JP2000303223A - Rubber-made gloves or fingerstall and casing capable of using the same and projection-exposure device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide rubber-made gloves or fingerstalls capable of handling optical parts. SOLUTION: Rubber made gloves and fingerstalls are pre-treated with an organic solvent. When the treated rubber made gloves or fingerstalls are brought to contact with the organic solvent during their use, materials do not eluted from the rubber made gloves or fingerstalls. The rubber made gloves or fingerstalls of this invention are used, e.g. by fitting to a case surrounding optical parts.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rubber glove or finger sack which can be used for handling semiconductor devices and the like manufactured in a clean environment, and a casing to which the rubber glove or the finger sack can be attached. Further, the present invention relates to a projection exposure apparatus provided with the casing.

[0002]

2. Description of the Related Art In the field of semiconductor device manufacturing, the wavelength of a light beam used for exposure of an integrated circuit on a silicon substrate or the like is shifted to a shorter wavelength side than before in accordance with the improvement in the degree of integration. In order to obtain a beam of such a wavelength, optical components such as a plurality of optical lenses are used in an optical system such as an exposure apparatus. Generally, these optical components are surrounded by a casing to prevent contamination by impurities and absorption of a light beam by oxygen or the like, and furthermore, the atmosphere around the optical components is replaced by an inert gas to provide a clean environment. ing.

[0003]

In manufacturing a semiconductor device, a person wears rubber gloves or finger cots to assemble, repair, or maintain equipment such as a projection exposure apparatus. Often, the user must touch the optical components. In such a case, as the rubber gloves or finger cots, rubber gloves or finger cots corresponding to a clean room washed with pure water are usually used. In some cases, an organic substance adheres to the glass and the optical characteristics of the optical component change. Contamination of optical components with organic matter is a serious problem particularly when a short wavelength fine light beam is used in order to obtain a high degree of integration. This results in unreliable results.

On the other hand, when handling optical components directly, if the optical components to be handled are present inside the casing and the atmosphere in the casing has already been replaced by an inert gas or the like, usually, After the casing is opened and the inert gas and the like inside is released to the outside, adjustment of optical components and the like are performed. However, such an operation increases the usage amount of the inert gas and the like and increases the manufacturing cost. I will.

[0005] In addition, even if the interior of the casing is again brought into the inert gas atmosphere after the adjustment of the optical parts, the optical parts inside the casing may need to be readjusted for some reason. In such a case, usually, the casing is opened again to release the inert gas to the outside, and then readjustment is performed. Such re-opening of the casing not only increases the manufacturing cost, but also prolongs the time required for manufacturing the semiconductor device and causes deterioration of the manufacturing efficiency.

An object of the present invention is to solve the above-mentioned problems. That is, an object of the present invention is to provide a rubber glove or finger cot that can handle an optical component such as an optical lens without being contaminated by an organic substance. Another object of the present invention is to provide a novel casing suitable for use in a projection exposure apparatus having a mechanism capable of adjusting an optical component without releasing an inert gas around the optical component to the atmosphere. To provide.

[0007]

The above objects of the present invention are attained by a rubber glove or finger sack which is characterized by being treated with an organic solvent, and is further characterized by applying a unit volume of a liquid and drying the quartz. Wavelength 19 on glass substrate surface
Regarding the reflectance change characteristics in the range of 0 to 230 nm, the reflectance change characteristics when an organic solvent not in contact with the rubber glove or finger sack is used as the liquid is referred to as a first reflectance change characteristic, and the liquid is used as the liquid. In the case where the reflectance change characteristic when the organic solvent is used in contact with the rubber glove or finger sack at a rate of 1 cm ³ per 1 cm ^{2 of} surface area for 1 hour or more is used as the second reflectance change characteristic, This can also be achieved by a rubber glove or finger sack that satisfies the condition that the wavelength shift amount of the second reflectance change characteristic with respect to the reflectance change characteristic is 1 nm or less.

It is another object of the present invention to provide a rubber glove or finger cot which is treated with an organic solvent and has a wavelength of 190 to 230 nm on the surface of a quartz glass substrate which is dried after applying a unit volume of liquid. Regarding the reflectance change characteristic, the same component as the organic solvent treated with the rubber glove or finger sack as the liquid, and when the rubber glove or finger sack and the non-contact organic solvent for extraction are used The reflectance change characteristic is defined as a first reflectance change characteristic, and the rubber glove or finger sack and the surface area of 1 cm are used as the liquid.
^When the reflectance change characteristic obtained by using the extraction organic solvent contacted for 1 hour or more at a rate of 1 cm ³ per ² is used as the second reflectance change characteristic, The wavelength shift amount of the second reflectance change characteristic is 1
It can also be achieved by a rubber glove or finger sack that satisfies the condition of nm or less. Note that the organic solvent is preferably an alcohol, an ether, a ketone, or a mixture thereof.

Another object of the present invention is to provide a casing for surrounding an optical component and filling the surrounding with a specific atmosphere, wherein the optical component in the casing is provided on a wall surface constituting the casing. This is achieved by a casing, wherein an airtight operating means for operating from outside the casing is attached.
It is preferable to use the rubber gloves or finger cots as the operation means.

