JP2000262077A - Oscillatory wave drive - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase the output of a motor and output torque by compounding the flexural oscillation of a disc with the bending oscillation of a center shaft, and forming driving oscillation at an oscillator for driving or an oscillator disc part. SOLUTION: When the columnar part of an oscillator 1 causes bending oscillation in the axial direction by driving a piezoelectric element 5, two waves (the peak of traveling wave is formed in two directions: the same direction as the bending direction of the columnar part and the direction opposed to it, respectively.) are formed. Namely, the resonance frequencies of a disc flexural mode and a columnar part axis bending mode are met each other to form axis bending disc flexure compound mode. Rotation is made around axis at the cycle of AC voltage to which deformation due to the oscillation of the axis bending - disc flexure compound mode is applied. By the neck part 4a of the oscillator 1, the disc part bending oscillation increases on a connection part side with the disc part. As a result, the amplitude of a disc mode also increases, so that the rotational speed of a mobile body 10 also becomes higher.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration wave driving device.

[0002]

2. Description of the Related Art Vibration wave motors as vibration wave driving devices that have been widely used include ring-type and disk-type vibration motors, and rod-type vibration motors such as disclosed in Japanese Patent Application Laid-Open No. 5-207761, for example. The ring type and the rod type are mounted on optical devices and the like. Hereinafter, a rod-type vibration wave motor will be described with reference to FIGS. 7 and 8.

In FIG. 7, reference numeral 101 denotes a vibrating body, and elastic bodies 109 and 110 made of metal or the like, and these elastic bodies 1
And a piezoelectric element group 111 interposed between the piezoelectric elements 09 and 110. The elastic body 109 is screwed onto a large-diameter screw portion 105a of a bolt-shaped support rod 105 serving as a frame member of the motor, and the elastic body 110 is a large-diameter head 105 of the support rod 105.
b and the piezoelectric element group 11
1 is pinched. As shown in detail in FIG. 8, a friction ring 109c is joined to the upper end of the elastic body 109.

[0004] Reference numeral 102 denotes a rotor which is a contact body disposed opposite to an upper end surface of an elastic body 109. A contact spring portion 102a is formed at a lower end portion of the rotor 102, and is provided at a tip end of the contact spring portion 102a. The lower friction surface of the sliding portion 102d is pressed against the friction surface of the friction ring 109c. As shown in FIG. 13, the contact spring portion 102a mainly includes a thin spring portion 102b that bends in the motor radial direction and a spring portion 102c that extends substantially perpendicular to the motor shaft.

[0005] An output gear 104 is fitted and fixed to the rotor 102, and the gear 104 is fitted to an outer ring of a bearing 103. The inner ring of the bearing 103 is fitted and fixed to a motor mounting flange 106,
Reference numeral 06 is fitted and fixed to a portion 105c near the distal end of the support rod 105.

A spring receiver 107 is fitted and fixed to the inner periphery of the rotor 102, and a rotor 102 is provided between an end of the spring receiver 107 on the vibrating body side and an end of the output gear 104.
A pressing spring 108 for pressing the sliding portion 102d of the sliding member 102c against the friction ring 109c is disposed.

In the vibration wave motor as the vibration wave driving device thus configured, when an AC voltage having a phase shifted from each other by 90 degrees is applied to the piezoelectric element group 111, the expansion and contraction of the piezoelectric element group causes the vibrating body 101 to expand and contract. A swinging motion in the direction indicated by the arrow in FIG. 7 and a swinging motion in a direction perpendicular to the paper surface, which is out of phase with the swing motion, occur.

When viewed from the contact surface (the upper surface of the vibrating body 101), this vibration corresponds to one traveling wave. This vibrator 1
When the rotor 102 having the contact spring portion 102a is brought into pressure contact with the elastic member 109, the rotor 102 comes into contact with the elastic body 109 at only one location near the wave front and is driven to rotate in the opposite direction. This output is taken out to the outside by the rotor 102 and the gear 104 fitted on the outer ring of the bearing 103.

In the rod-shaped vibration wave motor, the support rod 10
The flange 106 attached to the front end of the fifth member 5 is also designed as an integral system so that the eigenmode of the vibrating body 101 is such that the vibration amplitude of the flange 106 is very small. Rotor 1
The main ring of No. 02 has a sufficiently large inertial mass and is designed so that vibration is not excited by the vibration of the vibrating body 101.
The contact spring portion 102a of the rotor 102 has a natural frequency sufficiently higher than the driving frequency of the vibrating body, and is designed to follow the vibration.

