JP2000299264A - Lot automatic transfer system and lot transfer control method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable lots to be fed uniformly to various devices arranged on a production line in a shorter waiting time and to uniformly recover already processed lots by the devices to be in a shorter waiting time. SOLUTION: This lot automatic transfer system is equipped with at least one or more intra-process transfer systems, which have functions to feed lots delivered from automatic shelves and automatic shelves, where devices are arranged to the devices and to recover lots kept at the devices and transfer them to the automatic shelves, an interprocess transfer system which connects automatic shelves together and transfers the lots delivered from an automatic shelf to another automatic shelf, a lot transfer control device which indicates to an automatic shelf to deliver specific lots and also indicates the destinations of lots to the interprocess transfer system and the intra-process transfer system, and a lot progress control device which grasps the processing flow and current position of a lot.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic lot transfer system in which a lot is supplied to each of a plurality of types of devices existing in a production line and a lot is collected after completion of processing in each device with a short waiting time. The present invention relates to a system and a lot transfer control method.

[0002]

2. Description of the Related Art Generally, when a semiconductor wafer (lot) contained in a container is transferred to a semiconductor manufacturing apparatus,
It is necessary to carry it according to the operation status of the manufacturing equipment.
For example, even if a lot is supplied too early, it becomes necessary to store the lot on the manufacturing apparatus side. For this reason, it is necessary to provide a space for storing the lot in the manufacturing apparatus, and as a result, the space cost increases. Also, improper intermediate stock of lots occurs. On the other hand, if the lot is supplied too late, the progress speed of the lot becomes slow, and the throughput decreases. Alternatively, there arises a problem that useless idle time occurs in the manufacturing apparatus. Therefore, in the conventional lot transfer device, control for adjusting the start time of transfer to the processing end time of the manufacturing device at the transfer destination has been performed.

However, in a typical semiconductor production plant, the processing capacity per unit time in a so-called preparatory processing apparatus group such as a pre-cleaning apparatus and a resist coating apparatus is, for example, an oxidation apparatus, a diffusion apparatus, a CVD apparatus (a chemical apparatus). It is equivalent to the total processing capacity of the main processing apparatus such as a vapor growth thin film forming apparatus) and a sputtering apparatus. This is because installation of more devices than the number of devices required to process the number of lots based on the production plan puts a burden on the factory. For this reason, when an unexpected failure occurs in the preparation processing device or when performing regular maintenance, such a conventional control method temporarily reduces the processing capacity of the preparation processing device group. A lot of lots destined for the processing apparatus are in a waiting state. As a result, a waste time in the lot waiting state occurs in the apparatus group that performs the main processing step after the preparation processing step. On the other hand, in order to solve the above-mentioned problem, there is also a method in which the “time spent for transport” in the above-described control method is apparently longer than the actual time and the transport to the preparation processing device is started earlier. . According to this method, the preparatory process is executed early, and the lot is conveyed to the main processing device early, so that the idle time in the main processing device is reduced. However, there is a limit to early cleaning (the effect of the adhesion of floating dust by leaving the lot in the preparatory process, and the effect of a small amount of gas discharged from the container of the lot). A lot of lots to be preliminarily processed before the preparatory processing apparatus still remain. Therefore, there arises a problem that a prepared lot cannot be immediately supplied to the main processing apparatus that has been started up at that time, and that a free time is generated in the main processing apparatus that should urgently perform lot preparation processing. .

As a prior art for solving such a problem, for example, Japanese Patent Application Laid-Open No. 6-97019 is known.
There is one described in Japanese Patent Publication No. That is, the prior art includes a plurality or a single main processing apparatus that performs processing for creating added value for a lot in a wafer process in semiconductor production, and a plurality of processing that performs preparation processing on a wafer before processing in the main processing apparatus. Alternatively, a single preparation processing device, a warehouse for storing lots waiting for a process, a transport path connecting the warehouse, each main processing device and each preparation processing device, and a plurality of transporting lots moving along the transport path. Or a transport device consisting of a single transport vehicle, a transport device controller that controls each preparation processing device, warehouse, each transport vehicle and each main processing device, by the transport controller, for each lot, Subtracting the processing time of the preparation processing unit and the transport time from the scheduled processing end time of the main processing unit, and the limit time when no idle time due to lot waiting occurs in the main processing unit The latest scheduled delivery time is obtained, and the processing time of the preparation processing device, the transport time, and the delivery offset time are subtracted from the scheduled processing end time of the main processing device, and the limit time at which quality deterioration does not occur in the lot after the preparation process. If the operation rate of the preparatory processing device that can be processed is greater than the operation rate of the preparatory processing device of the current process between the earliest scheduled departure time and the latest scheduled departure time, the transfer is performed. With the equipment, the lot is taken out of the warehouse and transported to the preparation processing equipment,
Between the earliest scheduled release time and the latest scheduled release time, if the operation rate of the processable preparation processing apparatus is equal to or less than the operation rate of the current processing preparation processing apparatus, the operation rate of the processable preparation processing apparatus is reduced. A semiconductor manufacturing management system characterized in that the calculation of the operation rate of the preparation processing apparatus is repeated at regular intervals until the latest scheduled departure time until the operation rate of the preparation processing apparatus in the current process becomes larger than the operation rate.

[0005] As a result, the time between the earliest scheduled delivery time and the latest scheduled delivery time calculated and calculated for each lot,
The operation rate of the preparatory processing equipment that can be processed is compared with the operation rate of the preparatory processing equipment of the current process, or the judgment is repeated at regular intervals, so that the delivery of the lot can be automatically adjusted. Is continuously transported to the main processing apparatus, so that the main processing apparatus has no idle time due to lot waiting. Also, since the lot is transported to the preparation processing device immediately after processing by the preparation processing device,
Since a large number of lots can be prevented from concentrating on the preparation processing device, the load of the lot processing on the preparation processing device can be dispersed over time, and the equipment operation rate increases with the progress of the lot. It is disclosed that it can be achieved.

Incidentally, in a lot transfer control device for supplying a lot to each of a plurality of types of devices existing on a production line and collecting the lot after the completion of processing in each device, a certain process (allowable time start process) is performed. There is a case where there is a time limit, that is, an allowable time limit, between the processing completion time of the first step and the processing start time of the next step (the allowable time end step).

[0007] In order to comply with the allowable time limit, only when there is both a lot supply request from the apparatus and a lot supply from an apparatus in charge of the allowable time end step, the apparatus in the allowable time start step is used. There has been proposed a conventional lot transfer control device that supplies lots to a lot. In a semiconductor device manufacturing line, the same device is generally used repeatedly for one semiconductor device production process, and is responsible for an allowable time start process and an allowable time end process when executing a certain process. When the device executes another process using the device, a case occurs in which the device does not take charge of the allowable time start process and the allowable time end process.

