JP2000329502A - Position-inspecting apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make acurately and simply inspectable the positional relationship of flange faces of pipes, ducts or the like and the hole position of bolt holes by measuring an object to be measured from both sides of a reference stage and a related stage with the use of a position-measuring apparatus. SOLUTION: The apparatus has a measurement part where a reference stage 6 to which a position-measuring device A can be set, a related stage 7 opposite to the reference stage 6 whose positional relationship to the reference stage 6 can be accurately processed and to which the position-measuring device A can be set, and at least two support stages 2 to which an object 3 to be measured can be set and fixed are placed on a common table 1. The apparatus includes a control part for operating a positional relationship of the object 3 to be measured with using information obtained with the use of the position- measuring device A as input information. A manufacture error can be checked beforehand and, a large amount of waste to send back the object to a factory and form again because a failure of the object is noticed only after piping at the spot can be eliminated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pipe for piping, a duct for wiring, etc. (referred to as a design pipe) manufactured on the basis of the drawings. The present invention relates to a position inspection apparatus for inspecting a positional relationship and a deviation of a bolt hole from a drawing.

[0002]

2. Description of the Related Art Conventionally, when inspecting the positional relation between flanges at both ends of a three-dimensional pipe or the like and the swing of a bolt hole, X
A portal-type or orthogonal-type three-dimensional measuring device with YZ axes and a three-dimensional measuring device using an articulated robot are common, but when it comes to a device for inspecting a large pipe exceeding 3 meters, This type of inspection is rarely performed because the equipment is large and expensive.

[0003]

The position inspection apparatus using the conventional technique is expensive at 5 to 60 million yen, and the handling is complicated and requires skill. Inspection of the pipe is rarely performed. However, if there is a mistake in the production as the pipe becomes larger, it takes a lot of time to return to the site and delay delivery. The present invention has been made in order to solve these drawbacks, and has been invented so that the positional relationship between flange surfaces of pipes and ducts and the swing of bolt holes can be accurately and easily inspected. The price is as low as 10 million yen or less.

[0004]

According to the present invention, there is provided a semiconductor device comprising:
The position inspection apparatus described above was devised by the present inventor for another purpose of use, and a position measurement apparatus for a patent application (application number: Japanese Patent Application No. 10-103801) filed on March 30, 1998. A gantry whose back surface can be attached to a reference stage or a related stage, a gantry mounting plate attached to a peripheral portion of the surface of the gantry in a perpendicular state, and the gantry of the gantry mounting plate A turntable rotatably mounted on a surface facing the center side of the turntable and having a rotation axis parallel to the reference stage or the related stage, and rotatably mounted on the turntable orthogonal to the rotation axis of the turntable. Measurement axis, and a wire guide arm made of a conductor attached to the measurement axis so as to be freely tiltable around an axis orthogonal to the axis of the measurement axis, the rotation angle of the swivel table and the measurement axis. rotation angle A first and a second angle detection sensor for measuring respectively; a wire length sensor for measuring a length of a wire which is led out of tension from the wire guide arm and whose tip is a measurement point; An arm sensing member comprising a pair of arc-shaped plates attached so as to sandwich both side surfaces of the arm, wherein the distance between the arm sensing members is slightly wider than the width of the wire guide arm, and the wire at an arbitrary tilt position is provided. The position measuring device comprising a groove-type contact sensor that is turned on when the arm sensing member of the guide arm is in contact and is turned off when it is not in contact,
The reference stage to which the position measuring device can be attached, the relative stage facing the reference stage, and the positional relationship between the reference stage and the reference stage is accurately processed, and the position measuring device can be attached to the reference stage; A measuring unit having a stage, the related stage, and at least two supports for setting and fixing an object to be measured mounted on a common table, and obtained by using the position measuring device. And a control unit that calculates a position of a measurement point by using output values of the first angle detection sensor, the second angle detection sensor, and the wire length sensor as input values.

[0005]

Embodiments of the present invention will be described below. First, with reference to FIG. 3, a description will be given of a position measuring device which is a central part of the measuring unit of the present invention.

[0006] The position measuring device A is composed of a gantry (8) whose back surface can be attached to a reference stage (6) or a related stage (7), and a swivel gantry attached to one edge of the surface of the gantry (8) in a perpendicular state. A rotation axis which is rotatably mounted on the mounting plate (9) and a surface of the swivel mounting plate (9) facing the center side of the gantry (8) and parallel to the reference stage (6) or the related stage (7). Turning table (1) having (10)
1), a measurement axis (12) rotatably mounted on the swivel (11) orthogonally to the rotation axis (10) of the swivel (11), and a measurement axis (12) on the measurement axis (12). ), The turning angle θ of the turntable (11) and the turning angle φ of the measuring axis (12) of the wire guide arm (13) made of a conductor attached so as to be freely tiltable about an axis perpendicular to the axis.
The first and second angle detection sensors (14) and (15) for measuring the position of the wire (1) and the wire (1) which are led out from the wire guide arm (13) in a tensioned state and whose tip is a measurement point
6) a wire length sensor (17) for measuring the length, and an arm sensing member (18) composed of a pair of arc-shaped plates attached to the swivel table (11) with both sides of the wire guide arm (13) sandwiched therebetween; (19) a groove-type contact sensor (20) that is turned on when contacted and turned off when contacted, a first angle detection sensor (14), and a second angle detection sensor (1)
5) A wire length sensor (17) is provided.

