JP2000266778A - Measuring probe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a probe capable of securing and maintaining smooth slide of a probe body relative to a guide part, such as a shaft member. SOLUTION: This probe 10 has a cylindrical shape opened on the opposite side of a measuring part 14 of a probe body 12, and a guide shaft 22 is inserted into the probe body 12. A compression coil spring 38 is housed inside the probe body 12, and the probe body 12 is energized upward relative to the guide shaft 22 by the compression coil spring 38, to thereby slide the probe body 12 relative to the guide shaft 22. In this case, the opening of the probe body 12 is faced toward the opposite side of the measuring part 14, namely, downward, to prevent a falling refuse from entering.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measurement probe for measuring an object to be measured by pressing it against the object to be measured, and more particularly to a probe for inspecting the continuity of a printed circuit board and the characteristic of a semiconductor device. The present invention relates to a measurement probe.

[0002]

2. Description of the Related Art As a continuity test of a printed board, a pattern (printed wiring) formed on the board or an inner peripheral portion of a through hole formed on the board is formed on the front and back of the board. For so-called through holes that conduct patterns,
A plurality of probes each having a conical tip are brought into contact with each other, a predetermined current or voltage is applied to one of these probes, and a current or voltage is applied to another probe. There is a method of inspecting the continuity of a printed circuit board by measuring.

[0003] Probes used in this type of inspection method are erected in parallel with each other on the inspection device or on the inner bottom of the inspection device by supporting a base end on a mounting portion of the inspection device. By placing the probe so that the substrate is supported at the tip (upper end) of the probe, the tip of each probe comes into contact with a predetermined measurement site on the substrate. Depending on the mounting state of these probes to the device, Have slightly different tip positions. In this case, while the substrate is placed on the probe, a part of the measurement site contacts the tip of the probe,
There is a possibility that a state may occur in which another measurement site does not contact the tip of the probe. Also, the state of the substrate (for example,
A similar problem may also occur when any of the measurement sites is a through-hole or the measurement condition is a through hole.

Until now, in order to solve such a problem, a probe main body having a tip abutting on a measurement site of a substrate and a cylindrical shape opened upward have been provided with the probe main body extending vertically. A probe constituted by a shaft member slidably housed and a compression coil spring disposed inside the shaft member is employed.

In the probe having such a structure, the probe body accommodated in the shaft member is urged upward by a compression coil spring also accommodated in the shaft member, and the probe body is moved toward the tip of the probe body. When the substrate is further pressed downward while the probe is placed, the probe main body descends with respect to the shaft member together with the substrate against the urging force of the compression coil spring. In other words, even if some of the probes are not in contact with the substrate while the substrate is simply placed on the probe, the probe body of the probe that is not contacted by lowering the substrate together with the probe body of the probe in contact with the substrate The probe which has not been in contact with the substrate contacts the substrate by approaching the tip of the substrate. Therefore, by using the above-described probes, all the probes can be brought into contact with the substrate.

[0006]

By the way, in the above-described probe, when the substrate is mounted or the mounted substrate is pressed, the probe adheres to the residue of the synthetic resin material forming the substrate or the substrate. As shown in FIG. 9, there is a possibility that such scum of the solder is scattered and such scum 122 is caught between the shaft member 124 and the probe main body 126. As described above, when the scum 122 is sandwiched between the shaft member 124 and the probe main body 126, the frictional resistance (sliding resistance) between the inner peripheral portion of the shaft member 124 and the outer peripheral portion of the probe main body 126 increases, The smooth sliding of the probe main body 126 with respect to the shaft member 124 is hindered, and further, the initial position of the probe main body 126 with respect to the shaft member 124 due to an increase in frictional resistance (ie, the position of the probe main body 126 with respect to the shaft member 124 in a no-load state). May not return. In such a case, the contact of the probe main body 126 with the substrate becomes extremely unstable, making normal measurement difficult, and the number of times of maintenance or the like for removing such scum increases, thereby hindering the measurement operation. .

