JP2000283973A - Method for detecting fluorine containing compound gas - Google Patents
Method for detecting fluorine containing compound gasInfo
- Publication number
- JP2000283973A JP2000283973A JP2000008107A JP2000008107A JP2000283973A JP 2000283973 A JP2000283973 A JP 2000283973A JP 2000008107 A JP2000008107 A JP 2000008107A JP 2000008107 A JP2000008107 A JP 2000008107A JP 2000283973 A JP2000283973 A JP 2000283973A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- solid metal
- detecting
- containing compound
- fluorine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は微量のフッ素含有化
合物ガスを高精度に検出することを目的とするフッ素含
有化合物ガスの検出方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for detecting a fluorine-containing compound gas for detecting a trace amount of a fluorine-containing compound gas with high accuracy.
【０００２】[0002]
【従来の技術】クロロフルオロカーボン、パーフルオロ
カーボン、パーフルオロコンパウンズ等のフッ素含有化
合物ガスの中には、オゾン破壊係数（ＯＤＰ）や地球温
暖化係数（ＧＷＰ）の高いものが数多く存在し、近年国
際的に大きな問題となっている。このためＯＤＰやＧＷ
Ｐの低い代替ガスも開発されてきているが、これらの中
には可燃性または毒性のあるガスも多く含まれている。2. Description of the Related Art Many fluorine-containing compound gases such as chlorofluorocarbons, perfluorocarbons, and perfluorocompounds have a high ozone depletion potential (ODP) and a high global warming potential (GWP). Is a major problem. ODP and GW
Alternative gases with low P have been developed, but these also include many flammable or toxic gases.
【０００３】これら、フッ素含有化合物ガスの検出に
は、フッ素含有化合物ガスの赤外線吸収を利用した赤外
線式や熱線コイルの抵抗変化を利用した熱線式のセンサ
ーが使用されている。[0003] In order to detect such a fluorine-containing compound gas, an infrared sensor utilizing infrared absorption of the fluorine-containing compound gas or a hot wire sensor utilizing a resistance change of a hot wire coil is used.
【０００４】[0004]
【発明が解決しようとする問題点】上記したフッ素含有
化合物ガスを検出する場合、赤外線式や熱線式ではいず
れも検出下限が数１００ｐｐｍであり、数ｐｐｍのフッ
素含有化合物ガスの検出は不可能であった。近年開発さ
れてきているＯＤＰやＧＷＰの低い代替ガス中には、可
燃性または毒性のあるガスも多く含まれており、これら
ガスについては数ｐｐｍオーダの微量の検出が必要とな
ってきている。When detecting the above-mentioned fluorine-containing compound gas, the detection lower limit of the infrared ray method or the hot-wire method is several hundred ppm, and it is impossible to detect a fluorine-containing compound gas of several ppm. there were. In recent years, alternative gases having low ODP and GWP that contain many combustible or toxic gases are contained, and it is necessary to detect trace amounts of these gases on the order of several ppm.
【０００５】従来、ガスの検知方法としては、市販され
ているガス検知剤を用いる方法があるが、かかるガス検
知剤を用いて、ＨＦ，ＨＣｌ，Ｃｌ2，ＨＢｒ，Ｓｉ
Ｆ4，ＳｉＣｌ4，ＢＦ3，ＢＣｌ3，ＷＦ6，ＭｏＦ6，Ｖ
Ｆ5，ＧｅＦ4等のガスを検知できるものであるが、この
ガス検知剤は、これらの対象ガスと反応して変色により
微量検出が可能となるものである。市販されている検知
剤は、シリカゲルやアルミナ等の担体に発色試薬をコー
ティングさせたもので、発色試薬は検出対象ガスに対し
て選択的に反応する。これらのガス検知剤は、ＨＦ，Ｈ
Ｃｌ，Ｃｌ2，ＨＢｒ，ＳｉＦ4，ＳｉＣｌ4，ＢＦ3，Ｂ
Ｃｌ3，ＷＦ6，ＭｏＦ6，ＶＦ5，ＧｅＦ4等のガスを数
ｐｐｍオーダで検出が可能である。また、ガス検知剤以
外でこれらのガスの検出方法としては、電気分解を利用
したガス検知器がある。これは電極上で対象ガスを電気
分解し、そのとき発生する電流がガス濃度に比例するこ
とを利用したもので、電流出力により濃度を検出する。
さらに、ガス検知器の別の方式では発色剤を含浸させた
ニトロセルロース等の材質で作られた通気性のあるテー
プに測定ガスを通過させ、反応により形成される発色か
らの反射光を電流出力に変換し測定することにより定量
的に検出するテープ式のガス検知器がある。これらガス
検知器では、ＨＦ，ＨＣｌ，Ｃｌ2，ＨＢｒ，ＳｉＦ4，
ＳｉＣｌ4，ＢＦ3，ＢＣｌ3，ＷＦ6，ＭｏＦ6，ＶＦ5，
ＧｅＦ4等のガスを数ｐｐｍオーダで検出が可能であ
る。Conventionally, as a method for detecting gas, there is a method using a commercially available gas detecting agent. By using such a gas detecting agent, HF, HCl, Cl 2 , HBr, and Si are used.
F 4 , SiCl 4 , BF 3 , BCl 3 , WF 6 , MoF 6 , V
Although it can detect gases such as F 5 and GeF 4 , this gas detecting agent reacts with these target gases and can detect a trace amount by discoloration. A commercially available detection agent is obtained by coating a carrier such as silica gel or alumina with a coloring reagent, and the coloring reagent selectively reacts with a gas to be detected. These gas detectors are HF, H
Cl, Cl 2 , HBr, SiF 4 , SiCl 4 , BF 3 , B
Gases such as Cl 3 , WF 6 , MoF 6 , VF 5 , and GeF 4 can be detected in the order of several ppm. As a method for detecting these gases other than the gas detector, there is a gas detector utilizing electrolysis. This utilizes the fact that the target gas is electrolyzed on an electrode and the current generated at that time is proportional to the gas concentration, and the concentration is detected by a current output.
In addition, another method of gas detector is to pass the measurement gas through a gas-permeable tape made of a material such as nitrocellulose impregnated with a color former, and output the reflected light from the color formed by the reaction as a current output There is a tape-type gas detector that quantitatively detects by converting to and measuring. In these gas detectors, HF, HCl, Cl 2 , HBr, SiF 4 ,
SiCl 4 , BF 3 , BCl 3 , WF 6 , MoF 6 , VF 5 ,
Gases such as GeF 4 can be detected on the order of several ppm.
【０００６】[0006]
【問題点を解決するための手段】本発明者らは、かかる
問題点に鑑み鋭意検討の結果、常温では反応性の低いフ
ッ素含有化合物ガスを金属と加熱下において反応させる
ことにより、検知しやすいガスに変換生成させ、そのガ
スを直接検出することにより、数ｐｐｍの微量のフッ素
含有化合物ガスを間接的に検出できることを見いだし本
発明に到達したものである。Means for Solving the Problems The inventors of the present invention have conducted intensive studies in view of such problems, and as a result, they have been found to be easy to detect by reacting a fluorine-containing compound gas having low reactivity at room temperature with a metal under heating. The present invention has been found that it is possible to indirectly detect a trace amount of a fluorine-containing compound gas of a few ppm by converting the gas into a gas and directly detecting the gas, thereby achieving the present invention.
【０００７】すなわち本発明は、フッ素含有化合物ガス
の検出方法として、フッ素含有化合物ガスを微量含むガ
スを加熱した固体金属と接触反応させ、生成したガスを
検出することを特徴とする微量のフッ素含有化合物ガス
の検出方法を提供するものである。That is, the present invention provides a method for detecting a fluorine-containing compound gas, which comprises reacting a gas containing a small amount of a fluorine-containing compound gas with a heated solid metal and detecting the generated gas. A method for detecting a compound gas is provided.
