JP2000315107A - Process progress management device and its method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain process progress management device and its method capable of automatically and continuously executing process progress management even when communication with a processing progress management computer is disabled or when the battery in an ID card runs out and automatically returning to normal process progress management when the system is restored from the failure. SOLUTION: When a wafer cassette 2 is loaded, a loading sensor 4 senses the cassette 2 and a processor controller 7 sends a signal to a processing progress computer 8 through a device controller 9 to obtain information necessary for processing. When a switch 6 is depressed, an I/D card reading/writing controller 10 reads out information from an ID card 3 through an electro-optical communication converter 5 and sends the read information to the computer 8 through the controller 9, a processing start signal is sent to the controller 7 and processing is executed by a processor 1. When communication with a processing progress management computer system is disabled or when the battery in the ID card runs out, the controller 9 executed process management in accordance with an internal set program.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ID card which stores information necessary for processing a target wafer, such as a lot number, even if a failure occurs in a computer system for performing lot process progress management in a semiconductor manufacturing process. Even if the built-in battery runs out, the process progress of the lot will continue to be performed automatically without losing the stored data, and when the fault is recovered, the process progress management can be shifted to the normal lot progress management The present invention relates to an apparatus and a process progress management method.

[0002]

2. Description of the Related Art In recent years, computerization of process progress management in a semiconductor manufacturing process has advanced, and an ID card in which information necessary for processing such as a lot number and a process code is written is mounted on each wafer cassette, and the lot number is read. The manufacturing specification is obtained from the host computer using the read lot number as a key, and the work results and history are stored and stored in the host computer using this lot number as a key.
A process progress management method for a managed lot is generally used. FIG. 7 is a configuration diagram of a process progress management device in a conventional semiconductor manufacturing process. In FIG. 7, reference numeral 1 denotes a processing apparatus such as an etching apparatus or a film forming apparatus, and 2 denotes a set of semiconductor wafers of a lot to be processed, which is set on an installation table (not shown) of the processing apparatus 1 and stores, for example, 25 wafers. The wafer cassette 3 is an ID card mounted on the side surface of the wafer cassette 2, and includes a lot number of each wafer to be processed before loading, the number of wafers, and a processing step code from the self-processing step to several steps ahead. Stored display unit (not shown)
Is displayed in. For example, if the self-process is an etching process, process codes for foreign matter removal, photolithography, inspection, ion implantation, etc. are stored. ID card 3
Is driven by a built-in battery. Reference numeral 4 denotes a loading sensor for detecting that the wafer cassette 2 has been set, and 5
Denotes reading and / or writing of information with the ID card 3 attached to the processing device 1 while being located on the same axis as the optical transmitting / receiving section (not shown) of the ID card 3 (hereinafter simply referred to as reading / writing). 6) is a processing device 1
A switch for starting the operation of reading / writing information from / to the ID card 3 attached to the processing device 1; a processing device controller 7 attached to the processing device 1 for controlling the operation of the processing device 1;
Reference numeral 8 denotes a processing progress management computer which carries out lot progress management by possessing information necessary for the entire wafer manufacturing process and processing of each process, judges whether the processing result data is good or not, and stores it as a database. Upon receiving a command signal from the management computer 8,
An ID card read / write controller for reading / writing information from / to the D card 3 and transmitting the read information to the processing progress management computer 8. Is a line connecting

In the process progress management apparatus configured as described above, when a required wafer cassette 2 is set on the installation table of the processing apparatus 1, the processing apparatus controller detects the load sensor 4 and receives the detection signal. 7 sends a detection signal to the processing progress management computer 8. Upon receiving the detection signal, the processing progress management computer 8 sends a work instruction signal for reading information on the ID card 3 to the ID card reading / reading operation.
The information is transmitted to the writing controller 10, the internal memory of the ID card 3 is read from the ID card 3 via the electro-optical communication converter 5, and information such as a lot number, a process code, and the number of wafers is transmitted to the processing progress management computer 8. I do. The processing progress management computer 8 searches a database based on the information, and stores data necessary for the processing in a work instruction parameter (for example, if the processing apparatus 1 is an etching apparatus, the processing progress management computer 8 determines an etching time, a gas flow rate, , Etching pressure, etc.) are transmitted to the processing apparatus controller 7 as work instructions, and predetermined processing is performed. When the processing is completed, information on the processing results, for example, information such as the average etching time for 25 wafers, the etching time for each wafer, the gas flow rate, the etching pressure, etc.
Is transmitted to the processing progress management computer 8. The processing progress management computer 8 determines whether the received processing result is acceptable or not, stores the result as a database, and transmits, via the line 11, the data necessary for the processing of the required subsequent steps and the instruction signal for writing to the ID card 3 via the line 11. I via the card read / write controller 10 and the electro-optical communication converter 5
The data is sent to the D card 3, and the ID card 3 writes the data in a storage unit (not shown), and the process is terminated.

[0004] However, in this method, since the management is mainly performed by the computer, there is a problem that if the computer system fails, the process progress management of the lot cannot be continued. To solve this problem, for example,
Japanese Patent Application Laid-Open No. 5-114536 discloses a semiconductor process progress management device for managing the process progress of a semiconductor process by a computer, wherein data is transmitted between the storage unit for storing data and the computer by optical communication. A communication unit, a communication control unit, a control unit that writes and reads data to and from the storage unit, an input unit that is provided on a surface of the housing unit for inputting information and inputting an instruction, and displaying progress data and the like. A technology provided with a display unit provided on the surface of a housing unit, an ID card mounted on a product to be processed or its storage body, and improved progress management of a lot even if a computer system breaks down. Is disclosed.

[0005]

However, according to the improved prior art, when the computer system fails,
Although it is possible to execute process processing, input information, and search independently using data stored in the storage unit of the ID card, it is possible to instruct search start in the process progress stage up to that point, and to start process processing. Instructions, instructions for displaying a process processing recipe, and input of information such as process processing and measurement data are all performed by the operator using the input unit (key).
It is a so-called semi-automatic processing system and requires time and effort. Furthermore, when the life of the battery for operation of the ID card has expired, there has been a problem that the process progress of the lot cannot be managed.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the conventional semiconductor process processing progress management apparatus. Even if a failure occurs in a computer system, processing of a target wafer such as a lot number can be performed. Even if the internal battery runs out of the ID card that stores the information necessary for the product, the stored data will not be lost and the lot will continue to automatically proceed with the progress of the process, and The present invention provides a process progress management apparatus and a process progress management method that can shift to normal lot progress management.

[0007]

A process progress management apparatus according to the present invention is mounted on a wafer cassette in which a wafer to be processed is stored and set in a processing apparatus, and stores at least a lot number and a processing step code of the wafer to be processed. An ID card that can be read and / or written is provided, and information required for required processing is read from the processing progress management computer using the read lot number of the ID card and the processing step code as keys, and the processing is performed. Is a process progress management device which stores the process progress management computer in the lot, and performs a process progress management of the lot, and transmits a signal in which the wafer cassette is set in the processing device to execute a required process obtained from the process progress management computer. Processing unit controller that controls the processing of the processing unit based on necessary information and transmits information on the processing result Reads out and stores the write information of the ID card, transmits the information to the processing progress management computer, stores the information necessary for the required processing received from the processing progress management computer, and transmits the information to the processing device controller. Then, the information of the processing result of the processing device controller is received and stored, and the information is transmitted to the processing progress management computer. When the communication system with the processing progress management computer breaks down, or the battery of the ID card runs out. At that time, the subsequent process progress and received information are automatically stored and stored in accordance with a program incorporated in advance, and when the failure of the communication system with the processing progress management computer is recovered, the stored and stored information is automatically stored. And a device control controller for transmitting the information to the processing progress management computer.

[0010] A process progress management method according to the present invention includes an apparatus having a CPU provided with a program area and a memory area in which a predetermined processing progress procedure is written in advance, for transmitting and receiving information to and from a processing progress management computer. A control controller is provided, and a processing progress management computer searches for storage information necessary for required processing corresponding to the key information by using a lot number and processing step code information written in advance in an ID card for a processing target wafer as a key, and searches the storage information. A process progress management method in which a processing device controller controls the processing device based on the information, performs the process, and stores the process result information transmitted as a database by a process progress management computer and manages the process progress of the lot. When communication with the progress management computer is disabled, or inside the ID card When the out-of-pond is detected, the apparatus controller sends a processing instruction signal to the processing apparatus controller to perform a predetermined process if the wafer to be processed is in a pre-processing stage according to the procedure written in the program area, and executes the processing result. Information is received and stored, and if the wafer to be processed has been processed, the process code is incremented to the ID card, and a write instruction signal for writing the processing condition parameter of the next process is transmitted to perform writing. It was done. Further, when the communication with the processing progress management computer is restored, the information stored in the device control controller is transmitted to the processing progress management computer after the communication is disabled.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of a process progress management device in one semiconductor manufacturing process according to a first embodiment of the present invention, and FIG. 2 is a configuration diagram of an entire process progress management device including the manufacturing process processing block of FIG. FIG. 3 is a block diagram showing the internal configuration of the device control controller in FIG. In the drawings, the same reference numerals indicate the same or equivalent components as those in the conventional example. Less than,
the same. 1 and 2, an apparatus controller 9 controls the processing apparatus controller 7 in response to an instruction signal from the processing progress management computer 8 and information necessary for processing a wafer, and receives processing result information. , ID
Upon receiving various information stored in the card 3, the information is transmitted to the processing progress management computer 8. Line 11
Communication failed due to the failure of the system or the ID card 3
If the built-in battery (not shown) runs out, a function of automatically continuing the subsequent processing including several steps set in the ID card 3 in place of the processing progress management computer 8 is provided. have. 30 is an element shown in FIG.
A first processing unit block composed of elements 1 to 7, 9, and 10, for example, an etching step processing unit block. As shown in FIG. 2, each processing unit block in a photoengraving step, an ion implantation step, and the like. The second equivalent to ...
The (n-1) -th and n-th process processing apparatus blocks 40,..., 9
Reference numerals 0 and 100 are respectively connected to the processing progress management computer 8 via the line 11 to constitute an overall process progress management system.

In FIG. 2, a CPU 20 exchanges or stores data and exchanges a required instruction signal according to a pre-installed operation program.
It has a memory (all not shown) connected to the generator and the backup terminals a, b, c. 21 is an instruction,
A buffer communication driver for transmitting and receiving serial and / or parallel signals of data and the like; a buffer communication driver 21a connected to the processing progress management computer 8; A buffer communication driver 21b connected to the processing device controller 7; a buffer communication driver 21 connected to the ID card read / write controller 10;
There is c. These buffer communication drivers 21a, 21
When b and 21c are operating normally, the input serial signals are sent to S / P converters 22a, 22b and 22 respectively.
c to be converted into parallel signals.
b to be read by the CPU 20. 25 is CPU2
0 is an oscillator that generates an internal program of 0 and a fundamental frequency clock that determines the operation of each device. Then, it is processed by the above-mentioned DMA generator by software (program) incorporated therein, is converted into a serial signal via a reverse path, and is transmitted to the required controller or computer 7, 8, or 10.

On the other hand, if the buffer communication drivers 21a, 21b, 21c stop functioning for some reason and cannot transmit / receive to / from the controller or the computers 7, 8, 10, pulse transmitters 23a, 23b, 2
3c, the control synchronization between the transmitter 25 and the buffer communication drivers 21a, 21b, 21c is lost, so that the pulse transmitters 23a, 23b, 23c stop oscillating and the backup terminals a, b, c of the CPU 20. Sends a communication error detection signal to the The CPU 20, which has received the communication abnormality detection signal, determines which backup terminal a, b, or c the signal has been transmitted to, and regards it as a communication emergency evacuation, and the transmission / reception status of each buffer communication driver 21a, 21b, 21c and the S / S The information data in the mother buses 24a, 24b of the P converters 22a, 22b, 22c are read simultaneously with the stop synchronization of the pulse transmitters 23a, 23b, 23c,
continue processing. When the communication is restored, a signal of oscillation recovery is sent to the pulse transmitters 23a, 23b and 23c, and at the same time, the signal is synchronized with the transmitter 25 and the CPU 2 is reset.
A communication recovery signal is transmitted to 0. And the CPU 20
Are the backup terminals a, b, c
, The data is transferred to the original processing line, and the process returns to the normal processing.

Next, the operation of the process progress management device shown in FIG. 1 will be described. First, a case where the system of the line 11 between the first processing unit block 30 and the processing progress management computer 8 can communicate normally will be described. FIG.
5 is a flowchart showing a flow of process progress until a required wafer process is completed when communication between the process processing apparatus block 30 and the process progress management computer 8 is normal.
1 and 4, first, when the wafer cassette 2 containing the wafer to be processed is set on the installation table of the processing apparatus 1 (S1), the load sensor 4 detects it (S1).
2) The detection information is transmitted from the processing device controller 7 to the device control controller 9 (S3), and the device control controller 9 checks whether the line 11 is normal (S3).
4) If the data is good, the data is stored in the internal memory (transmitted to the backup terminals a, b, and c in FIG. 3), and the stored data is searched to check whether the stored data exists (S).
5) If there is data, the stored data and the received data are transmitted to the processing progress management computer 8 (S6). If there is no data, the received data is transmitted to the processing progress management computer 8 (S7). Then, the processing progress management computer 8 transmits a read / write instruction signal for the ID card 3 to the ID card read / write controller 10 via the device controller 9 based on the received information (S
8) It is in a state of waiting for reading the ID card information.

When the operator presses the switch 6 (S
9), the ID card read / write controller 10 which has received the instruction signal for reading the information of the ID card 3 stores data (lot number, process code, number of wafers, etc.) in the ID card 3 via the electro-optical communication converter 5 Is requested (S10). The ID card 3 transmits the stored data to the ID card read / write controller 10 via the reverse route (S11), and further transmits the ID card read / write controller 1.
0 to the device controller 9 (S12),
The device controller 9 checks whether or not the line 11 is normal (S13). If the line is good, the device controller 9 stores the data in the internal memory (transmits the data to the backup terminals a, b, and c in FIG. 3) and searches for the stored data to store the data. It is checked whether or not there is data (S14). If there is data, the accumulated data and the received data are transmitted to the processing progress management computer 8 (S15). (S16). The processing progress management computer 8 searches the database based on the received information of the ID card 3 and obtains information necessary for processing in the processing apparatus 1 (for example, if the processing apparatus 1 is an etching apparatus, the etching time, the gas flow rate, etc.). And processing parameters such as etching pressure) are transmitted to the apparatus controller 9 together with a work start instruction signal (S17). The work start instruction signal and the processing information are transmitted to the device controller 9.
Is sent to the processing apparatus controller 7 (S18), and the processing apparatus 1 performs required wafer processing based on the processing information (S19). When it is determined that the line 11 is not valid (abnormal state) in the steps (S4) and (S13), FIG. 6 (to the mark *) showing a processing flow after the abnormality determination of the line 11
After the required wafer processing is completed (S19), the subsequent processing is performed in accordance with FIG. 5 (to the ★ mark) showing the processing flow of the process progress after the completion of the wafer processing.

Next, a data processing step after the necessary wafer processing is completed will be described. FIG. 5 shows that after necessary wafer processing is completed, necessary data for several
9 is a flowchart showing a flow of a process progress until writing and storing in a D card 3. When the required wafer processing is completed (S19), as shown in FIG. 5, the processing apparatus controller 7 sends a processing completion signal to the apparatus controller 9 together with the processing result (S20). Check if (S
21) If it is good, the processing result and the processing completion signal are stored in the internal memory (transmitted to the backup terminals a, b, and c in FIG. 2) and the stored data is searched to determine whether there is stored data. A check is made (S22). If there is stored data, the stored data and the received data are transmitted to the processing progress management computer 8 (S23). If there is no stored data, the received data is transmitted to the processing progress management computer 8 (S24). ). The processing progress management computer 8 determines whether or not the processing result is acceptable (S25), and if the processing is successful, stores the received data as a database in the internal memory (S2).
6). Then, the processing progress management computer 8 sets necessary data for the required several steps after the next step and sets the ID card 3
Then, a write instruction request signal to the device controller 9 is transmitted to the device controller 9 (S27). In response to a write request to the ID card 3, the device control controller 9 stores the write information in the internal memory (transmits it to the backup terminals a, b, and c in FIG. 3), and reads the ID card read / write controller 10
Then, a write instruction signal is transmitted to (S28). And I
The D card read / write controller 10 transmits the necessary data to the ID card 3 (S29), and the ID card 3 writes and stores the data in its own internal memory (S29).
30), the process of the own process ends. When it is determined that the line 11 is not acceptable (abnormal state) at the (S21) stage, FIG. 6 (to the mark *) showing the processing flow after the abnormality determination of the line 11
Thereafter, the subsequent processing proceeds. If it is determined in the step (S25) that the result of the processing is acceptable (fail), an alarm is issued (S31).

Next, the system of the line 11 breaks down and the first processing unit block 30 and the processing progress management computer 8
The flow of the process progress when the communication is not possible between the units will be described. FIG. 6 is a flowchart showing the flow of the process progress when the communication between the first process apparatus block 30 and the process progress management computer 8 is impossible. Figure 1, Figure 3,
In FIG. 6, when it is determined that the line 11 is abnormal and cannot communicate, the device controller 9 first stores the received data to be transmitted in the internal memory (S3).
2), it is determined whether the current stage is before the process of the own process or after the process (S33), and when it is determined that the process is before the process, according to a process start format preset in the device controller 9; A processing instruction signal to perform a required process is transmitted to the processing device controller 7 (S34), and the required processing is performed by the processing device 1 under the control of the processing device controller 7 having received the processing instruction signal (S35). When the processing is completed, the processing device controller 7 transmits a processing completion signal to the device control controller 9 together with the processing result (S
36). Next, the device controller 9 checks whether the line 11 is normal or not (S37). If the abnormal situation is recovered, the device controller 9 stores the processing result in the internal memory and stores the processing result. Is transmitted to the processing progress management computer 8 (S38), and the processing ends. The data transmission in this case is performed first from the stored data.

If it is determined in step (S33) that the process has been performed in its own process, the apparatus controller 9 makes a pass / fail decision based on the process result stored in the internal memory and a preset process criterion ( S40), if it passes,
The process code of the current ID card 3 is incremented, and a parameter write instruction signal for the next process is read / written by the ID card.
The ID card read / write controller 10 transmits to the write controller 10 (S41), and the ID card read / write controller 10 transmits a parameter write instruction signal of the next process to the ID card 3 (S4).
2). Then, the ID card read / write controller 10
The ID card 3 writes and stores the parameters of the next process in the internal memory based on the write instruction signal transmitted from the device (S43), and the predetermined process ends. Note that (S3
If it is determined in step 7) that the communication is not possible (the line 11 is abnormal and communication is not possible), the device controller 9 stores the processing result in the internal memory as accumulated data (S3).
9), proceed to (S40) stage. If the result of the determination at step (S40) is negative (fail), an alarm is issued (S44), and the process ends.

The above operation will be described with reference to FIGS.
The process progress control device in one semiconductor manufacturing process was performed based on the configuration diagram of FIG. 2. However, as shown in FIG. 2, the second process processing device block 40,... Since the process processing device block 100 and the process processing device block are formed for each of the other manufacturing processes and are connected to the same processing progress management computer 8 and function similarly, processing from one process processing device block is performed. Even if the line 11 connected to the progress management computer 8 breaks down, the required processing after the middle of the process processing device block is automatically continued as described with reference to FIGS. 4, 5, and 6. In addition to the above, even if the processed wafer cassette 2 is loaded and set in a process processing apparatus block for the next and subsequent steps, the same processing can be continued. If the operation of the internal battery of the ID card 3 has expired and the operation of the internal battery of the ID card 3 has been stopped during the process of the above-described process, as described with reference to FIG. Is constantly monitored by the buffer communication driver 21a, the pulse transmitter 23c, and the CPU 20, so that it can be automatically and easily detected. As described in the step (12) in FIG. Since the controller 9 reads and stores the data, even if the battery of the ID card 3 runs out, the subsequent processing is not immediately disturbed. Of course, it is needless to say that the battery should be updated as soon as possible.

[0018]

The present invention is configured as described above.
The following effects are obtained. Process progress management device,
A processing apparatus controller and an ID card that cause a processing apparatus to process a wafer to be processed based on predetermined processing information and transmit a processing result, can transmit and receive information to and from the processing apparatus controller, and can store received information. The device is equipped with a device controller that can independently manage the process progress in accordance with the program written in the PC. Therefore, even if communication with the process progress management computer fails or the battery of the ID card runs out, Process progress management can be automatically and continuously performed.

The process progress management method includes a device control controller having a CPU provided with a program area and a memory area in which a predetermined process progress procedure is written in advance, and transmitting and receiving information to and from a process progress management computer. ,
When the communication with the processing progress management computer becomes impossible, the apparatus control controller automatically continues the required process progress management thereafter, so that the processing of the wafer to be processed does not stop, Productivity is improved. Also, when the internal battery of the ID card runs out,
Since the device controller storing the write information of the ID card detects this and performs the subsequent process progress, the required process progress management is automatically and continuously performed without erasing the write information. be able to.
In addition, when communication with the processing progress management computer is restored, the information stored in the device controller is automatically transmitted to the processing progress management computer after the communication is disabled, so that normal processing is performed. Easy process progress management.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a process progress management device in one semiconductor manufacturing process according to a first embodiment of the present invention.

FIG. 2 is a configuration diagram of an overall process progress management device including a manufacturing process processing block of FIG. 1;

FIG. 3 is a block diagram showing an internal configuration of the device control controller in FIG.

FIG. 4 is a flowchart showing the flow of process progress until the end of wafer processing when communication between the first process processing apparatus block and the process progress management computer is normal.

FIG. 5 is a flowchart showing the flow of the process progress from the completion of wafer processing to the writing of necessary data after the next process to the ID card when the communication between the first process apparatus block and the process progress management computer is normal; It is.

FIG. 6 is a flowchart showing the flow of the process progress when the communication between the first process processing device block and the process progress management computer in FIGS. 4 and 6 cannot be performed;

FIG. 7 is a configuration diagram of a process progress management device in a conventional semiconductor manufacturing process.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1; Processing apparatus 2; Wafer cassette 3; ID card 4; Loading sensor 5; Electric-optical communication converter 6;
Switch 7; processing device controller 8; processing progress management computer 9; device control controller 10;
Write controller 11; line 30; first process processing block

Continued on the front page (72) Inventor Hirofumi Otsuka 4-1-1 Mizuhara, Itami-shi, Hyogo Ryoden Semiconductor System Engineering Co., Ltd. (72) Inventor Shigemasa Targi 2-3-2 Marunouchi, Chiyoda-ku, Tokyo F term (reference) in Denki Co., Ltd. 3C042 RH05 RJ07 RK03 RK15 RK22 RK25 RK28 RL11 5H269 AB17 BB12 JJ04 KK03 PP02 QC06 9A001 JJ38 JJ46 JJ49 KK54 LL05

Claims (3)

[Claims] 1. An ID card which stores a wafer to be processed and is mounted on a wafer cassette set in a processing apparatus and which can store and read and / or write at least a lot number and a processing step code of the wafer to be processed. Using the lot number of the ID card and the processing step code as keys, information necessary for the required processing is read from the processing progress management computer, the processing is performed, and the processing result is stored in the processing progress management computer and the lot is stored. A process progress management device for performing process progress management of
A processing apparatus for transmitting a signal in which the wafer cassette is set in the processing apparatus, controlling processing of the processing apparatus based on information necessary for required processing obtained from the processing progress management computer, and transmitting processing result information; The controller reads out and stores the write information of the ID card, transmits the information to the processing progress management computer, stores the information necessary for the required processing received from the processing progress management computer, and stores the information as described above. Transmitting to the processing device controller, receiving and storing the processing result information of the processing device controller, and transmitting the information to the processing progress management computer, when the communication system with the processing progress management computer fails, or ID
When the battery of the card is exhausted, the subsequent process progress and the received information are automatically stored and accumulated according to a program incorporated in advance, and when the failure of the communication system with the processing progress management computer is recovered, A process progress management device, comprising: a device controller for automatically transmitting the stored information to the processing progress management computer. 2. A wafer to be processed, comprising: a device control controller having a CPU provided with a program area and a memory area in which a predetermined processing progress procedure is written in advance, for transmitting and receiving information to and from a processing progress management computer. ID
The processing progress management computer searches for storage information necessary for the required processing corresponding to the key information using the lot number and the processing step code information pre-written on the card as a key, and the processing apparatus controller determines the processing apparatus based on the search information. A process progress management method for controlling the process progress information and transmitting the process result information stored in the database as the database and managing the process progress of the lot. When it becomes impossible or when the internal battery of the ID card is exhausted, the apparatus control controller follows the procedure written in the program area, and if the wafer to be processed is in a pre-processing stage, a processing instruction signal to the processing apparatus controller. To perform the required processing and to receive and record the processing result information. If the accumulated wafer is already processed, the process code is incremented in the ID card, and a write instruction signal for writing a process condition parameter of the next process is transmitted to perform writing. Management method. 3. When the communication with the processing progress management computer is restored, the information stored in the device control controller after the point where the communication is disabled is transmitted to the processing progress management computer. 2. The process progress management method according to 2.