[0008]

However, the above-mentioned conventional lot transfer control device has the following problems when applied to such a case. First, the first problem is that a lot waiting for a supply request of an apparatus in charge of an allowable time start step waits for a supply request of an apparatus for the next step even if the next step of the lot is not an allowable time end step. This gives the lot extra waiting time. The second problem is that the apparatus in charge of the allowable time end step allocates a lot waiting for the apparatus in the previous step in response to the supply request, so that the step immediately before the step in charge of the apparatus is permitted. Lots that are not a time start step will not be supplied to this device.

The present invention has been made in view of the above problems, and has as its object to supply a lot to each of a plurality of types of apparatuses existing on a production line and to perform processing after completion of processing in each apparatus. An object of the present invention is to provide an automatic lot transfer system and a lot transfer control method for evenly collecting lots in a short waiting time.

[0010]

The gist of the present invention is to reduce the supply of a lot to each of a plurality of types of apparatuses existing on a production line and the collection of a lot after the completion of processing in each apparatus. An automatic lot transfer system that performs the same even in a waiting time, wherein the automatic shelf and a plurality of devices are disposed and a function of supplying a lot discharged from the automatic shelf to the device and collecting the lot placed in the device. At least one or more in-process transfer systems having a function of transferring to the automatic shelves, and an inter-process transfer system for connecting the automatic shelves and transferring a lot discharged from the automatic shelves to another automatic shelf. A lot transfer control device that instructs the automatic shelf to issue a specific lot, and instructs the inter-process transfer system and the in-process transfer system to transfer the lot, and grasps the process flow and the current position of each lot. Do Tsu and a preparative progress management apparatus, wherein the apparatus resides in the lot automatic transport system characterized in that it is configured to require recovery and supply of the lot to the lot conveyance control device. The gist of the invention described in claim 2 is that the lot transfer control device receives an arrival report reported from the automatic shelf and, based on the notified lot identification information, determines a device group in the current process of the lot. The lot progress management device is inquired, and the device group of the current process of the lot obtained by the inquiry is a device group in charge of the allowable time start process, and the device group of the next process of the lot is further added to the lot progress management device. As well as
When the device group of the next process is the device group in charge of the process of ending the allowable time, the lot identification information is registered in the queue of the first-type start processing waiting lot set under the device group of the current process, while the device of the next process is registered. When the group is not the device group in charge of the allowable time end process, the lot identification information is registered in the queue of the second type start processing waiting lot set under the device group of the current process,
The device group of the current process of the lot obtained by the inquiry is a device group in charge of the allowable time end process, and the device group of the current process under the device group of the current process when the lot is already reserved for the device of the device group. While the lot identification information is registered in the queue of the first type waiting lot set, the second type waiting lot of the second type subordinate to the apparatus group of the current process when the lot is not reserved for the apparatus of the apparatus group. If the lot identification information is registered in the set queue and the equipment group of the current process of the lot obtained by the inquiry is the equipment group that is not responsible for the allowable time start process and the allowable time end process, the lot is registered in the queue under the device group. The system according to claim 1, wherein the identification information is registered. The gist of the invention described in claim 3 is that the lot transfer control device has a function of deleting the lot identification information notified by the delivery report from the device group waiting queue. In the automatic lot transfer system described in (1). The gist of the invention according to claim 4 is that, when the lot transfer control device receives a supply request of the device in the allowable time end step, the lot transfer control device waits for the first type start processing lot under the device group of the device. A set, a queue of the first type of waiting lots, and a queue of the second type of waiting lots are searched, and the queue of the first type of waiting lots is set in the queue that has issued the supply request. Check whether a reserved lot exists, and if there is a lot reserved for the device that has issued the supply request in the queue of the first type end processing waiting lot set, supply the lot to the device. A command is transmitted to the automatic shelf, the intra-process transport system, and the inter-process transport system, and if the corresponding lot does not exist in the queue of the first type end processing waiting lot set, the first type Waiting for start processing A lot based on a predetermined algorithm is selected by using a lot set and a queue of the second type waiting lot set as a search range, and it is determined whether the selected lot belongs to the second type waiting lot set. Check, if the lot is a lot belonging to the second type end processing waiting lot set, the automatic shelf, the in-process transport system, and the inter-process transport system to supply the lot to the apparatus. While transmitting the command, when the lot belongs to the first type of waiting for start processing set, the lot is allocated as a reservation of the apparatus and information related to the reservation is stored. According to a second aspect of the present invention, there is provided an automatic lot transfer system. The gist of the invention described in claim 5 is that the lot transfer control device waits for the first type start processing under the device group of the device when receiving the supply request of the device in charge of the allowable time start process. It is checked whether a lot reserved for the device in charge of the allowable time ending process is present in the queue of the lot set, and the first type waiting queue for start processing under the device group of the device is already in the allowable time ending process. When the reserved lot exists in the device in charge, the lot is supplied to the device in charge of the allowable time start process. When the reserved lot does not exist, the second type under the device group of the device is supplied. The queue of the start processing waiting lot set is searched, and the existence of the lot belonging to the second type of start processing waiting lot set under the device group of the device is checked, and the start of the second type under the device group of the device is checked. place When there is a lot belonging to the waiting lot set, the automatic shelf, the in-process transport system, and the inter-process transport system select a lot based on a predetermined algorithm and supply it to the device in charge of the allowable time start process. Sending a command, when there is no lot belonging to the second type waiting lot set under the device group of the device, when the lot transfer control device does not supply the lot to the device in charge of the allowable time start process, 3. The automatic lot transfer system according to claim 2, wherein the system is configured to hold a supply request. The gist of the invention according to claim 6 is that, in response to an instruction from the lot transfer control device, the automatic shelf unloads a lot in the automatic shelf specified by the lot transfer control device and executes the process in the process. The automatic lot transfer system according to claim 4 or 5, wherein the transfer is performed to a transfer system or the inter-process transfer system. The gist of the invention described in claim 7 is that the automatic shelf is configured to notify the lot transfer control device that the unloading operation is completed. In the lot automatic transfer system. The gist of the invention described in claim 8 is that the automatic shelf reads identification information of a lot arriving at the automatic shelf by the inter-process transport system or the in-process transport system and notifies the lot transport control device of the lot. The present invention is directed to an automatic lot transfer system according to claim 4 or 5, wherein: The gist of the invention described in claim 9 is that the automatic shelf is configured to take in a lot arriving at the automatic shelf by the inter-process transport system or the in-process transport system and store the lot therein. A lot automatic transfer system according to claim 4 or 5, characterized in that: The gist of the invention described in claim 10 is to provide a lot transporting system in which a lot is supplied to each of a plurality of types of devices existing in a production line and a lot is collected after completion of processing in each device with a short waiting time. A control method, wherein an automatic shelf and a plurality of devices are arranged and a function for supplying a lot discharged from the automatic shelf to the device with respect to an in-process transport system provided with the device and a lot placed in the device are collected. In-process transport processing for transporting to the automatic shelf, and inter-process transport processing for transporting a lot discharged from the automatic shelf to another automatic shelf for an inter-process transport system configured by connecting the automatic shelves. And a lot transfer control process having a function of instructing the automatic shelf to issue a specific lot and giving a destination of the lot to the inter-process transfer process and the in-process transfer process, and a process flow of each lot. And present position The lot progress control device having a function of grasping the lot transfer control process, wherein the device is configured to request the supply and collection of lots to the lot transfer control process. Exist. The gist of the invention according to claim 11 is that the lot transfer control process receives an arrival report reported from the automatic shelf and, based on the notified lot identification information, determines a device group in a current process of the lot. The process of inquiring the lot progress management device, the device group of the current process of the lot obtained by the inquiry is a device group in charge of the allowable time start process, and the lot progress management device further performs the next process of the lot. In addition to inquiring about the device group, when the device group of the next process is the device group in charge of the process of ending the allowable time, the lot identification information is registered in the queue of the first type waiting lot set for start processing under the device group of the current process. On the other hand, when the device group of the next process is not the device group in charge of the process of ending the allowable time, the lot is queued in the second type waiting lot for start processing under the device group of the current process. The process of registering the separate information and the device group of the current process of the lot obtained by the inquiry is the device group in charge of the allowable time end process, and the lot is already reserved for the device of the device group. While registering the lot identification information in the queue of the first type end processing waiting lot set under the device group of the current process, and when the lot is not reserved for the device of the device group, The process of registering the lot identification information in the queue of the second type end processing waiting lot set, and the case where the device group of the current process of the lot obtained by the inquiry is the device group that is not responsible for the allowable time start process and the allowable time end process 2. The method according to claim 1, further comprising the step of registering the lot identification information in a queue under the device group.
0 is a lot transfer control method. Claim 1
The gist of the invention described in 2 is that the lot transfer control processing includes:
12. The method according to claim 11, further comprising a step of deleting the lot identification information notified by the delivery report from the device group waiting queue.
In the lot transfer control method described in (1). Claim 13
In the gist of the invention described in the above, the lot transfer control processing, when receiving a supply request of the device in the allowable time end step, the first type start processing waiting lot set under the device group of the device and the second A process of searching for a queue of one type of waiting lot set and a queue of the second type of waiting lot set;
Checking whether there is a lot reserved for the apparatus that has issued the supply request in the queue of the first type waiting lot set; and supplying the lot to the queue of the first type waiting lot set. If there is a reserved lot in the device that issued the request, so as to supply the lot to the device, a process of transmitting an instruction to the automatic shelf, the in-process transport process and the inter-process transport process, If the corresponding lot does not exist in the queue of the first type waiting lot set, the queue of the first type waiting lot set and the second type waiting lot set queue is set as a search range. Selecting a lot based on the above algorithm, checking whether the selected lot belongs to the second type of waiting-for-final-process set, and determining whether the lot belongs to the second type. When the lot belongs to the end processing waiting lot set, a command is sent to the automatic shelf, the intra-process transfer process, and the inter-process transfer process so that the lot is supplied to the device, while the lot is the 12. The method according to claim 11, further comprising a process of, when belonging to one kind of start processing waiting lot set, assigning a reservation for the device and storing information on the reservation. The gist of the invention according to claim 14 is that the lot transfer control process waits for the first type start process under the device group of the device when receiving a supply request of the device in charge of the allowable time start process. A process of checking whether there is a lot reserved for the device in charge of the allowable time end process in the queue of the lot set, and a process of checking whether or not the first type waiting lot set under the device group of the device has the allowable time. If there is a reserved lot in the device in charge of the end process, the process of supplying the lot to the device in charge of the allowable time start process, and if there is no reserved lot, the process under the device group of the device in question A process of searching a queue of a second type waiting-for-start processing lot set to check for the existence of a lot belonging to the second type waiting-for-start processing lot set under the device group of the device; When there is a lot belonging to the second type of waiting for start processing lot set under the control, the automatic shelf and the process in the process are so selected as to select a lot based on a predetermined algorithm and supply the selected lot to the device in charge of the allowable time start process. A transfer process, a process of transmitting a command to the inter-process transfer process, and a device in charge of an allowable time start process when there is no lot belonging to the second type start process waiting lot set under the device group of the device. 12. The lot transfer control method according to claim 11, wherein the lot transfer control process includes a process of holding a supply request without supplying the lot request. The gist of the invention according to claim 15 is that, in response to an instruction of the lot transfer control process, the automatic shelf unloads a lot in the automatic shelf specified by the lot transfer control process, and The method according to claim 13 or 14, wherein a transfer process or a process to be passed to the inter-process transfer process is performed.
The gist of the invention described in claim 16 is that the automatic shelf is
15. The lot transfer control method according to claim 13, wherein a process of notifying the lot transfer control process that the unloading operation is completed is executed. The gist of the invention described in claim 17 is that the automatic shelf reads identification information of a lot that has arrived at the automatic shelf by the inter-process transfer process or the in-process transfer process and notifies the lot transfer control process. The method according to claim 13 or 14, wherein the processing is executed. The gist of the invention described in claim 18 is that the automatic shelf executes a process of taking in a lot arriving at the automatic shelf by the inter-process transfer process or the intra-process transfer process and storing the lot therein. A lot transport control method according to claim 13 or 14.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A plurality of types of devices exist in a production line, and a lot transfer control device that supplies a lot to each device and collects a lot after the completion of the process in each device performs processing of a certain process. There may be a time limit between the completion time and the processing start time of the next step. Hereinafter, the former process will be referred to as an "allowable time start process" and the latter process will be referred to as an "allowable time end process".

