JP2000330643A - Flow rate distributing device - Google Patents
Flow rate distributing deviceInfo
- Publication number
- JP2000330643A JP2000330643A JP11137345A JP13734599A JP2000330643A JP 2000330643 A JP2000330643 A JP 2000330643A JP 11137345 A JP11137345 A JP 11137345A JP 13734599 A JP13734599 A JP 13734599A JP 2000330643 A JP2000330643 A JP 2000330643A
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- flow
- distribution valve
- operation amount
- distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Filling Of Jars Or Cans And Processes For Cleaning And Sealing Jars (AREA)
- Flow Control (AREA)
- Control Of Non-Electrical Variables (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、二股に分岐した１
系および２系の管路の流量比を、目標とする流量比に分
配する流量分配装置に係り、特に総流量変化等の外乱時
にも、振り分け流量の比を目標とする流量比となるよう
にオンラインで制御できるようにした流量分配装置に関
するものである。TECHNICAL FIELD The present invention relates to a bifurcated 1
The present invention relates to a flow distribution device that distributes a flow ratio of a system and a pipeline of a second system to a target flow ratio. In particular, even in the case of disturbance such as a change in total flow, the ratio of the divided flow is set to the target flow ratio. The present invention relates to a flow distribution device that can be controlled online.
【０００２】[0002]
【従来の技術】従来から、流量分配装置の一つとして、
二股に分岐した１系および２系の管路の流量比を、１系
および２系の管路に設置された振り分け弁の開度制御を
行なうことにより、目標とする流量比に分配するものが
ある。2. Description of the Related Art Conventionally, as one of flow distribution devices,
A method of distributing the flow ratio of the bifurcated 1-system and 2-system pipelines to a target flow ratio by controlling the opening of the distribution valves installed in the 1-system and 2-system pipelines. is there.
【０００３】この種の流量分配装置では、二股に分岐し
た１系および２系の管路の流量分配は、振り分け調節弁
の特性から、目標とする比に対応する流量が出るような
各振り分け弁の開度の組み合わせを調べ、流量比に対し
て振り分け弁の開度を一意に決めることにより、制御を
行なっている。[0003] In this type of flow distribution device, the flow distribution of the bifurcated 1-system and 2-system pipelines is determined by the characteristics of the distribution control valve so that each distribution valve produces a flow corresponding to a target ratio. The control is performed by examining the combination of the opening degrees and uniquely determining the opening degree of the distribution valve with respect to the flow rate ratio.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、流量比
に対して振り分け弁の開度を一意に決める流量分配装置
においては、管路を流れる総流量の変化により、あらか
じめ決められた各振り分け弁の開度の組み合わせでは、
所望の流量比を実現することができなくなる。However, in a flow distribution device that uniquely determines the degree of opening of the distribution valve with respect to the flow ratio, the opening of each predetermined distribution valve is determined by the change in the total flow rate flowing through the pipeline. In the combination of degrees,
The desired flow ratio cannot be achieved.
【０００５】また、管路内に空気が混入する等の理由に
より、流量バランスが崩れた場合には制御を行なうこと
ができないという問題がある。Another problem is that control cannot be performed when the flow rate balance is lost due to, for example, air being mixed into the pipeline.
【０００６】本発明の目的は、二股に分岐した１系およ
び２系の管路の流量分配を行なう場合に、総流量変化等
の外乱時にも、目標とする流量比に対応した比となるよ
うにオンラインで制御を行なうことが可能な流量分配装
置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a flow rate distribution system for branching the first and second pipelines so that a ratio corresponding to a target flow ratio is obtained even in the case of disturbance such as a change in total flow. It is another object of the present invention to provide a flow distribution device capable of performing online control.
【０００７】[0007]
【課題を解決するための手段】上記の目的を達成するた
めに、二股に分岐した１系および２系の管路の流量比
を、当該１系および２系の管路に設置された１系および
２系の振り分け弁の開度制御を行なうことにより目標と
する流量比に分配する流量分配装置において、請求項１
の発明では、１系および２系の管路を流れる流量をそれ
ぞれ計測する１系および２系の流量計測手段と、１系お
よび２系の振り分け弁の開度をそれぞれ計測する１系お
よび２系の振り分け弁開度計測手段と、目標とする流量
比に基づいて、１系および２系の管路の流量目標比率を
演算する流量目標比率演算手段と、１系および２系流量
計測手段によりそれぞれ計測された流量計測値に基づい
て、１系および２系の管路の流量計測値比率を演算する
流量計測値比率演算手段と、流量目標比率演算手段によ
り演算された流量目標比率と、流量計測値比率演算手段
により演算された流量計測値比率とに基づいて、１系お
よび２系の振り分け弁の操作量をそれぞれ演算する１系
および２系の振り分け弁操作量演算手段と、２系振り分
け弁開度計測手段により計測された２系振り分け弁開度
に基づいて、１系振り分け弁に対して出力する操作量
を、制御範囲最大開度とするか、１系振り分け弁操作量
演算手段により演算された１系振り分け弁操作量とする
かを判断する１系出力判断手段と、１系振り分け弁開度
計測手段により計測された１系振り分け弁開度に基づい
て、２系振り分け弁に対して出力する操作量を、制御範
囲最大開度とするか、２系振り分け弁操作量演算手段に
より演算された２系振り分け弁操作量とするかを判断す
る２系出力判断手段とを備える。In order to achieve the above object, the flow ratio of the bifurcated 1-system and 2-system pipelines is determined by adjusting the flow ratio of the 1-system and 2-system pipelines. And a flow distribution device that distributes the flow to a target flow ratio by controlling an opening degree of a distribution valve of a second system and a second system.
In the invention of the first aspect, flow rate measuring means of the first and second systems for measuring flow rates flowing through the first and second pipelines, and the first and second systems for measuring the opening degree of the distribution valves of the first and second systems, respectively. Distribution valve opening measurement means, flow rate target ratio calculation means for calculating the flow rate target ratios of the 1st and 2nd pipelines based on the target flow rate ratio, and 1st and 2nd flow rate measurement means, respectively. Flow rate measurement value calculation means for calculating the flow rate measurement value ratios of the first and second pipelines based on the measured flow rate measurement values; a flow rate target ratio calculated by the flow rate target ratio calculation means; A first-system and second-system distribution valve operation amount calculating means for calculating the operation amounts of the first-system and second-system distribution valves based on the flow rate measurement value ratio calculated by the value ratio calculation means; Opening measurement means Based on the measured degree of opening of the two-system distribution valve, the operation amount output to the one-system distribution valve is set to the maximum control range opening degree, or the first system calculated by the one-system distribution valve operation amount calculation means. An operation amount to be output to the second-system distribution valve based on the first-system distribution valve opening measured by the first-system distribution valve opening measurement means for determining whether to use the distribution valve operation amount. Is used as the control range maximum opening degree or the secondary system distribution valve operation amount calculated by the secondary system distribution valve operation amount computation unit.
【０００８】従って、請求項１の発明の流量分配装置に
おいては、流量目標比率演算手段では、目標とする流量
比を入力し、各系に相当する目標流量比率が求められ
る。流量計測値比率演算手段では、各系の流量計測値を
入力し、各系に相当する流量計測値比率が求められる。
１系振り分け弁操作量演算手段、および２系振り分け弁
操作量演算手段では、それぞれの系に相当する目標流量
比率と流量計測値比率とを入力し、例えばＰＩＤ制御演
算により、それぞれの統の振り分け弁操作量が求められ
る。Therefore, in the flow distribution device according to the first aspect of the present invention, the target flow ratio calculating means inputs the target flow ratio and obtains the target flow ratio corresponding to each system. In the flow rate measurement value calculating means, a flow rate measurement value of each system is input, and a flow rate measurement value ratio corresponding to each system is obtained.
