JP2000314545A - Room pressure control system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a room pressure control system, high in the control property of a room pressure. SOLUTION: A room pressure control system is constituted of a room pressure control means 19, and a duct pressure control means 24. The room pressure control means 19 regulates opening degrees β of room pressure regulating dampers 17, corresponding to respective objective rooms R1 to R4 based on respective detecting room pressures p of the objective rooms, to regulate the room pressures (p) of respective objective rooms R1 to R4 so as to obtain an objective room pressure mp. The duct pressure control means 24 regulates the output of the fans 4 based on the detected opening degrees β of respective room pressure regulating dampers 17, so that respective opening degrees βof the room pressure regulating dampers 17 will be within an objective opening degree range Y, in the room pressure regulation through the room pressure control means 19. In this case, the duct pressure control means 24 is limited with respect to the opening degree β of the room pressure regulating damper 17 for a specified room among the objective rooms R1 to R4 in the regulating factor of a fan output, compared to the opening degrees β of other room pressure regulating dampers 17 to control the outputs of the fans.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a room pressure control system used in a facility requiring room pressure control for a plurality of rooms, such as a chemical manufacturing facility or a semiconductor electronic component manufacturing facility. In the main wind path connected to the fan for
A plurality of target chambers are connected in parallel via branch air paths, and a room pressure adjustment damper is interposed in each of these branch air paths,
Room pressure control means for adjusting the opening of the room pressure adjusting damper corresponding to each target room to adjust the room pressure of each target room to the target room pressure based on the detected room pressure of each target room, and this room pressure control Means for adjusting the output of the fan based on the detected opening of each chamber pressure adjusting damper so that the opening of each chamber pressure adjusting damper falls within the target opening range in the room pressure adjustment by the means. A plurality of target chambers are connected in parallel to a main pressure path connected to a room pressure control system to be provided or a fan for exhaust or air supply via a branch air path, and an air flow adjustment damper is provided for each of these branch air paths. Air volume control means for adjusting the opening degree of each air volume adjustment damper to adjust the air volume passing through each air volume adjustment damper to a target air volume based on the detected air volume detected by each of these air volume adjustment dampers; and Air volume adjustment damper As the opening degree of the people become the target opening range, about room pressure controlling system providing an air passage pressure control means for adjusting the output of the fan based on the detected degree of opening of the air amount adjusting damper.

[0002]

2. Description of the Related Art Conventionally, in these room pressure control systems, the above-mentioned air passage pressure control means adjusts the output of a fan based on the detected opening of each room pressure adjustment damper. The opening is treated equivalently as a fan output adjustment factor, and similarly, when adjusting the fan output based on the detected opening of each air volume adjustment damper, the opening of each air volume adjustment damper is determined by the fan output adjustment factor. Was treated as equivalent.

For example (see FIG. 1), a chamber pressure adjusting damper 17 is provided.
Are installed in the branch air passages 6 on the exhaust side with respect to the target chambers R1 to R4.
7, the output of the exhaust fan 4 is immediately changed to the increase side when the opening β of any one of the nozzles 7 becomes larger than the upper limit value of the target opening range Y in adjusting the room pressure of the target room (that is, the exhaust The fan output is changed to a side that reduces the air passage pressure pe of the side main air passage 5), and the opening β of the chamber pressure adjusting damper 17 is returned to the target opening range Y.

Further, the air volume adjusting damper 9 is connected to the target chambers R1 to R1.
In the case of interposing in the branch air passage 3 on the air supply side to the air supply 4, the opening α of any one of the air volume adjusting dampers 9 interposed in each branch air passage 3 is adjusted to the target opening in adjusting the passing air volume. As soon as the temperature exceeds the upper limit of the temperature range X, the output of the air supply fan 1 is changed to the increase side (that is, the air path pressure p of the air supply side main air path 2).
The fan output is changed to increase s), and the opening α of the air volume adjustment damper 9 is returned to the target opening range X.

[0005]

However, in facilities using this type of room pressure control system, there is a difference in the degree of room pressure management required for each target room, and room pressure fluctuations occur due to the purpose of the target room. There is a mixture of target rooms with high room pressure management levels, which require strict room pressure control, which is required to prevent as much as possible, and low room pressure levels, which are not so strictly required. Often.

In this regard, in the above-described conventional system, when the room pressure adjusting damper 17 is interposed in the exhaust-side branch air passage 6 (see FIG. 1), the room pressure adjusting damper 17 for the target room having a low room pressure management level is used. When the air passage pressure control means 24 changes the output of the exhaust fan 4 in order to return the opening β to the target opening range Y, the change in the air passage pressure pe of the exhaust-side main air passage 5 is caused by the change. In addition, the amount of exhaust from the target room having a high room pressure management level also changes, and the opening adjustment of the room pressure adjusting damper 17 for the target room cannot completely follow the room pressure change due to the change in the amount of exhaust air. However, there is a problem that the room pressure of the target room having a high room pressure management level varies widely, and a similar problem occurs when the room pressure adjusting damper 17 is interposed in the supply side branch air passage 3. there were.

