JP2000277265A - Organic space light modulating element - Google Patents
Organic space light modulating elementInfo
- Publication number
- JP2000277265A JP2000277265A JP11082114A JP8211499A JP2000277265A JP 2000277265 A JP2000277265 A JP 2000277265A JP 11082114 A JP11082114 A JP 11082114A JP 8211499 A JP8211499 A JP 8211499A JP 2000277265 A JP2000277265 A JP 2000277265A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- light
- photoelectric conversion
- conversion layer
- electroluminescent layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims abstract description 43
- 239000002184 metal Substances 0.000 claims abstract description 32
- 229910052751 metal Inorganic materials 0.000 claims abstract description 32
- 230000005684 electric field Effects 0.000 claims abstract description 20
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 16
- 239000000969 carrier Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 description 33
- 230000005525 hole transport Effects 0.000 description 20
- 239000010408 film Substances 0.000 description 13
- 150000001875 compounds Chemical class 0.000 description 11
- 239000000758 substrate Substances 0.000 description 9
- 238000001771 vacuum deposition Methods 0.000 description 9
- 238000004528 spin coating Methods 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- IBHBKWKFFTZAHE-UHFFFAOYSA-N n-[4-[4-(n-naphthalen-1-ylanilino)phenyl]phenyl]-n-phenylnaphthalen-1-amine Chemical compound C1=CC=CC=C1N(C=1C2=CC=CC=C2C=CC=1)C1=CC=C(C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C3=CC=CC=C3C=CC=2)C=C1 IBHBKWKFFTZAHE-UHFFFAOYSA-N 0.000 description 4
- SJHHDDDGXWOYOE-UHFFFAOYSA-N oxytitamium phthalocyanine Chemical compound [Ti+2]=O.C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 SJHHDDDGXWOYOE-UHFFFAOYSA-N 0.000 description 4
- 229910006404 SnO 2 Inorganic materials 0.000 description 3
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical class C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 description 2
- UOCMXZLNHQBBOS-UHFFFAOYSA-N 2-(1,3-benzoxazol-2-yl)phenol zinc Chemical compound [Zn].Oc1ccccc1-c1nc2ccccc2o1.Oc1ccccc1-c1nc2ccccc2o1 UOCMXZLNHQBBOS-UHFFFAOYSA-N 0.000 description 2
- -1 Alq 3 Chemical class 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- WDEQGLDWZMIMJM-UHFFFAOYSA-N benzyl 4-hydroxy-2-(hydroxymethyl)pyrrolidine-1-carboxylate Chemical compound OCC1CC(O)CN1C(=O)OCC1=CC=CC=C1 WDEQGLDWZMIMJM-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 125000000687 hydroquinonyl group Chemical class C1(O)=C(C=C(O)C=C1)* 0.000 description 2
- 230000010365 information processing Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 150000003384 small molecules Chemical class 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- OAIASDHEWOTKFL-UHFFFAOYSA-N 3-methyl-n-[4-[4-(n-(4-methylphenyl)anilino)phenyl]phenyl]-n-phenylaniline Chemical compound C1=CC(C)=CC=C1N(C=1C=CC(=CC=1)C=1C=CC(=CC=1)N(C=1C=CC=CC=1)C=1C=C(C)C=CC=1)C1=CC=CC=C1 OAIASDHEWOTKFL-UHFFFAOYSA-N 0.000 description 1
- 229910001148 Al-Li alloy Inorganic materials 0.000 description 1
- KLSJWNVTNUYHDU-UHFFFAOYSA-N Amitrole Chemical compound NC1=NC=NN1 KLSJWNVTNUYHDU-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 125000000040 m-tolyl group Chemical group [H]C1=C([H])C(*)=C([H])C(=C1[H])C([H])([H])[H] 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical compound [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 1
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、空間光変調素子
に関し、詳しくは長波長の光を短波長の光に変換する有
機空間光変調素子に関するものである。[0001] 1. Field of the Invention [0002] The present invention relates to a spatial light modulator, and more particularly, to an organic spatial light modulator that converts light having a long wavelength into light having a short wavelength.
【０００２】[0002]
【従来の技術】空間光変調素子として、光の入力情報を
一度電荷像に変換し、この電荷像に対応する電界が液晶
層に印加されるようにして、読み出し光を変調する方式
が検討されている。これは光の並列性を情報処理に有効
に利用した素子であり、すでに実用化がなされようとし
ている。2. Description of the Related Art As a spatial light modulator, a method of converting light input information into a charge image once and applying an electric field corresponding to the charge image to a liquid crystal layer to modulate readout light has been studied. ing. This is an element that effectively utilizes the parallelism of light for information processing, and is already being put to practical use.
【０００３】しかしながら、光の入力情報を一度電荷像
に変換し、この電荷像に対応する電界が液晶層に印加さ
れるようにして読み出し光を変調する方式では、本質的
にその応答速度は液晶の電界に対する応答速度により制
限され、高速並列情報処理には適さない。However, in a system in which light input information is converted into a charge image once and an electric field corresponding to the charge image is applied to a liquid crystal layer to modulate the readout light, the response speed is essentially that of a liquid crystal. And is not suitable for high-speed parallel information processing.
