JP2000304691A - State-evaluation support apparatus, state evaluation method, and computer-readable recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a state-evaluation support apparatus, by which whether a sample to be evaluated is in a target state or not, can be evaluated easily by an evaluator, even when an instrumental error is contained in optical characteristic data which have been measured regarding the sample to be evaluated. SOLUTION: When sample data as optical characteristic data on a sample to be evaluated are given, this state-evaluation support apparatus is constituted so as to display a screen 50 indicating a graph whose coordinates are composed of a set of characteristic values within the sample data corresponding to the same wavelength and characteristic values within reference data and in which a plurality of data points are drawn, By using the graph, even when a general instrumental error is contained in the sample, whether the state of the sample to be evaluated is in a target state or not can be discriminated according to whether the data points are plotted linearly or not. Consequently, when the state-evaluation support apparatus is used, an evaluator can easily judge whether the sample to be evaluated is in the target state or not.

Description

DETAILED DESCRIPTION OF THE INVENTION

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a state evaluation support apparatus and a state evaluation method based on optical characteristic data obtained by spectroscopic measurement.

2. Description of the Related Art Optical properties (wavelength dependence of optical property values) of a sample are measured in order to control a manufacturing process of a sample manufactured by a chemical reaction and to evaluate a state of the manufactured sample. The measurement results are compared with target optical characteristics. Specifically, as shown in FIG. 12, the optical characteristics of the sample to be evaluated and the optical characteristics of the reference sample are converted into parameters related to wavelength (wave number in the figure).
Is plotted on the axis of abscissa and the optical characteristic value (absorbance in the figure) is plotted on the ordinate (displayed as a spectrum).
It has been determined whether or not the evaluation target sample is in the target state by determining whether or not the profiles of the two optical characteristics can be regarded as matching.

[0001]

As is well known, the measurement results of a spectrometer such as an infrared spectrometer used for measuring the optical characteristics include noise and a baseline drift. May have. In addition, if the arrangement and dimensions at the time of measurement of the sample to be evaluated are different from the arrangement and dimensions at the time of measurement of the reference sample (the target sample, the same sample as the sample to be evaluated), it is obtained for the sample to be evaluated. The optical characteristic value for each wavelength is a value obtained by multiplying the optical characteristic value for the corresponding reference sample by a magnification determined according to the difference in arrangement and dimensions. That is, when these mechanical errors are included, the optical characteristic values for each wavelength obtained for the sample to be evaluated are different from the optical characteristic values for the corresponding reference sample.

On the other hand, even when no instrumental error is included, but the reaction does not proceed sufficiently, the optical characteristic values for each wavelength obtained for the sample to be evaluated are the same as those for the corresponding reference sample. The value is different from the characteristic value. For this reason, if the optical characteristics of the sample to be evaluated and the reference optical characteristics are displayed on a graph in which the parameters related to the wavelength are plotted on the horizontal axis, as in the related art, when the two optical characteristics are different, In some cases, it was not possible to determine whether the difference was caused by the fact that the reaction did not proceed or that the measurement result included an instrumental error.

[0003] Therefore, an object of the present invention is to evaluate whether or not an evaluation target sample is in a target state even if optical characteristics data measured for the evaluation target sample include an instrumental error. It is an object of the present invention to provide a state evaluation support apparatus and a state evaluation method that can be easily determined by a user (user of the apparatus), and a computer-readable recording medium that allows a computer to operate as such a state evaluation support apparatus. .

[0004]

In order to solve the above-mentioned problems, according to the present invention, the state of a sample to be evaluated is evaluated based on optical characteristic data including a plurality of characteristic values associated with different wavelengths. Storage means for storing reference data, which is optical property data representing a target state of a sample to be evaluated, and input means for inputting sample data, which is optical property data of the sample to be evaluated. And from among a plurality of characteristic values included in the sample data input by the input means and a plurality of characteristic values included in the reference data stored in the storage means, the characteristic in the sample data associated with the same wavelength. Outputting a graph in which a specifying means for specifying all pairs of values and characteristic values in the reference data, and data points having coordinates of two characteristic values constituting each set specified by the specifying means. Configured using a rough output means.