Although the above-described probe is sometimes used for measuring and inspecting the output characteristics and the like of a semiconductor device, the same problem may occur when the probe is used for inspecting the characteristics of a semiconductor device. There is.

An object of the present invention is to provide a measuring probe capable of securing and maintaining a smooth sliding of a probe main body with respect to a guide portion such as a shaft member in consideration of the above fact.

[0009]

According to a first aspect of the present invention, there is provided a measuring probe having a bottomed cylindrical shape having one open end in an axial direction and a second end in an axial direction pressed against an object to be measured. A probe body, a guide portion inserted into the opening of the probe body, and supporting the probe body slidably along the axial direction thereof, and the other end side of the probe body with respect to the guide portion in the axial direction. And an urging means for urging the user.

According to the measurement probe having the above-described structure, one end in the axial direction of the probe main body is open, and the probe main body slides along the guide portion inserted relatively to the probe main body, thereby providing the probe main body. Is moved toward and away from the object to be measured. Further, in a state where the measurement target is brought into contact with the measurement unit of the probe main body, a pressing force is applied to one of the shaft member and the measurement target so that one of the measurement targets further approaches the other. When the pressing force exceeds the urging force of the urging means, the probe main body slides along the shaft member in a direction for accommodating the shaft member therein. Therefore, for example, when measuring or inspecting a measurement target using a plurality of main measurement probes simultaneously as the measurement target, even if each measurement site of the measurement target is not on the same plane, or the probe body Even if the position of the measuring part is not at the same position, measurement is performed in the direction in which the measuring object comes closer to the guide part with the measuring object in contact with the measuring part of the probe body of any measuring probe When the object is moved, the probe body that is in contact with the measurement object slides with the measurement object, and the probe body that is not in contact relatively comes closer to and contacts the measurement object. Thus, the measurement sections of the probe bodies of all the probes can be brought into contact with the measurement object, and accurate measurement and inspection can be performed.

In the present measuring probe, the probe main body is opened on the side opposite to the measuring section, and the guide section is relatively inserted from the opening. The opening of the probe body in the opposite direction to the measuring part allows the probe to guide the opening even if foreign matter adhering to the measuring object scatters when the measuring part of the probe body presses against the measuring object. No foreign matter enters through the gap between the part. Therefore, an increase in sliding resistance due to foreign matter entering between the guide portion and the probe main body is prevented, and a smooth sliding movement of the probe main body with respect to the guide portion can be secured and maintained.

According to a second aspect of the present invention, the measurement probe according to the first aspect of the present invention is housed inside the probe main body, and one end of the probe comes into contact with the end of the guide section on the side of the object to be measured. A compression coil spring whose end abuts on the inner bottom of the probe body is used as the urging means.

In the measurement probe having the above-described structure, the probe body is urged toward the object to be measured with respect to the guide portion by the urging force of a compression coil spring housed therein. Here, by accommodating the compression coil spring as the urging means inside the probe main body, interference with the compression coil spring from portions other than the guide portion and the probe main body is prevented.

According to a third aspect of the present invention, in the measurement probe according to the first aspect, the probe is slidably supported by the guide section along the same direction as the probe body slides with respect to the guide section. The end on the measurement object side abuts on the inner bottom of the probe main body, engages with the urging means on the side opposite to the measurement object, and urges the measurement object side by the urging means. It is characterized by having a slide part which is set.

In the measuring probe having the above structure, when the slide portion provided on the guide portion slides toward the object to be measured by the urging force of the urging means, the probe body slides in the sliding direction, ie, the measurement direction. It moves by being pressed against the object and comes into contact with the object to be measured.

As described above, the present measuring probe has a configuration in which the urging force of the urging means is indirectly applied to the probe main body, but the probe main body itself is opened on the side opposite to the measuring section. Since the guide portion is relatively inserted from the portion, foreign matter does not enter through a gap between the guide portion and the opening of the probe main body.