Similarly, when the air volume adjusting damper 9 is interposed in the supply side branch air passage 3 (see FIG. 1), the opening α of the air volume adjusting damper 9 with respect to the target room having a low room pressure management level.
Pressure control means 1 for returning the pressure within the target opening range X
6, when the output of the air supply fan 1 is changed, the change in the air path pressure ps of the air supply side main air path 2 causes the air supply amount q to the target room having a high room pressure management level to change, The change in the opening degree of the air flow adjustment damper 9 with respect to the target room cannot fully follow the change in the supplied air amount (that is, the change in the air flow amount passing through the air flow adjustment damper 9). There is a problem that the room pressure of the room fluctuates, and there is a similar problem in the case where the air volume adjustment damper 9 is interposed in the exhaust side branch air passage 6.

In view of this situation, the main problems of the present invention are:
In the fan output adjustment based on the opening of the room pressure adjustment damper and the opening of the air volume adjustment damper, the above-described problem is effectively solved by adopting a rational adjustment mode.

[0009]

[1] In the invention according to claim 1, a plurality of target chambers are connected in parallel via a branch air passage to a main air passage connected to an exhaust or air supply fan. At the same time, a room pressure adjusting damper is interposed in each of these branch air paths, and based on the detected room pressure of each of the target rooms, the opening degree of the room pressure adjusting damper corresponding to each of the target rooms is adjusted to adjust each of the target airflows. A chamber pressure control means for adjusting the chamber pressure of the chamber to a target chamber pressure; and a chamber pressure control means for adjusting the chamber pressure so that each of the chamber pressure adjustment dampers has an opening within a target opening range. A room pressure control system comprising: an air passage pressure control unit that adjusts an output of the fan based on a detection opening degree of an adjustment damper. The opening of the damper is larger than the opening of other chamber pressure adjustment dampers. By limiting the handling of as an adjustment factor for output, which is configured to perform the adjustment of the fan output.

[0010] According to this configuration, by setting the target room having a low room pressure management level as the specific room, the opening degree of the room pressure adjusting damper with respect to the target room having the low room pressure management level is determined by the above-described air passage. In the adjustment of the fan output by the pressure control means, the treatment as a fan output adjustment factor is more restricted than the opening degree of another room pressure adjustment damper for the target room having a high room pressure management level. However, even if the opening of the room pressure adjustment damper for the target room with a low room pressure management level deviates from the target opening range in the room pressure adjustment, the change in the fan output will not affect the target room with a high room pressure management level. Is limited in terms of quantity or frequency as compared with the change in the fan output when the opening degree of the other room pressure adjustment damper deviates from the target opening range.

That is, when the opening degree of the room pressure adjusting damper for the target room having a low room pressure management level deviates from the target opening range, the opening degree of the room pressure adjusting damper is changed to the target opening degree range. It is possible to effectively prevent the room pressure of the target room having a high room pressure management level from being spilled over due to a change in the fan output for returning to the inside of the room. Compared to the above-mentioned conventional system that treats each opening equally as an adjustment factor of fan output, it is possible to more reliably prevent the fluctuation of the room pressure in the target room where the room pressure management level that requires strict room pressure management is high. As a result, reliability in terms of room pressure management can be improved.

For a target room having a low room pressure management level that does not require strict room pressure management, the opening of the corresponding room pressure adjustment damper is set within the target opening range (that is, a suitable room pressure adjustment). Function within the opening range) can be secured at a function level corresponding to the room pressure management level of the target room.

[2] According to the second aspect of the present invention, a plurality of target chambers are connected in parallel to a main air passage connected to an exhaust or air supply fan via a branch air passage. Air volume control that interposes air volume adjustment dampers on each of the roads, adjusts the opening of each air volume adjustment damper based on the detected air volume detected by each of these air volume adjustment dampers, and adjusts the air volume that passes through each air volume adjustment damper to the target air volume Means for adjusting the output of the fan based on the detected opening of each air flow adjustment damper so that the opening of each of the air flow adjustment dampers is within a target opening range in the passing air flow adjustment by the air flow control means. In the room pressure control system provided with the pressure control means, the air path pressure control means may be configured such that the degree of opening of the air volume adjustment damper with respect to a specific one of the target chambers is higher than that of the other air volume adjustment dampers. To limit the handling of as an adjustment factor,
Use a configuration that adjusts the fan output.

According to this configuration, similarly to the first aspect of the invention, the target room having a low room pressure management level is set as the specific room, so that the air volume adjusting damper for the target room having the low room pressure management level is provided. In the adjustment of the fan output by the air path pressure control means, the opening is restricted as a factor for adjusting the fan output more than the opening of other air volume adjustment dampers for the target room having a high room pressure management level, and Due to this restriction, even if the opening of the air volume adjustment damper for the target room whose room pressure management level is low deviates from the target opening range in adjusting the passing air volume, the change of the fan output will not This is limited in terms of quantity or frequency as compared with a change in the fan output when the opening of the other air volume adjustment damper for the target room having a high pressure management level deviates from the target opening range.

In other words, the opening degree of the air flow adjustment damper for the target room having a low room pressure management level deviates from the target opening range. It is possible to effectively prevent the fluctuation of the room pressure of the target room having a high room pressure management level due to the change of the fan output for returning, thereby effectively opening the air volume adjustment dampers. Compared with the above-mentioned conventional system that treats the degree equivalently as the adjustment factor of the fan output, it is possible to more reliably prevent the fluctuation of the room pressure in the target room having a high room pressure management level that requires strict room pressure management, Reliability in room pressure management can be improved.

For a target room having a low room pressure management level which does not require strict room pressure management, the opening of the corresponding air volume adjustment damper is set within the target opening range (that is, a suitable opening for adjusting the passing air volume). In other words, the function of maintaining the pressure within the degree range, in other words, within the suitable opening degree range for stabilizing the room pressure) can be secured at the function level corresponding to the room pressure management level of the target room.

[3] In the invention according to claim 3, a plurality of target chambers are connected in parallel to the air supply side main air path connected to the air supply fan via the air supply side branch air path, and The target chamber is connected in parallel to an exhaust-side main air path connected to an exhaust fan via an exhaust-side branch air path, and one of the supply-side branch air path and the exhaust-side branch air path is connected to the target chamber. Each of which is provided with an air volume adjustment damper, and each of which is provided with a room pressure adjustment damper,
On the basis of the detected passing air volume of each of the air volume adjusting dampers, an air volume control means for adjusting the opening degree of each air volume adjusting damper to adjust the passing air volume of each air volume adjusting damper to a target air volume, and A room pressure control means for adjusting an opening degree of the room pressure adjusting damper corresponding to each target room to adjust a room pressure of each target room to a target room pressure, and the air volume in the passing air volume adjustment by the air volume control means. The output of the fan on the wind path side of the exhaust fan and the air supply fan based on the detected opening of each air flow adjusting damper so that the opening of each adjusting damper is within the target opening range. The air path pressure control means on the air volume adjustment side for adjusting the air pressure, and the chamber pressure adjustment dampers are controlled so that the opening of each of the chamber pressure adjustment dampers is within the target opening range in the chamber pressure adjustment by the chamber pressure control means. The discharge based on the detected opening Pressure control means for controlling the output of the fan on the air path side equipped with a chamber pressure adjusting damper among the fan for air supply and the air supply fan, the air flow on the air volume adjustment side The road pressure control means restricts the opening degree of the air volume adjustment damper to a specific one of the target chambers from being treated as a fan output adjustment factor more than the opening degrees of other air volume adjustment dampers. And the air passage pressure control means on the room pressure adjustment side is configured to adjust the opening degree of the room pressure adjustment damper with respect to the specific chamber of the target chamber. Rather than restricting it as a fan output adjustment factor,
Use a configuration that adjusts the fan output.

That is, in this configuration, the invention according to claim 1 is applied to one of the air supply side and the exhaust side with respect to the target chamber, and the invention according to claim 2 is applied to the other. As a synergistic effect of the effect obtained by the invention according to the first aspect and the effect obtained by the invention according to the second aspect, a room pressure fluctuation of a target room having a high room pressure management level requiring strict room pressure management is further performed. As a result, the reliability in terms of room pressure management can be further enhanced.

Further, for a target room having a low room pressure management level which does not require strict room pressure management, the opening degree of the corresponding room pressure adjustment damper is set within the target opening range (that is, a suitable room pressure adjustment). Function within a wide range of opening)
And, the opening of the corresponding air volume adjustment damper is within the target opening range (that is, within the suitable opening range for adjusting the passing air volume, in other words, within the opening range suitable for stabilizing the room pressure). Can be secured at a function level corresponding to the room pressure management level of the target room.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In FIG. 1, R1 to R4 are chamber pressure control target chambers. These target chambers R1 to R4 are on the air supply side relative to the air supply side main air passage 2 connected to the air supply fan 1. It is connected in parallel via a branch air passage 3 and is connected in parallel via an exhaust-side branch air passage 6 to an exhaust-side main air passage 5 connected to an exhaust fan 4.

Reference numeral 7 denotes each target room R through the supply side branch air passage 3.
Reference numeral 8 denotes an air supply-side filter for purifying air supplied to the target chambers R1 to R4.
This is an exhaust-side filter that prevents contaminants generated in the room from being mixed into the air discharged from the air conditioner.