In the 1-system distribution valve operation amount calculation means and the 2 system distribution valve operation amount calculation means, the target flow ratio and the flow measurement value ratio corresponding to each system are input, and the respective distributions are performed by, for example, PID control calculation. The amount of valve operation is required.
【０００９】自動制御投入時、両系の振り分け弁を一旦
制御範囲最大開度（固定値）とする。そして、両系の振
り分け弁開度が制御範囲最大開度となった時点から、制
御が開始される。At the time of automatic control input, the distribution valves of both systems are once set to the maximum control range opening (fixed value). Then, the control is started from the time when the distribution valve opening of both systems reaches the control range maximum opening.
【００１０】１系出力判断手段、および２系出力判断手
段では、それぞれ相手の系の振り分け弁開度を入力と
し、相手側の振り分け弁開度が制御範囲最大開度の時
は、自側の振り分け弁は１系振り分け弁操作量演算手段
または２系振り分け弁操作量演算手段にて演算された制
御演算（例えばＰＩＤ制御演算）出力値により制御が行
なわれ、相手側の振り分け弁開度が制御範囲最大開度で
ない時は、自側の振り分け弁の開度を制御範囲最大開度
（固定値）出力する判断が行なわれる。The output determination means for the first system and the output determination means for the second system each receive the distribution valve opening of the other system as an input. The distribution valve is controlled by an output value of a control operation (for example, PID control operation) calculated by the 1-system distribution valve operation amount operation means or the 2 system distribution valve operation amount operation means, and the distributing valve opening degree is controlled. If it is not the range maximum opening, it is determined that the opening of the distribution valve on its own side is output to the control range maximum opening (fixed value).
【００１１】これにより、片方の系は制御範囲最大開度
固定、もう片方の系は例えばＰＩＤ制御を行なうことに
なり、振り分け流量のバランスが崩れた時にも、各系の
流量比を目標とする流量比に制御することができる。As a result, one of the systems has a fixed control range maximum opening degree, and the other system performs, for example, PID control. Even when the distribution flow is out of balance, the flow ratio of each system is targeted. The flow rate can be controlled.
【００１２】また、請求項２の発明では、１系および２
系の管路を流れる流量をそれぞれ計測する１系および２
系の流量計測手段と、１系および２系の振り分け弁の開
度をそれぞれ計測する１系および２系の振り分け弁開度
計測手段と、目標とする流量比に基づいて、１系および
２系の管路の流量目標比率を演算する流量目標比率演算
手段と、流量目標比率演算手段により演算された流量目
標比率と、１系および２系流量計測手段によりそれぞれ
計測された流量計測値とに基づいて、１系および２系の
管路の流量目標値を演算する流量目標値演算手段と、流
量目標値演算手段により演算された１系および２系の管
路の流量目標値と、１系および２系流量計測手段により
それぞれ計測された流量計測値とに基づいて、１系およ
び２系の振り分け弁の操作量をそれぞれ演算する１系お
よび２系の振り分け弁操作量演算手段と、２系振り分け
弁開度計測手段により計測された２系振り分け弁開度に
基づいて、１系振り分け弁に対して出力する操作量を、
制御範囲最大開度とするか、１系振り分け弁操作量演算
手段により演算された１系振り分け弁操作量とするかを
判断する１系出力判断手段と、１系振り分け弁開度計測
手段により計測された１系振り分け弁開度に基づいて、
２系振り分け弁に対して出力する操作量を、制御範囲最
大開度とするか、２系振り分け弁操作量演算手段により
演算された２系振り分け弁操作量とするかを判断する２
系出力判断手段とを備える。According to the second aspect of the present invention, the first system and the second system
1 and 2 for measuring the flow rate through the pipeline of the system respectively
System flow measurement means, system 1 and system 2 distribution valve opening measurement means for measuring the opening of the system 1 and system 2 distribution valves, respectively, and system 1 and system 2 based on the target flow ratio Flow rate target ratio calculating means for calculating the flow rate target ratio of the pipeline, the flow rate target ratio calculated by the flow rate target ratio calculating means, and the flow rate measurement values respectively measured by the first and second system flow rate measuring means. Flow rate target value calculating means for calculating the flow rate target values of the system 1 and system 2 pipes; the flow rate target values of the system 1 and system 2 pipes calculated by the flow rate target value calculating means; A first and second system dividing valve operation amount calculating means for calculating the operation amounts of the first and second system dividing valves based on the flow measurement values respectively measured by the second system flow measuring means; For valve opening measurement means Ri based on 2-based distribution valve opening measured, the manipulated variable to be output to the 1-system sorting valve,
The first system output determination means for determining whether the control range is the maximum opening or the first system distribution valve operation amount calculated by the first system distribution valve operation amount calculation means, and measurement is performed by the first system distribution valve opening measurement means. Based on the determined 1-system distribution valve opening,
It is determined whether the operation amount to be output to the two-system distribution valve is the maximum control range opening degree or the two-system distribution valve operation amount calculated by the two-system distribution valve operation amount calculation means.
System output determination means.
【００１３】従って、請求項２の発明の流量分配装置に
おいては、流量目標比率演算手段では、目標とする流量
比を入力し、各系に相当する目標流量比率が求められ
る。流量目標値演算手段では、流量目標比率演算手段に
より演算された流量目標比率と、各系の流量計測値とを
入力し、各系の流量目標値が演算される。１系振り分け
弁操作量演算手段、および２系振り分け弁操作量演算手
段能では、それぞれの系統に相当する目標流量と流量計
測値とを入力し、例えばＰＩＤ制御演算により、それぞ
れの系の振り分け弁操作量が求められる。Therefore, in the flow distribution device according to the second aspect of the present invention, the target flow ratio calculating means inputs the target flow ratio and obtains the target flow ratio corresponding to each system. The flow rate target value calculation means inputs the flow rate target ratio calculated by the flow rate target ratio calculation means and the flow rate measurement value of each system, and calculates the flow rate target value of each system. In the 1-system distribution valve operation amount calculation means and the 2 system distribution valve operation amount calculation means function, a target flow rate and a flow rate measurement value corresponding to each system are input, and for example, the distribution valve of each system is calculated by PID control calculation. A manipulated variable is required.
【００１４】自動制御投入時、両系の振り分け弁を一旦
制御範囲最大開度（固定値）とする。そして、両系の振
り分け弁開度が制御範囲最大開度となった時点から、制
御が開始される。At the time of automatic control, the distribution valves of both systems are once set to the maximum control range opening (fixed value). Then, the control is started from the time when the distribution valve opening of both systems reaches the control range maximum opening.
【００１５】１系出力判断手段、および２系出力判断手
段では、それぞれ相手の系の振り分け弁開度を入力と
し、相手側の振り分け弁開度が制御範囲最大開度の時
は、自側の振り分け弁は１系振り分け弁操作量演算手段
または２系振り分け弁操作量演算手段にて演算された制
御演算（例えばＰＩＤ制御演算）出力値により制御が行
なわれ、相手側の振り分け弁開度が制御範囲最大開度で
ない時は、自側の振り分け弁の開度を制御範囲最大開度
（固定値）出力する判断が行なわれる。The output determination means for the first system and the output determination means for the second system each receive the distribution valve opening of the other system as an input. The distribution valve is controlled by an output value of a control operation (for example, PID control operation) calculated by the 1-system distribution valve operation amount operation means or the 2 system distribution valve operation amount operation means, and the distributing valve opening degree is controlled. If it is not the range maximum opening, it is determined that the opening of the distribution valve on its own side is output to the control range maximum opening (fixed value).