According to a fourth aspect of the present invention, in the measurement probe according to the third aspect, the guide portion is formed in a cylindrical shape opened toward the measurement object, and the slide portion is slidably housed therein. The compression coil spring is housed inside the guide portion, and the end of the object to be measured is engaged with the slide portion to urge the slide portion toward the object to be measured. Means
It is characterized by:

In the measuring probe having the above-described structure, the urging force of the compression coil spring accommodated in the guide portion having a cylindrical probe body acts on the guide portion by the urging force of the compression coil spring. It is urged toward. Here, by accommodating the compression coil spring as the urging means inside the guide portion, interference with the compression coil spring from portions other than the guide portion and the probe body is prevented.

In the present measurement probe, the slide portion has a cylindrical shape with the guide portion opened toward the object to be measured. However, since the guide portion is housed in the probe body, scum enters from the open end of the guide portion. Not even.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS <Configuration of First Embodiment> FIG.
Is a measuring probe 1 according to the first embodiment of the present invention.
1 is shown in an exploded perspective view, and FIG. 1 is a partially cutaway front view of the configuration of the measurement probe 10.

As shown in these figures, the measurement probe 10 has a conductive probe main body 12 formed of metal or the like. The probe main body 12 has a cylindrical shape as a whole, and a measuring unit 14 is provided at one end in the axial direction. The measuring section 14 is generally conical in shape, and the outer diameter dimension at the end on the larger diameter side in the axial direction is substantially equal to the outer diameter dimension of the probe main body 12, and the measuring section 14 is attached to the probe main body 12. In FIG. 2, the probe body 12 is coaxially opposed to one end of the probe body 12 along the axial direction of the probe body 12. As shown in FIG. 3, a male screw portion 16 is formed coaxially from the large-diameter end of the measuring portion 14.
On the other hand, a female screw portion 18 corresponding to the male screw portion 16 of the measuring section 14 is formed on the inner peripheral portion of the probe body 12 at one end in the axial direction. The male screw portion 16 can be screwed into the female screw portion 18. One end of the probe main body 12 in the axial direction is closed by the measuring portion 14 by screwing the male screw portion 16 into the female screw portion 18.

On the other hand, the end (that is, the tip) on the small diameter side of the measuring section 14 is sharp, and as shown in FIG. 1, is pressed against a predetermined measuring portion of the substrate 20 as a measuring object. The female thread portion 18 is connected to a terminal (not shown) of the inspection device via an electrical connection means such as a probe body 12 and a cord having one end fixed to the probe body 12.
Is electrically connected to a plurality of measurement probes 1
When the leading end of each of the zero measuring units 14 comes into contact with the substrate 20, power is supplied through the substrate 20.

As shown in FIGS. 1 and 2, the measuring probe 10 has a guide shaft 22 as a guide. The guide shaft 22 has a cylindrical shaft body 24 whose outer diameter is sufficiently smaller than the inner diameter of the probe body 12. One end in the longitudinal direction of the shaft main body 24 enters the inside of the probe main body 12 through an opening at the other longitudinal end of the probe main body 12. A stopper 26 is formed coaxially with the shaft main body 24 at one longitudinal end of the shaft main body 24. The stopper 26 has a disk shape or a column shape whose outer diameter is slightly smaller (substantially equal) than the inner diameter of the probe body 12, and extends in the longitudinal direction of the probe body 12 along the inner periphery of the probe body 12. Is relatively slidable.

On the other hand, at the other end in the longitudinal direction of the shaft main body 24, a mounting portion 28 having an outer diameter larger than that of the shaft main body 24 is provided.
4 and is formed coaxially with respect to the measuring device 10.
Is held at a predetermined mounting portion of an inspection device such as a socket.