Also, the friction ring 109c of the vibrating body 101
A friction layer 109c 'having improved abrasion resistance formed by subjecting a surface layer of an aluminum base material (aluminum base) 109c''to alumite treatment is used.
The rotor 102 is formed of a stainless steel having high wear resistance, and is hardened to further improve wear resistance.

[0011]

However, in the vibration wave motor as the vibration wave driving device described above, since only the bending vibration mode of the central axis of the vibration body is used, the vibration part 102d of the rotor 102 and the vibration body 102d are not used. It was not possible to increase the diameter of the frictional contact, and it was not possible to generate a large torque.

This will be described with reference to FIG. FIG.
(A) and (b) show, as a schematic cross-sectional view, the vibration of the vibrating body using only the bending vibration mode of the central axis of the vibrating body. The solid line indicates a state without vibration, and the dotted line indicates deformation due to vibration.

(A) is a columnar vibrator, and the outer peripheral portion of the upper end surface, which is a friction drive unit, is displaced in a direction close to the circumferential direction around a point O, which is a node of vibration, so that The displacement is as shown by the arrow.

On the other hand, (b) shows a disk whose upper end is larger in diameter than the vibrator shown in (a) for the purpose of obtaining a large torque by increasing the distance between the friction drive unit and the central axis. In the same manner as in the case of (a), the outer peripheral portion of the upper end surface serving as the friction drive portion is displaced in a direction close to the circumferential direction around the point O ′ which is a node of vibration. However, since the position of the outer peripheral portion of the upper end surface is located at a position radially closer to the point O ′, the vibration displacement of the outer peripheral portion of the upper end surface that is the frictional contact portion is, as shown by the arrow in the figure, The displacement in the r direction is extremely small.

The rotational speed of the vibration wave motor using only the bending vibration mode of the central axis of the vibrating body is proportional to the r-direction displacement of the friction contact portion and inversely proportional to the diameter of the friction contact portion. Therefore, the vibration wave motor using the vibrator shown in FIG. 9B cannot obtain a sufficient rotation speed.

As described above, in the vibration wave motor using only the bending vibration mode of the center axis of the vibrating body, it is difficult to obtain a large torque because the diameter of the friction contact portion of the vibrating body cannot be increased.

Although it is possible to obtain a large torque by increasing the pressing force between the vibrating body and the moving body, there is a problem that the life of the motor is shortened due to the increased wear of the frictional contact portion. .

An object of the present invention is to provide a vibration wave driving device capable of increasing the output and the output torque of a motor.

[0019]

According to a first aspect of the present invention, a driving vibration is formed by applying an alternating signal to a driving electro-mechanical energy conversion element. In a vibration wave driving device having a vibrating body, the vibrating body is a vibrating vibrating part in which a traveling wave for vibrating is formed by the electro-mechanical energy conversion element,
The driving vibrating part, which is excited by the vibration of the vibrating vibrating part to form a driving traveling wave, is integrally formed.

According to a second configuration for realizing the object of the invention according to the present application, a vibrating body in which a driving vibration is formed by applying an alternating signal to a driving electro-mechanical energy conversion element; Having a vibrating body and a contact body that makes pressure contact,
In the vibration wave driving device in which the vibrating body and the contact body relatively move, the vibrating body includes a vibrating vibrating body portion in which a traveling wave for generating vibration is formed by the electro-mechanical energy conversion element; The driving vibrator portion, which is excited by the vibration of the vibrating vibrator portion to form a driving traveling wave, is integrally formed.

According to a third configuration for realizing the object of the invention according to the present application, in the first or second configuration, the vibrating vibrating portion of the vibrating body is formed in a column shape, and the driving vibrating body is formed. The portion is formed in a disk shape, and is formed integrally with the axis center of the vibrating vibrator section substantially coincident with the axis center of the vibrating vibrator section.

According to a fourth configuration for realizing the object of the invention according to the present application, in the first, second, or third configuration, the vibrating body of the vibrating body includes the electromechanical energy converter. A traveling wave for excitation is formed by the synthesis of bending vibration by the element, and the driving vibrator portion is driven by the bending wave in the plane direction of the driving vibrator portion by the traveling wave for excitation. Is formed.

According to a fifth configuration for realizing the object of the invention according to the present application, in the first, second, third or fourth configuration, the vibrating vibrating body portion of the vibrating body includes a vibration displacement. It has a notch for enlargement.