A feature of each embodiment described below is that when such an allowable time start step and an allowable time end step exist, the lot transfer control device (1) performs processing of the apparatus in charge of the allowable time start step. A set of lots waiting for the next process is a set of lots whose next process is the end process of the permissible time (hereinafter referred to as “start A” (first-type start process waiting lot set)) and a set of other lots (hereinafter referred to as “start B ”(a second type of batch waiting for start processing).
(2) A set of lots awaiting processing by the device in charge of the allowable time end process is referred to as a set of lots reserved for the device in charge of the allowable time end process in the allowable time start process (hereinafter, “end A” (first type) Lot set), and a set of lots other than that (hereinafter, “end B” (second type set of lots waiting for end processing)). Is received by the lot transfer control device, a set of lots of “start A”, “end A”, and “end B” is searched, and (3-1) a set of “end A” is
If there is a reserved lot in the device that has issued the supply request, the lot is supplied to the device. (3-2) If no such lot exists, the “start A” and “end B” The set is the search range of the lot to be supplied,
According to a given algorithm, one lot is selected, and (3-2-1) Further, when the lot belongs to “end B”, the lot is supplied to the device, and -2-2) When the lot belongs to "start A", the apparatus is reserved, and (4) when the lot transfer control apparatus receives a supply request for the apparatus in charge of the allowable time start process. (4-1) If there is a lot already reserved for the device in charge of the allowable time end process at “start A”, the lot is supplied to the device in charge of the allowable time start process, and (4-2) If there is no reserved lot, (4-2-1) If there is a lot belonging to “Start B”, select one lot from among the lots using a given algorithm. hand,
Supply to the device in charge of the allowable time start process, (4-2-2)
When there is no lot belonging to “Start B”, the lot is not supplied to the device in charge of the allowable time start process, and the lot transfer control device holds the supply request, thereby supplying the device in charge of the allowable time start process. If the next process of the lot is not the process with the end of the allowable time, the lot waiting for the request is supplied to the device of the process with the start of the allowable time without waiting for the supply request of the device of the next process, and is responsible for the process with the end of the allowable time. The apparatus is capable of processing both the lots from the allowable time start step and the lots from the other steps. Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(First Embodiment) FIG. 1 shows a first embodiment of the present invention.
Lot transfer control device 50 according to the embodiment (described later)
FIG. 1 is a hardware configuration diagram for explaining an entire lot automatic transfer system 100 using the same. In FIG. 1, the automatic lot transfer system 100 includes an inter-process transfer system 30 and a plurality of in-process transfer systems 20 connected to the inter-process transfer system 30. An automatic shelf 14 and a plurality of devices 12 are provided in the inter-process transport system 30. The automatic shelf 14 has a function of transferring and storing lots between the inter-process transport system 30 and the in-process transport system 20. The inter-process transport system 30 is an automatic shelf 1
It has a function of connecting the four and transporting the lot discharged from the automatic shelf 14 to another automatic shelf 14. In-process transfer system 2
0 has a function of connecting the automatic shelf 14 to the apparatus 12 and supplying a lot discharged from the automatic shelf 14 to the apparatus 12 and a function of collecting the lot placed on the apparatus 12 and transporting the lot to the automatic shelf 14. I have.