【０００４】さらに空間変調された情報を取り出すため
には読み出し光を必要とし素子の小型化に制限を生じ
る。Further, in order to take out spatially modulated information, readout light is required, which limits the miniaturization of the device.
【０００５】[0005]
【発明が解決しようとする課題】本発明はかかる従来技
術の問題点を解消し、読み出し光を必要とせず、室温で
動作し、高速応答が可能で、しかも小型で安価な空間光
変調素子を提供することをその課題とする。SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems of the prior art and provides a small and inexpensive spatial light modulator which can operate at room temperature, does not require readout light, can respond at high speed, and is small. The task is to provide.
【０００６】[0006]
【課題を解決するための手段】本発明者らは、前記課題
を解決すべく鋭意研究を重ねた結果、本発明を完成する
に至った。即ち、本発明によれば、光電変換層と電界発
光層を対向させて配置し、光電変換層に照射した光によ
り励起したキャリアを、これら光電変換層及び電界発光
層に印加した電界によって電界発光層に注入し、光を励
起・発光させる空間光変調素子において、前記電界発光
層を有機電界発光材料で構成するとともに、前記光電変
換層を金属フタロシアニン錯体で構成することを特徴と
する有機空間光変調素子が提供される。Means for Solving the Problems The present inventors have conducted intensive studies to solve the above-mentioned problems, and as a result, have completed the present invention. That is, according to the present invention, the photoelectric conversion layer and the electroluminescent layer are arranged to face each other, and the carriers excited by the light applied to the photoelectric conversion layer are electroluminescent by the electric field applied to the photoelectric conversion layer and the electroluminescent layer. In a spatial light modulation element for injecting into a layer and exciting and emitting light, the electroluminescent layer is composed of an organic electroluminescent material, and the photoelectric conversion layer is composed of a metal phthalocyanine complex. A modulation element is provided.
【０００７】[0007]
【発明の実施の形態】以下本発明の実施の形態を詳細に
説明する。図１は、本発明による有機空間光変調素子の
基本的構成例を模式的に示す図であり、図中１０は金属
電極、２０は電界発生層、３０はホール輸送層、４０は
光電変換層、５０は透明電極、６０は基板、７０は電
源、８０は入射光、９０は出射光である。DESCRIPTION OF THE PREFERRED EMBODIMENTS The embodiments of the present invention will be described below in detail. FIG. 1 is a diagram schematically showing a basic configuration example of an organic spatial light modulator according to the present invention, in which 10 is a metal electrode, 20 is an electric field generating layer, 30 is a hole transport layer, and 40 is a photoelectric conversion layer. , 50 are transparent electrodes, 60 is a substrate, 70 is a power supply, 80 is incident light, and 90 is outgoing light.
【０００８】本発明において、光電変換層４０は金属フ
タロシアニン錯体により構成され、このような金属フタ
ロシアニン錯体としては、チタニルフタロシアニン、銅
フタロシアニン、亜鉛フタロシアニン、ニッケルフタロ
シアニン、水素フタロシアニン等を挙げることができ
る。これら金属フタロシアニン錯体は単独で用いてもよ
いし、２種以上で用いても良い。また、これら金属フタ
ロシアニン錯体にその他公知の光電変換材料を混合させ
てもよい。光電変換層４０の膜厚は１０〜１０００ｎ
ｍ、好ましくは１０〜１００ｎｍである。光電変換層４
０の製膜方法としては、真空蒸着法、スピンコート法、
スパッタ法等を用いることができる。光電変換層４０を
金属フタロシアニン錯体の薄膜で構成することにより、
素子の時間応答速度が改善されるとともに、空間変調さ
れた情報を取り出すためには読み出し光を必要としない
自発光型の空間光変調素子が実現する。In the present invention, the photoelectric conversion layer 40 is composed of a metal phthalocyanine complex, and examples of such a metal phthalocyanine complex include titanyl phthalocyanine, copper phthalocyanine, zinc phthalocyanine, nickel phthalocyanine, and hydrogen phthalocyanine. These metal phthalocyanine complexes may be used alone or in combination of two or more. Further, other known photoelectric conversion materials may be mixed with these metal phthalocyanine complexes. The thickness of the photoelectric conversion layer 40 is 10 to 1000 n.
m, preferably 10 to 100 nm. Photoelectric conversion layer 4
As a film forming method, a vacuum deposition method, a spin coating method,
A sputtering method or the like can be used. By constituting the photoelectric conversion layer 40 with a thin film of a metal phthalocyanine complex,
The time response speed of the element is improved, and a self-luminous spatial light modulation element that does not require readout light to extract spatially modulated information is realized.