【００１６】これにより、上記請求項１の発明と同様の
作用を奏するのに加えて、１系振り分け弁操作量演算手
段、および２系振り分け弁操作量演算手段で用いる制御
（例えばＰＩＤ制御）が流量制御となる構成のため、制
御ゲインを容易に決定することができる。Thus, in addition to having the same effect as the first aspect of the present invention, the control (for example, PID control) used in the 1-system distribution valve operation amount calculation means and the 2 system distribution valve operation amount calculation means is realized. Because of the configuration for flow control, the control gain can be easily determined.
【００１７】さらに、請求項３の発明では、上記請求項
２の発明の流量分配装置において、１系および２系の振
り分け弁操作量演算手段の制御演算に用いる制御ゲイン
を、１系および２系の振り分け弁の非線形特性に対応し
てそれぞれ可変設定する１系および２系の振り分け弁特
性データ手段を付加して、１系および２系の振り分け弁
操作量演算手段の制御をオートチュ−ニング型とする。According to a third aspect of the present invention, in the flow distribution device according to the second aspect of the present invention, the control gains used for the control calculation of the first and second system dividing valve operation amount calculating means are controlled by the first and second system. The control of the 1 and 2 distribution valve operation amount calculation means is controlled by an auto-tuning type by adding the 1 and 2 distribution valve characteristic data means variably set corresponding to the non-linear characteristics of the distribution valve. I do.
【００１８】従って、請求項３の発明の流量分配装置に
おいては、上記請求項２の発明において、１系振り分け
弁操作量演算手段、および２系振り分け弁操作量演算手
段の制御（例えばＰＩＤ制御）をオートチュ−ニング型
とすることにより、振り分け弁の非線形特性に対応して
制御ゲインを変化させることで、制御の最適化を図るこ
とができる。Therefore, in the flow distribution device according to a third aspect of the present invention, in the second aspect of the present invention, the control of the 1-system distribution valve operation amount operation means and the 2nd system distribution valve operation amount operation means (for example, PID control) Is an auto-tuning type, the control gain can be changed in accordance with the non-linear characteristic of the distribution valve, thereby optimizing the control.
【００１９】[0019]
【発明の実施の形態】本発明は、二股に分岐した１系お
よび２系の管路の流量分配を、それぞれの系の管路に設
置された振り分け弁の開度制御により行なう場合に、目
標とする流量比から求めた流量目標比率にしたがって例
えばＰＩＤ制御演算を行ない、片方の系の振り分け弁操
作量を制御範囲最大固定値とし、他方の系の振り分け弁
操作量を制御演算（例えばＰＩＤ制御演算）出力値とす
ることにより、振り分け流量の比を目標とする流量比と
なるようにオンラインで制御できるようにするものであ
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention is directed to the case where the flow distribution of the first and second lines branched into two branches is performed by controlling the opening degree of the distribution valves installed in the respective lines. For example, PID control calculation is performed in accordance with the flow rate target ratio obtained from the flow rate ratio to be set, the distribution valve operation amount of one system is set to the maximum fixed value of the control range, and the distribution valve operation amount of the other system is controlled (for example, PID control). By calculating the output value, it is possible to control the distribution flow rate on-line so that the ratio of the distribution flow rate becomes the target flow rate ratio.
【００２０】以下、上記のような考え方に基づく本発明
の実施の形態について、図面を参照して詳細に説明す
る。Hereinafter, embodiments of the present invention based on the above-described concept will be described in detail with reference to the drawings.
【００２１】（第１の実施の形態）図１は、本実施の形
態による流量分配装置の構成例を示すブロック図であ
る。(First Embodiment) FIG. 1 is a block diagram showing a configuration example of a flow distribution device according to the present embodiment.
【００２２】図１において、二股に分岐した１系および
２系の管路には、それぞれ１系振り分け弁１、および２
系振り分け弁２が設置されている。In FIG. 1, the 1-system branch valves 1 and 2 are provided in the 1-system and 2-system pipes branched into two branches, respectively.
A system distribution valve 2 is provided.
【００２３】また、１系および２系の管路には、それぞ
れ１系および２系の管路を流れる流量を計測する流量計
測手段である１系流量計３、および２系流量計４が設置
されている。In addition, a 1-system flow meter 3 and a 2-system flow meter 4 as flow measuring means for measuring the flow rates flowing through the 1-system and 2-system pipes are installed in the 1-system and 2-system pipes, respectively. Have been.
【００２４】さらに、１系振り分け弁１、および２系振
り分け弁２には、それぞれ１系振り分け弁１、および２
系振り分け弁２の開度を計測する１系および２系の振り
分け弁開度計５および２系振り分け弁開度計６が設置さ
れている。Further, the 1-system distribution valves 1 and 2 are respectively connected to the 1-system distribution valves 1 and 2.
A first and second system distribution valve opening meter 5 and a second system distribution valve opening meter 6 for measuring the opening of the system distribution valve 2 are provided.
【００２５】一方、コントローラは、流量目標比率演算
手段７と、流量計測値比率演算手段８と、１系および２
系の振り分け弁操作量演算手段９１および９２と、１系
出力判断手段１０１と、２系出力判断手段１０２とから
構成されている。On the other hand, the controller comprises a flow rate target ratio calculating means 7, a flow rate measured value ratio calculating means 8,
The system is constituted by system distribution valve operation amount calculating means 91 and 92, first system output determining means 101, and second system output determining means 102.
【００２６】流量目標比率演算手段７は、目標とする流
量比に基づいて、１系および２系の管路の流量目標比率
を演算する。The target flow rate calculating means 7 calculates the target flow rate of the first and second lines based on the target flow ratio.
【００２７】流量計測値比率演算手段８は、１系流量計
３、および２系流量計４によりそれぞれ計測された流量
計測値に基づいて、１系および２系の管路の流量計測値
比率を演算する。The flow rate measurement value calculating means 8 calculates the flow rate measurement value ratio of the system 1 and system 2 pipes based on the flow measurement values measured by the system 1 flow meter 3 and the system 2 flow meter 4, respectively. Calculate.
【００２８】１系および２系の振り分け弁操作量演算手
段９１および９２は、流量目標比率演算手段７により演
算された流量目標比率と、流量計測値比率演算手段８に
より演算された流量計測値比率とに基づいて、１系およ
び２系の振り分け弁１および２の操作量をそれぞれ演算
する。The first and second system dividing valve operation amount calculating means 91 and 92 are provided with a flow rate target ratio calculated by the flow rate target ratio calculating means 7 and a flow rate measured value ratio calculated by the flow rate measured value ratio calculating means 8. Based on the above, the operation amounts of the distribution valves 1 and 2 of the first and second systems are calculated respectively.
【００２９】１系出力判断手段１０１は、２系振り分け
弁開度計６により計測された２系振り分け弁開度に基づ
いて、１系振り分け弁１に対して出力する操作量を、制
御範囲最大開度とするか、１系振り分け弁操作量演算手
段９１により演算された１系振り分け弁操作量とするか
を判断する。The 1-system output judging means 101 determines the amount of operation to be output to the 1-system distribution valve 1 based on the 2-system distribution valve opening measured by the 2-system distribution valve opening meter 6 in the control range maximum. It is determined whether to use the opening degree or the 1-system distribution valve operation amount calculated by the 1-system distribution valve operation amount calculation means 91.
【００３０】２系出力判断手段１０２は、１系振り分け
弁開度計５により計測された１系振り分け弁開度に基づ
いて、２系振り分け弁２に対して出力する操作量を、制
御範囲最大開度とするか、２系振り分け弁操作量演算手
段９２により演算された２系振り分け弁操作量とするか
を判断する。The second-system output determining means 102 determines the amount of operation to be output to the second-system distribution valve 2 based on the first-system distribution valve opening measured by the first-system distribution valve opening meter 5 to the maximum of the control range. It is determined whether to use the opening degree or the second-system distribution valve operation amount calculated by the second-system distribution valve operation amount calculation means 92.
【００３１】次に、以上のように構成した本実施の形態
の流量分配装置の作用について説明する。Next, the operation of the flow distribution device of the present embodiment configured as described above will be described.
【００３２】図１において、１系流量計３および２系流
量計４により、それぞれ１系および２系の管路を流れる
流量ｑ1 およびｑ2 が計測される。また、１系振り分け
弁開度計５および２系振り分け弁開度計６により、それ
ぞれ１系振り分け弁１および２系振り分け弁２の弁開度
ｖ1 およびｖ2 が計測される。In FIG. 1, the flow rates q 1 and q 2 flowing through the pipelines of the first and second systems are measured by the first and second system flow meters 3 and 4, respectively. Further, the valve opening degrees v 1 and v 2 of the system 1 distribution valve 1 and the system 2 distribution valve 2 are measured by the system 1 distribution valve opening meter 5 and the system 2 distribution valve opening meter 6, respectively.
【００３３】一方、コントローラの流量目標比率演算手
段７では、目標流量比１系：２系＝Ｑ1 ：Ｑ2 を入力
し、各系に相当する目標流量比率が、次のような式によ
り求められる。On the other hand, the target flow ratio calculating means 7 of the controller inputs the target flow ratio 1 system: 2 system = Q 1 : Q 2 and obtains the target flow ratio corresponding to each system by the following equation. Can be
【００３４】 ＳＶ1 ＝Ｑ1 ／（Ｑ1 ＋Ｑ2 ） ……（１） ＳＶ2 ＝Ｑ2 ／（Ｑ1 ＋Ｑ2 ） ……（２） ＳＶ1 ；１系ＰＩＤ制御目標値 ＳＶ2 ；２系ＰＩＤ制御目標値 Ｑ1 ：Ｑ2 ；１系流量：２系流量目標比流量計測値比率
演算手段８では、１系流量計３で計測された１系流量計
測値ｑ1 、および２系流量計４で計測された２系流量計
測値ｑ2 を入力し、各系に相当する流量計測値比率が、
次のような式により求められる。SV 1 = Q 1 / (Q 1 + Q 2 ) (1) SV 2 = Q 2 / (Q 1 + Q 2 ) (2) SV 1 ; PID control target value of the first system SV 2 ; 2 System PID control target value Q 1 : Q 2 ; 1 system flow: 2 system flow target specific flow rate measurement value ratio calculating means 8, 1 system flow measurement value q 1 measured by 1 system flow meter 3, and 2 system flow The flow rate measurement value q 2 of the two systems measured by the total 4 is input, and the flow rate measurement value ratio corresponding to each system is:
It is obtained by the following equation.
【００３５】 ＰＶ1 ＝ｑ1 ／（ｑ1 ＋ｑ2 ） ……（３） ＰＶ2 ＝ｑ2 ／（ｑ1 ＋ｑ2 ） ……（４） ＰＶ1 ；１系ＰＩＤ制御プロセス値 ＰＶ2 ；２系ＰＩＤ制御プロセス値 ｑ1 ；１系流量計測値 ｑ2 ；２系流量計測値 １系振り分け弁操作量演算手段９１では、上記ＳＶ1 、
ＰＶ1 にしたがってＰＩＤ制御演算を行ない、１系振り
分け弁操作量ｍｖ1 が求められる。PV 1 = q 1 / (q 1 + q 2 ) (3) PV 2 = q 2 / (q 1 + q 2 ) (4) PV 1 ; 1-system PID control process value PV 2 ; 2 The system PID control process value q 1 ; the system flow measurement value q 2 ; the system flow measurement value The system 1 distribution valve operation amount calculating means 91 calculates the SV 1 ,
Performs PID control operation in accordance with PV 1, 1-based distribution valve operation amount mv 1 is obtained.
【００３６】２系振り分け弁操作量演算手段９２では、
上記ＳＶ2 、ＰＶ2 にしたがってＰＩＤ演算を行ない、
２系振り分け弁操作量ｍｖ2 が求められる。In the two-system distribution valve operation amount calculating means 92,
PID calculation is performed according to the above SV 2 and PV 2 ,
The two-system distribution valve operation amount mv 2 is obtained.
【００３７】自動制御投入時、両系の振り分け弁１およ
び２を、一旦制御範囲最大開度（固定値）とする。そし
て、両系の振り分け弁１および２開度が制御範囲最大開
度となった時点から、制御が開始される。At the time of automatic control, the distribution valves 1 and 2 of both systems are once set to the maximum control range opening (fixed value). Then, the control is started from the time when the distribution valves 1 and 2 of both systems reach the maximum control range.
【００３８】１系出力判断手段１０１では、２系振り分
け弁開度計６で計測された２系振り分け弁開度ｖ2 を入
力し、この２系振り分け弁開度ｖ2 が２系振り分け弁制
御範囲最大開度の時は、１系振り分け弁開度操作量の制
御出力ＭＶ1 として、１系振り分け弁操作量演算手段９
１で演算されたＰＩＤ制御演算値ｍｖ1 を用い、２系振
り分け弁開度ｖ2 が２系振り分け弁制御範囲最大開度で
ない時は、１系振り分け弁開度操作量の制御出力ＭＶ1
として、１系振り分け弁制御範囲最大開度（固定値）を
用いるように、出力値切り替え判断が行なわれる。[0038] In 1 system output determining unit 101 receives the 2-based distribution valve opening v 2 which is measured in 2-based distribution valve opening meter 6, the 2-based distribution valve opening v 2 is 2-based distribution valve control At the time of the range maximum opening, the control output MV 1 of the 1-system distribution valve opening operation amount is used as the 1-system distribution valve operation amount calculation means 9.
Using PID control calculation value mv 1 calculated by the 1, when 2-based distribution valve opening v 2 is not 2-based distribution valve control range maximum opening is 1-based distribution valve opening operation amount of the control output MV 1
The output value switching determination is performed so as to use the maximum opening (fixed value) of the 1-system distribution valve control range.
【００３９】２系出力判断手段１０２では、１系振り分
け弁開度計５で計測された１系振り分け弁開度ｖ1 を入
力し、この１系振り分け弁開度ｖ1 が１系振り分け弁制
御範囲最大開度の時は、２系振り分け弁開度操作量の制
御出力ＭＶ2 として、２系振り分け弁操作量演算手段９
２で演算されたＰＩＤ制御演算値ｍｖ2 を用い、１系振
り分け弁開度ｖ1 が１系振り分け弁制御範囲最大開度で
ない時は、２系振り分け弁開度操作量の制御出力ＭＶ2
として、２系振り分け弁制御範囲最大開度（固定値）を
用いるように、出力値切り替え判断が行なわれる。[0039] In 2-system output determination unit 102 receives the 1-system sorting valve opening v 1 measured by the 1-system sorting valve opening meter 5, the 1-system sorting valve opening v 1 is 1-based distribution valve control At the time of the maximum opening of the range, the control output MV 2 of the second-system distribution valve opening operation amount is set as the second-system distribution valve operation amount calculating means 9.
Using PID control calculation value mv 2 calculated by the 2, 1-based distribution valve when the opening degree v 1 is not 1-based distribution valve control range maximum opening is 2-based distribution valve opening operation amount of the control output MV 2
The output value switching determination is performed so as to use the maximum opening (fixed value) of the two-system distribution valve control range.
【００４０】上述したように、本実施の形態の流量分配
装置では、二股に分岐した１系および２系の管路の流量
分配を、それぞれの系の管路に設置された振り分け弁１
および２の開度制御により行なう場合に、目標とする流
量比から求めた流量目標比率にしたがってＰＩＤ制御演
算を行ない、片方の系の振り分け弁操作量を制御範囲最
大固定値とし、他方の系の振り分け弁操作量をＰＩＤ制
御演算出力値とするようにしているので、片方の系は制
御範囲最大開度固定、もう片方の系はＰＩＤ制御を行な
うことになるため、振り分け流量のバランスが崩れた時
にも、各系の流量比を目標とする流量比に制御すること
が可能となる。As described above, in the flow distribution device according to the present embodiment, the flow distribution of the bifurcated 1-system and 2-system pipes is divided by the distribution valve 1 installed in each system pipe.
And PID control calculation is performed according to the flow rate target ratio obtained from the target flow rate ratio, and the operation amount of the distribution valve of one system is set to the control range maximum fixed value, and the other system is controlled. Since the distribution valve operation amount is set to the PID control calculation output value, one of the systems performs the fixed control range maximum opening degree, and the other system performs the PID control. At times, it is possible to control the flow ratio of each system to a target flow ratio.
【００４１】（第２の実施の形態）図２は、本実施の形
態による流量分配装置の構成例を示すブロック図であ
り、図１と同一部分には同一符号を付してその説明を省
略し、ここでは異なる部分についてのみ述べる。(Second Embodiment) FIG. 2 is a block diagram showing a configuration example of a flow distribution device according to the present embodiment, and the same parts as those in FIG. Here, only the different parts will be described.
【００４２】図２において、コントローラは、流量目標
比率演算手段７と、流量目標値演算手段１１と、１系お
よび２系の振り分け弁操作量演算手段１２１および１２
２と、１系出力判断手段１３１と、２系出力判断手段１
３２とから構成されている。In FIG. 2, the controller comprises flow rate target ratio calculation means 7, flow rate target value calculation means 11, and distribution valve operation amount calculation means 121 and 12 for the first and second systems.
2, 1-system output determining means 131, 2-system output determining means 1
32.
【００４３】流量目標値演算手段１１は、流量目標比率
演算手段７により演算された流量目標比率と、１系流量
計３、および２系流量計４によりそれぞれ計測された流
量計測値とに基づいて、１系および２系の管路の流量目
標値を演算する。The flow rate target value calculation means 11 is based on the flow rate target rate calculated by the flow rate target ratio calculation means 7 and the flow rate measurement values respectively measured by the first system flow meter 3 and the second system flow meter 4. Calculate the flow rate target values for the 1st and 2nd pipelines.
【００４４】１系および２系の振り分け弁操作量演算手
段１２１および１２２は、流量目標値演算手段１１によ
り演算された１系および２系の管路の流量目標値と、１
系流量計３および２系流量計４によりそれぞれ計測され
た流量計測値とに基づいて、１系および２系の振り分け
弁１および２の操作量をそれぞれ演算する。The distribution valve operation amount calculation means 121 and 122 for the first and second systems are provided with the target flow rate values of the first and second pipelines calculated by the target flow value calculation means 11, respectively.
Based on the flow measurement values measured by the system flow meter 3 and the system flow meter 4, respectively, the operation amounts of the distribution valves 1 and 2 of the system 1 and system 2 are calculated.
【００４５】１系出力判断手段１３１は、２系振り分け
弁開度計６により計測された２系振り分け弁開度に基づ
いて、１系振り分け弁１に対して出力する操作量を、制
御範囲最大開度とするか、１系振り分け弁操作量演算手
段１２１により演算された１系振り分け弁操作量とする
かを判断する。The 1-system output judging means 131 determines the amount of operation to be output to the 1-system distribution valve 1 based on the 2-system distribution valve opening measured by the 2-system distribution valve opening meter 6 in the maximum control range. It is determined whether to use the opening degree or the 1-system distribution valve operation amount calculated by the 1-system distribution valve operation amount calculation unit 121.
【００４６】２系出力判断手段１３２は、１系振り分け
弁開度計５により計測された１系振り分け弁開度に基づ
いて、２系振り分け弁２に対して出力する操作量を、制
御範囲最大開度とするか、２系振り分け弁操作量演算手
段１２２により演算された２系振り分け弁操作量とする
かを判断する。The second system output judging means 132 determines the amount of operation to be output to the second system distribution valve 2 based on the first system distribution valve opening measured by the first system distribution valve opening meter 5 in the maximum control range. It is determined whether to use the opening degree or the second-system distribution valve operation amount calculated by the second-system distribution valve operation amount calculation unit 122.
【００４７】次に、以上のように構成した本実施の形態
の流量分配装置の作用について説明する。Next, the operation of the flow distribution device of the present embodiment configured as described above will be described.
【００４８】図２において、１系流量計３および２系流
量計４により、それぞれ１系および２系の管路を流れる
流量ｑ1 およびｑ2 が計測される。また、１系振り分け
弁開度計５および２系振り分け弁開度計６により、それ
ぞれ１系振り分け弁１および２系振り分け弁２の弁開度
ｖ1 およびｖ2 が計測される。In FIG. 2, the flow rates q 1 and q 2 flowing through the pipelines of the first and second systems are measured by the first and second system flow meters 3 and 4, respectively. Further, the valve opening degrees v 1 and v 2 of the system 1 distribution valve 1 and the system 2 distribution valve 2 are measured by the system 1 distribution valve opening meter 5 and the system 2 distribution valve opening meter 6, respectively.
【００４９】一方、コントローラの流量目標比率演算手
段７では、目標流量比１系：２系＝Ｑ１：Ｑ２を入力
し、各系に相当する目標流量比率が、 １系；Ｑ1 ／（Ｑ1 ＋Ｑ2 ）、２系；Ｑ2 ／（Ｑ1 ＋Ｑ
2 ） として求められる。On the other hand, the target flow ratio calculating means 7 of the controller inputs the target flow ratio 1 system: 2 system = Q1: Q2, and the target flow ratio corresponding to each system is 1 system; Q 1 / (Q 1 + Q 2 ), 2 system; Q 2 / (Q 1 + Q
2 ) Required.
【００５０】流量目標値演算手段１１では、流量目標比
率演算手段７で演算された各系流量目標比率、１系流量
計３で計測された１系流量計測値ｑ1 、２系流量計４で
計測された２系流量計測値ｑ2 を入力し、各系に相当す
る流量目標値が、次のような式により求められる。The target flow rate calculating means 11 calculates the target flow rate of each system calculated by the target flow rate calculating means 7, the measured flow rate q 1 of the first system measured by the flow meter 3, and the measured flow rate q 1 of the second system 4. enter the measured 2-based flow measurement value q 2, the flow rate target value corresponding to each system is determined by the following equation.
【００５１】 ＳＶ1 ＝（ｑ1 ＋ｑ2 ）×Ｑ1 ／（Ｑ1 ＋Ｑ2 ） ……（５） ＳＶ2 ＝（ｑ1 ＋ｑ2 ）×Ｑ2 ／（Ｑ1 ＋Ｑ2 ） ……（６） １系振り分け弁操作量演算手段１２１では、上記Ｓ
Ｖ1 、ＰＶ1 ＝ｑ1 にしたがってＰＩＤ制御演算を行な
い、１系振り分け弁操作量ｍｖ1 が求められる。SV 1 = (q 1 + q 2 ) × Q 1 / (Q 1 + Q 2 ) (5) SV 2 = (q 1 + q 2 ) × Q 2 / (Q 1 + Q 2 ) (6) In the 1-system distribution valve operation amount calculating means 121, the above S
The PID control calculation is performed according to V 1 , PV 1 = q 1 to obtain the 1-system distribution valve operation amount mv 1 .