That is, the state evaluation support apparatus of the present invention
When sample data, which is the optical property data of the sample to be evaluated, is given, a plurality of data points are drawn with coordinates of a set of a property value in the sample data and a property value in the reference data corresponding to the same wavelength. Output (display and print) the graph.
The graph output by this state evaluation support device is intended to target the state of the sample to be evaluated depending on whether or not data points are plotted in a straight line, even if the sample data contains general mechanical errors. It is possible to determine whether or not it is in the state. Therefore, by using the state evaluation support device of the present invention, the evaluator can easily determine whether or not the evaluation target sample is in the target state.

In realizing the state evaluation support device of the present invention, a means capable of storing a plurality of reference data is employed as a storage means, and one of the plurality of reference data stored in the storage means is provided. A selection unit for selecting the reference data is added, and a plurality of characteristic values included in the sample data input by the input unit and a plurality of the characteristic data included in the reference data stored in the storage unit selected by the selection unit are added as the specifying unit. Means for specifying all the sets of the characteristic values in the sample data and the characteristic values in the reference data associated with the same wavelength from among the characteristic values may be employed. By employing this configuration, a state evaluation support device capable of evaluating a plurality of types of evaluation target samples can be obtained.

In realizing the state evaluation support apparatus of the present invention, a designating means for designating a wavelength range is added, and the designating means is associated with the same wavelength falling within the wavelength range designated by the designating means. Means for specifying all the sets of the characteristic values in the sample data and the characteristic values in the reference data may be employed. If this configuration is adopted, the evaluator can more easily determine whether the evaluation target sample is in a target state or not, that is, a graph in which only characteristic values related to wavelengths characteristic of the evaluation target sample are used. A state evaluation support device capable of outputting a graph is obtained.

Further, based on a set of characteristic values specified by the specifying means, a coefficient of a linear equation representing a linear covariant relation existing between the characteristic value in the sample data and the characteristic value in the reference data is calculated. Calculation means for calculation may be added, and means for outputting a graph in which a line segment represented by a linear equation having a coefficient calculated by the calculation means is also drawn as the graph output means. By adopting such a configuration, it is possible to obtain a state evaluation support device that allows the evaluator to qualitatively recognize the magnitude of the mechanical error included in the sample data from the line segment of the data point in the output graph. Will be.

The calculating means calculates the coefficients of the linear equation and calculates the deviation of the relationship between the characteristic value in the sample data and the characteristic value in the reference data from the linear covariant relationship represented by the linear equation. Means for calculating a value indicating the magnitude may be adopted, and the graph output means may employ means for outputting a graph indicating a value indicating the magnitude of the deviation calculated by the calculating means. By adopting such a configuration, a state evaluation support device that allows the evaluator to quantitatively recognize the magnitude of the mechanical error included in the sample data can be obtained.

The state evaluation method of the present invention is a state evaluation method for evaluating the state of a sample to be evaluated based on optical property data including a plurality of property values associated with different wavelengths. From the multiple characteristic values included in the reference data, which is the optical characteristic data representing the target state of the target sample, and the multiple characteristic values included in the sample data, which is the optical characteristic data of the evaluation target sample, the same wavelength is selected. A specifying step of specifying all pairs of the characteristic values in the associated sample data and the characteristic values in the reference data, and a data point having coordinates of two characteristic values constituting each pair specified in the specific step. Outputting a drawn graph.

That is, in the state evaluation method of the present invention, the characteristics in the sample data (optical characteristic data of the evaluation target sample) associated with the same wavelength are displayed as a graph for the evaluator to evaluate the state of the evaluation target sample. A graph is drawn (displayed or printed) in which a plurality of data points having coordinates of a set of values and characteristic values in the reference data are drawn. The graph output by this method indicates that the state of the sample to be evaluated is the target state, depending on whether or not the data points are plotted linearly, even if the sample data contains general mechanical errors. It can be determined whether or not it is set. Therefore, if the present state evaluation method is used, the evaluator can easily determine whether the evaluation target sample is in the target state.

The computer readable recording medium of the present invention stores a program for causing a computer to operate as the above-described state evaluation support apparatus of the present invention. By using the above, the evaluator can easily determine whether or not the evaluation target sample is in a target state.

[0013]

Embodiments of the present invention will be specifically described below with reference to the drawings.

First, a hardware configuration of a state evaluation support apparatus according to an embodiment of the present invention will be described with reference to FIG.

