JP2000268715A - Washing method and device for screen board, and manufacture of plasma display member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable washing of a screen board with a simple device and reduce the amount of using a solvent upon washing by washing a screen board while supplying the solvent onto the board and sucking the solvent. SOLUTION: This washing device has a washing head 3. At an upper part of the head 3, a plurality of discharge nozzles are arranged in a line while a slit-like suction nozzle is provided at a lower part thereof. A solvent is discharged from the nozzle 4 and supplied onto a screen board. By moving a washing head 3 up/down and right/left, paste and the solvent remaining on the board are mixed. Accordingly, by sucking the solvent from a suction nozzle 5 while the solvent is supplied from the nozzle 4, the paste mixed with the solvent can be sucked together with the solvent to thereby efficiently wash the board. The mixture of the solvent and the paste being in the form of liquid is stored in a washed liquid receiver 6. As the solvent, the same solvent as the paste is used to thereby improve the mixed condition of the remaining paste and the solvent.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for cleaning a screen plate, a cleaning apparatus, and a method for manufacturing a plasma display panel member.

[0002]

2. Description of the Related Art A screen printing method for printing using a screen plate is suitably used for pattern printing or solid printing of various pastes. However, in the screen printing method, a problem is how to clean the screen plate after screen printing.

[0003] Washing of the screen plate after screen printing can be performed simply by immersing a solvent in a waste cloth and wiping it. As a manual cleaning device, a method of washing with a hand brush while pumping a solvent through a pump has been proposed. In addition, as a closed box type washing machine, a method of removing fine stains by wetting the plate surface with a solvent spray nozzle, brushing with a rotating brush to remove dirt, and further spraying the solvent at high pressure, and a method of removing fine dirt from the solvent spray nozzle There is a method of processing by exercise.

However, in the case of hand wiping, not only the operation is complicated, but also scattering of the solvent becomes a problem. Also, the method of hand brushing while pumping the solvent through a pump,
There is a problem that a large amount of solvent is used. The closed box type washing machine not only uses a large amount of solvent but also is expensive.

[0005] In particular, when these conventional cleaning methods are applied to cleaning of a screen plate for manufacturing a plasma display member, the above-mentioned problems are remarkably exposed because the screen plate is large.

[0006]

SUMMARY OF THE INVENTION An object of the present invention is to use a simple apparatus and reduce the amount of solvent used for washing a screen plate.

[0007]

SUMMARY OF THE INVENTION The object of the present invention is achieved by a method for cleaning a screen plate, wherein the cleaning is performed by suctioning the solvent while supplying the solvent onto the screen plate.

Further, the object of the present invention is attained by a method for cleaning a screen plate, wherein the cleaning is performed by sucking the solvent while supplying a solvent and a gas onto the screen plate.

Further, the object of the present invention is attained by a screen plate cleaning device characterized by comprising a solvent supply device and a solvent suction device.

Further, the object of the present invention is achieved by a screen plate cleaning apparatus characterized by comprising a solvent supply device, a gas supply device and a suction device.

Another object of the present invention is a method of manufacturing a plasma display member including a step of screen-printing a paste on a substrate, wherein the screen plate is cleaned by sucking the solvent while supplying the solvent onto the screen plate. This is achieved by a method for manufacturing a plasma display member, which is characterized in that cleaning is performed by performing the cleaning.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION The method for cleaning a screen plate of the present invention is intended to simplify the screen plate cleaning using a solvent and to reduce the amount of solvent used, and to supply a solvent onto at least the screen plate. The screen plate is washed by sucking the solvent.

As a method for supplying the solvent, any method such as natural fall or supply by a pump can be used.
A combination of a natural fall (siphon) and a cock is preferred because it is simple in terms of equipment.

FIG. 1 shows an embodiment of the screen plate cleaning apparatus of the present invention. Hereinafter, the present invention will be described with reference to FIG. 1, but the present invention is not limited to this.

In FIG. 1, a washing solvent is a solvent tank 1
Supplied by gravity. The solvent supply amount is controlled by selecting the supply line diameter and using the cock 2.