A stopper 30 is formed at the other end of the probe body 12 in the longitudinal direction. Retaining part 30
Has a ring-shaped restricting portion 32 whose outer diameter is equal to the outer diameter of the probe body 12. A through hole 34 is formed at the center of the restricting portion 32 coaxially with the inner peripheral portion of the probe main body 12. The through hole 34 has an inner diameter dimension of the shaft main body 24.
Is slightly larger than the outer diameter of the shaft main body 24, and the other end of the shaft main body 24 penetrates the intermediate portion in the longitudinal direction.

Further, the probe body 12 is
A cylindrical tubular portion 36 is formed toward the outside in the axial direction. The inner diameter of the cylindrical portion 36 is equal to the through hole 34, and the outer peripheral portion of the shaft main body 24 is supported by the through hole 34 and the inner peripheral portion of the cylindrical portion 36 when the shaft main body 24 penetrates the through hole 34. You. The displacement of the guide shaft 22 in the radial direction of the stopper 26 is restricted by the inner peripheral portion of the probe main body 12, and the shaft main body 24 is moved in the radial direction by the inner peripheral portion of the through hole 34 and the cylindrical portion 36. By restricting the displacement of the probe main body 12, the relative movement direction with respect to the probe main body 12 is restricted to the longitudinal direction of the probe main body 12.

Further, a compression coil spring 38 as a biasing means is provided inside the probe main body 12 described above. One end of the compression coil spring 38 is in contact with the end of the male screw portion 16 of the measuring section 14, and the other end is in contact with the end face of the stopper 26 of the guide shaft 22.

<Operation and Effect of First Embodiment> A plurality of main measurement probes 10 having the above-described configuration are set in an inspection apparatus such that the tip of the measurement section 14 faces upward. When the substrate 20 is placed from above, the substrate 20
Is in contact with the tip of the measuring section 14. When the substrate 20 is further pressed downward in this state, the guide shaft 2
The probe body 12 slides coaxially downward with respect to 2 (see FIG. 4). At this time, the compression coil spring 38 accommodated in the probe body 12 is
It is compressed by the pressing force from the end of the male screw part 16 formed in the measuring part 14 integrated with the measuring part 14, and a restoring force for returning to the original position is generated. This restoring force urges the probe main body 12 upward through the end of the male screw portion 16. For this reason, the end of the measurement unit 14 is always in contact with a predetermined measurement site on the substrate 20.

When the position of the tip of the measuring section 14 of each measuring probe 10 is not the same, or when the portion of the substrate 20 where the tip of the measuring section 14 of each measuring probe 10 contacts is not on the same plane. Is simply a measuring probe 10
By simply placing the substrate 20 on the measurement unit 14, the measurement unit 14 of any one of the measurement probes 10 of the measurement probes 10 is in contact with a predetermined measurement site of the substrate 20,
The measurement unit 14 of another measurement probe 10 may not be in contact with the substrate 20. As described above, the substrate 20
Is pressed down, the measurement unit 14 of the measurement probe 10 that has not been in contact with the substrate contacts the substrate 20.

In this manner, one of the plurality of measurement probes 10 is given a predetermined size while the tips of all the measurement units 14 are in contact with the predetermined measurement sites on the substrate 20. By applying a voltage of a predetermined value or passing a current of a predetermined magnitude, the voltage or current is detected by the measuring unit 14 of another measuring probe 10 at this time, and the magnitude is measured. It can be determined whether or not there is a defect in the wiring or the like formed in the above.

Incidentally, the measuring unit 14 described above is
In this case, scraps of a synthetic resin material forming the substrate 20, solder scraps used for electrically connecting wiring, electronic components, and the like may fall. However, in the present measurement probe 10, since the open end of the probe main body 12 is directed downward, the above-mentioned scum does not enter from the open end of the probe main body 12. For this reason, an increase in frictional resistance of the probe main body 12 with respect to the guide shaft 22 caused by the above-mentioned swarf entering between the guide shaft 22 and the probe main body 12 and a corresponding increase in the probe main body 12 with respect to the guide shaft 22 are caused. The operation (slide) failure does not occur, and the probe body 12 can be always smoothly slid with respect to the guide shaft 22. Therefore, in the present measurement probe 10, the pressure contact state between the tip of the measurement unit 14 and the predetermined measurement site of the substrate 20 by the urging force of the compression coil spring 38 can be ensured, and good measurement can be performed.