As shown in the figure, a state evaluation support device 10 according to an embodiment includes a display 11 and an input device 12.
, A printing device 13 and a control device 14. Control device 1
Reference numeral 4 denotes a CPU 21, a ROM 22, a RAM 23, an auxiliary storage unit 24, a display control circuit 25, interface circuits 26 to 28, and a bus 2 for interconnecting these.
9 is provided.

The display 11 is a device for displaying an image corresponding to the input RGB signals, and is connected to a display control circuit 25 of the control device 14. The display control circuit 25 has a VRAM, and is a circuit that outputs an RGB signal according to data stored in the VRAM. The input device 12 is a device (keyboard and mouse) used by the evaluator (user of the present device) to input various instructions to the state evaluation support device 10, and the printing device 13 stores data on paper. Is a device for outputting
The input device 12 and the printing device 13 are connected to the CPU 21 via interface circuits 26 and 27, respectively.

The interface circuit 28 is a circuit for controlling the infrared spectrometer 30 by the CPU 21. The infrared spectrometer 30 connected to the state evaluation support device 10 of the present embodiment is a device that can be set by an external device to set measurement conditions, start measurement, output a measurement result, and the like. Further, the apparatus outputs data (hereinafter, referred to as optical characteristic data) including a plurality of records each including a wave number and an absorbance corresponding to the wave number as a measurement result.

The auxiliary storage unit 24 includes a hard disk drive (HDD) and a flexible disk drive (FD).
D) and a CD-ROM drive. Auxiliary storage unit 24
HDD is used to store an optical property data file (details will be described later), which is a file containing optical property data measured by the infrared spectrometer 30. Also, H
The DD stores an OS (Operating System) installed from a CD-ROM or a flexible disk by a CD-ROM drive or FDD, and a state evaluation support program that is a program operating on the OS. Further, the HDD stores a measurement condition file and a display condition file which are files used by the state evaluation support program.

The ROM 22 has a CPU 21 when the power is turned on.
Are stored.
When the power is turned on, the CPU 21 reads the OS stored in the HDD into the RAM 2 according to the program in the ROM 22.
3 to a predetermined storage area. Next, the CPU 21
Starts the operation according to the read OS, and
When it is detected that a predetermined operation has been performed on 2, the state evaluation support program stored in the HDD is read out to another storage area of the RAM 23. Then, the operation according to the read state evaluation support program is started.

Hereinafter, C according to the state evaluation support program
The operation procedure of the PU 21 (that is, the state evaluation support device 10
Operation) will be described. First, the overall operation of the state evaluation support device 10 will be described with reference to the flowchart shown in FIG.

As shown, the CPU 21 according to the state evaluation support program first reads out the contents of the measurement condition file and the display condition file (details will be described later) stored in the HDD onto the RAM 23 (step S101).
Then, the CPU 21 displays the main menu on the display 11 (step S102). The main menu displayed in this step includes the evaluator's first to third
An instruction to execute the evaluation process, the measurement condition setting process, the display condition setting process, the measurement process, or the end instruction of the state evaluation support program can be issued. The CPU 21 detects that an instruction to execute any of the processes has been issued in the main menu (step S103: first, second,
For the third, measurement condition, display condition, and measurement), processing (steps S104 to S109) corresponding to the instruction is executed.
Then, when the execution of each process is completed, step S1
Returning to 02, the main menu is displayed again. Further, when it is detected that the end instruction of the state evaluation support program is issued in the main menu (step S103;
In (end), the operation according to the state evaluation support program is ended.

First to third evaluation processing (steps S104 to S104)
In S106), in each case, a graph that can easily determine whether the state of the evaluation target sample is in the target state is based on the optical characteristic data of the evaluation target sample and the optical characteristic data representing the target state. , Creation and display. Although the details will be described later, the third evaluation processing is to evaluate (or re-evaluate) a sample for which optical property data has already been obtained.
In the first and second evaluation processes, the infrared spectrometer 30 measures the optical characteristics of the sample to be evaluated while newly obtaining optical characteristic data, and compares the measurement results. This is a process for evaluating the sample to be evaluated based on the evaluation.

The measurement condition file read in step S101 includes various measurement condition data (measurement wavelength range designation data, etc.) for designating measurement conditions to be performed by the infrared spectrometer 30 during the first and second evaluation processes. It is a retained file. The measurement condition setting process (step S107) is a process of rewriting the measurement condition data in the RAM 23 and updating the measurement condition file in the HDD to a file containing the rewritten measurement condition data in accordance with the evaluator's instruction. It has become.

