful for protecting the refrigerator 30.

According to the present invention described above, since the flow path can be switched, the heat exchanger can be protected. In addition, when the heat exchanger is not used, power consumption to the heat exchanger is stopped, so that power consumption can be reduced at the same time.

[0034]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (Summary) The flow path 12 for cooling the heating unit 100 is divided into a first branch path 14-1 and a second branch path 14.
-2, and the first branch 14-1 is disposed on the heat absorbing surface side of the Peltier element 116. On the other hand, the second branch 14
-2 is disposed at a position distant from the Peltier element 116 so that the temperature of the fluid flowing through the flow path 12
If the fluid temperature is higher than the heat resistance temperature of the second branch 1
4-2 to protect the Peltier element 116 (FIG. 5).
reference).

(Preferred Embodiment) The above-described technical idea of branching the fluid flow path is a very useful concept in the field of fluid temperature control. Here, a plurality of examples in which this characteristic technical idea is embodied in a mode considered to be industrially preferable are shown. Among the components described above, those that do not need to be particularly described are given the same names and the same reference numerals, and detailed description thereof will be omitted. The embodiments described below are embodied examples of the present invention, and do not limit the present invention.

(First Embodiment) FIG. 5 is a block diagram showing a first embodiment of the present invention. The present embodiment is an example of a case where cooling water supplied to the heating unit 100 originally provided in the process chamber 104 is cooled and a low-temperature fluid is supplied to the process chamber 104.

Conventionally, the cooling of the heating unit 100 is performed using factory cooling water. In a configuration in which only the heating unit 100 is connected to the process chamber 104, the temperature of the fluid supplied to the process chamber 104 is reduced. Has not been able to be below the temperature of the factory cooling water.

In each embodiment described below including this embodiment,
By using a cooling unit in combination with the heating unit 100, a temperature lower than the factory cooling water is achieved. The configuration shown in the present embodiment has a feature that the internal configuration of the heating unit 100 used conventionally does not need to be changed. Hereinafter, this characteristic configuration will be described with reference to FIG.

The heating unit 100 is constructed by inserting a lamp heater 108 into a double tube comprising an inner tube 110 and an outer tube 112, as shown in FIG. The inner tube 110 is formed of a translucent quartz glass tube, in which a second flow path 12-2 is provided. The lamp heater 108 is
The fluid flowing through the second flow path 12-2 is radiantly heated to create a high-temperature fluid.

The second flow path 12-2 is connected to the process chamber 104 via a pipe joint 118, and the high-temperature fluid heated by the lamp heater 108 is provided on the second flow path 12-2. Is supplied to the process chamber 104 by the pump 114. Hereinafter, the description will be made on the assumption that the fluid supplied to the process chamber 104 is Fluorinert. An object drawn in the same shape as the pipe joint 118 means a joint for connecting a flow path in all drawings, and the reference numerals are omitted for clarity of the drawings.

On the other hand, inside the outer pipe 112, a flow path 12 connected to the factory cooling water circulator 106 is provided.
The cooling of the outer pipe 112 and the inner pipe 110 and the cooling of the florinate flowing through the second flow path 12-2 are performed by the factory cooling water flowing through the second flow path 12-2. The flow path 12 shown in FIG.
Has both functions of the flow path 12 and the cooling water flow path 20 shown in FIGS. 1 and 2 described above. With such a configuration, Fluorinert belonging to a high temperature range of 30 ° C. to 100 ° C. is supplied to the process chamber 104.

The other end of the flow path 12 connected to the outer tube 112 in the heating unit 100 is connected to the cooling unit 102. The flow path 12 is divided into a first branch path 14-1 and a second branch path 14-2 in the cooling unit 102, and the first branch path 14-1 and the second branch path 14-2 are provided. A switching valve 16 is provided at the intersection of 14-2.

The cooling unit 102 includes a Peltier element 116 corresponding to the heat exchanger 10 of FIG. 1, and a first branch 14-1 is disposed on the heat absorbing surface side of the Peltier element 116. 2 is connected to the Peltier element 11.
6 and is located away from it.

