JP2000334276A - Operation of filtration device - Google Patents
Operation of filtration deviceInfo
- Publication number
- JP2000334276A JP2000334276A JP11145695A JP14569599A JP2000334276A JP 2000334276 A JP2000334276 A JP 2000334276A JP 11145695 A JP11145695 A JP 11145695A JP 14569599 A JP14569599 A JP 14569599A JP 2000334276 A JP2000334276 A JP 2000334276A
- Authority
- JP
- Japan
- Prior art keywords
- filtration
- separation membrane
- membrane module
- washing water
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、下排水処理や産業
廃水処理における固液分離など、特に汚濁性の高い液体
の濾過処理に用いられる濾過装置の運転方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for operating a filtration device used for filtration of highly polluting liquids, such as solid-liquid separation in wastewater treatment and industrial wastewater treatment.
【0002】[0002]
【従来の技術】従来より、膜分離の技術は、無菌水、飲
料水、高度純水の製造、空気の浄化等に数多く使用され
てきた。これらの用途に加えて、近年では、下水処理場
における2次処理、3次処理や、浄化槽における固液分
離、産業廃水中の懸濁物質(SS)の固液分離など、高
汚濁性水の処理用途に用いられるようになっている。2. Description of the Related Art Conventionally, a large number of membrane separation techniques have been used for producing sterile water, drinking water, highly purified water, purifying air, and the like. In addition to these uses, in recent years, high-contamination water has been used in secondary and tertiary treatment in sewage treatment plants, solid-liquid separation in septic tanks, and solid-liquid separation of suspended solids (SS) in industrial wastewater. It is used for processing purposes.
【0003】図5は、分離膜モジュールを用いた濾過装
置の一例を示す概略構成図である。この濾過装置50
は、被処理液供給ライン51から供給された被処理液を
処理する被処理液槽52と、この被処理液槽52内に配
置された分離膜モジュール53と、濾液用配管54によ
ってこの分離膜モジュール53と接続されたポンプ55
とを具備して概略構成される。被処理液槽52に満たさ
れた被処理液は、ポンプ55を稼働させ、分離膜モジュ
ール53内を負圧にすることによって、分離膜モジュー
ル53によって濾過され、その濾液は、濾液用配管54
内部を通って、系外に排出される。FIG. 5 is a schematic diagram showing an example of a filtration device using a separation membrane module. This filtering device 50
Is a liquid tank 52 for processing the liquid to be processed supplied from the liquid supply line 51, a separation membrane module 53 disposed in the liquid tank 52, and a filtrate piping 54 for the separation membrane. Pump 55 connected to module 53
And is schematically configured. The liquid to be treated filled in the liquid to be treated tank 52 is filtered by the separation membrane module 53 by operating the pump 55 to make the inside of the separation membrane module 53 a negative pressure.
Through the inside, it is discharged out of the system.
【0004】分離膜モジュール53を用いた濾過装置5
0においては、長時間の濾過運転を行うと、懸濁物質
(SS)等による分離膜モジュール53の膜面の閉塞が
起こる。この膜面閉塞による分離膜モジュール53の分
離能の低下は、濾液用配管54に設けられた圧力計56
によって測定される濾過時の差圧上昇によって知ること
ができる。特に、汚濁性の高い液体の処理においては、
分離膜モジュール53の閉塞が起こりやすく、このた
め、分離膜モジュール53の寿命が短くなるという問題
が生じていた。[0006] Filtration device 5 using separation membrane module 53
At 0, if the filtration operation is performed for a long time, the membrane surface of the separation membrane module 53 will be blocked by the suspended solids (SS) and the like. The decrease in the separation ability of the separation membrane module 53 due to the membrane surface blockage is caused by the pressure gauge 56 provided in the filtrate pipe 54.
It can be known from the differential pressure rise at the time of filtration measured by the above method. Especially in the treatment of highly polluting liquids,
The separation membrane module 53 is likely to be blocked, which causes a problem that the life of the separation membrane module 53 is shortened.
【0005】そこで、膜面が閉塞した分離膜モジュール
53を、薬液などの洗浄水を満たした洗浄用タンクに移
動し、分離膜モジュール53の膜面に付着した閉塞原因
物質を取り除き、その分離能を回復させることが行われ
ている。Then, the separation membrane module 53 whose membrane surface is closed is moved to a washing tank filled with washing water such as a chemical solution, and the clogging substance adhering to the membrane surface of the separation membrane module 53 is removed. It has been made to recover.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、薬液を
満たした洗浄用タンクに分離膜モジュール53を移動
し、薬液に浸漬する方法では、分離膜モジュール53を
濾過装置50から取り外し、移動する手間がかかるとい
う問題があった。また、被処理液槽52内の被処理液を
一旦、排出し、これに代わって薬液を被処理液槽52に
満たすことによって、分離膜モジュール53を移動せず
に、分離膜モジュール53の膜面の薬液洗浄を行う方法
も考えられるが、多量の薬液が必要とされる。However, in the method in which the separation membrane module 53 is moved to a cleaning tank filled with a chemical solution and immersed in the chemical solution, it takes time to remove the separation membrane module 53 from the filtration device 50 and move the same. There was a problem. Further, the liquid to be treated in the liquid to be treated tank 52 is once discharged, and instead, the liquid to be treated is filled in the liquid to be treated 52 so that the membrane of the separation membrane module 53 can be moved without moving the separation membrane module 53. Although a method of cleaning the surface with a chemical solution is conceivable, a large amount of the chemical solution is required.
【0007】そこで、特開平7−313850号公報、
特開平9−75689号公報、特開平10−15615
5号公報、特開平10−66844号公報などに示され
るような、分離膜モジュールに薬液を2次側より通液し
て洗浄する方法も提案されているが、分離膜モジュール
の膜面が閉塞しているため、分離膜モジュール全体に薬
液が行き渡りにくく、分離膜モジュールに洗浄斑が生じ
やすかった。そのため、洗浄効果を発揮させるために
は、分離膜モジュール内に薬液を保持させる時間をある
程度取る必要があった。Therefore, Japanese Patent Application Laid-Open No. Hei 7-313850 discloses
JP-A-9-75689, JP-A-10-15615
No. 5, Japanese Patent Application Laid-Open No. 10-66844, etc., a method of washing by passing a chemical solution through a separation membrane module from the secondary side has been proposed, but the membrane surface of the separation membrane module is blocked. As a result, it was difficult for the chemical solution to spread throughout the separation membrane module, and washing spots were likely to occur on the separation membrane module. Therefore, in order to exhibit the cleaning effect, it is necessary to take a certain time to hold the chemical solution in the separation membrane module.