【０００８】本発明において、検知の対象とするフッ素
含有化合物とは、クロロフルオロカーボン、パーフルオ
ロカーボン、ハイドロフロロカーボン、ハイドロクロロ
フルオロカーボン、パーフルオロコンパウンズ等であ
り、特に、Ｃ5Ｆ8，Ｃ4Ｆ8，Ｃ 4Ｆ6,Ｃ2Ｆ6，Ｃ3Ｆ8，
ＣＨ2Ｆ2，ＣＨＦ3，ＣＣｌ3Ｆ，ＣＣｌ2Ｆ2，ＣＣｌＦ
3，ＣＣｌ4，ＣＨＣｌＦ2，ＣＨ3Ｃｌ，ＣＨ3Ｂｒ，Ｃ
ＨＣｌ3，ＣＢｒ2Ｆ2，ＣＢｒＦ3，ＣＨ2Ｂｒ2，ＣＨ2
ＢｒＣｌ，ＣＢｒ3Ｆ，ＣＨＢｒ2Ｆ，ＣＨＢｒＦ2，Ｃ
ＢｒＣｌＦ2，Ｃ2Ｈ3Ｃｌ，Ｃ2ＢｒＦ5，Ｃ2ＣｌＦ5，
Ｃ2Ｃｌ2Ｆ4，Ｃ2Ｃｌ3Ｆ3，Ｃ2ＢｒＦ4，Ｃ2Ｂｒ
2Ｆ4，Ｃ2Ｈ2Ｂｒ2Ｆ4，Ｃ2Ｂｒ2ＣｌＦ3，ＮＦ3であ
る。また、本発明で対象となるガスについて、微量と
は、数１０００ｐｐｍ以下のガス濃度であり、特に、１
ｐｐｂ〜１０００ｐｐｍの濃度範囲のガスである。[0008] In the present invention, fluorine to be detected
Contained compounds are chlorofluorocarbon, perfluoro
Carbon, Hydrofluorocarbon, Hydrochloro
Fluorocarbon, perfluoro compounds, etc.
And especially CFiveF8, CFourF8, C FourF6, CTwoF6, CThreeF8,
CHTwoFTwo, CHFThree, CClThreeF, CClTwoFTwo, CCIF
Three, CClFour, CHClFTwo, CHThreeCl, CHThreeBr, C
HClThree, CBrTwoFTwo, CBrFThree, CHTwoBrTwo, CHTwo
BrCl, CBrThreeF, CHBrTwoF, CHBrFTwo, C
BrClFTwo, CTwoHThreeCl, CTwoBrFFive, CTwoClFFive,
CTwoClTwoFFour, CTwoClThreeFThree, CTwoBrFFour, CTwoBr
TwoFFour, CTwoHTwoBrTwoFFour, CTwoBrTwoClFThree, NFThreeIn
You. In addition, the gas targeted in the present invention,
Is a gas concentration of several 1000 ppm or less,
It is a gas in a concentration range of ppb to 1000 ppm.
【０００９】本発明の方法は、上述したようにガス検知
しやすいガスである、ＨＦ，ＨＣｌ，Ｃｌ2，ＨＢｒ，
ＳｉＦ4，ＳｉＣｌ4，ＢＦ3，ＢＣｌ3，ＷＦ6，Ｍｏ
Ｆ6，ＶＦ5，ＧｅＦ4等のガスに変換するために、フッ
素含有化合物を加熱した固体金属と接触反応させるもの
である。According to the method of the present invention, HF, HCl, Cl 2 , HBr,
SiF 4 , SiCl 4 , BF 3 , BCl 3 , WF 6 , Mo
In order to convert the fluorine-containing compound into a gas such as F 6 , VF 5 , or GeF 4 , the fluorine-containing compound is contacted with a heated solid metal.
【００１０】以下、本発明を詳細に説明する。Hereinafter, the present invention will be described in detail.
【００１１】本発明に用いる固体金属は、Ｓｉ，Ｂ，
Ｗ，Ｍｏ，Ｖ，Ｇｅであり、これらを用いることによ
り、上述の検知しやすいガスに変換できる。また、加熱
温度は、１００〜１０００℃の範囲が好ましい。１００
℃未満だと反応が進まず正確に検知できず、１０００℃
を超えると固体金属が軟化、もしくは溶融するためガス
との接触が充分でなく好ましくない。The solid metal used in the present invention is Si, B,
W, Mo, V, and Ge are used, and can be converted into the above-mentioned easily detectable gas by using these. The heating temperature is preferably in the range of 100 to 1000C. 100
If the temperature is lower than ℃, the reaction does not proceed and cannot be detected accurately.
When the ratio exceeds the above, the solid metal is softened or melted, so that the contact with the gas is not sufficient, which is not preferable.
【００１２】具体的に、本発明を図１に基づいて説明す
る。More specifically, the present invention will be described with reference to FIG.