FIG. 2 shows the automatic lot transfer system 10 shown in FIG.
0 is a processing flow showing the configuration of No. 0 from the viewpoint of information processing. In the automatic lot transfer system 100 shown in FIG. 2, the inter-process transfer system 30 and the in-process transfer system 20 are connected by a transfer path shown by a thick line in FIG. , Device 12 are connected to the lot transfer control device 50 by a communication line shown by a thin line in FIG.
Also, the lot transfer control device 50 is a lot progress management device 4.
Connected to 0.

In response to an instruction from the lot transfer control device 50, the automatic shelf 14 takes out a lot in the automatic shelf 14 designated by the lot transfer control device 50 and sends it to the intra-process transfer system 20 or the inter-process transfer system 30. A transfer function, a function of notifying the lot transfer control device 50 that the unloading operation has been completed, the inter-process transfer system 3
0 or the function of reading the ID (identification information) of the lot arriving at the automatic shelf 14 by the in-process transport system 20 to notify the lot transport control device 50, and the inter-process transport system 30
Alternatively, it has a function of taking in the lot arriving at the automatic shelf 14 by the in-process transport system 20 and storing it inside.

In accordance with an instruction from the lot transfer control device 50, the inter-process transfer system 30 stores lots in a certain (arbitrary) automatic shelf 1
4 has a function of transporting it to another automatic shelf 14. The in-process transfer system 20 transfers the lot from the automatic shelf 14 to the device 12 according to the instruction of the lot transfer control device 50, or
It has a function of transporting from the device 12 to the automatic shelf 14.
Each of the devices 12 has a function of requesting the lot transfer control device 50 to supply and collect a lot. The lot progress management device 40 has a function of grasping the process flow and the current position of each lot.

FIG. 3 is a diagram showing an example of the relationship between the automatic shelf 14, the device group, and the device 12. As shown in FIG. The device group means a group in which devices 12 that perform the same operation are put together. In the automatic lot transfer system 100 according to the present embodiment shown in FIG.
, A005 (12), semiconductor manufacturing apparatuses B001 (12), B002 (12), and semiconductor manufacturing apparatus C001 (12) are connected to the in-process transport system 20.
Connected to the automatic shelf 1 (14). The semiconductor manufacturing apparatuses A001 (12),..., A005 (12) belong to the apparatus group A, and the semiconductor manufacturing apparatuses B001 (12), B001
002 (12) belongs to the device group B, and the semiconductor manufacturing device C0
01 (12) belongs to the device group C. Semiconductor manufacturing equipment D0
, D010 (12), semiconductor manufacturing apparatuses E001 (12), E002 (12)
2 is connected to the automatic shelf 2 (14) by the in-process transfer system 20. Semiconductor manufacturing apparatus D001 (12),..., D
Until 010 (12) belongs to the device group D, and the semiconductor manufacturing devices E001 (12) and E002 (12) belong to the device group E.

Hereinafter, in order to describe the configuration of the present embodiment in more detail, it is assumed that the device group A is a device group responsible for an allowable time start process and the device group E is a device group responsible for an allowable time end process. . FIG. 4 is a schematic diagram showing an internal configuration of the lot transfer control device 50 according to the first embodiment of the present invention. Referring to FIG. 4, the lot transfer control device 50 includes:
It has a function of instructing the automatic shelf 1 (14) or the automatic shelf 2 (14) to take out a specific lot, and a function of instructing the inter-process transport system 30 and the intra-process transport system 20 about the destination of the lot. I have.

The lot transfer control device 50 controls the automatic shelf 1 (1
4) Each of the automatic shelves 2 (14) has a subordinate device group. Under the device group, in the case of a device group (device group A) that is in charge of the allowable time start process, there are queues of “start A” and “start B”, and a device group (in charge of the allowable time end process) In the case of the device group E), “end A” and “end B” queues exist. In the present embodiment, since the device group A is a device group in charge of the allowable time start process, and the device group E is a device group in charge of the allowable time end process, “start A” is a process in the device group A. Waiting and the queue of the lot whose equipment group in the next process is the equipment group E, “Start B” is waiting for the processing in the equipment group A, and the equipment group in the next process is the equipment group This is a queue of lots other than E. “End A” is a queue of lots waiting for the process in the device group E and reserved in the devices 12 of the device group E, and “End B” is a process in the device group E. This is a queue of lots waiting and not reserved for the devices 12 of the device group E. The lot belonging to “end A” has the ID of the device 12 of the reserved device group E. In the case of other device groups (device groups B, C, and D), each device group has one queue of lots waiting for processing in the device group.

