JP2000275457A - Hybrid waveguide module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a hybrid waveguide module having good manufacturing yields. SOLUTION: A substrate for the portion of a waveguide element having the function of multiplexing and demultiplexing light waves is made of quartz to enhance optical characteristics and yields. A mounting-part waveguide element 31 on which optical components such as a laser diode 38 and a photodiode 39 are mounted and an optical wave multiplexing/demultiplexing part waveguide element 45 having the function of multiplexing and demultiplexing light waves are split into separate components, so that only nondefective components can be sorted out for each component and combined, so that the manufacturing yields of a hybrid waveguide module are greatly enhanced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hybrid waveguide module.

[0002]

2. Description of the Related Art In the field of communication using optical fibers, two-way communication using a wavelength of 1.3 μm has become mainstream in recent years. In order to perform the bidirectional communication, the hybrid waveguide module is an indispensable device.

FIG. 4 (a) is an external perspective view of a conventional filter type waveguide module, FIG. 4 (b) is a plan view of FIG. 4 (a), and FIG. 4 (c) is FIG. 4) is a side view, and FIG. 4 (d) is a partially enlarged view of the optical multiplexing / demultiplexing portion waveguide element of FIG. 4 (c).

[0004] A waveguide element 1 is adhesively fixed on a base 2. The waveguide element 1 has a structure in which a clad layer 4 is formed on a Si substrate 3 and a core layer 5 is formed on the clad layer 4.
Are formed. The core layer 5 is subjected to a photolithographic technique and an etching technique to form a waveguide 6. A clad layer 7 is formed on the waveguide 6.

[0005] The waveguide element 1 is branched into two at a branch portion 8. A laser diode (hereinafter referred to as “LD”) 9 and a photodiode (hereinafter referred to as “P”) are provided at the end of each waveguide 6.
D) are fixed on the Si substrate 3 by soldering. The LD 9 and the PD 10 are connected to the electrode 11 on the base 2 by a gold wire 12.
A predetermined voltage is applied to each of PD 9 and PD 10.

The light emitted from the LD 9 enters the waveguide 6, and the light emitted from the waveguide 6 is received by the PD 10.
The LD 9 and the PD 10 are covered with a silicone resin having a refractive index equal to or close to that of the waveguide 6.

A groove 14 is formed on the waveguide element 1 in a direction crossing the waveguide 6, and a dielectric multilayer filter 15 is inserted into the groove 14 using both walls of the groove 14 as a guide. The dielectric multilayer filter 15 has a function of blocking light having a wavelength of 1.3 μm. The dimensions of the groove 14 are about 20 μm in width and about 150 μm in depth, and the length is equal to the width of the waveguide element 1. The thickness of the dielectric multilayer filter 15 is about 15 μm. In the gap between the dielectric multilayer filter 15 and the groove 14,
Adhesive 1 having the same or similar refractive index as core layer 5
6, and the dielectric multilayer filter 15 is bonded and fixed. The adhesive 16 is a thermosetting type or an ultraviolet curing type, and the main component of the adhesive 16 is selected from acrylic resin, epoxy resin, silicone resin and the like.

A glass block 17 is adhered to the upper surface of the end of the waveguide element 1. The adhesive for fixing the glass block 17 to the waveguide element 1 is a thermosetting type or an ultraviolet setting type, and the main component of the adhesive is an acrylic resin, an epoxy resin or the like. Waveguide element 1 and glass block 1
The tips of 7 are polished, for example, eight times, and the tips are flush with each other, and have a function of fixing the fiber array 19, which has also been polished eight times.

FIG. 5A is a diagram showing the loss of the waveguide of the hybrid waveguide module shown in FIGS. 4A to 4D, and FIG. 5B is a diagram showing the loss of the waveguide. It is a top view showing the flow of light of the hybrid type waveguide module shown to d). In FIG. 5A, the horizontal axis indicates the loss, and the vertical axis indicates the frequency.

FIG. 6A is an external perspective view showing another conventional example of the hybrid waveguide module, and FIG.
6A is a plan view of FIG. 6A, and FIG. 6C is a plan view of FIG.
6D is a partial enlarged view of the optical multiplexing / demultiplexing portion waveguide element of FIG. 6C.

The difference from the conventional example shown in FIGS. 4A to 4D is that light having a wavelength of 1.3 μm is transmitted and a wavelength of 1.5 μm is transmitted.
As a method of blocking the light of the
MZ (Mach-Zehnder) in the middle of the waveguide 21 without using
This is the point that the optical multiplexing / demultiplexing circuit 22 is provided.

[0012]

However, when the substrate of the multiplexing / demultiplexing section having the optical multiplexing / demultiplexing function is a Si substrate,
There has been a problem that the optical characteristics are inferior to those of a quartz substrate.

It is an object of the present invention to solve the above-mentioned problems and to provide a hybrid waveguide module having a good production yield.

[0014]

In order to achieve the above object, a hybrid type waveguide module according to the present invention is a hybrid type waveguide module in which optical components such as a laser diode and a photodiode are mounted on a waveguide element having an optical multiplexing / demultiplexing function. In the type waveguide module, the waveguide element is divided into an optical component mounting portion on which an optical component is mounted, and an optical multiplexing / demultiplexing portion having an optical multiplexing / demultiplexing function, and a flat quartz substrate is used as a substrate of the optical multiplexing / demultiplexing portion. Is what it is.

In addition to the above structure, it is preferable that the divided optical component mounting portion and the optical multiplexing / demultiplexing portion of the hybrid type waveguide module of the present invention are optically joined and fixed respectively.

According to the present invention, since the substrate of the portion having the optical multiplexing / demultiplexing function of the waveguide element is a quartz substrate, the characteristics of light are improved and the yield is improved. In addition, by dividing the waveguide element part equipped with optical components such as laser diodes and photodiodes and the waveguide element part having the light multiplexing / demultiplexing function into separate parts, only good parts among each part Can be selected and combined, so that the production yield of the hybrid waveguide module is greatly improved.

[0017]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1A is an external perspective view showing another embodiment of the hybrid waveguide module of the present invention, and FIG. 1B is a plan view of FIG.
FIG. 1C is a side view of FIG. 1A, and FIG.
FIG. 1C is a partially enlarged view of the mounting portion waveguide element of FIG.
(E) is a partially enlarged view of the optical multiplexing / demultiplexing portion waveguide element of FIG. 1 (c).

Mounting part waveguide element 3 as optical part mounting part
1 is adhesively fixed on a base 32. The mounting portion waveguide element 31 has a structure in which a clad layer 34 is formed on a Si substrate 33 and a core layer 35 is formed on the clad layer 34. The core layer 35 is subjected to a photolithography technique and an etching technique to form a waveguide 36. A cladding layer 37 is formed on the waveguide 36.

At the ends of the two parallel waveguides 36, LD 38
And PD 39 are fixed on the Si substrate 33 with solder. The gold wire 41 connects between the LD 38 and PD 39 and the electrode 40 on the base 32. The gold wire 41 has a function of applying a voltage to the LD 38 and the PD 39.

Light emitted from the LD 38 enters the waveguide 36, and light emitted from the waveguide 36 is received by the PD 39. The LD 38 and the PD 39 are covered with a silicone resin 42 having a refractive index equal to or close to that of the waveguide 36.

A glass block 43 is bonded to the upper surface of the end of the mounting waveguide element 31. Mounting part waveguide element 3
The adhesive for fixing the glass block 43 to 1 is a thermosetting type or an ultraviolet setting type, and an acrylic resin, an epoxy resin or the like is used as a main component of the adhesive. For example, both ends of the mounting portion waveguide element 31 and the glass block 43 are polished eight times (an eight-degree polished surface 44), and the ends are flush with each other.

An optical multiplexing / demultiplexing portion waveguide element 45 as an optical multiplexing / demultiplexing portion has a cladding layer 47 formed on a quartz substrate 46.
It has a structure in which a core layer 48 is formed on a clad layer 47. The core layer 48 is subjected to a photolithography technique and an etching technique to form a waveguide 49.
A cladding layer 50 is formed on the waveguide 49.
A groove 51 is formed on the optical multiplexer / demultiplexer waveguide element 45 in a direction crossing the waveguide 49, and a dielectric multilayer filter 52 is formed.
Are inserted into the groove 51 using both walls of the groove 51 as guides. The dielectric multilayer filter 52 transmits light having a wavelength of 1.3 μm and blocks light having a wavelength of 1.5 μm. The dimensions of the groove 51 are about 20 μm in width and about 150 μm in depth, and the length is the same as the width of the optical multiplexing / demultiplexing part waveguide element 45. The thickness of the dielectric multilayer filter 52 is about 15 μm.

An adhesive 53 having the same refractive index as the core layer 48 has a gap between the groove 51 and the dielectric multilayer filter 52.
Is injected, and the dielectric multilayer filter 52 is bonded and fixed. The adhesive 53 is a thermosetting type or an ultraviolet curing type, and the main component of the adhesive 53 is an acrylic resin type, an epoxy resin type, a silicone resin type or the like. The waveguide is bifurcated at a branching section 54 on the way. Glass blocks 55 are adhered to the upper surfaces of both ends of the optical multiplexing / demultiplexing unit waveguide element 45. The adhesive for fixing the glass block 55 to the optical multiplexer / demultiplexer waveguide element 45 is a thermosetting or ultraviolet curing type, and the main component of the adhesive is acrylic resin, epoxy resin or the like. The tips of the optical multiplexing / demultiplexing portion waveguide element 45 and the glass block 55 are polished, for example, eight times, and the tips are on the same flat surface (eight-degree polished surface) 56.

The mounting section waveguide element 31 and the optical multiplexing / demultiplexing section waveguide element 45 are bonded so as to be optically coupled to each other. The adhesive for fixing the mounting section waveguide element 31 and the optical multiplexing / demultiplexing section waveguide element 45 is a thermosetting or ultraviolet curing type. An acrylic resin, an epoxy resin, or the like is used as a main component of the adhesive. The other end of the optical multiplexer / demultiplexer waveguide element 45 has a function of fixing the fiber array 57 similarly polished eight times.

FIG. 2 (a) is a diagram showing the loss of the waveguide of the hybrid type waveguide module shown in FIGS. 1 (a) to 1 (e), and FIG. 2 (b) is a diagram showing FIGS. It is a top view showing the flow of light of the hybrid type waveguide module shown to e). In FIG. 2A, the horizontal axis represents the loss, and the vertical axis represents the frequency.

FIG. 2A shows that the loss is reduced by 0.2 dB on average compared to the conventional case.

FIG. 3A is an external perspective view showing another embodiment of the hybrid waveguide module of the present invention, and FIG. 3B is a plan view of FIG.
3C is a side view of FIG. 3A, and FIG.
FIG. 3C is a partially enlarged view of the mounting portion waveguide element of FIG.
FIG. 3E is a partially enlarged view of the optical multiplexing / demultiplexing portion waveguide element of FIG.

The difference from the embodiment shown in FIG. 1 is that an MZ type optical multiplexing / demultiplexing circuit 62 is provided in the middle of a waveguide 61 so that light having a wavelength of 1.3 μm is transmitted and wavelength of 1.5 μm.
The point is that the light is blocked.

The optical multiplexer / demultiplexer waveguide element 63 is formed of a quartz substrate 6
4 and a core layer 66 is formed on the clad layer 65. Core layer 6
Reference numeral 6 denotes a waveguide 61 formed by photolithography and etching. A cladding layer 67 is formed on the waveguide 61.

An MZ type optical multiplexing / demultiplexing circuit 62 is formed in the waveguide 61. The MZ type optical multiplexing / demultiplexing circuit 62 has a function of transmitting light having a wavelength of 1.3 μm and blocking light having a wavelength of 1.5 μm.

As described above, according to the present invention, since the substrate of the waveguide portion having the light multiplexing / demultiplexing function is a quartz substrate, the characteristics of light are improved and the yield is improved. Furthermore, by dividing the waveguide element part equipped with optical parts such as LD and PD and the waveguide element part having the function of multiplexing / demultiplexing light into separate parts, only good products are selected from each part. Can be combined. As a result, the production yield of the hybrid waveguide module has been significantly improved.

[0033]

In summary, according to the present invention, the following excellent effects are exhibited.

It is possible to provide a hybrid waveguide module having a good production yield.

[Brief description of the drawings]

FIG. 1A is an external perspective view showing another embodiment of the hybrid waveguide module of the present invention, and FIG.
3A is a plan view of FIG. 3A, FIG. 3C is a side view of FIG. 3A, FIG. 3D is a partially enlarged view of the mounting-portion waveguide element of FIG. 3C, and FIG. FIG. 4 is a partially enlarged view of the optical multiplexing / demultiplexing portion waveguide element of FIG.

FIG. 2A is a diagram showing the loss of the waveguide of the hybrid waveguide module shown in FIGS. 1A to 1E, and FIG. 2B is a diagram showing the loss of the hybrid waveguide module shown in FIGS. It is a top view showing the flow of light of the hybrid type waveguide module shown.

3A is an external perspective view showing another embodiment of the hybrid waveguide module of the present invention, and FIG.
3A is a plan view of FIG. 3A, FIG. 3C is a side view of FIG. 3A, FIG. 3D is a partially enlarged view of the mounting-portion waveguide element of FIG. 3C, and FIG. FIG. 4 is a partially enlarged view of the optical multiplexing / demultiplexing portion waveguide element of FIG.

4A is an external perspective view of a conventional filter type waveguide module, FIG. 4B is a plan view of FIG.
(C) is a side view of (a), and (d) is a partially enlarged view of the optical multiplexer / demultiplexer waveguide element of (c).

5 (a) is a diagram showing the loss of the waveguide of the hybrid waveguide module shown in FIGS. 4 (a) to 4 (d), and FIG. 5 (b) is a diagram showing the losses in FIGS. 4 (a) to 4 (d). It is a top view showing the flow of light of the hybrid type waveguide module shown.

6A is an external perspective view showing another conventional example of a hybrid waveguide module, FIG. 6B is a plan view of FIG. 6A, and FIG. 6C is a side view of FIG. (D) is a partially enlarged view of the optical multiplexing / demultiplexing portion waveguide element of (c).

[Explanation of symbols]

 31 Optical component mounting part (mounting part waveguide element) 38 Laser diode (LD) 39 Photodiode (PD) 45 Waveguide element part (optical multiplexing / demultiplexing part waveguide element) 64 Quartz substrate

Continued on the front page (72) Inventor Yoshiaki Ishigami 5-1-1, Hidaka-cho, Hitachi-shi, Ibaraki Hitachi Cable, Ltd. Opto-System Research Laboratory (72) Inventor Tatsuo Teraoka 5-1-1 Hidaka-cho, Hitachi-shi, Ibaraki No. 1 Hitachi Cable Co., Ltd. Optro System Laboratory (72) Inventor Toshikazu Hashimoto Nippon Telegraph and Telephone Co., Ltd. 3-19-2 Nishi-Shinjuku, Shinjuku-ku, Tokyo (72) Inventor Kunie Hanai Totsuka-ku, Yokohama-shi, Kanagawa 216 Totsukacho F-term in Hitachi, Ltd. Information and Communications Division 2H047 KA04 KA11 LA18 MA07 PA24 TA42 5F073 AB25 BA02 FA06 FA29 5F089 AA01 AC01 GA10

Claims (2)

[Claims] 1. A hybrid type waveguide module in which optical components such as a laser diode and a photodiode are mounted on a waveguide device having an optical multiplexing / demultiplexing function, wherein the waveguide device has an optical component mounting section on which an optical component is mounted. A hybrid waveguide module divided into an optical multiplexing / demultiplexing section having the optical multiplexing / demultiplexing function, wherein a flat quartz substrate is used as a substrate of the optical multiplexing / demultiplexing section. 2. The hybrid waveguide module according to claim 1, wherein the divided optical component mounting section and the optical multiplexing / demultiplexing section are optically joined and fixed respectively.