According to a sixth configuration for realizing the object of the invention according to the present application, in any one of the above-described configurations, the vibrating body may include:
The driving surface of the driving vibrator on which the driving traveling wave is formed is a convex portion.

A seventh configuration for realizing the object of the invention according to the present application is the above-described second, third, fourth, fifth or sixth configuration, wherein the contact body is a moving body and is driven to rotate. It has a rotation output member to which the rotational force of the contact body is transmitted to take out the output.

An eighth configuration for realizing the object of the invention according to the present application is a vibrating body that forms vibration for driving on a driving surface by applying an alternating signal to a driving electro-mechanical energy conversion element. And a contact body that comes into contact with a drive surface of the vibrating body via a pressing unit, wherein the vibrating body and the contact body relatively move by friction drive. A vibrating body column that generates bending vibration with respect to a central axis by driving the electro-mechanical energy conversion element, and a vibrating body disk part that generates bending vibration of a disk orthogonal to the central axis of the vibrating body columnar part By generating a coupled vibration of a flexural vibration mode of the vibrating body disk portion and a bending vibration mode of a central axis of the vibrating body columnar portion, vibration for driving the frictional contact portion of the vibrating body is generated. Cause it to occur.

According to a ninth configuration for realizing the object of the invention according to the present application, in the eighth configuration, the vibrating body columnar portion that generates the bending vibration mode of the central axis is cut in a plane perpendicular to the central axis. It has a constricted part whose area is smaller than other parts.

The tenth embodiment for realizing the object of the invention according to the present application
In the eighth or ninth configuration, the vibrator disk portion that generates the bending vibration mode of the disk is provided with a frictional contact portion having a convex shape as viewed from a radial direction in which the vibrator disk portion comes into pressure contact with the contact body. It has.

An eleventh embodiment for achieving the object of the invention according to the present application
In the above-described eighth, ninth, or tenth configuration, the vibrating body may be provided with the vibrating body disk portion at a position symmetrical with respect to an axial direction of the vibrating body columnar portion. The contact bodies are arranged corresponding to the frictional contact portions of the disk portion.

A twelfth embodiment for realizing the object of the invention according to the present application
Is a rotary output member according to the eighth, ninth, tenth, or eleventh configuration, wherein the contact body is a moving body, and a rotational force of the rotationally driven contact body is transmitted to take out an output. Things.

A thirteenth embodiment for realizing the object of the invention according to the present application
In the eleventh configuration, in the eleventh configuration, a plurality of sets of the vibrators are arranged along the axial direction, and an output of each contact body corresponding to each of the plurality of sets of vibrators is extracted.

A fourteenth embodiment for realizing the object of the invention according to the present application
Is a configuration in which the driven body is driven by using the driving force of the vibrator in the first, third, fourth, or fifth configuration.

A fifteenth embodiment for realizing the object of the invention according to the present application
According to the configuration, in any one of the second to thirteenth configurations, the driven body is driven using the driving force of the contact body.

[0034]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) FIGS. 1, 2, 3, 10, and 11 show a first embodiment of the present invention.

FIG. 1 is a cross-sectional view of a vibration wave motor that best illustrates the features of the present invention. In FIG. 1, reference numeral 1 denotes a vibrating body, and an elastic body 4 having a constricted portion 4a formed of metal or the like.
A power supply member 6 formed of a flexible substrate or the like for applying an AC voltage to the piezoelectric element 5 and the piezoelectric element 5 is sandwiched between the piezoelectric element 5 and the pressing body 7. The disk 3 formed of an elastic body such as a metal is sandwiched between them so as to have a flat surface along a direction orthogonal to the axial direction, and the nut 9 outside the pressing body 7 is screwed to the screw portion 8b of the support body 8.
Is screwed between the nut 9 screwed to the flange portion 8a of the bolt-shaped support 8 and the screw portion 8b of the support 8. . Therefore, the vibrating body 1 of the present embodiment has a substantially T-shaped vertical section shown in FIG.

A friction contact member 2 having a shape shown in FIG. 2 is attached to one surface of the disk 3 by a bonding method such as bonding.
The friction contact member 2 has convex portions arranged at a constant pitch in a circumferential shape, and is formed by processing a material such as SUS by means such as press molding. In addition, this friction contact member 2 is
And may be formed integrally.