In FIG. 1, a screen version (not shown)
Are installed vertically (vertically), but may be installed horizontally (horizontally). In FIG. 1, the cleaning apparatus of the present invention has a cleaning head 3, a plurality of discharge nozzles 4 are provided in a row at an upper part of the cleaning head 3, and a slit-shaped suction nozzle 5 is provided at a lower part. I have. Solvent nozzle 4
And is supplied onto the screen plate. By moving the cleaning head up, down, left, and right, the paste remaining on the screen plate and the solvent can be blended. In FIG. 1, the cleaning head is moved manually, but may be moved automatically. Then, in the present invention, while the solvent is supplied from the discharge nozzle 4 and the solvent is suctioned from the suction nozzle 5, the paste compatible with the solvent can be sucked together with the solvent, and the screen plate is efficiently cleaned. be able to.

The mixture of the solvent and the paste (hereinafter, referred to as a familiar liquid) sucked from the suction nozzle 5 is stored in the washing liquid receiver 6.

The solvent discharge nozzle can have any shape, but in order to spread the solvent uniformly on the screen, a columnar discharge head is provided, and the surface of the discharge head that contacts the screen plate has a diameter of 0.1 mm. Preferably, a plurality of small-diameter nozzles having a diameter of about 2.0 mmφ are provided substantially uniformly in the major axis direction, and the solvent is simultaneously discharged.

The type of the solvent used is not particularly limited, but the same solvent contained in the paste is used.
It is preferable to improve the compatibility between the residual paste and the solvent.

When the paste contains two or more solvents, it is also effective to use a mixed solvent, or to use a solvent having a higher viscosity in the early stage of washing and a solvent having a lower viscosity in the latter half of the washing.

Examples of the solvent include terpineol, γ
-Butyrolactone, methanol, ethanol, isopropyl alcohol, benzyl alcohol and the like can be used.

In order to spread the solvent over a wider range and improve the compatibility with the paste, it is effective to discharge gas simultaneously with the solvent. By discharging the gas at the same time, the solvent is efficiently spread, so that the cleaning time can be shortened and the amount of the solvent used can be reduced.

The type of gas is not particularly limited, but it is preferable to use air or nitrogen from the viewpoint of cost.

It is preferable that the solvent compatible with the paste is sucked in before the drying proceeds to obtain the effect of the present invention.

Although the position of the suction nozzle is not particularly limited,
It is preferable to provide one or both sides of the discharge nozzle substantially in parallel with the discharge nozzle.

The distance between the discharge nozzle and the suction nozzle is preferably 5 mm to 50 mm away from the discharge nozzle from the viewpoint that the solvent and the residual paste are mixed and then sucked. If the distance is less than 5 mm, the solvent may be sucked before being mixed with the paste. If the distance exceeds 50 mm, evaporation or dripping of the solvent may cause a problem.

[0027] In order to effectively aspirate the familiar liquid, 0.2
A plurality of suction nozzles having a diameter of about mmφ to 10.0 mmφ are provided substantially uniformly in the horizontal direction, or 0.1 mm to 1 mm.
It is effective to provide a slit-shaped suction nozzle having a width of 0 mm.

When the screen is installed in the vertical direction, it is preferable to install a plurality of suction nozzles below the solvent discharge nozzle in the vertical direction from the viewpoint of preventing the solvent from dripping.

In order to prevent the solvent dripping over the suction nozzle from flowing out to the floor, it is preferable to provide a suction nozzle at the lower part of the screen or a pan (pan) for receiving the entire screen.

It is preferable to provide a baffle plate or a projection between the solvent discharge nozzle and the suction nozzle to promote the adaptation of the solvent and the paste, since the effect of the present invention is further increased.

Although the screen cleaning method of the present invention can be applied without limitation as long as it is a screen printing plate, it is particularly suitable for cleaning a screen plate for manufacturing a plasma display member. The screen plate for manufacturing a plasma display member has a large plate, so that the device is simple,
The effect of reducing the amount of solvent used is remarkable.

The plasma display panel member includes, for example, a back plate for a plasma display panel, a front plate for a plasma display panel, and the like.
It can be manufactured as a high quality plasma display panel member.

The substrate used for the back plate is not particularly limited, but a glass substrate, a ceramic substrate or the like can be used.

The substrate is preferably cleaned and then the electrodes are formed. As the composition of the electrode, for example, a conductive paste containing silver, copper, or the like can be used.

As a method of forming the electrodes, for example, a method in which a conductive paste is screen-pattern-printed and then baked, a method in which a photosensitive conductive paste is screen-printed and then an electrode pattern is exposed and baked, or a method in which the photosensitive conductive paste is sprayed with a nozzle or the like. It is preferable to use a method in which the electrode pattern is exposed and baked after application and application.

The electrode pattern has an electrode thickness of 1 to 20 μm.
Is preferably, and more preferably, 2 to 15 μm. When the thickness of the electrode is 1 μm or more, the thickness of the conductor film is reduced to prevent pinholes and the like from occurring, and the specific resistance value is reduced. By setting the thickness of the electrode to 20 μm or less, when a dielectric layer for insulation is formed on the electrode, thermal stress due to unevenness of the electrode and a difference in coefficient of thermal expansion is suppressed, and therefore, a crack occurs in the dielectric layer. Or irregularities in the dielectric layer can be prevented.

The line width of the electrode is 10 to 200 μm.
And more preferably 20 to 180 μm. When the thickness is 10 μm or more, disconnection defects are less likely to occur, and the specific resistance value can be reduced. Also, 2
By setting the thickness to 00 μm or less, shrinkage of firing is suppressed, and when observed in a cross-sectional shape, it is possible to prevent the edge portion from having a shape having corners after firing.

When a dielectric layer is provided on the electrode, the adhesion of the partition is increased and peeling is suppressed, and the deterioration of the phosphor (described below) is increased as compared with the case where a partition (described later) is formed directly on the substrate. This is preferable because it can be prevented.

The thickness of the dielectric layer is preferably 4 to 20 μm, more preferably 5 to 18 μm, in order to form a uniform dielectric layer. If the thickness exceeds 20 μm, there is a problem that it is difficult to remove the binder during firing and cracks easily occur, and the substrate is warped due to a large stress applied to the substrate. If the thickness is less than 4 μm, it is difficult to maintain the uniformity of the thickness.

The dielectric layer can be formed by applying or laminating a dielectric paste composed of an inorganic material powder and an organic binder on a glass substrate, followed by firing. The amount of the inorganic material powder used for the dielectric layer paste is preferably 50 to 95% by weight based on the sum of the inorganic material powder and the organic component. If the amount is less than 50% by weight, the denseness of the dielectric layer and the flatness of the surface are lacking.

A partition is provided on the dielectric layer to form a discharge space. The shape of the partition is formed in a stripe shape or a lattice shape. The height of the partition walls is preferably 50 to 200 μm, and the line width is preferably 20 to 200 μm. The line width may be the same or may be changed.

The partition may be formed on the back plate for the plasma display, may be formed on the front plate for the plasma display, or may be formed on both the back plate and the front plate.

The method for manufacturing the partition walls is not particularly limited. For example, the partition wall pattern is formed on a substrate using a partition paste containing an inorganic material and an organic component, and the partition wall pattern is baked. Can be formed.

A screen printing method, a sand blast method, a lift-off method, a photolithography method, or the like can be used as a partition pattern forming method.

Still another method is a step of applying a partition paste comprising an inorganic material and an organic component to a substrate to form a coating film, and pressing a partition matrix having grooves formed in the coating film to form a partition wall. Forming a pattern;
And firing at 00 to 600 ° C. in this order.

In this method, a glass paste for a partition is
This is a method of forming a partition pattern by applying a uniform coating on a part or the entire surface of a glass substrate in advance, and pressing a partition matrix onto the paste applied layer. The method of uniformly applying the glass paste to the glass substrate is not particularly limited,
A screen printing method and a coating method using a die coater or a roll coater are preferably exemplified.

A phosphor is formed on the discharge space formed by the partition. The method for forming the phosphor is not particularly limited, and a method of forming the phosphor paste by a photolithography method, a method of applying the phosphor paste by a dispenser, and the like are used. The applied phosphor is fired and fixed to the bottom and side surfaces of the partition.

As the substrate for the plasma display front panel, a glass substrate is preferably used.

As a method of manufacturing the front plate, for example, there is the following method. First, after forming ITO by the sputtering method on the same glass substrate as the back plate, a resist is applied,
After exposure and development to a desired pattern, etching treatment is performed to form a transparent electrode having a fired thickness of 0.1 μm and a line width of 200 μm. In addition, using a photosensitive silver paste composed of black silver powder, by photolithography, a thickness of 10 μm after baking.
Is formed. Electrodes having a pitch of 360 μm and a line width of 120 μm were prepared.

Further, a transparent dielectric paste was applied to a thickness of 20 μm on the front plate on which the electrodes were formed, and was baked at 430 ° C. for 20 minutes. Next, the formed transparent electrode, black electrode,
An MgO film having a thickness of 0.5 μm is formed using an electron beam evaporator so as to uniformly cover the dielectric layer, thereby completing the front plate.

According to the cleaning method of the present invention, in the manufacturing process of the above-described plasma display member, the formation of electrodes, dielectrics, partition walls, and phosphors on the back plate, the application of a resist for a transparent electrode on the front plate, the bus electrodes, the transparent dielectric In the case of using a method of applying a paste on a substrate by using a screen printing method in forming a screen plate or the like, the method can be used for cleaning the used screen plate.

After the obtained front substrate is bonded and sealed to the rear substrate, a discharge gas is sealed, and a driving circuit is joined to produce a plasma display panel.

The screen plate regenerated using the cleaning method and the cleaning apparatus of the present invention has a clean screen surface,
By using this in the manufacturing process of the plasma display member, a high quality plasma display panel member can be obtained.

[0054]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be specifically described below with reference to embodiments. However, the present invention is not limited to this. (Preparation of conductive paste) A mixture having the following composition was kneaded with a three-roller kneader to prepare a conductive paste. The paste viscosity was 500 poise as a result of measuring the rotation speed at 3 rpm while keeping the thermostat at 25 ° C. using a viscometer (manufactured by BROOKFIELD).

Conductive silver powder (weight average particle size: 1.4 μm) 88 parts by weight Binder (ethyl cellulose) 11 parts by weight Glass frit; component (% by weight) bismuth oxide (46.2), silicon dioxide (27.1), Boron oxide (11.8), zinc oxide (2.6), sodium oxide (4.7), aluminum oxide (2.8), zirconium oxide (4.8) Glass transition point; 461 ° C., glass softening point; 513 ° C., weight average particle diameter: 1.0 μm 3 parts by weight Terpineol 6 parts by weight Example 1 Glass substrate (PD-200 manufactured by Asahi Glass 500 mm × 9)
00 mm) was washed with water and dried, and the above-mentioned conductive paste was solid-printed using a screen plate (1800 mm × 1800 mm).

Next, the screen plate to which the used conductive paste was adhered was washed using the washing apparatus of the present invention shown in FIG. The ejection head was manufactured by cutting ultra-high molecular weight polyethylene. The tip of the ejection head 3 is substantially flat with an end face chamfered, and has a size of 200 mm × 50 mm. As the discharge nozzle, a 0.5 mmφ nozzle was arranged at a position 20 mm above the center in the minor diameter direction, and 30 holes were arranged substantially uniformly within 180 mm in the major diameter direction. The suction nozzle is located at a position 15 mm below the center in the minor axis direction, 195 mm in the major axis direction,
A slit having a width of 2 mm was formed. Terpineol was used as a washing solvent. The amount of solvent used for washing was 1 L or less, and the washing time was about 10 minutes. No trace of paste was seen on the screen plate after washing, and a clean screen surface was reproduced. Example 2 A member for a plasma display panel was manufactured using the method of the present invention. Hereinafter, the method will be described in detail.

Glass substrate (PD-2004 manufactured by Asahi Glass)
(00 mm × 500 mm) was washed with water and dried.

Next, address electrodes were formed. The address electrodes were formed by solid-printing the conductive paste used in Example 1 by a screen printing method, and then pattern-processing by a photolithography method to form an electrode pattern, followed by firing.

Screen plate for address electrode (1200 m
(mx 1200 mm) was used after repeating printing and washing three times. The same cleaning device as in Example 1 was used. Terpineol was used as a washing solvent. The amount of solvent used for the washing three times and the washing after the main printing was 1.5 L in total, and the total washing time was about 30 minutes.