Preferably, the casing has at least two wall surfaces, and the wall surface to which the operation means is attached is detachable from another wall surface, and the operation means is provided in the casing. It is preferable that a housing member for housing is provided. A window for checking the inside and / or an air lock for carrying in / out parts may be formed on a wall surface of the casing. A casing having these features can be suitably used as a component of a projection exposure apparatus.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, rubber gloves or finger cots of the present invention will be described. Rubber gloves or finger cots made from natural or synthetic rubber
Various additives such as anti-aging agents, softeners, plasticizers, coloring agents, vulcanizing agents are included in addition to natural rubber or synthetic rubber to obtain appropriate rubber elasticity and physical and chemical durability. . The present inventors have recognized this general fact regarding rubber gloves or finger cots, and the use of clean room compatible rubber gloves or finger cots to handle optical components such as optical lenses, especially when using organic solvents. Focusing on the fact that the degree of organic matter contamination of the optical component in the presence is large, and as a result of intensive studies, the organic matter contaminating the optical component remains on the surface or inside of the rubber glove or finger sack even after washing with pure water. The present invention was completed by elucidating the origin of trace amounts of additives and removing the residue from rubber gloves or finger cots to an optically acceptable range.

That is, in the present invention, almost all additives causing organic contamination of optical components are removed from a rubber glove or finger sack in advance, and the rubber glove or finger sack is brought into contact with an organic solvent. The additive is prevented from being eluted from the sack. Therefore, even if the optical component is handled through the rubber glove or the finger cot of the present invention in the presence of the organic solvent, the optical component is not contaminated by the organic substance and the optical characteristics thereof are not affected. Hereinafter, the rubber glove or finger cot of the present invention will be described in more detail.

[0013] The rubber glove or finger sack of the present invention can be used in addition to natural rubber, butadiene rubber, styrene-butadiene rubber, isoprene rubber, ethylene-propylene rubber, butyl rubber, chloroprene rubber, nitrile rubber, acrylic rubber, urethane rubber, Synthetic rubber such as silicone rubber, fluorine rubber, polyether rubber, polysulfide rubber, chlorosulfonated polyethylene rubber and the like can be used as a main raw material, but it is preferable to use natural rubber in view of chemical resistance. Not only a single rubber component but also a mixture of two or more rubber components may be used as a main raw material. Further, the rubber glove or finger sack of the present invention may have a single-layer structure, a laminated structure having a plurality of layers composed of different rubber components, or a metal mesh, a metal foil, a polyamide fiber in addition to the rubber layer. May have a laminated structure provided with a layer made of a component other than rubber, such as a lining made of fibers such as.

The rubber glove or finger cot of the present invention can be produced by a molding method such as dip molding generally used for the production of rubber gloves or finger cots. That is, for example, first, a rubber solution serving as a main raw material, a latex, a paste made of a plastisol or an organosol is prepared, and then a hand or finger mold is immersed in the paste and pulled up to form a thin film on the surface of the mold. The rubber can be applied, dried or heated to gel or vulcanize, and then removed from the mold to form a product. In addition,
Rubber gloves or finger cots with a laminated structure are preliminarily coated on the mold surface with a layer made of a component other than rubber, such as a different rubber component layer or a fiber layer, or various rubber solutions,
It can be manufactured by repeating a process of dipping, lifting, drying or heating a latex or the like.

In producing the rubber gloves or finger cots of the present invention, various additives generally used in the production of rubber gloves and finger cots can be added to the rubber raw material as required. . Examples of such additives include antioxidants. Specific examples thereof include N-methyl-N-propylbutylamine, N, N-dibutylformamide, N-dibutylamine, and phenyl-α. -Naphthylamine, 4,4'-dioctyldiphenylamine, N, N'-di-β-naphthyl-p-phenylenediamine, N, N'-diphenyl-p
-Phenylenediamine, N-phenyl-N'-cyclohexyl-p-phenylenediamine, N, N'-di-o-
Amine or amide antioxidants such as tolyl-ethylenediamine, alkylated diphenylamine, hydroquinone monobenzyl ether, 2,6-di-tert-butylphenol, 2,6-di-tert-butyl-p-cresol, 2,4, 6-tri-tert-butylphenol, 4,4'-bis (3,5-di-tert-butylphenol), bis (4-oxy-2,6-di-tert)
-Butylphenyl) methane and the like, or an alkylaryl phosphite-based antioxidant such as triphenyl phosphite and nonylphenyl phosphite. These antioxidants may be used alone or in combination of two or more.

Further, other additives include dibutyl phthalate, diheptyl phthalate, dioctyl phthalate,
Phthalates such as diisodecyl phthalate, tricresyl phosphate, phosphates such as trioctyl phosphate, tri-n-butyl citrate, dioctyl adipate, dioctyl azelate, dioctyl sebacate,
Plasticizers and softeners consisting of fatty acids, such as methyl acetyl ricinoleate, alkyl epoxy stearate, epoxidized soybean oil, epoxy compounds, such as diisodecyl 4,5-epoxytetrahydrophthalate, or mixtures thereof;
A vulcanizing agent comprising sulfur, zinc white, magnesia, P-quinone-dioxime, organic peroxide, azo compound, and the like;
Xanthate, thiuram, dithiocarbamate,
Vulcanization accelerators such as thiazole, aldehydeamine, guanidine and aldehyde ammonia; organic colorants such as azo and anthraquinone or inorganic colorants such as various metal oxides; carbon black, silica, clay, and dioxide Known additives such as fillers such as titanium, calcium carbonate, barium sulfate, mica, diatomaceous earth, talc, and zinc oxide can be used alone or in combination of two or more.