Reference numeral 10 denotes a moving body as a contact body having a structure in which a sliding member 10b made of, for example, alumina for wear resistance is joined to the main ring 10a by bonding or the like, and is rotatably supported by a flange 11 in a rotatable manner. The movable body 10 is moved by the pressure spring 13 provided between the gear 12 and the movable body 10.
Is in pressure contact with the frictional contact member 2 of FIG.

Since the friction contact member 2 has a spring property in the axial direction, the contact with the moving body is uniform. The flange 11 is fixed to the vibrating body 1 by being sandwiched between an upper nut 14 screwed to an upper thread portion 8c of the support 8 and a circumferential projection 8d of the support 8, and the vibration wave The flange 11 is fixed when it is mounted in a device driven by a motor.

The gear 12 is engaged with the moving body 10 in the circumferential direction by an engaging portion 12a, so that the moving body 10 and the gear 12 can rotate integrally.

The operation of the vibration wave motor configured as described above and the configuration of the piezoelectric element 5 will be described below.

A driving circuit (not shown) supplies a frequency to the piezoelectric element 5 via the power supply member 6 at a frequency close to the natural frequency of an axial bending-disk deflection coupled mode of a vibrating body described later and a temporal phase difference of 90. ° two-phase AC voltage is applied.

As shown in FIG. 10, the piezoelectric element 5 is polarized in the thickness direction. In the figure, the polarization directions of the regions A- and B- are opposite to those of the regions A + and B +. I have. A surface of the piezoelectric element 5 in contact with the power supply member 6 has A
Each of the four regions of + .A-.B + .B- is provided with an electrode for each region by vapor deposition or printing, and an AC voltage is applied through the power supply member 6.

A common electrode common to all regions is provided on the surface of the piezoelectric element 5 opposite to the surface in contact with the power supply member 6, and is provided via the elastic body 4, the disc 3, the support 8, and the flange 11. To the ground potential.

Of the two-phase AC voltages applied to the piezoelectric element 5 via the power supply member 6, one phase is applied to the area-specific electrodes corresponding to A + and A-, and the axial expansion and contraction movement of the A + area is performed. , Which causes the A-region to expand and contract in the axial direction, which has a phase opposite to that.

Another phase whose temporal phase differs by 90 ° is applied to the region-specific electrode corresponding to B + · B−, and the B + region has an axis whose temporal phase differs by 90 ° from that generated in the A + region. An axial stretching motion occurs in the B- region, and an axial stretching motion occurs in the B- region in a phase opposite to that in the B + region.

The cycle of these expansion and contraction movements is equal to the cycle of the applied AC voltage. Eventually, the side opposite to the portion of the piezoelectric element 5 which contracts in the axial direction always expands. Will rotate.

Due to the above-described expansion and contraction movement of the piezoelectric element 5, as shown in FIGS. Vibration of bending (hereinafter referred to as coupled bending-disk bending mode)
Is excited.

FIG. 11 is a view corresponding to FIG. 9B showing a conventional example, and is a cross-sectional view including a central axis, and a dotted line indicates deformation due to vibration.

In FIG. 3, the part shown by the solid line is the vibrating body 1
The deformation of the disk 3 is expressed only by the deformation of the neutral surface, and the portion indicated by the dashed line indicates the deformation of the portion of the vibrating body 1 other than the disk 3 (hereinafter, the cylindrical portion) only by the deformation of the neutral shaft. The bending vibration at the central column is a two-node vibration, and the vibration at the disk 3 is a bending vibration of a disk having one node diameter and two node circles.

In this embodiment, the configuration for generating such a vibration mode in the disk 3 is such that the node diameter of the vibration of the disk 3 is one (the straight line 1 in FIG. 3), and The resonance frequency of the disk bending mode with two nodal circles (the circle shown by the dotted line and the outermost circle of the solid line in FIG. 3) is approximately equal to the resonance frequency of the vibration of the columnar portion and the two axial bending modes. This is achieved by letting them do so. That is, when the columnar portion of the vibrating body 1 is bent and vibrated in the axial direction by the driving of the piezoelectric element 5, two waves are generated around the axis of the disk 3 of the vibrating body 1 (the same direction as the bending direction of the cylindrical portion; (A peak of a traveling wave is formed in each of two directions opposite to the above).

Usually, the resonance frequency of the disk bending mode is
The larger the nodal diameter and the nodal circle, the higher, and the higher the plate thickness and the Young's modulus of the material, the higher.

