JP2000306222A - Magnetoresistance effect element reproduction evaluation device - Google Patents

Magnetoresistance effect element reproduction evaluation device

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Publication number
JP2000306222A
JP2000306222A JP11115011A JP11501199A JP2000306222A JP 2000306222 A JP2000306222 A JP 2000306222A JP 11115011 A JP11115011 A JP 11115011A JP 11501199 A JP11501199 A JP 11501199A JP 2000306222 A JP2000306222 A JP 2000306222A
Authority
JP
Japan
Prior art keywords
reproduction
magnetic field
sensitivity distribution
distribution function
effect element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11115011A
Other languages
Japanese (ja)
Inventor
Takeshi Sone
威之 曽根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP11115011A priority Critical patent/JP2000306222A/en
Publication of JP2000306222A publication Critical patent/JP2000306222A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PROBLEM TO BE SOLVED: To make it possible to accurately and speedily measure a track width and sensitivity distribution of a magnetic reproducing head before being assembled into a magnetic head, by providing this device with a magnetic field applying means for applying a magnetic field perpendicular to a magneto-resistance effect element, a means for obtaining a reproduction sensitivity distribution function from the magneto-resistance effect element, and a means for obtaining a reproduction track width from the reproduction sensitivity distribution function. SOLUTION: A magnetic field generating device 1 having a narrow gap d and a coil 10 is arranged to be vertical and orthogonal to a magneto-resistance effect element 2. An arbitrary signal generating device 6 inputs a rectangular waveform signal to a coil 10, and generates a magnetic field in the part of the gap d. And, when the magneto-resistance effect element 2 through which a constant current is made to flow is moved in the direction of Z, from an electrode 3a to an electrode 3d, a mean value of the peaks of reproduced output waveforms is measured with respect to the moved distance, and thus, a reproducing sensitivity distribution function of the magneto-resistance effect element 2 is obtained. It is possible to obtain an effective reproduction width of the magneto-resistance effect element 2 from the reproducing sensitivity distribution function.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は磁気抵抗効果素子再
生評価装置に関する。より詳しくは、高感度の磁気記録
再生ヘッドを構成する薄膜磁気ヘッド、磁気抵抗効果型
ヘッド、スピンバルブ型ヘッドおよび巨大磁気抵抗効果
を利用したヘッド等の特性評価のための記録再生評価装
置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for evaluating and reproducing a magnetoresistance effect element. More specifically, the present invention relates to a recording / reproducing evaluation apparatus for evaluating characteristics of a thin-film magnetic head, a magnetoresistive head, a spin-valve head, and a head utilizing a giant magnetoresistive effect, which constitute a high-sensitivity magnetic recording / reproducing head. It is.

【0002】[0002]

【従来の技術】近年、磁気ディスク装置の高密度化に伴
う狭トラック化の進展により、記録再生評価装置ではヘ
ッドの再生トラック幅およびその感度分布の測定が重要
になっている。
2. Description of the Related Art In recent years, with the progress of narrower tracks accompanying the increase in density of magnetic disk devices, it has become important for a recording / reproducing evaluation device to measure the reproducing track width of a head and its sensitivity distribution.

【0003】従来の記録再生評価装置は、磁気記録ヘッ
ドおよび磁気再生ヘッドを有し、記録ヘッドには信号源
およびその信号源を増幅するための再生アンプが接続さ
れ、さらに入力信号を見るためのオシロスコープが接続
され、また磁気再生ヘッドには再生信号を増幅される再
生アンプ及び再生信号を見るためのデジタルオシロスコ
ープ及びスペクトルアナライザが接続され、さらにデジ
タルオシロスコープにはデータを処理するためのパーソ
ナルコンピュータが接続されている。
A conventional recording / reproducing evaluation device has a magnetic recording head and a magnetic reproducing head, and a signal source and a reproducing amplifier for amplifying the signal source are connected to the recording head, and further, an input signal is observed. An oscilloscope is connected, a reproducing amplifier for amplifying the reproduced signal, a digital oscilloscope and a spectrum analyzer for viewing the reproduced signal are connected to the magnetic reproducing head, and a personal computer for processing data is connected to the digital oscilloscope. Have been.

