JP2000326229A - Powder spouting apparatus and powder spouting nozzle - Google Patents

Powder spouting apparatus and powder spouting nozzle

Info

Publication number
JP2000326229A
JP2000326229A JP2000066454A JP2000066454A JP2000326229A JP 2000326229 A JP2000326229 A JP 2000326229A JP 2000066454 A JP2000066454 A JP 2000066454A JP 2000066454 A JP2000066454 A JP 2000066454A JP 2000326229 A JP2000326229 A JP 2000326229A
Authority
JP
Japan
Prior art keywords
powder
nozzle
compressed fluid
fluid
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000066454A
Other languages
Japanese (ja)
Other versions
JP4424807B2 (en
Inventor
Tsunemoto Kuriyagawa
常元 厨川
Hiromitsu Onodera
宏光 小野寺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Sendai Nikon Corp
Original Assignee
Nikon Corp
Sendai Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Sendai Nikon Corp filed Critical Nikon Corp
Priority to JP2000066454A priority Critical patent/JP4424807B2/en
Publication of JP2000326229A publication Critical patent/JP2000326229A/en
Application granted granted Critical
Publication of JP4424807B2 publication Critical patent/JP4424807B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a powder spouting apparatus or a powder spouting nozzle for blasting operation, capable of fixing working quantity, providing stable working quality, and achieving highly accurate working. SOLUTION: This powder spouting apparatus involving a tank 12 storing powder and a nozzle 3 spouting powder stored in the tank is provided with a powder fluid supply means 18 supplying compressed fluid for intermittently supplying the powder to the nozzle and a continuous fluid supply means 20 for continuously supplying continuous compressed fluid at all time so as to be separated from the compressed fluid for supplying the powder, and formed so that the powder may be spouted when the compressed fluid for supplying the powder is supplied, and only fluid excluding powder may be spouted when the compressed fluid for supplying the powder is not supplied.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、被加工物に粉体を
噴射して文字、図形の剥離(研削)加工を行なう粉体噴
射装置もしくは噴射ノズルに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a powder ejecting apparatus or an ejecting nozzle for ejecting powder onto a workpiece to separate (grind) characters and figures.

【0002】[0002]

【従来の技術】これまでにガラス、シリコン、セラミッ
クスなどに、鉄、砂、ガラスなどの微粒な粒子(噴射砥
粒)を吹き付けて、被加工物の表面を改質したり、溝、
穴などを形成する加工が知られている(ブラスト加
工)。 ブラスト加工はバリ取りや、塗装、錆の剥離、
被加工物の表面を荒らすなど精密加工とはかけ離れた分
野で利用されてきた。しかし、硬脆材料を低コスト、高
効率で除去加工できる点などから、精密な加工方法とし
てとらえ様々な加工装置が提案されている。
2. Description of the Related Art Up to now, fine particles (jet abrasive grains) such as iron, sand, glass, etc. have been sprayed on glass, silicon, ceramics, etc. to modify the surface of a workpiece, to form grooves,
Processing for forming holes and the like is known (blast processing). For blasting, deburring, painting, peeling of rust,
It has been used in fields far from precision machining, such as roughening the surface of a workpiece. However, various processing apparatuses have been proposed as a precise processing method because hard and brittle materials can be removed at low cost and with high efficiency.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、ブラス
ト加工において、加工量の定量化、安定化、高精度化を
実現したブラスト加工装置はこれまでに存在していない
のが現状である。本発明は、ブラスト加工を行なう粉体
噴射装置あるいは粉体噴射ノズルにおいて、加工量を定
量化でき、加工品質が安定的あり、高精度な加工を実現
する粉体噴射装置あるいは粉体噴射ノズルを提供するこ
とを目的とする。
However, in the blasting process, there is no blasting device which has realized the quantification, stabilization and high accuracy of the processing amount. The present invention provides a powder injection device or a powder injection nozzle that can quantify the amount of processing, has stable processing quality, and realizes high-precision processing in a powder injection device or a powder injection nozzle that performs blasting. The purpose is to provide.

【0004】[0004]

【課題を解決するための手段】本発明は、前記課題を解
決するために、本出願人が先に提案した特願平10−2
67672号における粉体噴射ノズルを粉体の供給用と
して使用し、別に設けた加工ノズルへ粉体の供給を行な
う。供給された粉体は、加工ノズルの加工ガスと共に排
出され、被加工物に衝突し、除去加工を行なうものであ
る。
SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is based on Japanese Patent Application No. Hei 10-2 proposed by the present applicant.
The powder injection nozzle in No. 67672 is used for supplying powder, and the powder is supplied to a separately provided processing nozzle. The supplied powder is discharged together with the processing gas of the processing nozzle, collides with the workpiece, and performs removal processing.

【0005】加工量の定量化、加工品質の安定化のため
に、粉体供給用ノズルから噴射する噴射量を限りなく小
さくすることによって、1回当たりの加工量をできるだ
け小さな量とする。この最小加工量を積み上げることに
よって、加工量の定量化、加工品質の安定化を実現する
ことができる。1回当たりの加工量が小さいので、粉体
の供給・停止を高速に行なうことによって単位時間当た
りの加工量を大きくすることができる。
[0005] In order to quantify the processing amount and stabilize the processing quality, the injection amount injected from the powder supply nozzle is made as small as possible to reduce the processing amount per operation as much as possible. By accumulating the minimum processing amount, quantification of the processing amount and stabilization of the processing quality can be realized. Since the processing amount per operation is small, the processing amount per unit time can be increased by supplying and stopping the powder at high speed.

【0006】特願平10−267672号においては、
粉体の吸入と加速を一つのノズルで行っているため、流
体制御装置の開閉時間が短い場合、立ち上がり及び立ち
下がり時に粉体を十分に加速できないことによる、加工
効率の低下が発生するが、本発明の場合、粉体は供給さ
れた時点から加速流体にて加速されるので、加工効率が
向上する。
In Japanese Patent Application No. 10-267672,
Since the suction and acceleration of the powder are performed by one nozzle, when the opening and closing time of the fluid control device is short, the processing efficiency is reduced due to the inability to sufficiently accelerate the powder at the time of rising and falling, but In the case of the present invention, since the powder is accelerated by the accelerating fluid from the point of supply, the processing efficiency is improved.

【0007】さらに、特願平10−267672号にお
いては、圧縮流体供給パイプにセラミックパイプを被せ
た構造であるので、噴射ノズルは圧縮流体供給パイプよ
りも小さくできない。本発明の場合、噴射ノズルと供給
ノズルは独立しているので、加工ノズルを極細にするこ
とができる。また本発明の場合、粉体が供給されないと
加工ガスのみが噴射されるので、除去加工の際に発生す
る滞留した粉体を除去する効果があり、加工効率、加工
品質、定量性、高精度化に効果がある。ゆえに、粉体供
給ノズルから加工ノズルに対する粉体の供給を断続的に
行なうことによって、理想状態の除去加工を行なうこと
ができる。
Further, in Japanese Patent Application No. 10-267672, the structure of the compressed fluid supply pipe is covered with a ceramic pipe, so that the injection nozzle cannot be smaller than the compressed fluid supply pipe. In the case of the present invention, since the injection nozzle and the supply nozzle are independent, the processing nozzle can be made extremely thin. Further, in the case of the present invention, since only the processing gas is injected when the powder is not supplied, there is an effect of removing the stagnant powder generated at the time of the removal processing, and the processing efficiency, the processing quality, the quantitativeness, the high precision It is effective for conversion. Therefore, by performing the intermittent supply of the powder from the powder supply nozzle to the processing nozzle, it is possible to perform an ideal removal process.

【0008】さらに、同じピッチで構成された多くの加
工対象物を効率的に加工するために、断続粉体噴射ノズ
ルを複数個集積化させることによって加工効率を上昇さ
せることができる。また、ノズル形状、加工特性のこと
なった複数のノズルを集積化させることによって加工対
象物に一定の加工のみではなく、異なった複数の加工
(穴形状、深さなど)を速やかに効率的に行なうことが
できるようになる。
Furthermore, in order to efficiently process a large number of workpieces having the same pitch, the efficiency of processing can be increased by integrating a plurality of intermittent powder injection nozzles. In addition, by integrating a plurality of nozzles with different nozzle shapes and processing characteristics, not only a fixed processing on the processing target but also a plurality of different processing (hole shape, depth, etc.) can be performed quickly and efficiently. Will be able to do it.

【0009】請求項1の発明は、粉体を貯蔵するタンク
(12)と;タンクに貯蔵された粉体を噴射するノズル
(3)と;を含む粉体噴射装置であって、ノズルに粉体
供給用の圧縮流体を間欠的に供給する粉体流体供給手段
(18)と;連続圧縮流体を粉体供給用の圧縮流体とは
別に常時連続的に供給する連続流体供給手段(20)
と;を備え、粉体供給用の圧縮流体が供給されるときは
前記粉体が噴射され、粉体供給用の圧縮流体が供給され
ないときは粉体を含まない流体のみが噴射されるという
ものである。
According to a first aspect of the present invention, there is provided a powder ejecting apparatus including: a tank (12) for storing powder; and a nozzle (3) for ejecting the powder stored in the tank. Powder fluid supply means (18) for intermittently supplying compressed fluid for body supply; and continuous fluid supply means (20) for continuously supplying continuous compressed fluid separately from the compressed fluid for powder supply.
And when the compressed fluid for supplying powder is supplied, the powder is ejected, and when the compressed fluid for supplying powder is not supplied, only the fluid containing no powder is ejected. It is.

【0010】請求項2の発明は、タンク内圧縮流体を供
給するタンク加圧用流体供給手段(24)をさらに含む
というものである。請求項3の発明は、粉体供給用の圧
縮流体P1と連続圧縮流体P2とタンク内圧縮流体P3
とのそれぞれの設定圧力が、P3<P2<P1の関係を
満たすというものである。
The invention according to claim 2 further includes a tank pressurizing fluid supply means (24) for supplying a compressed fluid in the tank. The third aspect of the present invention provides a compressed fluid P1 for supplying powder, a continuous compressed fluid P2, and a compressed fluid P3 in a tank.
Respectively satisfy the relationship of P3 <P2 <P1.