The display condition file read in step S101 includes various display condition data (data point shape, size designation data, display range designation data, etc.) referred to when displaying a graph in the first to third evaluation processes. )
The display condition setting process (step S108) is performed in accordance with the evaluator's instruction.
23 and rewrite the display condition data on the HDD.
Is updated to a file containing display condition data after rewriting.

Then, measurement processing (step S108)
Stores an optical property data file used as a reference data file in the first to third evaluation processes and an optical property data file used as a sample data file in the third evaluation process under the control of the infrared spectrometer 30. It is a process to create within.

Hereinafter, the operation of the state evaluation support apparatus 10 will be described more specifically.

FIG. 3 shows the CPU 2 in the first evaluation process.
1 shows an operation procedure. As shown in the figure, at the start of the first evaluation process, the CPU 21 displays a data input dialog box to display a file name used when saving the sample data, a comment on the evaluation target sample, and a reference data file ( The file name of an optical property data file holding optical property data used as reference data is obtained from the evaluator (step S201).

Next, the CPU 21 waits for an input of an evaluation start instruction from the evaluator (a predetermined operation is performed on the input device 12) (step S202). Then, when the evaluation start instruction is input, step S2
In step 03, a measurement start instruction command is sent to the infrared spectrometer 30. If the measurement condition has been changed, the CPU 21 also performs a process of notifying the infrared spectrometer 30 of the measurement condition in step S203.

Thereafter, the CPU 21 waits for the infrared spectrometer 30 to send a measurement end notification (step S204). When the infrared spectrometer 30 sends the measurement end notification, the infrared spectrometer 3
From 0, a measurement result (optical property data of a sample to be evaluated) is acquired, and the optical property data is used as sample data in a RAM.
23 and an HDD (auxiliary storage unit 24)
(Step S205). The storage of the sample data in the RAM 23 is performed in a form associated with the comment and the file name obtained from the evaluator in step S201. The storage of the sample data in the HDD includes the sample data and the comment obtained in step S201,
This is performed by creating a file having the file name acquired in step S201 in the HDD.

Next, the CPU 21 proceeds to step S201.
The contents (comment and reference data) of the optical property data file identified by the reference data file name acquired in
DD, and stores it in the RAM 23 (step S
206). Then, based on the reference data and the sample data prepared on the RAM 23, an evaluation screen including a graph showing the correlation between the absorbances in both data is displayed on the display 11 (step S208).

Here, the CPU 21 in step S208 will be described with reference to FIG. 4 showing an example of the evaluation screen.
Is specifically described. As illustrated, the evaluation screen 50 is a screen having a graph area 51 and buttons 52 to 55. When forming the graph area 51 of the evaluation screen 50, the CPU 21 obtains the maximum value of the absorbance contained in the reference data and the sample data, and based on the maximum value, the value used as the maximum value of the X and Y coordinate axes ( In the figure, "0.25") is determined. And graph area 5
1, the intersection point is at the position of the absorbance (0,0), the X-axis and the Y-axis are the determined values being the maximum values, some scale labels ("0.00", "0.05", etc.) and scales The plot area 61 with the auxiliary line is displayed. Also, a comment about the reference data (“DATA001” in the figure) is displayed as the axis title 63 of the X coordinate axis, and a comment about the evaluation data (“DATA101” in the figure) is displayed as the axis title 64 of the Y coordinate axis. I do.

Further, the CPU 21 sets the plot area 6
In 1, data points 62 are displayed (drawn) with the X and Y coordinate values of the absorbance in the reference data and the absorbance in the evaluation characteristic data for the same wave number. Note that the CPU 21
Performs the display of the data point 62 only for each absorbance included in the reference data whose corresponding wave number falls within the range specified by the display range specification data.

Further, the CPU 21 obtains a correlation coefficient ρ between absorbances used for displaying the data points 62 and a coefficient of a regression linear equation approximating the displayed series of data points 62. Further, the CPU 21 calculates the SN ratio η based on the following equation.
In the following equation, y _i (i = 1 to n) is a deviation from the average value of the absorbance in the sample data (from a certain absorbance in the sample data used for displaying the data point 62, X _i (i = 1 to n) is y _i , which is the value obtained by subtracting the average value of the absorbances in the n sample data used for the display.
It is a deviation from the average value of the absorbance in the reference data for the same wave number as.