Since the shape of the disk 3 of the vibrating body 1 of the present embodiment is not simple, it is difficult to analytically determine the resonance frequency of the disk bending mode. By the calculation, the resonance frequency of the above-described disk bending mode and the resonance frequency of the axial bending mode of the cylindrical portion are made to match each other. As a result, the vibrating body 1 sets the axial bending-disk bending coupled mode in which the two modes are coupled. Will have.

Since the deformation of the expansion / contraction movement of the piezoelectric element 5 rotates around the axis, the deformation due to the vibration of the shaft bending-disk deflection coupling mode shown in FIG. Rotate.

The number of node diameters of the vibration is desirably one, but is not limited to this, and the number of nodes / antinodes / node circles is not limited to the above.

When the vibration is observed only at the position of the circle S in FIG. 3 which is the antinode of the vibration in the disk bending mode, it becomes a single bending traveling wave traveling in the circumferential direction. The amplitude in the axial direction of this flexural vibration is a, the angular velocity is ω ₀ , and the circle S
Assuming that the upper circumferential coordinate is θ, the axial displacement Z on the circle S at the neutral plane of the disk flexural vibration is expressed by the following traveling wave equation.

Z = asin (θ−ω ₀ t) Now, the position of a certain mass on the surface of the disk located on the circle S is represented by P
Assuming that the position in the undeflected state is P ₀ , the axial displacement Z _P from P ₀ to P is Z _P = asin (θ−) where 角 is the deflection angle and T is the thickness of the disk. ω ₀ t) − (T / 2) (1-co
sψ), but since ψ is a very small value, it can be approximated to Z _P ≒ asin (θ−ω ₀ t). Also, a displacement x in the circumferential direction from P ₀ to P
_{P is, x P = - (T /} 2) sinψ ≒ - a (T / 2) ψ. Assuming that the radius of the circle S is r, x = θr, and the deflection angle ψ is given by the following equation.

Ψ = dZ / dx = (d / dx) asin
(X / r−ω ₀ t) = (a / r) cos (θ−ω ₀ t) Therefore, the displacement x _{P in the} circumferential direction is expressed as x _P ≒ − (aT / 2r) cos (θ−ω ₀ t). It can be understood that the displacement can be approximated and the displacement in the direction in which the rotor is sent is obtained. The relational expression between the axial displacement Z _P and the circumferential displacement x _P is (Z _P / a) ² + (x _P / (aT / 2r)) ² = 1, and the disk surface located on the circle S Draws an elliptical trajectory.

The velocity v of the circumferential displacement x _P is as follows: v = dx _P / dt = − (ω ₀ aT / 2r) sin (θ−ω ₀ t) On the disk surface located on the vertex m of the deflection in FIG. 3, the velocity v becomes maximum and is expressed by the following equation.

V _max = −ω ₀ aT / 2r Note that the velocity is in the direction opposite to the traveling wave.

On the other hand, the friction contact member 2 in contact with the moving body 10
Is provided so as to coincide with the circle S in FIG. 3, and the distance from the neutral surface to the surface of the disk becomes larger by the axial thickness of the friction contact member 2.

Accordingly, the elliptical motion at the apex of the friction contact member 2 is represented by a circular plate on the circle S when the thickness of the disk is T + 2T ', where T' is the axial thickness of the friction contact member 2. Elliptic motion similar to the surface. Thus the maximum velocity V at the apex of the friction contact member 2 _'max is _{V' max = - (ω 0} a (T + 2T ')) / 2r ···· (1) , and the moving body 10 to be contacted pressurization, By contacting the top of the traveling wave having this speed, the traveling wave rotates in the direction opposite to the direction of the traveling wave.

As described above, the provision of the frictional contact member having a convex shape as viewed from the radial direction increases the rotational speed of the moving body 10.

The constricted portion 4a of the vibrating body 1 corresponds to the position indicated by n in FIG. 3, but as shown in the figure, the bending vibration of the cylindrical portion (central axis) is caused by the constricted portion 4a. It is enlarged at the joint part side with the part. Therefore,
Since the amplitude of the coupled disk mode also increases, the value of equation (1) also increases, and the rotational speed of the moving body 10 increases.

The rotational force of the moving body 2 rotating as described above is transmitted to the gear 12 via the gear engaging portion 12a and output to the outside. In the vibration wave motor of the present embodiment described above, it is possible to obtain approximately twice the output and the output torque of the conventional vibration wave motor.

(Second Embodiment) FIG. 4 is a sectional view of a vibration wave motor according to a second embodiment.

In the present embodiment, the same three sets of vibrating bodies and the same four moving bodies are alternately stacked on the same axis, and the output shaft 29 in which the four moving bodies are connected rotates. , And output.

Reference numeral 15 denotes a vibrating body. Members 2 to 6 constituting the vibrating body 1 are the same as those in the first embodiment and have the same functions, but the friction contact member 2, the disk 3, Two elastic members 4 are arranged vertically symmetrically in the same vibrating body, and are sandwiched together with the power supply member 6, the piezoelectric element 5, and the support member 16 by the hollow bolt 17 and the nut 18 screwed to the hollow bolt 17. It has a structure.

In this way, in FIG. 4, the disk portion is provided on both the upper side and the lower side of the columnar portion, and an AC voltage is applied to the piezoelectric element 5 as in the first embodiment. The bending vibration of the columnar portion and the bending vibration of both disk portions occur in the same manner as in the first embodiment, but these vibration displacements are almost vertically symmetrical in the direction and magnitude within the vibrating body.

Therefore, the moving body 19 which comes into pressure contact with the upper and lower ends of the vibrating body 15 receives the same magnitude of force in the same rotational direction from the friction contact members 2 at the upper and lower ends of the vibrating body 15 and rotates at the same rotational speed. I do.

Further, since the same AC voltage is applied to the piezoelectric elements 5 of the three sets of vibrators, the four moving bodies 19 which come into pressure contact with these vibrators have the same size in the same rotational direction. Under the force, they rotate at the same rotation speed.

The four moving bodies 19 are fixed to the output shaft 29 in the circumferential direction and are restrained to be free in the axial direction by engaging with the moving body fixing member 20 joined to the output shaft 29. The four moving objects 19
Is transmitted to the output shaft 29 and output to a load outside the case 21.

The pressing spring 24 provided between the thrust bearing 22 fixed to the case 21 and the pressing spring pedestal 23
Is a pressure spring base 23, a rubber ring 26, a felt 27 between a pressure receiving plate 25 joined to the output shaft 14.
, And presses the three sets of vibrating bodies and the four moving bodies to generate a frictional force between the moving body 19 and the friction contact member 2.

The support member 16 is a thin plate such as a phosphor bronze plate as shown in the plan view of FIG. 5, and three leg portions 16a are sandwiched by the case joint portion 28, and the center portion 16b Is held in the vibrating body 15, thereby supporting and fixing the vibrating body 1 without obstructing the vibration of the vibrating body 1 and the pressing force of the moving body and the vibrating body.

The vibration wave motor of the second embodiment described above can obtain an output and an output torque about ten times that of the conventional vibration wave motor.

In the second embodiment, one motor is used by using three sets of vibrating bodies and four moving bodies. However, the number of vibrating bodies and moving bodies may be reduced according to the required output. Other numbers may be used. (Third Embodiment) FIG. 6 shows a third embodiment.

FIG. 6 shows a film feeder for a camera using a vibration wave motor as a driving source as a vibration wave driving device according to a second embodiment. In this figure, M is the above-mentioned vibration wave motor, which is accommodated in a take-up spool 55. Reference numeral 51 denotes a bottom plate attached to a camera body (not shown); 52, a sun gear meshing with an outer peripheral gear portion of a gear 71 fixed to an output shaft of the vibration wave motor M; 53, a planetary gear meshing with the sun gear 52; is there. These gears 52,
Reference numeral 53 denotes a planetary clutch, which selectively meshes with the two-stage gears 54 (54a) and 56 (56a) according to the rotation direction of the vibration wave motor M.

The two-stage gear 54 (54b) is always meshed with a gear 55a formed on the take-up spool 55,
The two-stage gear 56 (56b) is always meshed with the worm gear 57. The worm gear 57 is connected to a worm gear 59 via a transmission shaft 58, and the worm gear 59 meshes with a fork gear 61 formed integrally with the fork 62.

Reference numeral 70 denotes a fixing member fixed to the bottom plate 51, and supports the motor M and the gears 52, 56, 54.

In the film feeding apparatus having such a configuration, when the motor M rotates in the winding direction (the direction opposite to the direction of the arrow in the figure), the planetary gear 53 moves to the position shown by the chain line 53a in the figure. The motor rotational force is transmitted to the winding spool 55 via the two-stage gear 54. As a result, the film in the film cartridge (not shown) filled in the camera can be wound up by the winding spool 55 by engaging the spool in the cartridge with the fork 62.