【０００９】本発明において、光電変換層４０に対向配
置される電界発光層２０は、有機電界発光層材料で構成
される。有機電界発光層材料としては、従来公知の各種
材料が使用可能であるが、出射光の波長（エネルギー）
を容易に選択することができるという観点から、有機低
分子化合物からなる電界発光層材料の使用が好ましい。
このような有機低分子化合物としては、Ａｌｑ3、等の
金属キノール錯体、Ｚｎ（ＢＯＸ）2等の金属ベンゾオ
キサゾール錯体、ＰＡＴ（ポリアミノトリアゾール）、
ＴＰＤ（Ｎ，Ｎ’−ジフェニル−Ｎ，Ｎ’−（３−メチ
ルフェニル）−１，１’−ビフェニル−４，４’−ジア
ミン）等が好ましく使用される。これらの有機低分子化
合物からなる電界発光層材料は単独で用いてもよいし、
２種以上で用いても良い。電界発光層２０の膜厚は１０
〜５００ｎｍ、好ましくは１０〜３０ｎｍである。電界
発光層２０の製膜方法としては、真空蒸着法、スピンコ
ート法、スパッタ法等を用いることができる。In the present invention, the electroluminescent layer 20 disposed to face the photoelectric conversion layer 40 is made of an organic electroluminescent layer material. As the organic electroluminescent layer material, various conventionally known materials can be used, and the wavelength (energy) of the emitted light is used.
From the viewpoint that can be easily selected, it is preferable to use an electroluminescent layer material composed of an organic low molecular compound.
Examples of such organic low molecular weight compounds include metal quinol complexes such as Alq 3 , metal benzoxazole complexes such as Zn (BOX) 2 , PAT (polyaminotriazole),
TPD (N, N'-diphenyl-N, N '-(3-methylphenyl) -1,1'-biphenyl-4,4'-diamine) and the like are preferably used. Electroluminescent layer materials composed of these organic low-molecular compounds may be used alone,
Two or more types may be used. The thickness of the electroluminescent layer 20 is 10
５００500 nm, preferably 10-30 nm. As a method for forming the electroluminescent layer 20, a vacuum deposition method, a spin coating method, a sputtering method, or the like can be used.
【００１０】本発明において、電界発光層２０と光電変
換層４０の間にはホール輸送層３０を設けることができ
る。このホール輸送層３０にはホール輸送性にすぐれた
有機低分子化合物が使用される。このようなホール輸送
性にすぐれた有機低分子化合物としては、ＴＰＤ、α−
ＮＰＤ（４，４’−ビス[Ｎ−（１−ナフチル）−Ｎ−
フェニルアミノ]ビフェニル）等が挙げられる。これら
のホール輸送性にすぐれた有機低分子化合物は単独で用
いてもよいし、２種以上で用いても良い。ホール輸送層
３０の膜厚は１０〜５００ｎｍ、好ましくは１０〜３０
ｎｍである。ホール輸送層３０の製膜方法としては、真
空蒸着法、スピンコート法、スパッタ法等を用いること
ができる。In the present invention, a hole transport layer 30 can be provided between the electroluminescent layer 20 and the photoelectric conversion layer 40. The hole transport layer 30 is made of an organic low molecular compound having excellent hole transport properties. Examples of such organic low molecular weight compounds having excellent hole transport properties include TPD, α-
NPD (4,4'-bis [N- (1-naphthyl) -N-
Phenylamino] biphenyl) and the like. These organic low-molecular compounds having excellent hole transport properties may be used alone or in combination of two or more. The thickness of the hole transport layer 30 is 10 to 500 nm, preferably 10 to 30 nm.
nm. As a method for forming the hole transport layer 30, a vacuum evaporation method, a spin coating method, a sputtering method, or the like can be used.
【００１１】電界発光層２０及び光電変換層４０には電
圧が印加されるが、そのため電界発光層２０の片面に金
属電極１０が設けられるとともに、光電変換層４０の片
面に透明電極５０が設けられる。金属１０はＡｌ、Ａｌ
−Ｌｉ、Ａｇ−Ｍｇ等で構成することができる。一方、
透明電極５０はＩＴＯ、ＺｎＯ、ＳｎＯ2、ＦドープＳ
ｎＯ2、ＡｌドープＺｎＯの透明材料で構成することが
できる。金属電極１０の膜厚は１０〜１０００ｎｍ、好
ましくは５０〜２００ｎｍである。また、透明電極５０
の膜厚は１０〜４００ｎｍ、好ましくは１００〜３００
ｎｍである。A voltage is applied to the electroluminescent layer 20 and the photoelectric conversion layer 40. Therefore, the metal electrode 10 is provided on one side of the electroluminescent layer 20, and the transparent electrode 50 is provided on one side of the photoelectric conversion layer 40. . Metal 10 is Al, Al
-Li, Ag-Mg or the like. on the other hand,
The transparent electrode 50 is made of ITO, ZnO, SnO 2 , F-doped S
It can be made of a transparent material of nO 2 and Al-doped ZnO. The thickness of the metal electrode 10 is 10 to 1000 nm, preferably 50 to 200 nm. In addition, the transparent electrode 50
Has a thickness of 10 to 400 nm, preferably 100 to 300 nm.
nm.