Such additives can be almost completely removed from rubber gloves or finger cots by, for example, treatment with an organic solvent as described below, but from the surface or inside when used in the presence of an organic solvent. In order to minimize the possibility of dissolution of the additive, it is preferable that the amount of the additive be kept to a minimum.

The rubber glove or finger cot thus manufactured is then removed to a predetermined level with additives present on the surface and inside thereof to obtain the rubber glove or finger cot of the present invention. . The method of removing the additives is not particularly limited, but in order to extract the additives from the rubber gloves or finger cots with a simple operation and efficiently, a method of treating these with an organic solvent is required. preferable. Here, “treatment” refers to bringing a rubber glove or finger sack into contact with an organic solvent in some form. The type of organic solvent should have the same or similar chemical properties as the organic solvent that comes into contact with the glove or finger cot at the stage of using the rubber glove or finger cot. It is more preferable from the viewpoint.

In the present invention, the organic solvent used for treating rubber gloves or finger cots is methyl alcohol, ethyl alcohol, isopropyl alcohol, 2-
Alcohol solvents such as propanol; ketone solvents such as dimethyl ketone, methyl ethyl ketone and isobutyl methyl ketone; ether solvents such as diethyl ether, methyl ethyl ether and ethylene glycol monoethyl ether; esters such as ethyl acetate and ethylene glycol monobutyl ether acetate Solvents, aromatic hydrocarbon solvents such as benzene and toluene, chlorine solvents such as tetrachloroethylene and trichloroethane, CF
C-12, CFC-13 and other fluorocarbon solvents, naphthenes, linear paraffins, branched paraffins and other aliphatic hydrocarbon solvents, aniline, pyridine and other nitrogen compound solvents, and diethyl acetal and other acetal solvents. ,
Heterocyclic compound solvents such as furfural, acetic acid, acid solvents such as propionic acid, known organic solvents such as sulfur derivative solvents such as sulfolane, and mixtures of these various solvents can be mentioned, but handling is easy. From the viewpoint of properties and cost, it is preferable to use an alcohol-based, ether-based, ketone-based organic solvent or a mixture thereof. In particular, diethyl ether: methyl alcohol =
A mixed organic solvent mixed at a ratio of 4: 1 is preferred. However, some natural rubber and synthetic rubber may be dissolved in the organic solvent depending on the type of the organic solvent.
The kind of the organic solvent actually used in the present invention is appropriately selected from the known organic solvents as described above according to the kind of rubber constituting the rubber glove or finger sack to be treated. Is preferred. When natural rubber is used as a constituent material of the rubber glove or the finger cot, it is preferable to use ethers as the organic solvent in terms of the effect of extracting the additive.

The form of treatment with an organic solvent is not particularly limited, and specifically, a method of immersing a rubber glove or finger sack in the above-mentioned organic solvent for a predetermined time, a method of immersing the organic solvent from a nozzle through a rubber glove, Alternatively, a method of radiating toward the surface of the finger sack, a method of wiping the surface of the rubber glove or the finger sack with a member impregnated with an organic solvent, or the like can be used. The temperature of the organic solvent is not particularly limited, but is preferably set to an appropriate temperature for each type of organic solvent in order to enhance the effect of extracting the additive.
Note that a mechanical treatment may be performed in parallel with or after the treatment with the organic solvent by bringing a brush, a brush, a roll, or the like into contact with the surface of the rubber glove or the finger sack. In addition, in order to enhance the effect of extracting the additive by the organic solvent,
Prior to the treatment with the organic solvent, it is preferable that the rubber gloves or finger cots are washed with pure water in advance.

[0021] In this way, for example, by performing a treatment with an organic solvent, the additive contained in the rubber glove or the finger cot of the present invention is changed into an optical component or the like by contact with the glove or the finger cot. Almost completely removed to a level that is not contaminated. Whether the rubber glove or the finger cot of the present invention is at an acceptable level for handling optical components or the like can be confirmed by an optical evaluation method. Hereinafter, a method for optically evaluating a rubber glove or a finger cot according to the present invention will be described.

First, a rubber glove or finger cot is immersed in a predetermined type of organic solvent for a predetermined time. In order to ensure good contact with the organic solvent, and to perform a quantitative evaluation, the rubber glove or finger sack to be evaluated is preferably cut into pieces having a predetermined surface area, for example, 3 cm in width.
× Cut into a rectangular shape with a length of 2 cm, and the fragments are immersed in an organic solvent. Wherein the amount of organic solvent used is appropriately adjusted according to the surface area of rubber gloves or finger cots are immersed, of the surface area 1 cm ² rubber gloves or finger cots in the present invention, an organic solvent The amount is adjusted so that is contacted at a rate of 1 cm ³ . Therefore, for example, when immersing a part of a rubber glove or a finger sack cut into a rectangular shape of 3 cm wide × 2 cm long in an organic solvent, the amount of the organic solvent is 3 cm in consideration of the total surface area of the front and back surfaces. × 2 cm × 2 = 12 cm ³ .