【0011】請求項4の発明は、同一特性のノズルが複
数個集積化されるというものである。請求項5の発明
は、ノズル特性の異なったノズルが複数個集積化される
というものである。請求項6の発明は、ノズル(3)に
タンク(12)から粉体を供給するための粉体供給口に
カバーを設けたものである。請求項7の発明は、粉体を
噴射するノズル(3)であって、間欠的圧縮流体(P
1)とは別に連続的圧縮流体(P2)が供給され、間欠
的圧縮流体(P1)が供給されるとき粉体が噴射され、
間欠的圧縮流体(P1)が供給されないときは粉体を含
まない流体のみが噴射されるというものである。
According to a fourth aspect of the present invention, a plurality of nozzles having the same characteristics are integrated. The invention according to claim 5 is that a plurality of nozzles having different nozzle characteristics are integrated. According to a sixth aspect of the present invention, a cover is provided at a powder supply port for supplying powder from the tank (12) to the nozzle (3). According to a seventh aspect of the present invention, there is provided a nozzle (3) for injecting powder, wherein the intermittent compressed fluid (P
In addition to 1), a continuous compressed fluid (P2) is supplied, and powder is injected when an intermittent compressed fluid (P1) is supplied,
When the intermittent compressed fluid (P1) is not supplied, only the fluid containing no powder is ejected.

【0012】なお、本発明の構成を説明する上記課題を
解決するための手段の項では、本発明を分かり易くする
ために実施の形態の部材番号を用いたが、これによって
本発明が実施の形態に限定されるものではない。
In the section of the means for solving the above-mentioned problems, which explains the configuration of the present invention, the member numbers of the embodiments are used for easy understanding of the present invention. It is not limited to the form.

【0013】[0013]

【発明の実施の形態】以下図面を参照して実施の形態を
説明する。本実施の形態における粉体噴射装置(アブレ
イシブジェット−Abrasive Jet Machining−装置)の特
徴は、粉体(砥粒)の間欠噴射である。すなわち、粉体
を含まないガスが噴射ノズルから常時噴射されており、
粉体供給用の流体制御装置の高速電磁弁がオンとなった
ときのみ粉体がガス噴流の中に混合される。したがっ
て、高速電磁弁のオン時のみ加工が行なわれ、オフ時に
は加工が停止すると共に、加工面からの切り屑、残留粉
体の除去、クリーニングが行なわれるというものであ
る。この過程が高速で繰り返し行なわれ、加工が進行す
る。
Embodiments of the present invention will be described below with reference to the drawings. The feature of the powder injection device (Abrasive Jet Machining-device) in the present embodiment is intermittent injection of powder (abrasive grains). That is, gas containing no powder is constantly injected from the injection nozzle,
The powder is mixed into the gas jet only when the high-speed solenoid valve of the powder control fluid control device is turned on. Therefore, the processing is performed only when the high-speed solenoid valve is turned on, and the processing is stopped when the high-speed solenoid valve is turned off, while removing chips and residual powder from the processing surface and cleaning. This process is repeated at a high speed, and the processing proceeds.

【0014】図4は本発明の断続粉体噴射ノズルの断面
図である。なお、噴射装置および噴射ノズルの基本的構
成は本出願人が先に提案した特願平10−267672
号において開示されるものと同一である。粉体供給用の
ノズルとして、パイプフォルダー5に圧縮流体供給パイ
プ6を挿入して接着し粉体供給ブロック2にねじ込み固
定する。次に粉体供給ノズルフォルダー8に粉体供給ノ
ズル7を挿入して接着し、カバー25を粉体供給ノズル
7に接着固定し、粉体供給ノズルフォルダー8を粉体供
給ブロック2に接着固定する。これにより、粉体吸入室
10からの粉体が粉体供給口へ自然落下するのを防げ
る。粉体供給ブロック2に粉体供給継ぎ手11をねじ込
み固定すると共に粉体タンク12をねじ込み固定する。
粉体タンク12にOリング15を取り付けて、粉体タン
クカバー14をねじで固定する。さらに、粉体供給ブロ
ック2にOリング15を取り付け、加速ブロック1をね
じ込み固定する。加工ノズル3を加工ノズルフォルダー
4に接着し、加速ブロック1にねじ込み固定する。粉体
供給ブロック2には、加速用流体供給用継ぎ手19をね
じ込み固定する。パイプフォルダー5と流体制御装置1
8をチュウブ17にて接続し、加速用流体供給継ぎ手1
9と流体制御装置20をチュウブ17にて接続する。粉
体タンクの上部にタンク加圧用の圧力供給口を設け、フ
ィルター22と継ぎ手23を固定する。継ぎ手23とタ
ンク加圧用流体制御装置24をチュウブ17にて接続す
る。粉体供給用の流体制御装置18と粉体加速用の流体
制御装置20、タンク加圧用の流体制御装置24の各流
体制御装置には、各々独立に異なった圧力を設定するこ
とが可能である。
FIG. 4 is a sectional view of the intermittent powder injection nozzle of the present invention. The basic configuration of the injection device and the injection nozzle is described in Japanese Patent Application No. 10-267672 previously proposed by the present applicant.
The same as that disclosed in the above item. As a powder supply nozzle, a compressed fluid supply pipe 6 is inserted into a pipe folder 5 and adhered, and screwed and fixed to the powder supply block 2. Next, the powder supply nozzle 7 is inserted and adhered to the powder supply nozzle folder 8, the cover 25 is adhered and fixed to the powder supply nozzle 7, and the powder supply nozzle folder 8 is adhered and fixed to the powder supply block 2. . This prevents the powder from the powder suction chamber 10 from dropping naturally into the powder supply port. The powder supply joint 11 is screwed and fixed to the powder supply block 2 and the powder tank 12 is screwed and fixed.
The O-ring 15 is attached to the powder tank 12, and the powder tank cover 14 is fixed with screws. Further, the O-ring 15 is attached to the powder supply block 2, and the acceleration block 1 is screwed and fixed. The processing nozzle 3 is adhered to the processing nozzle folder 4 and screwed and fixed to the acceleration block 1. An acceleration fluid supply joint 19 is screwed and fixed to the powder supply block 2. Pipe holder 5 and fluid control device 1
8 are connected by a tube 17, and a fluid supply joint 1 for acceleration is connected.
9 and fluid control device 20 are connected by tube 17. A pressure supply port for pressurizing the tank is provided above the powder tank, and the filter 22 and the joint 23 are fixed. The joint 23 and the tank pressurizing fluid control device 24 are connected by the tube 17. Different pressures can be set independently for each of the fluid control devices of the fluid supply device 18 for powder supply, the fluid control device 20 for powder acceleration, and the fluid control device 24 for tank pressurization. .

【0015】次にこの粉体噴射ノズルの動作について説
明する。図6において、パイプフォルダー5に粉体供給
用流体W1(圧力P1)、 加速用流体供給用継ぎ手1
9に加速用流体(連続圧縮流体)W2(圧力P2)、
タンク加圧用流体供給継ぎ手23に加圧用流体W3(圧
力P3)を供給するが、各々の圧力の関係はP3<P2
<P1である。この圧力関係によって粉体の逆流を防止
することができる。流体制御装置20は電気信号にて開
閉され、粉体13を加速するための圧縮流体は加速用流
体供給用継ぎ手19に供給される。
Next, the operation of the powder injection nozzle will be described. 6, a powder supply fluid W1 (pressure P1) and an acceleration fluid supply coupling 1 are placed in a pipe folder 5.
9, an acceleration fluid (continuously compressed fluid) W2 (pressure P2),
The pressurizing fluid W3 (pressure P3) is supplied to the tank pressurizing fluid supply joint 23, and the relationship between the respective pressures is P3 <P2.
<P1. The backflow of the powder can be prevented by this pressure relationship. The fluid control device 20 is opened and closed by an electric signal, and a compressed fluid for accelerating the powder 13 is supplied to an acceleration fluid supply joint 19.

【0016】一方、流体制御装置18も電気信号によっ
て開閉され、粉体13を供給するための圧縮流体はパイ
プフォルダー5に供給される。パイプフォルダー5に供
給された圧縮流体は圧縮流体供給パイプ6から粉体供給
ノズル7に噴射され、圧縮流体供給パイプ6と粉体供給
ノズル7の内径差によって負圧が発生し、粉体吸入室1
0に存在する粉体13が粉体供給ノズル7に吸入され、
圧縮流体と共に、加速チャンバー9に噴射される。加速
チャンバー9に噴射された粉体13は、加速用流体供給
継ぎ手19から供給されている加速用の圧縮流体によっ
て加速され、加工ノズル3から噴射される。粉体タンク
12のタンク内圧を流体制御装置24を用いることによ
って、開放状態・加圧状態と高速に変化させることが可
能である。
On the other hand, the fluid control device 18 is also opened and closed by an electric signal, and a compressed fluid for supplying the powder 13 is supplied to the pipe folder 5. The compressed fluid supplied to the pipe folder 5 is jetted from the compressed fluid supply pipe 6 to the powder supply nozzle 7, and a negative pressure is generated due to a difference in inner diameter between the compressed fluid supply pipe 6 and the powder supply nozzle 7. 1
0 is sucked into the powder supply nozzle 7,
The compressed fluid is injected into the acceleration chamber 9. The powder 13 injected into the acceleration chamber 9 is accelerated by the acceleration compressed fluid supplied from the acceleration fluid supply joint 19, and is injected from the processing nozzle 3. By using the fluid control device 24, the tank internal pressure of the powder tank 12 can be rapidly changed between the open state and the pressurized state.

【0017】加速用の圧縮流体を流した状態で、粉体供
給用の流体制御装置18(詳細には電磁弁)を制御して
断続的に粉体の供給を行なうことによって、粉体が供給
されれば粉体と加速用圧縮流体が噴射され、粉体が供給
されなければ、加速用圧縮流体のみが噴射される。噴射
加工において、先に噴射された粉体に後から噴射された
粉体が衝突して加工効率が低下したり、滞留した粉体に
よって加工精度が低下する現象が発生する。本実施の形
態においては、粉体の噴射量が極めて小さく、高速な断
続噴射であり、粉体が噴射されなければ加速用圧縮流体
によってブロー(加工面からの切り屑、残留砥粒の除
去、クリーニング)が行われるので、滞留粉体による加
工効率の低下を防ぎ、加工精度を向上させることができ
る。
The powder is supplied intermittently by controlling the powder supply fluid controller 18 (specifically, an electromagnetic valve) to supply the powder intermittently while the compressed fluid for acceleration is flowing. If so, the powder and the compressed fluid for acceleration are injected, and if no powder is supplied, only the compressed fluid for acceleration is injected. In the injection processing, a powder injected later collides with a powder injected earlier, resulting in a reduction in processing efficiency or a phenomenon in which processing accuracy is reduced due to stagnant powder. In the present embodiment, the injection amount of the powder is extremely small, and the injection is a high-speed intermittent injection. If the powder is not injected, it is blown by the compressing fluid for acceleration (removal of chips from the processing surface, removal of residual abrasive grains, Since the cleaning is performed, it is possible to prevent a reduction in processing efficiency due to the retained powder and improve processing accuracy.