【００１２】本構成例では、上記各層は基板６０上に積
層配置される。基板６０は透明であることが必要で、例
えばガラス、ポリカーボネート等を用いることができ
る。本発明では、基板６０にＩＴＯ等の導電性材料を使
用して電極を兼ねた構成とすることもできる。In this configuration example, each of the above layers is stacked on the substrate 60. The substrate 60 needs to be transparent, and for example, glass, polycarbonate, or the like can be used. In the present invention, the substrate 60 may be made of a conductive material such as ITO and serve as an electrode.
【００１３】本発明において、素子に印加する電圧は
０．１〜５０×１０5（Ｖ／ｃｍ）程度である。また、
入射光８０の波長は６００〜８００ｎｍ程度である。In the present invention, the voltage applied to the device is about 0.1 to 50 × 10 5 (V / cm). Also,
The wavelength of the incident light 80 is about 600 to 800 nm.
【００１４】上記構成の空間光変調素子では、入射光８
０が光電変換層４０に照射されると、キャリアが励起さ
れ、励起されたキャリアは、透明電極５０及び金属電極
１０により、これらの間にに印加される電界により、光
電変換層４０からホール輸送層３０を通じ電界発光層２
０に注入され、光を励起・発光し、出射光９０として取
り出される。従来の空間光変調素子では、電荷注入型の
有機電界発光層は無機物である電極界面からの電界によ
る電荷注入を有効に行うことが困難であった。ところ
が、光電変換層４０として有機物である金属フタロシア
ニン錯体層を用いる本発明の空間光変調素子では、上記
のように光電変換層４０で励起光により生じた電荷が電
極間に印加された電界により有機電界発光層２０に注入
される。これにより低電界で有機電界発光層２０からの
発光が得られる上、励起光を走査することで発光位置を
二次元的に制御可能な空間光変調素子とすることができ
る。In the spatial light modulator having the above structure, the incident light 8
When 0 is applied to the photoelectric conversion layer 40, carriers are excited, and the excited carriers are transported from the photoelectric conversion layer 40 by the transparent electrode 50 and the metal electrode 10 due to an electric field applied therebetween. Electroluminescent layer 2 through layer 30
0, excites and emits light, and is extracted as outgoing light 90. In the conventional spatial light modulator, it has been difficult for the charge injection type organic electroluminescent layer to effectively perform charge injection by an electric field from the electrode interface, which is an inorganic substance. However, in the spatial light modulation device of the present invention in which an organic metal phthalocyanine complex layer is used as the photoelectric conversion layer 40, the charge generated by the excitation light in the photoelectric conversion layer 40 is reduced by the electric field applied between the electrodes as described above. It is injected into the electroluminescent layer 20. Thus, light emission from the organic electroluminescent layer 20 can be obtained with a low electric field, and a spatial light modulation element whose emission position can be two-dimensionally controlled by scanning the excitation light can be obtained.
【００１５】[0015]
【実施例】以下、本発明を実施例により詳細に説明す
る。 実施例１ ＩＴＯ基板上に光電変換層４０（厚さ９０ｎｍ）として
チタニルフタロシアニン膜を、ホール輸送層３０（厚さ
２０ｎｍ）としてＴＰＤ膜を、電界発光層２０（厚さ２
０ｎｍ）としてＡｌｑ3膜を、金属電極１０（厚さ５０
ｎｍ）としてＡｌ膜を、それぞれ真空蒸着法により製
膜、積層し、本発明による空間光変調素子を作製した。
室温で上記素子に１〜５０×１０5Ｖ／ｃｍの電界を印
加し、入射光８０として波長６４０ｎｍ（１．９４ｅ
Ｖ）のレーザー光を照射したところ、電界発光層２０か
ら中心波長５５０ｎｍ（２．２５ｅＶ）の出射光９０が
観察された。この発光は、外部電界をかけた素子のうち
入射光８０として波長６４０ｎｍ（１．９４ｅＶ）のレ
ーザー光を照射した部位のみから生じた。中心波長５５
０ｎｍ（２．２５ｅＶ）の出射光９０の発光強度は素子
に印加した電界に比例し、またその発光強度は素子に照
射する波長６４０ｎｍ（１．９４ｅＶ）のレーザー光の
強度に比例していた。また入射光８０に対する出射光９
０の応答速度は１０ｍｓ以下であった。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to embodiments. Example 1 A titanyl phthalocyanine film as a photoelectric conversion layer 40 (thickness 90 nm), a TPD film as a hole transport layer 30 (thickness 20 nm), and an electroluminescent layer 20 (thickness 2) were formed on an ITO substrate.
0 nm) and an Alq 3 film as the metal electrode 10 (thickness 50).
nm), an Al film was formed and laminated by a vacuum deposition method, to produce a spatial light modulator according to the present invention.
At room temperature, an electric field of 1 to 50 × 10 5 V / cm is applied to the device, and the incident light 80 has a wavelength of 640 nm (1.94 e).