The lot transfer control device 50 controls the automatic shelf 1 (1
4) Upon receiving the arrival report reported from each of the automatic shelves 2 (14), based on the notified lot ID (lot identification information), the apparatus group of the current process of the lot is shown in FIG.
The inquiry is made to the lot progress management device 40 indicated by.

If the device group of the current process of the lot obtained by this inquiry is the device group in charge of the allowable time start process, the lot transfer control device 50 further sends the lot progress control device 40 a While inquiring about the equipment group of the process, if the equipment group of the next process is the equipment group responsible for the end of the allowable time, the lot ID is registered in the queue of “Start A” under the equipment group of the current process, while If the device group is not the device group that is in charge of the allowable time ending process, the lot ID is registered in the “start B” queue under the device group of the current process.

Further, the lot transfer control device 50 determines that the device group of the current process of the lot obtained by the inquiry is a device group in charge of the process of ending the allowable time, and the lot is already in the device group. If the lot is registered in the device 12 of the current process group, the lot ID is registered in the queue of “End A” under the device group of the current process. The lot ID is registered in the “end B” queue under the device group.

If the device group of the current process of the lot obtained by this inquiry is a device group that is not responsible for the allowable time start process and the allowable time end process, the lot transfer control device 50 sets the queue under the device group. Has a function of registering a lot ID. In addition, the lot transfer control device 5
No. 0 has a function of deleting the lot ID notified by the delivery report from the device group waiting queue.

FIG. 5 is a flow chart for explaining the operation of the device 12 in the allowable time end step when receiving the supply request. Referring to FIG. 5, when receiving a supply request of the device 12 in the allowable time end step, the lot transfer control device 50
The “start A”, “end A”, and “end B” queues under the device group of the device 12 are searched (step S51), and the queue of “end A” is reserved for the device 12 that has issued the supply request. Check whether there is any lot (step S52)
Then, as a result, if there is a lot reserved for the device 12 that has issued the supply request in the queue of “End A” (YES in step S52), a command is issued to supply the lot to the device 12. The automatic shelf 14, the in-process transport system 20,
It is transmitted to the inter-process transport system 30 (step S53), and if there is no such lot (N in step S52).
O) uses a given algorithm (for example, FIFO) with the “start A” and “end B” queues as search ranges.
(First In First Out))
One lot is selected (step S55), and it is checked whether the selected lot belongs to "end B" (step S56). As a result, when the lot belongs to "end B" (step S55) (YES in S56) transmits a command to the automatic shelf 14, the in-process transport system 20, and the inter-process transport system 30 to supply the lot to the apparatus 12 (step S54), while the lot is determined to be “End B”. , That is, if it belongs to “start A” (step S
56) is reserved as a reservation for the device 12,
The information is stored (step S57).

FIG. 6 is a flowchart for explaining the operation of the device 12 in the allowable time start step when receiving the supply request. Referring to FIG. 6, in the lot transfer control device 50,
When the supply request of the device 12 in charge of the allowable time start process is received, the “start A” queue of the device 12 is searched (step S61), and the “start A” queue under the device group of the device 12 is searched. It is checked whether the reserved lot exists in the device 12 in charge of the allowable time end process (step S6).
2) If there is a lot already reserved for the device 12 in charge of the allowable time ending process in “start A” under the device group of the device 12 (YES in step S62), the lot is started for the allowable time. It is supplied to the device 12 in charge of the process (step S63).

If the reserved lot does not exist (NO in step S62), a queue of "start B" under the device group of the device 12 is searched (step S64).
The presence of a lot belonging to “start B” under the device group of the device 12 is checked (step S65), and
If there is a lot belonging to “start B” under the device group (YES in step S65), one of the lots is selected by a given algorithm (step S66), and the allowable time is selected. The command is sent to the automatic shelf 1 so that the command is supplied to the device 12 in charge of the starting process (step S67).
4. Transmit to the intra-process transport system 20 and the inter-process transport system 30.
On the other hand, when there is no lot belonging to “start B” under the device group of the device 12 (NO in step S65), the lot is not supplied to the device 12 in charge of the allowable time start process (step S68), and the lot transfer control is performed. The device 50 has a function of holding a supply request.

Next, a lot transfer control method (operation of the lot transfer control device 50) will be described with reference to FIGS.

(1) When a lot arrives at the automatic shelf 1 (14) waiting for the device group A and the device group of the next process is not the device group E (when the lot has no allowable time limit). . When the lot reaches the automatic shelf 1 (14),
The automatic shelf 1 (14) reads the ID of the lot and notifies the lot transfer control device 50 of the ID as an arrival report. The lot transfer control device 50 receives the arrival report and inquires of the lot progress management device 40 about the device group of the current process of the lot based on the ID of the lot. The device group thus obtained is the device group A, and since this device group A is in charge of the allowable time start process, the lot progress management device 4
Inquires of 0 about the equipment group of the next process. In this case, since the device group of the next process is not the device group in charge of the allowable time ending process, the lot transfer control device 50 registers the ID of this lot in the “start B” queue of the device group A.

Next, the device A 003 (1
Assume that 2) requests the lot transfer control device 50 to supply a lot. At this time, if there is a lot already assigned to the device 12 in charge of the allowable time end process at “start A”, the lot is selected. (1-1) No lot exists at “start A” ,
Select the lot belonging to “Start B”, and
A command is sent to the automatic shelf 14, the in-process transport system 20, and the inter-process transport system 30 so as to supply the command to 3 (12). (1-2) On the other hand, in cases other than the above case, that is, when a lot exists at “start A”, the lot within “start A” is supplied to the device 12 of the device group A first, and then The lot is supplied to the devices 12 of the device group A. At this time, the lot waits in front of the device group A until the lot in the start A is supplied. However, the number of lots in the “start A” is the maximum number of the devices 12 in the device group B. Device group B
Are supplied to the devices 12 of the device group A within the time required to supply the lots of the 12 devices. As described above, in any of the above cases, the lot waiting for a supply request from the device 12 that is in charge of the allowable time start process is the device 12 of the next process if the next process of the lot is not the allowable time end process. Is supplied to the apparatus 12 in the allowable time start step without waiting for the supply request of the above.

(2) A case where a lot waiting for the device group A and a lot of the device group E in the next process is put in the automatic shelf 1 (14) (that is, the lot has an allowable time limit). . The lot arrives at the automatic shelf 1 (14), and the automatic shelf 1 (14) reads the ID of the lot and notifies the lot transport control device 50 of the lot as an arrival report. The lot transfer control device 50 receives the arrival report and inquires of the lot progress management device 40 about the device group of the current process of the lot based on the ID of the lot. The device group thus obtained is the device group A, and since this device group A is in charge of the allowable time start step, the lot progress management device 40
Is inquired about the equipment group of the next process. At this time, since the device group in the next process is the device group E and the device group in charge of the allowable time ending process, the lot transfer control device 50 registers the ID of this lot in the “start A” queue of the device group A. Next, it is assumed that the device A003 (12) belonging to the device group A has requested the lot transfer control device 50 to supply a lot. At this time, if there is a lot already reserved in the apparatus 12 in charge of the allowable time end process at “start A”, the lot is selected. At this time, such a lot does not exist and Since the lot has not yet been assigned to the device 12 in charge of the allowable time end process, the lot is not supplied to the device A003 (12).