[0034]

(Equation 1)

Then, an approximate straight line 65 represented by a linear equation having the obtained coefficient is displayed in the plot area 61, and the equation, the correlation coefficient ρ and the SN ratio η are expressed by:
It is displayed in the information display area 66.

After the evaluation screen is displayed on the display 11 in such a procedure, the CPU 21 prints the graph, changes the size, changes the reference data, and the like in accordance with the evaluator's operation on the input device 12. Print /
A change process (FIG. 3: step S208) is executed.

At the time of this printing / change processing, the CPU 21 operates as follows. When the print button 52 is pressed by the evaluator (an operation indicating that the print button 52 is pressed is performed on the input device 12), the CPU 21 sends the print data representing the contents of the graph area 51 to the interface circuit 27. To the printing device 13 via the printer.

When the option button 53 is pressed, a dialog box for changing the shape and size of the data point 62, the maximum and minimum values of each coordinate axis, display range information, and the like is displayed on the evaluation screen 50. I do. Then, the display content in the dialog box is changed according to the operation content on the input device 12, and when an operation indicating the end of the setting is performed, the dialog box is deleted and the display of the graph area 51 is performed. Change the content according to the instructions in the dialog box.

When the reference change button 54 is pressed, C
The PU 21 displays a dialog box for inputting the file name of the reference data file. And when the file name is entered in that dialog box,
Optical property data in a file having the file name,
The comment is read from the HDD and stored in the RAM 23 as the reference data and a comment on the reference data.
Next, the graph area 51 is redisplayed using the reference data, the sample optical characteristic data, and the like.

When recognizing that the operation of selecting the end button 55 has been performed, the CPU 21 ends the print / change processing (FIG. 3: step S208) and restarts the processing from step S102 in FIG. ,Start.

Next, the operation at the time of the second evaluation processing will be described.

FIG. 5 shows an operation procedure of the CPU 21 in the second evaluation processing. As shown in the figure, at the start of the second evaluation process, the CPU 21 displays a dialog box for inputting data, thereby displaying a comment on the sample to be evaluated and a file name used when saving the optical characteristic data of the sample to be evaluated. , Total measurement count data N _MAX , j-th (j =
From the evaluator, information indicating the number of minutes after the first measurement (hereinafter, referred to as measurement interval information), a reference data file name used in each measurement, and the like are obtained from the evaluator (step 2 to N _MAX ). S301).

Thereafter, the CPU 21 waits for an input of an evaluation start instruction from the evaluator (step S30).
2). Then, when the evaluation start instruction is input, based on the current time (input time of the evaluation start instruction), the total measurement number data N _MAX, and the measurement interval information, the times at which the second to N _MAX times of measurement should be performed are respectively set. Calculate (Step S
303). Next, "1" is set to a variable j used as a counter of the number of measurements (step S304), and a measurement start instruction command is sent to the infrared spectrometer (step S305).

Then, the CPU 21 waits for the infrared spectrometer 30 to transmit the measurement end notification (step S306). Then, the optical characteristic data is obtained from, and the optical characteristic data is stored as sample data on the RAM, and is also stored as a file in the HDD (step S307). Also, based on the N _MAX reference data file names acquired in step S301, j
The reference data for the second measurement is read from the HDD and RA
It is stored in M23 (step S308).

Then, based on the reference data and the sample data read on the RAM 23, the CPU 21 sets a plurality of points having the X and Y coordinate values of the absorbance of the reference sample and the absorbance of the sample to be evaluated for the same wavelength. Are displayed and an evaluation screen including a graph on which a regression line is drawn is displayed on the display 11 (step S309). The evaluation screen displayed in this step is the same as the evaluation screen described with reference to FIG.

[0046] Then, CPU 21 may adds "1" to the j (step S310) and, if j is equal to or less than N _{MA X;} (step S311 YES), the print / modify & standby process (step S312) I do.