Next, a predetermined volume of the organic solvent in which the rubber glove or the finger sack to be evaluated is immersed for a predetermined time is collected and applied to the surface of a quartz glass substrate for evaluation having a predetermined size. The organic solvent applied to the surface of the quartz glass substrate for evaluation is then dried. The coating amount of the organic solvent is appropriately adjusted according to the surface area of the quartz glass substrate and the like. For example, when the diameter of the quartz glass substrate is 1 to 3 cm, the coating amount of the organic solvent is 0.01 to 1 cc. It is set appropriately. The application means is not particularly limited, but it is preferable to use a brush, a roll, or a wiping member such as absorbent cotton impregnated with an organic solvent. The organic solvent is preferably dried by natural drying.

As shown in the conceptual diagram of FIG. 1, a light beam L having a relatively short wavelength in the range of 190 to 230 nm is applied to the quartz glass substrate for evaluation on which the organic solvent has been applied and dried as described above. The reflected light R of the light beam which is irradiated and is reflected by the surface of the quartz glass substrate is monitored by detecting means (not shown). The irradiation angle of the light beam L on the surface of the quartz glass substrate is appropriately adjusted as necessary. In the embodiment shown in FIG. 1, the angle between the perpendicular V on the surface of the quartz glass substrate and the irradiation direction of the light beam L is determined. Irradiation angle θ
, The irradiation angle θ is 1 to 60 °, preferably 1
It is set appropriately within the range of 0 to 30 °. The most preferable angle of the irradiation angle is 12 °. Then, the reflectance on the substrate surface is calculated from the intensity of the light beam L applied to the quartz glass substrate for evaluation and the intensity of the reflected light R detected by the detection means.

By the way, under the irradiation conditions shown in FIG. 1, the reflectivity generally changes depending on the wavelength of the light beam irradiated on the surface of the quartz glass substrate. The change pattern is influenced by the substance existing on the surface of the quartz glass substrate. Greatly receive. Therefore, in the optical evaluation method of the present invention, 190
Regarding the change pattern of the reflectance when the light beam is irradiated on the surface of the quartz glass substrate over a wavelength range of up to 230 nm (hereinafter referred to as “reflectance change characteristic”), an organic solvent not in contact with rubber gloves or finger cots The reflectance change characteristic obtained by monitoring the reflectance of the surface of the quartz glass substrate for evaluation coated and dried (hereinafter referred to as “first reflectance change characteristic”) and the rubber glove as described above. Alternatively, a reflectance change characteristic obtained by monitoring the reflectance of the surface of the evaluation quartz glass substrate on which the organic solvent in which the finger cot is immersed is applied and dried (hereinafter, referred to as a “second reflectance change characteristic”) ) To evaluate the rubber gloves or finger cots. In the optical evaluation method of the present invention, it is preferable to coat a suitable antireflection film on the surface of the quartz glass substrate for evaluation in order to adjust the level of reflection on the surface.

FIG. 2 is a conceptual diagram for explaining the evaluation of a rubber glove or a finger cot using the reflectance change characteristics in the optical evaluation method described above. In FIG. 2 (1)
Shows an example of the first reflectance change characteristic.
(2) shows an example of the second reflectance change characteristic. In FIG. 2, the horizontal axis represents wavelength and the vertical axis represents reflectance.

As shown conceptually in FIG. 2, when any organic substance is present on the surface of the quartz glass substrate for evaluation,
The second reflectance change characteristic is parallel translation (hereinafter, referred to as ΔS) in the wavelength axis direction based on the first reflectance change characteristic.
"Wavelength shift"). Also, the wavelength shift amount ΔS
Is correlated with the amount of the organic substance present on the surface of the quartz glass substrate for evaluation, that is, the amount of the organic substance in the organic solvent applied to the surface of the quartz glass substrate for evaluation. Therefore, by measuring the value of the wavelength shift amount ΔS, it is possible to evaluate the degree of elution of the organic substance from the rubber glove or the finger cot into the organic solvent. The smaller the wavelength shift amount ΔS, the smaller the amount of organic substances contained in the organic solvent applied to the surface of the quartz glass substrate, and the less the organic substances are eluted from the rubber glove or finger sack into the organic solvent. Indicates that

When the above-mentioned optical evaluation method was applied to the rubber glove or finger cot of the present invention which had been treated with an organic solvent, the second reflectance change characteristic obtained was
And the amount of the wavelength shift was 1 nm or less. Therefore, it was confirmed that the organic solvent in contact with the rubber glove or finger cot of the present invention hardly elutes additives from the rubber glove or finger cot. Then, even when the rubber glove or finger sack of the present invention comes into contact with the organic solvent immersed, the optical characteristics of the quartz glass substrate for evaluation hardly change,
Even when handling an optical component or the like in the presence of an organic solvent, the use of the rubber gloves or finger cots of the present invention reduces the risk of changing the optical characteristics of the optical component or the like. Therefore, the rubber glove or finger cot of the present invention can be suitably used for handling an optical component such as a lens which requires optical precision.

In the optical evaluation method of the present invention,
The immersion time of the rubber glove or the finger sack piece in the organic solvent is appropriately adjusted according to the remaining amount of the additive required for the rubber glove or the finger sack. Is preferred. The rubber glove or finger cot of the present invention preferably has such a property that the additive does not elute into the organic solvent even when immersed in the organic solvent for 12 hours or more, more preferably for 1 day or more.

By the way, the additive eluted from the rubber glove or finger sack upon contact with the organic solvent can be identified by mass spectrometry described below. Hereinafter, preferred modes of mass spectrometry will be described.