Next, the overall structure of the apparatus of the present invention will be described with reference to FIGS. The position inspection device is a reference stage (6) to which the position measurement device A (see FIG. 3) can be attached.
And a related stage (7) which is opposed to the reference stage (6) and whose positional relationship with the reference stage (6) is accurately processed, and to which the position measuring device A can be attached, and an object to be measured (3). At least 2 that can be set and fixed
It has a measuring unit I on which a support table (2) is mounted on a common table (1). In addition, a control unit II is provided that calculates a positional relationship of the device under test (3) using information obtained by using the position measuring device A as input information.

Next, a position inspection method using the position measuring device A will be described with reference to FIGS. First, as shown in FIGS. 1 and 2, at least two freely movable supports (2) are placed at the center of the table (1), and the DUT (3) is set thereon. (2) is fixed on the table (1) with a magnet or the like.

Next, as shown in FIG. 4, the position measuring device A is fixed to the reference stage mounting surface (21). Also, a hook hooking jig (22) is fixed to any three of the bolt holes of the reference side flange (4) of the DUT (3). At this time, the center of the hook retaining jig is fastened with a tapered nut (23) from the rear surface of the flange so that the center of the jig for hooking is located at the center of the bolt hole. The wire (16) is pulled out from the tip of the wire guide arm (13) of the position measuring device A, and the wire tip hook (24) is hooked on the hook hooking jig (22). Since the wire (16) has tension as a wire encoder, the wire guide arm (13) tilts in the direction of the reference side flange. In this state, the length (l) of the wire at one measurement point P1 and the wire guide arm The output of (13), the turning angle (θ) of the turning table (11), and the rotation angle (φ) of the measurement axis (12) are input to the control unit II. In the same manner, the remaining two points P2 and P3 are measured.

A plurality of measurement points P1, P obtained by this method
2, a plane including the measurement points P1, P2, and P3 is calculated based on the distance data and the angle data of P3, and the center point P of the surface and the position of the bolt hole are calculated. Thus, the positional relationship between the reference stage (6) and the reference side flange (4) can be accurately obtained.

Next, as shown in FIG. 5, the position measuring device A is fixed to the associated stage mounting surface (25). Also, a hook hooking jig (22) is fixed to any three of the bolt holes of the associated side flange (5) of the DUT (3). At this time, the tapered nut (2) is inserted from the back surface of the flange so that the center of the hook hooking jig (22) becomes the center of the bolt hole.
Centered by fastening in 6). The wire (1) from the tip of the wire guide arm (13) of the position measuring device A
6) Pull out and hook the wire tip hook (24) on the hook hooking jig (22). Since the wire (16) is under tension as a wire encoder, the wire guide arm (13) tilts in the direction of the associated flange (5). In this state, the output of the length (l) of the wire at one measurement point P4, the turning angle (θ) of the wire guide arm and the turning table (11), and the rotation angle (φ) of the measuring axis (12) are output from the control unit II. Is input to In the same way, the remaining two places P
5. Measure P6.

A plurality of measurement points P4, P4 obtained by this method
Based on the distance data and angle data of P5 and P6, a plane including the measurement points P4, P5 and P6 is calculated, and the center point Q and the bolt hole position of the plane are calculated. Thus, the positional relationship between the related stage (7) and the related flange (5) can be accurately obtained.

Reference stage (6) and related stage (7)
Is precisely positioned and processed on the table (1), and the positional relationship is obtained in advance. Assuming that the center point of the reference stage mounting surface (21) is B and the center point of the related stage mounting surface (25) is R, three vectors BP, RQ, and BR are obtained in three-dimensional coordinates. The vector PQ can be easily calculated. (See FIG. 6) The vector PQ indicates the distance and direction from the center of the reference side flange (4) of the device under test (3) to the center of the related side flange (5). In addition, both the reference side flange (4) and the related side flange (5) are calculated at the time of measuring the inclination of the surface and the positions of the bolt holes, and the reference side flange (4) and the related side flange (5) are calculated. ) Can be accurately determined.

As described above, the present invention has been described with reference to one embodiment. However, the present invention is not limited to the configuration described in the above embodiment, and is described in the claims. It also includes other embodiments and modifications that can be considered within the scope of the matters described. For example, in the above embodiment, the target object to be measured is described as a pipe or a duct having a flange. However, it is possible to measure a welded pipe without a flange by using a simple jig. In addition, although a single pipe without a branch has been described, a branch pipe with a branch in the middle of the pipe can be inspected although the number of measurements increases. Next, regarding the configuration of the apparatus, in the above-described embodiment, the measurement unit I is described as being mounted on a common table. However, the common table is not necessarily required. Another table is acceptable. In addition, the description has been made in such a manner that the object to be measured is set at the center between the reference stage and the related stage. Further, in the above-described embodiment, two position measuring devices A are used for measurement / inspection by attaching them exclusively to the reference stage and the related stage. However, it is not always necessary to use two position measuring devices A, and one device is used. It is also possible to measure and inspect after changing the setup. Next, in the above-described embodiment, the groove type contact sensor is presented as a sensor for detecting the turning angle of the turntable of the wire guide arm, but it is also possible to detect an appropriate position of the turning angle by a non-contact beam sensor. Next, with respect to the number of measurement points, in the above embodiment, three points were measured. However, there is also a method of measuring four points, and the four-point measurement has the following merits. In the case of three-point measurement, it is difficult to check when there is a measurement error because only one plane is formed even if there is a measurement error. Although only one plane is formed, when a measurement error occurs, a plurality of planes are formed, so that it is easy to determine that a measurement error has occurred.

[0015]

The position inspection apparatus according to the first aspect is inexpensive and simple in structure and handling. Therefore, conventionally, the position inspection (accuracy inspection) of a designed pipe is performed because the inspection apparatus is expensive and the handling is complicated. There is a significant advance in the direction of conducting inspections from the status quo where they are rarely implemented. As a result, it is possible to check in advance for manufacturing mistakes, and it is possible to avoid a large waste of noticing a defect only after piping at the site and bringing it back to the factory for re-production.

[Brief description of the drawings]

FIG. 1 is a front view of a position inspection device according to an embodiment of the present invention.

FIG. 2 is a plan view of the same.

FIG. 3 is a front view of the position measuring device filed earlier.

FIG. 4 is a front view showing a method of measuring a reference side flange according to one embodiment of the present invention.

FIG. 5 is a front view showing a measuring method of the related side flange.

FIG. 6 is a diagram showing a positional relationship of the whole in three-dimensional coordinates.

[Explanation of symbols]

A Position measuring device P Center point of reference side flange surface P1 Measurement point P2 Measurement point P3 Measurement point P4 Measurement point P5 Measurement point P6 Measurement point Q Center point of related flange surface B Center point of reference stage mounting surface R Related stage mounting L Length of wire Center point θ Rotation angle of turntable φ Rotation angle of measurement axis 1 Table 2 Support 3 Measurement object 4 Reference side flange 5 Related side flange 6 Reference stage 7 Related stage 8 Mount 9 Turntable mounting Table 10 Rotation axis 11 Rotation table 12 Measurement axis 13 Wire guide arm 14 First
Angle detection sensor 15 second angle detection sensor 16 wire 17 wire length sensor 18 arm sensing member 19 arm sensing member 20 groove type contact sensor 21 reference stage mounting surface 22 hook locking jig 23 tapered nut 24 wire tip hook 25 Related stage mounting surface

Claims (1)

[Claims] 1. A gantry, the back of which can be attached to a reference stage or a related stage; a gantry mounting plate, which is mounted orthogonally to one peripheral edge of the gantry surface; A turntable rotatably mounted on a surface facing the center side and having a rotation axis parallel to the reference stage or the related stage, and rotatably mounted on the turntable perpendicular to the rotation axis of the turntable; A rotation angle of the swivel table and rotation of the measurement axis of a measurement axis and a wire guide arm formed of a conductor attached to the measurement axis so as to be freely tiltable about an axis perpendicular to the axis of the measurement axis. First and second angle detection sensors that respectively measure angles, a wire length sensor that measures the length of a wire that is brought out of tension from the wire guide arm and whose tip is a measurement point, An arm sensing member comprising a pair of arc-shaped plates attached to the swivel table so as to sandwich both side surfaces of the wire guide arm, wherein the interval between the arm sensing members is slightly wider than the width of the wire guide arm,
A position measuring device having a groove-type contact sensor that is turned on when the arm sensing member of the wire guide arm is in contact at an arbitrary tilt position, and is turned off when not in contact, the reference stage to which the position measuring device can be attached; The related stage which is opposed to the reference stage, and whose positional relationship with the reference stage is accurately processed, and to which the position measuring device can be attached, the reference stage, the related stage, and an object to be measured are set. And a measurement unit having at least two support bases for mounting and fixing on a common table, the first angle detection sensor obtained by using the position measurement device, the second angle detection sensor, A position inspection apparatus comprising: an angle detection sensor; and a control unit that calculates a position of a measurement point using an output value of the wire length sensor as an input value.