Next, the device E002 (1
Assume that 2) requests the lot transfer control device 50 to supply a lot. (2-1) When a lot reserved in the device E002 (12) exists in “End A”, the lot transfer control device 5
0 supplies the lot to the apparatus E002 (12).
At this time, the lot in “start A” is stored in the device A003.
Since it is not supplied to (12), the permissible time limit is not violated. (2-2) When the lot reserved for the device E002 (12) does not exist at the "end A", and (2-2-1) When the lot does not exist at the "end B", the lot transfer control device 50 reserves the lot belonging to “start A” in the apparatus E002 (12). Since this lot has been reserved for the device 12 of the device group E, the lot transfer control device 50 issues a command to supply the lot to the device A003 (12) by the automatic shelf 14 and the in-process transfer system 2.
0, transmitted to the inter-process transport system 30. The lot is processed by the apparatus A003 (12), and returns to the automatic shelf 1 (14) by the in-process transport system 20 again. Automatic shelf 1 (14)
The ID of the lot is read, and the lot transfer control device 50 is read.
Notify you as an arrival report. Lot transfer control device 50
Receives the arrival report and inquires of the lot progress management device 40 about the device group of the current process of the lot based on the ID of the lot. In this case, the device group thus obtained is the device group E, and since the device group E is in charge of the allowable time end step, it is further confirmed whether or not the lot is reserved for the device 12 of the device group E. At this time, the device group E
Is reserved in the device E002 (12), the lot transfer control device 50 registers the ID of this lot in the “end A” queue of the device group E.

Since the apparatus E002 (12) has reserved the lot, the lot transfer control device 50 does not supply another lot to the apparatus E002 (12). When the lot enters the “end A” queue, the lot is selected, and an instruction is sent to the automatic shelf 14, the intra-process transport system 20, and the inter-process transport system 30 so as to supply the selected lot to the apparatus E <b> 002 (12).
Send to Since the apparatus E002 (12) is always in a state in which the lot can be received, the lot can comply with the allowable time limit. (2-2-2) When a lot exists in “End B”,
The lot transfer control device 50 uses a queue of “start A” and “end B” as a search range, and uses a given algorithm, for example, FIFO, that is, an algorithm for selecting the oldest lot of the pre-process end time. Select one lot. (2-2-2-1) Further, the lot is “end B”
In the case of a lot belonging to the automatic shelf 14 and the in-process transport system 2, a command is issued to supply the lot to the apparatus 12.
0, transmitted to the inter-process transport system 30. Since the lot belonging to “start A” is not supplied to the apparatus A003 (12), the allowable time limit is not violated. (2-2-2-2) When the lot belongs to “start A”, the lot transfer control device 50 reserves the lot belonging to “start A” in the device E002 (12). Since this lot is reserved for the device 12 of the device group E, the lot transfer control device 50 stores the lot in the device A003 (1
A command is sent to the automatic shelf 14, the intra-process transport system 20, and the inter-process transport system 30 so as to supply them to 2). The following behavior
This is the same as the above (2-2-1), and as a result, the lot can comply with the allowable time limit. In the above case, it is assumed that the time required for the conveyance is larger than the allowable time limit with a certain margin. If the time required for transportation is shorter than the allowable time limit, it is difficult to guarantee compliance with the allowable time limit regardless of the control performed by the lot transfer control system.

(3) A case where a lot waiting for the device group B in the automatic rack 1 (14) and a device group of the device group E in the next process is put into the lot (when the lot has no allowable time limit). The lot arrives at the automatic shelf 1 (14), and the automatic shelf 1 (14) reads the ID of the lot and notifies the lot transport control device 50 of the lot as an arrival report. The lot transfer control device 50 receives the arrival report and inquires of the lot progress management device 40 about the device group of the current process of the lot based on the ID of the lot. Since the device group obtained in this way is the device group B, and the device group B is neither the allowable time start step nor the allowable time end step, the lot transfer control device 50 stores the ID of this lot in the queue of the device group B. Register with. Next, the device B002 (1
Assume that 2) requests the lot transfer control device 50 to supply a lot. Accordingly, the lot transfer control device 5
No. 0 transmits a command to the automatic shelf 14, the intra-process transport system 20, and the inter-process transport system 30 to supply the lot to the apparatus B002 (12). The lot is stored in the device B002 (1
The processing is performed in 2), and the process returns to the automatic shelf 1 (14) again by the in-process transport system 20. The automatic shelf 1 (14) reads the ID of the lot and notifies the lot transfer control device 50 of the ID as an arrival report. The lot transfer control device 50 receives the arrival report and sends the ID of the lot to the lot progress management device 40.
Is used to inquire the equipment group of the current process of the lot. The device group thus obtained is a device group E,
Since the device group E is in charge of the allowable time end step, it is further confirmed whether or not the lot is reserved for the device 12 of the device group E. At this time, since no reservation has been made, the lot transfer control device 50 registers the ID of this lot in the “end B” queue of the device group E.

Next, the device E002 (1
Assume that 2) requests the lot transfer control device 50 to supply a lot. The subsequent operation is the same as the operation described in (2-2-2). At this time, if the lot transfer control device 50 appropriately selects in advance an algorithm for determining a lot to be supplied with the “start A” and “end B” queues as search ranges, the devices 12 of the device group E will Both lots belonging to "start A" and lots belonging to "end B" can be supplied equally. As an example of the algorithm, an algorithm is conceivable in which a lot having the oldest end time of the previous process of the lot is selected from the union of “start A” and “end B”. However, the present invention does not limit the algorithm of the lot transfer control device 50 to this algorithm.

As described above, the first embodiment has the following advantages. First, the first effect is
The lot waiting for the supply request of the device 12 in charge of the allowable time start process is replaced with the device of the allowable time start process without waiting for the supply request of the device 12 of the next process when the next process of the lot is not the allowable time end process. 12 can be supplied. The second effect is that the device 12 in charge of the allowable time end step can uniformly supply both the lot from the allowable time start step and the lot from the steps other than the allowable time start step.

(Second Embodiment) FIG. 7 shows a second embodiment of the present invention.
FIG. 2 is a hardware configuration diagram for describing an entire lot automatic transfer system 100 using a lot transfer control device 50 according to the embodiment. The same portions as those already described in the first embodiment are denoted by the same reference numerals, and duplicate description will be omitted. In the present embodiment, the inter-process transfer system 30 of the first embodiment is omitted, and a single automatic
Is characterized by the fact that The functions of the automatic shelf 14, the in-process transport system 20, each device 12, and the lot progress management device 40 shown in FIG. 7 are the same as those in the first embodiment.

FIG. 8 is a schematic diagram showing the internal configuration of the lot transfer control device 50 according to the second embodiment of the present invention. In this embodiment, as shown in FIGS. 7 and 8, only one automatic shelf 14 is used, and a device group responsible for the allowable time start process is a device group A, and a device group responsible for the allowable time end process is a device group E. And For this reason, similar to the first embodiment,
Two queues of “start A” and “start B” exist under the device group A, and two queues of “end A” and “end B” exist under the device group E. The function and operation procedure of the lot transfer control device 50 are as follows.
This is the same as the first embodiment except that there is no instruction to 0. As described above, according to the second embodiment, the same effects as those described in the first embodiment can be obtained.

It should be noted that the present invention is not limited to the above embodiments, and it is clear that each embodiment can be appropriately modified within the scope of the technical idea of the present invention. Further, the number, position, shape, and the like of the constituent members are not limited to the above-described embodiment, and can be set to numbers, positions, shapes, and the like suitable for carrying out the present invention. In each drawing, the same components are denoted by the same reference numerals.

[0039]

Since the present invention is configured as described above, the following effects can be obtained. First, the first effect is that a lot waiting for a supply request of a device in charge of an allowable time start process is permitted without waiting for a supply request of a device of the next process when the next process of the lot is not the allowable time end process. It can be supplied to the device in the time start process. And the second
The effect of (1) is that the device in charge of the allowable time end step can uniformly supply both the lot from the allowable time start step and the lot from the steps other than the allowable time start step.

[Brief description of the drawings]

FIG. 1 is a hardware configuration diagram for describing an entire lot automatic transfer system using a lot transfer control device according to a first embodiment of the present invention.

FIG. 2 is a processing flow showing the configuration of the automatic lot transfer system of FIG. 1 from the viewpoint of information processing.

FIG. 3 is a diagram illustrating an example of a relationship between an automatic shelf, a device group, and devices.

FIG. 4 is a schematic diagram illustrating an internal configuration of the lot transfer control device according to the first embodiment of the present invention.

FIG. 5 is a flowchart for explaining the operation of the apparatus in the allowable time end step when receiving a supply request.

FIG. 6 is a flowchart for explaining the operation of the apparatus in the allowable time start step when receiving a supply request.

FIG. 7 is a hardware configuration diagram for explaining an entire lot automatic transfer system using a lot transfer control device according to a second embodiment of the present invention.

FIG. 8 is a schematic diagram illustrating an internal configuration of a lot transfer control device according to a second embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 12 apparatus 14 Automatic shelf 20 In-process conveyance system 30 Inter-process conveyance system 40 Lot progress management device 50 Lot conveyance control device 100 Lot automatic conveyance system A001, ..., A005, B001, B002, C00
, D010, E001, E002 Semiconductor manufacturing equipment A, B, C, D, E equipment group

Claims (18)

[Claims] 1. An automatic lot transfer system for supplying a lot to each of a plurality of types of devices existing in a production line and collecting the lot after completion of the processing in each device with a short waiting time. A shelf and a plurality of devices are arranged and provided with a function of supplying a lot discharged from the automatic shelf to the device, and a function of collecting a lot placed in the device and transporting the lot to the automatic shelf; An in-process transport system, an inter-process transport system that connects the automatic shelves and transports a lot issued from the automatic shelf to another automatic shelf, and instructs the automatic shelf to issue a specific lot,
A lot transfer control device that instructs a transfer destination of the lot to the inter-process transfer system and the in-process transfer system, and a lot progress management device that grasps a process flow and a current position of each lot; An automatic lot transfer system configured to request supply and collection from the lot transfer control device. 2. The lot transfer control device receives an arrival report reported from the automatic shelf, and inquires the lot progress management device about a device group in a current process of the lot based on the notified lot identification information. The device group of the current process of the lot obtained by the inquiry is a device group in charge of the allowable time start process, and further inquires of the lot progress management device about the device group of the next process of the lot, and When the device group is in charge of the allowable time end process, the lot identification information is registered in the queue of the first type start processing waiting lot set under the device group of the current process, while the device group of the next process is permitted. When the device group is not in charge of the time ending process, the lot identification information is registered in the queue of the second type waiting lot for start processing under the device group of the current process, and the inquiry is made. The device group of the current process of the lot obtained by the set is the device group in charge of the allowable time end process, and the device group of the current process under the device group of the current process when the lot is already reserved for the device of the device group. While the lot identification information is registered in the queue of one type of waiting-for-end-processing lot set, when the lot is not reserved for the equipment of the above-mentioned equipment group, the second kind of waiting-for-processing-lot-set under the equipment group of the current process is set. If the equipment group of the current process of the lot obtained by the inquiry is the equipment group that is not responsible for the allowable time start process and the allowable time end process, the lot identification information is registered in the queue under the device group. 2. The automatic lot transfer system according to claim 1, wherein the system is configured to register information. 3. The automatic lot transfer system according to claim 2, wherein the lot transfer control device has a function of deleting the lot identification information notified by the delivery report from the device group waiting queue. . 4. When receiving a supply request for an apparatus in an allowable time end step, the lot transfer control apparatus, the first type waiting lot set under the apparatus group of the apparatus and the first type Lots waiting for completion processing and the second
Searching for a queue of the kind of lots waiting for completion processing, and checking whether there is a lot reserved for the device that has issued the supply request in the queue of the lot of kinds waiting for completion processing, If there is a lot reserved for the device that issued the supply request in the queue of the lot set waiting for completion processing, the automatic shelf, the in-process transport system, and the process are executed so that the lot is supplied to the device. When the corresponding lot does not exist in the queue of the first type waiting lot set, the first type waiting set lot and the second type waiting lot lot are sent. A lot based on a predetermined algorithm is selected using the set queue as a search range, and it is checked whether the selected lot belongs to the second type of waiting-for-final-process set, and In the case of a lot belonging to the second type end processing waiting lot set, to send the lot to the apparatus, the automatic shelf, the in-process transport system, while sending a command to the inter-process transport system, 3. The apparatus according to claim 2, wherein when the lot belongs to the first type waiting lot set, the lot is allocated as a reservation of the apparatus and information related to the reservation is stored. 4. Lot automatic transfer system. 5. The lot transfer control device, upon receiving a supply request for a device in charge of an allowable time start process, stores the queue of the first type waiting lot set under the device group of the device in the queue. It is checked whether there is a lot reserved for the device in charge of the time ending process, and the device is already reserved for the device in charge of the allowable time ending process in the first type start processing waiting lot set under the device group of the device. If there is a lot, the lot is supplied to the device in charge of the allowable time start process. If there is no reserved lot, the queue of the second type waiting lot for start processing under the device group of the device is supplied. To check for the existence of a lot belonging to the second type of waiting queue for start processing under the device group of the device. When there is a lot to be performed, a command is transmitted to the automatic shelf, the in-process transport system, and the inter-process transport system so that a lot based on a predetermined algorithm is selected and supplied to the device in charge of the allowable time start process. When there is no lot belonging to the second type waiting queue set under the device group of the device, the lot transfer control device holds the supply request without supplying the lot to the device in charge of the allowable time start process. 3. The automatic lot transfer system according to claim 2, wherein the system is configured to perform the following operations. 6. The automatic shelf, according to an instruction from the lot transfer control device, unloads a lot in the automatic shelf specified by the lot transfer control device, and transfers the in-process transfer system or the inter-process transfer. The automatic lot transfer system according to claim 4, wherein the system is configured to be transferred to a system. 7. The automatic lot transfer system according to claim 4, wherein the automatic shelf is configured to notify the lot transfer control device that the unloading operation has been completed. 8. The automatic shelf is configured to read identification information of a lot arriving at the automatic shelf by the inter-process transport system or the in-process transport system and to notify the lot transport control device. The automatic lot transfer system according to claim 4 or 5, wherein: 9. The automatic shelf according to claim 4, wherein the inter-process transport system or the in-process transport system takes in the lot arriving at the automatic shelf and stores it therein. Or the automatic lot transfer system according to 5. 10. A lot transfer control method for uniformly supplying a lot to each of a plurality of types of devices existing in a production line and collecting lots after completion of processing in each device with a short waiting time. A function of supplying a lot taken out of the automatic shelf to the apparatus with respect to a shelf and an in-process transfer system provided with a plurality of apparatuses, and a step of collecting the lot placed in the apparatus and transporting the lot to the automatic shelf Internal transfer processing, an inter-process transfer process of transferring a lot taken out of the automatic shelf to another automatic shelf for an inter-process transfer system configured by connecting automatic shelves, Instruct the lot to be issued,
A lot transfer control process having a function of instructing a destination of a lot in the inter-process transfer process and the in-process transfer process, and a lot progress management device having a function of grasping a process flow and a current position of each lot; A lot transfer control method, wherein the apparatus requests the lot transfer control processing to supply and collect a lot. 11. The lot transfer control process receives an arrival report reported from the automatic shelf and inquires the lot progress management device about a device group in a current process of the lot based on the notified lot identification information. Processing, the device group of the current process of the lot obtained by the inquiry is a device group in charge of the allowable time start process, and further inquires of the lot progress management device about the device group of the next process of the lot, and When the device group of the process is the device group in charge of the process of ending the allowable time, the lot identification information is registered in the queue of the first type waiting lot for start processing under the device group of the current process, while the device group of the next process is registered. Process for registering the lot identification information in the queue of the second type start processing waiting lot set under the device group of the current process when is not the device group in charge of the allowable time end process The device group of the current process of the lot obtained by the inquiry is a device group in charge of the allowable time end process, and the device group of the current process when the lot is already reserved for the device of the device group. While the lot identification information is registered in the queue of the first type waiting lot set under the subordinate, while the lot is not reserved for the apparatus of the apparatus group, the second type of termination processing under the apparatus group of the current process The process of registering the lot identification information in the queue of the waiting lot set, and if the device group of the current process of the lot obtained by the inquiry is the device group that is not responsible for the allowable time start process and the allowable time end process, it is under the device group 11. The method according to claim 10, further comprising a step of registering the lot identification information in the queue. 12. The lot transfer control method according to claim 11, wherein the lot transfer control process includes a process of deleting the lot identification information notified by the delivery report from the device group waiting queue. 13. The lot transfer control process, when receiving a supply request of an apparatus in an allowable time ending step, the first type start processing waiting lot set under the apparatus group of the apparatus and the first type Lots waiting for completion processing and the second
A process of searching for a queue of a sort set waiting-for-finish lot set; a process of checking whether a queue reserved for a device that has issued a supply request exists in the queue of the first kind finish-process waiting lot set; If there is a lot reserved for the device that issued the supply request in the queue of the first type end processing waiting lot set, the automatic shelf and the intra-process transfer are performed so that the lot is supplied to the device. A process of transmitting a command to the process and the inter-process transfer process; and if the corresponding lot does not exist in the queue of the first type of end process waiting lot set, the first type of start process waiting lot set and the second A process of selecting a lot based on a predetermined algorithm using a queue of a kind of lots waiting for completion processing as a search range; And if the lot is a lot belonging to the second type of waiting for end processing set, the automatic shelf, the in-process transfer processing, While sending a command to the inter-process transfer process, the lot is
12. The lot transfer control method according to claim 11, further comprising, when belonging to a kind of start processing waiting lot set, assigning a reservation of the apparatus and storing information related to the reservation. 14. The lot transfer control process, when receiving a supply request for a device in charge of an allowable time start process, stores an allowable time in a queue of the first type waiting lot set under the device group of the device. Checking whether there is a reserved lot in the device in charge of the time end process, and reserving the device in charge of the allowable time end process in the first type waiting lot set under the device group of the device. If there is a reserved lot, a process of supplying the lot to the device in charge of the allowable time start process, and if there is no reserved lot, waiting for the second type start process under the device group of the device. A process of searching for a queue of a lot set and checking for the existence of a lot belonging to the second type of waiting-for-start processing lot set under the device group of the device; and a process of checking the second type under the device group of the device. When there is a lot belonging to the start processing waiting lot set, the automatic shelf, the intra-process transfer process, and the inter-process transfer are performed so that a lot based on a predetermined algorithm is selected and supplied to the device in charge of the allowable time start process. A process of transmitting a command to the process, and when there is no lot belonging to the second type of waiting for start process set under the device group of the device, the lot is not supplied to the device in charge of the allowable time start process, and the lot is not supplied. 12. The lot transfer control method according to claim 11, wherein the transfer control process includes a process for holding a supply request. 15. The automatic shelf, according to an instruction of the lot transfer control process, unloads a lot in the automatic shelf specified by the lot transfer control process, and performs the in-process transfer process or the inter-process transfer. 15. The lot transfer control method according to claim 13, wherein a process to be passed to the process is executed. 16. The lot transfer control method according to claim 13, wherein the automatic shelf executes a process of notifying the lot transfer control process that the unloading operation has been completed. 17. The automatic shelf executes a process of reading identification information of a lot arriving at the automatic shelf by the inter-process transfer process or the intra-process transfer process and notifying the lot transfer control process. Claim 13
Or the lot transfer control method according to 14. 18. The automatic shelf according to claim 13 or 14, wherein a lot arriving at the automatic shelf by the inter-process transfer process or the intra-process transfer process is taken in and stored therein. The lot transfer control method described in 1.