【0004】このパーソナルコンピュータでは、感度分
布関数を予測し、積分によりオフトラック特性を推測
し、この結果と測定したデータを比較する。このときの
誤差が、ある一定値以下であれば予測した感度分布関数
からトラック幅を推測し、誤差が大きければ新たな感度
分布関数を予想して計算を繰り返す。
In this personal computer, a sensitivity distribution function is predicted, an off-track characteristic is estimated by integration, and the result is compared with measured data. If the error at this time is equal to or less than a certain value, the track width is estimated from the predicted sensitivity distribution function, and if the error is large, a new sensitivity distribution function is predicted and the calculation is repeated.

【0005】しかしながら、この構成では感度分布関数
を予測し直すため、計算に時間がかかる。また、感度分
布関数を予想するためのトラック幅の計算値が正確では
なかった。
However, in this configuration, since the sensitivity distribution function is re-estimated, it takes a long time to perform the calculation. Further, the calculated value of the track width for estimating the sensitivity distribution function was not accurate.

【0006】また、他の従来の記録再生評価装置は、磁
気媒体と、これを駆動する駆動系および信号系を有し、
信号源に接続された磁気記録ヘッドで記録媒体に信号を
記録し、再生アンプに接続された磁気再生ヘッドをその
幅方向に動かしたときの再生出力(オフトラック再生デ
ータ)からオフトラックプロファイルを求め、その左右
の傾斜部分の幅を再生ヘッドのトラック幅としたり、オ
フトラックプロファイルを微分し、得られた波形を、オ
ントラック位置を境に左右2分割、波形の左右反転、上
下反転、位置調整した後に加算して感度分布関数を求
め、再生ヘッドのトラック幅を求めていた。
Further, another conventional recording / reproducing evaluation device has a magnetic medium, a drive system and a signal system for driving the magnetic medium,
A signal is recorded on a recording medium by a magnetic recording head connected to a signal source, and an off-track profile is obtained from a reproduction output (off-track reproduction data) when the magnetic reproduction head connected to a reproduction amplifier is moved in the width direction. The width of the left and right inclined parts is used as the track width of the reproducing head, the off-track profile is differentiated, and the obtained waveform is divided into two parts on the border of the on-track position, left-right inversion, up-down inversion, and position adjustment After adding, the sensitivity distribution function is obtained to obtain the track width of the reproducing head.

【0007】しかしながら、この構成では、磁気記録ヘ
ッドと磁気再生ヘッドが一体化された後の状態(HGA
状態)でしか測定することができない上、オフトラック
再生データが磁気記録媒体や磁気ヘッドによって変化す
るため、高密度化により狭トラック化が進展したときに
磁気再生ヘッドの正確な感度分布関数および再生トラッ
ク幅を測定することができない。
However, in this configuration, the state after the magnetic recording head and the magnetic reproducing head are integrated (HGA)
State), and the off-track reproduction data changes depending on the magnetic recording medium and the magnetic head. Therefore, when the track density becomes higher and the track becomes narrower, an accurate sensitivity distribution function and reproduction of the magnetic reproduction head are obtained. Track width cannot be measured.

【0008】[0008]

【発明が解決しようとする課題】本発明は上記従来技術
を考慮したものであって、高密度化に伴う狭トラック化
された磁気再生ヘッドのトラック幅および感度分布を、
磁気ヘッドとして組立たHGA状態とする前に、正確か
つ高速で測定できる磁気抵抗効果素子再生評価装置の提
供を目的とする。
SUMMARY OF THE INVENTION The present invention has been made in consideration of the above-mentioned prior art, and is intended to reduce the track width and the sensitivity distribution of a magnetic reproducing head having a narrower track due to a higher density.
It is an object of the present invention to provide an apparatus for evaluating and reproducing a magnetoresistive element, which can measure accurately and at high speed before an HGA state is assembled as a magnetic head.

【0009】[0009]

【課題を解決するための手段】前記目的を達成するた
め、本発明では、磁気再生ヘッドに組込まれる前の状態
の磁気抵抗効果素子に対し垂直に磁界を印加する磁界印
加手段と、この磁気抵抗効果素子から再生感度分布関数
を求める手段と、この再生感度分布関数から再生トラッ
ク幅を求める手段とを備えたことを特徴とする磁気抵抗
効果素子再生評価装置を提供する。
In order to achieve the above object, the present invention provides a magnetic field applying means for applying a magnetic field perpendicularly to a magnetoresistive element before being incorporated into a magnetic reproducing head; An apparatus for evaluating reproduction of a magnetoresistive element, comprising: means for obtaining a reproduction sensitivity distribution function from an effect element; and means for obtaining a reproduction track width from the reproduction sensitivity distribution function.