【0018】本実施の形態において、粉体供給用圧縮流
体制御装置18と圧縮流体供給パイプ6までの流体供給
路の体積が大きいと粉体の断続供給の応答性が悪くなる
ので粉体供給用圧縮流体制御装置18と圧縮流体供給パ
イプ6間の体積を極小にするか、チェックバルブを挿入
するなどの構造としても良い。本実施の形態において
は、粉体供給ノズル7と加工ノズル3の内径が同等であ
り、加速チャンバー9に供給された粉体が、加工ノズル
3の一定方向に偏ることはないが、粉体供給ノズル7に
比べて加工ノズル3が非常に大きい場合、供給された粉
体の分布を均一化するために、加工ノズル手前に適切な
大きさの混合室を設ける構造としても良い。
In this embodiment, if the volume of the fluid supply passage between the powder supply compressed fluid control device 18 and the compressed fluid supply pipe 6 is large, the responsiveness of the intermittent supply of the powder is deteriorated. The structure between the compressed fluid control device 18 and the compressed fluid supply pipe 6 may be minimized or a check valve may be inserted. In the present embodiment, the powder supply nozzle 7 and the processing nozzle 3 have the same inner diameter, and the powder supplied to the acceleration chamber 9 is not biased in a certain direction of the processing nozzle 3. When the processing nozzle 3 is much larger than the nozzle 7, a structure may be provided in which a mixing chamber of an appropriate size is provided in front of the processing nozzle in order to make the distribution of the supplied powder uniform.

【0019】また、加工ノズル3の内径が微少な場合に
おいて、加工終了時に粉体タンク12の圧力が高い場
合、開放して、加工ノズルのつまりを防止する必要があ
るため、粉体タンク12に加圧・開放機構を設ける構造
とした。さらに、粉体の供給量は圧縮流体供給パイプ6
と粉体供給ノズル7の内径差によって発生する負圧の
値、粉体供給用圧縮流体の圧力、噴射時間によって決ま
る。圧縮流体供給パイプ6の先端位置を変化させること
によって、発生する負圧の値を調整できるので、圧縮流
体供給パイプ6の先端位置を移動できる構造としても良
い。粉体供給ノズル7に設けてある粉体給入口の向きが
上向きであったり、横向きであった場合、また、ノズル
を縦型とした場合、粉体吸入室10に存在する粉体が、
自然に粉体給入口に落下し、排出されることを防ぐため
に、粉体供給ノズル7にカバー25を設ける構造とし
た。また、粉体供給ノズル7が水平の場合、粉体供給口
を下向きにセットして固定する構造としてもよい。
In the case where the inner diameter of the processing nozzle 3 is very small and the pressure of the powder tank 12 is high at the end of processing, it is necessary to open the powder tank 12 to prevent the processing nozzle from being clogged. A structure to provide a pressure / release mechanism was adopted. Further, the supply amount of the powder is determined by the compressed fluid supply pipe 6.
And the value of the negative pressure generated by the difference in the inner diameter of the powder supply nozzle 7, the pressure of the compressed fluid for powder supply, and the injection time. Since the value of the generated negative pressure can be adjusted by changing the position of the distal end of the compressed fluid supply pipe 6, the structure may be such that the distal end position of the compressed fluid supply pipe 6 can be moved. When the powder supply inlet provided in the powder supply nozzle 7 is directed upward or horizontally, or when the nozzle is a vertical type, the powder present in the powder suction chamber 10
A cover 25 is provided on the powder supply nozzle 7 in order to prevent the powder from being naturally dropped into the powder supply port and discharged. Further, when the powder supply nozzle 7 is horizontal, the structure may be such that the powder supply port is set downward and fixed.

【0020】本実施の形態において、圧縮流体供給パイ
プ6は外形0.8mm、内径0.40mmのステンレスパイ
プ、粉体供給ノズル7は外形1.2mm、内径0.8m
mのセラミックスパイプを、加工ノズル3は外形1.2
mm、内径0.8mmのセラミックスパイプを用いた。
加速ブロック1、粉体供給ブロック2はアクリルを、継
ぎ手19及びパイプフォルダー5は真鍮を用いた。粉体
13は粒径25μmのホワイトアランダムを、加工ガス
及び粉体供給用流体にはドライエアー(圧力1〜12K
g/cm2)、各々の流体制御装置として電磁弁を用い
た。
In this embodiment, the compressed fluid supply pipe 6 is a stainless steel pipe having an outer diameter of 0.8 mm and an inner diameter of 0.40 mm, and the powder supply nozzle 7 is an outer diameter of 1.2 mm and an inner diameter of 0.8 m.
m, and the processing nozzle 3 has an outer diameter of 1.2
A ceramic pipe having an inner diameter of 0.8 mm and an inner diameter of 0.8 mm was used.
The acceleration block 1 and the powder supply block 2 were made of acrylic, and the joint 19 and the pipe holder 5 were made of brass. The powder 13 is white alundum having a particle size of 25 μm, and the processing gas and the powder supply fluid are dry air (pressure 1 to 12K).
g / cm2), and an electromagnetic valve was used as each fluid control device.