On the other hand, when the motor M rotates in the rewinding direction (the direction of the arrow in the figure), the planetary gear 53 moves to the position shown by the solid line in the figure, and the motor rotating force is transmitted to the two-stage gear 56, the worm gear 57, and the transmission gear. The power is transmitted to the fork 62 via the shaft 58, the worm gear 59 and the fork gear 61. As a result, the spool in the cartridge engaged with the fork 62 can be rotationally driven to rewind the film on the film cartridge.

In the above-described film feeder, the vibration wave motor of the second embodiment is used. However, the vibration wave motor of the first embodiment may be used.
1 uses the gear 12 in the vibrating body of the first embodiment.

By using the vibration wave motor described in the first or second embodiment for such a film feeding device, a film feeding device having a strong film winding and rewinding force can be realized. .

In each of the above embodiments, the vibrating body is fixed and the moving body is moved.
The vibration wave driving device of the present invention is not limited to this. The vibrating body may be brought into pressure contact with a fixed rail, and the moving body may be moved along the fixed rail. Alternatively, a paper, card, or the like may be placed, and the paper, card, or the like may be transported.

[0084]

As described above, according to the invention of the present application, bending vibration is applied to the vibrating vibrating part or vibrating body columnar part constituting the vibrating body by the electro-mechanical energy conversion element such as the piezoelectric element. With the traveling wave formed by the combination of the above, a traveling wave of bending displacement is formed on the driving vibrating body portion or the vibrating body disk portion having the driving surface, that is, bending vibration of the disk is caused by bending vibration of the central axis. And the driving vibration is formed on the driving vibrating body portion or the vibrating disk portion, so that the diameter of the driving vibrating portion or the driving portion of the vibrating body disk portion can be increased, As a result, a large output and a large torque can be obtained.

Further, in the present invention, the diameter of the electromechanical energy conversion element can be made smaller than the diameter of the driving portion of the driving vibrating body portion or the vibrating body disk portion. The vibration wave driving device can be obtained.

Further, by providing a cutout portion in the vibrating vibrating body portion or the vibrating body columnar portion that generates bending vibration of the center axis of the vibrating body, the amplitude of the bending vibration of the center axis of the vibrating body can be increased. As a result, a higher moving body rotation speed can be obtained.

Further, since the convex portion which comes into contact with the contact body under pressure is provided on the driving vibrating body portion or the disk portion of the vibrating body, for example, the driving vibrating body portion or the disk portion of the vibrating body is flexibly vibrated. The resulting circumferential displacement is enlarged, so that a higher rotational speed can be obtained.

Further, for example, disk portions are connected to both sides in the axial direction of the vibrating body, and the shape and the vibration mode of the vibrating body are symmetrical with respect to a plane bisecting the columnar part. Therefore, since a contact body is provided corresponding to each disk portion, a larger output and torque can be obtained. Furthermore, a larger output and torque can be obtained by preparing a plurality of sets of the vibrating bodies and preparing the contact bodies correspondingly.

Further, conventionally, when a large torque is obtained by increasing the pressing force between the vibrating body and the contact body (moving body), the life has been shortened due to wear of the friction contact member, but this is not the case.

By driving the driven body with such a motor, a high-performance vibration wave driving device can be obtained.

[Brief description of the drawings]

FIG. 1 is a sectional view of a vibration wave motor according to a first embodiment of the present invention.

FIG. 2 is a perspective view of the friction contact member of FIG.

FIG. 3 is a view for explaining a shaft bending-disk deflection coupled mode of the vibration wave motor of FIG. 1;

FIG. 4 is a sectional view of a vibration wave motor according to a second embodiment of the present invention.

FIG. 5 is a plan view of the support member of FIG. 3;

FIG. 6 is a perspective view of a camera feeding device according to a third embodiment of the present invention.

FIG. 7 is a sectional view of a conventional vibration wave motor.