【0010】この構成によれば、磁気ヘッドとして組立
一体化される前に、磁気抵抗効果素子に対し、磁界を印
加して再生感度分布関数を求めてこの再生感度分布関数
から演算により正確にかつ高速で再生トラック幅を求め
ることができる。
According to this configuration, before assembling and integrating as a magnetic head, a magnetic field is applied to the magnetoresistive effect element to obtain a reproduction sensitivity distribution function, and the reproduction sensitivity distribution function is calculated accurately and by calculation from the reproduction sensitivity distribution function. The reproduction track width can be obtained at high speed.

【0011】好ましい構成例では、前記磁界印加手段
は、前記磁気抵抗効果素子に対し、前記再生感度分布関
数が得られる程度に狭い幅の磁界を印加することを特徴
としている。
In a preferred configuration example, the magnetic field applying means applies a magnetic field having a width narrow enough to obtain the reproduction sensitivity distribution function to the magnetoresistive element.

【0012】この構成によれば、磁気抵抗効果素子に対
し十分に狭い幅の磁界を印加して、演算処理可能な明確
な再生感度分布関数が得られ、これにより正確なトラッ
ク幅を求めることができる。
According to this configuration, by applying a magnetic field having a sufficiently narrow width to the magnetoresistive element, a clear reproduction sensitivity distribution function that can be processed can be obtained, and thereby an accurate track width can be obtained. it can.

【0013】さらに好ましい構成例では、前記磁界印加
手段は、前記磁気抵抗効果素子に対し垂直かつ直交して
配設したコイルとこのコイルに信号を印加する信号印加
手段とからなることを特徴としている。
In a further preferred embodiment, the magnetic field applying means comprises a coil disposed perpendicularly and perpendicular to the magnetoresistive element, and a signal applying means for applying a signal to the coil. .

【0014】この構成によれば、磁気抵抗効果素子に対
し、前述のように十分幅の狭いコイルを直交方向に垂直
に配設して所定の信号を印加することにより、磁気抵抗
効果素子に対し垂直方向の磁界が発生し、これに基づい
て再生感度分布関数が得られる。
According to this structure, the coil having a sufficiently narrow width is arranged perpendicularly to the orthogonal direction and a predetermined signal is applied to the magnetoresistive element as described above, whereby the magnetoresistive element is applied to the magnetoresistive element. A vertical magnetic field is generated, based on which a reproduction sensitivity distribution function is obtained.

【0015】[0015]

【発明の実施の形態】以下図面に基づいて本発明の実施
の形態について説明する。図1は、本発明の実施の形態
の要部構成図である。本実施形態では、磁気抵抗効果素
子2に対向して、非常に狭いギャップdをもち、1ター
ン以上のコイル10を有する狭幅の磁界発生装置1が、
この磁気抵抗効果素子2に対し垂直かつ直交するように
設置されている。このギャップdは、後述の再生感度分
布関数の演算処理が可能となる程度に十分狭く形成す
る。また、磁界発生装置1と磁気抵抗効果素子2との間
隔は、磁界発生装置から発生する磁場が十分に磁気抵抗
効果素子2内に入る程度に狭いものとする。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a main part configuration diagram of an embodiment of the present invention. In the present embodiment, a narrow magnetic field generating device 1 having a very narrow gap d and having a coil 10 of one or more turns is opposed to the magnetoresistive effect element 2.
It is installed so as to be perpendicular and orthogonal to the magnetoresistive element 2. The gap d is formed to be sufficiently small to enable the calculation processing of the reproduction sensitivity distribution function described later. The distance between the magnetic field generator 1 and the magnetoresistive element 2 is so small that the magnetic field generated from the magnetic field generator can sufficiently enter the magnetoresistive element 2.