Since the above-mentioned scum does not enter between the probe body 12 and the guide shaft 22,
The number of replacements and maintenance of the measurement probe 10 can be reduced, and the efficiency of the inspection process of the substrate 20 can be improved.

In the present embodiment, the mounting portion 28 having a larger outer diameter than the shaft main body 24 is provided at the other longitudinal end of the shaft main body 24. However, the mounting portion 28 is not necessarily required. For example, as shown in FIG.
Only the configuration may be adopted, and the shaft main body 24 may be held by the holding unit of the inspection device.

<Structure of the Second Embodiment> Next, another embodiment of the present invention will be described. In the following description, portions that are basically the same as those of the above-described first embodiment and the above-described embodiment will be denoted by the same reference numerals and will not be described. Omitted.

FIG. 6 is a sectional view showing the structure of a measuring probe 50 according to a second embodiment of the present invention. As shown in this figure, the main measurement probe 50 is formed of a conductive material such as a metal, and is electrically connected to a terminal (both not shown) of the inspection apparatus via an electric connection means such as a cord. A probe main body 52 to be connected is provided. Measurement probe 10 of the first embodiment
The probe main body 12 of the measurement probe 50 was used in the
Reference numeral 2 denotes a bottomed cylindrical shape whose one end in the longitudinal direction is closed. The bottom of the probe body 52 is a conical measuring section 54 whose outer diameter gradually decreases toward one end in the longitudinal direction, and the tip is pressed against the substrate 20. This is the same as the measurement unit 14 used for the measurement probe 10 of the first embodiment. Although the other end of the probe main body 52 is an open end, unlike the probe main body 12, the retaining portion 30 is not formed.

Inside the probe main body 52, one longitudinal end of a guide shaft 56 as a guide portion is housed. The guide shaft 56 has a cylindrical shape whose outer diameter is slightly smaller than the inner diameter of the probe main body 52, and is relatively slidable along the inner periphery of the probe main body 52 in the longitudinal direction of the probe main body 52. Have been.

Inside the guide shaft 56, a piston 58 as a slide portion is housed. The piston 58 has a cylindrical piston body 60 whose outer diameter is sufficiently smaller than the inner diameter of the guide shaft 56, and a pressing shaft 62 is provided at one end side in the longitudinal direction. The outer diameter of the pressing shaft 62 is larger than the outer diameter of the piston body 60,
Further, it has a substantially cylindrical shape smaller than the inner diameter of the probe main body 52, is coaxially and integrally connected to the piston main body 60, and is housed inside the probe main body 52.

A substantially conical pressing portion 64 is formed at the tip of the pressing shaft 62 (ie, at the end opposite to the portion connected to the piston body 60). The tip of the pressing portion 64 is in contact with or fixed to a corner portion inside the measuring portion 54.