【００１３】図１は、本発明方法によるフッ素含有化合
物ガスを検出確認するための実験フローの概略図を示
す。１は検出対象となる大気中に微量のフッ素含有化合
物ガスを含んだサンプルガスで、このガスを２の固体金
属を充填した筒に毎分５００ｃｍ3程度導入し、固体金
属と接触させる。固体金属充填筒は、３の加熱ヒータに
より加熱し、充填筒内部の固体金属を加熱する。固体金
属充填筒出口には、４のガス検知剤充填筒があり、ここ
に出口ガスを導入し反応生成したガス成分を、検知剤の
変色により確認する。ガス検知剤には、一例としてシリ
カゲルを担体としてベンゼンアゾジフェニルアミンやｏ
−トリジン溶液をコーティングしたものを使用した。固
体金属充填筒出口は、もう一方で５の電気分解を利用し
たガス検知器や６のテープ式のガス検知器に導入され
る。FIG. 1 is a schematic diagram of an experimental flow for detecting and confirming a fluorine-containing compound gas according to the method of the present invention. Reference numeral 1 denotes a sample gas containing a trace amount of a fluorine-containing compound gas in the atmosphere to be detected. The sample gas is introduced into a cylinder filled with solid metal 2 at a rate of about 500 cm 3 per minute, and brought into contact with the solid metal. The solid metal filling cylinder is heated by the three heaters to heat the solid metal inside the filling cylinder. At the outlet of the solid metal-filled cylinder, there are four gas-detecting agent-filled cylinders, and gas components produced by introducing the outlet gas into the outlet are confirmed by the color change of the detecting agent. Examples of the gas detector include benzene azodiphenylamine and o
-The one coated with the Tolidine solution was used. The outlet of the solid metal-filled cylinder is introduced into a gas detector utilizing electrolysis 5 and a tape-type gas detector 6 on the other side.
【００１４】例えば、サンプルガスにＣ5Ｆ8ガスを用
い、固体金属にＳｉを用いた場合、（１）式に示したよ
うにＳｉＦ4が生成するが、 Ｃ5Ｆ8 ＋ ２Ｓｉ → ２ＳｉＦ4 ＋ ５Ｃ （１） さらに、ＳｉＦ4ガスは大気中の水分と反応し（２）式
で示したようにＨＦが生成され、 ２ＳｉＦ4 ＋ ４Ｈ2Ｏ → ２ＨＦ ＋ Ｈ2ＳｉＦ6＋Ｓｉ（ＯＨ）2 （２） この生成されたＨＦガスを、ガス検知剤やガス検知器で
検出する。For example, when C 5 F 8 gas is used as a sample gas and Si is used as a solid metal, SiF 4 is generated as shown in equation (1), but C 5 F 8 + 2Si → 2SiF 4 + 5C (1) Further, the SiF 4 gas reacts with moisture in the atmosphere to generate HF as shown in the equation (2), and 2SiF 4 + 4H 2 O → 2HF + H 2 SiF 6 + Si (OH) 2 (2) The generated HF gas is detected by a gas detector or a gas detector.
【００１５】[0015]
【実施例】以下、実施例により具体的に説明するが、か
かる実施例に限定されるものではない。The present invention will be described in more detail with reference to the following Examples, but it should not be construed that the invention is limited thereto.
【００１６】実施例１〜６ 検出対象ガスとしてＣ5Ｆ8＝１０ｐｐｍの大気を用い、
固体金属にＳｉを用いた。固体金属充填筒加熱温度は７
００℃とした。固体金属との反応で生成したガスの成分
によりガス検知剤（シリカゲルを担体としてベンゼンア
ゾジフェニルアミンをコーティングしたもの。以下表１
中ではａと示す）の変色があり検出が確認された（表１
中に○で示した）。またガス検知器（電気分解を利用し
たガス検知器を以下表１中でｃ、テープ式のガス検知器
を以下表１中でｄと示す。）においても同様に電流出力
が得られ、検出が確認された（表１中に○で示した）。
これらは、（１）式、（２）式のような反応で生成した
ＨＦ成分が検出された。これらＨＦは、フーリエ変換式
赤外線吸光分析法やガスクロマトグラフ法により確認さ
れた。Examples 1 to 6 C 5 F 8 = 10 ppm air was used as a gas to be detected.
Si was used as a solid metal. The heating temperature of the cylinder filled with solid metal is 7
The temperature was set to 00 ° C. A gas detector (coated with benzeneazodiphenylamine using silica gel as a carrier.) With the components of the gas generated by the reaction with the solid metal.
(Indicated by a in the drawing), and the detection was confirmed (Table 1).
(Indicated by ○). Similarly, a gas detector (a gas detector utilizing electrolysis is shown as c in Table 1 below, and a tape-type gas detector is shown as d below in Table 1) can similarly obtain a current output, and can perform detection. It was confirmed (shown by ○ in Table 1).
In these, HF components generated by reactions such as the equations (1) and (2) were detected. These HFs were confirmed by Fourier transform infrared absorption spectroscopy and gas chromatography.
【００１７】実施例１と同様な方法で、検出対象ガスと
して、Ｃ5Ｆ8＝１０ｐｐｍの大気を用い、固体金属に
Ｂ、Ｗ、Ｍｏ、Ｖ、Ｇｅを用いた。固体金属充填筒加熱
温度は７００℃とした。固体金属との反応で生成したガ
スの成分によりガス検知剤ａの変色があり検出が確認さ
れた（表１中に○で示した）。またガス検知器において
も同様に電流出力が得られ、検出が確認された（表１中
に○で示した）。これらの条件及び結果を表１に示し
た。In the same manner as in Example 1, the air to be detected was C 5 F 8 = 10 ppm, and B, W, Mo, V, and Ge were used as the solid metals. The heating temperature of the solid metal-filled cylinder was 700 ° C. The color of the gas detector a was changed by the components of the gas generated by the reaction with the solid metal, and the detection was confirmed (shown by ○ in Table 1). Similarly, a current output was obtained from the gas detector, and the detection was confirmed (shown by a circle in Table 1). Table 1 shows these conditions and results.
【００１８】[0018]
【表１】 [Table 1]
【００１９】実施例７〜３８ 検出対象ガスとしてＣ4Ｆ8＝１０ｐｐｍの大気を用い、
固体金属にＳｉを用いた。固体金属充填筒加熱温度は８
００℃とした。固体金属との反応で生成したガスの成分
によりガス検知剤ａの変色があり検出が確認された（表
２中に○で示した）。またガス検知器においても同様に
電流出力が得られ、検出が確認された（表２中に○で示
した）。Examples 7 to 38 Using C 4 F 8 = 10 ppm air as a gas to be detected,
Si was used as a solid metal. The heating temperature of the cylinder filled with solid metal is 8
The temperature was set to 00 ° C. The color of the gas detector a was changed by the components of the gas generated by the reaction with the solid metal, and the detection was confirmed (shown by ○ in Table 2). Similarly, a current output was obtained from the gas detector, and the detection was confirmed (indicated by a circle in Table 2).
【００２０】また、実施例７と同様な方法で、固体金属
にＳｉを用いて、検出対象ガスを種々代えて、表２に示
した加熱条件で実施した。固体金属との反応で生成した
ガスの成分によりガス検知剤ａの変色があり検出が確認
された（表２中に○で示した）。またガス検知器におい
ても同様に電流出力が得られ、検出が確認された（表２
中に○で示した）。なお、一部ガス検知剤（シリカゲル
を担体としてＯ−トリジン溶液をコーティングしたも
の。以下表２中ではｂを示す）を変更したものも示し
た。これらの条件及び結果を表２に示した。Further, in the same manner as in Example 7, the test was carried out under the heating conditions shown in Table 2 by using Si as the solid metal and changing the gas to be detected in various ways. The color of the gas detector a was changed by the components of the gas generated by the reaction with the solid metal, and the detection was confirmed (shown by ○ in Table 2). Similarly, a current output was obtained in the gas detector, and the detection was confirmed (Table 2).
(Indicated by ○). In addition, some gas detectors (coated with an O-tolidine solution using silica gel as a carrier; hereinafter, b is shown in Table 2) are also shown. Table 2 shows these conditions and results.
【００２１】[0021]
【表２】 [Table 2]
【００２２】[0022]
【発明の効果】以上詳述したように、本発明の方法によ
ればフッ素含有化合物ガスの検出方法において、フッ素
含有化合物ガスを微量含む気体を加熱した固体金属と接
触反応させ、生成したガスを検出するにより、微量のフ
ッ素含有化合物ガスを検出することができる。As described above in detail, according to the method of the present invention, in a method for detecting a fluorine-containing compound gas, a gas containing a trace amount of a fluorine-containing compound gas is brought into contact with a heated solid metal, and the generated gas is reacted. By detecting, a trace amount of fluorine-containing compound gas can be detected.
【図１】フッ素含有化合物ガスの検出確認のための実験
フローの概略図である。FIG. 1 is a schematic diagram of an experimental flow for detecting and confirming a fluorine-containing compound gas.
１・・・サンプルガス（フッ素含有化合物＋窒素） ２・・・固体金属充填筒 ３・・・固体金属充填筒加熱ヒータ ４・・・ガス検知剤 ５・・・電気分解を利用したガス検知器 ６・・・テープ式のガス検知器 DESCRIPTION OF SYMBOLS 1 ... Sample gas (fluorine containing compound + nitrogen) 2 ... Solid metal filling cylinder 3 ... Heater of solid metal filling cylinder 4 ... Gas detector 5 ... Gas detector using electrolysis 6 ... tape type gas detector
───────────────────────────────────────────────────── フロントページの続き (72)発明者 市丸 広志 山口県宇部市大字沖宇部5272番地 セント ラルエンジニアリング株式会社内 (72)発明者 中野 久治 山口県宇部市大字沖宇部5272番地 セント ラルエンジニアリング株式会社内 (72)発明者 田井中 正弘 山口県宇部市大字沖宇部5272番地 セント ラルエンジニアリング株式会社内 Ｆターム(参考） 2G042 AA01 BA10 BB18 CA01 CB01 DA05 FA19 FB04 GA01 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hiroshi Ichimaru 5272 Oki Obe Oyama, Yamaguchi Prefecture Central Engineering Co., Ltd. (72) Inventor Masahiro Tainaka 5272 Oki Ube, Ube City, Yamaguchi Prefecture Central Engineering Co., Ltd. F term (reference) 2G042 AA01 BA10 BB18 CA01 CB01 DA05 FA19 FB04 GA01
Claims (1)
て、フッ素含有化合物ガスを微量含むガスを加熱した固
体金属と接触反応させ、生成したガスを検出することを
特徴とするフッ素含有化合物ガスの検出方法。1. A method for detecting a fluorine-containing compound gas, comprising: reacting a gas containing a trace amount of a fluorine-containing compound gas with a heated solid metal, and detecting the generated gas. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000008107A JP3375072B2 (en) | 1999-01-27 | 2000-01-17 | Method for detecting fluorine-containing compound gas |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1782099 | 1999-01-27 | ||
| JP11-17820 | 1999-01-27 | ||
| JP2000008107A JP3375072B2 (en) | 1999-01-27 | 2000-01-17 | Method for detecting fluorine-containing compound gas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000283973A true JP2000283973A (en) | 2000-10-13 |
| JP3375072B2 JP3375072B2 (en) | 2003-02-10 |
Family
ID=26354393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000008107A Expired - Fee Related JP3375072B2 (en) | 1999-01-27 | 2000-01-17 | Method for detecting fluorine-containing compound gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3375072B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003075342A (en) * | 2001-08-30 | 2003-03-12 | Riken Keiki Co Ltd | Octafluorocyclopentene measuring device |
| JP2007218673A (en) * | 2006-02-15 | 2007-08-30 | Riken Keiki Co Ltd | Hexafluorobutadiene detector |
| JP2012112846A (en) * | 2010-11-25 | 2012-06-14 | National Institute Of Advanced Industrial & Technology | Detection method and detection sensor |
| CN102914507A (en) * | 2012-10-19 | 2013-02-06 | 中国科学院东北地理与农业生态研究所 | Method for detecting fluorine content in water by utilizing escherichia coli |
| JP2015042987A (en) * | 2014-10-14 | 2015-03-05 | 独立行政法人産業技術総合研究所 | Detection method and detection sensor |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6908845B2 (en) * | 2016-08-10 | 2021-07-28 | セントラル硝子株式会社 | Manufacturing method of gas generator for detecting fluorine-containing compound gas |
-
2000
- 2000-01-17 JP JP2000008107A patent/JP3375072B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003075342A (en) * | 2001-08-30 | 2003-03-12 | Riken Keiki Co Ltd | Octafluorocyclopentene measuring device |
| JP4605574B2 (en) * | 2001-08-30 | 2011-01-05 | 理研計器株式会社 | Octafluorocyclopentene measuring device |
| JP2007218673A (en) * | 2006-02-15 | 2007-08-30 | Riken Keiki Co Ltd | Hexafluorobutadiene detector |
| JP2012112846A (en) * | 2010-11-25 | 2012-06-14 | National Institute Of Advanced Industrial & Technology | Detection method and detection sensor |
| CN102914507A (en) * | 2012-10-19 | 2013-02-06 | 中国科学院东北地理与农业生态研究所 | Method for detecting fluorine content in water by utilizing escherichia coli |
| JP2015042987A (en) * | 2014-10-14 | 2015-03-05 | 独立行政法人産業技術総合研究所 | Detection method and detection sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3375072B2 (en) | 2003-02-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Li et al. | In situ concentration of metallic hydride in a graphite furnace coated with palladium—determination of bismuth, germanium and tellurium | |
| JP2000283973A (en) | Method for detecting fluorine containing compound gas | |
| Daum et al. | Formation of halide reactant ions and effects of excess reagent chemical on the ionization of TNT in ion mobility spectrometry | |
| WO1997035183A1 (en) | High accuracy determination of chlorine content by isotope dilution flame infrared emission spectrometry (id-fire) | |
| Nelms et al. | Personal vinyl chloride monitoring device with permeation technique for sampling | |
| JP3640601B2 (en) | Method for detecting fluorine-containing compound gas | |
| US3425806A (en) | Method and means for detecting a halogen or phosphorus in a gaseous material | |
| Safford et al. | Microdetrmination of Chlorine, Bromine, and Iodine in Organic Compounds | |
| Lamb et al. | Determination of macrocyclic compounds in solution by thermometric titration against metal cations | |
| Zachariadis et al. | Optimization of cold vapour atomic absorption spectrometric determination of mercury with and without amalgamation by subsequent use of complete and fractional factorial designs with univariate and modified simplex methods | |
| Soelberg et al. | Phase 1 methyl iodide deep-bed adsorption tests | |
| JP2001165924A (en) | Method and apparatus for measuring concentration of fluorine in fluorine-containing mixed gas | |
| JP2003035647A (en) | Volatile organic chlorine compound sensor | |
| Fevrier et al. | Reactivity of some halogenated alkanes on 13X molecular sieve | |
| Ravishankar et al. | An element-specific, dual-channel, flame infrared emission, gas chromatography detector for chlorinated and fluorinated hydrocarbons | |
| Tschuikow-Roux et al. | Secondary kinetic isotope effects in hydrogen and deuterium abstraction by chlorine atoms from the chloromethyl group in gaseous ethyl chlorides: effects of isotopic substitution in the adjacent methyl group | |
| Świtaj-Zawadka et al. | New procedure of silica gel surface modification: Preparation of gaseous standard mixtures for calibration purposes | |
| Matsumoto et al. | Determination of phosphorus by gas-phase chemiluminescence after hydride generation | |
| JP3304547B2 (en) | Method for determination of ultra-trace phosphorus in chlorosilanes | |
| Haszeldine et al. | The kinetics of the reactions of silicon compounds. Part II. The gas-phase thermal decomposition of 3, 3, 3-trifluoropropyltrifluorosilane | |
| Wakeman et al. | Vinyl chloride formation from the thermal degradation of poly (vinyl chloride) | |
| Tanaka et al. | Simultaneous determination of phosphorus, sulfur and arsenic in steel by hydride generation and gas chromatography | |
| Wagner et al. | A gas‐chromatographic method for the preparation of 14C‐labeled vinyl chloride | |
| Curry et al. | Spectrophotometric determination of inorganic fluoride and of fluorine in organic compounds | |
| SU344349A1 (en) | METHOD OF QUANTITATIVE DETERMINATION OF HALOGENES IN HALOGENATED HYDROCARBONS OR IN AIR |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071129 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081129 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091129 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091129 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091129 Year of fee payment: 7 |
|
| LAPS | Cancellation because of no payment of annual fees |