Each of the supply-side branch air passages 3 has a target room R
An air flow adjustment damper 9 for adjusting the air supply amount q to each of the air flow controllers 1 to R4 is provided. Each of these air flow adjustment dampers 9 is provided with a flow air flow q of the air flow adjustment damper 9 detected by the air flow sensor 10 (i.e., The air volume control means 11 adjusts the opening degree α of the air volume adjustment damper 9 based on the amount of air supplied to each of the target chambers R1 to R4) and adjusts the air volume q passing through the air volume adjustment damper 9 to the target air volume mq. It is.

That is, the air volume adjusting damper 9, the air volume sensor 10, and the air volume control means 11 constitute a so-called constant air volume device.

Reference numeral 12 denotes an air path pressure sensor for detecting the air path pressure ps of the air supply side main air path 2, and reference numeral 13 denotes an inverter for converting the output of the air supply fan 1 based on the detected air path pressure ps of the air path pressure sensor 12. An air supply side fan controller that adjusts the air path pressure ps of the air supply side main air path 2 to a designated air path pressure mps from the air supply side control device 14 by adjusting by control or the like.

Each air flow adjustment damper 9 is provided with an opening sensor 15 for detecting the opening α of the air flow adjustment damper 9. 9 each opening α is the target opening range X
The designated air path pressure mps for the air supply side fan controller 13 is changed based on the opening degree α detected by the opening degree sensor 15 so as to be within the range.

That is, the air path pressure sensor 12, the air supply side fan controller 13, and the air supply side control device 14
1 to adjust the output of the air supply fan 1 based on the detected opening degree α of each of the air volume adjusting dampers 9 so that the opening α of each of the air volume adjusting dampers 9 is within the target opening degree range X in the passing air volume adjustment by the air flow adjusting device 1. The air path pressure control means 16 on the adjustment side (air supply side in this example) is configured.

The target opening range X of the air volume adjusting damper 9 includes
The range in which the passing air volume adjustment can be satisfactorily set on the damper characteristics is set.
An intermediate opening range having an upper limit of about% opening can be given.

In this embodiment, as the opening sensor 15 of the air flow adjusting damper 9, an over-open sensor for detecting that the opening α of the air flow adjusting damper 9 exceeds the upper limit of the target opening range X. And an overclose sensor for detecting that the opening degree α of the air volume adjustment damper 9 is lower than the lower limit value of the target opening degree range X.

On the other hand, each of the exhaust-side branch air passages 6 is provided with a chamber pressure adjusting damper 17 for adjusting the chamber pressure p of each of the target chambers R1 to R4 by adjusting the exhaust amount. For each of the dampers 17, the opening of the chamber pressure adjusting damper 17 is performed based on the chamber pressure p (in this example, the differential pressure between the reference pressure and the chamber pressure) of the corresponding target chambers R1 to R4 detected by the chamber pressure sensor 18. The degree β is adjusted, and the chamber pressure p of the corresponding chambers R1 to R4 is set to the target chamber pressure m.
A room pressure control means 19 for adjusting the pressure to p is provided.

Reference numeral 20 denotes an exhaust-side air path pressure sensor for detecting the air path pressure pe of the exhaust-side main air path 5, and reference numeral 21 denotes an exhaust fan 4 based on the detected air path pressure pe of the exhaust-side air path pressure sensor 20. The output is adjusted by inverter control, etc.
Is the designated air path pressure m from the exhaust side control device 22.
It is an exhaust-side fan controller that adjusts to pe.

Each of the chamber pressure adjusting dampers 17 is provided with an opening sensor 23 for detecting the opening β thereof. The opening β of each of the adjustment dampers 17 is the target opening range Y
The designated air path pressure mpe for the exhaust-side fan controller 21 is changed based on the detected opening degree β by the opening degree sensor 23 so as to be within the range.

That is, the exhaust-side air path pressure sensor 20, the exhaust-side fan controller 21, and the exhaust-side control device 22 provide the room pressure adjusting damper 17 in the room pressure adjustment by the room pressure control means 19.
The exhaust fan 4 based on the detected opening degree β of each of the chamber pressure adjusting dampers 17 so that each opening degree β falls within the target opening degree range Y.
The air path pressure control means 24 on the room pressure adjusting side (in this example, the exhaust side) for adjusting the output of the air pressure is constituted.

The target opening range Y of the chamber pressure adjusting damper 17 is set to a range in which the room pressure can be satisfactorily adjusted on the damper characteristics. As a preferred example, the target opening range X of the air volume adjusting damper 9 is the same. , An intermediate opening range having a lower limit of about 20% opening and an upper limit of about 80% opening.

In this embodiment, the opening degree β of the room pressure adjusting damper 17 exceeds the upper limit of the target opening degree range Y as the opening degree sensor 23 of the room pressure adjusting damper 17, similarly to the air volume adjusting damper 9. And an overclose sensor for detecting that the opening β of the chamber pressure adjusting damper 17 is below the lower limit of the target opening range Y.

The air supply-side control device 14 detects the opening degree α of each of the air volume adjustment dampers 9 by the opening degree sensor 15 (in this example, the opening degree α of each air volume adjustment damper 9 sets the upper limit of the target opening range X). Based on the detection information of whether it exceeds or falls below the lower limit, the supply-side determination value Us is obtained by the following equation 1, and Us = Σ (Kj × Aj) (1) 1, 2,... N, in this example, the number of rooms is 4, and N = 4.) The supply-side fan controller 13 according to the supply-side determination value Us.
Change the designated air path pressure mps.

Kj is a weighting coefficient (0.0 ≦ Kj ≦ 1.0) for each of the target chambers R1 to R4. The target chambers R1 to R4 having higher room pressure management levels requiring strict room pressure management are more desirable. , A large weighting coefficient Kj is set.

Aj is a function value for numerically selecting each of the target chambers R1 to R4 according to the detected opening degree α of the corresponding air volume adjustment damper 9, and the corresponding opening degree α of the air volume adjustment damper 9 is equal to the target opening range X. If the target opening degree X deviates from the target opening range X in the opening direction by exceeding the upper limit value of A, Aj = 1.0 is adopted, and the opening degree α of the corresponding air volume adjustment damper 9 is within the target opening degree range X. And when the value falls below the lower limit value of the target opening range X and deviates from the target opening range X in the closing direction, Aj
= 0.0 is adopted.

More specifically, the air supply side control device 14
Is a weight coefficient Kj for each of these target rooms R1 to R4.
And the above-described supply side determination value Us obtained from the function value Aj
When Us ≧ 1.0, the designated air path pressure mps for the air supply side fan controller 13 is increased at a predetermined change speed or by a predetermined amount of change (a side for increasing the output of the air supply fan 1). ).

Further, the required supply-side determination value Us is equal to Us.
When <1.0, the designated air path pressure mps for the air supply-side fan controller 13 is maintained at the current level, while the opening degrees α of the respective air volume adjustment dampers 9 all deviate from the target opening degree range X in the closing direction. In this case, the designated air path pressure mps for the air supply side fan controller 13 is changed at a predetermined change speed or by a predetermined amount of change to a lower side (a side that reduces the output of the air supply fan 1).

That is, in the change of the designated air path pressure mps in accordance with the supply-side determination value Us, the target room having the lower room pressure management level among the plurality of target rooms R1 to R4 is set as the specific room. By setting the weight coefficient Kj low for the target room having a low level, the target room having a low room pressure management level is used in the output adjustment of the air supply fan 1 based on the opening degree α of each air volume adjustment damper 9. Of the air volume adjustment damper 9 for the target room having a high weighting coefficient Kj and a high room pressure management level is more restricted than the aperture α of the air volume adjustment damper 9 as an adjustment factor of the fan output. ,
While the opening α of the airflow adjustment damper 9 for the target room having a low room pressure management level deviates from the target opening range X (in this example, the opening direction), the opening α of the airflow adjustment damper 9 is set to the target. It is possible to prevent the output pressure of the air supply fan 1 from returning to the opening degree range X to be changed to the room pressure p of the target room having a high room pressure management level.

The change of the designated air path pressure mps to the supply side fan controller 13 on the decreasing side is determined by the supply side determination value Us.
Irrespective of the above, the condition that all the opening degrees α of the respective air flow amount adjusting dampers 9 deviate from the target opening degree range X in the closing direction is determined by the above-described air flow side adjusting value Us. This is because it is not possible to completely determine a situation in which the opening degree α of the damper 9 deviates from the target opening range X in the closing direction (that is, a situation in which the designated wind path pressure mps should be changed to the descending side).

On the other hand, the exhaust-side control device 22 is configured to detect the opening degree β of each of the chamber pressure adjusting dampers 17 by the opening degree sensor 23 (in this example, each of the chamber pressure adjusting dampers 17). Is greater than the upper limit of the target opening range Y or less than the lower limit of the target opening range Y).
The exhaust-side discrimination value Ue is obtained by the following equation 2. Ue = Σ (Lj × Bj) (Equation 2) (j = 1, 2,..., N = 4 in this example, N = 4 4) The exhaust-side fan controller 21 according to the exhaust-side determination value Ue
Is changed for the designated air path pressure mpe.

Lj is a weighting coefficient (0.0 ≦ Lj ≦ 1.0) for each of the target chambers R1 to R4. , A large weighting coefficient Lj is set.

Bj is a function value for numerically selecting each of the target chambers R1 to R4 according to the detected opening degree β of the corresponding chamber pressure adjusting damper 17, and the opening degree β of the corresponding room pressure adjusting damper 17 is selected.
Is greater than the upper limit value of the target opening range Y and deviates from the target opening range Y in the opening direction, Bj = 1.0 is adopted,
The opening β of the corresponding room pressure adjusting damper 17 is the target opening range Y
Bj = 0.0 is adopted when the value falls within the range and the value falls below the lower limit value of the target opening range Y and deviates from the target opening range Y in the closing direction.

More specifically, the exhaust-side control device 22
Is a weight coefficient Lj for each of these target rooms R1 to R4.
And the above-described exhaust-side determination value Ue obtained from the function value Bj
When Ue ≧ 1.0, the designated air path pressure mpe for the exhaust-side fan controller 21 is increased at a predetermined change speed or by a predetermined change amount (to increase the output of the exhaust fan 4). change.

Also, the required exhaust-side determination value Ue is Ue
When <1.0, the designated air path pressure mpe for the exhaust-side fan controller 21 is maintained at the current level, whereas the opening degrees β of the respective chamber pressure adjustment dampers 17 all deviate from the target opening degree range Y in the closing direction. If so, the designated air path pressure mpe for the exhaust-side fan controller 21 is changed at a predetermined change speed or by a predetermined change amount to a lower side (a side that reduces the output of the exhaust fan 4).

That is, in the change of the designated air path pressure mpe according to the exhaust-side determination value Ue, a target room having a low room pressure management level among a plurality of target rooms R1 to R4 is specified as in the case of the above-described air supply side. By setting the weight coefficient Lj low for the target room having a low room pressure management level as a room, the output room of the exhaust fan 4 based on the opening degree β of each room pressure adjusting damper 17 is set to the room. The opening degree β of the room pressure adjusting damper 17 for the target room having a low pressure management level is a factor for adjusting the fan output more than the opening degree β of the room pressure adjusting damper 17 for the target room having a high room pressure management level in which the weight coefficient Lj is set high. , The opening degree β of the room pressure adjusting damper 17 for the target room having a low room pressure management level is set to the target opening degree range Y.
(In this example, in the opening direction), due to the output change of the exhaust fan 4 for returning the opening β of the chamber pressure adjusting damper 17 to within the target opening range Y, It is possible to prevent the spillover fluctuation to the room pressure p of the target room having a high room pressure management level.

The change of the designated air path pressure mpe to the exhaust side fan controller 21 on the decreasing side is determined by the exhaust side determination value Ue.
Irrespective of the above, on the condition that the opening degree β of each of the chamber pressure adjusting dampers 17 deviates from the target opening degree range Y in the closing direction on the condition that the exhaust side determination value Ue is set, This is because it is impossible to completely determine a situation in which the opening degree β of the adjustment damper 17 is all outside the target opening degree range Y in the closing direction (that is, a situation in which the designated wind path pressure mpe should be changed to the descending side).

[Another Embodiment] In the above embodiment, the weighting factors Kj and Lj for each of the target rooms R1 to R4 are set to 0.0 ≦
Although an example of setting within the range of Kj, Lj ≦ 1.0 has been shown,
The specific range in which the weighting coefficients Kj and Lj are set may be appropriately selected. For example, 0.0 ≦ K
The weighting factors Kj, Lj may be set within the range of j, Lj ≦ 100.0. It should be noted that the threshold values of the determination values Us and Ue for changing the designated air path pressures mps and mpe to the ascending side or maintaining the current state vary depending on what numerical range the weighting coefficients Kj and Lj are set to. Needless to say.

In the above-mentioned embodiment, the damper opening α,
When β deviates from the target opening range X, Y in the opening direction, the function values Aj, Bj = 1.0 are adopted and the damper opening α,
When β is in the range of the target opening ranges X and Y, and when β deviates from the target opening ranges X and Y in the closing direction, the function values Aj and Bj = 0.0 are adopted. Alternatively, when the damper openings α and β are within the target opening ranges X and Y and when the damper openings α and β deviate from the target opening ranges X and Y in the opening direction, the function values Aj and Bj = 1.0,
When the damper openings α and β deviate from the target opening ranges X and Y in the closing direction, the function values Aj and Bj = 0.0 are adopted,
When the determination values Us, Ue are Us, Ue ≧ 1.0, the designated air path pressures mps, mpe are maintained as they are, and the determination values U, Ue are maintained.
When s and Ue are Us and Ue <1.0, the designated air path pressure mp
When the damper openings α and β deviate from the target opening ranges X and Y in the opening direction, the designated air path pressures mps and mpe are increased. An adjustment mode of changing may be adopted.

In the above-described embodiment, the output for changing the outputs of the fans 1 and 4 by changing the designated air path pressures mps and mpe based on the detected opening degrees α and β of the air volume adjustment damper 9 and the room pressure adjustment damper 17. The adjustment mode was adopted, but instead of this, the detection opening degrees α, β of the air volume adjustment damper 9 and the room pressure adjustment damper 17 were used.
In this case, an output adjustment mode in which the rotation speed of the fans 1 and 4 is directly changed by inverter control or the like may be employed.

Further, the fan controllers 13 and 21 adjust the outputs of the fans 1 and 4 based on the detected air flow in the main air passages 2 and 5 to adjust the air flow in the main air passages 2 and 5 to the designated air flow. And an output adjustment mode in which the outputs of the fans 1 and 4 are changed by changing the designated airflow to the fan controllers 13 and 21 based on the detection openings α and β of the airflow adjustment damper 9 and the room pressure adjustment damper 17. May be adopted, and the air volume adjustment damper 9 may be used.
In order to change the output of the air supply fan 1 and the exhaust 4 based on the detected opening degrees α and β of the chamber pressure adjustment damper 17, various changes can be made in the basic output adjustment form.

In the above-described embodiment, the opening degree sensors 15, 2
3, an over-open sensor for detecting that the openings α and β of the air volume adjustment damper 9 and the room pressure adjustment damper 17 are above the upper limit values of the target opening ranges X and Y; β
Provided an overclose sensor for detecting that the state is below the lower limit values of the target opening ranges X and Y. However, an opening sensor for continuously detecting α and β is adopted.
As means for detecting the opening degrees α and β of the air volume adjustment damper 9 and the chamber pressure adjustment damper 17, various types can be adopted.

In the air volume control means for adjusting the opening degree α of the air volume adjustment damper 9 based on the detected air volume q detected by the air volume adjustment damper 9 to adjust the air volume q to the target air volume mq, the damper blades are operated by an electric motor. Various types including a so-called constant air volume device such as a motor damper type and a type in which damper blades are operated by mechanical interlocking with a passing air volume detection mechanism can be adopted.

Regarding the opening degrees α and β of the air volume adjusting damper 9 and the room pressure adjusting damper 17 for a specific one of the target rooms R1 to R4, the other air volume adjusting damper 9 and the other room pressure adjusting damper 1 are used.
In order to adjust the output of the fans 1 and 4 by restricting the handling as the adjustment factor of the fan output rather than the opening α and β of the opening 7, the opening α and β or the related values Aj and Bj in the above-described embodiment.
However, in the case where the opening degrees α and β of the air volume adjustment damper 9 and the room pressure adjustment damper 17 for a specific chamber deviate from the target opening degree ranges X and Y, for example, Air volume adjustment damper 9 and other chamber pressure adjustment dampers 17
, The output change amounts of the fans 1 and 4 and the change speed of the fan output may be made smaller than when the opening degrees α and β deviate from the target opening degree ranges X and Y.

The openings α and β of the air volume adjustment damper 9 and the chamber pressure adjustment damper 17 for the specific room are set in the target opening ranges X and Y.
, The opening degree α, β of the other air volume adjustment damper 9 or the other room pressure adjustment damper 17 deviates from the target opening range X, Y, and the change of the fan output is started from the point of deviation. May be employed to increase the standby time until the air flow is adjusted, and the opening degrees α and β of the air volume adjustment damper 9 and the chamber pressure adjustment damper 17 for a specific chamber are specifically treated as adjustment factors of the fan output. Various changes can be made in what form the restriction is made.

In the above embodiment, the weighting factors Kj, Lj
Although the degree of the restriction can be variously selected by the selection of, the degree of the restriction may be fixed and only whether or not the restriction is applied may be selected.

The level of the room pressure management level depends on each of the target rooms R1 to R
4 depending on the degree of cleanliness required, and each target room R
1 to R4 depending on the degree of contamination, or depending on the frequency of opening and closing the doors of each target room R1 to R4,
It may be due to any factor.

The number of target rooms is not limited to four, but may be any number of two or more rooms.
This number of rooms means at least one air volume adjustment damper 9.
And the number of target rooms provided with the room pressure adjusting damper 17, and 1
Two or more air volume adjustment dampers 9 and room pressure adjustment dampers 17 may be provided in one target room, and a plurality of rooms to be handled by one air volume adjustment damper 9 and room pressure adjustment damper 17 may be provided as one object room. It may be treated as a room.

In the above-described embodiment, an example in which the invention according to claim 1 is applied to the exhaust side and the invention according to claim 2 is applied to the air supply side has been described. 1
The invention according to claim 2 may be applied to the air supply side, and the invention according to claim 2 may be applied to the exhaust side. One of the invention according to claim 1 and the invention according to claim 2 is non- As an embodiment, only the other may be applied to the supply side or the exhaust side, or may be applied to both the supply side and the exhaust side.

The present invention can be applied to various fields requiring room pressure control for a plurality of rooms, such as a chemical manufacturing facility and a semiconductor electronic component manufacturing facility.