On the other hand, a stopper 66 is formed at the other end in the longitudinal direction of the piston main body 60 (that is, the end opposite to the portion connected to the pressing shaft 62). Stopper 66
Has a substantially cylindrical shape whose outer diameter is larger than the outer diameter of the piston body 60 and slightly smaller than the inner diameter of the guide shaft 56, and is coaxially and integrally connected to the piston body 60. And the guide shaft 56
Is housed inside. As described above, the stopper 6
Since the outer diameter of the guide shaft 6 is slightly smaller than the inner diameter of the guide shaft 56, it is guided by the inner peripheral portion of the guide shaft 56 in the longitudinal direction of the guide shaft 56 and is slidable.
The displacement in the radial direction is regulated by the inner peripheral portion of the guide shaft 56. A retaining portion 68 is formed at an intermediate portion in the longitudinal direction of the guide shaft 56 corresponding to the stopper 66. At the portion of the guide shaft 56 which is the retaining portion 68, the inner diameter is smaller than the outer diameter of the stopper 66, but is slightly larger than the outer diameter of the piston body 60, although the cross section is coaxial with the other portions. . Further, the formation position of the retaining portion 68 is one end side in the longitudinal direction of the guide shaft 56 with respect to the stopper 66. Therefore, the movement of the stopper 66 toward one end in the longitudinal direction of the guide shaft 56 is performed until the stopper 66 comes into contact with the retaining portion 68. Further, since the inner diameter of the retaining portion 68 is very slightly larger than the outer diameter of the piston body 60, the retaining portion 68 regulates the movement of the piston body 60 in the radial direction.

A compression coil spring 70 as an urging means is housed on the other end side of the guide shaft 56 in the longitudinal direction from the portion where the retaining portion 68 is formed. The form of the compression coil spring 70 in the measurement probe 50 is basically the same as the compression coil spring 38 of the measurement probe 10 according to the first embodiment. An end opposite to the connecting portion is abutted or locked, and the other end is locked or fixed to a predetermined portion in the guide shaft 56.

<Operation and Effect of Second Embodiment> In the main measurement probe 50 having the above-described configuration, the probe main body 5 is provided similarly to the measurement probe 10 according to the first embodiment.
A plurality of the test pieces are set in the inspection apparatus such that the front end of the test piece 2 faces upward. In this state, the substrate 2 is
0 (not shown in FIG. 6), the substrate 20
Is in contact with the tip of the probe main body 52. When the substrate 20 is further pressed downward in this state, it slides coaxially downward along the guide shaft 56, and
The pressing portion 64 of the piston 58 is pressed downward. The piston 58 having received the pressing force from the probe main body 52 presses the compression coil spring 70 with the stopper 66. Accordingly, a restoring force is generated in the contracted compression coil spring 70 to return to the original position, and the stopper 66 is pushed back to urge the probe main body 52 upward through the piston 58. Therefore, the end of the probe main body 52 is always in contact with a predetermined measurement site on the substrate 20.

When the probe body 52 comes into contact with the substrate 20, the residue of the synthetic resin material forming the substrate 20 and the residue of the solder used for electrically connecting the wiring and the electronic components are formed. May fall. However, in the measurement probe 50, since the open end of the probe main body 52 is directed downward, the probe main body 5 is similar to the measurement probe 10 according to the first embodiment.
The above-mentioned scum does not enter from the opening end of No. 2. For this reason, the guide shaft 56 and the probe body 52
The increase in frictional resistance of the probe main body 52 with respect to the guide shaft 56 caused by the above-mentioned scum entering between the above and the malfunction (sliding) of the probe main body 52 with respect to the guide shaft 56 caused by this increase. Instead, the probe main body 52 can be smoothly slid with respect to the guide shaft 56 at all times. Therefore, in the present measurement probe 50, the pressure contact state between the tip of the probe main body 52 and the predetermined measurement site of the substrate 20 due to the urging force of the compression coil spring 70 can be secured, and good measurement can be performed.

Since the above-mentioned scum does not enter between the probe main body 52 and the guide shaft 56,
The number of replacements and maintenance of the measurement probe 50 can be reduced, and the efficiency of the inspection process of the substrate 20 can be improved.

In other words, when the main measurement probe 50 described above is viewed only in terms of the configuration, if the probe main body 52 is not provided and the pressing portion 64 of the pressing shaft 62 is brought into direct contact with the substrate 20. The configuration is basically the same as that of the conventional measurement probe. That is, the main measurement probe 50 is different from the conventional measurement probe in the
2 can be realized, so that a conventional measurement probe can be used.

<Structure of Third Embodiment> Next, a third embodiment of the present invention will be described. FIG. 7 is a partially cutaway front view showing a configuration of a measurement probe 90 according to the third embodiment of the present invention. As shown in this figure, the main measurement probe 90 includes a guide shaft 92 as a guide part instead of the guide shaft 22 of the measurement probe 10 according to the first embodiment. The guide shaft 92 also includes the shaft main body 24 similarly to the guide shaft 22, but the other end of the shaft main body 24 in the longitudinal direction has the mounting portion 2.
8 and a probe body 94 is provided. The probe main body 94 is formed of a conductive member such as a metal and has a cylindrical shape or a cylindrical shape whose outer diameter is substantially the same as the outer diameter of the probe body 12 and is sufficiently larger than the outer diameter of the guide shaft 92. It is formed coaxially and integrally with the guide shaft 92. A measuring section 96 is provided at the other end in the longitudinal direction of the guide shaft 92 (that is, the end opposite to the portion connected to the guide shaft 92). The outer shape of the measuring unit 96 is conical, and is basically the same as the measuring unit 14. The measuring section 96 may be configured to be detachable from the other end of the probe main body 94 by connecting means such as the male screw section 16 and the female screw section 18,
The probe main body 94 and the measuring section 96 may be integrally formed in advance.

<Operation and Effect of Third Embodiment> The main measurement probe 90 having the above-described configuration is designed so that the probe main body 94 is held by the holding section of the inspection apparatus and the measuring section 14 is arranged upward. Has basically the same operation as the first embodiment, and achieves the same effect.

Further, the measuring probe 90 can be used with the probe main body 12 held by the holding section of the inspection apparatus and the measuring section 14 arranged downward, and in this case, the measuring section 96 is moved upward. Turn to. In this state, when the substrate 20 (not shown in FIG. 7) is placed from above the measurement unit 96, a predetermined measurement site of the substrate 20 comes into contact with the tip of the measurement unit 96. When the substrate 20 is further pressed downward in this state, the substrate 20 slides coaxially downward along the probe main body 12 and the retaining portion 30 of the guide shaft 92 presses the through hole 34. Accordingly, a restoring force is generated in the contracted through-hole 34 to return to the original position, and the guide shaft 92 is pushed back to urge the guide shaft 92 upward. Therefore, the measuring unit 9
The end of 6 is always in contact with a predetermined measurement site on the substrate 20. As described above, the present measurement probe 90 can basically be used in the same manner even if the measurement probe 90 is turned upside down.

In the case of the main measuring probe 90, the opening end of the probe main body 12 is directed upward when the measuring section 96 is set in the inspection apparatus with the upward direction.
However, in the measurement probe 90, the outer diameter of the probe body 94 is larger than the outer diameter of the guide shaft 92, and consequently is sufficiently larger than the inner diameter of the through hole 34 and the cylindrical portion 36. Therefore, when the measuring probe 90 is viewed from above with the measuring unit 96 set in the inspection apparatus with the measuring unit 96 facing upward, the through-hole 34 and the cylindrical portion 36 are hidden by the probe main body 94, so that the synthetic resin material falling or Solder residue is cylindrical part 3
The same effect as in the case where the measuring section 14 is directed upward can be obtained without entering between the guide shaft 92 and the guide shaft 92.