When the laser light V) was applied, emission light 90 having a center wavelength of 550 nm (2.25 eV) was observed from the electroluminescent layer 20. This light emission was generated only from a portion of the element to which an external electric field was applied, which was irradiated with laser light having a wavelength of 640 nm (1.94 eV) as incident light 80. Center wavelength 55
The emission intensity of the outgoing light 90 of 0 nm (2.25 eV) was proportional to the electric field applied to the device, and the emission intensity was proportional to the intensity of the laser light having a wavelength of 640 nm (1.94 eV) applied to the device. Also, the outgoing light 9 with respect to the incident light 80
The response speed of 0 was 10 ms or less.
【００１６】実施例２ ＩＴＯ基板上に、光電変換層４０（厚さ９０ｎｍ）とし
て銅フタロシアニン膜を、ホール輸送層３０（厚さ２０
ｎｍ）としてＴＰＤ膜を、電界発光層２０（厚さ２０ｎ
ｍ）としてＡｌｑ3膜を、金属電極１０（厚さ５０ｎ
ｍ）としてＡｌ膜を、それぞれ真空蒸着法により製膜、
積層し、本発明による有機空間光変調素子を作製した。
室温で上記素子に１〜５０×１０5Ｖ／ｃｍの電界を印
加し、入射光８０として波長６４０ｎｍ（１．９４ｅ
Ｖ）のレーザー光を照射したところ、電界発光層２０か
ら中心波長５５０ｎｍ（２．２５ｅＶ）の出射光９０が
観察された。この発光は外部電界をかけた素子のうち入
射光８０として波長６４０ｎｍ（１．９４ｅＶ）のレー
ザー光を照射した部位のみから生じた。中心波長５５０
ｎｍ（２．２５ｅＶ）の出射光９０の発光強度は素子に
印加した電界に比例し、またその発光強度は素子に照射
する波長６４０ｎｍ（１．９４ｅＶ）のレーザー光の強
度に比例していた。また入射光８０に対する出射光９０
の応答速度は１０ｍｓ以下であった。EXAMPLE 2 A copper phthalocyanine film was formed as a photoelectric conversion layer 40 (thickness: 90 nm) on an ITO substrate, and a hole transport layer 30 (thickness: 20 nm) was formed on the ITO substrate.
nm) and the electroluminescent layer 20 (thickness 20 n
m) and an Alq 3 film as the metal electrode 10 (thickness 50 n).
m), an Al film is formed by a vacuum evaporation method,
By laminating, an organic spatial light modulator according to the present invention was produced.
An electric field of 1 to 50 × 10 5 V / cm was applied to the device at room temperature, and a wavelength of 640 nm (1.94 e
When the laser beam V) was applied, emission light 90 having a center wavelength of 550 nm (2.25 eV) was observed from the electroluminescent layer 20. This light emission was generated only from a portion of the element to which an external electric field was applied, to which a laser beam having a wavelength of 640 nm (1.94 eV) was irradiated as incident light 80. Center wavelength 550
The emission intensity of the outgoing light 90 of nm (2.25 eV) was proportional to the electric field applied to the device, and the emission intensity was proportional to the intensity of the laser light having a wavelength of 640 nm (1.94 eV) applied to the device. Also, outgoing light 90 with respect to incident light 80
The response speed was 10 ms or less.
【００１７】実施例３ ＩＴＯ基板上に、光電変換層４０（厚さ９０ｎｍ）とし
てチタニルフタロシアニン膜を、ホール輸送層３０（厚
さ２０ｎｍ）としてＴＰＤ膜を、電界発光層２０（厚さ
２０ｎｍ）としてＡｌｑ3膜を、金属電極１０（厚さ５
０ｎｍ）としてＡｌ膜を、それぞれ真空蒸着法により製
膜、積層し、本発明による有機空間光変調素子を作製し
た。室温で上記素子に１〜５０×１０5Ｖ／ｃｍの電界
を印加し、入射光８０として波長６４０ｎｍ（１．９４
ｅＶ）のレーザー光を照射したところ、電界発光層２０
から中心波長４９２ｎｍ（２．５２ｅＶ）の出射光９０
が観察された。この発光は外部電界をかけた素子のうち
入射光８０として波長６４０ｎｍ（１．９４ｅＶ）のレ
ーザー光を照射した部位のみから生じた。中心波長４９
２ｎｍ（２．５２ｅＶ）の出射光９０の発光強度は素子
に印加した電界に比例し、またその発光強度は素子に照
射する波長６４０ｎｍ（１．９４ｅＶ）のレーザー光の
強度に比例していた。また入射光８０に対する出射光９
０の応答速度は１０ｍｓ以下であった。Example 3 A titanyl phthalocyanine film as a photoelectric conversion layer 40 (thickness 90 nm), a TPD film as a hole transport layer 30 (thickness 20 nm), and an electroluminescent layer 20 (thickness 20 nm) on an ITO substrate. The Alq 3 film is applied to the metal electrode 10 (thickness 5
0 nm), and an Al film was formed and laminated by a vacuum deposition method, to produce an organic spatial light modulator according to the present invention. At room temperature, an electric field of 1 to 50 × 10 5 V / cm is applied to the device, and the incident light 80 has a wavelength of 640 nm (1.94
eV), the electroluminescent layer 20 was irradiated.