【0021】本実施の形態において、粉体の断続供給に
よる、加工・クリーニングの繰り返しを高速に行なった
場合と連続加工を行なった場合の、加工量について実験
した。噴射条件は図8に示すとおりである。噴射条件に
おける電磁弁の総開放時間を500(msec)とし
て、Aの連続噴射、B〜Eの断続噴射で穿孔実験を行な
った。なお、FはEの総加工時間(on/offを含め
た総加工時間)と同じ4500(msec)の連続噴射
である。この実験結果を図7に示す。図7をみると、A
〜Eにおいては電磁弁の総開放時間が全て一定であるの
に関わらず、連続噴射の場合の加工量が一番小さく、断
続噴射の間隔が長いほど加工量が多くなっている。
In the present embodiment, experiments were conducted on the amount of processing when processing and cleaning were repeated at high speed and when continuous processing was performed by intermittent supply of powder. The injection conditions are as shown in FIG. With the total opening time of the solenoid valve under the injection condition set to 500 (msec), a drilling experiment was performed with continuous injection of A and intermittent injection of BE. Note that F is a continuous injection of 4500 (msec), which is the same as the total processing time of E (total processing time including on / off). FIG. 7 shows the results of this experiment. Looking at FIG.
In E to E, the processing amount in the case of continuous injection is the smallest, and the processing amount is larger as the interval between intermittent injections is longer, irrespective of the total open time of the solenoid valve being all constant.

【0022】EとFを比べると、Eの場合、砥粒の噴射
量がFの1/9であるのにも関わらず、加工深さはFと
ほぼ同じである。これは条件A及びFの場合、連続的に
粉体が噴射され、加工に寄与しない砥粒が穴底部に堆積
し砥粒の加工エネルギーを有効に被加工物に伝えられな
い現象が発生し、加工効率が低下するためである。これ
に対し、粉体を断続的に噴射し、加工とクリーニングを
交互に行いながら加工を進行させることによって加工効
率が上昇することが分かる。この実験結果から本方法の
有効性が実証された。
When E and F are compared, in the case of E, the processing depth is almost the same as F, though the injection amount of the abrasive grains is 1/9 of F. This is because in the case of the conditions A and F, the powder is continuously sprayed, and the abrasive grains that do not contribute to the processing accumulate at the bottom of the hole, and a phenomenon that the processing energy of the abrasive grains cannot be effectively transmitted to the workpiece occurs. This is because the processing efficiency decreases. On the other hand, it can be seen that the processing efficiency is increased by intermittently injecting the powder and performing the processing while performing the processing and the cleaning alternately. The experimental results proved the effectiveness of the method.

【0023】また、同じ間隔で構成された複数の加工対
象物を効率的に加工するために、同じ特性のノズルを複
数個集積化させたノズル構造とすることによって、複数
の加工対象物を同時に加工することができる。さらに、
加工対象物に複数の異なった形状の加工を行なう場合、
ノズル径や、ノズルの形状、加工能力などのノズル特性
が異なったノズルを複数個集積化させることによって、
効率のよい、高精度な加工を段取りなしで行なうことが
できる。
Further, in order to efficiently process a plurality of processing objects formed at the same interval, a plurality of nozzles having the same characteristics are integrated to form a nozzle structure, so that a plurality of processing objects can be simultaneously processed. Can be processed. further,
When processing multiple different shapes on the workpiece,
By integrating multiple nozzles with different nozzle characteristics such as nozzle diameter, nozzle shape, processing capability, etc.
Efficient, high-precision machining can be performed without setup.

【0024】[0024]

【発明の効果】本発明は、以下のような作用効果を達成
する。請求項1に記載の発明によれば、ノズルに粉体供
給用の圧縮流体を間欠的に供給する粉体流体供給手段
と;連続圧縮流体を粉体供給用の圧縮流体とは別に常時
連続的に供給する連続流体供給手段と;を備え、粉体供
給用の圧縮流体が供給されるときは粉体が噴射され、粉
体供給用の圧縮流体が供給されないときは粉体を含まな
い流体のみが噴射されるので、粉体の断続供給による、
加工・エアーブローの繰り返し(間欠噴射)によって、
加工効率が高く、精密な加工を実現できる。加工の高能
率化、高精度化が可能であって、粉体の噴射量を正確に
制御することができる。
The present invention achieves the following functions and effects. According to the first aspect of the present invention, a powder fluid supply means for intermittently supplying a compressed fluid for powder supply to the nozzle; a continuous compressed fluid which is always continuous separately from the compressed fluid for powder supply. And a continuous fluid supply means for supplying the compressed fluid for supplying the powder, the powder is ejected when the compressed fluid for supplying the powder is supplied, and only the fluid containing no powder when the compressed fluid for supplying the powder is not supplied. Is injected, so the powder is intermittently supplied,
By repeating processing and air blow (intermittent injection),
Processing efficiency is high and precise processing can be realized. High efficiency and high precision of processing are possible, and the injection amount of powder can be accurately controlled.

【0025】請求項2に記載の発明によれば、タンク内
圧縮流体を供給するタンク加圧用流体供給手段を備える
ので、加工ノズルの内径が極細な場合において、タンク
内圧が高い場合、これを開放し加工ノズルのつまりを防
止することができる。請求項3に記載の発明によれば、
粉体供給用の圧縮流体P1と連続圧縮流体P2とタンク
内圧縮流体P3とのそれぞれの設定圧力が、P3<P2
<P1の関係を満たすので、粉体の逆流を防止すること
ができる。
According to the second aspect of the present invention, since the tank pressurizing fluid supply means for supplying the pressurized fluid in the tank is provided, when the inside diameter of the processing nozzle is extremely small, when the tank internal pressure is high, it is opened. The clogging of the machining nozzle can be prevented. According to the invention described in claim 3,
The respective set pressures of the compressed fluid P1, the continuous compressed fluid P2, and the compressed fluid P3 in the tank for supplying powder are P3 <P2
Since the relationship of <P1 is satisfied, the backflow of the powder can be prevented.

【0026】請求項4に記載の発明によれば、同一特性
のノズルが複数個集積化されているので、複数の加工対
象物を同時に効率的に加工することができる。請求項5
に記載の発明によれば、ノズル特性の異なったノズルが
複数個集積化されているので、加工対象物に複数の異な
った形状の加工を、同時に効率的にかつ高精度に行なう
ことができる。請求項6に記載の発明によれば、粉体供
給ノズルにカバーを設けることによって、粉体供給ノズ
ルの向きに自由度が与えられる。 ゆえに、粉体粉体噴
射ノズル及び粉体噴射装置の構造、取り付け方法などが
比較的自由になる。
According to the fourth aspect of the present invention, since a plurality of nozzles having the same characteristics are integrated, a plurality of objects to be processed can be simultaneously and efficiently processed. Claim 5
According to the invention described in (1), since a plurality of nozzles having different nozzle characteristics are integrated, processing of a plurality of different shapes on a processing target object can be performed simultaneously efficiently and with high precision. According to the sixth aspect of the present invention, by providing the cover for the powder supply nozzle, a degree of freedom is given to the direction of the powder supply nozzle. Therefore, the structure and the mounting method of the powder injection nozzle and the powder injection device are relatively free.

【0027】請求項7に記載の発明によれば、間欠的圧
縮流体とは別に連続的圧縮流体が供給され、間欠的圧縮
流体が供給されるとき粉体が噴射され、間欠的圧縮流体
が供給されないときは粉体を含まない流体のみが噴射さ
れるので、粉体の断続供給による、加工・エアーブロー
の繰り返し(間欠噴射)によって、加工効率が高く、精
密な加工を実現できる。加工の高能率化、高精度化が可
能であって、粉体の噴射量を正確に制御することができ
る。
According to the seventh aspect of the invention, a continuous compressed fluid is supplied separately from the intermittent compressed fluid, and when the intermittent compressed fluid is supplied, powder is injected and the intermittent compressed fluid is supplied. When not performed, only the fluid containing no powder is ejected, so that the machining efficiency is high and precise machining can be realized by repeating machining and air blowing (intermittent ejection) by intermittent supply of powder. High efficiency and high precision of processing are possible, and the injection amount of powder can be accurately controlled.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 断続粉体噴射ノズルの正面図である。FIG. 1 is a front view of an intermittent powder injection nozzle.

【図2】 断続粉体噴射ノズルの側面図である。FIG. 2 is a side view of an intermittent powder injection nozzle.

【図3】 断続粉体噴射ノズルの後面図である。FIG. 3 is a rear view of the intermittent powder injection nozzle.

【図4】 (a)は、断続粉体噴射ノズルのA−A’断
面図であり、(b)は、A部の拡大図である。
FIG. 4A is an AA ′ cross-sectional view of an intermittent powder injection nozzle, and FIG. 4B is an enlarged view of a portion A.

【図5】 断続粉体噴射ノズルのB−B’方向視であ
る。
FIG. 5 is a BB ′ direction view of the intermittent powder injection nozzle.

【図6】 断続粉体噴射ノズルの制御ブロック図であ
る。
FIG. 6 is a control block diagram of an intermittent powder injection nozzle.

【図7】 断続粉体噴射ノズルの実験結果である。FIG. 7 is an experimental result of an intermittent powder injection nozzle.

【図8】 断続粉体噴射ノズルの実験条件である。FIG. 8 shows experimental conditions of an intermittent powder injection nozzle.

【符号の説明】[Explanation of symbols]

1 加速ブロック 2 粉体供給ブロック 3 加工ノズル 4 加工ノズルフォルダー 5 パイプフォルダー 6 圧縮流体供給パイプ 7 粉体供給ノズル 8 粉体供給ノズルフォルダー 9 加速チャンバー 10 粉体吸入室 11 粉体供給継ぎ手 12 粉体タンク 13 粉体 14 粉体タンクカバー 15、16 Oリング 17 チュウブ 18 流体制御装置 19 加速用流体供給継ぎ手 20 流体制御装置 21 加速用流体供給路 22 フィルター 23 粉体タンク加圧用圧縮流体供給継ぎ手 24 粉体タンク加圧用圧縮流体制御装置 25 カバー DESCRIPTION OF SYMBOLS 1 Acceleration block 2 Powder supply block 3 Processing nozzle 4 Processing nozzle folder 5 Pipe folder 6 Compressed fluid supply pipe 7 Powder supply nozzle 8 Powder supply nozzle folder 9 Acceleration chamber 10 Powder suction chamber 11 Powder supply joint 12 Powder Tank 13 Powder 14 Powder tank cover 15, 16 O-ring 17 Tube 18 Fluid control device 19 Acceleration fluid supply joint 20 Fluid control device 21 Acceleration fluid supply passage 22 Filter 23 Compressed fluid supply joint for powder tank pressurization 24 Powder Compressed fluid control device for body tank pressurization 25 cover

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】粉体を貯蔵するタンクと;前記タンクに貯
蔵された前記粉体を噴射するノズルと;を含む粉体噴射
装置であって、 前記ノズルに粉体供給用の圧縮流体を間欠的に供給する
粉体流体供給手段と;連続圧縮流体を前記粉体供給用の
圧縮流体とは別に常時連続的に供給する連続流体供給手
段と;を備え、 前記粉体供給用の圧縮流体が供給されるときは前記粉体
が噴射され、前記粉体供給用の圧縮流体が供給されない
ときは前記粉体を含まない流体のみが噴射されることを
特徴とする粉体噴射装置。
1. A powder ejecting apparatus comprising: a tank for storing powder; and a nozzle for ejecting the powder stored in the tank, wherein a compressed fluid for powder supply is intermittently supplied to the nozzle. Powder fluid supply means for continuously supplying; and continuous fluid supply means for constantly and continuously supplying a continuous compressed fluid separately from the compressed fluid for powder supply, wherein the compressed fluid for powder supply is A powder ejecting apparatus, wherein the powder is ejected when supplied, and when the compressed fluid for supplying the powder is not supplied, only a fluid containing no powder is ejected.
【請求項2】タンク内圧縮流体を供給するタンク加圧用
流体供給手段をさらに含むことを特徴とする請求項1に
記載の粉体噴射装置。
2. The powder injection device according to claim 1, further comprising a tank pressurizing fluid supply unit for supplying a compressed fluid in the tank.
【請求項3】前記粉体供給用の圧縮流体P1と前記連続
圧縮流体P2と前記タンク内圧縮流体P3とのそれぞれ
の設定圧力が、 P3<P2<P1の関係を満たすことを特徴とする請求
項2に記載の粉体噴射装置。
3. The set pressure of each of the compressed fluid P1 for powder supply, the continuous compressed fluid P2, and the compressed fluid P3 in the tank satisfies a relationship of P3 <P2 <P1. Item 3. A powder injection device according to Item 2.
【請求項4】前記ノズルは、同一特性のものが複数個集
積化されていることを特徴とする請求項1に記載の粉体
噴射装置。
4. The powder injection apparatus according to claim 1, wherein a plurality of nozzles having the same characteristics are integrated.
【請求項5】前記ノズルは、ノズル特性の異なったもの
が複数個集積化されていることを特徴とする請求項1に
記載の粉体噴射装置。
5. The powder injection apparatus according to claim 1, wherein a plurality of nozzles having different nozzle characteristics are integrated.
【請求項6】前記ノズルに前記タンクから粉体を供給す
るための粉体供給口に、カバーが設けられていることを
特徴とする請求項1に記載の噴射ノズル。
6. The injection nozzle according to claim 1, wherein a cover is provided at a powder supply port for supplying powder from the tank to the nozzle.
【請求項7】粉体を噴射するノズルであって、間欠的圧
縮流体とは別に連続的圧縮流体が供給され、前記間欠的
圧縮流体が供給されるとき前記粉体が噴射され、前記間
欠的圧縮流体が供給されないときは粉体を含まない流体
のみが噴射されることを特徴とする粉体噴射ノズル。
7. A nozzle for injecting powder, wherein a continuous compressed fluid is supplied separately from the intermittent compressed fluid, and the powder is injected when the intermittent compressed fluid is supplied, wherein the intermittent compressed fluid is supplied. A powder injection nozzle wherein only a fluid containing no powder is injected when a compressed fluid is not supplied.
JP2000066454A 1999-03-12 2000-03-10 Powder injection device and powder injection nozzle Expired - Lifetime JP4424807B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000066454A JP4424807B2 (en) 1999-03-12 2000-03-10 Powder injection device and powder injection nozzle

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-66058 1999-03-12
JP6605899 1999-03-12
JP2000066454A JP4424807B2 (en) 1999-03-12 2000-03-10 Powder injection device and powder injection nozzle

Publications (2)

Publication Number Publication Date
JP2000326229A true JP2000326229A (en) 2000-11-28
JP4424807B2 JP4424807B2 (en) 2010-03-03

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Country Status (1)

Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006224205A (en) * 2005-02-15 2006-08-31 Sendai Nikon:Kk Powder injection nozzle device
JP2010536586A (en) * 2007-08-21 2010-12-02 アブレイシブ・カッティング・テクノロジー・リミテッド Control system for fluid / abrasive jet cutting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006224205A (en) * 2005-02-15 2006-08-31 Sendai Nikon:Kk Powder injection nozzle device
JP2010536586A (en) * 2007-08-21 2010-12-02 アブレイシブ・カッティング・テクノロジー・リミテッド Control system for fluid / abrasive jet cutting device

Also Published As

Publication number Publication date
JP4424807B2 (en) 2010-03-03

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