Here, in order to have a structure which can be used even when the measuring probe 90 is turned upside down, the first
This can be sufficiently achieved by connecting two ends of the mounting portion 28 on the side opposite to the measuring portion 14 coaxially using two measuring probes 10 according to the embodiment (see FIG. 8). However, in this case, one set (two) of the probe main body 12 and the through hole 34 is required. Moreover, since both probe bodies 12 are configured to slide with respect to the guide shaft 22, the guide shaft 22 needs to have a length that allows both probe bodies 12 to slide. In contrast,
The main measurement probe 90 may include only one set of the probe body 12 and the through hole 34.
When the probe body 6 is used upward, the probe body 12 is held by the holding portion of the inspection apparatus. Therefore, even if the probe body 12 is turned upside down, the relative sliding movement amount of the probe body 12 with respect to the guide shaft 92 is the same. Therefore, in the present measurement probe 90, the dimension of the guide shaft 92 can be reduced as compared with a configuration in which two sets of the measurement probes 10 are simply used. Further, since the size of the guide shaft 92 can be shortened in this way, when the guide shaft 92 is electrically connected to the terminal of the inspection apparatus via an electrical connection means such as a cord, the measuring probe 10 The electrical characteristics are improved and the inspection accuracy (measurement accuracy) is further improved as compared with a configuration in which the guide shaft 22 is electrically connected to a terminal of the inspection apparatus via an electrical connection means.

In each of the above embodiments, the measurement probes 10, 50, and 90 have been described for measuring and inspecting the substrate 20, but for example, a wide range of electrical equipment such as for inspecting characteristics such as output characteristics of a semiconductor device. The above-described measurement probes 10, 50, and 90 may be used for general measurement and inspection.

[0051]

As described above, according to the present invention, it is possible to secure and maintain smooth sliding of the probe main body with respect to the guide portion.

[Brief description of the drawings]

FIG. 1 is a partially broken front view of a measurement probe according to a first embodiment of the present invention.

FIG. 2 is an exploded perspective view of the measurement probe according to the first embodiment of the present invention.

FIG. 3 is an enlarged sectional view of a distal end portion of the measurement probe according to the first embodiment of the present invention.

FIG. 4 is a front view corresponding to FIG. 1, showing a state in which a pressing force has been applied via a measurement object.

FIG. 5 is a partially cutaway front view of a modification of the measurement probe according to the first embodiment of the present invention.

FIG. 6 is a sectional view of a measurement probe according to a second embodiment of the present invention.

FIG. 7 is a partially cutaway front view of a measurement probe according to a third embodiment of the present invention.

FIG. 8 is a front view in which a measurement probe according to the first embodiment of the present invention is directly connected and a measurement probe having a function similar to that of the third embodiment is partially cut away. .

FIG. 9 is an enlarged sectional view of a measuring probe having a conventional structure.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Measurement probe 12 Probe main body 14 Measurement part 20 Substrate (measurement object) 22 Guide shaft (guide part) 38 Compression coil spring (biasing means) 50 Measurement probe 52 Probe main body 54 Measurement part 56 Guide shaft (guide part) 58 piston (sliding part) 70 compression coil spring (biasing means) 90 measuring probe 92 guide shaft (guide part) 94 probe body 96 measuring part

Claims (4)

[Claims] A probe body having a bottomed cylindrical shape with one end in the axial direction being open and a measurement part being pressed against an object to be measured at the other end in the axial direction; and a probe body inserted into the opening of the probe body. A guide portion for slidably supporting the probe body along the axial direction thereof; and a biasing means for biasing the probe body toward the other end in the axial direction with respect to the guide portion. . 2. An end portion of the guide portion, which is housed inside the probe main body, abuts on one end of the guide portion on the measurement object side,
2. The measuring probe according to claim 1, wherein a compression coil spring whose other end is in contact with an inner bottom portion of the probe body is used as the urging means. 3. The probe body is slidably supported in the same direction as the probe body slides with respect to the guide part, and an end of the object to be measured contacts an inner bottom of the probe body. The measurement according to claim 1, further comprising a slide portion that is in contact with, is engaged with the urging means on a side opposite to the object to be measured, and is urged by the urging means toward the object to be measured. For probe. 4. The guide portion is cylindrically opened toward the object to be measured, and the slide portion is slidably housed inside the guide portion, and is accommodated inside the guide portion, and is provided on the side of the object to be measured. The measurement probe according to claim 3, wherein a compression coil spring whose end is engaged with the slide portion and biases the slide portion toward the object to be measured is used as the biasing means. .