The second branch path 14-2 is further branched in the cooling unit 102, and forms a factory cooling water circulator 106.
And a third branch 14-3 passing through the heat dissipation surface side of the Peltier element 116. The third branch 14-3 is disposed on the heat dissipation surface side of the Peltier device 116 and contributes to cooling of the Peltier device 116.

The factory cooling water circulator 106 has a pump inside, and drives the pump to supply the factory cooling water to the flow path 1.
2 (the cooling water flow path 20), the second branch 14-2 and the third branch 14-3. The flow in the first branch 14-1 is created by a pump 114 provided on the first branch 14-1.

The junction between the first branch 14-1 and the flow path 12, the junction between the second branch 14-2 and the third branch 14-3, and the flow between the third branch 14-3 and the third branch 14-3. An auxiliary valve 16-1 for controlling the flow of the factory cooling water is provided at the junction of the road 12. In all the embodiments, the auxiliary valve 16-1 is an auxiliary component that may be provided as needed.

In the above configuration, when supplying florinate at 30 ° C. to 100 ° C. to the process chamber 104, the Peltier element 116 is stopped, and the switching valve 16 and the auxiliary valve 16-1 are operated. The factory cooling water is caused to flow through the second branch 14-2 to create the flow indicated by the solid line in the figure.

As a result, the factory cooling water is supplied to the heating unit 10.
0, and flows through the outer tube 112 and the inner tube 1.
10 is cooled. This cooling raises the temperature of the factory cooling water to 30 ° C. to 100 ° C., but the factory cooling water does not flow through the first branch path 14-1 and the third branch path 14-3. Can't be damaged.

On the other hand, the process chamber 104
In the case of supplying Fluorinert at a temperature of 30 ° C. to 30 ° C., as shown in FIG. 3, after the temperature of the factory cooling water has dropped to the set temperature TS, the Peltier element 116 is driven,
By operating the switching valve 16 and the auxiliary valve 16-1, the factory cooling water is supplied to the first branch 14-1 and the third branch 14-3.
To create the flow indicated by the dotted line in the figure.

As a result, the fluid cooled by the Peltier element 116 flows through the outer tube 112, and this fluid is
10, ie, the process chamber 104
Indirectly cools the florinate supplied to the reactor. By this indirect cooling, florinate at −20 ° C. to 30 ° C. is supplied to the process chamber 104.

As shown in the upper part of the figure, a second heating unit 100-2 for controlling the temperature of another process chamber is connected to the cooling unit 102, and may be shared by a plurality of units. It is possible. in this way,
If the cooling unit 102 is shared by a plurality of units, cost reduction of the device can be expected.

(Second Embodiment) FIG. 6 is a block diagram showing a second embodiment of the present invention. In this embodiment, the fluid supplied to the process chamber 104 is directly supplied to the Peltier device 1.
In this configuration, cooling is performed at 16 to improve cooling efficiency. Hereinafter, the configuration of the second embodiment will be described with reference to FIG.

In the second embodiment, unlike the first embodiment, the flow path connected to the process chamber 104 and the inner tube 110 of the heating unit 100 corresponds to the flow path 12 in FIG. The flow path 12 is formed between the first branch 14-1 and the second branch 1 inside the cooling unit 102.
The heat absorption surface of the Peltier element 116 is provided on the first branch 14-1 similarly to the first embodiment.

On the other hand, a cooling water flow path 20 is connected to the factory cooling water circulator 106, and the cooling water flow path 20 is connected to the first cooling water flow path 20-1 and the second cooling water flow path 20-1. Channel 20-
The heating unit 100 is divided into two, and is disposed on the heat radiation side of the Peltier element 116 and in the outer tube 112 of the heating unit 100, respectively. The cooling water channel 20 is a component corresponding to the cooling water channel 20 in FIG.

In the above configuration, when supplying florinate at 30 ° C. to 100 ° C. to the process chamber 104, the Peltier element 116 is stopped, and the switching valve 16 is operated to divide the fluid into the second branch. Road 14-
2, and the factory cooling water is caused to flow through the second cooling water flow path 20-2 to create the flow indicated by the solid line in the figure.

As a result, the factory cooling water is supplied to the heating unit 10.
0, and flows through the outer tube 112 and the inner tube 1.
10 is cooled, and the florinate flowing through the inner tube 110 is heated to 30 ° C. to 100 ° C. by the lamp heater 108.
Heated in the temperature range of ° C. However, since the heated florinate flows through the second branch 14-2, the Peltier element 116 is not damaged.

On the other hand, the process chamber 104
In the case of supplying Fluorinert at a temperature of 30 ° C. to 30 ° C., as shown in FIG. 3, after the temperature of the factory cooling water has dropped to the set temperature TS, the Peltier element 116 is driven,
By operating the switching valve 16 and the auxiliary valve 16-1, the fluid is caused to flow through the first branch path 14-1, and the factory cooling water is caused to flow toward the heat radiation surface side of the Peltier device 116. make.

As a result, florinate at −20 ° C. to 30 ° C. cooled by the Peltier element 116 is supplied to the process chamber 104.

(Third Embodiment) FIG. 7 is a block diagram showing a third embodiment of the present invention. This embodiment is an example in which the switching valve 16 provided in the heating unit 100 in the second embodiment described above is provided on the cooling unit 102 side. In the present embodiment, the first branch 14-1 is provided on the cooling unit 102 side, and the second branch 14-2 is provided.
Is provided on the heating unit 100 side. As shown in the figure, if a valve 120 is provided in the cooling water flow path 20 connected to the inlet of the outer tube 112, particularly in the fourth embodiment described later, when a plurality of heating units 100 are provided. First, the factory cooling water is supplied to the cooling unit 102 and the heating unit 1.
It is possible to adopt a configuration in which the flow is selectively supplied to 00.

With such a configuration, the cooling unit 102 can be used separately from the heating unit 100 if necessary. The configuration includes the cooling unit 102
And a configuration in which the temperature range of −20 ° C. to 30 ° C. is not so much used.

For example, a plurality of process chambers 104
Are connected to their own heating units 100 (assuming that there are a plurality of process chambers 104 and heating units 100 having the structure shown in FIG. 7), each process chamber requires a florinate at 20 ° C. to 30 ° C. The timing is mainly for maintenance. Therefore, it is sufficient that the cooling unit 102 can be connected to a necessary chamber when necessary even if the cooling unit 102 is not provided for all the process chambers 104.

In this embodiment, the common use of the cooling unit 102 is achieved as follows. First, the cooling unit 1
02, the switching valve 16 in the heating unit 100 is operated to switch the outflow direction of florinate from the second branch 14-2 to the first branch 14-1. . As a result, florinate flows on the heat absorbing surface of the Peltier element 116, and the temperature decreases from -20 ° C to 30 ° C.
And supplied to the process chamber 104.

On the other hand, with respect to the heating unit 100 from which the cooling unit 102 is removed, the switching valve 16 in the heating unit 100 is operated to change the outflow direction of the florinate into the first direction.
From the fork 14-1 to the second fork 14-2. As a result, Florinert is moved to the second branch 14-2.
Fluorinert, which flows through the inside and is controlled at 30 ° C. to 100 ° C., is supplied to the process chamber 104.

With the above configuration, one cooling unit can be shared by a plurality of process chambers, so that the cost of the apparatus can be reduced.

(Fourth Embodiment) FIG. 8 is a block diagram showing a fourth embodiment of the present invention. In this embodiment, a set of a plurality of process chambers and a heating unit is connected between the heating unit 100 and the cooling unit 102 shown in the third embodiment, and the cooling unit 102 is operated only by operating the switching valve 16. This is an example of sharing.

In this embodiment, a second heating unit 100-2 is connected in parallel between the heating unit 100 and the cooling unit 102, as shown in FIG. The second heating unit 100-2 has the same structure as the heating unit 100, and another process chamber (not shown) is connected to the second heating unit 100-2.

Then, the switching valve 16 provided in the heating unit 100 and the second heating unit 100-2 is provided.
Are operated independently to determine whether to use the cooling unit 102 or not. -In both process chambers
When the florinate at 20 ° C. to 30 ° C. is required, the flow path 12 in the heating unit 100 and the second heating unit 100-2 is connected to the first branch path 14 in the cooling unit 102.
What is necessary is just to communicate with -1.

The structure shown in this embodiment is the same as that of the cooling unit 1
Since it is not necessary to perform the attaching / detaching operation of the second embodiment, the workability is superior to that of the third embodiment.

(Fifth Embodiment) FIG. 9 is a block diagram showing a fifth embodiment of the present invention. In this embodiment, the heating unit 100 is connected to the process chamber 104, and the cooling unit 102 is connected to the second process chamber 104-.
2 is connected to the cooling unit 102 connected to the second process chamber 104-2.
Is also intended to be used effectively in the process chamber 104.

In order to achieve the above-mentioned effective use, in this embodiment, the heating unit 100 and the cooling unit 102
A heat exchange unit 124 is provided. In the heat exchange unit 124, a heat exchange unit 122 is provided, where:
Heat exchange between the florinate supplied to the process chamber 104 and the florinate supplied to the second process chamber 104-2 is performed.

As shown in the figure, the first branch 14-1
And the second branch 14-2 is connected to the heat exchange unit 124.
And a switching valve 16 for switching between these branch paths.
Is also provided in the heat exchange unit 124. Then, a part of the first branch path 14-1 and a part of the flow path circulating in the cooling unit 102 are arranged in a state of being in contact with each other in the heat exchange part 122. This contact portion is covered with a heat insulating material to allow for smooth heat exchange.

The switching valve 16 provided in the heat exchange unit 124 operates in the process chamber 104 at -20 ° C. to 30 ° C.
When the supply of Fluorinert at 0 ° C. is required, the flow path 12 in the heating unit 100 is communicated with the first branch path 14-1, otherwise, the flow path 12 is connected to the second branch path 14-1.
-2. Furthermore, even when the florinate flowing in the flow path 12 is at least 80 ° C., the flow path 12 is communicated with the second branch path 14-2 to protect the Peltier element 116.

That is, −20 is added to the process chamber 104.
When supplying Fluorinert at a temperature of from 30 ° C. to 30 ° C., a flow indicated by a dotted line in FIG. With such a structure, the cooling unit 102
And protection of the Peltier element 116 is achieved at the same time.

The factory cooling water circulator 106 is connected to the outer tube 112 provided in the heating unit 100 and the cooling unit 1.
The cooling water is disposed on the heat dissipation surface side of the Peltier element 116 provided in the inside 02, and circulates factory cooling water to each of them.

(Sixth Embodiment) FIG. 10 shows a sixth embodiment of the present invention.
FIG. 3 is a block diagram showing an embodiment. This embodiment is an example in which the cooling unit 102 of the fifth embodiment described above is configured by a refrigerator 30. When the refrigerator 30 is applied as described above, the flow path passing through the heat exchange section 122 is connected to the evaporator 36, and the cooling water flow path 20 is connected to the condenser 34. Other configurations are the same as those of the fifth embodiment. With such a structure, the refrigerator 30 can be shared and the refrigerator 30
At the same time, the compressor 32 provided therein is protected.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram showing the configuration of a fluid temperature control device according to the present invention during non-heat exchange.

FIG. 2 is a conceptual diagram showing a configuration at the time of heat exchange of the fluid temperature control device according to the present invention.

FIG. 3 is a timing chart showing an example of control timing in the present invention.

FIG. 4 is a conceptual diagram showing an example in which the present invention is applied to a refrigerator.

FIG. 5 is a block diagram showing a first embodiment of the present invention.

FIG. 6 is a block diagram showing a second embodiment of the present invention.

FIG. 7 is a block diagram showing a third embodiment of the present invention.

FIG. 8 is a block diagram showing a fourth embodiment of the present invention.

FIG. 9 is a block diagram showing a fifth embodiment of the present invention.

FIG. 10 is a block diagram showing a sixth embodiment of the present invention.

[Explanation of symbols]

10 heat exchanger, 12 flow path, 12-2 second flow path,
14-1 first branch, 14-2 second branch, 1
4-3: third branch path, 16: switching valve, 16-1: auxiliary valve, 18: terminator, 20: cooling water flow path, 20-
DESCRIPTION OF SYMBOLS 1 ... 1st cooling water flow path, 20-2 ... 2nd cooling water flow path, 22 ... temperature sensor, 24 ... controller, 30 ... refrigerator, 32 ... compressor, 34 ... condenser, 36 ... evaporation 100, heating unit, 100-2: second heating unit, 102: cooling unit, 104: process chamber, 104-2: second process chamber, 1
06: Factory cooling water circulator, 108: Lamp heater, 1
10: inner pipe, 112: outer pipe, 114: pump, 116 ...
Peltier element, 118: pipe joint, 120: valve, 12
2: heat exchange unit, 124: heat exchange unit

 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Hiroaki Miyazaki 2597 Yonomiya, Hiratsuka-shi, Kanagawa F-term (reference) in Komatsu Electronics Co., Ltd. 3L045 AA01 AA03 AA08 BA06 BA08 CA02 DA02 DA04 DA05 EA02 FA02 GA02 HA01 JA02 JA14 JA15 KA11 LA12 LA13 LA17 MA01 MA02 MA20 NA12 NA27 PA03 5H323 AA40 BB12 BB17 CA04 CB04 CB12 CB23 CB32 CB33 CB35 CB42 CB43 CB44 DA01 DB15 EE02 FF01 FF04 GG01 HH02 KK01 MM02 QQ06 SS01 TT09 TT20

Claims (7)

[Claims] 1. A flow path (12) through which a fluid flows, a first branch (14-1) and a second branch (14-2) branched from the flow path, and the first branch Or a switching valve (16) for communicating one of the second branch passages with the flow passage; and a heat exchange with a fluid disposed in close proximity to the first branch passage and flowing through the first branch passage. And a heat exchanger (10) for performing the following. 2. The fluid according to claim 1, further comprising: a temperature sensor for detecting a temperature of the fluid; and a controller for controlling the switching valve based on a detection result of the temperature sensor. Temperature control device. 3. A third branch (14-3) branched from the flow path (12) or the second branch (14-2).
The heat exchanger is a Peltier element (116), the first branch is disposed on the heat absorbing surface side of the Peltier element, and the third branch is the Peltier element. The fluid temperature control device according to claim 1, wherein the fluid temperature control device is disposed on a heat radiation side of the fluid. 4. A second flow path (12-f) provided independently of the flow path and disposed close to the flow path.
2), a heating unit (100) for heating a second fluid flowing in the second flow path, and a process chamber (1) connected to the heating unit.
04), wherein heat exchange is performed between the fluid flowing in the flow path and the second fluid flowing in the second fluid.
The fluid temperature control device according to any one of the preceding claims. 5. A heating unit (100) for heating a fluid flowing in the flow path, and a process chamber (1) connected to the heating unit.
The fluid temperature control device according to claim 1 or 2, further comprising: 6. The fluid temperature control device according to claim 1, wherein the heat exchanger exchanges heat with a fluid flowing in the first branch via a heat exchange section (122). 7. A flow path (12) using a heat exchanger (10).
In a method for controlling the temperature of a fluid flowing therethrough, switching the outflow direction of the fluid according to the temperature of the fluid,
A fluid temperature control method, wherein the heat exchanger is protected.