[Brief description of the drawings]

FIG. 1 shows a system configuration.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Air supply fan 4 Exhaust fan 2 Main air path, air supply side main air path 5 Main air path, exhaust side main air path 3 Branch air path, air supply side branch air path 6 Branch air path, exhaust side branch air Path 9 Air flow adjustment damper 11 Air flow control means 16 Air flow pressure control means, air flow pressure control means on the air flow adjustment side 17 Room pressure adjustment damper 19 Room pressure control means 24 Air flow pressure control means, air flow pressure on the room pressure adjustment side Control means α Opening of airflow adjustment damper β Opening of chamber pressure adjustment damper p Room pressure mp Target chamber pressure q Passing airflow mq Target airflow R1 to R4 Target room X Target opening range of airflow adjustment damper Y Room pressure adjustment damper Target opening range

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Tadashi Mukumoto 2-6-1 Nishishinjuku, Shinjuku-ku, Tokyo F-term F-term (reference) 3L056 BD07 BE07 BF04 3L058 BE02 BF01 BG01 BG04

Claims (3)

[Claims] 1. A plurality of target chambers are connected in parallel to a main air passage connected to an exhaust or air supply fan via a branch air passage, and a room pressure adjusting damper is provided for each of the branch air passages. Room pressure control means for adjusting the opening degree of the room pressure adjusting damper corresponding to each target room based on the detected room pressure of each of the target rooms to adjust the room pressure of each target room to the target room pressure. And adjusting the output of the fan based on the detected opening of each of the chamber pressure adjusting dampers so that the opening of each of the chamber pressure adjusting dampers is within the target opening range in the room pressure adjustment by the room pressure controlling means. A room pressure control system provided with air path pressure control means, wherein the air path pressure control means is configured to determine the degree of opening of the chamber pressure adjustment damper with respect to a specific one of the target chambers by another room pressure. Limit the handling of the fan output as an adjustment factor rather than the adjustment damper opening. , A room pressure control system configured to adjust the fan output. 2. A plurality of target chambers are connected in parallel to a main air passage connected to an exhaust or air supply fan through branch air passages, and each of the branch air passages is connected to a main air passage through an air volume adjustment damper. Air volume control means for adjusting the opening degree of each air volume adjustment damper to adjust the air volume passing through each air volume adjustment damper to a target air volume based on the detected air volume detected by each of these air volume adjustment dampers; In the air volume adjustment, so that the opening of each of the air volume adjustment dampers is within the target opening range,
A room pressure control system provided with air path pressure control means for adjusting the output of the fan based on the detection opening of each air volume adjustment damper, wherein the air path pressure control means A room pressure control system configured to adjust a fan output by restricting a degree of opening of the air volume adjustment damper with respect to a room as an adjustment factor of a fan output more than an opening of another air volume adjustment damper. 3. A plurality of target chambers are connected in parallel to an air supply side main air path connected to an air supply fan via an air supply side branch air path, and connected to an exhaust fan. The air path is connected to the target chamber in parallel via an exhaust-side branch air path, and an air volume adjustment damper is interposed in each of the supply-side branch air path and the exhaust-side branch air path. And, a room pressure adjusting damper is interposed in each of the other, and based on the detected passing airflow of each of the airflow adjusting dampers, the opening degree of each airflow adjusting damper is adjusted to make the passing airflow of each airflow adjusting damper a target airflow. Air volume control means for adjusting, and a chamber for adjusting an opening degree of the room pressure adjusting damper corresponding to each object room to adjust the room pressure of each object room to a target room pressure based on the detected room pressure of each object room. Pressure control means, and in the flow rate adjustment by the flow rate control means, As degree is within the target opening range,
An air-flow-adjustment-side air-path pressure control means for adjusting an output of an air-flow-adjustment-damper-equipped fan of the exhaust fan and the air-supply fan based on a detection opening degree of each air-air-adjustment damper; In the room pressure adjustment by the control means, the exhaust fan and the air supply fan are connected based on the detected opening degree of each room pressure adjustment damper so that the opening degree of each of the chamber pressure adjustment dampers falls within a target opening degree range. A room pressure control system provided with a room pressure adjustment side air path pressure control unit that adjusts an output of a room pressure adjustment damper equipped air path side fan, wherein the air volume adjustment side air path pressure control unit includes: Regarding the opening degree of the air volume adjustment damper with respect to a specific one of the target chambers, the configuration is such that the handling as a fan output adjustment factor is restricted more than the opening degrees of other air volume adjustment dampers, and the fan output is adjusted. The chamber pressure adjustment side The road pressure control means restricts the opening degree of the room pressure adjustment damper with respect to the specific chamber of the target chamber from being treated as an adjustment factor of the fan output more than the opening degrees of the other room pressure adjustment dampers. , A room pressure control system configured to adjust the fan output.