【0008】分離膜モジュールの洗浄斑を減らすため
に、圧力をかけて薬液などの洗浄水を通液する方法も提
案されている。しかしながら、結果的には多量の薬液を
使用することになり、また、薬液によって被処理液の性
状が悪くなり、分離膜モジュールを用いた濾過処理へ影
響を及ぼす可能性があった。また、これら分離膜モジュ
ールの洗浄方法は、濾過装置を長期間停止させる必要が
あり、1日当たりの濾過処理能力に影響を及ぼす可能性
があった。[0008] In order to reduce washing spots on the separation membrane module, a method has been proposed in which washing water such as a chemical solution is applied by applying pressure. However, as a result, a large amount of the chemical solution is used, and the properties of the liquid to be treated are deteriorated by the chemical solution, which may affect the filtration treatment using the separation membrane module. In addition, these methods for cleaning a separation membrane module require stopping the filtration device for a long period of time, which may affect the filtration processing capacity per day.
【0009】本発明は、前記事情に鑑みてなされたもの
で、分離膜モジュールを移動させることなく、少量の洗
浄水で、効率よく分離膜モジュールの洗浄を行うことが
でき、高い濾過処理能力を保ちながら、長期にわたり安
定した濾過処理を行うことができる濾過装置の運転方法
を提供することを目的とする。The present invention has been made in view of the above circumstances, and can efficiently clean a separation membrane module with a small amount of washing water without moving the separation membrane module. An object of the present invention is to provide a method of operating a filtration device capable of performing a stable filtration treatment for a long period of time while maintaining the same.
【0010】[0010]
【課題を解決するための手段】すなわち、本発明の濾過
装置の運転方法は、分離膜モジュールによって被処理液
の濾過処理を行う濾過装置の運転方法であって、前記濾
過処理を、濾過停止時間を挟んで間欠的に繰り返し、前
記濾過停止時間内に分離膜モジュールの2次側から洗浄
水を通液し、濾過処理時間と濾過停止時間とからなる1
サイクルの時間が30分以下であることを特徴とする。
また、本発明の濾過装置の運転方法においては、前記洗
浄水を、前記濾過処理時における設定流量以上の流量で
前記分離膜モジュールの2次側から通液することが好ま
しい。That is, a method of operating a filtration device according to the present invention is a method of operating a filtration device for filtering a liquid to be treated by a separation membrane module, wherein the filtration process is performed with a filtration stop time. Is repeated intermittently, washing water is passed from the secondary side of the separation membrane module within the filtration stop time, and the filter treatment time and the filtration stop time
The cycle time is 30 minutes or less.
In the method of operating a filtration device according to the present invention, it is preferable that the washing water is passed from the secondary side of the separation membrane module at a flow rate equal to or higher than a set flow rate during the filtration processing.
【0011】また、本発明の濾過装置の運転方法におい
ては、濾過停止時間の1/8〜1/2の時間内に洗浄水
を通液することが好ましい。また、本発明の濾過装置の
運転方法においては、洗浄水の通液時または洗浄水の通
液後にエアーバブリングによって分離膜モジュールの膜
面の洗浄を行うことが好ましい。また、洗浄水として、
酸化剤溶液、酸水溶液およびアルカリ水溶液のうちの少
なくとも1種の薬液を用いることが好ましい。また、洗
浄水として、さらに水を用い、前記薬液と水を交互に通
液することが好ましい。Further, in the method of operating the filtration device of the present invention, it is preferable that the washing water is passed within 1/8 to 1/2 of the filtration stop time. Further, in the operation method of the filtration device of the present invention, it is preferable that the membrane surface of the separation membrane module is washed by air bubbling when or after the washing water is passed. In addition, as washing water,
It is preferable to use at least one chemical solution of an oxidizing agent solution, an aqueous acid solution and an aqueous alkaline solution. Further, it is preferable that water is further used as the washing water, and the chemical solution and the water are alternately passed.
【0012】[0012]
【発明の実施の形態】以下、図面に基づいて本発明を詳
細に説明する。図1は、分離膜モジュールを用いた濾過
装置の一例を示す概略構成図である。この濾過装置10
は、被処理液供給ライン11から供給された被処理液を
処理する被処理液槽12と、この被処理液槽12内に配
置された分離膜モジュール13と、圧力計16が設けら
れた濾液用配管14によって、この分離膜モジュール1
3の濾液取出口17と接続されたポンプ15と、圧空ポ
ンプ19に接続した膜洗浄エアバブリング用の散気装置
18と、開閉弁22が設けられた洗浄水用配管21によ
って分離膜モジュール13の濾液取出口17に連通可能
に接続された洗浄水貯留部20と、タイマを有する制御
機構(図示略)とを具備して概略構成される。また、濾
液用配管14、濾液取出口17および洗浄水用配管21
の接続部には、流路を切り替えるための三方切替弁23
が設けられている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 is a schematic configuration diagram illustrating an example of a filtration device using a separation membrane module. This filtration device 10
Is a filtrate provided with a liquid tank 12 for processing the liquid supplied from the liquid supply line 11, a separation membrane module 13 disposed in the liquid tank 12, and a pressure gauge 16. This separation membrane module 1
The pump 15 connected to the filtrate outlet 17 of FIG. 3, an air diffuser 18 for membrane cleaning air bubbling connected to a pneumatic pump 19, and a washing water pipe 21 provided with an on-off valve 22 provide a separation membrane module 13. The washing water reservoir 20 is connected to the filtrate outlet 17 so as to be able to communicate with the filtrate, and a control mechanism (not shown) having a timer is schematically configured. Also, the filtrate pipe 14, the filtrate outlet 17 and the washing water pipe 21 are provided.
Is connected to the three-way switching valve 23 for switching the flow path.
Is provided.