Outgoing light 90 having a center wavelength of 492 nm (2.52 eV)
Was observed. This light emission was generated only from a portion of the element to which an external electric field was applied, which was irradiated with laser light having a wavelength of 640 nm (1.94 eV) as incident light 80. Center wavelength 49
The emission intensity of the outgoing light 90 of 2 nm (2.52 eV) was proportional to the electric field applied to the device, and the emission intensity was proportional to the intensity of the laser light having a wavelength of 640 nm (1.94 eV) applied to the device. Also, the outgoing light 9 with respect to the incident light 80
The response speed of 0 was 10 ms or less.
【００１８】[0018]
【発明の効果】本発明によれば、前記構成を採用したの
で、室温で動作可能な自発光型の空間光変調素子を提供
することが可能となる。また、本発明の空間光変調素子
は、有機低分子化合物を用いたものであるため、極薄型
で軽量・安価な素子である。更に、本発明の空間光変調
素子は、高速応答可能であるとともに、容易に大面積化
ができる。According to the present invention, since the above configuration is employed, it is possible to provide a self-luminous spatial light modulation element that can operate at room temperature. Further, since the spatial light modulator of the present invention uses an organic low-molecular compound, it is an extremely thin, lightweight and inexpensive element. Further, the spatial light modulator of the present invention can respond at high speed and can easily have a large area.
【図１】本発明による空間光変調素子の基本的構成例を
示す図である。FIG. 1 is a diagram showing a basic configuration example of a spatial light modulator according to the present invention.
１０ 金属電極 ２０ 電界発光層 ３０ ホール輸送層 ４０ 光電変換層 ５０ 透明電極 ８０ 入射光 ９０ 出射光 DESCRIPTION OF SYMBOLS 10 Metal electrode 20 Electroluminescent layer 30 Hole transport layer 40 Photoelectric conversion layer 50 Transparent electrode 80 Incident light 90 Outgoing light
─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成１１年１２月２７日（１９９９．１２．
２７）[Submission date] December 27, 1999 (1999.12.
27)
【手続補正１】[Procedure amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】特許請求の範囲[Correction target item name] Claims
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【特許請求の範囲】[Claims]
【手続補正２】[Procedure amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００６[Correction target item name] 0006
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【０００６】[0006]
【課題を解決するための手段】本発明者らは、前記課題
を解決すべく鋭意研究を重ねた結果、本発明を完成する
に至った。即ち、本発明によれば、光電変換層と電界発
光層を対向させて配置し、光電変換層に照射した光によ
り励起したキャリアを、これら光電変換層及び電界発光
層に印加した電界によって電界発光層に注入し、光を励
起・発光させる空間光変調素子において、前記電界発光
層を有機電界発光材料で構成するとともに、前記光電変
換層を金属フタロシアニン錯体で構成し、かつ前記光電
変換層と前記電界発光層との間にホール輸送層を設けた
ことを特徴とする有機空間光変調素子が提供される。Means for Solving the Problems The present inventors have conducted intensive studies to solve the above-mentioned problems, and as a result, have completed the present invention. That is, according to the present invention, the photoelectric conversion layer and the electroluminescent layer are arranged to face each other, and the carriers excited by the light applied to the photoelectric conversion layer are electroluminescent by the electric field applied to the photoelectric conversion layer and the electroluminescent layer. In the spatial light modulator, which is injected into a layer to excite and emit light, the electroluminescent layer is made of an organic electroluminescent material, the photoelectric conversion layer is made of a metal phthalocyanine complex , and the
An organic spatial light modulator is provided , wherein a hole transport layer is provided between a conversion layer and the electroluminescent layer .
【手続補正３】[Procedure amendment 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００８[Correction target item name] 0008
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【０００８】本発明において、光電変換層４０は金属フ
タロシアニン錯体により構成され、このような金属フタ
ロシアニン錯体としては、チタニルフタロシアニン、銅
フタロシアニン、亜鉛フタロシアニン、ニッケルフタロ
シアニン等を挙げることができる。これら金属フタロシ
アニン錯体は単独で用いてもよいし、２種以上で用いて
も良い。また、これら金属フタロシアニン錯体にその他
公知の光電変換材料を混合させてもよい。光電変換層４
０の膜厚は１０〜１０００ｎｍ、好ましくは１０〜１０
０ｎｍである。光電変換層４０の製膜方法としては、真
空蒸着法、スピンコート法、スパッタ法等を用いること
ができる。光電変換層４０を金属フタロシアニン錯体の
薄膜で構成することにより、素子の時間応答速度が改善
されるとともに、空間変調された情報を取り出すために
は読み出し光を必要としない自発光型の空間光変調素子
が実現する。In the present invention, the photoelectric conversion layer 40 is composed of a metal phthalocyanine complex. Examples of such a metal phthalocyanine complex include titanyl phthalocyanine, copper phthalocyanine, zinc phthalocyanine, and nickel phthalocyanine.
Cyanine and the like can be mentioned. These metal phthalocyanine complexes may be used alone or in combination of two or more. Further, other known photoelectric conversion materials may be mixed with these metal phthalocyanine complexes. Photoelectric conversion layer 4
0 is 10 to 1000 nm, preferably 10 to 10 nm.
0 nm. As a method for forming the photoelectric conversion layer 40, a vacuum evaporation method, a spin coating method, a sputtering method, or the like can be used. By forming the photoelectric conversion layer 40 with a thin film of a metal phthalocyanine complex, the time response speed of the element is improved, and a self-luminous spatial light modulation that does not require readout light to extract spatially modulated information. The element is realized.
【手続補正４】[Procedure amendment 4]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００９[Correction target item name] 0009
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【０００９】本発明において、光電変換層４０に対向配
置される電界発光層２０は、有機電界発光層材料で構成
される。有機電界発光層材料としては、従来公知の各種
材料が使用可能であるが、出射光の波長（エネルギー）
を容易に選択することができるという観点から、有機低
分子化合物からなる電界発光層材料の使用が好ましい。
このような有機低分子化合物としては、Ａｌｑ3、等の
金属キノール錯体、Ｚｎ（ＢＯＸ）2等の金属ベンゾオ
キサゾール錯体、ＰＡＴ（ポリアミノトリアゾール）等
が好ましく使用される。これらの有機低分子化合物から
なる電界発光層材料は単独で用いてもよいし、２種以上
で用いても良い。電界発光層２０の膜厚は１０〜５００
ｎｍ、好ましくは１０〜３０ｎｍである。電界発光層２
０の製膜方法としては、真空蒸着法、スピンコート法、
スパッタ法等を用いることができる。In the present invention, the electroluminescent layer 20 disposed to face the photoelectric conversion layer 40 is made of an organic electroluminescent layer material. As the organic electroluminescent layer material, various conventionally known materials can be used, and the wavelength (energy) of the emitted light is used.
From the viewpoint that can be easily selected, it is preferable to use an electroluminescent layer material composed of an organic low molecular compound.
Examples of the organic low molecular compound, Alq 3, metal quinol complexes etc., Zn (BOX) 2 or the like of metal benzoxazole complex, PAT (poly aminotriazole), etc.
Is preferably used. The electroluminescent layer material composed of these organic low molecular compounds may be used alone or in combination of two or more. The thickness of the electroluminescent layer 20 is 10 to 500.
nm, preferably 10 to 30 nm. Electroluminescent layer 2
As a film forming method, a vacuum deposition method, a spin coating method,
A sputtering method or the like can be used.
【手続補正５】[Procedure amendment 5]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１０[Correction target item name] 0010
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【００１０】本発明において、電界発光層２０と光電変
換層４０の間にはホール輸送層３０を設ける。このホー
ル輸送層３０にはホール輸送性にすぐれた有機低分子化
合物が使用される。このようなホール輸送性にすぐれた
有機低分子化合物としては、ＴＰＤ（Ｎ，Ｎ’−ビス
（３−メチルフェニル）−Ｎ，Ｎ’−ジフェニルベンジ
ジン）、α−ＮＰＤ（４，４’−ビス[Ｎ−（１−ナフ
チル）−Ｎ−フェニルアミノ]ビフェニル）等が挙げら
れる。これらのホール輸送性にすぐれた有機低分子化合
物は単独で用いてもよいし、２種以上で用いても良い。
ホール輸送層３０の膜厚は１０〜５００ｎｍ、好ましく
は１０〜３０ｎｍである。ホール輸送層３０の製膜方法
としては、真空蒸着法、スピンコート法、スパッタ法等
を用いることができる。In the present invention, a hole transport layer 30 is provided between the electroluminescent layer 20 and the photoelectric conversion layer 40. The hole transport layer 30 is made of an organic low molecular compound having excellent hole transport properties. TPD (N, N′-bis) is an example of such an organic low-molecular compound having an excellent hole transporting property.
(3-methylphenyl) -N, N'-diphenylbenzy
Gin) , α-NPD (4,4′-bis [N- (1-naphthyl) -N-phenylamino] biphenyl) and the like. These organic low-molecular compounds having excellent hole transport properties may be used alone or in combination of two or more.
The thickness of the hole transport layer 30 is 10 to 500 nm, preferably 10 to 30 nm. As a method for forming the hole transport layer 30, a vacuum evaporation method, a spin coating method, a sputtering method, or the like can be used.