First, similarly to the above-mentioned optical evaluation method, a rubber glove or finger cot having a predetermined surface area is immersed in a predetermined amount of an organic solvent such as methyl alcohol for a predetermined time. Next, after drying the organic solvent, the remainder is heated by a solid tumbler to generate a gas, and this gas is trapped and concentrated at a low temperature to obtain a sample, and the sample is subjected to mass spectrum analysis by GCMS. . Specifically, it is preferable to use a rubber glove or an organic solvent contacted for 1 day at a rate of 1 cm ³ per 1 cm ^{2 of} finger sack. From the mass spectrum data thus obtained, the type of the additive and the amount present in the organic solvent can be identified.

The rubber gloves or finger cots of the present invention can be suitably used when directly handling optical components such as lenses. FIG. 4 is a schematic perspective view showing an example of a usage form of the rubber glove of the present invention, and shows a configuration of a casing 2 constituting a part of the projection exposure apparatus shown in FIG.

First, the schematic configuration of the projection exposure apparatus shown in FIG. 3 will be described. The projection exposure apparatus 50 projects and transfers a pattern (for example, a semiconductor element pattern) formed on the mask M onto a substantially circular wafer (substrate) W coated with a photosensitive agent. It is roughly composed of an illumination optical system 8, a mask stage 10, a projection optical system 11, a wafer stage (substrate stage) 16, and a focus detection system 12, which will be described later.

The light source unit 6 emits excimer laser light using ArF as a medium as exposure light B. The light beam B emitted from the light source unit 6 is reflected by the reflection mirror 7 and enters the illumination optical system 8.

Here, the configuration of the illumination optical system 8 will be described in detail. The light beam from the light source unit 6 enters the optical integrator 19 via the reflection mirror 7 and a condensing optical system (not shown). The optical integrator 19 is a fly-eye lens configured by bundling a number of lens elements. Further, an inner reflection type rod-shaped optical member may be used instead of the fly-eye lens. In the vicinity of the exit surface of the optical integrator 19 (at the position where the secondary light source is formed by the optical integrator), there is disposed a turret plate 20 on which a plurality of aperture stops having at least one of different shapes and sizes is formed. . The turret plate 20 is driven to rotate by a motor 21, and one aperture stop is selected according to the pattern of the mask M to be transferred onto the wafer W and inserted into the optical path. Light beams from a number of secondary light sources formed by the optical integrator 19 are reflected by the reflection mirror 9 through a relay lens 24, a variable field stop 23 defining a rectangular aperture, and the relay lens 24, and then reflected by a reflection mirror (not shown). The light is collected by the condenser lens. Thereby, the variable field stop 2
The uniform light flux defined by the three apertures illuminates the mask M in a superimposed manner.

The projection optical system 11 forms an image of a pattern existing in the illumination area of the mask M on the wafer W. The wafer stage 16 holds the wafer W, and is movable in directions orthogonal to each other (three-dimensional directions of X, Y, and Z). This wafer stage 16
A movable mirror 17 is provided above. A laser beam 18 is emitted from a laser interferometer (not shown), which is a position measuring device, to the movable mirror 17, and the distance between the movable mirror 17 and the laser interference system is determined based on the interference between the reflected light and the incident light. That is, the position of the wafer stage 16 (and thus the wafer W) is detected. The wafer stage 16
Is provided with a driving mechanism (not shown) for driving the wafer stage 16 such as a linear motor.

The focus detection system 12 is for optically detecting the height position (position in the Z direction) of the wafer W, and includes a light projecting system 13 for obliquely inputting measurement light to the wafer W, and a wafer W And a light receiving system 14 for receiving the measurement light reflected on the surface of the light emitting device.

Next, a description will be given of an example in which a rubber glove is used for the casing 2 accommodating the illumination optical system 8 in the exposure apparatus configured as described above. In the embodiment shown in FIG. 4, the above-mentioned illumination optical system 8 is surrounded by a casing 2 to which a rubber glove 1 of the present invention is attached, and a light beam emitted from a light source (not shown) is provided on a side surface of the casing 2. The light passes through the optical window 3 and passes through the illumination optical system 8 to be guided to the mask M in FIG. In the present embodiment, since the ArF excimer laser is used as the light source, the atmosphere in the casing 2 is an inert gas in order to prevent the light beam from being undesirably absorbed. In addition, as the inert gas, if necessary, nitrogen,
Various types of gases, such as argon gas, can be used. When a KrF laser is used as a light source, chemically clean dry air may be used instead of the inert gas. Dry air is one in which impurities are removed by a chemical filter made of activated carbon or the like and humidity is adjusted (for example, 5% or less).

As shown in the figure, in the present embodiment, the rubber glove 1 is attached to the casing 2 so that an operator can insert a hand from outside and use it.
Therefore, when repair, maintenance of the variable field stop 23, adjustment of the optical axis of the lens, replacement of the lens, etc. are necessary,
The optical component 3 can be handled directly from the outside via the rubber glove 1 without opening the casing 2.
As described above, in this embodiment, since the optical component 3 can be operated while maintaining the atmosphere in the casing 2, the opening of the casing 2 and the discharge and re-introduction of the inert gas, which are conventionally required, can be performed. And other steps can be omitted.

The number of the rubber gloves 1 attached to the casing 2 is not particularly limited, and an appropriate number of the rubber gloves 1 can be installed as needed. Further, the place where the rubber glove 1 is installed on the casing 2 is not particularly limited, and may be attached to a different wall surface constituting the casing 2 if necessary, or may be attached to the same wall surface. However, in order to prevent the external atmosphere from being mixed into the casing 2 and appropriately maintain the atmosphere in the casing 2, the joint between the rubber glove 1 and the casing 2 is preferably airtight.

The material of the rubber glove 1 is not particularly limited as long as it has airtightness. As described above, in addition to natural rubber, butadiene rubber, styrene-butadiene rubber, isoprene rubber, ethylene- Synthetic rubbers such as propylene rubber, butyl rubber, chloroprene rubber, nitrile rubber, acrylic rubber, urethane rubber, silicone rubber, fluorine rubber, polyether rubber, polysulfide rubber, and chlorosulfonated polyethylene rubber can be used. Not only a single rubber component but also a mixture of two or more rubber components may be used as a main raw material. The rubber glove 1 may have a single-layer structure, a laminated structure having a plurality of layers made of different rubber components, or a metal mesh, a metal foil, a fiber such as a polyamide fiber in addition to the rubber layer. A laminated structure including a layer made of a component other than rubber, such as a lining, may be used.

FIG. 5 is a schematic perspective view showing an example of a mode of attaching the rubber glove 1 to the casing 2. The configuration of the illumination optical system 8 is the same as that of FIG. In the embodiment shown in FIG.
Is composed of a main body 2a and a lid 2b formed of a detachable wall surface, and the rubber glove 1 is attached to the lid 2b. In this embodiment, since the rubber glove 1 is attached to the lid 2b, the projection exposure apparatus and the like include a plurality of casings, and these casings are composed of a main body and a lid of the same size. In such a case, the existing casing can be used as the casing 2 of the present invention simply by replacing the lid.
In addition, since the cover 2b to which the rubber glove 1 is attached may be provided only in the casing that requires adjustment of the optical components, the manufacturing cost and the manufacturing time of the casing can be reduced.

FIG. 6 is a schematic perspective view showing another embodiment of the casing of the present invention. As is clear from the figure,
In the embodiment shown in FIG. 6, the casing 2 is composed of a main body 2a and a lid 2b, and a window 4 and an air lock 5 are formed in the lid 2b. In this embodiment, since the window 4 is formed in the casing 2, when handling one part of the illumination optical system 8 inside the casing 2 using the rubber gloves 1, the operator actually actually operates the casing 2. It is possible to check the internal situation. Window 4
Is not limited to the lid 2b, but may be an appropriate location on the main body 2a. Further, the material of the window 4 is not particularly limited, but is preferably a material that can block transmission of a light beam, particularly ultraviolet light, introduced into the casing 2 to the outside.

The air lock 5 is used for exchanging various components such as the optical component 3 in the casing 2 and for introducing and taking out various jigs necessary for maintenance and the like into the casing 2. The specific configuration of the air lock 5 is not particularly limited as long as it can prevent the outside atmosphere from being mixed into the casing 2. Is preferred. The location where the air lock 5 is formed is not limited to the lid 2b, but may be provided at an appropriate location on the main body 2a. In the casing of the present invention, the number of the windows 4 and the air locks 5 is not particularly limited. Window 4, air lock 5
May be attached to the casing 2, or only one of them may be attached to the casing 2. As a method of checking the inside of the casing 2 instead of providing the window 4, a TV camera that projects a portion in the casing 2 that needs to be adjusted may be provided.

In the embodiment shown in FIGS. 4 to 6, the rubber glove 1 is attached to the casing 2, but has airtightness that does not leak the atmosphere in the casing 2 to the outside.
In addition, if it is possible to operate various objects in the casing 2 from the outside of the casing 2, a remote control means such as a robot arm may be attached to the casing 2 instead of or together with the rubber gloves 1. . When rubber gloves are used as the operating means, it is preferable to attach rubber gloves to the end of a telescopic cylinder such as a bellows in order to improve operability. When the casing 2 is large, an airtight suit or the like into which an operator himself can enter may be attached to the casing 2 as the operating means.

It is preferable that the operating means such as the rubber gloves 1 attached to the casing 2 be housed in a housing member provided beforehand in the casing 2 when not in use.
Thus, it is possible to avoid such a problem that the light path of the light beam passing through the casing 2 at the time of exposure is blocked by the operation means. The accommodation member is not particularly limited as long as the operation member can be stored therein. Specifically, a case, a curtain, a bag, or the like having an opening / closing portion can be used.

In the present embodiment, as the casing 2,
Although the case where the illumination optical system 8 is accommodated has been described, a configuration in which the illumination optical system 8 is accommodated from the light source unit 6 to the mask M may be employed. In that case, the inside of the casing 2 may be divided into a plurality of independent blocks, and the optical components constituting the illumination optical system 8 may be separately accommodated in the blocks. Further, the casing in the present embodiment can be applied to a case where the wafer stage 16 and an interference system (not shown) are housed or a case where the mask stage 9 is housed. Further, the casing 2 may house an optical detection system (for example, an alignment optical system) necessary for controlling the exposure apparatus.

Note that the exposure apparatus in the present embodiment
A scanning exposure apparatus (USP 5,473,410) for exposing a mask pattern by synchronously moving a mask and a substrate, or exposing a mask pattern while the mask and the substrate are stationary and sequentially moving the substrate in steps -An and repeat type exposure apparatus may be used. Further, as an exposure apparatus in the present embodiment, a proximity exposure apparatus that exposes a mask pattern by bringing a mask and a substrate into close contact without using a projection optical system can be employed. The application of the exposure apparatus is not limited to exposure for manufacturing semiconductor devices. For example, an exposure apparatus for liquid crystal that exposes a liquid crystal display element pattern to a square glass plate, and an exposure apparatus for manufacturing a thin film magnetic head Can also be widely used.

The light source of the exposure apparatus of this embodiment uses a g-line (436 nm), an i-line (365 nm), a KrF excimer laser (248 nm), an F ₂ laser (157 nm), and an EUV laser having a wavelength smaller than that. It is also possible.

As described above, the exposure apparatus of the present embodiment can maintain various mechanical subsystems including the components described in the claims with predetermined mechanical, electrical, and optical precisions. So, it is manufactured by assembling. Before and after this assembly, adjustments to achieve optical accuracy for various optical systems, adjustments to achieve mechanical accuracy for various mechanical systems, and various electric systems to ensure these various accuracy Are adjusted to achieve electrical accuracy. The process of assembling the exposure apparatus from various subsystems includes mechanical connections, wiring connections of electric circuits, and piping connections of pneumatic circuits among the various subsystems. It goes without saying that there is an assembling process for each subsystem before the assembling process from these various subsystems to the exposure apparatus. When the process of assembling the various subsystems into the exposure apparatus is completed, comprehensive adjustment is performed, and various precisions of the entire exposure apparatus are secured. It is desirable that the manufacture of the exposure apparatus be performed in a clean room in which the temperature, cleanliness, and the like are controlled.

For a semiconductor device, a step of designing the function and performance of the device, a step of producing a reticle based on the design step, a step of producing a wafer from a silicon material, and a step of forming a reticle pattern by the exposure apparatus of the above-described embodiment. It is manufactured through a step of exposing a wafer, a step of assembling a device (including a dicing step, a bonding step, and a package step), an inspection step, and the like.

[0052]

EXAMPLE 1 Commercially available (1) finger sack made of natural rubber, (2) finger sack made of nitrile rubber, and (3) finger sack made of urethane rubber were washed by immersing them in a methanol solvent. A 3 cm x 2 cm fragment obtained by cutting each finger cot after washing is
After being immersed in 2 cc of a methanol solvent for 1 day, the methanol solvent was placed on the surface of a disk-shaped quartz glass substrate for evaluation coated with an antireflection film having a diameter of 30 mm and a thickness of 3 mm.
cc was applied and air-dried. Then, under the condition of the irradiation angle θ = 12 ° shown in FIG.
Using a spectrophotometer, according to the optical evaluation method of the present invention
(1) to (3), respectively, wavelength 190 to 230 nm
, The second reflectance change characteristic was measured.

On the other hand, for the methanol solvent not in contact with each finger sack, the first reflectance change characteristic was measured over a wavelength range of 190 to 230 nm in the same manner as described above. When the first reflectance change characteristic and the second reflectance change characteristic are compared, the wavelength shift amount ΔS of the second reflectance change characteristic with respect to the first reflectance change characteristic (see FIG. 2)
Was 1 nm or less. The methanol in which each finger sack was immersed was subjected to mass spectrometry using a purge and trap device (head space device JHS-100, manufactured by JASCO Corporation) and GC-MS (Auto mass 150, manufactured by JEOL Ltd.). As a result, amines, amides and the like added as an anti-aging agent to ordinary rubber gloves and finger cots were not detected.

Comparative Example 1 The same procedures as in Example 1 were carried out except that (1) a finger sack made of natural rubber, (2) a finger sack made of nitrile rubber, and (3) a finger sack made of urethane rubber were used without prior cleaning. When the second reflectance change characteristics were measured under the same conditions as in Example 1, the wavelengths were shifted by several nm from the first reflectance change characteristics, respectively. Further, when the methanol solvent in contact with each finger sack of (1) to (3) was subjected to mass spectrometry in the same manner as in Example 1, N-methyl-N-
Propyl butylamine, N, N-dibutylformamide and N-dibutylamine were detected in large amounts.

Example 2 The same (1) natural rubber finger cot as that used in Example 1 was washed with a methanol solvent and then washed with a methanol solvent, and the organic solvent used to immerse the finger sack was acetone, ethanol, isopropyl alcohol, diethyl ether. When the first and second reflectance change characteristics were measured in the same manner as in Example 1 except for using, the respective organic solvents such as acetone, ethanol, isopropyl alcohol, and diethyl ether were compared with the first reflectance change characteristic. The wavelength shift amount ΔS of the second reflectance change characteristic was 1 nm or less. When mass analysis was performed on each of the above organic solvents in the same manner as in Example 1, no amine, amide or the like was detected.

Comparative Example 2 The same conditions as in Example 2 were used except that the same (1) natural rubber finger cot as used in Example 2 was used without prior cleaning.
When the first and second reflectivity change characteristics were measured, the second reflectivity change characteristic was shifted by several nm from the first reflectivity change characteristic. In addition, when the methanol solvent in contact with each finger cot was subjected to mass spectrometry in the same manner as in Example 1, it was confirmed that N-methyl-N-propylbutylamine, N, N-dibutylformamide, N- Dibutylamine was detected in large amounts.

As described above, the rubber finger cot which has been washed in advance with an organic solvent can remove various additives existing in the rubber finger sack in advance by the washing. It was confirmed that additives such as amines and the like did not elute.

[0058]

According to the rubber gloves or finger cots of the present invention, since almost all additives causing organic contamination such as optical parts have been removed in advance, the rubber gloves or finger cots can be used in the presence of an organic solvent having a melting power. Even if an optical component or the like is directly handled via the rubber glove or the finger cot of the present invention, the optical component is not contaminated by an organic substance and its optical characteristics do not change. Therefore, it can be particularly preferably used in the field of manufacturing a highly integrated semiconductor device. When a treatment with an organic solvent is employed as a method for removing the additive, the additive contained in the rubber glove or the finger cot can be efficiently removed by a simple operation.

Further, in the casing of the present invention, various members in the casing can be directly handled by the operating means from the outside without opening the casing while maintaining the atmosphere inside the casing. In doing so, steps such as releasing and reintroducing the atmosphere in the casing to the outside can be omitted. Therefore,
The running cost of the entire apparatus including the casing of the present invention can be significantly reduced, and the operation itself can be performed efficiently. When the rubber gloves or finger cots are used as the operation means, it is possible to prevent organic matter contamination in the casing.

When the wall surface of the casing to which the operating means is attached is detachable from another wall surface, the existing casing can be used as the casing of the present invention simply by replacing the lid. Manufacturing cost and manufacturing time can be reduced. Further, when a housing member for housing the operation means is provided in the casing, for example, it is possible to avoid inconveniences such as an optical path of a light beam passing through the casing during exposure being interrupted by the operation means. it can.

When the inside wall of the casing of the present invention is provided with a window for confirming the inside, when operating the inside of the casing, the operator can actually confirm the state of the inside of the casing. The work can be performed safely and reliably. Further, in the case where an air lock for carrying in / out parts is formed on a wall surface constituting the casing of the present invention, it is possible to maintain an atmosphere state in the casing when carrying in / out necessary parts inside the casing. It becomes possible and work can be performed efficiently. The casing of the present invention can be suitably used, for example, as a member constituting a projection exposure apparatus.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram showing a measurement situation of a reflectance change characteristic in the present invention.

FIG. 2 is a conceptual diagram for explaining evaluation of a rubber glove or finger sack using reflectance change characteristics.

FIG. 3 is a side view showing an example of an embodiment of the projection exposure apparatus of the present invention.

FIG. 4 is a schematic perspective view showing an example of an embodiment of a casing of the present invention.

FIG. 5 is a schematic perspective view showing another example of the embodiment of the casing of the present invention.

FIG. 6 is a schematic perspective view showing still another example of the embodiment of the casing of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Rubber glove 2 Casing 3 Optical component 4 Window 5 Air lock

Claims (10)

[Claims] 1. A rubber glove or finger cot which has been treated with an organic solvent. 2. A rubber glove or finger sack which satisfies the following conditions: a wavelength of 190 to 230 nm on the surface of a quartz glass substrate dried after applying a unit volume of liquid.
The reflectance change characteristics in the range of the above, the reflectance change characteristics in the case of using an organic solvent that is not in contact with the rubber glove or finger sack as the liquid is referred to as a first reflectance change characteristic, and the liquid is made of the rubber. Gloves or finger cots and surface area 1
When the reflectance change characteristic when the organic solvent contacted at a rate of 1 cm ³ per cm ² for 1 hour or more is used as the second reflectance change characteristic, the second reflectance change characteristic with respect to the first reflectance change characteristic The wavelength shift amount of the reflectance change characteristic is 1 nm or less. 3. A rubber glove or finger sack which has been treated with an organic solvent and which satisfies the following conditions: a quartz glass substrate dried after applying a unit volume of liquid. 190-230n wavelength at the surface
For the reflectance change characteristics in the range of m, the liquid is the same component as the organic solvent treated with the rubber glove or finger sack, and the extraction organic solvent that is not in contact with the rubber glove or finger sack. The reflectance change characteristic when used is a first reflectance change characteristic, and the rubber glove or finger sack and the surface area 1 are used as the liquid.
The reflectance change characteristic obtained by using the extraction organic solvent contacted at a rate of 1 cm ³ per cm ² for 1 hour or more is the second.
Where the wavelength shift amount of the second reflectance change characteristic with respect to the first reflectance change characteristic is 1 nm or less. 4. The method according to claim 1, wherein the organic solvent is alcohol, ether,
4. The rubber glove or finger cot according to claim 1, which is ketone or a mixture thereof. 5. A casing for surrounding an optical component and filling the surroundings with a specific atmosphere, wherein said casing is provided with a hermetic seal for operating an optical component in said casing from outside of said casing on a wall constituting said casing. A casing to which operating means having a property is attached. 6. A casing according to claim 5, wherein said operating means is a rubber glove or a finger cot according to any one of claims 1 to 4. 7. The casing according to claim 5, wherein the casing has at least two wall surfaces, and a wall surface to which the operation means is attached is detachable from another wall surface. 8. The casing according to claim 5, wherein an accommodating member for accommodating the operating means is provided in the casing. 9. The casing according to claim 5, wherein a wall for confirming the inside and / or an airlock for carrying in / out the parts are formed on a wall surface of the casing. 10. A projection exposure apparatus comprising the casing according to claim 5. Description: