JP2000301720A - Ink jet head - Google Patents

Ink jet head

Info

Publication number
JP2000301720A
JP2000301720A JP2000107601A JP2000107601A JP2000301720A JP 2000301720 A JP2000301720 A JP 2000301720A JP 2000107601 A JP2000107601 A JP 2000107601A JP 2000107601 A JP2000107601 A JP 2000107601A JP 2000301720 A JP2000301720 A JP 2000301720A
Authority
JP
Japan
Prior art keywords
piezoelectric body
cavity
common electrode
ink
jet head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000107601A
Other languages
Japanese (ja)
Inventor
Hideaki Sonehara
秀明 曽根原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2000107601A priority Critical patent/JP2000301720A/en
Publication of JP2000301720A publication Critical patent/JP2000301720A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To enable the homogenization of characteristics at a time of adhesion and cutting processing even when many nozzles are arranged at a high density by forming elastomer vibration parts at the cavity corresponding positions of the ink sump parts communicating with the cavities connected to nozzles and the piezoelectric body on a common electrode in parallel to the piezoelectric body. SOLUTION: Cavities 220, nozzles 221, ink supply channels 222 and ink sump parts 240 are formed on a glass substrate 210 and a pressure generating member 260 is formed from a piezoelectric body 230, a common electrode 251 and elastomer vibration part 253. The piezoelectric body 230 is fixed on the side of the common electrode 251 by a vacuum chuck and elastic plates 263 are superposed on the opposite surface coated with an epoxy adhesive 410 thereof to be aligned and the piezoelectric body 230 and the elastic plates 263 are closely bonded by a pressure tool 420. Since the piezoelectric body 230 is used in a large sheet state without being processed and only the elastic plates 263 good in processability are processed, workability is enhanced to make it possible to form the pressure generating member 260 at a high density.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、インク液滴を記録
媒体上へ選択的に付着させるインクジェットヘッドに関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet head for selectively depositing ink droplets on a recording medium.

【0002】[0002]

【従来の技術】従来の技術として、図6に示すように、
ガラス基板600とガラス薄板610との間に複数組の
インクキャビティ620、ノズル621、インク供給路
622と、各インク供給路622に通じインクをとどめ
置くインク溜部630を形成し、電極640を両面に形
成した圧電体650の板をインクキャビティの面積程度
に切断した後、各インクキャビティ上にガラス薄板を挟
んで接着したインクジェットヘッドがある。
2. Description of the Related Art As a conventional technique, as shown in FIG.
A plurality of sets of ink cavities 620, nozzles 621, ink supply paths 622, and ink reservoirs 630 communicating with the respective ink supply paths 622 and retaining ink are formed between the glass substrate 600 and the thin glass plate 610. There is an ink jet head that cuts a plate of the piezoelectric body 650 formed as described above into the area of the ink cavity, and adheres a thin glass plate to each ink cavity.

【0003】又、特公昭61−2024号公報によれ
ば、単一の圧電体上に弾性板を形成し、その圧電素子面
もしくは、弾性板面のどちらかに溝を設けて振動子を形
成する方式が紹介されている。
According to Japanese Patent Publication No. 61-2024, an elastic plate is formed on a single piezoelectric body, and a groove is formed on either the piezoelectric element surface or the elastic plate surface to form a vibrator. The method of doing is introduced.

【0004】[0004]

【発明が解決しようとする課題】インクキャビティ62
0の広さは一辺が数百μm程度であり、これらと同程度
の大きさの圧電体650の板を機械変位発生手段として
各インクキャビティ620ごとに接着することが必要で
あった。しかしこのような構造のヘッドでは圧電体65
0とインクキャビティ620との位置合わせ精度が高く
できない、圧電体650の接着時における作業性が悪
い、接着の不均一さによる特性のばらつきが大きい、接
着部の剥離が起こり易い、切断加工時の内部歪による特
性のばらつきが大きい、などの問題点を有していた。
SUMMARY OF THE INVENTION Ink cavity 62
The width of 0 is about several hundred μm on one side, and it is necessary to bond a plate of a piezoelectric body 650 having a size similar to these to each ink cavity 620 as mechanical displacement generating means. However, in the head having such a structure, the piezoelectric body 65 is not provided.
The positioning accuracy of the ink cavities 620 and the ink cavities 620 cannot be increased, the workability at the time of bonding the piezoelectric body 650 is poor, the variation in characteristics due to the non-uniform bonding is large, the peeling of the bonded portion is likely to occur, There is a problem that the characteristics vary greatly due to internal strain.

【0005】これらの問題はプリンタの性能を向上させ
るためにノズル数を増やしたり、ノズル密度を高くする
ほど、よりクローズアップされてきていた問題であっ
た。
[0005] These problems are problems that have become more and more noticeable as the number of nozzles is increased or the nozzle density is increased in order to improve the performance of the printer.

【0006】又、特公昭61−2024号公報の方式
も、溝入れ加工を必要とし、製造工数の負担は回避でき
なかった。
Further, the method disclosed in Japanese Patent Publication No. 61-2024 also requires grooving, so that the burden of manufacturing steps cannot be avoided.

【0007】そこで本発明はこれらの問題点を解決する
もので、その目的とするところは高密度で、高ノズル
数、均質な特性を有する、信頼性の高いインクジェット
ヘッドをきわめて低コストに提供することである。
Accordingly, the present invention solves these problems, and an object of the present invention is to provide a highly reliable ink jet head having a high density, a high number of nozzles and uniform characteristics at a very low cost. That is.

【0008】[0008]

【課題を解決するための手段】本発明のインクジェット
ヘッドは、ノズルと、該ノズルと連通するキャビティと
該キャビティに連通するインク溜部と前記キャビティ上
に形成された共通電極と、該共通電極上に形成された連
続した圧電体と、該圧電体上の前記キャビティに対応す
る位置に前記圧電体と平行に形成されている弾性体振動
部を有することを特徴とする。
According to the present invention, there is provided an ink jet head comprising: a nozzle; a cavity communicating with the nozzle; an ink reservoir communicating with the cavity; a common electrode formed on the cavity; And a resilient vibrating portion formed in parallel with the piezoelectric body at a position corresponding to the cavity on the piezoelectric body.

【0009】さらに好ましくは、前記弾性体振動部のキ
ャビティに対応する部分は金属板からなることを特徴と
する。
More preferably, the portion corresponding to the cavity of the elastic vibrating portion is made of a metal plate.

【0010】さらに好ましくは、前記弾性体振動部は、
前記キャビティよりも面積が小さいことを特徴とする。
[0010] More preferably, the elastic body vibrating section includes:
The area is smaller than the cavity.

【0011】[0011]

【発明の実施の形態】本発明の実施例を説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described.

【0012】図1は本発明の第1の実施例のインクジェ
ットヘッドの構造図である。図1(a)は、平面図。図
1(b)は断面図。ガラスでできたベース基板210上
に、キャビティ220、ノズル221、インク供給路2
22、インク供給口262、インク溜部240が形成さ
れている。圧電体230は、片面に共通電極251、も
う一方の面に弾性体振動部253、配線部254が形成
されている。圧電体230、共通電極251、弾性体振
動部253によって、圧力発生部材260が形成されて
いる。共通電極251はグランドに、また、配線部25
4は駆動回路(図示されていない)に接続され、駆動信
号によって圧力発生部材260を駆動しインクを飛翔さ
せる。ベース基板210のキャビティ220と弾性体振
動部253とが対向するように接合し、本実施例のイン
クジェットヘッドを得る。
FIG. 1 is a structural view of an ink jet head according to a first embodiment of the present invention. FIG. 1A is a plan view. FIG. 1B is a sectional view. On a base substrate 210 made of glass, a cavity 220, a nozzle 221, and an ink supply path 2 are provided.
22, an ink supply port 262, and an ink reservoir 240 are formed. The piezoelectric body 230 has a common electrode 251 on one side, and an elastic body vibrating section 253 and a wiring section 254 on the other side. A pressure generating member 260 is formed by the piezoelectric body 230, the common electrode 251, and the elastic body vibrating section 253. The common electrode 251 is connected to the ground,
Reference numeral 4 is connected to a drive circuit (not shown), and drives the pressure generating member 260 by a drive signal to cause ink to fly. The cavity 220 of the base substrate 210 and the elastic body vibrating portion 253 are joined so as to face each other, and the ink jet head of this embodiment is obtained.

【0013】次に、図2を用いて圧力発生部材260の
製造方法について説明する。チタン酸ジルコン酸鉛系複
合ペロブスカイトセラミックス等の圧電材料からなる圧
電体230の片面に、メッキ、スパッタリング、蒸着、
厚膜印刷等により、Cr、Ni、Au等の導電材料を
0.5μm程度形成する。他の面に、フレキシブルフィ
ルム261上に所望の形状を有した金属板で形成した弾
性板263を貼り付ける。
Next, a method of manufacturing the pressure generating member 260 will be described with reference to FIG. On one surface of a piezoelectric body 230 made of a piezoelectric material such as a lead zirconate titanate-based composite perovskite ceramic, plating, sputtering, vapor deposition,
A conductive material such as Cr, Ni, and Au is formed to a thickness of about 0.5 μm by thick film printing or the like. An elastic plate 263 formed of a metal plate having a desired shape is attached on the flexible film 261 on another surface.

【0014】ここで、弾性板263の製造方法を図3を
用いて説明する。
Here, a method of manufacturing the elastic plate 263 will be described with reference to FIG.

【0015】図3(a)(b)に於いて、ポリイミド、
ポリエステル等のテープ状のフレキシブルフィルムに所
望の形状の貫通孔311をプレス加工法等により形成す
る。次に、図3(c)に示す様にNi、Cu、ステンレ
ス等の金属板312を全面にはりつける。更に、図3
(d)(e)に示すように、この金属板312の所望の
形状にフォトリソグラフィ技術等によりエッチングして
弾性板253、及び配線部254を形成する。この製造
技術は、IC実装用のTAB(Tape Automa
ted bonding)テープの製造方法として知ら
れている。
Referring to FIGS. 3A and 3B, polyimide,
A through hole 311 having a desired shape is formed in a tape-like flexible film such as polyester by a press working method or the like. Next, as shown in FIG. 3C, a metal plate 312 of Ni, Cu, stainless steel or the like is attached to the entire surface. Further, FIG.
(D) As shown in (e), the desired shape of the metal plate 312 is etched by a photolithography technique or the like to form the elastic plate 253 and the wiring portion 254. This manufacturing technique is based on TAB (Tape Automa) for IC mounting.
It is known as a method for producing a ted bonding tape.

【0016】上記のようにして製造された弾性板263
を圧電体に貼り付ける方法を、図4(a)〜(d)に示
した。
The elastic plate 263 manufactured as described above
4 (a) to 4 (d) show a method of sticking to the piezoelectric body.

【0017】図4(a)に於いて、基台400上に共通
電極251を形成した圧電体230の共通電極251側
を真空チャック等により固定し、エポキシ等の接着剤4
10をその反対面に塗布する。更に、図3で説明した弾
性板263をその上面に重ねて位置合わせした後、図4
(b)に示すように加圧ツール420で圧電体230と
弾性板263を密着させる。その後、テープ状の弾性板
263を個々に分離する為、図4(c)に示すように切
断刃430で押圧しプレス加工し図4(d)に示す様な
構造を得る。
In FIG. 4A, the common electrode 251 side of the piezoelectric body 230 having the common electrode 251 formed on the base 400 is fixed by a vacuum chuck or the like, and an adhesive 4 such as epoxy is used.
10 is applied to the opposite side. Further, after the elastic plate 263 described with reference to FIG.
As shown in (b), the piezoelectric body 230 and the elastic plate 263 are brought into close contact with the pressing tool 420. Thereafter, in order to separate the tape-shaped elastic plates 263 individually, pressing is performed with a cutting blade 430 as shown in FIG. 4C, and press working is performed to obtain a structure as shown in FIG. 4D.

【0018】上記は、弾性体振動部253、配線部25
4を2方向に出した例であるが、図5に示すように4方
向に出すことも可能である。
The above description includes the elastic vibrating section 253 and the wiring section 25.
Although this is an example in which 4 is extended in two directions, it is also possible to extend in four directions as shown in FIG.

【0019】以上、述べてきたように、本実施例のイン
クジェットヘッドは、圧力発生部材260を構成してい
る圧電体230を大きなシート状のまま加工せずに使用
し、加工性のよい弾性板263を加工しているだけのた
め、きわめて作業性がよく、圧力発生部材を高密度に形
成することができる。
As described above, the ink jet head according to the present embodiment uses the piezoelectric member 230 constituting the pressure generating member 260 in a large sheet shape without processing, and provides an elastic plate having good workability. Since only 263 is processed, the workability is extremely good, and the pressure generating member can be formed with high density.

【0020】[0020]

【発明の効果】本発明によれば、ノズルと、該ノズルと
連通するキャビティと該キャビティに連通するインク溜
部と前記キャビティ上に形成された共通電極と、該共通
電極上に形成された連続した圧電体と、該圧電体上の前
記キャビティに対応する位置に前記圧電体と平行に形成
されている弾性体振動部を有するのでノズルを高密度に
数多く配列した、均質な特性を有するインクジェットヘ
ッドを提供することが出来る。
According to the present invention, there is provided a nozzle, a cavity communicating with the nozzle, an ink reservoir communicating with the cavity, a common electrode formed on the cavity, and a continuous electrode formed on the common electrode. An ink jet head having uniform characteristics in which a plurality of nozzles are arranged at a high density since the piezoelectric body has a piezoelectric body and an elastic body vibrating portion formed in parallel with the piezoelectric body at a position corresponding to the cavity on the piezoelectric body. Can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のインクジェットヘッドの構造図。FIG. 1 is a structural diagram of an ink jet head of the present invention.

【図2】本発明の一実施例のインクジェットヘッドの製
造方法を説明するための図。
FIG. 2 is a diagram illustrating a method for manufacturing an ink jet head according to one embodiment of the present invention.

【図3】本発明の一実施例のインクジェットヘッドの製
造方法を説明するための図。
FIG. 3 is a diagram for explaining a method for manufacturing an ink jet head according to one embodiment of the present invention.

【図4】本発明の一実施例のインクジェットヘッドの製
造方法を説明するための図。
FIG. 4 is a diagram for explaining a method for manufacturing an ink jet head according to one embodiment of the present invention.

【図5】本発明の別の実施例を示す図。FIG. 5 is a diagram showing another embodiment of the present invention.

【図6】従来例を示す図。FIG. 6 is a diagram showing a conventional example.

【符号の説明】[Explanation of symbols]

220…キャビティ 221…ノズル 230…圧電体 240…インク溜部 251…共通電極 253…弾性体振動部 260…圧力発生部材 261…フレキシブルテープ 263…弾性板 220: Cavity 221: Nozzle 230: Piezoelectric 240: Ink reservoir 251: Common electrode 253: Elastic vibration part 260: Pressure generating member 261: Flexible tape 263: Elastic plate

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 ノズルと、該ノズルと連通するキャビテ
ィと該キャビティに連通するインク溜部と前記キャビテ
ィ上に形成された共通電極と、該共通電極上に形成され
た連続した圧電体と、該圧電体上の前記キャビティに対
応する位置に前記圧電体と平行に形成された弾性体振動
部を有することを特徴とするインクジェットヘッド。
A nozzle, a cavity communicating with the nozzle, an ink reservoir communicating with the cavity, a common electrode formed on the cavity, a continuous piezoelectric body formed on the common electrode, An ink jet head comprising an elastic body vibrating portion formed in parallel with the piezoelectric body at a position corresponding to the cavity on the piezoelectric body.
【請求項2】 前記弾性体振動部のキャビティに対応す
る部分は金属板からなることを特徴とする特許請求の範
囲1に記載のインクジェットヘッド。
2. The ink jet head according to claim 1, wherein a portion of the elastic body vibrating portion corresponding to the cavity is made of a metal plate.
【請求項3】 前記弾性体振動部は、前記キャビティよ
りも面積が小さいことを特徴とする特許請求の範囲1ま
たは2に記載のインクジェットヘッド。
3. The ink jet head according to claim 1, wherein the elastic body vibrating section has a smaller area than the cavity.
JP2000107601A 2000-01-01 2000-04-10 Ink jet head Pending JP2000301720A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000107601A JP2000301720A (en) 2000-01-01 2000-04-10 Ink jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000107601A JP2000301720A (en) 2000-01-01 2000-04-10 Ink jet head

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP29768590A Division JP3134305B2 (en) 1990-11-02 1990-11-02 Inkjet head

Publications (1)

Publication Number Publication Date
JP2000301720A true JP2000301720A (en) 2000-10-31

Family

ID=18620577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000107601A Pending JP2000301720A (en) 2000-01-01 2000-04-10 Ink jet head

Country Status (1)

Country Link
JP (1) JP2000301720A (en)

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Effective date: 20010918