【００５２】２系振り分け弁操作量演算手段１２２で
は、上記ＳＶ2 、ＰＶ2 ＝ｑ2 にしたがってＰＩＤ制御
演算を行い、２系振り分け弁操作量ｍｖ2 が求められ
る。The second system distribution valve operation amount calculating means 122 performs PID control calculation according to the above-mentioned SV 2 and PV 2 = q 2 to obtain the second system distribution valve operation amount mv 2 .
【００５３】自動制御投入時、両系の振り分け弁１およ
び２を、一旦制御範囲最大開度（固定値）とする。そし
て、両系の振り分け弁１および２開度が制御範囲最大開
度となった時点から、制御が開始される。At the time of automatic control, the distribution valves 1 and 2 of both systems are once set to the maximum control range opening (fixed value). Then, the control is started from the time when the distribution valves 1 and 2 of both systems reach the maximum control range.
【００５４】１系出力判断手段１３１では、２系振り分
け弁開度計６で計測された２系振り分け弁開度ｖ2 を入
力し、この２系振り分け弁開度ｖ2 が２系振り分け弁制
御範囲最大開度の時は、１系振り分け弁開度操作量の制
御出力ＭＶ1 として、１系振り分け弁操作量演算手段１
２１で演算されたＰＩＤ制御演算値ｍｖ1 を用い、２系
振り分け弁開度ｖ2 が２系振り分け弁制御範囲最大開度
でない時は、１系振り分け弁開度操作量の制御出力ＭＶ
1 として、１系振り分け弁最大開度（固定値）を用いる
ように、出力値切り替えの判断が行なわれる。[0054] In 1 system output determining unit 131 receives the 2-based distribution valve opening v 2 which is measured in 2-based distribution valve opening meter 6, the 2-based distribution valve opening v 2 is 2-based distribution valve control when the range maximum opening, as the control output MV 1 of 1 system distributing valve opening operation amount, 1-based distribution valve operating amount calculating means 1
Using PID control calculation value mv 1 which is calculated at 21, when 2-based distribution valve opening v 2 is not 2-based distribution valve control range maximum opening is 1-based distribution valve opening operation amount of the control output MV
As 1 , output value switching determination is performed so as to use the maximum opening (fixed value) of the 1-system distribution valve.
【００５５】２系出力判断手段１３２では、１系振り分
け弁開度計５で計測された１系振り分け弁開度ｖ1 を入
力し、この１系振り分け弁開度ｖ1 が１系振り分け弁制
御範囲最大開度の時は、２系振り分け弁開度操作量の制
御出力ＭＶ2 として、２系振り分け弁操作量演算手段１
２２で演算されたＰＩＤ制御演算値ｍｖ2 を用い、１系
振り分け弁開度ｖ1 が１系振り分け弁制御範囲最大開度
でない時は、２系振り分け弁開度操作量の制御出力ＭＶ
2 として、２系振り分け弁制御範囲最大開度（固定値）
を用いるように、出力値切り替え判断が行なわれる。The second-system output judging means 132 receives the first-system distribution valve opening v 1 measured by the first-system distribution valve opening meter 5, and controls the first-system distribution valve opening v 1 to control the first-system distribution valve control. when the range maximum opening, as the control output MV 2 of 2 system distributing valve opening operation amount, 2 based distribution valve operating amount calculating means 1
Using the PID control calculation value mv 2 calculated in step 22, when the 1-system distribution valve opening v 1 is not the maximum opening of the 1-system distribution valve control range, the control output MV of the 2 system distribution valve opening operation amount.
As 2 , the maximum opening of the 2-system distribution valve control range (fixed value)
Is used to determine the output value switching.
【００５６】上述したように、本実施の形態の流量分配
装置では、前記第１の実施の形態の場合と同様の効果が
得られるのに加えて、１系振り分け弁操作量演算手段１
２１、および２系振り分け弁操作量演算手段１２２で用
いるＰＩＤ制御が流量制御となる構成のため、制御ゲイ
ンを容易に決定することが可能となる。As described above, in the flow distribution device of the present embodiment, the same effects as those of the first embodiment can be obtained, and in addition, the 1-system distribution valve operation amount calculating means 1
Since the PID control used in the 21 and 2 system distribution valve operation amount calculation means 122 is a flow rate control, the control gain can be easily determined.
【００５７】（第３の実施の形態）図３は、本実施の形
態による流量分配装置の構成例を示すブロック図であ
り、図２と同一部分には同一符号を付してその説明を省
略し、ここでは異なる部分についてのみ述べる。(Third Embodiment) FIG. 3 is a block diagram showing a configuration example of a flow distribution device according to the present embodiment, and the same parts as those in FIG. Here, only the different parts will be described.
【００５８】図３において、コントローラは、流量目標
比率演算手段７と、流量目標値演算手段１１と、１系お
よび２系の振り分け弁特性データ設定手段１４１および
１４２と、１系および２系の振り分け弁操作量演算手段
１５１および１５２と、１系出力判断手段１６１と、２
系出力判断手段１６２とから構成されている。In FIG. 3, the controller comprises a flow rate target ratio calculating means 7, a flow rate target value calculating means 11, distribution valve characteristic data setting means 141 and 142 for the first and second systems, and distribution for the first and second systems. Valve operation amount calculating means 151 and 152, 1-system output determining means 161, 2
And system output determination means 162.
【００５９】１系および２系の振り分け弁特性データ設
定手段１４１および１４２は、１系および２系の振り分
け弁操作量演算手段１５１および１５２の制御演算に用
いる制御ゲインを、前記１系および２系の振り分け弁１
および２の非線形特性に対応してそれぞれ可変設定す
る。The distribution valve characteristic data setting means 141 and 142 for the first and second systems use the control gains used for the control calculations of the first and second distribution valve operation amount calculating means 151 and 152 for the first and second systems. Distribution valve 1
And 2 are variably set in accordance with the nonlinear characteristics.
【００６０】１系および２系の振り分け弁操作量演算手
段１５１および１５２は、流量目標値演算手段１１によ
り演算された１系および２系の管路の流量目標値と、１
系流量計３および２系流量計４によりそれぞれ計測され
た流量計測値と、１系および２系の振り分け弁特性デー
タ設定手段１４１および１４２により設定されたＰＩＤ
制御ゲインとに基づいて、１系および２系の振り分け弁
１および２の操作量をそれぞれ演算する。The distribution valve operation amount calculation means 151 and 152 for the first and second systems are provided with the target flow rate values of the first and second pipelines calculated by the target flow value calculation means 11, respectively.
The flow measurement values measured by the system flow meter 3 and the system 2 flow meter 4, respectively, and the PID set by the distribution valve characteristic data setting means 141 and 142 of the system 1 and system 2
Based on the control gains, the operation amounts of the distribution valves 1 and 2 of the first and second systems are calculated respectively.
【００６１】すなわち、１系および２系の振り分け弁操
作量演算手段１５１および１５２のＰＩＤ制御を、オー
トチュ−ニング型としている。That is, the PID control of the distribution valve operation amount calculation means 151 and 152 for the first and second systems is of the auto-tuning type.
【００６２】１系出力判断手段１６１は、２系振り分け
弁開度計６により計測された２系振り分け弁開度に基づ
いて、１系振り分け弁１に対して出力する操作量を、制
御範囲最大開度とするか、１系振り分け弁操作量演算手
段１５１により演算された１系振り分け弁操作量とする
かを判断する。The 1-system output judging means 161 determines the amount of operation to be output to the 1-system distribution valve 1 based on the 2-system distribution valve opening measured by the 2-system distribution valve opening meter 6 in the maximum control range. It is determined whether to use the opening degree or the 1-system distribution valve operation amount calculated by the 1-system distribution valve operation amount calculation means 151.
【００６３】２系出力判断手段１６２は、１系振り分け
弁開度計５により計測された１系振り分け弁開度に基づ
いて、２系振り分け弁２に対して出力する操作量を、制
御範囲最大開度とするか、２系振り分け弁操作量演算手
段１５２により演算された２系振り分け弁操作量とする
かを判断する。The second-system output judging means 162 determines the amount of operation to be output to the second-system distribution valve 2 based on the first-system distribution valve opening measured by the first-system distribution valve opening meter 5 to the maximum of the control range. It is determined whether to use the opening degree or the second-system distribution valve operation amount calculated by the second-system distribution valve operation amount calculation means 152.
【００６４】次に、以上のように構成した本実施の形態
の流量分配装置においては、１系振り分け弁操作量演算
手段１５１に１系振り分け弁特性データ設定手段１４１
を備え、２系振り分け弁操作量演算手段１５２に２系振
り分け弁特性データ設定手段１４２を備えて、１系振り
分け弁操作量演算手段１５１、および２系振り分け弁操
作量演算手段１５２のＰＩＤ制御をオートチュ−ニング
型としていることにより、１系および２系の振り分け弁
１および２の非線形特性に対応して制御ゲインを変化さ
せることで、制御の最適化を図ることができる。Next, in the flow distribution device of the present embodiment configured as described above, the 1-system distribution valve operation amount calculating means 151 is provided with the 1-system distribution valve characteristic data setting means 141.
The second system distribution valve operation amount calculation means 152 is provided with the second system distribution valve characteristic data setting means 142, and the PID control of the first system distribution valve operation amount calculation means 151 and the second system distribution valve operation amount calculation means 152 is performed. By adopting the auto-tuning type, control can be optimized by changing the control gain in accordance with the non-linear characteristics of the distribution valves 1 and 2 of the first and second systems.
【００６５】[0065]
【発明の効果】以上説明したように、本発明の流量分配
装置によれば、目標とする流量比から求めた流量目標比
率にしたがって制御演算を行ない、さらに制御出力の判
断手段により、片方の系の振り分け弁開度操作量を制御
範囲最大開度（固定値）とし、もう片方の系の振り分け
弁開度操作量を制御演算値とようにしているので、振り
分け流量の比を目標とする流量比となるように制御する
ことができるため、二股に分岐した１系および２系の管
路の流量分配を行なう場合に、総流量変化等の外乱時に
も、目標とする流量比に対応した比となるようにオンラ
インで制御を行なうことが可能となる。As described above, according to the flow distribution device of the present invention, the control operation is performed in accordance with the flow rate target ratio obtained from the target flow rate ratio, and the control output judging means is used to control one of the systems. Is the maximum controllable opening (fixed value) for the distribution valve opening and the control operation value for the distribution valve opening operation of the other system. In the case of performing flow distribution of the two-branch 1-system and 2-system pipes, even when disturbance such as a change in total flow occurs, the ratio corresponding to the target flow ratio can be controlled. It is possible to perform control online so that
【図１】本発明による流量分配装置の第１の実施の形態
を示すブロック図。FIG. 1 is a block diagram showing a first embodiment of a flow distribution device according to the present invention.
【図２】本発明による流量分配装置の第２の実施の形態
を示すブロック図。FIG. 2 is a block diagram showing a second embodiment of the flow distribution device according to the present invention.
【図３】本発明による流量分配装置の第３の実施の形態
を示すブロック図。FIG. 3 is a block diagram showing a third embodiment of the flow distribution device according to the present invention.
１…１系振り分け弁 ２…２系振り分け弁 ３…１系流量計 ４…２系流量計 ５…１系振り分け弁開度計 ６…２系振り分け弁開度計 ７…１系振り分け弁操作量演算手段 ８…２系振り分け弁操作量演算手段 ９１…１系振り分け弁操作量演算手段 ９２…２系振り分け弁操作量演算手段 １０１…１系出力判断手段 １０２…２系出力判断手段 １１…流量目標値演算手段 １２１…１系振り分け弁操作量演算手段 １２２…２系振り分け弁操作量演算手段 １３１…１系出力判断手段 １３２…２系出力判断手段 １４１…１系振り分け弁特性データ設定手段 １４２…２系振り分け弁特性データ設定手段 １５１…１系振り分け弁操作量演算手段 １５２…２系振り分け弁操作量演算手段 １６１…１系出力判断手段 １６２…２系出力判断手段。 DESCRIPTION OF SYMBOLS 1 ... 1 system distribution valve 2 2 system distribution valve 3 1 system flow meter 4 2 system flow meter 5 1 system distribution valve opening meter 6 2 system distribution valve opening meter 7 1 system distribution valve operation amount Arithmetic means 8 ... 2 system distribution valve operation amount operation means 91 ... 1 system distribution valve operation amount operation means 92 ... 2 system distribution valve operation amount operation means 101 ... 1 system output judgment means 102 ... 2 system output judgment means 11 ... Flow rate target Value calculating means 121 ... 1 system distribution valve operation amount calculation means 122 ... 2 system distribution valve operation amount calculation means 131 ... 1 system output determination means 132 ... 2 system output determination means 141 ... 1 system distribution valve characteristic data setting means 142 ... 2 System distributing valve characteristic data setting means 151 ... 1 system distributing valve operation amount computing means 152 ... 2 system distributing valve operation amount computing means 161 ... 1 system output judging means 162 ... 2 system output judging means.
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 3E079 CD21 5H307 CC03 DD06 EE02 ES02 FF08 FF27 GG05 GG09 HH10 5H309 BB03 BB08 CC20 DD08 DD32 EE05 FF01 GG02 HH11 HH25 JJ06 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3E079 CD21 5H307 CC03 DD06 EE02 ES02 FF08 FF27 GG05 GG09 HH10 5H309 BB03 BB08 CC20 DD08 DD32 EE05 FF01 GG02 HH11 HH25 JJ06
Claims (3)
流量比を、当該１系および２系の管路に設置された１系
および２系の振り分け弁の開度制御を行なうことにより
目標とする流量比に分配する流量分配装置において、 前記１系および２系の管路を流れる流量をそれぞれ計測
する１系および２系の流量計測手段と、 前記１系および２系の振り分け弁の開度をそれぞれ計測
する１系および２系の振り分け弁開度計測手段と、 前記目標とする流量比に基づいて、前記１系および２系
の管路の流量目標比率を演算する流量目標比率演算手段
と、 前記１系および２系流量計測手段によりそれぞれ計測さ
れた流量計測値に基づいて、前記１系および２系の管路
の流量計測値比率を演算する流量計測値比率演算手段
と、 前記流量目標比率演算手段により演算された流量目標比
率と、前記流量計測値比率演算手段により演算された流
量計測値比率とに基づいて、前記１系および２系の振り
分け弁の操作量をそれぞれ演算する１系および２系の振
り分け弁操作量演算手段と、 前記２系振り分け弁開度計測手段により計測された２系
振り分け弁開度に基づいて、前記１系振り分け弁に対し
て出力する操作量を、制御範囲最大開度とするか、前記
１系振り分け弁操作量演算手段により演算された１系振
り分け弁操作量とするかを判断する１系出力判断手段
と、 前記１系振り分け弁開度計測手段により計測された１系
振り分け弁開度に基づいて、前記２系振り分け弁に対し
て出力する操作量を、制御範囲最大開度とするか、前記
２系振り分け弁操作量演算手段により演算された２系振
り分け弁操作量とするかを判断する２系出力判断手段
と、 を備えて成ることを特徴とする流量分配装置。An opening control of a distribution valve of a first system and a second system provided in a first system and a second system of a flow path ratio of a first system and a second system branched into two branches. A flow distribution device for distributing a flow rate to a target flow ratio according to (1), wherein flow rate measuring means of the first and second systems for measuring flow rates flowing through the first and second pipelines, and the distribution valve of the first and second systems, respectively. Flow rate target ratios for calculating the flow rate target ratios of the first and second lines based on the target flow ratios, based on the target flow ratios. Calculation means; flow rate measurement value ratio calculation means for calculating the flow rate measurement value ratios of the pipelines of the first and second systems based on the flow rate measurement values respectively measured by the first and second system flow rate measurement means; The flow rate target ratio calculating means Based on the calculated flow rate target ratio and the flow rate measurement value ratio calculated by the flow rate measurement value calculation means, the first and second systems respectively operate the operation amounts of the first and second distribution valves. An operation amount to be output to the 1-system distribution valve based on the 2nd-system distribution valve opening measured by the 2nd-system distribution-valve opening measurement unit; Or a 1-system output valve operation amount that is calculated by the 1-system allocation valve operation amount calculation unit; Based on the system distribution valve opening, the operation amount output to the second system distribution valve is set to a control range maximum opening degree, or the two system distribution valve operation amount calculated by the second system distribution valve operation amount calculation means. Quantity and And a two-system output determining means for determining whether to perform the flow.
流量比を、当該１系および２系の管路に設置された１系
および２系の振り分け弁の開度制御を行なうことにより
目標とする流量比に分配する流量分配装置において、 前記１系および２系の管路を流れる流量をそれぞれ計測
する１系および２系の流量計測手段と、 前記１系および２系の振り分け弁の開度をそれぞれ計測
する１系および２系の振り分け弁開度計測手段と、 前記目標とする流量比に基づいて、前記１系および２系
の管路の流量目標比率を演算する流量目標比率演算手段
と、 前記流量目標比率演算手段により演算された流量目標比
率と、前記１系および２系流量計測手段によりそれぞれ
計測された流量計測値とに基づいて、前記１系および２
系の管路の流量目標値を演算する流量目標値演算手段
と、 前記流量目標値演算手段により演算された１系および２
系の管路の流量目標値と、前記１系および２系流量計測
手段によりそれぞれ計測された流量計測値とに基づい
て、前記１系および２系の振り分け弁の操作量をそれぞ
れ演算する１系および２系の振り分け弁操作量演算手段
と、 前記２系振り分け弁開度計測手段により計測された２系
振り分け弁開度に基づいて、前記１系振り分け弁に対し
て出力する操作量を、制御範囲最大開度とするか、前記
１系振り分け弁操作量演算手段により演算された１系振
り分け弁操作量とするかを判断する１系出力判断手段
と、 前記１系振り分け弁開度計測手段により計測された１系
振り分け弁開度に基づいて、前記２系振り分け弁に対し
て出力する操作量を、制御範囲最大開度とするか、前記
２系振り分け弁操作量演算手段により演算された２系振
り分け弁操作量とするかを判断する２系出力判断手段
と、 を備えて成ることを特徴とする流量分配装置。2. The method of claim 1, further comprising controlling the opening ratio of the distribution valves of the first and second systems installed in the first and second lines by controlling the flow ratio of the first and second lines branched into two branches. A flow distribution device for distributing a flow rate to a target flow ratio according to (1), wherein flow rate measuring means of the first and second systems for measuring flow rates flowing through the first and second pipelines, and the distribution valve of the first and second systems, respectively. Flow rate target ratios for calculating the flow rate target ratios of the first and second lines based on the target flow ratios, based on the target flow ratios. Calculating means, based on the flow rate target ratio calculated by the flow rate target ratio calculating means, and the flow measurement values respectively measured by the first and second system flow measuring means,
Flow rate target value calculating means for calculating a flow rate target value of the pipeline of the system; 1 and 2 calculated by the flow rate target value calculating means
A first system for calculating the operation amounts of the distribution valves of the first and second systems based on the flow target value of the system pipeline and the flow measurement values respectively measured by the first and second system flow measuring means; And control means for calculating the operation amount output to the first system distribution valve based on the second system distribution valve opening measured by the second system distribution valve opening measurement means. A first-system output determining means for determining whether to be a range maximum opening or a first-system distribution valve operation amount calculated by the first-system distribution valve operation amount calculating means; Based on the measured opening degree of the 1-system distribution valve, the operation amount output to the 2nd-system distribution valve is set to the maximum control range opening degree or calculated by the 2nd-system distribution valve operation amount operation means. System distribution valve operation Flow distribution apparatus characterized in that it comprises a two-system output determining means for determining whether the amount of a.
いて、 前記１系および２系の振り分け弁操作量演算手段の制御
演算に用いる制御ゲインを、前記１系および２系の振り
分け弁の非線形特性に対応してそれぞれ可変設定する１
系および２系の振り分け弁特性データ手段を付加して、
前記１系および２系の振り分け弁操作量演算手段の制御
をオートチュ−ニング型としたことを特徴とする流量分
配装置。3. The flow distribution device according to claim 2, wherein the control gain used for the control calculation of the first and second system dividing valve operation amount calculating means is controlled by the non-linearity of the first and second system dividing valves. 1 variably set according to characteristics
By adding the distribution valve characteristic data means of the system and the two systems,
A flow distribution device, wherein the control of the first and second distribution valve operation amount calculating means is of an auto-tuning type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13734599A JP3795699B2 (en) | 1999-05-18 | 1999-05-18 | Flow distribution device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13734599A JP3795699B2 (en) | 1999-05-18 | 1999-05-18 | Flow distribution device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000330643A true JP2000330643A (en) | 2000-11-30 |
| JP3795699B2 JP3795699B2 (en) | 2006-07-12 |
Family
ID=15196482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13734599A Expired - Fee Related JP3795699B2 (en) | 1999-05-18 | 1999-05-18 | Flow distribution device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3795699B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7007707B2 (en) * | 2002-01-04 | 2006-03-07 | Mks Instruments, Inc. | Mass flow ratio system and method |
| JP2009533756A (en) * | 2006-04-14 | 2009-09-17 | エム ケー エス インストルメンツ インコーポレーテッド | Multi-conduit flow rate controller |
| JP2013084287A (en) * | 2007-02-20 | 2013-05-09 | Mks Instruments Inc | Gas sending out method and system including flow ratio controller using multiple antisymmetric optimal control performance configuration |
-
1999
- 1999-05-18 JP JP13734599A patent/JP3795699B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7007707B2 (en) * | 2002-01-04 | 2006-03-07 | Mks Instruments, Inc. | Mass flow ratio system and method |
| JP2009533756A (en) * | 2006-04-14 | 2009-09-17 | エム ケー エス インストルメンツ インコーポレーテッド | Multi-conduit flow rate controller |
| US8997791B2 (en) | 2006-04-14 | 2015-04-07 | Mks Instruments, Inc. | Multiple-channel flow ratio controller |
| JP2013084287A (en) * | 2007-02-20 | 2013-05-09 | Mks Instruments Inc | Gas sending out method and system including flow ratio controller using multiple antisymmetric optimal control performance configuration |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3795699B2 (en) | 2006-07-12 |
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