During the printing / change / standby processing, the CPU 21
Is the printing / printing performed in step S208 described above.
The same processing as the change processing is performed. However, the evaluation screen 50
The print / change / standby process is ended when the j-th measurement time is reached without pressing the end button 55 of (1). Before the j-th measurement time, the evaluation screen 5 is displayed.
When the “0” end button 55 is pressed, the evaluation screen 50 is erased, and a message indicating that it is waiting for the j-th measurement time is displayed on the display 11. Then, when the j-th measurement time has come, the print / change / standby process ends.

When the j-th measurement time comes after the print / change waiting process is completed, the CPU 21 proceeds to step S305.
The process from is executed again. That is, when the j-th measurement time has come, the CPU 21 proceeds to step S305, and sends a j-th measurement start instruction to the infrared spectrometer 30. Then, an evaluation screen including a graph in which the sample data obtained by the j-th measurement in the procedure described above is compared with the reference data for the j-th measurement is displayed.
(Steps S306 to S309).

Then, "1" is added to j (step S3).
10) and j is equal to or _smaller than N _MAX (step S3)
11; YES), print / change / standby processing (step S312) is performed. On the other hand, j may have exceeded the N _MAX; (step S311 NO), after the same print / changing process and the processing being executed executed (step S313) in step S208, and ends the second evaluation process (Figure 2
Return to step S102).

Next, the operation of the state evaluation support apparatus 10 during the third evaluation processing will be described.

FIG. 6 shows an operation procedure of the CPU 21 at the time of the third evaluation processing. As shown in FIG.
U21 first obtains the file name of the sample data and the file name of the reference data from the evaluator by displaying the data input dialog box (step S401).
Then, the contents of the two files identified by the acquired file names are read onto the RAM 23 (step S40).
2).

Next, based on the reference data and the sample data read on the RAM 23, a plurality of points are plotted with the absorbance of the reference sample and the absorbance of the sample to be evaluated for the same wavelength, respectively, as X and Y coordinate values. , Display an evaluation screen including a graph on which a regression line is drawn
1 (step S403). This step S4
In 03, the CPU 21 displays an evaluation screen obtained by adding a data change button to the evaluation screen shown in FIG.
The print / change process, which is substantially the same as the print / change process performed in step S208, except that the process is terminated when the data change button on the evaluation screen is pressed (step S404). Execute

After the print / change processing is completed, the CPU 21
If the print / change processing has been completed by pressing the data change button (step S405; change), the processing from step S401 is executed again. On the other hand, if the print / change processing has been ended by pressing the end button 55 (step S405; end), the third evaluation processing ends, and the process returns to step S102.

As described above, the state evaluation support apparatus 10 according to the present embodiment has shown a correlation between the absorbance in the reference data and the absorbance in the evaluation data (optical characteristic data of the sample to be evaluated). It is configured to display a graph. Further, the graph can easily determine whether the state of the evaluation target sample is a target state (a state represented by reference data).

Specifically, as described above, the measurement result of a spectrometer such as an infrared spectrometer may be affected by noise, baseline drift, sample arrangement, and differences in dimensions. However, when the sample data is not affected by such an instrumental error, the condition evaluation support apparatus 10 uses the absorbance in the sample data and the absorbance in the reference data as shown in FIG. Is plotted very close to a straight line that passes through the origin and has a slope of about “1” and has a correlation coefficient ρ close to “1”.
Then, a graph showing a relatively large SN ratio η is displayed.

When the sample data is affected only by the noise, as shown in FIG. 7, the data point substantially passes through the origin and is close to a straight line having a slope of about "1". The graph plotted in is displayed. However, in this case, each data point is plotted at a position distant from the straight line as compared with the case where no noise is present (see FIG. 4). Also, the correlation coefficient ρ and the SN ratio η show smaller values than when no noise is present.

If the baseline drifts as a whole when the sample data is measured, the graph displayed by the state evaluation support apparatus 10 is, for example, as shown in FIG. Become. That is, each data point is plotted near a straight line that does not pass through the origin but has a slope of approximately “1”, and has relatively high values of correlation coefficient r and SN.
The ratio η is as shown. If the form of the drift of the baseline is not as simple as described above, for example, a graph in which the slope of the approximate straight line is not “1”, a characteristic value in the sample data and a characteristic value in the reference data, A graph in which a strong relationship with the value is recognized is displayed.

When the arrangement and dimensions of the samples were different, as shown in FIG. 9, each data point was plotted on a straight line substantially passing through the origin, having a slope different from "1". Is displayed. In addition, relatively high values of the correlation coefficient ρ and the SN ratio η are shown.