【0016】この磁界発生装置1は、1ターン以上のコ
イル10を有し、このコイル10に、任意信号発生装置
6が接続されている。磁気抵抗効果素子2の左右両側の
端部にはそれぞれ電極3a,3bが接続されている。ま
た、この磁気抵抗効果素子2の上面側には中間シールド
4が設けられ、下面側には下層シールド5が設けられ
る。この任意信号発生装置6により、コイル10に対
し、例えば、図2に示すような矩形波形の信号が入力さ
れる。これにより、ギャップdの部分に図3に示すよう
な磁界が発生する。このような狭い磁場を連続的に発生
させる磁界発生装置1に対して図2の矩形波を入力し、
かつ磁気抵抗効果素子2に一定電流を流した状態で、磁
気抵抗効果素子2の幅方向Xにそれに接続された一方の
電極3aからもう片端側の電極3bへ、この磁気抵抗効
果素子2をZ方向に移動させたとき、図3の再生出力波
形のピーク間の平均値を移動距離に対し測定する。この
ようにして得られた結果は、図4に示すようになり、磁
気抵抗効果素子2の再生感度分布関数が得られる。
The magnetic field generator 1 has a coil 10 of one or more turns, and an arbitrary signal generator 6 is connected to the coil 10. Electrodes 3a and 3b are connected to the left and right ends of the magnetoresistive element 2, respectively. An intermediate shield 4 is provided on the upper surface of the magnetoresistive element 2, and a lower shield 5 is provided on the lower surface. For example, a rectangular signal as shown in FIG. 2 is input to the coil 10 by the arbitrary signal generator 6. As a result, a magnetic field as shown in FIG. 3 is generated in the gap d. The rectangular wave of FIG. 2 is input to the magnetic field generator 1 that continuously generates such a narrow magnetic field,
In a state where a constant current is applied to the magnetoresistive element 2, the magnetoresistive element 2 is moved from one electrode 3a connected to the magnetoresistive element 2 in the width direction X to the other end 3b. When moving in the direction, the average value between the peaks of the reproduced output waveform in FIG. 3 is measured with respect to the moving distance. The result obtained in this way is as shown in FIG. 4, and the reproduction sensitivity distribution function of the magnetoresistive element 2 is obtained.

【0017】この磁気抵抗効果素子2の再生感度分布関
数の、立ち上がりおよび立ち下がりの傾斜部分は、磁界
発生装置1が磁気抵抗効果素子2にかかり始めるとき又
は遠ざかり始めるときを表わしている。よって、得られ
た再生感度分布関数をコンピュータによって再生感度分
布関数の最大出力に対して50%の出力の幅を計算する
ことによって、磁気抵抗効果素子の有効再生幅を求める
ことができる。
The rising and falling slopes of the reproduction sensitivity distribution function of the magnetoresistive element 2 indicate when the magnetic field generator 1 starts to be applied to the magnetoresistive element 2 or starts moving away. Therefore, the effective reproduction width of the magnetoresistive element can be obtained by calculating the width of the output of the obtained reproduction sensitivity distribution function by 50% with respect to the maximum output of the reproduction sensitivity distribution function.

【0018】図5は、磁気ヘッドとして組立る前の棒状
のローバー9の状態で磁気抵抗効果素子の測定をしてい
る状態を示す。図は3個のチップ11が棒状につながっ
たローバー9の状態でその長手方向(図1のZ方向)に
走行中に、磁界発生装置1により各チップ11を連続し
て測定する。各チップ11は、上層コア8と、その周囲
の記録コイル7とを含み、前述の磁気抵抗効果素子2接
続する端子3a,3bが引出される。これらの端子3
a,3bは、前述の再生感度分布関数を求めるとともに
これを解析して再生トラック幅を求めるためのコンピュ
ータ(図示しない)に接続される。
FIG. 5 shows a state in which the magnetoresistive element is measured in the state of the rod-shaped row bar 9 before being assembled as a magnetic head. In the figure, each of the chips 11 is continuously measured by the magnetic field generator 1 while running in the longitudinal direction (the Z direction in FIG. 1) in the state of the row bar 9 in which three chips 11 are connected in a bar shape. Each chip 11 includes an upper core 8 and a recording coil 7 around the upper core 8, and the terminals 3a and 3b for connecting the above-described magnetoresistive element 2 are drawn out. These terminals 3
a and 3b are connected to a computer (not shown) for obtaining the above-mentioned reproduction sensitivity distribution function and analyzing the same to obtain a reproduction track width.

【0019】このような状態で、電極3aから電極3b
へ電流を通電した状態で、ローバー9を垂直方向に移動
させたときに得られる再生出力の変化から再生感度分布
関数を得ることができ、さらにその再生感度分布関数の
最大出力の50%の幅を計算することによりHGA前の
状態で有効再生幅を求めることができる。
In this state, the electrodes 3a to 3b
A reproduction sensitivity distribution function can be obtained from a change in the reproduction output obtained when the row bar 9 is moved in the vertical direction with a current flowing through the reproduction bar, and a width of 50% of the maximum output of the reproduction sensitivity distribution function. Is calculated, the effective reproduction width can be obtained before the HGA.

【0020】図6は、図5のローバー9を各チップごと
に切断して磁気ヘッドのスライダーとして組立てた状態
を示し、(A)は底面図、(B)は側面図、(C)は
(A)のC部拡大図である。また、図7は磁気ヘッドと
して組立た後の使用状態の斜視図である。
FIGS. 6A and 6B show a state where the row bar 9 shown in FIG. 5 is cut for each chip and assembled as a slider of a magnetic head. FIG. 6A is a bottom view, FIG. 6B is a side view, and FIG. It is an enlarged view of the C section of A). FIG. 7 is a perspective view of a used state after being assembled as a magnetic head.

【0021】前述の磁気抵抗効果素子2が組込まれたス
ライダー20は、図7に示すようにサスペンション23
に保持されて磁気ヘッド24を構成する。スライダー2
0は、磁気ディスク等の磁気記録媒体22の記録再生ト
ラック面に臨む上層コア8側を摺接面(ABS面)21
としてディスク面上を浮上して走行し、情報の記録再生
を行う。
As shown in FIG. 7, the slider 20 incorporating the above-described magnetoresistive element 2 is
To form the magnetic head 24. Slider 2
Numeral 0 denotes a sliding surface (ABS surface) 21 on the side of the upper core 8 facing the recording / reproducing track surface of a magnetic recording medium 22 such as a magnetic disk.
And travels while floating on the disk surface to record and reproduce information.

【0022】[0022]

【発明の効果】以上説明したように、本発明では、磁気
ヘッドとして組立一体化される前に、磁気抵抗効果素子
に対し、磁界を印加して再生感度分布関数を求めてこの
再生感度分布関数から演算により正確にかつ高速で再生
トラック幅を求めることができる。
As described above, according to the present invention, before assembling and integrating as a magnetic head, a magnetic field is applied to the magnetoresistive element to obtain a reproduction sensitivity distribution function. Thus, the reproduction track width can be obtained accurately and at high speed by calculation.

【0023】すなわち、磁気抵抗記録素子に対して十分
に狭いギャップを有する狭幅の磁界発生装置によって磁
気抵抗効果素子に垂直に磁場を印加し、幅方向に移動さ
せながら磁気抵抗効果素子の両端の電圧を測定すること
によって、磁気ヘッドを構成する前に磁気記録媒体を用
いることなく、磁気抵抗効果素子を備えた磁気ヘッドの
特性を測定検査することができ、磁気ヘッド製造プロセ
スが効率的に行われ、生産性が高められる。
That is, a magnetic field is applied perpendicularly to the magnetoresistive element by a narrow magnetic field generator having a sufficiently narrow gap with respect to the magnetoresistive recording element, and the magnetic field is applied to both ends of the magnetoresistive element while moving in the width direction. By measuring the voltage, the characteristics of a magnetic head having a magnetoresistive element can be measured and inspected without using a magnetic recording medium before forming the magnetic head, and the magnetic head manufacturing process can be performed efficiently. And increase productivity.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明に係る磁気抵抗効果素子再生評価装置
の要部構成図。
FIG. 1 is a configuration diagram of a main part of a magnetoresistance effect element reproduction evaluation device according to the present invention.

【図2】 図1の装置に印加する信号波形図。FIG. 2 is a signal waveform diagram applied to the device of FIG.

【図3】 図2の信号により発生する磁界のグラフ。FIG. 3 is a graph of a magnetic field generated by the signal of FIG.

【図4】 図1の装置により得られた感度分布関数のグ
ラフ。
FIG. 4 is a graph of a sensitivity distribution function obtained by the apparatus of FIG.

【図5】 本発明の再生評価装置の使用状態の斜視図。FIG. 5 is a perspective view of a reproduction evaluation device according to the present invention in a used state.

【図6】 本発明の磁気抵抗効果素子を組込んだスライ
ダーの構成説明図。
FIG. 6 is a structural explanatory view of a slider incorporating the magnetoresistive element of the present invention.