After firing, an electrode substrate having a pattern having a thickness of 3.3 μm and a line width of 40 μm was obtained. Next, when the electrode pattern was examined with an optical microscope, an excellent electrode pattern free from short-circuit defects and disconnection defects was obtained. (Dielectric and partition wall materials used for panel production) Glass (1); Composition: Li ₂ O 7%, SiO ₂ 22%, B ₂ O ₃ 32%, BaO 4%, Al ₂ O ₃ 22%, ZnO 2 %, MgO 6%, CaO 4% Thermal properties: glass transition point 491 ° C., softening point 528 ° C., coefficient of thermal expansion 74 × 10 ⁻⁷ / K Particle size: D10 0.9 μm D50 2.6 μm D90 7.5 μm Maximum particle Diameter 22.0 μm Specific surface area: 1.92 m ² / g Refractive index: 1.59 (g line 436 nm) Specific gravity: 2.54 Glass (2); Composition: 38% Bi ₂ O ₃ , 7% SiO ₂ , B ₂ O ₃ 19%, BaO 12%, Al ₂ O ₃ 4%, ZnO 20% Thermal properties: glass transition point 475 ° C., softening point 515 ° C., coefficient of thermal expansion 75 × 10 ⁻⁷ / K Particle size: D10 0.9 μm D50 2.5 μm D90 3.9 μm Maximum particle size 6.5 μm (white Filler powder) Filler; TiO _2, specific gravity 4.61 (Polymer) Polymer (1); 40% methacrylic acid (MAA), 3
0% methyl methacrylate (MMA) and 30%
0.4 equivalent of glycidyl methacrylate (G) to the carboxyl group of the copolymer of styrene (St)
MA) by addition reaction, a 40% solution of a photosensitive polymer having a weight average molecular weight of 43,000 and an acid value of 95 in γ-butyrolactone polymer (2); ethyl cellulose / terpineol = 6
/ 94 solution (weight ratio) (Monomer) Monomer _{(1); X 2 -N-} CH (CH 3) -CH 2 - (O-CH 2- CH (CH 3)) n -N-
X ₂ X: —CH ₂ —CH (OH) —CH ₂ O—CO—C (CH ₃ ) = CH ₂ n = 2 to 10 Monomer (2); Trimethylolpropane triacrylate / modified PO (photopolymerization initiator ) IC-369; "Irgacure" -369 (Ciba
Geigy products) 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) butanone-1 IC-907; "Irgacure" -907 (Ciba.
Geigy products) 2-Methyl-1- (4- (methylthio) phenyl-2-
Morpholinopropanone (sensitizer) DETX-S; 2,4-diethylthioxanthone (sensitizer aid) EPA; p-dimethylaminobenzoic acid ethyl ester (plasticizer) DBP; dibutyl phthalate (DBP) (thickener) SiO ₂ ; 15% solution of 2- (2-butoxyethoxy) ethyl acetate of SiO ₂ (organic dye) Sudan; azo organic dye, chemical formula C ₂₄ H ₂₀ N ₄ O, molecular weight 380.45 (solvent) γ-butyrolactone terpineol ( (Dispersant) "NOPCOSPARSE" 092 (manufactured by San Nopco) (Stabilizer) 1,2,3-benzotriazole Next, a photosensitive paste for partition walls was prepared. 100 parts by weight of glass powder (glass (1)) and 0.0 parts of organic dye
It was weighed at a ratio of 8 parts by weight. Sudan was dissolved in acetone, a dispersant was added, and the mixture was homogeneously stirred with a homogenizer. After adding glass powder to this solution and uniformly dispersing and mixing,
Using a rotary evaporator, drying was performed at a temperature of 100 ° C., and acetone was evaporated. In this way, a powder was prepared in which the surface of the glass powder was uniformly coated with the organic dye film.

The polymer (1), the monomer (1), the photopolymerization initiator (IC-369), the sensitizer, the plasticizer, and the solvent were used in an amount of 37.5: 15:
The mixture was mixed at a weight ratio of 4.8: 4.8: 2: 7.5 and homogeneously dissolved. Thereafter, this solution was filtered using a 400-mesh filter to obtain an organic vehicle.

The above-mentioned glass powder and the above-mentioned organic vehicle were added in a weight ratio of glass powder: organic vehicle = 70: 71.6, and mixed and dispersed with three rollers to prepare a photosensitive paste for partition walls. did. The refractive index of the organic component is 1.5
9. The refractive index of the glass powder was 1.59.

Similarly, a paste for a dielectric layer having a weight ratio of glass (2): filler: polymer (2) = 55: 10: 35 was prepared. This dielectric paste was uniformly applied on a glass substrate on which electrodes were formed in advance by screen printing using a 325 mesh dielectric screen plate (1200 mm × 1200 mm).

The screen plate for the dielectric used was obtained by repeating printing and washing three times. The same cleaning device as in Example 1 was used. As a washing solvent, γ-butyrolactone was used. The amount of the solvent used for the three washings and the washing after the main printing was 1.8 L in total, and the total washing time was 30 L.
Minutes.

The applied dielectric paste is heated at 80.degree.
After drying for a minute, it was calcined at 550 ° C. to form a dielectric layer having a thickness of 10 μm.

After the firing, the dielectric layer was examined with an optical microscope. As a result, an excellent dielectric layer free from printing omission and blistering was obtained.

On the dielectric layer, the above-mentioned partition wall paste was uniformly applied using a roll coater to form a coating film.
Drying after forming the coating film was performed at 80 ° C. for 1 hour. The thickness of the coating film after drying was 150 μm.

Subsequently, a stripe-shaped negative chromium mask having a pitch of 360 μm was used to pass 50 mJ / c from the upper surface.
Ultraviolet irradiation was performed using an ultra-high pressure mercury lamp having an m ² output. The exposure amount was 1.0 J / cm ² . The width of each partition was 80 microns.

Next, a 0.2% by weight aqueous solution of monoethanolamine kept at 35 ° C. was developed by applying a shower for 170 seconds, and then washed with water using a shower spray. As a result, portions that were not photocured were removed, and a stripe-shaped partition pattern was formed on the glass substrate.

The glass substrate on which the partition pattern was formed was fired in air at 570 ° C. for 15 minutes to form a partition.

Between the partition walls thus formed, red, blue,
A phosphor paste that emits green light was applied using a dispenser, and the paste was baked (500 ° C., 30 minutes) to form a phosphor layer on the side and bottom of the partition, thereby completing the back plate.

Next, a front plate was manufactured by the following steps. First, after forming ITO by sputtering on the same glass substrate as the back plate, applying a resist, exposing and developing into a desired pattern, etching, and firing to a thickness of 0.1 μm.
m, a transparent electrode having a line width of 200 μm was formed. Further, a bus electrode having a thickness of 10 μm was formed after firing by a photolithography method using a photosensitive silver paste composed of black silver powder. Electrodes having a pitch of 360 μm and a line width of 120 μm were prepared.

Further, a transparent dielectric paste was applied to a thickness of 20 μm on the front plate on which the electrodes were formed, and baked at 430 ° C. for 20 minutes. Next, the formed transparent electrode, black electrode,
A 0.5 μm thick MgO film was formed using an electron beam evaporator so as to uniformly cover the dielectric layer, thereby completing the front plate.

Here, the application of the bus electrode paste and the application of the transparent dielectric paste were performed by a screen printing method. At that time, the screen plate was washed using the apparatus of Example 1.

After the obtained front substrate was bonded and sealed to the above-mentioned rear substrate, a discharge gas was sealed therein, and a driving circuit was joined to produce a plasma display. Display was performed by applying a voltage to this panel. The resulting image was clear and excellent display without defects was achieved.

[0076]

The present invention relates to a method for cleaning a screen plate using a solvent, a cleaning apparatus, and a method for manufacturing a member for a plasma display panel.

The present invention is characterized in that the screen plate is washed by sucking the solvent while supplying the solvent onto the screen plate, and the screen plate is efficiently sucked by immediately sucking the solvent that has been adapted to the paste. Can be washed. Therefore, the screen plate can be washed with a simple device using a small amount of solvent.

The screen surface of the screen plate cleaned by the method of the present invention is clean, and by using the screen plate, a high quality member for a plasma display panel can be manufactured.

[Brief description of the drawings]

FIG. 1 is a schematic diagram of a cleaning apparatus of the present invention.

[Explanation of symbols]

 Reference Signs List 1 solvent tank 2 cock 3 cleaning head 4 discharge nozzle 5 suction nozzle 6 cleaning liquid receiver 7 exhaust

Continuation of front page (72) Inventor Hisayoshi Yamada 1-1-1 Sonoyama, Otsu-shi, Shiga F-term (reference) in Toga Corporation Shiga Plant 2C035 AA06 2C250 FA06 FB02 FB23 5C027 AA01 AA09 AA10 5C040 JA23 JA25 JA40 MA25

Claims (7)

[Claims] 1. A method for cleaning a screen plate, wherein the cleaning is performed by sucking the solvent while supplying the solvent onto the screen plate. 2. A method for cleaning a screen plate, wherein the cleaning is performed by sucking the solvent while supplying a solvent and a gas onto the screen plate. 3. The method for cleaning a screen plate according to claim 1, wherein the screen plate is a screen plate for manufacturing a plasma display member. 4. A screen plate cleaning device comprising a solvent supply device and a solvent suction device. 5. A screen plate cleaning device comprising a solvent supply device, a gas supply device and a solvent suction device. 6. The screen plate cleaning apparatus according to claim 4, wherein the screen plate is a screen plate for manufacturing a plasma display member. 7. A method for manufacturing a plasma display member including a step of screen-printing a paste on a substrate, wherein the screen plate is cleaned by sucking the solvent while supplying the solvent onto the screen plate. A method for manufacturing a plasma display member, comprising: