JP2000337873A - Posture control system for displacement detector, displacement detector, and posture control method for displacement detector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a posture control system by which more precise measured data can be obtained by making the posture of a moving part in a displacement detector become precisely a mechanical neutral position a displacement detector and a posture control method for a displacement detector, in which the mechanical neutral position of a moving part is made precise. SOLUTION: In this posture control system 1, in which a moving part 25 is supported by support springs 26 in a gap in which a DC magnetic field is formed, and the posture of a displacement detector 2 which measures the displacement of the moving part is controlled, a mounting base 3, support parts 31 which are expanded and contracted freely, moving-part displacement means 25b, 41 by which the moving part is displaced to a prescribed displacement direction, stoppers 21, 27 which prevent the displacement at a prescribed amplitude of higher of the moving part, a displacement-signal detecting means 25a which detects a displacement signal caused by the displacement of the moving part up to the stoppers, a displacement- amount calculation means 42 which calculates a displacement amount is provided. Posture control means 43, 44, 45 which generate and output a posture control signal used to control the posture of the displacement detector, and a drive means which expands and contracts a support part are provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a posture control system for a displacement detector, such as a vibration detector or an inclinometer, having a movable part therein and measuring vibration or inclination based on the displacement of the movable part. The present invention also relates to a posture control method of a displacement detector.

[0002]

2. Description of the Related Art Conventionally, an electrokinetic displacement detector or a servo type displacement detector has been known as a displacement detector having a movable portion therein and measuring vibration or inclination based on the displacement of the movable portion. ing. The electrokinetic displacement detector is, for example, shown in FIG.
As shown in the figure, the case 201 of the electrokinetic displacement detector 200
Inside, the outer magnetic pole 202, the inner magnetic pole 203, the permanent magnet 204, the movable part 205, the support spring 206, the power generation coil 2
07 etc. are provided. Outer magnetic pole 20 made of magnetic material
2. A DC magnetic field that crosses the power generation coil 207 is formed in the gap G between the inner magnetic pole 203 and the permanent magnet 204. The movable portion 205 is displaced along a specific displacement direction while being restrained in the case 201 by a pair of support springs 206 formed of a ring-shaped leaf spring. The power generation coil 207 is provided in the movable part 205. When the power generation coil 207 is displaced in accordance with the displacement of the movable part 205, an electromotive force proportional to the displacement speed is generated, and the displacement can be detected based on the electromotive force. It has become.

On the other hand, as shown in FIG. 6, a servo type displacement detector comprises a drive control unit 302 provided inside a case 301 of a servo type displacement detector 300 and a pendulum (movable part) 3.
03, a displacement detection unit 304, a servo amplifier 305, and the like. The drive control unit 302 includes a case 3
01, and a drive coil 302b wound around the pendulum 303 and opposed to the permanent magnet 302a. When a current flows through the drive coil 302b, an electromagnetic force is generated in the drive coil 302b. ,
Thus, the pendulum 303 attached to the drive coil 302b moves.

[0004] Between the pendulum 303 and the permanent magnet 302a,
The support spring 306 and the damper 307 are provided in parallel. The displacement detection unit 304 includes two pole plates 304a and 304 of the capacitor C formed between the pole plate 304a attached to the pendulum 303 and the pole plate 304a on the case 301 side.
By measuring the displacement of the electric capacitance between the pendulums 3
03 is performed. In the servo displacement detector 300 having the above-described configuration, when acceleration is applied to the pendulum 303 and the pendulum 303 deviates from the zero position, the displacement detection unit 304 detects the deviation amount, and the servo amplifier 305 drives the drive control unit 302 based on the detection signal. The current is caused to flow through the drive coil 302b. This electromagnetic force is applied to the pendulum 30
The acceleration applied to the pendulum 303 can be detected by measuring this current because the acceleration is balanced with the acceleration that caused the displacement of the pendulum 3.

By the way, in general, when the measurement characteristics of the electrokinetic displacement detector 200 and the servo type displacement detector 300 are to be accurately obtained, the movable parts (pendulums) 205 and 303 are mechanically neutral with respect to the cases 201 and 301. It is necessary to carry out the test by placing it on a test stand (not shown) with the position adjusted.
Here, the mechanical neutral position refers to a state in which no force acts on the support springs 206 and 306 that support the movable parts 205 and 303. That is, if the mechanical neutral positions of the movable parts 205 and 303 are shifted, the support springs 206 and
This is because a force is acting on 06 and if displacement is performed in this state, an error will occur in the displacement measurement data due to the non-linearity of the spring constants of the support springs 206 and 306. Conventionally, in order to set the movable parts 205 and 303 at the mechanical neutral position, a waveform in one displacement direction is compared with a waveform in the other displacement direction with the mechanical neutral position of the movable parts 205 and 303 interposed therebetween. Although the height of the test table was adjusted so that the peak positions of the waveforms were almost equal, the judgment of whether the peak positions of the waveforms were equal was made by human eyes.

[0006]

However, in recent years,
Further, there is a need for a high-precision displacement measuring instrument, and when trying to meet this need, there is a limit in the determination of the mechanical neutral position described above, and there has been a problem that it cannot be met.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and it is an object of the present invention to obtain more accurate measurement data by accurately setting the posture of a movable part in a displacement detector to a mechanical neutral position. It is an object of the present invention to provide a posture control system, a displacement detector, and a displacement detector posture control method capable of accurately determining a mechanical neutral position of a movable part.

[0008]

According to a first aspect of the present invention, a movable part (25) is supported by a pair of support springs (26) in a gap in which a DC magnetic field is formed. In a posture control system (1) for controlling the posture of a displacement detector (2) for measuring the displacement of the movable part due to vibration or tilt, a mounting table (3) on which the displacement detector is mounted and a mounting table described above are supported. And a flexible support (3
1), movable part displacement means (25b, 41) for displacing the movable part in a predetermined displacement direction, and a stopper provided apart from the movable part and for preventing displacement of the movable part with a predetermined amplitude or more. (21, 27); displacement signal detection means (25a) for detecting a displacement signal resulting from displacement of the movable portion to the stopper with the displacement detector mounted on the mounting table; and the displacement signal. A displacement amount calculating means (42) for calculating a displacement amount of the movable portion to the stopper based on the displacement signal detected by the detecting portion, and a displacement amount of the movable portion calculated by the displacement amount calculating portion. Attitude control means (4) for generating and outputting an attitude control signal for controlling the attitude of the displacement detector by adjusting the inclination of the mounting table in order to set the amount of displacement of the displacement detector to a predetermined value.
3, 44, 45), and driving means for inputting the attitude control signal and extending and contracting the support portion based on the attitude control signal.

According to the first aspect of the present invention, a displacement signal caused by the displacement when the movable portion is displaced to one stopper is detected by the displacement signal detecting device, and the displacement signal is detected by the displacement signal detecting device. Based on the displacement amount of the movable portion up to the stopper is calculated by the calculation displacement amount calculating means,
In order to set the calculated amount of displacement to a predetermined value, a posture control signal for controlling the posture of the displacement detector by adjusting the inclination of the mounting table is output by the posture control means, and the support unit responds to this posture control signal. Since the inclination of the mounting table is adjusted by expansion and contraction by the driving means based on the driving means, the posture of the displacement detector can be brought into a desired state, and the position of the movable part of the displacement detector can be precisely adjusted by a machine. It can be adjusted to a neutral position. That is, by controlling the displacement amount of the movable portion to the stopper to a predetermined value, the position of the movable portion in a state where the movable portion is placed on the mounting table can be controlled, so that a predetermined value (for example, a preset value) is used. Mechanical neutral position, or
By making the distance between one stopper and the movable part equal to the distance between the other stopper and the movable part), the movable part of the displacement detector can be accurately positioned at the mechanical neutral position. It can be. Therefore, the mechanical neutral position is more accurate as compared with the conventional case where the neutral position is judged by the human eyes, and the measurement error due to the non-linearity of the spring constant of the support spring can be reduced as much as possible.

Here, the method of forming a DC magnetic field may be a method using a permanent magnet or a method using an electromagnet. The displacement detector is, for example, an electrokinetic speedometer or a servo-type accelerometer, but is not limited thereto, and may be any device that measures the displacement of the movable portion and detects the displacement. There may be. The measurement of the displacement of the movable part may be a method of directly detecting the displacement, or, as in the case of an electrokinetic speedometer, detecting the speed indirectly and integrating this speed. The displacement may be obtained. The movable part displacement means may displace the movable part by mechanical force using a cylinder or the like, or may generate an electric force by flowing a direct current to the movable part to displace the movable part. It may be something. The displacement signal refers to a signal based on an electromotive force generated by displacement of the movable portion, a current value for returning the movable portion to its original position, or the like. The driving unit is, for example, a servomotor, but is not limited to this, and may be any unit as long as the supporting unit can be extended and contracted.

According to a second aspect of the present invention, in the attitude control system for a displacement detector according to the first aspect, the attitude control means is configured to mount one of the movable parts in a state where the displacement detector is mounted on the mounting table. A storage means (43) for storing a first displacement amount when the movable portion is displaced to the stopper provided on the displacement direction side of the movable member; and the movable member having the displacement detector mounted on the mounting table. A second position when the movable portion is displaced to the stopper provided on the other displacement direction side of the portion.
Comparing means for comparing the amount of displacement with the first displacement stored in the storage means, and the first displacement and the second displacement based on a comparison result by the comparing means. And a posture control signal generating means (45) for generating and outputting the posture control signal such that the amounts are equal.

According to the second aspect of the present invention, it is needless to say that the same effect as that of the first aspect of the invention can be obtained. In particular, the storage means provided in the attitude control means detects the displacement of the mounting table. A first displacement amount of the movable portion up to a stopper provided on one displacement direction side of the movable portion in a state where the container is placed is stored, and the first displacement amount is detected by the comparing means and a displacement is detected on the mounting table. In the state where the container is placed, the second displacement amount of the movable portion up to the stopper provided on the other displacement direction side of the movable portion is compared, and the first displacement amount is compared with the first displacement amount by the posture control signal generation means. A posture control signal is generated and output so that the displacement amount of the second position is equal to that of the second position, so that the position of the movable portion can be accurately adjusted to the mechanical neutral position without inputting a predetermined value in advance. Can be done.

According to a third aspect of the present invention, the movable portion (303) has a pair of support springs (3) in the gap where the DC magnetic field is formed.
06), a displacement detector (304) for detecting displacement of the movable unit due to vibration or tilt, and the movable unit when the displacement detector detects displacement of the movable unit from a zero position. A drive control unit (302) for applying an electromagnetic force to return to the zero position to the movable unit (302); and a posture control system (1) for controlling the posture of the displacement detector (300).
1) A mounting table (12) on which the displacement detector is mounted.
And a telescopic support part (12a) that supports the mounting table.
Zero position control means (13) for outputting a zero position control signal for returning the movable portion to the zero position based on the displacement of the movable portion detected by the displacement detection portion; and the zero position control signal. And a driving unit (14) that expands and contracts the support portion based on the zero point position control signal and returns the movable portion to the zero point position.

According to the third aspect of the present invention, a zero point position control signal for returning the movable part to the zero point position is output by the zero point position control means based on the displacement of the movable part detected by the displacement detector. The support part expands and contracts by the driving means,
Since the movable part is returned to the zero point position, the position of the movable part of the displacement detector can be adjusted to the mechanical neutral position with high accuracy.

According to a fourth aspect of the present invention, the movable portion is supported by a pair of support springs in a gap in which a DC magnetic field is formed, and the displacement detecting portion detects displacement of the movable portion due to vibration or inclination. A drive control unit (102) that applies an electromagnetic force to the movable unit to return the movable unit to the zero position when the displacement detection unit detects a displacement of the movable unit from the zero position;
A displacement detector (161) for displacing the movable portion in a predetermined displacement direction, the displacement detector being provided separately from the movable portion, and preventing displacement of the movable portion having a predetermined amplitude or more. Generating a zero point position control signal for correcting the zero point position of the movable part in order to set the amount of displacement of the movable part to the stopper detected by the displacement detector to a predetermined value. And a zero point position control means (164) for outputting to the drive control section.

According to the fourth aspect of the present invention, the displacement when the movable portion is displaced to the one stopper is detected by the displacement detecting portion by the movable portion displacement means, and this displacement amount is set to a predetermined value. Therefore, a zero position control signal for correcting the zero position of the movable section is output by the zero position control means, and the drive control section drives based on the zero position control signal to correct the zero position of the movable section. Therefore, the movable part of the displacement detector can be adjusted to the mechanical neutral position with high accuracy. Therefore, the mechanical neutral position is more accurate as compared with the conventional case where the neutral position is judged by the human eyes, and the measurement error due to the non-linearity of the spring constant of the support spring can be reduced as much as possible. In particular, the position of the movable part can be adjusted to the mechanical neutral position without using a mounting table or the like.

According to a fifth aspect of the present invention, in the method for controlling the position of a displacement detector by the position control system for a displacement detector according to the first or second aspect, the displacement detector is placed on a mounting table, and the movable part displacement means is provided. By displacing the movable portion to one of the stoppers, a displacement signal due to the displacement at this time is detected by a displacement signal detecting means, and based on the displacement signal, the displacement amount of the movable portion to the stopper is calculated. The displacement amount calculated by the displacement amount calculating means, the calculated displacement amount,
In order to set a predetermined value, an attitude control signal for controlling the attitude of the displacement detector by adjusting the inclination of the mounting table is generated and output by attitude control means, and the support section is generated based on the attitude control signal. Is expanded and contracted by the driving means to adjust the inclination of the mounting table.

According to the fifth aspect of the invention, the displacement signal caused by the displacement when the movable portion is displaced to the one stopper is detected by the movable portion displacement means, and the displacement signal is detected by the displacement signal detection means. Based on the displacement amount of the movable portion up to the stopper is calculated by the calculation displacement amount calculating means,
In order to set the calculated amount of displacement to a predetermined value, a posture control signal for controlling the posture of the displacement detector by adjusting the inclination of the mounting table is output by the posture control means, and the support unit is controlled based on the posture control signal. Since the inclination of the mounting table is adjusted by expanding and contracting by the driving means, the posture of the displacement detector can be set in a desired state, and the position of the movable part of the displacement detector can be mechanically and precisely controlled. Can be adjusted to neutral position.

[0019]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing an embodiment of a displacement detector attitude control system and a displacement detector attitude control method according to the present invention; [First Embodiment] FIG. 1 is a diagram schematically showing a main configuration of an attitude control system for an electrokinetic vibration detector according to a first embodiment of the present invention. An attitude control system 1 shown in FIG. 1 includes a test stand 3 (mounting table) on which an electro-dynamic vibration detector 2 (displacement detector) is mounted, and an attitude control unit 4 for controlling the attitude of the electro-dynamic vibration detector 2. (Posture control means).

The electrodynamic vibration detector 2 is, for example, shown in FIG.
As shown in the figure, an outer magnetic pole 22, an inner magnetic pole 23, a permanent magnet 24, a movable portion 25, a support spring 2
6, 26, a stopper 27 and the like. The outer magnetic pole 22 is a magnetic material magnetized by a permanent magnet 24. The inner magnetic pole 23 is a magnetic material magnetized by a permanent magnet 24. And the outer magnetic pole 22
A DC magnetic field is formed in a gap G between an annular protrusion 22a formed along the circumference of the upper end of the inner magnetic pole 23 and the inner magnetic pole 23.

The movable portion 25 vibrates along a specific vibration direction while being restrained in the case 21 by a pair of support springs 26, 26 formed of ring-shaped leaf springs. The support springs 26, 26 are formed of, for example, a diaphragm type spring or a leaf spring. The stopper 27 protrudes from the case 21 at a position separated by a predetermined width from one end of the movable portion 25 in the displacement direction so as to prevent the movable portion 25 from displacing at a predetermined amplitude or more to prevent the displacement. It is provided. The case 21 is provided at a position spaced apart from the other end of the movable portion 25 in the movable direction by a predetermined width so as to block the displacement of the movable portion 25, and the case 21 serves as the stopper 27. I have.

The movable part 25 includes a power generation coil 25a.
(Displacement signal detection means) and a test coil 25b (movable part displacement means) concentrically wound around the power generation coil 25a. The test coil 25b is
The movable section 25 is connected to a current generating circuit 41 to be described later, and when a direct current is supplied from the current generating circuit 41, the movable section 25 can be moved in a displacement direction corresponding to the polarity. The power generation coil 25a is
When the power generation coil 25a vibrates with the vibration of the power generation coil 25a, an electromotive force (displacement signal) proportional to the vibration speed is generated.
The vibrations can be detected by the electromotive force generated at both ends of the line a.

The test stand 3 includes, for example, three telescopic supporting portions 31, one of which is connected to the driving portion 32, and the driving portion 32 is controlled by the posture control portion 4. Is driven, the support portion 31 expands and contracts.

The attitude control unit 4 includes a current generation circuit 41
(Movable part displacement means), an integration circuit 42 (displacement amount calculation means), a memory 43 (storage means), a comparison circuit 44 (comparison means), a posture control circuit 45 (posture control signal generation means), and the like. The current generating circuit 41 is a circuit for flowing a direct current to the test coil 25b. The integration circuit 42 is a circuit that calculates an amount of displacement by integrating an electromotive force proportional to the vibration speed output from the power generation coil 25a. The calculated displacement amount is output to the memory 43 or the comparison circuit 44.

The memory 43 stores the first displacement amount of the movable portion 25 up to the stopper 27 in one vibration direction calculated by the integration circuit 42. When the second displacement amount of the movable section 25 up to the stopper 27 in the other vibration direction is calculated, the comparison circuit 44
The first displacement amount stored in the memory is extracted, compared with the second displacement amount, and the result is output to the attitude control circuit 45.
The attitude control circuit 45 controls the inclination of the test stand 3 based on the comparison result so that the first displacement amount and the second displacement amount are equal to each other. An attitude control signal for controlling the attitude is output to the drive unit 32.

The drive section 32 includes, for example, a servomotor (not shown), and when the attitude control signal is input,
In response to the attitude control signal, a servomotor (not shown) is driven to expand and contract the support portion 31 of the test stand 3, whereby the inclination of the test stand 3 can be adjusted, Both stoppers 21 and 2
7 can be equalized. Thereby, the movable portion 25 can be accurately positioned at the mechanical neutral position. Also, in the memory 43,
The reference distance data is input in advance, and the integration circuit 42
By comparing the distance data between one end of the movable portion 25 in the movable direction and the stoppers 21 and 27 calculated by
In accordance with the difference, the driving unit 32 eliminates the difference.
However, an attitude control signal may be output.

Next, the attitude control operation of the electro-dynamic vibration detector 2 by the attitude control system 1 will be described. First, the electrodynamic vibration detector 2 is placed on the test stand 3. Next, a DC current having a positive polarity is supplied from the current generating circuit 41 to the test coil 25b to displace the movable portion 25 to the stopper 27, and the DC current supplied to the test coil 25b is momentarily interrupted. Then, the electromotive force generated in the power generation coil 25a due to the displacement at this time is output to the integration circuit 42, and the first electromotive force of the movable portion 25 up to the stopper 27 is
Is calculated. This first displacement is stored in the memory 4
3 is stored.

Subsequently, a DC current having a negative polarity is supplied from the current generating circuit 41 to the test coil 25b to displace the movable portion 25 to the case 21 (which functions as a stopper). Interrupt the current.
Then, the electromotive force generated in the power generation coil 25a due to the displacement at this time is output to the integration circuit 42, and the second displacement amount of the movable portion 25 to the case 21 is calculated. The calculated second displacement amount is output to the comparison circuit 44, and the comparison circuit 44 extracts the first displacement amount stored in the memory 43, and obtains the first displacement amount and the second displacement amount. Are compared, and as a result, a data signal is output to the attitude control circuit 45.

Next, based on the comparison result data output to the attitude control circuit 45, the attitude control circuit 45 detects the electro-dynamic vibration so that the first displacement and the second displacement are equal. A posture control signal for controlling the posture of the vessel 2 is generated and output to the drive unit 32. Next, based on the attitude control signal, a servomotor (not shown) is driven to expand and contract the support portion 31 to adjust the inclination of the test stand 3. Thereby, the position of the movable part of the electrodynamic vibration detector 2 can be adjusted to the mechanical neutral position with high accuracy.

According to the attitude control system 1 of the electro-dynamic vibration detector 2 of the first embodiment of the present invention described above, the electro-dynamic By controlling the attitude of the vibration detector 2, the movable portion 25 of the electro-dynamic vibration detector 2 can be accurately adjusted to the mechanical neutral position. Therefore, the mechanical neutral position is more accurate as compared with the conventional case where the neutral position is judged by the human eyes, and the measurement error due to the non-linearity of the spring constant of the support spring can be reduced as much as possible.

[Second Embodiment] FIG. 2 is a diagram schematically showing a main configuration of a servo vibration detector according to a second embodiment of the present invention. The servo-type vibration detector 100 (displacement detector) shown in FIG. 2 includes a drive control unit 102, a pendulum (movable unit) 103, a displacement detection unit 104, a servo amplifier 105, and a pendulum 10 provided inside a case 101.
A zero point position control unit 106 (zero point position control means) for performing the zero point position control of No. 3.

The drive control unit 102 includes a permanent magnet 121 fixed to the case 101 and a drive coil 122 wound around the pendulum 103 and arranged to face the permanent magnet 121. Thus, an electromagnetic force for moving the pendulum 103 attached to the drive coil 122 is generated. Between the pendulum 103 and the permanent magnet 121, the support spring 123 and the damper 12
4 are provided in parallel. The pendulum 103 has a test coil 125 connected to a current generation circuit 161 to be described later.
Is wound.

The displacement detecting unit 104 includes an electrode plate 104 a attached to the pendulum 103 and an electrode plate 104 on the case 101 side.
b, the bipolar plates 104a of the capacitor C formed between
The displacement of the pendulum 103 is detected by measuring the displacement of the capacitance between the electrodes 104b. Also,
At positions separated from the pendulum 103 in the movable direction, stoppers 107 for preventing displacement of the pendulum 103 are provided inside the case 101, respectively. In the servo-type vibration detector 100 having the above-described configuration, when acceleration is applied to the pendulum 103 and the pendulum 103 deviates from the zero position, the displacement detection unit 104 detects the deviation, and the servo amplifier 1
Numeral 05 supplies current to the drive coil 122 of the drive control unit 102.

Since this electromagnetic force is balanced with the acceleration that has caused the pendulum 103 to shift, the acceleration applied to the pendulum 103 can be detected by measuring this current. The zero point position control unit 106 includes a current generation circuit 161 (movable part displacement means), a memory 162 (storage means), a comparison circuit 163 (comparison means), a zero point position control circuit 164 (zero point position control means), and the like. I have. The current generation circuit 161 is a circuit for passing a direct current to the test coil 125.

The memory 162 has a displacement detection unit 104
The first displacement amount of the pendulum 103 up to the stopper 107 in one vibration direction detected by the above is stored. When the second displacement amount of the pendulum 103 up to the stopper 107 in the other vibration direction is detected, the comparison circuit 163 extracts the first displacement amount stored in the memory 162 and compares the first displacement amount with the second displacement amount. Then, the result is output to the zero point position control circuit 164. The zero position control circuit 16
4 outputs a zero point position control signal for controlling the zero point position of the pendulum 103 based on the comparison result so that the first displacement amount and the second displacement amount become equal to each other.
02 is output. When the zero point position control signal is input, the drive control unit 102 can drive the servo amplifier 105 according to the zero point position control signal to correct the zero point position of the pendulum 103. The displacement up to both stoppers 107 can be made equal. Thus, the pendulum 103 can be accurately positioned at the mechanical neutral position.

In addition, reference distance data is input to the memory 162 in advance, and the distance between one end of the pendulum 103 in the movable direction and the stopper 107 detected by the displacement detection unit 104 is compared. According to the difference, a zero point position control signal may be output to the drive control unit 102 so as to eliminate the difference.

Next, the zero point position control operation of the pendulum 103 of the servo type vibration detector 100 will be described. First, the servo-type vibration detector 100 is placed at a predetermined location. Next, the test coil 125 is output from the current generation circuit 161.
, A positive direct current is passed through the pendulum, the pendulum 103 is displaced to the stopper 107, and the direct current passed through the test coil 125 is momentarily interrupted. Then, the displacement detection unit 104
As a result, one of the stoppers 10 of the pendulum 103
The first displacement amount up to 7 (for example, 107a) is detected. This first displacement amount is stored in the memory 162.

Subsequently, a negative DC current is passed from the current generating circuit 161 to the verification coil 125 to
3 is displaced to the stopper 107 (for example, 107b), and the DC current flowing through the test coil 125 is momentarily interrupted. Then, the pendulum 10 is detected by the displacement detecting unit 104.
A second displacement amount up to the third stopper 107 is detected. The detected second displacement amount is output to the comparison circuit 163, and the comparison circuit 163 extracts the first displacement amount stored in the memory 162, and the first displacement amount and the second displacement amount Are compared, and the comparison result data signal is output to the zero point position control circuit 164.

Next, based on the comparison result data signal output to the zero point position control circuit 164, the zero point position control circuit 164 controls the pendulum 103 so that the first displacement amount and the second displacement amount become equal. Is generated and output to the drive control unit 102. Next, based on the zero position control signal, the servo amplifier 105 is driven to supply a current to the drive coil 122, thereby correcting the zero position of the pendulum 103. Thereby, the position of the pendulum 103 of the servo vibration detector 100 can be adjusted to the mechanical neutral position with high accuracy.

As described above, according to the servo-type vibration detector 100, the pendulum 103 of the servo-type vibration detector 100 can be adjusted to the mechanical neutral position with high accuracy. It becomes more accurate than the judgment by the human eyes,
The measurement error due to the influence of the nonlinearity of the spring constant of No. 3 can be minimized.

Although the servo-type vibration detector 100 has been described in the above embodiment, the same effect can be obtained with an inclinometer incorporating the servo-type vibration detector 100 in a device.

[Third Embodiment] FIG. 4 is a diagram schematically showing a main configuration of an attitude control system for a servo-type vibration detector according to a third embodiment of the present invention. The attitude control system 11 shown in FIG.
0 (displacement detector), a test stand 12 (mounting table), a posture control circuit 13 for controlling the posture of the servo-type vibration detector 300 (zero point position control means), and the posture control circuit 1
3 is provided with a drive unit 14 for driving the test stand 12 based on the posture of the test stand 3.

The servo type vibration detector 300 has the same structure as that described in the prior art, and the description is omitted.
The posture control circuit 13 inputs a displacement amount of the pendulum 303 (movable portion) from the zero position detected by the displacement detection unit 304 as a detection signal, and adjusts the inclination of the test stand 13 so that the displacement amount becomes zero. A zero point position control signal for controlling the attitude of the servo vibration detector 300 is output to the drive unit 14.

The drive section 14 includes, for example, a servomotor (not shown). When the zero point position control signal is input, the servomotor (not shown) is driven in accordance with the zero point position control signal to drive the test stand 12. The support portion 12a can be expanded and contracted.
2 can be adjusted, and the pendulum 303 can be accurately positioned at the mechanical neutral position.

According to the attitude control system for a servo-type vibration detector according to the third embodiment of the present invention described above, the pendulum 303 is set to the zero point based on the displacement of the pendulum 303 detected by the displacement detector 304. A zero point position control signal for returning to the position is output by the attitude control circuit 13,
The support part 12 a is expanded and contracted by the driving part 14, and the pendulum 30
3 is returned to the zero position, so that the servo type displacement detector 30
The position of the zero pendulum 303 can be adjusted to the mechanical neutral position with high accuracy.

[0046]

According to the first aspect of the present invention, a displacement signal caused by the displacement when the movable portion is displaced to one stopper is detected by the displacement signal detecting device by the movable portion displacement device. Based on the displacement signal, the displacement amount of the movable portion up to the stopper is calculated by the calculating displacement amount calculating means, and in order to set the calculated displacement amount to a predetermined value, the inclination of the mounting table is adjusted by adjusting the inclination of the mounting table. A posture control signal for controlling the posture is output by the posture control means, and the support section expands and contracts by the driving means based on the posture control signal, and the inclination of the mounting table is adjusted. As a result, the position of the movable portion of the displacement detector can be adjusted to the mechanical neutral position with high accuracy. That is, by controlling the displacement amount of the movable portion to the stopper to a predetermined value, the position of the movable portion in a state where the movable portion is placed on the mounting table can be controlled, so that a predetermined value (for example, a preset value) is used. By setting the value to a mechanical neutral position or a value at which the distance between one stopper and the movable part is equal to the distance between the other stopper and the movable part), the movable part of the displacement detector Can be accurately adjusted to the mechanical neutral position. Therefore, the mechanical neutral position is more accurate as compared with the conventional case where the neutral position is judged by the human eyes, and the measurement error due to the non-linearity of the spring constant of the support spring can be reduced as much as possible.

According to the second aspect of the invention, it is needless to say that the same effect as that of the first aspect of the invention can be obtained. In particular, the storage means provided in the attitude control means detects the displacement of the mounting table. A first displacement amount of the movable portion up to a stopper provided on one displacement direction side of the movable portion in a state where the container is placed is stored, and the first displacement amount is detected by the comparing means and a displacement is detected on the mounting table. In the state where the container is placed, the second displacement amount of the movable portion up to the stopper provided on the other displacement direction side of the movable portion is compared, and the first displacement amount is compared with the first displacement amount by the posture control signal generation means. Since the attitude control signal is generated and output so that the displacement amount becomes equal to 2, the displacement detector can be accurately adjusted to the mechanical neutral position without inputting a predetermined value in advance. .

According to the third aspect of the present invention, a zero point position control signal for returning the movable part to the zero point position is output by the zero point position control means based on the displacement of the movable part detected by the displacement detector. The support part expands and contracts by the driving means,
Since the movable part is returned to the zero point position, the position of the movable part of the displacement detector can be adjusted to the mechanical neutral position with high accuracy.

According to the fourth aspect of the invention, the displacement when the movable portion is displaced to one stopper is detected by the displacement detecting portion by the movable portion displacement means, and this displacement amount is set to a predetermined value. Therefore, a zero position control signal for correcting the zero position of the movable section is output by the zero position control means, and the drive control section drives based on the zero position control signal to correct the zero position of the movable section. Therefore, the movable part of the displacement detector can be adjusted to the mechanical neutral position with high accuracy. Therefore, the mechanical neutral position is more accurate as compared with the conventional case where the neutral position is judged by the human eyes, and the measurement error due to the non-linearity of the spring constant of the support spring can be reduced as much as possible.

According to the fifth aspect of the present invention, a displacement signal caused by the displacement when the movable portion is displaced to one stopper is detected by the movable portion displacement means, and the displacement signal is detected by the displacement signal detection means. Based on the displacement amount of the movable portion up to the stopper is calculated by the calculation displacement amount calculating means,
In order to set the calculated amount of displacement to a predetermined value, a posture control signal for controlling the posture of the displacement detector by adjusting the inclination of the mounting table is output by the posture control means, and the support unit is controlled based on the posture control signal. Since the inclination of the mounting table is adjusted by expanding and contracting by the driving means, the posture of the displacement detector can be set in a desired state, and the position of the movable part of the displacement detector can be mechanically and precisely controlled. Can be adjusted to neutral position.

[Brief description of the drawings]

FIG. 1 is a diagram schematically showing a configuration of a main part of an electro-dynamic vibration detector according to a first embodiment of the present invention.

FIG. 2 is a diagram schematically illustrating a main configuration of a servo-type vibration detector according to a second embodiment of the present invention.

FIG. 3 is a main block diagram of a zero point position control unit of the servo vibration detector of FIG.

FIG. 4 is a diagram schematically illustrating a main configuration of an attitude control system for a servo-type vibration detector according to a third embodiment of the present invention.

FIG. 5 is a side sectional view showing a configuration of a main part of a conventional electrodynamic vibration detector.

FIG. 6 is a side sectional view schematically showing a configuration of a main part of a conventional servo vibration detector.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Attitude control system 2 Electrokinetic vibration detector (displacement detector) 3 Verification table (mounting table) 4 Attitude control part (posture control means) 21 Case (stopper) 25 Movable part 25a Generating coil 25b Verification coil (moveable part displacement) Means) 26 Support spring 27 Stopper 31 Support part 32 Drive part 41 Current generation circuit (movable part displacement means) 42 Integration circuit (displacement amount calculation means) 43 Memory (storage means) 44 Comparison circuit (comparison means) 45 Attitude control circuit ( Attitude control signal generation means) 100 Servo type vibration detector (displacement detector) 101 Case 102 Drive control unit 103 Pendulum (movable part) 104 Displacement detection unit 105 Servo amplifier 106 Zero point position control unit (Zero position control unit) 107 Stopper 122 Drive coil 123 Support spring 125 Test coil 161 Current generation circuit (movable part Means) 162 memory (storage means) 163 comparator circuit (comparator) 164 zero point position control circuit

Claims (5)

[Claims] 1. A posture control system in which a movable portion is supported by a pair of support springs in a gap in which a DC magnetic field is formed, and controls a posture of a displacement detector that measures displacement of the movable portion due to vibration or inclination. A mounting table on which the displacement detector is mounted, a support section that supports the mounting table, and that can be extended and contracted; a movable section displacement unit that displaces the movable section in a predetermined direction; A stopper for preventing displacement of the movable portion having a predetermined amplitude or more, and a displacement signal for detecting a displacement signal due to displacement of the movable portion up to the stopper in a state where the displacement detector is mounted on the mounting table. Detecting means, a displacement amount calculating means for calculating a displacement amount of the movable portion to the stopper based on the displacement signal detected by the displacement signal detecting means, and a displacement amount calculating means. In order to set the displacement amount of the movable portion to the stopper calculated as described above to a predetermined value, a posture control signal for controlling the posture of the displacement detector by adjusting the inclination of the mounting table is generated and output. A posture control system for a displacement detector, comprising: a posture control unit for inputting the posture control signal; and a driving unit for expanding and contracting the support unit based on the posture control signal. 2. The posture control system for a displacement detector according to claim 1, wherein the posture control means is provided on one of the movable units in a displacement direction in a state where the displacement detector is mounted on the mounting table. Storage means for storing a first displacement amount when the movable portion is displaced to the stopper, provided on the other side of the movable portion in the displacement direction while the displacement detector is mounted on the mounting table. A second displacement amount when the movable portion is displaced up to the stopper, and a comparing means for comparing the first displacement amount stored in the storage means, based on a comparison result by the comparing means, And a posture control signal generating means for generating and outputting the posture control signal such that the first displacement amount and the second displacement amount are equal to each other. Attitude control system. 3. A movable portion supported by a pair of support springs in a gap in which a DC magnetic field is formed, a displacement detecting portion detecting displacement of the movable portion due to vibration or inclination, and the movable portion being movable by the displacement detecting portion. A drive control unit that applies an electromagnetic force to the movable unit to return the movable unit to the zero position when the displacement of the unit from the zero position is detected, and a posture control system that controls the posture of the displacement detector. A mounting table on which the displacement detector is mounted, a supporting section that supports the mounting table, and an extendable support section; and the movable section returns to the zero point position based on the displacement of the movable section detected by the displacement detection section. Zero point position control means for outputting a zero point position control signal, and a drive means for inputting the zero point position control signal, expanding and contracting the support portion based on the zero point position control signal, and returning the movable portion to the zero position. , Equipped Displacement detector of the attitude control system characterized by the. 4. A movable part is supported by a pair of support springs in a gap in which a DC magnetic field is formed, and a displacement detector for detecting displacement of the movable part due to vibration or inclination; A drive control unit that applies an electromagnetic force to the movable unit to return the movable unit to the zero position when a displacement of the movable unit from the zero position is detected. A movable section displacement means for displacing the movable section in a direction, a stopper provided to be spaced apart from the movable section, and for preventing displacement of the movable section by a predetermined amplitude or more; and a stopper of the movable section detected by the displacement detection section. And a zero-point position control unit that generates a zero-point position control signal for correcting the zero-point position of the movable unit and outputs the signal to the drive control unit in order to set the displacement amount to a predetermined value. Features Displacement detector. 5. The posture control method of a displacement detector according to claim 1, wherein the displacement detector is mounted on a mounting table, and the movable part is moved by the movable part displacement means. Is displaced to one of the stoppers, and a displacement signal caused by the displacement at this time is detected by a displacement signal detecting means. Based on the displacement signal, a displacement amount of the movable portion to the stopper is calculated by a displacement amount calculating means. In order to calculate the calculated displacement amount to a predetermined value, a posture control signal for controlling the posture of the displacement detector by adjusting the inclination of the mounting table is generated and output by a posture control unit. A posture control method for a displacement detector, wherein the inclination of the mounting table is adjusted by expanding and contracting the support unit by a driving unit based on the posture control signal.