【図7】 図6のスライダーを用いた磁気ヘッドの斜視
図。
FIG. 7 is a perspective view of a magnetic head using the slider of FIG. 6;

【符号の説明】[Explanation of symbols]

1:磁界発生装置、2:磁気抵抗効果素子、3a,3
b:電極、4:中間シールド、5:下層シールド、6:
任意信号発生装置、7:記録コイル、8:上層シール
ド、9:ローバー、10:コイル、11:チップ、2
0:スライダー、21:摺接面、22:磁気記録媒体、
23:サスペンション、24:磁気ヘッド。
1: magnetic field generator, 2: magnetoresistance effect element, 3a, 3
b: Electrode, 4: Middle shield, 5: Lower shield, 6:
Arbitrary signal generator, 7: recording coil, 8: upper shield, 9: row bar, 10: coil, 11: chip, 2
0: slider, 21: sliding surface, 22: magnetic recording medium,
23: suspension, 24: magnetic head.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】磁気再生ヘッドに組込まれる前の状態の磁
気抵抗効果素子に対し垂直に磁界を印加する磁界印加手
段と、 この磁気抵抗効果素子から再生感度分布関数を求める手
段と、 この再生感度分布関数から再生トラック幅を求める手段
とを備えたことを特徴とする磁気抵抗効果素子再生評価
装置。
A magnetic field applying means for applying a magnetic field perpendicularly to the magnetoresistive element before being incorporated in the magnetic reproducing head; a means for obtaining a reproduction sensitivity distribution function from the magnetoresistive element; Means for calculating a reproduction track width from a distribution function.
【請求項2】前記磁界印加手段は、前記磁気抵抗効果素
子に対し、前記再生感度分布関数が得られる程度に狭い
幅の磁界を印加することを特徴とする請求項1に記載の
磁気抵抗効果素子再生評価装置。
2. The magnetoresistive effect according to claim 1, wherein said magnetic field applying means applies a magnetic field having a width narrow enough to obtain said reproduction sensitivity distribution function to said magnetoresistive effect element. Element reproduction evaluation device.
【請求項3】前記磁界印加手段は、前記磁気抵抗効果素
子に対し垂直かつ直交して配設したコイルとこのコイル
に信号を印加する信号印加手段とからなることを特徴と
する請求項1に記載の磁気抵抗効果素子再生評価装置。
3. The apparatus according to claim 1, wherein said magnetic field applying means comprises a coil disposed perpendicularly and orthogonally to said magnetoresistive element and a signal applying means for applying a signal to said coil. An apparatus for evaluating reproduction of a magnetoresistive element according to any one of the preceding claims.
JP11115011A 1999-04-22 1999-04-22 Magnetoresistance effect element reproduction evaluation device Pending JP2000306222A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11115011A JP2000306222A (en) 1999-04-22 1999-04-22 Magnetoresistance effect element reproduction evaluation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11115011A JP2000306222A (en) 1999-04-22 1999-04-22 Magnetoresistance effect element reproduction evaluation device

Publications (1)

Publication Number Publication Date
JP2000306222A true JP2000306222A (en) 2000-11-02

Family

ID=14652069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11115011A Pending JP2000306222A (en) 1999-04-22 1999-04-22 Magnetoresistance effect element reproduction evaluation device

Country Status (1)

Country Link
JP (1) JP2000306222A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009193624A (en) * 2008-02-13 2009-08-27 Tdk Corp Method and apparatus for inspecting characteristic of thin film magnetic head element
JP2009193653A (en) * 2008-02-18 2009-08-27 Tdk Corp Method and apparatus for inspecting characteristic of thin film magnetic head element
JP2009211760A (en) * 2008-03-04 2009-09-17 Tdk Corp Characteristic inspection method and device for thin film magnetic head element
US7683610B2 (en) 2008-03-03 2010-03-23 Tdk Corporation Method for inspecting magnetic characteristics of a plurality of thin magnetic heads by means of local application of magnetic field

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009193624A (en) * 2008-02-13 2009-08-27 Tdk Corp Method and apparatus for inspecting characteristic of thin film magnetic head element
JP2009193653A (en) * 2008-02-18 2009-08-27 Tdk Corp Method and apparatus for inspecting characteristic of thin film magnetic head element
US7683610B2 (en) 2008-03-03 2010-03-23 Tdk Corporation Method for inspecting magnetic characteristics of a plurality of thin magnetic heads by means of local application of magnetic field
JP2009211760A (en) * 2008-03-04 2009-09-17 Tdk Corp Characteristic inspection method and device for thin film magnetic head element

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