JP2000299468A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2000299468A5 JP2000299468A5 JP2000032888A JP2000032888A JP2000299468A5 JP 2000299468 A5 JP2000299468 A5 JP 2000299468A5 JP 2000032888 A JP2000032888 A JP 2000032888A JP 2000032888 A JP2000032888 A JP 2000032888A JP 2000299468 A5 JP2000299468 A5 JP 2000299468A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000032888A JP4372939B2 (ja) | 1999-02-12 | 2000-02-10 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3366799 | 1999-02-12 | ||
| JP11-33667 | 1999-02-12 | ||
| JP2000032888A JP4372939B2 (ja) | 1999-02-12 | 2000-02-10 | 半導体装置の作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006038853A Division JP4860293B2 (ja) | 1999-02-12 | 2006-02-16 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000299468A JP2000299468A (ja) | 2000-10-24 |
| JP2000299468A5 true JP2000299468A5 (pl) | 2006-04-27 |
| JP4372939B2 JP4372939B2 (ja) | 2009-11-25 |
Family
ID=26372406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000032888A Expired - Fee Related JP4372939B2 (ja) | 1999-02-12 | 2000-02-10 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4372939B2 (pl) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002184710A (ja) * | 2000-12-18 | 2002-06-28 | Sony Corp | 半導体層のドーピング方法、薄膜半導体素子の製造方法、及び薄膜半導体素子 |
| JP4798907B2 (ja) | 2001-09-26 | 2011-10-19 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP2006243753A (ja) * | 2006-05-19 | 2006-09-14 | Seiko Epson Corp | 基板装置、電気光学装置及び電子機器 |
| JP5153921B2 (ja) * | 2011-06-27 | 2013-02-27 | 株式会社半導体エネルギー研究所 | 表示装置、及び携帯情報端末 |
| KR102097171B1 (ko) * | 2012-01-20 | 2020-04-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| KR102081468B1 (ko) * | 2012-07-20 | 2020-02-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치, 및 표시 장치를 포함하는 전자 장치 |
-
2000
- 2000-02-10 JP JP2000032888A patent/JP4372939B2/ja not_active Expired - Fee Related