【0013】前記分離膜モジュール13は、複数の微細
な孔を有する濾過膜(分離膜)を備えたものであれば特
に限定されるものではなく、例えば、平膜タイプ、中空
糸膜タイプ、管状膜タイプ、袋状膜タイプなどの公知の
分離膜モジュールを適用することができる。中でも、体
積当たりの膜面積を増やし処理効率を上げる見地より、
中空糸膜を用いることが好ましい。また、その材質とし
ては、セルロース、ポリオレフィン、ポリスルフォン、
ポリフッ化ビニリデン(PVDF)、ポリ四フッ化エチ
レン(PTFE)、セラミックス、ポリアクリロニトリ
ル(PAN)などが挙げられる。分離膜モジュール13
の分画性能は、その濾過の目的によって任意のものが選
択でき、通常0.01〜1μmのものが適用できる。The separation membrane module 13 is not particularly limited as long as it has a filtration membrane (separation membrane) having a plurality of fine pores. Examples thereof include a flat membrane type, a hollow fiber membrane type, and a tubular type. Known separation membrane modules such as a membrane type and a bag type membrane type can be applied. Above all, from the viewpoint of increasing the film area per volume and increasing the processing efficiency,
It is preferable to use a hollow fiber membrane. In addition, as its material, cellulose, polyolefin, polysulfone,
Examples include polyvinylidene fluoride (PVDF), polytetrafluoroethylene (PTFE), ceramics, and polyacrylonitrile (PAN). Separation membrane module 13
Can be selected arbitrarily according to the purpose of the filtration, and usually a fraction of 0.01 to 1 μm can be applied.
【0014】分離膜モジュール13には、例えば、図2
に示すような、並行に配された2枚の平膜31,31
と、枠材32,32および枠材33,33とからなり、
前記平膜31,31を支持する枠状支持体とを有して概
略構成される平膜モジュール、図3に示すような、複数
の中空糸で構成される中空糸膜41と、中空糸膜41の
両端に設けられた管状の集水部材42とを有して概略構
成される中空糸膜モジュールなどを適用できる。The separation membrane module 13 includes, for example, FIG.
The two flat membranes 31, 31 arranged in parallel as shown in FIG.
And frame members 32, 32 and frame members 33, 33,
A flat membrane module schematically including a flat membrane 31 supporting the flat membranes 31, a hollow fiber membrane 41 composed of a plurality of hollow fibers as shown in FIG. 3, and a hollow fiber membrane For example, a hollow fiber membrane module having a tubular water collecting member 42 provided at both ends of a hollow fiber membrane 41 can be applied.
【0015】前記制御機構は、タイマと、処理部と、イ
ンターフェース部とから概略構成され、被処理液の濾過
停止と、前記分離膜モジュール13への洗浄水の供給開
始と、前記分離膜モジュール13への洗浄水の供給停止
と、被処理液の濾過開始とを、前記タイマに設定された
任意の時間周期で制御するものである。The control mechanism is roughly composed of a timer, a processing section, and an interface section. The control mechanism stops filtration of the liquid to be treated, starts supply of washing water to the separation membrane module 13, The stop of the supply of the washing water to the filter and the start of the filtration of the liquid to be treated are controlled at an arbitrary time period set in the timer.
【0016】前記タイマは、時間を管理する時計部と、
濾過処理時間の長さ、濾過停止時間の長さ、洗浄水の通
液時間の長さ等の設定を記憶する記憶部とを具備してな
り、記憶部に記憶された設定時間間隔で電気信号を発信
できるようにされている。前記インターフェイス部は、
前記ポンプ15、圧空ポンプ19、開閉弁22、三方切
替弁23と、前記処理部との間を電気的に接続するもの
である。前記処理部は、タイマからの電気信号に基づい
て、前記ポンプ15、圧空ポンプ19の運転の開始と停
止、前記開閉弁22の開閉、三方切替弁23の流路の切
替えを制御するものである。The timer includes a clock unit for managing time,
A storage unit for storing settings such as the length of the filtration processing time, the length of the filtration stop time, and the length of the flow time of the washing water, and an electrical signal at a set time interval stored in the storage unit. You can send out. The interface unit includes:
The pump 15, the pneumatic pump 19, the on-off valve 22, the three-way switching valve 23, and the processing unit are electrically connected. The processing unit controls the start and stop of the operation of the pump 15 and the pneumatic pump 19, the opening and closing of the on-off valve 22, and the switching of the flow path of the three-way switching valve 23, based on an electric signal from a timer. .
【0017】なお、この処理部は専用のハードウエアに
より実現されるものであってもよく、また、この処理部
はメモリおよび中央演算装置(CPU)によって構成さ
れ、処理部の機能を実現するためのプログラムをメモリ
にロードして実行することによりその機能を実現させる
ものであってもよい。また、前記制御機構には、周辺機
器として、入力装置、表示装置等が接続されるものとす
る。ここで、入力装置とは、ディスプレイタッチパネ
ル、スイッチパネル、キーボード等の入力デバイスのこ
とをいい、表示装置とは、CRTや液晶表示装置のこと
をいう。The processing unit may be realized by dedicated hardware. The processing unit is constituted by a memory and a central processing unit (CPU), and realizes the function of the processing unit. The function may be realized by loading the program into a memory and executing the program. An input device, a display device, and the like are connected as peripheral devices to the control mechanism. Here, the input device refers to an input device such as a display touch panel, a switch panel, and a keyboard, and the display device refers to a CRT or a liquid crystal display device.
【0018】前記開閉弁22および三方切替弁23に使
用される弁としては、前記制御機構からの制御によって
弁の開閉、流量の調節、流路の切替えを行うことができ
るものであればよく、例えば、電磁弁、電動弁などが挙
げられる。The valve used for the on-off valve 22 and the three-way switching valve 23 may be any valve that can open and close the valve, adjust the flow rate, and switch the flow path under the control of the control mechanism. For example, an electromagnetic valve, a motor-operated valve and the like can be mentioned.
【0019】次に、この濾過装置10の運転方法につい
て説明する。まず、前記制御部に、濾過処理時間の長
さ、濾過停止時間の長さ、洗浄水の通液時間の長さ等の
設定を入力装置から入力し、前記タイマの記録部にこれ
らの設定を記録する。Next, an operation method of the filtration device 10 will be described. First, the control unit inputs from the input device settings such as the length of the filtration process time, the length of the filtration stop time, and the length of the washing water flow time, and these settings are recorded in the recording unit of the timer. Record.
【0020】ついで、制御機構によって、開閉弁22を
閉じ、三方切替弁23を、濾液取出口17と濾液用配管
14とが接続されるように切り替えた後、ポンプ15お
よび圧空ポンプ19を稼働させ、分離膜モジュール13
の2次側を負圧にして、被処理液の濾過処理を開始す
る。Then, after the control mechanism closes the on-off valve 22 and switches the three-way switching valve 23 so that the filtrate outlet 17 and the filtrate pipe 14 are connected, the pump 15 and the pneumatic pump 19 are operated. , Separation membrane module 13
Is set to a negative pressure to start the filtration of the liquid to be treated.
【0021】制御機構のタイマに設定された濾過処理時
間の終了とともに、制御機構によって、ポンプ15を停
止させ、被処理液の濾過処理を停止する。三方切替弁2
3を、濾液取出口17と洗浄水用配管21とが接続され
るように切り替えた後、開閉弁22を開いて、洗浄水貯
留部内の洗浄水を分離膜モジュール13の2次側から通
液し、分離膜モジュール13の洗浄を行う。At the end of the filtration time set in the timer of the control mechanism, the pump 15 is stopped by the control mechanism to stop the filtration of the liquid to be treated. Three-way switching valve 2
3 is switched so that the filtrate outlet 17 and the washing water pipe 21 are connected to each other, and then the opening / closing valve 22 is opened to allow the washing water in the washing water reservoir to flow from the secondary side of the separation membrane module 13. Then, the separation membrane module 13 is washed.
【0022】制御機構のタイマに設定された洗浄水の通
液時間の終了とともに、制御機構によって、開閉弁22
を閉じて洗浄水の通液を中止し、三方切替弁23を、濾
液取出口17と濾液用配管14とが接続されるように切
り替える。At the end of the flow time of the washing water set in the timer of the control mechanism, the opening / closing valve 22 is controlled by the control mechanism.
Is closed to stop the flow of the wash water, and the three-way switching valve 23 is switched so that the filtrate outlet 17 and the filtrate pipe 14 are connected.
【0023】ついで、制御機構のタイマに設定された濾
過停止時間の終了とともに、ポンプ15を稼働させ、分
離膜モジュール13の2次側を負圧にして、被処理液の
濾過処理を再開する。再び、制御機構のタイマに設定さ
れた濾過処理時間が終了すると、濾過処理を停止して、
洗浄水の通液を行い、洗浄水の通液終了後、被処理液の
濾過処理を再開する。Next, at the end of the filtration stop time set in the timer of the control mechanism, the pump 15 is operated to reduce the pressure on the secondary side of the separation membrane module 13 to restart the filtration of the liquid to be treated. Again, when the filtration processing time set in the timer of the control mechanism ends, the filtration processing is stopped,
The washing water is passed, and after the passing of the washing water, the filtration of the liquid to be treated is restarted.
【0024】このように、濾過装置10においては、前
記濾過処理は、濾過停止時間を挟んで間欠的に繰り返し
行われており、また、濾過停止時間内に行われる分離膜
モジュール13の洗浄も、前記濾過処理時間を挟んで間
欠的に繰り返し行われる。As described above, in the filtration device 10, the filtration treatment is intermittently repeated with the filtration stop time interposed therebetween, and the cleaning of the separation membrane module 13 performed during the filtration stop time is also performed. The filtration is intermittently repeated with the filtration time interposed.
【0025】前記濾過処理時間と前記濾過停止時間とか
らなる1サイクルの時間は、30分以下である必要があ
り、好ましくは10〜25分である。1サイクルの時間
が30分を超えると、分離膜モジュール13の膜面の閉
塞が進行してしまい、分離膜モジュール13の洗浄時に
多量の洗浄水が必要となり、分離膜モジュール13の濾
過処理能力も十分に回復しなくなる。The time of one cycle consisting of the filtration time and the filtration stop time must be 30 minutes or less, preferably 10 to 25 minutes. If the time of one cycle exceeds 30 minutes, blockage of the membrane surface of the separation membrane module 13 proceeds, so that a large amount of washing water is required for washing the separation membrane module 13, and the filtration capacity of the separation membrane module 13 is also reduced. Will not recover enough.
【0026】前記濾過処理時間の長さは、前記1サイク
ルの時間以内であれば、特に限定はされないが、通常、
5〜20分の範囲とされる。濾過処理時間が5分未満で
は、目標処理量をクリアできなくなるおそれがあるので
好ましくない。濾過処理時間が20分を超えると、分離
膜モジュール13の膜面の閉塞が進行し、分離膜モジュ
ール13の洗浄時に多量の洗浄水が必要となるおそれが
あるので好ましくない。The length of the filtration time is not particularly limited as long as it is within the time of the one cycle.
The range is 5 to 20 minutes. If the filtration time is less than 5 minutes, the target throughput may not be able to be cleared, which is not preferable. If the filtration time exceeds 20 minutes, the membrane surface of the separation membrane module 13 is blocked, and a large amount of washing water may be required when the separation membrane module 13 is washed.
【0027】前記濾過停止時間の長さは、前記濾過処理
時間の長さよりも短ければ、特に限定はされないが、通
常、1〜10分の範囲とされる。濾過停止時間が1分未
満では、分離膜モジュール13の洗浄時間が短くなりす
ぎ、分離膜モジュール13の洗浄が不十分となるおそれ
があるので好ましくない。濾過停止時間が10分を超え
ると、1日当たりの濾過処理時間が短くなり、目標処理
量をクリアできないるおそれがあるので好ましくない。The length of the filtration stop time is not particularly limited as long as it is shorter than the length of the filtration treatment time, but is usually in the range of 1 to 10 minutes. If the filtration stop time is less than 1 minute, the washing time of the separation membrane module 13 becomes too short, and the washing of the separation membrane module 13 may be insufficient, which is not preferable. If the filtration stop time exceeds 10 minutes, the filtration processing time per day becomes short, and the target processing amount may not be able to be cleared, which is not preferable.
【0028】前記洗浄水の通液時間は、被処理液の性状
にも影響され、比較的閉塞の起こりやすい性状のもので
あれば、長時間の通液を行い、濾過しやすい性状のもの
であれば、短時間の通液を行うことが多く、好ましく
は、濾過停止時間の1/8〜1/2である。洗浄水の通
液時間が濾過停止時間の1/8未満では、分離膜モジュ
ール13の洗浄時間が短くなりすぎ、分離膜モジュール
13の洗浄が不十分となるおそれがあるので好ましくな
い。洗浄水の通液時間が濾過停止時間の1/2を超える
と、洗浄水の通液量が多くなり、洗浄コストが高くなる
おそれがあるので好ましくない。また、洗浄水の通液
は、濾過処理を停止するたびに毎回実施してもよいし、
濾過処理と濾過停止のサイクルの数回のうち、1サイク
ルのみで実施してもよい。The flow time of the washing water is also affected by the properties of the liquid to be treated. If the properties are relatively easy to block, the flow time is long and the properties are easily filtered. If there is, the liquid is passed for a short time in many cases, and preferably 1/8 to 1/2 of the filtration stop time. If the flow time of the washing water is less than 1/8 of the filtration stop time, the washing time of the separation membrane module 13 is too short, and the washing of the separation membrane module 13 may be insufficient. When the flow time of the washing water exceeds 1/2 of the filtration stop time, the flow amount of the washing water is increased, and the washing cost is likely to be high. Further, the flow of the washing water may be performed every time the filtration process is stopped,
Of the several cycles of the filtration process and the filtration stop, it may be performed in only one cycle.
【0029】また、濾過停止時の洗浄水の通液は、濾過
停止時間中全て洗浄水の通液を行う方法と、濾過停止時
間中の一部の時間で行う方法とがある。分離膜の洗浄は
主として洗浄水の通液によりなされるため、濾過停止時
間が短い際には、濾過停止時間中全て洗浄水の通液を行
うことが好ましいが、濾過停止時間が比較的長い場合に
は、洗浄水通液後に、洗浄水を分離膜内に充填したまま
保持する時間があると、洗浄水が分離膜表面に残存する
堆積物中に浸透するので、分離膜表面から堆積物が剥離
しやすくなる。The flow of the washing water at the time of stopping the filtration includes a method in which the washing water is entirely passed during the filtering stop time, and a method of passing the washing water during a part of the filtering stop time. Since the washing of the separation membrane is mainly performed by passing the washing water, when the filtration stop time is short, it is preferable that the washing water is entirely passed during the filtration stop time, but when the filtration stop time is relatively long. If there is time to keep the washing water filled in the separation membrane after passing the washing water, the washing water penetrates into the sediment remaining on the surface of the separation membrane. It is easy to peel off.
【0030】洗浄水の通液方法は、水頭差による自然落
下の他、公知の方法を用いることができる。例えば、洗
浄水を満たした洗浄水貯留部20からポンプによって洗
浄水を分離膜モジュール13に送り込む方法、洗浄水貯
留部20として加圧容器を用い、コンプレッサー等によ
る圧力によって洗浄水を分離膜モジュール13に送り込
む方法等を用いることができる。As a method of flowing the washing water, a known method can be used in addition to the natural fall due to the head difference. For example, a method in which the cleaning water is sent from the cleaning water storage unit 20 filled with the cleaning water to the separation membrane module 13 by a pump, or a pressurized container is used as the cleaning water storage unit 20, and the cleaning water is separated by pressure from a compressor or the like. And the like.
【0031】洗浄水の通液流量は、特に限定はされない
が、分離膜モジュール13全体の隅々まで洗浄水が行き
渡るように、濾過処理時に設定される濾過流量以上の高
流量にて通液することが好ましく、より好ましくは設定
濾過流量の2〜4倍の範囲内である。洗浄水の通液流量
が、濾過処理時に設定される濾過流量以上の高流量であ
れば、分離膜モジュール13の洗浄斑が生じにくくな
る。洗浄水の通液流量の調節は、開閉弁22の解放割合
を調節することによって行うことができる。Although the flow rate of the washing water is not particularly limited, the washing water is passed at a high flow rate which is equal to or higher than the filtration flow rate set at the time of the filtration process so that the washing water reaches all corners of the entire separation membrane module 13. Preferably, it is more preferably within a range of 2 to 4 times the set filtration flow rate. If the flow rate of the washing water is a high flow rate that is equal to or higher than the filtration flow rate set at the time of the filtration process, the spots on the separation membrane module 13 will not easily be washed. The flow rate of the washing water can be adjusted by adjusting the release ratio of the on-off valve 22.
【0032】洗浄に用いられる洗浄水とその濃度は、洗
浄する分離膜モジュール13の材質やその濾過の目的、
閉塞状況に応じて、適宜選択されることが望ましい。洗
浄水としては、通常、次亜塩素酸塩、過炭酸塩、過酸化
水素等の酸化力を有する酸化剤の水溶液、水酸化ナトリ
ウム等のアルカリ類の水溶液、塩酸、硫酸、シュウ酸、
クエン酸等の酸類の水溶液、界面活性剤の水溶液、アル
コールなどの薬液が用いられる。これら薬液の中でも、
洗浄能力に優れることから、酸化剤溶液、酸水溶液、ア
ルカリ水溶液が好適に用いられる。また、洗浄水とし
て、薬液以外に、膜透過水、水道水、井戸水、工業用水
などの水を用いることもできる。また、これら洗浄水の
通液後、分離膜モジュール13の膜面に各種処理が必要
な場合には、適正な処理剤を、上記洗浄水に続いて上記
と同様の方法にて通液してもよい。The washing water used for washing and its concentration depend on the material of the separation membrane module 13 to be washed, the purpose of its filtration,
It is desirable that the selection be appropriately made according to the obstruction situation. As the washing water, usually, an aqueous solution of an oxidizing agent such as hypochlorite, percarbonate, and hydrogen peroxide, an aqueous solution of an alkali such as sodium hydroxide, hydrochloric acid, sulfuric acid, oxalic acid,
An aqueous solution of an acid such as citric acid, an aqueous solution of a surfactant, or a chemical such as alcohol is used. Among these chemicals,
An oxidizing agent solution, an aqueous acid solution, and an aqueous alkaline solution are preferably used because of their excellent cleaning ability. In addition to the chemical liquid, water such as membrane permeated water, tap water, well water, and industrial water can be used as the washing water. If various treatments are required for the membrane surface of the separation membrane module 13 after the passage of the washing water, an appropriate treating agent is passed through the washing water in the same manner as described above. Is also good.
【0033】また、薬液の使用量を抑えることを目的と
して、薬液と水の両方を洗浄水として用い、これらを交
互に通液してもよい。この場合、図4に示すような、三
方切替弁24によって流路が分岐された2本の洗浄水用
配管21にそれぞれ接続する薬液用の洗浄水貯留部20
aと水用の洗浄水貯留部20bとを有する濾過装置を用
いることができる。薬液と水の通液は、三方切替弁24
を切り替えることによって交互に行うことができる。薬
液と水の通液は、濾過処理時間と濾過停止時間からなる
1サイクル内の濾過停止時間内に三方切替弁24を1回
以上切り替えて交互に行ってもよく、数サイクルの内に
三方切替弁24を1回のみ切り替えて交互に行ってもよ
い。In order to reduce the amount of the chemical solution used, both the chemical solution and water may be used as washing water, and these may be alternately passed. In this case, as shown in FIG. 4, the cleaning water reservoir 20 for the chemical solution connected to each of the two cleaning water pipes 21 whose flow paths are branched by the three-way switching valve 24.
a and a filtration device having a washing water storage section 20b for water can be used. The three-way switching valve 24
Can be performed alternately by switching between. The passage of the chemical solution and the water may be performed alternately by switching the three-way switching valve 24 at least once during the filtration stop time in one cycle consisting of the filtration processing time and the filtration stop time, or three-way switching within several cycles. The valve 24 may be switched only once and alternately performed.
【0034】さらに、洗浄水を通液するに当たり、分離
膜洗浄用のエアーバブリングを継続しながら、通液を行
ってもよく、分離膜洗浄用エアーバブリングを停止して
洗浄水を通液し、通液後、エアーバブリングを再開して
分離膜を洗浄してもよい。これにより、分離膜への閉塞
物質の堆積を防止することが可能となり、閉塞物質の剥
離効率も上昇する。Further, in passing the washing water, the liquid may be passed while continuing the air bubbling for the separation membrane washing. The air bubbling for the separation membrane washing is stopped, and the washing water is passed. After the passage, air bubbling may be resumed to wash the separation membrane. This makes it possible to prevent the deposition of the plugging substance on the separation membrane, and also increases the stripping efficiency of the plugging substance.
【0035】このような濾過装置の運転方法によれば、
濾過停止時間を挟んで濾過処理を間欠的に繰り返し、濾
過停止時間内に分離膜モジュール13の2次側から洗浄
水の通液を行い、濾過処理時間と濾過停止時間からなる
1サイクルの時間が30分以下であるので、分離膜モジ
ュール13の膜面が閉塞してしまう前に膜面の洗浄をこ
まめに行うことができる。これにより、少量の洗浄水で
も効率よく分離膜モジュール13の洗浄を行うことがで
きるようになる。また、常に分離膜モジュール13の膜
面を閉塞させてしまうことなく濾過処理を行っているの
で、高い濾過処理能力を保ちながら、長期にわたり安定
した濾過処理を行うことができる。According to such an operation method of the filtration device,
The filtration process is intermittently repeated with the filtration stop time interposed, and the washing water is passed from the secondary side of the separation membrane module 13 within the filtration stop time, and one cycle of the filtration process time and the filtration stop time is performed. Since the time is 30 minutes or less, the membrane surface can be washed frequently before the membrane surface of the separation membrane module 13 is closed. Thus, the separation membrane module 13 can be efficiently washed with a small amount of washing water. In addition, since filtration is always performed without blocking the membrane surface of the separation membrane module 13, stable filtration can be performed over a long period of time while maintaining high filtration performance.
【0036】[0036]
【実施例】以下、実施例を示して本発明をさらに詳しく
説明する。 (実施例1)図1に示す濾過装置10を用いて被処理液
の濾過処理を行った。分離膜モジュール13として、ポ
リエチレン製中空糸膜をシート状に固定した平型中空糸
膜モジュール(三菱レイヨン(株)製、商標ステラポア
ーLF、分画性能0.4μm)を3本(8m2/1本)
並列に積層したものを用い、被処理液槽12へ設置し
た。被処理液として、SSが10000mg/Lの活性
汚泥水を用い、LV(単位膜面積当たりの処理量)=
0.4m/D、エアー量15m3 /hの条件下で、濾過
処理時間13分、濾過停止時間2分を1サイクルとした
間欠濾過処理を行った。The present invention will be described below in further detail with reference to examples. (Example 1) The liquid to be treated was filtered using the filtration device 10 shown in FIG. As the separation membrane module 13, a flat type hollow fiber membrane module with a fixed polyethylene hollow fiber membrane into a sheet (Mitsubishi Rayon Co., Ltd., trade STERAPORE LF, fractionation performance 0.4 .mu.m) 3 present the (8m 2/1 Book)
Using what was laminated | stacked in parallel, it installed in the to-be-processed liquid tank 12. FIG. As the liquid to be treated, activated sludge water having an SS of 10,000 mg / L was used, and LV (treatment amount per unit membrane area) =
Under a condition of 0.4 m / D and an air amount of 15 m 3 / h, an intermittent filtration treatment was performed with a filtration treatment time of 13 minutes and a filtration stop time of 2 minutes as one cycle.
【0037】さらに、毎回の濾過停止時間2分の間に、
以下のようにして洗浄水の通液を行った。まず、膜洗浄
用エアーバブリングを停止し、次に次亜塩素酸ナトリウ
ム1000mg/L溶液を、濾過処理時の設定濾過流量
とほぼ同等の7.5L/minの流量にて1分間通液し
た。通液後、エアーバブリングを再開して1分間洗浄を
行った。Further, during the filtration stop time of 2 minutes each time,
The washing water was passed as follows. First, the membrane bubbling air bubbling was stopped, and then a sodium hypochlorite 1000 mg / L solution was passed for 1 minute at a flow rate of 7.5 L / min, which was almost equal to the set filtration flow rate during the filtration treatment. After the passage, the air bubbling was restarted and washing was performed for 1 minute.
【0038】濾過開始時における初期差圧は5kPaで
あった。また、4ヶ月後の差圧は8kPaであり、大き
な差圧上昇は見られなかった。The initial pressure difference at the start of the filtration was 5 kPa. Further, the differential pressure after 4 months was 8 kPa, and no large increase in the differential pressure was observed.
【0039】(実施例2)実施例1と同様の濾過条件に
て間欠濾過処理を行い、かつ実施例1と同じタイミング
で洗浄水の通液を行った。このときの洗浄水の通液は、
以下の条件で行った。まず、膜洗浄用エアーバブリング
を停止し、次に次亜塩素酸ナトリウム1000mg/L
溶液を、濾過処理時の設定濾過流量の1.5倍である1
0L/minの流量にて1分間通液した。通液後、エア
ーバブリングを再開して1分間洗浄を行った。濾過開始
時における初期差圧は5kPaであった。また、4ヶ月
後の差圧は5kPaであり、差圧上昇はまったく見られ
なかった。Example 2 Intermittent filtration was performed under the same filtration conditions as in Example 1, and washing water was passed at the same timing as in Example 1. At this time, the flow of washing water is
The test was performed under the following conditions. First, air bubbling for membrane cleaning was stopped, and then sodium hypochlorite 1000 mg / L.
The solution was set to 1 which is 1.5 times the set filtration flow rate during the filtration process.
The solution was passed at a flow rate of 0 L / min for 1 minute. After the passage, the air bubbling was restarted and washing was performed for 1 minute. The initial pressure difference at the start of the filtration was 5 kPa. The differential pressure after 4 months was 5 kPa, and no increase in the differential pressure was observed.
【0040】(実施例3)図4に示す濾過装置を用い、
実施例1と同様の濾過条件にて間欠濾過処理を行い、か
つ実施例1と同じタイミングで洗浄水の通液を行った。
このときの洗浄水の通液は、以下(i)と(ii)の条件
を交互に繰り返しながら行った。 (i)濾過処理終了後、膜洗浄用エアーバブリングを停
止し、次に次亜塩素酸ナトリウム1000mg/L溶液
を、濾過処理時の設定濾過流量とほぼ同等の7.5L/
minの流量にて1分間通液した。通液後、エアーバブ
リングを再開して1分間洗浄を行った。洗浄後、濾過処
理を再開した。 (ii)濾過処理終了後、膜洗浄用エアーバブリングを停
止し、次に水を、濾過処理時の設定濾過流量とほぼ同等
の7.5L/minの流量にて1分間通液した。通液
後、エアーバブリングを再開して1分間洗浄を行った。
洗浄後、濾過処理を再開した。濾過開始時における初期
差圧は5kPaであった。また、4ヶ月後の差圧は5k
Paであり、差圧上昇はまったく見られなかった。Example 3 Using the filtration device shown in FIG.
Intermittent filtration was performed under the same filtration conditions as in Example 1, and washing water was passed at the same timing as in Example 1.
At this time, the washing water was passed while alternately repeating the following conditions (i) and (ii). (I) After the completion of the filtration treatment, the air bubbling for membrane washing is stopped, and then a sodium hypochlorite 1000 mg / L solution is added to the filtration flow rate at the time of the filtration treatment, which is 7.5 L / liter.
The liquid was passed at a flow rate of min for 1 minute. After passing the solution, air bubbling was restarted and washing was performed for 1 minute. After the washing, the filtration process was restarted. (Ii) After the filtration process, the air bubbling for membrane cleaning was stopped, and then water was passed for 1 minute at a flow rate of 7.5 L / min, which was almost equal to the set filtration flow rate during the filtration process. After passing the solution, air bubbling was restarted and washing was performed for 1 minute.
After the washing, the filtration process was restarted. The initial pressure difference at the start of the filtration was 5 kPa. The differential pressure after 4 months is 5k
Pa, and no increase in the differential pressure was observed.
【0041】(比較例1)実施例1と同様の濾過条件に
て間欠濾過処理を行った。ただし、洗浄水の通液は行わ
なかった。濾過開始時における初期差圧が、5kPaで
あったものが、6ヶ月後には差圧40kPaとなった。
この分離膜モジュールについて、以下の洗浄を行った。
まず、濾過を停止するとともに、膜洗浄用エアーバブリ
ングを停止し、次に次亜塩素酸ナトリウム1000mg
/L溶液を、8L/minの流量にて90分間通液し
た。通液後、エアーバブリングを再開して30分間洗浄
を行った。この洗浄の後、SSが10000mg/Lの
活性汚泥水を用い、LV=0.3m/D、エアー量15
m3 /hの条件下で再び濾過処理を行ったところ、差圧
は18kPaであった。(Comparative Example 1) Intermittent filtration was performed under the same filtration conditions as in Example 1. However, no washing water was passed. The initial pressure difference at the start of filtration was 5 kPa, but the pressure difference became 40 kPa after 6 months.
The following cleaning was performed on the separation membrane module.
First, filtration was stopped, and air bubbling for membrane cleaning was stopped. Then, sodium hypochlorite 1000 mg was used.
/ L solution was passed at a flow rate of 8 L / min for 90 minutes. After the passage, air bubbling was restarted and the washing was performed for 30 minutes. After this washing, SS = 10,000 mg / L activated sludge water, LV = 0.3 m / D, air amount 15
When the filtration treatment was performed again under the condition of m 3 / h, the differential pressure was 18 kPa.
【0042】[0042]
【発明の効果】以上説明したように、本発明の濾過装置
の運転方法によれば、濾過停止時間を挟んで濾過処理を
間欠的に繰り返し、濾過停止時間内に分離膜モジュール
13の2次側から洗浄水の通液を行い、濾過処理時間と
濾過停止時間からなる1サイクルの時間が30分以下で
あるので、分離膜モジュールを移動させることなく、少
量の洗浄水で、効率よく分離膜モジュールの洗浄を行う
ことができ、高い濾過処理能力を保ちながら、長期にわ
たり安定した濾過処理を行うことができる。また、前記
洗浄水を、前記濾過処理時における設定流量以上の流量
で前記分離膜モジュールの2次側から通液すれば、分離
膜モジュール全体の隅々まで洗浄水が行き渡るようにな
り、分離膜モジュールの洗浄斑が生じにくくなる。As described above, according to the operation method of the filtration apparatus of the present invention, the filtration process is intermittently repeated with the filtration stop time interposed therebetween, and the secondary side of the separation membrane module 13 is set within the filtration stop time. Since the time of one cycle consisting of the filtration processing time and the filtration stop time is 30 minutes or less, the separation membrane module can be efficiently used with a small amount of washing water without moving the separation membrane module. Can be performed, and stable filtration can be performed over a long period of time while maintaining high filtration performance. Further, if the washing water is passed from the secondary side of the separation membrane module at a flow rate equal to or higher than the set flow rate during the filtration process, the washing water spreads to every corner of the entire separation membrane module, Wash spots on the module are less likely to occur.
【0043】また、濾過停止時間の1/8〜1/2の時
間内に洗浄水の通液を行えば、少量の洗浄水で、効率よ
く分離膜モジュールの洗浄を行うことができる。また、
洗浄水の通液時または洗浄水の通液後にエアーバブリン
グによって分離膜モジュールの膜面の洗浄を行えば、分
離膜への閉塞物質の堆積を防止することが可能となり、
閉塞物質の剥離効率も上昇する。また、洗浄水として、
酸化剤溶液、酸水溶液およびアルカリ水溶液のうちの少
なくとも1種の薬液を用いれば、分離膜モジュールの洗
浄効果がさらに向上する。また、洗浄水として、さらに
水を用い、前記薬液と水を交互に通液すれば、薬液の使
用量を抑えることができる。If the washing water is passed within 1/8 to 1/2 of the filtration stop time, the separation membrane module can be efficiently washed with a small amount of washing water. Also,
If the membrane surface of the separation membrane module is washed by air bubbling at the time of passing the washing water or after the passing of the washing water, it is possible to prevent the deposition of the blocking substance on the separation membrane,
The stripping efficiency of the plugging material also increases. In addition, as washing water,
When at least one of the oxidizing agent solution, the acid aqueous solution and the alkaline aqueous solution is used, the cleaning effect of the separation membrane module is further improved. Further, if water is further used as the washing water and the chemical solution and the water are alternately passed, the usage amount of the chemical solution can be reduced.
【図1】 分離膜モジュールを用いた濾過装置の一例を
示す概略構成図である。FIG. 1 is a schematic configuration diagram illustrating an example of a filtration device using a separation membrane module.
【図2】 平膜モジュールの一例を示す斜視図である。FIG. 2 is a perspective view showing an example of a flat membrane module.
【図3】 中空糸膜モジュールの一例を示す斜視図であ
る。FIG. 3 is a perspective view showing an example of a hollow fiber membrane module.
【図4】 分離膜モジュールを用いた濾過装置の他の例
を示す概略構成図である。FIG. 4 is a schematic configuration diagram showing another example of a filtration device using a separation membrane module.
【図5】 分離膜モジュールを用いた濾過装置の他の例
を示す概略構成図である。FIG. 5 is a schematic configuration diagram showing another example of a filtration device using a separation membrane module.
10 濾過装置 13 分離膜モジュール 18 散気装置 Reference Signs List 10 Filtration device 13 Separation membrane module 18 Air diffuser
───────────────────────────────────────────────────── フロントページの続き (72)発明者 矢ノ根 勝行 愛知県名古屋市東区砂田橋四丁目1番60号 三菱レイヨン株式会社商品開発研究所内 (72)発明者 加藤 修身 愛知県名古屋市東区砂田橋四丁目1番60号 三菱レイヨン株式会社商品開発研究所内 Fターム(参考) 4D006 GA02 HA02 HA19 HA93 KA43 KC02 KC03 KC13 KC14 KC16 KD01 KD11 KD17 KD24 KE01Q KE01R KE05P KE06P KE08P KE11Q KE12P KE22Q KE23Q KE24Q KE28R MA01 MA22 MC03 MC11 MC22X MC29 MC30 MC39 MC62 PA01 PA02 PB08 PC64 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Katsuyuki Yanone 4- 60 Sunadabashi, Higashi-ku, Nagoya City, Aichi Prefecture Inside Mitsubishi Rayon Co., Ltd. Product Development Laboratory (72) Inventor Osamu Kato Sunadahashi, Higashi-ku, Nagoya City, Aichi Prefecture F-term (reference) No. 1-60, Mitsubishi Rayon Co., Ltd. Product Development Laboratory 4D006 GA02 HA02 HA19 HA93 KA43 KC02 KC03 KC13 KC14 KC16 KD01 KD11 KD17 KD24 KE01Q KE01R KE05P KE06P KE08P KE11Q KE12 MC23 MC22 MC30 MC39 MC62 PA01 PA02 PB08 PC64
Claims (6)
過処理を行う濾過装置の運転方法であって、 前記濾過処理を、濾過停止時間を挟んで間欠的に繰り返
し、 前記濾過停止時間内に分離膜モジュールの2次側から洗
浄水を通液し、 濾過処理時間と濾過停止時間とからなる1サイクルの時
間が、30分以下であることを特徴とする濾過装置の運
転方法。1. A method of operating a filtration device for performing a filtration treatment of a liquid to be treated by a separation membrane module, wherein the filtration treatment is intermittently repeated with a filtration stop time interposed therebetween, and the separation membrane is separated within the filtration stop time. A method for operating a filtration device, characterized in that washing water is passed from the secondary side of the module, and one cycle time comprising a filtration treatment time and a filtration stop time is 30 minutes or less.
設定流量以上の流量で前記分離膜モジュールの2次側か
ら通液することを特徴とする請求項1記載の濾過装置の
運転方法。2. The method according to claim 1, wherein the washing water is passed from the secondary side of the separation membrane module at a flow rate higher than a set flow rate during the filtration process.
に洗浄水を通液することを特徴とする請求項1または請
求項2記載の濾過装置の運転方法。3. The method according to claim 1, wherein the washing water is supplied within 1/8 to 1/2 of the filtration stop time.
エアーバブリングによって分離膜モジュールの膜面の洗
浄を行うことを特徴とする請求項1ないし3いずれか一
項に記載の濾過装置の運転方法。4. The filtration device according to claim 1, wherein the membrane surface of the separation membrane module is washed by air bubbling when or after the washing water is passed. Driving method.
よびアルカリ水溶液のうちの少なくとも1種の薬液を用
いることを特徴とする請求項1ないし4いずれか一項に
記載の濾過装置の運転方法。5. The method according to claim 1, wherein at least one of an oxidizing agent solution, an acid aqueous solution, and an alkaline aqueous solution is used as the washing water. .
液と水を交互に通液することを特徴とする請求項5記載
の濾過装置の運転方法。6. The method according to claim 5, wherein water is further used as washing water, and the chemical liquid and water are alternately passed.
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JP11145695A JP2000334276A (en) | 1999-05-25 | 1999-05-25 | Operation of filtration device |
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JP11145695A JP2000334276A (en) | 1999-05-25 | 1999-05-25 | Operation of filtration device |
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ID=15390977
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