【手続補正６】[Procedure amendment 6]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１１[Correction target item name] 0011
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【００１１】電界発光層２０及び光電変換層４０には電
圧が印加されるが、そのため電界発光層２０の片面に金
属電極１０が設けられるとともに、光電変換層４０の片
面に透明電極５０が設けられる。金属電極１０はＡｌ、
Ａｌ−Ｌｉ、Ａｇ−Ｍｇ等で構成することができる。一
方、透明電極５０はＩＴＯ、ＺｎＯ、ＳｎＯ2、Ｆドー
プＳｎＯ2、ＡｌドープＺｎＯの透明材料で構成するこ
とができる。金属電極１０の膜厚は１０〜１０００ｎ
ｍ、好ましくは５０〜２００ｎｍである。また、透明電
極５０の膜厚は１０〜４００ｎｍ、好ましくは１００〜
３００ｎｍである。A voltage is applied to the electroluminescent layer 20 and the photoelectric conversion layer 40. Therefore, the metal electrode 10 is provided on one side of the electroluminescent layer 20, and the transparent electrode 50 is provided on one side of the photoelectric conversion layer 40. . The metal electrode 10 is Al,
It can be made of Al-Li, Ag-Mg or the like. On the other hand, the transparent electrode 50 can be made of a transparent material of ITO, ZnO, SnO 2 , F-doped SnO 2 , and Al-doped ZnO. The thickness of the metal electrode 10 is 10 to 1000 n
m, preferably 50 to 200 nm. The transparent electrode 50 has a thickness of 10 to 400 nm, preferably 100 to 400 nm.
300 nm.
【手続補正７】[Procedure amendment 7]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】符号の説明[Correction target item name] Explanation of sign
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【符号の説明】 １０ 金属電極 ２０ 電界発光層 ３０ ホール輸送層 ４０ 光電変換層 ５０ 透明電極６０ 透明基板 ７０ 外部電源 ８０ 入射光 ９０ 出射光[Description of Signs] 10 Metal electrode 20 Electroluminescent layer 30 Hole transport layer 40 Photoelectric conversion layer 50 Transparent electrode60 transparent substrate 70 External power supply 80 Incident light 90 Outgoing light
Claims (1)
置し、光電変換層に照射した光により励起したキャリア
を、これら光電変換層及び電界発光層に印加した電界に
よって電界発光層に注入し、光を励起・発光させる空間
光変調素子において、前記電界発光層を有機電界発光材
料で構成するとともに、前記光電変換層を金属フタロシ
アニン錯体で構成することを特徴とする有機空間光変調
素子。1. A photoelectric conversion layer and an electroluminescent layer are arranged to face each other, and carriers excited by light applied to the photoelectric conversion layer are injected into the electroluminescent layer by an electric field applied to the photoelectric conversion layer and the electroluminescent layer. And a spatial light modulator for exciting and emitting light, wherein the electroluminescent layer is composed of an organic electroluminescent material, and the photoelectric conversion layer is composed of a metal phthalocyanine complex.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11082114A JP2000277265A (en) | 1999-03-25 | 1999-03-25 | Organic space light modulating element |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11082114A JP2000277265A (en) | 1999-03-25 | 1999-03-25 | Organic space light modulating element |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001020418A Division JP2001250687A (en) | 2001-01-29 | 2001-01-29 | Organic space light modulation element |
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| Publication Number | Publication Date |
|---|---|
| JP2000277265A true JP2000277265A (en) | 2000-10-06 |
Family
ID=13765389
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11082114A Pending JP2000277265A (en) | 1999-03-25 | 1999-03-25 | Organic space light modulating element |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003101060A (en) * | 2001-09-20 | 2003-04-04 | National Institute Of Advanced Industrial & Technology | Organic photocurrent amplifier element and manufacturing method therefor |
| JP2013532374A (en) * | 2010-05-24 | 2013-08-15 | ユニバーシティ オブ フロリダ リサーチ ファウンデーション，インク． | Method and apparatus for providing a charge blocking layer on an infrared upconversion device |
| US10134815B2 (en) | 2011-06-30 | 2018-11-20 | Nanoholdings, Llc | Method and apparatus for detecting infrared radiation with gain |
| US10700141B2 (en) | 2006-09-29 | 2020-06-30 | University Of Florida Research Foundation, Incorporated | Method and apparatus for infrared detection and display |
| US10749058B2 (en) | 2015-06-11 | 2020-08-18 | University Of Florida Research Foundation, Incorporated | Monodisperse, IR-absorbing nanoparticles and related methods and devices |
-
1999
- 1999-03-25 JP JP11082114A patent/JP2000277265A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003101060A (en) * | 2001-09-20 | 2003-04-04 | National Institute Of Advanced Industrial & Technology | Organic photocurrent amplifier element and manufacturing method therefor |
| US10700141B2 (en) | 2006-09-29 | 2020-06-30 | University Of Florida Research Foundation, Incorporated | Method and apparatus for infrared detection and display |
| JP2013532374A (en) * | 2010-05-24 | 2013-08-15 | ユニバーシティ オブ フロリダ リサーチ ファウンデーション，インク． | Method and apparatus for providing a charge blocking layer on an infrared upconversion device |
| US9997571B2 (en) | 2010-05-24 | 2018-06-12 | University Of Florida Research Foundation, Inc. | Method and apparatus for providing a charge blocking layer on an infrared up-conversion device |
| US10134815B2 (en) | 2011-06-30 | 2018-11-20 | Nanoholdings, Llc | Method and apparatus for detecting infrared radiation with gain |
| US10749058B2 (en) | 2015-06-11 | 2020-08-18 | University Of Florida Research Foundation, Incorporated | Monodisperse, IR-absorbing nanoparticles and related methods and devices |
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