On the other hand, when the sample to be evaluated is a sample that has not reached the target state or a sample in which a foreign substance has been formed, the data points are not on a straight line as shown in FIG. The graph plotted on the curve will be displayed.

As described above, the graph displayed by the present state evaluation support apparatus 10 basically determines whether or not the state of the sample to be evaluated is the target state based on whether or not the data points are plotted linearly. Can be determined.

Further, a change in the optical characteristic data of the sample when the process normally proceeds is measured in advance,
By executing the second evaluation process, it is possible to determine whether the progress speed of the process is slower or faster than the normal speed. That is, adjustment of the progress speed of the process (process control) can be performed.

Hereinafter, the process control using the second evaluation process will be described more specifically with reference to FIG. The four graphs shown in FIG. 11 are obtained when the process in which the absorbance decreases with the elapse of time is evaluated by the second evaluation process, and the graphs (a) to (b) are obtained.
(D) shows the results immediately after the start of the process, 15 minutes later,
It is created based on data measured after 0 minutes and 60 minutes. That is, FIG. 11 is a diagram showing a result of executing the second evaluation process when an evaluation start instruction is input and an instruction to perform measurement is given 15, 30, and 60 minutes after the input.

In the graph (a) shown in FIG. 11, the data points have a slope of “1” and are plotted on a straight line passing through the origin. Therefore, when this graph is displayed, the evaluator can recognize that the process has started in a normal state, and the arrangement of the sample and the like are also normal.

On the other hand, a graph (b) displayed after 15 minutes
In this case, the slope of the approximate straight line has a value significantly different from “1”. Further, the correlation coefficient ρ and the SN ratio η are also small values. Since the process to be evaluated is a process in which the absorbance decreases with the passage of time, the evaluator can determine from the graph (b) that the process is progressing too much, and delay the progress of the process. Measures can be taken. If the reference data after 20 minutes, 25 minutes, or the like is stored in the HDD, the reference data is changed while this graph is displayed (the print / change / standby process in step 312). By pressing the reference change button 54 during this), it is possible to determine how much the process is advanced (or delayed).

When the progress speed of the process can be reduced appropriately, as shown in graphs (c) and (d), the slope of the approximate straight line and the correlation coefficient ρ become “over time” as shown in graphs (c) and (d). A graph that is close to 1 ″ and indicates that the SN ratio η has increased is displayed on the display 11.

As described above, according to the state evaluation support apparatus according to the present embodiment, even if the optical characteristic data measured for the evaluation target sample includes a mechanical error, the state of the evaluation target sample is the target. The evaluator can easily and quickly determine whether or not.

The state evaluation support apparatus according to the embodiment is an apparatus that operates by acquiring data including absorbance from an infrared spectrometer, but transmits data including transmitted light intensity from the infrared spectrometer. Acquisition, the state evaluation support device may be configured to calculate the absorbance from the data,
The state evaluation support device may be configured so that a graph in the above-described form is created and displayed based on an optical characteristic value other than the absorbance. Further, only the graph printing function may be provided without providing the graph displaying function.

Although the state evaluation support apparatus according to the embodiment has a program developed for this apparatus installed in a general computer, the state evaluation support apparatus may be realized as a dedicated apparatus. It may be realized as one function of an optical measuring device such as an infrared spectrometer.

[0069]

According to the present invention, it is possible to evaluate whether or not the evaluation target sample is in a target state even if the optical property data measured for the evaluation target sample includes a mechanical error. Can easily and quickly make a decision.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a hardware configuration of a state evaluation support device according to an embodiment of the present invention.

FIG. 2 is a flowchart showing an overall operation procedure of the state evaluation support device according to the embodiment.

FIG. 3 is a flowchart of a first evaluation process executed in the state evaluation support device according to the embodiment.

FIG. 4 is an explanatory diagram of an evaluation screen displayed when the state evaluation support device according to the embodiment operates.

FIG. 5 is a flowchart of a second evaluation process executed in the state evaluation support device according to the embodiment.

FIG. 6 is a flowchart of a third evaluation process executed in the state evaluation support device according to the embodiment.

FIG. 7 is an explanatory diagram of a graph displayed by the state evaluation support device according to the embodiment.

FIG. 8 is an explanatory diagram of a graph displayed by the state evaluation support device according to the embodiment.

FIG. 9 is an explanatory diagram of a graph displayed by the state evaluation support device according to the embodiment.

FIG. 10 is an explanatory diagram of a graph displayed by the state evaluation support device according to the embodiment.

FIG. 11 is an explanatory diagram of a graph displayed by the state evaluation support device according to the embodiment during a second evaluation process.

FIG. 12 is an explanatory diagram of a conventional display form of optical characteristic data.

[Explanation of symbols]

 Reference Signs List 10 state evaluation support device 11 display 12 input device 13 printing device 14 control device 21 CPU 22 ROM 23 RAM 24 auxiliary storage unit 25 display control circuit 26 to 28 interface circuit 29 bus 30 infrared spectrometer

Claims (7)

[Claims] 1. A state evaluation support device for evaluating a state of an evaluation target sample based on optical characteristic data including a plurality of characteristic values respectively associated with different wavelengths, wherein: Storage means for storing reference data, which is optical property data representing a target state; input means for inputting sample data, which is optical property data of the sample to be evaluated; and sample data input by the input means. From a plurality of characteristic values included and a plurality of characteristic values included in the reference data stored in the storage means, a set of a characteristic value in the sample data and a characteristic value in the reference data associated with the same wavelength is determined. It is characterized by comprising a specifying means for specifying all, and a graph output means for outputting a graph in which data points having coordinates of two characteristic values constituting each set specified by the specifying means are drawn. State evaluation support apparatus according to. 2. The storage unit stores a plurality of reference data, and one of the plurality of reference data stored in the storage unit.
Selecting means for selecting two pieces of reference data, wherein the specifying means includes a plurality of characteristic values included in the sample data input by the input means and a reference stored in the storage means selected by the selecting means. 2. The state evaluation according to claim 1, wherein all sets of a characteristic value in the sample data and a characteristic value in the reference data associated with the same wavelength are specified from among a plurality of characteristic values included in the data. Support equipment. 3. A designating means for designating a wavelength range,
The apparatus further comprises: the specifying unit specifies all the pairs of the characteristic value in the sample data and the characteristic value in the reference data associated with the same wavelength falling within the wavelength range specified by the specifying unit. 3. The state evaluation support device according to claim 1, wherein 4. A coefficient of a linear equation indicating a linear covariant relationship between a characteristic value in sample data and a characteristic value in reference data based on a set of characteristic values specified by the specifying means. The graph output means outputs a graph in which a line segment indicated by the linear equation having a coefficient calculated by the calculation means is drawn. The state evaluation support device according to claim 3. 5. The calculating means calculates a coefficient of the linear equation, and calculates a linear covariance of a relationship between a characteristic value in the sample data and a characteristic value in the reference data by the linear equation. A value indicating a magnitude of a deviation from the relationship is calculated, and the graph output unit outputs a graph indicating a value indicating the magnitude of the deviation calculated by the calculation unit. 4. The state evaluation support device according to 4. 6. A state evaluation method for evaluating a state of a sample to be evaluated based on optical property data including a plurality of characteristic values respectively associated with different wavelengths, wherein: From among a plurality of characteristic values included in the reference data that is the optical characteristic data representing the state and a plurality of characteristic values included in the sample data that is the optical characteristic data of the evaluation target sample, they are associated with the same wavelength. A specifying step of specifying all the pairs of the characteristic values in the sample data and the characteristic values in the reference data, and configuring each set specified in the specific step 2
A graph output step of outputting a graph in which data points having two characteristic values as coordinates are drawn. 7. A state evaluation support apparatus for evaluating a state of a sample to be evaluated based on optical property data including a plurality of property values respectively associated with different wavelengths, the computer comprising: Storage means for storing reference data, which is optical property data representing a target state of the target sample; input means for inputting sample data, which is optical property data of the evaluation target sample; From a plurality of characteristic values included in the sample data and a plurality of characteristic values included in the reference data stored in the storage means, a characteristic value in the sample data and a characteristic value in the reference data associated with the same wavelength are selected. Specifying means for specifying all of the sets; and graph output means for outputting a graph in which data points having coordinates of two characteristic values constituting each set specified by the specifying means are drawn. Recorded computer-readable recording medium a program for operating as a state evaluation support apparatus comprising.