FIG. 8 is an enlarged sectional view of the friction contact portion of FIG. 7;

FIGS. 9A and 9B are diagrams showing a vibration state of the motor of FIG. 7;

FIG. 10 is a perspective view of the piezoelectric element of FIG. 1;

FIG. 11 is a diagram showing a vibration state of a vibration body of the vibration wave motor of FIG. 1;

[Explanation of symbols]

 1, 15 Vibration body 2 Friction contact member 3 Disk 4 Elastic body 5 Piezoelectric element 6 Power supply member 7 Holding body 8 Support 9, 18 Nut 10, 19 Moving body 11 Flange 12 Gear 13, 24 Pressure spring 14 Upper nut 16 Supporting member 17 Hollow bolt 20 Moving body fixing member 21 Case 22 Thrust bearing

 ──────────────────────────────────────────────────続 き Continued on the front page F-term (reference)

Claims (15)

[Claims] 1. A vibration wave driving device having a vibrating body in which driving vibration is formed by applying an alternating signal to a driving electro-mechanical energy conversion element, wherein the vibrating body includes the electro-mechanical energy converting element. A vibrating vibrator for generating a traveling wave for excitation by the energy conversion element, and a driving vibrator for generating a traveling wave for driving excited by the vibration of the vibrating vibrator. A vibration wave driving device which is formed integrally. 2. A vibrator in which vibration for driving is formed by applying an alternating signal to an electro-mechanical energy conversion element for driving, and a contact body in pressurized contact with the vibrator, In the vibration wave driving device in which the vibrating body and the contact body relatively move, the vibrating body includes a vibrating vibrating body portion in which a traveling wave for vibrating is formed by the electro-mechanical energy conversion element; A vibration wave driving device, wherein a driving vibrator portion, which is excited by the vibration of the vibrating vibrator portion to form a driving traveling wave, is integrally formed. 3. The vibrating body for vibration of the vibrating body is formed in a column shape, the vibrating body for driving is formed in a disk shape, and the center of the axis of the vibrating body for vibration and the driving vibration are formed. The vibration wave driving device according to claim 1, wherein the vibration wave driving device is formed integrally with the body portion so as to substantially coincide with an axis center thereof. 4. A traveling wave for vibration is formed in the vibration body for vibration of the vibrating body by synthesizing bending vibration by the electro-mechanical energy conversion element, and in the vibration body for driving, The vibration wave driving device according to claim 1, 2 or 3, wherein the driving vibration wave forms a driving traveling wave due to a bending displacement in a planar direction of the driving vibrator portion. 5. The vibration wave driving device according to claim 1, wherein the vibrating vibrator portion of the vibrator has a cutout portion for expanding vibration displacement. 6. The vibrating body according to claim 1, wherein the driving surface of the driving vibrating body on which a driving traveling wave is formed is a convex portion. Vibration wave driving device. 7. A rotary output member, wherein the contact body is a moving body, and a rotary output member is provided for transmitting the rotational force of the rotationally driven contact body and taking out an output.
7. The vibration wave driving device according to 5 or 6. 8. A vibrating body for generating vibration for driving on a driving surface by applying an alternating signal to a driving electro-mechanical energy conversion element, and a driving means for driving the vibrating body via a pressing means. A vibrating wave drive device, wherein the vibrating body and the contact body relatively move by friction drive, wherein the vibrating body is moved with respect to a central axis by driving the electro-mechanical energy conversion element. A vibrating body columnar portion that generates bending vibrations, and a vibrating body disk portion that generates flexural vibration of a disk orthogonal to a central axis of the vibrating body columnar portion. And a vibration for driving a friction contact portion of the vibrating body by generating a coupled vibration of a bending vibration mode of a central axis of the vibrating body columnar portion. 9. The vibrating body columnar portion that generates the bending vibration mode of the central axis has a constricted portion having a smaller sectional area on a plane perpendicular to the central axis than other portions. The vibration wave driving device as described in the above. 10. The vibrating body disk portion for generating a flexural vibration mode of a disk has a frictional contact portion having a convex shape as viewed from a radial direction in which the vibrating body makes pressure contact with the contact body. 10. The vibration wave driving device according to 8 or 9. 11. The vibrating body is provided with the vibrating body disk portions at positions symmetrical with respect to an axial direction of the vibrating body columnar portion, and the vibrating body corresponds to a friction contact portion of each vibrating body disk portion. The vibration wave driving device according to claim 8, 9 or 10, wherein the contact bodies are arranged respectively. 12. A rotary output member, wherein the contact body is a moving body, and a rotary output member is provided for transmitting a rotational force of the rotationally driven contact body to take out an output.
12. The vibration wave driving device according to 0 or 11. 13. The apparatus according to claim 11, wherein a plurality of sets of said vibrators are arranged along an axial direction, and an output of each said contact body corresponding to each of said plurality of sets of vibrators is taken out. Vibration wave driving device. 14. The vibration wave driving device according to claim 1, wherein the driven body is driven by using the driving force of the vibrating body. 15. The vibration wave driving device according to claim 2, wherein the driven body is driven using the driving force of the contact body.